Laser device and method for manufacturing display device using the same

Abstract

Disclosed are a laser device and a method for manufacturing a display device using the laser device. The laser device includes: a chamber having a space inside; a first laser generator and a second laser generator, which respectively generate a first laser beam and a second laser beam; a first workbench and a second workbench, which are arranged on the travel paths of the first laser beam and the second laser beam; a connecting pipe, which is arranged outside the chamber and connected to the chamber and extends in a first direction; a first dust collecting pipe, which is connected to the connecting pipe and formed with a first valve structure; a second dust collecting pipe, which is connected to the connecting pipe and formed with a second valve structure; a first dust collector, which is connected to the first dust collecting pipe; and a second dust collector, which is connected to the second dust collecting pipe.

Description

Technical Field

[0001] The present invention relates to a laser device and a method for manufacturing a display device using the laser device. More specifically, the present invention relates to a laser device including a dust collector and a method for manufacturing a display device using the laser device. Background Art

[0002] Substrates (eg, PI films) used to manufacture display devices are difficult to handle. Therefore, it is necessary to separate the PI film from the carrier glass after laminating various elements or thin films on the PI film while the PI film is fixed to the carrier glass.

[0003] The common laser process is a process of separating a thin film formed on a substrate using an excimer laser beam. By performing this process, the PI film can be separated from the carrier glass when manufacturing a display device. In addition, the substrate can be cut into a unit shape by the laser process.

[0004] On the other hand, during the laser process, a large amount of fume may be generated as a byproduct due to the chemical reaction between the heat caused by the laser beam and the substrate during the irradiation of the excimer laser beam for separating the film or element. The fume may fly to the upper part of the substrate and adhere to the laser device. In addition, it may be fixed to the workbench that is supporting the substrate, thereby contaminating the inside of the chamber. Therefore, it is necessary to effectively remove the fume by a dust collector. Summary of the invention

[0005] In view of the above points, an object of the present invention is to provide a laser device including a dust collector.

[0006] However, the problems to be solved by the present invention are not limited to the above-mentioned problems, and various extensions can be made without departing from the scope of the idea and field of the present invention.

[0007] A laser device according to an embodiment for achieving the above-mentioned purpose of the present invention may include: a chamber having a space inside; a first laser generator and a second laser generator, which respectively generate a first laser beam and a second laser beam; a first workbench and a second workbench, which are arranged on the travel paths of the first laser beam and the second laser beam; a connecting pipe, which is arranged outside the chamber, connected to the chamber, and extends in a first direction; a first dust collecting pipe, which is connected to the connecting pipe and forms a first valve structure; a second dust collecting pipe, which is connected to the connecting pipe and forms a second valve structure; a first dust collector, which is connected to the first dust collecting pipe; and a second dust collector, which is connected to the second dust collecting pipe.

[0008] In one embodiment, it may be that when laser cutting is being performed using at least one of the first laser generator and the second laser generator, at least one of the first dust collector and the second dust collector is collecting dust.

[0009] In one embodiment, the first valve structure and the second valve structure may be opened when the first dust collector and the second dust collector are collecting dust, and the first valve structure and the second valve structure may be closed when the first dust collector and the second dust collector are not collecting dust.

[0010] In one embodiment, the first valve structure may include: a fixed shaft, which is inside the first dust collecting pipe, extends in a second direction perpendicular to the first direction, and is fixed to the first dust collecting pipe; and a first valve, which is rotatably coupled to the first part of the fixed shaft and extends in a third direction perpendicular to the first direction and the second direction.

[0011] In one embodiment, the first valve structure may further include: a second valve rotatably coupled to a second portion of the fixed shaft opposite to the first portion and extending in a fourth direction opposite to the third direction.

[0012] In one embodiment, the second valve structure may include: a fixed shaft extending in a second direction perpendicular to the first direction and fixed to the second dust collecting pipe; and a first valve rotatably coupled to a first portion of the fixed shaft and extending in a third direction perpendicular to the first direction and the second direction.

[0013] In one embodiment, the second valve structure may further include: a second valve rotatably coupled to a second portion of the fixed shaft opposite to the first portion and extending in a fourth direction opposite to the third direction.

[0014] In one embodiment, the first valve structure and the second valve structure may include one selected from the group consisting of copper, aluminum, steel, and stainless steel.

[0015] In one embodiment, a guide structure extending in a second direction perpendicular to the first direction and generating a Karman vortex may be formed inside the connecting pipe.

[0016] In one embodiment, first to n-th sub-guide structures (where n is a natural number greater than or equal to 2) extending in the second direction and away from the guide structure may be further formed inside the connecting pipe.

[0017] In one embodiment, the guide structure may include a guide rod or a guide plate.

[0018] In a method for manufacturing a display device according to an embodiment of the present invention for achieving the above-mentioned purpose, a substrate is processed by using at least one of a first laser beam and a second laser beam generated by a first laser generator and a second laser generator arranged inside a laser device including a chamber. The method for manufacturing a display device may include: maintaining a first dust collecting pressure of a first dust collector connected to the chamber at a negative pressure by forming a first dust collecting pipe with a first valve structure, and maintaining a second dust collecting pressure of a second dust collector connected to the chamber at a negative pressure by forming a second dust collecting pipe with a second valve structure. , thereby collecting dust from the fume generated by the processing; in order to remove foreign matter adsorbed to the filter of the first dust collector, changing the first dust collecting pressure from negative pressure to positive pressure, and maintaining the second dust collecting pressure at the negative pressure, thereby collecting dust from the fume using the second dust collector; and in order to remove the foreign matter adsorbed to the filter of the second dust collector, changing the second dust collecting pressure from the negative pressure to the positive pressure, and maintaining the first dust collecting pressure at the negative pressure, thereby collecting dust from the fume using the first dust collector.

[0019] In one embodiment, the method may further include: placing the substrate on a first workbench and a second workbench arranged inside the laser device; and unloading the substrate from the first workbench and the second workbench after processing the substrate.

[0020] In one embodiment, the first valve structure and the second valve structure may include one selected from the group consisting of copper, aluminum, steel, and stainless steel.

[0021] In one embodiment, the laser device may include a connecting pipe that connects the chamber with the first dust collecting pipe and the second dust collecting pipe and extends in a first direction, and a guide structure that extends in a second direction perpendicular to the first direction and generates a Karman vortex is formed inside the connecting pipe.

[0022] In one embodiment, the connection pipe may further include first to n-th sub-guide structures (where n is a natural number greater than or equal to 2) extending away from the guide structure in the second direction.

[0023] In one embodiment, the guide structure may include a guide rod and a guide plate.

[0024] (Effects of the Invention)

[0025] According to various embodiments of the present invention, the laser device may include: a chamber having a space inside; a first laser generator and a second laser generator, generating a first laser beam and a second laser beam respectively; a first workbench and a second workbench, arranged on the travel paths of the first laser beam and the second laser beam; a connecting pipe, arranged outside the chamber and connected to the chamber, and extending in a first direction; a first dust collecting pipe, connected to the connecting pipe and forming a first valve structure; a second dust collecting pipe, connected to the connecting pipe and forming a second valve structure; a first dust collector, connected to the first dust collecting pipe; and a second dust collector, connected to the second dust collecting pipe.

[0026] Therefore, when the first dust collecting pressure of the first dust collector is changed from negative pressure to positive pressure, the first valve structure can prevent the backflow of airflow, and when the second dust collecting pressure of the second dust collector is changed from negative pressure to positive pressure, the second valve structure can prevent the backflow of airflow, thereby continuously removing smoke and preventing the degradation of the process of the laser device caused by the smoke.

[0027] However, the effects of the present invention are not limited to the above-mentioned effects, and various extensions can be made without departing from the spirit and scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a plan view showing a laser device according to an exemplary embodiment of the present invention.

[0029] Figure 2a to Figure 2d It is a cross-sectional view showing an embodiment of the first valve structure and the second valve structure.

[0030] Figure 3a to Figure 3d It is a cross-sectional view showing another embodiment of the first valve structure and the second valve structure.

[0031] Figure 4a as well as Figure 4b It is a cross-sectional view showing an embodiment of a guide structure.

[0032] Figure 5a as well as Figure 5b It is a cross-sectional view showing another embodiment of the guide structure.

[0033] Figure 6 It is a sequence diagram showing a method for manufacturing a display device using a laser device according to an embodiment of the present invention.

[0034] (Explanation of symbols)

[0035] 100: chamber; 110a: first laser generator; 110b: second laser generator; 120a: first workbench; 120b: second workbench; 130: connecting pipe; 140a: first dust collecting pipe; 140b: second dust collecting pipe; 150a: first dust collector; 150b: second dust collector; 160: substrate; 141a, 141b, 143a, 143b: first valve; 142a, 142b, 144a, 144b: solid Fixed axis; 145a, 145b: second valve; 146a, 147a: first valve structure; 146b, 147b: second valve structure; 148a, 148b: first fixed component; 149a, 149b: second fixed component; 151: guide rod; 152: guide plate; 151a, ..., 151n: first sub-guide rod to n-th sub-guide rod; 152a, ..., 152n: first sub-guide plate to n-th sub-guide plate; 1000: laser device. DETAILED DESCRIPTION

[0036] Hereinafter, various embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same reference numerals are used for the same components in the drawings, and repeated description of the same components will be omitted.

[0037] Figure 1 is a plan view showing a laser device according to an exemplary embodiment of the present invention.

[0038] The laser device 1000 may include a chamber 100, a first laser generator 110a, a second laser generator 110b, a first workbench 120a, a second workbench 120b, a connecting pipe 130, a first dust collecting pipe 140a, a second dust collecting pipe 140b, a first dust collector 150a, and a second dust collector 150b.

[0039] The chamber 100 may include a space inside. The chamber 100 may have a quadrilateral cross-section and a cube overall shape. However, this is an example and is not limited thereto. For example, the chamber 100 may include a rectangular parallelepiped, a cylinder, or the like. The side wall of the chamber 100 may include a gate (not shown). The substrate 160, etc. may be introduced into the interior of the chamber 100 through the gate (not shown). In addition, the substrate 160, etc. may be sent out to the outside of the chamber 100 through the gate (not shown).

[0040] The substrate 160 may include a thin film element substrate formed by laminating various elements or thin films on a PI (polyimide) film, and may be disposed on a carrier glass. The substrate 160 may include a silicon substrate for semiconductor element manufacturing, a glass substrate for display device manufacturing, etc., in which a process of forming various thin films or elements on the upper surface is in progress or has been completed. The shape of the substrate 160 may be various shapes such as a disc shape or a quadrilateral disc shape.

[0041] The laser device 1000 may include a first laser generator 110a and a second laser generator 110b. The first laser generator 110a and the second laser generator 110b may be disposed inside the chamber 100, respectively. Figure 1 100 shows a case where the first laser generator 110a and the second laser generator 110b are arranged inside the chamber 100, but this is an example, and the first laser generator 110a and the second laser generator 110b may also be arranged outside the chamber 100. The laser device 1000 can process the substrate 160 by irradiating the first laser beam and the second laser beam through the first laser generator 110a and the second laser generator 110b. For example, the first laser beam and the second laser beam may radiate an excimer laser beam. In addition, the first laser beam and the second laser beam may cut the substrate 160 into a cell shape.

[0042] The first laser generator 110a and the second laser generator 110b may use various laser sources according to the wavelength of a laser beam used in advance, such as Ar laser, Kr laser, and excimer laser. The first laser beam and the second laser beam may be processed into a linear beam shape.

[0043] The first workbench 120a and the second workbench 120b may be arranged on the paths of the first laser beam and the second laser beam. The substrate 160 may be processed on the first workbench 120a and the second workbench 120b. The first workbench 120a and the second workbench 120b may horizontally move the substrate 160 in the process direction. The process direction may be the third direction DR3. However, this is an example, and the process direction is not limited thereto. For example, the process direction may be the second direction DR2 or the fourth direction DR4.

[0044] The connecting pipe 130 may be disposed outside the chamber 100 and connected to the chamber 100. The connecting pipe 130 may extend along the first direction DR1 outside the chamber 100. The connecting pipe 130 may have a quadrilateral cross section and a cube overall shape. However, this is an example and is not limited thereto. For example, the connecting pipe 130 may include a cylindrical, rectangular parallelepiped, or other shapes.

[0045] The first dust collecting pipe 140a and the second dust collecting pipe 140b may be connected to the connecting pipe 130. Figure 1, the first dust collecting pipe 140a and the second dust collecting pipe 140b are shown to be connected to the first direction DR1 of the connecting pipe 130, but this is an example and is not limited to this. For example, the first dust collecting pipe 140a and the second dust collecting pipe 140b can be connected to the third direction DR3 or the fourth direction DR4 of the connecting pipe 130. In addition, the first dust collecting pipe 140a can be connected to the first direction DR1, and the second dust collecting pipe 140b can be connected to the second direction DR2, the third direction DR3 or the fourth direction DR4. The first dust collecting pipe 140a and the second dust collecting pipe 140b are shown to be quadrilateral in cross section, but this is an example and is not limited to this. For example, the first dust collecting pipe 140a and the second dust collecting pipe 140b can respectively include shapes such as a cylinder, a cuboid, and a cube.

[0046] The first dust collector 150a and the second dust collector 150b may be connected to the first dust collection pipe 140a and the second dust collection pipe 140b. The first dust collector 150a and the second dust collector 150b may collect dust from the fume (fume) emitted from the chamber 100 when processing the substrate 160. The fume may include pollutant particles. In the case where the pollutant particles are adsorbed on the substrate 160, problems may occur when the laser device 1000 processes the substrate 160. For example, the pollutant particles may hinder the laser cutting of the substrate 160 on the path of the first laser beam and the second laser beam.

[0047] When zeolite and the like are adsorbed above the reference value in the filters of the first dust collector 150a and the second dust collector 150b, the first dust collecting pressure of the first dust collector 150a and the second dust collecting pressure of the second dust collector 150b will become low, and smoke may not be effectively removed. Therefore, it is necessary to remove zeolite and the like from the filters of the first dust collector 150a and the second dust collector 150b. In one embodiment, in order to remove zeolite and the like adsorbed on the filters, the first dust collecting pressure of the first dust collector 150a and the second dust collecting pressure of the second dust collector 150b can be changed from negative pressure to positive pressure. For example, when the first dust collecting pressure of the first dust collector 150a and the second dust collecting pressure of the second dust collector 150b are positive pressures, the zeolite and the like adsorbed to the filters of the first dust collector 150a and the second dust collector 150b can be detached.

[0048] However, if the first dust collecting pressure of the first dust collector 150a and the second dust collecting pressure of the second dust collector 150b become positive pressure at the same time, the smoke generated in the chamber 100 cannot be removed, and thus the processing step of the substrate 160 using the first laser generator 110a and the second laser generator 110b may not be successfully performed. In one embodiment, when laser cutting (cutting) using the first laser generator 110a and the second laser generator 110b is in progress, at least one of the first dust collector 150a and the second dust collector 150b may be collecting dust. That is, at least one of the first dust collector 150a and the second dust collector 150b may be negative pressure. For example, the first dust collector 150a and the second dust collector 150b may be collecting dust at the same time. In addition, only one of the first dust collector 150a and the second dust collector 150b may be collecting dust. In one embodiment, when only one of the first dust collector 150a and the second dust collector 150b is collecting dust, the dust collecting pressure of the dust collector that is collecting dust may be increased.

[0049] Figure 2a to Figure 2d 14 is a cross-sectional view showing an embodiment of the first valve structure 146 a and the second valve structure 146 b .

[0050] Reference Figure 1 as well as Figure 2a to Figure 2d , a first valve structure 146a and a second valve structure 146b may be formed on the first dust collecting pipe 140a and the second dust collecting pipe 140b, respectively. The first valve structure 146a may include: a fixed shaft 142a, extending in the second direction DR2 perpendicular to the first direction DR1 and fixed to the first dust collecting pipe 140a; and a first valve 141a, rotatably coupled to the first part of the fixed shaft 142a, and extending in a third direction DR3 perpendicular to the first direction DR1 and the second direction DR2. The second valve structure 146b may include: a fixed shaft 142b, extending in the second direction DR2 and fixed to the second dust collecting pipe 140b; and a first valve 141b, rotatably coupled to the first part of the fixed shaft 142b, and extending in the third direction DR3. However, this is an example, and the first valve structure 146a or the second valve structure 146b may be as follows Figure 3a The shape of the valve structure (147a, 147b) shown. In one embodiment, when the first dust collector 150a and the second dust collector 150b are collecting dust, the first valve structure 146a and the second valve structure 146b can be opened. In other embodiments, when the first dust collector 150a and the second dust collector 150b are not collecting dust, the first valve structure 146a and the second valve structure 146b can be closed.

[0051] The first dust collector 150a and the second dust collector 150b may both be at negative pressure (see Figure 2b ). In the first dust collecting pipe 140a and the second dust collecting pipe 140b, the smoke can move in the first direction DR1. In this case, the first valve structure 146a and the second valve structure 146b can be opened, and the first dust collector 150a and the second dust collector 150b continue to collect dust, so that the smoke does not flow back.

[0052] It can be that the first dust collector 150a is at a negative pressure, and the second dust collector 150b is at a positive pressure (refer to Figure 2c ). In the first dust collecting pipe 140a, the smoke can move in the first direction DR1, and in the second dust collecting pipe 140b, the smoke can move in the fifth direction DR5 opposite to the first direction DR1. In the case where the smoke moves from the second dust collecting pipe 140b to the chamber 100, laser cutting may not be satisfactorily performed in the laser device 1000. Therefore, the first valve 141b of the second dust collecting pipe 140b can be closed by the first fixing member 148b of the second dust collecting pipe 140b. As a result, the smoke cannot move from the second dust collecting pipe 140b to the chamber 100.

[0053] It can be that the first dust collector 150a is at a positive pressure, and the second dust collector 150b is at a negative pressure (refer to Figure 2d ). In the second dust collecting pipe 140b, the smoke can move in the first direction DR1, and in the first dust collecting pipe 140a, the smoke can move in the fifth direction DR5. In the case where the smoke moves from the first dust collecting pipe 140a to the chamber 100, laser cutting may not be satisfactorily performed in the laser device 1000. Therefore, the first valve 141a of the first dust collecting pipe 140a can be closed by the first fixing member 148a of the first dust collecting pipe 140a. As a result, the smoke cannot move from the first dust collecting pipe 140a to the chamber 100.

[0054] The first valve structure 146a and the second valve structure 146b may include one selected from the group consisting of copper, aluminum, steel, and stainless steel. However, this is an example, and the first valve structure 146a and the second valve structure 146b may be made of various materials within a range that can prevent the backflow of smoke.

[0055] As described above, when the laser device 1000 is operated, it is possible to prevent the performance of the laser device 1000 from being degraded due to smoke.

[0056] Figure 3a to Figure 3d It is a cross-sectional view showing another embodiment of the first valve structure 147a and the second valve structure 147b.

[0057] Reference Figure 1 as well as Figure 3a to Figure 3d , a first valve structure 147a may be formed on the first dust collecting pipe 140a, and a second valve structure 147b may be formed on the second dust collecting pipe 140b. The first valve structure 147a may include: a fixed shaft 144a extending in the second direction DR2 and fixed to the first dust collecting pipe 140a; a first valve 143a rotatably coupled to a first portion of the fixed shaft 144a and extending in a third direction DR3; and a second valve 145a rotatably coupled to a second portion opposite to the first portion and extending in a fourth direction DR4 opposite to the third direction DR3. The second valve structure 147b may include: a fixed shaft 144b extending in the second direction DR2 and fixed to the second dust collecting pipe 140b; a first valve 143b rotatably coupled to a first portion of the fixed shaft 144b and extending in the third direction DR3; and a second valve 145b rotatably coupled to a second portion opposite to the first portion and extending in the fourth direction DR4. However, this is an example, and the first valve structure 147a or the second valve structure 147b may also be Figure 2a The shape of the first valve structure 146a is shown. In one embodiment, when the first dust collector 150a and the second dust collector 150b are collecting dust, the first valve structure 147a and the second valve structure 147b can be opened. In other embodiments, when the first dust collector 150a and the second dust collector 150b are not collecting dust, the first valve structure 147a and the second valve structure 147b can be closed.

[0058] The first dust collector 150a and the second dust collector 150b may both be at negative pressure (see Figure 3b ). In the first dust collecting pipe 140a and the second dust collecting pipe 140b, the smoke can move in the first direction DR1. In this case, the first valve structure 147a and the second valve structure 147b are opened, and the first dust collector 150a and the second dust collector 150b continue to collect dust, so that the smoke does not flow back.

[0059] It can be that the first dust collector 150a is at a negative pressure, and the second dust collector 150b is at a positive pressure (refer to Figure 3c). In the first dust collecting pipe 140a, the smoke can move in the first direction DR1, and in the second dust collecting pipe 140b, the smoke can move in the fifth direction DR5 opposite to the first direction DR1. In the case where the smoke moves from the second dust collecting pipe 140b to the chamber 100, laser cutting may not be successfully performed in the laser device 1000. Therefore, the first valve 143b and the second valve 145b of the second dust collecting pipe 140b can be closed by the first fixing member 148b and the second fixing member 149b of the second dust collecting pipe 140b. As a result, the smoke cannot move from the second dust collecting pipe 140b to the chamber 100.

[0060] It can be that the first dust collector 150a is at positive pressure and the second dust collector 150b is at negative pressure (refer to Figure 3d ). In the second dust collecting pipe 140b, the smoke can move in the first direction DR1, and in the first dust collecting pipe 140a, the smoke can move in the fifth direction DR5. In the case where the smoke moves from the first dust collecting pipe 140a to the chamber 100, laser cutting may not be successfully performed in the laser device 1000. Therefore, the first valve 143a and the second valve 145a of the first dust collecting pipe 140a can be closed by the first fixing member 148a and the second fixing member 149a of the first dust collecting pipe 140a. As a result, the smoke cannot move from the first dust collecting pipe 140a to the chamber 100.

[0061] The first valve structure 147a and the second valve structure 147b may include one selected from the group consisting of copper, aluminum, steel, and stainless steel. However, this is an example, and the first valve structure 147a and the second valve structure 147b may be made of various materials within the range of preventing the backflow of smoke.

[0062] As described above, when the laser device 1000 is operated, it is possible to prevent the performance of the laser device 1000 from being degraded due to smoke.

[0063] Figure 4a as well as Figure 4b is a cross-sectional view showing an embodiment of a guide structure, Figure 5a as well as Figure 5b It is a cross-sectional view showing another embodiment of the guide structure.

[0064] Reference Figure 1 , Figure 4a , Figure 4b , Figure 5a , Figure 5bA guide structure extending in a second direction DR2 perpendicular to the first direction DR1 and generating a Karman vortex may be formed on the connecting pipe 130. In one embodiment, the guide structure may include a guide rod 151. In other embodiments, the guide structure may include a guide plate 152.

[0065] Through the first dust collecting pressure of the first dust collector 150a and the second dust collecting pressure of the second dust collector 150b, an airflow including smoke flows in the first direction DR1 in the connecting pipe 130. The first dust collecting pipe 140a and the second dust collecting pipe 140b can be connected to the surface of the connecting pipe 130 in the first direction DR1. In addition, the first dust collecting pipe 140a and the second dust collecting pipe 140b can be arranged away from each other in the third direction DR3 and the fourth direction DR4. In the case where the airflow flows only in a straight line along the first direction DR1, the airflow may not effectively flow to the first dust collecting pipe 140a and the second dust collecting pipe 140b. When the Karman vortex is generated in the connecting pipe 130 by the guide structure, the airflow flowing only along the first direction DR1 in the connecting pipe 130 can flow to the first dust collecting pipe 140a and the second dust collecting pipe 140b. In one embodiment, the connection pipe 130 may further include first to n-th sub-guide structures (where n is a natural number greater than or equal to 2) extending in the second direction DR2 and away from the guide structure.

[0066] Figure 6 It is a sequence diagram showing a method for manufacturing a display device using the laser device according to each embodiment of the present invention.

[0067] Reference Figure 1 to Figure 2d as well as Figure 6 The substrate 160 may be processed using at least one of the first laser beam and the second laser beam generated by the first laser generator 110a and the second laser generator 110b disposed inside the laser device 1000. The substrate 160 may be placed on the first workbench 120a and the second workbench 120b disposed inside the laser device 1000. When the processing of the substrate 160 using the first laser beam and the second laser beam is completed, the substrate 160 may be unloaded from the first workbench 120a and the second workbench 120b.

[0068] The laser device 1000 can collect dust from smoke through the first dust collector 150a and the second dust collector 150b (S110). The first dust collector 150a and the second dust collector 150b connected to the chamber 100 based on the first dust collection pipe 140a formed with the first valve structure 146a and the second dust collection pipe 140b formed with the second valve structure 146b can collect dust from smoke generated in the chamber 100. In this case, the first valve structure 146a and the second valve structure 146b can be fully opened.

[0069] The laser device 1000 can collect dust from the smoke generated in the chamber 100 through the second dust collector 150b (S120). In the process of the laser device 1000 collecting dust from the smoke, the first dust collecting pressure of the first dust collector 150a may be reduced due to foreign matter adsorbed to the filter of the first dust collector 150a. In order to remove foreign matter adsorbed to the filter of the first dust collector 150a, the first dust collecting pressure of the first dust collector 150a can be changed from negative pressure to positive pressure. In this case, in order to continue to remove the smoke generated inside the chamber 100, the second dust collecting pressure of the second dust collector 150b can be maintained at a negative pressure. In the first dust collecting pipe 140a, the first valve structure 146a can be closed to prevent backflow of airflow.

[0070] The laser device 1000 can collect dust from the smoke generated in the chamber 100 through the first dust collector 150a (S130). In the process of collecting dust from the smoke, the second dust collecting pressure of the second dust collector 150b may be reduced due to foreign matter adsorbed to the filter of the second dust collector 150b. In order to remove foreign matter adsorbed to the filter of the second dust collector 150b, the second dust collecting pressure of the second dust collector 150b can be changed from negative pressure to positive pressure. In this case, in order to continue to remove the smoke generated inside the chamber 100, the first dust collecting pressure of the first dust collector 150a can maintain a negative pressure. In the second dust collecting pipe 140b, the second valve structure 146b can be closed to prevent backflow of airflow.

[0071] The guide structure (e.g., guide rod, guide plate, etc.) formed in the connecting pipe 130 can generate Karman vortex using the airflow flowing along the first direction DR1 in the connecting pipe 130. Therefore, the airflow including the smoke can effectively flow to the first dust collecting pipe 140a and the second dust collecting pipe 140b connected to the connecting pipe 130.

[0072] In passing Figure 6 When a display device is manufactured by a method for manufacturing a display device using the laser device 1000 , the laser device 1000 can effectively remove smoke, thereby preventing the process of the laser device 1000 from being degraded. Figure 6The method for manufacturing a display device using the laser device 1000 can also be applied to Figure 3a to Figure 3d In addition, the order in which the dust collection pressure of one of the first dust collector 150a and the second dust collector 150b changes from negative pressure to positive pressure may be variable.

[0073] (Industrial Applicability)

[0074] The present invention can be applied to a laser device and a method for manufacturing a display device using the laser device, and the like.

[0075] The present invention has been described above with reference to the exemplary embodiments. However, it should be understood by those skilled in the art that various modifications and changes may be made without departing from the spirit and scope of the present invention as described in the claims.

Claims

1. A laser device, comprising: Chamber, with space inside; A first laser generator and a second laser generator, generating a first laser beam and a second laser beam respectively; A first workbench and a second workbench are arranged on the travel paths of the first laser beam and the second laser beam; A connecting pipe is arranged outside the chamber, connected to the chamber, and extends in a first direction; A first dust collecting pipe is connected to the connecting pipe and is formed with a first valve structure; A second dust collecting pipe is connected to the connecting pipe and is formed with a second valve structure; a first dust collector connected to the first dust collecting pipe; as well as A second dust collector is connected to the second dust collecting pipe, The first dust collecting pressure of the first dust collector and the second dust collecting pressure of the second dust collector are maintained at negative pressure to collect dust from the smoke generated by the processing. In order to remove foreign matter adsorbed to the filter of the first dust collector, the first dust collecting pressure is changed from negative pressure to positive pressure, and the second dust collecting pressure is maintained at the negative pressure, so that the smoke is collected by the second dust collector. In order to remove the foreign matter adsorbed to the filter of the second dust collector, the second dust collection pressure is changed from the negative pressure to the positive pressure, and the first dust collection pressure is maintained at the negative pressure, so that the smoke is collected by the first dust collector.

2. The laser device according to claim 1, wherein: When laser cutting is being performed using at least one of the first laser generator and the second laser generator, at least one of the first dust collector and the second dust collector is collecting dust.

3. The laser device according to claim 1, wherein: When the first dust collector and the second dust collector are collecting dust, the first valve structure and the second valve structure are opened. When the first dust collector and the second dust collector are not collecting dust, the first valve structure and the second valve structure are closed.

4. The laser device according to claim 1, wherein: The first valve structure comprises: a fixed shaft, inside the first dust collecting pipe, extending in a second direction perpendicular to the first direction, and fixed to the first dust collecting pipe; and The first valve is rotatably coupled to the first portion of the fixed shaft and extends in a third direction perpendicular to the first direction and the second direction.

5. The laser device according to claim 4, wherein: The first valve structure further includes a second valve rotatably coupled to a second portion of the fixed shaft opposite to the first portion and extending in a fourth direction opposite to the third direction.

6. The laser device according to claim 1, wherein: The second valve structure comprises: a fixed shaft extending in a second direction perpendicular to the first direction and fixed to the second dust collecting pipe; and The first valve is rotatably coupled to the first portion of the fixed shaft and extends in a third direction perpendicular to the first direction and the second direction.

7. The laser device according to claim 6, wherein: The second valve structure further includes a second valve rotatably coupled to a second portion of the fixed shaft opposite to the first portion and extending in a fourth direction opposite to the third direction.

8. The laser device according to claim 1, wherein: The first valve structure and the second valve structure include one selected from the group consisting of copper, aluminum, steel, and stainless steel.

9. The laser device according to claim 1, wherein: A guide structure extending in a second direction perpendicular to the first direction and generating a Karman vortex flow is formed inside the connecting pipe.

10. The laser device according to claim 9, wherein: A first sub-guide structure to an n-th sub-guide structure extending in the second direction and away from the guide structure are further formed inside the connecting pipe, where n is a natural number greater than or equal to 2.

11. The laser device according to claim 9, wherein: The guide structure includes a guide rod or a guide plate.

12. A method for manufacturing a display device using a laser device, the laser device processing a substrate using at least one of a first laser beam and a second laser beam generated by a first laser generator and a second laser generator disposed inside the laser device including a chamber, the method comprising: A step of collecting dust from smoke generated by the processing by maintaining a first dust collecting pressure of a first dust collector connected to the chamber at a negative pressure through a first dust collecting pipe having a first valve structure, and maintaining a second dust collecting pressure of a second dust collector connected to the chamber at a negative pressure through a second dust collecting pipe having a second valve structure; In order to remove foreign matter adsorbed to the filter of the first dust collector, the first dust collecting pressure is changed from negative pressure to positive pressure, and the second dust collecting pressure is maintained at the negative pressure, thereby collecting dust from the smoke using the second dust collector; as well as In order to remove the foreign matter adsorbed to the filter of the second dust collector, the second dust collecting pressure is changed from the negative pressure to the positive pressure, and the first dust collecting pressure is maintained at the negative pressure, thereby collecting dust from the smoke using the first dust collector.

13. The method for manufacturing a display device using a laser device according to claim 12, further comprising: A step of placing the substrate on a first workbench and a second workbench arranged inside the laser device; as well as After processing the substrate, unloading the substrate from the first workbench and the second workbench.

14. The method for manufacturing a display device using a laser device according to claim 12, wherein: The laser device includes a connecting pipe that connects the chamber with the first dust collecting pipe and the second dust collecting pipe and extends in a first direction. A guide structure extending in a second direction perpendicular to the first direction and generating a Karman vortex flow is formed inside the connecting pipe.

15. The method for manufacturing a display device using a laser device according to claim 14, wherein: The connecting pipe further includes first to n-th sub-guide structures extending away from the guide structure in the second direction, wherein n is a natural number greater than or equal to 2.

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