Conveying system

Abstract

A conveying system includes: a mover capable of moving in a conveying direction; a stator having a plurality of coils arranged along the conveying direction and applying force to the mover using the plurality of coils to which current is applied; an acquisition unit that acquires a position and an attitude of the mover moving along the conveying direction; and a control unit that determines current values ​​applied to the plurality of coils and controls the force based on the position and attitude of the mover.

Description

Technical Field

[0001] The invention relates to a conveying system. Background Art

[0002] Generally, a conveying system is used in a production line for assembling industrial products, a semiconductor exposure device, and the like. In particular, a conveying system in a production line conveys workpieces such as components between a plurality of stations in a factory automation production line or between factory automation production lines. In addition, such a conveying system can be used as a conveying device within a processing device. As a conveying system, a conveying system having a movable magnet type linear motor has been proposed.

[0003] In a conveying system having a movable magnet type linear motor, a guide device (e.g., a linear guide) involving mechanical contact is used to construct the conveying system. However, in a conveying system using a guide device such as a linear guide, there is a problem of reduced productivity due to contaminants (e.g., wear sheets or lubricating oil of a rail or a bearing, volatiles thereof, etc.) generated from a sliding portion of the linear guide. In addition, there is a problem of shortening the life of the linear guide due to increased friction of the sliding portion during high-speed conveying.

[0004] Therefore, Japanese Patent No. 6538710 discloses a magnetic levitation conveying device capable of conveying a mover in a non-contact manner. The magnetic levitation conveying device disclosed in Japanese Patent No. 6538710 realizes non-contact conveying by using levitation coils arranged above a chamber at constant intervals along the conveying direction of the mover and stator coils arranged on the side of the chamber.

[0005] However, in the conveying device disclosed in Japanese Patent No. 6538710, control of the distance between the mover and the floating coil is performed in a closed manner between the mover and each coil, so stable conveyance of the mover is difficult. Summary of the invention

[0006] According to one aspect of the present invention, a conveying system is provided, comprising: a mover capable of moving in a conveying direction; a stator having a plurality of coils arranged along the conveying direction and applying force to the mover by utilizing the plurality of coils to which current is applied; an acquisition unit, the acquisition unit acquiring a position and a posture of the mover moving along the conveying direction; and a control unit, the control unit controlling the force generated by the current applied to the plurality of coils based on the acquired position and the acquired posture of the mover.

[0007] Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 is a schematic diagram showing the configuration of a conveying system according to a first embodiment of the present invention.

[0009] Figure 2 is a schematic diagram showing the configuration of a conveying system according to a first embodiment of the present invention.

[0010] Figure 3 1 is a schematic diagram showing a coil and a configuration related to the coil in a conveying system according to a first embodiment of the present invention.

[0011] Figure 4 1 is a schematic diagram showing a control system for controlling a conveying system according to a first embodiment of the present invention.

[0012] Figure 5 Schematic diagram showing a method for controlling the posture of a mover in a conveying system according to a first embodiment of the present invention.

[0013] Figure 6 : is a schematic diagram showing an example of a control block for controlling the position and posture of a mover in the conveying system according to the first embodiment of the present invention.

[0014] Fig. 7A 1 is a schematic diagram showing a process of using a mover position calculation function in the conveying system according to the first embodiment of the present invention.

[0015] Figure 7B 1 is a schematic diagram showing a process of using a mover position calculation function in the conveying system according to the first embodiment of the present invention.

[0016] Figure 8 1 is a schematic diagram showing a process of using a mover posture calculation function in the conveying system according to the first embodiment of the present invention.

[0017] Fig. 9A 1 is a schematic diagram showing a process of using a mover posture calculation function in the conveying system according to the first embodiment of the present invention.

[0018] Fig. 9B 1 is a schematic diagram showing a process of using a mover posture calculation function in the conveying system according to the first embodiment of the present invention.

[0019] Fig.10 1 is a schematic diagram showing the relationship between the force acting on the yoke plate attached to the mover and the force component and torque component acting on the mover 101 in the conveying system according to the first embodiment of the present invention.

[0020] Fig.11 : is a graph schematically showing a thrust constant curve in the Z direction in the conveying system according to the first embodiment of the present invention.

[0021] Fig. 12A is a schematic diagram showing coils of a stator in a conveying system according to a first embodiment of the present invention.

[0022] Fig. 12B is a schematic diagram showing coils of a stator in a conveying system according to a first embodiment of the present invention.

[0023] Fig.13 : is a graph schematically showing the relationship between the amount of current applied to the coil and the magnitude of the attractive force acting between the coil and the yoke plate in the conveying system according to the first embodiment of the present invention.

[0024] Fig.14 1 is a schematic diagram of a mover in a conveying system according to a first embodiment of the present invention when viewed from top to bottom along the Z direction.

[0025] Fig.15 : is a graph schematically showing an attraction force curve in the Y direction in the conveying system according to the first embodiment of the present invention.

[0026] Fig.16 is a schematic diagram showing the configuration of a conveying system according to a second embodiment of the present invention.

[0027] Fig.17A is a schematic diagram showing a method of independently applying force components Tx and Ty and a torque component Twz to a mover by using a coil and a permanent magnet array in a conveying system according to a second embodiment of the present invention.

[0028] Fig. 17B is a schematic diagram showing a method of independently applying force components Tx and Ty and a torque component Twz to a mover by using a coil and a permanent magnet array in a conveying system according to a second embodiment of the present invention.

[0029] Fig. 17C is a schematic diagram showing a method of independently applying force components Tx and Ty and a torque component Twz to a mover by using a coil and a permanent magnet array in a conveying system according to a second embodiment of the present invention.

[0030] Fig.18 is a schematic diagram showing the configuration of a conveying system according to a third embodiment of the present invention.

[0031] Fig.19A is a schematic diagram showing a method of independently applying force components Tx and Tz and torque components Twx, Twy, and Twz to the mover 101 by using a coil and a permanent magnet array in a conveying system according to a third embodiment of the present invention.

[0032] Fig.19Bis a schematic diagram showing a method of independently applying force components Tx and Tz and torque components Twx, Twy, and Twz to the mover 101 by using a coil and a permanent magnet array in a conveying system according to a third embodiment of the present invention.

[0033] Fig. 20 is a schematic diagram showing the configuration of a conveying system according to a fourth embodiment of the present invention.

[0034] Fig.21A is a schematic diagram showing the configuration of a conveying system according to a fourth embodiment of the present invention.

[0035] Fig. 21B : is a schematic diagram showing a q-axis thrust constant curve, an h-axis thrust constant curve, and a d-axis thrust constant curve in a conveying system according to a fourth embodiment of the present invention.

[0036] Fig. 22 : is a schematic diagram showing the principle of generating a force in the h-axis direction (Y direction) in the conveying system according to the fourth embodiment of the present invention.

[0037] Fig.23A 2 is a schematic diagram schematically showing a situation in which a mover is transported in the X direction while being twisted in a transport system according to a fifth embodiment of the present invention.

[0038] Fig. 23B 2 is a schematic diagram schematically showing a situation in which a mover is transported in the X direction while being twisted in a transport system according to a fifth embodiment of the present invention.

[0039] Fig.24A : is a schematic diagram showing the configuration of a conveying system according to a sixth embodiment of the present invention.

[0040] Fig. 24B : is a graph showing a q-axis thrust constant curve, an h-axis thrust constant curve, and a d-axis thrust constant curve in a conveying system according to a sixth embodiment of the present invention.

[0041] Fig.25A : is a schematic diagram showing the configuration of a conveying system according to a seventh embodiment of the present invention.

[0042] Fig.25B : is a schematic diagram showing the configuration of a conveying system according to a seventh embodiment of the present invention.

[0043] Fig.26 : is a schematic diagram showing the configuration of a conveying system according to an eighth embodiment of the present invention.

[0044] Fig. 27 : is a schematic diagram showing the configuration of a conveying system according to a ninth embodiment of the present invention.

[0045] Fig.28A : is a schematic diagram showing the configuration of a conveying system according to a tenth embodiment of the present invention.

[0046] Fig.28B is a schematic diagram showing the configuration of a conveying system according to an eleventh embodiment of the present invention.

[0047] Fig.29 : is a schematic diagram showing the configuration of a conveying system according to a twelfth embodiment of the present invention. DETAILED DESCRIPTION

[0048] First embodiment

[0049] The following will refer to Figures 1 to 15 A first embodiment of the present invention is described.

[0050] First, refer to Figures 1 to 3 The configuration of the transport system 1 according to the present embodiment is described. Figure 1 and Figure 2 is a schematic diagram showing the configuration of the conveying system 1 including the mover 101 and the stator 201 according to the present embodiment. Note that, Figure 1 and Figure 2 1 and 2 are views of extracted main parts of each mover 101 and each stator 201, respectively. Figure 1 is a diagram of the mover 101 when viewed from obliquely above, Figure 2 1 and 2 are diagrams of the mover 101 and the stator 201 when viewed from an X direction described later. Figure 3 is a schematic diagram showing the coils 202 , 207 , and 208 in the conveying system 1 and the configuration associated with the coils 202 , 207 , and 208 .

[0051] like Figure 1 and Figure 2 As shown, the conveying system 1 according to the present embodiment has a mover 101 forming a carrier, a carriage or a slider and a stator 201 forming a conveying path. In addition, the conveying system 1 has an integrated controller 301, a coil controller 302, a coil unit controller 303 and a sensor controller 304. Note that Figure 1 Three movers 101a, 101b, and 101c are shown as the mover 101 and two stators 201a and 201b are shown as the stator 201. In the following description, when there is no need to particularly distinguish a component that may exist in multiple parts (for example, the mover 101 and the stator 201), a reference numeral including only a numeral common to other components is used, and if necessary, a lower case letter is added after the reference numeral to distinguish the individual components. In addition, when distinguishing a component on the R side of the mover 101 and a component on the L side of the mover 101 from each other, "R" indicating the R side or "L" indicating the L side is added after the lower case letter.

[0052] The conveying system 1 according to the present embodiment is a conveying system having an induction linear motor, which generates an electromagnetic force between the coil 207 of the stator 201 and the conductive plate 107 of the mover 101, and applies a thrust in the X direction to the mover 101. Further, the conveying system 1 according to the present embodiment is a magnetic levitation conveying system that floats the mover 101 and conveys the mover 101 in a non-contact manner. The conveying system 1 according to the present embodiment forms a part of a processing system, which also has a processing device that processes the workpiece 102 conveyed by the mover 101.

[0053] For example, by using the stator 201 to transport the mover 101, the transport system 1 transports the workpiece 102 held by the mover 101 to a processing device that processes the workpiece 102. The processing device is not particularly limited, and it may be, for example, a film forming device (e.g., a vapor deposition device, a sputtering device, etc.) that forms a film on a glass substrate as the workpiece 102. Note that although Figure 1 Three movers 101 are shown for two stators 201 , but the number is not limited thereto. In the conveying system 1 , one or more movers 101 may be conveyed on one or more stators 201 .

[0054] Here, the coordinate axes, directions, etc. used in the following description are defined. First, the X-axis is taken along the horizontal direction as the conveying direction of the mover 101, and the conveying direction of the mover 101 is defined as the X-direction. In addition, the Z-axis is taken along the vertical direction (the direction orthogonal to the X-direction), and the vertical direction is defined as the Z-direction. The vertical direction corresponds to the gravity direction (mg direction). In addition, the Y-axis is taken along the direction orthogonal to the X-direction and the Z-direction, and the direction orthogonal to the X-direction and the Z-direction is defined as the Y-direction. In addition, the rotation direction around the X-axis is defined as the Wx direction, the rotation direction around the Y-axis is defined as the Wy direction, and the rotation direction around the Z-axis is defined as the Wz direction. In addition, "*" is used as a multiplication symbol. In addition, the center of the mover 101 is defined as the origin Oc, the Y+ side is represented as the R side, and the Y- side is represented as the L side. Note that although the conveying direction of the mover 101 is not necessarily required to be a horizontal direction, in the case where the conveying direction is defined as the X-direction, the Y-direction and the Z-direction can also be defined similarly. Note that the X direction, the Y direction, and the Z direction are not necessarily limited to directions orthogonal to each other, and may be defined as directions intersecting each other.

[0055] Furthermore, the displacement in the conveying direction is defined as the position, and the displacement in the other directions is defined as the state together with the displacement in the torsion direction, posture, position, and posture described later. In addition, the representation of the q-axis and the d-axis used in the following description is the same as the representation of the q-axis and the d-axis in the vector control generally used in the synchronous motor control, respectively. The direction along the q-axis is defined as the q-axis direction, and the direction along the d-axis is defined as the d-axis direction.

[0056] In addition, the symbols used in the following description are as follows: Note that each symbol is used in each case of the coils 202, 207, and 208 in a repeated manner.

[0057] Oc: origin of mover 101

[0058] Os: origin of the linear scale 104

[0059] Oe: origin of stator 201

[0060] j: indicator for identifying the coil

[0061] (Note that j is an integer satisfying 1≤j≤N, where N is an integer greater than or equal to 2)

[0062] N: Number of coils installed

[0063] Ij: The current applied to the jth coil

[0064] P: includes the position and posture of the mover 101 (X, Y, Z, Wx, Wy, Wz)

[0065] X(j, P): X coordinate of the jth coil when viewed from the center of the mover 101 in state P

[0066] Y(j, P): Y coordinate of the jth coil when viewed from the center of the mover 101 in state P

[0067] Z(j, P): Z coordinate of the jth coil when viewed from the center of the mover 101 in state P

[0068] T: force applied to mover 101

[0069] Tx: The force component of force T in the X direction

[0070] Ty: force component of force T in the Y direction

[0071] Tz: force component of force T in the Z direction

[0072] Twx: Torque component of force T in the Wx direction

[0073] Twy: Torque component of force T in the Wy direction

[0074] Twz: Torque component of force T in the Wz direction

[0075] Ez(j, P): The force in the Z direction acting on the mover 101 in state P when a unit current is applied to the jth coil

[0076] Ex(j, P): The force in the X direction acting on the mover 101 in state P when a unit current is applied to the jth coil

[0077] Ey(j, P): The force in the Y direction acting on the mover 101 in state P when a unit current is applied to the jth coil

[0078] Eq(j, P): The force in the q-axis direction acting on the mover 101 in state P when a unit current is applied to the jth coil

[0079] Ed(j, P): The force in the d-axis direction acting on the mover 101 in state P when a unit current is applied to the jth coil

[0080] Eh(j, P): The force in the h-axis direction acting on the mover 101 in state P when a unit current is applied to the jth coil

[0081] Σ: The sum when index j changes from 1 to N

[0082] ΣL: The sum of the coil index changes on the L side

[0083] ΣR: The sum of the coil index changes on the R side

[0084] *: Matrix product, vector product, or matrix-vector product

[0085] M: Torque contribution matrix

[0086] K: Pseudo current vector (column vector)

[0087] Tq: Torque vector (column vector)

[0088] Is: Coil current vector (column vector)

[0089] Fs: Coil force vector (column vector)

[0090] M(a, b): the element in the ath row and bth column of the matrix M

[0091] Inv(): Inverse matrix

[0092] Tr(): Transpose a matrix

[0093] Tr(element1, element2, ...): column vector with element1, element2, ... as elements

[0094] WyR: Displacement in the Wy direction on the R side of the mover 101

[0095] WyL: Displacement of the L side of the mover 101 in the Wy direction

[0096] like Figure 1As shown by the arrow in , the mover 101 is configured to be movable in the X direction (ie, the conveying direction). The mover 101 has a yoke plate 103 and a conductive plate 107. In addition, the mover 101 has a linear scale 104, a Y target 105, and a Z target 106.

[0097] A plurality of yoke plates 103 are attached and mounted on a plurality of portions of the mover 101. Specifically, the yoke plates 103 are attached and mounted on respective ends of the R side and the L side in the X direction on the upper surface of the mover 101. In addition, the yoke plates 103 are attached and mounted on respective side surfaces of the R side and the L side of the mover 101 in the X direction. Each yoke plate 103 is a plate made of a substance having a large magnetic permeability (e.g., iron).

[0098] Conductive plate 107 is attached and installed in the center portion along the X direction on the upper surface of mover 101. Conductive plate 107 is not particularly limited as long as it has conductivity, such as a conductive metal plate, preferably an aluminum plate with small resistance.

[0099] Note that the installation positions of the yoke plate 103 and the conductive plates 107 and the numbers thereof are not limited to the above-described examples and may be changed as appropriate.

[0100] The linear scale 104 , the Y target 105 , and the Z target 106 are respectively attached and installed in the mover 101 at positions that can be read by the linear encoder 204 , the Y sensor 205 , and the Z sensor 206 installed on the stator 201 .

[0101] The stator 201 has coils 202 , 207 , and 208 , a linear encoder 204 , a Y sensor 205 , and a Z sensor 206 .

[0102] The plurality of coils 202 are attached and mounted on the stator 201 in the X direction in such a manner as to be able to face the yoke plate 103 mounted on the upper surface of the mover 101 in the Z direction. Specifically, the plurality of coils 202 are arranged and mounted in two rows parallel to the X direction in such a manner as to be able to face the two yoke plates 103 mounted at the respective ends of the R side and the L side of the upper surface of the mover 101 from the top in the Z direction.

[0103] The plurality of coils 208 are attached and mounted on the stator 201 in the X direction in such a manner as to face the yoke plate 103 mounted on the side surface of the mover 101 in the Y direction. Specifically, the plurality of coils 208 are arranged and mounted in two rows parallel to the X direction in such a manner as to face the two yoke plates 103 mounted on the corresponding side surfaces of the R side and the L side of the mover 101 from the side in the Y direction.

[0104] The plurality of coils 207 are attached and mounted on the stator 201 in the X direction in such a manner as to be able to face the conductive plate 107 mounted on the upper surface of the mover 101 in the Z direction. Specifically, the plurality of coils 207 are arranged and mounted in a single row parallel to the X direction in such a manner as to be able to face the conductive plate 107 mounted at the central portion of the upper surface of the mover 101 in the Z direction from the top.

[0105] The stator 201 applies force to the mover 101 movable in the conveying direction through the respective coils 202, 207 and 208 to which current is applied. Thus, the mover 101 is conveyed in the conveying direction while its position and posture are controlled.

[0106] Note that the installation positions of the coils 202, 207, and 208 are not limited to the above examples, and can be changed appropriately. In addition, the number of installed coils 202, 207, and 208 can be changed appropriately.

[0107] The linear encoder 204 , the Y sensor 205 , and the Z sensor 206 serve as a detection unit that detects the position and posture of the mover 101 that moves in the conveying direction.

[0108] The linear encoder 204 is attached and mounted on the stator 201 so as to be able to read the linear scale 104 mounted on the mover 101. The linear encoder 204 detects the relative position of the mover 101 with respect to the linear encoder 204 by reading the linear scale 104.

[0109] The Y sensor 205 is attached and mounted on the stator 201 so as to be able to detect the distance in the Y direction from the Y target 105 mounted on the mover 101 .

[0110] The Z sensor 206 is attached and mounted on the stator 201 so as to be able to detect the distance in the Z direction from the Z target 106 mounted on the mover 101 .

[0111] For example, the mover 101 is configured to be transported with the workpiece 102 attached or held above or below the mover 101. Note that Figure 2 A state is shown in which the workpiece 102 is attached below the mover 101. Note that the mechanism for attaching or holding the workpiece 102 to the mover 101 is not particularly limited, and a common attachment mechanism such as a mechanical hook, an electrostatic chuck, or the like, a common holding mechanism, or the like may be used.

[0112] Notice, Figure 2The figure shows a situation where the mover 101 and the stator 201 are embedded in the chamber of the vapor deposition device 701, which is an example of a processing device for processing the workpiece 102. The vapor deposition device 701 has a vapor deposition source 702 for depositing the workpiece 102 attached to the mover 101. The vapor deposition source 702 is installed at the lower part in the chamber of the vapor deposition device 701 so that the vapor deposition source 702 can face the workpiece 102 attached below the mover 101. By using the vapor deposition of the vapor deposition source 702, a thin film of metal, oxide, etc. is formed on a substrate (i.e., the workpiece 102) below the mover 101 attached to the installation position transported to the vapor deposition source 702. In this way, the workpiece 102 is transported together with the mover 101, and the transported workpiece 102 is processed by the processing device to manufacture an article.

[0113] also, Figure 1 The region including a location where a structure 100 such as a gate valve exists between stators 201a and 201b is shown. The location where the structure 100 is located is a location between multiple stations in a production line or between production lines where electromagnets or coils cannot be arranged continuously.

[0114] The conveying system 1 is provided with a control system 3 for controlling the conveying system 1. Note that the control system 3 may form a part of the conveying system 1. The control system 3 has an integrated controller 301, a coil controller 302, a coil unit controller 303, and a sensor controller 304. The coil controller 302 and the sensor controller 304 are connected to the integrated controller 301 in a communicable manner. A plurality of coil unit controllers 303 are connected to the coil controller 302 in a communicable manner. A plurality of linear encoders 204, a plurality of Y sensors 205, and a plurality of Z sensors 206 are connected to the sensor controller 304 in a communicable manner. The coils 202, 207, and 208 are connected to the respective coil unit controllers 303 (see Figure 3 ).

[0115] The integrated controller 301 determines current command values ​​to be applied to the plurality of coils 202, 207, and 208 based on the outputs from the linear encoder 204, the Y sensor 205, and the Z sensor 206 sent from the sensor controller 304. The integrated controller 301 sends the determined current command values ​​to the coil controller 302. The coil controller 302 sends the current command values ​​received from the integrated controller 301 to the corresponding coil unit controllers 303. The coil unit controllers 303 control the current amounts of the connected coils 202, 207, and 208 based on the current command values ​​received from the coil controller 302.

[0116] like Figure 3As shown, one or more coils 202 , 207 , and 208 are connected to each coil unit controller 303 .

[0117] A current sensor 312 and a current controller 313 are connected to each of the coils 202, 207, and 208. The current sensor 312 detects the current value flowing in the connected coils 202, 207, and 208. The current controller 313 controls the amount of current flowing in the connected coils 202, 207, and 208.

[0118] Coil unit controller 303 instructs current controller 313 of a desired current amount based on the current instruction value received from coil controller 302. Current controller 313 detects the current value detected by current sensor 312 and controls the current amount so that the desired current amount flows in each coil 202, 207 and 208.

[0119] Next, we will refer to Figure 4 The control system 3 for controlling the conveying system 1 according to the present embodiment is further described. Figure 4 : is a schematic diagram showing a control system 3 for controlling the conveying system 1 according to the present embodiment.

[0120] like Figure 4 As shown, the control system 3 has an integrated controller 301, a coil controller 302, a coil unit controller 303, and a sensor controller 304. The control system 3 serves as a control device for controlling the conveying system 1 including the mover 101 and the stator 201. The coil controller 302 and the sensor controller 304 are connected to the integrated controller 301 in a communicable manner.

[0121] A plurality of coil unit controllers 303 are communicably connected to the coil controller 302. The coil controller 302 and the plurality of coil unit controllers 303 connected thereto are provided in association with the respective columns of the coils 202, 207, and 208. The coils 202, 207, and 208 are connected to each coil unit controller 303. The coil unit controller 303 can control the level of the current of the connected coils 202, 207, and 208.

[0122] The coil controller 302 indicates a target current value to each connected coil unit controller 303. The coil unit controller 303 controls the amount of current of the connected coils 202, 207, and 208.

[0123] The plurality of linear encoders 204 , the plurality of Y sensors 205 , and the plurality of Z sensors 206 are connected to the sensor controller 304 in a communicable manner.

[0124] A plurality of linear encoders 204 are attached to the stator 201 at certain intervals, so that even during the conveyance of the mover 101, one of the linear encoders 204 can always measure the position of one mover 101. In addition, a plurality of Y sensors 205 are attached to the stator 201 at certain intervals, so that two of the Y sensors 205 can always measure the Y target 105 of one mover 101. In addition, a plurality of Z sensors 206 are attached to the stator 201 at certain intervals, so that three of the two rows of Z sensors 206 can always measure the Z target 106 of one mover 101, and form a plane.

[0125] The integrated controller 301 determines the current command value to be applied to the plurality of coils 202 based on the outputs from the linear encoder 204, the Y sensor 205, and the Z sensor 206, and sends the current command value to the coil controller 302. As described above, the coil controller 302 instructs the coil unit controller 303 on the current value based on the current command value from the integrated controller 301. Thus, the integrated controller 301 functions as a control unit to transport the mover 101 along the stator 201 in a non-contact manner and to control the posture of the transported mover 101 on six axes.

[0126] The following will refer to Figure 5 A method of controlling the posture of the mover 101 executed by the integrated controller 301 will be described. Figure 5 is a schematic diagram showing a method for controlling the posture of the mover 101 in the conveying system 1 according to the present embodiment. Figure 5 An overview of the posture control method of the mover 101 is shown by focusing mainly on the data flow. The integrated controller 301 functions as a control unit that performs processing using a mover position calculation function 401, a mover posture calculation function 402, a mover posture control function 403, and a coil current calculation function 404 as described below. Therefore, the integrated controller 301 controls the conveyance of the mover 101 while controlling the posture of the mover 101 on six axes. Note that the coil controller 302 can perform the same processing as the integrated controller 301 instead of the integrated controller 301.

[0127] First, the number and position of the movers 101 located on the stator 201 forming the conveying path are calculated using the mover position calculation function 401 based on the measurement values ​​from the plurality of linear encoders 204 and the information about their attachment positions. Thus, the mover position calculation function 401 updates the mover position information (X) and the number information in the mover information 406 (i.e., the information about the movers 101). The mover position information (X) indicates the position of the mover 101 on the stator 201 in the X direction (i.e., the conveying direction). The mover information 406 is prepared for each mover 101 on the stator 201, for example, Figure 5 It is represented as POS-1, POS-2, …

[0128] Next, the mover posture calculation function 402 is used to determine the Y sensor 205 and the Z sensor 206 capable of measuring the corresponding mover 101 based on the mover position information (X) in the mover information 406 updated by the mover position calculation function 401. Next, the mover posture calculation function 402 calculates the posture information (Y, Z, Wx, Wy, Wz) (that is, information about the posture of each mover 101) based on the values ​​output from the determined Y sensor 205 and the determined Z sensor 206, and updates the mover information 406. The mover information 406 updated by the mover posture calculation function 402 includes the mover position information (X) and the posture information (Y, Z, Wx, Wy, Wz).

[0129] Next, the mover attitude control function 403 is used to calculate the applied force information 408 of each mover 101 according to the current mover information 406 including the mover position information (X) and attitude information (Y, Z, Wx, Wy, Wz) and the attitude target value. The applied force information 408 is information related to the magnitude of the force to be applied to each mover 101. The applied force information 408 includes information related to the three-axis components (Tx, Ty, Tz) of the force T to be applied and the three-axis components (Twx, Twy, Twz) of the torque. The applied force information 408 is prepared for each mover 101 on the stator 201, for example, Figure 5 It is represented as TRQ-1, TRQ-2, …

[0130] Here, Tx, Ty, and Tz, which are three-axis components of force, are the X-direction component, the Y-direction component, and the Z-direction component of force, respectively. In addition, Twx, Twy, and Twz, which are three-axis components of torque, are the components around the X-axis, the components around the Y-axis, and the components around the Z-axis of the torque, respectively. The conveying system 1 according to the present embodiment controls the conveying of the mover 101 while controlling the posture of the mover 101 on six axes by controlling these six-axis components (Tx, Ty, Tz, Twx, Twy, Twz) of the force T.

[0131] Next, a coil current calculation function 404 is used to determine current command values ​​409 applied to the corresponding coils 202 , 207 , 208 based on the applied force information 408 and the mover information 406 .

[0132] Thus, the integrated controller 301 determines the current command value 409 by processing using the mover position calculation function 401 , the mover posture calculation function 402 , the mover posture control function 403 , and the coil current calculation function 404 . The integrated controller 301 sends the determined current command value 409 to the coil controller 302 .

[0133] The following will refer to Figure 6The control of the position and posture of the mover 101 is further described in detail. Figure 6 is a schematic diagram showing an example of a control block for controlling the position and posture of the mover 101 .

[0134] exist Figure 6 In the figure, the symbol P represents the position and posture (also called position and posture or state) of the mover 101, which has components (X, Y, Z, Wx, Wy, Wz). The symbol ref represents the target value of (X, Y, Z, Wx, Wy, Wz). The symbol err represents the deviation between the target value ref and the position and posture P.

[0135] The mover posture control function 403 is used to calculate the force T to be applied to the mover 101 to achieve the target value ref based on the level of the deviation err, the change of the deviation err, the accumulated value of the deviation err, etc. The coil current calculation function 404 is used to calculate the coil current I to be applied to the coils 202, 207 and 208 to apply the force T to the mover 101 based on the force T to be applied and the position and posture P. The coil current I calculated in this way is applied to the coils 202, 207 and 208, whereby the force T acts on the mover 101 and the position and posture P becomes the target value ref.

[0136] By configuring the control block in this manner, the position and posture P of the mover 101 can be controlled to a desired target value ref.

[0137] Now refer to Fig. 7A and Figure 7B The process of calculating the function 401 according to the mover position is described. Fig. 7A and Figure 7B is a schematic diagram showing a process of calculating a function according to a mover position.

[0138] exist Fig. 7A , the reference point Oe corresponds to the position reference of the stator 201 to which the linear encoder 204 is attached. In addition, the reference point Os corresponds to the position reference of the linear scale 104 attached to the mover 101. Fig. 7A There is shown a case where two movers 101a, 101b are conveyed as the mover 101 and three linear encoders 204a, 204b, 204c are arranged as the linear encoder 204. Note that the linear scale 104 is attached to the same position of each of the movers 101a and 101b in the X direction.

[0139] For example, a single linear encoder 204c and Fig. 7AThe linear scale 104 of the mover 101b shown in FIG. faces. The linear encoder 204c reads the linear scale 104 of the mover 101b and outputs the distance Pc. In addition, the position of the linear encoder 204c on the X-axis with the reference point Oe as the origin is Sc. Therefore, the position Pos(101b) of the mover 101b can be calculated by the following equation (1).

[0140] Pos(101b)=Sc-Pc...Equation (1)

[0141] For example, two linear encoders 204a and 204b are connected to Fig. 7A The linear scale 104 of the mover 101a shown faces. The linear encoder 204a reads the linear scale 104 of the mover 101a and outputs the distance Pa. In addition, the position of the linear encoder 204a on the X-axis with the reference point Oe as the origin is Sa. Therefore, the position Pos(101a) of the mover 101a on the X-axis based on the output of the linear encoder 204a can be calculated by the following equation (2).

[0142] Pos(101a)=Sa-Pa…Equation (2)

[0143] In addition, the linear encoder 204b reads the linear scale 104 of the mover 101a and outputs the distance Pb. In addition, the position of the linear encoder 204b on the X-axis with the reference point Oe as the origin is Sb. Therefore, the position Pos(101a)' of the mover 101a on the X-axis based on the output of the linear encoder 204b can be calculated by the following equation (3).

[0144] Pos(101a)'=Sb-Pb...Equation (3)

[0145] Here, since the respective positions of the linear encoders 204a and 204b are accurately measured in advance, the difference between the two values ​​Pos(101a) and Pos(101a)' is sufficiently small. When the position difference of the mover 101 on the X-axis based on the outputs of the two linear encoders 204 is sufficiently small in this way, it can be determined that the two linear encoders 204 are observing the linear scale 104 of the same mover 101.

[0146] Note that, when a plurality of linear encoders 204 face the same mover 101 , the position of the observed mover 101 can be uniquely determined by calculating an average value of positions based on outputs of the plurality of linear encoders 204 .

[0147] In addition, the mover 101 can rotate about the Z axis by a rotation amount Wz. Figure 7B A case where the position of the mover 101 needs to be corrected using the displacement of the rotation amount Wz will be described.

[0148] Figure 7B The case where the linear scale 104 is attached to one side surface of the mover 101b' in the Y direction is shown. Position Os is the origin of the linear scale 104, and position Oc is the origin of the mover 101b'. When the distance from the center Oc of the mover 101 to the linear scale 104 is Lx, a more accurate position of the mover 101b' can be obtained by calculating the position Pos(101b') of the mover 101b' using the following equation (1b).

[0149] Pos(101b')=Sc-Pc-Wz*Lx+Wy*Lz…Equation (1b)

[0150] As described above, the mover position calculation function 401 is used to calculate and determine the position X of the mover 101 in the X direction as the mover position information based on the output of the linear encoder 204 .

[0151] Next, we will refer to Figure 8 , Fig. 9A and Fig. 9B The processing performed by using the mover posture calculation function 402 is described.

[0152] Figure 8 FIG. 2 shows a case where the mover 101c is transported as the mover 101 and Y sensors 205a and 205b are arranged as the Y sensors 205. The two Y sensors 205a and 205b are connected to Figure 8 The Y target 105 of the mover 101c shown faces the Z axis. The rotation amount Wz of the mover 101c around the Z axis is calculated by the following equation (4), where the relative distance values ​​output by the two Y sensors 205a and 205b are Ya and Yb respectively, and the interval between the Y sensors 205a and 205b is Ly.

[0153] Wz=(Ya-Yb) / Ly…Equation (4)

[0154] Note that for a specific position of the mover 101, there may be more than three Y sensors 205 facing the Y target 105. In this case, the inclination of the Y target 105 (ie, the rotation amount Wz around the Z axis) can be calculated by using the least square method or the like.

[0155] also, Fig. 9A and Fig. 9B FIG. 2 shows a case where a mover 101d is transported as the mover 101, and Z sensors 206a, 206b, and 206c are arranged as the Z sensor 206. The three Z sensors 206a, 206b, and 206c are connected to Fig. 9A and Fig. 9BThe Z target 106 of the mover 101d shown faces. Here, the values ​​of the relative distances output by the three Z sensors 206a, 206b and 206c are Za, Zb and Zc, respectively. In addition, the distance between the sensors in the X direction (i.e., the distance between the Z sensors 206a and 206b) is Lz1. In addition, the distance between the sensors in the Y direction (i.e., the distance between the Z sensors 206a and 206c) is Lz2. Then, the rotation amount Wy around the Y axis and the rotation amount Wx around the X axis can be calculated by the following equations (5a) and (5b), respectively.

[0156] Wy=(Zb-Za) / Lz1...Equation (5a)

[0157] Wx=(Zc-Za) / Lz2…Equation (5b)

[0158] As described above, the mover posture calculation function 402 can be used to calculate the rotation amounts Wx, Wy, and Wz around the respective axes as the posture information of the mover 101 .

[0159] In addition, the position Y of the mover 101 in the Y direction and the position Z of the mover 101 in the Z direction may be calculated as the posture information of the mover 101 as follows using the mover posture calculation function 402 .

[0160] First, refer to Figure 8 Describe the calculation of the position Y of the mover 101 in the Y direction. Figure 8 , the two Y sensors 205 faced by the mover 101c are Y sensors 205a and 205b, respectively. In addition, the measurement values ​​of the Y sensors 205a and 205b are Ya and Yb, respectively. In addition, the midpoint of the position of the Y sensor 205a and the position of the Y sensor 205b is represented as Oe'. In addition, the position of the mover 101c obtained by equations (1) to (3) is represented as Os', and the distance from Oe' to Os' is represented as dX'. At this time, the position Y of the mover 101c in the Y direction can be calculated by approximating it using the following equation (6).

[0161] Y=(Ya+Yb) / 2-Wz*dX'...Equation (6)

[0162] Next, we will refer to Fig. 9A and Fig. 9BThe calculation of the position Z of the mover 101 in the Z direction is described. The three Z sensors 206 faced by the mover 101d are Z sensors 206a, 206b and 206c, respectively. In addition, the measurement values ​​of the Z sensors 206a, 206b and 206c are Za, Zb and Zc, respectively. In addition, the X coordinate of the Z sensor 206a and the X coordinate of the Z sensor 206c are the same. In addition, the position X of the Z sensor 206a and the Z sensor 206c is represented as Oe". In addition, the distance from Oe" to the center Os" of the mover 101 is represented as dX". At this time, the position Z of the mover 101 in the Z direction can be calculated by approximating the calculation using the following equation (7).

[0163] Z=(Za+Zb) / 2+Wy*dX”…Equation (7)

[0164] Note that when the rotation amounts of Wz and Wy are large for both position Y and position Z, calculation can be performed with higher approximation accuracy.

[0165] In this way, the integrated controller 301 functions as an acquisition unit that acquires the position and attitude (X, Y, Z, Wx, Wy, Wz) of the mover 101 by performing processing using the mover position calculation function 401 and the mover attitude calculation function 402 .

[0166] Next, a method for determining the current values ​​to be applied to the coils 202, 207, and 208 for applying the desired force T to the mover 101 will be described. As described above, the force T applied to the mover 101 includes Tx, Ty, and Tz as three-axis components of force, and Twx, Twy, and Twz as three-axis components of torque. The integrated controller 301 that uses the coil current calculation function 404 for processing can determine the current values ​​to be applied to the coils 202, 207, and 208 according to the method for determining the current values ​​described below.

[0167] Note that for some cases, among the force components and torque components applied by coils 202, 207, and 208, the influence of one force component or torque component on other force components or torque components can be sufficiently ignored. Specifically, the force and torque applied by coils 202, 207, and 208 are formed by the force in the X direction applied by coil 207, the force in the Y direction and the torque in the Wz direction applied by coil 208, and the force in the Z direction, the torque in the Wx direction, and the torque in the Wy direction applied by coil 202. The force in the Y direction and the torque in the Wz direction applied by coil 208 act in the horizontal direction. The force in the Z direction, the torque in the Wx direction, and the torque in the Wy direction applied by coil 202 act in the floating direction. When the influence can be sufficiently ignored, the current value can be calculated by considering only the force in the X direction of coil 207, the force in the Y direction and the torque in the Wz direction of coil 208, and the force in the Z direction, the torque in the Wx direction, and the torque in the Wy direction of coil 202. The following describes a case where the influence can be sufficiently ignored.

[0168] First, refer to Figures 10 to 13 The current applied to each coil 202 in order to apply the force component Tz in the Z direction, the torque component Twx in the Wx direction, and the torque component Twy in the Wy direction to the mover 101 is described.

[0169] Fig.10 is a schematic diagram showing the relationship between the force acting on the yoke plate 103 attached to the mover 101 , and the force component Tz and torque components Twx, Twy acting on the mover 101 .

[0170] exist Fig.10 , Fzj represents the force applied to the yoke plate 103 by the j-th coil 202. Note that j is an integer satisfying 1≤j≤N, where the number N of installed coils 202 is an integer greater than or equal to 2. The torque applied by each force Fzj contributes to the torque components Twx and Twy. The torque applied by each force Fzj is determined according to the force Fzj and the distance between the point of application and the center Oc of the mover 101.

[0171] Fig.11 601 schematically shows a thrust constant curve 601 in the Z direction. The thrust constant curve 601 schematically shows an attractive force acting on the yoke plate 103 when a unit current is applied to the floating coil 202 facing the yoke plate 103. The magnitude of the attractive force changes continuously with respect to the movement in the X direction.

[0172] Now refer to Fig. 12A and Fig. 12B An example of the configuration of the coil 202 is described. Fig. 12A and Fig. 12Bis a schematic diagram showing the coil 202 . Fig. 12A is a diagram of the coil 202 viewed from the Z-axis direction, Fig. 12B 2 is a diagram of the coil 202 viewed from the X-axis direction.

[0173] like Fig. 12A and Fig. 12B As shown, the coil 202 has a winding 210 and a core 211. A current is applied to the winding 210 by a current controller 313. In response to the application of the current to the winding 210, a magnetic circuit 212 as a magnetic flux path is formed. Due to the magnetic flux in the magnetic circuit 212 formed in this way, an attractive force is generated between the coil 202 and the yoke plate 103.

[0174] Reference FIG. 12A to FIG. 13 The relationship between the current applied to the coil 202 and the magnitude of the attractive force acting between the coil 202 and the yoke plate 103 is described in more detail. Fig.13 2 is a graph schematically showing the relationship between the current applied to the coil 202 and the magnitude of the attractive force acting between the coil 202 and the yoke plate 103. Fig.13 In the graph shown, the horizontal axis represents the amount of current I applied to the coil 202 , and the vertical axis represents the magnitude of the attractive force Fz acting between the coil 202 and the yoke plate 103 . Fig.13 The graph shown in FIG. 6 shows an attraction force curve 604 representing the magnitude of the attraction force Fz relative to the amount of current I.

[0175] When the distance between the coil 202 and the yoke plate 103 in the Z direction is constant, the attraction force Fz is approximately proportional to the square of the current amount I. Fig.13 In the graph shown, F0 represents the average magnitude of the force acting on each coil 202 required to compensate for the gravity mg acting on the mover 101 .

[0176] Here, the values ​​and signs are set as follows.

[0177] The bottom area of ​​the core 211 of a coil 202: S = 0.01 [m 2 ]

[0178] The part of the mass of the mover 101 compensated by one coil 202: F0 = 100 [N] (about 10 [kg])

[0179] Vacuum magnetic permeability: μ0 = 4π × 10 -7

[0180] Air gap: gap[m]

[0181] Number of turns of the winding 210 of the coil 202: n [turns]

[0182] Coil current: I[A]

[0183] Magnetic flux density between the core 211 and the yoke plate 103: B[T]

[0184] If the magnetic permeabilities of the core 211 and the yoke plate 103 are sufficiently large relative to the magnetic permeability of vacuum, Fz and B can be approximately calculated by the following equations (8a) and (8b), respectively.

[0185] Fz=S*B 2 / (2*μ0)…Equation (8a)

[0186] B=N*I*μ0 / (2*gap)…Equation (8b)

[0187] Here, when the number of turns is 500 [turns] and the coil current I0 is 1.0 [A], the air gap "gap" can be calculated as 0.006266 [m] by equation (8a) and equation (8b).

[0188] Here, in the attraction force curve 604, the point where I=I0 leads to Fz=F0 is Q. The portion around this point Q will be described.

[0189] If the "gap" changes from 0.006266 [m] in the expansion direction by 0.25 [mm], a larger magnetomotive force needs to be generated in the coil 202 in order to compensate for the expanded "gap". If the "gap" is 0.006516 m, and equations (8a) and (8b) are calculated to produce the same Fz, the coil current I is calculated to be 1.0399 [A]. Due to this level of current value, the change in the current value of the coil current during the conveying of the mover 101 is sufficiently small compared to the coil current I0 used as a reference.

[0190] Therefore, around point Q, the current dI applied in addition to the current I0 and the magnitude of the force dF additionally generated in the Z-axis direction by applying the current dI satisfy the relationship expressed in the following equation (8c). Note that the relationship expressed in equation (8c) is not satisfied around the origin O.

[0191] dF∝dI…Equation (8c)

[0192] Here, the ratio of dF to dI is defined by the following equation (8d).

[0193] dF / dI=Ez…Equation (8d)

[0194] exist Fig.11In the thrust constant curve 601 shown, Ez(j, P) is shown. Ez(j, P) has a ratio represented by equation (8d). That is, Ez(j, P) represents the ratio of the magnitude of the force dF additionally generated in the Z-axis direction to the current Id when the mover 101 is at the position and posture P and an additional current dI is applied to the current I0 applied to the j-th coil 202 on average.

[0195] Refer to the above representation Fig.10 , where j is an index for identifying the coil 202. Hereinafter, for the sake of simplicity of explanation, the additional force dFzj in the Z direction is simply expressed as Fzj, and the additional current dIj is expressed as Ij.

[0196] The additional force Fzj generated by the j-th coil 202 in the Z direction is expressed by the following equation (9a), where Ij represents the additional current applied to the j-th coil 202.

[0197] Fzj=Ez(j,P)*Ij…Equation (9a)

[0198] Furthermore, X(j, P) is defined as the relative position of the j-th coil 202 in the X direction when viewed from the origin Oc of the mover 101, and Y(j, P) is defined as the relative position of the j-th coil 202 in the Y direction when viewed from the origin Oc of the mover 101. Then, the force component Tz in the Z direction, the torque component Twx in the Wx direction, and the torque component Twy in the Wy direction are expressed by the following equations (9b), (9c), and (9d), respectively.

[0199] Tz=Σ(Ez(j,P)*Ij)…Equation (9b)

[0200] Twx=Σ(-Ez(j,P)*Y(j,P)*Ij)...Equation (9c)

[0201] Twy=Σ(Ez(j,P)*X(j,P)*Ij)…Equation (9d)

[0202] If a current Ij satisfying the above equations (9b), (9c) and (9d) is applied to each coil 202, desired force components and torque components (Tz, Twx, Twy) can be obtained.

[0203] Here, a torque contribution matrix M is defined. The torque contribution matrix M is a matrix that represents the magnitude of the contribution to each force component and torque component (Tz, Twx, Twy) when a unit current is applied to each of the first to jth coils 202 when the mover is in position and posture P. In this way, the torque contribution matrix M is used, and the current value applied to each coil 202 is determined using information related to the contribution to each of the force component and the torque component (Tz, Twx, Twy) caused by the unit current applied to each coil 202.

[0204] In the torque contribution matrix M, the first row is associated with the Z direction, the second row is associated with the Wx direction, and the third row is associated with the Wy direction. Then, the corresponding elements M(1, j), M(2, j), and M(3, j) of the first row of the jth column, the second row of the jth column, and the third row of the jth column of the torque contribution matrix M are represented by the following equations (10a), (10b), and (10c), respectively. The torque contribution matrix M is a matrix of three rows by N columns. Note that the rows of the torque contribution matrix M are linearly independent of each other.

[0205] M(2, j) = -Ez(j, P) * Y(j, P) ... Equation (10b)

[0206] M(3,j)=Ez(j,P)*X(j,P)…Equation (10c)

[0207] On the other hand, a column vector having current amounts I1 to IN to be applied to the first to Nth coils 202 as elements is introduced as the coil current vector Is. The coil current vector Is is an Nth row and first column column vector represented by the following equation (10d).

[0208] Is=Tr(I1, I2, ..., Ij, ..., IN) ... Equation (10d)

[0209] Here, the torque vector Tq is defined by the following equation (11).

[0210] Tq=Tr(Tz,Twx,Twy)…Equation (11)

[0211] Then, the following equation (12) is obtained from equations (9b) to (9d), (10a) to (10d), and (11).

[0212] Tq=M*Is…Equation (12)

[0213] Here, a pseudo current vector K is introduced. The pseudo current vector K is a column vector of three rows by one column, and when Tr(M) is the transposed matrix of the torque contribution matrix M, the pseudo current vector is a vector satisfying the following equation (13).

[0214] Tr(M)*K=Is…Equation (13)

[0215] Since a larger current value can be applied to the coil 202 that contributes more to Tz, Twx, and Twy by defining the coil current vector Is as the vector represented by equation (13), the current can be applied efficiently.

[0216] Equation (12) can be transformed into the following equation (14) by using equation (13).

[0217] Tq=M*Tr(M)*K…Equation (14)

[0218] In equation (14), M*Tr(M) is the product of a matrix of three rows by N columns and a matrix of N rows by three columns, and is therefore a square matrix of three rows by three columns. In addition, the rows of the torque contribution matrix M are linearly independent of each other. Therefore, the inverse matrix can be obtained from M*Tr(M) in any case. Therefore, equation (14) can be transformed into the following equation (15).

[0219] K=Inv(M*Tr(M))*Tq…Equation (15)

[0220] The coil current vector Is expressed by the following equation (16) is finally obtained from equation (13) and equation (15). In this way, the coil current vector Is can be uniquely obtained.

[0221] Tr(M)*Inv(M*Tr(M))*Tq=Is…Equation (16)

[0222] By calculating the coil current vector Is as described above, it is possible to determine the current to be applied to each coil 202. Therefore, since the force component Tz in the Z direction, the torque component Twx in the Wx direction, and the torque component Twy in the Wy direction can be independently applied to the mover 101, the posture of the mover 101 can be stabilized in the Z direction, the Wx direction, and the Wy direction.

[0223] Next, we will refer to Fig.14 and Fig.15 The current applied to the coil 208 in order to apply the force component Ty in the Y direction and the torque component Twz in the Wz direction to the mover 101 is described. The force component Ty and the torque component Twz act in the horizontal direction, respectively. Fig.14 1 is a schematic diagram of the mover 101 when viewed from top to bottom along the Z direction. Fig.15 605 is a graph schematically showing an attraction curve 605 in the Y direction. Fig.15 In the graph shown in , the horizontal axis represents the current applied to the coil 208 , and the vertical axis represents the force acting on the mover 101 .

[0224] Note that, to simplify the explanation, Fig.14The case where four coils 208aR, 208bR, 208aL and 208bL are mounted on the stator 201 as the coil 208 facing the mover 101 is shown. In addition, the coil 208aL and the coil 208aR are paired and operated as one coil 208a. In addition, the coil 208bL and the coil 208bR are paired and operated as one coil 208b. In this way, the j-th pair of coils 208jR and the coil 208jL are paired and operated as one coil 208j.

[0225] Fig.15 The attraction curve 605 shown in represents the relationship between the levels of the currents IL and IR applied to the j-th pair of coils 208j and the magnitude of the force Fy acting on the mover 101. No repulsive force acts between the coils 208 and the yoke plate 103, but only an attraction force acts. Therefore, when a force is applied to the mover 101 in the Y+ direction, a current is applied to the coil 208jR on the R side within the range 605a of the attraction curve 605. In addition, when a force is applied to the mover 101 in the Y- direction, a current is applied to the coil 208jL on the L side within the range 605b of the attraction curve 605.

[0226] For example, when the force Fa in the Y+ direction is applied, the current Ia may be applied to the coil 208jR on the R side. Also, for example, when the force Fb in the Y- direction is applied, the current Ib may be applied to the coil 208jL on the L side.

[0227] The index j is defined as an index for identifying a pair of coils 208. In addition, X(j, P) is defined as the relative position of the j-th pair of coils 208 in the X direction when viewed from the origin Oc of the mover 101. In addition, the force in the Y direction applied by the j-th pair of coils 208 is represented as Fyj. Then, the force component Ty in the Y direction corresponding to the horizontal direction and the torque component Twz in the Wz direction are represented by the following equations (17a) and (17b), respectively.

[0228] Ty=ΣFyj…Equation (17a)

[0229] Twz=Σ(-Fyj*X(j,P))…Equation (17b)

[0230] Here, the Y-direction force vector Fys having the forces Fy1, Fy2, ..., FyN in the Y-direction applied by the first to N-th coils 208 as elements is defined by the following equation (17c).

[0231] Fys = Tr (Fy1, Fy2, ..., Fyj, ..., FyN) ... Equation (17c)

[0232] In addition, the torque vector Tq is defined by the following equation (17d).

[0233] Tq=Tr(Ty,Twz)…Equation (17d)

[0234] In the torque contribution matrix M, the first row is associated with the Y direction and the second row is associated with the Wz direction. Then, the corresponding elements M(1, j) and M(2, j) of the first row, j column and the second row, j column of the torque contribution matrix M are represented by the following equations (17e) and (17f), respectively.

[0235] M(1, j) = 1 ... equation (17e)

[0236] M(2, j) = X(j, P) ... Equation (17f)

[0237] In order to calculate the current to be applied to the coil 208, first, the Y-direction force vector Fys satisfying the following equation (17g) is determined.

[0238] Tq=M*Fys…Equation (17g)

[0239] Since Tq is a vector of two rows and one column and M is a matrix of two rows and N columns, there are countless combinations of elements of the Y-direction force vector Fys that satisfy equation (17g), but the combination can be uniquely calculated according to the following method.

[0240] Here, a two-row by one-column pseudo current vector K is introduced. The pseudo current vector K is a vector satisfying the following equation (17h), where Tr(M) is the transposed matrix of the torque contribution matrix M.

[0241] Tr(M)*K=Fys…Equation (17h)

[0242] Equation (17g) can be transformed into the following equation (17i) by using equation (17h).

[0243] Tq=M*Tr(M)*K…Equation (17i)

[0244] The term M*Tr(M) is the product of a matrix of two rows by N columns and a matrix of N rows by two columns, and is therefore a square matrix of two rows by two columns. In addition, the rows of the torque contribution matrix M are linearly independent of each other. Therefore, the inverse matrix can be obtained from M*Tr(M) in any case. Therefore, equation (17i) can be transformed into the following equation (17j).

[0245] K=Inv(M*Tr(M))*Tq…Equation (17j)

[0246] The Y-direction force vector Fys expressed by the following equation (17k) is finally obtained from equations (17h) and (17j). Therefore, the Y-direction force vector Fys can be uniquely calculated.

[0247] Tr(M)*Inv(M*Tr(M))*Tq=Fys…Equation (17k)

[0248] After the Y-direction force vector Fys is derived, the current to be applied to each coil 208 can be calculated by performing an inverse operation from the pre-calculated or measured attraction force curve 605 .

[0249] As described above, it is possible to determine the current to be applied to each coil 208. Therefore, since the force component Ty in the Y direction and the torque component Twz in the Wz direction can be independently applied to the mover 101, the posture of the mover 101 can be stabilized in the Y direction and the Wz direction. For example, a current can be applied to the coil 208 so that the torque in the Wz direction is always 0.

[0250] Next, a control method of the coil 207 that applies a thrust in the X direction (i.e., the conveying direction) to the mover 101 will be described. The conveying system 1 according to the present embodiment is a conveying system having an induction linear motor. The coil 207 generates an electromagnetic force between the coil 207 and the conductive plate 107 of the mover 101, and applies a thrust in the X direction (i.e., a force component Tx in the X direction) to the mover 101. The conductive plate 107 is not particularly limited, and a plate with relatively small resistance, such as an aluminum plate, is used.

[0251] When current is applied, each coil 207 generates a moving magnetic field in the X direction (i.e., the conveying direction) to generate an electromagnetic force between the coil 207 and the conductive plate 107. Thus, each coil 207 causes the mover 101 to generate a force component Tx as a thrust in the X direction (i.e., the conveying direction). When the speed of the mover 101 is insufficient, the current to be applied to each coil 207 may be increased, or the current application timing of each coil 207 may be changed so that the speed of the moving magnetic field moves faster.

[0252] As described above, the integrated controller 301 determines and controls the current command value to be applied to each of the coils 202, 207, and 208. Therefore, the integrated controller 301 controls the conveyance of the mover 101 on the stator 201 in a non-contact manner while controlling the posture of the mover 101 being conveyed by the stator 201 in six axes. Note that all or part of the functions of the integrated controller 301 as a control device may be replaced by the coil controller 302 and other control devices.

[0253] Note that, although the case where the current of the coil 207 is controlled in the same manner as the currents of the coils 202 and 208 has been described in the present embodiment, the present embodiment is not limited thereto. For example, in a simpler configuration, an induction motor controller may be connected to the integrated controller 301, and the current of each coil 207 may be controlled by the induction motor controller, thereby generating a constant moving magnetic field.

[0254] In the conventional conveying device disclosed in Japanese Patent No. 6538710, for example, it is difficult to change the overall posture, such as tilting the mover. In addition, in the conventional conveying device, since the posture of the mover cannot be controlled as a whole, for example, when the mover is deformed, contradictory instructions may be issued, one of which instructs a specific coil to apply an upward force and the other instructs another coil to apply a downward force. Such contradictory instructions cause unstable conveying of the mover.

[0255] In addition, in the conventional conveying device, since the posture is not controlled by considering the whole mover, the height or deformation of the mover causes interference as the mover moves, making the posture of the mover unstable. In addition, especially when the coils for floating the mover are discretely arranged, the conventional conveying device has the following problems: for a specific position of the mover, the number of coils involved in the control changes, and the effective gain of the control changes, resulting in unstable conveying of the mover. In addition, in the conventional conveying device, since a current greater than that required for control is applied, energy loss is large, and the coil is heated beyond the demand, so there is a problem such as the need for a cooling system.

[0256] In contrast, in the present embodiment, since force components and torque components (Tx, Ty, Tz, Twx, Twy, Twz) on six axes can be applied to the mover 101, the posture of the mover 101 can be controlled as a whole. Therefore, in the present embodiment, the posture of the mover 101 can be stabilized, and current can be applied to each coil 202, 207, and 208 within a desired range.

[0257] As described above, according to this embodiment, force components and torque components (Tx, Ty, Tz, Twx, Twy, Twz) on six axes can be independently applied to the mover 101. Therefore, according to this embodiment, the mover 101 can be stably transported in the X direction in a non-contact manner while the posture of the mover 101 is stabilized in the Y direction, the Z direction, the Wx direction, the Wy direction, and the Wz direction.

[0258] Second embodiment

[0259] The following will refer to Figures 16 to 17C A second embodiment of the present invention is described. Note that the same components as those in the above-described first embodiment are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0260] First, refer to Fig.16 The configuration of the transport system 1 according to the present embodiment is described. Fig.16 is a schematic diagram showing the configuration of the conveying system 1 including the mover 101 and the stator 201 according to the present embodiment. Fig.16 1 and 2 are diagrams showing the mover 101 and the stator 201 when viewed from the X direction.

[0261] The conveying system 1 according to the present embodiment is different from the configuration of the first embodiment in the configuration for applying the force component Tx in the X direction, the force component Ty in the Y direction, and the torque component Twz in the Wz direction to the mover 101 .

[0262] like Fig.16 As shown, the mover 101 according to the present embodiment has a permanent magnet array 109 including a plurality of permanent magnets, replacing the yoke plate 103 on the side surface of the mover 101 and the conductive plate 107 on the upper surface of the mover 101 used in the first embodiment. In addition, the stator 201 according to the present embodiment has a coil 209, replacing the coils 207 and 208 used in the first embodiment.

[0263] The permanent magnet array 109 is installed such that a plurality of permanent magnets are arranged in the X direction on one of the side surfaces on the R side and the L side of the mover 101 . Fig.16 As an example, the permanent magnet array 109 is shown as being installed on the side surface of the L side of the mover 101. The plurality of permanent magnets included in the permanent magnet array 109 are installed so that the polarities of the outer magnetic poles facing the side of the stator 201 side are alternately different, and the S-pole polarity and the N-pole polarity are alternately arranged on the outside along the X direction.

[0264] The plurality of coils 209 are attached and mounted on the stator 201 in the X direction so as to face the permanent magnet array 109 mounted on the side surface of the mover 101 in the Y direction. Specifically, the plurality of coils 209 are arranged and mounted in the X direction so as to face the permanent magnet array 109 mounted on the side surface of one of the R side and the L side of the mover 101 from the side in the Y direction.

[0265] In the same manner as in the case of the coils 202 , 207 , and 208 described in the first embodiment, a current is applied to each coil 209 by the control system 3 including the integrated controller 301 , the coil controller 302 , and the like.

[0266] In this embodiment, force is applied to the permanent magnet array 109 through the coil 209, thereby independently applying a force component Tx in the X direction, a force component Ty in the Y direction, and a torque component Twz in the Wz direction to the mover 101. The conveying system 1 according to this embodiment is a conveying system having a synchronous linear motor, which generates an electromagnetic force between the coil 209 of the stator 201 and the permanent magnet array 109 of the mover 101, and applies a thrust in the X direction to the mover 101. Further, the conveying system 1 according to this embodiment is a magnetic levitation conveying system that floats the mover 101 and conveys the mover 101 in a non-contact manner.

[0267] The following will refer to 17A to 17C A method of independently applying the force component Tx in the X direction, the force component Ty in the Y direction, and the torque component Twz in the Wz direction to the mover 101 is described.

[0268] 17A to 17C 4 is a schematic diagram showing a method of independently applying force components Tx and Ty and torque component Twz in the Wz direction to the mover 101 by using the coil 209 and the permanent magnet array 109. The coil current calculation function 404 is used to determine the current command value to be applied to the coil 209 in order to independently apply the force components Tx and Ty and the torque component Twz to the permanent magnet array 109 of the mover 101 according to the following method. Note that in order to simplify the description, FIG. 17A to FIG. 17C In FIG. 1 , the permanent magnet array 109 includes five permanent magnets. FIG. 17A to FIG. 17C The laterally arranged dashed lines indicate the corresponding positions in the X direction.

[0269] In addition, in the following description, the q-axis and the d-axis are appropriately used as coordinate axes. The q-axis and the d-axis are expressions generally used in the vector control theory of the synchronous motor. The q-axis is an axis along the direction in which the permanent magnet array 109 extends. The d-axis is an axis orthogonal to the q-axis and along the direction in which the surface of the permanent magnet included in the permanent magnet array 109 faces. In the present embodiment, the q-axis corresponds to the X-axis, and the d-axis corresponds to the Y-axis.

[0270] Here, the magnitude of the force per unit current acting on the j-th coil 209 in the q-axis direction (X direction) and the d-axis direction (Y direction) is represented as Eq(j, P) and Ed(j, P), respectively, where P is defined as the position and posture of the mover 101, and j is defined as the number of one of the coils 209 arranged in a row. In addition, the level of the current in the j-th coil 209 is represented as I(j).

[0271] Fig.17A The q-axis (X-axis) is taken horizontally, the Z-axis is taken vertically, and nine coils 209 facing the permanent magnet array 109 are singled out for explanation, and the diagram is viewed from the Y+ direction. Fig. 17B Observed from the Z direction Fig.17A The coils 209 are given numbers j of 1 to 9 in the order in which they are arranged in the X direction, so that each coil 209 is identified by a representation such as coil 209 (1) in the following description.

[0272] like Fig.17A and Fig. 17B As shown, the coils 209 are arranged at a pitch of a distance L. On the other hand, the permanent magnets included in the permanent magnet array 109 of the mover 101 are arranged at a pitch of a distance 3 / 2*L.

[0273] Fig. 17Cis a schematic diagram showing the effect of applying a unit current to Fig.17A and Fig. 17B Graph showing the magnitudes of the force Eq in the q-axis direction (X direction) and the force Ed in the d-axis direction (Y direction) generated when each coil 209 is shown in FIG.

[0274] To simplify the explanation, 17A to 17C In the figure, the origin Om of the position of the coil 209 in the X direction is defined as the midpoint of the coil 209 (5), and the center of the permanent magnet array 109 in the X direction is defined as the origin Oc of the mover 101. Therefore, Fig. 17C The case where Os and Om are consistent, that is, the case where X=0 is shown.

[0275] At this time, for example, the magnitude of the force acting on the coil 209 ( 4 ) per unit current is Eq(4, 0) in the q-axis direction (X direction) and is Ed(4, 0) in the d-axis direction (Y direction).

[0276] The force component Tx in the X direction, the force component Ty in the Y direction, and the torque component Twz in the Wz direction acting on the permanent magnet array 109 of the mover 101 are expressed by the following equations (20a), (20b), and (20c), respectively.

[0277] Tx=ΣEq(j,P)*Ij...Equation (20a)

[0278] Ty=ΣEd(j,P)*Ij…Equation (20b)

[0279] Twz=Σ{-Ed(j,P)*X(j,P)*Ij}…Equation (20c)

[0280] After this calculation, in the same manner as the first embodiment, by defining and calculating the torque contribution matrix M, a coil current vector Is can be obtained, which represents the current to be applied to each coil 209 in order to apply the desired Tx, Ty and Twz to the mover 101.

[0281] In the torque contribution matrix M defined in this embodiment, the first row is associated with the X direction, the second row is associated with the Y direction, and the third row is associated with the Wz direction. Then, the corresponding elements M(1, j) to M(3, j) of the first row, j column, second row, j column, and third row, j column of the torque contribution matrix M defined in this embodiment are represented by the following equations (20d) to (20f), respectively. The torque contribution matrix M is a matrix of three rows by N columns. Note that the rows of the torque contribution matrix M are linearly independent of each other.

[0282] M(1, j) = Eq(j, P) Equation (20d)

[0283] M(2, j) = Ed(j, P) ... Equation (20e)

[0284] M(3, j) = -Ed(j, P)*X(j, P) ... Equation (20f)

[0285] Furthermore, in this embodiment, a column vector having current amounts I1 to IN to be applied to the first to Nth coils 209 as elements is introduced as the coil current vector Is. The coil current vector Is is a column vector of N rows by one column represented by the following equation (20g).

[0286] Is = Tr (I1, I2, ..., Ij, ..., IN) ... Equation (20g)

[0287] Furthermore, in the present embodiment, the torque vector Tq is defined by the following equation (20h).

[0288] Tq=Tr(Tx,Ty,Twz)…Equation (20h)

[0289] Thus, the following equation (20i) is obtained.

[0290] Tq=M*Is…Equation (20i)

[0291] In this embodiment, calculation is also performed in the same manner as in the first embodiment using a pseudo current vector K. In this embodiment, a three-row by one-column pseudo current vector K is introduced. The pseudo current vector K introduced in this embodiment satisfies the following equation (20j).

[0292] Tr(M)*K=Is…Equation (20j)

[0293] Equation (20i) can be transformed into the following equation (20k) by using equation (20j).

[0294] Tq=M*Tr(M)*K…Equation (20k)

[0295] In equation (20k), M*Tr(M) is the product of a matrix of three rows by N columns and a matrix of N rows by three columns, and is therefore a square matrix of three rows by three columns. In addition, the rows of the torque contribution matrix M are linearly independent of each other. Therefore, the inverse matrix can be obtained from M*Tr(M) in any case. Therefore, equation (20k) can be transformed into the following equation (20l).

[0296] K=Inv(M*Tr(M))*Tq…Equation (201)

[0297] The coil current vector Is expressed by the following equation (20m) is finally obtained from equation (20j) and equation (201). In this way, the coil current vector Is can be uniquely obtained.

[0298] Tr(M)*Inv(M*Tr(M))*Tq=Is…Equation (20m)

[0299] By calculating the coil current vector Is as described above, it is possible to determine the current to be applied to each coil 209. Therefore, since the force component Tx in the X direction, the force component Ty in the Y direction, and the torque component Twz in the Wz direction can be independently applied to the mover 101, the mover 101 can be transported in the X direction while stabilizing the posture of the mover 101 in the Y direction and the Wz direction.

[0300] Note that in this embodiment, by applying a current to each coil 202 in the same manner as in the first embodiment, it is also possible to independently apply a force component Tz in the Z direction, a torque component Twx in the Wx direction, and a torque component Twy in the Wy direction to the mover 101. Therefore, in this embodiment, by using the coil 202 and the coil 209 in combination, it is also possible to apply six-axis components (Tx, Ty, Tz, Twx, Twy, Twz) of the force T to the mover 101.

[0301] Third embodiment

[0302] The following will refer to Figures 18 to 19B A third embodiment of the present invention is described. Note that the same components as those in the above-described first and second embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0303] First, refer to Fig.18 The configuration of the transport system 1 according to the present embodiment is described. Fig.18 is a schematic diagram showing the configuration of the conveying system 1 including the mover 101 and the stator 201 according to the present embodiment. Fig.18 1 and 2 are diagrams showing the mover 101 and the stator 201 when viewed from the X direction.

[0304] The conveying system 1 according to the present embodiment differs from the configuration of the first embodiment in the configuration for applying the force component Tx in the X direction, the force component Tz in the Z direction, the torque component Twx in the Wx direction, the torque component Twy in the Wy direction, and the torque component Twz in the Wz direction to the mover 101 .

[0305] like Fig.18 As shown, the mover 101 according to the present embodiment has a permanent magnet array 109 including a plurality of permanent magnets, replacing the yoke plate 103 on the upper surface of the mover 101 and the conductive plate 107 on the upper surface of the mover 101 used in the first embodiment. In addition, the stator 201 according to the present embodiment has a coil 209, replacing the coils 202 and 207 used in the first embodiment.

[0306] The permanent magnet array 109 is installed in two rows so that the plurality of permanent magnets are arranged along the X direction at the respective ends of the R side and the L side on the upper surface of the mover 101. The plurality of permanent magnets included in the permanent magnet array 109 are installed so that the polarities of the outer magnetic poles toward the top on the stator 201 side are alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outer side along the X direction.

[0307] The plurality of coils 209 are attached and mounted on the stator 201 in the X direction in such a manner that they can face the two rows of permanent magnet arrays 109 mounted on the upper surface of the mover 101 in the Z direction. Specifically, the plurality of coils 209 are arranged and mounted in two rows parallel to the X direction in such a manner that they can face the two rows of permanent magnet arrays 109 mounted on the upper surface of the mover 101 in the Z direction from the top.

[0308] In the same manner as in the case of the coils 202 , 207 , and 208 described in the first embodiment, a current is applied to each coil 209 by the control system 3 including the integrated controller 301 , the coil controller 302 , and the like.

[0309] The coil 209 is used as a coil for floating and conveying the mover 101. As such a coil 209, a coil with a core can be used. By using a coil with a core as the coil 209, since a large attraction force acts between the coil 209 and the permanent magnet array 109 when no current is applied to the coil 209, the amount of current applied to the coil 209 can be significantly reduced.

[0310] Note that the relationship between the coil 209 and the permanent magnet array 109 in this embodiment is the same as the relationship between the coil 209 and the permanent magnet array 109 described in the second embodiment, except for their respective mounting positions. Figures 16 to 17B In the second embodiment shown in FIG. 1 , the q axis corresponds to the X axis and the d axis corresponds to the Y axis, while in Fig.18 and Fig.19A In the present embodiment shown in FIG. , the q-axis corresponds to the X-axis and the d-axis corresponds to the Z-axis.

[0311] In this embodiment, force is applied to the permanent magnet array 109 through the coil 209, thereby independently applying a force component Tx in the X direction, a force component Tz in the Z direction, a torque component Twx in the Wx direction, a torque component Twy in the Wy direction, and a torque component Twz in the Wz direction to the mover 101. In the same manner as the second embodiment, the conveying system 1 of this embodiment is a conveying system having a synchronous linear motor, which generates an electromagnetic force between the coil 209 of the stator 201 and the permanent magnet array 109 of the mover 101, and applies a thrust in the X direction to the mover 101.

[0312] The following will refer to Fig.19Aand Fig.19B A method of independently applying the force component Tx in the X direction, the force component Tz in the Z direction, the torque component Twx in the Wx direction, the torque component Twy in the Wy direction, and the torque component Twz in the Wz direction to the mover 101 is described. Fig.19A and Fig.19B 2 is a schematic diagram showing a method of independently applying force components Tx and Tz and torque components Twx, Twy and Twz to the mover 101 by using the coil 209 and the permanent magnet array 109. Fig.19A and Fig.19B The laterally arranged dot-dash lines indicate corresponding positions in the X direction. The coil current calculation function 404 is used to determine the current command value to be applied to the coil 209 in order to independently apply force components Tx and Tz and torque components Twx, Twy, and Twz to the permanent magnet array 109 of the mover 101 according to the following method.

[0313] Here, the magnitude of the force per unit current acting on the j-th coil 209 in the q-axis direction (X direction) and the d-axis direction (Z direction) is represented as Eq(j, P) and Ed(j, P), respectively, where P is defined as the position and posture of the mover 101, and j is defined as the number of one of the coils 209 arranged in a row. In addition, the level of the current in the j-th coil 209 is represented as I(j).

[0314] Fig.19A is a diagram of the stator 201 and the mover 101 when viewed from top to bottom along the Z direction. Note that for better visibility, Fig.19A The coils 209 are shown offset outwardly relative to the permanent magnet array 109. In this embodiment, as described above, the q-axis corresponds to the X-axis and the d-axis corresponds to the Z-axis.

[0315] Fig.19B A q-axis thrust constant curve 601 representing Eq(j, P) and a d-axis thrust constant curve 603 representing Ed(j, P) are shown. Eq(j, P) can be derived from the q-axis thrust constant curve 601, and Ed(j, P) can be derived from the d-axis thrust constant curve 603.

[0316] According to the following method, force and rotational direction torque (Tx, Tz, Twx, Twy, Twz) can be applied on five axes by using two rows of coils 209.

[0317] In the present embodiment, equations (20a), (20b) and (20c) in the second embodiment are expanded in consideration of the presence of two rows of coils 209.

[0318] When j is used as an index of the coils 209 on both the L side and the R side, the force component Tx in the X direction and the force component Tz in the Z direction acting on the permanent magnet array 109 of the mover 101 are respectively expressed by the following equations (21a) and (21b). Further, the torque component Twx in the Wx direction, the torque component Twy in the Wy direction, and the torque component Twz in the Wz direction acting on the permanent magnet array 109 of the mover 101 are respectively expressed by the following equations (21c), (21d), and (21e).

[0319] Tx=ΣEq(j,P)*Ij…Equation (21a)

[0320] Tz=ΣEd(j,P)*Ij...Equation (21b)

[0321] Twx=Σ{-Ed(j,P)*Y(j,P)*Ij}...Equation (21c)

[0322] Twy=ΣEd(j,P)*X(j,P)*Ij...Equation (21d)

[0323] Twz=ΣEq(j,P)*Y(j,P)*Ij...Equation (21e)

[0324] After this calculation, in the same manner as the first embodiment, by defining and calculating the torque contribution matrix M, the coil current vector Is can be obtained, which represents the current to be applied to each coil 209 in order to apply the desired Tx, Tz, Twx, Twy and Twz to the mover 101.

[0325] In the torque contribution matrix M defined in this embodiment, the first row is associated with the X direction, the second row is associated with the Z direction, the third row is associated with the Wx direction, the fourth row is associated with the Wy direction, and the fifth row is associated with the Wz direction.

[0326] Then, the corresponding elements M(1, j) to M(5, j) of the first row and j column, the second row and j column, the third row and j column, the fourth row and j column, and the fifth row and j column of the torque contribution matrix M defined in this embodiment are respectively expressed by the following equations (21f) to (21j).

[0327] The torque contribution matrix M is a five-row by N-column matrix. Note that the rows of the torque contribution matrix M are linearly independent of each other.

[0328] M(1, j) = Eq(j, P) ... Equation (21f)

[0329] M(2, j) = Ed(j, P) Equation (21g)

[0330] M(3, j) = -Ed(j, P) * Y(j, P) ... Equation (21h)

[0331] M(4,j)=Ed(j,P)*X(j,P)…Equation (21i)

[0332] M(5,j)=Eq(j,P)*Y(j,P)…Equation (21j)

[0333] Furthermore, in this embodiment, a column vector having current amounts I1 to IN to be applied to the first to Nth coils 209 as elements is introduced as the coil current vector Is. The coil current vector Is is a column vector of N rows by one column represented by the following equation (21k).

[0334] Is = Tr (I1, I2, ..., Ij, ..., IN) ... Equation (21k)

[0335] Furthermore, in this embodiment, the torque vector Tq is defined by the following equation (211).

[0336] Tq=Tr(Tx, Tz, Twx, Twy, Twz)...Equation (21l)

[0337] Thus, the following equation (21m) is obtained.

[0338] Tq=M*Is…Equation (21m)

[0339] In this embodiment, calculation is also performed in the same manner as in the first embodiment using a pseudo current vector K. In this embodiment, a five-row by one-column pseudo current vector K is introduced. The pseudo current vector K introduced in this embodiment satisfies the following equation (21n).

[0340] Tr(M)*K=Is…Equation (21n)

[0341] Equation (21m) can be transformed into the following equation (21o) by using equation (21n).

[0342] Tq=M*Tr(M)*K…Equation (21o)

[0343] In equation (21o), M*Tr(M) is the product of a matrix of five rows by N columns and a matrix of N rows by five columns, and is therefore a square matrix of five rows by five columns. In addition, the rows of the torque contribution matrix M are linearly independent of each other. Therefore, the inverse matrix can be obtained from M*Tr(M) in any case. Therefore, equation (21o) can be transformed into the following equation (21p).

[0344] K=Inv(M*Tr(M))*Tq…Equation (21p)

[0345] The coil current vector Is represented by the following equation (21q) is finally obtained from equation (21n) to equation (21p). In this way, the coil current vector Is can be uniquely obtained.

[0346] Tr(M)*Inv(M*Tr(M))*Tq=Is…Equation (21q)

[0347] By calculating the coil current vector Is as described above, the current to be applied to each coil 209 can be determined. Therefore, the force component Tx in the X direction, the force component Tz in the Z direction, the torque component Twx in the Wx direction, the torque component Twy in the Wy direction, and the torque component Twz in the Wz direction can be independently applied to the mover 101. That is, the force components and torque components of the five axes can be independently applied to the mover 101. Therefore, the mover 101 can be transported in the X direction while stabilizing the posture of the mover 101 in the Z direction, the Wx direction, the Wy direction, and the Wz direction.

[0348] Note that in this embodiment, the force component Ty in the Y direction and the torque component Twz in the Wz direction can also be applied independently to the mover 101 by applying a current to each coil 208 in the same manner as in the first embodiment. Therefore, in this embodiment, by using the coil 208 and the coil 209 in combination, the six-axis components (Tx, Ty, Tz, Twx, Twy, Twz) of the force T can also be applied to the mover 101.

[0349] Fourth embodiment

[0350] The following will refer to Figure 20 to Figure 22 A fourth embodiment of the present invention is described. Note that the same components as those in the above-described first to third embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0351] First, refer to Fig. 20 and Fig.21A The configuration of the transport system 1 according to the present embodiment is described. Fig. 20 and Fig.21A is a schematic diagram showing the configuration of the conveying system 1 including the mover 101 and the stator 201 according to the present embodiment. Fig. 20 1 and 2 are diagrams showing the mover 101 and the stator 201 when viewed from the X direction. Fig.21A It is viewed from top to bottom along the Z direction. Fig. 20 Note that Fig. 20 The right part indicates the Fig.21A The cross section (A) is taken along the line (A)-(A) in FIG. 1 . In addition, Fig. 20 The left part represents the Fig.21A In addition, for better visibility, Fig.21A The coils 209 are shown offset outwardly relative to the permanent magnet array 110 (110a, 110b).

[0352] The conveying system 1 according to the present embodiment is different from the configuration according to the third embodiment in the configuration for applying the force in the Y direction to the mover 101 .

[0353] like Fig. 20 and Fig.21A As shown, the mover 101 according to the present embodiment has a permanent magnet array 110 including a plurality of permanent magnets, instead of the permanent magnet array 109 used in the third embodiment. Note that in the mover 101 of the present embodiment, unlike the third embodiment, the yoke plate 103 is not installed on both the L side and the R side of the mover 101. In addition, the stator 201 according to the present embodiment has a coil 209, as in the third embodiment. Note that, unlike the third embodiment, the coil 208 is not installed in the stator 201 according to the present embodiment.

[0354] The permanent magnet array 110 is installed in two rows so that a plurality of permanent magnets are arranged at the corresponding ends of the R side and the L side on the upper surface of the mover 101 along the X direction. However, at a portion of each array of the two rows of permanent magnet arrays 110 (i.e., at each of the two ends of the permanent magnet array 110), two permanent magnets are installed in a manner arranged along the Y direction. Each of the two rows of permanent magnet arrays 110 has a permanent magnet array 110b that is alternately magnetized to N poles and S poles in the X direction of the conveyor mover 101 and a permanent magnet array 110a that is alternately magnetized to N poles and S poles in the Y direction orthogonal to the X direction. In the permanent magnet array 110b, a plurality of permanent magnets are installed so that the polarity of the outer magnetic poles toward the top on the stator 201 side is alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outside along the X direction. In the permanent magnet array 110a, two permanent magnets are installed so that the polarity of the outer magnetic poles toward the top on the stator 201 side is alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outside along the Y direction. Note that the permanent magnet array 110a may include two or more permanent magnets. Here, the Y axis is defined as the h axis, and the Y direction is defined as the h axis direction.

[0355] The plurality of coils 209 are attached and mounted on the stator 201 in the X direction in such a manner that they can face the two rows of permanent magnet arrays 110 mounted on the upper surface of the mover 101 in the Z direction. Specifically, the plurality of coils 209 are arranged and mounted in two rows parallel to the X direction in such a manner that they can face the two rows of permanent magnet arrays 110 mounted on the upper surface of the mover 101 in the Z direction from the top.

[0356] As in the case of the coils 202 , 207 , and 208 described in the first embodiment, a current is applied to each coil 209 by the control system 3 including the integrated controller 301 , the coil controller 302 , and the like.

[0357] Fig. 21B The corresponding magnitudes of the forces Eq(j, P), Eh(j, P) and Ed(j, P) in the q-axis direction (X direction), h-axis direction (Y direction) and d-axis (Z-axis) per unit current generated in each coil 209 are schematically shown. Fig.21A and Fig. 21B The dot-dash lines arranged laterally in the middle represent the corresponding positions in the X direction. The q-axis thrust constant curve 601 represents Eq(j, P), the h-axis constant curve 602 represents Eh(j, P), and the d-axis thrust constant curve 603 represents Ed(j, P).

[0358] In this embodiment, reference will be made to Fig. 22 Describe the principle of generating force in the h-axis direction (Y direction). Fig. 22 2 is a schematic diagram showing the principle of generating a force in the h-axis direction (Y direction). Fig. 22 Shows Fig.21A A cross section of the permanent magnet array 110 taken along line (A)-(A) in FIG. 1 includes a portion of one of the permanent magnet arrays 110 a on the R side and the L side.

[0359] like Fig. 22 As shown, the coil 209 has a core 211 and a winding 210. The coil 209 is installed to face the permanent magnet array 110a from the top along the Z direction. The arrow 214 in the core 211 indicates the magnetization direction of the coil 209, and the head of the arrow 214 indicates the N pole. In the permanent magnet array 110a, the permanent magnets 110aR and 110aL are arranged in the h-axis direction (Y direction). The arrows in the permanent magnets 110aR and 110aL indicate the magnetization direction of the permanent magnets, and the head of each arrow indicates the N pole.

[0360] like Fig. 22 As shown, when current is applied so that the N pole appears on the surface of the permanent magnet array 110a side of the core 211 of the coil 209, a repulsive force is generated between the coil 209 and the permanent magnet 110aR, and an attractive force is generated between the coil 209 and the permanent magnet 110aL. Therefore, a force acts on the mover 101 in the + direction (Y+ direction) of the h-axis direction.

[0361] In more quantitative terms, the linkage flux Φ of the winding 210 passing through the core 211 has a relationship represented by the following expression (22a) with respect to the position h in the h-axis direction of the mover 101 .

[0362] Φ=Φ(h)…Equation (22a)

[0363] In this case, the magnitude of the force Fh acting in the h-axis direction (Y direction) is generally expressed by the following equation (22b), where i represents the level of the current flowing in the coil 209.

[0364]

[0365] As described above, in the present embodiment, force can be applied to the mover 101 along the h-axis direction (Y direction) by the force acting between the coil 209 and the permanent magnet array 110 a .

[0366] Moreover, in this embodiment, in the same manner as the first to third embodiments, the force components and torque components applied along each axial direction are respectively expressed by the following equations (23a), (23b), (23c), (23d), (23e) and (23f).

[0367] Tx=Σ(Eq(j,P)*Ij)…Equation (23a)

[0368] Ty=Σ(Eh(j,P)*Ij)…Equation (23b)

[0369] Tz=Σ(Ed(j,P)*Ij)…Equation (23c)

[0370] Twx=Σ{(Eh(j,P)*Z(j,P)-Ed(j,P)*Y(j,P))*Ij}…Equation (23d)

[0371] Twy=Σ{(Ed(j,P)*X(j,P)-Eq(j,P)*Z(j,P))*Ij}...Equation (23e)

[0372] Twz=Σ{(Eq(j,P)*Y(j,P)-Eh(j,P)*X(j,P))*Ij}…Equation (23f)

[0373] Here, in this embodiment, in a manner similar to the first to third embodiments, the coil current vector Is representing the current to be applied to coil 209 can be obtained by using the following equation (21q) by introducing a calculation of the torque contribution matrix M and a pseudo current vector K of six rows by one column.

[0374] Tr(M)*Inv(M*Tr(M))*Tq=Is…Equation (21q)

[0375] Fifth embodiment

[0376] The following will refer to FIG. 23A to FIG. 23BA fifth embodiment of the present invention is described. Note that the same components as those in the above-described first to fourth embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0377] In this embodiment, reference will be made to Fig.23A and Fig. 23B A case where the Wy torque to be applied is different between the L side and the R side of the mover 101 in the fourth embodiment is described.

[0378] Fig.23A and Fig. 23B 1 is a schematic diagram schematically showing a state in which the mover 101 is transported in the X direction while being twisted. Fig.23A is a diagram of the mover 101 when viewed from the Y direction, Fig. 23B This is a diagram of the mover 101 when viewed from obliquely above.

[0379] like Fig.23A and Fig. 23B As shown, the mover 101 can be transported while deforming or vibrating in the torsion direction. The case where the mover 101 is twisted may include a case where the rotation angle WyR of the R side of the mover 101 in the Wy direction is different from the rotation angle WyL of the L side of the mover 101 in the Wy direction, such as Fig.23A Such a torsion is one of the posture components of the position and posture P of the mover 101 .

[0380] In this embodiment, the Z sensors 206 are arranged to be able to measure the displacement of the mover 101 in the Wy direction independently on the L side and the R side. That is, the Z sensors 206 are installed on the L side and the R side, respectively, and are installed at a certain interval, so that no matter where the mover 101 exists, two or more Z sensors 206 on each side can measure the displacement of the mover 101 in the Wy direction on each side. For example, Fig.23A As shown, the displacement of the mover 101 in the Wy direction is measured by the Z sensors 206La and 206Lb on the L side and the Z sensors 206Ra and 206Rb on the R side. Generally, if more than four Z sensors 206 are installed and any three of them are not installed in a straight line, WyR and WyL can be calculated separately in theory. In this embodiment, a plurality of Z sensors 206 are installed so that WyR and WyL can be calculated separately.

[0381] In this embodiment, the displacement in the Wy direction is measured by the Z sensors 206 installed on the L side and the R side, respectively, to measure WyR and WyL. Then, the desired torque components TwyL and TwyR in the Wy direction to be applied to each of the L side and the R side of the mover 101 are calculated using the target value and the current value in the same manner as the other axes.

[0382] In more detail, in this embodiment, the following equations (23e1) and (23e2) are used instead of equation (23e) in the fourth embodiment.

[0383] TwyL=ΣL{(Ed(j,P)*X(j,P)-Eq(j,P)*Z(j,P))*Ij}…Equation (23e1)

[0384] TwyR=ΣR{(Ed(j,P)*X(j,P)-Eq(j,P)*Z(j,P))*Ij}…Equation (23e2)

[0385] In the following calculation, in the same manner as in the fourth embodiment, the coil current vector Is representing the current to be applied to the coil 209 can be obtained by performing a calculation that introduces the torque contribution matrix M and the pseudo current vector K. Note that in the present embodiment, the torque contribution matrix M is a matrix of seven rows by N columns, and the pseudo current vector K is a vector of seven rows by one column.

[0386] Thus, in this embodiment, when the torsion of the mover 101 caused by the displacement in the Wy direction occurs, the torsion of the mover 101 can be controlled by applying the torque components TwyL and TwyR in the Wy direction. For example, in this embodiment, the torque components TwyL and TwyR in the Wy direction can be applied to the mover 101 to eliminate the torsion of the mover 101 caused by the displacement in the Wy direction.

[0387] As described above, according to the present embodiment, a torque component can be actively applied in the twisting direction even when the mover 101 is twisted. Therefore, the twisting of the mover 101 can be controlled.

[0388] Therefore, according to the present embodiment, since the torque is actively applied instead of waiting for the torsion or vibration to stop naturally, the displacement of the mover 101 can be converged in a shorter time. Therefore, according to the present embodiment, the mover 101 can be transported more stably. In particular, the configuration according to the present embodiment is effective when the mover 101 is thin and the rigidity in the Wy direction is low.

[0389] Note that although the case where the torsion of the mover 101 occurs due to the displacement of the mover 101 in the Wy direction has been described above, the case is not limited to this. In addition, as in the case of the Wy direction, when the torsion of the mover 101 occurs due to the displacement of the mover 101 in the Wx direction, the torsion of the mover 101 can also be controlled in the same manner as in the case of the Wy direction.

[0390] Sixth embodiment

[0391] The following will refer to FIG. 24A to FIG. 24BA sixth embodiment of the present invention is described. Note that the same components as those in the above-described first to fifth embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0392] Reference Fig.24A The configuration of the transport system 1 according to the present embodiment is described. Fig.24A is a schematic diagram showing the configuration of the conveying system 1 including the mover 101 and the stator 201 according to the present embodiment. Fig.24A is a diagram showing the mover 101 when viewed from top to bottom along the Z direction. Note that for better visibility, Fig.24A The coils 209 are shown offset outwardly relative to the permanent magnet yoke composite array 111 .

[0393] The transport system 1 according to the present embodiment is different from the configuration according to the fourth embodiment in that a permanent magnet yoke composite array 111 is installed instead of the permanent magnet array 110 .

[0394] like Fig.24A As shown, the mover 101 according to the present embodiment has a permanent magnet yoke composite array 111 instead of the permanent magnet array 110 used in the fourth embodiment.

[0395] On the upper surface of the mover 101, the permanent magnet yoke composite array 111 is installed in two rows parallel to the X direction at the corresponding ends on the R side and the L side. Each array of the two rows of permanent magnet yoke composite arrays 111 has the same permanent magnet arrays 110a, 110b and yoke plates 110c as the fourth embodiment. The yoke plate 110c is installed in the permanent magnet array 110b parallel to the X direction. The yoke plate 110c is a plate made of a substance with a large magnetic permeability (for example, iron).

[0396] In this embodiment, since the yoke plate 110c is installed, the shapes of the q-axis thrust constant curve 601, the h-axis constant curve 602 and the d-axis thrust constant curve 603 are different from those in the fourth embodiment, as shown in FIG. Fig. 24B Note that Fig.24A and Fig. 24B The dot-dash lines arranged laterally in the middle indicate the corresponding positions in the X direction.

[0397] Note that, in this embodiment as well, the coil current vector Is representing the current to be applied to the coil 209 can be derived by the same method as in the fourth embodiment.

[0398] In this embodiment, since the yoke plate 110c is installed instead of the permanent magnet, it is easy to cool the coil 209. In particular, when the torque required in the X direction and the Y direction is small, the configuration according to this embodiment is preferred. In addition, in this embodiment, since the use of expensive permanent magnets can be reduced, a low-cost conveying system 1 can be configured.

[0399] Seventh embodiment

[0400] The following will refer to FIG. 25A to FIG. 25B A seventh embodiment of the present invention is described. Note that the same components as those in the above-described first to sixth embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0401] In this embodiment, reference will be made to Fig.25A and Fig.25B A case where the mover 101 is larger in the vertical direction than in the horizontal direction will be described. Fig.25A is a schematic diagram showing an example of the configuration of the conveying system 1 when the mover 101 is larger in the vertical direction than in the horizontal direction. Fig.25B is a schematic diagram showing another example of the configuration of the conveying system 1 when the mover 101 is larger in the horizontal direction than in the vertical direction. Fig.25A and Fig.25B 1 is a diagram of the mover 101 and the stator 201 when viewed from the X direction. In the present embodiment, the installation positions of the permanent magnet array 110 and the coil 209 described in the fourth or fifth embodiment are changed as described below.

[0402] like Fig.25A As shown, the mover 101 is larger in the vertical direction than in the horizontal direction. That is, the mover 101 is larger in the Z direction than in the Y direction. Note that the mover 101 may be larger in the Z direction than in the X direction, or may be smaller in the Z direction than in the X direction.

[0403] exist Fig.25A In the case of, the permanent magnet array 110 is installed on the upper surface of the mover 101. Each permanent magnet array 110 installed on the upper surface of the mover 101 includes permanent magnet arrays 110a and 110b. In the permanent magnet array 110a on the upper surface of the mover 101, two permanent magnets are installed so that the polarities of the outer magnetic poles on the stator 201 side facing the top are alternately different, and the S-pole polarity and the N-pole polarity are alternately arranged on the outside along the Y direction. In the permanent magnet array 110b on the upper surface of the mover 101, multiple permanent magnets are installed so that the polarities of the outer magnetic poles on the stator 201 side facing the top are alternately different, and the S-pole polarity and the N-pole polarity are alternately arranged on the outside along the Y direction.

[0404] The coil 209 is installed on the upper surface of the stator 201 in such a manner that it can face the permanent magnet array 110 on the upper surface of the mover 101 from the top along the Z direction. In this way, a large attractive force is generated between the permanent magnet array 110 installed on the upper surface of the mover 101 and the coil 209. Note that a yoke plate 103 may be installed on the upper surface of the mover 101 instead of the permanent magnet array 110 or in addition to the permanent magnet array 110 so that the coil 209 is opposite to the yoke plate 103. In addition, in order to generate an attractive force between the permanent magnet array 110 on the upper surface of the mover 101 and the coil 209 even when no current is applied to the coil, a magnet with a core may be used as the coil 209.

[0405] In addition, if Fig.25A As shown, the permanent magnet array 110 is installed on the lower surface of the mover 101. The permanent magnet array 110 installed on the lower surface of the mover 101 includes permanent magnet arrays 110a and 110b. In the permanent magnet array 110a on the lower surface of the mover 101, two permanent magnets are installed so that the polarity of the outer magnetic poles on the stator 201 side facing the bottom is alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outside along the Y direction. In the permanent magnet array 110b on the lower surface of the mover 101, multiple permanent magnets are installed so that the polarity of the outer magnetic poles on the stator 201 side facing the bottom is alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outside along the X direction.

[0406] The coil 209 is installed on the bottom of the stator 201 in such a manner as to be able to face the permanent magnet array 110 on the lower surface of the mover 101 from the bottom in the Z direction.

[0407] The vertically larger mover 101 may be configured to hold a workpiece 102 (eg, a substrate) on a side surface of the mover 101. A vapor deposition source 702 that performs deposition on the workpiece 102 is mounted on the stator 201 to oppose the workpiece 102 held on the side surface of the mover 101.

[0408] In addition, the stator 201 is provided with an opening 802 for taking out the mover 101. The opening 802 is provided at the top of the stator 201. When an abnormal situation such as a power outage or a fault occurs, the mover 101 can be lifted up from the upper side of the stator 201 through the opening 802 using a crane or the like to be evacuated. This contributes to the stable operation of the production line including the conveying system 1.

[0409] In addition, since the opening 802 can be easily provided in the stator 201 , it is suitable to lift and recover the mover 101 by using a crane or the like in an abnormal situation.

[0410] Note that Fig.25BAs shown, the permanent magnet array 110 may be installed on the side surface of the mover 101 instead of installing the permanent magnet array 110 on the lower surface of the mover 101. With such a configuration, the mover 101 which is long in the vertical direction may be transported more stably.

[0411] Note that although the above has described the case of changing the installation position of the permanent magnet array 110 and the coil 209 described in the fourth or fifth embodiment, the installation position of the permanent magnet yoke composite array 111 described in the sixth embodiment can also be changed in the same manner as the above-mentioned permanent magnet array 110.

[0412] Eighth embodiment

[0413] The following will refer to Fig.26 An eighth embodiment of the present invention is described. Note that the same components as those in the above-described first to seventh embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0414] In this embodiment, reference will be made to Fig.26 A case where the permanent magnet array 110 is installed on the lower surface of the mover 101 is described. Fig.26 is a schematic diagram showing an example of the configuration of the conveying system 1 when the permanent magnet array 110 is mounted on the lower surface of the mover 101 . Fig.26 1 is a diagram of the mover 101 and the stator 201 when viewed from the X direction. In the present embodiment, the installation positions of the permanent magnet array 110 and the coil 209 described in the fourth or fifth embodiment are changed as described below.

[0415] like Fig.26 As shown, the permanent magnet array 110 is installed at the corresponding ends of the L side and the R side on the lower surface of the mover 101. Each permanent magnet array 110 installed at the corresponding ends of the L side and the R side includes permanent magnet arrays 110a and 110b. In the permanent magnet array 110a, the two permanent magnets are installed so that the polarity of the outer magnetic poles on the stator 201 side facing the bottom is alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outside along the Y direction. In the permanent magnet array 110b, a plurality of permanent magnets are installed so that the polarity of the outer magnetic poles on the stator 201 side facing the bottom is alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outside along the X direction.

[0416] The coil 209 is mounted on the stator 201 in such a manner as to be able to face the permanent magnet arrays 110 provided at respective ends on the L and R sides of the lower surface of the mover 101 from the bottom in the Z direction.

[0417] exist Fig.26In the case of the arrangement of the permanent magnet array 110 and the coil 209 shown, the force between the permanent magnet array 110 and the coil 209 has a spring modulus in the positive direction, that is, when the amount of current of the coil 209 is kept constant, the repulsive force generated by the coil 209 increases when the mover 101 is lowered. Therefore, the position of the mover 101 is stabilized in the Z direction. Therefore, the mover 101 can be transported while making the posture of the mover 101 more stable.

[0418] Note that although the above has described the case of changing the installation position of the permanent magnet array 110 and the coil 209 described in the fourth or fifth embodiment, the installation position of the permanent magnet yoke composite array 111 described in the sixth embodiment can also be changed in the same manner as the above-mentioned permanent magnet array 110.

[0419] Ninth embodiment

[0420] The following will refer to Fig. 27 A ninth embodiment of the present invention is described. Note that the same components as those in the first to eighth embodiments described above are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0421] In this embodiment, reference will be made to Fig. 27 A case where the coil 202 used in the above-described embodiment has the permanent magnet 213 is described. Fig. 27 is a diagram showing a cross section of the coil 202 according to the present embodiment when viewed from the X direction.

[0422] like Fig. 27 As shown, the coil 202 has a winding 210 and a core 211 around which the winding 210 is wound, and also has a permanent magnet 213 inside the core 211. The permanent magnet 213 is arranged inside the core 211 around which the winding 210 is wound, so that the N pole and the S pole are as shown in FIG. Fig. 27 As shown by the arrow in the middle, they are arranged along the Z direction.

[0423] For example, when the number of turns of the winding in the coil is 500 and the current value applied to the winding is 1A, the magnetomotive force is 500A. If a neodymium magnet with a magnetomotive force of 950kA / m is used instead of it, the thickness of the magnet is about 1.05mm. In this way, the permanent magnet 213 exhibits the same effect as continuously applying a constant current to the winding 210. Therefore, the thickness of the permanent magnet 213 can be designed in such a way that the current applied to the winding 210 is reduced, taking into account the conveying height of the mover 101 as a reference. By using the permanent magnet 213 in this way, the current applied to the winding 210 during the conveying process of the mover 101 can be only the amount used to correct the posture change of the mover 101, and the current value applied to the coil 202 can be significantly reduced.

[0424] Note that the coils 207 , 208 , and 209 used in the above-described embodiments may also be configured to have the permanent magnet 213 in addition to the above-described coil 202 .

[0425] Tenth embodiment

[0426] The following will refer to Fig.28A A tenth embodiment of the present invention is described. Note that the same components as those in the above-described first to ninth embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0427] In this embodiment, reference will be made to Fig.28A A case where the shape of the core 211 of the coil 209 is changed in the configuration according to the fourth embodiment is described. Fig.28A is a diagram showing a cross section of the coil 209 and the permanent magnet array 110 a according to the present embodiment when viewed from the X direction.

[0428] The coil 209 according to this embodiment is Fig. 22 The coil 209 is installed in the same manner as the case of the fourth embodiment shown to face the permanent magnet array 110a including permanent magnets 110aR and 110aL in the Z direction. The coil 209 has a winding 210 and a core 211 around which the winding 210 is wound. In the permanent magnet array 110a, the permanent magnets 110aR and 110aL are installed to be arranged in the Y direction.

[0429] On the other hand, Fig. 22 Unlike the fourth embodiment shown in FIG. 1 , the core 211 of the coil 209 has a central portion around which the winding 210 is wound and an extending portion extending from the central portion to the outside of the winding 210 along the Y direction, as shown in FIG. Fig.28A Note that the extended portion of the core 211 may partially extend to the outside of the winding 210 along the Y direction, or may extend to the outside over the entire circumference of the winding 210.

[0430] In this embodiment, by utilizing the structure in which the core 211 has an extended portion, the change in the interlinkage flux Φ when the permanent magnet array 110a moves in the h-axis direction (Y direction) increases. Therefore, this embodiment is advantageous because the force per unit current in the h-axis direction (Y direction) increases. Therefore, in this embodiment, the mover 101 can be transported more stably.

[0431] Note that although the case where the shape of the core 211 of the coil 209 is changed in the configuration according to the fourth embodiment has been described above, the shape of the core 211 may be changed in the same manner as described above in the configurations of the fifth and sixth embodiments as well.

[0432] Eleventh Embodiment

[0433] The following will refer to Fig.28B An eleventh embodiment of the present invention is described. Note that the same components as those in the above-described first to tenth embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0434] In this embodiment, reference will be made to Fig.28B A case where the configuration of the permanent magnet array 110 a is changed in the configuration according to the tenth embodiment is described. Fig.28B is a diagram showing a cross section of the coil 209 and the permanent magnet array 110 a according to the present embodiment when viewed from the X direction.

[0435] In this embodiment, if Fig.28B As shown, one of the permanent magnets 110aR and 110aL in the permanent magnet array 110a is removed. In this case, since the linkage flux Φ changes when the permanent magnet array 110a moves along the h-axis direction (Y direction), a force in the h-axis direction (Y direction) can also be applied to the mover 101. In this embodiment, although the magnitude of the force applied in the Y direction is small, since the number of permanent magnets can be reduced, it is preferred for situations such as when the weight of the mover 101 needs to be reduced.

[0436] Twelfth Embodiment

[0437] The following will refer to Fig.29 A twelfth embodiment of the present invention is described. Note that the same components as those in the above-described first to eleventh embodiments are denoted by the same reference numerals, and description thereof will be omitted or simplified.

[0438] In this embodiment, reference will be made to Fig.29 A case where the mover 101 is configured to be able to be turned over so that the upper surface and the lower surface are switched in the configuration according to the fourth embodiment is described. Fig.29 : is a schematic diagram showing the configuration of the conveying system 1 according to the present embodiment. Fig.29 1 is a diagram of the mover 101 and the stator 201 according to the present embodiment when viewed from the X direction. In the present embodiment, even in the state where the permanent magnet arrays 110a and 110b are flipped due to the flipping of the mover 101 with the upper and lower surfaces switched in the structure of the fourth embodiment, the permanent magnet arrays 110a and 110b can be used for floating transportation of the mover 101.

[0439] In the case where the processing device that forms the processing system together with the conveying system 1 is a vapor deposition device, the workpiece 102 attached to the mover 101 is generally a substrate such as a glass substrate. When the substrate as the workpiece 102 is attached to the mover 101, if the workpiece holding surface of the mover 101 that holds the workpiece 102 by adsorption or the like can be made to face upward, it is preferred because the working efficiency can be improved. When the workpiece 102 is held, the mover 101 is in a state where the workpiece holding surface (i.e., its upper surface or lower surface, i.e., the deposition surface D) faces upward. After the workpiece 102 is held in this state by the mover 101, the mover 101 is rotated and flipped 180 degrees in the Wy direction while the workpiece 102 is held by the mover 101, and then the conveyance of the mover 101 can be started.

[0440] In this embodiment, when the mover 101 is transported as described above, the same coil 209 is used to transport the mover 101 both when the mover 101 is transported from its initial position to the position where the workpiece 102 is held and when the mover 101 is transported after the workpiece 102 is held and flipped.

[0441] In this embodiment, if Fig.29 As shown, the permanent magnet array 110 is installed on the side surface of the mover 101. That is, the permanent magnet array 110 including the permanent magnet arrays 110a and 110b is respectively installed on each side surface of the L side and the R side of the mover 101. In the permanent magnet array 110a, the two permanent magnets are installed so that the polarity of the outer magnetic poles facing the top on the stator 201 side is alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outside along the Y direction. In the permanent magnet array 110b, a plurality of permanent magnets are installed so that the polarity of the outer magnetic poles facing the top on the stator 201 side is alternately different, and the S pole polarity and the N pole polarity are alternately arranged on the outside along the X direction.

[0442] In the present embodiment, no yoke is installed on the upper surface of the permanent magnet arrays 110a and 110b on the upper surface side of the mover 101. In addition, similarly, no yoke is installed on the lower surface of the permanent magnet arrays 110a and 110b on the lower surface side of the mover 101. Since no yoke is installed, the upper and lower surfaces of the permanent magnet arrays 110a and 110b are open. Therefore, for both the cases where the mover 101 makes the deposition surface D face upward and the deposition surface D face downward, the permanent magnet arrays 110a and 110b can allow one or the other of the magnetic poles to be opposite to the coil 209 installed on the stator 201.

[0443] As described above, the mover 101 on which the permanent magnet array 110 is mounted can be flipped so that the upper surface and the lower surface are switched. The flipping of the permanent magnet array 110 is performed by a flipping mechanism installed at the position where the mover 101 is to be flipped.

[0444] On each side of the L side and the R side, the coil 209 is mounted on the stator 201 through the bracket 215 and the track 216 in a manner facing the permanent magnet array 110 in the Z direction. The coil 209 facing the permanent magnet array 110 is attached and mounted on the bracket 215 on each side of the L side and the R side, respectively. Each bracket 215 is mounted on the track 216 so as to be movable on the track 216 in the Y direction. When the mover 101 is flipped, each bracket 215 can be moved on the track 216 and withdrawn to the outside. When each bracket 215 has been withdrawn, the flipping device (not shown) can perform an operation of swapping the upper and lower surfaces of the mover 101.

[0445] Thus, in this embodiment, the permanent magnet array 110 including the permanent magnet arrays 110a and 110b is disposed on the mover 101 , so that the plurality of coils 209 can face the permanent magnet array 110 before and after the mover 101 is flipped.

[0446] Furthermore, in the present embodiment, the linear scale 104, the Y target 105, and the Z target 106 are respectively installed at the upper and lower parts of the mover 101. The linear scale 104, the Y target 105, and the Z target 106 installed at the upper and lower parts of the mover 101 are arranged, for example, in an axisymmetric manner around the flip axis about which the mover 101 rotates and flips as a symmetry axis.

[0447] The linear encoder 204 is mounted on the stator 201 so as to be able to measure one of the linear scales 104 mounted on the upper and lower parts of the mover 101 in both cases where the deposition surface D of the mover 101 faces upward and downward. In addition, the Y sensor 205 is mounted on the stator 201 so as to be able to measure one of the Y targets 105 mounted on the upper and lower parts of the mover 101 in both cases where the deposition surface D of the mover 101 faces upward and downward. In addition, the Z sensor 206 is mounted on the stator 201 so as to be able to measure one of the Z targets 106 mounted on the upper and lower parts of the mover 101 in both cases where the deposition surface D of the mover 101 faces upward and downward. In this way, in the present embodiment, the linear scale 104, the Y sensor 205, and the Z sensor 206 can also be used to measure the position and posture (X, Y, Z, Wx, Wy, Wz) of the mover 101 which can be flipped.

[0448] According to the present embodiment, even when the mover 101 can be turned over, the mover 101 can be stably transported in a non-contact manner along the X direction while stabilizing the posture of the mover 101 in the Y direction, the Z direction, the Wx direction, the Wy direction, and the Wz direction.

[0449] Note that although the case where the mover 101 can be turned over to exchange the upper and lower surfaces in the configuration of the fourth embodiment has been described above, the mover 101 can also be turned over in the same manner as described above in the configurations of the fifth and sixth embodiments.

[0450] Modified Embodiments

[0451] The present invention is not limited to the above-described embodiments, and various modifications may be made.

[0452] For example, although the above embodiment describes the case where the position and posture of the mover 101 are controlled in the X direction, Y direction, Z direction, Wx direction, Wy direction, and Wz direction as an example, the embodiment is not limited thereto. The position and posture may be controlled by obtaining displacement in at least any one of the X direction, Y direction, Z direction, Wx direction, Wy direction, and Wz direction.

[0453] In addition, although the above-mentioned embodiment describes the case where the electromagnetic force received from the coils 202 and 209 by the yoke plate 103 or the permanent magnet arrays 109 and 110 is used as the levitation force for floating the mover 101 as an example, the embodiment is not limited thereto. For example, when the mass of the mover 101 or the mass of the workpiece 102 placed on the mover 101 is large and the levitation force to be applied in the vertical direction is large, a separate static pressure from a fluid (e.g., air) can be used for levitation to assist the levitation force.

[0454] In addition, although the above embodiment describes a magnetic levitation conveying system 1 that floats the mover 101 and conveys the mover 101 in a non-contact manner, the embodiment is not limited thereto. For example, the conveying system 1 may be a system that is configured to be movable along a guide rail installed in a conveying direction and to be in contact with the guide rail and convey the mover 101.

[0455] In addition, although the above embodiment describes the case where a plurality of coils 202, 207, 208 or 209 are arranged in a predetermined number of rows as an example, the embodiment is not limited thereto. The predetermined number of rows of coils may be arranged according to the yoke plate 103, the conductive plate 107, or the permanent magnet array 109 or 110 arranged in the mover 101.

[0456] In addition, the conveying system according to the present invention can be used as a conveying system for conveying a workpiece together with a mover to a working area of ​​each processing device (for example, a machine tool) that performs various operations on the workpiece as an article in a manufacturing system for manufacturing articles (for example, electronic equipment). The processing device that performs the operation process may be any device, for example, a device that assembles parts of the workpiece, a device that performs painting, etc. In addition, the article to be manufactured is not limited to a specific article, and may be any part.

[0457] As described above, the conveying system according to the present invention can be used to convey a workpiece to a working area, perform work processing on the workpiece conveyed to the working area, and manufacture an article. According to the above embodiment, the mover can be stably conveyed in a non-contact state while controlling the posture of the mover.

[0458] Other embodiments

[0459] The embodiments of the present invention may also be implemented by a method executed by a computer of a system or device (e.g., by reading and executing computer executable instructions from a storage medium to perform the functions of one or more embodiments described above and / or controlling the one or more circuits to perform the functions of one or more embodiments described above) using a computer that reads and executes computer executable instructions (e.g., one or more programs) recorded on a storage medium (which may also be more completely referred to as a "non-transitory computer-readable storage medium") to perform the functions of one or more embodiments described above and / or includes one or more circuits (e.g., an application specific integrated circuit (ASIC)) for performing the functions of one or more embodiments described above. The computer may include one or more processors (e.g., a central processing unit (CPU), a microprocessing unit (MPU)), and may include a network of separate computers or separate processors to read and execute computer executable instructions. Computer executable instructions may be provided to a computer, for example, from a network or a storage medium. The storage medium may include, for example, a hard disk, a random access memory (RAM), a read-only memory (ROM), a memory of a distributed computing system, an optical disk (e.g., a compact disk (CD), a digital versatile disk (DVD), or a Blu-ray disk (BD)) TM ), one or more of flash memory devices, memory cards, etc.

[0460] Other embodiments

[0461] The embodiments of the present invention may also be implemented by providing software (program) for performing the functions of the above-described embodiments to a system or device via a network or various storage media, and a computer or a central processing unit (CPU) or a microprocessing unit (MPU) of the system or device reads and executes the program.

[0462] While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments.The scope of the following claims is to be accorded the broadest interpretation so as to encompass all modifications and equivalent structures and functions.

Claims

1. A conveying system comprising: a mover, the mover being movable in a first direction; a stator having a plurality of coils arranged along the first direction and applying a force to the mover by using the plurality of coils to which current is applied; an acquisition unit, the acquisition unit acquiring a position and a posture of the mover moving along the first direction; as well as a control unit that controls a force generated by currents applied to the plurality of coils based on the acquired position and the acquired posture of the mover, The mover has a permanent magnet array, which includes a first permanent magnet array having a plurality of permanent magnets arranged along the first direction and a second permanent magnet array having a plurality of permanent magnets arranged along a third direction intersecting the first direction and a perpendicular direction. wherein the plurality of coils face the first permanent magnet array and the second permanent magnet array, The acquisition unit acquires the torsion of the mover caused by the displacement in the first direction or the third direction, and The control unit controls the torsion of the mover by controlling the current applied to the plurality of coils, thereby eliminating the torsion of the mover.

2. The conveying system according to claim 1, in, As the position and the posture, the acquisition unit acquires: The displacement in the first direction, and At least one of a displacement in the vertical direction intersecting the first direction, a displacement in the third direction, a displacement in a fourth direction around an axis along the first direction, a displacement in a fifth direction around an axis along the vertical direction, and a displacement in a sixth direction around an axis along the third direction.

3. The conveying system according to claim 2, in, The mover has a first yoke plate, wherein the plurality of coils include a plurality of first coils facing the first yoke plate, and The control unit controls at least one of the component of the force in the vertical direction, the component in the fourth direction, and the component in the sixth direction by controlling the current applied to the first coil.

4. The delivery system according to claim 3, wherein: The plurality of first coils face the first yoke plate along the vertical direction.

5. The conveying system according to any one of claims 2 to 4, in, The mover has a second yoke plate, wherein the plurality of coils include a plurality of second coils facing the second yoke plate, and The control unit controls at least one of the component of the force in the third direction and the component of the force in the fifth direction by controlling the current applied to the plurality of second coils.

6. The delivery system according to claim 5, wherein: The plurality of second coils face the second yoke plate along the third direction.

7. The conveying system according to claim 4, in, The mover has a conductive plate, wherein the plurality of coils include a plurality of third coils facing the conductive plate, and The control unit controls the component of the force in the first direction by controlling the current applied to the plurality of third coils.

8. The conveying system according to claim 3 or 4, in, The mover has a permanent magnet array, in which a plurality of permanent magnets are arranged along the first direction. wherein the plurality of coils include a plurality of second coils facing the permanent magnet array, and The control unit controls at least any one of the component of the force in the first direction, the component of the force in the third direction, and the component of the force in the fifth direction by controlling the current applied to the plurality of second coils.

9. The conveying system according to any one of claims 2 to 4, in, The mover has a permanent magnet array, in which a plurality of permanent magnets are arranged along the first direction. wherein the plurality of coils include a plurality of first coils facing the permanent magnet array, and Wherein, the control unit controls at least one of the component of the force in the first direction, the component of the force in the vertical direction, the component of the force in the fourth direction, and the component of the force in the sixth direction by controlling the current applied to the multiple first coils.

10. The delivery system according to claim 9, in, The mover has a yoke plate, wherein the plurality of coils include a plurality of second coils facing the yoke plate, and The control unit controls at least any one of the component of the force in the third direction and the component of the force in the fifth direction by controlling the current applied to the plurality of second coils.

11. The delivery system according to claim 10, wherein: The plurality of second coils face the yoke plate along the third direction.

12. The delivery system according to any one of claims 2 to 4, in, The control unit controls at least one of the corresponding components of the first to sixth directions by controlling currents applied to the plurality of coils.

13. The delivery system according to claim 12, wherein: A yoke plate installed along the first direction is also provided in the first permanent magnet array.

14. The delivery system according to claim 12, in, The mover is larger in the vertical direction than in the third direction, and The permanent magnet array is installed on at least one selected from a side surface and a lower surface of the mover and on an upper surface of the mover.

15. The delivery system according to claim 12, wherein: The permanent magnet array is mounted on the lower surface of the mover.

16. The delivery system according to claim 12, in, The mover is configured to be turned over so that the upper surface and the lower surface are switched, and The permanent magnet array is arranged on the mover so that the plurality of coils are configured to face the mover before and after the mover flips over.

17. The delivery system according to any one of claims 1 to 4, in, The coil has a core and a winding wound around the core, and Wherein, a permanent magnet is arranged inside the core.

18. A processing system comprising: The conveying system according to any one of claims 1 to 17; as well as A processing device processes the workpiece transported by the mover.

19. An article manufacturing method for manufacturing an article by using the processing system according to claim 18, the article manufacturing method comprising the following steps: Transporting workpieces by using movers; and The workpiece conveyed by the mover is processed by using the processing device.

Images