Peeling device

Abstract

Provided is a peeling apparatus that does not cause wafer breakage or paste residue when peeling a protective member from a wafer, and peels the protective member from the wafer without spending unnecessary time. The peeling apparatus peels a protective member of one face of a plate-like workpiece from the one face, and includes a peeling unit that grips a peripheral portion of the protective member of the one face of the plate-like workpiece held by a holding face of a holding unit, peels the protective member from the periphery toward the center of the plate-like workpiece, and further peels the protective member from the periphery on the opposite side of the center to the periphery. The peeling unit includes a gripping portion that grips the peripheral portion of the protective member, a moving unit that moves the gripping portion on a straight line from the periphery of the holding face through the center to a direction away from the center, and a tensile load measuring portion that measures a tensile load applied to the protective member between the gripping portion and the holding face.

Description

TECHNICAL FIELD

[0001] The present application relates to a peeling apparatus that peels a protective member from a plate-shaped workpiece. BACKGROUND

[0002] A tape applicator is capable of attaching a dicing tape to the other face of a wafer on which a protective tape is attached on one face and a ring-shaped frame, so that the wafer becomes a state capable of being supported by the ring-shaped frame via the dicing tape. In addition, after the dicing tape is attached, the protective tape attached to the wafer is peeled (for example, refer to Patent Document 1).

[0003] Patent Document 1: Japanese Patent Application Publication No. 2015-167205

[0004] When peeling the protective tape, for example, a peeling tape is attached to the outer peripheral portion of the protective tape, and the protective tape is peeled by gripping the peeling tape and stretching it in a direction away from the wafer. However, if the speed at which the protective tape is stretched when peeling the protective tape is fast, there is a problem in that the paste of the protective tape can remain on one face of the wafer or the wafer can be broken. On the contrary, if the speed at which the protective tape is stretched is slow, there is a problem in that time is wasted and the work efficiency decreases.

[0005] In addition, depending on the kind of the device formed on one face of the wafer on which the protective tape is attached and the like, the adhesion of the protective tape is different. That is, even if the same protective tape, there are a case where the adhesion is strong and a case where the adhesion is weak depending on the device formed on the wafer, and the stretching force (stretching speed) at the time of peeling needs to be changed depending on the difference in the adhesion.

[0006] Further, depending on the small peeling area at the time when peeling of the circular protective tape is started and the large peeling area at the time when the protective tape is peeled to the vicinity of the center of the wafer, the stretching force is different, and thus the force received by the wafer is also different depending on the position at which the protective tape is peeled. However, conventionally, the peeling speed at which each wafer is peeled is gradually increased, and the peeling experiment is repeatedly performed, a prescribed peeling speed is determined and peeling is performed at the peeling speed, or a safe speed having a margin in which the wafer cannot be broken is set and peeling is performed, and thus time is wasted. SUMMARY

[0007] Therefore, an object of the present application is to provide a peeling apparatus that does not cause the wafer to be broken or cause paste to remain on the wafer or the like when peeling the protective member from the wafer, and that can peel the protective member from the wafer without wasting time.

[0008] According to the present application, there is provided a peeling apparatus which peels a protective member of one face of a protective plate-like work from the one face, wherein the peeling apparatus has a holding unit which holds the other face of the plate-like work by holding the face, and a peeling unit which grips a peripheral portion of the protective member which covers the one face of the plate-like work held by the holding face, peels the protective member from the periphery of the plate-like work toward the center, and further peels the protective member from the periphery on the opposite side of the center to the periphery, the peeling unit including a gripping portion which grips the peripheral portion of the protective member, a moving unit which relatively moves the gripping portion and the holding unit in a direction parallel to the holding face, moves the gripping portion from the periphery of the holding face toward the center, and moves the gripping portion which has passed the center of the holding face in a straight line in a direction away from the center, and a tensile load measuring portion which measures a tensile load applied to the protective member between the gripping portion and the holding face, the peeling operation of the peeling unit is optimized by measuring the tensile load applied to the protective member by the tensile load measuring portion.

[0009] Preferably, the tensile load measuring portion is constituted by a piezoelectric element provided to a supporting portion which supports the holding unit.

[0010] Preferably, the tensile load measuring portion is constituted by a piezoelectric element provided to a gripping portion supporting portion which supports the gripping portion.

[0011] Preferably, the protective member is a protective tape, the plate-like work has a cutout portion in the peripheral portion, the holding unit includes a partial peeling portion which lifts up the protective tape which is not attached to the plate-like work in the cutout portion, peels the protective tape in the vicinity of the cutout portion from the plate-like work, and the gripping portion grips the peripheral portion of the protective tape after peeled by the partial peeling portion.

[0012] Preferably, the protective member is a protective tape, the peeling apparatus further has a peeling tape attaching unit which attaches a peeling tape to the peripheral portion of the protective tape, the gripping portion grips the peeling tape attached to the protective tape instead of gripping the peripheral portion of the protective tape, and the tensile load measuring portion measures a tensile load applied to the peeling tape which is integrated with the protective tape between the gripping portion and the holding face.

[0013] Preferably, the protective member has a protruding portion which protrudes slightly from the periphery of the plate-like work, and the gripping portion grips the protruding portion.

[0014] According to the present application, the peeling operation of the peeling unit can be optimized by measuring the tensile load applied to the protective member by the tensile load measuring section. That is, the protective member can be peeled from the wafer at an optimum peeling speed without breaking the wafer or generating paste residue on the wafer or the like, and without wasting time.

[0015] When the tensile load measuring section is constituted by a piezoelectric element provided to the support section that supports the holding unit, the tensile load applied to the protective member can be accurately measured.

[0016] When the tensile load measuring section is constituted by a piezoelectric element provided to the holding section support section that supports the holding section, the tensile load applied to the protective member can be accurately measured.

[0017] The protective member is a protective tape, the plate-like workpiece has a cutout portion at an outer peripheral portion, the holding unit has a partial peeling portion that lifts up the protective tape not adhered to the plate-like workpiece at the cutout portion to peel the protective tape near the cutout portion from the plate-like workpiece, and the holding section can easily hold the outer peripheral portion of the protective tape peeled by the partial peeling portion.

[0018] The protective member is a protective tape, the holding section holds the peeling tape adhered to the protective tape instead of holding the outer peripheral portion of the protective tape by having a peeling tape adhering section that adheres the peeling tape to the outer peripheral portion of the protective tape, and the tensile load measuring section measures the tensile load applied to the peeling tape integrated with the protective tape between the holding section and the holding surface instead of measuring the tensile load applied to the protective tape, whereby the peeling operation of the peeling unit can be optimized.

[0019] The protective member has a protruding portion that protrudes slightly from the outer periphery of the plate-like workpiece, and the holding section can easily hold the protruding portion of the outer peripheral portion of the protective member. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a perspective view showing a peeling apparatus of a first embodiment.

[0021] Figure 2 is a sectional view explaining a case where the holding unit is moved in the X-axis direction and the holding section is moved in the horizontal direction with respect to the holding surface of the holding unit, the load is measured by the holding section side tensile load measuring section, and the protective tape is peeled from the plate-like workpiece.

[0022] Figure 3 is a sectional view explaining a case where the holding unit is moved in the X-axis direction and the holding section is not moved, the tensile load is measured by the tape side tensile load measuring section, and the protective tape is peeled from the plate-like workpiece.

[0023] Figure 4is a sectional view for describing a holding unit for a partial peeling section having a protective tape peeling section near a cut section of a plate-like work.

[0024] Figure 5 is a perspective view for describing the peeling device of the second embodiment.

[0025] Figure 6 is a sectional view showing a state in which the holding clamp of the holding section holds the extension section at the time of starting peeling of the protective member in the peeling device of the second embodiment.

[0026] Figure 7 is a sectional view for describing a state in which the holding clamp of the holding section peels a part of the extension section from the outer periphery of the plate-like work at the time of starting peeling of the protective member in the peeling device of the second embodiment.

[0027] Figure 8 is a sectional view for describing a state in which the holding clamp of the holding section peels a part of the extension section from the outer periphery of the plate-like work at the time of starting peeling of the protective member in the peeling device of the second embodiment.

[0028] Figure 9 is a sectional view for describing a case in which the holding unit is moved in the Y-axis direction and the holding section is moved toward the obliquely downward direction with respect to the holding surface of the holding unit, the tensile load is measured by the holding section side tensile load measuring section, and the protective member is peeled from the plate-like work.

[0029] Figure 10 is a sectional view for describing a case in which the holding unit is moved in the Y-axis direction and the holding section is not moved, the tensile load is measured by the pad side tensile load measuring section, and the protective member is peeled from the plate-like work.

[0030] Explanation of Reference Signs

[0031] 80: plate-shaped workpiece; 800: one face; 801: another face; 806: cutout portion; 82: dicing tape; 84: ring-shaped frame; 81: protective tape (protective member); 1: peeling apparatus of first embodiment; 10: base; 19: control unit; 17: recovery box; 30: holding unit; 300: suction portion; 302: holding face; 301: frame; 31: support portion; 32: frame fixing unit; 33: piston mechanism; 34: partial peeling portion; 341: through-hole; 342: jacking pin; 346: valve; 347: fluid supply source; 345: up-and-down driving portion; 83: peeling tape; 831: tape roller; 4: peeling unit; 13: table moving unit; 130: ball screw; 132: motor; 133: movable member; 35: table-side tensile load measuring portion; 351: first table-side tensile load measuring portion; 352: second table-side tensile load measuring portion; 40: tape cutting unit; 400: placement table; 401: cutter; 402: cutter moving unit; 403: cutter lifting unit; 41: gripping portion; 412: pair of gripping claws; 4121: fixed claw; 4122: movable claw; 48: gripping portion support portion; 480: support table; 483: piston rod; 484: cylinder; 42: peeling tape supply unit; 420: winding drum; 421: pair of guide rollers; 422: pair of feeding rollers; 44: peeling tape sticking unit; 440: support table; 441: pressing plate lifting mechanism; 442: pressing plate; 46: X-axis direction moving unit; 460: ball screw; 462: motor; 47: gripping portion-side tensile load measuring portion; 471: up-and-down direction load measuring piezoelectric element; 472: horizontal direction load measuring piezoelectric element; 80: plate-shaped workpiece; 85: protective member; 86: circular sheet; 87: resin film; 850: protruding portion; 2: peeling apparatus of second embodiment; 20: base; 21: column; 50: holding unit; 500: suction portion; 502: holding face; 509: suction tube; 52: arm portion; 53: support portion; 6: peeling unit; 60: pad moving unit; 602: motor; 600: ball screw; 601: movable plate; 61: gripping portion; 612: gripping jig; 610: jig base; 614: link block; 616: coupling member; 67: gripping portion-side tensile load measuring portion; 673: up-and-down direction load measuring piezoelectric element; 674: horizontal direction load measuring piezoelectric element; 63: gripping portion moving unit; 630: ball screw; 631: pair of guide rails; 632: motor; 633: movable block; 680: main shaft; 681: arm-shaped housing; 64: pad-side tensile load measuring portion; 641: first pad-side tensile load measuring portion; 642: second pad-side tensile load measuring portion; 66: pad lifting unit; 660: ball screw; 662: motor; 661: movable plate; 211: rotating roller; 27: placement table; 26: dropping unit; 28: dust collection box; 29: control unit. Detailed Implementation

[0032] (First embodiment of the stripping device)

[0033] Figure 1 The peeling device 1 of the first embodiment shown uses a strip-shaped peeling tape 83 to peel off the adhesive attached to the plate-shaped workpiece 80. Figure 1 An example of a peeling device for peeling off the protective strip 81, which serves as a protective component, from the upper surface, i.e., one surface 800, is described. The peeling device 1 has at least: a holding unit 30 that holds the other surface 801 of the plate-shaped workpiece 80 by a holding surface 302; and a peeling unit 4 that holds the outer peripheral portion of the protective strip 81 covering one surface 800 of the plate-shaped workpiece 80 held by the holding surface 302, peels the protective strip 81 from the outer periphery of the plate-shaped workpiece 80 toward the center, and further peels it from the center toward the outer periphery on the opposite side of the outer periphery.

[0034] Figure 1 The plate-shaped workpiece 80 shown is, for example, a circular semiconductor wafer made of silicon as the base material. One of its surfaces 800 is divided into a grid pattern by multiple vertical dividing lines 804, and IC devices 805 are formed in each of the grid-shaped regions.

[0035] In this embodiment, the protective component that is attached in a manner that covers the entire surface 800 of the plate-shaped workpiece 80 is, for example, a protective strip 81, which has a substrate layer made of a resin (e.g., a polyolefin resin) having a certain degree of flexibility and an adhesive layer (paste layer) on the substrate layer.

[0036] In addition to silicon, the plate-shaped workpiece 80 can also be made of gallium arsenide, sapphire, ceramic, resin, gallium nitride or silicon carbide, and the protective component is not limited to the protective strip 81.

[0037] For example, plate-shaped workpiece 80 has another face 801 opposite to a face 800. Figure 1 A scribe strip 82 with a diameter larger than that of the plate-shaped workpiece 80 is attached to the lower surface of the plate-shaped workpiece 80. Furthermore, the outer periphery of the paste layer of the scribe strip 82 is also attached to the annular frame 84, thereby the plate-shaped workpiece 80 is supported by the annular frame 84 via the scribe strip 82, enabling operations based on the annular frame 84.

[0038] The peeling apparatus 1 has a rectangular parallelepiped base 10 extending in the X-axis direction, and a worktable moving unit 13 that reciprocally moves a holding unit 30 in the X-axis direction is provided on the base 10. The worktable moving unit 13 has a ball screw 130 provided to the base 10, a motor 132 connected to one end of the ball screw 130, a pair of guide rails 131 extending in parallel to the ball screw 130, and a movable member 133 movable in the X-axis direction. The holding unit 30 is provided on the upper surface of the movable member 133 via a support 31. The pair of guide rails 131 are in sliding contact with the lower surface of the movable member 133, and the ball screw 130 is screwed with a nut (not shown) provided to the lower surface of the movable member 133. The ball screw 130 is rotated by the motor 132, and thereby the holding unit 30 moves in the X-axis direction along the guide rails 131 together with the movable member 133.

[0039] The worktable moving unit 13 is a part of the peeling unit 4, and functions as a moving unit that relatively moves the holding unit 30 and the holding portion 41 in the X-axis direction parallel to the holding surface 302, moves the holding portion 41 from the outer periphery of the holding surface 302 toward the center, and moves the holding portion 41 that has passed through the center of the holding surface 302 in a straight line in a direction away from the center.

[0040] In the present embodiment, the holding unit 30 is a holding worktable that has a suction portion 300 composed of a porous member or the like that suctions the plate-shaped workpiece 80, and a frame 301 that supports the suction portion 300. The suction portion 300 is communicated with a suction source (not shown) such as a vacuum generator, and a suction force generated by suction of the suction source is transmitted to a flat holding surface 302 that is an exposed surface of the suction portion 300, whereby the holding unit 30 can suction and hold the plate-shaped workpiece 80 on the holding surface 302.

[0041] For example, the periphery of the holding unit 30 is surrounded by a frame fixing unit 32 that fixes the annular frame 84. The frame fixing unit 32 having a top view annular shape and placing the annular frame 84 is configured to suction-fix the annular frame 84 by a suction force generated by a suction source (not shown), and is movable up and down in the Z-axis direction (vertical direction) by a piston mechanism 33 equally provided in the circumferential direction. Alternatively, instead of the frame fixing unit 32, a mechanical clamp that opens and closes a plurality of clamps by a spring or the like can be provided around the holding unit 30.

[0042] For example, as a force applied to the annular frame 84 interposed between the holding surface 302 of the holding unit 30 and the holding portion 41 of the holding unit 4, a force in the Z-axis direction (vertical direction) is considered. Figure 1The peeling unit 4 has a tensile load measuring section 35 that measures the tensile load on the protection tape 81 between the holding section 41 and the holding surface 302, and the tensile load measuring section 35 is constituted by a piezoelectric element provided to a support section 31 that supports the holding unit 30. Hereinafter, the tensile load measuring section 35 will be referred to as a table-side tensile load measuring section 35.

[0043] In the present embodiment, the support section 31 that supports the holding unit 30 has a cylindrical shape, for example, and the table-side tensile load measuring section 35 is provided to the support section 31 at a position that is connected to the movable member 133 of the table moving unit 13. That is, the table-side tensile load measuring section 35 is sandwiched between the support section 31 and the movable member 133 in the up-and-down direction (Z-axis direction) and is provided in a manner that bears the weight of the holding unit 30 mounted on the support section 31. Also, in the present embodiment, the table-side tensile load measuring section 35 is provided in two at positions that are opposed in the X-axis direction below the holding unit 30. That is, the table-side tensile load measuring section 35 is constituted by a first table-side tensile load measuring section 351 and a second table-side tensile load measuring section 352.

[0044] The piezoelectric element of the first table-side tensile load measuring section 351 (second table-side tensile load measuring section 352) is formed in a flat plate shape or a columnar shape from a material such as barium titanate (BaTi03), lead zirconate titanate (PZT), lithium niobate (LiNb03), or lithium tantalate (LiTa03), for example, and is capable of converting a load borne into a voltage signal and outputting the voltage signal to a control unit 19 that controls the entire apparatus of the peeling apparatus 1.

[0045] The peeling unit 4 is provided above the moving path of the holding unit 30 to peel the protection tape 81 of the plate-shaped workpiece 80 held by the holding unit 30, and the peeling unit 4 has, for example, a tape cutting unit 40 that cuts the peeling tape 83 at a prescribed length, a peeling tape providing unit 42 that pulls out the peeling tape 83 from a tape roll 831 in which the peeling tape 83 is wound in a roll shape and provides the peeling tape 83 to the protection tape 81 that is attached to one face 800 of the plate-shaped workpiece 80, a peeling tape attaching unit 44 that attaches the peeling tape 83 to the outer peripheral portion of the protection tape 81, a holding section 41 that holds the peeling tape 83 attached to the protection tape 81, and an X-axis direction moving unit 46 that moves the peeling tape attaching unit 44 and the holding section 41 in the X-axis direction.

[0046] The X-axis direction moving unit 46 functions as a moving unit that relatively moves the holding section 41 and the holding unit 30 in the X-axis direction that is parallel to the holding surface 302, moves the holding section 41 from the outer periphery of the holding surface 302 toward the center, and moves the holding section 41 that has passed through the center of the holding surface 302 in a straight line in a direction away from the center.

[0047] Specifically, the X-axis direction moving unit 46 has a ball screw 460 having an axis in the X-axis direction, a pair of rails 461 disposed in parallel with the ball screw 460, a motor 462 coupled to the ball screw 460 to rotate the ball screw 460, and a movable plate 463 in which a nut is screwed to the ball screw 460 and a side portion is in sliding contact with the rails 461, and when the motor 462 rotates the ball screw 460, the movable plate 463 is guided by the rails 461 to move reciprocally in the X-axis direction, and the peeling tape attaching unit 44 and the gripping portion 41 mounted to the movable plate 463 also move reciprocally in the X-axis direction.

[0048] The peeling tape supplying unit 42 has a roll 420 on which a tape roller 831 is mounted, a pair of guide rollers 421 that guide the peeling tape 83 pulled out from the tape roller 831 downward, and a pair of feed rollers 422 disposed on the lower side of the pair of guide rollers 421. A control mechanism not shown applies a counter-tension to the roll 420 to adjust the tension condition so that the peeling tape 83 pulled out from the tape roller 831 does not slacken. The pair of guide rollers 421 fold back while sandwiching the peeling tape 83 to apply tension and guide toward the pair of feed rollers 422, and the pair of feed rollers 422 can feed the peeling tape 83 toward the gripping portion 41.

[0049] The peeling tape 83 is, for example, a heat seal of a double-layer structure composed of an adhesive layer and a base material that are bonded to the outer peripheral portion of the protective tape 81 by heating. The base material is composed of, for example, a resin such as polyethylene terephthalate. The adhesive layer is composed of, for example, a thermosetting resin such as an epoxy resin. The adhesive force of the peeling tape 83 to the protective tape 81 is set to be stronger than the adhesive force of the protective tape 81 to the plate-shaped workpiece 80. The peeling tape 83 is wound in a state in which the adhesive layer is on the inner side (lower surface side in the stretched state) to become the tape roller 831. Note that the peeling tape 83 is not limited to a heat seal.

[0050] The gripping portion 41 is mounted to the movable plate 463 of the X-axis direction moving unit 46. Figure 1 A gripping portion support 48 is mounted to the side surface of the movable plate 463 of the X-axis direction moving unit 46, and a pair of gripping claws 412 that constitute the gripping portion 41 can move up and down by the gripping portion support 48.

[0051] The pair of gripping claws 412 has, for example, a fixed claw 4121 that is substantially L-shaped in side view, and a movable claw 4122 that is disposed opposite the fixed claw 4121 in the Z-axis direction and is capable of approaching or moving away from the fixed claw 4121. In the gripping portion 41, by causing the movable claw 4122 to approach the fixed claw 4121, it is possible to grip one end of the release tape 83 therebetween. Also, it is possible to position the pair of gripping claws 412 that are gripping the release tape 83 at a height position suitable for the tape adhesion on the protective tape 81 of the plate-shaped workpiece 80 held by the holding unit 30, using the gripping portion support portion 48. On the other hand, it is possible to release the gripping state of the gripping portion 41 on one end of the release tape 83 by causing the movable claw 4122 to move away from the fixed claw 4121.

[0052] Figure 1 The illustrated release tape adhesion unit 44 is disposed between the pair of feed rollers 422 and the gripping portion 41. The release tape adhesion unit 44 has a support table 440 that is fixed to the side surface of the movable plate 463 of the X-axis direction movement unit 46, a presser plate lifting mechanism 441 that is composed of a cylinder or the like and is supported by the support table 440, and a presser plate 442 that is capable of moving up and down by the presser plate lifting mechanism 441.

[0053] A not-illustrated heater that generates heat by flowing of electric current is installed on the presser plate 442, and when the presser plate 442 is caused to descend by the presser plate lifting mechanism 441 to press and adhere the release tape 83 to the outer peripheral portion of the protective tape 81, the presser plate 442 is heated by the not-illustrated heater, and it is possible to cause the release tape 83 to be locally heat-welded to the protective tape 81. By this, it is possible to adhere the release tape 83 to the protective tape 81 well.

[0054] The tape cutting unit 40 is disposed, for example, between the pair of feed rollers 422 and the release tape adhesion unit 44. The tape cutting unit 40 has a placement table 400 that has a placement surface 404 on which the adhesive layer side (lower side) of the release tape 83 is placed and a groove 405 that traverses the placement surface 404 in the width direction (Y-axis direction that is perpendicular to the X-axis direction in the horizontal plane) of the release tape 83, a cutter 401 that travels in the groove 405 in the extension direction of the groove 405, a cutter movement unit 402 that is a ball screw mechanism that supports the cutter 401 via a cutter lifting unit 403 and moves the cutter 401 in the extension direction (Y-axis direction) of the groove 405, and the cutter lifting unit 403 that is composed of a cylinder or the like and causes the cutter 401 to move up and down in the Z-axis direction with respect to the placement surface 404.

[0055] For example, as a tensile load measuring section that measures a tensile load applied to the protection tape 81 interposed between the holding section 41 and the holding surface 302, the peeling unit 4 has a tensile load measuring section 47 that is constituted by a piezoelectric element provided to a holding section support section 48 that supports the holding section 41. Hereinafter, the tensile load measuring section 47 will be referred to as a holding section side tensile load measuring section 47. Also, the holding section side tensile load measuring section 47 has, for example, an up-down direction load measuring piezoelectric element 471 and a horizontal direction load measuring piezoelectric element 472. Note that the peeling apparatus 1 can have at least either one of the stage side tensile load measuring section 35 or the holding section side tensile load measuring section 47 as the tensile load measuring section.

[0056] The holding section support section 48 is, for example, an electric cylinder in which a piston rod 483 is movable up and down in the Z-axis direction inside a cylinder 484. Also, for example, the up-down direction load measuring piezoelectric element 471 has a cylindrical outer shape, and is provided integrally to the piston rod 483 in a manner that two rods are linked up and down to become one piston rod 483.

[0057] The horizontal direction load measuring piezoelectric element 472 is, for example, formed in a flat plate shape, and is provided at a linking position of a front end of the piston rod 483 and the fixed claw 4121 in a state of being sandwiched from both sides in the X-axis direction by two members. Note that the up-down direction load measuring piezoelectric element 471 and the horizontal direction load measuring piezoelectric element 472 are constituted by the same material as the stage side tensile load measuring section 35 described earlier.

[0058] For example, a recovery box 17 that drops and recovers the protection tape 81 peeled by the peeling unit 4 is provided at a position below a moving path of the holding section 41.

[0059] The peeling device 1, for example, includes a control unit 19 that controls various structures of the device. The control unit 19 comprises a CPU that performs calculations according to a control program and a storage medium such as a memory. It is electrically connected to the holding part support 48, such as an electric cylinder that moves the worktable moving unit 13, the X-axis moving unit 46, and the holding part 41, via a wired or wireless communication path (not shown). Under the control of the control unit 19 on the worktable moving unit 13, the control unit 19 controls the movement speed of the holding unit 30, which holds the plate-shaped workpiece 80, in the X-axis direction, and controls its alignment relative to the holding part 41, etc. Furthermore, under the control of the control unit 19 on the X-axis moving unit 46 and the holding part support 48, the control unit 19 controls the movement speed and alignment of the holding part 41, which holds the peeling strip 83 attached to the protective strip 81 of the plate-shaped workpiece 80. Additionally, for example, the control unit 19 controls the X-axis moving unit 46 by controlling the rotational speed of the motor 462. In addition, the control unit 19 can receive information about the tensile load measured by each load measuring unit from the table-side tensile load measuring unit 35 and the handle-side tensile load measuring unit 47.

[0060] For example, if the motor 132 of the worktable moving unit 13 is a servo motor, the rotary encoder of the servo motor is connected to the control unit 19, which also functions as a servo amplifier. After providing an action signal to the servo motor from the output interface of the control unit 19, the rotational speed of the servo motor is output as an encoder signal to the input interface of the control unit 19. Then, the control unit 19, which receives the encoder signal, sequentially identifies the amount of movement of the holding unit 30 according to the rotation angle of the motor 132, thereby enabling it to sequentially identify the position of the holding unit 30 in the X-axis direction.

[0061] Next, regarding the use Figure 1 The peeling device 1 shown will be described in the process of peeling the protective strip 81 from the plate-shaped workpiece 80. First, the plate-shaped workpiece 80, which is integral with the annular frame 84, is placed on the holding surface 302 of the holding unit 30 with the protective strip 81 facing upwards, and the annular frame 84 is placed on the frame fixing unit 32 disposed on the outer periphery of the holding unit 30. Next, a suction source (not shown) is activated, the holding surface 302 suctions and holds the plate-shaped workpiece 80, and the frame fixing unit 32 suctions and fixes the annular frame 84. Furthermore, the annular frame 84 is lowered to, for example, a position lower than the holding surface 302.

[0062] pass Figure 1The pair of guide rollers 421 shown sends the peeling tape 83 from the tape roller 831 toward the gripping section 41. The adhesive layer side (inner side) of the peeling tape 83 is placed on the placement surface 404 of the placement table 400 of the tape cutting unit 40, and then, after one end of the peeling tape 83 is positioned on the upper surface of the fixed jaw 4121 of the gripping section 41, the movable jaw 4122 is brought close to the fixed jaw 4121, and the gripping section 41 grips one end of the peeling tape 83. Then, the gripping section 41 is moved in the -X direction by the X-axis direction moving unit 46, and the peeling tape 83 gripped is stretched in this direction. At this stage, the pressing plate 442 of the peeling tape attaching unit 44 and the cutter 401 of the tape cutting unit 40 are in a standby state on the upper side of the peeling tape 83.

[0063] For example, the holding unit 30 is moved in the +X direction, and the outer peripheral portion of the protection tape 81 is positioned directly below the peeling tape attaching unit 44. Then, the pressing plate 442 heated by a not-shown heater provided inside is lowered, and the peeling tape 83 is pressed on the outer peripheral portion of the protection tape 81 from above by the lower end of the pressing plate 442, and the adhesive layer of the peeling tape 83 is heat-fused to the protection tape 81.

[0064] In this state, the cutter 401 is positioned at a position where the groove 405 of the placement table 400 exposed from one side edge side of the peeling tape 83 reaches an end. Then, the cutter 401 is lowered to the lowermost end of the cutter 401 in the groove 405 by the cutter lifting unit 403. Then, the cutter 401 is moved in the -Y direction along the extension direction of the groove 405, and the peeling tape 83 is cut by the cutter 401. After the peeling tape 83 is cut by the cutter 401, the cutter 401 and the pressing plate 442 are raised in the +Z direction and retreat from the peeling tape 83.

[0065] (Embodiment A of peeling of the protection tape 81 in the peeling device 1)

[0066] The case where, after the holding unit 30 is moved in the X-axis direction and the gripping section 41 is positioned at a prescribed distance from the holding surface 302 of the holding unit 30, the gripping section 41 is moved in the horizontal direction is described.

[0067] The gripping part 41, which holds the peeling strip 83, moves in the +Z direction, peeling a portion of the protective strip 81 from one surface 800 of the plate-shaped workpiece 80. Next, the gripping part 41 is moved in the -X direction by the X-axis moving unit 46. Additionally, the holding unit 30 is moved in the +X direction by the worktable moving unit 13, causing the gripping part 41 to move radially relative to the center from the outer periphery of the plate-shaped workpiece 80, peeling the protective strip 81 from the plate-shaped workpiece 80. Alternatively, a rotating roller (not shown) can be arranged above the moving path of the holding unit 30, and by bringing the protective strip 81 abutting against this rotating roller and peeling it off, bending of the protective strip 81 that may occur during peeling can be suppressed.

[0068] Alternatively, for example, as long as the gripping part 41 can be moved radially relative to the center from the outer periphery of the plate-shaped workpiece 80, the protective strip 81 can be peeled off from the plate-shaped workpiece 80. Therefore, for example, in order to prevent the holding unit 30 from moving in the +X direction, the protective strip 81 can be peeled off by moving only the gripping part 41 in the -X direction.

[0069] In this embodiment, when the protective strip 81 is peeled off from the plate-shaped workpiece 80, Figure 2 The gripping side tensile load measuring unit 47 shown can accurately measure the tensile load applied to the peeling strip 83, which is integrated with the protective strip 81 between the gripping part 41 and the retaining surface 302.

[0070] For example, the tensile load measured by the gripping side tensile load measuring unit 47 is performed by a vertical load measuring piezoelectric element 471 and a horizontal load measuring piezoelectric element 472. Additionally, in Figure 2 In the diagram, the structures such as the stripping unit 4 and the holding unit 30 are shown in a simplified manner.

[0071] exist Figure 2 In the diagram, the upward-pointing arrow F1 represents the tensile load F1 applied to the peeling strip 83, which is integral with the protective strip 81 located between the gripping portion 41 and the retaining surface 302 of the retaining unit 30. Furthermore, the tensile load F1 is... Figure 2 The tensile load F1 shown is the result of the combination of the tensile load Fx1 in the X-axis direction (-X direction) and the tensile load Fz1 in the Z-axis direction (+Z direction). Moreover, according to the Pythagorean theorem, Equation 1 below holds.

[0072] (Tensive load Fx1 in the X-axis direction) 2 +(Tensive load Fz1 in the Z-axis direction) 2 = (Tensive load F1) 2 ...(Equation 1)

[0073] Here, the X-axis direction tensile load Fxl is measured by the horizontal direction load measuring piezoelectric element 472 at every prescribed time interval. That is, by the X-axis direction tensile load Fxl, the horizontal direction load measuring piezoelectric element 472 is slightly deformed, and a potential difference corresponding to the load is generated in the horizontal direction load measuring piezoelectric element 472. By the generation of the potential difference in the horizontal direction load measuring piezoelectric element 472, a load detection signal is sent from the horizontal direction load measuring piezoelectric element 472 to the control unit 19 at every measurement. Figure 1 The control unit 19 sends the load detection signal. In addition, the Z-axis direction tensile load Fzl is measured by the up-and-down direction load measuring piezoelectric element 471 at every prescribed time interval, and a load detection signal is sent to the control unit 19 at every measurement.

[0074] The control unit 19 performs an arithmetic process of substituting the measured value of the X-axis direction tensile load Fxl and the measured value of the Z-axis direction tensile load Fzl into Equation 1, and measures the tensile load Fl at every prescribed time interval. Furthermore, the control unit 19 uses the tensile load Fl measured at every prescribed time interval as information for optimizing the peeling operation of the peeling unit 4 with respect to the protective tape 81. That is, according to the value of the tensile load Fl measured at every prescribed time interval, the moving speed of the holding portion 41 in the -X direction by the X-axis direction moving unit 46 is optimized, for example, by the control unit 19. As a result, a state in which the feedback control is performed in such a manner that the tensile load Fl at the time when the holding portion 41 peels the peeling tape 83 integrated with the protective tape 81 becomes the optimum tensile load that does not cause the rupture of the plate-like workpiece 80 or the generation of paste residue on the plate-like workpiece 80, and the like is obtained. In addition, the peeling speed of the holding portion 41 is not too slow, and the protective tape 81 is not peeled from the plate-like workpiece 80 while wasting time.

[0075] When the protective tape 81 is completely peeled from one face 800 of the plate-like workpiece 80, the holding portion 41 that holds the peeling tape 83 attached to the protective tape 81 is moved onto the recovery tank 17. Then, the holding portion 41 releases the holding of the peeling tape 83, and the protective tape 81 and the peeling tape 83 fall into the recovery tank 17.

[0076] As in the present embodiment, the protective member that protects the plate-like workpiece 80 is the protective tape 81, the holding portion 41 holds the peeling tape 83 attached to the protective tape 81 instead of holding the outer peripheral portion of the protective tape 81, and the holding portion side tensile load measuring portion 47 measures the tensile load applied to the peeling tape 83 integrated with the protective tape 81 between the holding portion 41 and the holding face 302 instead of measuring the tensile load applied to the protective tape 81 by having the peeling tape attaching unit 44 that attaches the peeling tape 83 to the outer peripheral portion of the protective tape 81, thereby enabling the optimization of the peeling operation of the peeling unit 4.

[0077] (Embodiment B of peeling of the protective tape 81 in the peeling device 1)

[0078] After the gripping portion 41 that grips the peeling tape 83 is moved in the +Z direction to peel a portion of the protective tape 81 from one face 800 of the plate-shaped workpiece 80, the peeling of the protective tape 81 is further performed, as shown in Figure 3 illustrated. In this case, the gripping portion 41 is stopped at a prescribed height position and a prescribed position P2 in the X-axis direction, and the control unit 19 recognizes the height position and the position P2 in the X-axis direction at which the gripping portion 41 is present.

[0079] The holding unit 30 is moved in the +X direction by the stage moving unit 13, and the stopped gripping portion 41 is relatively moved in the radial direction from the outer periphery toward the center of the plate-shaped workpiece 80 to peel the protective tape 81 from the plate-shaped workpiece 80. In addition, a not-illustrated rotating roller can be provided above the moving path of the holding unit 30, and the generation of a bend in the protective tape 81 that can be caused when the protective tape 81 is peeled can be suppressed by bringing the protective tape 81 into abutment with the rotating roller and peeling it.

[0080] In the present embodiment, when the protective tape 81 is peeled from the above-described plate-shaped workpiece 80, the stage-side tensile load measuring portion 35 measures a tensile load that is applied to the peeling tape 83 that is integrated with the protective tape 81 between the gripping portion 41 and the holding surface 302.

[0081] In Figure 3 , the arrow F2 indicates a tensile load F2 that is applied to the peeling tape 83 that is integrated with the protective tape 81 between the gripping portion 41 and the holding surface 302 of the holding unit 30. Furthermore, the tensile load F2 is a tensile load F2 that is obtained by combining an X-axis direction tensile load Fx2 that is oriented in the -X direction and a Z-axis direction tensile load Fz2 that is oriented in the +Z direction, as shown in Figure 3

[0082] Figure 3 The arrow R1 shown in

[0083] ​The arrow R2 is a 2nd measurement load R2 that the 2nd table side tensile load measuring section 352 is able to measure at every prescribed time interval in the Z-axis direction. The 2nd measurement load R2 has, for example, an orientation in the +Z direction. Information on the value of the 2nd measurement load R2 is sent to the control unit 19 at every prescribed time interval.

[0084] Figure 3 The distance L2 in the X-axis direction of the illustrated 1st table side tensile load measuring section 351 and 2nd table side tensile load measuring section 352 is a device design value that the control unit 19 recognizes in advance, and is a constant.

[0085] The change distance M in the X-axis direction from the 1st table side tensile load measuring section 351 to the gripper 41 that has stopped at the position P2 in the X-axis direction is a variable that changes by movement of the holding unit 30 in the X-axis direction. Also, the control unit 19 is able to grasp the position of the 1st table side tensile load measuring section 351 that moves together with the movable member 133 from the encoder signal that is fed back from the rotation encoder of the motor 132 (servo motor 132) of the table moving unit 13 to the control unit 19, so the control unit 19 is also able to recognize the value of this change distance M sequentially at every prescribed time interval.

[0086] The distance N in the Z-axis direction of the 1st table side tensile load measuring section 351 that has recognized the height position by the control unit 19 and the gripper 41 that has stopped at the position P2 becomes a constant that the control unit 19 recognizes in advance.

[0087] According to the Pythagorean theorem, the following formula 2 is established.

[0088] (X-axis direction tensile load Fx2) 2 +(Z-axis direction tensile load Fz2) 2 =(tensile load F2) 2 ··· (formula 2)

[0089] Also, according to the balance of forces in the Z-axis direction, the following formula 3 is established.

[0090] (Z-axis direction tensile load Fz2) = (1st measurement load R1) + (2nd measurement load R2) ··· (formula 3)

[0091] Furthermore, according to the balance of the moment of force around the 1st table side tensile load measuring section 351 when the 1st table side tensile load measuring section 351 is assumed to be the origin, the following formula 4 is established.

[0092] (X-axis direction tensile load Fx2) x (constant distance N) = (2nd measurement load R2) x (distance L2) + (Z-axis direction tensile load Fz2) x (change distance M) ··· (formula 4)

[0093] According to Formula 3, the control unit 19 can measure the Z-axis direction tensile load Fz2 at every prescribed time interval. In addition, according to Formula 5 which is a modification of Formula 4 described below, the control unit 19 can measure the X-axis direction tensile load Fx2 at every prescribed time interval.

[0094] (X-axis direction tensile load Fx2) = {(2nd measurement load R2) x (distance L2) + (Z-axis direction tensile load Fz2) x (change distance M)} / (constant distance N) (Formula 5)

[0095] The control unit 19 performs an operation process of substituting the value regarding the X-axis direction tensile load Fx2 and the value regarding the Z-axis direction tensile load Fz2 into Formula 2, and measures the tensile load F2 at every prescribed time interval. Also, the control unit 19 uses the tensile load F2 measured at every prescribed time interval as information for optimizing the peeling operation of the peeling unit 4 against the protective tape 81. That is, according to the value of the tensile load F2 measured at every prescribed time interval, the moving speed of the holding unit 30 by the work table moving unit 13 is optimized, for example, by the control unit 19. As a result, it becomes a state in which feedback control is performed in such a manner that the tensile load F2 at the time when the gripping portion 41 peels the peeling tape 83 integrated with the protective tape 81 becomes an optimum tensile load which does not cause the plate-like workpiece 80 to be broken or paste to be left on the plate-like workpiece 80, and the like. In addition, the peeling speed of the gripping portion 41 which moves relatively in the X-axis direction with respect to the moving holding unit 30 is not too slow, and the protective tape 81 is not peeled from the plate-like workpiece 80 while wasting time.

[0096] If the work table side tensile load measuring portion 35, i.e., the 1st work table side tensile load measuring portion 351 and the 2nd work table side tensile load measuring portion 352 are constituted by piezoelectric elements provided to the support portion 31 which supports the holding unit 30 as in the present embodiment, the tensile load applied to the protective tape 81 which is a protective member can be accurately measured.

[0097] When the protective tape 81 is completely peeled from one face 800 of the plate-like workpiece 80, the gripping portion 41 which grips the peeling tape 83 pasted to the protective tape 81 is moved onto the recovery tank 17. Then, the gripping portion 41 releases the grip of the peeling tape 83, and the protective tape 81 and the peeling tape 83 fall into the recovery tank 17.

[0098] The peeling apparatus 1 of the 1st embodiment of the present application is not limited to the above-described embodiment, and of course can be implemented in various different manners within the scope of the technical idea thereof. In addition, the shape and the like of each structural element of the peeling apparatus 1 illustrated in the drawings are not limited thereto, and can be appropriately changed within the range in which the effects of the present application can be exerted.

[0099] For example, as shown in Figure 4 The plate-shaped workpiece 80 can also have a cutout portion 806 at the outer peripheral portion. The cutout portion 806 is, for example, a notch as a mark indicating a crystal orientation, which is formed in a state of being recessed toward the radial inner side of the center of the plate-shaped workpiece 80 at the outer periphery of the plate-shaped workpiece 80. Alternatively, the cutout portion 806 can be an orientation flat. In this case, the cutout portion 806 is formed by flatly cutting a portion of the outer periphery of the plate-shaped workpiece 80.

[0100] For example, as shown in Figure 4 Figure 1 The holding unit 30 shown in Figure 1 The holding portion 41 shown in

[0101] A through-hole 341 of a circular shape is formed at the outer periphery of the holding surface 302 in a manner corresponding to the cutout portion 806 of the plate-shaped workpiece 80 placed on the holding surface 302, the through-hole 341 constituting the partial peeling portion 34 and penetrating the holding surface 302 and the lower surface of the holding unit 30 (the lower surface of the frame 301). Specifically, the through-hole 341 is provided at the holding surface 302 in a manner in which the distance from the center of the plate-shaped workpiece 80 to the cutout portion 806 coincides with the distance from the center of the holding surface 302 to the through-hole 341.

[0102] In addition, the diameter of the through-hole 341 is set to be slightly smaller than the width of the cutout portion 806, for example. A jacking pin 342 that jacks up a portion of the protective tape 81 adhered to one face 800 of the plate-shaped workpiece 80 is provided directly below the through-hole 341 of the partial peeling portion 34 in a manner capable of moving up and down by the up-and-down driving portion 345. The jacking pin 342 is formed in a rod shape extending in the up-and-down direction, and the outer diameter of the jacking pin 342 is slightly smaller than the through-hole 341. The jacking pin 342 has, for example, a shape in which the front end (upper end) is sharp, and is capable of breaking through the dicing tape 82 adhered to the other face 801 of the plate-shaped workpiece 80.

[0103] In addition, for example, an unillustrated ejection hole that ejects a fluid from the front end in the extending direction is formed on the jacking pin 342. A fluid supply source 347 is connected to the lower end of the ejection hole via a valve 346, and a fluid is supplied from the fluid supply source 347 into the jacking pin 342 by opening the valve 346. In addition, the fluid supplied from the fluid supply source 347 is not particularly limited, and compressed air is used as the fluid in the present embodiment. ​

[0104] The up-and-down driving section 345 is constituted by, for example, an air or motor driven lead screw, and is capable of moving the jacking pin 342 up and down while guiding it in the up-and-down direction within the through-hole 341 of the holding unit 30.

[0105] In this way, the jacking pin 342 is configured to rise by the up-and-down driving section 345 while ejecting air from the outlet of the ejection hole, and to break through the dicing tape 82. In addition, the jacking pin 342 protrudes from the holding surface 302 after breaking through the dicing tape 82, and is capable of jacking up the protective tape 81 on the cutout portion 806 of the plate-shaped workpiece 80. That is, the jacking pin 342 is configured to jack up the outer peripheral portion of the protective tape 81 by rising while ejecting air from the ejection hole of the jacking pin 342 to float the protective tape 81, or to jack up the outer peripheral portion of the protective tape 81 by rising the jacking pin 342 while ejecting air from the ejection hole to peel the outer peripheral portion of the protective tape 81 from the plate-shaped workpiece 80.

[0106] Then, Figure 4 The holding section 41 shown in the drawing is capable of holding the outer peripheral portion of the protective tape 81 peeled by the partial peeling section 34 to peel the protective tape 81 from the plate-shaped workpiece 80.

[0107] (Second Embodiment of the Peeling Apparatus)

[0108] Figure 5 The peeling apparatus 2 of the present application shown in the drawing (hereinafter referred to as the peeling apparatus 2 of the second embodiment) is an example of a peeling apparatus that peels the protective member 85 adhered to the one face 800 of the plate-shaped workpiece 80. Figure 5 The peeling apparatus 2 of the present application shown in the drawing (hereinafter referred to as the peeling apparatus 2 of the second embodiment) is an example of a peeling apparatus that peels the protective member 85 adhered to the one face 800 of the plate-shaped workpiece 80.

[0109] The protective member 85 adhered in a manner to cover the entire one face 800 of the plate-shaped workpiece 80 facing downward is, for example, a resin film 87 (refer to FIG. 1) adhered to the one face 800 of the plate-shaped workpiece 80. Figure 6) and the circular sheet 86, the resin film 87 being formed by pressing one face 800 of the plate-like workpiece 80 against a liquid resin supplied to the circular sheet 86 larger in diameter than the plate-like workpiece 80, and spreading the liquid resin from the center of the plate-like workpiece 80 toward the outer peripheral side, and then curing the liquid resin by irradiating the liquid resin with, for example, ultraviolet rays, after the liquid resin has spread over the entire one face 800. Also, in the present embodiment, the protective member 85 is composed of the circular sheet 86 and the resin film 87, and has the protruding portion 850 protruding from the outer periphery of the plate-like workpiece 80 slightly radially outward. Figure 6 The protruding portion 850 is shown.

[0110] In Figure 5 A column 21 is vertically provided on the rear side (-X direction side) of the base 20 of the peeling apparatus 2 shown, and a pad moving unit 60 is provided at the upper portion of the front surface of the +X direction side of the column 21, which moves the holding unit 50 provided to the movable plate 601 in the Y axis direction by rotating a ball screw 600 by a motor 602.

[0111] The pad moving unit 60 is a part of the peeling unit 6, and functions as a moving unit that relatively moves the holding portion 61 and the holding unit 50 in the Y axis direction parallel to the holding surface 502, moves the holding portion 61 from the outer periphery of the holding surface 502 toward the center, and moves the holding portion 61 that has passed through the center of the holding surface 502 in a straight line in a direction away from the center.

[0112] A pad lifting unit 66 that moves the holding unit 50 in the Z axis direction is provided to the movable plate 601. The pad lifting unit 66 moves the holding unit 50 provided to the movable plate 661 in the Z axis direction by rotating a ball screw 66 by a motor 662.

[0113] The holding unit 50 that holds the other face 801 of the plate-like workpiece 80 by the holding surface 502 is supported by an arm portion 52 fixed at one end to the movable plate 661 and extending in the X axis direction, and is installed to the lower surface side of the other end of the +X direction side of the arm portion 52 via a support portion 53.

[0114] As Figure 6 In the present embodiment, the holding unit 50 is an attraction holding pad, and has an adsorption portion 500 composed of a porous member that adsorbs the plate-like workpiece 80, and a frame 501 that supports the adsorption portion 500. The adsorption portion 500 communicates with an attraction source not shown via an attraction pipe 509 and a resin pipe or a joint, etc. Also, the attraction force generated by the attraction source is transmitted to the holding surface 502 that is a common plane formed by the exposed surface of the adsorption portion 500 and the lower surface of the frame 501, and thus the holding unit 50 adsorbs and holds the plate-like workpiece 80 by the holding surface 502.

[0115] Figure 5 The support portion 53 is, for example, a circular ring plate, and its upper surface is connected to the lower surface of the arm portion 52 by fixing bolts or the like, not shown. A pad-side tensile load measuring portion 64, which is a tensile load measuring portion, is installed on the lower surface of the support portion 53, and measures the tensile load applied to the protective member 85 between the holding portion 61 and the holding surface 502.

[0116] The pad-side tensile load measuring portion 64 is composed of piezoelectric elements disposed on the support portion 53 that supports the holding unit 50. That is, for example, the pad-side tensile load measuring portion 64 is a piezoelectric element such as barium titanate, which is formed in a cylindrical or prismatic shape, and two (only one is shown in the figure) are disposed in opposition in the Y-axis direction, and are disposed in a manner that links the support portion 53 and the holding unit 50 and bears the weight of the holding unit 50. That is, the pad-side tensile load measuring portion 64 is composed of a first pad-side tensile load measuring portion 641 and a second pad-side tensile load measuring portion 642, as shown in the figure. Figure 5 The pad-side tensile load measuring portion 64 is composed of piezoelectric elements disposed on the support portion 53 that supports the holding unit 50. That is, for example, the pad-side tensile load measuring portion 64 is a piezoelectric element such as barium titanate, which is formed in a cylindrical or prismatic shape, and two (only one is shown in the figure) are disposed in opposition in the Y-axis direction, and are disposed in a manner that links the support portion 53 and the holding unit 50 and bears the weight of the holding unit 50. That is, the pad-side tensile load measuring portion 64 is composed of a first pad-side tensile load measuring portion 641 and a second pad-side tensile load measuring portion 642, as shown in the figure. Figure 6 The pad-side tensile load measuring portion 64 is composed of piezoelectric elements disposed on the support portion 53 that supports the holding unit 50. That is, for example, the pad-side tensile load measuring portion 64 is a piezoelectric element such as barium titanate, which is formed in a cylindrical or prismatic shape, and two (only one is shown in the figure) are disposed in opposition in the Y-axis direction, and are disposed in a manner that links the support portion 53 and the holding unit 50 and bears the weight of the holding unit 50. That is, the pad-side tensile load measuring portion 64 is composed of a first pad-side tensile load measuring portion 641 and a second pad-side tensile load measuring portion 642, as shown in the figure.

[0117] The pad-side tensile load measuring portion 64 is composed of piezoelectric elements disposed on the support portion 53 that supports the holding unit 50. That is, for example, the pad-side tensile load measuring portion 64 is a piezoelectric element such as barium titanate, which is formed in a cylindrical or prismatic shape, and two (only one is shown in the figure) are disposed in opposition in the Y-axis direction, and are disposed in a manner that links the support portion 53 and the holding unit 50 and bears the weight of the holding unit 50. That is, the pad-side tensile load measuring portion 64 is composed of a first pad-side tensile load measuring portion 641 and a second pad-side tensile load measuring portion 642, as shown in the figure. Figure 5 The pad-side tensile load measuring portion 64 is composed of piezoelectric elements disposed on the support portion 53 that supports the holding unit 50. That is, for example, the pad-side tensile load measuring portion 64 is a piezoelectric element such as barium titanate, which is formed in a cylindrical or prismatic shape, and two (only one is shown in the figure) are disposed in opposition in the Y-axis direction, and are disposed in a manner that links the support portion 53 and the holding unit 50 and bears the weight of the holding unit 50. That is, the pad-side tensile load measuring portion 64 is composed of a first pad-side tensile load measuring portion 641 and a second pad-side tensile load measuring portion 642, as shown in the figure.

[0118] The pad-side tensile load measuring portion 64 is composed of piezoelectric elements disposed on the support portion 53 that supports the holding unit 50. That is, for example, the pad-side tensile load measuring portion 64 is a piezoelectric element such as barium titanate, which is formed in a cylindrical or prismatic shape, and two (only one is shown in the figure) are disposed in opposition in the Y-axis direction, and are disposed in a manner that links the support portion 53 and the holding unit 50 and bears the weight of the holding unit 50. That is, the pad-side tensile load measuring portion 64 is composed of a first pad-side tensile load measuring portion 641 and a second pad-side tensile load measuring portion 642, as shown in the figure.

[0119] In addition, the moving unit 63 is referred to as the holding portion moving unit 63 in the following description.

[0120] The gripping portion moving unit 63 includes a ball screw 630 having an axis in the Y-axis direction, a pair of rails 631 disposed in parallel with the ball screw 630, a motor 632 that rotates the ball screw 630, and a movable block 633 in which a nut is screwed with the ball screw 630 and the side portion is in sliding contact with the rails 631. Also, when the motor 632 rotates the ball screw 630, the movable block 633 is guided by the rails 631 to move in the Y-axis direction, and the gripping portion 61 disposed in the movable block 633 moves in the Y-axis direction in conjunction with the movement of the movable block 633.

[0121] An arm-shaped housing 681 that supports a spindle 680 having an axis in the X-axis direction so as to be rotatable is installed on the side surface of the movable block 633. Also, a coupling member 616 disposed on the front end of the +X direction side of the spindle 680 has a link block 614 installed thereon that supports the gripping portion 61 via the upper and lower direction load measuring piezoelectric element 673 of the gripping portion side tensile load measuring unit 67. A jig base 610 that supports the gripping jig 612 of the gripping portion 61 via the horizontal direction load measuring piezoelectric element 674 of the gripping portion side tensile load measuring unit 67 is installed on the link block 614. In addition, although not shown, the arm-shaped housing 681 can be raised and lowered in the Z-axis direction by a raising and lowering unit such as a ball screw mechanism not shown, and the gripping portion 61 can also be raised and lowered in the Z-axis direction.

[0122] The gripping jig 612 can sandwich the gripping object between a pair of gripping plates that can approach and move away from each other, and can change the angle with respect to the gripping object by the spindle 680.

[0123] The gripping portion side tensile load measuring unit 67 that measures the tensile load applied to the protection member 85 interposed between the gripping portion 61 and the holding surface 502 of the holding unit 50 is composed of, for example, a horizontal direction load measuring piezoelectric element 674 formed in a flat plate shape of barium titanate or the like and an upper and lower direction load measuring piezoelectric element 673 formed in a flat plate shape of the same raw material. Also, the upper and lower direction load measuring piezoelectric element 673 is disposed in a state of being sandwiched from the Z-axis direction between the lower surface of a block-shaped coupling member 616 installed on the front end side of the spindle 680 and the upper surface of the link block 614. In addition, the horizontal direction load measuring piezoelectric element 674 is disposed in a state of being sandwiched from both sides in the Y-axis direction by the link block 614 and the jig base 610 of the gripping portion 61.

[0124] Figure 5 The illustrated rotary roller 211 is, for example, formed in a cylindrical shape and is rotated by a motor not shown with the axis in the X-axis direction as the axis. The rotary roller 211, by abutting against the protection member 85, for example, functions to prevent the generation of aFigure 6 The folding effect of the resin film 87 is shown. In addition, the rotating roller 211 can also be able to move in the Y-axis direction.

[0125] The placement table 27 on which the protective members 85 peeled from the plate-shaped workpiece 80 are placed, for example, has an outer shape that is substantially rectangular, and has a placement surface that is in a bamboo curtain shape. That is, the placement table 27 is configured so that the length direction of a plate-shaped linear material 271 is set as the Y-axis direction, the linear materials 271 are aligned at equal intervals with gaps in the X-axis direction, and one end of each linear material 271 on the +Y-axis direction side is joined and fixed by a not-shown rod-shaped joining member. For example, the placement table 27 is fixed to the +X-direction side surface of the column 21 by joining the not-shown rod-shaped joining members of the linear materials 271, and is disposed below the movement path of the gripping portion.

[0126] The falling unit 26 that makes the protective members 85 on the placement table 27 fall is configured from a ball screw 260 having an axis in the Y-axis direction, a pair of guide rails 261 disposed in parallel with the ball screw 260, a motor 262 that rotates the ball screw 260, a movable member 263 in a substantially L shape in side view, the inside of which is screwed to the ball screw 260, a side portion 2631 that is in sliding contact with the guide rails 261, and a protruding pin 2634 disposed in the movable member 263.

[0127] The movable member 263, for example, has a side portion 2631 that is screwed to the ball screw 260, and a pin platform portion 2632 that is formed so as to protrude toward the +X-direction side from the side surface of the upper end portion of the side portion 2631. Two protruding pins 2634 that protrude toward the +Z-direction are disposed on the upper surface of the pin platform portion 2632. The protruding pins 2634 are disposed at a prescribed distance apart in the X-axis direction, and when the motor 262 rotates the ball screw 260, the movable member 263 is guided by the guide rails 261 to move in the Y-axis direction, and the protruding pins 2634 disposed on the movable member 263 move in the Y-axis direction in a manner that passes through the gaps between the linear materials 271 of the placement table 27.

[0128] A dust collection box 28 is provided on the base 20 to collect the protective component 85 after it has been peeled off. The dust collection box 28 is, for example, generally rectangular in shape, and has an opening at the lower part of the +Y direction side of the loading table 27. A transmissive light sensor with a light-emitting part 280 (-Y direction side) and a light-receiving part 281 (+Y direction side) is provided on the upper part of the dust collection box 28. The protective component 85 peeled off from the plate-shaped workpiece 80 and placed on the loading table 27 falls into the dust collection box 28 through the falling unit 26. The protective component 85 accumulates in the dust collection box 28 to a predetermined height. The inspection light emitted from the light-emitting part 280 is blocked by the protective component 85, reducing the amount of light received by the light-receiving part 281. As a result, the light sensor detects that an amount of protective component 85 that should be recycled has accumulated in the dust collection box 28.

[0129] For example, a worktable holding table 22 is installed at a position within the movable range of the holding part 61 of the peeling unit 6 on the front surface of the column 21, and a transfer worktable 221 for placing the plate-shaped workpiece 80 for peeling off the protective component 85 is provided on the worktable holding table 22. The transfer worktable 221 can attract and hold the plate-shaped workpiece 80 placed on its holding surface in a state, for example, with one surface 801 facing upward. Alternatively, a structure in which the transfer worktable 221 is not provided on the worktable holding table 22 can also be adopted.

[0130] On the worktable holding table 22, a plurality of (e.g., 8) outer portion peeling units 23 are arranged at certain intervals along the circumference with the transfer worktable 221 as the center. These outer portion peeling units 23 hold the protrusion 850 and peel the outer portion of the protective member 85 from the plate-shaped workpiece 80. Additionally, in Figure 5 The structure of the outer part of the peeling unit 23 is enlarged and shown in detail in the middle.

[0131] The outer part peeling unit 23 has: a protrusion holding part 230 that holds the protrusion 850; a vertical moving part (not shown) that moves the protrusion holding part 230 along the Z-axis direction (vertical direction); and a horizontal moving part 234 that moves the protrusion holding part 230 along the horizontal direction.

[0132] like Figure 5 As shown, the horizontal moving part 234 rotates the ball screw 2341, which extends horizontally, via the motor 2340, thereby causing the protruding holding part 230, which is disposed on a slider 2342 (e.g., L-shaped in side view), via the vertical moving part (not shown), to reciprocate radially along the transfer table 221. The vertical moving part (not shown) is, for example, composed of a ball screw mechanism.

[0133] The extension portion holding portion 230 has a substantially rectangular parallelepiped-shaped holding table 2301, a cylinder mechanism 2303 provided on a side surface of the holding table 2301, and a holding plate 2302 that moves up and down in the Z-axis direction by the cylinder mechanism 2303 and can sandwich a holding object between an upper surface of the holding table 2301 and a lower surface of the holding plate 2302.

[0134] Each of the extension portion holding portions 230 is provided so that an opening portion between the holding plate 2302 and the holding table 2301 faces the transfer table 221 side.

[0135] The peeling apparatus 2 has, for example, a control unit 29 that controls each structure of the apparatus, and the control unit 29 is constituted by a CPU and a storage medium such as a memory that perform arithmetic processing according to a control program, and is electrically connected to the pad moving unit 60, the pad lifting unit 66, the holding portion moving unit 63, and the like via a communication path not shown by wire or wirelessly. Under the control of the control unit 29 over the pad moving unit 60 and the pad lifting unit 66, control of moving speed in the Y-axis direction and the Z-axis direction of the holding unit 50 that holds the plate-shaped workpiece 80 and alignment control with respect to the holding portion 61 and the like are performed. In addition, under the control of the control unit 29 over the holding portion moving unit 63, control of moving speed and alignment control of the holding portion 61 that holds the extension portion 850 of the protection member 85 that protects the plate-shaped workpiece 80 and the like are performed. In addition, the control unit 19 can receive information on the tensile load measured by each of the load measuring portions from the pad-side tensile load measuring portion 64 and the holding portion-side tensile load measuring portion 67.

[0136] For example, in the case where the motor 602 of the pad moving unit is a servo motor, a rotation encoder of the servo motor is connected to the control unit 29 that also has a function as a servo amplifier, and after an operation signal is supplied from an output interface of the control unit 29 to the servo motor, a rotation speed of the servo motor is output as an encoder signal to an input interface of the control unit 29. Then, the control unit 29 that receives the encoder signal sequentially recognizes the moving amount of the holding unit 50 according to the rotation angle of the servo motor, and thus can sequentially recognize the position in the Y-axis direction of the holding unit 50.

[0137] Hereinafter, the operation of the peeling apparatus 2 at the time of peeling the protection member 85 from the plate-shaped workpiece 80 shown in FIG. 1 will be described. First, the holding unit 50 is moved to a position above the plate-shaped workpiece 80 by the pad moving unit 60. Figure 5 Figure 5 ​The illustrated plate-like workpiece 80 after grinding is placed on the transfer table 221 with the ground face, i.e., the other face 801, as the upper side. The holding unit 50 moves in the +Y direction and is positioned above the plate-like workpiece 80 with the center of the holding face 502 substantially aligned with the center of the other face 801 of the plate-like workpiece 80. Next, the holding unit 50 is lowered so that the holding face 502 comes into contact with the other face 801 of the plate-like workpiece 80. Further, the suction force generated by suction by a not-illustrated suction source is transmitted to the holding face 502, whereby the holding unit 50 attracts and holds the protective member 85 toward the plate-like workpiece 80 from the other face 801.

[0138] For example, the holding unit 50 holding the plate-like workpiece 80 is raised, and the plate-like workpiece 80 is released from the transfer table 221. Next, the extension portion gripping portion 230 is positioned at a prescribed height position at which the extension portion 850 of the protective member 85 can be gripped by a not-illustrated vertical moving portion.

[0139] Further, each horizontal moving portion 234 moves each extension portion gripping portion 230 in the horizontal direction, and aligns the extension portion gripping portion 230 with the extension portion 850 of the protective member 85 in the radial direction. The gripping plate 2302 is lowered by the cylinder mechanism 2303, and the extension portion gripping portion 230 grips the extension portion 850 of the protective member 85. Further, the gripping of the extension portion 850 of the protective member 85 of the plate-like workpiece 80 by the extension portion gripping portion 230 can also be performed in a state in which the plate-like workpiece 80 is held on the transfer table 221.

[0140] Next, each horizontal moving portion 234 moves each extension portion gripping portion 230 gripping the extension portion 850 of the protective member 85 of the plate-like workpiece 80 toward the radial outer side of the plate-like workpiece 80, and thereby the extension portion 850 is stretched and expanded toward the radial outer side by the extension portion gripping portion 230. Further, by the above-described movement of the extension portion gripping portion 230, the resin film 87 adhering to the outer peripheral portion of the plate-like workpiece 80 is easily peeled from the outer peripheral edge of the plate-like workpiece 80 toward the radial outer side by the expansion force imparted to the resin film 87 adhering to the outer peripheral portion of the plate-like workpiece 80 and the adhesive force acting between the circular sheet 86 and the resin film 87. Figure 6

[0141] Next, for example, after the extension portion gripping portion 230 is lowered to a prescribed height position and the extension portion 850 of the protective member 85 is peeled to some extent by being pulled downward from the plate-like workpiece 80, the extension portion gripping portion 230 releases the extension portion 850 of the protective member 85. Thereby, for example, the extension portion 850 is partially peeled at least a total of 8 places in the circumferential direction at equal angles with the center of the plate-like workpiece 80 as a reference on the outer peripheral portion of the plate-like workpiece 80. ​

[0142] Next, the holding unit 50 holding the plate-shaped workpiece 80 is moved in the -Y direction until it is positioned above the rotation roller 211, and then is lowered so that the side surface of the rotation roller 211 abuts against the outer peripheral portion near the +Y direction side of the lower surface of the protective member 85. As shown in Figure 6 The holding portion moving unit 63 moves the holding portion 61 in the -Y direction, and aligns the holding jig 612 with the protruding portion 850 of the protective member 85, and the holding jig 612 holds the protruding portion 850. In Figure 6 In the example shown in the drawing, the holding portion 61 holds the protruding portion 850 of the outer side portion of the protective member 85, which is not peeled from the plate-shaped workpiece 80, but it can also hold the protruding portion 850 of the outer side portion of the protective member 85, which is peeled from the plate-shaped workpiece 80 (the protruding portion 850 of the -Y direction side in Figure 6 In the example shown in the drawing, the holding portion 61 holds the protruding portion 850 of the outer side portion of the protective member 85, which is not peeled from the plate-shaped workpiece 80, but it can also hold the protruding portion 850 of the outer side portion of the protective member 85, which is peeled from the plate-shaped workpiece 80 (the protruding portion 850 of the -Y direction side in

[0143] For example, as shown in Figure 6 After the holding jig 612 holds the protruding portion 850, the holding jig 612 is slightly moved in the +Y direction side, and the outer peripheral portion of the resin film 87 is peeled from the outer periphery of the plate-shaped workpiece 80. Next, as shown in Figures 7 to 8 The spindle 680 is rotated 180 degrees in the clockwise direction as viewed from the +X direction side, and thus, in a state in which the rotation roller 211 supports the lower surface side of the protective member 85, the resin film 87 of the protective member 85 is slowly bent along the side surface of the rotation roller 211, and the protective member 85 is stretched toward the -Z direction by the holding jig 612, and thus, a portion of the protective member 85 is peeled from the one face 800 of the plate-shaped workpiece 80.

[0144] (Embodiment C of the peeling of the protective member 85 in the peeling device 2)

[0145] In further peeling of the protective member 85, the holding unit 50 is moved in the Y axis direction. Alternatively, a case in which the holding portion 61 is moved in the Y axis direction with respect to the holding surface 502 of the holding unit 50 is described.

[0146] As shown in Figure 9 The holding portion 61 is moved in the -Y direction by the holding portion moving unit 63 shown in Figure 5 In addition, the holding portion 61 can be moved in the -Y direction by the pad moving unit 60 (refer to Figure 5The holding unit 50 is moved in the +Y direction. The gripping part 61 is moved radially relative to the center from the outer periphery of the plate-shaped workpiece 80, peeling the protective member 85 from the plate-shaped workpiece 80. Meanwhile, the rotating roller 211 rotates about the axis in the X-axis direction, maintaining the resin film 87 of the protective member 85 in a state of slow bending along the side of the rotating roller 211, while peeling the protective member 85 from the outer periphery of the plate-shaped workpiece 80 in the +Y direction towards the center of the plate-shaped workpiece 80. When the resin film 87 bends during the peeling of the protective member 85, there is a possibility that the resin film 87 may remain partially relative to the plate-shaped workpiece 80 after peeling, or that the reaction force caused by the resin bending may momentarily apply an impact force from the resin film 87 to one surface 800 of the plate-shaped workpiece 80, causing damage to one surface 800 of the plate-shaped workpiece 80. However, by the side of the rotating roller 211 abutting against the circular piece 86, such problems can be prevented.

[0147] In this embodiment, when the protective member 85 is peeled off from the plate-shaped workpiece 80, the tensile load measuring unit 67 on the gripping side can accurately measure the tensile load applied to the protective member 85 between the gripping part 61 and the holding surface 502.

[0148] For example, the tensile load measuring unit 67 on the gripping side measures the tensile load by using the vertical load measuring piezoelectric element 673 and the horizontal load measuring piezoelectric element 674.

[0149] exist Figure 9 In the diagram, arrow F3 represents the tensile load F3 applied to the protective member 85 located between the gripping part 61 and the retaining surface 502 of the retaining unit 50. Furthermore, since the plate-shaped workpiece 80 and the gripping part 61 are separated by a predetermined distance in the Z-axis direction, the tensile load F3 is... Figure 9 The tensile load F3 shown is the result of combining the tensile load Fy3 in the Y-axis direction (-Y direction) and the tensile load Fz3 in the Z-axis direction (-Z direction). Furthermore, according to the Pythagorean theorem, Equation 11 below holds.

[0150] (Tensive load Fy3 in the Y-axis direction) 2 +(Tensive load Fz3 in the Z-axis direction) 2 = (Tensive load F3) 2 ...(Equation 11)

[0151] Here, the horizontal load measuring piezoelectric element 674 accurately measures the Y-axis tensile load Fy3 at predetermined time intervals and sends a load detection signal to the control unit 29 during each measurement. Additionally, the vertical load measuring piezoelectric element 673 accurately measures the Z-axis tensile load Fz3 at predetermined time intervals and sends a load detection signal to the control unit 29 during each measurement.

[0152] The control unit 29 performs calculations by substituting the measured values ​​of the tensile load Fy3 in the Y-axis direction and the tensile load Fz3 in the Z-axis direction into Equation 11, and measures the tensile load F3 at predetermined time intervals. Furthermore, the control unit 29 uses the tensile load F3 measured at predetermined time intervals as information to optimize the peeling action of the peeling unit 6 on the protective member 85. That is, based on the value of the tensile load F3 measured at predetermined time intervals, the control unit 29 optimizes, for example, the moving speed of the gripping part 61 performed by the gripping part moving unit 63. As a result, a state of feedback control is achieved where the tensile load F3 when the gripping part 61 peels the protective member 85 is the optimal tensile load that will not cause the plate-shaped workpiece 80 to crack or produce residue on the plate-shaped workpiece 80. Additionally, the peeling speed of the gripping part 61 is not too slow, and unnecessary time is not wasted in peeling the protective member 85 from the plate-shaped workpiece 80.

[0153] When the protective member 85 is completely detached from one surface 800 of the plate-shaped workpiece 80, the holding portion 61 holding the protrusion 850 of the protective member 85 moves to... Figure 5 The protective member 85 is placed on the worktable 27 shown. Then, the holding part 61 releases its grip on the protrusion 850, causing the protective member 85 to fall onto the worktable 27.

[0154] (Implementation method D for peeling the protective component 85 in the peeling device 2)

[0155] The following describes a case where the holding unit 50 is moved along the Y-axis during the peeling of the protective member 85, but the gripping part 61 is not moved along the Y-axis as in Embodiment C. In this case, for example, the rotating roller 211 moves in the same direction as the moving direction of the holding unit 50. In this case, from Figure 8 The state shown is as follows Figure 10 The gripping part 61, which has been rotated 90 degrees, stops at a specified height and position P3 in the Y-axis direction. Figure 5 The control unit 29 shown identifies the height position and the position P3 of the gripping part 61 in the Y-axis direction.

[0156] The pad moving unit 60 moves the holding unit 50 in the +Y direction, causing the stopped gripping part 61 to move radially relative to the center from the outer periphery of the plate-shaped workpiece 80, thereby peeling the protective member 85 off the plate-shaped workpiece 80. Furthermore, the side of the rotating roller 211 abuts against the circular piece 86, preventing the resin film 87 from cracking.

[0157] In this embodiment, when the protective member 85 is peeled off from the plate-shaped workpiece 80, the pad-side tensile load measuring unit 64 measures the tensile load applied to the protective member 85 between the holding part 61 and the retaining surface 502. Figure 10 In the diagram, arrow F4 represents the tensile load F4 applied to the protective member 85 located between the gripping part 61 and the retaining surface 502 of the retaining unit 50. Furthermore, the tensile load F4 is... Figure 10 The tensile load F4 shown is the result of combining the tensile load Fy4 in the Y-axis direction (oriented towards -Y) and the tensile load Fz4 in the Z-axis direction (oriented towards -Z).

[0158] Figure 10 Arrow R4 indicates the first measuring load R4 that the first pad-side tensile load measuring unit 641 can measure at predetermined time intervals in the Z-axis direction. The first measuring load R4 has, for example, an orientation in the +Z direction. Arrow R5 indicates the second measuring load R5 that the second pad-side tensile load measuring unit 642 can measure at predetermined time intervals in the Z-axis direction. The second measuring load R5 has, for example, an orientation in the -Z direction. The distance L4 between the first pad-side tensile load measuring unit 641 and the second pad-side tensile load measuring unit 642 in the Y-axis direction is a device design value pre-identified by the control unit 29 and is a constant.

[0159] The change distance M1 in the Y-axis direction from the first pad-side tensile load measuring unit 641 to the holding unit 61 at position P3, where the movement in the Y-axis direction stops, is a variable that changes as the holding unit 50 moves along the Y-axis direction. Furthermore, based on the movement from... Figure 5 The rotary encoder of the motor 602 (servo motor 602) of the pad moving unit 60 shown feeds back encoder signals to the control unit 29. The control unit 29 can grasp the position of the first pad-side tensile load measuring unit 641, which moves together with the movable plate 601. Therefore, the control unit 29 can also sequentially identify the value of the changing distance M1 at predetermined time intervals. The distance N1 between the first pad-side tensile load measuring unit 641 and the holding part 61 stopped at position P3 in the Z-axis direction is a device design value pre-identified by the control unit 29 and is a constant.

[0160] According to the Pythagorean theorem, Equation 12 below holds true.

[0161] (Tensive load Fy4 in the Y-axis direction) 2 +(Tensive load Fz4 in the Z-axis direction) 2 = (Tensive load F4) 2 ...(Equation 12)

[0162] Furthermore, based on the balance of forces in the Z-axis direction, Equation 13 holds true.

[0163] (Z-axis direction tensile load Fz4) = (1st measurement load R4) + (2nd measurement load R5) ··· (Equation 13)

[0164] Further, according to the balance of the moment around the 1st pad side tensile load measuring section 641 when the 1st pad side tensile load measuring section 641 is assumed as the origin, the following Equation 14 holds.

[0165] (Y-axis direction tensile load Fy4) x (distance N1) = (2nd measurement load R5) x (distance L4) + (Z-axis direction tensile load Fz4) x (change distance M1) ··· (Equation 14)

[0166] According to Equation 13, the control unit 29 can measure the Z-axis direction tensile load Fz4 every prescribed time interval. Further, according to the following Equation 15 which is a modification of Equation 14, the control unit 29 can measure the Y-axis direction tensile load Fy4 every prescribed time interval.

[0167] (Y-axis direction tensile load Fy4) = {(2nd measurement load R5) x (distance L4) + (Z-axis direction tensile load Fz4) x (change distance M1)} / (distance N1) ··· (Equation 15)

[0168] The control unit 29 performs the operation process of substituting the value with respect to the Y-axis direction tensile load Fy4 and the value with respect to the Z-axis direction tensile load Fz4 into Equation 12, and measures the tensile load F4 every prescribed time interval. Further, the control unit 29 uses the tensile load F4 measured every prescribed time interval as information for optimizing the peeling operation of the peeling unit 6 against the protective member 85. That is, according to the value of the tensile load F4 measured every prescribed time interval, the moving speed of the holding unit 50 by the pad moving unit 60 is optimized, for example, by the control unit 29. As a result, the state where the feedback control is performed in such a manner that the tensile load F4 when the holding portion 61 peels the protective member 85 becomes the optimal tensile load which does not cause the rupture of the plate-like workpiece 80 or the paste residue on the plate-like workpiece 80, and the like. Further, the peeling speed of the holding portion 61 which relatively moves in the Y-axis direction with respect to the moving holding unit 50 is not too slow, and the protective member 85 is not peeled from the plate-like workpiece 80 while wasting time.

[0169] When the protective member 85 is completely peeled from one face 800 of the plate-like workpiece 80, the holding portion 61 which holds the protruding portion 850 of the protective member 85 is moved to the Figure 5 placement table 27 shown in FIG. 6. Then, the holding portion 61 releases the holding of the protruding portion 850, and the protective member 85 falls down on the placement table 27.

Claims

1. A peeling apparatus which peels a protective member of one face of a protective plate-like work from the one face, wherein the peeling apparatus has: a holding unit which holds by facing another face of the plate-like work; and a peeling unit which grips a peripheral portion of the protective member which covers the one face of the plate-like work held by the holding face, peels the protective member from the periphery of the plate-like work toward the center, and further peels from the periphery on the opposite side of the center to the periphery, the peeling unit includes: a gripping portion which grips the peripheral portion of the protective member; a moving unit which moves the gripping portion in a direction away from the one face while relatively moving the gripping portion and the holding unit in a direction parallel to the holding face, moves the gripping portion from the periphery of the holding face toward the center, and moves the gripping portion which has passed through the center of the holding face in a straight line in a direction away from the center; and a tensile load measuring portion which measures a tensile load applied to the protective member between the gripping portion and the holding face, the tensile load measuring portion has: a horizontal direction tensile load measuring portion which measures a horizontal direction tensile load in a direction parallel to the holding face; a Z-axis direction tensile load measuring portion which measures a Z-axis direction tensile load in a direction away from the one face; and a calculating portion which calculates a tensile load using a measured value of the horizontal direction tensile load measuring portion, a measured value of the Z-axis direction tensile load measuring portion, and the following formula, the peeling operation of the peeling unit is optimized by measuring the tensile load applied to the protective member by the tensile load measuring portion.

2. The peeling apparatus according to claim 1, wherein the tensile load measuring portion is constituted by a piezoelectric element provided to a support portion which supports the holding unit.

3. The peeling apparatus according to claim 1, wherein the tensile load measuring portion is constituted by a piezoelectric element provided to a gripping portion support portion which supports the gripping portion.

4. The peeling apparatus according to any one of claims 1 to 3, wherein the protective member is a protective tape, the plate-like work has a cutout portion in a peripheral portion, the holding unit includes a partial peeling portion which lifts up the protective tape which is not pasted to the plate-like work at the cutout portion, and peels the protective tape in the vicinity of the cutout portion from the plate-like work, and the gripping portion grips the peripheral portion of the protective tape after peeled by the partial peeling portion.

5. The peeling apparatus according to any one of claims 1 to 3, wherein the protective member is a protective tape, the peeling apparatus further has a peeling tape pasting unit which pastes a peeling tape to the peripheral portion of the protective tape, the gripping portion grips the peeling tape pasted to the protective tape instead of gripping the peripheral portion of the protective tape, and the tensile load measuring portion measures a tensile load applied to the peeling tape which is integrated with the protective tape between the gripping portion and the holding face.

6. The peeling apparatus according to any one of claims 1 to 3, wherein ​ ​ ​ ​ ​ ​ ​ ​ (horizontal direction tensile load Fx) 2 + (Z-axis direction tensile load Fz) 2 = (tensile load F) 2 , ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ The protective member has a protruding portion that protrudes slightly from the outer periphery of the plate-shaped workpiece, The gripping portion grips the protruding portion.

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