Alignment device and substrate processing device including the same

Abstract

The present invention provides an alignment device and a substrate processing device including the alignment device. The alignment device may include: a support module, which supports various objects at different heights; and an alignment module, which aligns the objects supported by the support module, wherein the alignment module may include: a first alignment part, which aligns a first object as one of the objects; a second alignment part, which aligns a second object as one of the objects and different from the first object; and a driving part, which moves the first alignment part and the second alignment part simultaneously.

Description

Technical Field

[0001] The invention relates to an alignment device and a substrate processing device comprising the alignment device. Background Art

[0002] As semiconductor chips become highly integrated, their size gradually decreases. On the other hand, the spacing between solder balls on a semiconductor chip is determined by the international standard of the World Semiconductor Standards Association. Therefore, it is not easy to adjust the number of solder balls of a semiconductor chip. In addition, as semiconductor chips become smaller, handling becomes difficult, and testing also becomes difficult. At the same time, there is a problem that the installed boards need to be diversified according to the size of the semiconductor chip. In order to solve this problem, a fan-out panel level package (FOPLP) is proposed.

[0003] Generally, a surface treatment process of a fan-out panel (FOPLP) for a fan-out panel level package (FOPLP) may be performed as follows: plasma is supplied to the fan-out panel, and impurities attached to the panel are removed by the plasma supplied to the fan-out panel.

[0004] Figure 1 FIG. 2 is a diagram showing the state of a fan-out type panel when a plasma treatment is performed on the panel. Figure 1 , the panel S is supported by a chuck 2 surrounded by an insulator 6. The panel S can be raised and lowered in the up and down directions by the lifting pins 4. When processing is performed by supplying plasma to the panel S, there is a warpage phenomenon in the panel S due to the thin thickness of the panel S and other reasons. In this case, a gap is generated between the bottom surface of the panel S and the top surface of the chuck 2. When a gap is generated between the bottom surface of the panel S and the chuck 2, an arc phenomenon and the like are generated due to local plasma. As a result, damage occurs to the bottom surface of the panel S. In addition, in the case where the panel S has a warpage phenomenon, when a transport robot transports the panel S by vacuum adsorption or the like, there is a phenomenon that it is difficult to correctly place the panel S on the transport robot. In this case, when the transport robot transports the panel S, there is a risk that the panel S may detach from the transport robot.

[0005] In order to eliminate the problem caused by the warping of the panel S, when handling the panel S and / or transporting the panel S, Figure 2 As shown, a window clamp W is disposed on the upper portion of the panel S, and a jig plate J is disposed on the lower portion of the panel S. In this case, when the panel S is handled and / or transported, problems caused by the warping phenomenon of the panel S can be minimized.

[0006] As described above, when the window clamp W and the jig plate J are arranged on the upper and lower parts of the panel S, the window clamp W and the jig plate J need to be correctly aligned with respect to the panel S. Otherwise, the above-mentioned arc phenomenon may occur due to the failure to eliminate the warping phenomenon of the panel S. In addition, when the window clamp W, the panel S and the jig plate J are transported by the transport robot, the window clamp W, the panel S and the jig plate J may be separated from the transport robot. Summary of the invention

[0007] An object of the present invention is to provide an alignment device capable of effectively performing processing on a fan-out type panel and a substrate processing device including the alignment device.

[0008] In addition, another object of the present invention is to provide an alignment device capable of effectively aligning at least one object and a substrate processing device including the alignment device.

[0009] In addition, another object of the present invention is to provide an alignment device capable of effectively aligning a window clamp, a panel, and a fixture plate, and a substrate processing device including the alignment device.

[0010] The objects of the present invention are not limited thereto, and a person skilled in the art can clearly understand other objects not mentioned from the following description.

[0011] The present invention provides an alignment device. The alignment device may include: a support module, which supports various objects at different heights; and an alignment module, which aligns the objects supported by the support module, wherein the alignment module may include: a first alignment unit, which aligns a first object as one of the objects; a second alignment unit, which aligns a second object as one of the objects and different from the first object; and a driving unit, which moves the first alignment unit and the second alignment unit simultaneously.

[0012] According to an embodiment, the driving portion may move the first aligning portion and the second aligning portion in the same direction.

[0013] According to one embodiment, the first alignment portion may include at least one first roller, and when the alignment module is aligned with the first object, the at least one first roller is in contact with the first object, and the second alignment portion may include at least one second roller, and when the alignment module is aligned with the second object, the at least one second roller is in contact with the second object.

[0014] According to one embodiment, the alignment module may further include a third alignment unit for aligning a third object which is one of the objects and different from the first object and the second object, and the driving unit may enable the first alignment unit, the second alignment unit and the third alignment unit to move simultaneously.

[0015] According to an embodiment, the alignment module may be provided in plurality and, when viewed from the top, are respectively arranged at corner regions of the object supported by the support module.

[0016] According to one embodiment, the support module may include: a base; a bracket, which is arranged on the top surface of the base and supports a third object different from the first object and the second object; at least one lifting pin, which can be inserted into a hole formed in the third object and lift the second object; and a support pin, which supports the first object.

[0017] According to one embodiment, the bracket may include: a seating portion that contacts the bottom surface of the third object when supporting the third object; and an inclined portion that extends from the seating portion and is inclined upward toward the outside of the base from the center of the base observed from the top.

[0018] According to one embodiment, the support pins can support the first object at a first height, the lifting pins can lift and support the second object at a second height lower than the first height, and the bracket can support the third object at a third height lower than the second height.

[0019] In addition, the present invention provides a device for processing a substrate. The substrate processing device may include: a processing chamber, which performs a plasma processing process on a substrate; a buffer chamber, which has an internal space, and an alignment device for aligning a window clamp, a substrate, and a fixture plate is arranged in the internal space; and a transport robot, which transports the window clamp, the substrate, and the fixture plate between the processing chamber and the buffer chamber, and the alignment device may include: a support module, which supports the window clamp, the substrate, and the fixture plate at different heights; and an alignment module, which aligns the window clamp, the substrate, and the fixture plate supported by the support module, and the alignment module may include: a first alignment part, which aligns the window clamp; a second alignment part, which aligns the substrate; a third alignment part, which aligns the fixture plate; and a driving part, which moves the first alignment part, the second alignment part, and the third alignment part simultaneously.

[0020] According to an embodiment, the driving portion may move the first aligning portion, the second aligning portion, and the third aligning portion in the same direction.

[0021] According to one embodiment, the first alignment portion may include at least one first roller, and when the alignment module is aligned with the window clamp, the at least one first roller is in contact with the window clamp, the second alignment portion may include at least one second roller, and when the alignment module is aligned with the substrate, the at least one second roller is in contact with the substrate, and the third alignment portion may include at least one third roller, and when the alignment module is aligned with the fixture plate, the at least one third roller is in contact with the fixture plate.

[0022] According to one embodiment, the support module may include a base; a bracket, which is arranged on the top surface of the base and supports the clamp plate; at least one lifting pin, which can be inserted into a hole formed in the clamp plate and lift the substrate; and a support pin, which supports the window clamp.

[0023] According to one embodiment, the bracket may include: a seating portion that contacts the bottom surface of the clamp plate when supporting the clamp plate; and an inclined portion that extends from the seating portion and is inclined upward toward the outer side of the base from the center of the base observed from the top.

[0024] According to an embodiment, when viewed from the top, the second roller, the third roller, and the first roller may be sequentially adjacent to the center of the base.

[0025] According to one embodiment, the supporting pins can support the window clamp at a first height, the lifting pins can lift and support the substrate at a second height lower than the first height, and the bracket can support the fixture plate at a third height lower than the second height.

[0026] According to an embodiment, the alignment module may be provided in plurality and, when viewed from the top, are respectively arranged at corner regions of the object supported by the support module.

[0027] According to an embodiment of the present invention, the present invention can effectively perform processing on a fan-out type panel.

[0028] In addition, according to an embodiment of the present invention, at least one object can be effectively aligned.

[0029] In addition, according to an embodiment of the present invention, the window clip, the panel, and the fixture plate can be effectively aligned.

[0030] The effects of the present invention are not limited to the above-mentioned effects, and those skilled in the art to which the present invention pertains can clearly understand unmentioned effects from the present specification and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1FIG. 1 is a diagram showing the state of a fan-out panel when plasma processing is performed on the panel.

[0032] Figure 2 The diagram shows the state of the window clips and the fixture plates provided on the upper and lower parts of the panel when the fan-out panel is subjected to plasma processing.

[0033] Figure 3 This is a diagram showing the substrate processing apparatus of the present invention as viewed from the top.

[0034] Figure 4 It shows that the setting Figure 3 A diagram of the state of the alignment device in the buffer chamber.

[0035] Figure 5 It is shown Figure 4 Diagram of the status of the stent.

[0036] Figure 6 It is shown Figure 4 Figure 2. Alignment module of the FPGA.

[0037] Figure 7 Is shown driving Figure 3 A diagram of the status of the alignment module.

[0038] Figure 8 and Fig. 9 1 is a diagram showing a state in which the window clip, the panel, and the jig plate are aligned in the buffer chamber.

[0039] Fig.10 and Fig.11 This is a diagram showing a state in which a transport robot holds a window clip, a panel, and a fixture plate in a buffer chamber.

[0040] Fig.12 It shows that the setting Figure 3 A diagram of a state of a processing chamber in a plasma processing apparatus.

[0041] Description of Reference Numerals

[0042] Substrate processing device: 10

[0043] First direction: 12

[0044] Second direction: 14

[0045] Third direction: 16

[0046] Equipment front-end module: 100

[0047] Loading port: 110

[0048] Support: 112

[0049] Carrier: C

[0050] Transmission frame: 130

[0051] Conveyor robot: 132

[0052] Transport tracks: 134

[0053] Processing department: 300

[0054] Buffer room: 310

[0055] Transport room: 330

[0056] Processing room: 350

[0057] Controller: 500

[0058] Alignment Device: 1000

[0059] Window clamp: W

[0060] Substrate: S

[0061] Fixture plate: J

[0062] Support modules: 1100

[0063] - Base: 1110

[0064] - Bracket: 1130

[0065] Resettlement Department: 1132

[0066] Inclined part: 1134

[0067] Joint: 1136

[0068] Combination plate: 1138

[0069] Lifting pin: 1150

[0070] Support pin: 1170

[0071] Alignment module: 1300, 1500

[0072] First alignment module: 1300

[0073] Alignment Department: 1310

[0074] First Alignment: 1311

[0075] Second alignment: 1312

[0076] Third Alignment Department: 1313

[0077] Alignment subject: 1314

[0078] First Roll: R1

[0079] Second roller: R2

[0080] Third Roller: R3

[0081] Drive unit: 1350

[0082] Drive: 1352

[0083] Drive shaft: 1354

[0084] Fastening part: 1370

[0085] Fastening body: 1372

[0086] Fastening bracket: 1374

[0087] Second alignment module: 1500 DETAILED DESCRIPTION

[0088] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. However, the present invention can be implemented in various forms and is not limited to the embodiments described herein. In addition, when describing the preferred embodiments of the present invention in detail, if it is determined that the specific description of the relevant known functions or structures may unnecessarily confuse the subject matter of the present invention, the detailed description thereof will be omitted. In addition, in all the drawings, the same reference numerals are used for parts that perform similar functions and effects.

[0089] Unless otherwise specified, "comprising" a certain constituent element means that other constituent elements may be further included, rather than excluding other constituent elements. Specifically, terms such as "comprising" or "having" should be understood as being used to indicate the existence of features, numbers, steps, actions, constituent elements, components, or combinations thereof recorded in the specification, rather than excluding the existence or additional possibility of one or more other features, numbers, steps, actions, constituent elements, components, or combinations thereof in advance.

[0090] Unless the context clearly indicates otherwise, a singular expression includes a plural expression. In addition, the shapes and sizes of elements in the drawings may be exaggerated for more clear explanation.

[0091] Below, refer to Figures 3 to 12 Embodiments of the present invention are described in detail. Figure 3 This is a diagram of a substrate processing apparatus according to the present invention as viewed from the top. Figure 3 The substrate processing apparatus 10 may include an equipment front end module (EFEM) 200 , a process processing unit 300 , and a controller 500 .

[0092] The device front end module 200 and the process processing unit 300 may be arranged in one direction. Hereinafter, the direction in which the device front end module 200 and the process processing unit 300 are arranged is defined as a first direction 12, and a direction perpendicular to the first direction 12 when viewed from the top is defined as a second direction 14. In addition, a direction perpendicular to the first direction 12 and the second direction 14 is defined as a third direction 16.

[0093] The equipment front end module 200 has a load port 110 and a transfer frame 130. The load port 110 is arranged in front of the equipment front end module 200 in the first direction 12. The load port 110 has a plurality of support parts 112. The respective support parts 112 may be arranged in a row in the second direction 14, and carriers C (e.g., boxes, FOUPs, etc.) that accommodate substrates to be provided to the process and substrates that have completed the process may be located in the support parts 112. The carriers C may accommodate substrates to be provided to the process and substrates that have completed the process.

[0094] The transfer frame 130 is disposed between the load port 110 and the process processing part 300. The transfer frame 130 includes a transfer robot 132 that is disposed inside the transfer frame 130 and transfers the substrate between the load port 110 and the process processing part 300. The transfer robot 132 moves along a transfer track 134 disposed in the second direction 14 to move the substrate between the carrier C and the process processing part 300.

[0095] The process treatment part 300 may include a buffer chamber 310 , a transfer chamber 330 , and a treatment chamber 350 .

[0096] The buffer chamber 310 is arranged adjacent to the conveying frame 130. As an example, the buffer chamber 310 can be arranged between the conveying chamber 330 and the equipment front-end module 200. The buffer chamber 310 can have an internal space for the substrates to be provided to the process to wait before the substrates are conveyed to the processing chamber 350 or before the substrates that have completed the process are conveyed to the equipment front-end module 200. In addition, the substrates can be aligned in the internal space of the buffer chamber 310. In addition, the substrates, the window clamps, and the fixture plates can be aligned in the buffer chamber 310. For example, the alignment device 1000 for aligning the window clamps, the substrates, and the fixture plates described later can be set in the internal space of the buffer chamber 310.

[0097] The transfer chamber 330 is arranged adjacent to the buffer chamber 310. When viewed from the top, the transfer chamber 330 has a polygonal body. As an example, when viewed from the top, the transfer chamber 330 may have a pentagonal body. On the outside of the body, the buffer chamber 310 and a plurality of processing chambers 350 are arranged along the periphery of the body. A passage (not shown) for the substrate to enter and exit is formed on each side wall of the body, and the passage connects the transfer chamber 330 and the buffer chamber 310 or the processing chamber 350. A door (not shown) is provided in each passage to seal the interior by opening and closing the passage.

[0098] A transport robot 332 for transporting substrates between the buffer chamber 310 and the processing chamber 350 is disposed in the inner space of the transfer chamber 330. The transport robot 332 transports unprocessed substrates waiting in the buffer chamber 310 to the processing chamber 350, or transports substrates that have completed process processing to the buffer chamber 310. In addition, the transport robot 332 can transport window clips, substrates, and fixture plates between the processing chamber 350 and the buffer chamber 310. In addition, the transport robot 332 can transport substrates between the processing chambers 350 to sequentially provide the substrates to a plurality of processing chambers 350. The buffer chamber 310 is disposed on the side wall of the transfer chamber 330 adjacent to the equipment front-end module 200, and the processing chamber 350 is disposed on the side wall of the remaining transfer chambers 330.

[0099] The processing chamber 350 is arranged around the conveying chamber 330. The processing chamber 350 can perform a processing process of a substrate. The processing chamber 350 can perform processes such as cleaning, etching, and ashing on the substrate. In addition, the plasma processing device 2000 described later can be set in the processing chamber 350, so that a plasma processing process can be performed on the substrate. In addition, a plurality of processing chambers 350 can be provided. Each processing chamber 350 can perform the same or different processing processes. The processing chamber 350 can receive a substrate from the transport robot 332 and perform a process, and then transfer the substrate that has completed the process to the transport robot 332. The processing chamber 350 can perform a plasma processing process on a substrate such as a panel configured between a window clamp and a fixture plate.

[0100] The controller 500 may control the structure of the substrate processing device 10. For example, the controller 500 may control the plasma processing device 2000 disposed in the processing chamber 350 so that it can perform a processing process on the substrate. In addition, the controller 500 may control the alignment device 1000 disposed in the buffer chamber 310 to align the window clamp, the substrate, and the fixture plate. In addition, the controller 500 may transfer the window clamp, the substrate, the fixture plate, etc. to a position to be transported according to the process by controlling the transfer robot 132 and / or the transport robot 332.

[0101] In the following, an alignment device 1000 of an embodiment of the present invention is described. The alignment device 1000 described below can align at least one or more objects. For example, the alignment device 1000 can align a first object as one of the objects, a second object as one of the objects and different from the first object, and a third object as one of the objects and different from the first object and the second object. In the following, an example is given in which the first object is a window clamp W, the second object is a substrate S such as a fan-out panel, and the third object is a fixture plate J. In addition, when viewed from the top, the width of the window clamp W can be greater than the width of the substrate S. In addition, when viewed from the top, the width of the fixture plate J can be greater than the width of the substrate S.

[0102] Figure 4 It shows that the setting Figure 3 FIG. 1 is a diagram showing the state of the alignment device in the buffer chamber. Figure 4 The alignment device 1000 may align the window clamp W, the substrate S, and the fixture plate J. The alignment device 1000 may include a supporting module 1100 and alignment modules 1300 and 1500 .

[0103] The support module 1100 can support at least one or more objects at different heights. For example, the support module 1100 can support the window clamp W, the substrate S, and the fixture plate J at different heights. The support module 1100 can support the window clamp W at a first height, the substrate S at a second height, and the fixture plate J at a third height. The first height may be a height higher than the second height. The second height may be a height higher than the third height. The first height may be a height higher than the third height. That is, the support module 1100 can support the window clamp W, the substrate S, and the fixture plate J at different heights along the up and down directions.

[0104] The supporting module 1100 may include a base 1110 , a bracket 1130 , an elevating pin 1150 , and a supporting pin 1170 .

[0105] The base 1110 may be combined with a bracket 1130, a lifting pin 1150, a support pin 1170, and alignment modules 1300 and 1500. When viewed from the top, the base 1110 may have a substantially plate shape. When viewed from the top, the base 1110 may have a substantially rectangular plate shape. However, the present invention is not limited thereto, and the base 1110 may be deformed into various shapes in which the bracket 1130, the lifting pin 1150, the support pin 1170, and the alignment modules 1300 and 1500 may be disposed. For example, when viewed from the top, the base 1110 may also have a circular or triangular shape.

[0106] The bracket 1130 may support the fixture plate J. The bracket 1130 may support the fixture plate J at a third height. The bracket 1130 may be combined with the base 1110. The bracket 1130 may be combined with the top surface of the base 1110. The bracket 1130 may be provided in plurality. The brackets 1130 provided in plurality may be respectively combined with the top surface of the base 1110. In addition, when viewed from the top, each bracket 1130 may be arranged between the corner areas of the base 1110. In addition, when viewed from the top, the bracket 1130 may be arranged in the center between the corner areas. In addition, when viewed from the top, the bracket 1130 may be arranged in the edge area of ​​the base 1110.

[0107] Figure 5 It is shown Figure 4 Figure 1 shows the state of the bracket. Figure 5 , the bracket 1130 may include a placement portion 1132, an inclined portion 1134, and a coupling portion 1136. The placement portion 1132 may have a placement surface, and when the placement portion 1132 supports the fixture plate J, the placement surface contacts the bottom surface of the fixture plate J. In addition, the inclined portion 1134 extends from the placement portion 1132 and may have an inclined inclined surface. Thus, when the fixture plate J is supported by the bracket 1130, if the fixture plate J is not in the correct position, the fixture plate J moves along the inclined surface of the inclined portion 1134, so that the fixture plate J can be located in the correct position. As described above, the bracket 1130 can be combined with the base 1110. The inclined portion 1134 of the bracket 1130 may have a shape that is inclined upward from the center of the base 1110 observed at the top toward the outer side of the base 1110. The coupling portion 1136 may extend in the up-down direction from the position where the placement portion 1132 intersects with the inclined portion 1134. In addition, a coupling plate 1138 may be provided at the end of the coupling portion 1136 extending in the up-down direction. In addition, the seating portion 1132, the inclined portion 1134, the coupling portion 1136, and the coupling plate 1138 may be provided as one body.

[0108] Refer again Figure 4 , the lifting pins 1150 can support the substrate S, such as a fan-out panel. The lifting pins 1150 can lift the substrate S to a second height and support it at the second height. The lifting pins 1150 can be set in a pin shape. In addition, the lifting pins 1150 can be set to be inserted into a hole formed in the fixture plate J. The lifting pins 1150 can lift the substrate S in the up and down directions. In addition, the lifting pins 1150 can be set in multiple numbers. A part of the multiple lifting pins 1150 can be set in the central area of ​​the base 1110 observed from the top. Another part of the multiple lifting pins 1150 can be set in the edge area of ​​the base 1110 observed from the top.

[0109] The support pin 1170 may support the window clip W. The support pin 1170 may support the window clip W at a first height. One end of the support pin 1170 may be inserted into a hole provided in the window clip W. In addition, the support pin 1170 may be provided in the base 1110. The support pin 1170 may be provided in a plurality. Each of the plurality of support pins 1170 may be provided in the base 1110. In addition, each of the support pins 1170 may be provided between corner areas of the base 1110 when viewed from the top.

[0110] The alignment modules 1300 and 1500 may align an object supported by the support module 1100. For example, the alignment modules 1300 and 1500 may align at least one of the window clamp W, the substrate S, and the fixture plate J supported by the support module 1100. The alignment modules 1300 and 1500 may be combined with the base 1110. The alignment modules 1300 and 1500 may be fixedly combined with the base 1110. The alignment modules 1300 and 1500 may be provided in plurality. Each of the plurality of alignment modules 1300 and 1500 may be combined with a corner area of ​​the base 1110 viewed from the top.

[0111] In addition, the alignment modules 1300, 1500 may include a first alignment module 1300 and a second alignment module 1500. The first alignment module 1300 may align the window clamp W, the substrate S, and the fixture plate J. In addition, the second alignment module 1500 may align the substrate S. The first alignment module 1300 may be provided in plurality. The first alignment module 1300 is combined with a corner area of ​​the base 1110 observed from the top, and the first alignment modules 1300 may be configured to be opposite to each other. The second alignment module 1500 may be provided in plurality. The second alignment module 1500 is combined with a corner area of ​​the base 1110 observed from the top, and the second alignment modules 1500 may be configured to be opposite to each other.

[0112] The first alignment module 1300 and the second alignment module 1500 are substantially similar except that the second alignment module 1500 does not include the first alignment portion 1311 and the third alignment portion 1313 described later. Therefore, the first alignment module 1300 will be described in detail below.

[0113] Figure 6 It is shown Figure 4 Specifically, Figure 6 The alignment module shown in FIG. 1 may be the first alignment module 1300 of the first alignment module 1300 and the second alignment module 1500 described above. The first alignment module 1300 may align the window clamp W, the substrate S, and the fixture plate J supported by the support module 1100. The first alignment module 1300 may include an alignment portion 1310, a driving portion 1350, and a fastening portion 1370.

[0114] The alignment part 1310 may align the window clamp W, the substrate S, and the fixture plate J. When aligning the window clamp W, the substrate S, and the fixture plate J, the alignment part 1310 may contact the window clamp W, the substrate S, and the fixture plate J, respectively. The alignment part 1310 may include a first alignment part 1311, a second alignment part 1312, a third alignment part 1313, and an alignment body 1314. The first alignment part 1311, the second alignment part 1312, and the third alignment part 1313 may be combined with the alignment body 1314, respectively. The alignment body 1314 may be combined with a driving shaft 1354 of a driving part 1350 described later. In addition, the first alignment part 1311 may be set at a height corresponding to the above-mentioned first height. In addition, the second alignment part 1312 may be set at a height corresponding to the above-mentioned second height. In addition, the third alignment part 1313 may be set at a height corresponding to the above-mentioned third height.

[0115] The first alignment part 1311, the second alignment part 1312, and the third alignment part 1313 may include a first roller R1, a second roller R2, and a third roller R3, respectively. The first roller R1, the second roller R2, and the third roller R3 may be rotatably combined with the alignment body 1314, respectively. Each of the first roller R1, the second roller R2, and the third roller R3 may have a cylindrical shape with a height greater than a diameter. When the alignment device 1000 aligns the window clamp W, the substrate S, and the fixture plate J, the first roller R1, the second roller R2, and the third roller R3 may contact the window clamp W, the substrate S, and the fixture plate J, respectively. When the alignment device 1000 aligns the window clamp W, the substrate S, and the fixture plate J, the first roller R1, the second roller R2, and the third roller R3 may contact the side of the window clamp W, the substrate S, and the fixture plate J, respectively. In addition, the first roller R1, the second roller R2, and the third roller R3 may be provided with at least one or more. For example, the first roller R1, the second roller R2, and the third roller R3 may be provided in plurality. The first rollers R1 may be arranged to be spaced apart from each other. When the first rollers R1 are aligned with the window clamps W, the corners of the window clamps W may be inserted between the first rollers R1. The second rollers R2 may be arranged to be spaced apart from each other. When the second rollers R2 are aligned with the substrate S, the corners of the substrate S may be inserted between the second rollers R2. The third rollers R3 may be arranged to be spaced apart from each other. When the third rollers R3 are aligned with the fixture plate J, the corners of the fixture plate J may be inserted between the third rollers R3.

[0116] In addition, when viewed from the top, the second roller R2, the third roller R3, and the first roller R1 may be sequentially adjacent to the base 1110. For example, the second roller R2 may be closest to the center of the base 1110, and the first roller R1 may be farthest from the center of the base 1110.

[0117] The driving portion 1350 can move the alignment portion 1310. For example, the driving portion 1350 can generate a driving force to move the alignment portion 1310. The driving portion 1350 may include a driver 1352 and a driving shaft 1354. The driver 1352 can generate a driving force. The driver 1352 may be one of the known devices that generate power, such as a motor, a pneumatic / hydraulic cylinder, a solenoid, etc. The driving shaft 1354 may be connected to the driver 1352. The driving shaft 1354 may be combined with the alignment portion 1310. The driving shaft 1354 may be combined with the alignment body 1314 of the alignment portion 1310. The driving shaft 1354 may receive the driving force generated by the driver 1352, thereby moving the alignment portion 1310 in the horizontal direction.

[0118] The fastening part 1370 may fasten the alignment part 1310 and the driving part 1350 to the base 1110 of the support module 1100. The fastening part 1370 may include a fastening body 1372 and a fastening bracket 1374. The fastening body 1372 may be combined with the driving part 1350. The fastening body 1372 may be combined with the fastening bracket 1374. The fastening bracket 1374 may combine the fastening body 1372 to the top surface of the base 1110.

[0119] Figure 7 Is shown driving Figure 3 A diagram of the state of the alignment module. For example, Figure 71 is a diagram showing a state of driving the first alignment module 1300 in the alignment modules 1300 and 1500. When the driver 1352 of the driving unit 1350 generates a driving force, the driving shaft 1354 of the driving unit 1350 can move in the horizontal direction. The axial direction of the driving shaft 1354 can be a direction toward the center of the base 1110. When viewed from the top, the driving shaft 1354 can move in a direction toward the center of the base 1110 or in a direction opposite thereto. When the driving shaft 1354 moves in the horizontal direction, the alignment body 1314 combined with the driving shaft 1354 will move together with the driving shaft 1354. As a result, the first alignment part 1311, the second alignment part 1312, and the third alignment part 1313 combined with the alignment body 1314 can move. In addition, as the alignment body 1314 moves, the first roller R1 of the first alignment part 1311, the second roller R2 of the second alignment part 1312, and the third roller R3 of the third alignment part 1313 can move. In addition, the alignment device 1000 according to an embodiment of the present invention can use a driving force generated by the driver 1352 to move all of the first roller R1 of the first alignment section 1311, the second roller R2 of the second alignment section 1312, and the third roller R3 of the third alignment section 1313. That is, multiple drivers are not required to drive each roller, so the structure and operation of the alignment device 1000 can be further simplified. As a result, errors that occur when the alignment device 1000 is driven can be minimized, and the manufacturing cost of the alignment device 1000 can be further reduced.

[0120] Figure 8 and Fig. 9 2 is a diagram showing a state where the window clip, the panel, and the fixture plate are aligned in the buffer chamber. Figure 8 and Fig. 9, when the window clamp W, the substrate S such as the fan-out panel, and the fixture plate J are supported by the alignment device 1000 of the buffer chamber 310, the alignment modules 1300 and 1500 are driven to align them. For example, when the window clamp W, the substrate S such as the fan-out panel, and the fixture plate J are supported by the support module 1100, the alignment section 1310 of the alignment modules 1300 and 1500 can move forward. If the alignment section 1310 moves forward, the rollers R1, R2, and R3 included in the alignment section 1310 can contact the sides of the window clamp W, the substrate S such as the fan-out panel, and the fixture plate J, respectively. In addition, when contacting the sides of the window clamp W, the substrate S, and the fixture plate J, the rollers R1, R2, and R3 can rotate. As a result, it is possible to minimize the damage to the sides of the window clamp W, the substrate S, and the fixture plate J, or to minimize impurities such as particles generated by friction. In addition, according to an embodiment of the present invention, a driver 1352 is used to move all rollers R1, R2, and R3. That is, the alignment device 1000 of an embodiment of the present invention can use a single-axis drive to align the positions of all window clamps W, substrates S such as fan-out panels, and fixture plates J. After the alignment unit 1310 advances and aligns the window clamp W, substrate S, and fixture plate J, the alignment unit 1310 can retreat. In addition, the advancement and retreat of the alignment unit 1310 can be performed once respectively. Different from this, the advancement and retreat of the alignment unit 1310 can also be performed multiple times equivalent to a preset number of times, so that the window clamp W, substrate S, and fixture plate J are properly aligned.

[0121] Fig.10 and Fig.11 310. It is a diagram showing a state in which a transport robot holds a window clamp, a panel, and a fixture plate in a buffer chamber. After the alignment portion 1310 aligns the window clamp W, the substrate S, and the fixture plate J by moving forward and backward, the transport robot 332 can enter the buffer chamber 310. The transport robot 332 entering the buffer chamber 310 can enter the lower part of the fixture plate J. For example, the transport robot 332 can enter the space between the fixture plate J and the base 1110. When the entry of the transport robot 332 is completed, the transport robot 332 can rise upward. As the transport robot 332 rises, the fixture plate J, the substrate S, and the window clamp W can be held by the transport robot 332 in sequence. The fixture plate J, the substrate S, and the window clamp W held by the transport robot 332 can be transported to any one of the processing chambers 350. According to an embodiment of the present invention, the fixture plate J, the substrate S and the window clamp W can all be aligned to the correct position, thereby minimizing the above-mentioned arc phenomenon or the problem of separation from the transport robot when transporting them.

[0122] Fig.12 It shows that the setting Figure 3 FIG. 1 is a diagram showing a state of a plasma processing device in a processing chamber. Fig.12The plasma processing apparatus 2000 disposed in the processing chamber 350 includes a chamber 2100 , a susceptor 2200 , a shower head 2300 , and a plasma exciting portion 2400 .

[0123] The chamber 2100 provides a space for performing process treatment. The chamber 2100 has a main body 2110 and a sealing cover 2120. The top surface of the main body 2110 is open, and a space is formed therein. An opening (not shown) for the substrate to enter and exit is formed on the side wall of the main body 2110, and the opening can be opened and closed by an opening and closing member such as a slit door (not shown). During the processing of the substrate in the chamber 2100, the opening is closed by the opening and closing member, and the opening is opened when the substrate S is transported to the inside of the chamber 2100 and moved out of the chamber 2100.

[0124] An exhaust hole 2111 is formed in the lower wall of the main body 2110. The exhaust hole 2111 is connected to an exhaust line 2112. Through the exhaust line 2112, the internal pressure of the chamber 2100 is adjusted, and reaction byproducts generated in the process are exhausted to the outside of the chamber 2100.

[0125] The sealing cover 2120 is combined with the upper wall of the body 2110 and covers the open top surface of the body 2110 to seal the inside of the body 2110. The top end of the sealing cover 2120 is connected to the plasma exciting part 2400. A diffusion space 2121 is formed in the sealing cover 2120. The width of the diffusion space 2121 is wider as it is closer to the shower head 2300. For example, the diffusion space 2121 may have an inverted funnel shape.

[0126] The susceptor 2200 is located inside the chamber 2100. A substrate is placed on the top surface of the susceptor 2200. A cooling flow path (not shown) for circulating a cooling fluid may be formed inside the susceptor 2200. The cooling fluid circulates along the cooling flow path and cools the susceptor 2200. Power may be applied to the susceptor 2200 from the bias power supply 2210 to adjust the degree of plasma treatment of the substrate. The power applied by the bias power supply 2210 may be a radio frequency (RF) power supply. The susceptor 2200 may form a sheath by the power supplied by the bias power supply 2210, and a high-density plasma may be formed in the region, thereby improving the process capability.

[0127] A heating member 2220 may be disposed inside the base 2200. According to one example, the heating member 2220 may be configured as a hot wire. The heating member 2220 heats the substrate at a preset temperature.

[0128] The shower head 2300 is combined with the upper wall of the main body 2110. The shower head 2300 may be configured in a disc shape to be parallel to the top surface of the base 2200. The shower head 2300 may be made of an aluminum material whose surface is oxidized. A distribution hole 2310 is formed in the shower head 2300. The distribution holes 2310 may be formed on concentric circles at fixed intervals to uniformly supply free radicals. The plasma diffused in the diffusion space 2121 flows into the distribution holes 2310. At this time, charged particles such as electrons or ions are confined in the shower head 2300, while uncharged neutral ions such as oxygen free radicals pass through the distribution holes 2310 and are supplied to the substrate. In addition, the shower head may be grounded to form a path for electrons or ions to move.

[0129] The plasma exciting part 2400 generates plasma to be supplied to the chamber 2100. The plasma exciting part 2400 may be disposed at the top of the chamber 2100. The plasma exciting part 2400 includes an oscillator 2410, a waveguide 2420, a dielectric tube 2430, and a process gas supply part 2440.

[0130] The oscillator 2410 generates electromagnetic waves. The waveguide 2420 connects the oscillator 2410 and the dielectric tube 2430, and provides a passage for transmitting the electromagnetic waves generated by the oscillator 2410 to the inside of the dielectric tube 2430. The process gas supply part 2440 supplies the process gas to the top of the chamber 2100. According to the process, the process gas may be supplied as a first process gas and a second process gas. The process gas supplied to the inside of the dielectric tube 2430 may be excited into a plasma state by the electromagnetic wave. The plasma flows into the diffusion space 2121 via the dielectric tube 2430.

[0131] The plasma excitation section 2400 described above is described by taking the case of using electromagnetic waves as an example. However, as another embodiment, the plasma excitation section 2400 may also be configured as an inductively coupled plasma excitation section or a capacitive plasma excitation section.

[0132] The above detailed description is an exemplary description of the present invention. In addition, the above content shows and describes the preferred embodiments of the present invention, and the present invention can be used in various other combinations, changes and environments. That is, changes or modifications can be made within the scope of the concept of the invention disclosed in this specification, the scope equivalent to the above disclosure, and / or the technology or knowledge in the field. The above embodiments illustrate the best state for implementing the technical ideas of the present invention, and various changes required can also be made in the specific application fields and uses of the present invention. Therefore, the above detailed description of the invention is not intended to limit the present invention to the disclosed implementation state. In addition, the attached claims should be interpreted as including other implementation states.

Claims

1. An alignment device, wherein: include: a support module, supporting each of the plurality of objects at different heights; as well as an alignment module, aligning a plurality of objects supported by the support module, The plurality of objects include a window clip, a substrate, and a fixture plate, The alignment module comprises: a first alignment unit for aligning a first object that is one of the plurality of objects; a second alignment unit that aligns a second object that is one of the plurality of objects and is different from the first object; a third alignment unit that aligns a third object that is one of the objects and is different from the first object and the second object; and The driving unit moves the first alignment unit, the second alignment unit, and the third alignment unit simultaneously.

2. The alignment device according to claim 1, wherein: The driving portion moves the first alignment portion, the second alignment portion, and the third alignment portion in the same direction.

3. The alignment device according to claim 1, wherein: The first alignment part includes at least one first roller, and when the alignment module aligns the first object, the first roller contacts the first object. The second alignment portion includes at least one second roller, and when the alignment module aligns the second object, the second roller contacts the second object.

4. The alignment device according to any one of claims 1 to 3, wherein: The alignment modules are provided in plurality, and when viewed from the top, the plurality of alignment modules are respectively arranged at corner areas of the object supported by the support module.

5. The alignment device according to claim 4, wherein: The support module comprises: Base; a bracket, disposed on a top surface of the base and supporting a third object different from the first object and the second object; at least one lifting pin capable of being inserted into a hole formed in the third object and lifting and lowering the second object; and A support pin supports the first object.

6. The alignment device according to claim 5, wherein: The support comprises: a placement portion that contacts a bottom surface of the third object when supporting the third object; and The inclined portion extends from the seating portion and is inclined upward toward the outer side of the base from the center of the base viewed from the top.

7. The alignment device according to claim 5, wherein: The support pin supports the first object at a first height, The lifting pins are lifted and lowered at a second height lower than the first height to support the second object, The support supports the third object at a third height that is lower than the second height.

8. A substrate processing device, wherein: include: a processing chamber for performing a plasma treatment process on a substrate; a buffer chamber having an internal space, and an alignment device for aligning the window clamp, the substrate and the fixture plate is disposed in the internal space; as well as a transport robot for transporting the window clamp, the substrate and the fixture plate between the processing chamber and the buffer chamber, The alignment device comprises: a supporting module to support the window clamp, the base plate, and the fixture plate at different heights from each other; and an alignment module, aligning the window clamp, the substrate and the fixture plate supported by the support module, The alignment module comprises: a first alignment portion, aligning the window clip; a second alignment portion, aligning the substrate; a third aligning portion, aligning the fixture plate; and The driving unit moves the first alignment unit, the second alignment unit, and the third alignment unit simultaneously.

9. The substrate processing apparatus according to claim 8, wherein: The driving portion moves the first alignment portion, the second alignment portion, and the third alignment portion in the same direction.

10. The substrate processing apparatus according to claim 8, wherein: The first alignment portion includes at least one first roller, and when the alignment module aligns the window clamp, the first roller contacts the window clamp. The second alignment part includes at least one second roller, and when the alignment module aligns the substrate, the second roller contacts the substrate. The third aligning portion includes at least one third roller, and when the aligning module aligns the fixture plate, the third roller contacts the fixture plate.

11. The substrate processing apparatus according to claim 10, wherein: The support module comprises: Base; A bracket, disposed on the top surface of the base and supporting the fixture plate; at least one lifting pin capable of being inserted into a hole formed in the fixture plate and lifting and lowering the substrate; and A support pin supports the window clamp.

12. The substrate processing apparatus according to claim 11, wherein: The support comprises: a placement portion, contacting a bottom surface of the fixture plate when supporting the fixture plate; and The inclined portion extends from the seating portion and is inclined upward toward the outer side of the base from the center of the base viewed from the top.

13. The substrate processing apparatus according to claim 11 or 12, wherein: The second roller, the third roller, and the first roller are sequentially adjacent to the center of the base when viewed from the top.

14. The substrate processing apparatus according to claim 11 or 12, wherein: The support pin supports the window clamp at a first height, The lifting pins lift and support the substrate at a second height lower than the first height, The bracket supports the fixture plate at a third height that is lower than the second height.

15. The substrate processing apparatus according to claim 11 or 12, wherein: The alignment modules are provided in plurality, and when viewed from the top, the plurality of alignment modules are respectively arranged at corner areas of the object supported by the support module.

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