Heating device

Abstract

The present invention provides a heating device. The heating device includes a cylinder for placing an object to be processed, and an electromagnetic wave generating system for generating electromagnetic waves in the cylinder to heat the object to be processed. The electromagnetic wave generating system includes a plurality of radiation units for radiating electromagnetic waves and a phase shifter for adjusting the direction of electromagnetic waves radiated by the plurality of radiation units. The heating device of the present invention is provided with a plurality of radiation units and a phase shifter for adjusting the radiation direction of electromagnetic waves of the plurality of radiation units, and can heat each part of the object to be processed precisely and specifically, thereby alleviating the undesirable phenomenon of local overheating or even overcooking of the object to be processed, reducing the loss of nutrients, and improving the quality of the thawed food.

Description

Technical Field

[0001] The invention relates to the field of food processing, and in particular to an electromagnetic wave heating device. Background Art

[0002] During the freezing process of food, the quality of the food is maintained, but the frozen food needs to be thawed before processing or eating. In order to facilitate users to thaw the food, an electromagnetic wave heating device is usually used to thaw the food.

[0003] Thawing food with electromagnetic wave heating devices is not only fast and efficient, but also reduces the loss of food nutrients. However, due to the difference in the penetration and absorption of microwaves into water and ice, and the uneven distribution of substances inside the food, the melted area absorbs more energy, which can easily cause uneven thawing and local overheating (such as the fat part of pork belly, the chicken feet part of chicken, the fish tail part, etc.). Summary of the invention

[0004] An object of the present invention is to overcome at least one technical defect of the prior art and provide an electromagnetic wave heating device.

[0005] A further object of the present invention is to improve the temperature uniformity of the material to be treated.

[0006] In particular, the present invention provides a heating device, characterized in that it comprises:

[0007] A cylinder body defines a heating chamber for placing the object to be processed; and

[0008] The electromagnetic wave generating system comprises a plurality of radiation units for radiating electromagnetic waves to heat the object to be processed in the heating chamber; and the electromagnetic wave generating system further comprises:

[0009] The phase shifter is configured to adjust the directions of the electromagnetic waves radiated by the multiple radiation units.

[0010] Optionally, the heating device further comprises:

[0011] a temperature sensing device configured to sense the temperature of a plurality of sensing points of the object to be processed corresponding to the plurality of radiation units; and

[0012] The phase shifter is configured to adjust directions of electromagnetic waves radiated by corresponding radiation units according to the temperatures of the plurality of sensing points.

[0013] Optionally, the phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the radiation unit to shift toward the corresponding area of ​​the adjacent radiation unit with the largest temperature difference when the temperature corresponding to the radiation unit is greater than the temperature corresponding to the adjacent radiation unit and the temperature difference is greater than or equal to a first temperature threshold.

[0014] Optionally, the plurality of radiation units include a first radiation unit, a second radiation unit and a third radiation unit arranged in sequence; wherein

[0015] The phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the second radiation unit to shift toward the corresponding area of ​​the third radiation unit when the temperature corresponding to the second radiation unit is greater than the temperature corresponding to the first radiation unit and further greater than the temperature corresponding to the third radiation unit and the maximum temperature difference is greater than or equal to the first temperature threshold;

[0016] When the temperature difference between the temperatures corresponding to the second radiation unit and the third radiation unit is less than a second temperature threshold, the phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the second radiation unit to shift toward the corresponding area of ​​the first radiation unit when the temperature corresponding to the second radiation unit is greater than the temperature corresponding to the first radiation unit and the temperature difference is greater than or equal to the second temperature threshold; when the temperature corresponding to the second radiation unit is less than or equal to the temperature corresponding to the first radiation unit or the temperature difference is less than the second temperature threshold, adjust the direction of the electromagnetic wave radiated by the second radiation unit to radiate to its corresponding area; wherein

[0017] The second temperature threshold is lower than the first temperature threshold.

[0018] Optionally, the temperature sensing device comprises a plurality of temperature sensors and is disposed on the top of the heating chamber; and

[0019] The plurality of radiation units are disposed at the bottom of the heating chamber.

[0020] Optionally, the phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the radiation unit to shift toward a direction close to the object to be processed when there is no object to be processed in a corresponding area where the radiation unit exists.

[0021] Optionally, the plurality of radiation units include a first radiation unit, a second radiation unit and a third radiation unit arranged in sequence; wherein

[0022] The phase shifter is configured to adjust the direction of the electromagnetic waves radiated by the first radiation unit to shift toward the corresponding area of ​​the second radiation unit when there is no object to be processed in the corresponding area of ​​the first radiation unit and the temperature difference between the temperature corresponding to the second radiation unit and the temperature corresponding to the third radiation unit is less than a first temperature threshold.

[0023] Optionally, the plurality of radiation units include a first radiation unit, a second radiation unit and a third radiation unit arranged in sequence; wherein

[0024] The phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the first radiation unit to shift toward the corresponding area of ​​the second radiation unit, and adjust the direction of the electromagnetic wave radiated by the second radiation unit to shift toward the corresponding area of ​​the third radiation unit when there is no object to be processed in the corresponding area of ​​the first radiation unit and the temperature difference between the temperature corresponding to the second radiation unit and the temperature corresponding to the third radiation unit is greater than or equal to the first temperature threshold and less than the third temperature threshold; and

[0025] The phase shifter is configured to adjust the electromagnetic waves radiated by the first radiation unit and the second radiation unit to radiate to their corresponding areas respectively when there is no object to be processed in the corresponding area of ​​the first radiation unit and the temperature difference between the temperature corresponding to the second radiation unit and the temperature corresponding to the third radiation unit is greater than or equal to a third temperature threshold.

[0026] Optionally, a plurality of radiation units are linearly arranged in the heating chamber.

[0027] Optionally, the heating chamber is divided into a plurality of imaginary spaces of equal volume, and each of the imaginary spaces is provided with a radiation unit.

[0028] The heating device of the present invention is provided with a plurality of radiation units and a phase shifter for adjusting the electromagnetic wave radiation direction of the plurality of radiation units, and can heat each part of the object to be processed precisely and specifically, thereby alleviating the undesirable phenomenon of local overheating or even overcooking of the object to be processed, reducing the loss of nutrients, and improving the quality of the thawed food.

[0029] Furthermore, the phase shifter of the present invention adjusts the electromagnetic wave radiation direction of the corresponding radiation unit according to the temperature difference of the temperature of the corresponding areas of the multiple radiation units, so that the distribution of the electromagnetic wave in the part with strong electromagnetic wave absorption ability and the part with poor electromagnetic wave absorption ability of the object to be processed is more reasonable, the heating efficiency of different parts of the object to be processed is balanced, and the temperature uniformity of the object to be processed is further improved.

[0030] Furthermore, when there is no object to be processed in the corresponding area of ​​the radiation unit, the present invention shifts the electromagnetic waves radiated by the radiation unit toward the direction close to the object to be processed, thereby further improving the heating efficiency and avoiding unexpected energy waste while ensuring the temperature uniformity of the object to be processed.

[0031] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0033] Figure 1 is a schematic structural diagram of a heating device according to an embodiment of the present invention;

[0034] Figure 2 yes Figure 1 A schematic structural diagram of the controller;

[0035] Figure 3 is a schematic diagram of the layout of multiple radiation units according to an embodiment of the present invention;

[0036] Figure 4 is a schematic diagram of the layout of multiple radiation units according to another embodiment of the present invention;

[0037] Figure 5 is a schematic flow chart of a control method for a heating device according to an embodiment of the present invention;

[0038] Figure 6 According to one embodiment of the present invention, Figure 3 A schematic flow chart of a control method of the illustrated arrangement;

[0039] Figure 7 According to one embodiment of the present invention, Figure 4 Schematic flow chart of the control method of the shown arrangement. DETAILED DESCRIPTION

[0040] Figure 1 is a schematic structural diagram of a heating device 100 according to an embodiment of the present invention. Figure 1 The heating device 100 may include a cylinder 110 , a door body, an electromagnetic wave generating system and a controller 130 .

[0041] The barrel 110 may define a heating chamber for placing the object to be processed 170 , and a take-in and put-out opening may be opened on the front wall thereof for taking the object to be processed 170 .

[0042] The door body can be installed together with the cylinder body 110 by appropriate methods, such as slide rail connection, hinge connection, etc., for opening and closing the loading and unloading port.

[0043] At least a portion of the electromagnetic wave generating system may be disposed in the barrel 110 or may be connected to the barrel 110 to generate electromagnetic waves in the heating chamber to heat the object 170 to be processed.

[0044] The cylinder 110 and the door body may be provided with electromagnetic shielding features respectively, so that the door body is conductively connected to the cylinder 110 when in a closed state, so as to prevent electromagnetic leakage.

[0045] The electromagnetic wave generating system may include an electromagnetic wave generating module 120 , a power supply module, at least one radiation group, a phase shifter 160 , and a switch device 150 .

[0046] The electromagnetic wave generating module 120 may be configured to generate an electromagnetic wave signal. The power supply module may be configured to be electrically connected to the electromagnetic wave generating module 120 to provide electrical energy to the electromagnetic wave generating module 120, thereby enabling the electromagnetic wave generating module 120 to generate an electromagnetic wave signal.

[0047] At least one radiation group may be disposed in the barrel 110 and electrically connected to the electromagnetic wave generating module 120 to generate electromagnetic waves of corresponding frequencies according to the electromagnetic wave signal to heat the object to be processed 170 in the heating chamber.

[0048] Each radiation group may include a plurality of radiation units to improve the distribution uniformity of the electromagnetic waves in the heating chamber.

[0049] In some embodiments, the cylinder 110 may be made of metal to serve as a receiving pole of at least one radiation group. In this embodiment, the cylinder 110 itself is the electromagnetic shielding feature of the cylinder 110 .

[0050] In other embodiments, the electromagnetic wave generating system further includes one or more receiving plates arranged opposite to the plurality of radiation units of at least one radiation group and electrically connected to the electromagnetic wave generating module 120. In this embodiment, the inner wall of the cylinder 110 may be coated with a metal coating or attached with a metal mesh, etc., to serve as an electromagnetic shielding feature of the cylinder 110.

[0051] The phase shifter 160 is configured to independently adjust the direction of electromagnetic waves radiated by multiple radiation units of at least one radiation group, so as to make the distribution of electromagnetic waves in the heating chamber more reasonable, thereby improving the heating efficiency and the temperature uniformity of the object 170 to be processed.

[0052] The phase shifter 160 may include multiple independently controlled phase shifting units, which are respectively connected in series between the electromagnetic wave generating module 120 and multiple radiation units of at least one radiation group, and adjust the direction of the electromagnetic wave radiated by the corresponding radiation unit by adjusting the phase of the electromagnetic wave signal.

[0053] The switch device 150 is configured to independently switch on and off a plurality of radiation units of at least one radiation group to avoid undesired energy waste.

[0054] Figure 2 yes Figure 1 Schematic diagram of the structure of the controller 130. Figure 2The controller 130 may include a processing unit 131 and a storage unit 132. The storage unit 132 stores a computer program 133, and the computer program 133 is used to implement the control method of the embodiment of the present invention when executed by the processing unit 131.

[0055] The heating device 100 may further include a temperature sensing device for sensing the temperature of a plurality of sensing points of the object to be processed 170 , wherein the plurality of sensing points correspond to a plurality of radiation units of at least one radiation group. The temperature sensing device may include a plurality of temperature sensors 180 .

[0056] At least one radiation group may be disposed at the bottom of the heating chamber, and a plurality of temperature sensors 180 may be disposed at the top of the heating chamber to uniformly heat the object 170 while improving the accuracy of the temperature of the sensing point detected by the temperature sensor 180 .

[0057] The heating chamber may be divided into a plurality of imaginary spaces of equal volume, and each imaginary space may be provided with a radiation unit to further improve the temperature uniformity of the object 170 to be processed.

[0058] In particular, the processing unit 131 can be configured to control the phase shifter 160 to adjust the direction of the electromagnetic waves radiated by the corresponding radiation unit according to the temperature of the plurality of sensing points, so that the distribution of the electromagnetic waves in the parts of the object to be processed 170 with strong electromagnetic wave absorption ability and the parts with poor electromagnetic wave absorption ability is more reasonable, and the heating efficiency of different parts of the object to be processed 170 is balanced, and the temperature uniformity of the object to be processed 170 is improved. In the present invention, in each heating cycle, it is assumed that each radiation unit initially radiates electromagnetic waves to its corresponding area.

[0059] Specifically, the processing unit 131 may be configured to control the phase shifter 160 to adjust the direction of the electromagnetic wave radiated by the radiation unit to shift to the corresponding area of ​​the adjacent radiation unit with the largest temperature difference within its adjustable range when the temperature corresponding to the radiation unit (sensing point) is greater than the temperature corresponding to the adjacent radiation unit and the temperature difference is greater than or equal to the first temperature threshold W1, so as to reduce the number of adjustments and further improve the temperature uniformity of the object to be processed 170. The first temperature threshold W1 may be 1.5 to 3°C, such as 1.5°C, 2°C, or 3°C.

[0060] The processing unit 131 may be further configured to control the phase shifter 160 to adjust the electromagnetic wave radiated by the radiation unit to stop shifting toward the corresponding area of ​​the aforementioned "adjacent radiation unit with the largest temperature difference" when the temperature corresponding to the radiation unit and the temperature corresponding to the aforementioned "adjacent radiation unit with the largest temperature difference" are less than the second temperature threshold W2, so as to avoid the radiation direction of the electromagnetic wave being frequently adjusted. The second temperature threshold W2 may be less than the first temperature threshold W1. The second temperature threshold W2 may be 0.75 to 1.5°C, for example, 0.75°C, 1°C or 1.5°C.

[0061] The processing unit 131 can also be configured to control the phase shifter 160 to adjust the direction of the electromagnetic waves radiated by the radiation unit to shift toward the direction close to the object to be processed 170, or control the switching device 150 to stop the radiation unit from radiating electromagnetic waves, so as to avoid unexpected energy waste while ensuring the temperature uniformity of the object to be processed 170, when there is a corresponding area where the radiation unit exists.

[0062] Figure 3 FIG. 1 is a schematic diagram of the layout of multiple radiation units according to an embodiment of the present invention. Figure 3 In some embodiments, the number of radiation groups may be one. The radiation units of the radiation group may be arranged linearly in the heating chamber, and are suitable for heating devices 100 having a larger length-to-width ratio of the mounting plane of the radiation group, for example, a length-to-width ratio greater than 3 / 2.

[0063] The adjustable direction of the electromagnetic waves radiated by the multiple radiation units can be the same as their arrangement direction, so as to adjust the distribution of the electromagnetic waves. In the illustrated embodiment, the multiple radiation units are arranged in the longitudinal direction, and the directions of the electromagnetic waves radiated by the multiple radiation units can be adjusted in the longitudinal direction.

[0064] In some further exemplary embodiments, the plurality of radiation units may include a first radiation unit 141, a second radiation unit 142 and a third radiation unit 143 arranged in sequence, that is, the first radiation unit 141, the second radiation unit 142 and the third radiation unit 143 are arranged adjacent to each other, and the second radiation unit 142 is arranged between the first radiation unit 141 and the third radiation unit 143.

[0065] The processing unit 131 can be configured to control the phase shifter 160 to adjust the direction of the electromagnetic waves radiated by the second radiation unit 142 to shift toward the corresponding area of ​​the third radiation unit 143 when the temperature T2 corresponding to the second radiation unit 142 is greater than the temperature T1 corresponding to the first radiation unit 141 and further greater than the temperature T3 corresponding to the third radiation unit 143, and the maximum temperature difference is greater than or equal to the first temperature threshold W1, so as to improve the heating efficiency of the corresponding area of ​​the third radiation unit 143 and reduce the temperature difference between the corresponding sensing points of the second radiation unit 142 and the third radiation unit 143.

[0066] When the temperature difference between the temperatures corresponding to the second radiation unit 142 and the third radiation unit 143 is less than the second temperature threshold W2, the processing unit 131 can be further configured to control the phase shifter 160 to adjust the direction of the electromagnetic wave radiated by the second radiation unit 142 to shift toward the corresponding area of ​​the first radiation unit 141 when the temperature T2 corresponding to the second radiation unit 142 is greater than the temperature T1 corresponding to the first radiation unit 141 and the temperature difference is greater than or equal to the second temperature threshold W2, so as to reduce the temperature difference between the sensing points corresponding to the second radiation unit 142 and the first radiation unit 141; when the temperature T2 corresponding to the second radiation unit 142 is less than or equal to the temperature T1 corresponding to the first radiation unit 141 or the temperature difference is less than the second temperature threshold W2, adjust the direction of the electromagnetic wave radiated by the second radiation unit 142 to radiate toward the area corresponding to itself, so as to ensure the temperature uniformity of the object to be processed 170.

[0067] When there is no object to be processed 170 in the corresponding area of ​​one or more radiation units of the radiation group, the processing unit 131 can also be configured to control the phase shifter 160 to adjust the direction of the electromagnetic waves radiated by the one or more radiation units to shift toward a direction close to the object to be processed 170 to improve the heating efficiency.

[0068] The present invention is described below by taking the case where only the corresponding area of ​​the first radiation unit 141 is free of the object to be processed 170 as an example. Figure 3 The technical solution of the illustrated embodiment is introduced in detail.

[0069] The processing unit 131 can be configured to first control the phase shifter 160 to adjust the direction of the electromagnetic waves radiated by the first radiation unit 141 to shift toward the corresponding area of ​​the second radiation unit 142 after determining that there is no object 170 to be processed in the corresponding area of ​​the first radiation unit 141, so as to improve the heating efficiency.

[0070] If the temperature difference between the temperature T2 corresponding to the second radiation unit 142 and the temperature T3 corresponding to the third radiation unit 143 is less than the first temperature threshold W1, the processing unit 131 can continue to control the phase shifter 160 to adjust the direction of the electromagnetic wave radiated by the first radiation unit 141 to shift toward the corresponding area of ​​the second radiation unit 142.

[0071] If the temperature difference between the temperature T2 corresponding to the second radiation unit 142 and the temperature T3 corresponding to the third radiation unit 143 is greater than or equal to the first temperature threshold W1 and less than the third temperature threshold W3, the processing unit 131 can be configured to control the phase shifter 160 to adjust the direction of the electromagnetic wave radiated by the first radiation unit 141 to shift toward the corresponding area of ​​the second radiation unit 142, and adjust the direction of the electromagnetic wave radiated by the second radiation unit 142 to shift toward the corresponding area of ​​the third radiation unit 143, so as to improve the temperature uniformity of the object to be processed 170. The third temperature threshold W3 can be 4 to 6°C, for example, 4°C, 5°C, or 6°C.

[0072] If the temperature difference between the temperature T2 corresponding to the second radiation unit 142 and the temperature T3 corresponding to the third radiation unit 143 is greater than or equal to the third temperature threshold W3, the processing unit 131 can be configured to control the phase shifter 160 to adjust the electromagnetic waves radiated by the first radiation unit 141 and the second radiation unit 142 to radiate to their corresponding areas respectively, so as to avoid local overheating of the object to be processed 170.

[0073] Figure 4 is a schematic diagram of the layout of multiple radiation units according to another embodiment of the present invention. Figure 4 In some other embodiments, there may be more than one radiation group. The adjustable directions of the electromagnetic waves radiated by the radiation units of each radiation group may be the same to simplify the control process.

[0074] The multiple radiation units of the multiple radiation groups may be distributed in a matrix to further improve the temperature uniformity of the object 170 to be processed.

[0075] In the illustrated embodiment, each radiation group may include a first radiation unit, a second radiation unit, and a third radiation unit arranged in sequence along the longitudinal direction. Specifically, a longitudinal radiation group may include a first radiation unit 141a, a second radiation unit 142a, and a third radiation unit 143a. Another longitudinal radiation group may include a first radiation unit 141b, a second radiation unit 142b, and a third radiation unit 143b. A transverse radiation group may include a first radiation unit 141c, a second radiation unit 142c, and a third radiation unit 143c.

[0076] In some further exemplary embodiments, the plurality of radiation groups may include two longitudinal radiation groups that are spaced apart and can adjust the direction of the electromagnetic waves radiated in the longitudinal direction, and a transverse radiation group that is disposed between the two longitudinal radiation groups and adjusts the direction of the electromagnetic waves radiated in the transverse direction, so as to fully adjust the distribution of electromagnetic waves in the heating chamber. That is, the arrangement direction of the plurality of radiation units of the longitudinal radiation group is the same as the adjustable direction of the electromagnetic waves radiated therefrom, and the arrangement direction of the plurality of radiation units of the transverse radiation group is perpendicular to the adjustable direction of the electromagnetic waves radiated therefrom.

[0077] The processing unit 131 may be configured to: c Greater than the temperature T corresponding to the radiation unit of the two adjacent longitudinal radiation groups a 、T b And when the maximum temperature difference is greater than or equal to the first temperature threshold W1, the phase shifter 160 is controlled to adjust the direction of the electromagnetic waves radiated by the radiation unit of the transverse radiation group to shift toward the corresponding area of ​​the radiation unit of the longitudinal radiation group with the largest temperature difference, so as to improve the heating efficiency of the corresponding area of ​​the radiation unit of the longitudinal radiation group with the largest temperature difference and reduce the temperature difference.

[0078] For example, at the temperature T corresponding to the radiation unit 141c c1 Greater than the temperature T corresponding to the radiation unit 141a a1 and further greater than the temperature T corresponding to the radiation unit 141b b1 , and when the maximum temperature difference is greater than or equal to the first temperature threshold W1, the processing unit 131 can control the phase shifter 160 to adjust the direction of the electromagnetic wave radiated by the radiation unit 141c to shift toward the corresponding area of ​​the radiation unit 141b.

[0079] When the temperature difference between the radiation unit 141c and the radiation unit 141b is less than the second temperature threshold W2, the processing unit 131 may be further configured to control the phase shifter 160 to be at the temperature T corresponding to the radiation unit 141c. c1 Greater than the temperature T corresponding to the radiation unit 141a a1 When the temperature difference is greater than or equal to the second temperature threshold W2, the direction of the electromagnetic wave radiated by the radiation unit 141c is adjusted to shift toward the corresponding area of ​​the radiation unit 141a to reduce the temperature difference between the corresponding sensing points of the radiation unit 141c and the radiation unit 141a; when the temperature T corresponding to the radiation unit 141c is c1 is less than the temperature T corresponding to the radiation unit 141a a1 When the temperature difference is less than the second temperature threshold W2, the direction of the electromagnetic wave radiated by the radiation unit 141 c is adjusted so that the electromagnetic wave radiates toward the corresponding area to ensure the temperature uniformity of the object 170 to be processed.

[0080] In some further exemplary embodiments, for the longitudinal radiation group, the processing unit 131 may be configured to, at the temperature T corresponding to the radiation unit 142a, a2 Greater than the temperature T corresponding to the radiation unit 141a and further greater than the temperature T corresponding to the radiation unit 143a a3 When the maximum temperature difference is greater than or equal to the first temperature threshold W1, the phase shifter 160 is controlled to adjust the direction of the electromagnetic wave radiated by the radiation unit 142a to shift toward the corresponding area of ​​the radiation unit 143a to improve the heating efficiency of the corresponding area of ​​the radiation unit 143a and reduce the temperature difference.

[0081] When the temperature difference between the temperature corresponding to the radiation unit 142a and the temperature corresponding to the radiation unit 143a is less than the second temperature threshold W2, the processing unit 131 can be further configured to control the phase shifter 160 to be at the temperature T corresponding to the radiation unit 142a. a2 Greater than the temperature T corresponding to the radiation unit 141a a1 When the temperature difference is greater than or equal to the second temperature threshold W2, the direction of the electromagnetic wave radiated by the radiation unit 142a is adjusted to shift toward the corresponding area of ​​the radiation unit 141a to reduce the temperature difference between the radiation unit 142a and the corresponding sensing point of the radiation unit 141a; when the temperature T corresponding to the radiation unit 142a a2 Less than or equal to the temperature T corresponding to the radiation unit 141a a1 Or when the temperature difference is less than the second temperature threshold value W2, the direction of the electromagnetic waves radiated by the radiation unit 142a is adjusted to radiate toward the area corresponding to itself, so as to ensure the temperature uniformity of the object 170 to be processed.

[0082] In some further exemplary embodiments, radiation unit 143a, radiation unit 143b, and radiation unit 143c may be located at an edge of the heating chamber.

[0083] When there is a radiation unit 143a and a radiation unit 143b located at the edge whose corresponding temperatures are respectively the highest and the lowest and the temperature difference is greater than or equal to the first temperature threshold W1, the processing unit 131 can be configured to control whether the radiation unit with the highest corresponding temperature radiates electromagnetic waves and the radiation direction of the electromagnetic waves when radiating electromagnetic waves according to the temperature of the second radiation unit adjacent to the radiation unit with the highest corresponding temperature.

[0084] Taking the temperatures corresponding to the radiation unit 143b and the radiation unit 142c as the highest and the lowest respectively as an example, a detailed description is given. When the temperature difference corresponding to the radiation unit 143b and the radiation unit 142c is greater than or equal to the first temperature threshold W1, the processing unit 131 can be configured to control the switch device 150 to stop the radiation unit 143b from radiating electromagnetic waves when the temperature difference between the radiation unit 142b adjacent to the radiation unit 143b and the radiation unit 142c is greater than or equal to the first temperature threshold W1, and control the phase shifter 160 to adjust the radiation unit The direction of the electromagnetic wave radiated by the radiation unit 142b is offset toward the corresponding area of ​​the radiation unit 141b to reduce the temperature difference between the radiation unit 143b and the corresponding sensing points of the radiation unit 142b and the radiation unit 142c; when the temperature difference between the radiation unit 142b and the radiation unit 142c is less than the first temperature threshold W1, the phase shifter 160 is controlled to adjust the direction of the electromagnetic wave radiated by the radiation unit 143b to be offset toward the corresponding area of ​​the radiation unit 142b to improve the heating efficiency and reduce the temperature difference between the corresponding sensing points of the radiation unit 143b and the radiation unit 142c.

[0085] When there is no object to be processed 170 in the corresponding area of ​​some radiation units of a longitudinal radiation group, the processing unit 131 can be configured to control the phase shifter 160 to adjust the direction of the electromagnetic waves radiated by the part of the radiation units to shift toward the corresponding areas of other radiation units in the longitudinal radiation group, so as to improve the heating efficiency while ensuring the temperature uniformity of the object to be processed 170.

[0086] For example, there is no object 170 to be processed in the area corresponding to the radiation unit 141b, and there is an object 170 to be processed in the areas corresponding to the radiation units 142b and 143b, and the processing unit 131 can be configured to heat the radiation unit 142b at a temperature T corresponding to the radiation unit 142b. b2 The temperature T corresponding to the radiation unit 143b b3 When the temperature difference is less than the first temperature threshold W1, the phase shifter 160 is controlled to adjust the direction of the electromagnetic wave radiated by the radiation unit 141b to shift toward the corresponding area of ​​the radiation unit 142b, so as to improve the heating efficiency while ensuring the temperature uniformity of the object 170 to be processed.

[0087] The processing unit 131 may also be configured to generate a temperature T corresponding to the radiation unit 142b. b2 The temperature T corresponding to the radiation unit 143b b3 When the temperature difference is greater than or equal to the first temperature threshold W1 and less than the third temperature threshold W3, the phase shifter 160 is controlled to adjust the direction of the electromagnetic waves radiated by the radiation unit 142b to shift toward the corresponding area of ​​the radiation unit 143b, so as to improve the heating efficiency while ensuring the temperature uniformity of the object 170 to be processed.

[0088] The processing unit 131 may also be configured to: b2 The temperature T corresponding to the radiation unit 143b b3 When the temperature difference is greater than or equal to the third temperature threshold W3, the phase shifter 160 is controlled to make the directions of the electromagnetic waves radiated by the radiation units 141b, 142b and 143b radiate toward their corresponding areas respectively to ensure the temperature uniformity of the object 170 to be processed.

[0089] When there is no object to be processed 170 in the corresponding areas of multiple radiation units of a longitudinal radiation group, the processing unit 131 can be configured to control the phase shifter 160 so that the directions of the electromagnetic waves radiated by the multiple radiation units of the longitudinal radiation group are radiated toward their corresponding areas respectively, so as to ensure the temperature uniformity of the object to be processed 170.

[0090] When there is no object to be processed 170 in the corresponding area of ​​one or more radiation units of the lateral radiation group, the processing unit 131 can be configured to control the phase shifter 160 so that the directions of the electromagnetic waves radiated by the one or more radiation units are radiated toward their corresponding areas respectively, so as to ensure the temperature uniformity of the object to be processed 170.

[0091] The processing unit 131 may also be configured to control the switch device 150 to stop the radiation units in the corresponding areas where there is no object 170 to be processed from radiating electromagnetic waves, so as to save energy.

[0092] In some embodiments, if there are multiple radiation units at the same time and the temperature difference between the temperatures of the adjacent radiation units is greater than or equal to the first temperature threshold W1, the processing unit 131 can be configured to determine the adjustment order of the radiation direction of the radiation unit according to the size of the temperature difference, and first adjust the radiation direction of the radiation unit with the largest temperature difference. Compared with adjusting the radiation directions of multiple radiation units at the same time, the number of adjustments can be reduced, the heating efficiency can be improved, and the temperature uniformity of the object 170 to be processed can be further improved.

[0093] Figure 5 is a schematic flow chart of a control method for a heating device 100 according to an embodiment of the present invention. Figure 5 The control method for the heating device 100 executed by the controller 130 of any of the above embodiments of the present invention may include the following steps:

[0094] Step S502: sensing the temperatures of a plurality of sensing points of the object to be processed 170, wherein the plurality of sensing points correspond to a plurality of radiation units of at least one radiation group.

[0095] Step S504: adjusting the direction of the electromagnetic waves radiated by each radiation unit according to the temperature corresponding to the adjacent radiation unit.

[0096] The control method of the present invention adjusts the electromagnetic wave radiation direction of the corresponding radiation unit according to the temperature of the corresponding sensing points of the multiple radiation units, so that the distribution of the electromagnetic wave in the part with strong electromagnetic wave absorption ability and the part with poor electromagnetic wave absorption ability of the object to be processed 170 is more reasonable, the heating efficiency of different parts of the object to be processed 170 is balanced, and the temperature uniformity of the object to be processed 170 is improved.

[0097] Specifically, step S504 may further include the following steps:

[0098] Determine whether there is a situation where the temperature corresponding to a radiation unit is greater than the temperature corresponding to its adjacent radiation unit and the temperature difference is greater than or equal to a first temperature threshold, wherein the first temperature threshold W1 can be 1.5-3°C, such as 1.5°C, 2°C, or 3°C.

[0099] If so, the direction of the electromagnetic wave radiated by the radiation unit is adjusted to shift toward the corresponding area of ​​the adjacent radiation unit with the largest temperature difference, so as to reduce the number of adjustments and further improve the temperature uniformity of the object 170 to be processed.

[0100] In some further embodiments, if there are multiple radiation units whose corresponding temperatures are greater than the corresponding temperatures of their adjacent radiation units and the temperature difference is greater than or equal to the first temperature threshold, the direction of the electromagnetic wave radiated by the radiation unit whose corresponding temperature is greater than the corresponding temperature of its adjacent radiation unit and whose temperature difference is the largest is adjusted first. Compared with adjusting the radiation directions of multiple radiation units at the same time, the number of adjustments can be reduced, the heating efficiency can be improved, and the temperature uniformity of the object 170 to be processed can be further improved.

[0101] In some embodiments, if there is no object to be processed 170 in the corresponding area of ​​the radiation unit, the direction of the electromagnetic waves radiated by the radiation unit is adjusted to shift toward the direction close to the object to be processed 170 or the radiation unit stops radiating electromagnetic waves to avoid unexpected energy waste while ensuring the temperature uniformity of the object to be processed 170.

[0102] Figure 6 According to one embodiment of the present invention, Figure 3 A schematic flow chart of the control method of the layout shown (in the accompanying drawings of the present invention, "Y" means "yes" and "N" means "no"). Figure 6 The present invention is based on Figure 3 The control method of the illustrated arrangement may include the following steps:

[0103] Step S602: Determine whether there is an area corresponding to a radiation unit without an object to be processed 170. If yes, execute step S604; if no, execute step S620.

[0104] Step S604: If there is no object 170 to be processed in the area corresponding to the first radiation unit 141 , adjust the direction of the electromagnetic waves radiated by the first radiation unit 141 to shift toward the area corresponding to the second radiation unit 142 to improve the heating efficiency.

[0105] Step S606: Sense the temperatures of multiple sensing points of the object to be processed 170 to determine whether the temperature T2 corresponding to the second radiation unit 142 is greater than the temperature T3 corresponding to the third radiation unit 143 and the temperature difference is greater than or equal to the first temperature threshold W1. If yes, execute step S608; if not, return to step S604.

[0106] Step S608 : adjusting the direction of the electromagnetic waves radiated by the second radiation unit 142 to shift toward the corresponding area of ​​the third radiation unit 143 , so as to improve the temperature uniformity of the object to be processed 170 .

[0107] Step S610: Sense the temperature of multiple sensing points of the object to be processed 170, and determine whether the temperature T2 corresponding to the second radiation unit 142 is greater than the temperature T3 corresponding to the third radiation unit 143 and the temperature difference is greater than or equal to the third temperature threshold W3. The third temperature threshold W3 can be 4 to 6°C, such as 4°C, 5°C, or 6°C. If yes, execute step S612; if not, return to step S606.

[0108] Step S612: Adjust the direction of the electromagnetic waves radiated by the first radiation unit 141 and the second radiation unit 142 to radiate toward their corresponding regions to avoid local overheating of the object to be processed 170. (If the radiation group also includes a fourth radiation unit disposed on the side of the third radiation unit 143 away from the second radiation unit 142, after executing step S608, it can be determined whether the temperature corresponding to the third radiation unit 143 is greater than or equal to the temperature corresponding to the fourth radiation unit and the temperature difference is greater than or equal to the first temperature threshold value W1. If so, the direction of the electromagnetic waves radiated by the third radiation unit 143 can be adjusted to shift toward the corresponding region of the fourth radiation unit. When there is a situation where the temperature difference between the temperatures corresponding to two adjacent radiation units is greater than or equal to the third temperature threshold value W3, each radiation unit is made to radiate electromagnetic waves to its corresponding region.)

[0109] Step S620: Sense the temperatures of multiple sensing points of the object to be processed 170, and determine whether the temperature T2 corresponding to the second radiation unit 142 is greater than the temperature T1 corresponding to the first radiation unit 141 and further greater than the temperature T3 corresponding to the third radiation unit 143 and the maximum temperature difference is greater than or equal to the first temperature threshold W1, that is, determine whether the temperature corresponding to the radiation unit located in the middle of the three adjacent radiation units is the highest and the maximum temperature difference with the corresponding temperatures of the radiation units on both sides is greater than or equal to the first temperature threshold W1. If yes, execute step S622; if not, execute step S632.

[0110] Step S622: adjust the direction of the electromagnetic waves radiated by the second radiation unit 142 to shift toward the corresponding area of ​​the third radiation unit 143 to improve the heating efficiency of the corresponding area of ​​the third radiation unit 143 and reduce the temperature difference between the corresponding sensing points of the second radiation unit 142 and the third radiation unit 143.

[0111] Step S624: Sense the temperatures of multiple sensing points of the object to be processed 170, and determine whether the temperature difference between the temperature T2 corresponding to the second radiation unit 142 and the temperature T3 corresponding to the third radiation unit 143 is less than the second temperature threshold W2. The second temperature threshold W2 may be less than the first temperature threshold W1, and may be 0.75 to 1.5°C, such as 0.75°C, 1°C or 1.5°C. If yes, execute step S626; if no, return to step S622.

[0112] Step S626: Sense the temperatures of multiple sensing points of the object to be processed 170 to determine whether the temperature T2 corresponding to the second radiation unit 142 is greater than the temperature T1 corresponding to the first radiation unit 141 and the temperature difference is greater than or equal to the second temperature threshold W2. If yes, execute step S628; if not, execute step S630.

[0113] Step S628: adjust the direction of the electromagnetic wave radiated by the second radiation unit 142 to shift toward the corresponding area of ​​the first radiation unit 141 to reduce the temperature difference between the corresponding sensing points of the second radiation unit 142 and the first radiation unit 141. Return to step S626.

[0114] Step S630: Adjust the direction of the electromagnetic wave radiated by the second radiation unit 142 so that the electromagnetic wave radiates toward its corresponding area to ensure the temperature uniformity of the object to be processed 170. Return to step S620.

[0115] Step S632: Sense the temperatures of multiple sensing points of the object to be processed 170, and determine whether the temperature T1 corresponding to the first radiation unit 141 is greater than the temperature T2 corresponding to the second radiation unit 142 and the temperature difference is greater than or equal to the first temperature threshold W1, and / or the temperature T3 corresponding to the third radiation unit 143 is greater than the temperature T2 corresponding to the second radiation unit 142 and the temperature difference is greater than or equal to the first temperature threshold W1, that is, determine whether the corresponding temperature of the radiation unit located at the edge is greater than the corresponding temperature of its adjacent radiation unit and the temperature difference is greater than or equal to the first temperature threshold W1. If so, execute step S634; if not, execute step S620.

[0116] Step S634: Adjust the direction of the electromagnetic wave radiated by the radiation unit whose temperature difference with the temperature T2 corresponding to the second radiation unit 142 is the largest and is greater than or equal to the first temperature threshold W1 among the first radiation unit 141 and the third radiation unit 143, so that the electromagnetic wave is offset toward the corresponding area of ​​the second radiation unit 142 to reduce the temperature difference between the edge and the center of the object to be processed 170.

[0117] Step S636: Sense the temperatures of multiple sensing points of the object to be processed 170 to determine whether the temperature difference between the temperature T2 corresponding to the adjusted radiation unit and the second radiation unit 142 is less than the second temperature threshold W2. If yes, execute step S638; if not, execute step S634.

[0118] Step S638: re-adjust the direction of the electromagnetic wave radiated by the above-adjusted radiation unit so that the electromagnetic wave radiates to its corresponding area to ensure the temperature uniformity of the object to be processed 170. Return to step S620.

[0119] Figure 7 According to one embodiment of the present invention, Figure 4Schematic flow chart of the control method of the layout shown. Figure 7 The present invention is based on Figure 4 The control method of the illustrated arrangement may include the following steps:

[0120] Step S702: Sense the temperatures of multiple sensing points of the object to be processed 170 to determine whether there is a radiation unit of the transverse radiation group corresponding to the temperature T c Greater than the temperature T corresponding to the radiation unit of the two adjacent longitudinal radiation groups a 、T b And the maximum temperature difference is greater than or equal to the first temperature threshold W1. That is, it is determined whether there is a temperature T corresponding to the radiation unit of the horizontal radiation group. c The highest temperature T corresponding to the radiation unit of an adjacent longitudinal radiation group b Less than the temperature T corresponding to the radiation unit of another adjacent longitudinal radiation group a And the temperature T corresponding to the radiation unit of the transverse radiation group c If the temperature difference is greater than or equal to the first temperature threshold W1, then execute step S704; if not, then execute step S720.

[0121] Step S704: Adjust the direction of the electromagnetic waves radiated by the radiation unit of the transverse radiation group to shift toward the corresponding area of ​​the radiation unit of the longitudinal radiation group with the largest temperature difference (i.e., the radiation unit of the aforementioned adjacent longitudinal radiation group), so as to improve the heating efficiency of the corresponding area of ​​the radiation unit of the longitudinal radiation group with the largest temperature difference and reduce the temperature difference.

[0122] Step S706: Sense the temperatures of multiple sensing points of the object to be processed 170, and determine the temperature T corresponding to the radiation unit of the transverse radiation group. c The temperature T of the radiation unit of a longitudinal radiation group adjacent to the above b Is the temperature difference less than the second temperature threshold W2? If so, execute step S708; if not, return to step S704.

[0123] Step S708: Measure the temperatures of multiple sensing points of the object to be processed 170, and determine the temperature T corresponding to the radiation unit of the transverse radiation group. c Is it greater than the temperature T of the radiation unit of another adjacent longitudinal radiation group? a And the temperature difference is greater than or equal to the second temperature threshold W2. If so, execute step S710; if not, execute step S712.

[0124] Step S710: Adjust the direction of the electromagnetic waves radiated by the radiation unit of the transverse radiation group to shift toward the corresponding area of ​​the radiation unit of the adjacent longitudinal radiation group, so as to reduce the temperature difference between the corresponding sensing points of the radiation unit of the transverse radiation group and the radiation unit of the adjacent longitudinal radiation group. Return to step S708.

[0125] Step S712: Adjust the direction of the electromagnetic waves radiated by the radiation units of the transverse radiation group so that the electromagnetic waves radiate toward their corresponding regions to ensure the temperature uniformity of the object to be processed 170. Return to step S702.

[0126] Step S720: Determine whether there is a corresponding temperature T in the radiation unit 143a and the radiation unit 143b. a3,b3 is the highest temperature among all sensing points, and the corresponding temperature T of the radiation unit 142c c2 is the lowest temperature among all sensing points, and the temperature difference between the two is greater than or equal to the first temperature threshold W1. That is, it is determined whether there is a corresponding temperature T in the radiation unit located at the edge of the heating chamber of the longitudinal radiation group. a3,b3 The highest, the corresponding temperature T of the radiation unit exists in the radiation unit located in the middle of the lateral radiation group. c2 The temperature difference between the highest temperature and the lowest temperature is greater than or equal to the first temperature threshold W1. If yes, execute step S722; if no, execute step S730.

[0127] Step S722: Determine the temperature T corresponding to the radiation unit adjacent to the radiation unit corresponding to the highest temperature (the second radiation unit of the longitudinal radiation group corresponding to the highest temperature). a2,b2 The corresponding temperature T of the radiation unit 142c c2 Is the temperature difference greater than or equal to the first temperature threshold W1? If so, execute step S724; if not, execute step S726.

[0128] Step S724: Stop the third radiation unit of the longitudinal radiation group from radiating electromagnetic waves, and adjust the direction of the electromagnetic waves radiated by the second radiation unit of the longitudinal radiation group to shift toward the corresponding area of ​​the first radiation unit of the longitudinal radiation group, so as to reduce the temperature difference between the corresponding sensing points of the third radiation unit and the second radiation unit of the longitudinal radiation group and the middle radiation unit of the transverse radiation group. Return to step S702.

[0129] Step S726: Adjust the direction of the electromagnetic wave radiated by the third radiation unit of the longitudinal radiation group to shift toward the corresponding area of ​​the second radiation unit of the longitudinal radiation group to improve the heating efficiency and reduce the temperature difference between the corresponding sensing points of the third radiation unit of the longitudinal radiation group and the middle radiation unit of the transverse radiation group. Return to step S702.

[0130] Step S730: Determine whether there is a temperature T corresponding to the second radiation unit in the longitudinal radiation group a2,b2 Greater than the temperature T corresponding to the first radiation unit a1,b1 And further greater than the temperature T corresponding to the third radiation unit a3,b3 And the maximum temperature difference is greater than or equal to the first temperature threshold W1, that is, it is determined whether there is a situation where the temperature corresponding to the radiation unit located in the middle of the three adjacent radiation units in the longitudinal radiation group is the highest and the maximum temperature difference with the corresponding temperature of the radiation units on both sides is greater than or equal to the first temperature threshold W1. If so, execute step S732; if not, return to step S702.

[0131] Step S732: adjust the direction of the electromagnetic wave radiated by the second radiation unit of the longitudinal radiation group to shift toward the corresponding area of ​​the third radiation unit of the radiation group to improve the heating efficiency of the corresponding area of ​​the third radiation unit of the radiation group and reduce the temperature difference.

[0132] Step S734: Sense the temperatures of multiple sensing points of the object to be processed 170 to determine whether the temperature difference between the second radiation unit and the third radiation unit of the longitudinal radiation group is less than the second temperature threshold W2. If yes, execute step S736; if not, return to step S732.

[0133] Step S736: Sense the temperatures of multiple sensing points of the object to be processed 170, and determine the temperature T corresponding to the second radiation unit of the longitudinal radiation group. a2,b2 Is it greater than the temperature T corresponding to the first radiation unit? a1,b1 And the temperature difference is greater than or equal to the second temperature threshold W2. If so, execute step S738; if not, execute step S740.

[0134] Step S738: adjust the direction of the electromagnetic wave radiated by the second radiation unit of the longitudinal radiation group to shift toward the corresponding area of ​​the first radiation unit of the radiation group to reduce the temperature difference between the corresponding sensing points of the second radiation unit and the first radiation unit of the longitudinal radiation group.

[0135] Step S740: adjusting the direction of the electromagnetic wave radiated by the second radiation unit of the longitudinal radiation group so that the electromagnetic wave radiates toward its corresponding area to ensure the temperature uniformity of the object 170 to be processed.

[0136] In some embodiments, for Figure 4 In the longitudinal radiation group of the embodiment, if there is no object 170 to be processed in the corresponding area of ​​one or more radiation units, the phase shifter 160 and / or the switching device 150 can be controlled by referring to the control method such as step S602 to step S612 to improve the heating efficiency and ensure the temperature uniformity of the object 170 to be processed.

[0137] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived based on the content disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all these other variations or modifications.

Claims

1. A heating device, characterized in that: include: A cylinder body defines a heating chamber for placing the object to be processed; and An electromagnetic wave generating system, comprising a plurality of radiation units for radiating electromagnetic waves to heat the object to be processed in the heating chamber; And the electromagnetic wave generating system also includes: A phase shifter is configured to adjust the direction of the electromagnetic waves radiated by the multiple radiation units; wherein, The phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the radiating unit to shift toward the direction close to the object to be processed when there is no object to be processed in the corresponding area where the radiating unit exists; The plurality of radiation units include a first radiation unit, a second radiation unit and a third radiation unit which are arranged in sequence; The phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the first radiation unit to shift toward the corresponding area of ​​the second radiation unit, and adjust the direction of the electromagnetic wave radiated by the second radiation unit to shift toward the corresponding area of ​​the third radiation unit when there is no object to be processed in the corresponding area of ​​the first radiation unit and the temperature difference between the temperature corresponding to the second radiation unit and the temperature corresponding to the third radiation unit is greater than or equal to the first temperature threshold and less than the third temperature threshold; and The phase shifter is configured to adjust the electromagnetic waves radiated by the first radiation unit and the second radiation unit to radiate to their corresponding areas respectively when there is no object to be processed in the corresponding area of ​​the first radiation unit and the temperature difference between the temperature corresponding to the second radiation unit and the temperature corresponding to the third radiation unit is greater than or equal to a third temperature threshold.

2. The heating device according to claim 1, characterized in that Also includes: A temperature sensing device configured to sense the temperature of a plurality of sensing points of the object to be processed corresponding to the plurality of radiation units; and The phase shifter is configured to adjust directions of electromagnetic waves radiated by corresponding radiation units according to the temperatures of the plurality of sensing points.

3. The heating device according to claim 2, characterized in that: The phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the radiating unit to shift toward the corresponding area of ​​the adjacent radiating unit with the largest temperature difference when the temperature corresponding to the radiating unit is greater than the temperature corresponding to the adjacent radiating unit and the temperature difference is greater than or equal to the first temperature threshold.

4. The heating device according to claim 3, characterized in that: The plurality of radiation units include a first radiation unit, a second radiation unit and a third radiation unit arranged in sequence; wherein The phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the second radiation unit to shift toward the corresponding area of ​​the third radiation unit when the temperature corresponding to the second radiation unit is greater than the temperature corresponding to the first radiation unit and further greater than the temperature corresponding to the third radiation unit and the maximum temperature difference is greater than or equal to the first temperature threshold; When the temperature difference between the temperatures corresponding to the second radiation unit and the third radiation unit is less than a second temperature threshold, the phase shifter is configured to adjust the direction of the electromagnetic wave radiated by the second radiation unit to shift toward the corresponding area of ​​the first radiation unit when the temperature corresponding to the second radiation unit is greater than the temperature corresponding to the first radiation unit and the temperature difference is greater than or equal to the second temperature threshold; When the temperature corresponding to the second radiation unit is less than or equal to the temperature corresponding to the first radiation unit or the temperature difference thereof is less than the second temperature threshold, the direction of the electromagnetic wave radiated by the second radiation unit is adjusted to radiate toward its corresponding area; wherein The second temperature threshold is lower than the first temperature threshold.

5. The heating device according to claim 2, characterized in that: The temperature sensing device includes a plurality of temperature sensors and is disposed on the top of the heating chamber; and The plurality of radiation units are disposed at the bottom of the heating chamber.

6. The heating device according to claim 1, characterized in that: The phase shifter is configured to adjust the direction of the electromagnetic waves radiated by the first radiation unit to shift toward the corresponding area of ​​the second radiation unit when there is no object to be processed in the corresponding area of ​​the first radiation unit and the temperature difference between the temperature corresponding to the second radiation unit and the temperature corresponding to the third radiation unit is less than a first temperature threshold.

7. The heating device according to claim 1, characterized in that: A plurality of radiation units are linearly arranged in the heating chamber.

8. The heating device according to claim 1, characterized in that The heating chamber is divided into a plurality of imaginary spaces with equal volumes, and each of the imaginary spaces is provided with a radiation unit.

Images