A gas-liquid extraction and separation device

Abstract

The present invention provides a gas-liquid extraction and separation device and a photolithography machine, which relate to the field of semiconductor processing equipment and are designed to solve the problem that the existing gas-liquid extraction and separation device cannot meet the gas-liquid extraction and separation requirements under different working conditions of the photolithography machine. The gas-liquid extraction and separation device is used in the photolithography machine, including a control module and multiple groups of gas-liquid extraction and separation modules, and the multiple groups of gas-liquid extraction and separation modules are respectively configured to extract and separate different gas-liquid mixtures; the gas-liquid extraction and separation module includes a vacuum adsorption head, an on-off valve and a gas-liquid separation box connected in sequence by pipelines, and the vacuum adsorption head is configured to extract the gas-liquid mixture; the control module is configured to control the operation of the gas-liquid extraction and separation module; the gas-liquid separation box is configured to perform gas-liquid separation on the gas-liquid mixture. The photolithography machine includes the above-mentioned gas-liquid extraction and separation device. The gas-liquid extraction and separation device and the photolithography machine provided by the present invention meet the gas-liquid separation requirements under different working conditions.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing equipment, and in particular to a gas-liquid extraction and separation device and a photolithography machine. Background Art

[0002] The development of the semiconductor industry has placed increasing demands on the machining precision of photolithography machines. In the new generation of immersion photolithography machines with dual worktables, a gas-liquid extraction and separation device is typically installed to extract and separate the immersion liquid and bubbles remaining on the worktable.

[0003] However, different gas-liquid mixtures need to be extracted and separated separately during different working periods and different processes of the lithography machine. Moreover, the extraction and separation of these different gas-liquid mixtures need to be switched and stopped at any time according to the working progress of the lithography machine. This results in the existing gas-liquid extraction and separation device being unable to meet the gas-liquid extraction and separation requirements of the above-mentioned new generation of immersion lithography machines. Summary of the Invention

[0004] The first object of the present invention is to provide a gas-liquid extraction and separation device to solve the technical problem that the existing gas-liquid extraction and separation device cannot meet the gas-liquid extraction and separation requirements under different working conditions of the lithography machine.

[0005] The gas-liquid extraction and separation device provided by the present invention is used for a photolithography machine, and the gas-liquid extraction and separation device includes a control module and multiple groups of gas-liquid extraction and separation modules, and the multiple groups of gas-liquid extraction and separation modules are respectively configured to extract and separate different gas-liquid mixtures; wherein, the gas-liquid extraction and separation modules include a vacuum adsorption head, an on-off valve and a gas-liquid separation box connected in sequence through pipelines, and the vacuum adsorption head is configured to extract the gas-liquid mixture; the control module is configured to control the operation of each group of the gas-liquid extraction and separation modules; the gas-liquid separation box is configured to perform gas-liquid separation on the gas-liquid mixture.

[0006] Furthermore, the gas-liquid extraction and separation module further includes a throttle valve, which is configured to control the flow rate flowing through the pipeline.

[0007] Furthermore, the gas-liquid extraction and separation module further includes a pressure sensor, which is configured to detect pipeline pressure.

[0008] Furthermore, the gas-liquid extraction and separation module further includes a pilot valve, which is connected to the control module. In each group of the gas-liquid extraction and separation modules, the pilot valve is configured to control the corresponding on-off valve.

[0009] Furthermore, each group of the gas-liquid extraction and separation modules shares the gas-liquid separation box.

[0010] Furthermore, the gas-liquid separation box includes a box body having a accommodating cavity and a partition arranged in the accommodating cavity, the partition divides the accommodating cavity into a first chamber and a second chamber that are connected to each other, wherein the pipeline outlet of each group of the gas-liquid extraction and separation modules is directly connected to the first chamber, and the partition is located on the flow path of the gas-liquid mixture flowing out of the pipeline outlet; the second chamber is connected to an air outlet and a liquid outlet, and the air outlet is located above the liquid outlet.

[0011] Furthermore, the liquid outlet is connected to a recovery pipe, the recovery pipe is provided with an opening and closing valve, and the opening and closing valve is electrically connected to the control module; the gas-liquid extraction and separation device also includes a liquid level switch, which is configured to detect the liquid level in the box body, and the liquid level switch is electrically connected to the control module.

[0012] Furthermore, there are multiple air outlets, and the multiple air outlets have different air outlet flow rates.

[0013] Furthermore, the gas-liquid extraction and separation device further includes a shell, and the control module and the plurality of groups of gas-liquid extraction and separation modules are all arranged inside the shell.

[0014] Furthermore, the gas-liquid extraction and separation module is provided with two groups, namely a first gas-liquid extraction and separation module and a second gas-liquid extraction and separation module, wherein the first gas-liquid extraction and separation module is configured to extract and separate the residual immersion liquid and bubbles from the suction cup of the photolithography machine, and the second gas-liquid extraction and separation module is configured to extract and separate the residual immersion liquid and bubbles from the bridge platform of the photolithography machine.

[0015] The beneficial effects brought about by the gas-liquid extraction and separation device of the present invention are:

[0016] For example, a gas-liquid extraction and separation device comprising two gas-liquid extraction and separation modules (a first gas-liquid extraction and separation module and a second gas-liquid extraction and separation module) is used to extract residual immersion liquid and bubbles from the lithography machine's chuck, while the second gas-liquid extraction and separation module is used to extract residual immersion liquid and bubbles from the bridging stage of the lithography machine. The control module independently controls the first and second gas-liquid extraction and separation modules.

[0017] Specifically, the control module can control different on-off valves according to different working periods and different processes of the lithography machine, so that the corresponding pipeline is in an on or off state. For example, when extracting and separating the residual immersion liquid and bubbles from the suction cup, the on-off valve of the first gas-liquid extraction and separation module is in the on state, so that the corresponding vacuum adsorption head adsorbs the residual immersion liquid and bubbles from the suction cup into the pipeline and enters the gas-liquid separation box for gas-liquid separation. Similarly, when extracting and separating the residual immersion liquid and bubbles from the bridge platform, the on-off valve of the second gas-liquid extraction and separation module is in the on state, so that the corresponding vacuum adsorption head adsorbs the residual immersion liquid and bubbles from the bridge platform into the pipeline and enters the gas-liquid separation box for gas-liquid separation. When extraction and separation of the gas-liquid mixture is not required, the corresponding on-off valve is in the off state.

[0018] The gas-liquid extraction and separation device is equipped with a control module and multiple groups of gas-liquid extraction and separation modules, so that different gas-liquid extraction and separation pipelines can be controlled electrically, thereby realizing real-time extraction and separation of different gas-liquid mixtures. The extraction and separation are sufficient to meet the gas-liquid separation requirements under different working conditions of the lithography machine. The gas-liquid separation process can be switched and stopped at any time according to the working progress of the lithography machine.

[0019] The second object of the present invention is to provide a photolithography machine to solve the technical problem that the existing gas-liquid extraction and separation device cannot meet the gas-liquid extraction and separation requirements under different working conditions of the photolithography machine.

[0020] The photolithography machine provided by the present invention comprises a workpiece table and the above-mentioned gas-liquid extraction and separation device, and the gas-liquid extraction and separation device is installed on the workpiece table through a shell.

[0021] The beneficial effects brought about by the photolithography machine of the present invention are:

[0022] By setting the above-mentioned gas-liquid extraction and separation device in the lithography machine, the lithography machine accordingly has all the advantages of the above-mentioned gas-liquid extraction and separation device, which will not be described one by one here. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0024] Figure 1 A schematic structural diagram of a gas-liquid extraction and separation device provided in an embodiment of the present invention;

[0025] Figure 2A top view of the structure of a gas-liquid extraction and separation device provided in an embodiment of the present invention;

[0026] Figure 3 A front view of the structure of the gas-liquid extraction and separation device provided in an embodiment of the present invention;

[0027] Figure 4 Schematic diagram of the structure of the gas-liquid separation box of the gas-liquid extraction and separation device provided in an embodiment of the present invention Figure 1 ;

[0028] Figure 5 Schematic diagram of the structure of the gas-liquid separation box of the gas-liquid extraction and separation device provided in an embodiment of the present invention Figure 2 .

[0029] Description of reference numerals:

[0030] 100-control module; 400-gas-liquid separation box; 500-first pilot valve; 600-housing; 700-second pilot valve;

[0031] 210 - first vacuum adsorption head; 220 - first on-off valve; 230 - first throttle valve; 240 - first pressure sensor;

[0032] 310 - second vacuum adsorption head; 320 - second on-off valve; 330 - second throttle valve; 340 - second pressure sensor;

[0033] 410 - box body; 420 - partition; 430 - first chamber; 440 - second chamber;

[0034] 431-first inlet; 432-second inlet; 433-installation port;

[0035] 441-first air outlet; 442-second air outlet; 443-liquid outlet;

[0036] 610-Pilot air port. DETAILED DESCRIPTION

[0037] In order to make the above-mentioned objects, features and advantages of the present invention more clearly understood, the following detailed description of the specific embodiments of the present invention is given in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0038] Figure 1 This is a schematic diagram of the structure of the gas-liquid extraction and separation device provided in this embodiment. Figure 2 This is a top view of the structure of the gas-liquid extraction and separation device provided in this embodiment. Figure 3 This is a structural front view of the gas-liquid extraction and separation device provided in this embodiment. Figures 1 to 3As shown, this embodiment provides a gas-liquid extraction and separation device for use in a photolithography machine. Specifically, the gas-liquid extraction and separation device includes a control module 100 and two groups of gas-liquid extraction and separation modules, namely a first gas-liquid extraction and separation module and a second gas-liquid extraction and separation module. The first gas-liquid extraction and separation module includes a first vacuum adsorption head 210, a first on-off valve 220, and a gas-liquid separation box 400, which are sequentially connected via pipelines. The second gas-liquid extraction and separation module includes a second vacuum adsorption head 310, a second on-off valve 320, and a gas-liquid separation box 400, which are sequentially connected via pipelines. In other words, the first gas-liquid extraction and separation module and the second gas-liquid extraction and separation module share the gas-liquid separation box 400.

[0039] Among them, the first vacuum adsorption head 210 is configured to extract the residual immersion liquid and bubbles from the suction cup of the photolithography machine, and the second vacuum adsorption head 310 is configured to extract the residual immersion liquid and bubbles from the bridge platform of the photolithography machine; the control module 100 is configured to control the operation of the first gas-liquid extraction and separation module and the second gas-liquid extraction and separation module; the gas-liquid separation box 400 is configured to perform gas-liquid separation on the gas-liquid mixture.

[0040] When extracting and separating residual immersion liquid and bubbles from the suction cup, the first on-off valve 220 is in an on state, allowing the first vacuum adsorption head 210 to adsorb the residual immersion liquid and bubbles from the suction cup into the pipeline, which then enters the gas-liquid separation box 400 for gas-liquid separation. Similarly, when extracting and separating residual immersion liquid and bubbles from the bridge platform, the second on-off valve 320 is in an on state, allowing the second vacuum adsorption head 310 to adsorb the residual immersion liquid and bubbles from the bridge platform into the pipeline, which then enters the gas-liquid separation box 400 for gas-liquid separation. When extraction and separation of the gas-liquid mixture from the suction cup or the bridge platform is not required, the first on-off valve 220 or the second on-off valve 320 is in a closed state.

[0041] The gas-liquid extraction and separation device is equipped with a control module 100 and two groups of gas-liquid extraction and separation modules, so that different gas-liquid extraction and separation pipelines can be controlled electrically, thereby realizing real-time extraction and separation of different gas-liquid mixtures. The extraction and separation are sufficient to meet the gas-liquid separation requirements under different working conditions of the lithography machine. The gas-liquid separation process can be switched and stopped at any time according to the working progress of the lithography machine.

[0042] In addition, the two groups of gas-liquid extraction and separation modules share the same gas-liquid separation box 400, which reduces the space occupied by the gas-liquid extraction and separation device and makes the structure of the gas-liquid extraction and separation device of this embodiment more compact.

[0043] It should be noted that this embodiment is merely described by taking as an example a gas-liquid extraction and separation device including two groups of gas-liquid extraction and separation modules, which are respectively used to extract and separate the residual immersion liquid and bubbles at the suction cup and the bridge platform. It can be understood that this embodiment can also make other settings for the number of gas-liquid extraction and separation devices according to the actual working conditions of the lithography machine. This embodiment is merely described by taking as an example a gas-liquid extraction and separation device including a first gas-liquid extraction and separation module and a second gas-liquid extraction and separation module, and cannot be regarded as a limitation of the present invention.

[0044] Specifically, in this embodiment, the control module 100 includes an electrical control box and a circuit board disposed in the electrical control box. In the text, “electrically connected to the control module 100 ” refers to “electrically connected to the circuit board of the control module 100 ”.

[0045] Please continue to refer to Figure 1 and Figure 2 In this embodiment, the first gas-liquid extraction and separation module may further include a first throttle valve 230, which is configured to control the flow rate flowing through the first gas-liquid extraction and separation pipeline; the second gas-liquid extraction and separation module may further include a second throttle valve 330, which is configured to control the flow rate flowing through the second gas-liquid extraction and separation pipeline.

[0046] By setting a first throttle valve 230 in the first gas-liquid extraction and separation module and a second throttle valve 330 in the second gas-liquid extraction and separation module, the control of the fluid flow in the first gas-liquid extraction and separation pipeline and the second gas-liquid extraction and separation pipeline is achieved, so that the gas-liquid extraction and separation device of this embodiment can control the extraction speed of the gas-liquid mixture at each location according to the actual working conditions. On the one hand, it ensures that the gas-liquid mixture at the corresponding position can be extracted in time, reducing the accumulation of the gas-liquid mixture at the suction cup and the bridge platform. On the other hand, it can also avoid the situation where the pipeline pressure is too high due to excessive fluid flow, thereby ensuring the safety of the gas-liquid extraction and separation device of this embodiment during operation and extending the service life of the pipeline.

[0047] Specifically, in this embodiment, the first throttle valve 230 and the second throttle valve 330 are manual throttle valves, that is, during actual use, the user can manually adjust the opening of the first throttle valve 230 and the second throttle valve 330 to achieve control of the fluid flow in the first gas-liquid extraction and separation pipeline and the second gas-liquid extraction and separation pipeline.

[0048] In other embodiments, the first throttle valve 230 and the second throttle valve 330 may be electrically connected to the control module 100, and the control module 100 may be used to adjust the opening of the first throttle valve 230 and the second throttle valve 330. This configuration can improve the degree of automation of the gas-liquid extraction and separation device of this embodiment.

[0049] Please continue to refer to Figure 1 and Figure 2 In this embodiment, the first gas-liquid extraction and separation module may further include a first pressure sensor 240. Specifically, the first pressure sensor 240 is configured to detect the pressure of the first gas-liquid extraction and separation pipeline; similarly, the second gas-liquid extraction and separation module may further include a second pressure sensor 340. Specifically, the second pressure sensor 340 is configured to detect the pressure of the second gas-liquid extraction and separation pipeline.

[0050] During the operation of the gas-liquid extraction and separation device, the first pressure sensor 240 can detect the pressure of the first gas-liquid extraction and separation pipeline in real time, and the second pressure sensor 340 can detect the pressure of the second gas-liquid extraction and separation pipeline in real time. The user can adjust the opening of the first throttle valve 230 according to the pressure displayed by the first pressure sensor 240, and adjust the opening of the second throttle valve 330 according to the pressure displayed by the second pressure sensor 340.

[0051] In other embodiments, the first pressure sensor 240 and the second pressure sensor 340 can also be set to be electrically connected to the control module 100, so that during the operation of the gas-liquid extraction and separation device, the first pressure sensor 240 and the second pressure sensor 340 can output the detected pressure signal to the control module 100 in real time, and use the control module 100 to feedback adjust the opening of the first throttle valve 230 and the second throttle valve 330.

[0052] By setting a first pressure sensor 240 in the first gas-liquid extraction and separation module and a second pressure sensor 340 in the second gas-liquid extraction and separation module, real-time monitoring of the fluid pressure in the first gas-liquid extraction and separation pipeline and the second gas-liquid extraction and separation pipeline is achieved, and the openings of the first throttle valve 230 and the second throttle valve 330 can be feedback-adjusted according to the detected pressure, thereby avoiding pipeline rupture caused by excessive pipeline fluid pressure, and providing safety and life protection for the gas-liquid extraction and separation device of this embodiment.

[0053] Please continue to refer to Figures 1 to 3 In this embodiment, the gas-liquid extraction and separation device may further include a housing 600. Specifically, the control module 100, the first gas-liquid extraction and separation module, and the second gas-liquid extraction and separation module are all disposed within the housing 600. This configuration achieves modularization and integration of the gas-liquid extraction and separation device of this embodiment, facilitating its installation in a lithography machine.

[0054] Please continue to refer to Figure 1 and Figure 2In this embodiment, the first gas-liquid extraction and separation module may further include a first pilot valve 500. Specifically, the first pilot valve 500 is connected to the control module 100 and is configured to control the first on-off valve 220 to automatically control the on-off state of the pipeline in the first gas-liquid extraction and separation module. A second pilot valve 700 is connected to the control module 100 and is configured to control the second on-off valve 320 to automatically control the on-off state of the pipeline in the second gas-liquid extraction and separation module. The pilot air ports 610 of the first and second pilot valves 500 and 700 are disposed in the housing 600. The first pilot valve 500 pneumatically controls the first on-off valve 220, while the second pilot valve 700 pneumatically controls the second on-off valve 320.

[0055] The arrangement of the first pilot valve 500 and the second pilot valve 700 enables the control module 100 to conveniently control the first on-off valve 220 and the second on-off valve 320 , with high control efficiency.

[0056] Figure 4 The structure of the gas-liquid separation box 400 of the gas-liquid extraction and separation device provided in this embodiment is shown in FIG. Figure 1 , Figure 5 The structure of the gas-liquid separation box 400 of the gas-liquid extraction and separation device provided in this embodiment is shown in FIG. Figure 2 Please continue to refer to Figures 1 to 3 , and combined with Figure 4 and Figure 5 In this embodiment, the gas-liquid separation box 400 may include a box body 410 having a accommodating chamber and a partition 420 arranged in the accommodating chamber, wherein the partition 420 divides the accommodating chamber into a first chamber 430 and a second chamber 440 that are connected to each other. Specifically, the pipeline outlets of the first gas-liquid extraction and separation module and the second gas-liquid extraction and separation module are both directly connected to the first chamber 430, and the partition 420 is located on the flow path of the gas-liquid mixture flowing out of the above-mentioned pipeline outlet; the second chamber 440 is connected to an air outlet and a liquid outlet 443, and the air outlet is located above the liquid outlet 443.

[0057] During operation of the gas-liquid extraction and separation device, under the blocking effect of the partition 420, the gas-liquid mixture entering the first chamber 430 through the pipeline outlet will first collide with the partition 420, causing the movement path of the above-mentioned gas-liquid mixture to change. In this process, the separation of the gas and liquid phases is achieved, wherein the gas will be able to be discharged from the gas outlet, and the liquid will be able to bypass the partition 420 and be discharged from the liquid outlet 443.

[0058] By disposing a partition 420 within the housing 410 of the gas-liquid separation box 400, a separation is achieved between the inlet for the gas-liquid mixture and the outlet for the separated gas-liquid two-phase gas. This effectively prevents the gas-liquid mixture entering the first chamber 430 from directly entering the second chamber 440 and being further discharged through the gas outlet directly connected to the second chamber 440. This effectively prevents the gas-liquid mixture from entering the gas channel connected to the gas outlet, improving the gas-liquid separation efficiency and thus ensuring the reliability of the gas-liquid separation, thereby ensuring the operational stability of the gas-liquid extraction and separation device of this embodiment. Furthermore, by arranging the gas outlet above the liquid outlet 443, the principle that the density of gas is less than that of liquid is effectively utilized to achieve reliable separation of the gas-liquid two-phase gas.

[0059] Please continue to refer to Figure 5 In this embodiment, both sides of the partition 420 are respectively a certain distance away from the two side walls of the box body 410, so that the gas-liquid mixture in the first chamber 430 can flow into the second chamber 440 through both sides of the partition 420.

[0060] Please continue to refer to Figure 5 In this embodiment, the box body 410 is provided with a first inlet 431 and a second inlet 432, wherein the first inlet 431 is used to connect to the pipeline outlet of the first gas-liquid extraction and separation module, and the second inlet 432 is used to connect to the pipeline outlet of the second gas-liquid extraction and separation module.

[0061] Specifically, in this embodiment, the liquid outlet 443 of the box body 410 can be connected to a recovery pipe, wherein the recovery pipe is provided with an opening and closing valve, and the opening and closing valve is electrically connected to the control module 100; the gas-liquid extraction and separation device can also include a liquid level switch, which is configured to detect the liquid level in the box body 410, and the liquid level switch is electrically connected to the control module 100.

[0062] During the operation of the gas-liquid extraction and separation device, the liquid level switch can detect the liquid level in the tank 410 in real time and output the detected liquid level signal to the control module 100; when the control module 100 determines that the liquid level in the tank 410 reaches the set value (the liquid in the tank 410 reaches the set capacity), it will control the opening and closing valve to be in the open state, so that the liquid in the tank 410 can flow to the recovery pipeline through the liquid outlet 443, and then be recycled.

[0063] The gas-liquid extraction and separation device realizes real-time detection of the liquid level in the box 410 by setting a liquid level switch. On the one hand, it avoids the situation where the liquid overflows due to the high liquid level. On the other hand, the liquid level switch can also be used to realize feedback adjustment of the opening and closing valve set in the recovery channel to realize timely recovery and recycling of the liquid.

[0064] Specifically, in this embodiment, a mounting opening 433 is provided on the side wall of the box body 410 , and the liquid level switch is mounted on the mounting opening 433 .

[0065] Please continue to refer to Figure 1 、 Figure 3 、 Figure 4 and Figure 5 In this embodiment, there are two air outlets, namely a first air outlet 441 and a second air outlet 442, wherein the first air outlet 441 is used to discharge the gas in the first gas-liquid extraction and separation module, and the second air outlet 442 is used to discharge the gas in the second gas-liquid extraction and separation module; the first air outlet 441 and the second air outlet 442 have different air outlet flow rates, specifically, the air outlet flow rate of the first air outlet 441 can be greater than the air outlet flow rate of the second air outlet 442.

[0066] This embodiment further provides a photolithography machine, comprising a workpiece stage and the above-mentioned gas-liquid extraction and separation device, wherein the gas-liquid extraction and separation device is installed on the workpiece stage through a housing 600 .

[0067] By setting the above-mentioned gas-liquid extraction and separation device in the lithography machine, the lithography machine accordingly has all the advantages of the above-mentioned gas-liquid extraction and separation device, which will not be described one by one here.

[0068] During operation of the lithography machine, when it is necessary to extract and separate the residual immersion liquid and bubbles at the suction cup, the first on-off valve 220 can be kept in the on state, and the first gas-liquid extraction and separation module extracts the gas-liquid mixture at the suction cup. The gas-liquid mixture enters the pipeline through the first vacuum adsorption head 210, and enters the gas-liquid separation box 400 after the flow is adjusted by the first throttle valve 230. This part of the gas-liquid mixture will first enter the first chamber 430 of the box 410, and after being blocked by the partition 420, it will flow from both sides of the partition 420 to the second chamber 440, wherein, under the action of gravity, the separation of the gas and liquid phases is realized, the gas will be discharged through the first gas outlet 441, and the liquid will be temporarily stored in the box 410. When the liquid level in the box 410 reaches the set height, it will be discharged through the liquid outlet 443 for recycling.

[0069] Among them, a vacuum pumping device is connected to the first gas outlet 441. When it is necessary to extract and separate the residual immersion liquid and bubbles at the suction cup, the vacuum pumping device connected to the first gas outlet 441 works to provide a vacuum air source for the first gas-liquid extraction and separation module, so that the residual immersion liquid and bubbles at the suction cup can enter the pipeline of the first gas-liquid extraction and separation module through the first vacuum adsorption head 210 under the action of the vacuum negative pressure of the above-mentioned vacuum pumping device, and enter the gas-liquid separation box 400 after passing through the first throttle valve 230, and the separated gas is directly discharged through the first gas outlet 441.

[0070] When it is necessary to extract and separate the residual immersion liquid and bubbles at the bridging platform, the second on-off valve 320 can be kept in the on state, and the second gas-liquid extraction and separation module extracts the gas-liquid mixture at the bridging platform. The gas-liquid mixture enters the pipeline through the second vacuum adsorption head 310, and enters the gas-liquid separation box 400 after the flow is adjusted by the second throttle valve 330. This part of the gas-liquid mixture will also first enter the first chamber 430 of the box body 410, and after being blocked by the partition 420, it will flow from both sides of the partition 420 to the second chamber 440. Under the action of gravity, the separation of the gas and liquid phases is realized, and the gas will be discharged through the second gas outlet 442, and the liquid will be temporarily stored in the box body 410. When the liquid level in the box body 410 reaches the set height, it will be discharged through the liquid outlet 443 for recycling.

[0071] Among them, the second gas outlet 442 is connected to a vacuum pumping device. When it is necessary to extract and separate the residual immersion liquid and bubbles at the suction cup, the vacuum pumping device connected to the second gas outlet 442 works to provide a vacuum air source for the second gas-liquid extraction and separation module, so that the residual immersion liquid and bubbles at the bridge platform can enter the pipeline of the second gas-liquid extraction and separation module through the second vacuum adsorption head 310 under the action of the vacuum negative pressure of the above-mentioned vacuum pumping device, and enter the gas-liquid separation box 400 after passing through the second throttle valve 330, and the separated gas is directly discharged through the second gas outlet 442.

[0072] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be based on the scope defined by the claims.

[0073] Finally, it should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprises" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, article, or device that includes the element.

[0074] In the above embodiments, the descriptions of directions such as “upper”, “lower”, and “side” are all based on the drawings.

[0075] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A gas-liquid extraction and separation device, characterized in that: For a photolithography machine, the gas-liquid extraction and separation device comprises a control module (100) and a gas-liquid extraction and separation module, wherein a plurality of groups of the gas-liquid extraction and separation modules are respectively configured to extract and separate different gas-liquid mixtures; wherein the gas-liquid extraction and separation modules comprise a vacuum adsorption head, an on-off valve, and a gas-liquid separation box (400) connected in sequence through a pipeline, wherein the vacuum adsorption head is configured to extract the gas-liquid mixture; the control module (100) is configured to control the operation of each group of the gas-liquid extraction and separation modules; the gas-liquid separation box ( 400) is configured to perform gas-liquid separation on the gas-liquid mixture, and each group of the gas-liquid extraction and separation modules shares the gas-liquid separation box (400); the gas-liquid extraction and separation modules are provided with two groups, namely a first gas-liquid extraction and separation module and a second gas-liquid extraction and separation module, wherein the first gas-liquid extraction and separation module is configured to extract and separate the residual immersion liquid and bubbles from the suction cup of the photolithography machine, and the second gas-liquid extraction and separation module is configured to extract and separate the residual immersion liquid and bubbles from the bridge platform of the photolithography machine; The gas-liquid separation box (400) comprises a box body (410) having a housing chamber and a partition (420) arranged in the housing chamber, wherein the partition (420) divides the housing chamber into a first chamber (430) and a second chamber (440) that are connected to each other, wherein the pipeline outlet of each group of the gas-liquid extraction and separation modules is directly connected to the first chamber (430), and the partition (420) is located on the flow path of the gas-liquid mixture flowing out of the pipeline outlet; the second chamber (440) is connected to an air outlet and a liquid outlet (443), and the air outlet is located above the liquid outlet (443); The two side edges of the partition (420) are respectively spaced from the two side walls of the box (410), so as to enable the gas-liquid mixture in the first chamber (430) to flow into the second chamber (440) through the two sides of the partition (420); the partition (420) is configured to be impacted by the gas-liquid mixture entering the first chamber (430) so as to change the movement path of the gas-liquid mixture and realize the separation of the gas-liquid two phases.

2. The gas-liquid extraction and separation device according to claim 1, characterized in that: The gas-liquid extraction and separation module further includes a throttle valve configured to control a flow rate flowing through the pipeline.

3. The gas-liquid extraction and separation device according to claim 2, characterized in that: The gas-liquid extraction and separation module further includes a pressure sensor, which is configured to detect pipeline pressure.

4. The gas-liquid extraction and separation device according to claim 1, characterized in that: The gas-liquid extraction and separation module further comprises a pilot valve, which is connected to the control module (100). In each group of the gas-liquid extraction and separation modules, the pilot valve is configured to control the corresponding on-off valve.

5. The gas-liquid extraction and separation device according to claim 1, characterized in that: The liquid outlet (443) is connected to a recovery pipe, the recovery pipe is provided with an on-off valve, and the on-off valve is electrically connected to the control module (100); the gas-liquid extraction and separation device also includes a liquid level switch, the liquid level switch is configured to detect the liquid level in the box (410), and the liquid level switch is electrically connected to the control module (100).

6. The gas-liquid extraction and separation device according to claim 1, characterized in that: There are multiple air outlets, and the multiple air outlets have different air outlet flow rates.

7. The gas-liquid extraction and separation device according to any one of claims 1 to 4, characterized in that: The gas-liquid extraction and separation device further comprises a housing (600), and the control module (100) and a plurality of groups of the gas-liquid extraction and separation modules are all arranged inside the housing (600).

8. A photolithography machine, characterized in that: It comprises a workpiece table and the gas-liquid extraction and separation device according to any one of claims 1 to 7, wherein the gas-liquid extraction and separation device is mounted on the workpiece table through a housing (600).

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