Vacuum pump and rotary drive structure

By designing a rotary driving structure including twenty-four magnetic columns and electromagnetic coils in the vacuum pump, the problem of uneven magnetic lines in the existing vacuum pump is solved, and the smooth rotation of the rotor and the stable extraction of gas are achieved.

CN113452228BActive Publication Date: 2025-06-27SEMICHAMP (NINGBO) SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202010232100.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-03-27
Publication Date
2025-06-27
Estimated Expiration
2040-03-27

AI Technical Summary

Technical Problem

In existing vacuum pumps, the magnetic force lines formed by the twelve magnetic columns are relatively uneven, resulting in the magnetic rotation shaft being unable to rotate smoothly, affecting the rotation stability of the rotor.

Method used

A rotary driving structure is designed, including a groove body, twenty-four magnetic columns, two magnetic rotary columns and a plurality of electromagnetic coils. Through this structure, a high density and uniform distribution magnetic force line is generated to drive the rotor to rotate.

Benefits of technology

The smooth rotation of the magnetic rotating column is achieved, driving the rotor to rotate stably, and ensuring the effective extraction of gas.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a rotational drive structure, which is applied to a vacuum pump. The vacuum pump includes two rotors. The rotational drive structure includes a groove body, a plurality of magnetic columns, two magnetic rotating columns and a plurality of electromagnetic coils. The two magnetic rotating columns are located in the groove body and are respectively pivotally connected to the two rotors. Each magnetic column includes a first connection end, a second connection end, a first side and a second side. Each magnetic column is dispersedly arranged and connected to the groove body at the first connection end, and the second connection end surrounds the two magnetic rotating columns. Each electromagnetic coil is dispersedly arranged on each first side and each second side and is close to the groove body.
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Description

Technical Field

[0001] The present invention relates to a vacuum pump and a rotary drive structure, and more particularly to a vacuum pump and a rotary drive structure that drive the rotation of the rotor of the pump by uniform magnetic lines of force. Background Art

[0002] A vacuum pump is a pump that discharges gas from a container to create a negative pressure inside the container. A general vacuum pump has twelve magnetic columns, a pair of magnetic rotating shafts, and a pair of rotors. The twelve magnetic columns surround the pair of magnetic rotating shafts and drive the magnetic rotating shafts to rotate synchronously in opposite directions by magnetic force. When the pair of magnetic rotating shafts rotate synchronously in opposite directions, they drive the rotors to rotate synchronously in opposite directions to discharge the gas.

[0003] However, the magnetic lines of force formed by the twelve magnetic columns are relatively uneven and sparse in density, so the magnetic rotating shafts sometimes cannot rotate smoothly. Therefore, it is necessary to provide a new vacuum pump to solve the above problems. Summary of the Invention

[0004] The main object of the present invention is to provide a rotary drive structure that drives the rotation of the rotor of the pump by uniform magnetic lines of force.

[0005] To achieve the above object, the rotary drive structure of the present invention is applied to a vacuum pump, and the vacuum pump includes two rotors. The rotary drive structure includes a tank body, a plurality of magnetic columns, two magnetic rotating columns, and a plurality of electromagnetic coils. The two magnetic rotating columns are located inside the tank body and are respectively pivotally connected to the two rotors. Each magnetic column includes a first connection end, a second connection end, a first side, and a second side. Each magnetic column is dispersedly arranged and connected to the tank body at the first connection end, and the second connection end surrounds the two magnetic rotating columns. Each electromagnetic coil is dispersedly arranged on each first side and each second side and is close to the tank body.

[0006] According to an embodiment of the present invention, both of the two magnetic rotating columns include a main body and a plurality of magnetic members, and each magnetic member is dispersedly arranged on the main body.

[0007] According to an embodiment of the present invention, each of the magnetic rotating columns further includes a rotating shaft, the rotating shaft is arranged inside the main body, and each magnetic member is dispersedly arranged around the rotating shaft at intervals of 90 degrees with the rotating shaft as the center.

[0008] According to an embodiment of the present invention, any two adjacent magnetic members have opposite magnetic poles.

[0009] According to an embodiment of the present invention, the tank body further includes a plurality of inner side wall surfaces, and each first connection end is connected to the plurality of inner side wall surfaces.

[0010] According to an embodiment of the present invention, at least one inner wall surface includes an extension post, and at least one of the plurality of magnetic posts is connected to the extension post.

[0011] According to an embodiment of the present invention, each electromagnetic coil system is dispersedly arranged on each first side and each second side and is close to each inner wall surface.

[0012] According to an embodiment of the present invention, the number of the plurality of magnetic posts is 24, and twelve of the magnetic posts are radially arranged around one of the two magnetic rotating posts, and the second connection ends of the twelve magnetic posts form a rotating area around one of the two magnetic rotating posts.

[0013] The main object of the present invention is to provide a vacuum pump that drives the rotation of the rotor of the pump by uniform magnetic lines of force.

[0014] To achieve the above object, the vacuum pump of the present invention includes two rotors and the rotation driving structure as described above.

[0015] By the structural design of the vacuum pump and the rotation driving structure of the present invention, magnetic lines of force with high density and uniform distribution can be generated, so that the two magnetic rotating posts can rotate more smoothly, driving the two rotors to rotate smoothly to stably extract gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic diagram of a vacuum pump according to an embodiment of the present invention.

[0017] Figure 2 is a schematic diagram of a rotation driving structure according to an embodiment of the present invention.

[0018] Figure 3 is a partial schematic diagram of a rotation driving structure according to an embodiment of the present invention.

[0019] REFERENCE NUMERALS

[0020] Rotation driving structure 1

[0021] Tank body 10

[0022] Inner wall surfaces 11, 11a

[0023] Extension post 111

[0024] Magnetic post 20

[0025] First connection end 22

[0026] Second connection end 23

[0027] First side 24

[0028] Second side 25

[0029] Rotating area 26

[0030] Magnetic rotating column 30

[0031] Main body 31

[0032] Magnets 32, 32a

[0033] Rotating shaft 33

[0034] Electromagnetic coil 40

[0035] Vacuum pump 200

[0036] Rotors 210

[0037] Rotating directions A, B Detailed implementation manners

[0038] To make the above objects, features and advantages of the present invention more obvious and understandable, the following detailed description of the specific implementation manners of the present invention will be given with reference to the accompanying drawings.

[0039] Please refer to the following together Figures 1 to 3 Regarding the rotation drive structure of an embodiment of the present invention. Figure 1 It is a schematic diagram of a vacuum pump according to an embodiment of the present invention; Figure 2 It is a schematic diagram of the rotation drive structure according to an embodiment of the present invention; Figure 3 It is a partial schematic diagram of the rotation drive structure according to an embodiment of the present invention.

[0040] As Figures 1 to 3 shown, in an embodiment of the present invention, the vacuum pump 200 is used to extract the gas in a container (not shown in the figure). The vacuum pump 200 includes two rotors 210 and a rotation drive structure 1. The rotation drive structure 1 can generate uniform magnetic lines of force to drive the two rotors 210 of the vacuum pump 200 to rotate smoothly. The rotation drive structure 1 includes a groove body 10, twenty-four magnetic columns 20, two magnetic rotating columns 30 and a plurality of electromagnetic coils 40.

[0041] In an embodiment of the present invention, the groove body 10 is a receiving groove made of metal and the twenty-four magnetic columns 20 are arranged in the groove body 10. The inner wall of the groove body 10 is divided into eight inner side wall surfaces 11, 11a, and the eight inner side wall surfaces 11, 11a are flat surfaces; the flat metal inner side wall surfaces 11, 11a can help the metal wires in the groove body 10 to be evenly distributed. Among the eight inner side wall surfaces 11, 11a, two of the inner side wall surfaces 11a respectively include an extension column 111, and the extension column 111 is used to arrange a part of the magnetic columns 20 so that the arrangement of the twenty-four magnetic columns 20 is in a radial shape. However, the number of the inner side wall surfaces 11, 11a is not limited to eight, and it can be changed according to the design requirements.

[0042] In an embodiment of the present invention, twenty-four magnetic columns 20 are disposed in the groove body 10. The magnetic columns 20 have magnetic force, and the magnetic force of the magnetic columns 20 can generate magnetic lines of force to rotate the magnetic rotating columns 30. Each of the magnetic columns 20 includes a first connection end 22, a second connection end 23, a first side 24, and a second side 25. The twenty-four magnetic columns 20 are dispersedly arranged and connected to the eight inner side walls 11, 11a by the first connection end 22, and four of the magnetic columns 20 are connected to two extension columns 111. The second connection end 23 surrounds the two magnetic rotating columns 30. Among the twenty-four magnetic columns 20, twelve of the magnetic columns 20 are radially arranged around one of the two magnetic rotating columns 30 to form one rotation area 26, and the other twelve magnetic columns 20 are radially arranged around the other of the two magnetic rotating columns 30 to form another rotation area 26; since the twenty-four magnetic columns 20 are densely arranged in the groove body 10 and surround the two rotation areas 26, magnetic lines of force with high density and uniform distribution can be generated.

[0043] In an embodiment of the present invention, two magnetic rotating columns 30 are respectively located in the two rotation areas 26. Each magnetic rotating column 30 includes a main body 31, four magnetic members 32, 32a, and a rotating shaft 33. The main body 31 has an annular structure. The four magnetic members 32, 32a are dispersedly arranged on the main body 31 and are arranged around the rotating shaft 33 at intervals of 90 degrees with the rotating shaft 33 as the center; among them, the magnetic member 32 is a magnet with an N pole, and the magnetic member 32a is a magnet with an S pole. The magnetic members 32 of the N-pole magnets and the magnetic members 32a of the S-pole magnets are arranged alternately, so that any two adjacent magnetic members 32, 32a have opposite magnetic poles. The rotating shaft 33 is disposed in the main body 31. The rotating shafts 33 of the two magnetic rotating columns 30 are respectively pivotally connected to the two rotors 210. The magnetic lines of force generated by the magnetic force of the twenty-four magnetic columns 20 will drive the magnetic members 32, 32a of the two magnetic rotating columns 30 to rotate, so that the two magnetic rotating columns 30 rotate along the rotation directions A and B respectively; the rotation direction A is counterclockwise rotation, and the rotation direction B is clockwise rotation. When the two magnetic rotating columns 30 rotate along the rotation directions A and B respectively, they will drive the two rotors 210 to rotate along the rotation directions A and B together.

[0044] In an embodiment of the present invention, the plurality of electromagnetic coils 40 are copper coils. The plurality of electromagnetic coils 40 are respectively connected to the twenty-four magnetic columns 20 in a surrounding manner, and are dispersedly arranged on each first side 24 and each second side 25 and closely adjacent to the inner wall surfaces 11, 11a of the groove body 10. The plurality of electromagnetic coils 40 can be energized to generate an electromagnetic effect, so as to further cooperate with the surrounding magnetic columns 20 to generate stronger magnetic force lines, or weaken the magnetic force lines. In this way, the magnetic rotating column 30 can be started or stopped from rotating, or the rotation speed of the magnetic rotating column 30 can be adjusted by the enhanced or weakened magnetic force lines, so as to further control whether the rotor 210 starts to rotate and the rotation speed.

[0045] In an embodiment of the present invention, when the user wants to use the vacuum pump 200 to extract the gas in a specific container, the user can energize the plurality of electromagnetic coils 40 to generate an electromagnetic effect. The electromagnetic effect of the electromagnetic coils 40 will cooperate with the surrounding magnetic columns 20 to generate stronger magnetic force lines. The strong magnetic force lines will drive the magnetic members 32, 32a of the two magnetic rotating columns 30 to rotate, so that the two magnetic rotating columns 30 rotate along the rotation directions A and B respectively. When the two magnetic rotating columns 30 rotate along the rotation directions A and B respectively, they will drive the two rotors 210 to rotate along the rotation directions A and B together, and the two rotating rotors 210 will discharge the gas in the specific container. In addition, since the twenty-four magnetic columns 20 densely surround the two rotation areas 26, magnetic force lines with high density and uniform distribution can be generated, so that the two magnetic rotating columns 30 can rotate more smoothly.

[0046] Through the structural design of the vacuum pump of the present invention, magnetic force lines with high density and uniform distribution can be generated, so that the two magnetic rotating columns can rotate more smoothly, and drive the two rotors to rotate smoothly to stably extract gas.

[0047] The present invention shows characteristics that are quite different from the prior art in terms of purpose, means and efficacy. It should be noted, however, that the above-mentioned many embodiments are examples for easy explanation, and the scope of protection claimed by the present invention should be subject to what is described in the claims, rather than being limited to the above-mentioned embodiments.

Claims

1. A rotary drive structure is applied to a vacuum pump, and the vacuum pump includes two rotors, characterized in that, The rotation driving structure includes: A groove body; Two magnetic rotating columns, which are located in the groove body and are respectively pivotally connected to the two rotors; A plurality of magnetic columns, each of the magnetic columns includes a first connection end, a second connection end, a first side and a second side, wherein each of the magnetic columns is dispersedly arranged and connected to the groove body at the first connection end, and the second connection end surrounds the two magnetic rotating columns; and A plurality of electromagnetic coils, each of the electromagnetic coils is dispersedly arranged on each of the first sides and each of the second sides and is close to the groove body; The groove body includes a plurality of inner side wall surfaces, each of the first connection ends is connected to the plurality of inner side wall surfaces, at least one inner side wall surface includes an extension column, the extension column is located on the symmetry axis of the two magnetic rotating columns, and the extension column is connected to at least two magnetic columns, the second connection ends of the two magnetic columns are respectively oriented towards the two magnetic rotating columns, so that a part of the magnetic columns among the plurality of magnetic columns are radially arranged with one of the two magnetic rotating columns as the center and form a rotation area, and the other part of the magnetic columns are radially arranged with the other of the two magnetic rotating columns as the center and form another rotation area.

2. The rotational drive structure according to claim 1, wherein Wherein the two magnetic rotating columns both include a main body and a plurality of magnetic members, and each of the magnetic members is dispersedly arranged on the main body.

3. The rotational drive structure according to claim 2, wherein, Each of the magnetic rotating columns further includes a rotating shaft, the rotating shaft is arranged in the main body, and each of the magnetic members is dispersedly arranged around the rotating shaft at intervals of 90 degrees with the rotating shaft as the center.

4. The rotational drive structure according to claim 3, wherein Any two adjacent magnetic members have opposite magnetic poles.

5. The rotational drive structure according to claim 4, wherein Each of the electromagnetic coils is dispersedly arranged on each of the first sides and each of the second sides and is close to each of the inner side wall surfaces.

6. The rotational drive structure according to claim 1, wherein, The number of the plurality of magnetic columns is 24, and twelve of the magnetic columns are radially arranged with one of the two magnetic rotating columns as the center, and the second connection ends of the twelve magnetic columns form a rotation area with one of the two magnetic rotating columns.

7. A vacuum pump, comprising two rotors, characterized in that, The vacuum pump includes a rotation driving structure as described in any one of claims 1 to 6.

Citation Information

Patent Citations

  • Vacuum pump and rotary drive structure

    CN211791196U