Cutting device, method for replacing a cutting tool and method for replacing a plate

Abstract

Provided are a cutting device, a cutting tool replacement method, and a plate replacement method, which have a miniaturized replacement device. The cutting device has a mounting flange for mounting a cutting tool and a replacement device that replaces the cutting tool mounted to the mounting flange with a replacement cutting tool. The replacement device has a rotating portion, a first holding portion that holds the cutting tool mounted to the mounting flange with a front surface side, a second holding portion that holds the replacement cutting tool with a front surface side, and a nut rotating portion that has a nut holding portion that holds a nut for fixing the cutting tool to the mounting flange and rotates the nut held by the nut holding portion. The rotating portion is connected to the first holding portion, the second holding portion, and the nut rotating portion. The front surface of the first holding portion, the front surface of the second holding portion, and the nut holding portion are arranged to face the side opposite the rotation axis of the rotating portion in a state in which they are separated from each other around the rotation axis of the rotating portion.

Description

Technical Field

[0001] The present invention relates to a cutting device for cutting a workpiece using a cutting tool, a cutting tool replacement method for replacing a cutting tool mounted on the cutting device, and a plate replacement method for replacing a plate used for trimming or inspecting the cutting tool mounted on the cutting device. Background Art

[0002] By dividing a wafer on which multiple devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed, multiple device chips each having a device are manufactured. Furthermore, after mounting multiple device chips on a predetermined substrate, a package substrate can be obtained by covering the mounted device chips with a sealing material (molding resin) made of resin. By dividing this package substrate, packaged devices having multiple packaged device chips are manufactured. Device chips or packaged devices are mounted on various electronic devices such as mobile phones and personal computers.

[0003] A cutting device is used to separate workpieces such as wafers and package substrates. The cutting device comprises a chuck table that holds the workpiece and a cutting unit that cuts the workpiece. The cutting unit comprises a spindle and a mounting flange fixed to the front end of the spindle. An annular cutting tool is mounted on the mounting flange to cut the workpiece.

[0004] The cutting tool is fixed to the mounting flange by a nut. When the spindle is rotated with the cutting tool attached to the mounting flange, the cutting tool rotates. The rotating cutting tool cuts into the workpiece held by the chuck table, cutting and dividing the workpiece.

[0005] Cutting tools wear as they are machined and therefore need to be replaced periodically. To replace a cutting tool, first loosen and remove the nut securing the cutting tool and remove the used cutting tool from the mounting flange. Then, attach the replacement cutting tool (the unused cutting tool) to the mounting flange and secure it with the nut.

[0006] Manually replacing a cutting tool is not only time-consuming, but also creates the risk of the cutting tool and nut being accidentally dropped during the operation. Therefore, attempts have been made to automate the replacement of cutting tools. Patent Document 1 discloses a cutting device equipped with a replacement device that automatically replaces a cutting tool mounted on a cutting unit (spindle unit).

[0007] The replacement device includes a cutting tool attachment and detachment mechanism for attaching and detaching the cutting tool, and a nut attachment and detachment mechanism for attaching and detaching the nut that secures the cutting tool to the cutting unit. Furthermore, the cutting tool attachment and detachment mechanism includes a first retaining portion (first cutting tool gripping member) for gripping a used cutting tool, and a second retaining portion (second cutting tool gripping member) for gripping a replacement cutting tool.

[0008] Patent Document 1: Japanese Patent Application Laid-Open No. 2007-98536

[0009] In the aforementioned changing device, the cutting tool attachment and nut attachment mechanisms are independently arranged. Furthermore, the first and second retaining portions of the cutting tool attachment and nut attachment mechanisms are aligned with the nut attachment mechanisms, facing the tool holders of the cutting unit. Consequently, the changing device tends to become larger, requiring a relatively large space within the cutting device for mounting the changing device. This results in an increase in the size of the cutting device or a restriction on the layout of its components.

[0010] Furthermore, the aforementioned replacement device is sometimes also installed in a so-called face-to-face dual-axis cutting device, which has a pair of cutting units and a pair of cutting tools arranged in a mutually opposing manner. In this case, to enable the replacement of cutting tools for each of the two cutting units, the replacement device is equipped with a pair of cutting tool attachment and detachment mechanisms and a pair of nut attachment and detachment mechanisms. This results in a further increase in the size of the replacement device, which in turn increases the size of the cutting device and further restricts its layout. Summary of the Invention

[0011] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a cutting device having a compact replacement device and a replacement method for replacing a cutting tool or the like using the replacement device.

[0012] According to one embodiment of the present invention, a cutting device is provided, which uses a cutting tool to cut a workpiece, wherein the cutting device comprises: a cutting unit, which has a main shaft and a mounting flange, the mounting flange being fixed to the front end of the main shaft and for mounting the cutting tool; a storage unit, which stores the cutting tool for replacement; a replacement device, which replaces the cutting tool mounted on the mounting flange with the cutting tool for replacement; and a moving unit, which moves the replacement device, the replacement device comprising: a rotating part; a first holding part, which uses the front side to hold the cutting tool mounted on the mounting flange; a second holding part, which uses the front side to hold the cutting tool mounted on the mounting flange; The front side is used to hold the replacement cutting tool; and a nut rotating part, which has a nut holding part for holding the nut used to fix the cutting tool to the mounting flange, and the nut rotating part rotates the nut held by the nut holding part, the rotating part is connected to the first holding part, the second holding part and the nut rotating part, and rotates with a straight line passing through the interior of the rotating part as the rotation axis, and the front side of the first holding part, the front side of the second holding part and the nut holding part are arranged to face the side opposite to the rotation axis of the rotating part in a state of being separated from each other around the rotation axis of the rotating part.

[0013] Furthermore, it is preferable that the first holding portion and the second holding portion are connected to the rotating portion via an elastic body so that the front surface of the first holding portion and the front surface of the second holding portion can tilt.

[0014] In addition, it is preferable that the nut rotating portion is arranged so that the rotation axis of the nut holding portion is along a direction perpendicular to the rotation axis of the rotating portion.

[0015] In addition, preferably, the cutting device further includes a processing chamber, which forms a space for cutting the workpiece by the cutting unit, and the replacement device is arranged outside the processing chamber, and the processing chamber has an entrance and exit for the replacement device to pass through.

[0016] In addition, preferably, the storage unit has: a loading portion having a loading surface for loading a plurality of the cutting tools; and a reading unit that reads an identification mark that is attached to the cutting tool loaded on the loading surface and contains information related to the cutting tool.

[0017] In addition, preferably, the cutting device further has: a chuck worktable, which holds the workpiece; and a sub-worktable, which holds a plate used in the dressing or inspection of the cutting tool, the storage unit has a plate storage part for storing the plate, and the first holding part and the second holding part are capable of holding the plate.

[0018] Furthermore, it is preferable that the first holding portion and the second holding portion attract and hold the cutting tool.

[0019] In addition, preferably, the mounting flange has: a fixed mounting seat, which is fixed to the front end portion of the main shaft, and has a flange portion and a boss portion, the flange portion supports the cutting tool, and the boss portion protrudes from the flange portion and is inserted into the cutting tool; and a pressing flange, which has an opening for inserting the boss portion, and the pressing flange is fixed to the fixed mounting seat by the nut, and the pressing flange has: a first surface; a second surface, which is located on the opposite side of the first surface and contacts the cutting tool; and a through hole, which passes through from the first surface to the second surface, the first retaining portion and the second retaining portion attract the first surface side of the pressing flange to hold the pressing flange, and attract the cutting tool via the through hole and hold the cutting tool.

[0020] Furthermore, it is preferable that the storage unit includes a pressing flange storage portion for storing the pressing flange.

[0021] In addition, according to another embodiment of the present invention, a method for replacing a cutting tool is provided, wherein the cutting tool installed on the above-mentioned cutting device is replaced, wherein the method for replacing the cutting tool has the following steps: a preparation step, placing the cutting tool for replacement on the loading surface of the storage unit having a loading surface capable of loading the cutting tool; a replacement cutting tool holding step, holding the replacement cutting tool loaded on the loading surface by the second holding portion; a nut removal step, placing the nut holding portion of the nut rotating portion opposite to the mounting flange, holding the nut installed on the mounting flange by the nut holding portion and rotating the nut to remove the nut from the mounting flange; a first retraction step, separating the nut rotating portion from the mounting flange; After completing the cutting tool holding step, the first holding part is made to face the mounting flange by rotating the rotating part, and the cutting tool mounted on the mounting flange is held by the first holding part; a second retraction step is made to separate the first holding part from the mounting flange; a cutting tool installation step is made to face the second holding part by rotating the rotating part, and the replacement cutting tool held by the second holding part is installed on the mounting flange; a third retraction step is made to separate the second holding part from the mounting flange; and a nut installation step is made to face the nut holding part of the nut rotating part by rotating the rotating part, and the nut held by the nut holding part is rotated to install the nut on the mounting flange.

[0022] In addition, according to another embodiment of the present invention, a plate replacement method is provided for replacing the plate arranged on the above-mentioned cutting device, wherein the plate replacement method has the following steps: a preparation step of placing the replacement plate on the loading surface of the storage unit having a loading surface capable of placing the plate; a replacement plate holding step of holding the replacement plate placed on the loading surface by the second holding portion; a used plate holding step of making the first holding portion face the sub-workbench and holding the used plate held by the sub-workbench by the first holding portion; a retreat step of separating the first holding portion from the sub-workbench; and a loading step of rotating the rotating portion to make the second holding portion face the sub-workbench and placing the replacement plate held by the second holding portion on the sub-workbench.

[0023] A cutting device according to one embodiment of the present invention includes a replacement device for replacing a cutting tool mounted on the cutting device and a plate used for dressing or inspecting the cutting tool. The replacement device has a structure in which a first holding portion, a second holding portion, and a nut rotating portion, which hold the cutting tool and the like, are connected to a common rotating portion, and the front surfaces of the first holding portion, the second holding portion, and the nut holding portion are arranged to face opposite the rotating portion's rotation axis, spaced apart from each other about the rotating portion's rotation axis.

[0024] When using the above-described replacement device, the replacement device can be significantly miniaturized compared to a conventional method in which the first holding portion, the second holding portion, and the nut rotating portion are independently provided, and the front surface of the first holding portion, the front surface of the second holding portion, and the nut holding portion are arranged so as to face the mounting flange. As a result, the size of the cutting device is suppressed and the layout freedom of the components of the cutting device is increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a perspective view showing a cutting device.

[0026] Figure 2 It is an exploded perspective view showing a cutting unit to which a hub-type cutting tool is attached.

[0027] Figure 3 It is an exploded perspective view showing a cutting unit to which a washer-type cutting blade is attached.

[0028] Figure 4 It is a perspective view showing the replacement unit.

[0029] Figure 5 This is a perspective view showing the replacement unit in which the replacement device is arranged at the replacement position.

[0030] Figure 6It is a perspective view showing the replacement device.

[0031] Figure 7 (A) is a side view showing the replacement device, Figure 7 (B) is a front view showing the replacement device.

[0032] Figure 8 (A) is a front view showing the holding portion, Figure 8 (B) is a cross-sectional view showing the holding portion.

[0033] Figure 9 (A) is a cross-sectional view showing a holding portion for holding a hub-type cutting tool. Figure 9 (B) is a cross-sectional view showing a holding portion that holds a washer-type cutting tool.

[0034] Figure 10 (A) is a perspective view showing a storage unit, Figure 10 (B) is a perspective view showing the tool storage portion.

[0035] Figure 11 (A) is a schematic diagram showing a replacement device in a replacement cutting tool holding step, Figure 11 (B) is a schematic diagram showing the replacement device in the nut removal step, Figure 11 (C) is a schematic diagram showing the replacement device in the first retreat step, Figure 11 (D) is a schematic diagram showing a replacement device in a used cutting tool holding step.

[0036] Figure 12 (A) is a schematic diagram showing the replacement device in the second retreat step, Figure 12 (B) is a schematic diagram showing a replacement device in a cutting tool installation step, Figure 12 (C) is a schematic diagram showing the replacement device in the third retreat step, Figure 12 (D) is a schematic diagram showing the replacement device in the nut mounting step.

[0037] Figure 13 (A) is a perspective view showing a holding portion for holding a square plate. Figure 13 (B) is a perspective view showing a holding portion that holds a rectangular plate.

[0038] Figure 14 (A) is a schematic diagram showing a replacement device in a replacement plate holding step, Figure 14 (B) is a schematic diagram showing the replacement device in the used plate holding step, Figure 14 (C) is a schematic diagram showing the replacement device in the retreat step, Figure 14(D) is a schematic diagram showing the replacement device in the placement step.

[0039] Figure 15 It is a perspective view showing a cutting device provided with a storage unit.

[0040] Figure 16 It is a perspective view showing a storage unit having a rotatable placement portion.

[0041] Label Description

[0042] 11: Workpiece; 13: Belt (scribing belt); 15: Frame; 17: Frame unit (workpiece unit); 19, 19A, 19B: Plate (trimming plate); 21: Plate (inspection plate); 2: Cutting device; 4: Base; 4a, 4b: Opening; 6: Elevator; 6a: Elevator; 8: Container; 10: Box; 10a: Guide rail; 12: Cleaning unit; 14: Rotary table; 16: Guide rail; 18: Table cover; 20: Dust and drip proof cover; 22: Chuck table (holding table); 24: Clamp; 26: Sub-table (holding table); 28: Processing chamber (cover); 28a: Entrance and exit (opening); 30: Cutting unit; 32: Housing; 34: Spindle; 34a: Threaded hole; 36: Cutting tool; 36a: opening; 38: base; 38a: front side (first side); 38b: back side (second side); 40: cutting edge; 42: mounting flange; 42a: through hole; 44: flange portion; 44a: front side; 44b: convex portion; 44c: supporting surface; 46: boss portion (support shaft); 46a: threaded portion; 48: nut; 48a: opening; 48b: through hole; 50: screw; 52: cutting tool; 52a: opening; 54: mounting flange; 56: fixed mounting seat; 56a: through hole; 56b: receiving portion; 58: flange portion; 58a: front side; 58b: convex portion; 58c: supporting surface; 60: boss portion (support shaft); 60a: first boss portion (first support shaft); 60b : Second boss portion (second support shaft); 60c: Third boss portion (third support shaft); 60d: Threaded portion; 62: Pressing flange; 62a: Front surface (first surface); 62b: Back surface (second surface); 62c: Opening; 62d: Through hole; 64: Nut; 64a: Opening; 64b: Through hole; 66: Washer; 68: Screw; 70: Imaging unit; 72: First conveying unit; 72a: Holding unit; 72b: Holding mechanism; 74: Second conveying unit; 74a: Holding unit; 76: Replacement unit; 78: Cover; 80: Hinge; 82: Control unit (control unit); 82a: Processing unit; 82b: Storage unit; 84: Moving unit (moving mechanism); 86: Elevating mechanism; 88: Substrate; 90: Multi-jointed arm; 92A: First support member; 92B: Second support member; 94A: First rotating mechanism; 94B: Second rotating mechanism; 94C: Third rotating mechanism; 96A: First arm; 96B: Second arm; 100: Replacement device (replacement mechanism); 102: Attachment and detachment unit; 104: Rotation mechanism; 106: Rotation portion (shaft); 106a: Rotation axis; 110: Frame; 112a, 112b: Support members; 114a, 114b: Connecting members; 120: Nut rotating portion (nut attachment and detachment unit); 122: Nut holding portion; 124: Rotation portion (shaft); 124a: Rotation axis; 126: Housing; 128: Rotation drive source; 130: Rotation member; 130a: Front face;132: Retaining pin; 134: Holding member; 134a: Claw; 136: Cover; 136a: Opening; 136b: First pin receiving portion; 136c: Second pin receiving portion; 138: Pin; 140: Ring-shaped member; 142a, 142b: Elastic bodies (elastic member); 150A: Retaining portion (first retaining portion); 150B: Retaining portion (second retaining portion); 150a: Front surface; 152: Frame; 152a: Front surface (first surface); 152b: Back surface (second surface); 152c: First groove (first recess); 152d: Second groove (second recess); 152e: Third groove (third recess); 152f: Fourth groove (fourth recess); 152g: Fifth groove (fifth recess); 154: Elastic member; 154a: Base; 154b: Lip; 154c: Through-hole; 156: Flow path; 158: Valve; 160: Suction source; 162: Pressure measuring device (pressure sensor); 200: Storage unit; 202: Loading portion (loading table); 202a: Loading surface; 204, 204A, 204B: Tool storage; 206: Press flange storage; 208: Plate storage (trimming plate storage); 210: Plate storage (inspection plate storage); 212: Identification mark; 250: Storage unit; 252: Loading portion; 252a: Loading surface; 254: Tool storage; 256: Press flange storage; 258: Rotating portion (shaft); 260: Reading unit. DETAILED DESCRIPTION

[0043] Hereinafter, an embodiment of one mode of the present invention will be described with reference to the drawings. First, a configuration example of a cutting device according to this embodiment will be described. Figure 1 2 is a perspective view showing the cutting device 2. Figure 1 In the CAD system, the X-axis (machining feed direction, first horizontal direction, front-to-back direction) and the Y-axis (indexing feed direction, second horizontal direction, left-to-right direction) are perpendicular to each other. Furthermore, the Z-axis (vertical direction, up-down direction, height direction) is perpendicular to the X-axis and Y-axis directions.

[0044] The cutting device 2 includes a base 4 that supports or houses the various components that constitute the cutting device 2. An elevator 6 having a lifting platform 6a is provided at a front corner of the base 4. The elevator 6 includes a lifting mechanism (not shown) that raises and lowers the lifting platform 6a along the Z-axis direction.

[0045] A container 8 storing various tools (parts, consumables, etc.) used in the cutting device 2 and a cassette 10 storing a plurality of workpieces 11 to be cut by the cutting device 2 are placed on the lift table 6 a of the lift 6 . Figure 1The example in which the container 8 is placed on the lifting platform 6a and the cassette 10 is placed on the container 8 is shown. In addition, the details of the tools accommodated in the container 8 will be described later.

[0046] The box 10 has a pair of side surfaces facing each other. Furthermore, a plurality of guide rails 10a are fixed to each side surface of the box 10 and arranged at predetermined intervals along the height direction of the box 10. A frame unit (workpiece unit) 17 containing a workpiece 11 is supported by the pair of guide rails 10a fixed to both side surfaces of the box 10 and located at the same height.

[0047] The workpiece 11 is, for example, a disc-shaped wafer made of a semiconductor material such as silicon. The workpiece 11 is divided into a plurality of regions by a plurality of predetermined dividing lines (streets) arranged in a grid pattern. Devices such as ICs and LSIs are formed on the front (top) sides of each region. The workpiece 11 is cut along the predetermined dividing lines to separate the wafer, producing a plurality of device chips, each containing a device.

[0048] However, there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a wafer made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass, ceramics, resin, metal, etc. In addition, there are no restrictions on the type, number, shape, structure, size, and configuration of the devices formed on the workpiece 11, and no devices may be formed on the workpiece 11. In addition, the workpiece 11 may also be a packaging substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate.

[0049] A circular tape (scribing tape) 13 having a larger diameter than the workpiece 11 is attached to the back (lower) side of the workpiece 11. The tape 13 may be a sheet material having a circular, film-shaped base material and an adhesive layer (paste layer) disposed on the base material. For example, the base material may be made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer may be made of an epoxy-based, acrylic-based, or rubber-based adhesive. Alternatively, the adhesive layer may be made of an ultraviolet-curing resin that cures upon exposure to ultraviolet light.

[0050] The outer periphery of the belt 13 is attached to an annular frame 15 made of metal or the like and having a circular opening in the center. The diameter of the opening of the frame 15 is larger than the diameter of the workpiece 11, and the workpiece 11 is arranged inside the opening of the frame 15.

[0051] When the tape 13 is attached to the workpiece 11 and the frame 15, the workpiece 11 is supported by the frame 15 via the tape 13. This forms a frame unit 17 including the workpiece 11, the tape 13, and the frame 15. One or more frame units 17 are housed in the cassette 10.

[0052] An opening 4a is provided in a region adjacent to the elevator 6 in the X-axis direction on the upper surface of the base 4. A cleaning unit 12 for cleaning the workpiece 11 is disposed within the opening 4a. The cleaning unit 12 includes a rotary table 14 that holds the workpiece 11 and a nozzle (not shown) disposed above the rotary table 14 and that supplies a cleaning liquid such as pure water.

[0053] The rotary table 14 is connected to a rotational drive source (not shown), such as a motor, which rotates the rotary table 14 about an axis of rotation generally parallel to the Z-axis. While the rotary table 14 holds the workpiece 11, a cleaning fluid is supplied from a nozzle to the workpiece 11 while the rotary table 14 rotates, thereby cleaning the workpiece 11. Alternatively, a gas-liquid mixture of a liquid (such as pure water) and air may be used as the cleaning fluid.

[0054] A pair of guide rails 16 are provided above the cleaning unit 12 along the X-axis to hold the frame unit 17. A movement mechanism (not shown) is connected to the pair of guide rails 16 to move the pair of guide rails 16 toward and away from each other along the Y-axis. By clamping the frame unit 17 with the pair of guide rails 16, the position of the frame unit 17 in the Y-axis direction can be adjusted.

[0055] A rectangular opening 4b is provided on the upper surface of the base 4, adjacent to the guide rail 16 along the Y-axis. The opening 4b is formed so that its longitudinal direction extends along the X-axis. A flat-plate workbench cover 18 is located within this opening 4b. Furthermore, bellows-shaped dust and drip shields 20, which are extendable and retractable along the X-axis, are provided on both sides of the workbench cover 18 in the X-axis direction.

[0056] A chuck table (holding table) 22 is provided on the table cover 18 to hold the workpiece 11, etc. The upper surface of the chuck table 22 constitutes a flat holding surface for holding the workpiece 11, etc. In addition, a plurality of clamps 24 are provided around the chuck table 22 to grip and fix the frame 15, etc.

[0057] For example, the chuck table 22 has a cylindrical frame (not shown) made of a metal such as stainless steel. In addition, a circular recess is formed on the upper surface side of the central portion of the frame, and a disc-shaped porous component made of a porous material such as porous ceramic is embedded in the recess. The holding surface of the chuck table 22 is connected to a suction source (not shown) such as an ejector via the porous component, a flow path (not shown) provided inside the chuck table 22, a valve (not shown), etc.

[0058] For example, the frame unit 17 is arranged on the chuck table 22 so that the front side of the workpiece 11 is exposed upward and the back side (belt 13 side) of the workpiece 11 faces the holding surface of the chuck table 22. Furthermore, the frame 15 is secured by a plurality of clamps 24. In this state, when negative pressure from a suction source is applied to the holding surface of the chuck table 22, the workpiece 11 is suctioned and held by the chuck table 22 via the belt 13.

[0059] Furthermore, a pair of sub-tables (holding tables) 26 are provided adjacent to the chuck table 22 on the table cover 18. The pair of sub-tables 26 are arranged on the rear side of the chuck table 22 in a state separated from each other in the Y-axis direction.

[0060] The upper surface of the sub-table 26 constitutes a flat holding surface for holding plate-like components used for setting, inspection, and evaluation of cutting processing. For example, the holding surface of the sub-table 26 is formed into a rectangular shape and is connected to a suction source (not shown) such as an ejector via a flow path (not shown) and a valve (not shown) provided inside the sub-table 26. The plates 19 and 21 (see FIG. 2 ) described later are held by the sub-table 26. Figure 10 (A)) etc. are maintained.

[0061] A moving unit (not shown) and a rotational drive source (not shown) are provided below the table cover 18. The moving unit comprises a ball screw-type moving mechanism or the like, and moves the chuck table 22 and sub-table 26 along the X-axis along with the table cover 18. The rotational drive source comprises an electric motor or the like, and rotates the chuck table 22 about a rotation axis substantially parallel to the Z-axis.

[0062] The front side of the opening 4b (the area adjacent to the opening 4a) corresponds to the transport area where the workpiece 11 is carried in and out. Furthermore, the rear side of the opening 4b corresponds to the processing area where the workpiece 11 is processed. The chuck table 22 and the sub-table 26 are moved along the X-axis by a moving unit, thereby being positioned in the transport area or the processing area.

[0063] A processing chamber (hood) 28 is provided above the processing area to form a space for cutting the workpiece 11. Figure 1In FIG, the outline of the processing chamber 28 is shown by a two-dot chain line. The processing chamber 28 is formed into a rectangular parallelepiped shape by metal or the like, and is arranged so as to cover the processing area. In addition, a replacement device 100 (see FIG. 1 ) is provided on the side of the processing chamber 28 on the side of the transport area. Figure 6 An entrance and exit (opening) 28a through which the device passes.

[0064] A pair of cutting units 30 for cutting the workpiece 11 are provided inside the processing chamber 28. The cutting units 30 rotate an annular cutting tool and cut into the workpiece 11, thereby cutting the workpiece 11. For example, a hub-type cutting tool 36 (see FIG. 1 ) is mounted on the cutting unit 30. Figure 2 ).

[0065] Figure 2 1 is an exploded perspective view showing a cutting unit 30 equipped with a hub-type cutting blade 36. The cutting unit 30 includes a cylindrical housing 32, and a cylindrical spindle 34 arranged along the Y-axis direction is accommodated in the housing 32.

[0066] The front end (one end) of the spindle 34 is exposed to the outside of the housing 32, and a threaded hole 34a is formed in the front end of the spindle 34. A rotational drive source, such as a motor, is connected to the base end (the other end) of the spindle 34. An annular cutting tool 36 is attached to the front end of the spindle 34. The cutting tool 36 attached to the front end of the spindle 34 is rotated by power transmitted from the rotational drive source through the spindle 34.

[0067] The cutting tool 36 is formed by integrating an annular base 38 made of metal or the like and an annular cutting edge 40 formed along the outer periphery of the base 38. A circular opening 36a is provided in the center of the cutting tool 36, penetrating the cutting tool 36 (base 38) in the thickness direction.

[0068] The base 38 has a front surface (first surface) 38a and a back surface (second surface) 38b that are substantially parallel to each other. The front surface 38a of the base 38 constitutes an annular retaining surface that is retained during attachment and detachment of the cutting tool 36. Furthermore, a cutting edge 40 is formed on the outer periphery of the back surface 38b of the base 38. For example, the cutting edge 40 is formed from an electroformed grinding tool in which abrasive grains such as diamond are fixed with a bonding material such as nickel plating.

[0069] A mounting flange 42 is fixed to the front end of the spindle 34. This mounting flange 42 is used to mount the cutting tool 36. The mounting flange 42 includes a disc-shaped flange portion 44 that supports the cutting tool 36 and a cylindrical boss portion (support shaft) 46 that protrudes from the center of the front surface 44a of the flange portion 44. Furthermore, a through-hole 42a is provided in the mounting flange 42, extending through the center of the flange portion 44 and the center of the boss portion 46.

[0070] An annular convex portion 44b protruding from the front surface 44a is provided on the outer periphery of the flange portion 44. The front end surface of the convex portion 44b is formed substantially parallel to the front surface 44a, and constitutes an annular support surface 44c for supporting the cutting blade 36.

[0071] A threaded portion 46a is formed on the outer circumferential surface of the distal end of the boss portion 46. This threaded portion 46a is fastened to an annular nut 48. A circular opening 48a is formed in the center of the nut 48, extending through the nut 48 in the thickness direction. The opening 48a has a diameter approximately the same as that of the boss portion 46 and is provided with a thread groove corresponding to the threaded portion 46a of the boss portion 46. Nut 48 also has a plurality of through-holes 48b formed at approximately equal intervals along its circumference, extending through the nut 48 in the thickness direction.

[0072] The screw 50 is inserted into the threaded hole 34a of the spindle 34 through the through-hole 42a of the mounting flange 42, and the screw 50 is screwed into the threaded hole 34a and tightened, thereby fixing the mounting flange 42 to the front end of the spindle 34. Then, when the boss portion 46 is inserted into the opening 36a of the cutting tool 36, the cutting tool 36 is attached to the mounting flange 42. In this state, when the nut 48 is tightened on the threaded portion 46a of the boss portion 46, the cutting tool 36 is clamped between the support surface 44c of the flange portion 44 and the nut 48, and is fixed to the mounting flange 42.

[0073] On the other hand, a washer-type cutting tool 52 (see Figure 3 ). Figure 3 It is an exploded perspective view showing the cutting unit 30 to which the washer-type cutting blade 52 is attached.

[0074] The cutting blade 52 is composed of an annular cutting edge formed by fixing abrasive grains with a bonding material such as metal bond, resin bond, or vitrified bond. A circular opening 52a is provided in the center of the cutting blade 52, penetrating the cutting blade 52 in the thickness direction.

[0075] A mounting flange 54 is mounted on the front end of the spindle 34 to which the cutting tool 52 is mounted. The mounting flange 54 includes a fixed mounting seat 56 fixed to the front end of the spindle 34 and a pressing flange 62 for pressing the cutting tool 52 mounted on the fixed mounting seat 56.

[0076] The fixed mount 56 includes a disc-shaped flange portion 58 that supports the cutting tool 52, and a cylindrical boss portion (support shaft) 60 that protrudes from the center of the front surface 58a of the flange portion 58. Furthermore, the fixed mount 56 has a through-hole 56a extending through the center of the flange portion 58 and the center of the boss portion 60. An annular receiving portion 56b is provided inside the through-hole 56a to support a washer 66, which will be described later.

[0077] An annular convex portion 58b protruding from the front surface 58a is provided on the outer periphery of the flange portion 58. The front end surface of the convex portion 58b is formed substantially parallel to the front surface 58a, and constitutes an annular support surface 58c for supporting the cutting blade 52.

[0078] The boss portion 60 includes an annular first boss portion (first support shaft) 60a protruding from the front surface 58a of the flange portion 58; an annular second boss portion (second support shaft) 60b protruding from the front end of the first boss portion 60a; and an annular third boss portion (third support shaft) 60c protruding from the front end of the second boss portion 60b. The diameter of the second boss portion 60b is smaller than that of the first boss portion 60a, and the diameter of the third boss portion 60c is smaller than that of the second boss portion 60b. The first, second, and third boss portions 60a, 60b, and 60c are arranged concentrically.

[0079] A pressing flange 62 is mounted on the fixed mounting seat 56. The pressing flange 62 is an annular member made of metal or the like, and has a front surface (first surface) 62a and a back surface (second surface) 62b that are substantially parallel to each other. The front surface 62a of the pressing flange 62 serves as an annular retaining surface that is retained during attachment and detachment of the pressing flange 62. Furthermore, the back surface 62b of the pressing flange 62 serves as an annular support surface that supports the cutting tool 36.

[0080] A circular opening 62c is provided in the center of the pressing flange 62, extending from the front surface 62a to the back surface 62b of the pressing flange 62. Furthermore, a plurality of through-holes 62d are formed in the region between the outer peripheral edge of the pressing flange 62 and the opening 62c, extending through the pressing flange 62 from the front surface 62a to the back surface 62b at approximately equal intervals along the circumference of the pressing flange 62.

[0081] A threaded portion 60d is formed on the outer circumferential surface of the front end of the boss portion 60 of the fixed mounting seat 56. This threaded portion 60d is fastened to an annular nut 64. A circular opening 64a is formed in the center of the nut 64, extending through the nut 64 in the thickness direction. The opening 64a has a diameter approximately the same as that of the third boss portion 60c and is provided with a thread groove corresponding to the threaded portion 60d of the boss portion 60. Furthermore, a plurality of through-holes 64b are formed in the nut 64 at approximately equal intervals along its circumference, extending through the nut 64 in the thickness direction.

[0082] The fixed mount 56 is mounted on the spindle 34 using screws 68. Specifically, first, a washer 66 is placed on the receiving portion 56b of the fixed mount 56. In this state, the screw 68 is inserted through the washer 66 and the through-hole 56a of the fixed mount 56 into the threaded hole 34a of the spindle 34. The screw 68 is then screwed into the threaded hole 34a to secure the spindle 34. This secures the fixed mount 56 to the front end of the spindle 34.

[0083] When the boss portion 60 is sequentially inserted into the opening 52a of the cutting tool 52 and the opening 62c of the pressing flange 62, the cutting tool 52 and the pressing flange 62 are mounted on the fixed mounting seat 56. Furthermore, an annular protrusion (not shown) is provided on the back surface 62b of the pressing flange 62, protruding from the back surface 62b. This protrusion is formed so that its outer peripheral surface follows the contour of the opening 52a of the cutting tool 52, and its inner wall (inner peripheral surface) follows the contour of the outer peripheral surface of the first boss portion 60a.

[0084] The convex portion of the pressing flange 62 is fitted into the inner side of the opening 52a of the cutting tool 52. This allows the pressing flange 62 and the cutting tool 52 to be aligned. Furthermore, the first boss portion 60a is fitted into the inner side of the inner wall of the convex portion of the pressing flange 62, and the second boss portion 60b is fitted into the opening 62c of the pressing flange 62.

[0085] In this state, when the nut 64 is tightened on the threaded portion 60d formed on the third boss portion 60c, the cutting tool 36 and the pressing flange 62 are fixed to the fixed mounting seat 56. As a result, the cutting tool 36 is clamped between the support surface 58c of the flange portion 58 and the back surface 62b of the pressing flange 62 and fixed to the mounting flange 54.

[0086] As described above, the cutting tool 36 or the cutting tool 52 is mounted on Figure 1 The pair of cutting units 30 shown. In addition, the cutting tools 36 or cutting tools 52 mounted on the pair of cutting units 30 are arranged to face each other.

[0087] Each of the pair of cutting units 30 is equipped with an imaging unit 70 for imaging the workpiece 11 held by the chuck table 22. For example, the imaging unit 70 may be a visible light camera having an imaging element that receives visible light and converts it into an electrical signal, or an infrared camera having an imaging element that receives infrared light and converts it into an electrical signal. The images captured by the imaging unit 70 are used to align the workpiece 11 with the cutting unit 30.

[0088] Furthermore, a first transport unit 72 for transporting the workpiece 11 is provided above the base 4. The first transport unit 72 is connected to a moving mechanism (not shown) that moves the first transport unit 72 in the X-axis and Y-axis directions. Furthermore, the first transport unit 72 includes an air cylinder having a built-in rod that moves upward and downward in the Z-axis direction.

[0089] A holding unit 72a is fixed to the lower end of the cylinder rod to hold the frame 15 and the like of the frame unit 17. For example, the holding unit 72a includes a plurality of suction pads that suction and hold the upper surface of the frame 15 of the frame unit 17. Furthermore, a gripping mechanism 72b is provided at the end of the holding unit 72a on the elevator 6 side to grip the end of the frame 15 and the like of the frame unit 17.

[0090] A second transport unit 74 for transporting the workpiece 11 is provided above the holding unit 72a of the first transport unit 72. The second transport unit 74 is connected to a moving mechanism (not shown) that moves the second transport unit 74 along the Y-axis direction. The second transport unit 74 also includes an air cylinder having a built-in rod that moves upward and downward along the Z-axis direction.

[0091] A holding unit 74a for holding the frame 15 and the like of the frame unit 17 is fixed to the lower end of the rod of the air cylinder. The holding unit 74a has the same structure as the holding unit 72a of the first transport unit 72.

[0092] Furthermore, a replacement unit 76 is provided on the side of the chuck table 22. The replacement unit 76 replaces the cutting tools 36, 52 and the like attached to the cutting unit 30. The structure of the replacement unit 76 will be described in detail later.

[0093] A plate-shaped cover 78 is provided on the edge of the base 4 on the side of the replacement unit 76. One end of the cover 78 is connected to the base 4 via a hinge 80, and the cover 78 is rotatable around the hinge 80.

[0094] When the workpiece 11 is processed by the cutting unit 30, Figure 1As shown by the solid line, the cover 78 is in a state of standing up along the Z-axis direction (open state). On the other hand, when the cutting tool 36, 52, etc. is replaced by the replacement unit 76, as shown in FIG. Figure 1 As shown by the two-dot chain line, the cover 78 is in a state of lying along the X-axis direction and the Y-axis direction (closed state).

[0095] Each component of the cutting device 2 (the elevator 6, the cleaning unit 12, the guide rail 16, the chuck table 22, the fixture 24, the sub-table 26, the cutting unit 30, the imaging unit 70, the first transport unit 72, the second transport unit 74, the replacement unit 76, etc.) is connected to a control unit (control section) 82. The control unit 82 generates control signals for controlling the operation of each component of the cutting device 2, thereby controlling the operation of the cutting device 2.

[0096] For example, the control unit 82 is configured as a computer and includes a processing unit 82a that performs various processes (calculations, etc.) required for the operation of the cutting device 2, and a storage unit 82b that stores various information (data, programs, etc.) used by the processing unit 82a. The processing unit 82a is configured to include a processor such as a CPU (Central Processing Unit). The storage unit 82b is configured to include various memories such as a main storage device and an auxiliary storage device.

[0097] The cutting device 2 cuts the workpiece 11. When machining the workpiece 11, the frame unit 17 including the workpiece 11 is first housed in the cassette 10. The cassette 10 is then placed on the lift table 6a of the lift 6.

[0098] The frame unit 17 housed in the cassette 10 is unloaded from the cassette 10 by the first transport unit 72. Specifically, the first transport unit 72 moves in the X-axis direction away from the cassette 10 while gripping the end of the frame 15 with the gripping mechanism 72b. This pulls the frame unit 17 out of the cassette 10 and places it on the pair of guide rails 16. The frame unit 17 is then clamped by the pair of guide rails 16, and the position of the frame unit 17 is adjusted.

[0099] Next, the first transport unit 72 uses the holding unit 72a to hold the upper surface of the frame 15 and transport the frame unit 17 to the chuck table 22 located in the transport area. Furthermore, the chuck table 22 moves from the transport area to the processing area while suction-holding the back side (belt 13 side) of the workpiece 11. As a result, the workpiece 11 is positioned inside the processing chamber 28.

[0100] After the workpiece 11 and the cutting unit 30 are aligned based on the image captured by the imaging unit 70, the workpiece 11 is cut by the cutting unit 30. For example, the workpiece 11 is cut along the planned dividing lines to be divided into a plurality of device chips.

[0101] When the cutting process is completed, the chuck table 22 moves to the transport area. Then, the second transport unit 74 uses the holding unit 74a to hold the upper surface side of the frame 15 and transports the frame unit 17 from the chuck table 22 to the cleaning unit 12. Then, the cleaning unit 12 cleans the workpiece 11.

[0102] When the workpiece 11 is cleaned, the first transport unit 72 holds the frame 15 with the holding unit 72a and transports the frame unit 17 onto the pair of guide rails 16. The frame unit 17 is then clamped by the pair of guide rails 16, and the position of the frame unit 17 is adjusted. The first transport unit 72 then moves toward the cassette 10 while holding the frame 15 with the holding mechanism 72b, and stores the frame unit 17 in the cassette 10.

[0103] The memory unit 82b of the control unit 82 stores a program describing a series of operations of the cutting device 2. When the operator instructs the cutting device 2 to process the workpiece 11, the processing unit 82a reads and executes the program from the memory unit 82b, sequentially generating control signals for controlling the operations of the various components of the cutting device 2.

[0104] Here, the cutting blades 36 and 52 attached to the cutting unit 30 gradually wear out by cutting the workpiece 11 and therefore need to be replaced regularly. In the cutting apparatus 2 , the replacement unit 76 automatically replaces the cutting blades 36 and 52 .

[0105] Figure 4 This is a perspective view showing the replacement unit 76. The replacement unit 76 includes a replacement device (replacement mechanism) 100 that replaces the cutting tools 36 and 52, and a moving unit (movement mechanism) 84 that moves the replacement device 100. The moving unit 84 includes a lifting mechanism 86 that moves the replacement device 100 in the Z-axis direction, and a multi-jointed arm 90 that is connected to the lifting mechanism 86 and moves the replacement device 100 in a direction parallel to the X-axis and Y-axis directions (horizontal direction).

[0106] The lifting mechanism 86 includes a columnar base plate 88 arranged along the Z-axis, and moves the multi-jointed arm 90 in the Z-axis direction along the base plate 88. For example, the lifting mechanism 86 includes a motor (not shown) disposed below the base plate 88, with a drive pulley fixed to its shaft, and a driven pulley (not shown) disposed above the base plate 88. A toothed endless belt (not shown) is mounted between the drive pulley and the driven pulley, and a first metal support member 92A is fixed to the toothed endless belt.

[0107] When the motor of the lifting mechanism 86 is rotated in a first direction, the first support member 92A is raised, and when the motor of the lifting mechanism 86 is rotated in a second direction opposite to the first direction, the first support member 92A is lowered. Thus, the first support member 92A is raised and lowered along the Z-axis direction.

[0108] However, the structure of the lifting mechanism 86 is not limited as long as it can lift and lower the first support member 92A. For example, the lifting mechanism 86 may be a ball screw type lifting mechanism. A ball screw type lifting mechanism includes a pair of guide rails (not shown) arranged along the Z-axis direction. In addition, a flat movable plate (not shown) is mounted on the pair of guide rails so as to be able to slide along the guide rails.

[0109] A first support member 92A is fixed to the front (first) side of the movable plate. Furthermore, a nut portion (not shown) is provided on the back (second) side of the movable plate. This nut portion is screwed into a ball screw arranged approximately parallel to a pair of guide rails. A pulse motor (not shown) is connected to one end of the ball screw. When the pulse motor is rotated, the first support member 92A is raised and lowered along the Z-axis direction.

[0110] A first rotating mechanism 94A having a rotational drive source such as a motor is fixed to the first support member 92A. The rotational drive source is arranged so that its rotation axis is substantially parallel to the Z-axis. One end of a first arm 96A is attached to the first rotating mechanism 94A, which is arranged parallel to the X-axis and Y-axis directions.

[0111] A second rotating mechanism 94B is attached to the other end of the first arm 96A. The second rotating mechanism 94B includes a rotational drive source such as a motor, whose rotation axis is arranged substantially parallel to the Z-axis direction. One end of the second arm 96B is attached to the second rotating mechanism 94B, which is arranged parallel to the X-axis and Y-axis directions.

[0112] A third rotating mechanism 94C is attached to the other end of the second arm 96B. The third rotating mechanism 94C includes a rotational drive source, such as a motor, whose rotation axis is arranged substantially parallel to the Z-axis. A second metal support 92B is attached to the third rotating mechanism 94C. Furthermore, a replacement device 100 for replacing cutting tools 36, 52, etc. is attached to the second support 92B.

[0113] The replacement device 100 is arranged at a position (retracted position) adjacent to the base plate 88. When the cutting blades 36, 52, etc. are replaced, the moving unit 84 is driven and the replacement device 100 is arranged above the base 4 (replacement position). Figure 5 It is a perspective view showing the replacement unit 76 in which the replacement device 100 is arranged at the replacement position.

[0114] The replacement device 100 is raised and lowered along the Z-axis by the lifting mechanism 86 and moved along a plane (horizontal plane) parallel to the X-axis and Y-axis by the multi-jointed arm 90. In other words, the replacement device 100 is positioned at any position by the lifting mechanism 86 and the multi-jointed arm 90.

[0115] Next, a configuration example of the replacement device 100 will be described. Figure 6 : is a perspective view showing the replacement device 100. Figure 7 (A) is a side view showing the replacement device 100, Figure 7 (B) is a front view showing the replacement device 100. Figure 7 In (B), the illustration of the connecting parts 114a and 114b described later is omitted. Figure 6 The structure of the replacement device 100 will be described.

[0116] The replacement device 100 has a cutting tool 36, 52 and a nut 48, 64 (see Figure 2 and Figure 3 ) is mounted and unmounted. In addition, the mounting and unmounting unit 102 is connected to a rotating mechanism 104 that rotates the mounting and unmounting unit 102.

[0117] The rotating mechanism 104 includes a rotating portion (shaft) 106 connected to the detachable unit 102, and a rotational drive source (not shown), such as a motor, that rotates the rotating portion 106 about a rotation axis 106a, a straight line passing through the interior of the rotating portion 106. The rotational drive source rotates the rotating portion 106 about the rotation axis 106a in two directions (a first direction and a second direction opposite to the first direction). When the rotating portion 106 rotates, the detachable unit 102 connected to the rotating portion 106 rotates about the rotation axis 106a in conjunction with the rotating portion 106.

[0118] The detachable unit 102 includes a frame 110 connected to the rotating portion 106 of the rotating mechanism 104. The frame 110 includes a pair of plate-shaped support members 112a and 112b made of metal or the like and arranged substantially parallel to each other.

[0119] Rectangular parallelepiped connecting members 114a and 114b are provided between the support members 112a and 112b. Connecting member 114a is fixed to one end of the support members 112a and 112b (on the rotating unit 106 side), and connecting member 114b is fixed to the other end of the support members 112a and 112b (on the side opposite the rotating unit 106). In other words, the support members 112a and 112b are connected to each other via connecting members 114a and 114b.

[0120] A nut rotating portion (nut attaching and detaching unit) 120 is mounted on the frame 110. The nut rotating portion 120 rotatably rotates the nuts 48 and 64 (see FIG. 1 ) for attaching the cutting blades 36 and 52 to the cutting unit 30. Figure 2 and Figure 3 The nut rotating portion 120 includes a nut holding portion 122 for holding the nuts 48 and 64 and a columnar rotating portion (shaft) 124 connected to the nut holding portion 122 (see Figure 7 (B)).

[0121] The rotating portion 124 is housed in a cylindrical housing 126. One end (front end) of the rotating portion 124 is exposed from the housing 126, and the nut holding portion 122 is connected to one end of the rotating portion 124. Furthermore, the other end (base end) of the rotating portion 124 is connected to a rotational drive source 128, such as an electric motor, which causes the rotating portion 124 to rotate (rotate) about a straight line passing through the interior of the rotating portion 124 as a rotation axis 124a.

[0122] The rotation drive source 128 rotates the rotating portion 124 in two directions (a first direction and a second direction opposite to the first direction) about the rotation axis 124a. When the rotating portion 124 rotates, the nut holding portion 122 connected to the rotating portion 124 rotates in conjunction with the rotating portion 124 about the rotation axis 124a.

[0123] In addition, an opening (not shown) is provided in the center of support member 112a, extending through the thickness of support member 112a. An opening (not shown) is provided in the center of support member 112b, extending through the thickness of support member 112b. Furthermore, one end of rotating portion 124, which is exposed from housing 126, is inserted into the opening of support member 112a, protruding from support member 112a toward the outside of housing 110. Furthermore, the other end of rotating portion 124, along with the end of housing 126, is inserted into the opening of support member 112b, protruding from support member 112b toward the outside of housing 110.

[0124] One end of the rotating portion 124 is connected to the nut holding portion 122 outside the frame 110. Furthermore, the other end of the rotating portion 124 is connected to the rotation drive source 128 outside the frame 110. Thus, the frame 110 is clamped between the nut holding portion 122 and the rotation drive source 128, and the nut rotating portion 120 is attached to the frame 110. Furthermore, the nut rotating portion 120 is arranged so that the rotation axis of the nut holding portion 122 (equivalent to the rotation axis 124a) is perpendicular to the rotation axis 106a of the rotating portion 106.

[0125] The nut holding portion 122 includes a cylindrical rotating member 130 fixed to one end of the rotating portion 124. The rotating member 130 is biased by a spring or the like toward the side opposite to the support member 112a and moves toward the support member 112a when an external force is applied.

[0126] The rotating member 130 has a front surface 130a located on the opposite side of the supporting member 112a. In addition, the rotating member 130 is provided with a plurality of protruding portions (in the direction of the rotation direction) protruding from the front surface 130a at approximately equal intervals along the circumference of the front surface 130a. Figure 6 There are 4 of them) retaining pins 132.

[0127] The retaining pin 132 and the through hole 48b of the nut 48 (see Figure 2 ) or the through hole 64b of the nut 64 (see Figure 3 ) are formed correspondingly and can be inserted into the through holes 48b, 64b. In addition, the number, size, configuration, etc. of the retaining pins 132 are appropriately set according to the through holes 48b, 64b.

[0128] Around the rotating member 130, a plurality of nuts 48 and 64 are arranged at substantially equal intervals along the circumferential direction of the rotating member 130 (in the embodiment of FIG. 1 ). Figure 6 The holding members 134 are four in number. The holding members 134 are each formed in a columnar shape, and a base end portion (one end side) of the holding member 134 is fixed to the outer peripheral surface of the rotating member 130.

[0129] The front end (the other end) of the gripping member 134 protrudes from the front surface 130a of the rotating member 130, and is formed with a claw portion 134a that is curved toward the center of the rotating member 130. Furthermore, the gripping member 134 is biased radially outward of the rotating member 130 by a spring or the like, and when an external force is applied, the claw portion 134a moves radially inward of the rotating member 130.

[0130] A hollow cylindrical cover 136 is provided around the rotating member 130. The cover 136 is configured to rotate independently of the rotating member 130 about the rotation axis 124a and is arranged to surround the rotating member 130 and the base ends of the plurality of gripping members 134. When the front surface 130a of the rotating member 130 is pressed toward the inside of the cover 136 (toward the support member 112a), a spring or the like biasing the rotating member 130 contracts, and the rotating member 130 is pressed into the inside of the cover 136 along with the plurality of gripping members 134.

[0131] When the rotating member 130 is pressed and pushed into the inner side of the cover 136, the front ends (claws 134a) of the multiple gripping members 134 contact and are pressed against the inner wall of the cover 136, causing the springs, etc., that bias the gripping members 134 to contract. As a result, the front ends of the multiple gripping members 134 move radially inward of the rotating member 130. The multiple gripping members 134 are then positioned so that their lengths extend along the inner wall of the cover 136 (a closed position). At this point, the claws 134a of the gripping members 134 are positioned, for example, radially inward of the rotating member 130 relative to the outer periphery of the rotating member 130.

[0132] On the other hand, when the pressure on the rotating member 130 is released, the rotating member 130 moves toward the outside of the cover 136, and the state in which the front ends of the gripping members 134 are pressed against the inner wall of the cover 136 is released. As a result, the front ends of the plurality of gripping members 134 move toward the radially outward side of the rotating member 130. The front ends of the plurality of gripping members 134 are then positioned radially outward of the rotating member 130 compared to the closed state (open state). At this time, the claws 134a of the gripping members 134 are, for example, positioned radially outward of the rotating member 130 relative to the outer periphery of the rotating member 130.

[0133] The outer circumference of the rotating member 130 is provided with a plurality (e.g., four) of pins 138 that protrude from the outer circumference of the rotating member 130. Furthermore, the cover 136 is provided with a plurality (e.g., four) of openings 136a that penetrate the cover 136 from the outer circumference to the inner circumference (inner wall). The distal ends of the pins 138 are inserted into the respective openings 136a.

[0134] The end portion of the opening 136a located opposite the support member 112a is formed in a stepped shape and includes a first pin receiving portion 136b and a second pin receiving portion 136c. The second pin receiving portion 136c is arranged at a position farther from the front surface 130a of the rotating member 130 than the first pin receiving portion 136b (on the support member 112a side).

[0135] In the initial state of the nut holding portion 122, the pin 138 is in contact with the first pin receiving portion 136b. Furthermore, when the rotating member 130 is pressed into the inner side of the cover 136, the pin 138 separates from the first pin receiving portion 136b. When the rotating portion 124 is rotated in the first direction in this state, the pin 138 moves from the first pin receiving portion 136b to the second pin receiving portion 136c.

[0136] Then, when the rotation member 130 is released from the pressure, the pin 138 contacts the second pin receiving portion 136c and is supported by the second pin receiving portion 136c. Thus, the rotation member 130 is kept pressed into the inner side of the cover 136, and the plurality of holding members 134 are kept in the closed state.

[0137] On the other hand, when the rotating member 130, which is pressed into the inner side of the cover 136, is further pressed and pushed into the inner side of the cover 136, the pin 138 separates from the second pin receiving portion 136c. When the rotating portion 124 is rotated in the second direction opposite to the first direction in this state, the pin 138 moves from the second pin receiving portion 136c side to the first pin receiving portion 136b side.

[0138] Then, when the pressing of the rotating member 130 is released, the pin 138 contacts the first pin receiving portion 136b and is supported by the first pin receiving portion 136b. As a result, the rotating member 130 is pushed out from the inside of the cover 136, and the plurality of holding members 134 are opened.

[0139] The nut rotating portion 120 holds and rotates the nuts 48 and 64. Specifically, first, the front surface 130a of the rotating member 130 contacts the nuts 48 and 64 so that the holding pin 132 is inserted into the through hole 48b of the nut 48 (see FIG. Figure 2 ) or the through hole 64b of the nut 64 (see Figure 3 When the rotating member 130 is pressed into the inner side of the cover 136 in this state, the plurality of gripping members 134 are closed, and the claws 134 a come into contact with the outer peripheral surfaces of the nuts 48 and 64 to grip the nuts 48 and 64 .

[0140] In a state where the nuts 48 and 64 are held by the plurality of gripping members 134, when the rotating portion 124 (see Figure 7When (B)) is rotated, the rotating member 130 connected to the rotating portion 124 is rotated, and the nuts 48 and 64 held by the holding member 134 are also rotated.

[0141] By holding and rotating the nuts 48 and 64 using the nut rotating portion 120 , the nuts 48 and 64 can be automatically removed and tightened when replacing the cutting blades 36 and 52 attached to the cutting unit 30 .

[0142] For example, when the nut 48 (see FIG. 1 ) is mounted on the mounting flange 42 of the cutting unit 30, Figure 2 ) is removed, first, the lifting mechanism 86 and the multi-jointed arm 90 (see Figure 4 and Figure 5 ) moves the replacement device 100 through the entrance 28a of the processing chamber 28 (refer to Figure 1 ) and the replacement device 100 is arranged inside the processing chamber 28. Then, the detachable unit 102 is rotated by the rotating mechanism 104 so that the nut holding portion 112 and the mounting flange 42 face each other.

[0143] Then, the nut holding portion 112 is moved toward the mounting flange 42. As a result, the front surface 130a of the rotating member 130 is pressed against the nut 48 mounted on the mounting flange 42. At this time, the plurality of holding pins 132 of the rotating member 130 are inserted into the through-holes 48b of the nut 48.

[0144] Then, the rotating member 130 is pressed by the nut 48 and pushed into the inner side of the cover 136 , and the plurality of gripping members 134 are closed.

[0145] Next, the rotating portion 124 (see Figure 7 (B)) rotates the rotating member 130 about the rotation axis 124a in the first direction (the direction for loosening the nut 48). As a result, the nut 48, which is gripped by the plurality of gripping members 134, rotates and loosens, and is removed from the boss portion 46 of the mounting flange 42. Furthermore, when the rotating member 130 rotates in the first direction while being pressed into the inner side of the cover 136, the pin 138 moves from the first pin receiving portion 136b to the second pin receiving portion 136c.

[0146] Then, the nut holding portion 112 is moved away from the mounting flange 42. At this time, the pin 138 is supported by the second pin receiving portion 136c, and the rotating member 130 is maintained in a state of being pressed into the inner side of the cover 136. As a result, the multiple holding members 134 are maintained in a state of holding the nut 48 (closed state).

[0147] On the other hand, when attaching the nut 48 to the mounting flange 42 of the cutting unit 30, first, the nut holding portion 112 holding the nut 48 is positioned opposite the mounting flange 42, and the nut holding portion 112 is moved toward the mounting flange 42. As a result, the nut 48 held by the nut holding portion 112 is positioned at the front end of the boss portion 46 of the mounting flange 42, and the rotating member 130 is pressed into the inner side of the cover 136.

[0148] Next, the rotating portion 124 (see Figure 7 (B)) rotates the rotating member 130 about the rotation axis 124a in a second direction (the direction in which the nut 48 is tightened), which is opposite to the first direction. As a result, the nut 48 rotates and is tightened against the threaded portion 46a of the boss 46 formed on the mounting flange 42, thereby being mounted on the mounting flange 42. Furthermore, when the rotating member 130 rotates in the second direction while being pressed into the inner side of the cover 136, the pin 138 moves from the second pin receiving portion 136c to the first pin receiving portion 136b.

[0149] Then, the nut holding portion 112 is moved away from the mounting flange 42. At this time, the pin 138 is supported by the first pin receiving portion 136b. Then, the rotating member 130 is pushed out from the inside of the cover 136, and the plurality of gripping members 134 release the grip on the nut 48.

[0150] Furthermore, the method for maintaining the multiple gripping members 134 in the closed or open state is not limited to the method described above. For example, instead of providing the pin 138 on the rotating member 130, an actuator that moves the cover 136 in the height direction of the cover 136 may be provided on the detachable unit 102. For example, the actuator may be formed of an air cylinder or the like and fixed to the support member 112a. By moving the cover 136 via this actuator, the multiple gripping members 134 can be freely switched between the closed and open states.

[0151] An annular member 140 made of metal or the like is provided between the support members 112a and 112b. The annular member 140 surrounds the housing 126 (rotating portion 124) without contacting the housing 126 and is disposed substantially parallel to the support members 112a and 112b.

[0152] The annular member 140 is connected to the supporting member 112a via a plurality of elastic bodies (elastic members) 142a, and is connected to the supporting member 112b via a plurality of elastic bodies (elastic members) 142b. That is, the annular member 140 is suspended by the elastic bodies 142a and 142b and is held in a state of not contacting the supporting members 112a and 112b (see Figure 7 (B)).

[0153] For example, the elastic bodies 142a and 142b are formed of elastic members such as springs and rubber. When an external force is applied to the annular member 140, the elastic bodies 142a and 142b expand and contract, causing the annular member 140 to move or rotate in any direction.

[0154] A retaining portion 150A (first retaining portion) and a retaining portion 150B (second retaining portion) are connected to the outer circumferential surface of the annular member 140 to retain the cutting tools 36 and 52. The retaining portions 150A and 150B are disc-shaped members made of resin, metal, or the like, and retain the cutting tools 36 and 52 on their circular front surfaces 150a facing the opposite side of the annular member 140. The retaining portions 150A and 150B are arranged so that the front surfaces 150a of the retaining portion 150A and the front surfaces 150a of the retaining portion 150B face the outside of the frame 110 and face each other across the frame 110.

[0155] The holding portions 150A and 150B are each arranged 90 degrees apart from the nut holding portion 122 in the circumferential direction (rotational direction) of the rotating portion 106 of the rotating mechanism 104. Furthermore, the nut holding portion 122, the front surface 150a of the holding portion 150A, and the front surface 150a of the holding portion 150B are arranged so as to face the side opposite to the rotation axis 106a of the rotating portion 106 while being separated from each other about the rotation axis 106a.

[0156] Next, a configuration example of the holding portions 150A and 150B will be described. Figure 8 (A) is a front view showing the holding portion 150A, Figure 8 (B) is a cross-sectional view showing the holding portion 150A. In addition, the structure and function of the holding portion 150A will be described below, but the structure and function of the holding portion 150B are also the same as those of the holding portion 150A.

[0157] The holding portion 150A has a disc-shaped frame 152 made of resin, metal, etc. The frame 152 has a front surface (first surface) 152a and a back surface (second surface) 152b that are substantially parallel to each other. The front surface 152a side of the frame 152 corresponds to the front surface 150a side of the holding portion 150A. A circular first groove (first recess) 152c is provided in the central portion of the front surface 152a side of the frame 152. In addition, the diameter of the first groove 152c is larger than the diameter of the front surface 38a of the base 38 of the cutting tool 36 (refer to FIG. 1 ). Figure 9 (A)) and the front face 62a of the pressing flange 62 (refer to Figure 9 (B)) has a larger diameter.

[0158] A circular second groove (second recess) 152d is provided at the center of the bottom of the first groove 152c. Furthermore, an annular third groove (third recess) 152e is formed at the bottom of the second groove 152d with a predetermined width along the outer circumference of the second groove 152d.

[0159] An annular elastic member 154 is embedded in the third groove 152e. The elastic member 154 is made of an elastically deformable material such as rubber or resin. The elastic member 154 includes a base 154a embedded within the third groove 152e and a pair of lips 154b protruding from the base 154a. One lip 154b is positioned along the radially outer sidewall of the third groove 152e relative to the frame 152. The other lip 154b is positioned along the radially inner sidewall of the third groove 152e relative to the frame 152.

[0160] The pair of lips 154b are inclined relative to the front face 152a of the frame body 152, separating from each other as they move away from the base 154a. Specifically, the pair of lips 154b are arranged in the width direction of the third groove 152e, extending from the inside toward the outside. Furthermore, the distal ends of the pair of lips 154b protrude from the front face 152a of the frame body 152 in the thickness direction of the frame body 152.

[0161] A plurality of through holes 154c are provided in the area of ​​the base 154a that overlaps with the space between the pair of lips 154b. Figure 8 As shown in FIG. 1A , six through holes 154c are formed in the base 154a at approximately equal intervals along the circumferential direction of the elastic member 154. One end of the through hole 154c opens on the front surface 152a side of the frame body 152, and the other end of the through hole 154c is connected to the annular fourth groove (fourth recess) 152f provided at the bottom of the third groove 152e.

[0162] Fourth groove 152f is connected to one end of a flow path 156 formed by a tube, pipe, or the like. Furthermore, the other end of flow path 156 is connected to a suction source 160 via valve 158. For example, valve 158 is a solenoid valve whose opening and closing is electrically controlled, and suction source 160 is an ejector. When valve 158 is opened, negative pressure from suction source 160 acts on the space between the pair of lips 154b via fourth groove 152f of frame 152 and through-hole 154c of elastic member 154.

[0163] In addition, a pressure measuring device (pressure sensor) 162 for measuring the pressure of the flow path 156 is connected to the region between the fourth groove 152f and the valve 158 in the flow path 156. For example, the pressure measuring device 162 measures the negative pressure inside the flow path 156 based on the gauge pressure (the difference between the absolute pressure and the atmospheric pressure). The pressure value of the flow path 156 measured by the pressure measuring device 162 is output to the control unit 82 (see Figure 1 ) and stored in the storage unit 82b.

[0164] The holding portion 150A holds the cutting tool. When the cutting tool is replaced, the cutting tool (used cutting tool) and the unused cutting tool (replacement cutting tool) attached to the cutting unit 30 are held by the holding portion 150A. The holding portion 150A can hold either a hub-type cutting tool or a washer-type cutting tool.

[0165] Figure 9 (A) is a cross-sectional view of the holding portion 150A that holds the hub-type cutting tool 36. To hold the cutting tool 36 using the holding portion 150A, valve 158 is first opened to apply negative pressure from the suction source 160 to the space between the pair of lips 154b. Then, with the front surface 150a of the holding portion 150A facing the cutting tool 36, the holding portion 150A is brought closer to the base 38 of the cutting tool 36.

[0166] When the front surface 38a of the base 38 contacts the front ends of the pair of lips 154b, the space between the pair of lips 154b is sealed and decompressed by the negative pressure of the suction source 160. Thus, the cutting tool 36 is sucked and held by the holding portion 150A.

[0167] Figure 9 (B) is a cross-sectional view showing the holding portion 150A that holds the washer-type cutting tool 52. When the holding portion 150A holds the cutting tool 52, the holding portion 150A suctions the front surface 62a side of the pressing flange 62 and suctions the cutting tool 52 through the through-hole 62d provided in the pressing flange 62.

[0168] Specifically, valve 158 is first opened to apply negative pressure from suction source 160 to the space between the pair of lips 154b. Then, with the front surface 150a of holding portion 150A facing the pressing flange 62 and cutting tool 52, holding portion 150A is brought closer to pressing flange 62.

[0169] When the front surface 62a of the pressing flange 62 contacts the front ends of the pair of lips 154b, the space between the pair of lips 154b is sealed and decompressed by the negative pressure of the suction source 160. Thus, the pressing flange 62 is sucked and held by the holding portion 150A.

[0170] Furthermore, the negative pressure of the suction source 160 also acts on the cutting blade 52 via the plurality of through-holes 62d provided in the pressing flange 62. Thus, the cutting blade 52 is sucked and held by the holding portion 150A via the pressing flange 62.

[0171] The through hole 62d is formed to open in the area corresponding to the elastic member 154 on the front surface 62a of the pressing flange 62 and in the area in contact with the cutting blade 52 on the back surface 62b of the pressing flange 62. The diameter of the through hole 62d is set to about 1 mm, for example.

[0172] However, the holding portion 150A may also hold only the pressing flange 62. Specifically, as described above, the holding portion 150A suctions the pressing flange 62, which is not in contact with the cutting tool 52. In this case, although the negative pressure of the suction source 160 leaks slightly through the through-hole 62d of the pressing flange 62, the pressing flange 62 can be held by appropriately controlling the suction force of the suction source 160.

[0173] As described above, the holding portion 150A holds the cutting blades 36 and 52. Furthermore, by measuring the pressure of the flow path 156 using the pressure measuring device 162, it can be determined whether the holding portion 150A is properly holding a desired object.

[0174] For example, when the cutting tool 36 is held by the holding portion 150A (see Figure 9 (A)), the space between the pair of lips 154b is sealed. Therefore, the pressure P of the flow path 156 in the state where the holding portion 150A holds the cutting tool 36 is kept constant. a1 The pressure P of the flow path 156 in the state where the holding portion 150A is not in contact with the cutting blade 36 is a2 (>P a1 Therefore, by comparing the pressure measured by the pressure measuring device 162 with the preset threshold value P tha (P a1 <P tha <P a2 ), it is possible to determine whether the cutting tool 36 is held by the holding portion 150A.

[0175] In addition, when the cutting blade 52 is held by the holding portion 150A (see Figure 9(B)), the pressure P of the flow path 156 in the state where the holding portion 150A is sucking and holding the cutting tool 52 and the pressing flange 62 b1 The pressure P of the flow path 156 in the state where the holding portion 150A only sucks and holds the pressing flange 62 is b2 (>Pressure P b1 ), and the pressure P of the flow path 156 in a state where the holding portion 150A does not hold the cutting blade 52 and the pressing flange 62. b3 (>P b2 )different.

[0176] Therefore, by comparing the pressure measured by the pressure measuring device 162 with the preset threshold value P thb1 (P b1 <P thb1 <P b2 ) and threshold P thb2 (P b2 <P thb2 <P b3 ), it is possible to determine whether the cutting tool 52 and the pressing flange 62 are held by the holding portion 150A.

[0177] In the control unit 82 (refer to Figure 1 ) is stored in advance in the storage unit 82b of the tha 、P thb1 、P thb2 ), the above-mentioned determination can be performed, for example, by causing the processing unit 82a to execute a process of comparing the pressure measured by the pressure measuring device 162 with a threshold value. In this case, the storage unit 82b stores a program describing the process of comparing the measured pressure with the threshold value. The processing unit 82a then accesses the storage unit 82b, reads out the program, and executes it, thereby comparing the measured pressure with the threshold value.

[0178] As described above, the holding portion 150A holds the cutting blades 36 and 52. The procedure for holding the cutting blades 36 and 52 by the holding portion 150B is the same as that for the holding portion 150A.

[0179] In addition, a cylindrical fifth groove (fifth recess) 152g is provided in the area on the inner side of the fourth groove 152f on the front side 152a of the frame 152. The diameter of the fifth groove 152g is set to be larger than the boss portion 46 of the mounting flange 42 (see FIG. Figure 2 ) and the diameter of the third boss portion 60c of the mounting flange 54 (see Figure 3Thus, when the holding portions 150A and 150B are brought close to the cutting unit 30, the front ends of the bosses 46 and 60 are inserted into the fifth groove 152g, thereby preventing the holding portions 150A and 150B from contacting the cutting unit 30.

[0180] Furthermore, the retaining portions 150A and 150B do not necessarily need to be provided with the elastic member 154. For example, two O-rings having different diameters may be arranged concentrically in place of the elastic member 154. In this case, one O-ring is provided along the side wall of the third groove 152e located radially outward of the frame body 152, and the other O-ring is provided along the side wall of the third groove 152e located radially inward of the frame body 152.

[0181] Here, as Figure 6 and Figure 7 As shown in FIG. 1B , the holding portions 150A and 150B are connected to the rotating portion 106 of the rotating mechanism 104 via elastic bodies 142a and 142b. Thus, the holding portions 150A and 150B are maintained in a state where the front surface 150a can tilt. In other words, when an external force is applied to the holding portions 150A and 150B, the front surface 150a can tilt freely in any direction.

[0182] Therefore, when the cutting tool 36 and the pressing flange 62 come into contact with the front surface 150a of the holding portions 150A and 150B, the holding portions 150A and 150B are tilted so that the front surface 150a is arranged parallel to the front surface 38a of the cutting tool 36 and the front surface 62a of the pressing flange 62. As a result, the front surface 150a of the holding portions 150A and 150B appropriately come into contact with the cutting tool 36 and the pressing flange 62, and the cutting tool 36 and the pressing flange 62 are securely attracted and held.

[0183] The cutting tools 36 and 52 are replaced by the replacement device 100. The cutting tools 36 and 52 are replaced by removing the used cutting tools 36 and 52 mounted on the cutting unit 30 and then mounting the replacement cutting tools 36 and 52 on the cutting unit 30. The replacement cutting tools 36 and 52 are stored in advance in the cutting device 2.

[0184] Figure 10 (A) is a perspective view showing a storage unit 200 for storing the cutting tools 36, 52, etc. for replacement. The storage unit 200 has a mounting portion (mounting table) 202 for mounting the cutting tools 36, 52, etc. For example, the mounting portion 202 is formed to be aligned with the frame 15 (refer to FIG. 1 ) that supports the workpiece 11. Figure 1 ) is a plate-like component of the same shape, and the upper surface of the mounting portion 202 constitutes a flat mounting surface 202a for mounting cutting tools 36, 52, etc.

[0185] A plurality of tool storage portions 204 for storing cutting tools are provided on the mounting surface 202a of the mounting portion 202. For example, a plurality of tool storage portions 204 (tool storage portions 204A) for storing hub-type cutting tools 36 and a plurality of tool storage portions 204 (tool storage portions 204B) for storing washer-type cutting tools 52 are respectively arranged on the mounting surface 202a.

[0186] Figure 10 (B) is a perspective view showing the tool storage portion 204. For example, the tool storage portion 204 is composed of a plastic housing (tool case) that stores the cutting tools 36 and 52, and is fixed to the mounting surface 202a of the mounting portion 202. Figure 10 In (B), as an example, a tool storage portion 204A (tool case) having a circular bottom surface and an annular side wall protruding from the outer periphery of the bottom surface in a direction perpendicular to the bottom surface is shown.

[0187] A columnar projection 204a protruding from the bottom surface is provided in the center of the tool storage portion 204A. When the cutting tool 36 is stored in the tool storage portion 204A, the cutting tool 36 is positioned within the tool storage portion 204A such that the projection 204a is inserted into the opening 36a of the cutting tool 36. Similarly, when the cutting tool 52 is stored in the tool storage portion 204B, the cutting tool 52 is positioned within the tool storage portion 204B such that the projection 204a is inserted into the opening 52a of the cutting tool 52.

[0188] A pressing flange storage portion 206 for storing the pressing flange 62 is provided on the placement surface 202a of the placement portion 202. The pressing flange storage portion 206 is configured similarly to the tool storage portion 204, and the pressing flange 62 is stored in the pressing flange storage portion 206.

[0189] Furthermore, tools other than parts used for replacing the cutting tools 36 and 52 may be stored in the mounting portion 202. For example, a plate storage portion (trimming plate storage portion) 208 and a plate storage portion (inspection plate storage portion) 210 are provided on the mounting surface 202a of the mounting portion 202. The plate storage portion 208 stores a plate-shaped plate (trimming plate) 19 used for trimming the cutting tools 36 and 52, and the plate storage portion 210 stores a plate-shaped plate (inspection plate) 21 used for inspecting the cutting tools 36 and 52.

[0190] When machining the workpiece 11 using the cutting tools 36 and 52, dressing is performed to intentionally wear the tip of the cutting tools 36 and 52 for purposes such as correcting the shape of the cutting tools 36 and 52 or ensuring their sharpness. This dressing is performed by causing the cutting tools 36 and 52 to cut into the plate 19. For example, the plate 19 is formed by fixing abrasive grains such as green corundum (GC) and white corundum (WA) with a bonding material such as a resin bond or a vitrified bond.

[0191] During dressing, the bonding material of the cutting tools 36 and 52 contacts the plate 19 and wears away, causing the cutting tools 36 and 52 to be shaped concentrically with the spindle 34 (rounded), and the abrasive grains to be appropriately exposed from the bonding material (sharpened). Using the thus-dressed cutting tools 36 and 52 improves the machining accuracy of the workpiece 11.

[0192] Furthermore, while the workpiece 11 is being machined using the cutting tools 36 and 52, the cutting tools 36 and 52 may be caused to penetrate the plate 21 to inspect their shape or correct their position. For example, by penetrating the plate 21 with the cutting tools 36 and 52 and observing the groove (cut groove) formed in the plate 21, it is possible to inspect whether the tip of the cutting tools 36 and 52 has the desired shape. Furthermore, based on the length of the cut groove formed in the plate 21, the position of the lower end of the cutting tools 36 and 52 (the penetration depth) is calculated, and the height of the cutting tools 36 and 52 is adjusted.

[0193] As the plate 21 , for example, a plate-shaped member made of silicon (silicon plate) is used. However, the material of the plate 21 is not limited as long as it can be cut by the cutting tools 36 and 52 . Examples of the material of the plate 21 are the same as those of the workpiece 11 .

[0194] The cutting tools 36, 52 cut the plates 19, 21 on a pair of sub-tables 26 (see Figure 1 ) is carried out while holding the plates 19 and 21. In this case, one sub-table 26 holds the plate 19 or plate 21 to be cut by the cutting tool 36 or 52 mounted on one cutting unit 30, while the other sub-table 26 holds the plate 19 or plate 21 to be cut by the cutting tool 36 or 52 mounted on the other cutting unit 30. That is, a pair of sub-tables 26 are provided corresponding to a pair of cutting units 30.

[0195] In addition, identification marks containing information related to the various tools stored on the loading portion 202 may be added. Figure 10The cutting tool 36 shown in FIG. 3B has an identification mark 212 attached thereto. Examples of the identification mark 212 include a barcode and a QR code. Furthermore, the identification mark 212 may be printed directly on the cutting tool 36 or a sticker printed with the identification mark 212 may be attached to the cutting tool 36.

[0196] For example, the identification mark attached to cutting tools 36 and 52 includes information such as the type of cutting tools 36 and 52 (hub type or washer type), outer diameter, inner diameter, thickness, abrasive material and particle size, bonding material, and serial number. Furthermore, the identification mark attached to plate 19 includes information such as the size, shape, abrasive material and particle size, bonding material, and serial number of plate 19. Furthermore, the identification mark attached to plate 21 includes information such as the size, shape, material, and serial number of plate 19.

[0197] The identification marks added to the cutting blades 36, 52, etc. are read by a reading unit provided in the cutting device 2. The reading unit is appropriately selected according to the type of the identification mark, and for example, a camera, a barcode reader, etc. can be used.

[0198] For example, the imaging unit 70 (see FIG. Figure 1 ) also functions as a reading unit, and the identification mark is read by the imaging unit 70. However, the reading unit may be separated from the imaging unit 70 and independently provided in the cutting device 2.

[0199] The information read by the reading unit is input to the control unit 82 (refer to Figure 1 ) and stored in the storage unit 82b. Then, when performing replacement of the cutting tools 36, 52, the control unit 82 refers to the information stored in the storage unit 82b and determines the object held by the replacement unit 76.

[0200] The storage unit 200 is stored in a container 8 (see Figure 1 ) In addition, the storage unit 200 is pulled out from the container 8 by the first conveying unit 72 and conveyed onto the cover 78 in the closed state.

[0201] In addition, an openable and closable door (not shown) is provided on the cleaning unit 12 side of the container 8. When the storage unit 200 is taken out of the container 8, the elevator 6 is raised and lowered so that the height position of the container 8 matches the height position of the pair of guide rails 16.

[0202] The shape of the placement portion 202 of the storage unit 200 corresponds to the shape of the frame 15 supporting the workpiece 11. Therefore, the storage unit 200 can be transferred to the closed cover 78 by the same operation as when transferring the frame unit 17 to the chuck table 22.

[0203] The storage unit 200 is not limited to being placed on the cover 78. For example, the storage unit 200 may be placed on the pair of guide rails 16. Alternatively, the cover 78 may be omitted and the storage unit 200 may be placed on the chuck table 22.

[0204] Next, a specific example of a method for replacing the cutting tools 36 and 52 of the cutting unit 30 mounted on the cutting device 2 will be described. Figure 2 ) is explained below.

[0205] First, the replacement cutting tool 36 is placed on the loading surface 202a of the loading portion 202 of the storage unit 200 (preparation step). Specifically, the replacement cutting tools 36 (unused cutting tools 36) are stored in the plurality of tool storage portions 204A fixed to the loading surface 202a of the loading portion 202. The storage unit 200 replenished with the replacement cutting tools 36 is stored in the container 8 (refer to Figure 1 )middle.

[0206] Then, the storage unit 200 is pulled out of the container 8 by the first transport unit 72 and transported to the closed cover 78. Thus, the replacement cutting tool 36 is held by the cover 78. As described above, the storage unit 200 may also be arranged on the pair of guide rails 16 or on the chuck table 22.

[0207] Next, the replacement cutting tool 36 placed on the placement surface 202 a of the placement portion 202 is held by the holding portion 150B of the replacement device 100 (replacement cutting tool holding step). Figure 11 (A) is a schematic diagram showing the replacement device 100 in the replacement cutting tool holding step.

[0208] In the replacement cutting tool holding step, first, the lifting mechanism 86 and the multi-jointed arm 90 (see Figure 4 and Figure 5 ) moves the replacement device 100 and places it on the placement portion 202 held by the cover 78 or the like. Figure 6 The frame body 110 is rotated so that the holding portion 150B faces the placement surface 202a of the placement portion 202.

[0209] Next, the replacement device 100 is lowered to bring the holding portion 150B into contact with the replacement cutting blade 36 placed on the placement surface 202a of the placement portion 202. The replacement cutting blade 36 is then suctioned and held by the holding portion 150B.

[0210] Then, the replacement device 100 is raised to move the holding portion 150B in a direction away from the placement surface 202a of the placement portion 202. As a result, the cutting tool 36 for replacement is lifted by the holding portion 150B.

[0211] Next, the nut 48 attached to the mounting flange 42 of the cutting unit 30 is removed from the mounting flange 42 (nut removing step). Figure 11 (B) is a schematic diagram showing the replacement device 100 in a nut removing step.

[0212] In the nut removal step, first, the nut is removed by the lifting mechanism 86 and the multi-jointed arm 90 (see Figure 4 and Figure 5 ) moves the replacement device 100 and places the replacement device 100 in the processing chamber 28 (refer to Figure 1 ) inside. In addition, the nut holding portion 122 of the replacement device 100 is placed opposite to the mounting flange 42 in a state where the cutting tool 36 and the nut 48 are mounted.

[0213] Then, the nut 48 mounted on the mounting flange 42 is held and rotated by the nut holding portion 122. Specifically, the nut 48 is held and rotated by the nut holding portion 122. Figure 6 etc.) while holding the nut 48, the rotating member 130 (see Figure 6 , etc.) to rotate the nut 48 in the first direction (the direction in which the nut 48 is loosened). As a result, the nut 48 is loosened and removed from the mounting flange 42.

[0214] Next, the nut holding portion 122 is separated from the mounting flange 42 (first retreat step). Figure 11 (C) is a schematic diagram showing the replacement device 100 in the first retraction step.

[0215] In the first retreat step, the multi-jointed arm 90 (see Figure 4 and Figure 5 ) The replacement device 100 is moved toward the side opposite to the mounting flange 42. As a result, the nut holding portion 122 moves in a direction away from the mounting flange 42 while holding the nut 48.

[0216] Next, the cutting tool 36 mounted on the mounting flange 42 of the cutting unit 30 is held by the holding portion 150A of the replacement device 100 (used cutting tool holding step). Figure 11 (D) is a schematic diagram showing the replacement device 100 in a used cutting tool holding step.

[0217] In the used cutting tool holding step, first, the rotating portion 106 (see Figure 6 etc.) is rotated so that the front side 150a of the holding portion 150A (see Figure 8 (A, etc.) is placed opposite the mounting flange 42. Then, the replacement device 100 is moved toward the mounting flange 42, and the holding portion 150A is brought into contact with the used cutting tool 36 mounted on the mounting flange 42. The used cutting tool 36 is then sucked and held by the holding portion 150A.

[0218] Next, the holding portion 150A is separated from the mounting flange 42 (second retreat step). Figure 12 (A) is a schematic diagram showing the replacement device 100 in the second retraction step.

[0219] In the second retreat step, the multi-jointed arm 90 (see Figure 4 and Figure 5 ) moves the replacement device 100 toward the side opposite to the mounting flange 42. As a result, the holding portion 150A moves away from the mounting flange 42 while holding the used cutting tool 36, thereby removing the used cutting tool 36 from the mounting flange 42.

[0220] Next, the replacement cutting tool 36 held by the holding portion 150B of the replacement device 100 is mounted on the mounting flange 42 (cutting tool mounting step). Figure 12 (B) is a schematic diagram showing the replacement device 100 in the cutting tool mounting step.

[0221] In the cutting tool mounting step, first, the rotating portion 106 (see Figure 6 etc.) is rotated so that the front side 150a (refer to Figure 8 The (A) side is opposite to the mounting flange 42.

[0222] Then, the replacement device 100 is moved toward the mounting flange 42 so that the boss portion 46 (see FIG. Figure 2 ) is inserted into the opening 36a of the replacement cutting tool 36 (see Figure 2 ) is arranged in the manner of . In this state, when the suction holding of the replacement cutting tool 36 by the holding portion 150B is released, the replacement cutting tool 36 is mounted on the mounting flange 42.

[0223] Next, the holding portion 150B is separated from the mounting flange 42 (third retreat step). Figure 12 (C) is a schematic diagram showing the replacement device 100 in the third retreat step.

[0224] In the third retreat step, the multi-jointed arm 90 (see Figure 4 and Figure 5 ) The replacement device 100 is moved to the side opposite to the mounting flange 42. As a result, the holding portion 150B moves in a direction away from the mounting flange 42 and moves away from the replacement cutting tool 36 mounted on the mounting flange 42.

[0225] Next, the nut 48 held by the nut holding portion 122 is mounted on the mounting flange 42 (nut mounting step). Figure 12 (D) is a schematic diagram showing the replacement device 100 in the nut mounting step.

[0226] In the nut mounting step, first, the rotating portion 106 of the rotating mechanism 104 (see Figure 6 The nut holding portion 122 holding the nut 48 is rotated to face the mounting flange 42. In addition, the replacement device 100 is moved toward the mounting flange 42 to position the nut 48 on the boss portion 46 of the mounting flange 42 (see FIG. Figure 2 ) at the front end portion.

[0227] Then, the rotating member 130 (see Figure 6 etc.) are rotated so that the plurality of holding members 134 (refer to Figure 6 The nut 48 held by the nut 48 is rotated in the second direction (the direction in which the nut 48 is tightened). As a result, the nut 48 is tightened on the boss portion 46 of the mounting flange 42 (see Figure 2 ) and mounted on the mounting flange 42. As a result, the cutting tool 36 is clamped by the mounting flange 42 and the nut 48 and fixed to the front end portion of the main shaft 34.

[0228] Through the above process, the cutting blade 36 mounted on the mounting flange 42 is replaced. Then, the used cutting blade 36 held by the holding portion 150A is placed in the blade storage portion 204A of the storage unit 200.

[0229] Furthermore, in the above-described steps, the mounting flange 42 and the replacement device 100 may be brought closer to and separated from each other by moving the cutting unit 30 (mounting flange 42). For example, in the first, second, and third retraction steps, the replacement device 100 and the mounting flange 42 may be separated from each other by moving the cutting unit 30 in the Y-axis direction away from the replacement device 100.

[0230] In addition, the above description has been given of the replacement of the cutting tool 36 mounted on the mounting flange 42, but the cutting tool 52 mounted on the mounting flange 54 (see Figure 3 ) is also replaced by the same steps. However, when replacing the cutting tool 52, as described above, the pressing flange 62 is held together with the cutting tool 52 by the holding portion 150A, 150B (refer to Figure 9 (B)). That is, instead of replacing the cutting blade 36, the cutting blade 52 and the pressing flange 62 are replaced.

[0231] When the cutting tool 52 is replaced, in the replacement cutting tool holding step, after the pressing flange 62 is held by the holding portion 150B, the cutting tool 36 is held by the holding portion 150B. Specifically, first, the holding portion 150B is brought into contact with the pressing flange storage portion 206 (see FIG. Figure 10 The pressing flange 62 in (A)) is opposed and the pressing flange 62 is held by the holding portion 150B.

[0232] Next, the holding portion 150B holding the pressing flange 62 is connected to the tool storage portion 204B (see FIG. Figure 10 The replacement cutting tool 52 in (A) is placed opposite to the pressing flange 62, and the holding portion 150B is used to hold the pressing flange 62. At this time, the cutting tool 52 is inserted through the through hole 62d (see Figure 9 (B)) and the negative pressure of the suction source 160 acting on the cutting tool 52 is maintained.

[0233] As described above, the cutting device 2 of this embodiment includes the replacement device 100 for replacing the cutting tools 36, 52 and the nuts 48, 64. Furthermore, the replacement device 100 has a structure in which the holding portions 150A, 150B for holding the cutting tools 36, 52 and the nut rotating portion 120 are connected to the common rotating portion 106, and the front surface 150a of the holding portion 150A, the front surface 150a of the holding portion 150B, and the nut holding portion 122 are arranged to face the side opposite to the rotation axis 106a of the rotating portion 106, while being separated from each other about the rotation axis 106a of the rotating portion 106.

[0234] When the replacement device 100 is used, the replacement device 100 can be significantly miniaturized compared to a conventional method in which the holding portions 150A and 150B and the nut rotating portion 120 are independently provided, and the front surface 150a of the holding portion 150A, the front surface 150a of the holding portion 150B, and the nut holding portion 122 are arranged so as to face the mounting flanges 42 and 54. As a result, the increase in size of the cutting device 2 is suppressed, and the degree of freedom in the layout of the components of the cutting device 2 is increased.

[0235] In addition, in the above description, the case where the replacement device 100 replaces the cutting tools 36 and 52 mounted on the cutting unit 30 is described, but the replacement object of the replacement device 100 is not limited to the cutting tools 36 and 52. For example, the replacement device 100 can also be configured on the sub-table 26 (refer to Figure 1 ) on the used plates 19, 21 (refer to Figure 10 Replacement of (A)).

[0236] When plate 19 is used to trim cutting tools 36 and 52, cutting grooves are formed in plate 19. When the cutting grooves are formed throughout plate 19, the used plate 19 is replaced with a replacement plate 19 (unused plate 19). Similarly, plate 21 used for inspecting cutting tools 36 and 52 is also replaced with a replacement plate 21 (unused plate 21) at a predetermined timing.

[0237] Here, the holders 150A and 150B of the replacement device 100 can hold not only the cutting tools 36 and 52 but also plate-shaped members such as the plates 19 and 21. Therefore, the replacement device 100 can replace the plates 19 and 21 placed on the sub-table 26.

[0238] Figure 13 (A) is a perspective view showing a holding portion 150A that holds a square plate 19 (plate 19A).

[0239] Figure 13 (A) shows a plate 19A of a size that can cover the entire front surface 152a side of the frame 152. Figure 13 In (A), the outline of the plate 19A is shown by a two-dot chain line.

[0240] When the plate 19A is held by the holding portion 150A, the pair of lips 154b of the elastic member 154 are brought into contact with the plate 19A. At this time, the holding portion 150A is configured so that the entire elastic member 154 is covered by the plate 19A. As a result, the space between the pair of lips 154b is sealed. Then, the suction source 160 (see FIG. 16) acts on the space between the pair of lips 154b. Figure 8 The negative pressure of (B)) attracts and holds the plate 19A.

[0241] In addition, the size and shape of the plate 19 held by the holding portion 150A are not limited to the above-described size and shape. Figure 13 (B) is a perspective view showing a holding portion 150A that holds the rectangular plate 19 (plate 19B). Figure 13(B) shows a plate 19B whose long side is longer than the diameter of the frame 152 and whose short side is shorter than the diameter of the frame 152. However, the short side of the plate 19B is longer than the diameter of the elastic member 154.

[0242] When the plate 19B is held by the holding portion 150A, the pair of lips 154b of the elastic member 154 are brought into contact with the plate 19B. At this time, the holding portion 150A is configured so that the entire elastic member 154 is covered by the plate 19B. As a result, the space between the pair of lips 154b is sealed. Then, the suction source 160 (see FIG. 16) acts on the space between the pair of lips 154b. Figure 8 The negative pressure of (B)) attracts and holds the plate 19B.

[0243] However, the manner in which the plate 19 is held by the holding portion 150A is not limited to the above. For example, the plate 19 may be held by the holding portion 150A without contacting the lip portion 154b. In this case, the lip portion 154b can be prevented from being worn away by contact between the plate 19 and the lip portion 154b.

[0244] For example, the holding portion 150A may be configured such that the front ends of the pair of lips 154b do not protrude from the front surface 152a of the frame body 152 but are arranged on the inner side of the first groove 152c relative to the front surface 152a. In this case, the holding portion 150A can hold the plate 19A ( Figure 13 (A)).

[0245] Specifically, the holding portion 150A is configured so that the entire first groove 152c is covered by the plate 19A. At this time, the plate 19A is supported by the front surface 152a of the frame 152 and does not contact the lip 154b. In this state, when the suction source 160 (see Figure 8 When the negative pressure of (B)) acts on the first groove 152c, the plate 19A is attracted and held.

[0246] In addition, the holding portion 150A may also have a mechanism for ejecting a gas such as air and holding the plate 19 in a non-contact manner by utilizing the Bernoulli effect. Figure 13 As shown in FIG. 1B , even when a plate 19B having a size and shape that cannot cover the entire first groove 152 c is used, the plate 19B can be held by the holding portion 150A without contacting the lip portion 154 b .

[0247] in addition, Figure 13 (A) and Figure 13 (B) shows a case where the plate 19 is held by the holding portion 150A, but the holding portion 150B can also hold the plate 19 in the same manner. In addition, similarly to the plate 19, the holding portions 150A and 150B can also hold the plate 21.

[0248] Next, a specific example of a plate replacement method for replacing a plate placed on the sub-table 26 of the cutting device 2 will be described. A method for replacing the plate 19 used for trimming the cutting tools 36 and 52 will be described below as an example.

[0249] First, in the storage unit 200 (refer to Figure 10 The replacement plate 19 is placed on the placement surface 202a of the placement portion 202 (preparation step). Specifically, the replacement plate 19 (unused plate 19) is stored in the plate storage portion 208 fixed to the placement surface 202a of the placement portion 202. The storage unit 200 replenished with the replacement plate 19 is stored in the container 8 (refer to Figure 1 ).

[0250] Then, the storage unit 200 is pulled out of the container 8 by the first transport unit 72 and transported to the closed cover 78. Thus, a replacement plate 19 is prepared on the cover 78. Alternatively, the storage unit 200 may be arranged on the pair of guide rails 16 or on the chuck table 22.

[0251] Next, the replacement plate 19 placed on the placement surface 202a of the placement portion 202 is held by the holding portion 150B of the replacement device 100 (replacement plate holding step). Figure 14 (A) is a schematic diagram showing the replacement device 100 in the replacement plate holding step.

[0252] In the replacement plate holding step, first, the lifting mechanism 86 and the multi-joint arm 90 (see Figure 4 and Figure 5 ) moves the replacement device 100 and places it on the placement portion 202 held by the cover 78 or the like. Figure 6 The frame body 110 is rotated so that the holding portion 150B faces the placement surface 202a of the placement portion 202.

[0253] Next, the replacement device 100 is lowered, and the holding portion 150B is brought into contact with the replacement plate 19 placed on the placement surface 202a of the placement portion 202. The replacement plate 19 is then suctioned and held by the holding portion 150B.

[0254] Then, the replacement device 100 is raised, and the holding portion 150B is moved in a direction away from the placement surface 202a of the placement portion 202. As a result, the replacement plate 19 is lifted by the holding portion 150B.

[0255] Next, the used plate 19 held by the sub-stage 26 is held by the holding portion 150A of the replacement device 100 (used plate holding step). Figure 14 (B) is a schematic diagram showing the replacement device 100 in the used plate holding step.

[0256] In the used plate holding step, first, the lifting mechanism 86 and the multi-joint arm 90 (see Figure 4 and Figure 5 ) moves the replacement device 100 and places the replacement device 100 on the sub-table 26 where the used plate 19 is placed. Figure 6 etc.) to rotate so that the holding portion 150A is opposite to the sub-workbench 26.

[0257] Then, the replacement device 100 is moved toward the sub-stage 26, and the holding portion 150A is brought into contact with the used plate 19 held by the sub-stage 26. Then, the used plate 19 is sucked and held by the holding portion 150A.

[0258] Next, the holding portion 150A is separated from the sub-stage 26 (retreat step). Figure 14 (C) is a schematic diagram showing the replacement device 100 in the retraction step.

[0259] In the retreat step, the lifting mechanism 86 (see Figure 4 and Figure 5 ) to raise the replacement device 100 and move the replacement device 100 toward the side opposite to the sub-table 26. As a result, the holding portion 150A moves away from the sub-table 26 while holding the used plate 19, and the used plate 19 is lifted.

[0260] Next, the replacement plate 19 held by the holding portion 150B of the replacement device 100 is placed on the sub-stage 26 (placing step). Figure 14 (D) is a schematic diagram showing the replacement device 100 in the placement step.

[0261] In the placement step, first, the rotating portion 106 (see Figure 6 The replacement plate 19 is rotated by the holder 150B (e.g., etc.) so that the holder 150B holding the replacement plate 19 faces the sub-table 26. The replacement device 100 is then moved toward the sub-table 26 to position the replacement plate 19 on the sub-table 26. Thereafter, the replacement plate 19 is placed on the plate 19 by releasing the suction holding of the replacement plate 19 by the holder 150B.

[0262] The above steps replace the plate 19 placed on the sub-table 26. The used plate 19 held by the holding portion 150A is placed in the plate storage portion 208 of the storage unit 200. While the above description focuses on the replacement of the plate 19, the replacement of the plate 21 can also be performed using the same steps when the plate 21 is placed on the sub-table 26.

[0263] In the above description, the storage unit 200 (see FIG. 1 ) having the placement portion 202 for placing various tools (cutting blades 36, 52, pressing flange 62, plates 19, 21, etc.) used in the cutting device 2 is described. Figure 10 (A)) is stored in the container 8 (refer to Figure 1 ) and is conveyed to cover 78 (refer to Figure 1 However, the storage method of the cutting tools 36, 52, etc. is not limited to this.

[0264] Figure 15 It is a perspective view showing the cutting device 2 provided with the storage unit 250 . Figure 15 The cutting device 2 shown has a storage unit 250 instead of the container 8 (see Figure 1 ), the storage unit 250 is provided near the replacement unit 76 and stores various tools used in the cutting device 2. For example, the storage unit 250 is arranged in a region adjacent to the opening 4b of the base 4.

[0265] The storage unit 250 stores the cutting tools 36, 52, the pressing flange 62, and the plates 19, 21 used in the cutting device 2 (see Figure 10 Specifically, the storage unit 250 includes a rotating placement portion (placement table) 252 on which various tools are placed.

[0266] Figure 16 2 is a perspective view showing a storage unit 250 having a rotating placement portion 252. The placement portion 252 is a plate-shaped member formed in a disk shape, for example, and the upper surface of the placement portion 252 constitutes a flat placement surface 252a on which various tools are placed.

[0267] A cutting tool or the like is placed on the placement surface 252a of the placement portion 252. Figure 16 , as an example, a case where the cutting blade 52 and the pressing flange 62 are placed on the placement surface 252 a of the placement portion 252 is shown.

[0268] A plurality of tool storage portions 254 for storing cutting tools 52 and a pressing flange storage portion 256 for storing pressing flanges 62 are fixed to the mounting surface 252a of the mounting portion 252. Figure 10The tool storage portion 204 and the pressing flange storage portion 206 shown in (A) are the same. The tool storage portion 254 and the pressing flange storage portion 256 are arranged at substantially equal intervals along the circumferential direction of the mounting portion 252.

[0269] A rotating portion (shaft) 258, which is rotated by power transmitted from a rotational drive source (not shown), such as a motor, is connected to the lower surface of the central portion of the mounting portion 252. When the rotating portion 258 is rotated by the rotational drive source, the mounting portion 252 rotates about a rotation axis that is substantially parallel to the Z axis.

[0270] A reading unit 260 is provided on the lower side of the mounting portion 252. The reading unit 260 reads an identification mark attached to the cutting tool 52 or the like. For example, an identification mark including information related to the cutting tool 52 is attached to the cutting tool 52 (see Figure 10 The cutting tool 52 is stored in the tool storage portion 254 so that the surface with the identification mark is opposite to the mounting surface 252a.

[0271] The reading unit 260 is composed of, for example, a visible light camera or an infrared camera, and reads the identification mark attached to the cutting tool 52 through the placement unit 252 and the tool storage unit 254. Therefore, the materials of the placement unit 252 and the tool storage unit 254 are selected according to the type of the reading unit 260.

[0272] For example, if the reading unit 260 is a visible light camera, the entirety or a portion of the placement portion 252 and the tool storage portion 254 may be formed from a member that transmits visible light. Specifically, a substrate formed from a transparent material such as plastic or glass (e.g., quartz glass or borosilicate glass) may be used as the placement portion 252. Furthermore, a housing formed from a transparent material such as plastic may be used as the tool storage portion 254.

[0273] However, the materials of the placement portion 252 and the tool storage portion 254 can be changed appropriately depending on the type of the reading unit 260. For example, when the reading unit 260 is an infrared camera, the placement portion 252 and the tool storage portion 254 are made of infrared-transmitting materials.

[0274] The reading unit 260 is arranged just below one tool storage unit 254. The reading unit 260 reads the identification mark attached to the cutting tool 52 stored in the tool storage unit 254 arranged just above the reading unit 260.

[0275] In addition, by rotating the mounting portion 252, the tool storage portion 254 disposed directly above the reading unit 260 can be changed. Thus, the identification mark attached to any cutting tool 52 mounted on the mounting portion 252 can be read. The information of the identification mark read by the reading unit 260 is output to the control unit 82 (refer to FIG. Figure 15 ).

[0276] Alternatively, the reading unit 260 may be provided on the upper side of the placement portion 252. In this case, the cutting blade 52 is stored in the blade storage portion 254 so that the surface to which the identification mark is attached is exposed upward.

[0277] For example, when the cutting tool 52 is replaced, the cutting tool 52 and the pressing flange 62 for replacement are prepared in the storage unit 250. Then, the replacement unit 76 uses the replacement device 100 to hold the cutting tool 52 and the pressing flange 62 for replacement stored in the storage unit 250 (see Figure 9 (B)).

[0278] At this time, the control unit 82 controls the replacement unit 76 based on the information included in the identification mark attached to the cutting tool 52, so that the specified cutting tool 52 is retained in the replacement device 100. In this way, the desired cutting tool 52 can be selected as the replacement cutting tool 52. Then, the used cutting tool 52 and the pressing flange 62 mounted on the cutting unit 30 are replaced with the replacement cutting tool 52 and the pressing flange 62 (see Figure 11 (A)~ Figure 12 (D)).

[0279] Alternatively, the mounting surface 252a of the mounting portion 252 may be fixed. Figure 10 In this case, the storage unit 250 also stores the replacement plates 19 and 21. The replacement unit 76 can hold the replacement plates 19 and 21 stored in the storage unit 250 and replace them with the used plates 19 and 21 placed on the sub-table 26 (see Figure 14 (A)~ Figure 14 (D)).

[0280] Furthermore, the structure, method, etc. of the above-described embodiment can be implemented with appropriate changes without departing from the scope of the purpose of the present invention.

Claims

1. A cutting device for cutting a workpiece using a cutting tool, characterized in that: The cutting device has: A cutting unit having a main shaft and a mounting flange, wherein the mounting flange is fixed to the front end of the main shaft and is used for mounting the cutting tool; a storage unit for storing the cutting tool for replacement; a replacement device for replacing the cutting tool mounted on the mounting flange with a replacement cutting tool; and a moving unit that moves the changing device, The replacement device has: Rotating part; a first holding portion for holding the cutting tool mounted on the mounting flange using a front side thereof; a second holding portion that holds the cutting tool for replacement on its front side; and a nut rotating portion having a nut holding portion for holding a nut for fixing the cutting tool to the mounting flange, and the nut rotating portion rotates the nut held by the nut holding portion, The rotating portion is connected to the first holding portion, the second holding portion, and the nut rotating portion, and rotates with a straight line passing through the interior of the rotating portion as a rotation axis. The front surface of the first holding portion, the front surface of the second holding portion, and the nut holding portion are arranged to face the side opposite to the rotation axis of the rotating portion in a state of being separated from each other around the rotation axis of the rotating portion. The first holding portion and the second holding portion are respectively arranged to be separated from the nut rotating portion by 90° in a circumferential direction around the rotation axis of the rotating portion.

2. The cutting device according to claim 1, characterized in that The first holding portion and the second holding portion are connected to the rotating portion via an elastic body so that the front surface of the first holding portion and the front surface of the second holding portion can tilt.

3. The cutting device according to claim 1 or 2, characterized in that: The nut rotating portion is arranged so that the rotation axis of the nut holding portion is along a direction perpendicular to the rotation axis of the rotating portion.

4. The cutting device according to claim 1 or 2, characterized in that: The cutting device further comprises a processing chamber, which forms a space for cutting the workpiece by the cutting unit. The replacement device is arranged outside the processing chamber, The processing chamber has an entrance and an exit through which the replacement device can pass.

5. The cutting device according to claim 1 or 2, characterized in that: The storage unit has: a mounting portion having a mounting surface for mounting a plurality of the cutting tools; and The reading unit reads an identification mark which is attached to the cutting tool placed on the placement surface and contains information related to the cutting tool.

6. The cutting device according to claim 1 or 2, characterized in that: The cutting device also has: a chuck table for holding the workpiece; and a sub-table that holds a plate used in dressing or inspection of the cutting tool, The storage unit includes a plate storage portion for storing the plate. The first holding portion and the second holding portion can hold the plate.

7. The cutting device according to claim 1 or 2, characterized in that: The first holding portion and the second holding portion attract and hold the cutting tool.

8. The cutting device according to claim 7, characterized in that The mounting flange has: a fixed mounting seat fixed to the front end portion of the spindle, comprising a flange portion and a boss portion, wherein the flange portion supports the cutting tool, and the boss portion protrudes from the flange portion and is inserted into the cutting tool; as well as A pressing flange has an opening for inserting the boss portion, and the pressing flange is fixed to the fixing mounting seat by the nut. The pressing flange has: Page 1; a second surface located on the opposite side of the first surface and in contact with the cutting tool; and a through hole extending from the first surface to the second surface, The first holding portion and the second holding portion suck the first surface side of the pressing flange to hold the pressing flange, and suck the cutting tool through the through hole to hold the cutting tool.

9. The cutting device according to claim 8, characterized in that The storage unit includes a pressing flange storage portion for storing the pressing flange.

10. A method for replacing a cutting tool, for replacing the cutting tool installed in the cutting device according to claim 1, characterized in that: The method for replacing the cutting tool has the following steps: a preparation step of placing the cutting tool for replacement on the placement surface of the storage unit having a placement surface capable of placing the cutting tool; a replacement cutting tool holding step of holding the replacement cutting tool placed on the placement surface by the second holding portion; a nut removal step, wherein the nut holding portion of the nut rotating portion is placed opposite to the mounting flange, the nut mounted on the mounting flange is held by the nut holding portion, and the nut is rotated to remove the nut from the mounting flange; a first retreat step of separating the nut rotating portion from the mounting flange; A cutting tool holding step in which the first holding portion is opposed to the mounting flange by rotating the rotating portion, and the cutting tool mounted on the mounting flange is held by the first holding portion; a second retreating step of separating the first retaining portion from the mounting flange; a cutting tool mounting step of rotating the rotating portion so that the second holding portion faces the mounting flange, and mounting the replacement cutting tool held by the second holding portion on the mounting flange; a third retreating step of separating the second holding portion from the mounting flange; and The nut mounting step includes rotating the rotating portion so that the nut holding portion of the nut rotating portion faces the mounting flange, rotating the nut held by the nut holding portion, and mounting the nut on the mounting flange.

11. A method for replacing a plate, for replacing the plate disposed in the cutting device according to claim 6, characterized in that: The method for replacing the board has the following steps: a preparation step of placing the plate for replacement on the placement surface of the storage unit having a placement surface capable of placing the plate; a replacement plate holding step of holding the replacement plate placed on the placement surface by the second holding portion; a used plate holding step of placing the first holding portion opposite to the sub-table and using the first holding portion to hold the used plate held by the sub-table; A retreat step of separating the first holding portion from the sub-workbench; as well as The placing step is to place the replacement plate held by the second holding portion on the sub-table by rotating the rotating portion so that the second holding portion faces the sub-table.

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