Eddy current sensor component and magnetic suspension molecular pump having the same

Abstract

The present invention provides an eddy current sensor component and a magnetic levitation molecular pump having the same, belonging to the technical field of magnetic levitation equipment, wherein the eddy current sensor component comprises: a mounting seat having a central through hole; a plurality of inductance probes symmetrically arranged around the central through hole, wherein the inductance probes are connected to the mounting seat in an adjustable radial position along the central through hole; the eddy current sensor component of the present invention, the inductance probe can be radially adjusted on the mounting seat, thereby facilitating accurate adjustment of the position of the inductance probe according to the shaft diameter to be monitored, thereby improving the accuracy of the eddy current sensor component and the range of adaptable shaft diameters.

Description

Technical Field

[0001] The present invention relates to the technical field of sensors, and in particular to an eddy current sensor component and a magnetic suspension molecular pump having the same. Background Art

[0002] The eddy current sensor consists of a sensor excitation wire and a metal body to be measured. According to Faraday's law of electromagnetic induction, when a sinusoidal alternating current passes through the sensor excitation wire, a sinusoidal alternating magnetic field will be generated around the wire, causing the metal conductor in the magnetic field to generate an induced current, which in turn generates a new alternating magnetic field. The new alternating magnetic field hinders the change of the original magnetic field, causing the equivalent impedance of the sensor wire to change.

[0003] In the prior art, for example, Chinese patent document CN208383054U discloses an eddy current sensor assembly, including a mounting seat and an inductance mechanism connected to the mounting seat, wherein the center of the mounting seat has a circular through hole, an inductance wire is wound around the inductance mechanism, and the inductance mechanism is used to monitor the displacement signals of a shaft passing through the circular through hole at four positions, thereby monitoring the operation of the shaft.

[0004] However, in the above solution, the inductor mechanism and the mounting seat are connected by a fixed method such as welding, which is not convenient for accurately determining the position of the inductor mechanism on the one hand, and is suitable for a narrow range and cannot monitor shafts of different specifications on the other hand. Summary of the invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect in the prior art that the installation position of the inductor mechanism cannot be accurately controlled, thereby providing an eddy current sensor component and a magnetic levitation molecular pump having the same.

[0006] In order to solve the above technical problems, the present invention provides an eddy current sensor assembly, comprising:

[0007] A mounting base having a central through hole;

[0008] The inductance probe comprises a plurality of inductance probes symmetrically arranged around the central through hole, and the radial positions of the inductance probes along the central through hole are adjustable and connected to the mounting seat.

[0009] Optionally, the mounting base has a mounting hole for inserting the inductance probe.

[0010] Optionally, an abutment piece for clamping the inductance probe is provided in the mounting hole of the mounting seat.

[0011] Optionally, the abutment member is connected to the mounting seat via a threaded structure, one end of the abutment member extends into the mounting hole, and the other end of the abutment member extends to the outside of the mounting seat.

[0012] Optionally, one end of the abutment member facing the outside of the mounting seat has a rotation limiting structure for cooperating with an operating member.

[0013] Optionally, the inductance probe is connected to the mounting base via threads.

[0014] Optionally, the mounting seat is an annular structure, the inductance probe is a columnar structure, and the tail of the inductance probe passes through the mounting seat and is connected to the outside of the mounting seat.

[0015] Optionally, a wire is wound around the head of the inductance probe, and the wire extends from the inside of the inductance probe to the tail of the inductance probe. An annular groove for routing the wire of the inductance probe is provided on the outer wall of the mounting seat.

[0016] Optionally, a plurality of notches for installation and positioning are provided at the bottom end of the mounting seat.

[0017] The present invention further provides a magnetic levitation molecular pump, comprising: an eddy current sensor assembly as described in any one of the above schemes, wherein the eddy current sensor assembly is sleeved on the rotating shaft of the magnetic levitation molecular pump.

[0018] The technical solution of the present invention has the following advantages:

[0019] 1. In the eddy current sensor assembly provided by the present invention, the inductive probe can be radially adjusted on the mounting base, thereby facilitating precise adjustment of the position of the inductive probe according to the shaft diameter to be monitored, thereby improving the accuracy of the eddy current sensor assembly and the range of adaptable shaft diameters.

[0020] 2. The eddy current sensor assembly provided by the present invention positions the inductive probe by means of an abutment member, thereby improving the stability of the eddy current sensor assembly during operation.

[0021] 3. The magnetic levitation molecular pump provided by the present invention has the advantages described in any one of the above schemes because it adopts the eddy current sensor assembly described in any one of the above schemes. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a stereoscopic view of an eddy current sensor assembly provided in an embodiment of the present invention.

[0024] Figure 2 for Figure 1 First zoomed in view of the mid-inductance probe.

[0025] Figure 3 for Figure 1 Schematic diagram of the front cross-section view at the location of the inductance probe.

[0026] Figure 4 for Figure 1 Second zoomed in view of the mid-inductance probe.

[0027] Figure 5 for Figure 1 Stereoscopic view of the inductance probe.

[0028] Figure 6 for Figure 1 The third magnified image of the mid-inductance probe.

[0029] Description of reference numerals:

[0030] 1. Mounting seat; 2. Inductance probe; 3. Notch; 4. Abutment; 5. Head; 6. Tail; 7. Annular groove. DETAILED DESCRIPTION

[0031] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0035] The eddy current sensor assembly provided in this embodiment can be used to monitor the shaft of a rotating machine, thereby measuring the radial displacement of the shaft during operation.

[0036] like Figure 1 As shown, a specific implementation of the eddy current sensor assembly provided in this embodiment includes: a mounting seat 1 having a central through hole; specifically, the mounting seat 1 can be a ring structure with a certain height. In addition, as an alternative implementation, the mounting seat 1 can also be other conventional shapes that are convenient for installation.

[0037] like Figure 1 As shown, the eddy current sensor assembly provided in this embodiment also includes: an inductance probe 2, which is connected to the mounting base 1. Specifically, the inductance probe 2 is screwed on the inner wall of the mounting base 1 through a thread, and the inductance probe 2 has four, and the four inductance probes 2 are symmetrically arranged around the central through hole of the mounting base 1; in addition, as a replaceable implementation manner, the inductance probe 2 can also be two, three or more, and the multiple inductance probes 2 are symmetrically arranged around the central through hole of the mounting base 1.

[0038] In addition, as an alternative embodiment, the inductance probe 2 can also be installed on the mounting base 1 in other ways besides threaded connection, such as snap connection, etc., so that the inductance probe 2 can be adjusted along the radial position of the central through hole to adapt to the shaft diameter to be monitored.

[0039] like Figure 1 As shown, the bottom end of the mounting seat 1 is provided with a plurality of notches 3 for installation and positioning, and the notches 3 are arranged at intervals, and are used to be fixed on the rotating machinery through the notches 3. In addition, as an alternative embodiment, the notches 3 can be omitted, or replaced by other conventional positioning structures.

[0040] like Figure 1 , Figure 2 As shown, the mounting seat 1 has a mounting hole for inserting the inductance probe 2, and the mounting hole is connected to the inductance probe 2 through a fine thread. In addition, as an alternative embodiment, the inductance probe 2 can also be slidably matched with the mounting hole, and connected to the inductance probe 2 by setting a clamping structure in the mounting hole.

[0041] like Figure 3 , Figure 4As shown, the mounting hole of the mounting seat 1 has an abutment 4 for clamping the inductance probe 2, and the abutment 4 can be a top screw; the abutment 4 is vertically connected to the mounting seat 1 relative to the inductance probe 2 through a threaded structure, one end of the abutment 4 extends into the mounting hole, and the other end of the abutment 4 is connected to the outside of the mounting seat 1, and the end of the abutment 4 facing the outside of the mounting seat 1 has a rotation limit structure for cooperating with an operating member, and specifically, the rotation limit structure can be a hexagonal hole. In addition, as an alternative embodiment, the abutment 4 can be set on the mounting seat 1 by clamping, and the limit structure can be omitted.

[0042] like Figure 5 As shown, the inductance probe 2 is a columnar structure, and includes a head 5 and a tail 6. The head 5 has an annular groove for winding a wire, and the wire is wound around the annular groove to form a coil. The inside of the inductance probe 2 has a through hole for routing, and the wire extends from the inside of the inductance probe 2 to the tail 6 of the inductance probe 2.

[0043] like Figure 6 As shown, an annular groove 7 for routing the wire of the inductance probe 2 is provided on the outer wall of the mounting base 1, and the tail 6 of the inductance probe 2 passes through the mounting base 1 and communicates with the outside of the mounting base 1. The wire extending from the tail 6 of the inductance probe 2 is routed through the annular groove 7, so that the wire does not protrude from the mounting base 1.

[0044] In addition, this embodiment further provides a magnetic levitation molecular pump, comprising: the eddy current sensor assembly described in the above embodiment, wherein the eddy current sensor assembly is sleeved on the rotating shaft of the magnetic levitation molecular pump, so as to monitor the operating stability of the rotating shaft.

[0045] Obviously, the above embodiments are merely examples for clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the present invention.

Claims

1. An eddy current sensor assembly, characterized in that: include: The mounting seat (1) is an annular structure and has a central through hole; The inductance probe (2) is a columnar structure, having a plurality of probes symmetrically arranged around the central through hole, and the inductance probe (2) is connected to the inner side wall of the mounting seat (1) in an adjustable radial position along the central through hole; The mounting seat (1) has a mounting hole for inserting the inductance probe (2); the tail (6) of the inductance probe (2) passes through the mounting seat (1) and is connected to the outside of the mounting seat (1); an annular groove (7) for routing the wire of the inductance probe (2) is provided on the outer wall of the mounting seat (1); and a plurality of notches (3) for installation and positioning are provided at the bottom end of the mounting seat (1); The mounting hole of the mounting seat (1) has an abutment member (4) for clamping the inductance probe (2); the abutment member (4) is connected to the mounting seat (1) via a threaded structure, and one end of the abutment member (4) extends into the mounting hole.

2. The eddy current sensor assembly according to claim 1, characterized in that: The other end of the abutment member (4) extends toward the outside of the mounting seat (1).

3. The eddy current sensor assembly according to claim 2, characterized in that: One end of the abutment member (4) facing the outside of the mounting seat (1) has a rotation limiting structure for cooperating with an operating member.

4. The eddy current sensor assembly according to any one of claims 1 to 3, characterized in that: The inductance probe (2) is connected to the mounting seat (1) via threads.

5. The eddy current sensor assembly according to any one of claims 1 to 3, characterized in that: A wire is wound around the head (5) of the inductance probe (2), and the wire extends from the inside of the inductance probe (2) to the tail (6) of the inductance probe (2).

6. A magnetic levitation molecular pump, characterized in that: include: The eddy current sensor assembly according to any one of claims 1 to 5, wherein the eddy current sensor assembly is sleeved on the rotating shaft of the magnetic levitation molecular pump.

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