Leveling method and device for flexible material
By forming a sealed hollow part on the flexible material and injecting positive pressure gas, the problems of pressure damage and uneven stress during the flattening process of the flexible material are solved, achieving non-contact flattening and uniform fixation, and improving the flattening effect.
Patent Information
- Application Number
- CN202110874860.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-07-30
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2041-07-30
AI Technical Summary
Existing methods for leveling flexible materials are prone to causing damage or injury, and the leveling effect is poor, especially when using non-contact planar positioning and air gun spraying gas, which cannot effectively fix and apply force evenly.
A hollow positioning unit is used to fix the flexible material on the bearing platform. By injecting positive pressure gas into the hollow part, a uniform positive pressure is formed, which makes the flexible material flat, avoids direct contact, and ensures that each part is evenly stressed.
It achieves the goal of avoiding crushing or damage to flexible materials without contact, while improving the flatness effect, ensuring that the flexible materials are evenly stressed and fixed, making them suitable for subsequent testing.
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Figure CN113581893B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of flexible material processing, in particular to a flattening method and device for flexible material. BACKGROUND
[0002] In actual use, flexible material needs to be flattened before being detected. The existing flattening method for flexible material is to flatten the flexible material by rigid material, which may cause pressure injury or damage to the flexible material. To solve this problem, the industry usually looks for super-flexible film flattening products, but the flexible film is not rigid enough to effectively position, compress and shape the flexible material.
[0003] To solve the above problems, the inventor attempts to use a non-contact flattening method, which places the flexible material on the flat part of the bearing platform and performs vacuum suction treatment on the vacuum suction micro-holes in the bearing platform, intending to adsorb the flexible material from the end of the bearing platform away from the flexible material to achieve the effect of flattening the flexible material. However, it is found that this point suction method does not uniformly apply force to the flexible material, and the flattening effect is not good. In addition, the inventor also attempts to use an air gun to spray gas from the end of the flexible material away from the bearing platform, but finds that the gas in the air gun vibrates and cannot keep the flexible material fixed in the state of flattening. SUMMARY
[0004] To overcome the defects in the prior art, the embodiments of the present application provide a flattening method and device for flexible material, which solves the problems of pressure injury or damage to the flexible material and poor flattening effect.
[0005] The embodiments of the present application disclose a flattening method for flexible material, the flexible material including a detection part and a supplementary material part surrounding the periphery of the detection part, comprising the following steps: fixing the flexible material on a bearing platform with a positioning unit having a hollow part, the positioning unit being pressed on the supplementary material part, and the hollow part being correspondingly arranged with the detection part; closing the end of the hollow part away from the bearing platform to seal the hollow part; injecting a positive pressure gas into the hollow part to form a positive pressure on all surfaces, thereby flattening the detection part.
[0006] Further, the flexible material includes a PU film and a wafer arranged on the detection part of the PU film, and the pressure of the hollow part is set to 0.5-0.7MPA.
[0007] The embodiment of the present application also provides a flattening device for a flexible material, the flexible material comprising a detection part and an auxiliary material part surrounding the periphery of the detection part, the flattening device comprising: a bearing platform, the bearing platform having a planar part for the flexible material to be arranged thereon; a positioning unit, the positioning unit being arranged on the side of the auxiliary material part away from the planar part, the positioning unit having a hollow part penetrating in the direction perpendicular to the planar part, the hollow part being arranged corresponding to the detection part, the positioning unit being provided with an airflow channel penetrating from the hollow part to the side away from the hollow part; a sealing part, the sealing part being arranged on the side of the hollow part away from the bearing platform and sealing the hollow part; and a gas source, the gas source being in communication with the airflow channel so as to be capable of inputting gas to the airflow channel to make the hollow part reach a preset pressure, the gas source being capable of stopping inputting gas to the airflow channel when the hollow part reaches the preset pressure.
[0008] Further, the sealing part is transparent optical glass.
[0009] Further, the fixing unit is adjacent to the positioning unit and the bearing platform, and is threadedly connected with the positioning unit and the bearing platform.
[0010] Further, a plurality of the fixing units are arranged at the end of the positioning unit away from the hollow part.
[0011] Further, the positioning unit has a first plane and a second plane parallel to the planar part, the side of the sealing part adjacent to the planar part is parallel to the planar part, the first plane is in abutment with the auxiliary material part, and the second plane is in abutment with the sealing part.
[0012] Further, the sealing part is fixedly connected with the positioning unit.
[0013] Further, the bearing platform is provided with a groove recessed from the edge of the bearing platform to the inside of the bearing platform, and the groove is arranged corresponding to the gas pipe joint.
[0014] Further, the bearing platform and the positioning unit are both aluminum plates.
[0015] The beneficial effects of the present application are as follows:
[0016] 1. The flexible material can be flattened without contacting the flexible material, so that the detection part can be detected, and the flexible material is not damaged.
[0017] 2. By forming a sealed hollow section, the positive pressure gas inside can apply force to the detection section, making the detection section flat. In this process, direct contact with flexible materials can be avoided, thereby preventing damage to the flexible materials. In addition, it can also achieve uniform force on all parts of the flexible materials and fix the flexible materials in the flattened position, improving the flatness effect of flexible materials.
[0018] 3. Facilitates observation and monitoring of the flexible material inside the hollow section. This allows operators to gain a direct understanding of the working environment within the hollow section and further assess the flatness of the flexible material.
[0019] 4. Positioning units are set around the perimeter of the positioning unit, thereby fixing the positioning unit around its perimeter and improving the stability of the entire device. In addition, it can also avoid direct fixing between the positioning unit and the support platform, thus saving the need for the positioning unit to be set beyond the auxiliary part to be fixed to the support platform.
[0020] To make the above and other objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is an exploded view of a leveling device for flexible materials in an embodiment of the present invention;
[0023] Figure 2 This is a schematic diagram of the structure of a leveling device for flexible materials in an embodiment of the present invention;
[0024] Figure 3 This is a cross-sectional schematic diagram of a leveling device for flexible materials in an embodiment of the present invention;
[0025] The reference numerals in the above figures are as follows: 1. Supporting platform; 11. Flat part; 12. Groove; 2. Flexible material; 21. Detection part; 22. Auxiliary material part; 3. Positioning unit; 31. Hollow part; 32. Second plane; 33. Airflow channel; 34. Threaded hole; 4. Sealing part; 5. Fixing unit; 6. Air pipe connector. Detailed Implementation
[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0027] like Figures 1 to 3 As shown, the method for flattening flexible materials in this embodiment includes the following steps: The flexible material 2 may include a detection unit 21 and an auxiliary material unit 22 surrounding the detection unit 21.
[0028] The flexible material 2 is fixed on the support platform 1 by the positioning unit 3 with the hollow part 31. The positioning unit 3 can be pressed on the auxiliary material part 22. The hollow part 31 can be set in correspondence with the detection part 21, so that the detection part 21 is located inside the hollow part 31. At this time, the detection part 21 may have a part that is raised relative to the support platform 1.
[0029] The end of the hollow part 31 away from the bearing platform 1 is closed to seal the hollow part 31, thereby preventing gas from flowing out after positive pressure gas is injected into the hollow part 31.
[0030] Positive pressure gas is injected into the hollow part 31, forming a positive pressure that applies pressure to all surfaces in the hollow part 31. The positive pressure gas inside the hollow part 31 can use the pressure to flatten the flexible material 2 onto the support platform 1, thereby flattening the detection part 21.
[0031] Specifically, the flexible material may include a PU film and a wafer disposed on the PU film detection unit 21, and the pressure of the hollow part is set to 0.5MPa-0.7MPa.
[0032] In this embodiment, a gas source injects high-pressure gas into the hollow portion 31 through the airflow channel 33 on the positioning unit 3, and sets the preset pressure value of the hollow portion 31 to 0.6 MPa. When the pressure value inside the hollow portion 31 reaches 0.6 MPa, the gas source is shut off. The positive pressure gas inside the hollow portion 31 forms a positive pressure that applies pressure to all surfaces, and the positive pressure presses the detection part 21 against the flat surface 11, thereby making the detection part 21 fit tightly against the flat surface 11, thus achieving the effect of flattening the detection part 21.
[0033] By using the above method, the detection section 21 in the flexible material 2 can be flattened without contacting the flexible material 2, thus allowing for subsequent testing and avoiding damage to the flexible material 2. Furthermore, because a preset pressure value is set throughout the method, the force exerted by the positive pressure gas on all parts of the detection section 21 remains the same, resulting in a better flattening effect.
[0034] As shown in Figures 1 to 3 The embodiment also provides a flatting device for flexible material. The flexible material 2 can be arranged on the flat surface 11. The flexible material 2 can include a detection part 21 and a supplementary material part 22 arranged around the detection part 21. The supplementary material part 22 is used for positioning the positioning unit 3 thereon and positioning the whole flexible material 2 to the flat surface 11. The detection part 21 can be provided with a crystal element. The specific shape of the supplementary material part 22 and the detection part 21 can be adjusted according to actual needs.
[0035] The flatting device includes:
[0036] A bearing platform 1, which can have a flat surface 11, so that the bearing platform 1 can bear the material and other mechanisms. The flat surface 11 can be arranged in such a way that the flexible material 2 can be kept in close contact with the flat surface 11 under the action of the gas pressure in the hollow part 31, so that the flexible material 2 can be kept flat. The other parts of the bearing platform 1 except the flat surface 11 can be adjusted according to actual needs, so that the bearing platform 1 can be arranged in different working conditions. The bearing platform 1 can be made of rigid material, so that the bearing platform 1 can provide a flat reference surface.
[0037] A positioning unit 3, which can be arranged on the side of the supplementary material part 22 away from the flat surface 11. The positioning unit 3 can have a hollow part 31 penetrating in the direction perpendicular to the flat surface 11. So that after the positioning unit 3 contacts with the flexible material 2, the positioning unit 3 can contact with the supplementary material part 22, and the hollow part 31 corresponds to the detection part 21, so as to prevent the positioning part from contacting with the detection part 21 and affecting the detection part 21. The positioning unit 3 can be provided with an air flow channel 33 penetrating from the hollow part 31 to the side away from the hollow part 31. The air flow channel 33 away from the hollow part 31 can include an air pipe joint 6, so that the positive pressure gas can enter the hollow part 31 from the air flow channel 33 through the air pipe joint 6. The positioning unit 3 can be made of rigid material, so that the positioning unit 3 can fasten the supplementary material part 22.
[0038] A sealing part 4, which can be arranged on the side of the hollow part 31 away from the bearing platform 1 and seal the hollow part 31, so that the positive pressure gas in the hollow part 31 can be accumulated in the hollow part 31 and the positive pressure gas in the hollow part 31 is sealed without leakage.
[0039] A gas source (not shown in the figure), which can communicate with the air flow channel 33 to input gas into the air flow channel 33 and make the hollow part 31 reach a preset pressure. The gas source can stop inputting gas into the air flow channel 33 when the hollow part 31 reaches the preset pressure. The input gas can be positive pressure gas, so that the inside of the hollow part 31 can reach the preset pressure value faster.
[0040] In the embodiment, the gas source comprises an electric control cabinet, a high-pressure gas pipe controllable by the electric control cabinet, and a solenoid valve electrically connected to the electric control cabinet. The electric control cabinet controls the high-pressure gas pipe to communicate with the gas pipe joint 6 and causes the solenoid valve electrically connected to the electric control cabinet to be in an open state, the high-pressure gas pipe injects high-pressure gas into the gas pipe joint 6 and causes the high-pressure gas to flow into the hollow part 31 through the gas flow channel 33, and finally, the solenoid valve is cut off when the gas in the hollow part 31 reaches a preset pressure value, so that the gas path of the high-pressure gas pipe is closed. In this process, the positive pressure gas in the hollow part 31 forms a positive pressure force pressing all surfaces, and the detection part 21 is pressed towards the flat part 11 by the positive pressure force, so that the detection part 21 is tightly attached to the flat part 11, thereby achieving the effect of flattening the detection part 21.
[0041] Through the above structure, by forming a sealed hollow part 31, the positive pressure gas therein can apply a force to the detection part 21 and flatten the detection part 21. In this process, direct contact with the flexible material 2 can be avoided to prevent bruising or damaging the flexible material 2, and in addition, uniform stress on the flexible material 2 can be achieved and the position of the flattened flexible material 2 can be fixed, thereby improving the flattening effect of the flexible material.
[0042] Specifically, the sealing part 4 can be transparent optical glass, so that the sealing part 4 functions as a viewing window for the hollow part 31, facilitating observation and monitoring of the flexible material 2 in the hollow part 31. Thereby, the operator can intuitively understand the working environment in the hollow part 31 and further judge the flattening state of the flexible material 2.
[0043] Specifically, as shown in Figures 1 to 3 , the fixing unit 5 can be adjacent to the positioning unit 3 and the bearing platform 1, and the fixing unit 5 is threadedly connected with the positioning unit 3 and the bearing platform 1. Thereby, the fixing unit 5 fixes the positioning unit 3 and the bearing platform 1 relative to each other. The reinforcing effect of the positioning unit 3 and the bearing platform 1 can be achieved. The fixing unit 5 and the positioning unit 3 and the bearing unit can be threadedly connected. Except that the gas flow channel 33 communicating with the gas pipe joint 6 communicates with the hollow part 31, the rest can be thread holes 34 isolated from the hollow part 31.
[0044] Specifically, as shown in Figure 1 and Figure 2 , a plurality of fixing units 5 can be arranged at one end of the positioning unit 3 away from the hollow part 31. As shown in Figure 1As shown in the embodiment, the projection shape of the positioning unit 3 on the section perpendicular to the thickness thereof is a rectangular ring, and the positioning unit 3 is arranged around the four sides of the positioning unit 3, thereby fixing the four sides of the positioning unit 3 and improving the stability of the entire device. In addition, the direct fixing between the positioning unit 3 and the bearing platform 1 can be avoided, thereby saving the positioning unit 3, and the positioning unit 3 does not need to be arranged beyond the auxiliary part 22 to be fixed with the bearing platform 1. Of course, in other alternative embodiments, when the projection shape of the positioning unit 3 on the section perpendicular to the thickness thereof is a circular ring or other shapes, the fixing unit 5 can be arranged outside to fix the positioning unit 3.
[0045] Specifically, as shown in the embodiment, Figure 1 The positioning unit 3 can have a first plane parallel to the plane part 11 and a second plane 32, and the side of the sealing part 4 close to the plane part 11 can be parallel to the plane part 11, so that in use, the first plane can abut against the auxiliary part 22, and the second plane 32 can abut against the sealing part 4. The first plane and the auxiliary part 22 can seal the part of the hollow part 31 close to the flexible material 2, and the second plane 32 and the sealing part 4 can seal the part of the hollow part 31 close to the sealing part 4, thereby improving the sealing of the positive pressure gas in the hollow part 31.
[0046] Specifically, the sealing part 4 can be fixedly connected with the positioning unit 3, so that the sealing part 4 and the positioning unit 3 have stronger binding force, and the positive pressure gas inside the hollow part 31 can be prevented from pushing the sealing part 4 away from the positioning unit 3 during use of the device, thereby improving the use stability of the entire flat device for the flexible material.
[0047] Specifically, as shown in the embodiment, Figure 1 and Figure 2 The bearing platform 1 can be provided with a groove 12 recessed from the edge thereof to the inside thereof, and the groove 12 can be arranged corresponding to the air pipe joint 6, that is, the groove 12 can be arranged at the position corresponding to the air pipe joint 6 on the bearing platform 1, and the size of the groove 12 can be slightly larger than that of the air pipe joint 6, thereby preventing interference between the air pipe joint 6 and the bearing platform 1.
[0048] Specifically, the bearing platform 1 and the positioning unit 3 can both be aluminum plates, and since the aluminum plate has the characteristics of light weight and high hardness, the flexible material 2 in the bearing platform 1 and the positioning unit 3 can be fixed on the reference surface formed by the plane part 11, thereby improving the fixing effect of the flexible material 2.
[0049] The principles and implementation manners of the present application are described by using specific examples, and the above examples are only used for helping to understand the method of the present application and its core idea; meanwhile, for the general technical personnel in the art, according to the idea of the present application, the specific implementation manners and application ranges will be changed, and the above description should not be understood as the limitation of the present application.
Claims
1. A flattening method for a flexible material including a detection portion and a sub-portion which is provided around the periphery of the detection portion, characterized by, The method comprises the following steps: The flexible material is fixed on the bearing platform by a positioning unit with a hollow part, the positioning unit is pressed on the auxiliary material part, and the hollow part is arranged corresponding to the detection part; The end of the hollow part away from the bearing platform is closed to seal the hollow part; A positive pressure gas is injected into the hollow part to form a positive pressure on all surfaces, thereby flattening the detection part; the flexible material comprises a PU film and a wafer arranged on the detection part of the PU film, and the pressure of the hollow part is set to 0.6 MPa, and the gas source is closed when the pressure value in the hollow part reaches 0.6 MPa.
2. A flattening device for a flexible material for use in a flattening method for a flexible material as claimed in claim 1, said flexible material comprising a detection portion and a sub-portion which is provided around the periphery of said detection portion, characterized in that, The flattening device comprises: A bearing platform having a flat part for the flexible material to be arranged thereon; A positioning unit arranged on the side of the auxiliary material part away from the flat part, the positioning unit having a hollow part penetrating in the direction perpendicular to the flat part, the hollow part being arranged corresponding to the detection part, and the positioning unit being provided with an airflow channel penetrating from the side close to the hollow part to the side away from the hollow part; a sealing part arranged on the side of the hollow part away from the bearing platform and sealing the hollow part; A gas source in communication with the airflow channel to input gas into the airflow channel to make the hollow part reach a preset pressure, and the gas source can stop inputting gas into the airflow channel when the hollow part reaches the preset pressure; The flexible material comprises a PU film and a wafer arranged on the detection part of the PU film, and the pressure of the hollow part is set to 0.6 MPa.
3. A device for smoothing flexible material according to claim 2, characterized in that The sealing part is transparent optical glass.
4. The calendering device for flexible material according to claim 2, characterized in that, A fixing unit adjacent to the positioning unit and the bearing platform, the fixing unit being threadedly connected with the positioning unit and the bearing platform.
5. A device for smoothing flexible material according to claim 4, characterized in that A plurality of fixing units are arranged at the end of the positioning unit away from the hollow part.
6. The flattening device for flexible material of claim 2, wherein, The positioning unit has a first plane and a second plane parallel to the flat part, the side of the sealing part close to the flat part is parallel to the flat part, the first plane abuts against the auxiliary material part, and the second plane abuts against the sealing part.
7. The flattening device for flexible material of claim 2, wherein The sealing part is fixedly connected with the positioning unit.
8. The flattening device for flexible material of claim 2, wherein, The bearing platform is provided with a groove recessed from the edge to the inside, the airflow channel away from the hollow part comprises a gas pipe joint, and the groove is arranged corresponding to the gas pipe joint.
9. The flattening device for flexible material of claim 2, wherein, The bearing platform and the positioning unit are both aluminum plates.
Citation Information
Patent Citations
A semiconductor wafer leveling device and method thereof
CN109696437A
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