Cutting device

Abstract

The present application provides a cutting device capable of reliably performing replacement of a cutting tool and preventing occurrence of poor machining. The cutting device is configured to include: a cutting unit having a cutting tool that performs cutting on a workpiece and the cutting tool being capable of rotation; a detection unit that detects a position of a front end of the cutting tool; and a display unit that displays a tool replacement screen, the tool replacement screen including: a first display section that displays an outer diameter and a blade tip overhang amount of a new cutting tool that replaces the cutting tool; a second display section that displays a consumption amount of a blade tip of the cutting tool; and an end key that ends a replacement process of the cutting tool, and when the end key is selected, the position of the front end of the cutting tool is detected by the detection unit.

Description

Technical Field

[0001] The present invention relates to a cutting device for cutting a workpiece such as a wafer. Background Art

[0002] By dividing a wafer, in which devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed in regions defined by a plurality of predetermined dividing lines (streets) arranged in a grid pattern, multiple device chips, each containing a device, are produced. These device chips are incorporated into various electronic devices such as mobile phones and personal computers.

[0003] For example, a cutting device is used to separate wafers. The cutting device comprises a holding unit (holding table) that holds the workpiece, and a cutting unit equipped with an annular cutting tool that cuts the workpiece. The cutting tool rotates and cuts into the workpiece held by the holding unit, thereby cutting and separating the workpiece.

[0004] The cutting machine also includes a display unit that displays various information related to cutting processing, and an operation panel for the operator to input predetermined information into the cutting machine. For example, Patent Document 1 discloses a cutting machine in which a display unit and an operation panel are provided at positions where the operator operates. The operator operates the operation panel while referring to the information displayed on the display unit, thereby inputting information such as processing conditions into the cutting machine.

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2006-156809

[0006] When a cutting tool continuously cuts a workpiece, wear or defects occur at the front end (blade tip) of the cutting tool. Therefore, after using the cutting tool for a certain period of time, a tool replacement operation is performed to replace the used cutting tool with an unused cutting tool (replacement cutting tool).

[0007] When replacing a cutting tool, the operator displays a tool replacement screen (tool replacement screen) on the display unit and uses the operation panel to input information about the unused cutting tool. The operator then manually or automatically removes the used cutting tool and installs the unused cutting tool. The operator then selects the End key (OK key) on the tool replacement screen to confirm the cutting tool replacement process.

[0008] However, while operating a cutting device, the operator may mistakenly select the End button on the tool change screen for various reasons. For example, if an emergency occurs immediately after the tool change screen is displayed on the display unit, the operator may abruptly leave the scene to respond to the emergency and forget to replace the cutting tool, thereby selecting the End button on the tool change screen. Furthermore, if the tool change screen is inadvertently displayed on the display unit due to an operational error, the operator may mistakenly select the End button in order to close the tool change screen.

[0009] If the End key is selected without replacing the cutting tool, the cutting device will begin machining the workpiece as if a used cutting tool, undamaged or undamaged, is installed, even though the cutting unit still has a used cutting tool. This can result in insufficient penetration of the cutting tool into the workpiece, which can lead to inadequate machining of the workpiece and defective machining. Summary of the Invention

[0010] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a cutting device that can reliably perform replacement of a cutting tool and prevent occurrence of machining defects.

[0011] According to one embodiment of the present invention, a cutting device is provided, which is configured to include: a holding unit that holds a workpiece; a cutting unit that has a cutting tool and the cutting tool is capable of rotating, and the cutting tool cuts the workpiece held by the holding unit; a processing feed unit that causes the holding unit and the cutting unit to move relative to each other along a processing feed direction; a cutting feed unit that causes the cutting unit to move along the cutting direction; a detection unit that detects the front end position of the cutting tool; a cover that can be opened and closed to close the processing area where the cutting unit is installed; and a display unit, wherein the cutting unit includes: a rotating shaft; a housing that supports the rotating shaft so that it can rotate; and a flange that is provided at the front end portion of the rotating shaft for the cutting tool to be freely installed and removed. The display unit displays a tool replacement screen, which includes: a first display portion, which displays the outer diameter and blade tip extension of an unused cutting tool to be replaced with the cutting tool; a second display portion, which displays the consumption of the blade tip of the cutting tool; and an end key, which ends the replacement process of the cutting tool. When the end key is selected, the front end position of the cutting tool is detected by the detection unit. When the outer diameter of the cutting tool installed on the cutting unit corresponds to the outer diameter of the unused cutting tool displayed on the first display portion, the cutting tool is allowed to be replaced. When the outer diameter of the cutting tool installed on the cutting unit does not correspond to the outer diameter of the unused cutting tool displayed on the first display portion, the cutting tool is not allowed to be replaced and a warning is issued.

[0012] Furthermore, it is preferred that the consumption displayed on the second display is backed up so that the cutting device can restore the consumption on the second display even when the end key is selected. Furthermore, it is preferred that the cover can be opened and closed while the tool replacement screen is displayed on the display unit, and that the cutting tool replacement is not permitted and a warning is issued until the detection unit detects the tip position of the cutting tool after the end key is selected despite the absence of information indicating that the cover is open.

[0013] In addition, according to another embodiment of the present invention, there is provided a cutting device, which is configured to include: a holding unit that holds a workpiece; a cutting unit that has a cutting tool and the cutting tool is capable of rotating, and the cutting tool cuts the workpiece held by the holding unit; a processing feed unit that causes the holding unit and the cutting unit to move relative to each other along a processing feed direction; a cutting feed unit that causes the cutting unit to move along the cutting direction; a cover that can be opened and closed to enclose a processing area where the cutting unit is installed; and a display unit, wherein the cutting unit includes: a rotating shaft; a housing that supports the rotating shaft so that it can The tool change screen includes: a first display portion that displays the outer diameter and the amount of blade tip extension of an unused cutting tool to be replaced with the cutting tool; a second display portion that displays the amount of blade tip consumption of the cutting tool; and an end key that ends the replacement process of the cutting tool. When the tool change screen is displayed on the display unit, the cover can be opened and closed. When the end key is selected even though there is no information that the cover is opened, replacement of the cutting tool is not allowed and a warning is issued.

[0014] In a cutting device according to one embodiment of the present invention, if the outer diameter of the cutting tool attached to the cutting unit does not correspond to the outer diameter of an unused cutting tool, or if there is no information indicating that the cover enclosing the cutting unit has been opened, even if the End key on the tool replacement screen is selected, the cutting tool replacement is not permitted, and a warning is issued. This prevents the workpiece from being inadvertently machined by a used cutting tool, and allows the operator to easily recognize that the cutting tool has not been correctly replaced. This ensures reliable replacement of the cutting tool, preventing machining defects. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a perspective view showing a cutting device.

[0016] Figure 2 (A) is a perspective view showing a cutting unit, Figure 2 (B) is a perspective view showing the cutting unit with the tool cover mounted thereon.

[0017] Figure 3 is a side view showing a detection unit.

[0018] Figure 4 This is a front view showing a display unit displaying a tool replacement screen.

[0019] Figure 5 This is a flowchart showing the operation of the cutting device.

[0020] Description of labels

[0021] 11: Workpiece; 13: Wafer; 15: Belt (Scribing Belt); 17: Frame; 2: Cutting Device; 4: Base; 4a: Opening; 4b: Opening; 6: Cassette Support; 8: Cassette; 10: Transport Unit (Transport Assembly); 10a: Gripping Unit; 12: Temporary Storage Area; 14: Guide Rail; 16: Transport Unit (Transport Assembly); 18: Processing Feed Unit (First Moving Assembly); 18a: Moving Worktable; 20: Dust and Drip Proof Cover; 22: Holding Unit (Holding Worktable); 22a: Holding Surface; 24: Clamp; 26: Cutting Unit (Cutting assembly); 28: Cutting feed unit (second moving assembly); 30: Housing; 32: Rotating axis (spindle); 34: Flange (mounting seat); 36: Flange portion; 36a: Front; 36b: Protrusion; 38: Support shaft; 38a: Threaded portion; 40: Cutting tool; 42: Base; 42a: Opening; 42b: Gripping portion; 44: Cutting edge; 46: Fixing nut; 46a: Opening; 48: Tool cover; 48a, 48b: Threaded holes; 50: Tube; 52: Nozzle; 54: Loading and unloading cover; 54a: Round hole; 56: Tube ; 58: Nozzle; 60: Screw; 62: Mounting and disassembling cover; 62a: Round hole; 64: Screw; 66: Imaging unit (imaging component); 68: Detection unit (detection component); 70: Base; 70a: Recessed portion; 72a: Light projecting portion; 72b: Light receiving portion; 74: Cleaning unit (cleaning component); 76: Transport unit (transportation component); 78: Support platform; 80: Display unit (display unit, display component); 82: Input unit (input unit, input component); 84: Frame; 86a, 86b, 86c: Cover; 88: Control unit ( Control unit, control component); 90: Outer diameter calculation unit; 92: Tool determination unit; 94: Cover opening and closing determination unit; 96: Drive unit; 98: Storage unit; 100: Tool replacement screen; 102: First display unit (unused tool information display unit); 102a, 102b, 102c, 102d, 102e, 102f, 102g, 102h: Display bar; 104: Second display unit (tool usage information display unit); 104a, 104b, 104c, 104d: Display bar; 106: End key (OK key). DETAILED DESCRIPTION

[0022] Hereinafter, an embodiment of one mode of the present invention will be described with reference to the drawings. First, a configuration example of a cutting device according to this embodiment will be described. Figure 1 It is a perspective view showing the cutting device 2 .

[0023] The cutting device 2 has a base 4 that supports the various structural elements that constitute the cutting device 2. An opening 4a is formed at the front corner of the base 4, and a box support 6 is provided in the opening 4a. The box support 6 is moved along the Z-axis direction (cutting direction, vertical direction, up and down direction) by a lifting mechanism (not shown). A box 8 is mounted on the box support 6, and the box 8 can accommodate a plurality of workpieces 11 that are cut by the cutting device 2. In addition, Figure 1 The outline of the box 8 is shown by a dotted line.

[0024] For example, the workpiece 11 comprises a disc-shaped wafer 13 made of silicon or the like. Wafer 13 is divided into a plurality of regions by a plurality of predetermined dividing lines (streets) arranged in a grid pattern that intersect one another. Furthermore, devices such as ICs and LSIs are formed on the front sides of each of these regions. When wafer 13 is cut along the predetermined dividing lines by a cutting device 2, a plurality of device chips, each containing a device, are obtained.

[0025] A circular tape (dicing tape) 15 made of resin or the like and having a diameter larger than that of the wafer 13 is attached to the back side of the wafer 13. In addition, an annular frame 17 is attached to the outer periphery of the tape 15. The frame 17 is made of metal or the like and has a circular opening in the center with a diameter larger than that of the wafer 13. Thus, the wafer 13 is supported by the frame 17 via the tape 15. That is, Figure 1 The workpiece 11 shown is a frame unit including a wafer 13 , a tape 15 , and a frame 17 .

[0026] However, there are no limitations on the type, material, shape, structure, size, etc. of the workpiece 11 processed by the cutting device 2. For example, the workpiece 11 may include a wafer 13 made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass, ceramics, resin, metal, etc. Furthermore, there are no limitations on the type, number, shape, structure, size, and arrangement of devices formed on the wafer 13, and no devices may be formed on the wafer 13.

[0027] The workpiece 11 may include a wafer 13 that is not supported by the frame 17 or a wafer 13 that is not attached with the tape 15. Furthermore, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded Package) substrate.

[0028] A transport unit (transport assembly) 10 is provided behind the opening 4a. This transport unit 10 carries out both the removal of the workpiece 11 from the cassette 8 and the loading of the workpiece 11 into the cassette 8. The transport unit 10 comprises a transport mechanism that is movable along the Y-axis direction (indexing feed direction, front-to-back direction). Furthermore, a gripping portion 10a is provided at the end of the transport unit 10 located on the opening 4a side (cassette 8 side) for gripping the end of the workpiece 11 (e.g., frame 17).

[0029] A temporary storage area 12 is provided between the opening 4a and the transport unit 10 for temporarily storing workpieces 11 removed from or loaded into the cassette 8. A pair of guide rails 14 are provided in the temporary storage area 12, arranged substantially parallel to each other along the Y-axis. The pair of guide rails 14 move toward and away from each other along the X-axis (the machining feed direction, the left-right direction), sandwiching the workpiece 11 and aligning the workpiece 11.

[0030] A conveying unit (conveying assembly) 16 for conveying the workpiece 11 is provided near the temporary storage area 12. For example, the conveying unit 16 is composed of a conveying mechanism having a suction pad for sucking and holding the upper surface side of the workpiece 11 (for example, the upper surface side of the frame 17).

[0031] A rectangular opening 4b, whose longitudinal direction extends along the X-axis, is formed to the side of opening 4a. A feed unit (first moving assembly) 18 and a dust and drip-proof cover 20 that partially covers feed unit 18 are disposed within opening 4b. Feed unit 18 is comprised of, for example, a ball screw-type moving mechanism and includes a movable table 18a, the upper surface of which is exposed through dust and drip-proof cover 20.

[0032] A holding unit (holding table) 22 is provided on the movable table 18a to hold the workpiece 11. The upper surface of the holding unit 22 forms a holding surface 22a that holds the workpiece 11. The holding surface 22a is connected to a suction source (not shown) such as an ejector via a suction passage (not shown) formed within the holding unit 22. Furthermore, a plurality of clamps 24 are provided around the holding unit 22 to grip and secure the ends of the workpiece 11 (e.g., the frame 17).

[0033] The feed unit 18 moves the holding unit 22 along the X-axis direction along with the movable table 18a. The feed unit 18 positions the holding unit 22 between the transport area A for transporting the workpiece 11 and the processing area B for processing the workpiece 11. The holding unit 22 is connected to a rotational drive source (not shown) such as a motor, which rotates the holding unit 22 about a rotation axis substantially parallel to the Z-axis direction.

[0034] A cutting unit (cutting assembly) 26 is provided in the processing area B for cutting the workpiece 11 held by the holding unit 22. The cutting unit 26 includes a rotatable annular cutting tool 40 for cutting the workpiece 11. Furthermore, the cutting unit 26 is connected to a plunge feed unit (second moving assembly) 28 for moving the cutting unit 26 along the Y-axis and Z-axis directions. For example, the plunge feed unit 28 is composed of a ball screw-type moving mechanism having a Y-axis ball screw along the Y-axis direction and a Z-axis ball screw along the Z-axis direction.

[0035] Figure 2 (A) is a perspective view showing the cutting unit 26. The cutting unit 26 includes a cylindrical housing 30, which houses a cylindrical rotating shaft (spindle) 32. The rotating shaft 32 is rotatably supported by the housing 30, with the front end (one end) of the rotating shaft 32 exposed to the outside of the housing 30.

[0036] A flange (mounting seat) 34 supporting the cutting tool 40 is provided at the distal end of the rotating shaft 32. A rotational drive source (not shown) such as a motor is connected to the proximal end (other end) of the rotating shaft 32 to rotate the rotating shaft 32.

[0037] The flange 34 includes a disc-shaped flange portion 36 and a cylindrical support shaft 38 protruding from the center of the front face 36a of the flange portion 36. An annular protrusion 36b is provided on the outer periphery of the flange portion 36, protruding from the front face 36a. The distal end of the protrusion 36b is formed substantially parallel to the front face 36a. A threaded portion 38a is also formed on the outer periphery of the support shaft 38.

[0038] An annular cutting tool 40 for cutting the workpiece 11 is detachably mounted on the flange 34. The cutting tool 40 includes an annular base 42 formed of metal or the like and an annular cutting edge 44 formed along the outer edge of the base 42. A circular opening 42a is provided in the center of the base 42, extending through the base 42 in the thickness direction. Furthermore, an annular gripping portion 42b is formed around the opening 42a of the base 42, protruding in the thickness direction of the base 42. For example, an operator grips the gripping portion 42b to attach the cutting tool 40 to the flange 34.

[0039] The cutting edge 44 is formed so as to protrude from the outer peripheral edge of the base 42 toward the radially outer side of the base 42. The protrusion amount of the cutting edge 44 from the outer peripheral edge of the base 42 (the amount of the blade tip protrusion) is appropriately adjusted according to the specifications of the cutting tool 40. For example, the cutting edge 44 is formed by fixing abrasive grains such as diamond with a bonding material such as nickel plating.

[0040] However, the materials of the abrasive grains and the bonding material of the cutting edge 44 are not limited and can be appropriately selected according to the material of the workpiece 11 and the processing content. Figure 2 (A) shows a hub-type cutting tool 40 in which a base 42 and a cutting edge 44 are integrally formed, but a washer-type cutting tool consisting of an annular cutting edge formed by fixing abrasive grains via a bonding material formed of metal, ceramic, resin, etc. may also be used.

[0041] An annular fixing nut 46 for fixing the cutting tool 40 is fastened to the threaded portion 38a of the support shaft 38. A circular opening 46a corresponding to the diameter of the support shaft 38 is formed in the center of the fixing nut 46, and a thread groove corresponding to the threaded portion 38a of the support shaft 38 is formed in the opening 46a.

[0042] The cutting tool 40 is attached to the flange 34 by inserting the support shaft 38 into the opening 42a of the base 42. In this state, when the fixing nut 46 is screwed into the threaded portion 38a of the support shaft 38 and tightened, the cutting tool 40 is clamped between the front end surface of the protrusion 36b of the flange 36 and the fixing nut 46. Furthermore, by removing the fixing nut 46 tightened to the support shaft 38, the cutting tool 40 attached to the flange 36 can be removed. In this manner, the cutting tool 40 is detachably attached to the front end portion (flange 34) of the rotating shaft 32.

[0043] Figure 2 (B) is a perspective view showing the cutting unit 26 with the tool cover 48 installed. Figure 2 As shown in FIG. 2 (B), a tool cover 48 formed in a rectangular parallelepiped shape is fixed to the front end portion of the housing 30 , and the cutting tool 40 attached to the cutting unit 26 is covered by the tool cover 48 .

[0044] The tool cover 48 includes a tube 50 for supplying cutting fluid and a nozzle 52 connected to the tube 50 and opening toward the back side of the cutting tool 40. Furthermore, a detachable cover 54 is attached to the front surface of the tool cover 48, and a detachable cover 62 is attached to the top surface of the tool cover 48. The top of the cutting tool 40 is covered by the tool cover 48 and the detachable covers 54 and 62.

[0045] The detachable cover 54 has a pipe 56 for supplying cutting fluid and a nozzle 58 connected to the pipe 56. The nozzle 58 is provided so as to open toward the front side of the cutting tool 40 when the detachable cover 54 is attached to the tool cover 48. The detachable cover 54 is fixed to the tool cover 48 by inserting a screw 60 into a circular hole 54a formed in the detachable cover 54 and screwing it into a threaded hole 48a formed in the tool cover 48.

[0046] The detachable cover 62 is fixed to the tool cover 48 by inserting a screw 64 into a circular hole 62a formed in the detachable cover 62 and screwing the screw 64 into a threaded hole 48b formed in the tool cover 48. A laser irradiation unit (laser irradiation assembly) for irradiating a laser beam for trimming the cutting tool 40 may be provided inside the detachable cover 62.

[0047] When the workpiece 11 is cut by the cutting unit 26, a cutting fluid such as pure water is supplied to the pipes 50 and 56. This cutting fluid is supplied to the front and back sides of the cutting tool 40 through the nozzles 52 and 58. This cools the workpiece 11 and the cutting tool 40 and washes away the chips (cutting chips) generated by the cutting.

[0048] like Figure 1 As shown, an imaging unit (imaging assembly) 66 is provided at a position overlapping with the movement path of the holding unit 22 (between the transport area A and the processing area B). The imaging unit 66 is composed of a camera and the like, and images the workpiece 11 held by the holding unit 22. Based on the image obtained by the imaging unit 66, the workpiece 11 and the cutting unit 26 are aligned.

[0049] Furthermore, a detection unit (detection assembly) 68 is provided near the cutting unit 26 (e.g., on the movable table 18a). This detection unit 68 detects the position of the tip of the cutting tool 40 attached to the cutting unit 26. Based on the position of the tip of the cutting tool 40 detected by the detection unit 68, the outer diameter of the cutting tool 40 can be determined.

[0050] Figure 3 1 is a side view showing the detection unit 68. For example, the detection unit 68 has a rectangular parallelepiped base 70 with a recess 70a formed on the upper surface. A light projecting portion 72a and a light receiving portion 72b are provided in the recess 70a so as to face each other.

[0051] For example, the light-emitting portion 72a is connected to a light source (not shown) such as an LED (Light Emitting Diode) via an optical fiber or the like, and irradiates light toward the light-receiving portion 72b. The light irradiated from the light-emitting portion 72a is received by the light-receiving portion 72b. For example, the light-receiving portion 72b is connected to a photoelectric conversion portion (not shown) configured to include a photoelectric conversion element via an optical fiber or the like. The photoelectric conversion portion generates an electrical signal (voltage) corresponding to the amount of light received by the light-receiving portion 72b, and inputs the signal to the control portion 88 (see FIG. 1 ) to be described later. Figure 1 ).

[0052] The detection unit 68 is provided on the movable table 18a (see Figure 1 ), the position of the detection unit 68 in the X-axis direction is controlled by the machining feed unit 18. Furthermore, when the cutting unit 26 and the detection unit 68 are arranged so that the cutting edge 44 of the cutting tool 40 overlaps the area between the light projecting portion 72a and the light receiving portion 72b, and when the cutting unit 26 is lowered by the plunge feed unit 28, the leading end portion (blade tip) of the cutting tool 40 is inserted between the light projecting portion 72a and the light receiving portion 72b.

[0053] When the cutting unit 26 is lowered to a predetermined height, light from the light-emitting portion 72a to the light-receiving portion 72b is blocked by the tip of the cutting tool 40, reducing the amount of light received by the light-receiving portion 72b. Furthermore, the height of the cutting unit 26 at which the amount of light received decreases varies depending on the outer diameter of the cutting tool 40 (the outer diameter of the cutting edge 44). Therefore, by lowering the cutting unit 26 and monitoring the amount of light received by the light-receiving portion 72b and the height of the cutting unit 26, the outer diameter of the cutting tool 40 can be determined.

[0054] like Figure 1 As shown, a cleaning unit (cleaning assembly) 74 for cleaning the workpiece 11 is provided behind the holding unit 22. For example, the cleaning unit 74 includes a rotary table that holds the workpiece 11 and a nozzle that supplies a cleaning liquid such as pure water toward the workpiece 11 held by the rotary table. Furthermore, a conveying unit (conveying assembly) 76 is provided above the cleaning unit 74 for conveying the workpiece 11 between the holding unit 22 and the cleaning unit 74. For example, the conveying unit 76 comprises a conveying mechanism having a suction pad that suction-holds the upper surface of the workpiece 11 (e.g., the upper surface of the frame 17).

[0055] A display unit (display portion, display assembly) 80 is provided on the support table 78 disposed at the rear of the processing area B. The display unit 80 displays various information related to the cutting process (processing conditions, etc.) of the cutting device 2 and images acquired by the imaging unit 66. Furthermore, an input unit (input portion, input assembly) 82 is provided on the front surface side of the base 4 for the operator to input various information (processing conditions, etc.) to the cutting device 2.

[0056] For example, various displays are used as the display unit 80, and an operation panel having a plurality of operation keys is used as the input unit 82. However, the cutting device 2 may also include a touch panel as a user interface. In this case, the touch panel functions as both the display unit 80 and the input unit 82, and the operator can input information by touching the touch panel.

[0057] Furthermore, a frame 84 covering the upper surface of the base 4 is provided on the base 4. Furthermore, an openable and closable cover covering the components of the cutting device 2 is attached to the support table 78 and the frame 84.

[0058] For example, a cover 86a that closes the cassette 8 placed on the cassette support 6, a cover 86b that closes the transfer area A, and a cover 86c that closes the processing area B where the cutting unit 26 is installed are fixed to the support 78 or the frame 84. Figure 1 , the outlines of the covers 86a, 86b, and 86c are indicated by two-dot chain lines. During processing of the workpiece 11, the covers 86a, 86b, and 86c are locked in a closed state and opened and closed by the operator as needed.

[0059] Each component constituting the cutting device 2 (the cassette support table 6, the conveying unit 10, the guide rail 14, the conveying unit 16, the processing feed unit 18, the holding unit 22, the clamp 24, the cutting unit 26, the cutting feed unit 28, the imaging unit 66, the detection unit 68, the cleaning unit 72, the conveying unit 76, the display unit 80, the input unit 82, etc.) is connected to a control unit (control unit, control assembly) 88. The control unit 88 controls the operation of each component of the cutting device 2.

[0060] For example, the control unit 88 is composed of a computer. Specifically, the control unit 88 includes: a processing unit that performs operations and other processing required for the operation of the cutting device 2; and a storage unit that stores various information (data, programs, etc.) used for the processing of the processing unit. The processing unit is configured to include a processor such as a CPU (Central Processing Unit). In addition, the storage unit is composed of memories such as ROM (Read Only Memory) and RAM (Random Access Memory). The processing unit and the storage unit are connected to each other via a bus. In addition, the details of the structure and function of the control unit 88 will be described later.

[0061] When processing the workpiece 11, first, the gripping portion 10a of the transport unit 10 grips the end portion (e.g., the frame 17) of one of the workpieces 11 housed in the cassette 8. When the transport unit 10 is moved rearward along the Y-axis in this state, the workpiece 11 is pulled out of the cassette 8 and placed on the pair of guide rails 14.

[0062] The pair of guide rails 14 move toward each other along the X-axis while supporting the workpiece 11 (e.g., frame 17) from below. The workpiece 11 is thereby clamped between the pair of guide rails 14, allowing alignment. The workpiece 11 is then held by suction by the transport unit 16 and transported to the holding unit 22.

[0063] For example, when processing the workpiece 11 having the wafer 13, the belt 15, and the frame 17, the wafer 13 is placed on the holding unit 22 via the belt 15, and the frame 17 is fixed by the clamp 24. In this state, when negative pressure from a suction source is applied to the holding surface 22a, the wafer 13 is sucked and held by the holding unit 22 via the belt 15.

[0064] Then, the cutting tool 40 attached to the cutting unit 26 is rotated to cut into the wafer 13 held by the holding unit 22. For example, with the lower end of the cutting tool 40 positioned below the upper surface of the workpiece 11, the holding unit 22 is moved by the feed unit 18. As a result, the holding unit 22 and the cutting unit 26 move relative to each other in the feed direction, and the wafer 13 is cut linearly.

[0065] Furthermore, the cutting unit 26 is indexed by moving the cutting unit 26 in the Y-axis direction via the plunge feed unit 28 connected to the cutting unit 26. Furthermore, the amount of penetration of the cutting tool 40 into the workpiece 11 is adjusted by moving the cutting unit 26 in the Z-axis direction via the plunge feed unit 28. Furthermore, during the processing of the wafer 13, a cutting fluid such as pure water is supplied to the wafer 13 and the cutting tool 40.

[0066] When the processing of the workpiece 11 is completed, the workpiece 11 is transported from the holding unit 22 to the cleaning unit 74 by the transport unit 76 and cleaned by the cleaning unit 74. Then, the cleaned workpiece 11 is transported onto the pair of guide rails 14 by the transport unit 16, and then grasped by the grasping portion 10a of the transport unit 10 and stored in the cassette 8.

[0067] Here, when the workpiece 11 is cut using the cutting tool 40, the cutting edge 44 of the cutting tool 40 wears, and the amount of protrusion of the cutting edge 44 from the outer periphery of the base 42 (the amount of blade tip protrusion) gradually decreases. Therefore, after the cutting tool 40 has been used for a certain period of time, a tool replacement operation is performed to replace the used cutting tool 40 with an unused cutting tool. In this operation, the operator operates the input unit 82 to display a screen (tool replacement screen) on the display unit 80 for performing the cutting tool 40 replacement operation.

[0068] Figure 4 1 is a front view of the display unit 80 showing a tool replacement screen 100. The tool replacement screen 100 includes a first display portion (unused tool information display portion) 102 that displays information related to unused cutting tools (replacement cutting tools); a second display portion (tool usage information display portion) 104 that displays information related to the usage status of the cutting tool 40 mounted on the cutting unit 26; and an end key (OK key) 106 that ends the replacement process of the cutting tool 40.

[0069] Various information regarding the unused cutting tool to be replaced with the cutting tool 40 mounted on the cutting unit 26 is displayed on the first display unit 102. For example, the first display unit 102 includes a display field 102a that displays the ID (name, etc.) of the unused cutting tool; a display field 102b that displays the type (material, etc.) of the unused cutting tool; a display field 102c that displays the ID (letters, numbers, symbols, etc.) indicated by the barcode attached to the unused cutting tool; and a display field 102d that displays the reason for replacing the cutting tool 40 with the unused cutting tool.

[0070] In addition, the first display portion 102 includes: a display column 102e, which displays the outer diameter of the unused cutting tool (the outer diameter of the cutting edge); a display column 102f, which displays the thickness of the cutting edge of the unused cutting tool; a display column 102g, which displays the type of the unused cutting tool (for example, a hub type or a washer type); and a display column 102h, which displays the amount of blade tip extension of the unused cutting tool.

[0071] For example, by reading a barcode attached to an unused cutting tool, information corresponding to the display fields 102a to 102h is automatically input and displayed in the display fields 102a to 102h. However, the operator may manually input the information displayed in the display fields 102a to 102h by operating the input unit 82.

[0072] The second display unit 104 displays the usage status of the cutting tool 40 (the cutting tool to be replaced) mounted on the cutting unit 26. For example, the second display unit 104 includes: a display column 104a that displays the number of lines processed by the cutting tool 40 (such as the number of lines to be divided); a display column 104b that displays the distance of the area processed by the cutting tool 40; a display column 104c that displays the consumption of the cutting tool 40; and a display column 104d that displays the rotation axis 32 (see FIG. 1 ) when the cutting tool 40 processes the workpiece 11. Figure 2 The consumption of the cutting tool 40 is equivalent to the difference between the outer diameter (blade tip extension) of the cutting tool 40 before machining the workpiece 11 and the current outer diameter (blade tip extension) of the cutting tool 40 .

[0073] When the end key 106 is selected using the input unit 82 while various information related to the unused cutting tool is input to the cutting device 2 and displayed on the first display unit 102, the tool replacement screen 100 is closed. At this time, the information displayed on the first display unit 102 is fixed, and the information related to the use status of the used cutting tool 40 displayed on the second display unit 104 is reset.

[0074] If the display unit 80 and input unit 82 are configured as touch panels, the operator can input information by touching the touch panel displaying the tool replacement screen 100. For example, by clicking the area displaying the display fields 102a to 102h or the display fields 104a to 104d, a specific display field is selected, and text or numerical values ​​can be input in the selected display field. Alternatively, by clicking the area displaying the end key 106, the end key 106 is selected.

[0075] When replacing the cutting tool, the display unit 80 displays a tool replacement screen 100, and information related to the unused cutting tool is input. Furthermore, the cutting tool 40 mounted on the cutting unit 26 is removed, and the unused cutting tool is mounted on the cutting unit 26. Then, when the end key 106 is selected while the input information is displayed on the first display unit 102, the cutting tool replacement operation is completed, and processing of the workpiece 11 resumes.

[0076] In the cutting device 2 of this embodiment, when the end key 106 is selected, it is checked whether the cutting tool has actually been attached or detached. Furthermore, if it is determined that the cutting tool has not been attached or detached, the cutting device 2 does not permit the cutting tool replacement process and issues a warning. This prevents the workpiece 11 from being erroneously machined by a consumed cutting tool, thereby preventing machining defects.

[0077] Figure 5 Flowchart showing the operation of the cutting device 2. Figure 1 and Figure 5 The specific example of the operation of the cutting device 2 will be described. The operation of each component of the cutting device 2 during the replacement operation of the cutting tool is controlled by the control unit 88 (see Figure 1 )control.

[0078] exist Figure 1 The functional configuration of the control unit 88 is shown in a block diagram. The control unit 88 includes an outer diameter calculation unit 90, which calculates the outer diameter of the cutting tool attached to the cutting unit 26; and a tool determination unit 92, which determines whether the cutting tool attached to the cutting unit 26 is an unused cutting tool based on the outer diameter calculated by the outer diameter calculation unit 90. Furthermore, the control unit 88 includes a cover opening / closing determination unit 94, which determines whether the cover 86c enclosing the machining area B is open or closed.

[0079] The determination results of the tool determination unit 92 and the determination results of the cover opening / closing determination unit 94 are input to the drive unit 96. The drive unit 96 then drives the various components of the cutting device 2 based on the input determination results. In addition, the outer diameter calculation unit 90, the tool determination unit 92, and the cover opening / closing determination unit 94 are each connected to the storage unit 98 and process information stored in the storage unit 98.

[0080] like Figure 5 As shown, first, the operator operates the input unit 82 to display the tool replacement screen 100 (see Figure 3) (Step S1). Then, the operator inputs information related to the unused cutting tool (replacement cutting tool) by operating the input unit 82. As a result, the input various information is displayed on the first display unit 102 (display fields 102a to 102h) of the tool replacement screen 100.

[0081] When the tool replacement screen 100 is displayed on the display unit 80, the lock on the cover 86c covering the machining area B is released by the control unit 88, allowing the cover 86c to be opened and closed. The operator then opens the cover 86c, replaces the used cutting tool 40 mounted on the cutting unit 26 with an unused cutting tool, and then closes the cover 86c. The operator then operates the input unit 82 to select the end key 106 on the tool replacement screen 100, indicating that the cutting tool replacement process has been completed.

[0082] When the end key 106 is selected ("YES" in step S2), the control unit 88 stores the information displayed on the second display unit 104 (display fields 104a-104d) of the tool replacement screen 100 in the storage unit 98. This backs up the usage status of the used cutting tool 40 (number of machining lines, machining distance, consumption of the cutting tool 40, and maximum rotational speed of the rotary shaft 32). However, there is no restriction on the timing of backing up the usage status of the cutting tool 40.

[0083] Then, after the last cutting tool replacement operation, the control unit 88 checks whether the cover 86c covering the cutting unit 26 is opened or closed (step S3). For example, the cutting device 2 is provided with a push-button switch (safety button) that is pressed by the operator when the cover 86c is opened or closed. Alternatively, a sensor that detects the opening and closing of the cover 86c may be provided near the cover 86c.

[0084] Information on whether the safety button has been pressed and the sensor detection result of the cover 86c being opened or closed is stored in the storage unit 98. Then, when the end key 106 is selected, the cover opening / closing determination unit 94 accesses the storage unit 98 and refers to the information stored in the storage unit 98 to determine whether the cover 86c is opened or closed.

[0085] Here, if the cutting tool has not actually been attached or detached, the storage unit 98 does not store any information indicating that the cover 86c is open (e.g., information indicating that the safety button has been pressed, information indicating that the cover 86c has been opened or closed by the sensor). In this case, the cover opening / closing determination unit 94 determines that the cover 86c is not open or closed ("No" in step S4), and does not permit replacement of the cutting tool (step S5). In this case, the control unit 88 does not close the tool replacement screen 100 or confirm the information displayed on the first display unit 102 of the tool replacement screen 100.

[0086] Furthermore, the determination result of the cover opening / closing determination unit 94 (that the cover 86c is not opened / closed) is input to the driving unit 96. Then, the driving unit 96, having received the determination result, drives predetermined components of the cutting device 2 (such as the display unit 80) and issues a warning to inform that the cutting tool has not been attached or detached (step S6).

[0087] Furthermore, the method for issuing the warning is not limited. For example, the driver 96 may cause the display unit 80 to display a message indicating that the cutting tool has not been replaced. Alternatively, the cutting device 2 may include a warning light, and the driver 96 may cause the warning light to illuminate or flash. Furthermore, the cutting device 2 may include a speaker, and the driver 96 may cause the speaker to emit a warning sound or a voice notifying the content of the warning.

[0088] Furthermore, the control unit 88 reads the information related to the usage status of the cutting tool 40 backed up in the storage unit 98 and restores (re-displays) it on the second display unit 104 (display fields 104a to 104d) of the tool replacement screen 100 (step S7). As a result, the second display unit 104 returns to the state when the tool replacement screen 100 was displayed on the display unit 80 (step S1).

[0089] On the other hand, if the cover opening / closing determination unit 94 determines that the cover 86c is open or closed ("YES" in step S4), the determination result is input to the drive unit 96. The drive unit 96 then controls the detection unit 68 and the plunge feed unit 28, causing the detection unit 68 to detect the tip position (lower end position) of the cutting tool 40 (step S8). The detection result is then input from the detection unit 68 to the outer diameter calculation unit 90, and information on the height position of the cutting unit 26 being detected is input from the plunge feed unit 28 to the outer diameter calculation unit 90.

[0090] The outer diameter calculation unit 90 calculates the outer diameter of the cutting tool mounted on the cutting unit 26 based on the signals input from the detection unit 68 and the cutting feed unit 28. For example, the storage unit 98 stores in advance the data indicating the light emitted from the light projecting unit 72a of the detection unit 68 to the light receiving unit 72b (see Figure 3 ) is blocked by the cutting tool when the height position of the cutting unit 26 and the outer diameter of the cutting tool. In addition, the outer diameter calculation unit 90 refers to the information stored in the storage unit 98 to determine the outer diameter of the cutting tool attached to the cutting unit 26.

[0091] The outer diameter value calculated by the outer diameter calculation unit 90 is input to the tool determination unit 92. The tool determination unit 92 then determines whether the cutting tool attached to the cutting unit 26 is an unused cutting tool based on the outer diameter input from the outer diameter calculation unit 90. Specifically, the storage unit 98 pre-stores the outer diameter value (reference outer diameter value) of the unused cutting tool to be replaced with the used cutting tool 40. This reference outer diameter value corresponds to the outer diameter value of the unused cutting tool displayed on the first display unit 102 (display field 102e) of the tool replacement screen 100.

[0092] The tool determination unit 92 then compares the outer diameter value input from the outer diameter calculation unit 90 with the reference outer diameter value. If an unused cutting tool is correctly mounted on the cutting unit 26, the outer diameter value calculated by the outer diameter calculation unit 90 agrees with the reference outer diameter value, or the difference is within a predetermined error range (e.g., ±10 μm). In this case, the tool determination unit 92 determines that the outer diameter of the cutting tool mounted on the cutting unit 26 corresponds to the outer diameter of the replacement tool ("YES" in step S9), and allows the replacement of the cutting tool (step S10).

[0093] When the cutting tool replacement is permitted, the information displayed on the first display unit 102 of the tool replacement screen 100 is finalized and stored in the storage unit 98, and the information displayed on the second display unit 104 is reset.

[0094] On the other hand, if the cutting tool 40 remains mounted on the cutting unit 26 after use and the cutting tool has not been installed or removed, the outer diameter calculated by the outer diameter calculation unit 90 is smaller than the reference outer diameter value. Furthermore, if the outer diameter value input from the outer diameter calculation unit 90 differs from the reference outer diameter value, or if the difference falls outside a predetermined error range, the tool determination unit 92 determines that the outer diameter of the cutting tool mounted on the cutting unit 26 does not correspond to the outer diameter of the replacement tool ("No" in step S9), and tool replacement is not permitted (step S5). Then, similar to the case where the cover 86c is not open or closed, a warning is issued (step S6) and the display on the second display unit 104 is restored (step S7).

[0095] When the cutting device 2 issues a warning, the operator correctly mounts the unused cutting tool on the cutting unit 26 and then selects the end key 106 on the tool replacement screen 100. This completes the replacement of the cutting tool and allows the workpiece 11 to be processed using the unused cutting tool.

[0096] The operation of the cutting device 2 is controlled by the control unit 88. Specifically, the memory unit 98 stores the description Figure 5The control unit 88 reads and executes the program for the series of operations shown in FIG. 9 from the storage unit 98. This generates control signals for controlling the operations of the various components of the cutting device 2, thereby realizing the replacement process of the cutting tool.

[0097] As described above, in the cutting device 2 of this embodiment, if the outer diameter of the cutting tool attached to the cutting unit 26 does not correspond to the outer diameter of an unused cutting tool, or if there is no information indicating that the cover 86c enclosing the cutting unit 26 is open, even if the End key 106 on the tool replacement screen 100 is selected, the cutting tool replacement is not permitted, and a warning is issued. This prevents the workpiece 11 from being inadvertently machined by a used cutting tool, and allows the operator to easily recognize that the cutting tool has not been correctly replaced. This ensures reliable replacement of the cutting tool, preventing machining defects.

[0098] In addition, in this embodiment, an example is described in which whether the cutting tool attached to the cutting unit 26 is used or unused is determined based on the correspondence between the opening and closing of the cover 86c (step S4) and the outer diameter of the cutting tool (step S9). However, the cutting device 2 may determine whether the cutting tool is used or unused based on only one of the correspondence between the opening and closing of the cover 86c and the outer diameter of the cutting tool.

[0099] In addition, the structure, method, etc. of the above-mentioned embodiment can be implemented with appropriate changes within the scope not departing from the purpose of the present invention.

Claims

1. A cutting device, comprising: a holding unit for holding the workpiece; a cutting unit having a rotatable cutting tool, wherein the cutting tool cuts the workpiece held by the holding unit; a machining feed unit that moves the holding unit and the cutting unit relatively along a machining feed direction; a cutting feed unit that moves the cutting unit along a cutting direction; a detection unit that detects a front end position of the cutting tool; a freely openable and closable cover that encloses a processing area where the cutting unit is installed; and Display unit, It is characterized by: The cutting unit contains: Rotation axis; a housing that rotatably supports the rotating shaft; and The flange is provided at the front end of the rotating shaft and is used for detachably mounting the cutting tool. The display unit shows the tool change screen. The tool change screen contains: a first display portion for displaying an outer diameter and a protrusion of a cutting edge of an unused cutting tool to be replaced with the cutting tool; a second display portion that displays the amount of consumption of the cutting edge of the cutting tool; and The end button ends the replacement process of the cutting tool. When the end key is selected, the front end position of the cutting tool is detected by the detection unit. When the outer diameter of the cutting tool mounted on the cutting unit corresponds to the outer diameter of the unused cutting tool displayed on the first display unit, replacement of the cutting tool is permitted; when the outer diameter of the cutting tool mounted on the cutting unit does not correspond to the outer diameter of the unused cutting tool displayed on the first display unit, replacement of the cutting tool is not permitted and a warning is issued; Until the end key is selected and the front end position of the cutting tool is detected by the detection unit despite the absence of information that the cover is opened, replacement of the cutting tool is not allowed and a warning is issued to prevent the workpiece from being accidentally processed by the used cutting tool.

2. The cutting device according to claim 1, characterized in that The consumption displayed on the second display is backed up, Even when the end key is selected, the consumption amount can be restored in the second display unit.

3. The cutting device according to claim 1 or 2, characterized in that: When the tool replacement screen is displayed on the display unit, the cover can be opened and closed.

4. A cutting device comprising: a holding unit for holding the workpiece; a cutting unit having a rotatable cutting tool, wherein the cutting tool cuts the workpiece held by the holding unit; a machining feed unit that moves the holding unit and the cutting unit relatively along a machining feed direction; a cutting feed unit that moves the cutting unit along a cutting direction; a freely openable and closable cover that encloses a processing area where the cutting unit is installed; and Display unit, It is characterized by: The cutting unit contains: Rotation axis; a housing that rotatably supports the rotating shaft; and The flange is provided at the front end of the rotating shaft and is used for detachably mounting the cutting tool. The display unit shows the tool change screen. The tool change screen contains: a first display portion for displaying an outer diameter and a protrusion of a cutting edge of an unused cutting tool to be replaced with the cutting tool; a second display portion that displays the amount of consumption of the cutting edge of the cutting tool; and The end button ends the replacement process of the cutting tool. When the tool replacement screen is displayed on the display unit, the cover can be opened and closed. Until the end key is selected and the front end position of the cutting tool is detected by the detection unit despite the absence of information that the cover is opened, replacement of the cutting tool is not allowed and a warning is issued to prevent the workpiece from being accidentally processed by the used cutting tool.

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