trimming component

Abstract

This invention provides a dressing component that reduces costs. The dressing component is used in dressing a cutting tool performed by a cutting device, the cutting device comprising: a chuck table for holding a workpiece; a cutting unit for cutting the workpiece held by the chuck table using a cutting tool; a cassette holder for holding a cassette containing the workpiece; and a conveying unit for conveying the workpiece between the cassette holder and the chuck table. The dressing component comprises: a dressing plate for being cut by the cutting tool; and a rigid plate fixed to the dressing plate.

Description

Technical Field

[0001] This invention relates to a dressing component for dressing cutting tools used to cut workpieces. Background Technology

[0002] By dicing a wafer containing multiple integrated circuit (IC) chips, large-scale integration (LSI) chips, and other devices, multiple device chips, each containing a device, are manufactured. Furthermore, after mounting the multiple device chips onto a defined substrate, the mounted device chips are covered with a sealing material (molding resin) formed of resin, thereby obtaining a packaging substrate. By dicing this packaging substrate, packaged devices containing multiple packaged device chips are manufactured. Device chips and packaged devices are incorporated into various electronic devices such as mobile phones and personal computers.

[0003] A cutting device is used when dividing the workpieces such as wafers and packaging substrates. The cutting device includes a chuck stage for holding the workpieces and a cutting unit equipped with an annular cutting tool for cutting the workpieces. By rotating the cutting tool and cutting into the workpieces, the workpieces are cut and divided.

[0004] The workpieces are stored in a box, supported by a ring-shaped frame using a belt. The cutting device then removes the workpieces, supported by the frame, one by one from the box and transfers them to the chuck table, where they are machined using a cutting tool. After machining, the workpieces are cleaned and then stored back in the box (see Patent Document 1).

[0005] When machining a workpiece using a cutting tool, dressing is performed to intentionally wear the tip of the cutting tool for purposes such as correcting its shape and ensuring its sharpness. For example, dressing is performed by holding a plate-shaped component (dressing plate) used for dressing the cutting tool on the chuck table of the cutting device and cutting the cutting tool into the dressing plate.

[0006] The cutting tool is constructed of a bonding material containing abrasive grains and fixed abrasive grains. During dressing, the bonding material comes into contact with the dressing plate and wears, the shape of the cutting tool is adjusted to be round (rounding), and the abrasive grains are moderately exposed from the bonding material (sharpening). By using a cutting tool that has been dressed in this way, machining accuracy is improved.

[0007] The dressing plate is supported by an annular frame in the same way as the workpiece. Specifically, the dressing plate is supported by the frame by means of a belt while being disposed inside a circular opening located in the center of the frame (see Patent Document 2). As a result, the cutting device can process the dressing plate in the same way as the workpiece, and can perform cutting tool dressing by the same action as when the cutting tool cuts the workpiece.

[0008] Patent Document 1: Japanese Patent Application Publication No. 2001-110756

[0009] Patent Document 2: Japanese Patent Application Publication No. 2012-187692

[0010] When dressing cutting tools, linear grooves are sequentially formed on the front side of the dressing plate. Furthermore, when grooves are formed throughout the entire area of ​​the dressing plate, the used dressing plate is discarded and replaced with a new one. Therefore, by increasing the size of the dressing plate and thus the number of grooves that can be formed on a single dressing plate, the frequency of dressing plate replacement can be reduced, thereby achieving cost reduction.

[0011] However, when dressing cutting tools using a cutting device, the dressing plate is supported by a ring-shaped frame, just like the workpiece. Therefore, the dressing plate needs to be sized to fit within the opening of the frame. Furthermore, to reliably hold the dressing plate using the chuck table, its dimensions are set such that the entire dressing plate is held by the holding surface of the chuck table. As a result, the size of the dressing plate is limited, restricting its ability to be made large.

[0012] In addition, to support the trimming plate using the ring-shaped frame, tape needs to be attached to both the trimming plate and the frame. Therefore, the tape is consumed each time the trimming plate is replaced, increasing costs. Summary of the Invention

[0013] The present invention was made in view of the above-mentioned problems, and its object is to provide a trimming component that can reduce costs.

[0014] According to one aspect of the present invention, a dressing component is provided for dressing a cutting tool performed by a cutting device, the cutting device comprising: a chuck table for holding a workpiece; a cutting unit for cutting the workpiece held by the chuck table using the cutting tool; a box-holding portion for holding a box containing the workpiece; and a conveying unit for conveying the workpiece between the box held in the box-holding portion and the chuck table, wherein the dressing component comprises: a dressing plate for being cut by the cutting tool; and a rigid plate fixed to the dressing plate, the dressing component being movable out of the box by the conveying unit, being held by the chuck table, and being moved into the box by the conveying unit.

[0015] Furthermore, the dressing component preferably has an information display section that displays information related to the dressing plate. Additionally, the chuck table preferably has a circular holding surface for holding the workpiece and the rigid plate, and the dressing plate is rectangular, with the length of its diagonal greater than the diameter of the holding surface. Furthermore, the workpiece is preferably supported by a ring-shaped frame via a belt, and the outer periphery of the rigid plate corresponds to the outer periphery of the frame.

[0016] One aspect of the dressing component of the present invention includes: a dressing plate, which is cut by a cutting tool; and a rigid plate fixed to the dressing plate. Thus, the dressing component and the workpiece unit can be transported and held in the same manner within the cutting apparatus, and the dressing plate can be made larger, thereby reducing costs. Attached Figure Description

[0017] Figure 1 This is a perspective view showing the cutting device.

[0018] Figure 2 It is a three-dimensional view showing the workpiece unit.

[0019] Figure 3 It is a three-dimensional view showing the trimmed parts.

[0020] Figure 4 It is a perspective view showing the box that houses the workpiece unit and the finishing parts.

[0021] Figure 5 (A) is a top view showing the trimming component with an information display section. Figure 5 (B) is a top view showing the trimmed part of the rigid plate that has been colored. Figure 5 (C) is a top view showing a trimming component with an information display section that uses symbols to represent information related to the trimming plate.

[0022] Figure 6 (A) is a partial cross-sectional front view showing the workpiece unit being conveyed by the conveying unit. Figure 6 (B) is a partial cross-sectional front view showing the workpiece unit held by the chuck table.

[0023] Figure 7 (A) is a partial cross-sectional front view showing the trimming component being transported by the conveying unit. Figure 7 (B) is a partial cross-sectional front view showing the dressing components held by the chuck table.

[0024] Label Explanation

[0025] 11: Workpiece unit (frame unit); 13: Workpiece; 13a: Front; 13b: Back; 15: Dividing pre-line (spacer); 17: Component; 19: Belt (dicing belt); 21: Frame; 21a: Opening; 21b: Marking part; 23: Trimming component (trimming unit); 25: Trimming plate; 25a: Front; 25b: Back; 25c: Groove; 27: Rigid plate; 27a: Front; 27b: Back; 27c: Marking part; 29: Information display part; 31: Information display part; 2: Cutting device; 4: Base; 4a: Opening; 4b: Opening; 6: Box mounting part (box mounting platform); 8: Box; 8a: Storage part; 8b: Side; 8c: Side wall; 8d: Guide rail; 10: Moving mechanism; 10a: Moving worktable; 12: Dustproof and dripproof cover; 14: Chuck worktable (protection) 14a: Holding surface; 14b: Flow path; 16: Fixture; 18: Guide rail; 20: First support structure; 22: Track; 24: Moving mechanism; 26: Conveying unit (conveying mechanism); 26a: Holding part (holding mechanism); 28: Track; 30: Moving mechanism; 32: Conveying unit (conveying mechanism); 34: Second support structure; 36a, 36b: Moving mechanism; 38a, 38b: Cutting unit; 40: Cutting tool; 42: Imaging unit (camera); 44: Cleaning unit; 46: Rotary table; 48: Nozzle; 50: Cover; 52: Display unit (display device); 54: Notification unit (notification unit); 56: Control unit (control unit); 60: Base; 62: Suction pad; 62a: Holding surface; 64: Valve; 66: Suction source; 68: Spindle. Detailed Implementation

[0026] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. First, an example of the structure of a cutting apparatus capable of dressing a cutting tool using the dressing component of this embodiment will be described. Figure 1 This is a perspective view showing the cutting device 2. Additionally, in Figure 1 In this diagram, the X-axis (machining feed direction, first horizontal direction, forward / backward direction) and Y-axis (indexing feed direction, second horizontal direction, left / right direction) are perpendicular to each other. Additionally, the Z-axis (vertical direction, up / down direction, height direction) is perpendicular to both the X-axis and Y-axis.

[0027] The cutting device 2 has a base 4 that supports or houses the various structural elements constituting the cutting device 2. A rectangular opening 4a is formed at the front corner of the base 4, opening onto the upper surface of the base 4. In addition, a rectangular opening 4b is formed to the side of the opening 4a, opening onto the upper surface of the base 4 and extending along the X-axis.

[0028] Inside the opening 4a, there is a box-mounting section (box-mounting platform) 6, which holds the workpiece unit 11 (described later) that can be stored. Figure 2 ) and trimming parts 23 (see reference) Figure 3 The box 8 is a case. The box mounting section 6 is connected to a lifting mechanism (not shown), which moves the box mounting section 6 up and down along the Z-axis. Furthermore, the box 8 is mounted on the upper surface of the box mounting section 6. Additionally, in... Figure 1 The outline of box 8 is shown only by dashed lines.

[0029] Figure 2 This is a perspective view showing the workpiece unit (frame unit) 11 housed in the box 8. The workpiece unit 11 has a workpiece 13 that is the object of cutting by the cutting device 2. The workpiece 13 is, for example, a disk-shaped semiconductor wafer made of silicon or the like, having a front side 13a and a back side 13b that are substantially parallel to each other.

[0030] The workpiece 13 is divided into multiple rectangular regions by a series of pre-defined dividing lines (spacers) 15 arranged in a grid pattern and intersecting with each other. Furthermore, ICs, LSIs, and other devices 17 are formed on the front side 13a of the regions divided by the pre-defined dividing lines 15. By cutting along the pre-defined dividing lines 15, multiple device chips, each equipped with a device 17, can be obtained.

[0031] Furthermore, there are no restrictions on the material, shape, structure, or size of the workpiece 13. For example, the workpiece 13 can be a wafer of any shape and size made of semiconductors other than silicon (GaAs, InP, GaN, SiC, etc.), sapphire, glass, ceramics, resin, metal, etc. Additionally, there are no restrictions on the type, quantity, shape, structure, size, or arrangement of the device 17, and the device 17 may not even be formed on the workpiece 13. Moreover, the workpiece 13 can also be a CSP (Chip Size Package) substrate, a QFN (Quad Flat Non-leaded package) substrate, or other packaging substrates.

[0032] A circular strip (dicing strip) 19 with a diameter larger than that of the workpiece 13 is adhered to the back side 13b of the workpiece 13. For example, the strip 19 may be a sheet material having a circular, thin film substrate and an adhesive layer (paste layer) disposed on the substrate. The substrate may be formed of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer may be formed of an epoxy, acrylic, or rubber-based adhesive. Alternatively, the adhesive layer may be made of a UV-curable resin that is cured by irradiation with ultraviolet light.

[0033] The outer periphery of the belt 19 is attached to a ring-shaped frame 21 made of metal such as SUS (stainless steel). A circular opening 21a with a diameter larger than that of the workpiece 13 is provided in the center of the frame 21. The workpiece 13 is attached to the center of the belt 19 such that it is positioned inside the opening 21a of the frame 21. Thus, the workpiece 13 is supported by the frame 21 by means of the belt 19, forming the workpiece unit 11.

[0034] Additionally, a pair of marking portions 21b indicating the orientation of the frame 21 are provided on a portion of the outer periphery of the frame 21. For example, the marking portions 21b may be formed in a region (cutout) that is missing from a portion of the outer periphery of the frame 21.

[0035] Figure 3 This is a perspective view showing the dressing component (dressing unit) 23 housed together with the workpiece unit 11 in the box 8. The dressing component 23 is a component used for dressing the cutting tool 40, which will be described later.

[0036] The dressing component 23 has a plate-shaped dressing plate 25. The dressing plate 25 is rectangular in shape, for example, when viewed from above, and has a generally parallel front side 25a and a back side 25b. The dressing plate 25 contains abrasive grains and a bonding material (bonding material) for fixing the abrasive grains. For example, the dressing plate 25 is formed by fixing abrasive grains made of green corundum (GC), white corundum (WA), etc., using a bonding material such as a resin binder or a ceramic binder.

[0037] Furthermore, there are no restrictions on the materials of the abrasive grains and bonding materials included in the dressing plate 25, and they are appropriately selected based on the material, thickness, diameter, etc., of the cutting tool 40 to be dressed. In addition, there are no restrictions on the content and particle size of the abrasive grains included in the dressing plate 25. For example, the abrasive grains are included in the dressing plate 25 at a ratio of 55% to 65% by weight. Furthermore, the average particle size of the abrasive grains is, for example, 0.1 μm or more and 50 μm or less.

[0038] There are no restrictions on the method of forming the dressing plate 25. For example, after impregnating abrasive grains in a resin such as phenolic resin or epoxy resin, the resin is molded into a plate shape and fired at a specified temperature (e.g., above 150°C and below about 200°C) to form the dressing plate 25.

[0039] A rigid plate 27 is fixed to the trimming plate 25. The rigid plate 27 is a component with sufficient rigidity to support the trimming plate 25, and has a generally parallel front side 27a and a back side 27b. The rigidity of the rigid plate 27 is set so that when the trimming plate 25 is cut using the cutting tool 40 as described later (see reference...). Figure 7 (B)) The front 25a and back 25b of the trimming plate 25 are kept parallel to the holding surface 14a of the chuck table 14.

[0040] Examples of materials that can be used for the rigid plate 27 include resin (plastic, etc.), glass (quartz glass, borosilicate glass, etc.), ceramics, and metals. For example, a plastic sheet with a thickness of 2 mm or more and less than 10 mm can be used as the rigid plate 27. Since plastic is lighter than metals such as SUS, it is easy to transport the rigid plate 27 when it is made of plastic.

[0041] The trimming plate 25 is fixed to the front side 27a of the rigid plate 27. For example, the trimming plate 25 is bonded to the rigid plate 27 via an adhesive in such a way that the entire back side 25b contacts the front side 27a of the rigid plate 27. As an adhesive, for example, an adhesive resin such as epoxy resin or acrylic resin can be used. Thus, the trimming plate 25 is supported by the rigid plate 27, forming the trimming component 23.

[0042] A pair of marking portions 27c indicating the orientation of the rigid plate 27 are provided on a portion of the outer periphery of the rigid plate 27. For example, the marking portions 27c are formed as a region (cutout) that is missing from a portion of the outer periphery of the rigid plate 27. The shape of the marking portion 27c can be set to match the marking portion 21b of the frame 21 (see reference). Figure 2 They have the same shape.

[0043] Figure 4 This is a perspective view of a box 8 that houses the workpiece unit 11 and the trimming component 23. For example, the box 8 is formed as a cuboid box shape, and has a cuboid storage section 8a inside that can hold multiple workpiece units 11 and trimming components 23. The storage section 8a is connected to the external space through a rectangular opening formed on the side 8b of the box 8. The workpiece units 11 and trimming components 23 are transported (moved out of the box 8 and moved into the box 8) through this opening.

[0044] Inside the storage section 8a, a pair of sidewalls 8c face each other. Furthermore, a pair of guide rails 8d, arranged vertically along the sidewalls 8c, provide multiple levels of support for the workpiece unit 11 and the trimming member 23. When the workpiece unit 11 is inserted into the storage section 8a of the box 8, the lower surface of the frame 21 is supported by the pair of guide rails 8d. Additionally, when the trimming member 23 is inserted into the storage section 8a of the box 8, the back surface 27b of the rigid plate 27 is supported by the pair of guide rails 8d.

[0045] Furthermore, the workpiece unit 11 is housed in the box 8 with the marking portion 21b of the frame 21 arranged in a predetermined orientation. Similarly, the trimming component 23 is housed in the box 8 with the marking portion 27c of the rigid plate 27 arranged in a predetermined orientation. As a result, the orientations of the workpiece unit 11 and the trimming component 23 can be aligned.

[0046] The size and shape of the frame 21 and the rigid plate 27 are not limited as long as they can be housed in the box 8. For example, the rigid plate 27 is formed such that the outline of the outer periphery of the rigid plate 27 corresponds to the outline of the outer periphery of the frame 21. More specifically, the rigid plate 27 can be formed such that when the frame 21 and the rigid plate 27 overlap, the difference between the position of the outer periphery of the frame 21 and the position of the outer periphery of the rigid plate 27 is 10 mm or less, preferably 5 mm or less.

[0047] Furthermore, especially when the frame 21 is annular and the rigid plate 27 is disc-shaped, the rigid plate 27 can be formed such that the difference between the outer diameter (diameter of the outer perimeter) of the frame 21 and the outer diameter (diameter of the outer perimeter) of the rigid plate 27 is 20 mm or less, preferably 10 mm or less. In this way, when the outline of the frame 21 corresponds to the outline of the rigid plate 27, the trimming component 23 and the workpiece unit 11 can be processed in the same way in the cutting device 2, thereby enabling the trimming component 23 and the workpiece unit 11 to be transported and held in the same way.

[0048] However, the rigid plate 27 can also be larger than the frame 21. More specifically, the rigid plate 27 can also be configured such that, when the frame 21 overlaps with the rigid plate 27, the outer periphery of the rigid plate 27 is positioned further outward than the outer periphery of the frame 21. In this case, compared to the case where the frame 21 and the rigid plate 27 are the same size, the area of ​​the front surface 27a of the rigid plate 27 becomes larger, and the rigid plate 27 can support the larger trimming plate 25.

[0049] The box 8 containing the workpiece unit 11 and the trimming parts 23 is placed in Figure 1 The box 8 is placed on the box mounting section 6 shown. At this time, the box 8 is arranged such that the side 8b with the opening faces the opening 4b side of the base 4.

[0050] Inside the opening 4b is a ball screw type moving mechanism 10 and a corrugated dustproof and dripproof cover 12 that covers a portion of the moving mechanism 10. The moving mechanism 10 has a moving worktable 10a exposed from the dustproof and dripproof cover 12, which moves along the X-axis.

[0051] A chuck table (holding table) 14 is provided on the movable worktable 10a to hold the workpiece unit 11 and the dressing component 23. The upper surface of the chuck table 14 forms a holding surface 14a for holding the workpiece unit 11 and the dressing component 23. In addition, a plurality of clamps 16 are provided around the chuck table 14, which hold and fix the frame 21 of the workpiece unit 11.

[0052] The moving mechanism 10 moves the chuck table 14 and the moving table 10a together along the X-axis. Furthermore, the chuck table 14 is connected to a rotary drive source (not shown) such as an electric motor, which rotates the chuck table 14 about a rotation axis that is approximately parallel to the Z-axis.

[0053] A pair of guide rails 18 are provided on the front side above the opening 4b of the base 4. These guide rails 18 maintain a state approximately parallel to the Y-axis while moving closer to and further away from each other. Each pair of guide rails 18 has: a support surface that supports the lower surface of the workpiece unit 11 (the lower surface of the frame 21) and the lower surface of the trimming member 23 (the back surface 27b of the rigid plate 27); and a side surface that is approximately perpendicular to the support surface and contacts the outer periphery of the frame 21 or the outer periphery of the rigid plate 27. The pair of guide rails 18 clamp the workpiece unit 11 and the trimming member 23 along the X-axis, aligning the workpiece unit 11 and the trimming member 23.

[0054] Additionally, a portal-shaped first support structure 20 is arranged on the upper surface of the base 4, spanning the opening 4b. A track 22 is fixed along the Y-axis on the front surface side (guide rail 18 side) of the first support structure 20. A conveying unit (conveying mechanism) 26 is connected to this track 22 via a moving mechanism 24.

[0055] The moving mechanism 24 moves the conveying unit 26 along the track 22 in the Y-axis direction. Additionally, the moving mechanism 24 has a cylinder with a built-in rod that moves up and down in the Z-axis direction. The conveying unit 26 is fixed to the lower end of the rod of the cylinder.

[0056] The conveying unit 26 moves up and down along the Z-axis via the moving mechanism 24 and moves along the Y-axis along the track 22. In addition, a holding part (holding mechanism) 26a is provided at the front end of the conveying unit 26 on the opening 4a side (box 8 side) to hold the workpiece unit 11 and the trimming component 23.

[0057] The transfer unit 26 transfers the workpiece unit 11 between the box 8 and the chuck table 14. Specifically, the transfer unit 26 moves away from the box 8 along the Y-axis while holding the frame 21 of the workpiece unit 11 stored in the box 8 using the gripping part 26a. As a result, the workpiece unit 11 is removed from the box 8 and placed on a pair of guide rails 18. Then, the transfer unit 26 holds the frame 21 of the workpiece unit 11 placed on the pair of guide rails 18 and transfers the workpiece unit 11 to the chuck table 14.

[0058] Furthermore, the conveying unit 26 moves along the Y-axis towards the box 8 while holding the frame 21 of the workpiece unit 11, which is arranged on a pair of guide rails 18, with the holding part 26a. As a result, the workpiece unit 11 is moved into the box 8 and stored there.

[0059] Similarly, the transfer unit 26 transfers the trimming component 23 between the housing 8 and the chuck table 14. Specifically, the transfer unit 26 moves away from the housing 8 along the Y-axis while holding the rigid plate 27 of the trimming component 23 housed in the housing 8 using the gripping part 26a. As a result, the trimming component 23 is removed from the housing 8 and positioned on a pair of guide rails 18. Then, the transfer unit 26 holds the rigid plate 27 of the trimming component 23 positioned on the pair of guide rails 18 and transfers the trimming component 23 to the chuck table 14.

[0060] Furthermore, the conveying unit 26 moves along the Y-axis towards the box 8 while holding the rigid plate 27 of the trimming component 23, which is arranged on a pair of guide rails 18, with the holding part 26a. As a result, the trimming component 23 is moved into the box 8 and stored there.

[0061] In addition, the conveying unit 26 conveys the workpiece unit 11 and the trimming component 23 between the cleaning unit 44 (described later) and a pair of guide rails 18. The workpiece unit 11 and the trimming component 23, after being cleaned by the cleaning unit 44, are conveyed by the conveying unit 26 onto the guide rails 18.

[0062] A track 28 is fixed along the Y-axis on the front surface of the first support structure 20. A conveying unit (conveying mechanism) 32 is connected to the track 28 via a moving mechanism 30. The structures of the moving mechanism 30 and the conveying unit 32 are the same as those of the moving mechanism 24 and the conveying unit 26, respectively. The conveying unit 32 conveys the workpiece unit 11 and the trimming component 23 between the chuck table 14 and the cleaning unit 44.

[0063] A portal-shaped second support structure 34 is arranged behind the first support structure 20, spanning the opening 4b. A pair of ball screw-type moving mechanisms 36a and 36b are fixed to both ends of the front surface side (first support structure 20 side) of the second support structure 34. Furthermore, a cutting unit 38a is fixed to the lower part of the moving mechanism 36a, and a cutting unit 38b is fixed to the lower part of the moving mechanism 36b. The cutting units 38a and 38b use annular cutting tools 40 to cut the workpiece 13 of the workpiece unit 11.

[0064] The cutting unit 38a is moved along the Y-axis and Z-axis directions by the moving mechanism 36a, thereby adjusting the position of the cutting unit 38a in the Y-axis and Z-axis directions. Similarly, the cutting unit 38b is moved along the Y-axis and Z-axis directions by the moving mechanism 36b, thereby adjusting the position of the cutting unit 38b in the Y-axis and Z-axis directions.

[0065] Cutting units 38a and 38b each have a cylindrical spindle 68 (see reference). Figure 6 (B) and Figure 7 (B)). A ring-shaped cutting tool 40 is mounted on the front end of the spindle 68. The cutting tool 40 is a machining tool that cuts into the workpiece 13 to cut the workpiece 13.

[0066] As a cutting tool 40, for example, a hub-type cutting tool is used, which integrates a ring-shaped base formed of metal or the like and a ring-shaped cutting edge formed along the outer periphery of the base. The cutting edge of the hub-type cutting tool is made of an electroformed abrasive, which is formed by fixing abrasive grains made of diamond, cubic boron nitride (cBN), or the like using a bonding material such as nickel plating. Alternatively, as a cutting tool 40, a washer-type cutting tool with a ring-shaped cutting edge can also be used, which is formed by fixing abrasive grains using a bonding material made of metal, ceramic, resin, or the like.

[0067] in addition, Figure 1 The diagram shows an example of a so-called facing dual-axis cutting device, in which the cutting device 2 has two sets of cutting units 38a and 38b and a pair of cutting tools 40 arranged facing each other. However, the number of cutting units provided in the cutting device 2 may also be one set.

[0068] Imaging units (cameras) 42 are respectively provided adjacent to cutting units 38a and 38b. These imaging units 42 photograph the workpiece unit 11 and dressing component 23 held by the chuck table 14. For example, the imaging unit 42 is composed of a visible light camera or an infrared camera. The visible light camera has an imaging element that receives visible light and converts it into an electrical signal, and the infrared camera has an imaging element that receives infrared light and converts it into an electrical signal.

[0069] Based on the images acquired by the imaging unit 42, the workpiece 13 of the workpiece unit 11 held by the chuck table 14 is aligned with the cutting units 38a and 38b. Additionally, based on the images acquired by the imaging unit 42, the dressing plate 25 of the dressing component 23 held by the chuck table 14 is aligned with the cutting units 38a and 38b.

[0070] A cleaning unit 44 is arranged on the side opposite to the opening 4a of the opening 4b. The cleaning unit 44 has a rotary table 46 that holds the workpiece unit 11 and the trimming component 23 within a cylindrical cleaning space. The rotary table 46 is connected to a rotary drive source (not shown) that rotates the rotary table 46 about a rotation axis that is substantially parallel to the Z-axis direction.

[0071] A nozzle 48 is positioned above the rotary table 46, which supplies a cleaning fluid (e.g., a mixture of water and air) to the workpiece unit 11 and the dressing component 23 held by the rotary table 46. While the workpiece unit 11 is held by the rotary table 46, fluid is supplied from the nozzle 48 while the rotary table 46 is rotated, thereby cleaning the workpiece unit 11. Similarly, the dressing component 23 held by the rotary table 46 is also cleaned.

[0072] After the workpiece 13 is cut by the cutting units 38a and 38b, the workpiece unit 11 is transported by the conveying unit 32 to the cleaning unit 44 for cleaning. Then, the workpiece unit 11 is transported by the conveying unit 26 to a pair of guide rails 18 and stored in the box 8.

[0073] Similarly, after the trimming plate 25 is cut by the cutting units 38a and 38b, the trimming component 23 is transported by the conveying unit 32 to the cleaning unit 44 for cleaning. Then, the trimming component 23 is transported by the conveying unit 26 to a pair of guide rails 18 and stored in the box 8.

[0074] A cover 50 is provided on the upper side of the base 4, which covers all structural elements arranged on the base 4. Figure 1 In the diagram, only the outline of the cover 50 is shown using dashed lines. Additionally, a display unit (display unit, display device) 52 for displaying various information related to the cutting device 2 is provided on the side of the cover 50. For example, the display unit 52 may be a touch panel that functions as a user interface. In this case, the display unit 52 also functions as an input unit (input unit, input device) for inputting information into the cutting device 2.

[0075] Furthermore, a notification unit 54 is provided on the upper surface of the cover 50 to notify the operator of prescribed information. For example, the notification unit 54 may be a warning light that illuminates or flashes to notify the operator of an abnormality when an abnormality occurs in the cutting device 2. Alternatively, the notification unit 54 may also be a speaker or similar device that emits a sound or audio signal to notify the operator of the prescribed information.

[0076] The various structural elements constituting the cutting device 2 (box-mounted unit 6, moving mechanism 10, chuck table 14, fixture 16, guide rail 18, moving mechanism 24, conveying unit 26, moving mechanism 30, conveying unit 32, moving mechanisms 36a and 36b, cutting unit 38a and 38b, imaging unit 42, cleaning unit 44, display unit 52, notification unit 54, etc.) are connected to the control unit (control unit) 56. The control unit 56 generates control signals to control the operation of each structural element of the cutting device 2, thereby controlling the operation of the cutting device 2.

[0077] For example, the control unit 56 is configured as a computer and includes: a processing unit that performs various processing (calculations, etc.) required for the operation of the cutting device 2; and a storage unit that stores various information (data, programs, etc.) for the processing of the processing unit. The processing unit is configured to include a processor such as a CPU (Central Processing Unit). In addition, the storage unit is configured to include various memories constituting main storage devices, auxiliary storage devices, etc.

[0078] The cutting device 2 performs machining by cutting the workpiece 13 of the workpiece unit 11 housed in the box 8 using a cutting tool 40. In addition, the cutting device 2 performs dressing of the cutting tool 40 by cutting the dressing plate 25 of the dressing component 23 housed in the box 8 using the cutting tool 40.

[0079] Additionally, the trimming component 23 housed in the box 8 may also have an area (information display section) for displaying information related to the trimming plate 25. Figure 5 (A) is a top view showing the trimming component 23 with the information display section 29.

[0080] For example, the information display unit 29 is a barcode or QR code that displays information related to the dressing plate 25 and is attached to the front 27a side of the rigid plate 27. Examples of information related to the dressing plate 25 included in the information display unit 29 could include the size and type of the dressing plate 25 (material of the bonding material, material of the abrasive, abrasive grain size, etc.), serial number, and the type of cutting tool 40 used on the dressing plate 25.

[0081] Alternatively, the trimming component 23 may be fitted with a color that indicates information related to the trimming plate 25. Figure 5 (B) is a top view showing the trimming member 23 in which the rigid plate 27 has been colored. For example, when the front 27a side of the rigid plate 27 is colored according to the type of trimming plate 25, the operator can easily identify the type of trimming plate 25. In this case, the colored front 27a side of the rigid plate 27 functions as an information display unit.

[0082] In addition, markings (text, numbers, graphics, etc.) for indicating information related to the trimming plate 25 may be attached to the trimming component 23. Figure 5 (C) is a top view showing the trimming component 23, which has an information display section 31 that uses symbols to represent information related to the trimming plate 25.

[0083] exist Figure 5 In the trimming component 23 shown in (C), an information display section 31 is attached to the front side 23a of the trimming component 23, which uses markings to indicate the name and size of the trimming plate 25. When this information display section 31 is attached, the operator can instantly grasp the name and size of the trimming plate 25 by observing the trimming plate 25.

[0084] Furthermore, there are no restrictions on the method of retrieving information from the information display units 29 and 31. For example, the operator can directly visually confirm the information display units 29 and 31 attached to the trimming component 23 and grasp the information contained in the information display units 29 and 31. Alternatively, the imaging unit 42 (see reference) can also be used. Figure 1 The information display units 29 and 31 are photographed, and the captured images are magnified and displayed on the display unit 52. In this case, the operator can confirm the information display units 29 and 31 that are magnified and displayed on the display unit 52, and thus be able to grasp the information contained in the information display units 29 and 31.

[0085] Alternatively, a reading unit for reading the information display units 29 and 31 may be provided in the cutting device 2. For example, if the information display units 29 and 31 include symbols (text, numbers, graphics, etc.), barcodes, or QR codes, a reader for reading symbols, a barcode reader for reading barcodes, or a QR code reader for reading QR codes may be provided in the cutting device. Furthermore, the imaging unit 42 may also have the function of a reading unit, and the reading unit may be provided independently of the imaging unit 42.

[0086] The information read by the reading unit (read information) is input to the control unit 56 (see reference). Figure 1 Then, the control unit 56 reads the information related to the trimming plate 25 from the storage unit and displays it on the display unit 52. Thus, the operator can grasp the information related to the trimming plate 25.

[0087] Furthermore, the control unit 56 can also determine whether the dressing plate 25 is appropriate based on the read information. For example, if the reading unit reads that the dressing plate 25 is a dressing plate that should be used for dressing the cutting tools 40 installed in the cutting units 38a and 38b, the control unit 56 determines that the dressing plate 25 is an appropriate dressing plate. Then, the control unit 56 operates the cutting device 2 as usual and continues to dress the cutting tools 40.

[0088] On the other hand, if the dressing plate 25 is not a dressing plate intended for use in dressing the cutting tools 40 installed in the cutting units 38a and 38b, or if the number of grooves formed on the dressing plate 25 through past dressing has reached a certain level, the control unit 56 determines that the dressing plate 25 is an unsuitable dressing plate. Then, the control unit 56 interrupts the operation of the cutting device 2.

[0089] Furthermore, if the trimming plate 25 is not properly adjusted, the control unit 56 can also notify the display unit 52 or the notification unit 54 of the situation. For example, the control unit 56 can cause the display unit 52 to display a message indicating that the trimming plate 25 is not properly adjusted, and cause the notification unit 54 to light up or flash.

[0090] Next, a specific example of the operation of the cutting device 2 during the machining of the workpiece 13 and the dressing of the cutting tool 40 will be described.

[0091] When machining the workpiece 13 using the cutting device 2, firstly, the workpiece unit 11 (refer to) stored in the box 8 is... Figure 4 The workpiece unit 11 is moved out by the conveying unit 26. Specifically, the conveying unit 26 moves away from the box 8 along the Y-axis while holding the end of the frame 21 with the holding part 26a. As a result, the workpiece unit 11 is pulled out from the box 8 and placed on a pair of guide rails 18. Moreover, the workpiece unit 11 is clamped by the pair of guide rails 18 to perform alignment of the workpiece unit 11.

[0092] Next, the workpiece unit 11 is transported to the chuck worktable 14 by the transfer unit 26. Figure 6 (A) is a partial cross-sectional front view showing the workpiece unit 11 being conveyed by the conveying unit 26. Additionally, in Figure 6 In (A), the gripping part 26a is omitted (see reference). Figure 1 The illustration is shown.

[0093] The conveying unit 26 includes: a plate-shaped base 60 connected to the lower end of the moving mechanism 24; and a plurality of suction pads 62 fixed to the lower surface of the base 60. The lower surface of the suction pads 62 forms a holding surface 62a for attracting and holding the upper surface of the workpiece unit 11. The holding surface 62a is connected to a suction source (not shown) such as an injector via a flow path (not shown), a valve (not shown), etc., formed inside the suction pads 62.

[0094] The conveying unit 26 is configured such that the holding surfaces 62a of the plurality of suction pads 62 are in contact with the upper surface of the frame 21 of the workpiece unit 11. In this state, when a negative pressure from the suction source is applied to the holding surfaces 62a of the suction pads 62, the frame 21 is attracted and held by the conveying unit 26. Then, the workpiece unit 11 is conveyed by the conveying unit 26 to the chuck table 14 and held by the chuck table 14.

[0095] Figure 6 (B) is a partial cross-sectional front view showing the workpiece unit 11 held by the chuck table 14. The holding surface 14a of the chuck table 14 is connected to the suction source 66, such as an ejector, via a flow path 14b, a valve 64, etc., formed inside the chuck table 14.

[0096] The workpiece 13 is positioned on the chuck table 14 via the belt 19. Additionally, multiple clamps 16 are in a closed state, and the frame 21 is secured by the multiple clamps 16. In this state, when the valve 64 is opened, causing the negative pressure of the suction source 66 to act on the holding surface 14a, the workpiece 13 is attracted and held by the chuck table 14 via the belt 19.

[0097] Then, the workpiece 13 is machined using a cutting tool 40 mounted on the cutting unit 38a or a cutting tool 40 mounted on the cutting unit 38b. Additionally, in Figure 6 In (B), the case in which the workpiece 13 is machined by the cutting tool 40 mounted on the cutting unit 38b is shown, but the cutting tool 40 mounted on the cutting unit 38a can also be used in the machining of the workpiece 13.

[0098] Cutting units 38a and 38b have a cylindrical spindle 68 arranged along the Y-axis. A cutting tool 40 is fixed at the front end (one end) of the spindle 68, and a rotary drive source (not shown) such as an electric motor is connected to the base end (the other end) of the spindle 68. When the spindle 68 is rotated by the rotary drive source, the cutting tool 40 fixed to the spindle 68 rotates about a rotation axis that is approximately parallel to the Y-axis.

[0099] The workpiece 13 is cut by rotating the cutting tool 40 while cutting into it. For example, the cutting tool 40 cuts into the workpiece 13 along the predetermined dividing line 15 with a cutting depth exceeding the thickness of the workpiece 13. As a result, the workpiece 13 is divided into multiple device chips.

[0100] When the workpiece 13 is finished, the upper surface of the frame 21 is conveyed by the transfer unit 32 (see reference). Figure 1 The workpiece unit 11 is held in place and transferred from the chuck table 14 to the cleaning unit 44. Furthermore, the structure and function of the transfer unit 32 are similar to... Figure 6 The conveying unit 26 shown in (A) is the same. Then, the workpiece 13 is cleaned by the cleaning unit 44.

[0101] When the cleaning of the workpiece 13 is completed, the workpiece unit 11 is transported by the transfer unit 26 onto a pair of guide rails 18. Then, the workpiece unit 11 is positioned using the pair of guide rails 18. Next, the transfer unit 26 moves towards the box 8 while holding the frame 21 with the gripping part 26a, storing the workpiece unit 11 in the box 8. In this way, the workpiece 13 is machined by the cutting tool 40.

[0102] Furthermore, before using a new cutting tool 40 or after the workpiece 13 has been cut to a certain extent using the cutting tool 40, a dressing is performed to intentionally wear the tip of the cutting tool 40 for the purpose of correcting the shape of the cutting tool 40 or ensuring the sharpness of the cutting tool 40. This dressing is performed by causing the cutting tool 40 to cut into the dressing plate 25 of the dressing component 23.

[0103] The cutting device 2 is used to repair the trimming parts 23 housed in the box 8 (see reference). Figure 4 The workpiece unit 11 processes the workpiece 13 in the same way as the workpiece unit 11, thereby dressing the cutting tool 40. Specifically, firstly, the conveying unit 26 moves away from the box 8 along the Y-axis while holding the end of the rigid plate 27 of the dressing member 23 with the holding part 26a. As a result, the dressing member 23 is pulled out from the box 8 and placed on a pair of guide rails 18. Moreover, the dressing member 23 is clamped by the pair of guide rails 18, and the dressing member 23 is aligned.

[0104] Next, the trimmed part 23 is moved to the chuck worktable 14 by the transfer unit 26. Figure 7 (A) is a partial cross-sectional front view showing the trimming component 23 being transported by the transport unit 26.

[0105] The conveying unit 26 is configured such that the holding surfaces 62a of the plurality of suction pads 62 respectively contact the front surface 27a of the rigid plate 27 of the trimming component 23. In addition, the front surface 27a of the rigid plate 27 includes an area that does not overlap with the trimming plate 25, and the holding surfaces 62a of the plurality of suction pads 62 contact this area.

[0106] In this state, when the negative pressure of the suction source is applied to the holding surface 62a of the suction pad 62, the rigid plate 27 is attracted and held by the conveying unit 26. Then, the trimming component 23 is conveyed by the conveying unit 26 to the chuck table 14 and held by the chuck table 14.

[0107] Figure 7(B) is a partial cross-sectional front view showing the trimming member 23 held by the chuck table 14. The trimming plate 25 is disposed on the chuck table 14 through the rigid plate 27. Furthermore, at this time, the clamp 16 is in the open state and is not in contact with the trimming member 23. In this state, when the valve 64 is opened, causing the negative pressure of the suction source 66 to act on the holding surface 14a, the trimming plate 25 is attracted and held by the chuck table 14 through the rigid plate 27.

[0108] Then, the dressing plate 25 is cut by the cutting tool 40 mounted on the cutting unit 38a or the cutting unit 38b. As a result, the cutting tool 40 wears, and the cutting tool 40 is dressed.

[0109] Specifically, with the lower end of the cutting tool 40 positioned below the front surface 25a of the dressing plate 25, the cutting tool 40 is rotated while the chuck table 14 moves along the machining feed direction. As a result, the cutting tool 40 cuts into the dressing plate 25, and the front end of the cutting tool 40 contacts and wears against the dressing plate 25.

[0110] When the cutting tool 40 contacts the dressing plate 25, the shape of the cutting tool 40 is adjusted to be concentric with the spindle 68 (rounding), and the abrasive grains of the cutting tool 40 are appropriately exposed from the bonding material (sharpening). In this way, the cutting tool 40 is dressed. In addition, during dressing, a linear groove 25c is formed on the dressing plate 25.

[0111] Here, in the trimming component 23 of this embodiment, the trimming plate 25 is supported by a rigid plate 27, instead of being supported by a ring-shaped frame 21 as in the past (see reference). Figure 2 Furthermore, the dimensions of the trimming plate 25 can be freely set within the range where the entire trimming plate 25 is supported by the rigid plate 27.

[0112] For example, when the trimming plate 25 is supported by the annular frame 21, the trimming plate 25 needs to be formed with an opening 21a that can be disposed in the frame 21 (see reference). Figure 2 The internal dimensions of the trimming plate 25 are not limited by the rigid plate 27. Therefore, the length of the diagonal of the trimming plate 25 can be set to be larger than the diameter of the opening 21a of the frame 21.

[0113] Furthermore, when the trimming component 23 is held by the chuck table 14, the trimming plate 25 is entirely supported by the rigid plate 27, therefore the trimming plate 25 does not need to be formed smaller than the holding surface 14a of the chuck table 14. For example, the length of the diagonal of the trimming plate 25 can be set to be larger than the diameter of the holding surface 14a of the chuck table 14. In this case, such as Figure 7As shown in (B), a portion of the trimming plate 25 is disposed on the outside of the retaining surface 14a (the area that does not overlap with the retaining surface 14a).

[0114] As described above, when a rigid plate 27 is used in the support of the dressing plate 25, the dressing plate 25 can be made larger. Furthermore, when the dressing plate 25 is made larger, the number of grooves 25c that can be formed on a single dressing plate 25 increases, reducing the number of dressing plates 25 used in dressing the cutting tool 40. This reduces the frequency of dressing plate 25 replacement and lowers costs.

[0115] Furthermore, the size of the trimming plate 25 is preferably as large as possible within the range that it can be supported by the rigid plate 27. For example, the trimming plate 25 is formed such that the area of ​​the front surface 27a of the rigid plate 27 covered by the trimming plate 25 is 50% or more, preferably 70% or more, of the total area of ​​the front surface 27a of the rigid plate 27.

[0116] Furthermore, when the trimming plate 25 is supported by the rigid plate 27, and the trimming plate 25 is surrounded by the annular frame 21 (see reference). Figure 2 The support conditions are different, so it is not necessary to attach tape 19 (refer to) to the trimming plate 25. Figure 2 Therefore, it is possible to suppress the consumption of band 19, thereby reducing costs.

[0117] In addition, Figure 7 In (B), the case of dressing the cutting tool 40 mounted on the cutting unit 38b is shown, but the dressing of the cutting tool 40 mounted on the cutting unit 38a can also be performed in the same way.

[0118] When the cutting tool 40 has finished dressing, the upper surface of the rigid plate 27 is conveyed by the transport unit 32. Figure 1 The trimming plate 25 is then moved from the chuck table 14 to the cleaning unit 44. The trimming plate 25 is then cleaned via the cleaning unit 44.

[0119] When the cleaning of the trimming plate 25 is completed, the trimming component 23 is transported by the transfer unit 26 to a pair of guide rails 18. Then, the trimming component 23 is aligned using the pair of guide rails 18. Then, the transfer unit 26 moves toward the box 8 while holding the rigid plate 27 with the gripping part 26a, and stores the trimming component 23 in the box 8. In this way, the trimming of the cutting tool 40 is performed.

[0120] As described above, the dressing component 23 of this embodiment includes a dressing plate 25, which is cut by the cutting tool 40, and a rigid plate 27, which is fixed to the dressing plate 25. As a result, the dressing component 23 and the workpiece unit 11 can be transported and held in the same way within the cutting device 2, and the dressing plate 25 can be made larger, thereby reducing costs.

[0121] Additionally, the trimming plate 25 can be a complete rectangle (square or elongated) or approximately rectangular. For example, the corners of the trimming plate 25 (the vertices of the front 25a and the back 25b) can also be slightly curved. However, when the cutting tool 40 cuts into the trimming plate 25 (refer to...), Figure 7 When the cutting tool 40 comes into contact with the curved area of ​​the dressing plate 25, it is prone to deformation. Therefore, the shape of the dressing plate 25 is preferably rectangular. Thus, the corners of the dressing plate 25 can also be effectively used for dressing the cutting tool 40.

[0122] In addition, the structure and method of the above embodiments can be implemented with appropriate modifications without departing from the purpose of the present invention.

Claims

1. A dressing component used in dressing a cutting tool by a cutting device. The cutting device has the following features: A chuck table holds the workpiece and the dressing component separately. A cutting unit that uses the cutting tool to cut the workpiece held by the chuck table; The box-holding section holds the box containing the workpiece. as well as The conveying unit transports the workpiece between the box placed in the box holding section and the chuck worktable. Its features are, The trimming component has the following features: Dressing plate, which is cut by the cutting tool; and A rigid plate is fixed to the dressing plate in such a way that it completely covers the surface opposite to the side of the dressing plate that is being cut by the cutting tool. The rigid plate has a degree of rigidity that allows it to support the dressing plate when it is being cut by the cutting tool. The trimming component can be moved out of the box by the transfer unit, held by the chuck table, and moved into the box by the transfer unit. The chuck table has a circular holding surface for holding the workpiece and the rigid plate. The dressing plate is rectangular, and the length of the diagonal of the dressing plate is greater than the diameter of the holding surface. When the dressing plate is held by the chuck table via the rigid plate and is cut by the cutting tool, a portion of the dressing plate and a portion of the rigid plate are disposed outside the holding surface of the chuck table.

2. The trimming component according to claim 1, characterized in that, The trimming component has an information display section that displays information related to the trimming plate.

3. The trimming component according to claim 1 or 2, characterized in that, The workpiece is supported by a ring-shaped frame using a belt. The outline of the outer periphery of the rigid plate corresponds to the outline of the outer periphery of the frame.

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