A high energy particle surface treatment system

Abstract

The present invention discloses a high-energy particle surface treatment system, including a base, an electrical control box is fixedly connected to the left upper end of the base, an exhaust device is fixedly connected to the right upper end of the base, a working chamber is inserted and fixedly connected to the upper left end of the exhaust device, an adjustment device is inserted and fixedly connected to the middle upper end of the working chamber, a product stand is arranged at the middle lower end of the adjustment device, a sealing door is movably connected to the left end of the working chamber through a hinge, an introducer is fixedly connected to the middle lower end of the working chamber, and the upper end of the introducer passes through the lower cavity wall of the working chamber and is fixedly connected to an ion energizer. A high-energy particle surface treatment system of the present invention provides a low-stress, high-precision processing method, which can promote the migration of molecules and atoms on the surface of metal and non-metal products by bombarding the product surface with high-energy ions, thereby achieving the purpose of product surface treatment, and is suitable for wide application.

Description

Technical Field

[0001] The invention relates to the technical field of ion beam processing, and in particular to a high-energy particle surface processing system. Background Art

[0002] High-energy particles are the cannonballs in modern particle scattering experiments. They are the most useful tools for studying the elementary structure of matter. It can be said that so far, they are almost the only tools for particle physicists. Without high-energy particle scattering experiments, modern physics would hardly develop. Early high-energy particles came from high-energy rays emitted by natural radioactive elements such as uranium and radium. Modern large-scale experimental devices such as particle accelerators and colliders came into being, and a large number of particles were continuously discovered. In order to meet the mechanical and electrochemical properties required by various components for tools, components for transmission equipment, chemical and power generation equipment, etc., high-energy particles are needed for surface treatment;

[0003] It is found that at least the following problems exist in the prior art and have not been solved: 1. The processing system cannot adjust the distance between the product and the ion energizer according to different products, nor can it rotate the product in different directions, which cannot meet the user's usage needs and reduces the practicality of the device; 2. The processing system mainly uses the energizing impact of larger solid particles. Due to the large physical size of the solid particles and the large impact force, the surface of the thin product is deformed during the processing; 3. The gas ion surface treatment device can only be used as a cleaning tool for impurities on the surface of the product due to its low energy, and cannot process the microscopic defects on the surface; 4. In principle, the processing system can only work in a poor vacuum environment and can only form a low-energy particle flow, which affects the processing quality of the product and reduces the processing efficiency; therefore, we propose a high-energy particle surface treatment system that works in a higher vacuum system. Summary of the invention

[0004] The main purpose of the present invention is to provide a high-energy particle surface treatment system, which can effectively solve the problems in the background technology.

[0005] To achieve the above object, the technical solution adopted by the present invention is:

[0006] A high-energy particle surface treatment system comprises a base, wherein the upper left portion of the base is fixedly connected to an electrical control box, the upper right portion of the base is fixedly connected to an exhaust device, the upper left portion of the exhaust device is fixedly connected to a working chamber, the middle portion of the upper end of the working chamber is fixedly connected to an adjustment device, the middle portion of the lower end of the adjustment device is provided with a product stand, the left end of the working chamber is movably connected to a sealed door via a hinge, the middle portion of the lower end of the working chamber is fixedly connected to an introducer, the upper end of the introducer penetrates through the lower cavity wall of the working chamber and is fixedly connected to an ion energizer, and the ion energizer The lower end of the energy device is fixedly connected to the lower cavity wall of the working chamber, and observation windows are inserted and fixedly connected in the middle of the front cavity wall and the middle of the rear cavity wall of the working chamber. Support feet are fixedly connected to the four corners of the lower end of the working chamber. The lower left end of the exhaust device is fixedly connected to a water vapor supply box, and the lower end of the water vapor supply box and the lower ends of the four supporting feet are fixedly connected to the upper end of the base. An air supply pipe is inserted and fixedly connected to the left upper end of the water vapor supply box, and a water supply pipe is inserted and fixedly connected to the lower left end of the water vapor supply box, and the ends of the water supply pipe and the air supply pipe away from the water vapor supply box are inserted and fixedly connected to the introducer.

[0007] As a further improvement of the above scheme, the adjusting device includes an adjusting cylinder, the output end of the adjusting cylinder passes through the upper cavity wall of the working chamber and is fixedly connected to a fixing frame, the lower end of the fixing frame is fixedly connected to an adjusting plate, the four corners of the upper end of the adjusting plate are fixedly connected to a limiting device, and a limiting groove is commonly opened between the periphery of the lower end of the adjusting plate.

[0008] As a further improvement of the above scheme, the limiting device includes a limiting cylinder, a through hole is opened in the middle of the lower cylinder wall of the limiting cylinder, a limiting rod movably connected is inserted in the through hole, a spring is sleeved on the lower part of the outer surface of the limiting rod, the upper end of the limiting rod is fixedly connected to the limiting plate, and the lower end of the limiting cylinder is inserted and fixedly connected with the upper end of the working chamber.

[0009] As a further improvement of the above scheme, the product stand includes a driver, the output end of the driver passes through the upper end of the adjustment plate and is fixedly connected to a rotating table, a fixing device is fixedly connected to the middle of the lower end of the rotating table, a plurality of limit blocks are fixedly connected to the periphery of the upper end of the rotating table, the upper parts of the outer surfaces of the plurality of limit blocks are slidably connected to the limit grooves, and the upper end of the rotating table is movably connected to the lower end of the adjustment plate through a bearing.

[0010] As a further improvement of the above scheme, the fixing device includes a fixing seat, and movable grooves are opened at the front, rear, left and right parts of the lower end of the fixing seat, and screw rods are movably connected to each other through bearings between the middle of the left groove wall and the middle of the right groove wall of the movable grooves on the left and right sides and between the middle of the front groove wall and the middle of the rear groove wall of the movable grooves on the front and rear sides, and movable blocks are movably connected through the middle of the outer surfaces of the four screw rods, and the lower ends of the four movable blocks are fixedly connected to fixed plates, and one end of the opposite surfaces of the four fixed plates is fixedly connected to clamping plates, and one end of the outer sides of the four screw rods is fixedly connected to adjustment handles, and the upper end of the fixing seat is fixedly connected to the lower end of the rotating table.

[0011] As a further improvement of the above scheme, the exhaust device includes a low vacuum pump, a first pipe is inserted and fixedly connected to the left upper end of the low vacuum pump, a high vacuum pump is inserted and fixedly connected to the end of the first pipe away from the low vacuum pump, and the left end of the high vacuum pump is inserted and fixedly connected to the right end of the working chamber, a second pipe is inserted and fixedly connected to the lower part of the outer surface of the first pipe, and the left end of the second pipe is inserted and fixedly connected to the right end of the working chamber, solenoid valves are arranged in the middle of the lower end of the second pipe and the middle of the upper end of the first pipe, and the lower end of the low vacuum pump is fixedly connected to the upper end of the base.

[0012] As a further improvement of the above solution, the distance between the right end face of the electrical control box and the left end face of the sealing door is greater than the width of the sealing door, and the electrical control box is electrically connected to the water vapor supply box, the introducer and the ion energizer.

[0013] As a further improvement of the above scheme, the outer surface of the limit plate contacts the inner cylinder wall of the limit cylinder, and the diameter length of the limit plate is greater than the diameter length of the limit rod, the outer surface of the adjustment plate contacts the inner cavity wall of the working chamber, and the adjustment cylinder is electrically connected to the electrical control box.

[0014] As a further improvement of the above scheme, the four clamps are all set to flexible materials, and one end of the opposite surfaces of the four clamps are fixedly connected with a number of flexible material particles, the outer surfaces of the four adjustment handles are not in contact with the inner cavity wall of the working chamber, the upper end surface of the driver is lower than the upper frame wall of the fixed frame, and the driver is electrically connected to the electrical control box, and the diameter length of the rotating table is smaller than the length and width of the adjustment plate.

[0015] As a further improvement of the above solution, a vacuum valve is installed between the high vacuum pump and the working chamber, and the low vacuum pump, high vacuum pump and solenoid valve are all electrically connected to the electrical control box.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. In the present invention, by setting an adjusting device and a limiting device, the adjusting cylinder can be adjusted to drive the adjusting plate to move up and down, and then the elasticity of the spring and the limiting of the limiting cylinder can improve the stability of the adjusting plate during the adjustment process, so that the distance between the product and the ion energizer can be adjusted according to actual conditions, which can meet the user's usage needs and improve the practicability of the device.

[0018] 2. In the present invention, by setting up a product stand and a fixing device, the screw rod is rotated by turning the adjusting handle, so that the fixing plate can be moved inward together, and the product can be clamped and fixed from four sides, and then the clamping plate of flexible material and a plurality of flexible material particles are used to enhance the fixing effect of the product, so that different models of products can be fixed, and the application range of the device is improved. The product can be rotated in different directions by the driver, which is beneficial to the processing of the product.

[0019] 3. In the present invention, by setting up an exhaust device, through the control and power supply of the electrical control box, and then through the mutual cooperation between the low vacuum pump and the high vacuum pump, the gas in the working chamber can be effectively emptied, thereby enhancing the exhaust effect of the device, and a vacuum better than 5.0*10^-2Pa can be formed in the working chamber, so that the device can work in an excellent vacuum environment, and a high-energy particle flow can be formed, thereby ensuring the processing quality of the product and improving the processing efficiency. Then, the water and gas supply box is used to supply gas and cooling water to the introducer, so that the gas reacts with the electrode to generate plasma, and then the plasma is energized by the ion energizer, and high-energy ions can be emitted to bombard the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0021] Figure 1 This is a schematic diagram of the overall structure of a high-energy particle surface treatment system of the present invention;

[0022] Figure 2 This is a schematic diagram of the internal structure of a working chamber of a high-energy particle surface treatment system of the present invention;

[0023] Figure 3 It is a structural schematic diagram of a regulating device of a high-energy particle surface treatment system of the present invention;

[0024] Figure 4 It is a structural schematic diagram of a limiting device of a high-energy particle surface treatment system of the present invention;

[0025] Figure 5 It is a structural schematic diagram of a product stand of a high-energy particle surface treatment system of the present invention;

[0026] Figure 6 It is a structural schematic diagram of a fixing device of a high-energy particle surface treatment system of the present invention;

[0027] Figure 7 It is a schematic structural diagram of an exhaust device of a high-energy particle surface treatment system of the present invention;

[0028] Figure 8 The figure is a schematic diagram of the overall structure of a high-energy particle surface treatment system of the present invention.

[0029] In the figure: 1. base; 2. electrical control box; 3. working chamber; 4. adjustment device; 5. product stand; 6. exhaust device; 7. water and gas supply box; 8. air supply pipe; 9. water supply pipe; 10. introducer; 11. ion energizer; 12. sealing door; 13. observation window; 14. support foot; 41. adjustment cylinder; 42. fixing frame; 43. adjustment plate; 44. limit device; 45. limit slot; 441. limit cylinder; 442 , limit rod; 443, through hole; 444, spring; 445, limit plate; 51, driver; 52, rotating table; 53, fixing device; 54, limit block; 531, fixing seat; 532, moving groove; 533, screw rod; 534, moving block; 535, fixing plate; 536, clamping plate; 537, adjusting handle; 61, low vacuum pump; 62, first pipeline; 63, high vacuum pump; 64, second pipeline; 65, solenoid valve. DETAILED DESCRIPTION

[0030] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0031] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] The technical solution of the present invention is further described below in conjunction with the accompanying drawings.

[0034] like Figure 1-8 As shown, a high-energy particle surface treatment system includes a base 1, an electrical control box 2 is fixedly connected to the left upper end of the base 1, an exhaust device 6 is fixedly connected to the right upper end of the base 1, a working chamber 3 is inserted and fixedly connected to the upper left end of the exhaust device 6, an adjustment device 4 is inserted and fixedly connected to the middle of the upper end of the working chamber 3, a product stand 5 is arranged in the middle of the lower end of the adjustment device 4, a sealing door 12 is movably connected to the left end of the working chamber 3 through a hinge, an introducer 10 is fixedly connected to the middle of the lower end of the working chamber 3, the upper end of the introducer 10 passes through the lower cavity wall of the working chamber 3 and is fixedly connected to an ion energizer 11, and the ion energizer 11 The lower end of 1 is fixedly connected to the lower cavity wall of the working chamber 3, the middle of the front cavity wall and the middle of the rear cavity wall of the working chamber 3 are both fixedly connected with observation windows 13, the four corners of the lower end of the working chamber 3 are fixedly connected with supporting feet 14, the lower left end of the exhaust device 6 is fixedly connected to the water vapor supply box 7, and the lower end of the water vapor supply box 7 and the lower ends of the four supporting feet 14 are fixedly connected to the upper end of the base 1, the upper left end of the water vapor supply box 7 is fixedly connected with an air supply pipe 8, the lower left end of the water vapor supply box 7 is fixedly connected with a water supply pipe 9, and the ends of the water supply pipe 9 and the air supply pipe 8 away from the water vapor supply box 7 are fixedly connected with the introducer 10.

[0035] The regulating device 4 comprises a regulating cylinder 41, the output end of which passes through the upper wall of the working chamber 3 and is fixedly connected to a fixing frame 42, the lower end of the fixing frame 42 is fixedly connected to an regulating plate 43, the upper four corners of the regulating plate 43 are fixedly connected to a limiting device 44, and a limiting groove 45 is commonly provided between the lower periphery of the regulating plate 43; the distance between the right end face of the electrical control box 2 and the left end face of the sealing door 12 is greater than the width of the sealing door 12, the electrical control box 2 is electrically connected to the water and gas supply box 7, the introducer 10 and the ion energizer 11, the introducer 10 can introduce water, electricity and gas, and the water and gas supply box 7 can meet the true The water-passing flange that meets the vacuum sealing requirements supplies circulating cooling water to the product stand 5. The electrical control box 2 provides bias pressure to the product stand 5 through the electrical connection flange that meets the vacuum sealing requirements. A separate vacuum valve is separately installed on the working chamber 3, which is used to inflate the vacuum chamber at the end of production to restore the working chamber 3 to the atmospheric state, which is convenient for loading and unloading of processed products. The observation window 13 is used to observe the product processing process from different angles, and the observation window 13 and the sealing door 12 are both made of solid materials that are permeable to visible light, which is convenient for the human eye to observe the working status in the working chamber 3, and also convenient for observing the product processing process from different angles.

[0036] The limiting device 44 includes a limiting cylinder 441, a through hole 443 is opened in the middle of the lower cylinder wall of the limiting cylinder 441, a limiting rod 442 is movably inserted in the through hole 443, a spring 444 is sleeved on the lower part of the outer surface of the limiting rod 442, the upper end of the limiting rod 442 is fixedly connected to the limiting plate 445, the lower end of the limiting cylinder 441 is inserted and fixedly connected with the upper end of the working chamber 3; the outer surface of the limiting plate 445 contacts the inner cylinder wall of the limiting cylinder 441, and the diameter length of the limiting plate 445 is greater than the diameter length of the limiting rod 442, the outer surface of the adjusting plate 43 contacts the inner cavity wall of the working chamber 3, the adjusting plate 43 can be limited, and the adjusting cylinder 41 is electrically connected to the electrical control box 2.

[0037] The product stand 5 includes a driver 51, the driver 51, the output end of the driver 51 passes through the upper end of the adjustment plate 43 and is fixedly connected to a rotating table 52, the middle part of the lower end of the rotating table 52 is fixedly connected to a fixing device 53, and the upper end periphery of the rotating table 52 is fixedly connected to a plurality of limit blocks 54, and the upper parts of the outer surfaces of the plurality of limit blocks 54 are slidably connected to the limit grooves 45, thereby improving the stability of the rotating table 52 during rotation, and the upper end of the rotating table 52 is movably connected to the lower end of the adjustment plate 43 through a bearing.

[0038] The fixing device 53 includes a fixing seat 531, and the fixing seat 531 has movable grooves 532 at the front, rear, left and right parts of the lower end. The middle parts of the left and right groove walls of the movable grooves 532 on the left and right sides and the middle parts of the front and rear groove walls of the movable grooves 532 on the front and rear sides are all movably connected with screw rods 533 through bearings. The middle parts of the outer surfaces of the four screw rods 533 are all movably connected with movable blocks 534. The lower ends of the four movable blocks 534 are all fixedly connected with fixing plates 535. The ends of the opposite surfaces of the four fixing plates 535 are all fixedly connected with clamping plates 536. The outer ends of the four screw rods 533 are all fixedly connected with adjustment handles 537. The upper end of the fixed seat 531 is fixedly connected to the lower end of the rotating table 52; the four splints 536 are all set to a flexible material, and one end of the opposite surface of the four splints 536 is fixedly connected with a number of flexible material particles, which increases the friction between the splints 536 and the product and strengthens the fixing effect on the product. The outer surfaces of the four adjustment handles 537 are not in contact with the inner cavity wall of the working chamber 3. The upper end surface of the driver 51 is lower than the upper shelf wall of the fixed frame 42, and the driver 51 is electrically connected to the electrical control box 2. The diameter length of the rotating table 52 is smaller than the length and width of the adjustment plate 43, so that the rotating table 52 does not contact the inner cavity wall of the working chamber 3 and does not affect the rotation of the rotating table 52.

[0039] The exhaust device 6 includes a low vacuum pump 61, a first pipe 62 is inserted and fixedly connected to the left upper end of the low vacuum pump 61, a high vacuum pump 63 is inserted and fixedly connected to the end of the first pipe 62 away from the low vacuum pump 61, and the left end of the high vacuum pump 63 is inserted and fixedly connected to the right end of the working chamber 3, a second pipe 64 is inserted and fixedly connected to the lower part of the outer surface of the first pipe 62, and the left end of the second pipe 64 is inserted and fixedly connected to the right end of the working chamber 3, and an electromagnetic valve 65 is arranged in the middle of the lower end of the second pipe 64 and the middle of the upper end of the first pipe 62, and the lower end of the low vacuum pump 61 is fixedly connected to the upper end of the base 1; a vacuum valve is installed between the high vacuum pump 63 and the working chamber 3, which is used to block and connect spaces with different vacuum degrees under different conditions, and the low vacuum pump 61, the high vacuum pump 63 and the electromagnetic valve 65 are all electrically connected to the electrical control box 2.

[0040] In summary, during the use of the present invention, the sealing door 12 is first opened, and then the product to be processed is prevented from being placed on the fixed seat 531. At this time, the adjusting handle 537 is rotated to rotate the screw rod 533, so that the moving block 534 is limited by the moving groove 532, and drives the fixed plate 535 to move inward together, so that the product can be clamped and fixed from all sides. Then, the flexible material clamping plate 536 and a plurality of flexible material particles thereon are used to enhance the fixing effect of the product, so that the product can be firmly fixed, and the device can also fix products of different models, thereby improving the application range of the device. Then, the driver 51 drives the rotating table 52 to rotate forward and reverse, and the limit block 54 is slidably limited in the limit groove 45, so that the product can be rotated and adjusted in different directions. The adjustment section is beneficial to the processing of the product. At this time, according to the different products, the adjustment cylinder 41 is extended and retracted to drive the adjustment plate 43 to move up and down, and then the limit plate 445 is limited by sliding in the limit cylinder 441, and the elasticity of the spring 444 is cooperated to improve the stability of the adjustment plate 43 during the adjustment process, so that the distance between the product and the ion energizer 11 can be adjusted according to the actual situation, so that the product is located in the best processing position, which can meet the user's use needs and improve the practicality of the device. Then, through the control and energy supply of the electrical control box 2, and the mutual cooperation between the low vacuum pump 61 and the high vacuum pump 63, the gas in the working chamber 3 can be effectively emptied, thereby enhancing the exhaust effect of the device, and the working chamber 3 can form a vacuum better than 5.0* The vacuum of 10^-2Pa enables the device to work in an excellent vacuum environment, can form a high-energy particle flow, strengthen the energy of the device, can process microscopic defects on the surface, ensure the processing quality of the product, and improve the processing efficiency. Then, the electromagnetic valve 65 can be used to form the blocking and connection of different vacuum spaces under different conditions. When the working vacuum is reached, the gas supply pipe 8 and the water supply pipe 9 in the water gas supply box 7 can supply working gas and cooling water to the introducer 10 and the ion energizer 11, so that the gas reacts with the electrode in the introducer 10 to generate plasma, so that the introducer 10 and the ion energizer 11 are both ready for work, and then the electrical control box 2 controls the introducer 10 and the ion energizer 11 to enter the working state through the power supply and control circuit. The working state is then, the plasma is energized by the ion energizer 11, the energized high-energy ions can be emitted, and the product fixed on the product stand 5 is bombarded, thereby avoiding the problem of deformation of the surface of the thin product during the treatment process, and the cooling water provided by the water supply pipe 9 can be used to cool the introducer 10 and the product stand 5, thereby improving the processing efficiency of the high-energy particle surface treatment system, and the surface treatment of the product is high in precision, the processing process is low in stress and deformation, and it is suitable for wide application. After the product is processed, a separate vacuum valve separately installed on the working chamber 3 can be used to inflate the working chamber 3 after the product processing is completed, so that the working chamber 3 is restored to the atmospheric state, thereby facilitating the loading and unloading of the processed products and being convenient to use.

[0041] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A high-energy particle surface treatment system, comprising a base (1), characterized in that: The upper left portion of the base (1) is fixedly connected to an electrical control box (2); the upper right portion of the base (1) is fixedly connected to an exhaust device (6); the upper left portion of the exhaust device (6) is inserted and fixedly connected to a working chamber (3); the middle portion of the upper end of the working chamber (3) is inserted and fixedly connected to an adjustment device (4); the middle portion of the lower end of the adjustment device (4) is provided with a product stand (5); the left end of the working chamber (3) is movably connected to a sealing door (12) via a hinge; the middle portion of the lower end of the working chamber (3) is fixedly connected to an introducer (10); the upper end of the introducer (10) passes through the lower cavity wall of the working chamber (3) and is fixedly connected to an ion energizer (11); and the lower end of the ion energizer (11) is connected to the working chamber. The working chamber (3) is fixedly connected to the lower cavity wall of the working chamber (3); the middle of the front cavity wall and the middle of the rear cavity wall of the working chamber (3) are both interspersed and fixedly connected with observation windows (13); the four corners of the lower end of the working chamber (3) are all fixedly connected with supporting feet (14); the lower left end of the exhaust device (6) is fixedly connected to a water vapor supply box (7), and the lower end of the water vapor supply box (7) and the lower ends of the four supporting feet (14) are all fixedly connected to the upper end of the base (1); the upper left end of the water vapor supply box (7) is interspersed and fixedly connected with an air supply pipe (8); the lower left end of the water vapor supply box (7) is interspersed and fixedly connected with a water supply pipe (9), and the ends of the water supply pipe (9) and the air supply pipe (8) away from the water vapor supply box (7) are both interspersed and fixedly connected with the introducer (10); The regulating device (4) comprises a regulating cylinder (41), the output end of the regulating cylinder (41) penetrates the upper cavity wall of the working chamber (3) and is fixedly connected to a fixing frame (42), the lower end of the fixing frame (42) is fixedly connected to an regulating plate (43), the upper four corners of the regulating plate (43) are fixedly connected to limiting devices (44), and the lower end periphery of the regulating plate (43) is provided with limiting grooves (45); The product stand (5) comprises a driver (51), wherein the output end of the driver (51) passes through the upper end of the adjustment plate (43) and is fixedly connected to a rotating table (52), a fixing device (53) is fixedly connected to the middle of the lower end of the rotating table (52), a plurality of limit blocks (54) are fixedly connected to the periphery of the upper end of the rotating table (52), the upper parts of the outer surfaces of the plurality of limit blocks (54) are slidably connected to the limit grooves (45), and the upper end of the rotating table (52) is movably connected to the lower end of the adjustment plate (43) via a bearing.

2. A high-energy particle surface treatment system according to claim 1, characterized in that: The limiting device (44) comprises a limiting cylinder (441), a through hole (443) is opened in the middle of the lower cylinder wall of the limiting cylinder (441), a limiting rod (442) is inserted and movably connected in the through hole (443), a spring (444) is sleeved on the lower part of the outer surface of the limiting rod (442), the upper end of the limiting rod (442) is fixedly connected to the limiting plate (445), and the lower end of the limiting cylinder (441) is inserted and fixedly connected with the upper end of the working chamber (3).

3. A high energy particle surface treatment system according to claim 1, characterized in that: The fixing device (53) comprises a fixing seat (531), wherein the front part, the rear part, the left part and the right part of the lower end of the fixing seat (531) are all provided with movable grooves (532), and screw rods (533) are movably connected to each other through bearings between the middle part of the left groove wall and the middle part of the right groove wall of the movable grooves (532) on the left and right sides and between the middle part of the front groove wall and the middle part of the rear groove wall of the movable grooves (532) on the front and rear sides, and the middle part of the outer surface of the four screw rods (533) are all inserted and movably connected to movable blocks (534), the lower ends of the four movable blocks (534) are all fixedly connected to fixing plates (535), the opposite ends of the four fixing plates (535) are all fixedly connected to clamping plates (536), the outer ends of the four screw rods (533) are all inserted and fixedly connected to adjusting handles (537), and the upper end of the fixing seat (531) is fixedly connected to the lower end of the rotating platform (52).

4. A high energy particle surface treatment system according to claim 1, characterized in that: The exhaust device (6) comprises a low vacuum pump (61), a first pipe (62) is inserted and fixedly connected to the left portion of the upper end of the low vacuum pump (61), a high vacuum pump (63) is inserted and fixedly connected to the end of the first pipe (62) away from the low vacuum pump (61), and the left end of the high vacuum pump (63) is inserted and fixedly connected to the right end of the working chamber (3), a second pipe (64) is inserted and fixedly connected to the lower portion of the outer surface of the first pipe (62), and the left end of the second pipe (64) is inserted and fixedly connected to the right end of the working chamber (3), a solenoid valve (65) is provided at the middle portion of the lower end of the second pipe (64) and the middle portion of the upper end of the first pipe (62), and the lower end of the low vacuum pump (61) is fixedly connected to the upper end of the base (1).

5. A high energy particle surface treatment system according to claim 1, characterized in that: The distance between the right end face of the electrical control box (2) and the left end face of the sealing door (12) is greater than the width of the sealing door (12), and the electrical control box (2) is electrically connected to the water vapor supply box (7), the introducer (10) and the ion energizer (11).

6. A high-energy particle surface treatment system according to claim 2, characterized in that: The outer surface of the limit plate (445) contacts the inner wall of the limit cylinder (441), and the diameter length of the limit plate (445) is greater than the diameter length of the limit rod (442). The outer surface of the adjustment plate (43) contacts the inner wall of the working chamber (3), and the adjustment cylinder (41) is electrically connected to the electrical control box (2).

7. A high-energy particle surface treatment system according to claim 3, characterized in that: The four clamps (536) are all made of flexible material, and one end of the opposite surface of the four clamps (536) is fixedly connected with a plurality of flexible material particles, the outer surfaces of the four adjustment handles (537) are not in contact with the inner wall of the working chamber (3), the upper end surface of the driver (51) is lower than the upper wall of the fixed frame (42), and the driver (51) is electrically connected to the electrical control box (2), and the diameter length of the rotating table (52) is smaller than the length and width of the adjustment plate (43).

8. A high energy particle surface treatment system according to claim 4, characterized in that: A vacuum valve is installed between the high vacuum pump (63) and the working chamber (3), and the low vacuum pump (61), the high vacuum pump (63) and the solenoid valve (65) are all electrically connected to the electrical control box (2).

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