A piezoelectric inertial drive device

Abstract

The present invention relates to the technical field of driving devices, and discloses a piezoelectric inertial driving device. The device includes a base, a sliding member, and a piezoelectric driving module. The sliding member is slidably engaged with the base and can slide along a first direction. A bearing surface for carrying a load is provided on one side of the sliding member, and a friction surface perpendicular to the bearing surface is provided on the other side. Both the friction surface and the bearing surface extend along the first direction. The piezoelectric driving module is disposed on the base and is located on the side of the sliding member where the friction surface is provided. The piezoelectric driving module includes a piezoelectric element and a first friction member. The piezoelectric element can expand and contract along the first direction. The piezoelectric element is flexibly connected to the first friction member, and the first friction member is in frictional contact with the friction surface. The present invention avoids the influence of the load gravity on the frictional force in the friction pair and improves the load-carrying capacity of the piezoelectric inertial driving device.

Description

Technical Field

[0001] The present invention relates to the technical field of driving devices, and particularly to a piezoelectric inertial driving device. Background Art

[0002] With the development of industries such as precision manufacturing, semiconductors, and medical equipment, the market demand for high-precision and high-resolution precision motion driving devices is increasing day by day, and various new structures and new technologies are emerging continuously. As a kind of precision motion driving device, the piezoelectric inertial motor has been widely recognized at present. For example, the inertial motor described in US Patent US10250164B2 generates displacement through the "stick-slip" effect between the friction pairs and the drive of the piezoelectric ceramics.

[0003] The current inertial motor includes a sliding platform, a piezoelectric driving module, and a base arranged in sequence from top to bottom. A friction surface is attached to the bottom of the sliding platform, and a friction block is arranged on the top of the piezoelectric driving module, and a friction pair is formed between the friction surface and the friction block.

[0004] For the inertial motor provided by the prior art, since the gravity of the sliding platform and the load above the sliding platform acts on the piezoelectric driving module, the pressure between the friction block and the friction surface is relatively large, resulting in an increase in the preload force between the friction pairs. The relatively high preload force will then lead to an increase in the resistance during the slip stage, resulting in limited load-carrying capacity of the motor.

[0005] Based on this, there is an urgent need for a piezoelectric inertial driving device to solve the above-mentioned problems. Summary of the Invention

[0006] The purpose of the present invention is to provide a piezoelectric inertial driving device, which avoids the influence of the load gravity on the friction force in the friction pair and ensures the load-carrying capacity of the piezoelectric inertial driving device.

[0007] To achieve this purpose, the present invention adopts the following technical solutions:

[0008] A piezoelectric inertial driving device, comprising:

[0009] A base;

[0010] A sliding member, which is slidably matched with the base and can slide along a first direction. A load-bearing surface for carrying a load is arranged on one side of the sliding member, and a friction surface perpendicular to the load-bearing surface is arranged on the other side. Both the friction surface and the load-bearing surface extend along the first direction;

[0011] A piezoelectric drive module is disposed on the base. The piezoelectric drive module is located on the side of the sliding member where the friction surface is provided. The piezoelectric drive module includes a piezoelectric element and a first friction member. The piezoelectric element expands and contracts along the first direction. The piezoelectric element is flexibly connected to the first friction member, and the first friction member is in frictional contact with the friction surface.

[0012] As an alternative technical solution of a piezoelectric inertial drive device, two friction surfaces are provided at intervals and oppositely in the second direction. The second direction is perpendicular to the friction surface. The piezoelectric drive module is provided with at least two first friction members, and each friction surface is in frictional contact with at least one first friction member.

[0013] As an alternative technical solution of a piezoelectric inertial drive device, the piezoelectric drive module further includes a mounting portion and a flexible portion. The flexible portion includes two flexible arms spaced apart in the second direction. The mounting portion is connected to the base, and the piezoelectric element is fixed on the mounting portion. At least one first friction member is provided on the side wall of each flexible arm. One ends of the two flexible arms are both connected to the mounting portion, and the flexible arms are located at one end of the piezoelectric element along the first direction. An adjustment gap is provided between the other ends of the two flexible arms.

[0014] As an alternative technical solution of a piezoelectric inertial drive device, each flexible arm includes a first flexible arm and a second flexible arm. A first rigid member is provided at the connection between the first flexible arm and the second flexible arm. The first friction member is provided on the first rigid member. One end of the first flexible arm away from the second flexible arm is connected to the mounting portion. The adjustment gap is provided between the ends of the two second flexible arms away from the first flexible arm.

[0015] As an alternative technical solution of a piezoelectric inertial drive device, a support member is provided on the base. A movable first adjustment member is provided on the support member. The first adjustment member is disposed opposite to the adjustment gap, and the first adjustment member can extend into the adjustment gap and change the size of the adjustment gap.

[0016] As an alternative technical solution of a piezoelectric inertial drive device, second rigid members are connected to the ends of the second flexible arms away from the first rigid member, and the adjustment gap is provided between the second rigid members of the two flexible arms.

[0017] As an alternative technical solution of a piezoelectric inertial driving device, the mounting portion is U-shaped, the piezoelectric element is placed inside the opening of the mounting portion, and two end faces of the piezoelectric element along the first direction respectively abut against the first side arm and the second side arm of the mounting portion. A connecting arm is connected between the first side arm and the second side arm, and a gap is provided between the connecting arm and the piezoelectric element.

[0018] As an alternative technical solution of a piezoelectric inertial driving device, a gap is provided between the flexible portion and the base.

[0019] As an alternative technical solution of a piezoelectric inertial driving device, support portions are respectively connected to one ends of the two flexible arms away from the mounting portion, an adjustment gap is provided between the two support portions, and the end face of the support portion facing the base protrudes from the end face of the flexible portion facing the base.

[0020] As an alternative technical solution of a piezoelectric inertial driving device, the support portion includes a first arm portion, a second arm portion and an extension portion;

[0021] The first arm portion and the second arm portion are oppositely arranged in the first direction. The first end of the first arm portion and the first end of the second arm portion are connected by a connecting arm portion to form a U-shaped structure. The opening of the U-shaped structure faces the base, and one side of the second arm portion away from the first arm portion is connected to the flexible arm;

[0022] The extension portion protrudes from the second end of the first arm portion and extends along the first direction towards the flexible arm. The end face of the extension portion facing the base protrudes from the end face of the flexible portion facing the base. The end face of the extension portion facing away from the base faces the second end of the second arm portion, and a gap is provided between the end face of the extension portion facing away from the base and the second end of the second arm portion.

[0023] As an alternative technical solution of a piezoelectric inertial driving device, the piezoelectric driving module further includes a lever amplification structure. The lever amplification structure includes an input connection portion, an output connection portion and a lever portion. A fulcrum is provided at one end of the lever portion. One end of the input connection portion is connected to one end of the piezoelectric element along the first direction. The other end of the input connection portion is connected to the middle of the lever portion. The other end of the lever portion is connected to one end of the output connection portion. The other end of the output connection portion is connected to the first friction member.

[0024] As an alternative technical solution of a piezoelectric inertial driving device, the base includes a first connection seat and a second connection seat. The piezoelectric driving module is arranged on the first connection seat. The sliding member is slidably connected to the second connection seat, and the first connection seat is detachably connected to the second connection seat.

[0025] As an alternative technical solution of a piezoelectric inertial driving device, a piezoelectric fixing member is provided on the base, and the piezoelectric fixing member is used to fix the piezoelectric driving module to the base.

[0026] Advantages of the present invention: In the piezoelectric inertial driving device provided by the present invention, the bearing surface is horizontally arranged above the sliding member, and the friction surface is vertically arranged perpendicular to the bearing surface. Compared with the prior art in which the friction surface is parallel to the load surface, the influence of the gravity of the load above the bearing surface on the pre-tightening force and pressure of the friction pair can be reduced, avoiding an increase in the frictional force on the friction pair, thereby avoiding the piezoelectric driving module from providing an additional driving force and improving the load-carrying capacity of the piezoelectric inertial driving device. In addition, in the present invention, the friction surface is perpendicular to the bearing surface, and the load gravity and the pressure on the friction pair are orthogonally arranged, so that the load gravity cannot act on the flexible structure, avoiding the additional deformation of the flexible structure in the direction of the load gravity when the load gravity and the pressure on the friction pair are in the same direction, and ensuring the durability of the piezoelectric driving module. Description of the Drawings

[0027] Figure 1 is a schematic structural diagram of the piezoelectric inertial driving device provided in Embodiment 1 of the present invention;

[0028] Figure 2 is an exploded view of the piezoelectric inertial driving device provided in Embodiment 1 of the present invention;

[0029] Figure 3 is a cross-sectional view of the piezoelectric inertial driving device provided in Embodiment 1 of the present invention;

[0030] Figure 4 is a schematic structural diagram of a partial structure of the piezoelectric inertial driving device provided in Embodiment 1 of the present invention from a bottom view perspective;

[0031] Figure 5 is a schematic structural diagram of the piezoelectric driving module provided in Embodiment 1 of the present invention;

[0032] Figure 6 is a partial schematic structural diagram of the piezoelectric driving module provided in Embodiment 1 of the present invention;

[0033] Figure 7 is a schematic diagram of the first driving process of the piezoelectric inertial driving device provided in Embodiment 1 of the present invention;

[0034] Figure 8 is a schematic diagram of the second driving process of the piezoelectric inertial driving device provided in Embodiment 1 of the present invention;

[0035] Figure 9 is a side view of a partial structure of the piezoelectric driving module provided in Embodiment 2 of the present invention;

[0036] Figure 10 It is a schematic structural diagram of the lever amplification structure provided in the second embodiment of the present invention;

[0037] Figure 11 It is a partial schematic structural diagram of the piezoelectric inertial driving device provided in the third embodiment of the present invention;

[0038] Figure 12 is Figure 11 The partial enlarged view at position A in

[0039] In the figure:

[0040] 1. Base; 11. First connection seat; 111. Support member; 112. First adjusting member; 113. Piezoelectric fixing member; 114. Fixing groove; 115. Connection block; 12. Second connection seat; 13. Guide member;

[0041] 2. Sliding member; 21. Second friction member;

[0042] 3. Piezoelectric driving module; 31. Piezoelectric element; 32. First friction member; 33. Mounting portion; 331. First side arm; 332. Connecting arm; 333. Second side arm; 34. Flexible arm; 341. First flexible arm; 342. Second flexible arm; 343. First rigid member; 3431. Fixed groove; 344. Second rigid member; 345. Support portion; 3451. First arm portion; 3452. Second arm portion; 3453. Extension portion; 35. Lever amplification structure; 351. Input connection portion; 352. Output connection portion; 353. Lever portion;

[0043] 41. First screw; 42. Second screw; 43. Third screw;

[0044] 5. Cable fixing member;

[0045] 61. First through groove; 62. Second through groove; 63. Third through groove; 631. Arc groove. Detailed implementation manners

[0046] To make the technical problems solved by the present invention, the technical solutions adopted and the achieved technical effects clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present invention.

[0047] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral body; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over", and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "beneath", and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely means that the horizontal height of the first feature is lower than that of the second feature.

[0049] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0050] This embodiment provides a piezoelectric inertial drive device, which can be applied as an inertial motor or other devices, and is not limited herein. Specifically, as Figures 1 - 4 shown, the piezoelectric inertial drive device includes: a base 1; a slider 2 and a piezoelectric drive module 3. The slider 2 can slide relative to the base 1 along a first direction through the piezoelectric drive module 3. One side of the slider 2 is provided with a bearing surface for carrying a load, and the other side is provided with a friction surface perpendicular to the bearing surface. Both the friction surface and the bearing surface extend along the first direction; the piezoelectric drive module 3 is located on the side of the slider 2 where the friction surface is provided and is connected to the base 1. The piezoelectric drive module 3 includes a piezoelectric element 31 and a first friction member 32. The piezoelectric element 31 can expand and contract along the first direction. The piezoelectric element 31 is flexibly connected to the first friction member 32, and the first friction member 3 is in frictional contact with the friction surface.

[0051] The piezoelectric inertial driving device provided in this embodiment includes a base 1, a sliding member 2, and a piezoelectric driving module 3. The sliding member 2 is slidably engaged with the base 1. The piezoelectric driving module 3 is disposed on one side of the sliding member 2 where a friction surface is provided. The piezoelectric driving module 3 includes a first friction member 32. The friction surface is in frictional contact with the first friction member 32 to form a friction pair. When the bearing surface is horizontally disposed above the sliding member 2, the friction surface is vertically disposed perpendicular to the bearing surface, so that the pressure and pre-tightening force generated on the friction pair are forces in the horizontal direction, that is, the pressure and pre-tightening force on the friction pair are orthogonally disposed with the gravity of the load placed on the sliding member 2, reducing the influence of the gravity of the load on the upper part of the sliding member 2 on the pre-tightening force and pressure of the friction pair, avoiding an increase in the frictional force on the friction pair, thus avoiding the piezoelectric driving module 3 from providing an additional driving force, and improving the load-carrying capacity of the piezoelectric inertial driving device. Since the first friction member 32 of the piezoelectric driving module 3 is flexibly connected to the piezoelectric element 31 through a flexible structure, the flexible structure of the piezoelectric driving module 3 is deformed due to the pressure generated on the friction pair. In the prior art, the direction of the load gravity is the same as the direction of the pressure on the friction pair, so that the load gravity affects the amount of deformation of the flexible structure, causing an additional deformation of the flexible structure. In the present invention, the friction surface is vertically disposed with respect to the bearing surface, and the load gravity is orthogonally disposed with the pressure on the friction pair, so that the load gravity cannot act on the flexible structure, avoiding the additional deformation of the flexible structure in the direction of the load gravity and ensuring the durability of the piezoelectric driving module 3.

[0052] In this embodiment, it is stipulated that the first direction, the second direction, and the third direction are perpendicular to each other. Taking the first direction and the second direction being in the horizontal plane as an example, the third direction is vertically disposed. For the sake of easy understanding, as Figure 1 shown, the positive or negative direction of the X-axis is the first direction, the positive or negative direction of the Y-axis is the second direction, and the positive or negative direction of the Z-axis is the third direction. In other embodiments, the first direction can also be vertically disposed or inclined, to realize other application scenarios of the piezoelectric inertial driving device, which will not be elaborated here.

[0053] In this embodiment, as Figure 2 and Figure 3 shown, the base 1 includes two guiding members 13 spaced apart in the Y-axis direction. The guiding members 13 both extend in the X-axis direction. The guiding members 13 and the sliding member 2 are both strip-shaped. The sliding member 2 is located between the two guiding members 13. Crossed roller guide structures are formed between the two sides of the sliding member 2 along the Y-axis and the two guiding members 13 respectively. Both sides of the sliding member 2 are slidably engaged with the guiding members 13, improving the smoothness of the sliding of the sliding member 2 and the practicability of the piezoelectric inertial driving device. Among them, the crossed roller guide structure is a prior art and will not be elaborated here.

[0054] Specifically, a second friction member 21 is provided on the side of the sliding member 2 where the friction surface is located. The side surface of the second friction member 21 facing the first friction member 32 forms this friction surface. The second friction members 21 all extend along the X-axis. In this embodiment, a bearing surface is horizontally arranged above the sliding member 2, and the bearing surface extends along the X-axis. The second friction member 21 protrudes from the bottom of the sliding member 2 and is fixedly arranged with the bottom of the sliding member 2. Moreover, the second friction member 21 is strip-shaped, preferably square in cross-section. Its top surface is attached to and connected with the bottom surface of the sliding member 2, specifically by bonding with an adhesive layer, so that the side surface of the second friction member 21 is vertically arranged, and the side surface (i.e., the friction surface) of the second friction member 21 is arranged opposite to the first friction member 32 to achieve frictional contact. The second friction member 21 and the sliding member 2 can also be connected by screws or other means, or the second friction member 21 and the sliding member 2 are of an integral structure. In some embodiments, the friction surface may not be formed by providing the second friction member 21. For example, a square groove may be opened at the bottom of the sliding member 2, the square groove extends along the X-axis direction, and friction layers are provided on two opposite groove walls on the inner side of the square groove along the Y-axis direction. The sides of the friction layers facing each other serve as the friction surface, which is not limited herein.

[0055] Preferably, there are two friction surfaces arranged at intervals and opposite to each other, and both of these two friction surfaces face the first friction member 32. That is to say, there are two second friction members 21 arranged at intervals and opposite to each other, and the two second friction members 21 are arranged at intervals along the Y-axis direction. The piezoelectric drive module 3 is provided with at least two first friction members 32, and each friction surface is in frictional contact with at least one first friction member 32. By providing two friction surfaces, and each friction surface is in frictional contact with at least one first friction member 32, both sides of the piezoelectric drive module 3 along the Y-axis direction are in contact with the sliding member 2, ensuring the smoothness of the sliding member 2.

[0056] Preferably, the second friction member 21 and the first friction member 32 are made of ceramic materials, which have a relatively high coefficient of friction and are more durable. When the sliding of the sliding member 2 is realized through the frictional contact between the friction surface and the first friction member 32, relative sliding between the second friction member 21 and the first friction member 32 is avoided, ensuring the output stroke of the piezoelectric inertial drive device. The second friction member 21 and the first friction member 32 are preferably made of alumina ceramic material.

[0057] Preferably, the two second friction members 21 are respectively arranged at the edges near both sides of the sliding member 2 along the width direction (i.e., the Y-axis), maximizing the use of the width dimension of the sliding member 2, avoiding the sliding member 2 from being too wide, improving the compactness of the overall structure of the piezoelectric inertial drive device, and reducing the space occupation.

[0058] In this embodiment, as Figures 2 - 5As shown, two first friction members 32 are provided on the piezoelectric driving module 3. The two first friction members 32 are in friction contact with the two second friction members 21 respectively, and the two first friction members 32 are located between the two second friction members 21, that is, the two first friction members 32 are in friction contact with the friction surface on the side opposite to each other. Figure 4 As shown, the two second friction members 21 form a groove structure on the bottom surface of the sliding member 2, and the piezoelectric driving module 3 is placed in the above groove structure, which reduces the height size of the piezoelectric inertial driving device and further reduces the space occupied.

[0059] Furthermore, the first friction member 32 is block-shaped, and the end portion for contacting the second friction member 21 is arc-shaped, so that the friction surface and the first friction member 32 are in line contact, which reduces the dimensional accuracy requirements for each structure of the piezoelectric inertial drive device and the assembly accuracy requirements for the piezoelectric inertial drive device compared to surface contact, thereby reducing production costs; in addition, compared to point contact, the contact area is also increased, the stability of the sliding member 2 is ensured, and the durability of the contact structure is also improved. In other embodiments, the surface in contact between the first friction member 32 and the friction surface may be a plane, so that the friction surface and the first friction member 32 are in surface contact, or the friction surface and the first friction member 32 are in point contact, which is not limited here.

[0060] Specifically, Figure 4 and Figure 5 As shown, the piezoelectric driving module 3 also includes a mounting portion 33 and a flexible portion fixedly connected to one end of the mounting portion 33, the flexible portion includes two flexible arms 34 spaced apart and oppositely arranged along the Y-axis (second direction), the mounting portion 33 is used to fix the piezoelectric element 31, the mounting portion 33 is fixedly connected to the base 1, at least one first friction member 32 is arranged on the side wall of each flexible arm 34 facing away from the other flexible arm 34, one end of the two flexible arms 34 are connected to the mounting portion 33, and the length direction of the flexible arm 34 is arranged along the X-axis direction, that is, the length direction of the flexible arm 34 is consistent with the telescopic direction of the piezoelectric element 31, and an adjustment gap is arranged between the other ends of the two flexible arms 34. In the above structure, in the initial state, the two first friction members 32 respectively abut against the second friction members 21 on both sides, and the pressure between the first friction member 32 and the second friction member 21 can be changed by changing the size of the adjustment gap, thereby adjusting the preload between the first friction member 32 and the second friction member 21; at the same time, the mounting portion 33 is arranged at one end of the flexible portion, so as to avoid the flexible portion having a larger width along the Y axis due to the mounting portion 33 being arranged between the two first friction members 32, which is conducive to reducing the width of the entire piezoelectric inertial drive device along the Y axis. In some embodiments, the mounting portion 33 is arranged between the two first friction members 32, which is not limited here.

[0061] In this embodiment, the piezoelectric element 31 is a piezoelectric ceramic stack. A plurality of piezoelectric ceramics are stacked in sequence along the first direction (X-axis direction) of the piezoelectric element 31. When the energization condition is different, the piezoelectric ceramic stack can elongate or contract along the first direction (X-axis direction), so as to drive the flexible part to move along the X-axis direction, thereby driving the first friction part 32 to move along the X-axis direction. The installation part 33 and the flexible part adopt an integral structure, which reduces the connection process between the installation part 33 and the flexible part and is convenient for production and processing. The installation part 33 and the flexible part are made of metal materials and have a certain elasticity. They can deform when the piezoelectric ceramic stack elongates or contracts, and transfer the output displacement generated by the piezoelectric ceramic stack to the flexible part, so as to drive the flexible part to move along the X-axis direction, thereby driving the first friction part 32 to move along the X-axis direction. It should be noted that the rigidity and flexibility involved in this embodiment are relative. Rigid parts all refer to parts with higher stiffness relative to the flexible arm, rather than rigid parts in an absolute sense. That is to say, in this embodiment, the rigid parts and the flexible arm made of metal materials both have the ability of elastic deformation to a certain extent. However, compared with the flexible arm, the rigid parts have higher stiffness, and compared with the rigid parts, the flexible arm has better deformation ability.

[0062] Preferably, in the XZ plane, the installation part 33 has a U-shaped structure. The piezoelectric element 31 is placed in the opening of the installation part 33, and the two end faces of the piezoelectric element 31 along the X-axis direction abut against the first side arm 331 and the second side arm 333 of the U-shaped installation part 33. A connecting arm 332 is connected between the first side arm 331 and the second side arm 333. There is a gap between the connecting arm 332 and the piezoelectric element 31. Since the piezoelectric element 31 becomes thinner when it elongates, that is, the cross-sectional area perpendicular to the X-axis becomes smaller, and the piezoelectric element 31 becomes thicker when it shortens, that is, the cross-sectional area perpendicular to the X-axis becomes larger. There is a gap between the connecting arm 332 and the piezoelectric element 31, which can avoid interference of the connecting arm 332 when the piezoelectric element 31 contracts, ensure the moving stroke of the piezoelectric inertial driving device, and also avoid structural deformation of the piezoelectric driving module 3, ensuring the durability of the piezoelectric driving module 3. In this embodiment, the opening of the installation part 33 is arranged at the top, which avoids the piezoelectric element 31 detaching from the installation part 33 due to gravity. In other embodiments, the opening of the installation part 33 can also be arranged at the bottom, which is not limited here.

[0063] When the piezoelectric element 31 shortens, its middle position is thicker, that is, the piezoelectric element 31 is similar to a shuttle shape. In this embodiment, the surface of the connecting arm 332 facing the piezoelectric element 31 is set as an inclined surface, and the inclined surface is inclined with respect to the first direction (X-axis direction), so that the distance between the bottom of the piezoelectric element 31 and the inclined surface gradually increases or gradually decreases along the first direction (X-axis direction), avoiding interference between the middle part of the piezoelectric element 31 and the connecting arm 332. And the surface of the connecting arm 332 facing the piezoelectric element 31 is set as an inclined surface, the inclined surface is inclined with respect to the first direction (X-axis direction), and the end of the inclined surface facing the first side arm 331 is inclined downward (towards the bottom of the connecting arm 332), so that the end of the inclined surface facing the second side arm 333 can support the piezoelectric element 31, avoiding the piezoelectric element 31 from sliding and shifting. In addition, the end of the inclined surface facing the first side arm 331 is inclined downward, so that the connection between the connecting arm 332 and the first side arm 331 is thinner and the rigidity is weakened. When the piezoelectric element 31 elongates, it is convenient for the first side arm 331 to deflect relative to the connecting arm 332, which is beneficial for the piezoelectric element 31 to push the flexible part and transmit the output displacement generated by the piezoelectric ceramic stack to the flexible part.

[0064] In other embodiments, the surface of the connecting arm 332 facing the piezoelectric element 31 may also be set as a flat surface. At this time, an additional fixing structure is required to fix the piezoelectric element 31 between the first side arm 331 and the second side arm 333, which is not limited here.

[0065] Preferably, as Figure 2 shown, the base 1 includes a first connecting seat 11 for fixing the piezoelectric driving module 3. The first connecting seat 11 is in the shape of a square plate, and a piezoelectric fixing member 113 is provided on the first connecting seat 11. The piezoelectric fixing member 113 is used to fix the piezoelectric driving module 3 to the base 1. Further, a fixing groove 114 is formed on the side wall of the piezoelectric fixing member 113. One end of the mounting portion 33 away from the flexible part is placed in the fixing groove 114, and the groove wall of the fixing groove 114 fits against the outer surface of the mounting portion 33.

[0066] In this embodiment, the piezoelectric fixing member 113 is in a block shape, the fixing groove 114 is set in a U shape, and the opening of the fixing groove 114 is provided on the side wall of the piezoelectric fixing member 113 facing the mounting portion 33. The fixing groove 114 extends vertically upward to penetrate the top surface of the piezoelectric fixing member 113, facilitating the placement of the mounting portion 33 inside the fixing groove 114. In this embodiment, an adhesive layer is provided between the side wall of the fixing groove 114 and the side wall 331 to realize the fixed connection between the piezoelectric driving module 3 and the first connecting seat 11.

[0067] Preferably, as Figures 4 - 6As shown, each flexible arm 34 includes a first flexible arm 341 and a second flexible arm 342. A first rigid member 343 is provided at the connection between the first flexible arm 341 and the second flexible arm 342. The first friction member 32 is provided on the first rigid member 343. One end of the first flexible arm 341 away from the second flexible arm 342 is connected to the mounting portion 33. An adjustment gap is provided between the ends of the two second flexible arms 342 away from the first flexible arm 341. The first rigid member 343 is provided to ensure that the first friction member 32 can be stably connected to the flexible arm 34, ensuring the durability of the piezoelectric inertial drive device.

[0068] Further, as Figure 6 shown, a fixing groove 3431 is formed on the side wall of the first rigid member 343, and the first friction member 32 is fixed inside the fixing groove 3431. Specifically, the first friction member 32 can be fixed inside the fixing groove 3431 by adhesive bonding or interference fit.

[0069] In this embodiment, the first flexible arm 341 and the second flexible arm 342 are arranged in a V shape. The openings of the V-shaped structures formed between two groups of the above-mentioned first flexible arms 341 and second flexible arms 342 are arranged oppositely, and the two flexible arms 34 are arranged symmetrically about the X axis, that is, the flexible part as a whole is in a quadrilateral structure symmetrical about the X axis. One diagonal of the quadrilateral flexible part is arranged along the X axis, and the other diagonal is arranged along the Y axis. Among them, the two first rigid members 343 are arranged on the Y-axis diagonal of the quadrilateral, and the first friction members 32 are respectively arranged on the side walls of the two first rigid members 343 facing away from each other. One end of the diagonal of the quadrilateral along the X axis is connected to the mounting portion 33, and an adjustment gap is provided between the two second flexible arms 342 at the other end.

[0070] As Figure 2 shown, preferably, a support member 111 is further provided on the first connection seat 11. A movable first adjustment member 112 is provided on the support member 111. The first adjustment member 112 is arranged facing the adjustment gap, that is, the support member 111 is arranged at one end of the flexible part away from the mounting portion 33, and the first adjustment member 112 can adjust the size of the adjustment gap. By adjusting the size of the adjustment gap, the pressure of the first friction member 32 on the second friction member 21 is changed, thereby changing the sliding friction force and the maximum static friction force between the first friction member 32 and the second friction member 21, which is beneficial for the sliding member 2 to drive a larger load to move, improving the practicality of the piezoelectric inertial drive device and expanding the applicable range.

[0071] Preferably, a gap is provided between the bottom surface of the flexible part and the first connection seat 11, reducing the contact area between the bottom of the flexible part and the first connection seat 11, reducing the friction force between the flexible part and the first connection seat 11, facilitating the deformation of the flexible part, and thus facilitating the change of the size of the adjustment gap.

[0072] Furthermore, the end face of the mounting portion 33 facing the base 1 protrudes from the end face of the flexible portion facing the base 1, and the end face of the mounting portion 33 facing the base 1 is in contact with the base 1. That is to say, in this embodiment, the bottom of the mounting portion 33 protrudes from the flexible portion, so that the bottom surface of the mounting portion 33 can be in contact with and arranged on the first connecting seat 11, while there is a gap between the bottom surface of the flexible portion and the first connecting seat 11.

[0073] In this embodiment, the first adjusting member 112 is an adjusting set screw. The adjusting set screw is arranged along the X-axis and has external threads on its outer wall. The support member 111 is in a block shape and is fixedly arranged on the first connecting seat 11 of the base 1. A threaded through hole is formed in the support member 111 along the X-axis direction, and the first adjusting member 112 is threadedly connected to the threaded through hole, so that the first adjusting member 112 can move along the threaded through hole. In the natural state, the width of the adjusting gap is smaller than the maximum diameter of the first adjusting member 112, and the end face of the first adjusting member 112 facing the adjusting gap is conical. As the first adjusting member 112 gradually approaches and extends into the adjusting gap along the threaded through hole, the first adjusting member 112 can change the size of the adjusting gap, thereby changing the pressure of the two first friction members 32 on the second friction member 21, and thus adjusting the pre-tightening force between the second friction member 21 and the first friction member 32. In addition, during the use of the piezoelectric inertial driving device, it is necessary to adjust the position of the first adjusting member 112 before the piezoelectric driving module 3 drives the sliding member 2 to slide, so as to adjust the pre-tightening force of the friction pair.

[0074] Preferably, when the piezoelectric driving module 3 drives the slider 2 to slide, the first adjusting member 112 and the first connecting seat 11 are relatively stationary. However, the flexible portion is pushed by the piezoelectric element 31 and can reciprocate along the X-axis relative to the first connecting seat 11, resulting in a relative displacement between the flexible portion and the first adjusting member 112. That is, the length of the first adjusting member 112 extending into the adjusting gap changes with the expansion and contraction of the piezoelectric element 31. When the first friction member 32 gradually approaches the first adjusting member 112, the length of the first adjusting member 112 extending into the adjusting gap becomes larger, further increasing the pre-tightening force of the friction pair. If the piezoelectric inertial driving device is in a "sticking" state at this time, the maximum static friction force between the friction pair can be further increased, facilitating the first friction member 32 to drive the load on the slider 2 to slide and making the operation of the piezoelectric inertial driving device more stable. When the first friction member 32 gradually moves away from the first adjusting member 112, the length of the first adjusting member 112 extending into the adjusting gap becomes smaller, reducing the pre-tightening force of the friction pair. If the piezoelectric inertial driving device is in a "slipping" state at this time, the sliding friction force between the friction pair can be reduced, increasing the relative displacement between the first friction member 32 and the slider 2 and reducing the sliding displacement of the load on the slider 2, ensuring the driving stroke of the piezoelectric inertial driving device. In other embodiments, the first adjusting member 112 may not be configured as an adjusting screw, and can be directly placed inside the adjusting gap through other rigid structures to adjust the size of the above-mentioned adjusting gap.

[0075] Further, a second rigid member 344 is connected to each end of the second flexible arm 342 away from the first rigid member 343, and an adjusting gap is provided between the two second rigid members 344. Since the first adjusting member 112 needs to extend into the adjusting gap when changing the size of the adjusting gap, the setting of the second rigid member 344 can prevent the second flexible arm 342 from deforming and ensure the durability of the piezoelectric inertial driving device.

[0076] It should be noted that the rigid members and flexible arms mentioned in this embodiment can be in the linear structure shown in the figure, or can be in an arc shape, a broken line shape, or a spiral shape, which are not specifically limited here. The flexible arm 34 is made of a metal material and is an integral structure. The first flexible arm 341 and the second flexible arm 342 have a smaller thickness, making their rigidity smaller, while the first rigid member 343 and the second rigid member 344 have a larger thickness, making their rigidity larger. In other embodiments, the connection between the first flexible arm 341, the second flexible arm 342, the first rigid member 343, and the second rigid member 344 can also be connected by welding or other means, which is not limited here.

[0077] Specifically, the base 1 further includes a second connecting seat 12. The top of the second connecting seat 12 is fixedly connected to the guiding member 13 by a second screw 42, such that the sliding member 2 is slidably connected to the second connecting seat 12. The first connecting seat 11 is embedded in the bottom of the second connecting seat 12, and a through groove is formed in the second connecting seat 12 along the Z-axis to expose the first connecting seat 11, realizing the frictional contact between the second friction member 21 and the first friction member 32. The second connecting seat 12 is in a square frame shape. At the four corners of the top surface of the first connecting seat 11, connecting blocks 115 are protrudingly provided. At the bottoms of the two side edges of the second connecting seat 12 along the Y-axis, receiving grooves are formed, and the connecting blocks 115 are fixed inside the receiving grooves by screws, realizing the detachable connection between the first connecting seat 11 and the second connecting seat 12, which is convenient for replacing the piezoelectric driving module 3.

[0078] Preferably, a cable fixing member 5 is provided on the second connecting seat 12, which is convenient for fixing the cable and supplying power to the piezoelectric element 31. Specifically, the cable fixing member 5 is in a "Ji" shape, with an opening at the bottom, and the cable can be connected to the piezoelectric element 31 through its opening. The cable fixing member 5 and the second connecting seat 12 are fixed by a third screw 43. In this embodiment, the cable fixing member 5 is fixed on the side of the mounting portion 33 away from the flexible portion.

[0079] As Figures 7 - 8 shown, it is the process of the piezoelectric inertial driving device provided in this embodiment driving the load to move. Figure 7 For the first process, it is "sticking" first and then "slipping". It should be noted that, as in Figure 7 b), d), f), and h) are all graphs of the voltage U (i.e., the voltage applied to the piezoelectric element 31) versus time t, and Figure 7 the state of the piezoelectric inertial driving device in a) of Figure 7 corresponds to the moment of t = 0 in b) of Figure 7 the driving distance ΔS of the piezoelectric inertial driving device in c) of 1 corresponds to Figure 7 the time interval of 0 to t in d) of 1 Figure 7 the driving distance ΔS of the piezoelectric inertial driving device in e) of 2 corresponds to Figure 7 the time interval of 0 to t in f) of 2 Figure 7 the driving distance nΔS of the piezoelectric inertial driving device in g) of 2 corresponds to Figure 7 the time interval of 0 to nt in h) of 2 The driving process is specifically as follows:

[0080] First, at t = 0, as in Figure 7 ​​As shown in a) of [description], the piezoelectric inertial drive device is in its initial state, and at this time, all components are in their natural states. At this time, the voltage applied to the piezoelectric element 31 is U 0 .

[0081] Secondly, during the process from 0 to t 1 ("sticking" stage), the voltage applied to the piezoelectric element 31 gradually rises from U 0 to U t . The piezoelectric element 31 slowly elongates, pushing the flexible part to slowly move along the X-axis, causing the first friction member 32 to drive the second friction member 21 to move through static friction, thereby driving the slider 2 to slide along the X-axis. Specifically, in Figure 7 c), it slides to the left, enabling the slider 2 to drive the load thereon to move by ΔS 1 . Moreover, during this process, the first friction member 32 approaches the first adjusting member 112, the adjusting gap increases, and the maximum static friction force between the friction pairs increases, which is beneficial for the first friction member 32 to drive the load on the slider 2 to slide, making the operation of the piezoelectric inertial drive device more stable.

[0082] Then, during the process from t 1 to t 2 ("slipping" stage), the voltage applied to the piezoelectric element 31 rapidly drops from U t to U 0 . The piezoelectric element 31 quickly retracts, and the flexible part quickly returns to its initial state along the X-axis, causing the first friction member 32 to slide relative to the second friction member 21, so that the slider 2 either remains stationary or still has a small displacement along the X-axis, that is, Figure 7 in e), it remains stationary or has a small displacement to the right, enabling the load on the slider 2 to have a final total displacement of ΔS 2 at t = t 2 (i.e., in the time period from 0 to t 2 ). Moreover, during this process, the first friction member 32 moves away from the first adjusting member 112 in the X-axis direction, the adjusting gap decreases, the sliding friction force between the friction pairs decreases, and the displacement of the load is reduced, ensuring the driving stroke of the piezoelectric inertial drive device.

[0083] Finally, by continuously repeating the above process, within the time interval of t = nt 2 , the piezoelectric inertial drive device can drive the load to move by nΔS 2 .

[0084] Figure 8 For the second driving process, "slipping" first and then "sticking", its driving process is similar to the first one, but the moving direction is opposite. Specifically, first, at t = 0, the piezoelectric inertial drive device is in its initial state, and at this time, all components are in their natural states. At this time, the voltage applied to the piezoelectric element 31 is U0 . Secondly, during the process from 0 to t 1 ("sliding" stage), the voltage applied to the piezoelectric element 31 rapidly rises from U 0 to U t . The piezoelectric element 31 rapidly elongates, pushing the flexible part to rapidly move along the X-axis, causing the first friction member 32 to relatively slide with the second friction member 21, so that the slider 2 is stationary or slides with a small displacement along the X-axis, that is Figure 8 stationary or sliding with a small leftward displacement in 1 ~t 2 ("viscous" stage), the voltage applied to the piezoelectric element 31 slowly drops from U t to U 0 . The piezoelectric element 31 slowly retracts, pulling the flexible part to slowly move along the X-axis, causing the first friction member 32 to drive the second friction member 21 to move through static friction, thereby driving the slider 2 to slide along the X-axis. Specifically, in Figure 8 it slides to the right, enabling the slider 2 to drive the load thereon to move ΔS', so that the load on the slider 2 has a final total displacement ΔS 2 at t = t 2 (i.e., in the time period from 0 to t 3 ). That is to say, within the time interval from 0 to t 2 , the driving distance of the piezoelectric inertial driving device is ΔS 3 . Finally, the above process is continuously repeated, so that within the time interval of t = nt 2 , the piezoelectric inertial driving device can drive the load to move nΔS 3 .

[0085] Embodiment 2

[0086] This embodiment provides a piezoelectric inertial driving device. Compared with Embodiment 1, the structure provided in this embodiment is basically the same as that in Embodiment 1, except for the structural settings of the piezoelectric driving module 3. The same structures as those in Embodiment 1 will not be elaborated herein again.

[0087] Since the deformation amount generated by the piezoelectric ceramic stack is small, in order to facilitate the realization of a piezoelectric inertial driving device with a large driving stroke, further, as shown in Figure 9 and Figure 10As shown, the piezoelectric drive module 3 further includes a lever amplification structure 35 disposed between the piezoelectric element 31 and the flexible part, for amplifying the output deformation amount of the piezoelectric element 31. Specifically, the lever amplification structure 35 includes an input connection part 351, an output connection part 352, and a lever part 353. One end of the lever part 353 is pivotally fixed to form a fulcrum O. One end of the input connection part 351 is connected to one end of the piezoelectric element 31 facing the flexible part. The other end of the input connection part 351 is connected to the middle part of the lever part 353. The other end of the lever part 353 is connected to one end of the output connection part 352. The other end of the output connection part 352 is connected to the flexible part. In this embodiment, the lever part 353 is connected to the mounting part 33, and the bottom of the mounting part 33 is fixed to the base 1, so that the connection point between the bottom of the lever part 353 and the base 1 forms the fulcrum O, and the lever part 353 is pivotally fixed, so that the lever part 353 can rotate. The middle part of the lever part 353 is connected to the piezoelectric element 31 through the input connection part 351. The top of the lever part 353 is connected to the flexible part through the output connection part 352. When the piezoelectric element 31 elongates, it can push the middle part of the lever part 353 through the input connection part 351. The lever part 353 rotates along the fulcrum O, so as to push the flexible part to move through the output connection part 352, realizing the movement of the first friction part 32. By setting the lever amplification structure 35, the output displacement of the piezoelectric element 31 can be amplified, increasing the input displacement of the flexible part, making the sliding displacement of the sliding part 2 larger, which is beneficial to realizing a large driving stroke of the piezoelectric inertial drive device and improving the practicability. Specifically, the output connection part 352 and the input connection part 351 are respectively located on both sides of the lever part 353. The lever part 353 in the natural state is arranged in the vertical direction. Specifically, Figure 10 The input connection part 351, the output connection part 352 and the lever part 353 are shown by dotted lines inside, and the directions of the acting forces of the output connection part 352 and the input connection part 351 are shown by arrows.

[0088] In this embodiment, the structure of the mounting part 33 is the same as that in the first embodiment, including a first side arm 331, a connecting arm 332 and a second side arm 333. The mounting part 33 and the flexible part are of an integral structure. The lever amplification structure 35 is disposed on the first side arm 331 and formed by opening a hole and groove structure on the first side arm 331.

[0089] Specifically, a first through groove 61 is provided at the bottom of one end of the first side arm 331 facing the flexible part. The first through groove 61 runs through the two side walls of the first side arm 331 in the front and rear along the Y-axis and runs through the bottom of the first side arm 331 in the Z-axis direction. Preferably, the bottom of the first through groove 61 is arc-shaped and is spaced from the top surface of the first side arm 331, so that an output connection part 352 is formed between the bottom of the first through groove 61 and the top surface of the first side arm 331, that is, the output connection part 352 is arranged at the top of the first through groove 61. At one end of the first side arm 331 facing the mounting part 33, a second through groove 62 and a third through groove 63 are spaced apart in the vertical direction. The second through groove 62 is located above the third through groove 63. Both the second through groove 62 and the third through groove 63 run through the two side surfaces of the first side arm 331 in the front and rear along the Y-axis, and the second through groove 62 extends upward through the top surface of the first side arm 331, so that an input connection part 351 is formed between the second through groove 62 and the third through groove 63. A lever part 353 is formed between the second through groove 62 and the third through groove 63 and the groove side wall of the first through groove 61. Among them, an arc groove 631 is recessed in the groove wall bottom of the third through groove 63 facing the first through groove 61, so that the bottom of the lever part 353 has flexibility and the lever part 353 can be deflected.

[0090] Embodiment III

[0091] This embodiment provides a piezoelectric inertial driving device. Compared with Embodiment I or Embodiment II, the structure provided in this embodiment is basically the same as that in Embodiment I or Embodiment II, except for the structural settings of the piezoelectric driving module 3 and the sliding member 21. The same structures as those in Embodiment I and Embodiment II will not be described in detail in this embodiment.

[0092] As Figure 11 shown, in this embodiment, a second friction member 21 is provided on each of the two side walls of the sliding member 2 in the width direction. The two second friction members 21 are in corresponding contact with the two side walls. At this time, the sides of the two second friction members 21 facing away from each other are friction surfaces. Since the piezoelectric driving module 3 is arranged below the sliding member 2, at this time, the first rigid member 343 extends upward and protrudes from the first flexible arm 341 and the second flexible arm 342. Fixed grooves 3431 are formed on the side walls of the two rigid members 343 relative to each other. First friction members 32 are arranged in the two fixed grooves 3431. The sides of the two first friction members 32 facing each other are in friction contact with the two friction surfaces.

[0093] As Figures 11 - 12As shown, preferably, support portions 345 are respectively connected to the ends of two flexible arms 34 away from the mounting portion 33. An adjustment gap is provided between the two support portions 345. The end face of the support portion 345 facing the base 1 protrudes from the end face of the flexible portion facing the base 1. Further, the end face of the support portion 345 facing the base 1 is flush with the end face of the mounting portion 33 facing the base 1. Since the bottom of the mounting portion 33 protrudes from the flexible portion and the bottom surface of the mounting portion 33 is attached to the base 1, that is, the end face of the support portion 345 facing the base 1 is attached to the base 1, which further plays a role in supporting the flexible arm 34, ensuring that there is a gap between the bottom surface of the flexible portion and the first connecting seat 11, avoiding the generation of friction between the flexible arm 34 and the base 1, facilitating the deformation of the flexible portion, avoiding the influence of the friction between the flexible arm 34 and the base 1 on the deformation of the flexible portion, and also facilitating the change of the size of the adjustment gap.

[0094] Further, the support portion 345 includes a first arm portion 3451, a second arm portion 3452, and an extension portion 3453. The first arm portion 3451 and the second arm portion 3452 are connected by a connecting arm portion to form a U-shaped structure. The opening of the U-shaped structure faces the base 1. The side of the second arm portion 3452 away from the first arm portion 3451 is connected to the flexible arm 34. The extension portion 3453 protrudes from the second end of the first arm portion 3451 and extends along the X-axis toward the flexible arm 34. The end face of the extension portion 3453 facing the base 1 protrudes from the end face of the flexible portion facing the base 1, and the end face of the extension portion 3453 facing the base 1 is flush with the end face of the mounting portion 33 facing the base, so as to support the flexible portion, such that there is a gap between the bottom surface of the flexible portion and the first connecting seat 11. The end face of the extension portion 3453 facing away from the base 1 faces the second end of the second arm portion 3452, and there is a gap between the end face of the extension portion 3453 facing away from the base 1 and the second end of the second arm portion 3452. Thus, when the flexible portion moves along the X-axis and drives the first arm portion 3451 to deflect, the second arm portion 3452 and the extension portion 3453 will not interfere with each other, ensuring the driving function of the piezoelectric driving module 3. By providing the extension portion 3453, the contact area between the support portion 345 and the base 1 can be increased, which is beneficial to the stable support of the flexible arm 34 by the support portion 345 and ensures the supporting effect of the support portion 345. Specifically, the first arm portion 3451 is supported on the first connecting seat 11 of the base 1. It can be understood that the size of the connecting arm portion should be relatively thin to enable the relative deflection of the first arm portion 3451 and the second arm portion 3452.

[0095] In other embodiments, the extension portion 3453 may extend toward the side away from the flexible arm 34, or extension portions 3453 are provided on both sides of the first arm portion 3451, which is not limited herein. In this embodiment, the extension portion 3453 extending toward the flexible arm 34 is beneficial to reducing the size of the support portion 345 in the X-axis direction, which is conducive to the miniaturization of the piezoelectric inertial driving device.

[0096] Obviously, the above-mentioned embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation manners here. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A piezoelectric inertial driving device, characterized in that, it includes: a base (1); a sliding member (2), which is slidably engaged with the base (1) and can slide along a first direction. One side of the sliding member (2) is provided with a bearing surface for carrying a load, and the other side is provided with a friction surface perpendicular to the bearing surface. Both the friction surface and the bearing surface extend along the first direction; the base (1) includes two guiding members (13) spaced apart along a second direction. The guiding members (13) both extend along the first direction. The guiding members (13) and the sliding member (2) are both strip-shaped. The sliding member (2) is located between the two guiding members (13). Crossed roller guide structures are formed between the two guiding members (13) and the two sides of the sliding member (2) along the Y-axis respectively; the positive or negative direction of the X-axis is the first direction, the positive or negative direction of the Y-axis is the second direction, and the positive or negative direction of the Z-axis is the third direction; a piezoelectric driving module (3), which is arranged on the base (1). The piezoelectric driving module (3) is located on the side of the sliding member (2) where the friction surface is provided. The piezoelectric driving module (3) includes a piezoelectric element (31) and a first friction member (32). The piezoelectric element (31) expands and contracts along the first direction. The piezoelectric element (31) is flexibly connected to the first friction member (32). The first friction member (32) is in frictional contact with the friction surface; the piezoelectric driving module (3) further includes a mounting portion (33) and a flexible portion. The flexible portion includes two flexible arms (34) spaced apart in the second direction. The mounting portion (33) is connected to the base (1), and the piezoelectric element (31) is fixed on the mounting portion (33). At least one first friction member (32) is provided on the side wall of each flexible arm (34). One ends of the two flexible arms (34) are both connected to the mounting portion (33), and the flexible arms (34) are located at one end of the piezoelectric element (31) along the first direction. An adjustment gap is provided between the other ends of the two flexible arms (34).

2. The piezoelectric inertial driving device according to claim 1, characterized in that, there are two friction surfaces spaced apart and opposite to each other in the second direction. The second direction is perpendicular to the friction surface. The piezoelectric driving module (3) is provided with at least two first friction members (32). Each friction surface is in frictional contact with at least one first friction member (32).

3. The piezoelectric inertial driving device according to claim 1, characterized in that, Each of the flexible arms (34) includes a first flexible arm (341) and a second flexible arm (342). A first rigid member (343) is provided at the connection between the first flexible arm (341) and the second flexible arm (342). The first friction member (32) is provided on the first rigid member (343). One end of the first flexible arm (341) away from the second flexible arm (342) is connected to the mounting portion (33). The adjustment gap is provided between the ends of the two second flexible arms (342) away from the first flexible arm (341).

4. The piezoelectric inertial drive device according to claim 3, wherein, a support member (111) is provided on the base (1), and a movable first adjustment member (112) is provided on the support member (111). The first adjustment member (112) is disposed opposite to the adjustment gap, and the first adjustment member (112) can extend into the adjustment gap and change the size of the adjustment gap.

5. The piezoelectric inertial drive device according to claim 3, wherein, A second rigid member (344) is connected to one end of each of the second flexible arms (342) away from the first rigid member (343). The adjustment gap is provided between the second rigid members (344) of the two flexible arms (34).

6. The piezoelectric inertial drive device according to claim 1, wherein, The mounting portion (33) is U-shaped. The piezoelectric element (31) is placed in the opening of the mounting portion (33). The two end faces of the piezoelectric element (31) along the first direction respectively abut against the first side arm (331) and the second side arm (333) of the mounting portion (33). A connecting arm (332) is connected between the first side arm (331) and the second side arm (333). A gap is provided between the connecting arm (332) and the piezoelectric element (31).

7. The piezoelectric inertial drive device according to claim 1, wherein, A gap is provided between the flexible portion and the base (1).

8. The piezoelectric inertial drive device according to claim 7, wherein, Support portions (345) are respectively connected to the ends of the two flexible arms (34) away from the mounting portion (33). The adjustment gap is provided between the two support portions (345). The end face of the support portion (345) facing the base (1) protrudes from the end face of the flexible portion facing the base (1).

9. The piezoelectric inertial drive device according to claim 8, wherein, The support portion (345) includes a first arm portion (3451), a second arm portion (3452) and an extension portion (3453); The first arm portion (3451) and the second arm portion (3452) are oppositely arranged in the first direction. The first ends of the first arm portion (3451) and the second arm portion (3452) are connected by a connecting arm portion to form a U-shaped structure. The opening of the U-shaped structure faces the base (1). The side of the second arm portion (3452) away from the first arm portion (3451) is connected to the flexible arm (34). The extension portion (3453) protrudes from the second end of the first arm portion (3451) and extends towards the flexible arm (34) in the first direction. The end face of the extension portion (3453) facing the base (1) protrudes from the end face of the flexible portion facing the base (1). The end face of the extension portion (3453) facing away from the base (1) faces the second end of the second arm portion (3452), and there is a gap between the end face of the extension portion (3453) facing away from the base (1) and the second end of the second arm portion (3452).

10. The piezoelectric inertial drive device according to any one of claims 1-9, characterized in that, the piezoelectric drive module (3) further includes a lever amplification structure (35). The lever amplification structure (35) includes an input connection portion (351), an output connection portion (352), and a lever portion (353). One end of the lever portion (353) is provided with a fulcrum. One end of the input connection portion (351) is connected to one end of the piezoelectric element (31) in the first direction. The other end of the input connection portion (351) is connected to the middle of the lever portion (353). The other end of the lever portion (353) is connected to one end of the output connection portion (352). The other end of the output connection portion (352) is connected to the first friction member (32).

11. The piezoelectric inertial drive device according to any one of claims 1-9, characterized in that, the base (1) includes a first connection seat (11) and a second connection seat (12). The piezoelectric drive module (3) is arranged on the first connection seat (11). The sliding member (2) is slidably connected to the second connection seat (12). The first connection seat (11) is detachably connected to the second connection seat (12).

12. The piezoelectric inertial drive device according to any one of claims 1-9, characterized in that, a piezoelectric fixing member (113) is arranged on the base (1). The piezoelectric fixing member (113) is used to fix the piezoelectric drive module (3) to the base (1).

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