A sealing performance testing device for a sealing lifting structure

Abstract

The present invention relates to the field of sealing detection, and specifically to a sealing performance detection device for a sealing lifting structure, comprising a workbench and a turntable arranged on the workbench for conveying the sealing lifting structure in a turntable manner, and also comprising an airtightness detection device, wherein the airtightness detection device comprises a frame arranged below the turntable, a water injection container arranged above the turntable, a water receiving container arranged on the frame, and a pressure sensing mechanism arranged in the water receiving container, the water injection container and the water receiving container can move relative to each other on the workbench along the lifting direction of the sealing lifting structure, and a two-way driving device for driving the water injection container and the water receiving container to move relative to each other on the workbench is also provided, and a water storage container is also installed on the two-way driving device. The present application detects the sealing performance of the sealing lifting structure through the airtightness detection device, thereby ensuring that the sealing lifting structure will not leak solution when in use, thereby improving the quality of the sealing lifting structure.

Description

Technical Field

[0001] The invention relates to the field of sealing performance detection, and in particular to a sealing performance detection device of a sealing lifting structure. Background Art

[0002] The sealed lifting structure is a wind bag sealed telescopic structure, which can be applied to semiconductor wet process technology. The cavity of the wind bag sealed telescopic structure can effectively prevent solution leakage. This structure mainly includes: a hollow wind bag tube, a lifting fixed seat, a lower fixed seat, a piston rod, etc. The upper end of the wind bag tube of this structure is fixed on a base, and the lower end is fixed on a bottom plate. The bottom plate is fixed. The piston rod passes through the wind bag structure and is fixed on the upper base to drive the upper base to move up and down. When the piston rod moves upward, the wind bag tube is stretched and extended, and when the piston rod moves downward, the wind bag tube is compressed. Since the piston rod is always isolated from the external environment during the lifting process, it can be well ensured that no liquid will enter the lifting hole of the piston rod. The wind bag tube is made of PTFE material, which can ensure good corrosion resistance.

[0003] However, after the existing sealing lifting structure is assembled, there is no process for testing its sealing performance. If the sealing performance of the sealing lifting structure is not good during use, it is easy to cause leakage of the solution. In order to ensure that the sealing effect of the hollow air bag tube is good after the sealing lifting mechanism is assembled, it is necessary to test the sealing performance of the hollow air bag tube during the lifting process of the piston rod; for example, the gas density relay and gas density monitoring device with sealing performance self-test disclosed in Chinese utility model patent CN211927197U are not suitable for sealing performance testing of the sealing lifting structure in the semiconductor wet process. Therefore, a device capable of performing sealing testing on the sealing lifting structure is required. Summary of the invention

[0004] 1. Technical issues to be solved

[0005] The present invention is aimed at the above-mentioned defects existing in the prior art, and specially proposes a sealing performance detection device of a sealing lifting structure, which solves the problem that the sealing performance of the sealing lifting structure cannot be well detected in the prior art of semiconductor wet process technology.

[0006] 2. Technical Solution

[0007] In order to solve the above technical problems, the present invention provides a sealing performance testing device for a sealing lifting structure, including a workbench and a turntable arranged on the workbench for turntable-type conveying of the sealing lifting structure, and also including an airtightness testing device, which includes a frame arranged below the turntable, a water filling container arranged above the turntable, a water receiving container arranged on the frame, and a pressure sensing mechanism arranged in the water receiving container, the water filling container and the water receiving container can move relative to each other on the workbench along the lifting direction of the sealing lifting structure, and a two-way driving device is also provided on the workbench to drive the water filling container and the water receiving container to move relative to each other, and a water storage container is also installed on the two-way driving device.

[0008] Preferably, the water injection container is a funnel structure, the small end of the water injection container is set downward, a sealing gasket is provided on the small end of the water injection container, the large end of the water injection container is covered with a lid, and the lid is provided with a water inlet, and the lower end of the side wall of the water injection container is also provided with a water outlet.

[0009] Preferably, there are two water receiving containers, and the two water receiving containers can be symmetrically arranged on both sides of the sealed lifting structure, the symmetry planes of the two water receiving containers are the middle cross-section of the sealed lifting structure, the water receiving container is a semicircular block structure, and a semicircular groove is provided on the central straight surface of the water receiving container. The two water receiving containers are connected to form a rotating body structure and the semicircular grooves of the two water receiving containers are connected to form a circular groove. A sealing rubber gasket is also embedded in the semicircular groove of the water receiving container, a water receiving cavity is provided in the water receiving container, and a wall opening connected to the water receiving cavity is also provided on the straight surface of the water receiving container, and a step is also provided at the cavity opening of the water receiving cavity.

[0010] Preferably, each water receiving container has a pressure sensing mechanism in the water receiving cavity, and the pressure sensing mechanism includes a trigger and a sensing member, the trigger is arranged on the step of the water receiving container and is located in the water receiving cavity, the sensing member is arranged at the outer bottom of the water receiving container, and the trigger contacts the sensing member.

[0011] Preferably, the trigger member includes a rubber gasket and a floating plate, the rubber gasket is arranged on the step of the water receiving container and the edge of the rubber gasket is fixedly connected to the step, the floating plate is arranged in the water receiving cavity of the water receiving container and the floating plate is located on the bottom surface of the rubber gasket, the edge contour of the floating plate is the contour shape of the water receiving cavity, the floating plate can move vertically in the water receiving cavity, the bottom of the floating plate also has a guide rod extending vertically downward through the bottom of the water receiving container, and a buffer spring is also sleeved on the guide rod, and the two ends of the buffer spring are respectively fixed to the bottom of the floating plate and the bottom of the water receiving container.

[0012] Preferably, the sensing component includes a pressure sensor, which is fixedly mounted on the bottom of the water receiving container through a mounting bracket, the sensing end of the pressure sensor faces the guide rod and the pressure sensor and the guide rod are coaxial, and a compression spring is also connected between one end of the guide rod extending out of the water receiving container and the sensing end of the pressure sensor.

[0013] Preferably, each water receiving container is also provided with a water suction pipe, which is a hard pipe structure. A pipe groove is provided at the upper end of the water receiving container, one end of the water suction pipe is threadedly fixed in the pipe groove, the other end of the water suction pipe extends vertically downward and the end of the water suction pipe contacts the surface of the rubber gasket when it is in an undeformed state, and the end of the water suction pipe contacting the surface of the rubber gasket is also provided with a water suction port connected to the inside of the water suction pipe, and an interface for connecting the water suction pipe is also provided on the upper end side wall of the water receiving container.

[0014] Preferably, each water receiving container is also provided with a blowing member, which includes multiple small fans. A mounting opening is provided at the top of the water receiving container, and the multiple small fans are installed in the mounting opening. The blades of each small fan are also located in the water receiving cavity and the blowing direction of each small fan faces the rubber gasket. An interlayer is also provided on the curved surface of the water receiving container, a heating plate is provided in the interlayer, and a plurality of air holes connected to the interlayer are also provided on the inner curved surface of the water receiving container.

[0015] Preferably, the two water receiving containers can also move horizontally on the frame, the direction of horizontal movement of the water receiving containers is perpendicular to the driving direction of the bidirectional driving device, and the frame is also provided with an opening and closing driving device that can drive the two water receiving containers to move relative to each other.

[0016] Preferably, it also includes a lifting drive device, which is used to drive the lifting movement of the sealing lifting structure. The lifting drive device is arranged on the workbench and the lifting drive device is located directly below the water receiving container. A three-jaw chuck is also installed on the lifting drive device.

[0017] 3. Beneficial Effects

[0018] Compared with the prior art, the present invention detects the sealing performance of the sealing lifting structure through the airtightness detection device, thereby realizing whether the sealing performance of the sealing lifting structure is qualified after assembly, and ensuring that the sealing lifting structure will not leak solution when in use; specifically, through the docking of two water receiving containers, it is realized that water can smoothly flow into the two water receiving containers after flowing along the piston rod, and through the judgment of the pressure sensing mechanism and the coordination between the trigger part and the sensing part, it can be known whether the sealing performance of the sealing lifting structure is qualified.

[0019] Specifically, the deformation of the rubber gasket triggers the floating plate, which enables the guide rod on the floating plate to trigger the sensing element, ensuring that the sensing element can sense the water pressure. The connection between the compression spring, the guide rod and the pressure sensor enables the pressure sensor to determine whether there is water in the water cavity.

[0020] The water in the water receiving container is also absorbed through the water suction pipe, so that the water in the water receiving container can be discharged into the water storage container, so that the water can be recycled; through the cooperation of a small fan and a heating plate, the rubber gasket and the inner wall of the water receiving container are blown dry, ensuring that the pressure sensor can make accurate judgments. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of a three-dimensional structure for implementing the present invention;

[0022] Figure 2 is a front view of the present invention;

[0023] Figure 3 is a top view of the present invention;

[0024] Figure 4 yes Figure 3 Sectional view at AA;

[0025] Figure 5 It is a three-dimensional structural schematic diagram of the sealing lifting structure;

[0026] Figure 6 It is a schematic diagram of a partial three-dimensional structure for implementing the present invention;

[0027] Figure 7 yes Figure 6 The main view;

[0028] Figure 8 It is a three-dimensional structural schematic diagram of a water filling container;

[0029] Fig. 9 yes Figure 8 Left view of

[0030] Fig.10 yes Fig. 9 Cross-sectional view at BB;

[0031] Fig.11 It is a three-dimensional structural schematic diagram of a water receiving container and a pressure sensing mechanism;

[0032] Fig.12 yes Fig.11 The main view;

[0033] Fig.13 It is a schematic diagram of the three-dimensional structure after two water receiving containers are docked;

[0034] Fig.14 yes Fig.13 Left view of

[0035] Fig.15 yes Fig.14 Cross-sectional view at CC.

[0036] In the figure:

[0037] 1 is a workbench;

[0038] 2 is a turntable;

[0039] 3 is an air tightness detection device; 3a is a frame; 3b is a water filling container; 3b1 is a cover; 3b2 is a water inlet; 3b3 is a water outlet; 3b4 is a sealing gasket; 3c is a water receiving container; 3c1 is a semicircular groove; 3c2 is a sealing rubber pad; 3c3 is a water receiving chamber; 3c31 is a step; 3c4 is a wall opening; 3c5 is a water suction pipe; 3c51 is a pipe groove; 3c52 is an interface; 3c6 is a blowing part; 3c61 is a small fan; 3c62 is a heating plate; 3c63 is a vent hole; 3d is a pressure sensing mechanism; 3d1 is a trigger; 3d11 is a rubber gasket; 3d12 is a floating plate; 3d13 is a guide rod; 3d14 is a buffer spring; 3d2 is a sensing part; 3d21 is a pressure sensor; 3d22 is a mounting bracket; 3d23 is a compression spring;

[0040] 4 is a bidirectional driving device; 4a is a water storage container;

[0041] 5 is an opening and closing driving device;

[0042] 6 is a lifting drive device; 6a is a three-jaw chuck;

[0043] 7 is a sealed lifting structure; 7a is a lower fixing seat; 7b is a lifting fixing seat; 7c is a hollow air bag tube; 7d is a piston rod. DETAILED DESCRIPTION

[0044] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0045] Embodiment 1:

[0046] The sealing performance testing device of the sealing lifting structure of this embodiment is as follows: Figure 1 to Figure 4As shown, it includes a workbench 1 and a turntable 2 arranged on the workbench 1 for turntable-type conveying of the sealing lifting structure 7, and also includes an airtightness detection device 3, the airtightness detection device 3 includes a frame 3a arranged below the turntable 2 and a water injection container 3b arranged above the turntable 2, a water receiving container 3c arranged on the frame 3a, and a pressure sensing mechanism 3d arranged in the water receiving container 3c, the water injection container 3b and the water receiving container 3c can move relative to each other on the workbench 1 along the lifting direction of the sealing lifting structure 7, and the workbench 1 is also provided with a two-way driving device 4 for driving the water injection container 3b and the water receiving container 3c to move relative to each other, and a water storage container 4a is also installed on the two-way driving device 4.

[0047] Specifically, the sealing lifting mechanism is composed of a hollow air bag tube 7c, a lifting fixed seat 7b, a lower fixed seat 7a and a piston rod 7d. After the existing sealing lifting structure 7 is assembled, there is no process for performing a sealing test on it, which easily leads to the phenomenon of solution leakage in the sealing lifting structure 7 when it is used. In order to solve the technical problem of how to perform a sealing test on the sealing lifting structure 7, the turntable 2 sends the sealing lifting structure 7 to the airtightness testing device 3, and the sealing lifting structure 7 is located between the water injection container 3b and the water receiving container 3c. Then, the two-way driving device 4 drives the water injection container 3b and the water receiving container 3c to move toward the turntable 2 at the same time until the ends of the water injection container 3b and the water receiving container 3c contact the turntable 2 and then stop driving. The hollow air bag tube 7c and the lifting fixed seat 7b are in the water injection container 3b, and the water storage container 4a injects the stored water into the water injection container 3b. As the piston rod 7d drives the lifting fixed seat 7b to move up and down, the lifting fixed seat 7b is lifted and lowered in the water injection container 3b. When the piston rod 7d drives the lifting and fixing seat 7b to move up and down for many times, there is still no water flowing into the water receiving container 3c, which indicates that the sealing of the hollow air bag tube 7c is good. On the contrary, the water in the water injection container 3b flows into the water receiving container 3c along the piston rod 7d, and the water remains on the pressure sensing mechanism 3d, so that after the pressure sensing mechanism 3d senses the gravity change, it is judged that the sealing effect of the hollow air bag tube 7c is not good, and the sealing lifting structure 7 needs to be repaired. After the sealing performance test of the sealing lifting structure 7 is completed, the water in the water injection container 3b and the water in the water receiving container 3c are discharged into the water storage container 4a. Then, the two-way driving device 4 drives the water injection container 3b and the water receiving container 3c to move in the direction away from the turntable 2 at the same time, so that the turntable 2 can send the sealing lifting structure 7 out without being hindered. After the next sealing lifting structure 7 comes between the water injection container 3b and the water receiving container 3c, the above operation is repeated to test the sealing performance of the sealing lifting structure 7.

[0048] like Figure 5-Figure 10As shown, the water filling container 3b is a funnel structure, the small mouth end of the water filling container 3b is set downward, a sealing gasket 3b4 is also provided on the small mouth end of the water filling container 3b, the large mouth end of the water filling container 3b is also covered with a lid 3b1, and the lid 3b1 is provided with a water inlet 3b2, and the lower end of the side wall of the water filling container 3b is also provided with a water outlet 3b3.

[0049] Specifically, when the sealing lifting structure 7 is undergoing a sealing performance test, in order to solve the technical problem of how to test the sealing performance of the sealing lifting structure 7 of the water filling container 3b, the water filling container 3b is moved toward the turntable 2 by the drive of the two-way driving device 4, and the small mouth end of the water filling container 3b is against the turntable 2. Then, water is injected into the water filling container 3b through the water inlet 3b2 until the water in the water filling container 3b is full, and the sealing lifting structure 7 starts to perform the lifting movement again. As the sealing lifting mechanism continues to perform the lifting movement, if water enters the hollow air bag tube 7c, it will flow into the water receiving container 3c along the piston rod 7d, indicating that the sealing performance of the hollow air bag tube 7c is poor. Otherwise, it means that the sealing performance of the hollow air bag tube 7c is qualified. After the sealing performance test of the sealing lifting structure 7 is completed, the water in the water filling container 3b is discharged into the water storage container 4a through the water outlet 3b3 for easy recycling.

[0050] like Figure 11-Figure 15 As shown, there are two water receiving containers 3c, and the two water receiving containers 3c can be symmetrically arranged on both sides of the sealing lifting structure 7. The symmetric planes of the two water receiving containers 3c are the middle cross-sections of the sealing lifting structure 7. The water receiving container 3c is a semicircular block structure. A semicircular groove 3c1 is provided on the central straight surface of the water receiving container 3c. The two water receiving containers 3c are connected to form a rotating body structure and the semicircular grooves 3c1 of the two water receiving containers 3c are connected to form a circular groove. A sealing rubber pad 3c2 is also embedded in the semicircular groove 3c1 of the water receiving container 3c. A water receiving cavity 3c3 is provided in the water receiving container 3c, and a wall opening 3c4 connected to the water receiving cavity 3c3 is also provided on the straight surface of the water receiving container 3c, and a step 3c31 is also provided at the cavity opening of the water receiving cavity 3c3.

[0051] Specifically, if water flows into the water receiving container 3c along the piston rod 7d, in order to solve the technical problem of how to judge whether the sealing performance of the water receiving container 3c is qualified, before water is injected into the water injection container 3b, the two water receiving containers 3c are connected to each other, and the piston rod 7d can be lifted and lowered in the circular groove formed after the two water receiving containers 3c are connected. Water flows into the two connected water receiving containers 3c along the piston rod 7d. Due to the setting of the sealing gasket 3c2, water will not flow out of the two water receiving containers 3c. Water flows into the water receiving cavity 3c3 through the wall opening 3c4 on the water receiving container 3c. The water remains on the pressure sensing mechanism 3d. The pressure sensing mechanism 3d is used to judge whether there is water, thereby judging whether the sealing performance of the sealing lifting structure 7 is qualified.

[0052] like Fig.11 and Fig.15 As shown, each water receiving container 3c has a pressure sensing mechanism 3d in the water receiving chamber 3c3, and the pressure sensing mechanism 3d includes a triggering member 3d1 and a sensing member 3d2. The triggering member 3d1 is arranged on the step 3c31 of the water receiving container 3c and the triggering member 3d1 is located in the water receiving chamber 3c3. The sensing member 3d2 is arranged at the outer bottom of the water receiving container 3c, and the triggering member 3d1 contacts the sensing member 3d2.

[0053] Specifically, when water flows into the water receiving chamber 3c3 of the water receiving container 3c, in order to solve the technical problem of how the pressure sensing mechanism 3d determines the presence of water, water falls on the trigger member 3d1. The pressure of the water on the trigger member 3d1 causes the trigger member 3d1 to trigger the sensing member 3d2. After the sensing member 3d2 senses the pressure, it is known that water has entered the water receiving chamber 3c3, thereby judging that the sealing performance of the sealing lifting structure 7 is poor.

[0054] like Fig.15 As shown, the trigger member 3d1 includes a rubber gasket 3d11 and a floating plate 3d12, the rubber gasket 3d11 is arranged on the step 3c31 of the water receiving container 3c and the edge of the rubber gasket 3d11 is fixedly connected to the step 3c31, the floating plate 3d12 is arranged in the water receiving chamber 3c3 of the water receiving container 3c and the floating plate 3d12 is located on the bottom surface of the rubber gasket 3d11, the edge contour of the floating plate 3d12 is the contour shape of the water receiving chamber 3c3, the floating plate 3d12 can move vertically in the water receiving chamber 3c3, the bottom of the floating plate 3d12 also extends vertically downward through the bottom of the water receiving container 3c to have a guide rod 3d13, and the guide rod 3d13 is also sleeved with a buffer spring 3d14, and the two ends of the buffer spring 3d14 are respectively fixed to the bottom of the floating plate 3d12 and the bottom of the water receiving container 3c.

[0055] Specifically, when water flows onto the rubber gasket 3d11, in order to solve the technical problem of how the trigger member 3d1 triggers the sensing member 3d2 under the pressure of water, the rubber gasket 3d11 is deformed after being subjected to the pressure of water. After the rubber gasket 3d11 is deformed, it drives the floating plate 3d12 to move downward. As the floating plate 3d12 moves downward, the guide rod 3d13 on the floating plate 3d12 triggers the sensing member 3d2, so that the sensing member 3d2 senses the presence of water. After the sealing performance test of the sealing lifting structure 7 is completed, the water in the water receiving container 3c is discharged, and the floating plate 3d12 returns to its original position under the action of the buffer spring 3d14, and the rubber gasket 3d11 also returns to its flat state when it is not deformed.

[0056] like Fig.15As shown, the sensing element 3d2 includes a pressure sensor 3d21, which is fixedly mounted on the bottom of the water receiving container 3c through a mounting bracket 3d22, the sensing end of the pressure sensor 3d21 faces the guide rod 3d13 and the pressure sensor 3d21 and the guide rod 3d13 are coaxial, and a compression spring 3d23 is connected between one end of the guide rod 3d13 extending out of the water receiving container 3c and the sensing end of the pressure sensor 3d21.

[0057] Specifically, when the guide rod 3d13 moves downward, in order to solve the technical problem of how the sensing element 3d2 is sensed by the guide rod 3d13, the guide rod 3d13 presses the compression spring 3d23 downward, and the compression spring 3d23 presses on the pressure sensor 3d21, so that after the pressure sensor 3d21 senses the pressure of the compression spring 3d23, it senses the presence of water in the water receiving chamber 3c3, thereby judging that the sealing performance of the sealing lifting structure 7 is poor.

[0058] like Fig.11 As shown, each water receiving container 3c is further provided with a water suction pipe 3c5, which is a hard tube structure. A pipe groove 3c51 is provided at the upper end of the water receiving container 3c. One end of the water suction pipe 3c5 is threadedly fixed in the pipe groove 3c51, and the other end of the water suction pipe 3c5 extends vertically downward and the end of the water suction pipe 3c5 contacts the surface of the rubber gasket 3d11 in an undeformed state. The end of the water suction pipe 3c5 contacting the surface of the rubber gasket 3d11 is also provided with a water suction port connected to the inside of the water suction pipe 3c5, and an interface 3c52 for connecting the water suction pipe 3c5 is also provided on the upper end side wall of the water receiving container 3c.

[0059] Specifically, after the sealing performance test of the sealing lifting structure 7 is completed, in order to solve the technical problem of how the water in the water receiving container 3c is discharged, the water pump is connected to the two suction pipes 3c5 through a hose, and the water is sucked out through the suction pipes 3c5. When the rubber gasket 3d11 gradually returns to a flat state and the end of the suction pipe 3c5 touches the surface of the rubber gasket 3d11, in order not to affect the water absorption efficiency of the suction pipe 3c5, the water is sucked into the suction pipe 3c5 through the suction port opened at the end of the suction pipe 3c5, and the water is finally sucked into the water storage container 4a.

[0060] like Fig.11 , Fig.12 and Fig.15As shown, each water receiving container 3c is further provided with a blowing member 3c6, and the blowing member 3c6 includes a plurality of small fans 3c61. A mounting opening is provided at the top of the water receiving container 3c, and the plurality of small fans 3c61 are all installed in the mounting opening. The blades of each small fan 3c61 are also located in the water receiving cavity 3c3 and the blowing direction of each small fan 3c61 faces the rubber gasket 3d11. An interlayer is further provided on the curved surface of the water receiving container 3c, and a heating plate 3c62 is provided in the interlayer. Furthermore, a plurality of air vents 3c63 connected to the interlayer are further provided on the inner curved surface of the water receiving container 3c.

[0061] Specifically, after the water is discharged, in order to solve the technical problem of how to ensure that no water droplets affect the rubber gasket 3d11 after the water is discharged from the water receiving container 3c, multiple small fans 3c61 are turned on at the same time, the heating plate 3c62 generates heat, and the heat enters the water receiving chamber 3c3 through the air hole 3c63. Multiple small fans 3c61 blow the hot air toward the rubber gasket 3d11, and the surface of the rubber gasket 3d11 is dried, thereby avoiding the deformation of the rubber gasket 3d11 that affects the judgment of the pressure sensor 3d21.

[0062] like Figure 6 and Figure 7 As shown, the two water receiving containers 3c can also move horizontally on the frame 3a, and the direction of horizontal movement of the water receiving containers 3c is perpendicular to the driving direction of the bidirectional driving device 4, and the frame 3a is also provided with an opening and closing driving device 5 that can drive the two water receiving containers 3c to move relative to each other.

[0063] Specifically, when the sealing lifting structure 7 arrives at the airtightness detection device 3, in order to solve the technical problem of how to dock the two water receiving containers 3c, the opening and closing drive device 5 drives the two water receiving containers 3c to move toward the piston rod 7d of the sealing lifting structure 7 at the same time. After the two water receiving containers 3c are docked, the circular groove formed between the two water receiving containers 3c wraps the piston rod 7d. Therefore, water can smoothly enter the water receiving container 3c when flowing down the piston rod 7d.

[0064] Embodiment 2:

[0065] Compared with Example 1, in this embodiment, Figure 7 As shown, it also includes a lifting drive device 6, which is used to drive the lifting movement of the sealing lifting structure 7. The lifting drive device 6 is arranged on the workbench and the lifting drive device 6 is located directly below the water receiving container 3c. A three-jaw chuck 6a is also installed on the lifting drive device 6.

[0066] Specifically, when the sealed lifting structure 7 comes between the water filling container 3b and the water receiving container 3c, in order to solve the technical problem of how the sealed lifting structure 7 can realize the lifting movement, the lifting drive device 6 drives the three-jaw chuck 6a to move upward until the three-jaw chuck 6a grabs the end of the piston rod 7d. After the water filling container 3b is filled with water, the lifting drive device 6 drives the piston rod 7d to perform reciprocating lifting movements. After the sealed lifting structure 7 has performed multiple lifting movements, the lifting drive device 6 stops driving, and the pressure sensing mechanism 3d simultaneously senses whether there is water in the water receiving container 3c. After the sealing performance test of the sealed lifting structure 7 is completed, the three-jaw chuck 6a releases the piston rod 7d, and the water filling container 3b and the water receiving container 3c also move away from the sealed lifting structure 7. Finally, the sealed lifting structure 7 is sent out by the turntable 2 for subsequent steps.

[0067] The present application detects the sealing performance of the sealing lifting structure 7 through the airtightness detection device 3, thereby determining whether the sealing performance of the sealing lifting structure 7 is qualified after assembly, ensuring that the sealing lifting structure 7 will not leak solution when in use, thereby improving the quality of the sealing lifting structure 7.

[0068] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A sealing performance testing device for a sealing lifting structure, characterized in that: The sealing performance testing device for the sealing lifting structure comprises a workbench (1), a turntable (2) arranged on the workbench (1) for conveying the sealing lifting structure (7) in a turntable manner, and an airtightness testing device (3); The airtightness detection device (3) comprises a frame (3a) arranged below the turntable (2), a water injection container (3b) arranged above the turntable (2), a water receiving container (3c) arranged on the frame (3a), and a pressure sensing mechanism (3d) arranged in the water receiving container (3c); the water injection container (3b) and the water receiving container (3c) are capable of relative movement on the workbench (1) along the lifting direction of the sealing lifting structure (7); and a bidirectional driving device (4) is also provided on the workbench (1) for driving the water injection container (3b) and the water receiving container (3c) to move relative to each other; and a water storage container (4a) is also installed on the bidirectional driving device (4).

2. The sealing performance testing device of the sealing lifting structure according to claim 1, characterized in that: The water injection container (3b) is a funnel structure, the small end of the water injection container (3b) is arranged downward, a sealing gasket (3b4) is provided on the small end of the water injection container (3b), a lid (3b1) is covered on the large end of the water injection container (3b), and a water inlet (3b2) is provided on the lid (3b1), and a water outlet (3b3) is provided at the lower end of the side wall of the water injection container (3b).

3. The sealing performance testing device of a sealing lifting structure according to claim 1, characterized in that: There are two water receiving containers (3c), and the two water receiving containers (3c) can be symmetrically arranged on both sides of the sealing lifting structure (7). The symmetric surfaces of the two water receiving containers (3c) are the middle cross-sections of the sealing lifting structure (7). The water receiving container (3c) is a semicircular block structure. A semicircular groove (3c1) is provided on the central straight surface of the water receiving container (3c). The two water receiving containers (3c) form a rotating body structure after being connected, and the semicircular grooves (3c1) of the two water receiving containers (3c) form a circular groove after being connected. A sealing rubber pad (3c2) is also embedded in the semicircular groove (3c1) of the water receiving container (3c). A water receiving cavity (3c3) is provided in the water receiving container (3c), and a wall opening (3c4) connected to the water receiving cavity (3c3) is also provided on the straight surface of the water receiving container (3c). A step (3c31) is also provided at the cavity opening of the water receiving cavity (3c3).

4. The sealing performance testing device of the sealing lifting structure according to claim 3 is characterized in that: A pressure sensing mechanism (3d) is provided in the water receiving chamber (3c3) of each water receiving container (3c), and the pressure sensing mechanism (3d) comprises a triggering member (3d1) and a sensing member (3d2), wherein the triggering member (3d1) is arranged on a step (3c31) of the water receiving container (3c) and the triggering member (3d1) is located in the water receiving chamber (3c3), and the sensing member (3d2) is arranged at the outer bottom of the water receiving container (3c), and the triggering member (3d1) contacts the sensing member (3d2).

5. The sealing performance testing device of the sealing lifting structure according to claim 4, characterized in that: The trigger member (3d1) comprises a rubber gasket (3d11) and a floating plate (3d12); the rubber gasket (3d11) is arranged on a step (3c31) of a water receiving container (3c) and the edge of the rubber gasket (3d11) is fixedly connected to the step (3c31); the floating plate (3d12) is arranged in a water receiving cavity (3c3) of the water receiving container (3c) and the floating plate (3d12) is located on the bottom surface of the rubber gasket (3d11); the edge of the floating plate (3d12) is The profile is the profile shape of the water receiving chamber (3c3), the floating plate (3d12) can move vertically in the water receiving chamber (3c3), the bottom of the floating plate (3d12) also vertically extends downward through the bottom of the water receiving container (3c) to form a guide rod (3d13), and the guide rod (3d13) is also sleeved with a buffer spring (3d14), and the two ends of the buffer spring (3d14) are respectively fixed to the bottom of the floating plate (3d12) and the bottom of the water receiving container (3c).

6. The sealing performance testing device of the sealing lifting structure according to claim 4, characterized in that: The sensing element (3d2) includes a pressure sensor (3d21), which is fixedly mounted on the bottom of the water receiving container (3c) via a mounting frame (3d22), the sensing end of the pressure sensor (3d21) faces the guide rod (3d13), and the pressure sensor (3d21) and the guide rod (3d13) are coaxial, and a compression spring (3d23) is also connected between one end of the guide rod (3d13) extending out of the water receiving container (3c) and the sensing end of the pressure sensor (3d21).

7. The sealing performance testing device of the sealing lifting structure according to claim 5, characterized in that: Each water receiving container (3c) is also provided with a water suction pipe (3c5), which is a hard pipe structure. A pipe groove (3c51) is provided at the upper end of the water receiving container (3c). One end of the water suction pipe (3c5) is threadedly fixed in the pipe groove (3c51). The other end of the water suction pipe (3c5) extends vertically downward and the end of the water suction pipe (3c5) contacts the surface of the rubber gasket (3d11) when it is not deformed. The end of the water suction pipe (3c5) contacting the surface of the rubber gasket (3d11) is also provided with a water suction port connected to the inside of the water suction pipe (3c5), and an interface (3c52) for connecting the water suction pipe (3c5) is also provided on the upper end side wall of the water receiving container (3c).

8. The sealing performance testing device of the sealing lifting structure according to claim 5, characterized in that: Each water receiving container (3c) is also provided with a blowing member (3c6), the blowing member (3c6) comprising a plurality of small fans (3c61), a mounting opening is provided at the top of the water receiving container (3c), the plurality of small fans (3c61) are all mounted in the mounting opening, the blades of each small fan (3c61) are also all located in the water receiving cavity (3c3), and the blowing direction of each small fan (3c61) faces the rubber gasket (3d11), an interlayer is also provided on the curved surface of the water receiving container (3c), a heating plate (3c62) is provided in the interlayer, and a plurality of air holes (3c63) connected to the interlayer are also provided on the inner curved surface of the water receiving container (3c).

9. The sealing performance testing device of a sealing lifting structure according to claim 3, characterized in that: The two water receiving containers (3c) can also move horizontally on the frame (3a), the direction of the horizontal movement of the water receiving containers (3c) being perpendicular to the driving direction of the bidirectional driving device (4), and the frame (3a) is also provided with an opening and closing driving device (5) capable of driving the two water receiving containers (3c) to move relative to each other.

10. The sealing performance testing device of a sealing lifting structure according to claim 1, characterized in that: The invention also comprises a lifting drive device (6) for driving the lifting movement of the sealing lifting structure (7). The lifting drive device (6) is arranged on a workbench and is located directly below the water receiving container (3c). A three-jaw chuck (6a) is also installed on the lifting drive device (6).

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