Wafer scanning mechanism for wafer loading station

Abstract

The present invention discloses a wafer scanning mechanism for a wafer loading platform, comprising a base plate and a horizontal guide plate fixedly connected to the base plate, two horizontal slide plates slidably connected to the horizontal guide plate, the horizontal slide plates are connected to a driving member extending and retracting along a vertical plane through a connecting rod assembly, and the output shaft of the driving member pushes the two horizontal slide plates to move relative to or toward each other when extended or retracted. The two horizontal slide plates are respectively hinged to one end of two correspondingly arranged horizontal long swing arms, and a horizontal short swing arm is also hinged to the horizontal long swing arm, one end of the horizontal short swing arm is hinged to the horizontal long swing arm, and the other end is hinged to the horizontal guide plate, and the two horizontal long swing arms can move with the horizontal slide plates, and can simultaneously swing in opposite directions and synchronously in a horizontal plane under the action of two corresponding horizontal short swing arms. The photoelectric sensor can be extended and retracted to the base plate to avoid collision with a wafer loading box or a wafer, and the structure is compact and space is saved.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer processing equipment, and in particular to a wafer scanning mechanism for a wafer loading platform. Background Art

[0002] In order to reduce the risk of wafers being contaminated during transportation, wafer boxes are usually used to place and transport wafers during semiconductor processing. A wafer loader (Loadport) is a device used to open the wafer box and detect the number and storage posture of the wafers inside. The wafer box is first placed and locked on the loading table of the loader, and a wafer scanning mechanism is generally used to scan the number, position and status of the wafers in the wafer box. The wafer scanning mechanism is integrally installed in the wafer loader, but the wafer scanning mechanism in the prior art is basically not foldable and is very easy to collide with the wafer box during installation and transportation. Even in some foldable wafer scanning mechanisms, the rotating arm equipped with the scanning sensor is suspended and only the ends are hinged, resulting in poor stability of the rotating arm during the swinging process and low scanning accuracy, which cannot meet the high-precision scanning requirements of semiconductor production and processing technology. Summary of the invention

[0003] In order to overcome the above disadvantages, the present invention aims to provide a wafer scanning mechanism for a wafer loading platform, wherein the photoelectric sensor sensing transmitting and receiving device can swing horizontally with the horizontal long swing arm to realize the movement of extending and retracting the bottom plate, thereby avoiding the collision of the through-beam sensor with the wafer loading box or the wafer during the extension and retraction process. The output shaft of the driving member extends or retracts in the vertical direction to drive the horizontal long swing arm to swing, and the vertically distributed motion structure saves space and makes the overall structure more compact and stable.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a wafer scanning mechanism for a wafer loading platform, comprising a base plate and a horizontal guide plate fixedly connected to the base plate, characterized in that: a horizontal guide rail is fixedly installed on the horizontal guide plate, two horizontal sliders are slidably connected to the horizontal guide rail, the two horizontal sliders are respectively fixedly connected to the two horizontal slides, the two horizontal slides are connected to the driving member through a connecting rod assembly, the output shaft of the driving member is extended and retracted in the vertical direction, and the output shaft of the driving member drives the two horizontal slides to move relative to or toward each other when extended or retracted, and the two horizontal slides are respectively connected to two horizontal long swing arms One end of the two horizontal long swing arms is hinged, and the ends of the two horizontal long swing arms away from the horizontal slide are respectively provided with light emitting and receiving devices of the photoelectric sensor. The two horizontal long swing arms are also respectively hinged with correspondingly arranged horizontal short swing arms. One end of the two horizontal short swing arms is respectively hinged to the corresponding horizontal long swing arm, and the other end is respectively hinged to the corresponding horizontal guide plate. The two horizontal long swing arms can move with the corresponding horizontal slide and can make reverse synchronous swings in the horizontal plane under the action of the two corresponding horizontal short swing arms. The light emitting and receiving sensing devices of the photoelectric sensor swing in the horizontal plane with the horizontal long swing arms, approaching or moving away from the horizontal guide plate.

[0005] The beneficial effect of the present invention is that the output shaft of the driving member extends or retracts in the vertical direction, and drives the two horizontal slides to move in the same direction or in the opposite direction on the horizontal plane through the connecting rod assembly. During the sliding process, the horizontal slide drives the end of the horizontal long swing arm hinged thereto to move horizontally. At the same time, since the horizontal short swing arm pulls the horizontal long swing arm, and the other end of the horizontal short swing arm is rotationally connected to the rotating shaft fixed on the horizontal guide plate, the horizontal long swing arm is driven to rotate relative to the horizontal slide, and finally the horizontal short swing arm is made to swing synchronously in the opposite direction in the horizontal plane, so as to realize that the other end of the horizontal long swing arm equipped with the photoelectric sensor transmitting and receiving device moves away from and close to the horizontal guide plate during the swinging process of the horizontal long swing arm. The photoelectric sensor transmitting and receiving device realizes the action of extending and retracting the bottom plate during the swinging process of the horizontal long swing arm. The collision of the photoelectric sensor transmitting and receiving device with the wafer box or the wafer during the extending and retracting process is avoided. The driving part moves on the vertical plane, while the swinging combination structure formed by the horizontal long swing arm and the horizontal short swing arm telescopes upward on the horizontal plane. This arrangement saves space and makes the overall structure more compact and stable. The auxiliary movement of the horizontal short swing arm enables the horizontal long swing arm to have higher stability during the swinging process.

[0006] Further, the connecting rod assembly includes a vertical slide, an adapter plate, and two vertical long rotating arms and two vertical short rotating arms corresponding to the two horizontal slides. One end of the two vertical short rotating arms is hinged to the adapter plate, and the other end is respectively hinged to the corresponding vertical long rotating arms. One end of the two vertical long rotating arms is respectively hinged to the corresponding horizontal slides, and the other end is respectively hinged to the vertical slide. The driving member is fixedly mounted on the vertical slide, and the output shaft of the driving member is fixedly connected to the adapter plate. A vertical guide rail is provided on the bottom plate, and a vertical slider is slidably connected to the vertical guide rail. The vertical slider is fixedly connected to the vertical slide, and the vertical slide can slide up and down along the vertical guide rail synchronously with the vertical slider under the drive of the driving member. The cooperation of the vertical guide rail and the vertical slider guides the vertical slide, ensuring that the vertical slide can always slide on the vertical plane along the vertical guide rail. When the output shaft of the driving member is extended or retracted, the two vertical long rotating arms are pushed to swing synchronously in opposite directions through the two vertical short rotating arms. When the two vertical long rotating arms are swinging, they will apply a vertical combined force to the vertical slide, driving the vertical slide to slide up and down along the bottom plate; at the same time, when the two vertical long rotating arms are swinging, they will also apply horizontal component forces in opposite directions to the corresponding horizontal slides, driving the two horizontal slides to slide horizontally in opposite directions along the horizontal guide rail.

[0007] Furthermore, the bottom plate is provided with a limit block for limiting the range of motion of the horizontal slide, and when the two horizontal slides move relative to each other, the opposite surface of the horizontal slide can abut against the limit block. That is, the limit position of the two horizontal slides when they approach each other is limited, and when the two horizontal slides approach each other to the limited position, the two horizontal slides abut against the limit block to limit the two from continuing to approach each other, and prevent the output shaft of the driving member from continuing to extend, so that the central axes of the two horizontal long swing arms coincide with each other. In this position state, the horizontal long swing arm is subject to the smallest constraint force and is most susceptible to vibration caused by external interference, thereby affecting the fixation of the photoelectric sensor on the horizontal long swing arm and causing it to become loose, and ultimately affecting the position accuracy of the photoelectric sensor transmitting and receiving device, causing the photoelectric sensor transmitting and receiving device to be misaligned, and then when the horizontal long swing arm is unfolded in a parallel state, the light emitted by the photoelectric sensor transmitting device cannot be received by the photoelectric sensor receiving device, and the wafer detection work cannot be performed normally.

[0008] Further, when the central axis of the vertical long swing arm moves to the same horizontal plane, the horizontal long swing arm is perpendicular to the horizontal guide plate, that is, the three sides of the triangle formed by the connecting line of the hinge center points of the horizontal long swing arm, the horizontal short swing arm and the horizontal guide plate in the horizontal plane satisfy the Pythagorean theorem, wherein the connecting line between the two hinge points of the horizontal short swing arm is the longest side of the three sides of the triangle. The distance between the two hinge points of the horizontal short swing arm ensures that the horizontal long swing arm can swing to a position perpendicular to the horizontal guide plate, and at this time, the two horizontal long swing arms are parallel to each other, ensuring that the light emitted by the transmitting device of the photoelectric sensor can be received by the receiving device of the photoelectric sensor, so that the position status of the wafer quantity box in the wafer box can be detected.

[0009] Further, two first rotating shafts are symmetrically fixedly installed on the vertical slide, and the two vertical long rotating arms are respectively rotatably connected to the two first rotating shafts through micro-rolling bearings mounted on the first rotating shafts; the adapter plate is fixedly installed with a second rotating shaft, and one end of the two vertical short rotating arms are respectively rotatably connected to the second rotating shaft through micro-rolling bearings mounted on the second rotating shaft, and a third rotating shaft is fixedly installed on each of the two vertical long rotating arms, and the other end of the two vertical short rotating arms are respectively rotatably connected to the two third rotating shafts through micro-rolling bearings mounted on the third rotating shaft, and the distance between the second rotating shaft and the third rotating shaft on the vertical short rotating arm is greater than half of the distance between the two first rotating shafts on the vertical slide. When the distance between the second rotating shaft and the third rotating shaft on the vertical short rotating arm is equal to half of the distance between the two first rotating shafts on the vertical slide, the two vertical long rotating arms will reach a position where the central axes are collinear during the swinging process, and the central axes of the two vertical long rotating arms and the two vertical short rotating arms will completely overlap. At this time, a dead point of the mechanism will appear, resulting in the two vertical long rotating arms and the two vertical short rotating arms being unable to be retracted; when the distance between the second rotating shaft and the third rotating shaft on the vertical short rotating arm is less than half of the distance between the two first rotating shafts on the vertical slide, the two vertical long rotating arms will reach a position where the central axes are collinear during the swinging process, while the central axes of the two vertical long rotating arms fail to overlap, that is, the vertical short rotating arms do not reach a horizontal position. This situation will increase the layout space of the entire scanning mechanism structure.

[0010] Furthermore, the hinge points between the two horizontal slides and the horizontal long swing arms and the hinge points between the horizontal guide plate and the two horizontal short swing arms are located on the same horizontal line. The horizontal long swing arms and the horizontal short swing arms both swing at the hinge points on the horizontal line, which improves consistency and also facilitates the arrangement design of the hinge center points between the two horizontal long swing arms, the two horizontal short swing arms and the horizontal guide plate when the two horizontal long swing arms are swung to be perpendicular to the horizontal guide plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1It is a schematic diagram of the three-dimensional structure of an embodiment of the present invention;

[0012] Figure 2 It is a structural schematic diagram of a connecting rod assembly in an embodiment of the present invention;

[0013] Figure 3 A schematic diagram of a through-beam sensor in an extended state according to an embodiment of the present invention;

[0014] Figure 4 A schematic diagram of a retracted state of a through-beam sensor in an embodiment of the present invention;

[0015] Figure 5 is a schematic diagram of a vertical slide plate in an embodiment of the present invention;

[0016] Figure 6 Schematic diagram of a vertical short rotating arm in an embodiment of the present invention;

[0017] Figure 7 Schematic diagram of a vertical long rotating arm in an embodiment of the present invention.

[0018] In the figure:

[0019] 1. Bottom plate; 2. Adapter plate; 3. Vertical slide plate; 3a. Fixed part; 3b. Connecting part; 3c. Shaft mounting hole; 4. Driving member; 5. Vertical short rotating arm; 5a. Shaft matching hole; 6. Vertical guide rail; 7. Vertical long rotating arm; 7a. Bearing mounting hole; 7b. Shaft hole; 8. Horizontal slide plate; 9. Horizontal guide plate; 12. Limit block; 13. Horizontal guide rail; 15. Horizontal long swing arm; 16. Photoelectric sensor; 17. Horizontal short swing arm; 18. First rotating shaft; 19. Second rotating shaft; 20. Third rotating shaft; 21. Horizontal slider; 22. Vertical slider. DETAILED DESCRIPTION

[0020] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0021] Example

[0022] See attached Figure 1 As shown, the wafer scanning mechanism for the wafer loading platform of the present invention comprises a base plate 1 and a horizontal guide plate 9 fixedly connected to the base plate 1, and the horizontal guide plate is fixed to the upper end of the base plate 1. The horizontal guide plate 9 and the base plate 1 can be an integral part, that is, the base plate 1 and the horizontal guide plate are integrally formed, or can be detachably connected by bolts.

[0023] The horizontal guide plate 9 is provided with two horizontal slide plates 8 that can slide horizontally along the horizontal guide plate 9. The horizontal guide plate 9 is provided with a horizontal guide rail 13 for the horizontal slide plates 8 to slide. The horizontal guide rail 13 is slidably connected to two horizontal slide blocks 21 that are respectively fixedly connected to the horizontal slide plates 8. The horizontal guide rail 13 guides the sliding of the horizontal slide plates 8, ensuring that the horizontal slide plates 8 always slide parallel in the horizontal plane. The horizontal slide plates 8 are connected to the vertically arranged driving member 4 through a connecting rod assembly. When the output shaft of the driving member 4 is extended or retracted, the two horizontal slide plates 8 are pushed to move relative to or towards each other in the horizontal direction.

[0024] See attached Figure 2 As shown, the connecting rod assembly includes a vertical slide 3, an adapter plate 2, and two vertical long rotating arms 7 and two vertical short rotating arms 5 corresponding to the two horizontal slides 8. One end of the two vertical short rotating arms 5 are hinged to the adapter plate 2, and the other end is hinged to the corresponding vertical long rotating arms 7. One end of the vertical long rotating arm 7 is hinged to the corresponding horizontal slide 8, and the other end is hinged to the vertical slide 3. The driving member 4 is fixed on the vertical slide 3 and the output shaft is fixedly connected to the adapter plate 2. At the same time, a vertical guide rail 6 is provided on the base plate 1, and a vertical slider 22 is slidably connected to the vertical guide rail 6, and the vertical slider 22 is fixedly connected to the vertical slide 3. When the output shaft of the driving member 4 is extended or retracted, the adapter plate 2 is driven to move up and down relative to the vertical slide. Then, the two vertical short rotating arms 5 are driven to swing synchronously in opposite directions. The two vertical short rotating arms 5 push and drive the two vertical long rotating arms 7 to swing synchronously in opposite directions. When the two vertical long rotating arms 7 are swinging, the reaction force of the output shaft of the driving member 4 will apply a combined force in the vertical direction to the vertical slide 3, driving the vertical slide 3 to slide up and down along the bottom plate 1. At the same time, when the two vertical long rotating arms 7 are swinging, they will also apply horizontal components in opposite directions to the corresponding horizontal slides 8, driving the two horizontal slides 8 to slide horizontally in opposite directions along the horizontal guide rail.

[0025] See attached Figure 5 As shown, the vertical slide 3 includes a fixed portion 3a and a connecting portion 3b in an L-shaped structure. The fixed portion 3a is horizontally arranged parallel to the horizontal guide rail 13. The driving member 4 is fixed on the fixed portion 3a, and the output shaft of the driving member 4 can move up and down relative to the fixed portion 3a. The vertical slider 22 is fixed on the fixed portion 3a, and the vertical guide rail 6 guides the sliding of the vertical slide 3 to ensure that the vertical slide 3 always moves parallelly in the vertical direction. Two first rotating shaft 18 mounting holes 3c are symmetrically opened along the center line of the connecting portion 3b, and the first rotating shaft 18 is fixedly glued in the two first rotating shaft 18 mounting holes 3c respectively. The vertical long rotating arm 7 is rotatably connected to the first rotating shaft 18 through a micro rolling bearing mounted on the first rotating shaft 18. Refer to the attached Figure 7 As shown, a bearing mounting hole 7a corresponding to the micro rolling bearing is provided at the end of the vertical long rotating arm 7.

[0026] One end of the two vertical short rotating arms 5 is rotatably connected to the adapter plate 2 through the second rotating shaft 19, and the other end is rotatably connected to the vertical long rotating arms 7 through the third rotating shaft 20. Figure 6 As shown, two ends of the vertical short rotating arm 5 are respectively provided with two shaft matching holes 5a matching the second rotating shaft 19 and the third rotating shaft 20, wherein the second rotating shaft 19 is fixed on the adapter plate 2, and the third rotating shaft 20 is fixed on the vertical long rotating arm 7. Figure 7 The vertical long rotating arm 7 is provided with an axial hole 7b for fixing the third rotating shaft 20. The distance between the two axial matching holes 5a for installing the second rotating shaft 19 and the third rotating shaft 20 on the vertical short rotating arm 5 is greater than half the distance between the mounting holes 3c for installing the two first rotating shafts 18 on the vertical slide plate 3. When the distance between the two shaft matching holes 5a for installing the second rotating shaft 19 and the third rotating shaft 20 on the vertical short rotating arm 5 is equal to half of the distance between the mounting holes 3c for installing the two first rotating shafts 18 on the vertical slide 3, the two vertical long rotating arms 7 will reach a position where the central axes are collinear during the swinging process, and the central axes of the two vertical long rotating arms 7 and the two vertical short rotating arms 5 will completely overlap. At this time, a dead point of the mechanism will appear, resulting in the inability of the two vertical long rotating arms 7 and the two vertical short rotating arms 5 to be folded; when the distance between the two shaft matching holes 5a for installing the second rotating shaft 19 and the third rotating shaft 20 on the vertical short rotating arm 5 is less than half of the distance between the mounting holes 3c for installing the two first rotating shafts 18 on the vertical slide 3, the two vertical short rotating arms 5 will reach a position where the central axes are collinear during the swinging process, while the central axes of the two vertical long rotating arms 75 fail to reach an overlapping position, that is, the vertical long rotating arms 7 do not reach a horizontal position, which will increase the layout space of the entire scanning mechanism structure.

[0027] The two horizontal slides 8 are respectively hinged with horizontal long swing arms 15 that can swing in opposite directions. The horizontal slide 8 is L-shaped, including a vertical portion and a horizontal portion. The vertical portion is hinged with the vertical long rotating arm 7, and the horizontal portion is hinged with the end of the horizontal long swing arm 15. The vertical portion is provided with a horizontal slider 21 that matches the horizontal guide rail 13. The horizontal long swing arm 15 is horizontally arranged and is provided with a photoelectric sensor transmitting and receiving device at one end away from the bottom plate. The horizontal long swing arm 15 is provided with a mounting groove. The photoelectric sensor transmitting and receiving device is a beam sensor embedded in the mounting groove and can emit and receive beams. The end of the horizontal long swing arm 15 is hinged with the horizontal slide 8 through a rotating shaft, and the horizontal long swing arm 15 is provided with a rotating shaft hole for the rotating shaft to be embedded and fixed. The horizontal long swing arm 15 can swing horizontally relative to the horizontal slide 8. A short horizontal swing arm 17 is also hinged on the long horizontal swing arm 15. One end of the short horizontal swing arm 17 is hinged to the middle of the long horizontal swing arm 15, and the other end is hinged to the horizontal guide plate. The short horizontal swing arm 17 is hinged to the long horizontal swing arm 15 and the horizontal guide plate 9 through a rotating shaft. The hinge point between the short horizontal swing arm 17 and the horizontal guide plate 9 is located outside the two horizontal slide plates 8, so that the two long horizontal swing arms 15 can be driven to swing in the opposite direction. The short horizontal swing arm 17 is hinged to the middle of the long horizontal swing arm 15. While the long horizontal swing arm 15 slides synchronously with the horizontal slide plate 8, the long horizontal swing arm 15 swings horizontally under the pull of the short horizontal swing arm 17. The long horizontal swing arm 15 and the short horizontal swing arm 17 form a swing combination. The end of the long horizontal swing arm 15 slides horizontally, which serves as the power to drag the entire swing combination to swing open or close, so as to realize the extension and retraction of the photoelectric sensor sensing transmitting and receiving device fixed on the long horizontal swing arm 15 relative to the bottom plate 1.

[0028] The bottom plate 1 is provided with a limit block 12 for limiting the movable position of the horizontal slide. When the two horizontal slides 8 move relative to each other, the opposite surface of the horizontal slide can abut against the limit block 12. That is, the limit position of the two horizontal slides when they approach each other is limited. When the two horizontal slides 8 approach each other to the limited position, the two horizontal slides 8 abut against the limit block 12 to limit the two from continuing to approach each other, and prevent the output shaft of the driving member 4 from continuing to extend, and the central axis of the two horizontal long swing arms 15 from coinciding. In this position state, the horizontal long swing arm 15 is subject to the smallest constraint force, and is most susceptible to vibration due to external interference, thereby affecting the fixation of the photoelectric sensor 16 on the horizontal long swing arm and causing it to become loose, and ultimately affecting the position accuracy of the photoelectric sensor 16 transmitting and receiving device, resulting in the misalignment of the photoelectric sensor 16 transmitting and receiving device, and then when the horizontal long swing arm 15 is unfolded in a parallel state, the light emitted by the photoelectric sensor 16 transmitting device cannot be received by the photoelectric sensor 16 receiving device, and the wafer detection work cannot be performed normally.

[0029] When the central axis of the vertical long swing arm 7 moves to the same horizontal plane, the horizontal long swing arm 15 is perpendicular to the horizontal guide plate, that is, the three sides of the triangle formed by the connecting lines of the hinge points of the horizontal long swing arm 15, the horizontal short swing arm 17 and the horizontal guide plate in the horizontal plane satisfy the Pythagorean theorem, and the connecting line between the two hinge points of the horizontal short swing arm 17 is the longest side of the three sides of the triangle. The distance between the two hinge points of the horizontal short swing arm 17 ensures that the horizontal long swing arm 15 can swing to a position perpendicular to the horizontal guide plate. At this time, the two horizontal long swing arms 15 are parallel to each other, ensuring that the light emitted by the transmitting device of the photoelectric sensor 16 can be received by the receiving device of the photoelectric sensor 16, so that the number of wafers in the wafer box and the position state can be detected. The hinge points of the two horizontal slides 8 and the horizontal long swing arm 15 and the hinge points of the horizontal guide plate and the two horizontal short swing arms 17 are located on the same horizontal line. The horizontal long swing arm 15 and the horizontal short swing arm 17 both swing at the hinge point of the horizontal line to improve consistency. It is also convenient for the arrangement design of the hinge center point between the two horizontal long swing arms 15 and the two horizontal short swing arms 17 and the horizontal guide plate 9 when the two horizontal long swing arms 15 are swung to be perpendicular to the horizontal guide plate 9.

[0030] The driving member 4 is a single-acting cylinder with spring return, which is fixedly mounted on the vertical slide plate 3. In the initial state, the output shaft in the driving member 4 is in an extruded state. The output shaft of the driving member 4 is fixedly connected to the adapter plate 2, and the adapter plate 2 is rotatably connected to the two vertical short rotating arms 5 through the rotating shaft.

[0031] During operation, the output shaft of the single-acting cylinder serving as the driving member 4 is in a spring-pressed state. When the scanning mechanism receives the action signal of the wafer loading platform, the output shaft of the driving member 4 begins to retract under the action of air pressure, and drives the vertical short rotating arm 5 to swing through the adapter plate 2, thereby driving the vertical long rotating arm 7 to start swinging. While the vertical long rotating arm 7 is swinging, it will also drive the vertical slide plate 3 and the vertical slider 22 to move upward along the vertical guide rail 6 synchronously, and the driving member 4 moves upward synchronously with the vertical slide plate 3. During the swinging process, the vertical long rotating arm 7 further drives the horizontal slide plate 8 and the horizontal slider 21 to slide horizontally toward each other on both sides synchronously along the horizontal guide rail 13. The horizontal slide plate 8 drives the horizontal long swing arm 15 to move to both sides, and the horizontal long swing arm 15 swings inward under the action of the horizontal short swing arm 17. Until the vertical slide plate 3 abuts against the limit block 12, reaching the attachment. Figure 4The two vertical long swing arms 7 are in the extended state. At this time, when the two vertical long swing arms 7 swing to the same horizontal plane, the vertical long swing arms 7 and the vertical short swing arms 5 reach the limit position. The two vertical short swing arms 5 cannot be further extended. Under the pulling force of the output shaft of the single-acting driving member 4, a stable state is reached. At the same time, the length of the line between the hinge points of the horizontal long swing arm 15, the horizontal short swing arm 17 and the horizontal guide plate 9 satisfies the Pythagorean theorem, wherein the distance between the two hinges at both ends of the horizontal short swing arm 17 is the largest of the three distances, that is, the horizontal long swing arm 15 is perpendicular to the horizontal guide plate 9, and the two horizontal long swing arms 15 are parallel. The transmitting and receiving devices of the photoelectric sensor 16 installed on the horizontal long swing arm 15 form a corresponding light beam, and the next step of detecting the placement state of the wafers in the wafer box begins. When the detection is completed, the folding process of the detection mechanism is opposite to the above process. The output shaft of the driving member 4 begins to extend under the action of the spring force inside the cylinder, and drives the vertical short rotating arm 5 to swing through the adapter plate 2, and then drives the vertical long rotating arm 7 to start swinging. When the vertical long rotating arm 7 swings, it will also drive the vertical slide plate 3 and the vertical slider 22 to move downward along the vertical guide rail 6 synchronously, and the driving member 4 moves downward synchronously with the vertical slide plate 3. During the swinging process, the vertical long rotating arm 7 further drives the horizontal slide plate 8 to slide relatively horizontally along the horizontal guide rail 13 synchronously with the horizontal slider. The horizontal slide plate 8 drives the horizontal long swing arm 15 to approach each other, and the horizontal long swing arm 15 swings outward under the action of the horizontal short swing arm 17. Figure 3 The two vertical long rotating arms 7 are in the retracted state, at which time they are retracted to the horizontal guide plate.

[0032] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A wafer scanning mechanism for a wafer loading station, comprising a base plate and a horizontal guide plate fixedly connected to the base plate, characterized in that: The horizontal guide plate is fixedly mounted with a horizontal guide rail, and two horizontal sliders are slidably connected to the horizontal guide rail, and the two horizontal sliders are respectively fixedly connected to the two horizontal slides, and a limit block is arranged on the bottom plate to limit the range of movement of the horizontal slide. When the two horizontal slides are close to each other, the opposite surfaces of the horizontal slides can abut against the limit blocks, and the two horizontal slides are connected to the driving member through a connecting rod assembly, and the output shaft of the driving member is extended and retracted in the vertical direction, and the output shaft of the driving member drives the two horizontal slides to move relative to or toward each other when it is extended or retracted, and the two horizontal slides are respectively connected to one end of the two horizontal long swing arms. The ends of the two horizontal long swing arms are hinged, and the ends away from the horizontal slide are respectively provided with light emitting and receiving devices of the photoelectric sensor. The two horizontal long swing arms are also respectively hinged with correspondingly arranged short horizontal swing arms. One end of the two horizontal short swing arms is respectively hinged with the corresponding long horizontal swing arm, and the other end is respectively hinged with the corresponding horizontal guide plate. The two horizontal long swing arms can move with the corresponding horizontal slide, and can make reverse synchronous swings in the horizontal plane under the action of the two corresponding short horizontal swing arms. The light emitting and receiving devices of the photoelectric sensor swing in the horizontal plane with the long horizontal swing arms, approaching or moving away from the horizontal guide plate. The connecting rod assembly includes a vertical slide and two vertical long rotating arms corresponding to the two horizontal slides, the vertical slide slides up and down along the bottom plate, one end of the two vertical long rotating arms is respectively hinged to the corresponding horizontal slides, and the other end is hinged to the vertical slide, when the central axis of the vertical long rotating arm moves to the same horizontal plane, the three sides of the triangle formed by the lines connecting the hinge center points of the horizontal long swing arm, the horizontal short swing arm and the horizontal guide plate in the horizontal plane satisfy the Pythagorean theorem, wherein the line connecting the two hinge points on the horizontal short swing arm is the longest side of the three sides of the triangle, and the hinge points of the two horizontal slides and the horizontal long swing arms and the hinge center points of the horizontal guide plate and the two horizontal short swing arms are located on the same horizontal line.

2. The wafer scanning mechanism for a wafer loading station according to claim 1, characterized in that: The connecting rod assembly also includes an adapter plate and two vertical short rotating arms corresponding to the two horizontal slides, one end of the two vertical short rotating arms are hinged to the adapter plate, and the other end is respectively hinged to the corresponding vertical long rotating arms. The driving member is fixedly mounted on the vertical slide and the output shaft of the driving member is fixedly connected to the adapter plate. A vertical guide rail is provided on the base plate, and a vertical slider is slidably connected to the vertical guide rail. The vertical slider is fixedly connected to the vertical slide, and the vertical slide can slide up and down along the vertical guide rail synchronously with the vertical slider under the drive of the driving member; when the output shaft of the driving member is extended or retracted, the two vertical short rotating arms are pushed or pulled by the adapter plate to swing in opposite directions and synchronously, and the two vertical short rotating arms push or pull the two vertical long rotating arms to swing in opposite directions and synchronously. When the two vertical long rotating arms swing, they drive the vertical slide to slide up and down along the base plate, and at the same time drive the two horizontal slides to slide horizontally along the horizontal guide plate.

3. The wafer scanning mechanism for a wafer loading station according to claim 2, characterized in that: Two first rotating shafts are symmetrically fixedly installed on the vertical slide, and the two vertical long rotating arms are respectively rotatably connected to the two first rotating shafts through micro-rolling bearings mounted on the first rotating shafts; the adapter plate is fixedly installed with a second rotating shaft, and one end of the two vertical short rotating arms is respectively rotatably connected to the second rotating shaft through micro-rolling bearings mounted on the second rotating shaft; a third rotating shaft is respectively fixedly installed on the two vertical long rotating arms, and the other end of the two vertical short rotating arms is respectively rotatably connected to the two third rotating shafts through micro-rolling bearings mounted on the third rotating shaft, and the distance between the second rotating shaft and the third rotating shaft on the vertical short rotating arm is greater than half of the distance between the two first rotating shafts on the vertical slide.

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