A double-sided stamping tooling fixture and its working method

Abstract

The present invention discloses a double-sided imprinting tooling fixture and its working method. This tooling fixture can ensure the vacuum adsorption of the A side (convex surface) in contact with the vacuum holes during double-sided imprinting, protect the surface profile of the A side (convex surface) from being damaged, and at the same time avoid the optimization of the vacuum holes of the equipment itself, reducing costs. The present invention can meet the double-sided imprinting process and ensure product quality. The present invention can avoid the improvement of the vacuum holes of the equipment itself, reducing costs.

Description

Technical Field

[0001] The present invention belongs to the technical field of nanoimprint double-sided imprinting, and particularly relates to a double-sided imprinting tooling fixture and its working method. Background Art

[0002] Nanoimprint technology is a new type of micro-nano processing technology. It is a technology that transfers the micro-nano structure on the template to the material to be processed with the assistance of photoresist. Through mechanical transfer means, this technology achieves ultra-high resolution and is an important processing means in the fields of microelectronics and materials.

[0003] In the nanoimprint product structure of the prior art, there is double-sided imprinting. Its product structure is as Figure 1 shown. It can be seen from Figure 1 that both the upper and lower surfaces of this product need to be imprinted to form surface type B. The following difficulties exist in the imprinting process of this type of product structure: (1) After the imprinting of surface A (convex surface) is completed, when the imprinting of surface B is carried out, surface A contacts the vacuum chuck tray of the equipment. Since surface A is a convex surface, there is a gap between surface A and the vacuum chuck tray, and the equipment cannot adsorb the product (vacuum leakage), and the product moves, affecting the alignment of surface A and surface B; (2) Since surface A is a convex surface, during the imprinting process, under the action of force, the surface type of surface A will have a flat top phenomenon, that is, the surface type is damaged and the product is abnormal; (3) During the imprinting process of surface B, how to adsorb and protect surface A; (4) If the tray of the vacuum chuck is directly optimized and improved, the cost is relatively high. Summary of the Invention

[0004] The purpose of the present invention is to overcome the above-mentioned shortcomings of the prior art and provide a double-sided imprinting tooling fixture and its working method to solve the problems that in the prior art, when imprinting surface B, surface A is not easily adsorbed, the surface type of surface A is easily damaged, and the product is abnormal.

[0005] To achieve the above purpose, the present invention adopts the following technical solutions:

[0006] A double-sided imprinting tooling fixture includes a vacuum chuck, and vacuum holes are provided on the upper surface of the vacuum chuck; a tooling fixture is arranged on the vacuum chuck, a first hole is provided on one surface of the tooling fixture, and the opening position of the first hole corresponds to the convexity of the surface type of surface A; a second hole is provided on the other surface of the tooling fixture, and the opening position of the second hole corresponds to the vacuum hole; the first hole and the second hole are communicated through a through hole.

[0007] A further improvement of the present invention lies in:

[0008] Preferably, the tooling fixture is made of a transparent material.

[0009] Preferably, the tooling fixture is made of glass.

[0010] Preferably, the height of the convex surface on the A side is less than 1 / 2 of the thickness of the tooling fixture.

[0011] Preferably, the thickness of the tooling fixture is 300 μm - 1000 μm.

[0012] Preferably, the diameter of the first hole ≥ the diameter of the convex surface on the A side + 10 μm.

[0013] Preferably, the distance between the axes of adjacent first holes is the same as the distance between the axes of the convex surfaces on the A side.

[0014] Preferably, at least one second hole is communicated with at least one vacuum hole.

[0015] Preferably, the diameter of the through hole is less than the diameter of the second hole and less than the diameter of the first hole.

[0016] For the working method of the above double-sided imprinting tooling fixture, the vacuum pressure of the vacuum chuck is transmitted to the convex surface on the A side through the vacuum hole, the second hole, the through hole and the first hole in sequence to adsorb the convex surface on the A side.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] The present invention discloses a double-sided imprinting tooling fixture and its working method. This tooling fixture can ensure the vacuum adsorption of the contact between the A side (convex surface) and the tray during the double-sided imprinting process, protect the surface profile of the A side (convex surface) from being damaged, and at the same time can avoid the optimization of the equipment's own tray, reducing costs. The present invention can meet the double-sided imprinting process and ensure the product quality. The present invention can avoid the improvement of the equipment's own tray and reduce costs.

[0019] Furthermore, the tooling fixture is made of a transparent material, which is convenient for observing the shape change of the convex surface on the A side during the re-imprinting process.

[0020] Furthermore, the tooling fixture is made of a transparent material and has a high hardness, capable of withstanding sufficient compressive stress.

[0021] Furthermore, the height of the convex surface on the A side is less than 1 / 2 of the thickness of the tooling fixture, so that the tooling fixture has enough space to withstand the deformation of the convex surface.

[0022] Furthermore, the diameter of the first hole is larger than the diameter of the convex surface on the A side, so that the convex surface on the A side has enough lateral expansion space. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a product structure diagram of the double-sided imprinting of the present invention;

[0024] Figure 2 This is the top view of the stamping tooling fixture of the present invention;

[0025] Figure 3 This is the cross-sectional view of the stamping tooling fixture of the present invention

[0026] Wherein: 1 - vacuum hole; 2 - surface A surface profile protrusion; 3 - tooling fixture; 4 - first hole; 5 - second hole; 6 - vacuum chuck; 7 - through hole. Detailed implementation manners

[0027] The following further describes the present invention in detail with reference to the accompanying drawings:

[0028] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present invention; the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance; in addition, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

[0029] The present invention discloses a product tooling fixture for double-sided stamping products. The product tooling fixture is made of transparent glass or transparent material. Refer to Figure 2 , a notch D is provided on the product tooling fixture 3 for placement and alignment. The thickness of the tooling fixture 3 depends on the height of the surface A surface profile protrusion 2. The height of the surface A surface profile protrusion 2 is less than 1 / 2 of the thickness of the tooling fixture 3. Preferably, the thickness of the tooling fixture 3 is 300 μm - 1000 μm. This structure can ensure that there is enough space for the surface A surface profile protrusion 2 to release the stress during stamping, and prevent the surface A surface profile protrusion 2 from being deformed by extrusion.

[0030] The tooling fixture 3 is provided with a first hole 4 on one of its sides. The diameter of the first hole 4 ≥ the diameter of the convexity on surface A + 10 μm, such that the convexity 2 on surface A can be completely set in the first hole 4, and there is sufficient space in both the horizontal and vertical directions to release stress; the distance between the axes of adjacent first holes 4 is the same as the distance between the axes of the convexities 2 on surface A, such that the structure of the tooling fixture 3 can fully cooperate with the structure of the convexities 2 on surface A, and each convexity 2 on surface A can be inserted into a first hole 4.

[0031] The tooling fixture is provided with a second hole 5 on its other side. The second hole 5 corresponds to the vacuum holes 1 on the vacuum chuck 6. Specifically, the second hole 5 is at least in communication with one vacuum hole 1. Preferably, one second hole 5 corresponds to one vacuum hole 1, such that the vacuum adsorption force of the vacuum chuck 6 can be transmitted to the tooling fixture 3 through the second hole 5.

[0032] One first hole 4 and one second hole 5 are connected through at least one through hole 7. The diameter of the through hole 7 ≤ the diameter of the second hole 5, and the diameter of the through hole 7 is smaller than the diameter of the first hole 4.

[0033] The tooling fixture 3 and the vacuum chuck 6 are connected by adhesive bonding with a colloid.

[0034] The working process of the tooling fixture of the present invention is as follows.

[0035] During the adsorption process, the vacuum adsorption force passes through the vacuum holes 1 on the surface of the vacuum chuck, and is sequentially transmitted to the second hole 5, the through hole 8, and the first hole 4, such that the vacuum adsorption force can be transmitted to the side of the tooling fixture 3 that is in contact with the convex surface of surface A, and the glass and surface A can be integrally vacuum adsorbed.

[0036] When embossing surface B according to this structure, surface A (convex surface) is hollowed out. Therefore, it can be ensured that surface A can be vacuum adsorbed by the equipment, and surface A will not be damaged by pressing, ensuring the qualification of the product.

[0037] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A double-sided stamping tooling fixture, characterized in that It includes a vacuum chuck (6), and vacuum holes (1) are provided on the upper surface of the vacuum chuck (6); a tooling fixture (3) is arranged on the vacuum chuck (6), a first hole (4) is provided on one surface of the tooling fixture (3), and the opening position of the first hole (4) corresponds to the A-plane surface protrusion (2); a second hole (4) is provided on the other surface of the tooling fixture (3), and the opening position of the second hole (4) corresponds to the vacuum hole (1); the first hole (4) and the second hole (5) are communicated through a through hole (7); The height of the A-plane surface protrusion (2) is less than 1 / 2 of the thickness of the tooling fixture (3); The diameter of the first hole (4) ≥ the diameter of the A-plane surface protrusion (2) + 10 μm; The distance between the axes of adjacent first holes (4) is the distance between the axes of the A-plane surface protrusions (2).

2. The double-sided imprinting tooling fixture according to claim 1, wherein The tooling fixture (3) is made of a transparent material.

3. A double-sided stamping tooling fixture according to claim 1, characterized in that, The tooling fixture (3) is made of glass material.

4. A double-sided imprinting tooling fixture according to claim 1, characterized in that The thickness of the tooling fixture (3) is 300 μm - 1000 μm.

5. The double-sided imprinting tooling fixture according to claim 1, wherein At least one second hole (5) is communicated with at least one vacuum hole (1).

6. The double-sided imprinting tooling fixture according to claim 1, wherein, The diameter of the through hole (7) is less than the diameter of the second hole (5), and the diameter of the through hole (7) is less than the diameter of the first hole (4).

7. The working method of the double-sided imprinting tooling fixture according to any one of claims 1-6, characterized in that, The vacuum pressure of the vacuum chuck (6) is transmitted to the A-plane surface protrusion (2) through the vacuum hole (1), the second hole (5), the through hole (7) and the first hole (4) in sequence to adsorb the A-plane surface protrusion (2).

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