Protective member forming device

Abstract

The present application provides a protective member forming apparatus capable of suppressing difficulty in carrying out a workpiece on which a protective member is formed on one surface. The protective member forming apparatus includes: an ultraviolet irradiation table that supports a workpiece with a support surface of a support plate that transmits ultraviolet light; a carrying unit that holds a resin sheet on which the workpiece is fixed and carries out the workpiece from the ultraviolet irradiation table; a resin providing unit that provides a liquid resin of an ultraviolet hardening type to the resin sheet arranged on the support surface; a pressing unit that presses the workpiece from a back surface side toward the liquid resin provided to the resin sheet arranged on the support surface; and an ionizer unit that sprays ionized air to the support surface of the ultraviolet irradiation table.

Description

Technical Field

[0001] The present invention relates to a protective member forming device. Background Art

[0002] The manufacturing process for semiconductor device chips and various electronic components involves thinning or dividing a plate-shaped workpiece, such as a wafer, onto which various devices are formed, into device chips. The workpiece is held on a chuck table while being processed. During this process, the front surface of the workpiece is attached to a resin sheet such as adhesive tape or a substrate to protect it from damage.

[0003] For example, if the front surface of the workpiece has irregularities such as metal electrode bumps, it is difficult to adhere the adhesive tape to the irregularities, and machining chips and machining fluid can seep into the gaps, causing it to peel. Furthermore, because the adhesive tape cannot fully absorb the irregularities, there is a problem of the irregularities being transferred to the workpiece when the back surface is ground and thinned.

[0004] Therefore, a processing method has been proposed in which a liquid resin that hardens under external stimulation such as ultraviolet rays is evenly laminated to form a protective member (for example, see Patent Documents 1 and 2).

[0005] Patent Document 1: Japanese Patent No. 6312343

[0006] Patent Document 2: Japanese Patent Application Laid-Open No. 2017-168565

[0007] However, the liquid resin used in the processing methods disclosed in Patent Documents 1 and 2 is applied to a protective sheet placed on a UV irradiation table. The sheet is pressed against the workpiece, spreading the liquid resin. Ultraviolet radiation is then applied to cure the liquid resin. This forms a protective member composed of the sheet and liquid resin. (In reality, the protective film adheres closely to the front surface of the workpiece, and the liquid resin does not come into contact with the workpiece.)

[0008] When holding and removing the protective sheet with the workpiece fixed thereon from the UV irradiation table, the following problem arises: severe peeling and charging occurs between the glass of the UV irradiation table and the protective sheet (resin), and then the protective sheet that has expanded on the UV irradiation table will adhere tightly to the UV irradiation table and cannot be removed. Summary of the Invention

[0009] Therefore, an object of the present invention is to provide a protective member forming apparatus that can reduce the difficulty in carrying out a workpiece having a protective member formed on one surface.

[0010] According to the present invention, a protective component forming device is provided, which forms a protective component on one surface of a plate-shaped workpiece, wherein the protective component forming device comprises: an ultraviolet irradiation table, which supports the workpiece using a supporting surface of a supporting plate, the supporting plate allowing ultraviolet rays from an ultraviolet light source arranged inside the ultraviolet irradiation table to pass through; a sheet arrangement unit, which arranges a sheet larger than the workpiece and allowing ultraviolet rays to pass through on the supporting surface; a resin supply unit, which supplies ultraviolet-curing liquid resin to the sheet arranged on the supporting surface; a pressing unit, which presses the workpiece from the other side toward the liquid resin provided to the sheet arranged on the supporting surface; a carrying out unit, which holds the sheet to which the workpiece is fixed by the liquid resin hardened by ultraviolet rays and carries the workpiece out of the ultraviolet irradiation table; and an ionizer unit, which sprays ionized air onto the supporting surface of the ultraviolet irradiation table, and when the sheet is moved away from the supporting surface by the carrying out unit, the ionized air is supplied along the supporting surface to the gap between the sheet and the supporting surface.

[0011] Preferably, the protective component forming device also has: a light shielding hood, which covers the space on the supporting surface side of the ultraviolet irradiation table with a light-shielding component; and a light shielding baffle, which opens and closes a portion of the light shielding hood to allow the carrying-out unit to invade the space, and when the light shielding baffle is opened, a portion of the ionized air ejected from the ionizer unit is ejected in a direction that presses the end area of ​​the sheet on the light shielding baffle side toward the supporting surface.

[0012] The present invention has an effect of being able to suppress the difficulty in carrying out a workpiece having a protective member formed on one surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a side view schematically showing a configuration example of a protective member forming device according to the embodiment in partial cross-section.

[0014] Figure 2 Is to show the use of Figure 1 The protective member forming apparatus shown is a perspective view of a workpiece on which a protective member is formed.

[0015] Figure 3 yes Figure 2 An enlarged cross-sectional view of a main portion of a workpiece is shown.

[0016] Figure 4 It is shown by Figure 2 A perspective view of a frame unit consisting of the workpiece shown.

[0017] Figure 5 yes Figure 4 A cross-sectional view of the frame unit is shown.

[0018] Figure 6 Shown in partial section Figure 1 The protective member shown is a top view of the main part of the device.

[0019] Figure 7 is schematically shown in partial cross-section Figure 1 The protective member forming apparatus shown is a side view of a state in which liquid resin is applied to the front surface of the resin sheet on the support surface.

[0020] Figure 8 is schematically shown in partial cross-section Figure 1 A side view of a state in which a pressing unit of the protective member forming apparatus is pressing a workpiece toward liquid resin is shown.

[0021] Figure 9 is schematically shown in partial cross-section Figure 1 The figure shows a side view of a state in which an ionizer unit of the protective member forming apparatus sprays ionized air toward an end portion of a resin sheet on a support surface.

[0022] Figure 10 is schematically shown in partial cross-section Figure 1 The transport unit of the protective member forming apparatus shown is a side view of a state in which the transport unit holds the resin sheet on the support surface and transports the workpiece.

[0023] Description of labels

[0024] 1: Protective component forming device; 10: Ultraviolet irradiation table; 12: Support plate; 13: Ultraviolet light source; 20: Resin supply unit; 30: Pressing unit; 40: Light shielding hood; 41: Light shielding baffle; 42: Space; 43: Opening (part of the light shielding hood); 50: Transport unit (sheet configuration unit, unloading unit); 60: Ionizer unit; 61: Ionized air; 121: Support surface; 200: Workpiece; 203: Front side (one side); 207: Back side (the other side); 210: Protective component; 213: Resin sheet (sheet); 214: Liquid resin; 217: End portion (end area on the light shielding baffle side). DETAILED DESCRIPTION

[0025] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the constituent elements described below include elements that can be easily imagined by those skilled in the art and substantially the same elements. Furthermore, the structures described below can be appropriately combined. In addition, various omissions, replacements, or changes in the structure can be made without departing from the scope of the present invention.

[0026] A protective member forming apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 It is a side view schematically showing a configuration example of a protective member forming device according to an embodiment in partial cross-section. Figure 2 Is to show the use of Figure 1 The protective member forming apparatus shown is a perspective view of a workpiece on which a protective member is formed. Figure 3 yes Figure 2 A cross-sectional view of the main part of the workpiece shown. Figure 4 It shows Figure 2 A perspective view of a frame unit composed of the workpiece shown. Figure 5 yes Figure 4 A cross-sectional view of the frame unit is shown. Figure 6 Shown in partial section Figure 1 The protective member shown is a top view of the main part of the device.

[0027] Implementation Figure 1 The protective component forming device 1 is in Figure 2 A desired thickness is formed on one surface of the workpiece 200, that is, the front surface 203. Figure 3 The workpiece 200 on which the protective member 210 is formed using the protective member forming apparatus 1 of the embodiment is a wafer such as a circular semiconductor wafer or an optical device wafer having a substrate 201 made of silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), or silicon carbide (SiC).

[0028] like Figure 2 As shown, the workpiece 200 has devices 204 formed in each region of the front surface 203 divided by a plurality of intersecting predetermined dividing lines 202. Figure 3 As shown, each device 204 has a bump 205 connected to an electrode of the device 204 and protruding from the front surface 203. Device 204 may be, for example, an integrated circuit (IC) or an LSI (Large Scale Integration), an image sensor (CCD) or a CMOS (Complementary Metal Oxide Semiconductor), or a MEMS (Micro Electro Mechanical Systems). Bump 205 is formed of a conductive metal and, in this embodiment, is spherical.

[0029] The bumps 205 electrically connect the device 204 to electrodes on a substrate or the like on which the device 204 is mounted. In the embodiment, the workpiece 200 includes the bumps 205 that protrude from the front surface 203, thereby forming a concavo-convex surface on the front surface 203. Furthermore, in the embodiment, the workpiece 200 includes the bumps 205, thereby forming a concavo-convex surface on the front surface 203. However, in the present invention, the workpiece 200 need not include the bumps 205. Furthermore, in the present invention, the workpiece 200 is not limited to a wafer; it may also be a rectangular resin-sealed substrate, a ceramic plate, a glass plate, or the like, having multiple resin-sealed devices.

[0030] In the embodiment, the workpiece 200 has a functional layer 206 stacked on the front surface of the substrate 201. The functional layer 206 includes: a low dielectric constant insulator film (hereinafter referred to as a Low-k film) composed of an inorganic film such as SiOF, BSG (SiOB) and an organic film such as a polymer film such as a polyimide-based film or a polyparaxylene-based film; and a conductor film formed of a conductive metal. The Low-k film and the conductor film are stacked to form the device 204. The conductor film constitutes the circuit of the device 204. Therefore, the device 204 is composed of Low-k films stacked on each other and a conductor film stacked between the Low-k films. In addition, the functional layer 206 of the predetermined dividing line 202 is composed of a Low-k film and does not have a conductor film except for the TEG (Test Element Group). The TEG is an evaluation element used to identify design or manufacturing problems that may occur in the device 204.

[0031] In the embodiment, a workpiece 200 is thinned to a predetermined finished thickness by grinding the back surface 207, the other side opposite to the front surface 203, while a protective member 210 is formed on the front surface 203 of the workpiece 200. The workpiece 200 is then divided into individual components 204 along the planned dividing lines 202.

[0032] In an embodiment, Figure 3 As shown, protective member 210 comprises a resin film 211, a resin layer 212, and a resin sheet 213 (equivalent to a sheet), and is formed from two or more layers of resin. In the embodiment, resin film 211 is formed from a thin, flexible synthetic resin (PO (polyolefin) in the embodiment) in a sheet-like shape. Resin film 211 is adhered to the front surface 203 of workpiece 200 and the front surface of bump 205.

[0033] In an embodiment, the resin layer 212 is formed of a liquid resin 214 ( Figure 1) and is laminated on resin film 211. Liquid resin 214 constituting resin layer 212 is a UV-curable liquid resin that cures upon exposure to ultraviolet light as an external stimulus. However, the present invention is not limited to this and may also be a liquid resin that cures upon heating. Liquid resin 214 is, for example, made of ResiFlat manufactured by DISCO Co., Ltd. or TEMPLOC manufactured by Denka Co., Ltd.

[0034] The resin sheet 213 is formed from a thin, flexible, ultraviolet-transmissive synthetic resin (PO (polyolefin) in this embodiment) in a film-like shape. The resin sheet 213 is laminated on the resin layer 212. The resin layer 212 is composed of a liquid resin 214 laminated between the resin film 211 and the resin sheet 213, which hardens upon application of an external stimulus. The combined thickness of the protective member 210 and the workpiece 200 is uniform across the entire front surface 203.

[0035] Furthermore, in the embodiment, the workpiece 200 is constituted Figure 4 and Figure 5 In the state shown in the frame unit 215, the protective member 210 is formed on the workpiece 200 using the protective member forming apparatus 1. Furthermore, the frame unit 215 is formed by placing a disk-shaped resin film 211 having a larger diameter than the workpiece 200 in close contact with the front surface 203 and the front surface of the bump 205 without any gap, and attaching a ring-shaped frame 216 to the outer periphery of the resin film 211.

[0036] like Figure 1 As shown, the protective member forming apparatus 1 according to the embodiment includes an ultraviolet irradiation station 10 , a resin supply unit 20 , a pressing unit 30 , a light shielding cover 40 , a light shielding plate 41 , a conveying unit 50 , an ionizer unit 60 , and a control unit 100 .

[0037] The planar shape of the ultraviolet irradiation station 10 is formed into a rectangular shape larger than the planar shape of the frame unit 215. Figure 1 As shown, the ultraviolet irradiation station 10 includes a housing 11, a support plate 12, and an ultraviolet light source 13. The housing 11 includes a bottom plate 111 having a rectangular planar shape larger than the planar shape of the frame unit 215, and a frame-shaped portion 112 extending vertically from the outer edge of the bottom plate 111. The housing 11 is formed of a metal such as stainless steel.

[0038] The support plate 12 is formed into a rectangular shape larger than the planar shape of the frame unit 215 and is mounted on the inner side of the frame portion 112 of the frame body 11. The support plate 12 is formed into a flat plate with a constant thickness. The upper surface of the support plate 12 is a support surface 121 formed flat along the horizontal direction. The support plate 12 is formed of a light-transmitting material such as glass to allow ultraviolet rays to pass through. The support plate 12 places a rectangular resin sheet 213 whose planar shape is larger than the planar shape of the frame unit 215, that is, the workpiece 200, on the support surface 121. The support plate 12 supports the resin sheet 213 on the support surface 121.

[0039] The ultraviolet light source 13 is positioned above the bottom plate 111 of the housing 11 and below the support plate 12, thereby being positioned within the ultraviolet irradiation station 10. The ultraviolet light source 13 is a UV lamp that irradiates ultraviolet rays. Thus, the ultraviolet irradiation station 10 supports the resin sheet 213 using the support surface 121 of the support plate 12, which transmits ultraviolet rays from the ultraviolet light source 13 positioned within the station.

[0040] The resin supply unit 20 supplies liquid resin 214 from a liquid resin supply source (not shown) onto the front surface of a resin sheet 213 positioned on the support surface 121. The resin supply unit 20 includes a supply pipe 21, into which the liquid resin 214 is supplied from the liquid resin supply source, and a nozzle 22, attached to the distal end of the supply pipe 21 and having a discharge port for discharging the liquid resin onto the resin sheet 213. The nozzle 22 of the resin supply unit 20 is movable by a movement mechanism (not shown) between a resin supply position, where the nozzle 22 is vertically aligned with the center of the support surface 121 of the ultraviolet irradiation station 10, and a retracted position, where the nozzle 22 is retracted from the support surface 121 of the ultraviolet irradiation station 10. The resin supply unit 20 positions the nozzle 22 at the resin supply position and supplies the liquid resin 214 onto the resin sheet 213 supported on the support surface 121 of the ultraviolet irradiation station 10.

[0041] The pressing unit 30 presses the workpiece 200 from the back surface 207 opposite the front surface 203 toward the liquid resin 214 supplied to the front surface of the resin sheet 213 disposed on the support surface 121. The pressing unit 30 includes a holding member 31, a lifting member 32 attached to the holding member 31, and a feeding unit 33.

[0042] The lower surface 311 of the holding member 31 is formed flat along the horizontal direction, and the planar shape of the lower surface 311 is formed into a rectangular shape of the same size as the planar shape of the ultraviolet irradiation station 10. The holding member 31 is arranged above the ultraviolet irradiation station 10 so that the lower surface 311 and the support surface 121 are opposite in the vertical direction. The holding member 31 has a plurality of suction holes connected to a suction source (not shown) on the lower surface 311. The suction holes are sucked by the suction source, thereby sucking and supporting the workpiece 200 on the lower surface 311. In the embodiment, the holding member 31 sucks and supports the annular frame 216 of the frame unit 215 and the back surface 207 of the workpiece 200 on the lower surface 311.

[0043] The lifting member 32 is fixed to a position such as the upper surface of the holding member 31. The feed unit 33 includes: a well-known ball screw 34, which is arranged parallel to the vertical direction and is rotatable about its axis and is screwed into the threaded hole of the lifting member 32; a motor 35, which is mounted on the device body (not shown) and rotates the ball screw 34 about its axis to lift the holding member 31 in the vertical direction; and a well-known guide rail (not shown) which is mounted on the device body and supports the lifting member 32 so that it can move freely along the vertical Z-axis direction.

[0044] The pressing unit 30 attracts and holds the workpiece 200 on the lower surface 311 of the holding component 31, and the feeding unit 33 rotates the ball screw 34 around the axis, thereby pressing the workpiece 200 held on the holding component 31 toward the liquid resin 214 provided to the resin sheet 213 held on the ultraviolet irradiation station 10.

[0045] In an embodiment, Figure 6 As shown, the light shield 40 is a light-blocking component having a U-shaped planar shape. This light shield 40 positions the UV irradiation station 10 inwardly and covers a space 42 above the support surface 121. Thus, the light shield 40, as a light-blocking component, covers the space 42 on the side of the support surface 121 of the UV irradiation station 10. The light shield 40 is formed from a light-blocking material (particularly one that limits the transmission of UV rays). Furthermore, the space 42 is also the space inside the light shield 40.

[0046] In an embodiment, Figure 1 As shown, the light shield 40 is placed between the support surface 121 of the ultraviolet irradiation station 10 and the lower surface 311 of the holding member 31 of the pressing unit 30 that has been separated from the ultraviolet irradiation station 10. In addition, the plane shape of the light shield 40 is formed into a "コ" shape, so as shown in FIG. Figure 6 As shown, an opening 43 (corresponding to a part of the light shielding cover) is provided. The opening 43 is an opening that connects the outside and the inside of the light shielding cover 40.

[0047] The light shielding plate 41 is formed into a flat plate having the same thickness as the light shielding cover 40 and is made of a light shielding material (especially limiting the transmission of ultraviolet rays). The light shielding plate 41 is provided so as to be moved between the opening 43 and the light shielding cover 40 by a moving mechanism (not shown). Figure 8 The closed position shown in the figure and Figure 1 The light shielding plate 41 is movable between the closed position and the open position to open the opening 43 as shown in FIG.

[0048] In the embodiment, the light shielding plate 41 is arranged parallel to the wall 401 farthest from the opening 43 of the light shielding cover 40, and is vertically slidable by a moving mechanism to move between a closed position and an open position. When positioned in the open position, the light shielding plate 41 allows the transport unit 50 to intrude into the space 42 on the side of the support surface 121 within the light shielding cover 40.

[0049] The transport unit 50 is a sheet placement unit that holds the resin sheet 213 and penetrates from the outside of the light shield 40 through the opening 43 into the space 42 on the support surface 121 side within the light shield 40, thereby placing the held resin sheet 213 on the support surface 121. Furthermore, the transport unit 50 is also a removal unit that holds the resin sheet 213 to which the workpiece 200 is fixed by means of the liquid resin 214 hardened by ultraviolet light, and removes the workpiece 200 from the ultraviolet irradiation station 10 through the opening 43 to the outside of the light shield 40.

[0050] In the embodiment, the transport unit 50 includes a suction pad 51, a holding member 52 that holds the suction pad 51, and a moving unit (not shown) that moves the holding member 52 in the vertical and horizontal directions. The suction pad 51 is a non-contact Bernoulli pad, which is placed at a corner or other location of the holding member 52 and sprays pressurized gas. The negative pressure of the gas holds the resin sheet 213 without contacting the resin sheet 213. In addition, in the embodiment, the transport unit 50 further includes a frame holding portion (not shown) that suctions and holds the annular frame 216 of the frame unit 215 fixed to the resin sheet 213.

[0051] The ionizer unit 60 ejects ionized air 61 ( Figure 6 As shown), the charging of the support surface 121 of the ultraviolet irradiation station 10 is neutralized and the static electricity of the support surface 121 is removed. In the embodiment, the ionizer unit 60 has an ionizer that sprays ionized ionized air 61, which is an end 217 ( Figure 6 The so-called bar-type structure is a structure in which ionized air 61 is ejected along the entire width direction of the device (as shown in FIG. 1 ).

[0052] In the embodiment, the ionizer unit 60 has a jet port that extends linearly parallel to the light shielding baffle 41 in the open position and ejects ionized air 61. Furthermore, the ionizer unit 60 is positioned vertically at the same height as the light shielding baffle 41 in the open position and ejects ionized air 61 toward the end 217 of the resin sheet 213 on the support surface 121. The ejection direction of the ionizer unit 60 gradually tilts downward toward the depths of the space 42 as viewed from the side. Therefore, a portion of the ionized air 61 ejected from the ionizer unit 60 is ejected in a direction that presses the end 217 of the resin sheet 213 on the support surface 121 toward the support surface 121. Furthermore, the end 217 of the resin sheet 213 on the support surface 121 is the end region of the resin sheet 213 on the light shielding baffle 41 side.

[0053] The control unit 100 controls the various components of the protective member forming apparatus 1, causing the protective member forming apparatus 1 to execute a protective member forming operation for forming the protective member 210 on the front surface 203 of the workpiece 200. The control unit 100 is a computer capable of executing computer programs and includes: an arithmetic processing unit including a microprocessor such as a CPU (Central Processing Unit); a storage device including memory such as ROM (Read Only Memory) or RAM (Random Access Memory); and an input / output interface device.

[0054] The processing unit of the control unit 100 executes the computer program stored in the ROM on the RAM to generate control signals for controlling the protective member forming apparatus 1. The processing unit of the control unit 100 outputs the generated control signals to the components of the protective member forming apparatus 1 via the input / output interface device.

[0055] The control unit 100 is also connected to a display unit (not shown) such as a liquid crystal display device that displays the status and images of the machining operation, and an input unit (not shown) used by the operator to register machining content information. The input unit is composed of at least one of a touch panel and a keyboard provided on the display unit.

[0056] Next, the protective member forming operation of the protective member forming apparatus 1 having the above-described configuration will be described with reference to the drawings. Figure 7 is schematically shown in partial cross-section Figure 1 The protective member forming apparatus shown is a side view of a state in which liquid resin is applied to the front surface of the resin sheet on the support surface. Figure 8is schematically shown in partial cross-section Figure 1 A side view of a state in which a pressing unit of the protective member forming apparatus is pressing a workpiece toward liquid resin is shown. Figure 9 is schematically shown in partial cross-section Figure 1 The figure shows a side view of a state in which an ionizer unit of the protective member forming apparatus sprays ionized air toward an end portion of a resin sheet on a support surface. Figure 10 is schematically shown in partial cross-section Figure 1 The transport unit of the protective member forming apparatus shown is a side view of a state in which the transport unit holds the resin sheet on the support surface and transports the workpiece.

[0057] Regarding the protective component forming device 1 of the above-mentioned structure, the control unit 100 controls each component to perform a protective component forming action of forming the protective component 210. In the protective component forming action, the protective component forming device 1 first positions the pressing unit 30 at a position away from the supporting surface 121, and the pressing unit 30 attracts and holds the annular frame 216 of the frame unit 215 and the back side 207 of the workpiece 200 on the lower surface 311 of the holding member 31. The protective component forming device 1 positions the light-shielding baffle 41 at an open position to open the opening 43, and uses the conveying unit 50 to convey the resin sheet 213 held on the suction pad 51 into the space 42, places the resin sheet 213 on the supporting surface 121 of the supporting plate 12 of the ultraviolet irradiation station 10, and supports the resin sheet 213 on the supporting surface 121. The protective component forming device 1 positions the nozzle 22 of the resin providing unit 20 at the resin providing position, as shown in FIG. Figure 7 As shown, a prescribed amount of liquid resin 214 is supplied from the nozzle 22 onto the resin sheet 213 .

[0058] During the protective component forming operation, the protective component forming device 1 positions the nozzle 22 of the resin supply unit 20 at the retracted position, positions the light shielding baffle 41 at the closed position, closes the opening 43, and lowers the holding member 31 of the pressing unit 30, so that the workpiece 200, which is attracted and held on the holding member 31, is lowered to a position where the protective component 210 has the desired thickness. As a result, the front surface 203 of the workpiece 200 contacts the liquid resin 214 on the resin sheet 213 through the resin film 211, and as the workpiece 200 descends, the liquid resin 214 is pushed toward the outer periphery of the resin sheet 213. And, as Figure 8 As shown, when the workpiece 200 is lowered to a position where the protective member 210 has a desired thickness, the liquid resin 214 adheres to the resin sheet 213 and the resin film 211 , and covers the entire front surface 203 of the workpiece 200 via the resin film 211 .

[0059] During the protective component forming operation, the protective component forming apparatus 1 stops the retaining member 31 at a position where the protective component 210 has a desired thickness, and then irradiates the liquid resin 214 with ultraviolet light from the ultraviolet light source 13 via the support plate 12 and the resin sheet 213 for a predetermined period of time. The protective component forming apparatus 1 cures the liquid resin 214 to form a resin layer 212, thereby forming a protective component 210 of the desired thickness on the front surface 203 of the workpiece 200. In this manner, the workpiece 200 is secured to the resin sheet 213 via the resin film 211 and the cured liquid resin 214, i.e., the resin layer 212. The protective component forming apparatus 1 stops the retaining member 31 from sucking and holding the frame unit 215. The ultraviolet irradiation station 10 then supports the workpiece 200 using the support surface 121 of the support plate 12, which transmits ultraviolet light from the ultraviolet light source 13 disposed within the ultraviolet irradiation station 10.

[0060] In the protective member forming operation, the protective member forming apparatus 1 raises the holding member 31 of the pressing unit 30, positions the light shielding plate 41 at the open position and opens the opening 43. Figure 9 As shown, ionized air 61 is ejected from the ionizer unit 60. Consequently, even if gas flows into the space 42 when the light shielding shutter 41 opens the opening 43, the ionized air 61 ejected from the ionizer unit 60 presses the end 217 of the resin sheet 213 on the support surface 121 toward the support surface 121, thereby preventing the end 217 of the resin sheet 213 from floating away from the support surface 121. Thus, when the light shielding shutter 41 is opened, a portion of the ionized air 61 ejected from the ionizer unit 60 is ejected in a direction that presses the end 217 of the resin sheet 213 toward the support surface 121. Furthermore, since the ionized air 61 is ejected, even if the support surface 121 of the support plate 12 becomes charged, the charge can be neutralized, eliminating static electricity.

[0061] In the protective member forming operation, the protective member forming apparatus 1 inserts the conveying unit 50 into the space 42 inside the light shielding cover 40 through the opening 43, and uses the suction pad 51 of the conveying unit 50 to hold the resin sheet 213 on the supporting surface 121. Figure 10As shown, the protective member forming apparatus 1 raises the transport unit 50, which holds the resin sheet 213 on the support surface 121 with the suction pad 51, within the space 42 inside the light shield 40, causing the resin sheet 213 to rise from the support surface 121. This causes ionized air 61 ejected from the ionizer unit 60 to be supplied along the support surface 121 into the gap between the resin sheet 213 and the support surface 121, neutralizing the charge on the entire support surface 121 of the support plate 12 and removing static electricity. Thus, when the transport unit 50 removes the resin sheet 213 from the support surface 121, the ionized air 61 is supplied along the support surface 121 into the gap between the resin sheet 213 and the support surface 121.

[0062] Thereafter, during the protective member forming operation, the protective member forming apparatus 1 transports the transport unit 50 toward the outside of the light shield 40 through the opening 43, unloading the workpiece 200 on which the protective member 210 is formed toward the outside of the light shield 40, thereby completing the protective member forming operation. Furthermore, with respect to the workpiece 200 unloaded toward the outside of the light shield 40, the protective member 210, i.e., the resin film 211, the resin layer 212, and the resin sheet 213, is cut along the outer edge of the workpiece 200.

[0063] In the protective member forming apparatus 1 of the embodiment described above, when the resin sheet 213 is separated from the support surface 121 by the transport unit 50, ionized air 61 is supplied to the gap between the resin sheet 213 and the support surface 121. This suppresses charging of the support surface 121 and facilitates the removal of the workpiece 200 having the protective member 210 formed thereon. As a result, the protective member forming apparatus 1 achieves the effect of reducing the difficulty of removing the workpiece 200 having the protective member 210 formed thereon.

[0064] In addition, the protective component forming device 1 is provided with a light shielding hood 40 and a light shielding baffle 41 for shielding the ultraviolet rays irradiated by the ultraviolet irradiation station 10, but ionized air 61 is sprayed onto the end 217 of the resin sheet 213 on the side of the light shielding baffle 41 to prevent the gas flowing into the light shielding hood 40 due to the opening 43 of the light shielding baffle 41 from causing the end 217 of the resin sheet 213 to roll up, thereby making it impossible to use the conveying unit 50 to hold the resin sheet 213, thereby suppressing the end 217 of the resin sheet 213 from rolling up. In particular, with respect to the protective component forming device 1, when clean air is provided on the outside of the light-shielding baffle 41 (achieved by an FFU (fan filter unit) that transports clean air that has passed through a filter), it is easy for an airflow to flow into the interior of the light-shielding cover 40 due to the opening 43 of the light-shielding baffle 41, and it is easy for the end 217 of the resin sheet 213 to curl. However, since the protective component forming device 1 sprays ionized air 61 onto the end 217 of the resin sheet 213 on the light-shielding baffle 41 side, the curling of the end 217 as described above can be suppressed.

[0065] The present invention is not limited to the above-described embodiment, and can be implemented with various modifications without departing from the spirit of the present invention.

Claims

1. A protective member forming device for forming a protective member on one surface of a plate-shaped workpiece, wherein: The protective component forming device has: an ultraviolet irradiation station that supports a workpiece by a support surface of a support plate, the support plate transmitting ultraviolet rays from an ultraviolet light source disposed inside the ultraviolet irradiation station; a sheet disposing unit for disposing an ultraviolet-transmissive sheet larger than the workpiece on the support surface; a resin supply unit for supplying ultraviolet curing liquid resin to the sheet disposed on the support surface; a pressing unit that presses the workpiece from the other surface side toward the liquid resin provided on the sheet disposed on the support surface; a carrying-out unit that holds the sheet to which the workpiece is fixed by means of the liquid resin hardened by ultraviolet rays and carries the workpiece out of the ultraviolet irradiation station; and an ionizer unit that sprays ionized air toward the supporting surface of the ultraviolet irradiation table, When the sheet is moved away from the support surface by the carrying-out unit, the ionized air is supplied along the support surface into the gap between the sheet and the support surface. The protective component forming device further comprises: a light shield covering the space on the supporting surface side of the ultraviolet irradiation station using a light-shielding member; as well as A light shielding plate opens and closes a portion of the light shielding cover to allow the carrying unit to intrude into the space. When the light shielding shutter is opened, a portion of the ionized air ejected from the ionizer unit is ejected in a direction that presses an end region of the sheet on the light shielding shutter side toward the support surface.

Images