A processing device system and surface treatment method for obtaining a specified geometric size energy transmission optical fiber preform

By using a combined system for chemical vapor etching treatment, the problems of poor geometric uniformity, cracking and precision control difficulties in grinding energy-transfer fiber preform rods are solved, and the treatment effect of high-precision and solid-state waste is achieved.

CN114057386BActive Publication Date: 2025-02-11JIANGSU HENGTONG OPTICAL FIBER TECH +2
View PDF 4 Cites 0 Cited by

Patent Information

Application Number
CN202111611918.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-12-27
Publication Date
2025-02-11
Estimated Expiration
2041-12-27

AI Technical Summary

Technical Problem

In the existing grinding and processing technology, the outer surface of the energy-transmission fiber prefabricated rod has poor geometric uniformity, is prone to cracking, is difficult to control accuracy, is difficult to monitor online, and quartz solid waste is generated.

Method used

Using a combined system composed of a three-jaw sleeve sealing ring combination fixture, glass base tube, glass processing lathe, diameter control system and exhaust air exhaust device, the surface segmented quantitative processing of the optical fiber prefabricated rod is realized through chemical vapor phase etching to realize online Monitoring and treatment of solid-state waste.

Benefits of technology

Improves geometric dimension uniformity, avoids cracking, improves control accuracy, realizes online monitoring, and avoids the generation of solid waste.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN114057386B_ABST
    Figure CN114057386B_ABST
Patent Text Reader

Abstract

The present invention provides a processing device system and a surface treatment method for obtaining a specified geometric size energy transmission optical fiber preform rod, wherein the device system comprises a machine tool processing unit and an optical fiber preform rod processing unit; the optical fiber preform rod processing unit comprises a preform rod combination sleeve and a three-claw sleeve sealing ring combination device; the machine tool processing unit comprises a glass processing lathe, a diameter control device and an exhaust gas exhaust device. The device system provided by the present invention can improve the problem of poor uniformity of geometric dimensions of the existing grinding processing technology by quantitatively treating the surface of the optical fiber preform rod in sections; solve the problem of cracking without applying stress to the rod body; improve the control accuracy by online monitoring of the outer diameter of the preform rod, and do not generate solid waste.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention belongs to the field of energy transmission optical fiber preform production equipment, and relates to a device system for processing energy transmission optical fiber preform, and in particular to a processing device system and a surface treatment method for obtaining energy transmission optical fiber preforms of specified geometric dimensions. Background Art

[0002] Optical fiber is widely valued and used in military and civilian communications and sensing fields due to its strong anti-interference ability, low loss, and large information capacity.

[0003] Among them, large core diameter energy transmission optical fiber can flexibly and safely transmit high-power lasers in three-dimensional complex spaces, and can transmit higher laser energy without damaging the optical fiber, thereby meeting application requirements. Lasers have the advantages of high conversion efficiency, large gain coefficient, and high output power. In addition to being widely used in industrial processing fields such as material surface heat treatment, welding, and cutting, they are also widely used in medical and health fields such as ophthalmology, dermatology, and in vivo surgery. Therefore, the research on energy transmission optical fiber used to transmit high-power optical radiation lasers has become increasingly important.

[0004] The strength and loss of optical fiber are its main performance parameters. The strength of optical fiber directly affects the reliability of the system in which the optical fiber is located. Especially when optical fiber is used in the military field, due to the harsh working environment of optical fiber, the high stress, and the long storage period, the requirements for optical fiber strength are very stringent. Therefore, high-strength optical fiber must be selected. High-strength optical fiber can be used in special environments and harsh conditions for wired guidance, military submarine cables, field optical cables and other applications. To achieve optical fiber communication and optical fiber laser or amplification, it is necessary to reduce the loss of optical fiber as much as possible. The level of optical fiber loss directly affects the transmission distance or the distance between relay stations in communication applications, as well as the laser efficiency in laser applications. Therefore, reducing the loss of optical fiber has great practical significance.

[0005] Optical fiber preform is the core raw material for manufacturing quartz series optical fibers. The diameter of the preform is generally a few millimeters to tens of millimeters. The internal structure of the optical fiber is formed in the preform. The production of preform is the most important part of the optical fiber process. Since the large-scale production of optical fiber began in the late 1970s, the research and improvement of optical fiber preform manufacturing technology has never stopped.

[0006] There are many ways to make light rods, and the most commonly used process is gas phase oxidation. In the gas phase oxidation method, high-purity metal halide vapor reacts with oxygen to form some oxide particles, which are deposited on the surface of glass or quartz (or the inner wall of the tubular body) and then sintered to form a transparent glass rod.

[0007] CN 205528425U discloses an optical fiber preform processing device, which includes a lathe platform, two ends of the lathe platform are respectively provided with seats, at least one of the seats is a movable seat, the inner sides of the two seats are respectively provided with coaxial rotating chucks, a movable slide is provided on the lathe platform, a combustion torch is provided on the movable slide, and a correction device is provided on the lathe platform or the movable slide. The device can perform axial correction and surface polishing on the optical fiber preform, thereby improving its strength and strength stability.

[0008] CN 103663988A discloses a mixed acid and treatment method for treating the surface of an optical fiber preform. The surface treatment method adopted is: firstly, using a mixed acid within a certain temperature range to treat the concave layer and the microcrack layer on the surface of the finely ground preform, then polishing the preform, and finally treating the polished preform with a diluted mixed acid. The treatment method can remove microcracks and impurity ions on the surface of the optical fiber preform.

[0009] CN 109553295A discloses a large-size low-loss optical fiber preform and a manufacturing method thereof. The manufacturing method comprises: using a VAD process to prepare an optical fiber core rod, wherein the optical fiber core rod has a core layer and an inner cladding layer from the inside to the outside; using an OVD process to deposit a barrier layer loose body on the outside of the optical fiber core rod, and then performing a sintering process to obtain a synthetic core rod; and using a RIC process to combine the synthetic core rod with a continuous-fusion sleeve into a large-size low-loss optical fiber preform.

[0010] The above method improves the strength and loss resistance of optical fiber preforms, but does not provide a method for preparing energy-transmitting optical fiber preforms of various sizes.

[0011] In order to obtain an energy-transmitting optical fiber preform with specified energy-transmitting geometric dimensions, it is usually necessary to grind the outer surface of the preform. However, the grinding process is often accompanied by poor grinding uniformity, different grinding uniformity at different positions of the preform, easy eccentricity and other shortcomings, resulting in poor uniformity of the core diameter of the drawn optical fiber, and even direct losses of optical fibers with unqualified core diameters; possible cracking; difficulty in precision control, and the accuracy of grinding control is difficult to achieve a control level of 10 microns; and difficulty in online monitoring, because the grinding process will also produce quartz waste, and real-time monitoring of the outer surface geometric dimensions during the process is more complicated.

[0012] Therefore, in order to improve the existing grinding processing technology, the problems of poor uniformity of the geometric dimensions of the outer surface of the preform rod after processing, possible cracking, difficulty in precision control, and difficulty in online monitoring, and the problem of generating solid quartz waste, a processing method is proposed to overcome the above shortcomings, which has become one of the problems that urgently need to be solved in this field. Summary of the invention

[0013] The purpose of the present invention is to provide a processing device system and surface treatment method for obtaining a specified geometric size energy transmission optical fiber preform. The present invention can improve the problem of poor uniformity of geometric dimensions in the existing grinding processing technology by quantitatively treating the surface of the optical fiber preform in sections; solve the problem of cracking without applying stress to the rod body; improve the control accuracy by online monitoring of the outer diameter of the preform, and do not generate solid waste.

[0014] In order to achieve the purpose of the invention, the present invention adopts the following technical solutions:

[0015] In a first aspect, the present invention provides a processing device system for obtaining an energy-transmitting optical fiber preform of a specified geometric size, the device system comprising a machine tool processing unit and an optical fiber preform to-be-processed unit;

[0016] The optical fiber preform rod to be processed unit comprises a preform rod assembly sleeve and a three-claw sleeve sealing ring assembly device;

[0017] The machine tool processing unit includes a glass processing lathe, a diameter control device and an exhaust gas exhaust device.

[0018] The device system of the present invention realizes quantitative etching treatment on the surface of optical fiber preform rod by designing a combined system consisting of a three-claw sleeve sealing ring combined fixing device, a glass substrate tube, a glass processing lathe, a diameter control system including a heating electric furnace and an industrial camera, and an exhaust gas exhaust system device.

[0019] Preferably, the preform assembly sleeve comprises an optical fiber preform and a glass substrate tube.

[0020] Preferably, the glass substrate tube is sleeved outside the optical fiber preform.

[0021] Preferably, the glass substrate tube is made of quartz.

[0022] The glass substrate tube of the present invention adopts a high temperature resistant thick-walled transparent quartz sleeve, which can be used as a sealing main material and an etching reaction cavity.

[0023] Preferably, the three-claw sleeve sealing ring assembly device is arranged at both ends of the preform rod assembly sleeve.

[0024] Preferably, the three-claw sleeve sealing ring assembly device is used to fix the preform rod assembly sleeve.

[0025] Preferably, the three-jaw sleeve sealing ring combination device comprises a three-jaw sleeve and a sealing ring.

[0026] Preferably, the three-claw sleeve is arranged between the optical fiber preform and the sealing ring.

[0027] Preferably, the sealing ring is arranged between the three-claw sleeve and the glass substrate tube.

[0028] Preferably, the sealing ring is made of polytetrafluoroethylene or perfluoroether rubber.

[0029] The optical fiber preform rod and the glass substrate tube of the present invention are combined into a whole through a three-claw sleeve sealing ring combination device. The optical fiber preform rod and the glass substrate tube can realize coaxial and synchronous rotation.

[0030] Preferably, a track is provided at the middle position of the glass processing lathe.

[0031] Preferably, a slide is provided on the track.

[0032] Preferably, a diameter control device is provided on the slide.

[0033] Preferably, the diameter control device includes a heating furnace and an industrial camera.

[0034] Preferably, the heating electric furnace comprises a resistance furnace.

[0035] Preferably, the industrial camera is arranged on a mounting platform of the heating furnace.

[0036] The diameter control device of the present invention reciprocates through a slide and is located above the machine tool. The diameter control system receives and processes monitoring data from an industrial camera to realize online monitoring of the outer surface size of the preform rod. The temperature and travel speed of the heating furnace are manually adjusted according to the monitoring values ​​to realize segmented quantitative etching of the outer surface of the preform rod.

[0037] Preferably, chucks are respectively provided at both ends of the glass processing lathe.

[0038] Preferably, the chuck is used to fix the optical fiber preform to be processed unit.

[0039] Preferably, the exhaust gas exhaust device is arranged at the rear of the glass processing lathe.

[0040] Preferably, the exhaust gas exhaust device comprises a tail pressure gauge, a filter and an exhaust device which are installed in sequence.

[0041] The tail pressure gauge of the present invention is used to detect the pressure inside the optical fiber preform rod to be processed unit, and the filter is used to filter waste materials to prevent harmful waste materials from being discharged into the outside without being processed, thereby affecting the health of operators.

[0042] In a second aspect, the present invention provides a method for surface treatment using the device system provided in the first aspect, the surface treatment method comprising the following steps:

[0043] (1) installing the optical fiber preform to be processed unit on a glass processing lathe, rotating and heating it, and obtaining a processed optical fiber preform;

[0044] (2) etching the processed optical fiber preform obtained in step (1) to obtain an energy-transmitting optical fiber preform of specified geometric dimensions and reaction waste gas;

[0045] During the etching process, an industrial camera is used to monitor the outer diameter of the processed optical fiber preform in real time.

[0046] Before the surface treatment described in the present invention, the optical fiber preform rod is also cleaned and dried to avoid deterioration of etching accuracy and uniformity and affecting the cleanliness of the preform rod surface.

[0047] Preferably, the rotation speed in step (1) is 10-20 r / min, for example, it can be 10 r / min, 11 r / min, 12 r / min, 13 r / min, 14 r / min, 15 r / min, 16 r / min, 17 r / min, 18 r / min, 19 r / min or 20 r / min, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0048] Preferably, the heating temperature in step (1) is 800-1100°C, for example, 800°C, 850°C, 930°C, 1000°C, 1060°C or 1100°C, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0049] Preferably, the gas used in the etching process in step (2) includes a mixed gas of fluorine-containing gas and oxygen.

[0050] Preferably, the fluorine-containing gas comprises any one of carbon tetrafluoride, hexafluoroethane or trifluoromethane, or a combination of at least two thereof. Typical but non-limiting combinations include a combination of carbon tetrafluoride and hexafluoroethane, a combination of hexafluoroethane and trifluoromethane, a combination of carbon tetrafluoride and trifluoromethane, or a combination of carbon tetrafluoride, hexafluoroethane and trifluoromethane.

[0051] Preferably, the gas flow rate of the fluorine-containing gas is 30-50sccm, for example, it can be 30sccm, 32sccm, 34sccm, 36sccm, 38sccm, 40sccm, 42sccm, 44sccm, 46sccm, 48sccm or 50sccm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0052] Preferably, the gas flow rate of oxygen is 30-60sccm, for example, it can be 30sccm, 33sccm, 36sccm, 39sccm, 41sccm, 44sccm, 47sccm, 50sccm, 53sccm, 56sccm or 60sccm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0053] Preferably, the pressure during the etching process is -10 to -5 Pa, for example, -10 Pa, -9 Pa, -8 Pa, -7 Pa, -6 Pa or -5 Pa, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0054] The etching pressure of the present invention is -10 to -5 Pa. Too high a pressure will lead to excessive suction in the tube and worsen the rod out-of-roundness, while too low a pressure will cause waste accumulation and affect the etching accuracy and uniformity.

[0055] Preferably, the method further comprises using an exhaust gas exhaust device to remove reaction waste gas.

[0056] As a preferred technical solution of the surface treatment method described in the second aspect of the present invention, the surface treatment method described in the present invention comprises the following steps:

[0057] (1) installing the optical fiber preform to be processed unit on a glass processing lathe, rotating it at a speed of 10-20 r / min and heating it to 800-1100° C. to obtain a processed optical fiber preform;

[0058] (2) etching the treated optical fiber preform obtained in step (1) at a pressure of -10 to -5 Pa to obtain an energy-transmitting optical fiber preform of specified geometric dimensions and reaction waste gas; the gas used in the etching process includes a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 30-50 sccm; the gas flow rate of the oxygen is 30-60 sccm;

[0059] (3) using an exhaust gas exhaust device to remove reaction waste gas;

[0060] During the etching process, an industrial camera is used to monitor the outer diameter of the processed optical fiber preform in real time.

[0061] The numerical range described in the present invention not only includes the point values ​​listed above, but also includes any point values ​​between the above numerical ranges that are not listed. Due to space limitations and for the sake of simplicity, the present invention no longer exhaustively lists the specific point values ​​included in the range.

[0062] Compared with the prior art, the present invention has the following beneficial effects:

[0063] (1) The surface treatment method provided by the present invention uses a chemical vapor etching method to achieve segmented quantitative surface treatment of the energy transfer optical fiber preform;

[0064] (2) The device system provided by the present invention uses a diameter control system with an industrial camera to realize online monitoring of the outer diameter of the energy transmission optical fiber preform;

[0065] (3) The device system provided by the present invention uses a high temperature resistant thick-walled transparent sleeve as the main sealing material and the reaction chamber, which does not pollute the outside air and does not affect the health of the operator;

[0066] (4) The present invention uses a resistance furnace as a temperature control heat source, which can provide a uniform and stable heating temperature and is easy to control the temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0067] Figure 1 is a side view of an optical fiber preform to be processed unit provided in Example 1 of the present invention;

[0068] Figure 2 is a cross-sectional view of an optical fiber preform to be processed unit provided in Example 1 of the present invention;

[0069] Figure 3 It is a structural schematic diagram of a machine tool processing unit provided in Example 1 of the present invention.

[0070] Among them, 1 is a three-claw sleeve, 2 is an optical fiber preform rod, 3 is a sealing ring, 4 is a glass substrate tube, 5 is a glass processing lathe, 6 is an industrial camera, 7 is a heating furnace, 8 is a tail pressure gauge, 9 is a filter, and 10 is an exhaust device. DETAILED DESCRIPTION

[0071] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0072] Example 1

[0073] This embodiment provides a processing device system for obtaining an energy-transmitting optical fiber preform of a specified geometric size, the device system comprising: Figure 3 The machine tool processing unit and the optical fiber preform rod processing unit shown in the figure; the optical fiber preform rod processing unit includes a preform rod combination sleeve and a three-claw sleeve sealing ring combination device; the machine tool processing unit includes a glass processing lathe 5, a diameter control device and an exhaust gas exhaust device.

[0074] The side view of the optical fiber preform to be processed unit is as follows Figure 1 As shown, the cross-sectional diagram is Figure 2 shown.

[0075] The preform rod assembly sleeve comprises an optical fiber preform rod 2 and a glass base tube 4; the glass base tube 4 is sleeved on the outside of the optical fiber preform rod 2; the material of the glass base tube is quartz.

[0076] The three-claw sleeve sealing ring assembly device is arranged at both ends of the preform rod assembly sleeve; the three-claw sleeve sealing ring assembly device is used to fix the preform rod assembly sleeve.

[0077] The three-claw sleeve sealing ring assembly device comprises a three-claw sleeve 1 and a sealing ring 3; the three-claw sleeve 1 is arranged between the optical fiber preform rod 2 and the sealing ring 3; the sealing ring 3 is arranged between the three-claw sleeve 1 and the glass substrate tube 4; the material of the sealing ring 3 is polytetrafluoroethylene.

[0078] A track is arranged in the middle of the glass processing lathe 5 ; a slide is arranged on the track; and a diameter control device is arranged on the slide.

[0079] The diameter control device includes a heating furnace 7 and an industrial camera 6 ; the heating furnace 7 is a resistance furnace; and the industrial camera 6 is arranged on a mounting platform of the heating furnace 7 .

[0080] Chucks are respectively provided at both ends of the glass processing lathe 5; the chucks are used to fix the optical fiber preform rod to be processed unit.

[0081] The exhaust gas exhaust device is arranged at the rear of the glass processing lathe 5; the exhaust gas exhaust device comprises a tail pressure gauge 8, a filter 9 and an exhaust device 10 which are installed in sequence.

[0082] Example 2

[0083] This embodiment provides a processing device system for obtaining an energy-transmitting optical fiber preform of a specified geometric size. The device system is the same as the first embodiment except that the exhaust gas exhaust device is arranged at the head of the glass processing lathe 5 .

[0084] Example 3

[0085] This embodiment provides a processing device system for obtaining an energy-transmitting optical fiber preform of a specified geometric size. The device system is the same as the first embodiment except that the filter 9 is omitted.

[0086] Application Example 1

[0087] This application example provides a method for surface treatment using the processing device system for obtaining an energy-transmitting optical fiber preform of a specified geometric size provided in Example 1. The surface treatment method comprises the following steps:

[0088] (1) installing the optical fiber preform to be processed unit on a glass processing lathe, rotating it at a speed of 15 r / min and heating it to 960° C. to obtain a processed optical fiber preform;

[0089] (2) etching the treated optical fiber preform obtained in step (1) at a pressure of -7 Pa to obtain an energy transmission optical fiber preform of specified geometric dimensions and reaction waste gas; the gas used in the etching process includes a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 40 sccm; the gas flow rate of the oxygen is 50 sccm;

[0090] (3) using an exhaust gas exhaust device to remove reaction waste gas;

[0091] During the etching process, an industrial camera is used to monitor the outer diameter of the processed optical fiber preform in real time.

[0092] Application Example 2

[0093] This application example provides a method for surface treatment using the processing device system for obtaining an energy-transmitting optical fiber preform of a specified geometric size provided in Example 1. The surface treatment method comprises the following steps:

[0094] (1) installing the optical fiber preform to be processed unit on a glass processing lathe, rotating it at a speed of 10 r / min and heating it to 800° C. to obtain a processed optical fiber preform;

[0095] (2) etching the treated optical fiber preform obtained in step (1) at a pressure of -5 Pa to obtain an energy transmission optical fiber preform of specified geometric dimensions and reaction waste gas; the gas used in the etching process includes a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 30 sccm; the gas flow rate of the oxygen is 30 sccm;

[0096] (3) using an exhaust gas exhaust device to remove reaction waste gas;

[0097] During the etching process, an industrial camera is used to monitor the outer diameter of the processed optical fiber preform in real time.

[0098] Application Example 3

[0099] This application example provides a method for surface treatment using the processing device system for obtaining an energy-transmitting optical fiber preform of a specified geometric size provided in Example 1. The surface treatment method comprises the following steps:

[0100] (1) installing the optical fiber preform to be processed unit on a glass processing lathe, rotating it at a speed of 20 r / min and heating it to 1100° C. to obtain a processed optical fiber preform;

[0101] (2) etching the treated optical fiber preform obtained in step (1) at a pressure of -10 Pa to obtain an energy-transmitting optical fiber preform of specified geometric dimensions and reaction waste gas; the gas used in the etching process includes a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 50 sccm; the gas flow rate of the oxygen is 60 sccm;

[0102] (3) using an exhaust gas exhaust device to remove reaction waste gas;

[0103] During the etching process, an industrial camera is used to monitor the outer diameter of the processed optical fiber preform in real time.

[0104] Application Example 4

[0105] This application example provides a method for surface treatment of a processing device system for obtaining an energy transmission optical fiber preform rod of specified geometric dimensions provided in Example 1. The surface treatment method is the same as that of Application Example 1 except that the heating temperature in step (1) is changed to 1200°C.

[0106] The surface treatment method described in this application example results in an energy transfer optical fiber preform of specified geometric dimensions having a diameter that is thinner than the required diameter. It can be seen that increasing the heating temperature will increase the etching amount per unit time, deteriorate the etching accuracy, and increase the difficulty of control.

[0107] Application Example 5

[0108] This application example provides a method for surface treatment of a processing device system for obtaining an energy-transmitting optical fiber preform rod of specified geometric dimensions provided in Example 1. The surface treatment method is the same as that of Application Example 1 except that the heating temperature in step (1) is changed to 750°C.

[0109] The processing time of the energy transfer optical fiber preform with specified geometric dimensions obtained by surface treatment using the method described in this application example increases. It can be seen that lowering the heating temperature will increase the time required for the etching reaction and reduce the reaction efficiency.

[0110] Application Example 6

[0111] This application example provides a method for surface treatment of a processing device system for obtaining an energy transmission optical fiber preform rod of specified geometric dimensions provided in Example 1. The surface treatment method is the same as that of Application Example 1 except that the etching pressure in step (2) is changed to -2Pa.

[0112] The energy transfer optical fiber preform with specified geometric dimensions obtained by surface treatment using the method described in this application example deviates greatly from the specified dimensions. The reason is that insufficient suction causes the accumulation of reaction waste, which leads to a larger diameter detection error, and the uneven distribution of waste in the tube causes the etching uniformity to deteriorate. It can be seen that increasing the etching pressure will deteriorate the etching accuracy and uniformity.

[0113] Application Example 7

[0114] This application example provides a method for surface treatment of a processing device system for obtaining an energy transmission optical fiber preform rod of specified geometric dimensions provided in Example 1. The surface treatment method is the same as that of Application Example 1 except that the etching pressure in step (2) is changed to -20Pa.

[0115] The surface treatment method described in this application example results in a worse out-of-roundness of the outer diameter of the energy transfer optical fiber preform with specified geometric dimensions. It can be seen that reducing the etching pressure will increase the suction force and cause the out-of-roundness of the diameter of the energy transfer optical fiber preform to worsen.

[0116] Application Example 8

[0117] This application example provides a method for surface treatment using the processing device system provided in Example 2 to obtain an energy-transmitting optical fiber preform of specified geometric dimensions. The surface treatment method is the same as that in Application Example 1.

[0118] Compared with Application Example 1, placing the exhaust gas exhaust device at the head of the glass processing lathe 5 will make the amount of etching gas introduced unstable, affecting the etching uniformity.

[0119] Application Example 9

[0120] This application example provides a method for surface treatment using the processing device system provided in Example 3 to obtain an energy-transmitting optical fiber preform of specified geometric dimensions. The surface treatment method is the same as that in Application Example 1.

[0121] Compared with Application Example 1, omitting the filter 9 will cause the waste to be directly discharged into the outside air without being filtered, polluting the air and affecting the health of the operating staff.

[0122] In summary, the processing device system for obtaining a specified geometric size energy transmission optical fiber preform provided by the present invention realizes the surface quantitative etching treatment of the optical fiber preform by designing a combined system consisting of a three-claw sleeve sealing ring combined fixing device, a glass substrate tube, a glass processing lathe, a diameter control system including a heating electric furnace and an industrial camera, and an exhaust gas exhaust system device, so as to obtain a specified geometric size energy transmission optical fiber preform. The device system provided by the present invention can improve the problem of poor uniformity of geometric dimensions of the existing grinding processing technology by quantitatively processing the surface of the optical fiber preform in sections; no stress is applied to the rod body to solve the problem of cracking; online monitoring of the outer diameter of the preform improves the control accuracy, and no solid waste is generated, which has industrial application prospects.

[0123] The applicant declares that the above is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention shall fall within the protection scope and disclosure scope of the present invention.

Claims

1. A processing device system for obtaining a power transmission optical fiber preform of specified geometric dimensions, characterized in that: The device system includes a machine tool processing unit and an optical fiber preform rod processing unit; The optical fiber preform rod to be processed unit comprises a preform rod assembly sleeve and a three-claw sleeve sealing ring assembly device; The preform assembly sleeve includes an optical fiber preform and a glass substrate tube; the glass substrate tube is sleeved outside the optical fiber preform; the material of the glass substrate tube includes quartz; The three-claw sleeve sealing ring assembly device is arranged at both ends of the preform rod assembly sleeve; the three-claw sleeve sealing ring assembly device is used to fix the preform rod assembly sleeve; the three-claw sleeve sealing ring assembly device includes a three-claw sleeve and a sealing ring; the three-claw sleeve is arranged between the optical fiber preform rod and the sealing ring; the sealing ring is arranged between the three-claw sleeve and the glass substrate tube; the material of the sealing ring includes polytetrafluoroethylene or perfluoroether rubber; The machine tool processing unit includes a glass processing lathe, a diameter control device and an exhaust gas exhaust device; The surface treatment method using the treatment device system comprises the following steps: (1) installing the optical fiber preform to be processed unit on a glass processing lathe, rotating and heating it, and obtaining a processed optical fiber preform; (2) etching the processed optical fiber preform obtained in step (1) to obtain an energy-transmitting optical fiber preform of specified geometric dimensions and reaction exhaust gas; During the etching process, an industrial camera is used to monitor the outer diameter of the processed optical fiber preform in real time.

2. The device system according to claim 1, characterized in that: A track is arranged at the middle position of the glass processing lathe.

3. The device system according to claim 2, characterized in that: A slide is arranged on the track.

4. The device system according to claim 3, characterized in that: The slide table is provided with a diameter control device.

5. The device system according to claim 4, characterized in that: The diameter control device includes a heating electric furnace and an industrial camera.

6. The device system according to claim 5, characterized in that: The heating electric furnace includes a resistance furnace.

7. The device system according to claim 5, characterized in that: The industrial camera is arranged on a mounting platform of the heating electric furnace.

8. The device system according to claim 1, characterized in that: Chucks are respectively arranged at both ends of the glass processing lathe.

9. The device system according to claim 8, characterized in that: The chuck is used to fix the optical fiber preform to be processed unit.

10. The device system according to claim 1, characterized in that: The tail gas exhaust device is arranged at the tail of the glass processing lathe.

11. The device system according to claim 1, characterized in that: The exhaust gas exhaust device comprises an exhaust pressure gauge, a filter and an exhaust device which are installed in sequence.

12. A surface treatment method using the device system according to any one of claims 1 to 11, characterized in that: The surface treatment method comprises the following steps: (1) installing the optical fiber preform to be processed unit on a glass processing lathe, rotating and heating it, and obtaining a processed optical fiber preform; (2) etching the processed optical fiber preform obtained in step (1) to obtain an energy-transmitting optical fiber preform of specified geometric dimensions and reaction exhaust gas; During the etching process, an industrial camera is used to monitor the outer diameter of the processed optical fiber preform in real time.

13. The surface treatment method according to claim 12, characterized in that: The rotation speed of step (1) is 10-20r / min.

14. The surface treatment method according to claim 12, characterized in that: The heating temperature in step (1) is 800-1100°C.

15. The surface treatment method according to claim 12, characterized in that: The gas used in the etching process of step (2) includes a mixed gas of fluorine-containing gas and oxygen.

16. The surface treatment method according to claim 15, characterized in that: The fluorine-containing gas includes any one of carbon tetrafluoride, hexafluoroethane, and trifluoromethane, or a combination of at least two of them.

17. The surface treatment method according to claim 15, characterized in that: The gas flow rate of the fluorine-containing gas is 30-50 sccm.

18. The surface treatment method according to claim 15, characterized in that: The gas flow rate of the oxygen gas is 30-60 sccm.

19. The surface treatment method according to claim 12, characterized in that: The pressure during the etching process is -10 to -5 Pa.

20. The surface treatment method according to claim 12, characterized in that: The method further comprises using a tail gas exhaust device to remove reaction waste gas.

21. The surface treatment method according to any one of claims 12 to 20, characterized in that: The surface treatment method comprises the following steps: (1) installing the optical fiber preform to be processed unit on a glass processing lathe, rotating it at a speed of 10-20 r / min and heating it to 800-1100° C. to obtain a processed optical fiber preform; (2) etching the treated optical fiber preform obtained in step (1) at a pressure of -10 to -5 Pa to obtain an energy-transmitting optical fiber preform of specified geometric dimensions and reaction waste gas; the gas used in the etching process includes a mixed gas of fluorine-containing gas and oxygen; the gas flow rate of the fluorine-containing gas is 30-50 sccm; the gas flow rate of the oxygen is 30-60 sccm; (3) using an exhaust gas exhaust device to remove reaction waste gas; During the etching process, an industrial camera is used to monitor the outer diameter of the processed optical fiber preform in real time.

Citation Information

Patent Citations

  • Mixed acid and method for treating surface of optical fiber preform

    CN103663988A

  • Large-size low-loss optical fiber preform and manufacturing method thereof

    CN109553295A

  • Optical fiber perform processing apparatus

    CN205528425U

  • Processing device system for obtaining energy-transmitting optical fiber preform with specified geometric size

    CN218232225U