Rotary reciprocating drive actuator

Abstract

The present application provides a rotary reciprocating drive actuator, which is easy to assemble, improves output by improving electromagnetic conversion efficiency, and can drive a movable object with high amplitude. The movable magnet is annular, and is configured to have an even number of magnetic poles forming S and N poles alternately magnetized on the outer periphery of the shaft portion. The number of core magnetic poles of the magnetic poles as the core is equal to the number of magnetic poles of the movable magnet. The core magnetic poles are arranged in opposition to the movable magnet with a gap in the direction orthogonal to the shaft portion. A magnet position holding portion is provided in the drive unit. The magnet position holding portion is a magnetic body arranged in opposition to the movable magnet, and magnetically attracts the movable magnet to a reference position. The core is formed to surround the periphery of the even number of core magnetic poles, and has a shape that makes the core magnetic poles continuous. The coil body is arranged adjacent to each of the even number of core magnetic poles.

Description

Technical Field

[0001] This invention relates to a rotary reciprocating drive actuator. Background Technology

[0002] For example, rotary drive actuators are used in scanners of multifunction printers, laser beam printers, and the like. Specifically, rotary reciprocating drive actuators change the reflection angle of the laser by causing the scanner's mirror to rotate back and forth, thereby achieving optical scanning of the object.

[0003] Currently, devices using a galvano motor as such a rotary reciprocating drive actuator are disclosed in Patent Document 1, etc. As a galvano motor, in addition to the type where the coil is mounted on a reflector and is movable, various types of motors, such as the one disclosed in Patent Document 1, are known.

[0004] Patent document 1 discloses a beam scanner in which four permanent magnets are provided on a rotating shaft for mounting a reflector in a manner that is magnetized radially along the rotating shaft, and an iron core having magnetic poles with coils wound around it is arranged across the rotating shaft.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent No. 4727509 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] However, in rotary reciprocating actuators with movable coils, there are concerns that the heat generated by the coil during operation may adversely affect the surface condition of the reflector, the engagement between the reflector and the rotating shaft, and the shape of the reflector, including warping. Furthermore, in rotary reciprocating actuators with movable coils, considering the heat generated by the coil when energized, it is difficult to increase the input current to the coil, resulting in difficulties in scaling up the reflector as a movable element and achieving high amplitude. Additionally, the wiring leading to the coil needs to be routed to the fixed side relative to the movable reflector, leading to poor assembly.

[0010] Furthermore, in Patent Document 1, since the magnet is placed on the movable body side, although the problem of the above-mentioned movable coil type can be eliminated, in order to keep the magnet stationary relative to the iron core in a neutral position, that is, in order to keep the switching part of the magnet's magnetic poles located at the center of the iron core, each iron core requires two magnets, and a total of four magnets are required.

[0011] Therefore, compared to using a bipolar magnet to construct the same rotary reciprocating actuator, there is a problem that the amplitude of the movable body is smaller, i.e., the oscillation range is reduced. Furthermore, since at least four magnets are used, the number of components is larger, the structure is more complex, and assembly is more difficult.

[0012] Furthermore, in recent years, the size of mirrors, which are assumed to be movable bodies, has increased as a feature of rotary reciprocating actuators used in scanners. In this case, the structure that uses the rotary reciprocating actuator shown in Patent Document 1 to support the movable body in a cantilever manner suffers from insufficient rigidity, making it difficult to ensure impact resistance and vibration resistance.

[0013] Furthermore, when the electromagnetic conversion efficiency in the rotary reciprocating drive actuator is low, the output decreases, making it difficult to obtain the predetermined rotation angle, and high-speed drive becomes difficult.

[0014] Therefore, there is a need for a rotary reciprocating actuator that is rigid, shock-resistant, vibration-resistant, and has improved assemblability, and can achieve high amplitude.

[0015] The present invention was made with consideration of the above aspects, and provides a rotary reciprocating drive actuator that is easy to assemble, improves output by increasing electromagnetic conversion efficiency, and is able to drive movable objects with high amplitude.

[0016] Solution for solving the problem

[0017] One embodiment of the rotary reciprocating drive actuator of the present invention includes: a base portion; a movable magnet fixed to a shaft portion connected to a movable object; and a drive unit having a core and a coil body externally mounted on a portion of the core and generating magnetic flux in the core when energized. The movable magnet is driven to reciprocate by the electromagnetic interaction between the magnetic flux generated from the core and the movable magnet. The rotary reciprocating drive actuator employs the following structure: the movable magnet is ring-shaped and configured such that an even number of magnetic poles, forming S and N poles, are alternately magnetized on the outer periphery of the shaft portion, serving as the core. The number of iron core magnetic poles is equal to the number of magnetic poles of the movable magnet. The iron core magnetic poles are arranged opposite the movable magnet on the outer periphery of the movable magnet with an air gap in a direction orthogonal to the shaft. The drive unit is provided with a magnet position holding part, which is a magnetic body arranged opposite the movable magnet to attract the movable magnet to the reference position of operation. The core is formed to surround the even number of iron core magnetic poles and has a shape that makes the iron core magnetic poles continuous. The coil body is arranged adjacent to each of the even number of iron core magnetic poles in the core.

[0018] The effects of the invention are as follows.

[0019] According to the present invention, assembly is easy, and the output is improved by increasing the electromagnetic conversion efficiency, thereby enabling the high-amplitude driving of movable objects. Attached Figure Description

[0020] Figure 1 This is a perspective view of the rotary reciprocating drive actuator according to the embodiment.

[0021] Figure 2 This is an exploded 3D view of a rotary reciprocating drive actuator.

[0022] Figure 3 This was observed from the drive unit side. Figure 1 Side view of a rotary reciprocating drive actuator.

[0023] Figure 4 This is a three-dimensional view showing the structure of the drive unit.

[0024] Figure 5 This is a diagram used to illustrate a modified example of the drive unit.

[0025] Figure 6 This is an exploded perspective view of a modified example of the drive unit.

[0026] Figure 7 It is a diagram used to illustrate the operation of the magnetic circuit of a rotary reciprocating drive actuator.

[0027] Figure 8 It is a diagram used to illustrate the operation of the magnetic circuit of a rotary reciprocating drive actuator.

[0028] Figure 9 This is a perspective view of a modified example 1 of the rotary reciprocating drive actuator of the embodiment.

[0029] Figure 10 This is a longitudinal sectional view showing the main structure of the rotary reciprocating drive actuator of Modified Example 1.

[0030] Figure 11 This is an exploded perspective view showing the angle sensor section of the rotary reciprocating drive actuator of Modified Example 1.

[0031] Figure 12 This is a block diagram showing the main structure of an optical scanning device as an example of using the rotary reciprocating drive actuator of Modified Example 1.

[0032] Figure 13 This is a perspective view showing other structural examples of rotary reciprocating drive actuators.

[0033] In the picture:

[0034] 100, 100A—Rotary reciprocating drive actuator; 110—Base section; 111a, 111b—Wall section; 112—Through hole; 113—Slit hole; 114—Bearing mounting section; 120—Reflector section; 122—Reflector bracket; 124—Reflector; 122a—Through hole; 130—Angle sensor section; 131—Circuit board; 132—Light sensor; 133—Connector; 134—Encoder disk; 135—Housing; 136, 137, 251—Fixed parts; 138—Mounting parts; 141—Shaft section; 151—Ball bearing; 161—Movable magnet; 161a, 161b—Magnetic poles; 161c—Magnetic pole switching section; 200, 200A, 200B—Drive unit; 210—Core. 211—First core, 211a, 212a—Magnetic poles (iron core poles), 211b, 212b—Core, 211c, 212c—Other end, 212—Second core, 213—Relay iron core, 2132—First side, 2134—Second side, 2136—Third side, 220, 220A—Coil body, 221, 221A—First coil, 222, 222A—Second coil, 225, 225a—Spool, 225A—Spool body, 227—Coil, 230, 230A—Interval, 240—Magnet position holding part, 300—Scanning system, 301—Laser emitting part, 302—Laser control part, 303—Drive signal supply part, 304—Position control signal calculation part. Detailed Implementation

[0035] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0036] <Overall Structure of Rotary Reciprocating Drive Actuator>

[0037] Figure 1 This is a perspective view of the rotary reciprocating drive actuator 100 according to the embodiment. Figure 2 This is an exploded perspective view of the rotary reciprocating drive actuator 100.

[0038] The rotary reciprocating drive actuator 100 is used, for example, in a LiDAR (Laser Imaging Detection and Ranging) device. Furthermore, the rotary reciprocating drive actuator 100 can also be applied to optical scanning devices such as multifunction printers and laser beam printers.

[0039] The rotary reciprocating drive actuator 100 is generally divided into a base portion 110, a reflector portion 120 rotatably supported on the base portion 110, and a drive unit 200 that drives the reflector portion 120 to reciprocate.

[0040] The reflector portion 120 is part of the movable object in the rotary reciprocating drive actuator 100, and together with the shaft portion 141, constitutes a movable body. For example... Figure 1 and Figure 2 As shown, the reflector portion 120 is formed by attaching a reflector 124 to one side of the reflector bracket 122. The reflector bracket 122 has a through hole 122a, through which a shaft portion 141 is inserted to fix the reflector bracket 122 and the shaft portion 141.

[0041] The base portion 110 is composed of a component having a pair of wall portions 111a and 111b with a cross-section that is approximately "ko"-shaped (or U-shaped). Insertion holes 112 for the shaft portion 141 are formed in each of the pair of wall portions 111a and 111b. Additionally, cutout holes 113 are formed in each of the pair of wall portions 111a and 111b, communicating with the outer edges of the wall portions 111a and 111b.

[0042] Therefore, with the mirror portion 120 fixed to the shaft portion 141, the shaft portion 141 can be positioned in the insertion hole 112 via the notch hole 113. Without the notch hole 113, when the mirror portion 120 is positioned between a pair of wall portions 111a and 111b, it would be necessary to insert the shaft portion 141 into both the insertion holes 112 of the wall portions 111a and 111b and the insertion hole 122a of the mirror support 122, and also to perform a complex assembly operation to fix the shaft portion 141 to the mirror support 122. In contrast, in this embodiment, because the notch hole 113 is formed, the shaft portion 141, to which the mirror portion 120 is pre-fixed, can be easily inserted into the insertion hole 112.

[0043] Ball bearings 151 are mounted at both ends of the shaft portion 141. The ball bearings 151 are mounted in bearing mounting portions 114 at the positions of the through holes 112 formed in a pair of wall portions 111a, 111b. Thus, the shaft portion 141 is rotatably mounted to the base portion 110 via the ball bearings 151, and a reflector portion 120 is disposed between the pair of wall portions 111a, 111b.

[0044] Additionally, a movable magnet 161 is fixed to one end of the shaft portion 141. The movable magnet 161 is disposed within the drive unit 200 and is driven to reciprocate by magnetic flux generated by the drive unit 200. Specifically, the movable magnet 161, through its cooperation with the coil body 220, causes the shaft portion 141 of the movable body to reciprocate relative to the base portion 110 from an operating reference position in one direction and another around the axis.

[0045] In this embodiment, the movable body including the shaft portion 141 being in the operating reference position means that the movable magnet 161 is in a neutral position relative to the magnetic poles 211a and 212a of the excitation core 210 of the coil body 220. This neutral position is a position in which it can rotate equally in both directions around the shaft and in the other direction (forward and reverse rotation when viewed from the shaft portion 141 side).

[0046] The movable magnet 161 is ring-shaped and has an even number of magnetic poles 161a and 161b (see reference) on the outer periphery of the shaft portion 141 in a direction orthogonal to the rotation axis of the shaft portion 141, which are alternately magnetized as S poles and N poles. Figure 3 In this embodiment, the movable magnet 161 is magnetized to two poles, but it can also be magnetized to more than two poles depending on the amplitude of its movement.

[0047] The even number of magnetic poles 161a and 161b have magnetization surfaces of different polarities that face opposite directions across the shaft portion 141. In this embodiment, the magnetic poles 161a and 161b have different polarities bounded by a plane along the axial direction of the shaft portion 141.

[0048] Furthermore, the even number of magnetic poles 161a and 161b are configured to be magnetized at equal intervals on the outer periphery of the shaft portion 141.

[0049] Thus, in the movable magnet 161, an even number of magnetic poles 161a and 161b forming S poles and N poles are alternately arranged on the outer periphery of the shaft portion 141, and each magnetic pole 161a and 161b is arranged at equal intervals.

[0050] More specifically, the movable magnets 161 each have different magnetic poles 161a and 161b in their respective semi-circular portions. The arc-shaped curved surfaces of the semi-circular portions are the magnetization surfaces of the different magnetic poles 161a and 161b, and these magnetization surfaces of the different magnetic poles 161a and 161b are configured to extend circumferentially around an axis.

[0051] In other words, the magnetization surfaces of the magnetic poles 161a and 161b are arranged in a direction orthogonal to the axial direction of the shaft portion 141, and are configured to rotate so as to be opposite to the magnetic poles 211a and 212a of the first core 211 and the second core 212, respectively.

[0052] The number of magnetic poles of the movable magnet 161 is equal to the number of magnetic poles of the core 210.

[0053] When the coil body 220 is not energized, the pole switching section 161c of the movable magnet 161's magnetic poles 161a and 161b is positioned opposite the center position in the width direction of the magnetic poles 211a and 212a of the first core 211 and the second core 212. In this embodiment, the movable magnet 161 has two poles, magnetic poles 161a and 161b. When the movable magnet 161 is held at a rotational angle position by the magnet position holding section 240, the pole switching section 161c is arranged symmetrically with respect to each of the magnetic poles 211a and 212a on a line centered on the axis 141. Thus, by aligning the end of the pole switching section 161c toward the magnetic poles 211a and 212a and arranging a movable object in that direction, the rotational direction can be determined relative to the energization of the coil 227, and its torque can be maximized.

[0054] The shaft portion 141 of the reflector portion 120, which is a movable object, is supported by a pair of wall portions 111a and 111b of the base portion 110, thus supporting the reflector portion 120 from both sides. As a result, compared with the shaft portion 141 being supported by a cantilever, the support of the reflector portion 120 becomes more robust, and its impact resistance and vibration resistance can be improved.

[0055] like Figure 2 and Figure 3 As shown, the drive unit 200 has a core 210 and a coil body 220. Figure 4 This is a perspective view showing the structure of the drive unit. In this embodiment, the drive unit 200 is formed in the shape of a rectangular plate.

[0056] like Figures 2 to 4 As shown, the coil body 220 has a bobbin 225 mounted on the core 210 and a coil 227 wound on the bobbin 225. The coil body 220 is formed into a rectangular cylindrical shape by winding the coil 227 on the bobbin 225, and is configured to surround a portion of the core 210. In this embodiment, the coil body 220 has a first coil 221 and a second coil 222 formed by winding the coil 227 on the bobbin 225.

[0057] In the core 210, one end and the other end, which are energized by the coil body 220 to become magnetic poles 211a and 212a, are positioned opposite each other with a movable magnet 161 between them. In the core 210, the continuous portion between the one end and the other end that becomes magnetic poles 211a and 212a is configured to surround the magnetic pole 211a at one end and the magnetic pole 212a at the other end. The core 210 is formed to surround the magnetic poles 211a and 212a, which are an even number of iron core magnetic poles, and has a shape that makes the magnetic poles 211a and 212a continuous.

[0058] The core 210 is composed of a first core 211, a second core 212, and a relay core 213. In this embodiment, the coil body 220 is installed and inserted into each of the first core 211 and the second core 212 of the core 210. The first core 211 and the second core 212 are integrally connected by the relay core 213. When the coil of the coil body 220 is energized, the core 210 is energized.

[0059] The core 210 and the coil body 220 are fixed to the wall portion 111a of the base portion 110 via the fastener 251.

[0060] In the core 210, the first core 211, the second core 212, and the relay core 213 are all laminated cores, such as laminated silicon steel plates.

[0061] The first core 211 and the second core 212 have: magnetic poles 211a and 212a formed with a movable magnet 161 between them; and rod-shaped cores 211b and 212b, each with a magnetic pole 211a and 212a at one end and arranged parallel to each other.

[0062] The other ends 211c and 212c of the cores 211b and 212b are connected to the relay core 213. The first core 211 and the second core 212 together with the relay core 213 form the core 210 as an integral structure.

[0063] Magnetic poles 211a and 212a are arranged opposite each other across the movable magnet 161 in a direction orthogonal to the axis of the movable magnet 161. Magnetic poles 211a and 212a have curved surfaces that bend in the direction of rotation of the movable magnet 161.

[0064] The core portions 211b and 212b of the first core 211 and the second core 212 are configured to extend from each magnetic pole 211a and 212a in a direction orthogonal to both the opposing direction of the magnetic poles 211a and 212a and the extension direction of the shaft portion 141.

[0065] Coil bodies 220 are inserted externally into the cores 211b and 212b, respectively. Specifically, a first coil 221 and a second coil 222 are mounted externally on the cores 211b and 212b. The winding direction of the coil wires in the first coil 221 and the second coil 222 is set such that, when current is supplied, the magnetic flux flows appropriately from one of the magnetic poles 211a and 212a to the other.

[0066] The other end of the first core 211 is connected to one end of the first side portion 2132 of the relay core 213, which is arranged parallel to the first core 211.

[0067] The other end of the second core 212 is connected to one end of the second side portion 2134 of the relay core 213, which is arranged parallel to the second core 212.

[0068] The relay core 213 is formed to surround the movable magnet 161 and the magnetic poles 211a and 212a.

[0069] In this embodiment, the relay core 213 is formed in a U-shape with a first core 211 and a second core 212 disposed inside. The relay core 213 connects the magnetic poles 211a and 212a.

[0070] Specifically, the relay core 213 is configured such that, in addition to surrounding the magnetic poles 211a of the first core 211 and the magnetic poles 212a of the second core 212, which are opposite each other, it also surrounds the first coil 221 and the second coil 222 from three directions orthogonal to the shaft 141. The relay core 213, together with the other ends 211c and 212c of the first and second cores 211 and 212, covers the magnetic poles 211a, the first coil 221, and the second coil 222 from the remaining side orthogonal to the shaft 141.

[0071] The relay core 213 has a first side portion 2132 and a second side portion 2134, and a third side portion 2136 connecting the first side portion 2132 and the second side portion 2134 to each other. The relay core 213 integrally comprises the first side portion 2132, the second side portion 2134, and the third side portion 2136. The relay core 213 is formed by stacking magnetic materials in the same manner as the first core body 211 and the second core body 212. The relay core 213 is a stacked material with a thickness greater than that of the first core body 211 and the second core body 212. The relay core 213 corresponds to the outer periphery of the core in the core body 210, which serves as the surrounding area of ​​the magnetic poles 211a and 212a.

[0072] The third side portion 2136 connects the other end of the first side portion 2132 and the other end of the second side portion 2134, connecting the two sides with the shortest distance. As a whole, the relay core 213 has a fixing protrusion that protrudes from the corner portion formed by the two ends of the third side portion 2136 joining the first side portion 2132 and the second side portion 2134 in the extending direction of the third side portion 2136, and is formed in a U-shape.

[0073] The third side portion 2136 is a cuboid shape. The third side portion 2136 is configured to extend in the opposite direction of the first core 211 and the second core 212, that is, in the opposite direction of the magnetic poles 211a and 212a, and in a direction orthogonal to the axis of the movable magnet 161.

[0074] like Figures 1 to 4 As shown, in this embodiment, the drive unit 200 has a magnet position holding part 240.

[0075] Thus, the drive unit 200 comprises a first core 211 and a second core 212 assembled with a first coil 221 and a second coil 222, and a U-shaped relay core 213 having a first side portion 2132 to a third side portion 2136. Specifically, the core 210 has: a rod-shaped first core 211 and a second core 212, each having a core magnetic pole 211a and 212a at its respective front end, and each having a coil body 220 externally mounted; and a relay core 213 connecting the first core 211 and the second core 212. The first core 211 and the second core 212 are arranged in parallel with the core magnetic poles 211a and 212a facing each other. The relay core 213 is formed in a U-shape surrounding the first core 211 and the second core 212. The relay core 213 is configured to surround the first core 211 and the second core 212, and its two ends are engaged with the base ends of the first core 211 and the second core 212, respectively. As a result, the number of components in the core becomes the minimum, which enables low cost and improved assemblability.

[0076] The magnet position holding part 240 is composed of a magnet. The magnet position holding part 240 functions as a magnetic spring together with the movable magnet 161, utilizing the magnetic attraction generated between it and the movable magnet 161. In normal operation, the magnetic spring freely holds the movable body, including the movable magnet 161 and the shaft 141, in an operating reference position. Here, the coil body 220 is not energized in normal operation. Furthermore, the magnet position holding part 240 is magnetically attracted relative to the movable magnet 161 by the magnetic spring, so that the rotating movable magnet 161 is positioned at the operating reference position.

[0077] The reference position for the magnet position holding unit 240 to magnetically attract the movable magnet 161 is the rotation center position of the reciprocating rotation of the movable magnet 161. When the movable body is in the reference position, the pole switching unit 161c of the movable magnet 161 is located opposite to the pole on the coil body 220 side.

[0078] The magnet position holding part 240 is mounted on the third side part 2136 in a convex shape toward the movable magnet 161 side and is configured to face the movable magnet 161 with an open air gap G.

[0079] The magnet position holding part 240, for example, magnetizes the opposing surface into an N pole (see reference). Figure 6 The magnet is a movable magnet. The magnet position holding part 240 may also be integrally formed with the third side part 2136. The magnet position holding part 240 keeps the movable magnet 161 in the operation reference position and maintains it.

[0080] The magnet position holding part 240 is a magnetized magnet facing the movable magnet 161. In the operating reference position (neutral position), the magnet position holding part 240 positions the magnetic pole switching part 161c of the movable magnet 161 opposite to the magnetic poles 211a and 212a. That is, relative to the center of the length of the magnetic poles 211a and 212a in the axial direction, the magnetic pole switching part 161c, which serves as the switching position for the even number of magnetic poles 161 and 161b, is located on the same radius of the axis centered on the shaft part 141. Thus, the even number of magnetic poles 161 and 161b are in a state where they can move equally in both directions around the axis relative to the magnetic poles 211a and 212a.

[0081] In this way, the magnet position holding part 240 and the movable magnet 161 attract each other, enabling the movable magnet 161 to be positioned at the operating reference position. Consequently, the magnetic pole switching part 161c of the movable magnet 161 is aligned with the magnetic poles 211a and 212a of the first core 211 and the second core 212. In this position, the drive unit 200 generates maximum torque and stably drives the movable body. Furthermore, since the movable magnet 161 is magnetized into two poles, through its cooperation with the core 210, it is possible to easily drive the movable object with high amplitude and improve vibration performance.

[0082] Furthermore, in this embodiment, as Figures 2 to 4 As shown, the drive unit 200 has a spacer portion 230. The spacer portion 230 fixes the magnetic poles 211a and 212a to the first side portion 2132 and the second side portion 2134, which are respectively close to each other. Furthermore, the spacer portion 230 has the following function: in the core 210, it allows magnetic flux to flow appropriately through the portion of the core 210 between the magnetic poles 211a and 212a.

[0083] The spacer portion 230 is fixedly disposed on both sides of the spacer portion 230, which is sandwiched between the first core 211 and the first side portion 2132, which are arranged adjacent to each other, and between the second core 212 and the second side portion 2134. By fixing the first side portion 2132 and the second side portion 2134 to the magnetic poles 211a and 212a via the spacer portion 230, the rigidity of the core 210 itself can be improved. This suppresses deformation or damage caused by the magnetic attraction between the magnetic poles 211a and 212a and the movable magnet 161, as well as impacts.

[0084] The spacer 230 fixes the magnetic pole 211a, which is the free end of the first core 211, to the first side 2132 of the relay core 213, and fixes the magnetic pole 212a, which is the free end of the second core 212, to the second side 2134 of the relay core 213.

[0085] Furthermore, the spacer 230 restricts the flow of magnetic flux in the direction opposite to the first core 211 and the first side 2132, that is, in a direction different from the magnetic path generated by the core 210. Also, the spacer 230 restricts the flow of magnetic flux in the direction opposite to the second core 212 and the second side 2134, that is, in a direction different from the direction in which the second core 212 and the second side 2134 are continuous with each other as the magnetic path of the core 210 (the direction of magnetic flux flow).

[0086] The spacer portion 230 is preferably a non-magnetic body that does not adhere to a magnet, and the spacer portion 230 is preferably formed from raw materials such as brass or aluminum.

[0087] The spacer portion 230 is configured to be sandwiched between the first core 211 and the first side portion 2132, which are arranged adjacent to each other, and is fixed to both the first core 211 and the first side portion 2132 by bonding, welding, or the like. Thus, by using a non-magnetic and weldable component such as brass or aluminum as the raw material, the spacer portion 230 can be more firmly fixed to the core 210.

[0088] Furthermore, the spacer 230 can also be fixed to at least one of the adjacent first core 211 and first side portion 2132, or at least one of the second core 212 and second side portion 2134, by adhesive bonding. Also, for example, the spacer 230 can be integrally provided in the drive unit 200 within the first coil 221 and second coil 222 constituting the coil body 220. Additionally, the spacer 230 can be configured simply to be sandwiched between the gaps between the first core 211 and the first side portion 2132 arranged adjacent to each other, and can also be fixed.

[0089] exist Figure 5 and Figure 6 In the drive unit 200A shown, the spacer portion 230A is integrally provided on the spool 225 that constitutes the first coil 221 and the second coil 222.

[0090] The spacer portion 230A is configured such that, after the first coil 221A and the second coil 222A are respectively assembled onto the first core 211 and the second core 212, it overlaps with the back side of the magnetic poles 211a and 212a. The spacer portion 230A is integrally formed with the spool 225a, for example, using resin or the like as the spool body 225A. Furthermore, compared to the drive unit 200, the drive unit 200A differs only in the structure of the spacer portion 230A, the first coil 221A, and the second coil 222A; the other structures are the same. Therefore, only the components that differ from the drive unit 200 will be described, and the descriptions of the components that are the same will be omitted.

[0091] Therefore, the spacer 230A is positioned between the first core 211A and the first side portion 2132, and between the second core 212A and the second side portion 2134, respectively, by assembling the first coil 221A and the second coil 222A, which are coil bodies 220A, onto the core 210. In this way, by forming the spacer 230A and the spool 225 as a single unit, the number of components can be reduced, while the fixing strength of the magnetic poles 211a and 212a can be improved.

[0092] <Operation of the rotary reciprocating drive actuator 100>

[0093] Next, besides Figure 3 In addition, it also uses Figure 7 and Figure 8 The operation of the rotary reciprocating drive actuator 100 will be explained. Figure 7 and Figure 8 This is a diagram used to illustrate the operation of the magnetic circuit of the rotary reciprocating drive actuator 100.

[0094] Two magnetic poles 211a and 212a are arranged opposite each other to the movable magnet 161 with an open air gap G on the outer periphery of the movable magnet 161.

[0095] like Figure 3 As shown, when the coil body 220 (221, 222) is not energized, the movable magnet 161 is located at the operating reference position by the magnetic attraction between the magnet position holding part 240 and the movable magnet 161, i.e., the magnetic spring.

[0096] At this reference position (in this embodiment, the reference position is sometimes referred to as the normal state), one of the magnetic poles 161a and 161b of the movable magnet 161 is attracted by the magnet position holding part 240, while the magnetic pole switching part 161c is located opposite to the center position of the magnetic poles 211a and 212a of the first core 211 and the second core 212.

[0097] If the coil body 220 is energized, the coil body 220 (221, 222) will excite the first core 211 and the second core 212.

[0098] If in Figure 7 When the coil body 220 is energized in the direction shown, magnetic pole 211a is magnetized as the N pole and magnetic pole 212a is magnetized as the S pole.

[0099] As a result, in the first core 211, a magnetic flux is formed that is emitted from the magnetic pole 211a, which is magnetized to the N pole, toward the movable magnet 161, flows sequentially through the movable magnet 161, the magnet position holding part 240, the relay core 213 (third side part 2136), and enters the core 211b.

[0100] Furthermore, in the second iron core 212, magnetic flux is emitted from the core portion 212b toward the relay iron core 213 (second side portion 2134), flows sequentially through the relay iron core 213, the magnet position holding portion 240, and the movable magnet 161, and is injected into the magnetic pole 212a.

[0101] As a result, the magnetic pole 211a, magnetized as the N pole, attracts the S pole of the movable magnet 161, and the magnetic pole 212a, magnetized as the S pole, attracts the N pole of the movable magnet 161. The movable magnet 161 generates a torque in the F direction around the shaft 141, causing it to rotate in the F direction. Simultaneously, the shaft 141 also rotates, and the reflector portion 120 fixed to the shaft 141 also rotates.

[0102] Next, as Figure 8 As shown, if the energizing direction of the coil body 220 is switched to the opposite direction, the magnetic pole 211a is magnetized as the S pole and the magnetic pole 212a is magnetized as the N pole, and the flow of magnetic flux is also reversed.

[0103] As a result, the magnetic pole 211a, magnetized as the S pole, attracts the N pole of the movable magnet 161, and the magnetic pole 212a, magnetized as the N pole, attracts the S pole of the movable magnet 161. The movable magnet 161 generates a torque in the direction opposite to the F direction in the direction around the shaft 141, causing it to rotate in the opposite direction to the F direction. Simultaneously, the shaft 141 also rotates in the opposite direction, and the reflector 120, fixed to the shaft 141, also rotates in the opposite direction to the previous rotation. The rotary reciprocating actuator 100 drives the reflector 120 to reciprocate by repeatedly performing the above actions.

[0104] In fact, the rotary reciprocating drive actuator 100 is powered by a power supply unit (e.g., equivalent to...). Figure 12 The drive signal supply unit 303 inputs an AC wave to the coil body 220. That is, the energizing direction of the coil body 220 is switched periodically, alternately applying a torque in the F direction around the axis and a torque in the opposite direction (-F direction) to the movable body. As a result, the movable body is driven to reciprocate.

[0105] Furthermore, when the energizing direction is switched, a magnetic spring torque FM is generated through the magnetic attraction between the magnet position holding part 240 and the movable magnet 161, i.e., the magnetic spring. Figure 7 ) or -FM ( Figure 8 ), and apply force to the movable magnet 161 at the action reference position.

[0106] The driving principle of the rotary reciprocating drive actuator 100 will be briefly explained below. In the rotary reciprocating drive actuator 100 of this embodiment, the inertial torque of the movable body is set to J [kg·m]. 2The spring constant of the torsional direction of the magnetic spring (magnetic poles 211a, 212a, magnet position holding part 240, and movable magnet 161) is set as K. sp In this case, the movable body relative to the base portion 110 resonates at the frequency F calculated by equation (1). r [Hz] vibrates (reciprocates).

[0107] [Formula 1]

[0108]

[0109] F r Resonant frequency [Hz]

[0110] J: Torque of inertia [kg·m] 2 ]

[0111] K sp Spring constant [N·m / rad]

[0112] Since the movable body constitutes the mass component in the vibration model of the spring-mass system, if the resonant frequency F with the movable body is input to the coil body 220... r When an alternating current wave of equal frequency is input to the coil body 220, the movable body enters a resonant state. That is, by inputting the resonant frequency F of the movable body to the coil body 220 from the power supply unit... r Alternating current waves of roughly equal frequency can make a movable body vibrate efficiently.

[0113] The following shows the equations of motion and circuit equations representing the driving principle of the rotary reciprocating drive actuator 100. The rotary reciprocating drive actuator 100 is driven based on the equation of motion shown in equation (2) and the circuit equation shown in equation (3).

[0114] [Equation 2]

[0115]

[0116] J: Torque of inertia [kg·m] 2 ]

[0117] θ(t): Angle [rad]

[0118] K t Torque constant [N·m / A]

[0119] i(t): Current [A]

[0120] K sp Spring constant [N·m / rad]

[0121] D: Attenuation coefficient [N·m / (rad / s)]

[0122] T Loss Load torque [N·m]

[0123] [Formula 3]

[0124]

[0125] e(t): Voltage [V]

[0126] R: Resistance [Ω]

[0127] L: Inductance [H]

[0128] K e Back electromotive force constant [V / (rad / s)]

[0129] That is, the inertial torque J [kg·m] of the movable body in the rotary reciprocating drive actuator 100 2 Rotation angle θ(t) [rad], torque constant K t [N·m / A], current i(t) [A], spring constant K sp [N·m / rad], attenuation coefficient D [N·m / (rad / s)], load torque T Loss The values ​​[N·m] can be appropriately varied within the range satisfying equation (2). Furthermore, the voltage e(t) [V], resistance R [Ω], inductance L [H], and back electromotive force constant K... e [V / (rad / s)] can be appropriately varied within the range that satisfies equation (3).

[0130] Thus, the rotary reciprocating drive actuator 100 operates by means of the inertial torque J of the movable body and the spring constant K of the magnetic spring. sp When the AC wave corresponding to the determined resonant frequency Fr is energized to the coil, a highly efficient and large vibration output can be obtained.

[0131] According to the rotary reciprocating drive actuator 100 of this embodiment, since the torque generation efficiency is high, heat is difficult to transfer to the reflector 124, which is the movable object. As a result, the flatness accuracy of the reflective surface of the reflector 124 can be ensured. Furthermore, even in cases where manufacturability is high, assembly accuracy is high, and the movable object is a large reflector, high-amplitude driving can be achieved.

[0132] Furthermore, according to the rotary reciprocating drive actuator 100, between a pair of wall portions 111a and 111b of the base portion 110, the reflector portion 120, which is arranged via the shaft portion 141, is supported by the drive unit 200 on one side of the shaft portion 141 so that it can rotate and reciprocate.

[0133] Therefore, the rotary reciprocating drive actuator 100 itself can be reduced in size according to the size of the reflector portion 120, which is a movable object, so that it can be used efficiently even in narrow configuration spaces. Furthermore, since the drive unit 200 is only disposed on one side of the pair of wall portions 111a and 111b separated from the reflector portion 120, the wiring and other components of the coil 227 can be simplified.

[0134] <Variation Example 1>

[0135] Figures 9-11 This is a diagram illustrating a rotary reciprocating drive actuator 100A, which is a modified example 1 of a rotary reciprocating drive actuator. Figure 9 This is a perspective view of the rotary reciprocating drive actuator 100A as a variation of Example 1. Figure 10 This is a longitudinal sectional view showing the main structural components of the rotary reciprocating drive actuator 100A. Furthermore, Figure 11 This is an exploded perspective view showing the angle sensor section 130 of the rotary reciprocating drive actuator 100A.

[0136] The rotary reciprocating drive actuator 100A includes an angle sensor unit 130 in the structure of the rotary reciprocating drive actuator 100.

[0137] Angle sensor 130 detects the rotation angle of shaft 141 and is installed on the side of wall 111b of a pair of wall portions 111a and 111b of base 110 where the drive unit 200 is not installed.

[0138] Furthermore, the rotary reciprocating drive actuator 100A is substantially the same as the rotary reciprocating drive actuator 100 in terms of its structure, except for the presence of the angle sensor unit 130. Therefore, in the following description of the rotary reciprocating drive actuator 100A, the description of the angle sensor unit 130 will be the main focus, and the description of other components, i.e., components that are the same as those in the rotary reciprocating drive actuator 100, will be omitted.

[0139] The angle sensor unit 130 includes a circuit board 131, a light sensor 132 and a connector 133 mounted on the circuit board 131, an encoder disk 134, and a housing 135. The circuit board 131 is fixed to the housing 135 by a fastener 136. The housing 135 is fixed to the wall portion 111b by a fastener 137.

[0140] The encoder disk 134 is fixedly mounted on the shaft portion 141 via the mounting member 138, and rotates integrally with the movable magnet 161 and the reflector portion 120. Specifically, the mounting member 138 has an insertion hole for the shaft portion 141 to be inserted and fixed, and a flange portion for the encoder disk 134 to abut and be fixed to both the shaft portion 141 and the encoder disk 134. As a result, the rotational position of the encoder disk 134 is the same as the rotational position of the shaft portion 141. The optical sensor 132 emits light towards the encoder disk 134 and detects the rotational position (angle) of the encoder disk 134 based on its reflected light. Thus, the rotational position of the movable magnet 161 and the reflector portion 120 can be detected by the optical sensor 132. In this way, the rotational angle of the movable body, including the movable magnet 161 and the shaft portion 141, can be detected, thereby enabling angular position and speed control of the movable body, specifically the reflector portion 120 which is the movable object, during drive.

[0141] In the rotary reciprocating drive actuator 100A, a drive unit 200, including a movable magnet 161 with a movable body, a coil body 220, and a core 210, is mounted on the outer surface of one of the pair of wall portions 111a and 111b of the base portion 110. Conversely, an angle sensor 130, which detects the rotation angle of the shaft portion 141, is mounted on the outer surface of the other of the pair of wall portions 111a and 111b of the base portion 110. This facilitates the disassembly and reassembly adjustment of the angle sensor 130. Because the angle sensor 130 is easy to disassemble, it can be easily replaced if it malfunctions.

[0142] Furthermore, the angle sensor unit 130 can be assembled in the final stage of assembly. As a result, since the expensive angle sensor unit 130 can be assembled after confirming that the assembly of other components is normal, the risk of wasting the expensive angle sensor unit 130 due to poor assembly of other components can be suppressed. In addition, the rotary reciprocating drive actuators 100 and 100A of this embodiment are used in scanners capable of optical scanning, and can perform resonant drive, but can also perform non-resonant drive.

[0143] Figure 12 This is a block diagram showing the main structural components of a scanner system using the rotary reciprocating drive actuator 100A of Modified Example 1.

[0144] As an example of an optical scanning device, the scanning system 300 includes a rotary reciprocating drive actuator 100A, a laser emission unit 301, a laser control unit 302, a drive signal supply unit 303, and a position control signal calculation unit 304.

[0145] The laser emitting unit 301 is composed, for example, of an LD (laser diode) that serves as a light source and a lens system for focusing the laser light output from the light source. The laser control unit 302 controls the laser emitting unit 301. The laser light obtained by the laser emitting unit 301 is directed into the reflector 124 of the rotary reciprocating drive actuator 100.

[0146] The position control signal calculation unit 304 generates and outputs a drive signal to control the shaft 141 (reflector 124) to the target angle position by referring to the angular position of the shaft 141 (reflector 124) obtained by the angle sensor unit 130 and the target angle position. For example, the position control signal calculation unit 304 generates a position control signal based on the obtained angular position of the shaft 141 (reflector 124) and the target angle position converted using sawtooth waveform data stored in a waveform memory (not shown), and outputs the position control signal to the drive signal supply unit 303.

[0147] The drive signal supply unit 303 supplies a drive signal to the coil body 220 of the rotary reciprocating drive actuator 100 based on the position control signal, so that the angular position of the shaft 141 (reflector 124) is the desired angular position. As a result, the scanning system 300 can emit scanning light from the rotary reciprocating drive actuator 100A into a predetermined scanning area.

[0148] <Variation Example 2>

[0149] Figure 13 This is a perspective view showing a modified example 2 of the rotary reciprocating drive actuator of this embodiment.

[0150] In addition to having the structure of the rotary reciprocating drive actuator 100, the rotary reciprocating drive actuator 100B of Modification 2 also has other drive units 200B configured in the same way as the drive unit 200.

[0151] That is, the rotary reciprocating drive actuator 100B has a base portion 110, a reflector portion 120 rotatably supported on the base portion 110 via a shaft portion 141, and drive units 200 and 200B disposed at both ends of the shaft portion 141 and driving the reflector portion 120 to reciprocate.

[0152] At the other end of the shaft portion 141, a movable magnet 161 is mounted in the same manner as at one end, and a drive unit 200B is provided corresponding to the movable magnet 161, similar to the drive unit 200 at one end of the shaft portion 141. Furthermore, when current is supplied to the drive unit 200, the drive unit 200B is driven in a reciprocating rotation manner that is the same as the reciprocating rotation of the movable magnet 161 performed by the drive unit 200.

[0153] In the rotary reciprocating drive actuator 100B, the reflector portion 120, which is a movable object, is disposed between a pair of wall portions 111a and 111b via ball bearings 151. It can be said that the reflector portion 120 is disposed in a position clamped by the ball bearings 151 and is held by the pair of wall portions 111a and 111b via the ball bearings 151.

[0154] In this way, since the reflector portion 120, which is a movable object, is clamped by the ball bearing 151, it can be stably maintained even when the reflector portion 120 is enlarged. It has excellent impact resistance and vibration resistance, and can improve the reliability of the drive.

[0155] Furthermore, since the reflector section 120 is supported by drive units 200 and 200B on both sides of the shaft section 141 supporting the reflector section 120 and can rotate freely, it can generate a greater driving force compared to a structure with drive units 200 and 200A on one side.

[0156] <Summary>

[0157] As described above, the rotary reciprocating drive actuator 100 of this embodiment includes: a base portion 110; a movable magnet 161 fixed to a shaft portion 141 connected to a movable object (in the example of this embodiment, a reflector portion 120); and a drive unit 200 having a core 210 and a coil body 220 that generates magnetic flux in the core 210 when energized, and driving the movable magnet 161 to reciprocate by utilizing the electromagnetic interaction between the magnetic flux generated from the core 210 and the movable magnet 161.

[0158] Furthermore, the rotary reciprocating drive actuator 100 is configured such that the movable magnet 161 is formed in a ring shape, and an even number of magnetic poles, forming S and N poles, are alternately magnetized on the outer periphery of the shaft portion 141. The number of magnetic poles of the core 210 is equal to the number of magnetic poles of the movable magnet 161, and the even number of magnetic poles of the core 210 and the movable magnet 161 are respectively arranged opposite each other on the outer periphery of the shaft portion 141 with an air gap. The drive unit 200 is provided with a magnetic body arranged opposite to the movable magnet 161, and a magnet position holding part 240 that magnetically attracts the movable magnet 161 to a reference position.

[0159] Therefore, the movable magnet 161 is magnetically attracted to the neutral position (operation reference position) by the magnet position holding part 240 each time the energizing direction is switched, resulting in good energy efficiency, good responsiveness, and high-amplitude reciprocating rotation drive. Furthermore, compared with coil-movable type rotary reciprocating drive actuators, the heat generated by the coil body 220 is less likely to be transferred to the movable object. When the movable object is a reflector, adverse heat-related effects on the reflector (such as joint deterioration and warping) can be avoided.

[0160] In the core 210 of the drive unit 200, magnetic poles 211a and 212a are respectively arranged opposite each other with a movable magnet 161 between them. The first coil 221 and the second coil 222 are respectively arranged adjacent to the magnetic poles 211a and 212a and are externally mounted on the core 210. Furthermore, the other ends 211c and 212c of the first core 211 and the second core 212, which are mounted on the first coil 221 and the second coil 222, are connected to the relay core 213. The relay core 213 is configured to surround the first coil 221, the second coil 222, the magnetic poles 211a and 212a, and the movable magnet 161 in a direction orthogonal to the shaft 141. The core 210 is formed to surround the magnetic poles 211a and 212a, which are an even number of core magnetic poles, and has a shape that makes the magnetic poles 211a and 212a continuous.

[0161] For example, in the core 210, the magnetic poles 211a and 212b are separated by a movable magnet 161 in a direction orthogonal to the shaft 141. Furthermore, adjacent to the magnetic poles 211a and 212b, a first coil body 221 and a second coil body 222 are arranged extending in a direction orthogonal to the shaft 141 and to the opposing directions of the magnetic poles 211a and 212b. Moreover, the portions of the relay core 213 connected to the first to third sides 2132, 2134, 2136 and the other ends 211c and 212c, and the other ends 211c and 212c, surround the magnetic poles 211a and 212b, the first coil body 221, and the second coil body 222 in a direction orthogonal to the shaft 141.

[0162] In the core 210, coil bodies 220 (first coil 221 and second coil 222) are arranged adjacent to or close to the magnetic poles 211a and 212a, and the magnetic circuit connecting the magnetic poles 211a and 212a is formed with the shortest distance in a manner that surrounds them.

[0163] Therefore, it is possible to improve the magnetic conversion efficiency in the magnetic circuit and thus improve the output.

[0164] In addition, the rotary reciprocating drive actuator 100 of this embodiment has a pair of wall portions 111a and 111b that are vertically provided on the base portion 110 and support the shaft portion 141 to rotate freely via a bearing 151. A movable object (in the example of this embodiment, a reflector portion 120) is arranged between the pair of wall portions 111a and 111b.

[0165] Therefore, the movable object (reflector part 120) is configured to be held stably by ball bearings 151 on both sides of the movable object, thereby improving the reliability of the actuator 100 as a rotary reciprocating drive.

[0166] Furthermore, the angle sensor 130, which detects the rotation angle of the shaft 141, is mounted on the outer surface of the other wall 111b of the pair of wall portions 111a and 111b. This facilitates the disassembly and adjustment of the angle sensor 130's position. Because disassembly of the angle sensor 130 is easy, it can be easily replaced if a malfunction occurs. Furthermore, the angle sensor 130 can be assembled during the final stage of assembly. As a result, since the expensive angle sensor 130 can be assembled after confirming that the assembly of other components is correct, the risk of wasting the expensive angle sensor 130 due to poor assembly of other components can be mitigated.

[0167] In one embodiment of the present invention, the magnet position holding part 240 magnetically attracts the movable magnet 161, and in normal operation, the operating reference position of the movable magnet 161 is the rotation center position of the movable magnet 161 reciprocating around the axis part 141.

[0168] In one embodiment of the invention, the movable magnet 161 has an even number of magnetic poles equally spaced on the outer periphery of the shaft portion 141. In another embodiment of the invention, the magnet position holding portion 240 is disposed between the even number of magnetic poles of the core 210 and is positioned radially opposite to the movable magnet 161. With the above structure, the movable magnet 161, i.e., the movable body including the shaft portion 141, can rotate and reciprocate around the axis in the same angular range from a neutral position, thereby maximizing the driving torque and stabilizing the direction of the driving torque.

[0169] The above-described embodiments are merely one example of specific implementations of the present invention, and the technical scope of the present invention should not be limited by the above-described embodiments. That is, the present invention can be implemented in various forms without departing from its spirit or main features.

[0170] In the above embodiment, the case where the wall portion 111b of the mounting angle sensor portion 130 is integrally formed with the base portion 110 has been described. However, the wall portion of the mounting angle sensor portion 130 may not be integrally formed with the base portion 110, but may be a wall portion that is subsequently mounted on the base portion.

[0171] In the above embodiment, the case where the drive units 200, 200A, and 200B are mounted on the outer surface side of the wall portions 111a and 111b has been described, but the position of the drive units 200, 200A, and 200B is not limited to this. For example, the drive unit 200 may also be mounted on the inner surface side of the wall portion 111a.

[0172] In the above embodiment, the movable object driven by the rotary reciprocating drive actuator 100, i.e., the movable object mounted on the shaft portion 141, is described as the reflector portion 120, but the movable object is not limited to this. For example, a camera or the like can also be a movable object.

[0173] Industrial availability

[0174] This invention is applicable, for example, to optical scanning devices.

Claims

1. A rotary reciprocating drive actuator, comprising: Base section; A movable magnet, which is fixed to a shaft connected to a movable object; and The drive unit has a core and a coil body externally mounted on a portion of the core, which generates magnetic flux in the core when energized. It drives the movable magnet to reciprocate by utilizing the electromagnetic interaction between the magnetic flux generated from the core and the movable magnet. The aforementioned rotary reciprocating drive actuator is characterized by the following: The aforementioned movable magnet is formed in a ring shape, and is configured such that an even number of magnetic poles, forming S and N poles, are alternately magnetized on the outer periphery of the aforementioned shaft portion. The number of iron core magnetic poles that serve as the magnetic poles of the aforementioned core is equal to the number of magnetic poles of the aforementioned movable magnet. The aforementioned iron core magnetic poles are arranged opposite the aforementioned movable magnet on the outer periphery of the aforementioned movable magnet in a direction orthogonal to the aforementioned shaft portion with an air gap. The drive unit is provided with a magnet position holding part, which is a magnetic body disposed opposite to the movable magnet, and magnetically attracts the movable magnet to the reference position for operation. The core is formed to surround an even number of the aforementioned iron core poles, and has a shape that makes the iron core poles continuous. The coil body is arranged adjacent to each of the even number of the aforementioned iron core magnetic poles in the core body. The aforementioned iron core poles are arranged with an open gap to the outer periphery of the iron core, which surrounds the aforementioned iron core poles. A spacer portion is provided in the gap between the magnetic poles of the iron core and the outer periphery of the iron core.

2. The rotary reciprocating drive actuator according to claim 1, characterized in that, The reference position for the magnet position holding part to magnetically attract the movable magnet is the rotation center position of the reciprocating rotation of the movable magnet.

3. The rotary reciprocating drive actuator according to claim 1, characterized in that, The aforementioned iron core magnetic poles are fixed to the outer periphery of the aforementioned iron core via the aforementioned spacing portion.

4. The rotary reciprocating drive actuator according to claim 1, characterized in that, The aforementioned gap is fixed to both sides by being sandwiched between the aforementioned iron core magnetic pole and the aforementioned outer periphery of the iron core.

5. The rotary reciprocating drive actuator according to claim 1 or 3, characterized in that, The aforementioned spacing portion and the aforementioned coil body are integrally constructed.

6. The rotary reciprocating drive actuator according to any one of claims 1, 3, and 4, characterized in that, The aforementioned spacer portion is a non-magnetic material.

7. The rotary reciprocating drive actuator according to any one of claims 1 to 4, characterized in that, The aforementioned core has: The first and second cores are rod-shaped, each having the aforementioned iron core magnetic poles at its front end, and each having the aforementioned coil body externally mounted on it, arranged side by side with the aforementioned iron core magnetic poles facing each other. as well as The relay core is a magnetic body, which is formed in a U-shape surrounding the first core and the second core, with both ends connected to the base ends of the first core and the second core, respectively.

8. The rotary reciprocating drive actuator according to any one of claims 1 to 4, characterized in that, It has an angle sensor unit that detects the rotation angle of the aforementioned shaft.

9. The rotary reciprocating drive actuator according to any one of claims 1 to 4, characterized in that, The movable object is positioned in a position clamped by a bearing, and an actuator is provided on one or both sides.

10. The rotary reciprocating drive actuator according to any one of claims 1 to 4, characterized in that, The movable object is a mirror that reflects the scanning light.

Images