Air pressure environment maintaining structure, scanning electron microscope and air pressure environment maintaining method

Abstract

The present application discloses an air pressure environment maintaining structure, a scanning electron microscope, and an air pressure environment maintaining method, which are applied to an indoor studio with a target air pressure requirement, and include: a through-piece, which passes through a through-hole connected to the indoor space of the studio and can move within the through-hole, wherein the control end of the through-piece for controlling displacement is located outdoors, and the bearing end for bearing samples is located indoors; a sealing component, which is arranged between the through-piece and the through-hole to seal and isolate the indoor and outdoor areas of the studio. The air pressure environment maintaining structure and method provided by the present application allows staff to move samples in the studio through external operation, while ensuring that the specific air pressure environment is always isolated from the external environment during the movement, ensuring that the specific air pressure environment required for work is effectively maintained in the studio for a long time, improving work efficiency, and simplifying work operations.

Description

Technical Field

[0001] The present application relates to the field of sealing technology, and in particular to an air pressure environment maintaining structure, a scanning electron microscope having the air pressure environment maintaining structure, and a method for maintaining an air pressure environment. Background Art

[0002] During the working process, many processes or certain types of operations have special requirements for the atmospheric pressure environment. They need to work in a specific atmospheric pressure environment. The stability of this atmospheric pressure environment has a significant impact on the accuracy of the operating results. Therefore, many types of equipment, especially those that require some work in a high vacuum environment, have high requirements for the sealing and isolation of the atmospheric pressure environment.

[0003] The object being implemented (i.e., the sample) needs external interference to enter and exit a specific air pressure environment (i.e., the air pressure studio) or move within the air pressure studio. If the air pressure studio is connected to the outside or the connection time is long during the movement, the specific air pressure environment in the air pressure studio will be destroyed, and the specific air pressure state will need to be restored before work can continue, which consumes time and manpower and reduces work efficiency.

[0004] Therefore, how to maintain a specific air pressure environment in the working chamber when moving the sample has become a technical problem that technicians in this field have been committed to studying. Summary of the Invention

[0005] In view of this, the present application provides an air pressure environment maintenance structure and an air pressure environment maintenance method, which allows personnel to move samples within the studio through external operation, while ensuring that the specific air pressure environment is always isolated from the external environment during the movement, ensuring that the specific air pressure environment required for work is effectively maintained in the studio for a long time, improving work efficiency and simplifying work operations. The present application also provides a scanning electron microscope having the above-mentioned air pressure environment maintenance structure.

[0006] In order to achieve the above-mentioned purpose, the present application provides the following technical solutions: an air pressure environment maintaining structure, applied to an indoor studio with a target air pressure requirement, comprising: a through-piece, passing through a through-hole connecting the indoor space of the studio and capable of moving within the through-hole, the control end of the through-piece for controlling the displacement being located outdoors, and the carrying end for carrying the sample being located indoors; a sealing component, arranged between the through-piece and the through-hole, to seal and isolate the indoor and outdoor spaces of the studio.

[0007] Optionally, the sealing component includes a sealing ring that seals the gap between the through hole and the through piece.

[0008] Optionally, the penetration member is configured as a penetration rod slidably passing through the penetration hole, and the sealing component further includes a sealing protective sleeve that seals the gap between the penetration hole and the penetration rod and is sleeved on the penetration rod.

[0009] Optionally, a sample chamber for taking and placing samples is further included, and the sample chamber is connected to the working chamber through a transmission channel for sample entry and exit, and the sample chamber and the transmission channel are both within the moving range of the carrying end.

[0010] Optionally, a sealing isolation component for opening or closing the transmission channel is also included.

[0011] Optionally, it further includes a sliding channel formed outside the working room and for the through rod to slide, wherein the sliding channel is communicated with the through hole and is sealed with the outer wall of the working room.

[0012] Optionally, a through seat is further included, which is arranged on the outer wall of the working room, and the through hole is arranged on the through seat and is connected to the transmission channel on the wall of the working room.

[0013] A scanning electron microscope comprises a studio and an air pressure environment maintaining structure applied to the studio, characterized in that the studio is the studio described above, and the air pressure environment maintaining structure is the air pressure environment maintaining structure described above.

[0014] A method for maintaining an air pressure environment is applicable to the air pressure environment maintaining structure described above, the method comprising the following steps: setting the gap between the through-piece and the through-hole, and calculating the sealing ring compression amount C; obtaining the sealing ring according to the sealing ring compression amount C; and arranging the sealing ring in the gap between the through-piece and the through-hole to achieve a movable seal between the through-piece and the through-hole.

[0015] Optionally, the through-piece is set as a through-rod, and a sealing protective sleeve is provided between the through-rod and the through-hole, and is sleeved on the through-rod. The setting of the sealing protective sleeve, the sealing ring and the aperture includes the following steps: determining the gap Δ1 between the inner diameter D1 of the sealing protective sleeve and the diameter d1 of the through-rod, and the gap Δ2 between the large diameter D2 of the through-hole and the outer diameter d2 of the sealing protective sleeve, the sum of Δ1 and Δ2 being the total gap Δ; determining the sealing ring compression amount C according to the multiple of the total gap Δ, and setting the sealing ring diameter dx according to the sealing ring compression amount C and the set sealing compression ratio, and the sealing compression ratio is set within the range of 8%-20%; determining D1, D2, d1 and d2, and determining the small diameter D0 of the through-hole according to the formula D0≥d1+C.

[0016] In the technical solution provided by the present application, the air pressure environment maintaining structure includes a through-piece that penetrates into the through-hole of the studio and is movably arranged. One end of the through-piece penetrates into the studio to carry samples, and the other end is the control end and is located outdoors. By controlling the through-piece, the indoor sample can be moved without opening the studio, reducing the need for opening and closing operations of the studio and reducing the degree of damage to the indoor environment; at the same time, the gap between the through-piece and the through-hole of the studio is sealed by a sealing component to achieve a mobile sealing function, ensuring that no air pressure leakage will be generated at the through-hole during the movement of the through-piece; in this way, through the air pressure environment maintaining structure, the studio can always be isolated from the outside world when the target object is transferred indoors, thereby effectively maintaining the required air pressure state and air pressure environment in the studio, improving the time and state of the equipment to maintain the working requirements of this link, improving work efficiency, and facilitating the staff to perform operations simply and efficiently. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without any creative work.

[0018] Figure 1 A cross-sectional schematic diagram of a first application of the air pressure environment maintaining structure in an embodiment of the present invention;

[0019] Figure 2 A cross-sectional schematic diagram of a second application of the air pressure environment maintaining structure according to an embodiment of the present invention;

[0020] Figure 3 for Figure 2 Schematic diagram of the external connections of the medium-pressure environment maintenance structure;

[0021] Figure 4 This is a schematic diagram of an exploded view of the air pressure environment maintaining structure in an embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of the first angle of the air pressure environment maintaining structure in an embodiment of the present invention;

[0023] Figure 6 This is a second-angle overall schematic diagram of the air pressure environment maintaining structure in an embodiment of the present invention;

[0024] Figure 7 2 is a cross-sectional view of the air pressure environment maintaining structure in an embodiment of the present invention.

[0025] exist Figure 1-Figure 7 middle:

[0026] 1-working room, 11-transmission channel, 2-through rod, 21-control end, 22-bearing end, 3-sealing protective sleeve, 4-sealing ring, 5-through seat, 51-through hole, 52-docking shaft, 6-sample chamber, 7-connecting seat, 71-sliding channel, 8-sealing element. DETAILED DESCRIPTION

[0027] This application provides a pressure environment maintenance structure and method, which allows personnel to move samples within a workroom through external operation, while ensuring that the specific pressure environment remains isolated from the external environment during the movement of the object, ensuring that the specific pressure environment required for work is effectively maintained in the workroom for a long time, improving work efficiency and simplifying work operations. This application also provides a scanning electron microscope having the above-mentioned pressure environment maintenance structure.

[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0029] like Figure 1-Figure 7 As shown, an embodiment of the present application provides an air pressure environment maintaining structure, which is applied to a studio 1 with a target air pressure requirement indoors. The air pressure environment maintaining structure includes a through-piece and a sealing component, wherein the through-piece passes through a through-hole 51 provided on the wall of the studio 1 and connected to the indoor space of the studio 1, and can move in the through-hole 51. The control end 21 of the through-piece for controlling the displacement of the through-piece is located outdoors, and the carrying end 22 for carrying the sample is located indoors. In this way, the movement of the through-piece can be controlled outside the studio 1, and the movement of the through-piece will drive the sample on its carrying end 22 to move indoors, completing the change of the sample position, so that there is no need to open the studio 1 to move the sample, and will not cause damage to the indoor air pressure environment; at the same time, the sealing component is arranged between the through-piece and the through-hole 51 to seal the gap between the through-piece and the through-hole 51, so that the gap is effectively sealed during the movement of the through-piece, and no air pressure leakage will be generated at the through-hole 51, and the indoor and outdoor of the studio 1 are kept sealed and isolated.

[0030] With such a configuration, the air pressure environment maintaining structure provided in this embodiment can realize the movement of indoor samples without opening the studio 1 by manipulating the through-piece, thereby reducing the need for opening and closing operations of the studio 1 and reducing the degree of damage to the indoor environment; at the same time, the gap between the through-piece and the through-hole 51 of the studio 1 is sealed by the sealing component to realize the mobile sealing function, thereby ensuring that no air pressure leakage will be formed at the through-hole 51 during the movement of the through-piece; thus, the air pressure environment maintaining structure of this embodiment realizes the effect that when the sample is transferred indoors, the studio 1 can always be kept isolated from the outside world, effectively maintains the required air pressure state and air pressure environment in the studio 1, improves the time and state of the equipment to maintain the working requirements of this link, improves the working efficiency, and also facilitates the staff to perform operations simply and efficiently.

[0031] The air pressure environment maintenance structure of the above-mentioned embodiment has a sealable, perforated and movable penetration function. By manipulating the penetration, the sample inside the chamber can be moved without opening the chamber 1. This ensures that the chamber 1 remains isolated from the outside world even when the sample is transferred indoors. Furthermore, this embodiment also provides an implementation structure that reduces the degree of damage to the air pressure inside the chamber 1 during sample removal and placement operations. This further maintains the required air pressure state and air pressure environment within the chamber 1, increases the time and state that the equipment can maintain the required working conditions in this link, and improves operational efficiency.

[0032] In this embodiment, Figure 2 and Figure 3 As shown, the air pressure environment maintaining structure also includes a sample chamber 6 for taking and placing samples. The sample chamber 6 is provided with a sample port for sample entry and exit and a chamber door for opening or closing the sample port. At the same time, the sample chamber 6 is connected to the working room 1 through a transmission channel 11 for sample entry and exit. The sample chamber 6 and the transmission channel 11 are both within the moving range of the through-piece carrier end 22. The carrier end 22 can move between the two chambers with the sample through the transmission channel 11 to achieve the transfer of the sample between the two chambers. The through hole 51 is provided on the wall of the working room 1 or on the wall of the sample chamber 6, that is, the through-piece can be connected to the working room 1 or to the sample chamber 6. Furthermore, a sealing isolation component for opening or closing the transmission channel 11 is provided between the two chambers.

[0033] When a specific air pressure is preset in the studio 1, the studio 1 is isolated from the outside by sealing the transfer channel 11 through the sealing isolation component, and the required air pressure can be maintained. The air pressure in the sample chamber 6 can be preset to be the same as that in the studio 1, or it can be preset to an air pressure environment between the outside atmosphere and the air pressure in the studio 1. When it is necessary to put in a sample, the seal of the transfer channel 11 is maintained, the sample chamber 6 is opened, the sample is placed in the sample chamber 6 and placed on the supporting end 22 of the through-piece. After sealing the sample port of the sample chamber 6, the transfer channel 11 is opened, the sample is moved into the studio 1 through the through-piece, and then the through-piece is quickly moved out of the studio 1 and the transfer channel 11 is sealed. When it is necessary to take out the sample in the studio 1, first keep the sample port sealed, then open the transfer channel 11, quickly move the sample out of the studio 1 through the through-piece, and then quickly seal the transfer channel 11. Then, open the sample port, take out the sample and seal it again. With such an arrangement, the opening and closing time of the studio 1 is minimized during the process of taking and placing samples. Since the air pressure in the sample chamber 6 is close to the air pressure in the studio 1, when the studio 1 is opened, the destructiveness to the air pressure in the studio 1 is also reduced. Therefore, the air pressure environment maintaining structure provided in this embodiment realizes the function of significantly reducing the degree of damage to the indoor air pressure of the studio 1 during the process of taking and placing samples, which is extremely destructive to the indoor air pressure in the prior art. It can enable the studio 1 to quickly restore the required working environment and improve the work efficiency of the process performed in the studio 1, especially when a high vacuum environment is required in the studio 1. Since the recovery speed of the high vacuum environment is slow, if the studio 1 is opened for a long time, it will seriously affect the efficiency of the process in the studio 1. Applying the air pressure environment maintaining structure provided in this embodiment to the sealing isolation of the studio 1 with high vacuum requirements can significantly and effectively improve the high vacuum environment maintenance effect in the room and improve work efficiency.

[0034] At the same time, no matter whether the through piece is movably connected to the sample chamber 6 or the working chamber 1, the sealing component has a good sealing function between the through piece and the through hole 51, and thus will not cause damage to the indoor air pressure, and the structural performance is excellent.

[0035] Regardless of whether the through piece is used in a separate working chamber 1 or in a working condition with both the sample chamber 6 and the working chamber 1, specifically, the sealing component may include a sealing rubber pad, which is laid around the through hole 51 and wraps the through piece in the circumferential direction. Figure 1 and Figure 2As shown, in this embodiment, the sealing component includes a sealing ring 4 that seals the gap between the through hole 51 and the through piece. The sealing ring 4 can be mounted on the through piece or embedded in the inner wall of the through hole 51. The use of the sealing ring 4 for sealing does not result in any butting or splicing gaps in the circumferential direction. Its one-piece structure can better ensure a good sealing effect, and it can be directly mounted on the through piece, making it easier to implement. For example, in a preferred embodiment in which the sealing component includes the sealing ring 4, the sealing ring 4 is mounted on the through piece and plugged into the through hole 51. With this arrangement, a good sealing effect can be ensured by simply ensuring that the sealing ring 4 and the through hole 51 are tightly matched in size. Compared to embedding the sealing ring 4 in the hole wall, this method does not require a groove on the hole wall to accommodate the sealing ring 4, thus avoiding a tedious processing process and making it easier to form the structure.

[0036] The through-piece can be a rod or other types. When it is a rod, it slides and displaces in the through-hole 51. When it is other types of structures such as a plate or a sphere, it can slide or rotate in a hinged manner, which can be set according to the specific situation.

[0037] In order to ensure the smooth displacement of the sample in the studio 1 and to ensure the normal movement of the through-piece in the through-hole 51 while ensuring sealing, in this embodiment, the through-piece is configured as a through-rod 2 that is slidably disposed in the through-hole 51. One end of the through-rod 2 is located outdoors and forms the above-mentioned control end 21, and the other end passes through the through-hole 51 and is located inside the studio 1 and forms the above-mentioned bearing end 22, which is used to carry and drive the sample displacement. In this way, by pushing and pulling the through-rod 2, the displacement can be performed to adjust the position of the sample in the room, which is not only convenient for operation and control, but also smooth and stable. The control end 21 can be provided with an operating handle for easy gripping by the staff, and the bearing end 22 can be provided with a bearing component for carrying the sample. The bearing component is specifically set according to the specific application requirements.

[0038] At the same time, the sealing component includes not only a sealing ring 4 mounted on the through-rod 2, but also a sealing protective sleeve 3 mounted on the through-rod 2 to seal the gap between the through-hole 51 and the through-rod 2. The sealing protective sleeve 3 and the sealing ring 4 are arranged axially along the through-rod 2. The inner and outer diameters of the sealing protective sleeve 3 and the sealing ring 4 are respectively matched to the outer diameter of the through-rod 2 and the inner diameter of the through-hole 51. This arrangement, on the one hand, the sealing protective sleeve 3 and the sealing ring 4 jointly seal the gap between the through-rod 2 and the through-piece, thereby improving the sealing effect. On the other hand, the sealing protective sleeve 3 has an axial length, providing a sealed movement space with an axial length for the moving through-rod 2. In other words, when the through-rod 2 slides axially, the gap in the displacement path is effectively sealed in the axial direction with a guaranteed length, ensuring both the sealing effect and the normal sliding of the through-rod 2. This solves the problem in the prior art that the through-piece is easily unstable under conditions of frequent movement, resulting in an inability to form an effective seal and a destruction of the air pressure environment.

[0039] The through hole 51 can be a through hole directly opened on the wall of the studio 1, and the connection between the sealing ring 4, the sealing protection sleeve 3 and the through rod 2 and the through hole 51 can be directly processed on the studio 1. However, if the equipment with the studio 1 is large or not suitable for frequent flipping or moving, it is inconvenient to perform processing operations such as connection and sealing of the various components with the through hole 51. Therefore, the present application also provides another embodiment, in which the air pressure environment maintaining structure also includes a through-hole 5, and a through hole penetrating along the thickness direction is provided on the wall of the studio 1, which can also be a transmission channel 11, and the above-mentioned through-hole 51 for sealing with the through-hole rod 2 is provided on the through-hole seat 5, and the through-hole seat 5 is connected to the outer wall of the studio 1. The through-hole 51 is connected to the through-hole on the wall of the studio 1, namely the transmission channel 11. At the same time, the through-hole seat 5 is sealed and connected to the outer wall to prevent air pressure leakage; the through-hole rod 2 passes through the through-hole 51 and then through the transmission channel 11 and extends into the studio 1, and the sealing protective cover 3 and the sealing ring 4 are both provided in the through-hole 51 on the through-hole seat 5. With such an arrangement, there is no need to seal between the through rod 2 and the transmission channel 11 on the studio 1, and the studio 1 can be sealed during movement. Then, the through rod 2, the sealing protective sleeve 3 and the sealing ring 4 are all connected to the through seat 5. These components basically constitute the main body of the air pressure environment maintaining structure. After the main body is manufactured, the through seat 5 is directly connected to the wall of the studio 1, and the application of the air pressure environment maintaining structure can be completed. This implementation structure has the following beneficial effects: First, it is convenient to connect the parts, facilitate processing and manufacturing, avoid damage to the studio 1, and reduce production costs; second, it is convenient to repair, inspect or replace the various parts, and it is easier to maintain a longer service life to ensure effective sealing; third, the implementation body of the air pressure environment maintaining structure is independently set up from the studio 1, is not restricted by the implementation object, and can be matched and applied to the sealing of chambers of various structures on various equipment. It is flexible and convenient in application and implementation.

[0040] The through seat 5 and the outer wall of the studio 1 need to be sealed to prevent air pressure leakage from the connection between the two. Figure 1 and Figure 6 As shown, a sealing member 8 is provided between the side of the through seat 5 connected to the outer wall of the studio 1 and the outer wall of the studio 1. The sealing member 8 is annular as a whole and is provided around the through hole of the studio 1. Specifically, it can be a sealing gasket or a sealing ring.

[0041] The through-hole seat 5 can be in the form of a plate, fitted against the outer wall of the working chamber 1, and the sealing member 8 is embedded in the through-hole seat 5 or the outer wall of the working chamber 1. A docking shaft 52 for penetrating into the through hole of the working chamber 1 can also be provided on the side where the through-hole seat 5 is connected to the working chamber 1. The docking shaft 52 protrudes from the end face of the through-hole seat 5 for fitting with the outer wall, and its outer diameter matches the inner diameter of the through hole of the working chamber 1. Meanwhile, the through hole 51 is formed on the docking shaft 52. This arrangement, on the one hand, facilitates positioning the connection of the through-hole seat 5 and easily aligns the through hole 51 with the through hole of the working chamber 1. On the other hand, it also improves the coaxiality of the through hole 51 with the through hole of the working chamber 1; and on the other hand, it extends the axial length of the through hole 51, improving the sealing performance and sealing effect.

[0042] The through seat 5 and the working chamber 1 can be detachably connected by fasteners or a snap-fit connection structure, or can be non-detachably fixedly connected by bonding or welding.

[0043] The through hole 51 can be a straight hole of equal diameter, or, as Figure 7 As shown, the hole has a stepped shape, consisting of a coarse hole section with a large diameter D2 and a fine hole section with a small diameter D0. The sealing sleeve 3 and sealing ring 4 are both located within the coarse hole section, with the fine hole section being closer to the working chamber 1. The fine hole section directly engages with the through-rod 2. This arrangement forms a barrier step, against which the axial ends of the sealing ring 4 and sealing sleeve 3 abut, preventing axial displacement of the sealing ring 4 and sealing sleeve 3 due to friction from the movement of the through-rod 2, which could affect the sealing effect.

[0044] The coordinated arrangement of the sealing protective sleeve 3 and the sealing ring 4 ensures the effective sealing of the moving gap during the axial sliding of the through rod 2, and ensures that the indoor environment can maintain the specific air pressure required for work. However, if the through rod 2 is offset, skewed, or has radial displacement, the sealing protective sleeve 3 and the sealing ring 4 will be squeezed, which may easily lead to temporary failure of the seal. If such a situation occurs frequently, it will cause damage to the sealing protective sleeve 3 and the sealing ring 4, resulting in long-term failure of the seal and the structure cannot be used any further. Therefore, in order to solve this problem, ensure the smooth sliding of the through rod 2, and reduce the offset, skewness, etc. of the through rod 2, in this embodiment, as Figure 1 and Figure 3As shown, the air pressure environment maintaining structure also includes a sliding channel 71 formed outside the studio 1 and for the through-rod 2 to slide. The sliding channel 71 is connected to the through-hole 51 and is sealed with the outer wall of the studio 1. In the preferred embodiment, the cross-section of the sliding channel 71 is circular, extends with equal diameters, and is coaxially arranged with the through-hole 51. In this way, the through-rod 2 slides in the sliding channel 71 and is constrained by the sliding channel 71, ensuring that the through-rod 2 maintains a high degree of coaxiality with the through-hole 51 during movement. Even when subjected to radial forces such as accidental collisions or improper operation, it can avoid skew or deviation, preventing adverse consequences such as seal failure or squeezing of the sealing components, significantly improving structural stability and safety, enhancing performance, and solving the problem of seal failure to a large extent, ensuring and improving the sealing effect and long-term effectiveness, and extending the service life.

[0045] The sliding channel 71 is formed on the connecting seat 7. If the through hole 51 is directly opened on the studio 1, the connecting seat 7 is directly and tightly connected to the outer wall of the studio 1, and sealing can be achieved by providing a sealing ring arranged around the transmission channel 11 between the two. If the through hole 51 is provided on the through seat 5, the connecting seat 7 is connected to the side of the through seat 5 away from the studio 1, and can be detachably connected by fasteners or a snap-fit connection structure, or can be non-detachably fixedly connected by bonding or welding.

[0046] Based on the above-mentioned air pressure environment maintaining structure, the present application also provides a scanning electron microscope, including a studio 1 and an air pressure environment maintaining structure applied to the studio 1. The studio 1 is the above-mentioned studio 1, and the air pressure environment maintaining structure is the above-mentioned air pressure environment maintaining structure.

[0047] Since the scanning electron microscope has the above-mentioned studio 1, and the studio 1 is provided with the above-mentioned air pressure environment maintaining structure, the beneficial effects of the scanning electron microscope brought by the air pressure environment maintaining structure can be found in the above content and will not be repeated here.

[0048] The embodiment of the present application also provides a method for maintaining an air pressure environment, which is applicable to the above-mentioned air pressure environment maintaining structure. The method includes the following steps: setting the gap between the through-piece and the through-hole 51 and calculating the compression amount C of the sealing ring; determining the sealing ring 4 based on the compression amount C of the sealing ring; and setting the sealing ring 4 in the gap between the through-piece and the through-hole 51 to achieve a mobile seal between the through-piece and the through-hole 51. The method specifically provides a step for obtaining the sealing ring 4, setting the compression amount C of the sealing ring based on the gap, and selecting or making a suitable sealing ring 4 based on the compression amount C (the manufacturing process and technology are existing technology), ensuring that the sealing ring 4 can effectively seal the gap between the through-piece and the through-hole 51, avoiding the occurrence of loose sealing or over-tight sealing that makes the through-piece unable to move, and ensuring the performance of use. The air pressure environment maintaining method enables the air pressure environment maintaining structure to be used with high performance. The beneficial effects brought about by this can be found in the above content and will not be repeated here.

[0049] The through member can be specifically a through rod 2. The beneficial effects of using a through rod 2 have been described above and will not be repeated here. A sealing protective sleeve 3 is provided between the through rod 2 and the through hole 51. The sealing protective sleeve 3 and the sealing ring 4 provide dual protection, ensuring that the through rod 2 can move normally while maintaining a good seal. The specific derivation process of this beneficial effect is consistent with the corresponding part above and will not be repeated here.

[0050] Through hole 51 is a stepped hole, comprising a coarse hole section with a large diameter D2 and a fine hole section with a small diameter D0. The sealing sleeve 3 and the sealing ring 4 are both disposed within the coarse hole section of through hole 51. The fine hole section is closer to the working chamber 1 than the coarse hole section. The fine hole section directly engages with the through rod 2.

[0051] The size setting of the sealing protection sleeve 3 and the sealing ring 4 and the setting of the corresponding large and small apertures of the through hole 51 specifically include the following steps: determining the gap Δ1 between the inner diameter D1 of the sealing protection sleeve 3 and the diameter d1 of the through rod 2, and the gap Δ2 between the large diameter D2 of the through hole 51 and the outer diameter d2 of the sealing protection sleeve 3, where the sum of Δ1 and Δ2 is the total gap Δ; determining the sealing ring compression amount C according to the multiple of the total gap Δ, setting the diameter dx of the sealing ring 4 according to the sealing ring compression amount C and the set sealing compression ratio, and setting the sealing compression ratio within the range of 8%-20%; determining D1, D2, d1 and d2, and determining the small diameter D0 of the through hole 51 according to the formula D0≥d1+C. In this method, the gaps between the sealing protective sleeve 3 and the through rod 2 and the through hole 51 are first determined. This is because the sealing protective sleeve 3 has a longer axial length than the sealing ring 4. The degree of sealing between the sealing protective sleeve 3 and the rod and the hole is the primary parameter to ensure the movement seal of the through rod 2. Therefore, the gaps between the sealing protective sleeve 3 and the rod and the hole are first determined, and then the sealing ring 4 is set according to the gaps, which is more reasonable and has better sealing performance. However, the compression amount C of the sealing ring 4 is not the sum of Δ1 and Δ2, that is, the total gap Δ between the sealing protective sleeve 3 and the rod and the hole, but a multiple of the total gap Δ. Therefore, the sealing ring 4 is more closely matched with the dimensions between the rod and the hole than the sealing protective sleeve 3, further improving the sealing performance and sealing effect, and improving the guarantee of tight and durable sealing. After setting the linear relationship of the matching dimensions, the dimensions of the through hole 51 and the through rod 2 can be set according to actual needs, which can be extended to a variety of specifications and has higher practicality and application convenience.

[0052] The compression amount C of the sealing ring 4 can be 3-4 times of the total gap amount Δ. Such a setting has a suitable tightness, will not cause jamming of the movement of the through rod, and will not cause loose sealing.

[0053] The components and devices involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the accompanying drawings. As will be appreciated by those skilled in the art, these components and devices can be connected, arranged, or configured in any manner. Words such as "including," "comprising," "having," and the like are open-ended words that mean "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or" and can be used interchangeably therewith unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0054] It should also be noted that in the device of the present application, each component can be decomposed and / or reassembled, and such decomposition and / or reassembly should be regarded as equivalent solutions of the present application.

[0055] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0056] The above description has been provided for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

[0057] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. An air pressure environment maintaining structure, applied to a studio (1) with a target air pressure requirement, characterized in that: Includes: A sample chamber (6) is connected to the outer wall of the working chamber, is connected to the working chamber (1) through a transmission channel (11) for sample entry and exit, and includes a sealing isolation component for conducting or sealing the transmission channel (11); A through-hole seat (5) is attached to the outer wall of the sample chamber (6), and is provided with a docking shaft (52) for penetrating into a through hole on the wall of the sample chamber (6) and a through hole (51) connected to the through hole. A sealing member (8) in an annular shape and surrounding the through hole is provided between the through-hole seat (5) and the outer wall of the sample chamber (6); a connecting seat (7), the connecting seat (7) being connected to a side of the through seat (5) away from the working chamber (1), and being provided with a sliding channel (71) connected to the through hole (51); A through-piece, comprising a through-rod (2) slidably disposed in the sliding channel (71) and the through-hole (51), the through-rod (2) comprising a manipulation end (21) for manipulating displacement and a carrying end (22) for carrying a sample and extending into the working chamber (1) through the transmission channel (11); A sealing component is provided between the through-rod (2) and the through-hole (51) to seal and isolate the interior of the working room (1) from the exterior, the sealing component comprising a sealing ring (4) for sealing the gap between the through-hole (51) and the through-piece, and a sealing protective sleeve (3) for sealing the gap between the through-hole (51) and the through-rod (2) and sleeved on the through-rod (2); The gap between the inner diameter D1 of the sealing protective sleeve (3) and the diameter d1 of the through rod (2) is Δ1, the gap between the large diameter D2 of the through hole (51) and the outer diameter d2 of the sealing protective sleeve (3) is Δ2, and the sum of Δ1 and Δ2 is the total gap Δ; Determining the sealing ring compression amount C according to the multiple of the total gap amount Δ, and setting the diameter dx of the sealing ring (4) according to the sealing ring compression amount C and the set sealing compression ratio, wherein the sealing compression ratio is set within the range of 8%-20%; According to D1, D2, d1 and d2, and according to the formula D0≥d1+C, the minor diameter D0 of the through hole (51) is determined.

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