Silicon rod grinding machine

Abstract

The present application discloses a silicon rod grinder, comprising a machine base, a silicon rod transfer device, a coarse grinding device, and a fine grinding device, wherein the machine base has a silicon rod processing platform, and the silicon rod processing platform is provided with a first processing position and a second processing position, and the silicon rod transfer device comprises a transfer body and a plurality of silicon rod clamps and a switching mechanism, and the switching mechanism is used to drive the plurality of silicon rod clamps and the silicon rods clamped therein to switch positions between the first processing position and the second processing position so that the coarse grinding device can perform coarse grinding operations on the silicon rods and the fine grinding device can perform fine grinding operations on the silicon rods, so that the coarse grinding device and the fine grinding device in the silicon rod grinder are both in working state at the same time, which can improve the silicon rod grinding efficiency, reduce the grinding operation time, and improve economic benefits.

Description

Technical Field

[0001] The present application relates to the technical field of silicon workpiece processing, and in particular to a silicon rod grinding machine. Background Art

[0002] With society's increasing emphasis on and openness to the use of green and renewable energy, the photovoltaic solar power generation sector is gaining increasing attention and development. Within this sector, crystalline silicon solar cells are typically manufactured on high-quality silicon wafers. These wafers are cut from pulled or cast silicon ingots using a multi-wire saw and subsequently processed.

[0003] The existing silicon wafer production process, taking single crystal silicon products as an example, generally, the general operation procedures may include: first, using a silicon rod cutting machine to cut the original long silicon rods to form multiple short silicon rods; after cutting, using a silicon rod squarer to square the cut short silicon rods to form single crystal silicon rods; then, each silicon rod is subjected to surface grinding, chamfering and other processing operations to ensure that the surface of the silicon rod meets the corresponding flatness and dimensional tolerance requirements; and then the silicon rod is sliced ​​to obtain silicon wafers.

[0004] Generally speaking, the process of grinding and chamfering silicon rods must go through two processes: rough grinding and fine grinding. A single silicon rod is loaded, subjected to rough grinding and fine grinding in sequence, and then transferred and unloaded. Then, another silicon rod is loaded, ground (rough grinding and fine grinding), and unloaded. In typical large-scale processing, the silicon rod grinder repeats this processing process. The grinding wheel of the silicon rod grinder is idle for a long time, and the grinding efficiency is low, which affects the economic benefits of silicon rod processing. Summary of the Invention

[0005] In view of the shortcomings of the related art described above, the purpose of this application is to disclose a silicon rod grinder to solve the problems of low grinding efficiency and other problems existing in the prior art.

[0006] To achieve the above-mentioned objectives and other related objectives, the present application discloses a silicon rod grinder, comprising: a machine base having a silicon rod processing platform; a first processing position and a second processing position are provided on the silicon rod processing platform; a silicon rod transfer device, provided on the machine base, comprising a transfer body and a plurality of silicon rod clamps and a shifting mechanism provided on the transfer body, the shifting mechanism being used to drive the plurality of silicon rod clamps and the silicon rods clamped therein to switch positions between the first processing position and the second processing position; wherein the clamping center lines corresponding to the plurality of silicon rod clamps are located at the same horizontal height; a coarse grinding device, provided in the first processing position, for performing coarse grinding operations on the silicon rods clamped by the silicon rod clamp located at the first processing position in the silicon rod transfer device; and a fine grinding device, provided in the second processing position, for performing fine grinding operations on the silicon rods clamped by the silicon rod clamp located at the second processing position in the silicon rod transfer device.

[0007] The silicon rod grinder disclosed in the present application includes a machine base, a silicon rod transfer device, a coarse grinding device, and a fine grinding device, wherein the machine base has a silicon rod processing platform, and the silicon rod processing platform is provided with a first processing position and a second processing position. The silicon rod transfer device includes a transfer body and a plurality of silicon rod clamps and a switching mechanism. The switching mechanism is used to drive the plurality of silicon rod clamps and the silicon rods clamped therein to switch positions between the first processing position and the second processing position so that the coarse grinding device can perform coarse grinding operations on the silicon rods and the fine grinding device can perform fine grinding operations on the silicon rods, so that the coarse grinding device and the fine grinding device in the silicon rod grinder are both in working state at the same time, which can improve the silicon rod grinding efficiency, reduce the grinding operation time, and improve economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The specific features of the invention involved in this application are shown in the appended claims. The features and advantages of the invention involved in this application can be better understood by referring to the exemplary embodiments described in detail below and the accompanying drawings. A brief description of the drawings is as follows:

[0009] Figure 1a Shown is a schematic structural diagram of a silicon rod grinder according to one embodiment of the present application.

[0010] Figure 1b for Figure 1a Top view of .

[0011] Figure 1c Display as Figure 1a Schematic diagram of the partial structure of the silicon rod grinder shown.

[0012] Figure 1d Shown is a partial structural schematic diagram of a silicon rod clamp of the silicon rod grinder of the present application in one embodiment.

[0013] Figure 2a Shown is a schematic structural diagram of a silicon rod grinder according to one embodiment of the present application.

[0014] Figure 2b for Figure 2a Top view of .

[0015] Figure 2c The figure shows a schematic structural diagram of a coarse grinding device of the silicon rod grinder shown in Figure 2a in one embodiment.

[0016] Figure 3a Shown is a side view of a chamfering device of a silicon rod grinder according to an embodiment of the present application.

[0017] Figure 3b Shown is a side view of another embodiment of a chamfering device of a silicon rod grinder of the present application.

[0018] Figure 3cShown is a schematic structural diagram of a chamfering device of a silicon rod grinder of the present application in one embodiment.

[0019] Figure 4 Shown is a schematic structural diagram of a grinding and repairing device for a silicon rod grinder of the present application in one embodiment.

[0020] Figure 5a Shown is a schematic structural diagram of a silicon rod grinder according to another embodiment of the present application.

[0021] Figure 5b Display as Figure 5a Top view of .

[0022] Figure 6 Shown is a structural schematic diagram of a silicon rod transferring device according to one embodiment of the present application.

[0023] Figure 7 Display as Figure 6 Top view of .

[0024] Figure 8 Display as Figure 7 Schematic diagram after removing the first loading component and the second loading component.

[0025] Figure 9 It is a schematic diagram showing the silicon rod transfer device of the present application after loading silicon rods.

[0026] Figure 10 Shown is a structural schematic diagram of the centering adjustment mechanism in the silicon rod transfer device of the present application.

[0027] Figure 11 Display as Figure 5a A partial enlarged view of . DETAILED DESCRIPTION

[0028] The following describes the implementation of the present application through specific embodiments. People familiar with this technology can easily understand other advantages and effects of the present application from the contents disclosed in this specification.

[0029] In the following description, several embodiments of the present application are described with reference to the accompanying drawings. It should be understood that other embodiments may also be used, and changes in mechanical composition, structure, and operation may be made without departing from the spirit and scope of the present disclosure. The following detailed description should not be considered restrictive, and the scope of the embodiments of the present application is limited only by the claims of the published patents. The terms used herein are only for describing specific embodiments and are not intended to limit the present application. Spatially related terms, such as "upper", "lower", "left", "right", "below", "below", "lower", "above", "upper", etc., may be used in the text to illustrate the relationship between one element or feature shown in the figure and another element or feature.

[0030] Although in some instances the terms first, second, etc. are used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, the first silicon rod clamp can be referred to as the second silicon rod clamp, and similarly, the second silicon rod clamp can be referred to as the first silicon rod clamp, without departing from the scope of the various described embodiments. The first silicon rod clamp and the second silicon rod clamp are both describing a certain silicon rod clamp, but unless the context clearly indicates otherwise, they are not the same silicon rod clamp. Similar situations also include the first guide structure and the second guide structure, the first processing location and the second processing location, the first loading component and the second loading component, the first transmission assembly and the second transmission assembly, etc.

[0031] Furthermore, as used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context indicates otherwise. It should be further understood that the terms "comprise", "include" indicate the presence of the described features, steps, operations, elements, components, items, kinds, and / or groups, but do not exclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Thus, "A, B, or C" or "A, B, and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B, and C". Exceptions to this definition occur only when the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0032] In the processing of silicon materials, it is usually necessary to go through multiple steps before silicon wafers for industrial production can be obtained. The original silicon material is usually a long silicon rod with a cylindrical structure. The long silicon rod is cut by a silicon rod cutting machine to obtain multiple short silicon rods; the cut silicon rod segments are then squared by a silicon rod squaring machine to form single crystal silicon rods, and the cross-section of the obtained single crystal silicon rods is rectangular (including square); the single crystal silicon rods obtained by squaring need to remove surface damage and chamfer the edges to eliminate internal stress, and then the single crystal silicon rods need to be ground and chamfered so that the surface shaping of the silicon rods meets the corresponding flatness and dimensional tolerance requirements before final slicing can be carried out.

[0033] In the process of grinding single crystal silicon rods, rough grinding and then fine grinding are required, and the grinding is achieved by corresponding rough grinding tools and fine grinding tools respectively. In the traditional working method, a single single crystal silicon rod is rough ground in the rough grinding work area and then transferred to the fine grinding work area for fine grinding. After the fine grinding is completed, the processed single crystal silicon rod is transported out of the work area. This process is repeated in a large amount of grinding work. The grinding sequence of fine grinding and rough grinding makes it inevitable that the silicon rod grinder has a grinding tool in a waiting state during operation. For example, when the rough grinding tool is performing rough grinding, the fine grinding tool is in a waiting state, and when the fine grinding tool is performing fine grinding, the rough grinding tool is in a waiting state. The grinding process is time-consuming.

[0034] The present application discloses a silicon rod grinder, comprising a machine base, a silicon rod transfer device, a coarse grinding device, and a fine grinding device, wherein the machine base has a silicon rod processing platform, and the silicon rod processing platform is provided with at least a first processing position and a second processing position, a coarse grinding device is provided on the first processing position, and a fine grinding device is provided on the second processing position, the silicon rod transfer device comprises a transfer body and a plurality of silicon rod clamps and a shifting mechanism provided on the transfer body, wherein the shifting mechanism is used to drive the plurality of silicon rod clamps and the silicon rods clamped therein to switch positions between the first processing position and the second processing position; wherein the clamping center lines corresponding to the plurality of silicon rod clamps are located at the same horizontal height; the shifting mechanism is used to drive the plurality of silicon rod clamps and the silicon rods clamped therein to be transferred to the first processing position and the second processing position in sequence so that the coarse grinding device can perform coarse grinding on the silicon rod and the fine grinding device can perform fine grinding on the silicon rod, so that the coarse grinding device and the fine grinding device in the silicon rod grinder are both in working state at the same time, thereby improving the silicon rod grinding efficiency.

[0035] In the embodiments provided in this application, in order to clarify the definition of direction and the operation mode between different structures, a three-dimensional space defined by a first direction, a second direction, and a third direction is defined. The first direction, the second direction, and the third direction are all straight directions and are perpendicular to each other. Among them, the vertical direction, that is, the perpendicular direction, the vertical direction, the up-down direction, or the lifting direction can be defined as the third direction. In certain embodiments provided in this application (for example, the following Figure 5a In the embodiment shown in the figure), the first direction may also be referred to as the X direction, the second direction may also be referred to as the Y direction, and the third direction may also be referred to as the Z direction.

[0036] See also Figure 1a and Figure 1b ,in, Figure 1a Shown is a schematic structural diagram of a silicon rod grinder in one embodiment of the present application. Figure 1b Display as Figure 1a The top view of the silicon rod grinder is shown in FIG. Figure 1a and Figure 1bAs shown, the silicon rod grinding machine includes a machine base 1, a silicon rod transfer device 2, a coarse grinding device 3, and a fine grinding device 4.

[0037] The machine base 1 serves as the main component of the silicon ingot processing equipment and is used to provide a working platform. In one example, the machine base 1 is large in size and weight to provide a larger mounting surface and a stronger overall stability. It should be understood that the machine base 1 can serve as the base for different structures or components that perform processing operations in the silicon ingot processing equipment. The specific structure and shape of the machine base 1 can be changed based on different functional or structural requirements. In some examples, the machine base 1 includes fixed structures or limiting structures such as bases, rods, columns, and frames for supporting different components in the silicon ingot processing equipment, all of which are the machine base 1 described in this application.

[0038] Meanwhile, in some examples, the base may be an integrated base, and in other examples, the base may include a plurality of independent bases.

[0039] The silicon rod grinder of the present application is used to grind silicon rods with a rectangular (including square) cross-section, wherein most silicon rods may be, for example, single crystal silicon rods or polycrystalline silicon rods. Taking single crystal silicon rods as an example, the single crystal silicon rods are obtained by cutting the original silicon rods and then passing them through a silicon rod squaring device. The original silicon rods are usually rod-shaped single crystal silicon grown from the melt by using the Czochralski method or the floating zone melting method.

[0040] The machine base has a silicon rod processing platform, and the silicon rod processing platform is provided with a plurality of processing positions. It should be noted that in each example provided in this application, the processing position is defined by the travel path and range of the processing device at the processing position. For example, the coarse grinding device of the silicon rod grinder is provided at the first processing position, and the range of the first processing position is the range occupied by the coarse grinding device in the process of completing the grinding operation; similarly, the second processing position is the range occupied by the fine grinding device in the process of completing the fine grinding operation. At the same time, the direction of the processing position and the direction of the waiting position described in this application are both the long side direction of the position.

[0041] exist Figure 1a and Figure 1b In the illustrated embodiment, the silicon rod processing platform can be arranged in accordance with the shape of the machine base, and is provided with a first processing area and a second processing area.

[0042] The silicon rod transfer device is mounted on a machine base and is used to transfer silicon rods. In the embodiment shown in FIG1 , the silicon rod transfer device 2 further comprises a transfer body 21 and a plurality of silicon rod clamps 23 and a position transfer mechanism (not shown) mounted on the transfer body 21 .

[0043] Among them, the clamping center lines corresponding to the multiple silicon rod clamps 23 provided on the transfer body 21 are located at the same horizontal height. It should be understood that under this setting, the silicon rods clamped by the silicon rod clamps are in a horizontal state, and correspondingly, the coarse grinding device and the fine grinding device are used to grind the side surfaces of the horizontal silicon rods.

[0044] In one embodiment of the present application, the transfer body 21 can be arranged in the central area of ​​the silicon rod processing platform, and each side surface of the transfer body 21 can be used as an installation surface for installing multiple silicon rod clamps 23. As shown in Figure 1, a silicon rod clamp 23 is installed on each side surface of the transfer body 21.

[0045] The transfer body 21 is driven by a switching mechanism to switch the silicon rod clamp 23 provided on the transfer body 21 between different processing positions, thereby enabling the silicon rod clamped by the silicon rod clamp 23 to switch between different processing positions, and thus completing different processing procedures such as coarse grinding and fine grinding on the silicon rod; at the same time, the multiple silicon rod clamps 23 provided on the transfer body 21 can be respectively in different processing positions, then at the same time, the silicon rods clamped by different silicon rod clamps 23 are respectively subjected to different processing procedures, so that the coarse grinding device and the fine grinding device in the silicon rod processing equipment can be in working state at the same time, which is beneficial to improving processing efficiency.

[0046] The transposition mechanism (not shown) serves as a driving mechanism for switching the processing positions of the silicon rod holders 23 on the transport body 21. In one embodiment, the transposition mechanism includes a transposition shaft. Thus, by rotating the transposition shaft through a predetermined angle, the transport body 21 and the silicon rod holders 23 mounted thereon can be switched between various processing positions. In certain embodiments, the transposition shaft is located at the geometric center of the transport body 21 and is arranged in the direction of the vertical.

[0047] The transposition axis is arranged in the direction of the vertical line, that is, during the transposition process, the height of the silicon rod clamp 23 provided on the transport body 21 remains unchanged, and the height of the clamping center line of the corresponding silicon rod clamp 23 remains unchanged. Here, the multiple silicon rod clamps 23 on the transport body 21 of the silicon rod grinder are arranged so that the clamping center lines are located at the same horizontal height. During the controlled rotation of the transport body 21, the horizontal planes of the clamping center lines of the multiple silicon rod clamps 23 remain unchanged. In this way, when any of the silicon rod clamps 23 is loading silicon rods, the height of the silicon rod axis is adjusted to the same predetermined height, so that the silicon rod axis and the clamping center line can be aligned in the third direction (i.e., the direction of the vertical line). The predetermined height is the same horizontal height at which the clamping center lines of the multiple silicon rod clamps 23 are located.

[0048] It should be understood that the clamping center lines of the multiple silicon rod clamps described in this application are at the same horizontal height, which does not mean that the clamping center lines of the multiple silicon rod clamps are limited to the same precise height range. In some embodiments, when the height difference of the clamping center lines corresponding to the multiple silicon rod clamps provided on the transport body is within a preset range, the clamping center lines of the multiple silicon rod clamps can be considered to be at the same horizontal height.

[0049] In other embodiments, the height of the clamping center line corresponding to the silicon rod clamp can also be obtained by the control system of the silicon rod grinder. Accordingly, when any silicon rod clamp is loaded with the silicon rod to be processed, the height of the silicon rod axis center line is adjusted to the horizontal height corresponding to the silicon rod clamp.

[0050] The silicon rod clamp is used to clamp the two end faces of the silicon rod. Correspondingly, the silicon rod clamp has two opposite clamping parts for contacting a pair of end faces of the silicon rod. The clamping center line is the line connecting the centers of the two contact surfaces of the two clamping parts corresponding to the two ends of the silicon rod; the center of the clamping part here is not limited to the geometric center of the contact surface, but can also be a point on the contact surface set artificially; in some embodiments provided in this application, the silicon rod clamp can also drive the silicon rod to rotate along the axis of the silicon rod. In this example, the clamping center line is the direction of the rotation axis of the clamping part. Usually, in actual processing scenarios, in order to keep the position (or height) of the axis of the silicon rod unchanged when the silicon rod is driven to rotate by the silicon rod clamp, when loading the silicon rod to be processed into the silicon rod clamp, it is usually necessary to align the clamping center line of the silicon rod clamp with the axis of the silicon rod (i.e., coincide with it).

[0051] As mentioned above, the transposition shaft is controlled to rotate by a preset angle so that the transfer body 21 and its respective silicon rod clamps 23 can be switched between various processing positions. Therefore, the transposition mechanism further includes a transposition drive unit for driving the transposition shaft to rotate.

[0052] In some embodiments, the transposition drive unit may include a driving gear, a drive source, and a driven gear, wherein the driving gear is axially connected to the drive source, and the driven gear is meshed with the driving gear and connected to the transposition shaft. In some embodiments, the transposition drive unit may include a drive source directly associated with the transposition shaft. The power source may be, for example, a servo motor.

[0053] In practical applications, taking the above-mentioned transposition drive unit including a driving gear, a driving source, and a driven wheel as an example, the driving source is used to drive the driving gear to rotate in the forward direction, and through the engagement of the driving gear with the driven rack, the driven gear and its associated transposition shaft are driven to rotate in the first rotation direction by a preset angle, so that the transfer body and the various silicon rod clamps set therein are switched from the current processing position to the adjacent next processing position or other subsequent processing positions, or, the driving source can be used to drive the driving gear to rotate in the reverse direction, and through the engagement of the driving gear with the driven rack, the driven gear and its associated transposition shaft are driven to rotate in the second rotation direction by a preset angle, so that the transfer body and the various silicon rod clamps set therein are switched from the current processing position to the adjacent previous processing position or other previous processing positions.

[0054] Taking the example of two adjacent processing positions (for example, the first processing position and the second processing position) in the above-mentioned processing positions being 120° apart, it is assumed that, in one case, in the initial state, a silicon rod clamp in the silicon rod transfer device clamps a silicon rod and the silicon rod clamp and the silicon rod clamped therein correspond to the first processing position. The driving source is used to drive the driving gear to rotate counterclockwise, and through the engagement of the driving gear with the driven gear rail, the driven gear and its associated transposition shaft are driven to rotate clockwise by a preset angle of 120°, so that the silicon rod clamp in the silicon rod transfer device and the silicon rod clamped therein are transposed from the first processing position to the second processing position. Alternatively, in another case, in the initial state, a silicon rod clamp in the silicon rod transfer device holds a silicon rod and the silicon rod clamp and the silicon rod clamped by the silicon rod clamp correspond to the second processing position, and the driving source is used to drive the driving gear to rotate clockwise, and through the engagement of the driving gear with the driven rack, the driven gear and its associated transposition shaft are driven to rotate counterclockwise by a preset angle of 120°, so that the silicon rod clamp in the silicon rod transfer device and the silicon rod clamped by the silicon rod clamp are transposed from the second processing position to the first processing position. The preset angle is not strictly limited. For example, in addition to the aforementioned 120°, in actual processing scenarios, the preset angle may be allowed to deviate from 120° to a certain extent. For example, the preset angle may be 120°±10°, as well as other angles.

[0055] In actual processing scenarios, in order to avoid the accumulation of errors in the transfer body after multiple transfers during continuous processing, the clamping center line of the silicon rod clamp must be parallel or approximately parallel to the long side direction of the processing location. The preset angle can also be determined by the clamping center line direction of the silicon rod in the current processing location and the long side direction of the next processing location. For example, the preset angle is used to make the clamping center line of the silicon rod clamp parallel or approximately parallel to the long side of the next processing location after it is transferred to the next processing location. The parallel or approximately parallel angle, for example, is an angle between the clamping center line of the silicon rod and the long side direction of the processing location of 0° to 10°.

[0056] The clamping center lines of the silicon rod clamps in the silicon rod grinder of the present application are all arranged in the horizontal direction. Here, the transposition shaft is arranged in the direction of the vertical line. When the transfer body drives the silicon rod clamp to rotate along the transposition shaft, the clamping center line of the silicon rod clamp is still in the horizontal direction (that is, the clamping center line of the silicon rod clamp is a horizontal line). At the same time, the clamping center line of the silicon rod clamp coincides with the axis of the silicon rod. Generally, the angle between different processing positions of the silicon rod grinder in the working state is a fixed value. When a silicon rod clamp is transferred from one processing position to another processing position, the preset angle of rotation of the transposition shaft can be made equal to the angle between the two processing positions. The silicon rod grinder of the present application also has the following beneficial effects: the clamped silicon rod is in a horizontal state, and the coarse grinding device and the fine grinding device in the processing area outside the transfer body can be set to have the grinding surface located in the horizontal plane to grind the upper and lower sides of the horizontal silicon rod; when the silicon rod clamp drives the silicon rod to be converted to any processing area, the silicon rod clamp drives the silicon rod to rotate along the clamping center line (silicon rod axis) to adjust the upper and lower sides of the silicon rod to a horizontal state, and in this state, the grinding surface of the grinding device can contact the upper and lower sides of the silicon rod and move along the direction of travel of the grinding tool so that the grinding surface covers the upper and lower sides of the silicon rod to complete the grinding; in this scenario, when the preset angle is different from the angle difference between the two processing areas before and after the conversion, it will not affect the grinding accuracy.

[0057] Therefore, compared with the multi-station processing equipment for silicon rods that grinds vertical silicon rods, the silicon rod grinder of the present application can grind the side of the silicon rod without the need to accurately position the preset angle at which the transfer body drives the silicon rod clamp to rotate when driving the silicon rod clamp to switch between multiple processing positions; in other words, the preset angle at which the transfer body drives the silicon rod clamp to rotate is used to enable the silicon rod to be switched to another processing position to contact the grinding tool, but does not affect the grinding accuracy. The silicon rod grinder of the present application can thus eliminate the need for a precise positioning structure or operating procedure for the rotation of the transfer body, which is beneficial to simplifying the equipment and processing technology.

[0058] It should be noted that in the embodiments provided in the present application, when different locations differ by a certain angle, for example, different processing locations or a processing location and other locations such as a waiting location differ by a certain angle, these are all angles between the long side directions corresponding to the different locations.

[0059] As mentioned above, the silicon rod transport device includes a plurality of silicon rod clamps. Figure 1a and Figure 1bIn the illustrated embodiment, silicon rod clamps 23 are mounted on each side of the transfer body 21 of the silicon rod transfer device 2. These clamps 23 are used to clamp the silicon rods. When the clamps 23 are used to clamp the silicon rods, the axis of the clamped silicon rods is a horizontal line. In this embodiment, the clamps 23 are of the same specifications and have the same structure and operating principles. However, this is not limiting. In other embodiments, the clamps 23 may also be of different specifications.

[0060] Regarding the silicon rod clamps 23 , each of the silicon rod clamps 23 includes a pair of clamping arms and a clamping arm driving mechanism.

[0061] See also Figure 1c , displayed as Figure 1a Schematic diagram of the partial structure of the silicon rod grinder shown.

[0062] like Figure 1c As shown, the pair of clamping arms 231 are arranged opposite to each other along a horizontal line to clamp the two end faces of the silicon rod. The silicon rod is a slender structure that has been squared, and its length direction is placed along a horizontal line. The end faces are the cross-sections at both ends of the length direction. In the embodiment shown in Figure 1, two clamping arms 231 in the pair of clamping arms 231 extend outward from one side of the transport body 21. Among them, any one of the clamping arms 231 in the pair of clamping arms 231 is provided with a clamping portion 232, that is, each clamping arm 231 is provided with a clamping portion 232.

[0063] Of course, the specific structure and setting orientation of the silicon rod fixture are not limited to Figure 1c The view shown is limited. For example, the pair of clamping arms of the silicon rod clamp are arranged along the horizontal line object, and the clamping arms can be arranged in the direction of the vertical line, or as shown in FIG. Figure 1c As shown, it is arranged in a horizontal direction. It should be understood that the silicon rod clamp can be clamped horizontally by making the clamping center line of the silicon rod clamp a horizontal line.

[0064] Please continue reading Figure 1c The clamping arm driving mechanism is used to drive at least one clamping arm 231 of the pair of clamping arms 231 to move along a horizontal line to adjust the clamping distance between the pair of clamping arms 231. Figure 1c In an embodiment, two clamping arms 231 of the pair of clamping arms 231 are arranged opposite to each other along a horizontal line, and the clamping arm driving mechanism can drive at least one clamping arm 231 of the pair of clamping arms 231 to move along the horizontal line to adjust the clamping distance between the pair of clamping arms 231 arranged opposite to each other.

[0065] In one embodiment provided in this application, Figure 1cAs shown, the clamping arm driving mechanism may include: an opening and closing guide rail 2331 and an opening and closing driving unit (not shown), wherein the opening and closing guide rail 2331 is arranged on the transport body 21 along a horizontal line, for setting a pair of clamping arms 231, and the opening and closing driving unit is used to drive at least one clamping arm 231 in the pair of clamping arms 231 to move along the opening and closing guide rail.

[0066] In certain embodiments, the clamping arm driving mechanism can drive the first clamping arm of the pair of clamping arms to move toward the second clamping arm along a horizontal line, thereby reducing the clamping distance between the two clamping arms and thereby clamping the silicon ingot between the two clamping arms. Correspondingly, the clamping arm driving mechanism can drive the first clamping arm of the pair of clamping arms to move away from the second clamping arm along a horizontal line, thereby increasing the clamping distance between the two clamping arms and thereby releasing the clamped silicon ingot.

[0067] Assuming that the first clamp arm in the pair of clamp arms can be driven by the clamp arm driving mechanism to move along the horizontal line, and the second clamp arm in the pair of clamp arms can be fixedly arranged on the transport body by, for example, a clamp arm mounting seat or a similar structure, in one embodiment, the opening and closing drive unit in the clamp arm driving mechanism may further include: a screw rod and a drive source, wherein the screw rod is arranged along the horizontal line and is associated with the first clamp arm in the pair of clamp arms, and the drive source is associated with the screw rod, and is used to drive the screw rod to rotate so that the associated first clamp arm moves along the horizontal line. For example, the drive source drives the screw rod to rotate in the forward direction, thereby driving the associated first clamp arm to move closer to the second clamp arm along the horizontal line, thereby reducing the clamping distance between the two clamp arms, or the drive source drives the screw rod to rotate in the reverse direction, thereby driving the associated first clamp arm to move away from the second clamp arm along the horizontal line, thereby increasing the clamping distance between the two clamp arms. The drive source may be, for example, a servo motor.

[0068] Of course, the opening and closing drive unit can still adopt other structures. For example, in another embodiment, the opening and closing drive unit may include: a rack, a drive gear, and a drive motor, wherein the rack is arranged along a horizontal line and is associated with the first clamping arm of the pair of clamping arms, and the drive gear is controlled by the drive motor and meshes with the rack. In this way, the drive motor drives the drive gear to rotate, driving the rack and its associated first clamping arm to move along the horizontal line. For example, when the drive source drives the drive gear to rotate in a forward direction, the first clamping arm associated with the rack is driven to move closer to the second clamping arm along the horizontal line, thereby reducing the clamping distance between the two clamping arms. Alternatively, when the drive source drives the drive gear to rotate in a reverse direction, the first clamping arm associated with the rack is driven to move away from the second clamping arm along the horizontal line, thereby increasing the clamping distance between the two clamping arms.

[0069] In certain embodiments, the clamping arm drive mechanism can drive the two clamping arms of the pair of clamping arms to move toward each other, thereby reducing the clamping distance between the two clamping arms, thereby clamping the silicon ingot between the two clamping arms. Correspondingly, the clamping arm drive mechanism can drive the two clamping arms of the pair of clamping arms to move away from each other, thereby increasing the clamping distance between the two clamping arms, thereby releasing the clamped silicon ingot.

[0070] Assuming that both clamping arms in the pair of clamping arms are driven by the clamping arm driving mechanism to move along the horizontal line, in one embodiment, the opening and closing driving unit in the clamping arm driving mechanism may further include: a bidirectional screw rod and a driving source, wherein the bidirectional screw rod is arranged along the horizontal line, and the bidirectional screw rod is a left-handed screw rod, which has two sections of threads on the rod body, and the rotation directions of the two sections of threads are opposite, that is, one section of thread is a left-handed thread, and the other section of thread is a right-handed thread, wherein the left-handed thread can be associated with one clamping arm in a pair of clamping arms, and the right-handed thread can be associated with the other clamping arm in a pair of clamping arms, and the driving source is associated with the bidirectional screw rod, and is used to drive the bidirectional screw rod to rotate so that the associated first clamping arm and the second clamping arm move toward or away from each other along the horizontal line. For example, when the driving source drives the bidirectional screw to rotate in the forward direction, the first and second clamping arms are driven to move toward each other along a horizontal line (i.e., move closer to each other), thereby reducing the clamping distance between the two clamping arms. Alternatively, when the driving source drives the screw to rotate in the reverse direction, the first and second clamping arms are driven to move away from each other along a horizontal line (i.e., move away from each other), thereby increasing the clamping distance between the two clamping arms. The driving source may be, for example, a servo motor located in the middle section of the bidirectional screw. Of course, the clamp arm driving mechanism may still adopt other structures. For example, in another embodiment, the clamp arm driving mechanism may include: a pair of racks, a driving gear, and a driving motor, wherein the pair of racks are parallel to each other and are both arranged along a horizontal line, one of the pair of racks is associated with the first clamp arm in the pair of clamp arms, and the other rack in the pair of racks is associated with the second clamp arm in the pair of clamp arms, and the driving gear is located between the pair of racks to engage with the pair of racks and is controlled by the driving motor. In this way, the driving motor drives the driving gear to rotate, driving the pair of racks and their associated first clamp arm and second clamp arm to move toward or away from each other along the horizontal line. For example, the driving source drives the driving gear to rotate forward, thereby driving the first clamping arm and the second clamping arm associated with the pair of racks to move toward each other along a horizontal line (i.e., approach each other), thereby reducing the clamping distance between the two clamping arms; or, the driving source drives the driving gear to rotate backward, thereby driving the first clamping arm and the second clamping arm associated with the pair of racks to move away from each other along a horizontal line (i.e., move away from each other), thereby increasing the clamping distance between the two clamping arms.

[0071] In one embodiment of the present application, the clamping portion of the clamping arm is designed to rotate, such as Figure 1d As shown, Figure 1d Shown is a partial structural diagram of a silicon rod clamp in one embodiment of the present application. Figure 1d In the illustrated embodiment, any silicon rod clamp 23 further includes a clamping portion rotating mechanism 234 for driving the clamping portion 232 on the clamping arm 231 in the silicon rod clamp 23 to rotate. In one implementation of this embodiment, the clamping portion rotating mechanism 234 drives the clamping portion 232 of the clamping arm 231 to rotate about the axis of the silicon rod, and the clamped silicon rod undergoes a corresponding rotation about the axis of the silicon rod. In actual processing, the clamping portion rotating mechanism 234 drives the silicon rod to rotate along its axis, and the positional relationship of the clamped silicon rod relative to the grinding device or chamfering device can be adjusted to determine the grinding surface or chamfering surface relative to the silicon rod. The grinding and chamfering of the silicon rod to be performed on the four surfaces in the longitudinal direction and the edges between the four surfaces can be achieved by the clamping arm provided by this application. The selection and control of different grinding surfaces and different edges of the silicon rod can be achieved.

[0072] In some embodiments, the clamping portion is a multi-point contact clamping head. It should be understood that the contact method between the multi-point contact clamping head and the silicon rod end face is not limited to point contact, for example Figure 1d In the illustrated embodiment, the clamping portion 232, for example, has a plurality of protrusions 2321 for contacting the end face of the silicon rod, wherein each protrusion 2321 may be in surface contact with the end face of the silicon rod. In one implementation, the protrusions of the clamping portion may also be connected to the clamping portion body via a spring along a horizontal line, thereby forming a multi-point floating contact, so that the silicon rod clamp can adapt to the flatness of the silicon rod end face when clamping the silicon rod end face to clamp the silicon rod. In some examples, the clamping portion of the clamping portion for contacting the silicon rod end face may also be connected to the clamping arm via a universal mechanism, such as a universal ball, so that the clamping portion can adapt to clamping silicon rod end faces with different inclinations.

[0073] In certain embodiments, the pair of clamping parts of the silicon rod clamp used for contacting the silicon rod are configured as rigid structures to prevent the clamped silicon rod from being disturbed during cutting and grinding operations, thereby preventing the processing accuracy from being affected.

[0074] In practical applications, the clamping portion rotation mechanism may include rotatable structures disposed on the two clamping portions of a pair of clamping arms, and a drive source for driving at least one of the two rotatable structures. In one implementation, the grinding surface is disposed on a rotatable platform, and the cross-section of the platform can be configured to have a custom regular or irregular geometric shape. In this manner, the clamping portion rotation mechanism can be used to drive the platform and the grinding surface thereon to rotate.

[0075] In one embodiment of the present application, the rotatable platform can be configured as a whole hinged by a hinge device with a locking function, and can rotate along a horizontal axis. The axis of the rotating shaft is connected to the clamping portion rotation mechanism.

[0076] In one embodiment of the present application, the clamping portion of the clamping arm can be configured as a rotatable truncated cone, with the circular plane of the cone contacting the end face of the silicon ingot and remaining stationary relative to the end face after being in close contact with the silicon ingot. The silicon ingot clamping portion also includes a locking structure, which locks the clamping portion of the clamping arm when grinding a selected surface. When switching between different grinding surfaces, the silicon ingot clamping portion rotates along the center of the truncated cone driven by the clamping portion rotation mechanism.

[0077] In one implementation, the clamping portion of the clamping arm includes a rotatable truncated cone and a series of protruding contacts disposed on the truncated cone, each of which has a contact plane. The truncated cone rotates driven by the clamping portion's rotation mechanism. In one implementation of this embodiment, the protruding length of the contacts, i.e., the position of the contacts on a horizontal line, is adjustable. This allows for the clamping of silicon rods with less flat end surfaces to adjust the protruding length of the contacts based on the end surface of the silicon rod, ensuring that each polishing surface is in close contact with the end surface of the silicon rod. The protruding length is the horizontal length from the circular plane of the truncated cone to the contact plane of the contacts.

[0078] In one embodiment of the present application, the clamping portion of the silicon rod clamp is provided with a pressure sensor to adjust the protruding length of the contact based on the detected pressure state. Generally, during the process of clamping the silicon rod, the pair of clamping arms of the first silicon rod clamp are driven by the clamping arm driving mechanism to approach each other along a horizontal line until the polished surface of the clamping portion contacts the end face of the silicon rod to be clamped. When the clamping portion is provided with multiple contacts and the pressure value of the contact between some contacts and the end face of the silicon rod is less than a set value or a set range, the protruding length of the contact can be adjusted (generally in the direction of approaching the end face of the silicon rod) to change the clamping degree; Alternatively, each clamping portion of the pair of clamping arms of the first silicon rod clamp is provided with a polishing surface. During the process of clamping the silicon rod, the clamping arm driving mechanism drives the end faces of the pair of clamping arms facing the two ends of the silicon rod to approach each other to achieve the effect of the pressure. After the clamping portion contacts the end face of the silicon rod, the pressure sensor detects the degree of clamping of the silicon rod. When the set pressure range is reached, the clamping arm driving mechanism controls the pair of clamping arms to stop moving toward each other.

[0079] The clamping portion rotation mechanism may be provided on one of the pair of clamping arms to drive the clamping portion of the pair of clamping arms and the clamped silicon rod to rotate; or the clamping portion rotation mechanism may be provided on each clamping arm of the pair of clamping arms to coordinate movement and control the two clamping portions of the pair of clamping arms to rotate at the same angle and direction. In certain implementations, the driving source of the clamping portion rotation mechanism may be provided as a drive motor.

[0080] Thus, in the embodiment of the present application, a plurality of silicon rod clamps configured using a silicon rod transfer device can clamp the silicon rod horizontally and drive the clamped silicon rod to rotate at a predetermined angle about its axis, wherein the axis of the silicon rod is a horizontal line.

[0081] The silicon rod clamp grips the two end faces of the silicon rod, and the transport body transports the silicon rod clamp to the processing area. The rough grinding device and fine grinding device then grind the clamped silicon rod in the processing area. The rough grinding device is located in the first processing area and is used to perform rough grinding on the silicon rod in the first processing area of ​​the silicon rod processing platform. The fine grinding tool is located in the second processing area and is used to perform rough grinding on the silicon rod in the second processing area of ​​the silicon rod processing platform.

[0082] In the actual processing scenario, the silicon rod clamp clamps the silicon rod to be ground in a horizontal position, and the transfer body drives the silicon rod clamp to be transferred to the first processing position and the second processing position corresponding to the rough grinding device and the fine grinding device respectively. The silicon rod can be processed in the first processing position and the second processing position in turn.

[0083] It should be understood that the shape of the transfer body and the positions of the multiple silicon rod clamps on the transfer body determine the angle at which the transfer body must be rotated after the rough grinding tool (or fine grinding tool) completes the rough grinding (or fine grinding) of the silicon rod and is about to perform the rough grinding (or fine grinding) of the next silicon rod. To simplify the equipment layout of the silicon rod grinding machine of this application and to simplify the transfer process required for the processing devices (i.e., the rough grinding device and the fine grinding device) to perform the grinding operation, this application also provides the following embodiments:

[0084] In certain embodiments, the transport body has an equilateral triangle outline in a horizontal plane.

[0085] Taking the transposition mechanism including the transposition shaft as an example, the rotation center of the transfer body can be set at the centroid (geometric center) of an equilateral triangle. At any initial moment, the transfer body can overlap with the position at the initial moment every time it rotates 120° in the clockwise or counterclockwise direction.

[0086] In some embodiments where the profile of the transfer body in the horizontal plane is an equilateral triangle, a silicon rod clamp is provided on the outside of each side of the triangle of the transfer body profile, wherein the clamping center line of any silicon rod clamp is parallel to the corresponding side.

[0087] In a specific implementation, a silicon rod clamp is arranged outside one side of the transfer body profile, for example, it can be arranged on a horizontal guide rail, guide groove or guide column outside the triangular side, and the clamping center line of the silicon rod clamp is parallel to the corresponding side.

[0088] Under this setting, when the transfer body is driven by the transposition mechanism to rotate a preset angle such as 120°, the silicon rod corresponding to the same processing position can be replaced from the silicon rod on the outside of one side of the transfer body to the silicon rod corresponding to the outside of the other side. For example, after the rough grinding device at the first processing position performs rough grinding on a single crystal silicon rod, the transfer body is driven by the transposition mechanism to rotate 120°, and then the rough grinding device can perform rough grinding on another single crystal silicon rod. Of course, it should be understood that the preset angle is not limited to 120°. For example, the transfer body can also be driven by the transposition mechanism to rotate 120°±10° or other angles, and the same processing position can process the silicon rod clamped by the silicon rod clamp corresponding to the other side of the transfer body.

[0089] In actual processing scenarios, in order to avoid the accumulation of errors in the transfer body after multiple transfers during continuous processing, the clamping center line of the silicon rod clamp must be parallel or approximately parallel to the long side direction of the processing location. The preset angle can also be determined by the clamping center line direction of the silicon rod in the current processing location and the long side direction of the next processing location. For example, the preset angle is used to make the clamping center line of the silicon rod clamp parallel or approximately parallel to the long side of the next processing location after it is transferred to the next processing location. The parallel or approximately parallel angle, for example, is an angle between the clamping center line of the silicon rod and the long side direction of the processing location of 0° to 10°.

[0090] It should be understood that in the silicon rod grinder of the present application, the transfer body is arranged in the central area of ​​the silicon rod processing platform, and the rough grinding device and the fine grinding device are arranged on the outside of the transfer body. In order to realize the side grinding of the horizontally clamped silicon rod, the grinding surface of the rough grinding tool in the grinding device is arranged in a horizontal plane, and the grinding surface of the fine grinding tool in the fine grinding device is arranged in a horizontal plane. After the transfer body rotates to switch the processing position of the silicon rod clamp, the horizontal height of the upper and lower sides of the clamped silicon rod remains unchanged. Alternatively, the clamping part of the silicon rod clamp drives the silicon rod to rotate, so that the surface to be ground of the silicon rod can be adjusted to be located in the horizontal plane. Therefore, there is no need to accurately position the preset angle at which the transfer body drives the silicon rod clamp to rotate.

[0091] In certain embodiments, the long side of the first processing area and the extension of the long side of the second processing area form a 60° angle, wherein the long side of the first processing area corresponds to the direction of travel of the rough grinding tool in the rough grinding device, and the long side of the second processing area corresponds to the direction of travel of the fine grinding tool in the fine grinding device. The directions of travel of the rough grinding tool and the fine grinding tool, respectively, are both horizontal.

[0092] In actual processing scenarios, the axis of the silicon rod held by the silicon rod clamp in the grinding state is parallel (or approximately parallel) to the long side of the processing location. When the grinding tool moves along the travel direction, the distance between the grinding tool and the silicon rod remains unchanged, which is conducive to the grinding operation and helps to simplify the equipment. To this end, the angle between the long side of the first processing location and the long side of the second processing location determines the angle at which the transfer body of the same silicon rod clamp needs to be transferred from one processing location to another.

[0093] On the other hand, the angles between the multiple silicon rod clamps on the transport body determine the angle at which the transport body must be rotated when, after completing a corresponding process, such as fine grinding, at a second processing location on a first silicon rod held by one silicon rod clamp, the second silicon rod held by another silicon rod clamp is finely ground. By ensuring that the angle between the long sides of the first processing location and the second processing location is the same as the angle between adjacent silicon rod clamps on the transport body, the centerline of any silicon rod clamp is parallel or approximately parallel to the long side of the processing location in which it is located after the transport body is driven to rotate through the preset angle.

[0094] The long side of the first processing location and the extension line of the long side of the second processing location form an angle of 60°, and the outline of the transfer body in the horizontal plane is an equilateral triangle. Then, the clamping center line of the silicon rod clamp located on the outside of any side and the clamping center line of its adjacent silicon rod clamp form an angle of 60°. When the transposition body drives the silicon rod clamp to convert a preset angle (for example, 120°), the clamping center line of any silicon rod clamp is parallel or approximately parallel to the long side of the processing location where it is located.

[0095] In some embodiments, the silicon rod processing platform is further provided with a waiting area. In the waiting state, the first side of the transfer body contour corresponds to the waiting area, the second side corresponds to the first processing area, and the third side corresponds to the second processing area.

[0096] Here, the waiting state is a state in which the clamping center line corresponding to a silicon rod clamp on the transfer body is parallel or approximately parallel to the silicon rod loaded at the waiting position. In this state, the contour edge with the silicon rod clamp is regarded as the first edge, the second edge of the contour of the transfer body corresponds to the first processing position, and the third edge corresponds to the second processing position. In this way, the waiting position can be used for loading or unloading silicon rods, the first processing position can be used for rough grinding, and the second processing position can be used for fine grinding. At the same time, different processing positions are all in working state. At the same time, the transfer body drives the silicon rod clamp to switch between different positions, so that different grinding processes can be seamlessly connected for the same silicon rod, thereby improving the processing efficiency of the silicon rod grinder.

[0097] At the same time, the silicon rod grinder of the present application can also be modified in other ways. For example, other processing areas can be set on the silicon rod processing platform. For this purpose, the present application also provides the following embodiments.

[0098] In some embodiments, the silicon rod processing platform is further provided with a third processing position; the silicon rod grinder further comprises a chamfering device, which is provided in the third processing position and is used to chamfer the silicon rod clamped by the silicon rod clamp located at the third processing position in the silicon rod transfer device. In certain embodiments, when the silicon rod processing equipment grinds different sides of the cut silicon rod or chamfers the edges, the clamped silicon rod is driven to rotate by the rotating mechanism of the clamping part of the silicon rod clamp. Usually, the cross-section of the silicon rod after cutting is rectangular or quasi-rectangular. When grinding different sides, the rotating mechanism of the clamping part controls the silicon rod to rotate a certain angle, such as 90°, to switch the grinding surface of the grinding tool relative to the silicon rod. When chamfering different edges, it can be achieved by controlling the clamping part to rotate a certain angle, such as 45°, 135°, etc. In the case where the grinding surface provided by the grinding device is a plane, when chamfering the silicon rod, the clamping portion rotation mechanism can control the clamped silicon rod to rotate at different angles to perform multiple chamfering. For example, after completing the grinding of one side of the silicon rod, an edge adjacent to the side and the edge opposite to the edge can be chamfered multiple times by rotating at a certain angle, such as 40°, 45°, 50°, etc., to obtain a silicon rod with a smoother transition at the junction of different sides. The angles are all rotation angles starting from the initial position of grinding. The method of achieving chamfering can refer to patent disclosures such as CN108942570A, which drives the silicon rod to rotate a certain angle, and the grinding tool cooperates to feed relative to the silicon rod to achieve grinding of the edges of the cut silicon rod. In this example, by controlling the relative movement between the silicon rod clamp and the grinding device, the grinding device can achieve grinding and chamfering of the silicon rod after cutting.

[0099] In some embodiments, the silicon ingot processing apparatus of the present application further includes a chamfering device for grinding the edges of the cut silicon ingot. Generally, chamfering the silicon ingot can easily cause significant wear and tear on the grinding tool. Here, by using the grinding tool and the chamfering tool of the chamfering device to grind and chamfer the silicon ingot, respectively, the service life of the grinding tool can be increased.

[0100] In some embodiments, the third processing position is located between the first processing position and the second processing position, and the chamfering device is used to chamfer the rough-ground silicon rod clamped by the silicon rod clamp located at the third processing position in the silicon rod transfer device; or, the third processing position is located after the second processing position, and the chamfering device is used to chamfer the fine-ground silicon rod clamped by the silicon rod clamp located at the third processing position in the silicon rod transfer device.

[0101] See also Figure 2a and Figure 2b ,in, Figure 2a Shown is a schematic structural diagram of a silicon rod grinder in one embodiment of the present application. Figure 2b Display as Figure 2a A top view of the . Figure 2a and Figure 2b As shown, the silicon rod grinding machine includes a machine base 1, a silicon rod transfer device 2, a rough grinding device 3, a fine grinding device 4, and a chamfering device 5.

[0102] It should be noted that in the embodiments of the silicon rod grinder provided in the present application in which a chamfering device and a corresponding chamfering device are provided, as well as in the embodiments in which the aforementioned silicon rod grinder is only provided with a first processing position and a second processing position, or in the embodiments in which the aforementioned silicon rod grinder is provided with a first processing position, a second processing position and a waiting position, the structures, functions and processing methods of the machine base, silicon rod transfer device, rough grinding device and fine grinding device are similar.

[0103] For example, Figure 2a and Figure 2b In the illustrated embodiment, the base 1 still serves as the main component of the silicon ingot processing equipment, providing a work platform. Of course, in this example, the specific structure and shape of the base 1 can be modified based on different functional or structural requirements. The silicon ingot processing platform is provided with a third processing area. Accordingly, the base 1 can be configured as a rectangle, with the three sides of the rectangle corresponding to the first, second, and third processing areas, respectively.

[0104] exist Figure 2a 、 Figure 2bIn the illustrated embodiment, the machine base 1 has an overall rectangular structure, and the silicon ingot processing platform is designed to conform to the shape of the machine base 1. Processing locations are provided on one or more sides of the silicon ingot processing platform, such as a first processing location, a second processing location, and a third processing location. The third processing location is located between the first and second processing locations. Specifically, the first processing location is located on the first side of the silicon ingot processing platform, the third processing location is located on the second side of the silicon ingot processing platform, the second side being adjacent to the first side, and the second processing location is located on the third side of the silicon ingot processing platform, the third side being adjacent to the second side and facing the first side. That is, the first processing location is 90° away from the third processing location, and the third processing location is 90° away from the second processing location. In the embodiment of the present application, corresponding silicon ingots can be processed independently at the first, third, and second processing locations.

[0105] The silicon rod transfer device is installed on the machine base and is used to transfer silicon rods. Figure 2a 、 Figure 2b In the illustrated embodiment, the silicon rod transfer device 2 further includes a transfer body 21 and a plurality of silicon rod clamps 23 and a position-changing mechanism (not shown in the drawings) disposed on the transfer body 21 .

[0106] The silicon rod transfer device 2 is intended to transfer the processed silicon rods between the various processing locations of the silicon rod processing platform. Therefore, in one embodiment of the present application, the transfer body 21 is located in the central area of ​​the silicon rod processing platform, and the transfer body 21 is designed to be rectangular in shape to conform to the shape of the silicon rod processing platform. Each side of the rectangular transfer body 21 can be used as an installation surface for installing multiple silicon rod fixtures 23, such as Figure 2a 、 Figure 2b As shown, a silicon rod clamp 23 is installed on each of the four sides of the transfer body 21.

[0107] In addition, in this embodiment, the silicon rod transfer device 2 can realize the switching of the transfer body 21 and the silicon rod clamps 23 provided therein at various processing locations through the switching mechanism to transfer the silicon rods clamped by the silicon rod clamps 23 to the corresponding processing locations for corresponding processing operations. The specific structure and function of the silicon rod clamps 23 can be referred to Figure 1a 、 Figure 1b The embodiments shown will not be described in detail here.

[0108] Here, the transposition mechanism can be configured to include a transposition shaft. Thus, by driving the transposition shaft to rotate by a predetermined angle, the transport body 21 and its respective silicon rod holders 23 can be switched between various processing locations. In certain embodiments, the transposition shaft is located at the geometric center of the transport body 21 and is oriented in the direction of the vertical. The structure of the transposition mechanism and the method for driving the transport body to rotate can be referred to in the aforementioned embodiments and will not be further described here.

[0109] Of course, in the embodiment where the silicon rod processing platform is provided with a third processing location, when the positional relationships between the multiple processing locations are different, the angle at which the transfer body is driven to rotate by the position change mechanism may be changed accordingly.

[0110] Taking the example of two adjacent processing positions in the aforementioned processing positions being 90° apart, it is assumed that, in one case, in the initial state, a silicon rod clamp in the silicon rod transfer device clamps a silicon rod and the silicon rod clamp and the silicon rod clamped therein correspond to the first processing position. The driving source is used to drive the driving gear to rotate counterclockwise, and through the engagement of the driving gear with the driven gear rail, the driven gear and its associated transposition shaft are driven to rotate clockwise by a preset angle of 90° (or 180°), so that the silicon rod clamp in the silicon rod transfer device and the silicon rod clamped therein are transposed from the first processing position to the third processing position (or the second processing position). Alternatively, in another case, in the initial state, a silicon rod clamp in the silicon rod transfer device holds a silicon rod and the silicon rod clamp and the silicon rod clamped by it correspond to the second processing position. The driving source is used to drive the driving gear to rotate clockwise, and through the engagement of the driving gear with the driven rack, the driven gear and its associated transposition shaft are driven to rotate counterclockwise by a preset angle of 90° (or 180°), so that the silicon rod clamp in the silicon rod transfer device and the silicon rod clamped by it are transposed from the second processing position to the third processing position (or the first processing position). The preset angle is not strictly limited. For example, in addition to the aforementioned 90° (or 180°), in actual processing scenarios, the preset angle may be allowed to deviate from 90° (or 180°). For example, the preset angle may be 90°±10° (or 180°±10°), as well as other angles.

[0111] In actual processing scenarios, in order to avoid the accumulation of errors in the transfer body after multiple transfers during continuous processing, the clamping center line of the silicon rod clamp must be parallel or approximately parallel to the long side direction of the processing location. The preset angle can also be determined by the clamping center line direction of the silicon rod in the current processing location and the long side direction of the next processing location. For example, the preset angle is used to make the clamping center line of the silicon rod clamp parallel or approximately parallel to the long side of the next processing location after it is transferred to the next processing location. The parallel or approximately parallel angle, for example, is an angle between the clamping center line of the silicon rod and the long side direction of the processing location of 0° to 10°.

[0112] The following describes the feasible structures and implementations of the coarse grinding and fine grinding devices using a silicon ingot grinder equipped with a first processing area, a second processing area, and a third processing area as an example. Of course, the fine grinding and coarse grinding devices can also be used in the aforementioned silicon ingot grinder equipped with only the first and second processing areas.

[0113] In one embodiment, for example Figure 2a 、 Figure 2b In the illustrated embodiment, the rough grinding device 3 includes: a rough grinding installation structure 31 , at least one pair of rough grinding tools 33 , a rough grinding tool advance and retreat mechanism 35 , and a rough grinding tool travel mechanism 37 .

[0114] The rough grinding installation structure 31 is arranged on the machine base and corresponds to the first processing area, and is used to set at least one pair of rough grinding tools 33. Figure 2a 、 Figure 2b In the illustrated embodiment, a rough grinding mounting structure 31 is provided at the edge of the silicon ingot processing platform of the machine base 1 and is used to mount at least one pair of rough grinding tools 33. The rough grinding mounting structure 31 may be, for example, a mounting plate, a mounting beam, or a mounting frame constructed from multiple components. For example, if the rough grinding mounting structure 31 is a mounting plate, the mounting plate is a regularly shaped rectangular plate having a certain height and length. The height of the mounting plate ensures that at least one pair of rough grinding tools 33 can be mounted, and the length of the mounting plate must at least cover the length of the silicon ingot to be rough ground. For example, the length of the mounting plate corresponds to the length of the first processing area. The side of the mounting plate facing the first processing area serves as the mounting surface for mounting at least one pair of rough grinding tools 33. The length of the first processing area refers to the span along the long side of the first processing area, which is the direction of travel of the rough grinding tools.

[0115] The at least one pair of rough grinding tools is arranged on the rough grinding mounting structure. Specifically, the at least one pair of rough grinding tools is arranged on a mounting side of the rough grinding mounting structure along the direction of the gravity vertical line. In this way, the grinding surfaces of the at least one pair of rough grinding tools are located in opposite horizontal planes, that is, the grinding surfaces of the two rough grinding tools in the at least one pair of rough grinding tools are respectively located in a first horizontal plane and a second horizontal plane, wherein the first horizontal plane and the second horizontal plane are parallel to each other and perpendicular to the gravity vertical line. Figure 2a 、 Figure 2b In the illustrated embodiment, the pair of rough grinding tools 33 are disposed on the rough grinding mounting structure 31 via a rough grinding tool support.

[0116] Regarding the rough grinding tool, in some implementations, the rough grinding tool includes a rough grinding wheel and a rotating motor connected to the rough grinding wheel. The rough grinding wheel has a certain particle size and roughness. The two rough grinding wheels arranged opposite to each other in the at least one pair of rough grinding tools are respectively provided with two symmetrical grinding surfaces of the clamped silicon rod. In some embodiments, the rough grinding wheel is circular and hollow in the middle. The rough grinding wheel is formed by consolidating abrasive grains and a binder to form a surface with an abrasive portion that contacts and rotates with the surface of the silicon rod to be ground. The rough grinding wheel has a certain abrasive grain size and abrasive grain density, and has pores in the rough grinding wheel. The abrasive of the rough grinding wheel can be set to abrasive grains with a hardness greater than the hardness of silicon material, such as aluminum oxide, silicon carbide, diamond, cubic boron nitride, etc., according to the needs of grinding silicon rods. The rotating motor is connected to the rough grinding wheel through a rotating shaft, and is used to drive the rough grinding wheel to rotate at a predetermined speed.

[0117] The rough grinding tool advance and retreat mechanism is used to drive at least one of the at least one pair of rough grinding tools to move up and down along the direction of the gravity perpendicular, wherein the gravity perpendicular is perpendicular to the horizontal plane. The rough grinding tool advance and retreat mechanism controls the at least one of the at least one pair of rough grinding tools to move up and down along the gravity perpendicular, thereby adjusting the relative distance between the two rough grinding tools in the at least one pair of rough grinding tools in the gravity perpendicular direction, thereby controlling the feed rate during the grinding process and determining the grinding amount. In addition, when the silicon rod clamp in the silicon rod transfer device clamps the silicon rod, the at least one pair of rough grinding tools moves up and down along the gravity perpendicular under the control of the rough grinding tool advance and retreat mechanism.

[0118] For example, each pair of rough grinding tools is equipped with a rough grinding tool advance and retreat mechanism. In one embodiment, the rough grinding tool advance and retreat mechanism includes an advance and retreat guide rail and an advance and retreat drive unit. Figure 2a 、 Figure 2b 、 Figure 2c ,in, Figure 2cThe schematic diagram of the structure of the rough grinding device of the silicon rod grinder shown in Figure 2a in one embodiment is shown. The rough grinding tool advance and retreat mechanism 35 includes an advance and retreat guide rail 351 and an advance and retreat drive unit 352. The advance and retreat guide rail 351 is arranged on the first mounting side of the rough grinding tool support along the direction of the gravity perpendicular line. The bottom of the rough grinding tool 33 is provided with a guide groove structure or a guide block structure along the direction of the gravity perpendicular line that cooperates with the advance and retreat guide rail 351. The advance and retreat drive unit 352 can further include, for example, a ball screw and a drive motor. The ball screw is arranged along the advance and retreat guide rail 351, is associated with the corresponding rough grinding tool 33, and is connected to the drive motor shaft.

[0119] In one embodiment of the present application, one of the at least one pair of rough grinding tools is equipped with a ball screw and a drive motor, wherein the ball screw is arranged along the vertical line and is associated with the one rough grinding tool. Thus, the drive motor drives the ball screw to rotate in the forward direction so that the rough grinding tool associated with the ball screw moves along the advance and retreat guide rail toward the other rough grinding tool disposed oppositely, thereby reducing the grinding distance between the two rough grinding tools (or adjusting the grinding feed rate); alternatively, the drive motor drives the ball screw to rotate in the reverse direction so that the rough grinding tool associated with the ball screw moves along the advance and retreat guide rail away from the other rough grinding tool disposed oppositely, thereby increasing the grinding distance between the two rough grinding tools.

[0120] In one embodiment of the present application, each rough grinding tool in the at least one pair of rough grinding tools is equipped with a ball screw and a drive motor. For each rough grinding tool, the ball screw is arranged along the vertical line and is associated with the rough grinding tool. In this way, the drive motor drives the ball screw to rotate in the forward direction so that the rough grinding tool associated with the ball screw moves along the advance and retreat guide rail toward the other rough grinding tool disposed oppositely, thereby reducing the grinding distance between the two rough grinding tools (or adjusting the grinding feed rate). Alternatively, the drive motor drives the ball screw to rotate in the reverse direction so that the rough grinding tool associated with the ball screw moves along the advance and retreat guide rail away from the other rough grinding tool disposed oppositely, thereby increasing the grinding distance between the two rough grinding tools.

[0121] In one embodiment of the present application, two rough grinding tools in the at least one pair of rough grinding tools share a ball screw and a drive motor, the ball screw being, for example, a bidirectional screw, arranged along the direction of the vertical line, having two sections of threads with opposite rotation directions arranged on the shaft of the bidirectional screw, the two sections of threads being associated with the two rough grinding tools, respectively, the drive motor being associated with the bidirectional screw, and being driven by the drive motor to rotate the bidirectional screw so that the two rough grinding tools associated with the bidirectional screw move toward or away from each other along the advance and retreat guide rail based on a certain cooperative relationship. For example, when the drive motor drives the bidirectional screw to rotate in the forward direction, the two associated rough grinding tools are driven to move toward each other along the vertical line (i.e., approach each other), thereby reducing the grinding distance between the two rough grinding tools (or adjusting the grinding feed rate), or when the drive motor drives the screw to rotate in the reverse direction, the two associated rough grinding tools are driven to move away from each other along the vertical line (i.e., move away from each other), thereby increasing the grinding distance between the two rough grinding tools.

[0122] The rough grinding tool travel mechanism is used to drive the at least one pair of rough grinding tools to move along a horizontal line. In one embodiment, the rough grinding tool travel mechanism includes a travel guide rail and a travel drive unit. Figure 2a 、 Figure 2b 、 Figure 2c In the illustrated embodiment, the rough grinding tool travel mechanism 37 includes a travel guide rail 371 and a travel drive unit 372. The travel guide rail 371 is horizontally disposed on the mounting side of the rough grinding mounting structure 31 and is used to mount a rough grinding tool support equipped with at least one pair of rough grinding tools 33. A second mounting side of the rough grinding tool support is provided with a horizontal guide groove structure or a guide block structure that cooperates with the travel guide rail 371. The travel drive unit 372 may further include, for example, a ball screw and a drive motor. The ball screw is disposed along the travel guide rail 371, associated with the corresponding rough grinding tool support and the at least one pair of rough grinding tools 33 thereon, and axially connected to the drive motor. The driving motor is used to drive the ball screw to rotate forward so that the rough grinding tool support associated with the ball screw and at least a pair of rough grinding tools 33 thereon are moved along the travel guide from the first end of the first processing position to the second end of the first processing position, or the driving motor is used to drive the ball screw to rotate forward so that the rough grinding tool support associated with the ball screw and at least a pair of rough grinding tools 33 thereon are moved along the travel guide 371 from the second end of the first processing position to the first end of the first processing position.

[0123] When the rough grinding tool is used to perform rough grinding on the silicon rod located in the first processing position, the rough grinding tool advance and retreat mechanism of the rough grinding tool drives the rough grinding tool in the at least one pair of rough grinding tools to move in the direction of the vertical line to determine the feed amount of the rough grinding tool and the grinding surface of the silicon rod. The rough grinding tool travel mechanism drives the at least one pair of rough grinding tools to move along the horizontal line until they have passed through the entire silicon rod. If necessary, the rough grinding tool travel mechanism can also drive the at least one pair of rough grinding tools to move back and forth along the horizontal line to ensure that the silicon rod is fully ground in the length direction. At the same time, the rough grinding tool advance and retreat mechanism drives the at least one pair of relatively arranged rough grinding tools to move in the direction of the vertical line to determine the feed amount of the rough grinding tool and the grinding surface of the silicon rod. In such a case Figure 2a 、 Figure 2b In the illustrated embodiment, at least one pair of rough grinding tools 33 in the rough grinding device 3 are arranged opposite to each other along the direction of the gravity perpendicular. The grinding surfaces of the at least one pair of rough grinding tools 33 are located in relative horizontal planes, wherein the horizontal planes are perpendicular to the gravity perpendicular. When grinding the silicon rod, the rough grinding tool advance and retreat mechanism 35 drives at least one of the at least one pair of rough grinding tools 33 to move up and down along the gravity perpendicular to adjust the feed amount, so as to grind the upper and lower sides of the silicon rod along the direction of the gravity perpendicular.

[0124] In one embodiment of the present application, the rough grinding device may further include a cooling device to cool the at least one pair of rough grinding tools, reduce damage to the surface layer of the silicon rod during the grinding process, and improve the grinding efficiency and service life of the rough grinding wheel. In one implementation of this embodiment, the cooling device includes a cooling water pipe, a guide groove and a guide hole. In some embodiments, a protective cover for placing cooling water into the rotating motor of the rough grinding wheel is provided on the outer edge of the circumference of the rough grinding wheel. One end of the cooling water pipe is connected to the cooling water source, and the other end is connected to the surface of the protective cover of the rough grinding wheel. The guide groove is provided on the protective cover as the contact point between the protective cover and the cooling water pipe, and the guide hole is provided in the cooling groove. The coolant of the cooling device can be common cooling water. The cooling water pipe is connected to the cooling water source. The cooling water is sucked through the cooling water pipe to the guide groove and the guide hole on the surface of the rough grinding wheel, and is guided directly to the rough grinding wheel and the grinding surface of the ground silicon rod for cooling. During the grinding of the rough grinding wheel, the cooling water in the guide hole enters the interior of the rough grinding wheel by centrifugal action due to the rotation of the rough grinding wheel for sufficient cooling.

[0125] It should be understood that the rough grinding device in the above embodiment can be used in a silicon rod grinder having a first processing position and a second processing position, and can also be used in a silicon rod grinder having a first processing position, a second processing position, and a third processing position. In certain embodiments, for example, for a silicon rod grinder having a first processing position and a second processing position (e.g. Figure 1aThe rough grinding device can achieve both grinding and rough chamfering of silicon ingots. The rough grinding mounting structure is mounted on the machine base 1 via a displacement mechanism. The displacement mechanism includes: a first linear guide rail mounted on the machine base 1 along the width of the first processing area, the width of the first processing area being orthogonal to the horizontal direction of travel of the rough grinding tool; and a drive source for driving the rough grinding mounting structure along the first linear guide rail. The drive source can be, for example, a pneumatic cylinder, a hydraulic pump, or a travel motor.

[0126] The horizontal direction in which the rough grinding tool moves is the long side direction (also referred to as the length direction) of the first processing area. The rough grinding device mounting structure can move along the first linear guide rail, thereby driving the rough grinding tool mounted on the rough grinding device mounting structure to move along the width direction of the first processing area, thereby adjusting the distance between the rough grinding tool and the axis of the silicon ingot in the width direction of the first processing area.

[0127] As mentioned above, the grinding surface of the rough grinding tool is typically in the form of a ring. In one working scenario, when the rough grinding tool is used to achieve rough chamfering, the drive source can drive the rough grinding mounting structure and the rough grinding tool mounted thereon to move, thereby adjusting the position of the silicon rod edge relative to the rough grinding tool to determine the contact chord length between the silicon rod edge and the grinding surface of the rough grinding tool. By increasing the contact length between the silicon rod edge and the rough grinding tool, the rough chamfering efficiency can be effectively improved and the wear of the rough grinding tool can be reduced.

[0128] The fine grinding device is used to perform fine grinding on the silicon rod at the second processing position of the silicon rod processing platform. Figure 2b In the illustrated embodiment, the fine grinding device 4 includes a fine grinding mounting structure 41 , at least one pair of fine grinding tools 43 , a fine grinding tool advancing and retreating mechanism 45 , and a fine grinding tool advancing mechanism 47 .

[0129] The fine grinding installation structure is arranged on the machine base and corresponds to the second processing area, and is used to set at least one pair of fine grinding tools. Figure 2a 、 Figure 2bIn the illustrated embodiment, a fine grinding mounting structure 41 is provided at the edge of the silicon rod processing platform of the machine base 1 and is used to mount at least one pair of fine grinding tools 43. The fine grinding mounting structure 41 may be, for example, a mounting plate, a mounting beam, or a mounting frame constructed from multiple components. For example, the fine grinding mounting structure 41 is a mounting plate. The mounting plate is a regularly shaped rectangular plate having a certain height and length. The height of the mounting plate ensures that at least one pair of fine grinding tools 43 can be mounted, and the length of the mounting plate must at least cover the length of the silicon rod to be fine-ground. For example, the length of the mounting plate corresponds to the length of the second processing area. The side of the mounting plate facing the second processing area serves as the mounting surface for mounting at least one pair of fine grinding tools 43. The length of the second processing area is the span along the long side of the second processing area, which is the direction of travel of the fine grinding tools.

[0130] The at least one pair of fine grinding tools is arranged on the fine grinding mounting structure. Specifically, the at least one pair of fine grinding tools is arranged on a mounting side of the fine grinding mounting structure along the direction of the gravity vertical line. In this way, the grinding surfaces of the at least one pair of fine grinding tools are located in relative horizontal planes, that is, the grinding surfaces of the two fine grinding tools in the at least one pair of fine grinding tools are respectively located in the first horizontal plane and the second horizontal plane, wherein the first horizontal plane and the second horizontal plane are parallel to each other and perpendicular to the gravity vertical line. Figure 2a 、 Figure 2b In the illustrated embodiment, the pair of fine grinding tools 43 are disposed on the fine grinding mounting structure 41 via a fine grinding tool support.

[0131] Regarding the fine grinding tool, in some implementations, the fine grinding tool includes a fine grinding wheel and a rotating motor connected to the fine grinding wheel. The fine grinding wheel has a certain particle size and roughness. The two fine grinding wheels arranged opposite to each other in the at least one pair of fine grinding tools are respectively provided to two symmetrical grinding surfaces of the clamped silicon rod. In some embodiments, the fine grinding wheel is circular and hollow in the middle. The fine grinding wheel is formed by consolidating abrasive grains and a binder to form a surface with an abrasive portion that contacts and rotates with the surface of the silicon rod to be ground. The fine grinding wheel has a certain abrasive grain size and abrasive grain density, and there are pores in the fine grinding wheel. The abrasive of the fine grinding wheel can be set to abrasive grains with a hardness greater than the hardness of silicon material, such as aluminum oxide, silicon carbide, diamond, cubic boron nitride, etc., according to the needs of grinding silicon rods. The rotating motor is connected to the fine grinding wheel through a rotating shaft, and is used to drive the fine grinding wheel to rotate at a predetermined speed.

[0132] The fine grinding tool advance and retreat mechanism is used to drive at least one of the at least one pair of fine grinding tools to move up and down along the direction of the gravity perpendicular, wherein the gravity perpendicular is perpendicular to the horizontal plane. The fine grinding tool advance and retreat mechanism controls the at least one of the at least one pair of fine grinding tools to move up and down along the gravity perpendicular, thereby adjusting the relative distance between the two fine grinding tools in the at least one pair of fine grinding tools in the gravity perpendicular direction, thereby controlling the feed rate during the grinding process and thus determining the grinding amount. In addition, when the silicon rod clamp in the silicon rod transfer device clamps the silicon rod, the at least one pair of fine grinding tools moves up and down along the gravity perpendicular under the control of the fine grinding tool advance and retreat mechanism.

[0133] For example, each pair of fine grinding tools is equipped with a fine grinding tool advance and retreat mechanism. In one embodiment, the fine grinding tool advance and retreat mechanism includes an advance and retreat guide rail and an advance and retreat drive unit. Figure 2a 、 Figure 2b In the embodiment described, the fine grinding tool advance / retract mechanism 45 includes an advance / retract guide rail and an advance / retract drive unit (not shown). The advance / retract guide rail is disposed along the vertical axis on the first mounting side of the fine grinding tool support. The bottom of the fine grinding tool 43 is provided with a guide groove structure or a guide block structure along the vertical axis that cooperates with the advance / retract guide rail. The advance / retract drive unit may further include, for example, a ball screw and a drive motor. The ball screw is disposed along the advance / retract guide rail, is associated with the corresponding fine grinding tool, and is axially connected to the drive motor.

[0134] In one embodiment of the present application, one of the at least one pair of fine grinding tools is equipped with a ball screw and a drive motor, wherein the ball screw is arranged along the vertical line and is associated with the one fine grinding tool. Thus, the drive motor drives the ball screw to rotate in the forward direction so that the fine grinding tool associated with the ball screw moves along the advance and retreat guide rail toward the other fine grinding tool disposed oppositely, thereby reducing the grinding distance between the two fine grinding tools (or adjusting the grinding feed rate); alternatively, the drive motor drives the ball screw to rotate in the reverse direction so that the fine grinding tool associated with the ball screw moves along the advance and retreat guide rail away from the other fine grinding tool disposed oppositely, thereby increasing the grinding distance between the two fine grinding tools.

[0135] In one embodiment of the present application, each of the at least one pair of fine grinding tools is equipped with a ball screw and a drive motor. For each fine grinding tool, the ball screw is arranged along the vertical line and is associated with the fine grinding tool. In this way, the drive motor drives the ball screw to rotate in the forward direction so that the fine grinding tool associated with the ball screw moves along the advance and retreat guide rail toward the other fine grinding tool arranged oppositely, thereby reducing the grinding distance between the two fine grinding tools (or adjusting the grinding feed rate). Alternatively, the drive motor drives the ball screw to rotate in the reverse direction so that the fine grinding tool associated with the ball screw moves along the advance and retreat guide rail away from the other fine grinding tool arranged oppositely, thereby increasing the grinding distance between the two fine grinding tools.

[0136] In one embodiment of the present application, two fine grinding tools in the at least one pair of fine grinding tools share a ball screw and a drive motor, and the ball screw can be, for example, a bidirectional screw, which is arranged along the direction of the vertical line, and has two sections of threads with opposite rotation directions on the shaft of the bidirectional screw, which are respectively associated with the two fine grinding tools, and the drive motor is associated with the bidirectional screw, and the bidirectional screw is driven by the drive motor to rotate, so that the two fine grinding tools associated with the bidirectional screw move toward each other or away from each other along the advance and retreat guide rail based on a certain cooperative relationship. For example, when the drive motor drives the bidirectional screw to rotate in the forward direction, the two fine grinding tools associated with the bidirectional screw are driven to move toward each other along the vertical line (i.e., approach each other), reducing the grinding distance between the two fine grinding tools (or adjusting the grinding feed rate), or when the drive motor drives the screw to rotate in the reverse direction, the two fine grinding tools associated with the bidirectional screw are driven to move away from each other along the vertical line (i.e., move away from each other), increasing the grinding distance between the two fine grinding tools.

[0137] The fine grinding tool travel mechanism is used to drive the at least one pair of fine grinding tools to move along a horizontal line. In one embodiment, the fine grinding tool travel mechanism includes a travel guide rail and a travel drive unit. Figure 2a 、 Figure 2bIn the illustrated embodiment, the fine grinding tool travel mechanism 47 includes a travel guide rail and a travel drive unit (not shown). The travel guide rail is horizontally disposed on the mounting side of the fine grinding mounting structure 41 and is used to mount a fine grinding tool support equipped with at least one pair of fine grinding tools. A second mounting side of the fine grinding tool support is provided with a horizontal guide groove structure or a guide block structure that cooperates with the travel guide rail. The travel drive unit may further include, for example, a ball screw and a drive motor. The ball screw is disposed along the travel guide rail and is associated with the corresponding fine grinding tool support and the at least one pair of fine grinding tools 43 thereon, and is axially connected to the drive motor. The driving motor is used to drive the ball screw to rotate forward so that the fine grinding tool support associated with the ball screw and at least a pair of fine grinding tools 43 thereon are moved along the travel guide from the first end of the second processing position to the second end of the second processing position, or the driving motor is used to drive the ball screw to rotate forward so that the fine grinding tool support associated with the ball screw and at least a pair of fine grinding tools 43 thereon are moved along the travel guide from the second end of the second processing position to the first end of the second processing position.

[0138] When the fine grinding tool is used to fine grind the silicon rod located in the second processing position, the fine grinding tool advance and retreat mechanism of the fine grinding tool drives the fine grinding tool in the at least one pair of fine grinding tools to move along the direction of the weighted vertical line to determine the feed amount of the fine grinding tool and the grinding surface of the silicon rod. The fine grinding tool travel mechanism drives the at least one pair of fine grinding tools to move along the horizontal line until they have passed through the entire silicon rod. If necessary, the fine grinding tool travel mechanism can also drive the at least one pair of fine grinding tools to move back and forth along the horizontal line to ensure that the silicon rod is fully ground in the length direction. At the same time, the fine grinding tool advance and retreat mechanism drives the at least one pair of relatively arranged fine grinding tools to move in the direction of the weighted vertical line to determine the feed amount of the fine grinding tool and the grinding surface of the silicon rod. In such a case Figure 2a 、 Figure 2b In the illustrated embodiment, at least one pair of the fine-grinding tools are arranged opposite to each other along the direction of the gravity perpendicular line, and the grinding surfaces of the at least one pair of fine-grinding tools are located in relative horizontal planes, wherein the horizontal planes are perpendicular to the gravity perpendicular line. When grinding the silicon rod, the fine-grinding tool advance and retreat mechanism drives at least one of the at least one pair of fine-grinding tools to move up and down along the direction of the gravity perpendicular line to adjust the feed amount, so as to grind the upper and lower sides of the silicon rod along the direction of the gravity perpendicular line.

[0139] In one embodiment of the present application, the fine grinding device may further include a cooling device to cool the at least one pair of fine grinding tools, reduce damage to the surface layer of the silicon rod during the grinding process, and improve the grinding efficiency and service life of the fine grinding wheel. In one implementation of this embodiment, the cooling device includes a cooling water pipe, a guide groove and a guide hole. In some embodiments, a protective cover for placing cooling water on the outer edge of the circumference of the fine grinding wheel is provided for the rotating motor of the fine grinding wheel. One end of the cooling water pipe is connected to the cooling water source, and the other end is connected to the surface of the protective cover of the fine grinding wheel. The guide groove is provided on the protective cover as the contact point between the protective cover and the cooling water pipe, and the guide hole is provided in the cooling groove. The coolant of the cooling device can be common cooling water. The cooling water pipe is connected to the cooling water source. The cooling water is sucked through the cooling water pipe to the guide groove and the guide hole on the surface of the fine grinding wheel, and is guided directly to the fine grinding wheel and the grinding surface of the ground silicon rod for cooling. During the grinding of the fine grinding wheel, the cooling water in the guide hole enters the interior of the fine grinding wheel by centrifugal action through the rotation of the fine grinding wheel for sufficient cooling.

[0140] It should be understood that the fine grinding device in the above embodiment can be used in a silicon rod grinder having a first processing area and a second processing area, and can also be used in a silicon rod grinder having a first processing area, a second processing area, and a third processing area. In certain embodiments, for example, for a silicon rod grinder having a first processing area and a second processing area (e.g. Figure 1a The fine grinding device can achieve both grinding and fine chamfering of silicon rods. The fine grinding mounting structure is mounted on the machine base via a displacement mechanism. The displacement mechanism includes a second linear guide rail mounted on the machine base along the width of the second processing area, the width of the second processing area being orthogonal to the horizontal direction of travel of the fine grinding tool; and a drive source for driving the fine grinding mounting structure along the second linear guide rail. The drive source can be, for example, a pneumatic cylinder, a hydraulic pump, or a travel motor.

[0141] The horizontal direction in which the fine grinding tool moves is the long side direction (also referred to as the length direction) of the second processing area. The fine grinding device mounting structure can move along the second linear guide rail, thereby driving the fine grinding tool mounted on the fine grinding device mounting structure to move along the width direction of the second processing area, thereby adjusting the distance between the fine grinding tool and the axis of the silicon rod in the width direction of the second processing area.

[0142] As mentioned above, the grinding surface of the fine grinding tool is typically in the form of a ring. In one working scenario, when the fine grinding tool is used to achieve fine chamfering, the drive source can drive the fine grinding mounting structure and the fine grinding tool mounted thereon to move, thereby adjusting the position of the silicon rod edge relative to the fine grinding tool, thereby determining the contact chord length between the silicon rod edge and the grinding surface of the fine grinding tool. By increasing the contact length between the silicon rod edge and the fine grinding tool, the fine chamfering efficiency can be effectively improved and the wear of the fine grinding tool can be reduced.

[0143] Compared with the grinding device for grinding vertical silicon rods, the grinding tool needs to be raised and lowered to cover the side of the silicon rod during the grinding operation, so the grinding tool needs to be equipped with a lifting drive mechanism and a support structure. The equipment space occupied by the grinding tool is often larger; at the same time, the center of gravity height of the grinding tool is in a changing state during the grinding process, which may cause certain stability problems. Here, the silicon rod grinder of the present application provides an implementation method for setting the grinding surface of the grinding tool on a horizontal plane. During the grinding operation of the silicon rod grinder provided by the present application, the grinding device (i.e., the rough grinding device and the fine grinding device) moves along the direction of travel, and the center of gravity height remains unchanged, which is conducive to ensuring the stability of the grinding operation. At the same time, under this setting, the grinding device can be set as one with the machine base, which is conducive to increasing the structural rigidity.

[0144] In an embodiment of the silicon rod grinder of the present application further comprising a rough grinding device, a fine grinding device, and a chamfering device, the rough grinding device, the fine grinding device, and the chamfering device are respectively arranged at corresponding processing positions. In one embodiment of the present application, the rough grinding device is arranged at the first processing position, the fine grinding device is located at the second processing position, and the chamfering device is located at the third processing position, wherein the third processing position is located between the first processing position and the second processing position. Specifically, the rough grinding device is located at the first position for performing rough grinding operations on the silicon rods at the first position, the chamfering device is located at the third position for performing chamfering operations on the rough-ground silicon rods at the third position, and the fine grinding device is located at the second position for performing fine grinding operations on the chamfered silicon rods at the second position. In particular, the aforementioned silicon rod transfer device can be used to clamp the silicon rods and transfer the clamped silicon rods to multiple processing locations. For example, according to the process of the processing operation, the silicon rods clamped by the silicon rod clamps are sequentially transferred to the first processing location, the third processing location, and the second processing location. In this way, under a certain state, multiple silicon rod clamps in the silicon rod transfer device clamp the silicon rods and controllably drive multiple silicon rod clamps and the silicon rods they clamp to change positions. For example, one silicon rod clamp and the silicon rod to be rough-ground it clamps are converted to the first processing position, another silicon rod clamp and the silicon rod to be chamfered it clamps are converted to the third processing position, and another silicon rod clamp and the silicon rod to be fine-ground it clamps are converted to the second processing position. In this way, the rough grinding device located in the first processing position can perform rough grinding operations on the silicon rod to be rough-ground here, the chamfering device located in the third processing position can perform chamfering operations on the silicon rod to be chamfered here, and the fine grinding device located in the second processing position can perform fine grinding operations on the silicon rod to be fine-ground here.

[0145] The specific structures of the rough grinding device and the fine grinding device, as well as the method for achieving silicon rod grinding, can refer to the aforementioned embodiments. It should be understood that when the positions of the first processing area and the second processing area are changed, the direction of travel of the rough grinding tool can still follow the long side direction of the first processing area, and the direction of travel of the fine grinding tool can still follow the long side direction of the second processing area. The structure, layout, and operation of the rough grinding mounting structure, rough grinding tool, rough grinding tool advance and retreat mechanism, and rough grinding tool travel mechanism in the rough grinding device can all refer to the aforementioned embodiments. The fine grinding device is similar and will not be described in detail here.

[0146] The chamfering device is used to chamfer the silicon rods held by the silicon rod clamps located at the third processing position in the silicon rod transfer device. Figure 2a 、 Figure 2bIn the embodiment shown, the third processing position is located between the first processing position and the second processing position. Therefore, the chamfering device 5 is used to chamfer the roughly ground silicon rod clamped by the silicon rod clamp located at the third processing position in the silicon rod transfer device.

[0147] In such Figure 2a 、 Figure 2b In the illustrated embodiment, the chamfering device 5 includes: a chamfering mounting structure 51 , at least one pair of chamfering grinding tools 53 , a chamfering grinding tool advancing and retreating mechanism 55 , and a chamfering grinding tool advancing mechanism 57 .

[0148] The chamfering mounting structure is arranged on the machine base and corresponds to the third processing area, and is used to set at least one pair of chamfering grinding tools. Figure 2a 、 Figure 2b In the embodiment shown, the chamfering mounting structure 51 is provided at the edge of the silicon rod processing platform of the machine base 1, and is used to set at least one pair of chamfering grinders 53. The chamfering mounting structure 51 can be, for example, a mounting structure plate, a mounting beam, or a mounting frame constructed by multiple components. Taking the chamfering mounting structure 51 as an example of a mounting structure plate, the mounting structure plate is a rectangular structure plate with a regular shape and a certain height and length, wherein the height of the mounting structure plate can ensure that at least one pair of chamfering grinders 53 can be set, and the length of the mounting structure plate must at least ensure that it can cover the length of the silicon rod to be chamfered, for example, the length of the mounting structure plate corresponds to the length of the third processing position. The side of the mounting structure plate facing the third processing position serves as the mounting surface, which is used to set at least one pair of chamfering grinders 53.

[0149] The at least one pair of chamfering tools is disposed on the chamfering mounting structure. Specifically, the at least one pair of chamfering tools is disposed on a mounting side of the chamfering mounting structure in a direction opposite to the vertical line. Thus, the grinding surfaces of the at least one pair of chamfering tools are located in opposite horizontal planes, that is, the grinding surfaces of the two chamfering tools in the at least one pair of chamfering tools are located in a first horizontal plane and a second horizontal plane, respectively, wherein the first horizontal plane and the second horizontal plane are parallel to each other and perpendicular to the vertical line. In the embodiment shown in FIG1 , the pair of chamfering tools 53 is disposed on the chamfering mounting structure 51 via a chamfering tool support.

[0150] Regarding the chamfering grinding tool, in some implementations, the chamfering grinding tool includes a chamfering grinding wheel and a rotating motor connected to the chamfering grinding wheel. The chamfering grinding wheel has a certain particle size and roughness, and the two chamfering grinding wheels arranged opposite to each other in the at least one pair of chamfering grinding tools respectively provide two symmetrical grinding surfaces for the clamped silicon rod. In some embodiments, the chamfering grinding wheel is circular. Since the chamfering grinding tool is used to chamfer the edges of the silicon rod, the edges of the silicon rod are smaller than the sides of the silicon rod. Therefore, the size of the chamfering grinding wheel as a chamfering grinding tool is smaller than the size of the rough grinding wheel as a rough grinding tool (or the fine grinding wheel as a fine grinding tool). The chamfering grinding wheel is formed by consolidating abrasive grains and a binder to form a surface with an abrasive portion that rotates in contact with the surface of the silicon rod to be ground. The chamfering grinding wheel has a certain abrasive size and abrasive density, and the chamfering grinding wheel has pores. The abrasive of the chamfering grinding wheel can be set to abrasive particles with a hardness greater than that of silicon material, such as aluminum oxide, silicon carbide, diamond, cubic boron nitride, etc., according to the needs of grinding silicon rods. The rotary motor is connected to the chamfering grinding wheel through a rotating shaft, and is used to drive the chamfering grinding wheel to rotate at a predetermined speed.

[0151] The chamfering tool advance and retreat mechanism is used to drive at least one of the at least one pair of chamfering tools to move up and down along the direction of the gravity perpendicular, wherein the gravity perpendicular is perpendicular to the horizontal plane. The chamfering tool advance and retreat mechanism controls the at least one of the at least one pair of chamfering tools to move up and down along the gravity perpendicular, thereby adjusting the relative distance between the two chamfering tools in the at least one pair of chamfering tools in the gravity perpendicular direction, thereby controlling the feed rate during the grinding process and determining the grinding rate. In addition, when the silicon rod clamp in the silicon rod transfer device clamps the silicon rod, the at least one pair of chamfering tools moves up and down along the gravity perpendicular under the control of the chamfering tool advance and retreat mechanism.

[0152] For example, each pair of chamfering tools is equipped with a chamfering tool advance and retreat mechanism. In one embodiment, the chamfering tool advance and retreat mechanism includes an advance and retreat guide rail and an advance and retreat drive unit. Figure 2a 、 Figure 2b In the embodiment described, the chamfering tool advance / retract mechanism includes an advance / retract guide rail and an advance / retract drive unit (not shown in the drawings). The advance / retract guide rail is disposed along the vertical axis on the first mounting side of the chamfering tool support. The bottom of the chamfering tool 53 is provided with a guide groove structure or a guide block structure along the vertical axis that cooperates with the advance / retract guide rail. The advance / retract drive unit may further include, for example, a ball screw and a drive motor. The ball screw is disposed along the advance / retract guide rail, is associated with the corresponding chamfering tool, and is axially connected to the drive motor.

[0153] In one embodiment of the present application, one of the at least one pair of chamfering grinders is equipped with a ball screw and a drive motor, wherein the ball screw is arranged along the vertical line and is associated with the one chamfering grinder. In this way, the drive motor drives the ball screw to rotate in the forward direction so that the chamfering grinder associated with the ball screw moves along the advance and retreat guide rail toward the other chamfering grinder disposed oppositely, thereby reducing the grinding distance between the two chamfering grinders (or adjusting the grinding feed rate); or the drive motor drives the ball screw to rotate in the reverse direction so that the chamfering grinder associated with the ball screw moves along the advance and retreat guide rail away from the other chamfering grinder disposed oppositely, thereby increasing the grinding distance between the two chamfering grinders.

[0154] In one embodiment of the present application, each of the at least one pair of chamfering grinders is equipped with a ball screw and a drive motor. For each chamfering grinder, the ball screw is arranged along the vertical line and is associated with the chamfering grinder. In this way, the drive motor drives the ball screw to rotate in the forward direction so that the chamfering grinder associated with the ball screw moves along the advance and retreat guide rail toward the other chamfering grinder arranged oppositely to reduce the grinding distance between the two chamfering grinders (or adjust the grinding feed rate). Alternatively, the drive motor drives the ball screw to rotate in the reverse direction so that the chamfering grinder associated with the ball screw moves along the advance and retreat guide rail away from the other chamfering grinder arranged oppositely to increase the grinding distance between the two chamfering grinders.

[0155] In one embodiment of the present application, two chamfering grinders in the at least one pair of chamfering grinders share a ball screw and a drive motor, the ball screw being, for example, a bidirectional screw, arranged along the direction of the vertical line, having two sections of threads with opposite rotation directions arranged on the shaft of the bidirectional screw, the two sections of threads being associated with the two chamfering grinders respectively, the drive motor being associated with the bidirectional screw, and being driven by the drive motor to rotate the bidirectional screw so that the two chamfering grinders associated with the bidirectional screw move toward or away from each other along the advance and retreat guide rail based on a certain cooperative relationship. For example, when the drive motor drives the bidirectional screw to rotate in the forward direction, the two associated chamfering grinders are driven to move toward each other along the vertical line (i.e., approach each other), thereby reducing the grinding distance between the two chamfering grinders (or adjusting the grinding feed rate), or, when the drive motor drives the screw to rotate in the reverse direction, the two associated chamfering grinders are driven to move away from each other along the vertical line (i.e., move away from each other), thereby increasing the grinding distance between the two chamfering grinders.

[0156] The chamfering tool travel mechanism is used to drive the at least one pair of chamfering tools to move along a horizontal line. In one embodiment, the chamfering tool travel mechanism includes a travel guide rail and a travel drive unit. Figure 2a 、 Figure 2bIn the illustrated embodiment, the chamfering tool travel mechanism includes a travel guide rail and a travel drive unit (not shown in the drawings). The travel guide rail is horizontally disposed on the mounting side of the chamfering mounting structure 51 and is used to mount a chamfering tool support equipped with at least one pair of chamfering tools. A second mounting side of the chamfering tool support is provided with a horizontal guide groove structure or a guide block structure that cooperates with the travel guide rail. The travel drive unit may further include, for example, a ball screw and a drive motor. The ball screw is disposed along the travel guide rail and is associated with the corresponding chamfering tool support and the at least one pair of chamfering tools 53 thereon, and is axially connected to the drive motor. The driving motor is used to drive the ball screw to rotate forward so that the chamfering tool support associated with the ball screw and at least one pair of chamfering tools 53 thereon are moved along the travel guide from the first end of the third processing position to the second end of the third processing position, or the driving motor is used to drive the ball screw to rotate forward so that the chamfering tool support associated with the ball screw and at least one pair of chamfering tools 53 thereon are moved along the travel guide from the second end of the third processing position to the first end of the third processing position.

[0157] When the chamfering tool is used to chamfer the silicon rod located in the third processing position, the chamfering tool advance and retreat mechanism of the chamfering tool drives the chamfering tool in the at least one pair of chamfering tools to move in the direction of the vertical line to determine the feed amount of the chamfering tool and the silicon rod edge grinding, and the chamfering tool travel mechanism drives the at least one pair of chamfering tools to move along the horizontal line until it has passed through the entire silicon rod. If necessary, the chamfering tool travel mechanism can also drive the at least one pair of chamfering tools to move back and forth along the horizontal line to ensure that the silicon rod is fully ground in the length direction. In coordination with this, the clamping part rotation mechanism in the silicon rod clamp drives the clamping part to rotate to drive the clamped silicon rod to rotate by a deflection angle, and the chamfering tool advance and retreat mechanism drives the at least one pair of chamfering tools arranged opposite to each other to move in the direction of the vertical line to determine the feed amount of the chamfering tool and the silicon rod edge grinding. For example, Figure 2a 、 Figure 2b In the illustrated embodiment, at least one pair of chamfering grinders 53 in the chamfering device 5 are arranged opposite to each other along the direction of the gravity perpendicular. The grinding surfaces of the at least one pair of chamfering grinders 53 are located in relative horizontal planes, wherein the horizontal planes are perpendicular to the gravity perpendicular. When grinding the silicon rod, the chamfering grinder advance and retreat mechanism 55 drives at least one of the at least one pair of chamfering grinders 53 to move up and down along the direction of the gravity perpendicular to adjust the feed amount, so as to grind the upper and lower edges of the silicon rod along the direction of the gravity perpendicular.

[0158] Typically, the chamfering tool is a grinding wheel with a circular grinding surface. The chamfering tool can grind the edges of the silicon rod at different chordal sides. It should be understood that the chamfering tool can be moved along the long side of the third processing area under the drive of the chamfering tool travel mechanism. By controlling the position of the chamfering tool in the width direction of the third processing area, the silicon rod edges can be aligned with different chordal sides of the chamfering tool. The width direction of the third processing area is orthogonal to the travel direction of the chamfering tool and is located in the horizontal plane.

[0159] In some embodiments, the grinding wheel of the chamfering grinder can be pre-set to achieve the chord edge of the chamfer, so that when the chamfering device is installed to the chamfering mounting structure, the relative position of the clamping center line of the chamfering device and the silicon rod clamp can be predetermined, so that the contact length between the edge of the silicon rod and the grinding wheel during the chamfering operation can be controlled in advance.

[0160] In one embodiment of the present application, two grinding tools of the pair of chamfering grinding tools are staggered in the width direction of the third processing position, wherein the width direction of the third processing position is a horizontal line direction orthogonal to the moving direction of the chamfering grinding tools.

[0161] See also Figure 3a , which shows a side view of the chamfering device of the silicon rod grinder of the present application in one embodiment.

[0162] like Figure 3a As shown, a pair of chamfering grinding tools 53 of the chamfering device are arranged in the width direction of the third processing area (such as Figure 3a The two opposite edges of the silicon rod can be staggered as shown in the arrow direction below. Figure 3a In the figure, the upper and lower chamfering tools 53 are in contact, allowing the edge of the silicon rod to contact the chord edge of the chamfering tool 53 to achieve a longer contact length. In this setting, the chamfering tool 53 can contact a longer edge of the silicon rod, effectively improving chamfering efficiency and extending the wear life of the chamfering tool 53.

[0163] Of course, in other embodiments, the pair of chamfering tools of the chamfering device can be aligned in the width direction of the third processing position, as shown in FIG. Figure 3b The embodiment shown, wherein Figure 3b A side view of another embodiment of the chamfering device of the silicon rod grinding machine of the present application is shown. As shown in the figure, a pair of chamfering grinding tools 53 of the chamfering device are arranged in the width direction of the third processing position (such as Figure 3b In this way, the contact lengths of a pair of opposite edges of the silicon rod (the upper and lower edges in the view) relative to the grinding surfaces of the pair of chamfering grinders 53 are the same, and a longer contact length between the silicon rod edges and the chamfering grinders 53 can also be achieved.

[0164] It should be understood that, generally, after a single crystal silicon rod with a circular cross-section is squared and cut to form a silicon rod with a rectangular or quasi-rectangular cross-section, the silicon rod needs to be ground on the sides and chamfered on the edges. Here, the chamfering of the edges can also be rounding. The inventors of the present application have found that for silicon rods with a common side length of approximately 210 mm after square cutting, the subsequent processes usually required are grinding and chamfering, and for silicon rods with a common side length of approximately 158 mm after square cutting, the subsequent processes usually required are grinding and rounding. In this regard, the chamfering device provided in the present application is adaptable to different process requirements and can be used for chamfering or rounding.

[0165] In certain embodiments, the pair of chamfering grinding tools of the chamfering device may be provided with a coarse chamfering grinding tool and a fine chamfering grinding tool, respectively, to perform coarse chamfering and fine chamfering on the edges of the silicon rod, respectively. Here, the coarse chamfering grinding tool and the fine chamfering grinding tool may be provided as chamfering grinding wheels having different abrasive grain sizes, abrasive grain sizes, or abrasive grain densities, for example.

[0166] In some implementations, in order to make the edges of the silicon rod contact the rough chamfering grinder and the fine chamfering grinder in the order of first contacting the rough chamfering grinder for rough chamfering (or rough rounding) and then contacting the fine chamfering grinder for fine chamfering (or fine rounding), the present application also provides an embodiment in which the fine chamfering grinder and the rough chamfering grinder are staggered in the horizontal line direction of the movement of the chamfering grinder.

[0167] See also Figure 3c , which is a schematic structural diagram of a chamfering device of a silicon rod grinder of the present application in one embodiment.

[0168] like Figure 3c As shown, the chamfering tool 53 is driven by the chamfering tool travel mechanism 57 to move along a horizontal line, and the direction of the horizontal line is Figure 3c The arrow pointing to the right is on top. The chamfering tool 53 has a rough chamfering tool on the top and a fine chamfering tool on the bottom. In this horizontal movement direction, the rough chamfering tool contacts the silicon rod relative to the fine chamfering tool. This allows the silicon rod edge to be roughly chamfered (or roughly rounded) by the rough chamfering tool, then driven by the silicon rod clamp to rotate before contacting the fine chamfering tool and performing fine chamfering (or fine rounding). In this way, the chamfering device of the silicon rod grinding machine of the present application can achieve both rough and fine chamfering, as well as rough and fine rounding, of the silicon rod edge.

[0169] Taking the chamfering device as an example, a processing scenario in which a silicon rod is rounded is used. Figure 3c In the figure, the chamfering grinding tool 53 moves along the traveling direction, and at the same time, the silicon rod is driven by the rotating mechanism of the clamping part of the silicon rod clamp to keep rotating (or rotating) along the axis of the silicon rod, so as to Figure 3cThe arrow above indicates the positive direction of travel of the chamfering tool 53. The rough chamfering tool is positioned before the fine chamfering tool. The rotating silicon rod edge first contacts the rough chamfering tool to achieve rough rounding, then maintains its rotation until it contacts the fine chamfering tool for fine rounding. Simultaneously, the rough and fine chamfering tools, driven by the chamfering tool travel mechanism 57, move to cover the entire length of the silicon rod edge, completing the rounding.

[0170] It should be understood that Figure 3c As only an example of the positional relationship between the fine chamfering tool and the rough chamfering tool in the chamfering device, for example, in other possible implementations, the fine chamfering tool may be arranged at the top and the rough chamfering tool at the bottom, and only when the chamfering device is moved in the working state along the travel direction driven by the chamfering tool travel mechanism, the edge of the silicon rod first contacts the rough chamfering tool and then contacts the fine chamfering tool.

[0171] In a specific implementation, at least one of the rough chamfering tool and the fine chamfering tool may be configured with a displacement mechanism along the travel direction of the chamfering tool to adjust the staggered distance between the rough chamfering tool and the fine chamfering tool in the travel direction.

[0172] In one embodiment of the present application, the chamfering device may further include a cooling device to cool the at least one pair of chamfering grinding tools, reduce damage to the surface layer of the silicon rod during the grinding process, and improve the grinding efficiency and service life of the chamfering grinding wheel. In one implementation of this embodiment, the cooling device includes a cooling water pipe, a guide groove and a guide hole. In some embodiments, a protective cover for placing cooling water into the rotating motor of the chamfering grinding wheel is provided on the outer edge of the circumference of the chamfering grinding wheel. One end of the cooling water pipe is connected to a cooling water source, and the other end is connected to the surface of the protective cover of the chamfering grinding wheel. The guide groove is provided on the protective cover as a contact point between the protective cover and the cooling water pipe, and the guide hole is provided in the cooling groove. The coolant of the cooling device can be common cooling water. The cooling water pipe is connected to the cooling water source. The cooling water is sucked through the cooling water pipe to the guide groove and guide hole on the surface of the chamfering grinding wheel, and is guided directly to the chamfering grinding wheel and the edge of the ground silicon rod for cooling. During the grinding of the chamfering grinding wheel, the cooling water in the guide hole enters the inside of the chamfering grinding wheel by centrifugal action due to the rotation of the chamfering grinding wheel for sufficient cooling.

[0173] In other embodiments, the third processing position corresponding to the chamfering device is located after the first processing position and the second processing position. In this way, the chamfering device is used to chamfer the finely ground silicon rod clamped by the silicon rod clamp located at the third processing position in the silicon rod transfer device.

[0174] In this setting, for details about the chamfering device, please refer to the aforementioned Figures 2a to 3c The relevant description of the chamfering device shown is not repeated here.

[0175] Here, the present application provides a silicon rod grinder having a silicon rod processing platform with a first processing position, a second processing position and a third processing position, wherein the first processing position, the second processing position and the third processing position correspond to a rough grinding device, a fine grinding device and a chamfering device respectively. By chamfering the silicon rod in the third processing position by the chamfering device, the wear of the rough grinding tool and the fine grinding tool due to chamfering can be effectively avoided. At the same time, the inventor of the present application found that the chamfering process takes a long time in actual production. Compared with the traditional method of chamfering by rough grinding tools or fine grinding tools, the present application configures a third processing position for the chamfering tool. A plurality of silicon rod clamps are provided on the transport body of the silicon rod grinder. In a processing state, the silicon rod clamps correspond one-to-one to the processing positions, so that the silicon rod grinder can perform rough grinding, fine grinding and chamfering operations at the same time, thereby improving production efficiency. In addition, the silicon rod grinder of the present application makes the processing time required for rough grinding, fine grinding and chamfering more evenly distributed in each processing position that does not interfere with each other, thereby reducing the waiting time when different processing devices cooperate in processing, reducing grinding time, and further improving processing efficiency.

[0176] Furthermore, after the silicon rod clamped by the silicon rod clamp completes the corresponding processing step such as rough grinding in one processing location, it can be driven by the transfer body to be transferred to another processing location for subsequent processing steps such as fine grinding or chamfering, which is conducive to simplifying the connection between various processes.

[0177] In one embodiment of the present application, at least one of the silicon ingot holders of the silicon ingot transfer device may be equipped with a grinding and repairing device for repairing the corresponding grinding tool, that is, repairing the coarse grinding tool of the corresponding coarse grinding device, repairing the fine grinding tool of the corresponding fine grinding device, or repairing both the coarse grinding tool of the corresponding coarse grinding device and the fine grinding tool of the fine grinding device. The grinding and repairing device can be used to repair the grinding tool to ensure that the grinding tool achieves the required precision after being used to grind silicon ingots.

[0178] See also Figure 4, which is a schematic structural diagram of an embodiment of a grinding and repairing device according to the present application. In one implementation, the grinding and repairing device includes a mounting body 241 and at least one grinding portion 242. The mounting body 241 can be mounted on a silicon rod fixture 23. The at least one grinding portion 242 is mounted on the mounting body 241 and is used to grind the corresponding at least one grinding tool. For example, a grinding portion 242 is provided on opposite sides of the mounting body 241. For example, using the grinding and repairing device to grind a fine grinding tool in a fine grinding device, the fine grinding device includes a pair of fine grinding tools. The pair of opposing fine grinding tools are moved along a vertical line to the outside of the grinding portion 242. The silicon rod fixture is driven to move horizontally, causing the two repairing portions 242 on either side of the mounting body 241 to reciprocate horizontally. In this state, the pair of fine grinding tools in the fine grinding device can be moved toward each other (e.g., along a vertical line) until the grinding portions 242 contact the surface of the grinding portions 242, thereby achieving grinding and repair.

[0179] The grinding unit can be, for example, an oilstone. Examples of such oilstones include diamond oilstone, boron carbide oilstone, fine grinding oilstone, and ordinary oilstone. The oilstone can modify the surface of the abrasive tool it contacts by utilizing its surface grain size. During the grinding process, the surface of the oilstone contacts the abrasive tool, modifying the surface to a uniform grain size and improving the flatness and perpendicularity of the tool surface.

[0180] The silicon rod grinding machine disclosed in this application may also have other variations. For example, in some embodiments, the silicon rod processing platform is further provided with a waiting area. Therefore, the silicon rod transfer device is also provided with a corresponding silicon rod clamp. The silicon rod clamp corresponding to the waiting area can be used to load the single crystal silicon rod to facilitate subsequent grinding operations. Figure 2a and Figure 2b In the illustrated embodiment, the silicon rod processing platform is designed to be rectangular in accordance with the shape of the machine base 1. Therefore, in the embodiment of the present application, the four sides of the silicon rod processing platform are respectively provided with a waiting position, a first processing position, a third processing position, and a second processing position. Correspondingly, the silicon rod transfer device 2 is equipped with four silicon rod clamps 23 that match the number of positions provided on the silicon rod processing platform. In this way, in a certain state, when a silicon rod clamp 23 in the silicon rod transfer device 2 is facing a certain position on the silicon rod processing platform, the other silicon rod clamps 23 in the silicon rod transfer device 2 are also facing other positions on the silicon rod processing platform. For example, when the first silicon rod clamp in the silicon rod transfer device 2 is currently facing the second processing position on the silicon rod processing platform, the second silicon rod clamp, the third silicon rod clamp, and the fourth silicon rod clamp in the silicon rod transfer device 2 are also facing the third processing position, the first processing position, and the waiting position on the silicon rod processing platform, respectively.

[0181] When using the Figure 2a and Figure 2b When the silicon rod grinder in the illustrated embodiment performs silicon rod processing, the silicon rod clamps in the silicon rod transfer device can clamp the silicon rod to be ground and drive each silicon rod clamp and the silicon rod clamped therein to the corresponding processing position. For example, the silicon rod clamp located in the waiting position of the silicon rod transfer device can clamp the silicon rod to be ground, the rough grinding device 3 can perform rough grinding on the silicon rod clamped by the silicon rod clamp 23 located in the first processing position of the silicon rod transfer device 2, and the chamfering device 5 can perform rough grinding on the silicon rod clamp 23 located in the third processing position of the silicon rod transfer device 2. The silicon rod after rough grinding is chamfered, and the fine grinding device 4 performs fine grinding on the silicon rod after chamfering, which is clamped by the silicon rod clamp 23 located in the second processing position of the silicon rod transfer device 2. In this way, it can be ensured that each processing device including the rough grinding device 3, the chamfering device 5, and the fine grinding device 4 can simultaneously perform corresponding processing operations (such as rough grinding, chamfering, and fine grinding) on ​​the silicon rods in the corresponding processing positions, which can improve the silicon rod grinding efficiency and reduce the grinding operation time. At the same time, in subsequent operations, the silicon rod transfer device can continue to drive the silicon rod clamp and the silicon rod clamped therein to transfer from the original processing position to the next processing position, so that the processing device at the next processing position performs the next processing operation on the silicon rod, that is, the silicon rod transfer device rotates a preset angle (the preset angle can be, for example, 90°) to drive each silicon rod clamp to transfer from the original processing position to the next processing position, for example, the silicon rod clamp originally located in the second processing position and the silicon rod clamped therein are transferred to the waiting position for precision processing. The ground silicon rods are unloaded and loaded with new silicon rods to be ground. The silicon rod fixture originally located in the third processing position and the silicon rods it holds are transferred to the second position so that the fine grinding device can perform fine grinding on the chamfered silicon rods. The silicon rod fixture originally located in the first processing position and the silicon rods it holds are transferred to the third position so that the chamfering device can perform chamfering on the rough-ground silicon rods. The silicon rod fixture originally located in the waiting position and the silicon rods it holds are transferred to the first position so that the rough grinding device can perform rough grinding on the silicon rods to be ground. In this way, the silicon rod transfer device drives each silicon rod fixture to sequentially transfer to each processing position so that each processing device can perform corresponding processing on the silicon rods in the corresponding processing position, forming a silicon rod assembly line to complete each processing operation. Compared with related technologies, the silicon rod grinding efficiency is improved.

[0182] See also Figure 5a and Figure 5b ,in, Figure 5a Shown is a schematic structural diagram of another embodiment of the silicon rod grinder of the present application, Figure 5b Display as Figure 5a A top view of the . Figure 5a and Figure 5bAs shown, the silicon rod grinding machine includes a silicon rod transfer device 2, a rough grinding device 3, a fine grinding device 4, a chamfering device 5, and a silicon rod conveying device 6.

[0183] Of course, the waiting area and silicon rod transfer device can also be set up in Figure 1a to Figure 2b In the silicon rod grinding machine provided by the embodiment shown, the structure of the silicon rod transfer device and the method of realizing silicon rod loading and unloading are similar. Therefore, the following is based on Figure 5a and Figure 5b The silicon rod grinder in the illustrated embodiment will be described.

[0184] The waiting area is used as a location for the silicon rods to be ground to wait for subsequent grinding operations after loading and for the ground silicon rods to wait for subsequent unloading. In order to improve the working efficiency of the silicon rod loader and silicon rod unloading, the silicon rod grinder of the present application also includes a silicon rod transfer device corresponding to the waiting area.

[0185] The silicon rod transfer device is used to load silicon rods to be ground into the waiting area or to unload processed silicon rods from the waiting area.

[0186] It should be understood that in embodiments where the silicon ingot processing platform is provided with a waiting area, the silicon ingot transfer device may be provided with a corresponding silicon ingot clamp. In this configuration, the silicon ingot transfer device 2 is intended to transfer processed silicon ingots and silicon ingots to be processed between the various processing areas and the waiting area of ​​the silicon ingot processing platform.

[0187] Similarly, in this embodiment, the silicon rod transfer device 2 can realize the switching of the transfer body 21 and the various silicon rod clamps 23 provided therein at various processing locations through the switching mechanism to transfer the silicon rods clamped by the various silicon rod clamps 23 to the corresponding processing locations for corresponding processing operations.

[0188] In some embodiments, the transposition mechanism includes a transposition shaft. Thus, by driving the transposition shaft to rotate a preset angle, the transport body 21 and the respective silicon rod clamps 23 provided therewith can be switched between various processing positions. In certain embodiments, the transposition shaft is located at the geometric center of the transport body 21, and the transposition shaft is arranged in the direction of the vertical line, i.e. Figure 5a The Z-axis direction is controlled. The transposition axis rotates by a preset angle to allow the transfer body 21 and its respective silicon rod fixtures 23 to switch between the various processing and waiting positions. The specific structure and operation of the transposition mechanism can be referred to in the previous embodiment and will not be repeated here.

[0189] When the silicon rod fixture is transferred to the waiting area, the silicon rod transfer device can unload the processed silicon rods or load the silicon rods to be ground into the silicon rod fixture.

[0190] Taking the silicon rod grinder as an example, the silicon rod grinder has a coarse grinding device located in the first processing area and a fine grinding device located in the second processing area. Therefore, the silicon rod transfer device is used to load the silicon rods to be ground to the waiting area for subsequent rough grinding operations by the coarse grinding device at the first processing area, or to unload the silicon rods located in the waiting area that have been finely ground by the fine grinding device at the second processing area.

[0191] In one embodiment of the present application, the silicon rod grinder disclosed in the present application may also be provided with a loading and unloading area on the silicon rod processing platform, and the silicon rod transfer device is located between the loading and unloading area and the waiting area, and is used to load the silicon rods to be ground from the loading and unloading area to the waiting area for subsequent rough grinding of the silicon rods by the rough grinding device at the first processing area, or to transfer the silicon rods located in the waiting area that have been fine-ground by the fine-grinding device at the second processing area to the loading and unloading area for unloading.

[0192] In one embodiment of the present application, the silicon rod transfer device 6 can not only load and unload silicon rods in the waiting area, but also align the silicon rods loaded into the waiting area before grinding. Specifically, the alignment involves aligning the axis of the silicon rod and the centerline of the silicon rod clamp in the silicon rod transfer device.

[0193] See also Figures 6 to 9 , which is a schematic diagram of the structure of the silicon rod transfer device in one embodiment of the present application. As mentioned above, in the present application, the silicon rod transfer device 6 can transfer the silicon rods to be ground (please refer to Figure 5a 、 Figure 5b The silicon rod 101 is moved from the loading and unloading area to the first processing area or the second processing area and the silicon rod 101 is aligned before the grinding operation. Figures 6 to 9 As shown, the silicon rod transfer device 6 includes: a silicon rod loading and carrying structure, a centering adjustment mechanism, and a feeding drive mechanism.

[0194] The silicon rod loading support structure is used to support the silicon rods to be ground. In one embodiment of the present application, the silicon rod loading support structure is used to support the silicon rods to be ground. The silicon rod loading support structure includes a support base 612 and a first loading part 611 and a second loading part 613 arranged opposite to each other along the direction of travel, wherein the first loading part 611 and the second loading part 613 cooperate to support the silicon rods to be ground, and the first loading part 611 and the second loading part 613 can move relative to the support base 612, so that the first loading part 611 and the second loading part 613 and the silicon rods they carry can move relative to the support base 612. In other embodiments, the silicon rod loading support structure can be a plate-like structure as a whole, such as a rectangular support plate, and pillow bars can be provided on the rectangular support plate. In order to protect the supported silicon rods, the pillow bars can be made of flexible materials, and the flexible materials can be, for example, rubber, acrylic, plastic, etc. In this embodiment, the direction of travel can be referred to as the first direction, that is, Figure 5a The X-axis direction in .

[0195] The first loading member 611 and the second loading member 613 are used to carry silicon rods to be ground. In certain embodiments, the first loading member 611 and the second loading member 613 are generally plate-shaped structures, and the first loading member 611 and the second loading member 613 further include stoppers (strips) extending from the plate-shaped structures and protruding therefrom. Pillow bars may be provided on the plate-shaped structures to protect the carried silicon rods. The pillow bars may be made of a flexible material, such as rubber, acrylic, or plastic.

[0196] The silicon rod transfer device disclosed in the present application can adjust the position of the silicon rod carried by the silicon rod loading and carrying structure through a centering adjustment structure so that the axis of the silicon rod corresponds to a predetermined center line.

[0197] As mentioned above, the centering operation specifically refers to making the axis of the silicon rod and the clamping center line of the silicon rod clamp in the silicon rod transfer device be on the same straight line, that is, the axis of the silicon rod and the clamping center line of the silicon rod clamp in the silicon rod transfer device coincide with each other. In one implementation, the silicon rod clamps in the silicon rod transfer device are identical, and the clamping center lines of the silicon rod clamps are consistent in the direction of the vertical line. In another implementation, the silicon rod clamps in the silicon rod transfer device are different, and the clamping center lines of the silicon rod clamps are inconsistent in the direction of the vertical line.

[0198] In practical applications, taking one of the silicon rod clamps (hereinafter referred to as the first silicon rod clamp) as an example, the clamping centerline of the first silicon rod clamp can be predetermined, and a predetermined centerline is determined based on the clamping centerline of the first silicon rod clamp, wherein the predetermined centerline is identical to the clamping centerline of the first silicon rod clamp in the direction of the weighted perpendicular (i.e., the height is consistent). Therefore, the centering adjustment mechanism is used to adjust the position of the silicon rod to be ground so that its axis corresponds to the predetermined centerline, and is used to adjust the position of the silicon rod to be ground in the direction of the weighted perpendicular so that its axis is consistent with the predetermined centerline in the direction of the weighted perpendicular.

[0199] Regarding the centering adjustment mechanism, in one embodiment of the present application, the centering adjustment mechanism includes a vertical lifting mechanism for driving the silicon rod loading and carrying structure and the silicon rods it carries to perform vertical lifting relative to each other so that the axis of the silicon rod is aligned with the predetermined center line in the direction of the vertical line. Figure 10 , which is a schematic diagram showing the structure of the centering adjustment mechanism in the silicon rod transfer device of this application. Figure 10 As shown, the vertical lifting mechanism serving as the centering adjustment mechanism further includes: a vertical lifting guide rod 621 and a vertical lifting drive unit 623.

[0200] The vertical lifting guide rod 621 can be arranged on the supporting base 612 of the silicon rod loading support structure along the vertical line direction. Specifically, in one embodiment of the present application, the silicon rod transfer device further includes a mounting structure 620. The vertical lifting guide rod 621 is arranged on the mounting structure 620 and passes through the supporting base 612 of the silicon rod loading support structure. In order to ensure the stability of the silicon rod loading support structure in being able to move up and down along the vertical lifting guide rod 621, the number of vertical lifting guide rods 621 can be multiple, for example, Figure 10 In the illustrated embodiment, there are four vertical lifting guide rods 621, corresponding to the four corners of the support base 612 (in this embodiment, the support base 612 is rectangular) in the silicon ingot loading support structure. Of course, the number of vertical lifting guide rods may also be other, for example, three, five, six, or more. For example, three vertical lifting guide rods may be arranged in an isosceles triangle, for example. For example, five vertical lifting guide rods may be arranged in the center of the four vertical lifting guide rods, with an additional vertical lifting guide rod being provided.

[0201] The vertical lifting drive unit 623 is used to drive the silicon rod loading support structure to move up and down along the vertical lifting guide rod. The vertical lifting drive unit 623 includes a drive motor 6231 and a screw assembly 6233 driven by the drive motor 6231. The drive motor can be set on the mounting structure 620. The screw assembly 6233 is connected to the drive motor 6231 and the support base 612 in the silicon rod loading support structure. When the vertical lifting drive unit 623 is in use, the screw assembly 6233 connected to the drive motor drives the forward rotation, thereby driving the silicon rod loading support structure to move up along the vertical lifting guide rod 621. Alternatively, the screw assembly 6233 connected to the drive motor drives the reverse rotation, thereby driving the silicon rod loading support structure to move down along the vertical lifting guide rod 621.

[0202] Of course, the vertical lifting drive unit is not Figure 10 The structure shown is limited to this. In other embodiments, the vertical lifting drive unit may be modified in other ways. For example, in one embodiment, the vertical lifting drive unit may also include a drive motor and a rack-and-pinion transmission assembly driven by the drive motor, wherein the rack-and-pinion transmission assembly may include a drive gear and a lifting rack. The drive motor may be disposed on a mounting structure, the lifting rack is disposed along the vertical direction and connected to the supporting base 612 of the silicon rod loading support structure, and the drive gear is engaged with the lifting rack and is controlled by the drive motor. When the vertical lifting drive unit is in use, the drive motor drives the drive gear to rotate in a forward direction, thereby driving the lifting rack and the connected silicon rod loading support structure to ascend along the vertical lifting guide rod 621. Alternatively, the drive motor drives the drive gear to rotate in a reverse direction, thereby driving the lifting rack and the connected silicon rod loading support structure to descend along the vertical lifting guide rod 621.

[0203] In addition, Figure 10 In the illustrated embodiment, the vertical lift drive unit 623 may further include an auxiliary lift assembly, further comprising a cylinder and a lift rod connected to the cylinder. The cylinder may be mounted on the mounting structure 620, and the lift rod is connected to the cylinder and associated with the support base 612 of the silicon ingot loading support structure. The lift rod can be associated with the support base 612 of the silicon ingot loading support structure in a variety of ways. For example, in one embodiment, the lift rod is connected to the support base 612, while in another embodiment, the lift rod maintains contact with the support base 612. Thus, when the vertical lift drive unit 623 is in use, the adjustable auxiliary lift assembly can assist the support base 612 in performing a lifting motion along the vertical lift guide rod 621, thereby ensuring the stability of the lifting motion of the support base 612.

[0204] In the present application, the vertical lifting mechanism as the centering adjustment mechanism is used to drive the silicon rods carried by the silicon rod loading support structure to move vertically up and down, so that the axis of the silicon rod can be aligned with the predetermined center line in the direction of the vertical line, wherein the predetermined center line can be obtained based on the clamping center of the silicon rod clamp. Generally, since the clamping center of the silicon rod clamp is determined, the predetermined center line is also determined. In this way, when using the vertical lifting mechanism, in order to ensure the lifting value of the silicon rod carried by the silicon rod loading support structure to move up and down in the direction of the vertical line, it is also necessary to determine the current size of the silicon rod in the direction of the vertical line or the height difference between the silicon rod and the clamping center of the silicon rod clamp in the direction of the vertical line. Therefore, in one embodiment of the present application, the centering adjustment mechanism also includes a height detector for detecting the position information of the axis of the silicon rod carried by the silicon rod loading support structure in the direction of the vertical line.

[0205] The silicon rod transfer device further includes a first centering adjustment mechanism for changing the position of the silicon rod in the loading and unloading direction by adjusting the first loading member and the second loading member so that the axis of the silicon rod corresponds to the center line of the silicon rod loading and unloading structure in the loading and unloading direction. In this embodiment, the loading and unloading direction can be referred to as the first direction, that is, Figure 5a The X-axis direction in .

[0206] In one embodiment of the present application, the first centering adjustment mechanism includes: an opening and closing slide rail and an opening and closing drive unit, and the opening and closing drive unit can be used to drive the first loading component and the second loading component to move toward each other along the opening and closing slide rail to perform a closing action or to move away from each other along the opening and closing slide rail to perform an opening action.

[0207] Please refer to Figure 7 and Figure 8 , an opening and closing slide rail 630 is provided on the bearing base 612, wherein the opening and closing slide rail 630 can be, for example, two, and the two opening and closing slide rails 630 are arranged in parallel, that is, the two opening and closing slide rails 630 are arranged along the loading and unloading direction (the loading and unloading direction is the first direction, that is, Figure 5a The X-axis direction) is arranged and respectively arranged on the supporting base 612 along the second direction (ie, Figure 5a At opposite ends of the first loading component 611 and the second loading component 613, correspondingly, the bottoms of the first loading component 611 and the second loading component 613 are both provided with guide groove structures or guide block structures that match the opening and closing slide rail 630.

[0208] The opening and closing driving unit is used to drive the first loading component and the second loading component to move toward each other along the opening and closing slide rail to perform a closing action or to move away from each other along the opening and closing slide rail to perform an opening action. Figure 8As shown, the opening and closing drive unit includes: a turntable 631 , a first transmission assembly 633 , a second transmission assembly 635 , a first push-pull component 637 , and a second push-pull component 639 .

[0209] The turntable is arranged on the supporting base via a rotating shaft. Figure 8 In the illustrated embodiment, the turntable 631 is disposed in the central region of the support base 612 via a rotation axis. For example, the rotation axis of the turntable 631 is located at the geometric center of the support base 612. The turntable 631 is designed to be circular in shape, but the shape is not limited thereto. The turntable 631 may also be designed to be a square, a regular polygon, or other custom shape.

[0210] The first transmission assembly is associated with the bearing base and the turntable, and the second transmission assembly is associated with the bearing base and the turntable. Figure 8 In the illustrated embodiment, the first transmission assembly 633 and the second transmission assembly 635 are centrally symmetrically arranged relative to the turntable 631 , wherein the first transmission assembly 633 is associated with the supporting base 612 and the turntable 631 , and the second transmission assembly 635 is associated with the supporting base 612 and the turntable 631 .

[0211] Regarding the first transmission assembly, in one implementation, the first transmission assembly further includes a first cylinder, a cylinder body of the first cylinder is connected to the supporting base, and a piston rod of the first cylinder is axially connected to the turntable. Figure 8 As shown, the first transmission assembly 633 includes a first cylinder, the cylinder body side of the first cylinder is connected to the supporting base 612 through a mounting component, wherein the mounting component can be fixed to the supporting base 612 by, for example, bolts, and the first cylinder is axially connected to the mounting component to obtain a certain degree of axial freedom of movement, and the piston rod of the first cylinder is axially connected to the turntable 631.

[0212] Similarly, regarding the second transmission assembly, in one implementation, the second transmission assembly further includes a second cylinder, the cylinder body of the second cylinder is connected to the supporting base, and the piston rod of the second cylinder is axially connected to the turntable. Figure 8 As shown, the second transmission assembly 635 includes a second cylinder, and the cylinder body side of the second cylinder is connected to the supporting base 612 through a mounting component, wherein the mounting component can be fixed to the supporting base 612 by, for example, bolts, and the second cylinder is axially connected to the mounting component to obtain a certain degree of axial freedom of movement, and the piston rod of the second cylinder is axially connected to the turntable 631.

[0213] The first push-pull component is associated with the turntable and the first loading component, and the second push-pull component is associated with the turntable and the second loading component.

[0214] In such Figure 8 In the illustrated embodiment, the first push-pull component 637 and the second push-pull component 639 are centrally symmetrically arranged relative to the turntable 631 , wherein the first push-pull component 637 is associated with the turntable 631 and the first loading component 611 , and the second push-pull component 639 is associated with the turntable 631 and the second loading component 613 .

[0215] Regarding the first push-pull component, in one implementation, the first push-pull component 637 is a first connecting rod, the first end of the first connecting rod 637 is axially connected to the turntable 631, and the second end of the first connecting rod 637 is axially connected to the first loading component 611. For example, an axial joint can be set at the second end of the first connecting rod 637, and an axial connection hole corresponding to the axial joint can be set at the bottom of the first loading component 611.

[0216] Regarding the second push-pull component, in one implementation, the second push-pull component 639 is a second connecting rod, the first end of the second connecting rod 639 is axially connected to the turntable 631, and the second end of the second connecting rod 639 is axially connected to the second loading component 613. For example, an axial joint can be set at the second end of the second connecting rod 639, and an axial connection hole corresponding to the axial joint is set at the bottom of the second loading component 613.

[0217] In this way, when utilizing the opening and closing drive unit disclosed in the aforementioned embodiment, when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate forward, the turntable drives the first loading assembly associated with the first push-pull assembly and the second loading assembly associated with the second push-pull assembly to move toward each other along the opening and closing slide rail; when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate backward, the turntable drives the first loading assembly associated with the first push-pull assembly and the second loading assembly associated with the second push-pull assembly to move away from each other along the opening and closing slide rail.

[0218] like Figure 8As shown, when the opening and closing drive unit disclosed in the above embodiment is used, one of the transmission components in the transmission component can be designed as a driving type. Taking the first transmission component 633 as an example, the first cylinder in the first transmission component 633 is designed as a control cylinder. Taking the first cylinder as the control cylinder as an example, after the first cylinder is controlled, the piston rod of the first cylinder is pushed out, driving the turntable 631 to rotate clockwise. The clockwise rotating turntable 631 drives the piston rod of the second cylinder to extend. In addition, the clockwise rotating turntable 63 1 drives the first connecting rod 637 and the second connecting rod 639 thereon to twist clockwise (the axial connection point of the first connecting rod 637 and the axial connection point of the second connecting rod 639 to the rotatable disk 631 is close to the center line of the silicon rod loading support structure along the second direction when twisting clockwise), and the first connecting rod 637 and the second connecting rod 639 respectively drive the corresponding first loading part 611 and the second loading part 613 to move toward each other along the opening and closing slide rail 630 to perform the closing action, forming the following Figure 9 Correspondingly, after the first cylinder is controlled, the piston rod of the first cylinder retracts, driving the turntable 631 to rotate counterclockwise. The counterclockwise rotating turntable 631 drives the piston rod of the second cylinder to retract. In addition, the counterclockwise rotating turntable 631 drives the first connecting rod 637 and the second connecting rod 639 thereon to twist counterclockwise (the axial joints of the first connecting rod 637 and the axial joints of the second connecting rod 639 to the turntable 631 move away from the center line of the silicon rod loading support structure along the second direction when twisting clockwise). The first connecting rod 637 and the second connecting rod 639 respectively drive their corresponding first loading component 611 and the second loading component 613 to move away from each other along the opening and closing slide rail 630 to perform the opening action.

[0219] In such Figure 8 In the embodiment shown, the opening and closing drive unit in the first centering adjustment mechanism includes: a turntable 631, a first transmission assembly 633, a second transmission assembly 635, a first push-pull component 637, and a second push-pull component 639, but is not limited to this. In other embodiments, the opening and closing drive unit in the first centering adjustment mechanism can still be subjected to other changes.

[0220] For example, in some embodiments, the opening and closing drive unit includes: a bidirectional screw and a drive source, wherein the bidirectional screw is arranged along the loading and unloading direction, and the two ends of the bidirectional screw are respectively threadedly connected to the first loading part and the second loading part, and the drive source is connected to the bidirectional screw, and is used to drive the bidirectional screw to rotate so that the first loading part and the second loading part move toward or away from each other along the loading and unloading direction. When using the opening and closing drive unit disclosed in the embodiment, the drive source drives the bidirectional screw to rotate in the forward direction so that the first loading part and the second loading part move toward each other along the opening and closing slide rail (the opening and closing slide rail is arranged along the loading and unloading direction) to perform a closing action, or the drive source drives the bidirectional screw to rotate in the reverse direction so that the first loading part and the second loading part move away from each other along the opening and closing slide rail (the opening and closing slide rail is arranged along the loading and unloading direction) to perform an opening action.

[0221] For example, in some embodiments, the opening and closing drive unit includes: a first rack and a second rack arranged along the loading and unloading direction, the first rack being connected to the first loading part, and the second rack being connected to the second loading part; a driving gear located between the first rack and the second rack and meshing with the first rack and the second rack; a driving source for driving the driving gear to rotate to drive the first loading part connected to the first rack and the second loading part connected to the second rack to move toward or away from each other along the loading and unloading direction. When using the opening and closing drive unit disclosed in the embodiment, the drive source drives the drive gear to rotate in the forward direction, and through the engagement of the drive gear with the first rack and the second rack, the first loading part connected to the first rack and the second loading part connected to the second rack move toward each other along the opening and closing slide rail (the opening and closing slide rail is arranged along the loading and unloading direction) to perform a closing action, or, the drive source drives the drive gear to rotate in the reverse direction, and through the engagement of the drive gear with the first rack and the second rack, the first loading part connected to the first rack and the second loading part connected to the second rack move away from each other along the opening and closing slide rail (the opening and closing slide rail is arranged along the loading and unloading direction) to perform an opening action.

[0222] From the above, it can be seen that by utilizing the first centering adjustment unit, the position of the carried silicon rod in the loading and unloading direction is changed by adjusting the first loading component and the second loading component, so that the axis of the silicon rod corresponds to the center line of the silicon rod loading and unloading direction in the silicon rod loading and unloading support structure.

[0223] The silicon rod transfer device of the present application may have other variations. For example, in certain embodiments, the silicon rod transfer device may further include a second centering adjustment mechanism for adjusting the position of the silicon rods carried by the silicon rod loading support structure in a clamping direction so that the silicon rods are located in a central region of the silicon rod loading support structure in the clamping direction, wherein the clamping direction is perpendicular to the loading and unloading direction.

[0224] See also Figure 11 , displayed as Figure 5a A partial enlarged view of the Figure 5a and Figure 11 The silicon rod transfer device may further include a second centering adjustment mechanism, which may include: a bracket 641, a slide rail 643 configured on the bracket 641, two ejection members 645 arranged on both sides of the bracket 641 and capable of relative movement on the slide rail 643, and an ejection driving unit, wherein the slide rail 643 moves along the clamping direction (i.e., Figure 5a The two ejection members 645 are arranged on the slide rail 643 and are arranged on both sides of the bracket 641 relative to each other. The ejection drive unit further includes a bidirectional screw and a drive source, wherein the bidirectional screw is arranged along the clamping direction and two ejection members are threadedly connected at both ends. The drive source is connected to the bidirectional screw and is used to drive the bidirectional screw to rotate so that the two ejection members move toward or away from each other along the clamping direction. When using the second centering adjustment mechanism disclosed in the embodiment, the drive source drives the bidirectional screw to rotate in the forward direction so that the two ejection members 645 move toward each other along the slide rail 643 (the slide rail 643 is arranged along the clamping direction) to perform a closing action, or the drive source drives the bidirectional screw to rotate in the reverse direction so that the two ejection members 645 move away from each other along the slide rail 643 (the slide rail 643 is arranged along the clamping direction) to perform an opening action. The control source can be, for example, a servo motor.

[0225] As can be seen from the above, the second centering adjustment unit pushes the silicon rods carried on the silicon rod loading support structure in the clamping direction through the two pushing members 645, so that the silicon rods are adjusted to the center area of ​​the silicon rod loading support structure.

[0226] As mentioned above, the centering adjustment mechanism also includes a height detector for detecting the position information of the axis of the silicon rod carried by the silicon rod loading support structure in the direction of the vertical line. Figure 5a 、 Figure 5b and Figure 11 In an embodiment of the present application, the centering adjustment mechanism includes a height detector 625, and the height detector 625 is configured on the second centering adjustment unit. Figure 10As shown, the height detector 625 is arranged on the slide rail 643 of the second centering adjustment unit, which can be controlled by a control source (such as a servo motor) to perform movement along the vertical direction and the clamping direction and / or the loading and unloading direction. In one implementation, the height detector 625 can be, for example, a contact sensor or a distance sensor. Taking the contact sensor as an example, the contact sensor has a detection head for contacting the side of the silicon rod (such as the top surface of the silicon rod). In some embodiments, the detection head of the contact sensor can also be provided with a telescopic spring. When the detection head contacts the silicon rod, it can retreat under the drive of the telescopic spring, which can be used to protect the detection head and prevent the detection head from being damaged by being touched or pressed by the image.

[0227] When using the height detector, take the case where the height detector 625 moves in the clamping direction (along the slide rail 643) and the height detector is a contact sensor as an example: the silicon rod loading support structure and the silicon rod it carries are moved along the loading and unloading direction to the bottom of the slide rail 643 in the second centering adjustment unit, and the height detector 625 is driven to descend along the direction of the vertical line until it touches the top surface of the silicon rod, completing the detection of one detection point; the height detector 625 is driven to rise along the direction of the vertical line to retreat, and the height detector 625 is driven to move a preset length along the clamping direction, and the height detector 625 is driven to descend along the direction of the vertical line until it touches the top surface of the silicon rod, completing the detection of the next detection point, wherein the next detection point is in the same clamping direction as the previous detection point; in this way, continuing the above steps, the detection of multiple detection points on the same straight line (a row) can be completed. Of course, multiple rows of inspection points can also be inspected on the silicon rods. For example, after completing the inspection of multiple inspection points in one row, the silicon rod loading and unloading support structure and the silicon rods it supports are moved a preset offset distance in the loading and unloading direction, and the inspection of the next row of multiple inspection points is completed according to the above method.

[0228] As can be seen from the above, the height detector can be used to obtain the height of the silicon rod by performing multi-point detection on the top surface of the silicon rod, and then obtain the position information of the axis of the silicon rod in the direction of the vertical line, so as to facilitate subsequent adjustment using the centering adjustment mechanism.

[0229] The feed drive mechanism is used to drive the silicon rod loading and carrying structure and the silicon rods it carries to move from the loading and unloading area to the waiting area along the loading and unloading direction.

[0230] like Figure 5a and Figure 11 In the embodiment shown, the feed drive mechanism is arranged below the silicon rod loading support mechanism, and includes: a feed guide rod 651 and a feed drive unit 653, wherein the feed guide rod 651 is arranged along the loading and unloading direction, and is used to set the silicon rod loading support structure, such as Figure 10As shown, the feed guide rod 651 is arranged across the machine base along the loading and unloading direction and passes through the mounting structure 620, so that the mounting structure 620 and the silicon rod loading structure thereon are both arranged on the feed guide rail 651. The feed drive unit is used to drive the silicon rod loading support structure to move along the feed guide rod. In one implementation, as shown in FIG. Figure 10 In the illustrated embodiment, the feed drive unit includes a drive motor 6531 and a screw assembly 6533 disposed along the loading and unloading direction and driven by the drive motor. The drive motor may be disposed at one end of the screw assembly 6533. The screw assembly 6533 is controlled by the drive motor 6531 and is threadedly connected to the mounting structure 620. Thus, when the feed drive mechanism is in use, the drive motor 6531 drives the screw assembly 6533 to rotate in the forward direction, thereby driving the silicon rod loading support structure connected to the screw assembly 6533 to move along the feed guide rod 651 (along the loading and unloading direction) toward the waiting area. Alternatively, the drive motor 6531 drives the screw assembly 6533 to rotate in the reverse direction, thereby driving the silicon rod loading support structure connected to the screw assembly 6533 to move along the feed guide rod 651 (along the loading and unloading direction) toward the loading and unloading area, thereby transferring silicon rods carried by the silicon rod loading support structure between the loading and unloading area and the waiting area.

[0231] In actual application, when the aforementioned silicon rod transfer device is used, the specific operation process may roughly include: the silicon rod loading support structure is located at the initial position of the loading and unloading area, and the silicon rod to be ground is placed on the first loading component and the second loading component of the silicon rod loading support structure; the first centering adjustment mechanism is used to drive the first loading component and the second loading component to move toward each other along the loading and unloading direction, so that the axis of the silicon rod is aligned with the center line of the silicon rod loading support structure along the loading and unloading direction; the feed drive mechanism is used to drive the silicon rod loading support structure and the silicon rod it carries to move along the loading and unloading direction to the second centering adjustment mechanism; the second centering adjustment mechanism is used to adjust the position of the silicon rod in the clamping direction, so that the silicon rod is located in the center area of ​​the silicon rod loading support structure in the clamping direction. In addition, a height detector is used to measure the silicon rod. Multi-point detection is performed to obtain position information of the axis of the silicon rod in the direction of the gravity vertical line; the silicon rod loading support structure and the silicon rod it carries are driven by a feed drive mechanism to move along the loading and unloading direction to return to the initial position; based on the position information of the axis of the silicon rod in the direction of the gravity vertical line and the position information of the clamping center line of the silicon rod clamp at the waiting position to be moved in the direction of the gravity vertical line, the difference between the two is determined, and the vertical lifting mechanism is used to drive the silicon rod loading support structure and the silicon rod it carries to perform a lifting action along the direction of the gravity vertical line, so that the axis of the silicon rod is aligned with the clamping center line of the silicon rod clamp at the waiting position in the direction of the gravity vertical line; the silicon rod loading support structure and the silicon rod it carries are driven by a feed drive mechanism to move along the loading and unloading direction to the waiting position, so that the silicon rod clamp at the waiting position clamps the silicon rod.

[0232] Here, the silicon rod transfer device disclosed in the present application includes a silicon rod loading and carrying structure, a centering adjustment mechanism, and a feed drive mechanism. It can realize the centering operation of the silicon rod when transferring the silicon rod to be ground from the loading area to at least one processing position corresponding to at least one silicon rod processing equipment, so that the axis of the silicon rod is in the same straight line with the center line of the corresponding at least one silicon rod processing equipment. Taking the silicon rod grinder in the aforementioned embodiment of the present application as an example, the silicon rod transfer device disclosed in the present application can transfer the silicon rod to be ground from the loading area to the waiting position, so that the axis of the silicon rod is in the same straight line with the clamping center line of the silicon rod clamp at the waiting position, so as to facilitate subsequent silicon rod processing operations. Compared with related technologies, it has the advantages of simple structure, convenient operation, accurate and efficient centering, etc.

[0233] The silicon rod transfer device disclosed in this application can still be modified in other ways. For example, in some embodiments, the silicon rod transfer device can further include a silicon rod unloading support structure for supporting the silicon rods to be unloaded. The silicon rod unloading support structure includes an unloading component, which is provided on the supporting base or on one of the first loading component and the second loading component. Figure 6 In the embodiment shown, the bearing portion of the unloading component 66 for bearing the silicon rod is roughly a plate-like structure, and pillow bars may be provided on the plate-like structure. To protect the carried silicon rod, the pillow bars may be made of a flexible material, such as rubber, acrylic, plastic, etc.

[0234] In such Figure 6 In the illustrated embodiment, there is one unloading member 66, which is fixedly mounted on the first loading member 611 or the second loading member 613 of the silicon ingot loading support structure. Thus, when the silicon ingot transfer device is used to load the silicon ingots, the loading member to which the unloading member 66 is not fixed (if the unloading member 66 is fixed to the first loading member 611, the second loading member 613 is aligned with the waiting position for loading; if the unloading member 66 is fixed to the second loading member 613, the first loading member 611 is aligned with the waiting position for loading) is aligned with the waiting position for loading, thereby preventing the unloading member 66 from interfering with the silicon ingot fixtures in the waiting position. On the other hand, when the silicon rod transfer device is used to unload the silicon rods, the loading component on which the unloading component 66 is not fixed is made to correspond to the waiting area for unloading (if the unloading component 66 is fixed on the first loading component 611, then the second loading component 613 is made to correspond to the waiting area for unloading; if the unloading component 66 is fixed on the second loading component 613, then the first loading component 611 is made to correspond to the waiting area for unloading).

[0235] In view of this, when the unloading component 66 is one and fixedly mounted on the first loading component 611 or the second loading component 613 of the silicon rod loading support structure, the silicon rod transfer device further includes a reversing mechanism for driving the silicon rod loading support structure and the silicon rod unloading support structure to exchange positions. Figure 5a In the illustrated embodiment, the reversing mechanism includes a reversing shaft disposed in the direction of the vertical line, which is driven to rotate the reversing shaft through a predetermined angle (e.g., 180°) to cause the silicon ingot loading and unloading structures to interchange positions. In one implementation, the reversing mechanism further includes a reversing drive unit for driving the reversing shaft. The reversing drive unit includes a driving gear axially connected to a drive source, and a driven gear meshing with the driving gear and connected to the reversing shaft.

[0236] Here, the silicon rod grinder disclosed in the present application includes a machine base, a silicon rod transfer device, a rough grinding device, a chamfering device, a fine grinding device, and a silicon rod transfer device, wherein the machine base has a silicon rod processing platform, and the silicon rod processing platform is provided with a waiting position, a first processing position, a third processing position, and a second processing position. The silicon rod transfer device includes a transfer body and multiple silicon rod clamps and a shifting mechanism. The shifting mechanism is used to drive multiple silicon rod clamps and the silicon rods clamped therein to change positions in each processing position so that the rough grinding device can perform rough grinding operations on the silicon rods, the chamfering device can perform chamfering operations on the silicon rods, and the fine grinding device can perform fine grinding operations on the silicon rods, so that the rough grinding device, chamfering device, and fine grinding device in the silicon rod grinder are all in working state at the same time, which can improve the silicon rod grinding efficiency and reduce the grinding operation time, and can improve economic benefits.

[0237] When using the Figure 5a 、 Figure 5b When the silicon rod grinder in the embodiment shown performs silicon rod processing, the specific process can be roughly as follows:

[0238] The first silicon rod is placed on the silicon rod transfer device 6 located at the loading and unloading area.

[0239] The silicon rod transfer device 6 transfers the first silicon rod to the waiting area, where the silicon rod clamp at the waiting area clamps the first silicon rod to complete loading. The axis of the first silicon rod and the clamping centerline of the silicon rod clamp are aligned.

[0240] The silicon rod transfer device 2 rotates a predetermined angle to drive each silicon rod clamp 23 and the silicon rods it holds to the corresponding processing location. For example, the silicon rod transfer device 2 can rotate 90 degrees clockwise to transfer a silicon rod clamp and the first silicon rod it holds from the waiting location to the first processing location.

[0241] The coarse grinding device 3 performs a coarse grinding operation on the first silicon ingot held by the silicon ingot clamp 23 in the first processing position of the silicon ingot transfer device 2. At the same time, the silicon ingot transfer device transfers the second silicon ingot to the waiting position, where the silicon ingot clamp is clamped to complete the loading.

[0242] After the first silicon ingot is roughly ground, the silicon ingot transfer device 2 rotates by a predetermined angle to drive each silicon ingot holder and the silicon ingot it holds to its corresponding processing location. For example, the silicon ingot transfer device 2 can rotate clockwise by another 90° to transfer the silicon ingot holder 23 and the first silicon ingot it holds, originally located in the first processing location, to the third processing location, and to transfer the silicon ingot holder 23 and the second silicon ingot it holds, originally located in the waiting location, to the first processing location.

[0243] The chamfering device 5 chamfers the rough-ground first silicon rod clamped by the silicon rod clamp 23 located at the third processing position in the silicon rod transfer device 2. At the same time, the rough grinding device 3 rough-grinds the second silicon rod clamped by the silicon rod clamp 23 located at the first processing position in the silicon rod transfer device 2, and the silicon rod transfer device transfers the third silicon rod to the waiting position, and the silicon rod clamp at the waiting position clamps the third silicon rod to complete the loading.

[0244] After the first silicon ingot is chamfered, the silicon ingot transfer device 2 rotates a preset angle to drive each silicon ingot holder 23 and the silicon ingot it holds to its corresponding processing location. For example, the silicon ingot transfer device 2 can continue to rotate clockwise 90° to transfer the silicon ingot holder 23 and the first silicon ingot it holds, originally located in the third processing location, to the second processing location; the silicon ingot holder 23 and the second silicon ingot it holds, originally located in the first processing location, to the third processing location; and the silicon ingot holder 23 and the third silicon ingot it holds, originally located in the waiting location, to the first processing location.

[0245] The fine grinding device 4 performs fine grinding on the first silicon rod that has been chamfered and is clamped by the silicon rod clamp 23 located at the second processing position in the silicon rod transfer device 2. At the same time, the chamfering device 5 performs chamfering on the second silicon rod that has been rough-ground and is clamped by the silicon rod clamp 23 located at the third processing position in the silicon rod transfer device 2. The rough grinding device 3 performs rough grinding on the third silicon rod that is clamped by the silicon rod clamp 23 located at the first processing position in the silicon rod transfer device 2. In addition, the silicon rod transfer device transfers the fourth silicon rod to the waiting position, and the silicon rod clamp at the waiting position clamps the fourth silicon rod to complete the loading.

[0246] After the first silicon ingot is finely ground, the silicon ingot transfer device 2 rotates a preset angle to drive each silicon ingot holder 23 and the silicon ingot it holds to the corresponding processing location. For example, the silicon ingot transfer device can rotate counterclockwise 270° (or further rotate clockwise 90°) to transfer the silicon ingot holder 23 and the first silicon ingot it holds, originally located in the second processing location, to the waiting location; the silicon ingot holder 23 and the second silicon ingot it holds, originally located in the third processing location, to the second processing location; the silicon ingot holder 23 and the third silicon ingot it holds, originally located in the first processing location, to the third processing location; and the silicon ingot holder 23 and the fourth silicon ingot it holds, originally located in the waiting location, to the first processing location.

[0247] The silicon rod transfer device 6 transfers the finely ground first silicon rod from the waiting area to the loading and unloading area to complete the unloading, loads the fifth silicon rod and transfers it to the waiting area, and the silicon rod clamp at the waiting area clamps the fifth silicon rod to complete the loading. At the same time, the fine grinding device 4 performs fine grinding on the chamfered second silicon rod clamped by the silicon rod clamp 23 located in the second processing area of ​​the silicon rod transfer device 2. The chamfering device 5 performs chamfering on the rough-ground third silicon rod clamped by the silicon rod clamp 23 located in the third processing area of ​​the silicon rod transfer device 2. The rough grinding device 3 performs rough grinding on the fourth silicon rod clamped by the silicon rod clamp 23 located in the first processing area of ​​the silicon rod transfer device 2.

[0248] In an embodiment in which the silicon rod grinder is provided with a first processing area corresponding to a coarse grinding device, a second processing area corresponding to a fine grinding device, and a third processing area corresponding to a chamfering device, in order to simplify the equipment layout of the silicon rod grinder of the present application and to simplify the transfer process required for the processing devices (i.e., the coarse grinding device, the fine grinding device, and the chamfering device) to perform the grinding operation, the present application further provides the following embodiments:

[0249] In some embodiments, the transport body has a rectangular outline in a horizontal plane. In some embodiments, the rectangle may also be a square.

[0250] In one embodiment of the present application, the transfer body 21 is located in the central area of ​​the silicon rod processing platform, and the transfer body 21 is designed to be rectangular in shape to conform to the shape of the silicon rod processing platform. Each side of the rectangular transfer body 21 can be used as a mounting surface for mounting multiple silicon rod fixtures 23, such as Figure 5a 、 Figure 5b As shown, a silicon rod clamp 23 is installed on each of the four sides of the transfer body 21.

[0251] In such Figure 5a 、 Figure 5bIn the illustrated embodiment, the silicon ingot processing platform is designed to be rectangular to conform to the shape of the machine base 1. Therefore, in this embodiment, the four sides of the silicon ingot processing platform are respectively provided with a waiting area, a first processing area, a third processing area, and a second processing area. Accordingly, the silicon ingot transfer device 2 is equipped with four silicon ingot clamps 23, corresponding to the number of areas provided on the silicon ingot processing platform. Thus, in a certain state, when a silicon ingot clamp 23 in the silicon ingot transfer device 2 is facing a certain area of ​​the silicon ingot processing platform, the other silicon ingot clamps 23 in the silicon ingot transfer device 2 are also facing other areas of the silicon ingot processing platform. That is, when the first silicon ingot clamp in the silicon ingot transfer device 2 is facing the second processing area of ​​the silicon ingot processing platform, the second, third, and fourth silicon ingot clamps in the silicon ingot transfer device 2 are also facing the third processing area, the first processing area, and the waiting area, respectively, of the silicon ingot processing platform.

[0252] In an embodiment where the horizontal profile of the transfer body is set to a rectangle, taking the transposition mechanism including a transposition shaft as an example, the rotation center of the transfer body can be set at the centroid (i.e., the geometric center) of the rectangle. Then, at any initial moment, when the transfer body rotates 90° in the same direction, for example, clockwise, the directions of the four sides of the rectangle correspond to the directions of the four sides at the initial moment before the rotation. The mutual correspondence means that the directions of the rectangular sides are parallel or collinear with the directions of the rectangular sides before the rotation. When the horizontal profile of the transfer body is set to a square, at any initial moment, when the transfer body rotates 90° in the clockwise or counterclockwise direction, it can overlap with the initial position.

[0253] In some implementations, a silicon rod clamp is provided on the outside of each side of the rectangular outline of the transport body, wherein the clamping center line of any silicon rod clamp is parallel to the corresponding rectangular side.

[0254] In a specific implementation, a silicon rod clamp is arranged outside one side of the transfer body profile, for example, it can be arranged on a horizontal guide rail, guide groove or guide column outside the rectangular side, and the clamping center line of the silicon rod clamp is parallel to the corresponding side.

[0255] Under this setting, when the transfer body is driven by the transposition mechanism to rotate a preset angle such as 90° (or 180°), the silicon rod corresponding to the processing in the same processing position can be replaced from the silicon rod on the outside of one side of the transfer body to the silicon rod corresponding to the outside of the other side. For example, after the rough grinding device at the first processing position performs rough grinding on a single crystal silicon rod, the transfer body is driven by the transposition mechanism to rotate 90°, and then the rough grinding device can perform rough grinding on another single crystal silicon rod. Of course, it should be understood that the preset angle is not limited to 90°. For example, in addition to the aforementioned 90° (or 180°), in actual processing scenarios, the preset angle may be allowed to deviate from 90° (or 180°) to a certain extent. For example, the preset angle may be 90°±10° (or 180°±10°), as well as other angles. The same processing position can process the silicon rod clamped by the silicon rod clamp corresponding to the other side of the transfer body.

[0256] In actual processing scenarios, in order to avoid the accumulation of errors in the transfer body after multiple transfers during continuous processing, the clamping center line of the silicon rod clamp must be parallel or approximately parallel to the long side direction of the processing location. The preset angle can also be determined by the clamping center line direction of the silicon rod in the current processing location and the long side direction of the next processing location. For example, the preset angle is used to make the clamping center line of the silicon rod clamp parallel or approximately parallel to the long side of the next processing location after it is transferred to the next processing location. The parallel or approximately parallel angle, for example, is an angle between the clamping center line of the silicon rod and the long side direction of the processing location of 0° to 10°.

[0257] It should be understood that in the silicon rod grinding machine of this example, the transfer body is located in the central area of ​​the silicon rod processing platform, and the rough grinding device, fine grinding device, and chamfering device are located on the outside of the transfer body. In order to achieve side grinding of the horizontally clamped silicon rod, the grinding surface of the rough grinding tool in the grinding device is located in a horizontal plane, the grinding surface of the fine grinding tool in the fine grinding device is located in a horizontal plane, and the grinding surface of the chamfering tool in the chamfering device is located in a horizontal plane. After the transfer body rotates to switch the processing position of the silicon rod clamp, the horizontal height of the upper and lower sides of the clamped silicon rod remains unchanged. Alternatively, the clamping portion of the silicon rod clamp can be used to drive the silicon rod to rotate so that the surface to be ground of the silicon rod is adjusted to be located in the horizontal plane. Therefore, there is no need to accurately position the preset angle at which the transfer body drives the silicon rod clamp to rotate to perform side grinding of the silicon rod.

[0258] In some embodiments, the silicon rod processing platform is further provided with a waiting area, and the long sides of the first processing area, the second processing area, the third processing area and the waiting area are parallel to and correspond to the four sides of the rectangle; wherein, the long side of the first processing area is the travel direction of the rough grinding tool in the rough grinding device, the long side of the second processing area is the travel direction of the fine grinding tool in the fine grinding device, the long side of the third processing area is the travel direction of the chamfering tool in the chamfering device, and the long side of the waiting area is the axial direction of the silicon rod supported at the waiting area.

[0259] In the actual processing scenario, the axis of the silicon rod clamped by the silicon rod clamp in the grinding state is made parallel (or approximately parallel) to the long side direction of the processing position. When the grinding tool or chamfering tool moves along the direction of travel, the distance between the tool and the silicon rod remains unchanged, which is conducive to grinding or chamfering operations and helps to simplify the equipment. To this end, this application makes the long sides of the first processing position, the second processing position, the third processing position and the waiting position parallel to the four sides of the rectangle of the transfer body outline. When the clamping center line corresponding to the silicon rod clamp on one side of the transfer body is parallel to the long side of any processing position or waiting position, the clamping center lines corresponding to the silicon rod clamps on the other three rectangular sides of the transfer body are also parallel to the long sides of the processing position or waiting position. At the same time, when the silicon rod clamp provided on the transfer body rotates with the transfer body at a preset angle, so that the processing position corresponding to a silicon rod clamp is changed, the clamping center line of the silicon rod clamp is made parallel to the long side of the processing position after rotation, and the other silicon rod clamps on the transfer body are also adjusted so that the clamping center lines are parallel to the long sides of the processing positions.

[0260] In some embodiments, in the waiting state, the first side of the rectangle of the transfer body outline corresponds to the waiting area, the second side corresponds to the first processing area, the third side corresponds to the second processing area, and the fourth side corresponds to the third processing area.

[0261] Here, the waiting state is a state in which the silicon rods loaded at the waiting position of the clamping center line corresponding to a silicon rod clamp on the transfer body are parallel or approximately parallel. In this state, the contour edge with the silicon rod clamp is regarded as the first edge, the second edge of the contour of the transfer body corresponds to the first processing position, the third edge corresponds to the second processing position, and the fourth edge corresponds to the third processing position. In this way, the waiting position can be used for loading or unloading operations of silicon rods, the first processing position can be used for rough grinding operations, the second processing position can be used for fine grinding operations, and the third processing position can be used for chamfering operations. At the same time, different processing positions are all in working state. At the same time, by driving the silicon rod clamp to switch between different positions through the transfer body, seamless connection of different grinding processes can be achieved for the same silicon rod, and the processing efficiency of the silicon rod grinder is improved.

[0262] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical concepts disclosed in this application shall be covered by the claims of this application.

Claims

1. A silicon rod grinding machine, characterized in that: include: The machine base has a silicon rod processing platform; the silicon rod processing platform is provided with a first processing position and a second processing position; A silicon rod transfer device is provided on a machine base, comprising a transfer body and a plurality of silicon rod clamps and a position-changing mechanism provided on the transfer body, wherein the position-changing mechanism is used to drive the plurality of silicon rod clamps and the silicon rods clamped therein to switch positions between a first processing position and a second processing position; wherein the clamping center lines corresponding to the plurality of silicon rod clamps are located at the same horizontal height; the silicon rods clamped by the silicon rod clamps are in a horizontal state; a rough grinding device is provided in the first processing position, and is used to perform rough grinding on the silicon rods clamped by the silicon rod clamps located at the first processing position in the silicon rod transfer device; the rough grinding device comprises: a rough grinding mounting structure provided on the machine base and corresponding to the first processing position; at least one pair of rough grinding tools to be used for rough grinding along the weighted axis; The rough grinding mounting structure is provided opposite to the vertical direction; wherein the grinding surfaces of the at least one pair of rough grinding tools are parallel and arranged opposite to each other; the rough grinding tool advance and retreat mechanism is used to drive at least one of the at least one pair of rough grinding tools to move along the vertical direction, wherein the vertical direction is perpendicular to the horizontal plane; the rough grinding tool travel mechanism is used to drive the at least one pair of rough grinding tools to move along the horizontal line; wherein the rough grinding mounting structure is provided on the machine base via a displacement mechanism, and the displacement mechanism is used to drive the rough grinding mounting structure to move along the width direction of the first processing position, and the width direction of the first processing position is perpendicular to the horizontal direction of the rough grinding tool travel; and A fine grinding device is provided in the second processing position and is used for fine grinding the silicon rod clamped by the silicon rod clamp located in the second processing position of the silicon rod transfer device; the fine grinding device comprises: a fine grinding mounting structure, which is provided on the machine base and corresponds to the second processing position; at least one pair of fine grinding tools are provided on the fine grinding mounting structure in a direction opposite to the vertical line; wherein the grinding surfaces of the at least one pair of fine grinding tools are parallel and relatively arranged; a fine grinding tool advance and retreat mechanism for driving at least one of the at least one pair of fine grinding tools to move in the direction of the vertical line, wherein the direction of the vertical line is perpendicular to the horizontal plane; a fine grinding tool travel mechanism for driving the at least one pair of fine grinding tools to move along the horizontal line; wherein the fine grinding mounting structure is provided on the machine base by a displacement mechanism, and the displacement mechanism is used to drive the fine grinding mounting structure to move in the width direction of the second processing position, and the width direction of the second processing position is orthogonal to the horizontal line direction of the fine grinding tool travel.

2. The silicon rod grinding machine according to claim 1, characterized in that The silicon rod transfer device is arranged in the central area of ​​the silicon rod processing platform. The transposition mechanism includes a transposition shaft, which is driven to rotate the transposition shaft by a preset angle to drive multiple silicon rod clamps to perform a conversion action.

3. The silicon rod grinding machine according to claim 2, characterized in that: The transposition mechanism further includes a transposition drive unit for driving the transposition shaft to rotate, and the transposition drive unit includes: A driving gear, axially connected to a driving source; and The driven gear is meshed with the driving gear and connected to the transposition shaft.

4. The silicon rod grinding machine according to claim 1, characterized in that The silicon rod fixture comprises: A pair of clamping arms, provided on the transfer body, for clamping two end faces of the silicon rod; wherein the axis of the silicon rod clamped by the pair of clamping arms is consistent with the clamping center line of the pair of clamping arms; and The clamping arm driving mechanism is used to drive at least one clamping arm of a pair of clamping arms to move along a horizontal line to adjust the clamping distance between the pair of clamping arms.

5. The silicon rod grinding machine according to claim 4, characterized in that: Any one of the pair of clamping arms is provided with a clamping portion and a clamping portion rotating mechanism, and the clamping portion rotating mechanism is used to drive the clamping portion and the clamped silicon rod to rotate.

6. The silicon rod grinding machine according to claim 4, characterized in that: The clamping arm driving mechanism comprises: an opening and closing guide rail, arranged on the transfer body along a horizontal line, for arranging a pair of clamping arms; and The opening and closing driving unit is used to drive at least one clamping arm of the pair of clamping arms to move along the opening and closing guide rail.

7. The silicon rod grinding machine according to claim 1, characterized in that: The rough grinding tool advance and retreat mechanism comprises: an advance and retreat guide rail, provided on the position change mechanism along the direction of the vertical line, for arranging the at least one pair of rough grinding tools; and The advance and retreat driving unit is used to drive at least one of the at least one pair of rough grinding tools to move along the advance and retreat guide rail.

8. The silicon rod grinding machine according to claim 1, characterized in that: The rough grinding tool advancing mechanism comprises: a travel guide rail, arranged on the rough grinding mounting structure along a horizontal line, for arranging the at least one pair of rough grinding tools; and The travel drive unit is used to drive the at least one pair of rough grinding tools to move along the travel guide rail.

9. The silicon rod grinding machine according to claim 1, characterized in that: The displacement mechanism on the rough grinding device includes: a first linear guide rail, provided on the machine base along the width direction of the first processing area; A driving source drives the rough grinding mounting structure to move along the first linear guide rail.

10. The silicon rod grinding machine according to claim 1, characterized in that: The fine grinding tool advance and retreat mechanism comprises: An advance and retreat guide rail is provided on the position change mechanism along the direction of the vertical line, and is used to set the at least one pair of fine grinding tools; and The advance and retreat driving unit is used to drive at least one of the at least one pair of fine grinding tools to move along the advance and retreat guide rail.

11. The silicon rod grinding machine according to claim 1, characterized in that: The fine grinding tool advancing mechanism comprises: a travel guide rail, arranged on the fine grinding mounting structure along a horizontal line, for arranging the at least one pair of fine grinding tools; and The travel drive unit is used to drive the at least one pair of fine grinding tools to move along the travel guide rail.

12. The silicon rod grinding machine according to claim 1, characterized in that: The displacement mechanism on the fine grinding device includes: a second linear guide rail provided on the machine base along a width direction of the second processing area; A driving source drives the fine grinding mounting structure to move along the second linear guide rail.

13. The silicon rod grinding machine according to claim 1, characterized in that The silicon rod processing platform is also provided with a third processing position; the silicon rod grinder also includes a chamfering device, which is provided in the third position and is used to chamfer the silicon rod clamped by the silicon rod clamp located in the third processing position in the silicon rod transfer device.

14. The silicon rod grinding machine according to claim 13, characterized in that: The third processing position is located between the first processing position and the second processing position, and the chamfering device is used to chamfer the roughly ground silicon rod clamped by the silicon rod clamp located at the third processing position in the silicon rod transfer device; or, the third processing position is located after the second processing position, and the chamfering device is used to chamfer the finely ground silicon rod clamped by the silicon rod clamp located at the third processing position in the silicon rod transfer device.

15. The silicon rod grinding machine according to claim 13, characterized in that: The chamfering device comprises: A chamfering installation structure is provided on the machine base and corresponds to the third processing area; At least one pair of chamfering grinding tools are provided on the chamfering mounting structure; wherein the grinding surfaces of the at least one pair of chamfering grinding tools are parallel and arranged opposite to each other; a chamfering tool advancing and retreating mechanism, configured to drive at least one of the at least one pair of chamfering tools to move along a vertical line direction, wherein the vertical line direction is perpendicular to the horizontal plane; and The chamfering grinding tool advancing mechanism is used to drive the at least one pair of chamfering grinding tools to move along a horizontal line.

16. The silicon rod grinding machine according to claim 15, characterized in that: The chamfering grinding tool advance and retreat mechanism comprises: An advance and retreat guide rail is provided on the position change mechanism along the direction of the vertical line, and is used to set the at least one pair of chamfering grinding tools; and The advance and retreat driving unit is used to drive at least one chamfering grinding tool of the at least one pair of chamfering grinding tools to move along the advance and retreat guide rail.

17. The silicon rod grinding machine according to claim 15, characterized in that: The chamfering grinding tool advancing mechanism comprises: a travel guide rail, arranged on the chamfering mounting structure along a horizontal line, for arranging the at least one pair of chamfering grinding tools; and The travel drive unit is used to drive the at least one pair of chamfering grinding tools to move along the travel guide rail.

18. The silicon rod grinding machine according to claim 15, characterized in that: The two grinding tools in the pair of chamfering grinding tools are respectively a fine chamfering grinding tool and a rough chamfering grinding tool.

19. The silicon rod grinding machine according to claim 18, characterized in that The fine chamfering grinding tool and the rough chamfering grinding tool are staggered in the horizontal direction of the chamfering grinding tool.

20. The silicon rod grinding machine according to claim 18, characterized in that The two grinding tools of the pair of chamfering grinding tools are staggered in the width direction of the third processing position, wherein the width direction of the third processing position is perpendicular to the horizontal line direction of the chamfering grinding tools.

21. The silicon rod grinding machine according to claim 13, characterized in that The profile of the transfer body in the horizontal plane is rectangular.

22. The silicon rod grinding machine according to claim 21, characterized in that A silicon rod clamp is provided on the outside of each side of the rectangular outline of the transfer body, wherein the clamping center line of any silicon rod clamp is parallel to the corresponding rectangular side.

23. The silicon rod grinding machine according to claim 21, characterized in that The silicon rod processing platform is also provided with a waiting area, and the long sides of the first processing area, the second processing area, the third processing area and the waiting area are parallel to the four sides of the rectangle; wherein, the long side of the first processing area is the travel direction of the rough grinding tool in the rough grinding device, the long side of the second processing area is the travel direction of the fine grinding tool in the fine grinding device, the long side of the third processing area is the travel direction of the chamfering tool in the chamfering device, and the long side of the waiting area is the axial direction of the silicon rod carried at the waiting area.

24. The silicon rod grinding machine according to claim 23, characterized in that In the waiting state, the first side of the rectangle of the transfer body outline corresponds to the waiting area, the second side corresponds to the first processing area, the third side corresponds to the second processing area, and the fourth side corresponds to the third processing area.

25. The silicon rod grinding machine according to claim 1, characterized in that The silicon rod processing platform is further provided with a waiting area; the silicon rod grinder further comprises a silicon rod transferring device for loading the silicon rods to be ground into the waiting area or unloading the processed silicon rods from the waiting area.

26. The silicon rod grinding machine according to claim 25, characterized in that The silicon rod transferring device comprises: Silicon rod loading and carrying structure, used to carry silicon rods to be ground; a centering adjustment mechanism, configured to adjust the position of the silicon rod so that the axis of the silicon rod corresponds to a predetermined center line; and The feed drive mechanism is used to drive the silicon rod loading and carrying structure and the silicon rods carried by it to move along the loading and unloading direction to the waiting position.

27. The silicon rod grinding machine according to claim 26, characterized in that The centering adjustment mechanism includes a vertical lifting mechanism, which is used to drive the silicon rod loading support structure and the silicon rods it supports to perform vertical lifting and lowering movements so that the axis of the silicon rod is aligned with the predetermined center line in the direction of the vertical line. The predetermined center line corresponds to the clamping center line of each first silicon rod clamp in the silicon rod transfer device.

28. The silicon rod grinding machine according to claim 27, characterized in that The vertical lifting mechanism comprises: A vertical lifting guide rod, used for setting the silicon rod loading bearing structure; and The vertical lifting drive unit is used to drive the silicon rod loading support structure to move up and down along the vertical lifting guide rod.

29. The silicon rod grinding machine according to claim 28, characterized in that The vertical lifting drive unit also includes an auxiliary lifting component for cooperating with the vertical lifting drive unit.

30. The silicon rod grinding machine according to claim 26, characterized in that The centering adjustment mechanism further includes a height detector for detecting the silicon rod to obtain position information of the axis of the silicon rod in the direction of the vertical line.

31. The silicon rod grinding machine according to claim 30, characterized in that The height detector is a contact sensor or a distance sensor.

32. The silicon rod grinding machine according to claim 26, characterized in that The feed drive mechanism comprises: A feed guide rod is arranged along the loading and unloading direction and is used to set the silicon rod loading and supporting structure; and A feed drive unit is used to drive the silicon rod loading support structure to move along the feed guide rod.

33. The silicon rod grinding machine according to claim 26, characterized in that The silicon rod loading and supporting structure includes a supporting base and a first loading component and a second loading component that are arranged opposite to each other along a loading and unloading direction.

34. The silicon rod grinding machine according to claim 33, characterized in that It also includes a first centering adjustment mechanism for changing the position of the silicon rod in the loading and unloading direction by adjusting the first loading component and the second loading component so that the axis of the silicon rod corresponds to the center line of the silicon rod loading and unloading direction in the silicon rod loading and unloading support structure.

35. The silicon rod grinding machine according to claim 34, characterized in that The first centering adjustment mechanism includes: An opening and closing slide rail is provided on the bearing base along the loading and unloading direction, and is used to set the first loading component and the second loading component; and The opening and closing driving unit is used to drive the first loading component and the second loading component to move toward each other along the opening and closing slide rail to perform a closing action or to move away from each other along the opening and closing slide rail to perform an opening action.

36. The silicon rod grinding machine according to claim 35, characterized in that The opening and closing drive unit includes: A turntable is provided in the central area of ​​the supporting base via a rotating shaft; a first transmission assembly and a second transmission assembly, wherein the first transmission assembly is associated with the bearing base and the turntable, and the second transmission assembly is associated with the bearing base and the turntable; a first push-pull component and a second push-pull component, wherein the first push-pull component is associated with the turntable and the first loading component, and the second push-pull component is associated with the turntable and the second loading component; Wherein, when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate forward, the turntable drives the first loading assembly associated with the first push-pull assembly and the second loading assembly associated with the second push-pull assembly to move toward each other along the opening and closing slide rail; when at least one of the first transmission assembly and the second transmission assembly is controlled to drive the turntable to rotate backward, the turntable drives the first loading assembly associated with the first push-pull assembly and the second loading assembly associated with the second push-pull assembly to move away from each other along the opening and closing slide rail.

37. The silicon rod grinding machine according to claim 36, characterized in that The first push-pull component is a first connecting rod, the first end of the first connecting rod is axially connected to the turntable, and the second end of the first connecting rod is axially connected to the first loading component. The second push-pull component is a second connecting rod, the first end of the second connecting rod is axially connected to the turntable, and the second end of the second connecting rod is axially connected to the second loading component.

38. The silicon rod grinding machine according to claim 36, characterized in that The first transmission assembly includes a first cylinder, the cylinder body of the first cylinder is connected to the supporting base, and the piston rod of the first cylinder is axially connected to the turntable. The second transmission assembly includes a second cylinder, the cylinder body of the second cylinder is connected to the supporting base, and the piston rod of the second cylinder is axially connected to the turntable.

39. The silicon rod grinding machine according to claim 26, characterized in that It also includes a second centering adjustment mechanism, which is used to adjust the position of the silicon rods supported by the silicon rod loading support structure in the clamping direction so that the silicon rods are located in the center area of ​​the silicon rod loading support structure in the clamping direction, wherein the clamping direction is perpendicular to the loading and unloading direction.

40. The silicon rod grinding machine according to claim 39, characterized in that The second centering adjustment mechanism includes: A bracket is provided on the silicon rod processing platform; A slide rail is provided on the bracket along a clamping direction; Two ejecting members are provided on the slide rail and are arranged opposite to each other on both sides of the bracket; and The ejection driving unit is used to drive the two ejection members to move toward or away from each other along the slide rail.

41. The silicon rod grinding machine according to claim 33, characterized in that The silicon rod transfer device further includes: a silicon rod unloading supporting structure for supporting the silicon rods to be unloaded.

42. The silicon rod grinding machine according to claim 41, characterized in that The silicon rod unloading supporting structure includes an unloading component, and the unloading component is provided on the supporting base or one of the first loading component and the second loading component.

43. The silicon rod grinding machine according to claim 42, characterized in that The silicon rod transfer device further includes a reversing mechanism for driving the silicon rod loading support structure and the silicon rod unloading support structure to exchange positions.

44. The silicon rod grinding machine according to claim 43, characterized in that The reversing mechanism includes a reversing shaft arranged in the direction of the vertical line, and the reversing shaft is driven to rotate a preset angle so that the silicon rod loading support structure and the silicon rod unloading support structure exchange positions.

45. The silicon rod grinding machine according to claim 44, characterized in that The reversing mechanism further includes a reversing drive unit for driving the reversing shaft to rotate.

46. ​​The silicon rod grinding machine according to claim 1, characterized in that The profile of the transfer body in the horizontal plane is an equilateral triangle.

47. The silicon rod grinding machine according to claim 46, characterized in that A silicon rod clamp is provided on the outside of each side of the triangle of the transport body outline, wherein the clamping center line of any silicon rod clamp is parallel to the corresponding side.

48. The silicon rod grinding machine according to claim 46, characterized in that The long side of the first processing location and the extension line of the long side of the second processing location form an angle of 60°, wherein the long side direction of the first processing location is the travel direction of the rough grinding tool in the rough grinding device, and the long side direction of the second processing location is the travel direction of the fine grinding tool in the fine grinding device.

49. The silicon rod grinding machine according to claim 48, characterized in that The silicon rod processing platform is also provided with a waiting area. In the waiting state, the first side of the transfer body contour corresponds to the waiting area, the second side corresponds to the first processing area, and the third side corresponds to the second processing area.

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