A method for fitting harmonic error function of hybrid turntable

By combining the data of multi-faceted prism and gyroscope, the hybrid rotary table harmonic error function fitting method is used to solve the problem of insufficient number of calibration points in the existing technology, and more accurate characterization of position deviation of the entire circumferential angle of the rotary table and the accuracy improvement is achieved. .

CN114139106BActive Publication Date: 2025-01-10CHINA JILIANG UNIV +2
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Patent Information

Application Number
CN202111450066.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-12-01
Publication Date
2025-01-10
Estimated Expiration
2041-12-01

AI Technical Summary

Technical Problem

In the existing rotary angular position error compensation technology, the limit of the multi-faceted prism deviates the number of calibrated angular position error points, making it difficult to fully characterize the position deviation of the entire circumferential angle of the rotary trunk, resulting in large error problems in the range of some angular positions after compensation.

Method used

The hybrid rotary table harmonic error function fitting method is used to calibrate the rotary table angular position error data through a multi-faceted prism and a self-collimator, and the angular position error sequence is obtained by combining the gyroscope. The calibration data volume is increased through the Rait criterion, and the harmonic is used. The wave analysis method is fitted to obtain a more accurate characterization of the position deviation of the entire circumferential angle of the turntable.

Benefits of technology

By increasing the calibrated data volume, the hybrid harmonic error function can more accurately characterize the angular position deviation of the turntable, improve the accuracy of angular position measurement, and reduce the error after error compensation.

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Abstract

The present invention discloses a hybrid turntable harmonic error function fitting method. The present invention combines the traditional polyhedral prism with the autocollimator calibration method and the gyroscope and turntable positioning comparison data, and uses the Rait criterion to increase the calibration data volume, so as to solve the problem that the number of calibration points in the traditional harmonic error function fitting process is too small and the fitted harmonic error function cannot fully characterize the turntable circular angular position deviation. The harmonic error function fitted by the method described in the present invention is used to compensate for the turntable angular position deviation, which can more effectively improve the turntable full circumferential angular position accuracy.
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Citation Information

Patent Citations

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