Device and method for moving items to a processing station, conveyor system and processing equipment

Abstract

A device for moving an article comprising at least a substrate (2) through an open side of a processing station (1a, b) of a processing apparatus, the device comprising at least one support (26; 26') positionable at the processing station (1a, b). The device comprises at least one carrier (27a, b; 27'a, b) each guided to move relative to the one or more supports (26; 26') along a respective path oriented primarily parallel to a reference axis (z) in a reference coordinate system. The device comprises at least one device (29a, b, 30a, b, 31a, b; 37a, b) for controlling the movement of at least one of the carriers (27a, b; 27'a, b) and driving the movement in at least one of the opposite directions along the path. The device comprises an assembly (21; 21') for holding the article and a suspension mechanism, the holding assembly (21; 21') being connected to the at least one carrier (27a, b; 27'a, b) by the suspension mechanism. The suspension mechanism is arranged to guide the movement of the holding assembly (21; 21') along a holding assembly (21; 21') path relative to the at least one carrier (27a, b; 27'a, b). The device (29a, b, 30a, b, 31a, b; 37a, b) is arranged to drive the movement of the holding assembly (21; 21') along the holding assembly path in at least one direction. The holding assembly path is oriented primarily parallel to the reference axis (z).

Description

Technical Field

[0001] The present invention relates to an apparatus for moving an article comprising at least a substrate through an open side of a processing station of a processing device, the apparatus comprising:

[0002] at least one support, which can be placed at said processing station,

[0003] at least one carrier, each carrier guided for movement relative to the one or more supports along a respective path oriented primarily parallel to a reference axis in a reference coordinate system;

[0004] at least one device for controlling movement of at least one of said carriages and driving movement in at least one of opposite directions along said path;

[0005] an assembly for holding the article; and

[0006] a suspension mechanism, the holding assembly being connected to the at least one carrier by the suspension mechanism;

[0007] wherein the suspension mechanism is arranged to guide movement of the holding assembly along a holding assembly path relative to the at least one carrier, and

[0008] wherein the device is arranged to drive movement of the holding assembly along the holding assembly path in at least one direction.

[0009] The invention further relates to a system for transporting articles comprising at least a substrate between processing stations of a processing apparatus.

[0010] The invention also relates to a processing device.

[0011] The invention also relates to a method of handling a substrate in a processing apparatus. Background Art

[0012] US 2018 / 0282893 A1 discloses an electrolytic plating device. The electrolytic plating device includes a horizontal guide, a horizontal transport mechanism, a vertical guide, a vertical transport mechanism, and an arm. The horizontal transport mechanism is a mechanism for moving a substrate in a transport direction. The vertical transport mechanism is a mechanism for moving a substrate in a vertical direction. The arm is arranged on the vertical transport mechanism. The longitudinal direction of the arm is a direction perpendicular to a plane defined by the transport direction and the vertical direction. The substrate is held by a substrate holder. The substrate holder is connected to a clamping mechanism and clamped by the clamping mechanism. The holder clamping mechanism is arranged near the distal end of the arm. The electrolytic plating device is provided with a moving mechanism near the distal end of the arm. The moving mechanism is a mechanism for moving the holder clamping mechanism independently of the substrate transport section. The moving mechanism includes a rotating mechanism and a linear motion mechanism. The rotating mechanism is a mechanism for rotating the holder clamping mechanism about a vertical axis. The linear motion mechanism is a mechanism for linearly moving the holder clamping mechanism along the longitudinal direction of the arm.

[0013] A problem with known systems is their relatively high equipment requirements. The substrate must be lifted high enough to allow its lower edge to pass through the processing stations over which it moves horizontally. The substrate must also be lowered sufficiently into each processing station to allow proper processing. This determines the arm stroke and, therefore, the height of the vertical lift mechanism. Summary of the Invention

[0014] It is an object of the present invention to provide a device, a conveying system, a treatment apparatus and a method of the type defined above in the opening paragraph which allow the treatment apparatus provided with the device or conveying system to have relatively small dimensions in the direction of the reference axis.

[0015] This object is achieved by a first aspect of the device according to the invention, which is characterized in that the holding assembly path is oriented mainly parallel to the reference axis.

[0016] For ease of explanation, this document will assume that the reference axis is a substantially vertical reference axis, such that the open side of the processing station is the top surface of the processing station. Articles, including substrates, can thus be raised out of and lowered into the processing station by the apparatus. In alternative embodiments, the reference axis can be a horizontal axis.

[0017] The path oriented primarily parallel to the reference axis has an angle of no more than 45° to the reference axis. In practical embodiments, the angle will be less than 10° or even 5°. The path will thus be oriented substantially parallel to the reference axis.

[0018] Since the components for holding items can be raised and lowered relative to one or more carriers, the stroke of the carriers can be shorter. Since this stroke determines the height of the space required to accommodate the device, the overall height of the processing equipment equipped with the device is reduced.

[0019] The apparatus may be movable between processing stations or associated with only one processing station, in which case at least one support member is positioned at the processing station. There may be one support member on one side of the processing station, supports on both sides of the processing station, or a support frame. The at least one support member may itself be supported by another structure, such as a transport frame.

[0020] There may be a single carrier, such as a strip, with the holding assembly attached at a single point. Alternatively, there may be multiple carriers guided for movement in series, with the suspension mechanism comprising a linkage between the holding assembly and each of the carriers. Each carrier is guided for movement relative to at least one of the supports. Multiple carriers may be guided for movement relative to a single support. Where multiple carriers are provided, these carriers may have respective movement paths that are tilted in different directions at slight angles to a reference axis, but collectively move the holding assembly along a path substantially parallel to the reference axis.

[0021] The carrier may be in the form of a pivot at the end of a piston or plunger of an actuator (e.g., a pneumatic or hydraulic actuator). Alternatively, the carrier may be a slip ring guided along a guide fixed to a support. In either case, the connection between the carrier and the support determines the path of the carrier. The movement path will typically be substantially linear, so that each movement of the carrier corresponds to a translation.

[0022] At least one device is arranged between the support and the carrier for controlling the movement of the carrier relative to the support. The device is arranged to apply a force sufficient to move one or more carriers and the holding assembly and the article. As will be explained, the at least one movement control device can also drive the movement of the holding assembly relative to the carrier. Alternatively, another actuator or motor can drive the movement of the holding assembly relative to at least one carrier. Movement can be driven along the path in only one sense, which movement will correspond to upward movement of the holding assembly in the case where the reference axis is a substantially vertical reference axis. Movement in the reverse sense does not need to be driven by a component of the device, but can be driven by gravity. Regardless of the orientation of the reference axis, the reverse movement of at least one of the carriers and the holding assembly can be driven by the elastic component.

[0023] To move an item into a processing station, one or more carriers are moved relative to the supports toward the processing station, and the holding assembly is moved relative to the one or more carriers toward the processing station. To retrieve an item from the processing station, one or more carriers are moved in the opposite direction relative to the one or more supports, and the holding assembly is moved relative to the one or more carriers away from the processing station. A suspension mechanism connects the holding assembly to the one or more carriers.

[0024] In an embodiment, the reference axis is a first reference axis in a reference coordinate system, the reference coordinate system further includes a second reference axis perpendicular to the first reference axis, and the holding component has an elongated shape extending parallel to the second reference axis.

[0025] This embodiment is particularly well-suited for processing equipment having multiple processing stations for processing planar substrates, where the substrates are moved into and out of the processing stations in a plane parallel to the plane of the substrate. An example is a so-called vertical processing equipment, in which the processing stations are arranged in a row extending in the direction of a third reference axis that is perpendicular to both the first and second reference axes. The processing stations can be relatively close together in the direction of the third reference axis because the substrate is held by its plane perpendicular to the third reference axis. Because the processing stations are relatively close together in the direction in which they are aligned, the processing equipment can be relatively compact in all three dimensions.

[0026] In an embodiment, the reference axis is a first reference axis in a reference coordinate system, the reference coordinate system further comprising a second reference axis perpendicular to the first reference axis, and the holding assembly has an engagement feature for engaging the article at at least two different positions along the second reference axis.

[0027] This embodiment has the effect of facilitating counter-rotation of the substrate about an axis parallel to the reference axis. This embodiment further facilitates counter-rotation of the substrate, at least relative to one or more carriers, about an axis parallel to a third reference axis, the third reference axis being perpendicular to the first and second reference axes. If the substrate and article are planar and move in a plane substantially parallel to the planes of the substrate and article, the processing station may have an opening in the form of a relatively narrow slot through which the article is moved into or out of the processing station.

[0028] In an embodiment, the retaining assembly is provided with at least one engagement feature for releasably interlocking with at least one engagement feature of the article.

[0029] This feature allows the device to be used for other purposes while a substrate is being processed in a processing station. When the item is properly positioned for processing in the processing station, the device can release the item. If the device is included in a conveyor system for moving items between multiple processing stations in a processing facility, the device can be moved to another processing station to process another item, including another substrate. Furthermore, the interlocking engagement facilitates reverse movement of the item relative to the holding assembly, such as swinging the item.

[0030] In a specific example of this embodiment, the retaining assembly includes at least one actuator for moving at least one of the engagement features of the retaining assembly into and out of engagement with at least one of the engagement features of the article.

[0031] One effect is that play between the engagement features can be largely avoided. Because the retaining assembly includes at least one actuator, the article does not need to be provided with an actuator. The article can only include stationary engagement features.

[0032] In another example of any embodiment of the device wherein the retaining assembly is provided with at least one engagement feature for releasably interlocking with at least one engagement feature of the article, the engagement feature of the retaining assembly comprises at least one element shaped and arranged to hook behind the engagement feature of the article, and in use, at least the end of the element proximate the article is movable laterally relative to the reference axis.

[0033] This example is particularly applicable where the reference axis is a vertical reference axis. The article can actually be suspended from the engagement feature. The engagement feature of the mobile retaining assembly is hooked under the engagement feature of the article to achieve interlocking engagement.

[0034] In a specific example of an embodiment, wherein the reference axis is a first reference axis in a reference coordinate system, the reference coordinate system further includes a second reference axis perpendicular to the first reference axis, the retaining component has an engagement feature for engaging the article at at least two different positions along the second reference axis, and the retaining component has at least one engagement feature for releasably interlocking with at least one engagement feature of the article, the engagement feature of the retaining component includes at least two elements formed to have supports relative to each other in respective opposite directions along the second reference axis.

[0035] The support contacts the engagement feature of the article from the opposite side, as seen in the direction of the second reference axis. This positions the article relative to the retaining assembly in said direction, substantially preventing relative movement in said direction.

[0036] An embodiment of the apparatus comprises at least one substrate holder for receiving a substrate such that at least a portion of the substrate is exposed, wherein the article further comprises a substrate holder and the holding assembly is arranged to hold the substrate holder.

[0037] As a result, there is less risk of damage to the substrate. This embodiment is particularly applicable where the holding component has at least one engagement feature for releasably holding the article, and more particularly where the processing equipment comprises a plurality of processing stations, with the device being part of a conveyor system for moving the article between the stations. In such cases, the article is placed in each processing station, released, and then picked up again to remove the article from the relevant processing station and move it to the next processing station. Repeated engagement occurs with the substrate holder, rather than the substrate.

[0038] In a specific example of this embodiment, the substrate holder is arranged to receive a planar substrate such that at least an edge region of each of the opposing major surfaces of the substrate is covered along a periphery of the substrate while exposing at least a section of at least one of the major surfaces.

[0039] The vulnerable edges of the substrate are thereby protected because the substrate holder frames or covers each major surface of the planar substrate. In the case of framing both major surfaces, the substrate can be processed on both sides simultaneously.

[0040] In an example of an embodiment in which the apparatus comprises at least one substrate holder for holding a substrate to expose at least a portion of the substrate, the article further comprises a substrate holder, and the holding assembly is arranged to hold the substrate holder, the substrate holder having a planar configuration, and the substrate holder includes a carrier member extending in the plane of the substrate holder adjacent to a section of the substrate holder for holding the substrate.

[0041] The carrier assembly forms a portion of the substrate holder, adjacent to the holding assembly of the device for moving objects into and out of the processing station. The carrier assembly itself may comprise a plurality of components. Such components of the carrier assembly may also be integrally connected to one or more components included in the section for accommodating substrates. The integrally connected components are then formed into a single piece. The section for accommodating substrates can be inserted relatively deep into the processing station, without requiring the device for moving objects into and out of the processing station (in particular, the holding assembly) to extend very deeply into the processing station.

[0042] In a particular version of this example, the carrier member comprises an end section that projects laterally in an opposite direction relative to the section for accommodating the substrate.

[0043] This version is particularly suitable for use in vertical processing stations, in which the section for accommodating substrates can be suspended from a carrier part. The carrier part can be supported by protruding end sections, for example on both sides of a bath in which the section for accommodating substrates can be immersed.

[0044] In a special version of this embodiment, the end section is provided with features for engaging a support in the processing station, wherein said features are arranged on the same side of the carrier part as the side on which the section for accommodating the substrate extends.

[0045] The device for moving objects into and out of the processing station can thus simply lower the objects onto a support provided in the processing station.

[0046] In certain embodiments, features for engaging a support in a processing station are shaped to interlock with features of the support in the processing station to prevent relative movement in a direction parallel to the direction in which the carrier component extends.

[0047] This is suitable for use in conjunction with a processing station in which the support moves the substrate holder in the plane of the substrate during processing.

[0048] In a variation of an embodiment comprising at least one substrate holder for holding a substrate so as to expose at least a portion of the substrate, wherein the article further comprises a substrate holder and the holding assembly is arranged to hold the substrate holder, the substrate holder has a planar configuration, the substrate holder includes a carrier member extending in the plane of the substrate holder adjacent to a section of the substrate holder for holding the substrate, the carrier member includes an end section protruding laterally in an opposite direction relative to the section for holding the substrate, the end section having a feature for engaging a support in a processing station, and the feature is arranged on the same side of the carrier member as the side on which the section for holding the substrate extends, the feature for engaging a support in the processing station being shaped to interlock with the feature of the support in the processing station to prevent relative movement in a direction transverse to the plane of the substrate holder.

[0049] A rotation about an axis in the plane of the substrate holder extending in a direction transverse to the carrier part can thereby be prevented.A movement in a direction transverse to the plane of the substrate holder is likewise prevented.

[0050] In an example of an embodiment comprising at least one substrate holder for holding a substrate so as to expose at least a portion of the substrate, wherein the article further comprises a substrate holder, and the holding assembly is arranged to hold the substrate holder, the substrate holder has a planar configuration, the substrate holder includes a carrier member extending in the plane of the substrate holder adjacent to a section of the substrate holder for holding the substrate, and the carrier member includes end sections protruding laterally in opposite directions relative to the section for holding the substrate, the protruding end sections each including a section extending in the same direction as the section of the substrate holder for holding the substrate relative to a central section of the carrier member.

[0051] The end section can thus be arched over a barrier, for example a side wall of a tub for accommodating the substrate-accommodating section of the substrate holder.

[0052] In an embodiment of the device for moving items, at least one of the means for controlling the movement of at least one of the carriers is further arranged to drive the movement of the holding assembly.

[0053] This embodiment requires fewer actuators. It also means that synchronization between the actuators can be relatively simple.

[0054] In an example of this embodiment, at least one carrier is provided with a member movably journalled to the carrier, the carrier is guided to move along one of the supports past a feature arranged to engage the movable member along the support from at least one position along the path of the carrier, and the suspension mechanism includes a mechanism for converting movement of the movable member relative to the carrier into movement of the retaining assembly relative to the carrier.

[0055] In one embodiment, the feature arranged to engage the movable component can engage the movable component only from a specific position along the forward path of the carrier. In another embodiment, the engagement is permanent. Engaging the movable component and moving the carrier forward via at least one device for controlling the movement of at least one of the carriers causes the movable component to move relative to the carrier, and this relative movement translates into movement of the retaining assembly relative to the carrier. The carrier or retaining assembly need not include a separately powered actuator for moving the retaining assembly relative to the at least one carrier. The feature arranged to engage the movable component can be fixed to at least one support member. The feature is located at least at a fixed position along the reference axis.

[0056] In an example of this embodiment, one or more movable parts are included in a mechanism for converting movement of the movable part relative to the carrier into movement of the holding assembly relative to the carrier, and includes at least one lever pivotably arranged on the carrier.

[0057] The lever also forms a transmission mechanism because a relatively small displacement of the lever relative to a feature arranged to engage the movable component can be converted into a relatively large displacement of the retaining assembly. Furthermore, the lever can be a first-class lever. Movement of one of the lever arms relative to the carrier in a first direction along a reference axis causes movement of the other lever arm in an opposite direction along the reference axis. One of the arms can thereby engage via the feature, and the other arm can be coupled directly or indirectly to the retaining assembly.

[0058] In a particular version thereof, the mechanism for converting movement of the movable part relative to the carrier into movement of the holding assembly relative to the carrier is connected to the holding assembly via a slip ring, for example a slip ring movable along an arm of a lever.

[0059] The slip ring can be supported in any of a number of different ways, including via ball or roller bearings. While direct contact between the slip ring and the guide along which it moves is not required, it may be so in some embodiments. The slip ring ensures that pivotal movement of the lever only translates movement of the retaining assembly in a direction primarily parallel to the reference axis.

[0060] In a specific version of the embodiment, at least one of the devices for controlling the movement of at least one of the carriers is also arranged to drive the movement of the holding assembly, and at least one of the carriers has a component that is movably supported to the carrier, the carrier is guided to move along one of the supports through a feature, the feature being arranged to engage the movable component along the support from at least a certain position along the path of the carrier, and the suspension mechanism includes a mechanism for converting the movement of the movable component relative to the carrier into movement of the holding assembly relative to the carrier, the movable component is guided to move linearly relative to the carrier in a direction at least approximately parallel to the path of the holding assembly, and the mechanism for converting the movement of the movable component relative to the carrier into movement of the holding assembly relative to the carrier includes another movable component and a force transfer device, the other movable component is guided to move linearly relative to the carrier in a direction at least approximately parallel to the path of the holding assembly, and the force transfer device is used to transfer force between the movable component and the other movable component.

[0061] The corresponding movement components of the movable component and the other movable component, which are oriented at least parallel to the holding assembly path, will typically be oriented in opposite directions. Thus, when the movement of the movable component is contained by the features engaging the movable component, the carrier continues to move in a sense in a direction at least approximately parallel to the reference axis (e.g., upward). The movable component moves downward relative to the carrier. Due to the configuration of the force transmission device, the other movable component moves upward relative to the carrier. The means for driving the movement of the carrier need only drive the movement of the carrier. All forces are oriented at least approximately parallel to the holding assembly path and, therefore, parallel to the reference axis. This results in no, or at least almost no, torque on any of the components of the suspension mechanism.

[0062] In a specific example of this embodiment, the force transfer means includes a medium interconnecting the movable member with the other movable member and wound around a wheel rotatably supported to the carrier.

[0063] The medium may be a cable, belt, wire, rope, chain, or the like. Specifically, the medium may be configured to positively engage the wheel. In such a case, the wheel may be a gear, and the medium may be, for example, a chain or toothed belt. Positive engagement prevents slippage. In any case, the medium will be flexible and configured to transmit a tensile force, thereby coupling the movement of the movable component and the other movable component. The number of turns of the medium around the wheel will generally cause the movable component and the other movable component to move in opposite directions relative to the carrier.

[0064] In a particular embodiment of the device, the carrier, the suspension mechanism and the holding assembly form a planar linkage.

[0065] The object can therefore only be moved on one plane.

[0066] In an embodiment of the device, the reference axis is a first reference axis in a reference coordinate system, the reference coordinate system further comprising a second reference axis perpendicular to the first reference axis, the first reference axis and the second reference axis together defining a plane parallel to the plane in which the holding component path is located, and the device comprises at least two carriers, which are guided to move on opposite sides of the holding component as seen in a direction parallel to the second reference axis.

[0067] In this embodiment, the holding member may be an elongated holding member extending in a direction parallel to the second reference axis. The holding member is held at two ends, rather than in the form of an arm with free ends. This facilitates reverse bending of the holding member, which could result in less accurate positioning of the item or even cause the item to wobble relative to the carrier.

[0068] In an example of this embodiment, the at least one support comprises a support frame supporting each of the at least two carriers.

[0069] This helps to ensure that the paths of the carriers are relatively well defined with respect to each other, as the support frame can be relatively rigid.The respective paths of the carriers may in particular be substantially parallel linear paths.

[0070] In an embodiment of the device, the reference axis is a first reference axis in a reference coordinate system, the reference coordinate system further comprising a second reference axis perpendicular to the first reference axis, the first reference axis and the second reference axis together defining a plane parallel to the plane in which the holding component path is located, and the suspension mechanism is arranged to support the holding component on each of opposite sides of the plane in which the holding component path is located.

[0071] This helps to counter-rotate the holding assembly about an axis in the plane.In the case of a substantially planar article, the plane of the article is maintained in the desired plane in which the path is preferably located relative to.

[0072] In an embodiment of the device, the at least one means for controlling the movement of at least one of the carriers comprises a linear actuator.

[0073] The carriage is thereby driven along the path in a relatively simple manner.

[0074] In a particular example of this embodiment, the linear actuator comprises a rotary motor and a mechanism for converting the rotary motion into a linear motion, wherein the rotary motor is arranged on at least one support.

[0075] Thereby, the assembly comprising the carrier and the holding assembly is not pressed down by the electric motor.

[0076] In an embodiment of the apparatus, the holding assembly path extends, in use, in a direction parallel to the reference axis beyond the end point of the path of the carrier, proximate the processing station.

[0077] This ensures that the movement of the holding assembly relative to the carrier causes the holding assembly to move closer to the interior of the processing station than the carrier.For example, the path of the carrier does not need to cross the processing station.

[0078] In an embodiment, in use, the carrier and suspension mechanism are positioned laterally adjacent the holding assembly relative to the holding assembly path at an end of the holding assembly path distal to the processing station.

[0079] This further contributes to reducing the dimensions of the device in the direction of the reference axis. The end point of the holding assembly path, located distally from the processing station, can be relatively close to the limit of the device in the direction of the reference axis, since no parts of the carrier or suspension mechanism are located between the holding assembly and said limit, as seen in the direction of the reference axis.

[0080] According to another aspect, a system according to the invention for transporting objects comprising at least substrates between processing stations of a processing apparatus comprises a transport movable along the processing stations, wherein the transport comprises at least one device according to the invention.

[0081] The transport element carrying the articles is able to pass through barriers between adjacent processing stations or near openings through which articles can be moved. The transport element can still be relatively compact in the direction of moving articles into and out of each processing station. The system can in particular comprise at least two devices according to the invention. One function is that the transport element can be moved to a processing station having a substrate to be processed, retrieve a substrate that has been processed in said processing station, and insert a substrate to be processed without first having to return a processed substrate at a station further along the line and retrieve the substrate to be processed. The processing stations are idle for relatively short periods of time, and the number and length of the movements performed by the transport element are kept small.

[0082] An embodiment of the system comprises at least one guide for guiding the movement of the transport element, wherein the holding arrangement extends in a direction transverse to the direction of movement of the transport element.

[0083] In particular, if the article, including at least the substrate, is planar, the plane of the article can extend in a direction transverse to the direction of movement of the transport, allowing each processing station to extend over a relatively short distance parallel to the direction of movement. The longest dimension of the holding assembly is transverse to the direction of movement of the transport. As a result, the apparatus can be compact in all dimensions.

[0084] An embodiment of the system comprises at least two guides for guiding the movement of the transport, said at least two guides being arranged to support the transport and being arranged on opposite sides of a plane passing through the centre of the holding assembly and parallel to the reference axis and the movement direction of the transport.

[0085] This helps to maintain the article, including at least the substrate, relatively accurately in its desired orientation.

[0086] An embodiment of the system comprises a system for transferring inductive power to a transmission, the system being arranged to supply power to at least one device for controlling movement of at least one of the carriers.

[0087] The transport element is thus provided with a pickup device, for example a shoe movable along a track, wherein, during use, a current is induced in the pickup device. This avoids the need for cable carriers (also known as drag chains, energy chains, or cable chains) to power at least one device for controlling the movement of at least one of the carriers. The transport element can still have a relatively large travel distance.

[0088] According to a further aspect, the apparatus according to the invention for processing substrates comprises at least one of the devices according to the invention and a transport system according to the invention.

[0089] In other words, the apparatus may be provided with at least one device for moving an article comprising at least a substrate, said device being comprised or not in the transport of the system according to the invention.The apparatus is relatively compact.

[0090] In a particular embodiment, the apparatus comprises at least one processing station open at the top, wherein the means for moving items are arranged to raise and lower items from and to at least one (eg each) processing station.

[0091] In this embodiment, the apparatus may have a relatively low height.

[0092] In an example of this embodiment, at least one support of the device is arranged at a level above the top of the processing station.

[0093] The device therefore does not span the processing stations, but rather extends over them. If the support member is included in the transport member of the conveyor system, the transport member extends over the top of the processing stations. This facilitates movement of the device (if provided) between processing stations. The fact that the device does not need to span the processing stations also keeps the apparatus relatively compact and makes the processing stations easily accessible from the side.

[0094] In an embodiment, the apparatus is a wet processing apparatus, at least one of the processing stations comprising a bath for containing a processing liquid in which at least the substrate is immersed.

[0095] The device for moving an item comprising at least a substrate may in particular be arranged to lower at least the substrate into the tub and to raise the substrate again from the tub.

[0096] According to another aspect, a method for handling substrates in a processing apparatus is characterized in that the holding assembly path is oriented predominantly parallel to a reference axis.

[0097] The method can be implemented by making a relatively small addition to the distance of the processing device in the direction of the reference axis.

[0098] In an embodiment of the method, the processing device is a processing device according to the present invention.

[0099] Conversely, the apparatus, system and processing device according to the present invention may be configured for carrying out the method according to the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0100] The present invention will be explained in further detail with reference to the accompanying drawings, in which:

[0101] Figure 1 is a perspective view of a row of processing stations in a processing plant;

[0102] Figure 2 is a perspective view of components of a system for transporting articles including substrates between processing stations;

[0103] Figure 3 is a detailed view of components of a mechanism for moving a transport member of a conveyor system along a processing station;

[0104] Figure 4 is a perspective view of a conveyor showing a lifting device of the conveyor in a raised position;

[0105] Figure 5 is a plan view of the transmission member showing the lifting device in a raised position;

[0106] Figure 6 is a perspective view of the transport at the station showing the lifting device in the lowered position;

[0107] Figure 7 is a plan view of the transmission member showing the lifting device in the lowered position;

[0108] Figure 8 is a detailed perspective view of the transmission showing the lifting device in the lowered position;

[0109] Figure 9 is a detailed partial perspective view of a lever included in a suspension mechanism of a lifting device;

[0110] Figure 10 A detailed view of an end section of a component that is a substrate holder;

[0111] Figure 11 a detailed view of an engagement feature of a lifting device for engaging a substrate holder;

[0112] Figure 12 for Figure 11 a second detailed view of a joining feature of FIG.

[0113] Figure 13 A plan view of a holding assembly of a lifting device;

[0114] Figure 14 is a detailed perspective view of a substrate holder supported by one of a pair of carrier assemblies of a processing station;

[0115] Figure 15 is a plan view of the frame and lifting device of a second embodiment of a transmission member, wherein the lifting device is in a raised position;

[0116] Figure 16 is a plan view of the frame and lifting device of the second embodiment, wherein the lifting device is in a lowered position; and

[0117] Figure 17 Detailed view of a carrier included in the lifting device of the second embodiment, with part of the housing of the carrier omitted. DETAILED DESCRIPTION

[0118] The example of a vertical wet processing apparatus for a planar substrate 2 will be used to describe the process of a vertical wet processing apparatus comprising a plurality of processing stations 1a, b ( Figure 1 However, the conveyor system can also be used in combination with other types of processing equipment including a plurality of processing stations 1a, b arranged in a row and open on one side (e.g., at the top) to allow the substrate 2 to be inserted into and retracted from the processing stations 1a, b, for example, by lowering and raising the substrate 2.

[0119] Turning to the processing apparatus used here as an example, the processing of substrate 2 in the apparatus may include at least one of: chemical or electrolytic metal deposition, chemical or electrolytic etching, and chemical or electrolytic cleaning. In a particular embodiment, the apparatus is arranged to perform electrolytic metal deposition, chemical etching, and chemical cleaning, wherein each of these steps is performed in a dedicated processing station 1a, 1b. A specific envisioned example of electrolytic metal deposition includes galvanic deposition of copper or nickel onto the surface of substrate 2.

[0120] Variations of the apparatus can be configured to process planar substrates 2 having circular or polygonal (e.g., square or rectangular) shapes. For example, substrate 2 can be a thin film or a semiconductor wafer. Such a wafer can, in particular, have a frame-like structure obtained using the so-called TAIKO process. In the illustrated example, substrate 2 is shown in the form of a plate. For example, the apparatus can be used to form conductive traces on and / or through the plate.

[0121] In the illustrated embodiment, the apparatus is a vertical plating apparatus, meaning that the substrate 2 is held in a generally vertical orientation during processing.

[0122] The coordinate system is conveniently defined with reference to the orientation in which the processing stations 1a and 1b are arranged, with the x-axis parallel to this orientation. Thus, the reference coordinate system is stationary. Substrate 2 is held with its plane substantially parallel to the zy plane. Therefore, processing stations 1a and 1b can have a relatively large width corresponding to their dimension in the y-direction and a relatively short length corresponding to their dimension in the x-direction. A transport system including a transport element 3 moves substrate 2 from processing station 1a and 1b to processing station 1a and 1b.

[0123] For this purpose, transmission rails 4a, b are provided which extend in the x-axis direction and carry slip rings 5a to 5c ( Figure 3 and 5 The racks 6a and 6b extend in the x-axis direction on both sides of the transmission member 3. Figure 3 ) are provided at the ends of axles 8a, b driven by a motor 9 included in the transmission 3. The transmission 3 is thus arranged for linear motion in either direction along the x-axis. The coupler socket 10 forms part of a system for transferring inductive power to the transmission 3. This power is used by various actuators included in the transmission 3.

[0124] During processing, the substrate 2 is accommodated in the substrate holder 11, so that the transport system handles the item comprising the substrate 2 and the substrate holder 11. In this way, the transport system does not need to repeatedly grip and release the substrate 2. Damage to the substrate 2 is thereby avoided.

[0125] The substrate holder 11 shown in the example comprises two substantially identical planar holding members that bear against the opposing main surfaces of the substrate 2. The section 12 of the substrate holder 11 for accommodating the substrate 2 engages the substrate 2 along its entire periphery in the edge region of each of its two main surfaces. The substrate holder 11 leaves the central region of each main surface exposed. Thus, the substrate holder 11 frames the substrate 2 on each side. Depending on the intended application, it is possible to alternatively use a substrate holder 11 that completely covers one of the two main surfaces of the substrate 2.

[0126] The substrate holder 11 further includes a support portion, in this case a support assembly 13 having features for engaging the substrate holder 11. In this example, the support assembly 13 includes two parallel strips 14a, b. These strips 14a, b extend substantially in the plane of the substrate holder 11. The support assembly 13 projects laterally in opposite directions relative to the substrate holding member that holds the substrate 2 therebetween. Engaging features are provided on the projecting sections of the support assembly 13 for engaging the support assembly 13 on both sides of the substrate 2, extending relative to the direction in which the substrate 2 extends relative to the support assembly 13. In the illustrated embodiment, the engaging features include claws 15a, b for accommodating corresponding latches, which are oriented with their longitudinal axes transverse to the plane of the substrate 2. In the illustrated embodiment, the claws 15a, b are formed at the ends of an extension 16 that is angled relative to the substrate holder support strips 14a, b. In an alternative embodiment, the claws 15a, b or similar recesses may be formed directly in the bottom surface of the support strip 14. The end section 17 ( Figure 10 ) extends in the same direction as the section 12 for accommodating the substrate 2 relative to the substrate holder support strips 14a, b.

[0127] In at least one processing station 1a, b, the substrate holder 11 is held by opposing carrier assemblies 18a, b. Each carrier assembly 18a, b includes a latch 19 ( Figure 14 ), the pair of components having opposing surface sections that face each other in an axial direction relative to the longitudinal latch axis. The latch 19 and the claw 15b thereby form an interlocking engagement feature that substantially prevents movement of the substrate holder 11 in the x-direction (a direction transverse to the plane of the substrate 2). The latch 19 includes flanges 20a, b at both ends. The claw 15b is inserted between the flanges 20a, b to engage the latch 19. The opposing surface sections defined by the flanges 20a, b at both ends of the latch 19 thereby restrict movement of the substrate holder 11 in the y-direction relative to the carrier assemblies 18a, b. The engagement feature is maintained in engagement by gravity. It is only necessary to lift the substrate holder 11 out of the processing station 1a, b to disengage the engagement feature.

[0128] In this way, the end section in the form of the angled extension 16 is provided with features in the form of claws 15a, b for engaging supports in the form of carrier fittings 18a, b in the processing stations 1a, b. The claws 15a, b interlock with features in the form of latches 19 and flanges 20a, b to prevent relative movement in the y-direction, which is the direction in which the carrier component in the form of the support fitting 13 extends.

[0129] In an embodiment, at least one of the carrier assemblies 18a, b includes at least one actuator for moving the substrate holder 11, and thereby the substrate 2, in the plane of the substrate 2. This movement can be multi-dimensional. The movement supplements or replaces agitation of the fluid in which the substrate 2 is immersed for processing. Examples of contemplated types of movement and a description of their effects are provided in WO 2017 / 093382 A1.

[0130] The conveyor system includes a transport member 3, which includes a holding assembly 21 for carrying a substrate holder 11. To this end, the substrate holder 11 is further provided with an engagement feature for interlocking engagement with a mating engagement feature of the holding assembly 21. The engagement features of the substrate holder 11 are arranged at two different locations along the substrate holder support strips 14a, b. This substantially eliminates any rotation of the substrate holder 11 about the z-axis during handling by the transport system. Providing the engagement features at two different locations also helps prevent any wobble of the substrate holder 11 in the plane of the substrate 2. Therefore, when the substrate holder 11 is lowered into the processing station 1a, b, the engagement features (in this example, the claws 15a, b) arranged for interlocking engagement with the engagement features (in this example, the latches 19) of the carrier assemblies 18a, b can be relatively accurately aligned.

[0131] In the illustrated embodiment, the engagement features of the substrate holder 11 include features behind which the movable engagement features of the holding component 21 can hook to allow the engagement features to interlock. Specifically, the engagement features of the substrate holder 11 include latches 22 ( Figures 10 to 12 and 14). The engagement feature of the retaining assembly 21 comprises hooks 23a, b movably supported to the retaining assembly 21. The hooks 23a, b are open in opposite lateral directions ( Figure 14 ). The hooks 23a, b move in opposite directions along the y-axis to facilitate the inner edge sections 24a, b of the hooks 23a, b ( Figure 13 ) engages the latch 22. In this manner, once engaged with the latch 22, relative movement of the substrate holder 11 relative to the holding assembly 21 is substantially prevented. The hooks 23a, b are moved into engagement by respective actuators 25a, b provided with the holding assembly 21. In other embodiments, the holding assembly 21 may include engagement features having different shapes, as long as they are movable in the y-direction to hook behind the engagement features of the substrate holder 11. In this manner, the substrate holder 11 is supported by the engagement features of the holding assembly 21 when suspended from the holding assembly 21.

[0132] First embodiment ( Figures 1 to 14 ) of the transmission member 3 includes two lifting devices ( Figure 2Each lifting device includes a corresponding holding assembly 21. The following description will focus only on one of the lifting devices. The other is a mirror image.

[0133] The transmission 3 comprises a frame 26 forming a support relative to which the holding assembly 21 is movable upwards and downwards in the z-direction.

[0134] The lifting device is arranged to lift the holding assembly 21 and the substrate holder 11 completely out of each processing station 1a, b so that the substrate holder 2 is held without any obstacles in the x-direction on the way to the next processing station 1a, b. For illustration purposes, the displacement range of the substrate holder 11 is indicated as Z1 ( Figure 7 ). Distance Z1 is the sum of the displacement distance Z2 of the two carriers 27a, b relative to the frame 26 in the z-direction and the displacement distance Z3 of the holding assembly 21 relative to the carriers 27a, b. In this manner, the frame 26 only needs to have a height h sufficient to accommodate the displacement distance Z2 of the carriers 27a, b. If the holding assembly 21 is immovable in the z-direction relative to the carriers 27a, b, then the height h would need to be sufficient to accommodate the displacement of the carriers 27a, b, which is equal to the displacement distance Z1 of the substrate holder 11.

[0135] In the illustrated embodiment, the frame 26 extends in the y-direction, that is, substantially parallel to the plane holding the substrate 2. In an alternative embodiment, respective supports are provided on each side of the holding assembly 21, with the holding assembly 21 suspended between those supports. The illustrated variant using a frame having a plurality of cross-bars extending in the y-direction at different respective levels helps ensure relatively accurate determination of the displacement path of the carriers 27a, b.

[0136] Each carrier 27a, b includes a guide 28 ( Figure 9 ) which serves to guide the movement of the holding assembly 21 in the z-direction relative to the carriers 27a, b. Each carrier 27a, b is guided in itself for movement in the z-direction relative to the transport frame 26. A pair of linear actuators is provided for controlling the upward and downward movement of the carriers 27a, b in the z-direction. For example, the linear actuators may be electromechanical actuators. Pneumatic or hydraulic actuators are also possible in principle, but require space for the piston. Linear actuators using motor and screw mechanisms are relatively well suited. The illustrated example utilizes lead screws 29a, b having a rotation axis extending substantially in the z-direction and rotatably supported on the transport frame 26. Rotary motors 30a, b are arranged to drive the lead screws 29a, b via transport mechanisms 31a, b. The lead screws 29a, b guide the movement of the carriers 27a, b traveling along the lead screws 29a, b. The motors 30 a, b therefore remain stationary relative to the transmission 3 .

[0137] For this type of linear actuator, the longest element of the mechanism (i.e., the lead screws 29a, b) does not displace in the z-direction. Alternatives with similar effects include linear actuators that include mechanisms that include rack and pinion gears, belt drives, or cranks. In the latter two alternatives, as in the case of screw mechanisms with rotating screws, the carriages 27a, 27b do not need to include an electric motor, but are instead supported by a frame.

[0138] The carriages 27a, b are provided with a pair of pivots on which the levers 32a, b are pivotally arranged. In the illustrated embodiment, the levers 32a, b are first class levers with unequal arm lengths. The slip ring 33 ( Figure 9 ) is arranged for movement along the longer of the two arms. These slip rings 33 are connected to the holding assembly 21 via guide grooves 34a, b oriented in the z direction.

[0139] Support 35( Figure 9 ) is disposed at a level corresponding to the end of the range of movement of the carriers 27a, b in the path of the levers 32a, b. When the carriers 27a, b are raised by the linear actuator, the followers 36 of the levers 32a, b at their free ends contact the abutments 35. This causes the levers 32a, b to pivot and thereby drive the holding assembly 21 upward in the z-direction relative to the carriers 27a, b.

[0140] In an alternative embodiment, a different type of transmission mechanism enables the linear actuator that drives the carriages 27a, b relative to the transmission frame 26 to also drive the holding assembly 21 relative to the carriages 27a, b. An example would be a rack and pinion mechanism, where the pinion is carried by the carriages 27a, b and is optionally connected via a gear to a crank for winding and unwinding the cable connected to the holding assembly 21. Another possibility is the combination of a pantograph mechanism with a mount arranged to arrest the movement of the pivot connecting the two links.

[0141] Another example is to describe a second embodiment of the same components using the same reference numerals herein. Figures 15 to 17 )supply.

[0142] In the second embodiment, the substrate holder 11 is the same as that of the first embodiment ( Figures 1 to 14 ) substrate holder. Reference is made to the description of the substrate holder 11 provided above. The holding assembly 21' is substantially identical to the holding assembly 21 of the first embodiment, except that the end of the holding assembly 21' is connected to the lifting device (as viewed in the y-direction). Furthermore, the description of the engagement features of the holding assembly 21 provided above also applies to the holding assembly 21' of the second embodiment and will not be repeated here.

[0143] In the second embodiment, the transport 3' also comprises a frame 26' forming a support. This frame 26' can be placed at one of the processing stations 1a, b via the transport 3'.

[0144] The carriages 27'a, b are guided for movement in the z-direction relative to the frame 26'. Linear actuators 37a, b form respective means for controlling the movement of the carriages 27'a, b, specifically driving the movement of the carriages 27'a, b in the z-direction. For example, each linear actuator 37a, b can be an electromechanical actuator. Pneumatic or hydraulic actuators are also possible in principle, but require space for a piston. Linear actuators 37a, b that utilize a motor and screw mechanism are relatively well suited. Thus, as in the first embodiment, a lead screw having an axis of rotation extending substantially in the z-direction and rotatably supported on the transmission frame 26' can be utilized, with the rotary motor being arranged to drive the lead screw via a corresponding transmission mechanism. Examples of such linear actuators 37a, b are also referred to as ball screw assemblies or planetary screw assemblies and are available as off-the-shelf components.

[0145] As in the first embodiment, the displacement Z1 of the substrate holder 11' is the sum of the displacement distance Z2 of the two carriers 27'a, b relative to the frame 26' in the z-direction and the displacement distance Z3 of the holding assembly 21' relative to the carriers 27'a, b in the z-direction. In this manner, the frame 26' only needs to have a height h sufficient to accommodate the displacement distance Z2 of the carriers 27'a, b. If the holding assembly 21' were immovable relative to the carriers 27'a, b, the height h would need to be sufficient to accommodate a displacement of the carriers 27'a, b equal in length to the displacement distance Z1 of the substrate holder 21'. This is because the lower edge of the substrate holder 11 must be elevated to approximately the lower level of the frame 26' to allow unimpeded movement of the transport element 3' in the x-direction.

[0146] Seen in the y-direction, the holding assembly 21 'is connected to the carriers 27'a, b via a suspension mechanism comprising fittings at both ends of the holding assembly 21 '. Only the fittings of the first of the two carriers 27'a, b are shown in detail ( Figure 17 ). The second carrier 27'b has the same construction except that the assembly is a mirror image of the assembly described. The suspension mechanism is arranged to guide the movement of the holding assembly 21' relative to the carriers 27'a, b along the holding assembly path. The holding assembly path extends substantially in the z-direction.

[0147] The first carriage 27'a includes a carriage housing 38 and first and second guides 39 and 40, on which first and second brackets 41 and 42 are arranged for movement. In the second embodiment, the first and second guides 39 and 40 are linear guides oriented at least approximately in the z-direction. The first and second brackets 41 and 42 are provided with ball bearings (not shown) by which they are supported on the first and second guides 39 and 40. Roller bearings or magnetic bearings may be used in variations of the second embodiment. The first guide 39 and the first bracket 41 form a slide mechanism, as do the second guide 40 and the second bracket 42. Alternative linear motion guide mechanisms may be used, for example, by forming a profile in a channel, in which rollers, including one or more brackets, are arranged for movement.

[0148] First carriage 27'a further includes a chain 43 and a sprocket 44. Chain 43 interconnects first bracket 41 and second bracket 42. Sprocket 44 is rotatably mounted to carriage 27'a. For example, chain 43 may be a roller chain. Another means of transmitting force between first and second brackets 41, 42, wrapped around wheels, such as ropes, belts, or cables, may also be used. For example, a means of engaging the wheels through friction rather than forced engagement, such as a rope, belt, or cable, may be used. However, forced engagement between the wheels and the force transmission mechanism prevents slippage. The presence of two carriages 27'a, b helps maintain the holding assembly 21' level.

[0149] In one embodiment, the displacement distance Z3 of the retaining assembly 21' relative to the first carriage 27'a can be finely adjusted. To this end, a connecting device is provided at one or each end of the chain 43. The connecting device has an adjustable length between its attachment point to the chain 43 and its attachment point to a component connected to the chain 43 via the connecting device. For example, this other component may be one of the first and second brackets 41, 42, or a mounting device attached to one of these brackets. The connecting device may include mating threaded components that enable length adjustment. In the illustrated embodiment, a first connecting device 45 and a second connecting device 46 are provided.

[0150] The longitudinal ends of the holding assembly 21' (seen in the y-direction) are attached to the first bracket 41 via a first mounting plate 47. The first mounting plate 47 extends through a slot in the carrier housing 38. The first mounting plate 47 is arranged to move within this slot, which may be relatively narrow and therefore only form a small aperture in the carrier housing 38.

[0151] The second bracket 42 is connected to a second mounting plate 48, which also extends through a slot in the carrier housing 38 and is arranged to travel within this slot. The second mounting plate 48 has a support surface 49. When the first carrier 27'a moves in the z-direction in the direction of retrieving the substrate carrier 11 from the processing station 1a, b, the support surface 49 cooperates with a support 50 mounted on the frame 26' to check movement of the second bracket 42. The assembly of the second bracket 42 and the second mounting plate 48 forms a component that is movably supported to the first carrier 27'a. The first carrier 27'a is guided for movement past the support 50. The support 50 forms a feature arranged to engage the movable component (i.e., the second bracket 42 and the second mounting plate 48) along the frame 26' from a certain position along the path of the first carrier 27'a. This certain position is adjustable, and an example of how this adjustment is achieved will be provided below. The arrangement of the first and second carriages 41, 42, the chain 43 and the sprocket 44 forms a mechanism for translating movement of the second carriage 42 relative to the first carrier 27'a into movement of the holding assembly 21' relative to the first carrier 27'a. This configuration is replicated in the second carrier 27'b.

[0152] The first and second carriages 27'a, 27'b, the holding assembly 21', and the suspension mechanism that holds the holding assembly 21' between the first and second carriages 27'a, 27'b lie at least approximately in a plane parallel to the z- and y-directions, forming a planar linkage. As viewed in the y-direction, the first and second carriages 27'a, 27'b are guided to move on opposite sides of the holding assembly 21'. The position of the linear actuators 37a, b is adjustable relative to the frame 26' in the x-, y-, and z-directions. As mentioned above, the displacement distance Z2 of the first carriage 27'a can be further adjusted by adjusting the position of the support 50 relative to the frame 26'.

[0153] Compared to the first embodiment, the second embodiment avoids the relatively large amount of torque required when applying the lifting force. The lifting force is applied in a direction substantially parallel to the weight of the substrate holder 11. Furthermore, the carriers 27'a, b need only include a few or no custom components. For example, the first bracket 41 and the second bracket 42 can be off-the-shelf components, and the first guide 39 and the second guide 40 can be cut from standardized extruded profiles. Furthermore, the carrier housing 38 can be relatively enclosed, minimizing the risk of contamination from particles caused by abrasive wear.

[0154] However, in each embodiment, the movement distance of the holding assembly 21; 21' along the z-axis relative to the carriers 27a, b; 27'a, b shortens the required movement distance of the carriers 27a, b; 27'a, b along the z-axis relative to the transmission frame 26; 26' and thus reduces the height h that the transmission 3 must have.

[0155] The invention is not limited to the embodiments described but may vary within the scope of the appended claims. For example, the pivoting movement of the levers 32a, 32b of the first embodiment need not be in a plane parallel to the plane of the substrate 2 as long as the movement of the substrate 2 is in a single plane.

[0156] Reference Number List

[0157] 1a,b processing station

[0158] 2 Substrate

[0159] 3; 3' transmission parts

[0160] 4a,b Transmission guide rails

[0161] 5a-c Transmission element slip ring

[0162] 6a,b rack

[0163] 7 small gears

[0164] 8a,b axle

[0165] 9 Transmission motor

[0166] 10 Coupler socket

[0167] 11. Substrate holder

[0168] 12 Substrate holder section

[0169] 13 Support assembly parts

[0170] 14a,b support strips

[0171] 15a,b Claw

[0172] 16 Long extension

[0173] 17 Extension end section

[0174] 18a,b Carrier assembly

[0175] 19 Carrier assembly latch

[0176] 20a,b Latch flange

[0177] 21 Holding components

[0178] 22 Substrate holder pin

[0179] 23a,b Retaining assembly hook

[0180] 24a,b Medial marginal segment

[0181] 25a,b Holding assembly actuator

[0182] 26; 26' transmission frame

[0183] 27a,b; 27'a,b carrier

[0184] 28 Holding component guide

[0185] 29a,b Lead screw

[0186] 30a,b Rotary motor

[0187] 31a,b Linear actuator transmission mechanism

[0188] 32a,b Lever

[0189] 33 slip ring

[0190] 34a,b guide groove

[0191] 35 support

[0192] 36 Follower

[0193] 37a,b Linear actuator

[0194] 38 Carrier shell

[0195] 39 first guide

[0196] 40 Second guide

[0197] 41 First Bracket

[0198] 42 Second bracket

[0199] 43 Chain

[0200] 44 sprocket

[0201] 45 first connecting device

[0202] 46 Second connecting device

[0203] 47 First mounting plate

[0204] 48 Second mounting plate

[0205] 49 Support surface

[0206] 50 supports.

Claims

1. An apparatus for moving an article comprising at least a substrate (2) through an open side of a processing station (1a, b) of a processing device, the apparatus comprising: at least one support (26; 26') which can be placed at said processing station (1a, b), at least one carrier (27a, b; 27'a, b) each guided to move relative to the one or more supports (26; 26') along a respective path oriented parallel to a reference axis (z) in a reference coordinate system; at least one control device (29a,b, 30a,b, 31a,b; 37a,b) for controlling the movement of at least one of said carriages (27a,b; 27'a,b) and driving the movement in at least one of the opposite directions along said path; a holding component (21; 21') for holding the article; and a suspension mechanism, by which the holding assembly (21; 21') is connected to the at least one carrier (27a, b; 27'a, b), wherein the suspension mechanism is arranged to guide the movement of the holding assembly (21; 21') relative to the at least one carrier (27a, b; 27'a, b) along a holding assembly (21; 21') path, and wherein the control device (29a, b, 30a, b, 31a, b; 37a, b) is arranged to drive the movement of the holding assembly (21; 21') along the holding assembly path in at least one direction, characterized in that The retaining assembly path is oriented parallel to the reference axis (z).

2. The device according to claim 1, At least one of the control devices (29a,b, 30a,b, 31a,b; 37a,b) for controlling the movement of at least one of the carriers (27a,b; 27'a,b) is also arranged to drive the movement of the holding assembly (21; 21').

3. The device according to claim 2, wherein at least one carrier (27a, b; 27'a, b) is provided with a movable part (32a, b; 42, 48) movably supported to said carrier (27a, b; 27'a, b), wherein the carrier (27a, b; 27'a, b) is guided to move along one of the supports (26; 26') through a feature (35; 50) arranged to engage the movable part (32a, b; 42, 48) along the support (26; 26') from at least one position along the path of the carrier (27a, b; 27'a, b), and The suspension mechanism comprises a mechanism for converting the movement of the movable part (32a, b; 42, 48) relative to the carrier (27a, b; 27'a, b) into the movement of the holding assembly (21; 21') relative to the carrier (27a, b; 27'a, b).

4. The device according to claim 3, wherein the movable member (42, 48) is guided for linear movement relative to the carrier (27'a) in a direction oriented at least parallel to the reference axis (z), and The mechanism for converting the movement of the movable part (42, 48) relative to the carrier (27'a, b) into the movement of the holding assembly (21') relative to the carrier (27'a, b) comprises another movable part (41, 47) guided to move linearly relative to the carrier (27'a, b) in a direction at least parallel to the holding assembly path orientation, and a force transmission device for transmitting force between the movable part (42, 48) and the other movable part (41, 47).

5. The device according to claim 4, The force transmission device includes a medium (43) connecting the movable part (42, 48) and the other movable part (41, 47) to each other and wound around a wheel (44) rotatably supported to the carrier (27'a).

6. The device according to any one of claims 1 to 5, The carriers (27a, b; 27'a, b), the suspension mechanism and the holding assembly (21; 21') form a planar connecting rod.

7. The device according to any one of claims 1 to 5, wherein the reference axis (z) is a first reference axis in a reference coordinate system, the reference coordinate system further comprising a second reference axis (y) perpendicular to the first reference axis (z), the first reference axis (z) and the second reference axis (y) together defining a plane parallel to the plane in which the holding component path is located, and The device comprises at least two carriers (27a, b; 27'a, b) which are guided to move on opposite sides of the holding element (21; 21') seen in a direction parallel to the second reference axis (y).

8. The device according to claim 7, wherein the at least one support (26; 26') comprises a support frame supporting each of the at least two carriers (27a, b; 27'a, b).

9. The device according to any one of claims 1 to 5, wherein the at least one control device (29a,b, 30a,b, 31a,b; 37a,b) for controlling the movement of at least one of the carriers (27a,b; 27'a,b) comprises a linear actuator.

10. The device according to claim 9, wherein the control device (29a, b, 30a, b, 31a, b; 37a, b) comprises a rotary motor (30a, b) and a mechanism (29a, b, 31a, b) for converting rotary motion into linear motion, The rotary motor (30a, b) is arranged on the at least one support (26; 26').

11. The device according to any one of claims 1 to 5, Wherein, when in use, the holding assembly path extends in a direction parallel to the reference axis (z) beyond the end point of the path of the carrier (27a, b; 27'a, b) close to the processing station (1a, b).

12. The device according to any one of claims 1 to 5, Wherein, when in use, the carrier (27a, b; 27'a, b) and the suspension mechanism are positioned laterally adjacent to the holding component (21; 21') relative to the holding component path at an end point of the holding component path located distal to the processing station (1a, b).

13. A conveying system for conveying objects comprising at least a substrate (2) between processing stations (1a, b) of a processing device, wherein the transport system comprises a transport (3) movable from a processing station (1a, b) to a processing station (1a, b), and wherein the transport (3) comprises at least one device according to any of the preceding claims.

14. An apparatus for processing a substrate (2), comprising at least one of the device according to any one of claims 1 to 12 and the transport system according to claim 13.

15. A method of handling a substrate (2) in an apparatus for processing a substrate (2) according to claim 14, comprising moving an article comprising at least the substrate (2) through an open side of a processing station (1a, b) of the processing apparatus, wherein moving the article through the open side comprises: moving at least one carrier (27a, b; 27'a,b); holding the article by means of a holding assembly (21; 21') connected to the at least one carrier (27a, b; 27'a, b); and moving the holding assembly (21; 21') relative to the at least one carrier (27a, b; 27'a, b) along a holding assembly path, It is characterized by The retaining assembly path is oriented parallel to the reference axis (z).

Images