Full-automatic bonding machine for automatic positioning of intake temperature and pressure sensor

Abstract

The application discloses a full-automatic bonding machine for processing of an air inlet temperature and pressure sensor with automatic positioning, and particularly relates to the technical field of pressure sensor processing, which comprises a fixed shell, the lower surface of the inner wall of the fixed shell is fixedly connected with the lower surface of a gas pump assembly, the exhaust port in the front of the gas pump assembly is in communication with one end in the back of an exhaust pipe, and one end in the front of the exhaust pipe is in communication with the bottom end of two first connecting pipes respectively. The gas pump assembly, the exhaust pipe, the sealing cover, the sealing cover plate and the air tightness detection box are arranged, so that the full-automatic bonding machine can detect the finished chip in time, the step of detecting the chip processing effect is reduced, chip loss caused by defects in chip processing in the later use process is avoided, the situation of return or even complaint caused by chip quality problems is avoided, the difficulty in chip detection is reduced, and thus the quality of chip processing of the full-automatic bonding machine is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of pressure sensor processing, more particularly, the present application relates to a full-automatic bonding machine for processing of air inlet temperature pressure sensor with automatic positioning. BACKGROUND

[0002] The bonding machine refers to the equipment for bonding two pieces of homogenous or heterogeneous semiconductor materials with clean and atomically flat surfaces into one body through van der waals force, molecular force or even atomic force under certain conditions after surface cleaning and activation treatment. The full-automatic wire bonding machine is a key equipment for semiconductor production to connect the chip pad and the packaging pin with metal wires. The fundamental feature of the working process of the bonding machine is to guide the metal wire to make complex and high-speed movement in three-dimensional space to form various special arc shapes that meet the needs of different packaging forms. The high acceleration and high positioning accuracy workbench is the core component of the wire bonding machine, which determines the working speed and quality of the bonding. The linear motor replaces the rotary motor due to its excellent performance and is widely used in the workbench of the wire bonding machine, replacing the workbench driven by the rotary motor and the ball screw. However, most of the existing full-automatic bonding machines only have the effect of bonding the chip. After the bonding is completed, the quality effect of the chip bonding can be obtained only after actual use. However, at this time, the chip quality is fixed. If a fault occurs, rework is required, which not only increases the cost of chip processing, but also makes it difficult to guarantee the timeliness and efficiency of detecting the chip, resulting in difficulty in guaranteeing the quality of the chip. SUMMARY

[0003] In order to overcome the above-mentioned defects of the prior art, the present application provides a full-automatic bonding machine for processing of air inlet temperature pressure sensor with automatic positioning. The technical problem to be solved by the present application is that most of the existing full-automatic bonding machines only have the effect of bonding the chip. After the bonding is completed, the quality effect of the chip bonding can be obtained only after actual use. However, at this time, the chip quality is fixed. If a fault occurs, rework is required, which not only increases the cost of chip processing, but also makes it difficult to guarantee the timeliness and efficiency of detecting the chip, resulting in difficulty in guaranteeing the quality of the chip.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a fully automatic bonding machine for processing intake air temperature and pressure sensors with automatic positioning, comprising a fixed shell, the lower surface of the inner wall of the fixed shell is fixedly connected to the lower surface of the air pump assembly, the exhaust port on the front of the air pump assembly is connected to one end of the back of the exhaust pipe, one end of the front of the exhaust pipe is respectively connected to the bottom ends of two first connecting pipes, the top ends of the two first connecting pipes are connected to the top end of the same second connecting pipe through an elbow and a first conduit, the outer surfaces of the second connecting pipe and the two first connecting pipes are both sleeved with a sealing connecting tube, the outer surface of the sealing connecting tube is fixedly connected to a connector, and the three The bottom end of the connecting head is respectively connected to the upper surfaces of the three sealing cover plates, the upper surface of the sealing cover plate is fixedly connected to the lower surface of the buckle block, the outer surface of the buckle block is fixedly connected with a steel cable, the other end of the steel cable is fixedly connected to the back side of the airtight detection box through a first pulley, a second pulley and a third pulley, the upper surface of the first pulley is fixedly connected to the upper surface of the inner wall of the fixed shell, the back side of the second pulley is fixedly connected to the front side of the fixed bracket, the upper surface of the fixed bracket is fixedly connected to the upper surface of the inner wall of the fixed shell, the back side of the third pulley is fixedly connected to the front side of the mounting block, and the back side of the mounting block is fixedly connected to the front side of the inner wall of the fixed shell.

[0005] As a further solution of the present invention: the front surface of the mounting block is fixedly connected to the back surface of the sliding sleeve, and a sliding rod is slidably connected in the sliding sleeve.

[0006] As a further solution of the present invention: a spring is provided in the sliding sleeve, and the two ends of the spring are respectively fixedly connected to the front side of the inner wall of the sliding sleeve and one end of the back side of the sliding rod, and the upper surface of the sealing cover plate is fixedly connected to the bottom end of the elastic telescopic rod.

[0007] As a further solution of the present invention: the top end of the elastic telescopic rod is fixedly connected to the upper surface of the inner wall of the fixed shell, an expansion airbag is provided in the sealing cover plate, the expansion airbag provided in the sealing cover plate is connected to the connecting head, and the air inlet on the back of the air pump assembly is connected to one end of the front of the air inlet pipe.

[0008] As a further solution of the present invention: the other end of the air inlet pipe is respectively connected to the bottom ends of the two second conduits, and the two second conduits are respectively connected to one end of the back side of the three first sleeves through connecting pipes.

[0009] As a further solution of the present invention: a second sleeve is sleeved inside the first sleeve, and one end of the front side of the three second sleeves is connected to the back side of the three airtight detection boxes respectively, and the outer surfaces of the two first connecting tubes and the second connecting tubes are provided with air holes, and the second connecting tube and the two first connecting tubes are connected to the sealing connecting tube through the air holes.

[0010] As a further scheme of the present application: the lower surface of the inner wall of the airtight detection box is fixedly connected with a plurality of sensing blocks, and the output ends of the sensing blocks are electrically connected with the input end of the air pump assembly through wires.

[0011] As a further scheme of the present application: the gas detection device is located in front of the small hole on the front face of the airtight detection box, the back face of the airtight detection box is provided with an exhaust hole, the airtight detection box is communicated with the second sleeve through the exhaust hole, and the front face of the airtight detection box is fixedly connected with a handle.

[0012] As a further scheme of the present application: the outer surface of the handle is provided with anti-skid lines, the upper surface of the fixed shell is fixedly connected with the lower surface of a workbench, the upper surface of the workbench is fixedly connected with the lower surface of a bonding device, and the upper surface of the workbench is provided with a plurality of through holes.

[0013] As a further scheme of the present application: the upper surface of the first conduit is communicated with the lower surface of the sealing cover, the front face of the fixed shell is provided with three sliding grooves, and the three airtight detection boxes are slidingly connected in the three sliding grooves, respectively.

[0014] The present application has the advantages that:

[0015] 1、The air pump assembly, the air inlet pipe, the air outlet pipe, the sealing cover, the sealing cover plate and the airtight detection box are arranged, the sealing cover plate is moved upward by the steel cable in the moving process of the airtight detection box, then the chip is placed in the airtight detection box, the handle is loosened, the airtight detection box is quickly reset under the elastic force of the spring deformation, the steel cable is loosened to pull the sealing cover plate due to the resetting of the airtight detection box, the expansion gas is quickly expanded and presses the space in the airtight detection box, the expansion gas bag is completely attached to the chip, the gas flows into the airtight detection box through the air inlet pipe, the gas detection device is triggered when there is a gap in the processed chip, the processing effect of the chip is detected, the gas detection device is not triggered when there is no gap in the processed chip, the processed chip is detected in time, the step of detecting the processing effect of the chip is reduced, the chip loss caused by the defects in the processing of the chip is avoided, the situation of return or complaint caused by the quality problem of the chip is avoided, the difficulty in detecting the chip is reduced, and the quality of the chip processing by the full-automatic bonding machine is ensured.

[0016] 2、The utility model discloses through setting up air pump subassembly, elastic telescopic link and spring, because in the process of detection, staff only needs to pull handle, then places the chip in the airtight detection box inside, and then loosens the handle, and the airtight detection box can automatic detection the processing quality of chip to greatly reduce the difficulty of the operation of the full -automatic bonder, and because of the equipment of the sealing cover, the stability of air pump subassembly operation is guaranteed, air pump subassembly gas is difficult to discharge due to the good processing quality of chip is avoided, the damage of air pump subassembly is reduced, the accuracy of the full -automatic bonder is guaranteed after long -time use, and the service life of the full -automatic bonder is guaranteed.

[0017] 3、The utility model discloses through setting up steel cable, when staff pulls airtight detection box, airtight detection box will pull steel cable in the process of along the sliding slot movement, at this moment under the effect of first pulley, second pulley and third pulley turning, sealing cover plate will move upwards along with the movement of airtight detection box to the effect that airtight detection box separates from sealing cover plate, and the stability of airtight detection box is guaranteed when pulling out. ACCURACY

[0018] Figure 1 It is the three -dimensional structure schematic diagram of the utility model;

[0019] Figure 2 It is the sectional structure schematic diagram of fixed shell three -dimensional of the utility model;

[0020] Figure 3 It is the three -dimensional structure schematic diagram of air pump subassembly of the utility model;

[0021] Figure 4 It is the sectional structure schematic diagram of sliding sleeve three -dimensional of the utility model;

[0022] Figure 5 It is the three -dimensional structure schematic diagram of first on -off pipe of the utility model;

[0023] Figure 6 It is the three -dimensional structure schematic diagram of airtight detection box of the utility model;

[0024] In the drawing: 1 fixed shell, 2 air pump subassembly, 3 exhaust pipe, 4 first on -off pipe, 5 first conduit, 6 second on -off pipe, 7 sealing connection barrel, 8 connecting head, 9 sealing cover plate, 10 buckle block, 11 steel cable, 12 first pulley, 13 second pulley, 14 fixed support, 15 third pulley, 16 airtight detection box, 17 sliding rod, 18 sliding sleeve, 19 spring, 20 mounting block, 21 elastic telescopic link, 22 air inlet pipe, 23 second conduit, 24 first sleeve, 25 second sleeve, 26 sealing cover, 27 gas detection device, 28 inductive block, 29 exhaust hole, 30 handle, 31 sliding slot, 32 workbench, 33 bonding device, 34 through -hole. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be apparently and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0026] As shown in Figures 1-6 The present application provides a full-automatic bonding machine for automatic positioning of air inlet temperature and pressure sensor processing, which comprises a fixed shell 1, the lower surface of the inner wall of the fixed shell 1 is fixedly connected with the lower surface of an air pump assembly 2, the exhaust port of the front surface of the air pump assembly 2 is in communication with one end of the back surface of an exhaust pipe 3, one end of the front surface of the exhaust pipe 3 is respectively in communication with the bottom end of two first connecting pipes 4, the top end of the two first connecting pipes 4 is in communication with the top end of the same second connecting pipe 6 through an elbow and a first conduit 5, the outer surface of the second connecting pipe 6 and the two first connecting pipes 4 is sleeved with a sealing connecting cylinder 7, the outer surface of the sealing connecting cylinder 7 is fixedly connected with a connecting head 8, and the bottom end of the three connecting heads 8 is respectively in communication with the upper surface of three sealing cover plates 9, the upper surface of the sealing cover plate 9 is fixedly connected with the lower surface of a buckle 10, the outer surface of the buckle 10 is fixedly connected with a steel cable 11, the other end of the steel cable 11 is fixedly connected with the back surface of a gas tightness detection box 16 through a first pulley 12, a second pulley 13 and a third pulley 15, the upper surface of the first pulley 12 is fixedly connected with the upper surface of the inner wall of the fixed shell 1, the back surface of the second pulley 13 is fixedly connected with the front surface of a fixed support 14, the upper surface of the fixed support 14 is fixedly connected with the upper surface of the inner wall of the fixed shell 1, the back surface of the third pulley 15 is fixedly connected with the front surface of a mounting block 20, the back surface of the mounting block 20 is fixedly connected with the front surface of the inner wall of the fixed shell 1, the front surface of the mounting block 20 is fixedly connected with the back surface of a sliding sleeve 18, a sliding rod 17 is slidingly connected in the sliding sleeve 18, a spring 19 is arranged in the sliding sleeve 18, and the two ends of the spring 19 are respectively fixedly connected with the front surface of the inner wall of the sliding sleeve 18 and the back surface of one end of the sliding rod 17. By arranging the air pump assembly 2, the sealing cover 26, the sealing cover plate 9 and the gas tightness detection box 16, when there is a gap in the processed chip, the gas circulation will trigger the gas detection device 27, so as to detect the processing effect of the chip, and when there is no gap in the processed chip, the gas detection device 27 will not be triggered, so that the full-automatic bonding machine can timely detect the processed chip, reduces the steps of detecting the processing effect of the chip, avoids the chip loss caused by the defects in the chip processing in the later use process, avoids the situation of return or even complaint caused by the quality problem of the chip, reduces the difficulty of detecting the chip, and thus guarantees the quality of the chip processing of the full-automatic bonding machine.

[0027] AsFigure 1 、 Figure 3 、 Figure 4 and Figure 5 As shown, the upper surface of the sealing cover plate 9 is fixedly connected to the bottom end of the elastic telescopic rod 21, and the top of the elastic telescopic rod 21 is fixedly connected to the upper surface of the inner wall of the fixed shell 1. An expansion airbag is provided in the sealing cover plate 9. Because a steel cable 11 is provided, when the staff pulls the airtight detection box 16, the airtight detection box 16 will pull the steel cable 11 while moving along the slide groove 31. At this time, under the effect of the steering of the first pulley 12, the second pulley 13 and the third pulley 15, the sealing cover plate 9 will move upward synchronously with the movement of the airtight detection box 16, thereby separating the sealing cover plate 9 from the airtight detection box 16 and ensuring the stability of the airtight detection box 16 when it is pulled out. The expansion airbag provided in the sealing cover plate 9 is connected to the connector 8, and the air inlet on the back of the air pump assembly 2 is connected to one end of the front of the air inlet pipe 22. The other end of the air inlet pipe 22 is respectively connected to the bottom ends of the two second conduits 23, and the two second conduits 23 are respectively connected to one end of the back of the three first sleeves 24 through connecting pipes.

[0028] like Figure 2 、 Figure 4 、 Figure 5 and Figure 6 As shown, the second sleeve 25 is sleeved in the first sleeve 24, and one end of the front of the three second sleeves 25 is respectively connected to the back of the three airtight detection boxes 16, and the outer surfaces of the two first connection tubes 4 and the second connection tubes 6 are provided with air holes. Because the spring 19 and the elastic telescopic rod 21 are provided, when the staff releases the pull on the airtight detection box 16, the airtight detection box 16 will be reset under the action of the elastic force of the spring 19. At the same time, the sealing cover plate 9 will be squeezed by the elastic telescopic rod 21 and quickly fit with the airtight detection box 16, thereby ensuring the adhesion between the sealing cover plate 9 and the airtight detection box 16. To ensure the stability of the combination and avoid gas leakage due to gaps between the airtight detection box 16 and the sealing cover 9, the second connecting tube 6 and the two first connecting tubes 4 are connected to the sealing connecting tube 7 through air holes. A plurality of sensor blocks 28 are fixedly connected to the lower surface of the inner wall of the airtight detection box 16, and the output ends of the plurality of sensor blocks 28 are electrically connected to the input end of the air pump assembly 2 through wires. The front of the airtight detection box 16 is fixedly connected to the back of the gas detection device 27. A small hole is provided on the front of the airtight detection box 16, and the gas detection device 27 is located in front of the small hole provided on the front of the airtight detection box 16.

[0029] like Figure 1 、 Figure 2 、 Figure 4 and Figure 6As shown, the back of the air tightness detection box 16 is provided with an exhaust hole 29, the air tightness detection box 16 is communicated with the second sleeve 25 through the exhaust hole 29, the front of the air tightness detection box 16 is fixedly connected with a handle 30, the outer surface of the handle 30 is provided with anti-skid lines, because the air pump assembly 2 and the air tightness detection box 16 are arranged, the difficulty of the operation of the full-automatic bonding machine is greatly reduced, at the same time, because of the device of the sealing cover 26, the stability of the air pump assembly 2 during operation is ensured, the damage of the air pump assembly 2 due to the difficulty of the gas discharge of the air pump assembly 2 caused by the good quality of the chip processing is avoided, the accuracy of the detection of the full-automatic bonding machine after long time use is ensured, and the service life of the full-automatic bonding machine is ensured, the upper surface of the fixed shell 1 is fixedly connected with the lower surface of a workbench 32, the upper surface of the workbench 32 is fixedly connected with the lower surface of a bonding device 33, the upper surface of the workbench 32 is provided with a plurality of through holes 34, the upper surface of the first conduit 5 is communicated with the lower surface of the sealing cover 26, the front of the fixed shell 1 is provided with three sliding grooves 31, and the three air tightness detection boxes 16 are respectively slidably connected in the three sliding grooves 31, the shape of the inner wall of the sliding groove 31 is matched with the shape of the outer surface of the air tightness detection box 16.

[0030] The working principle of the present application is as follows: when the full-automatic bonding machine is used, the chip is only processed through the bonding device 33, and after processing, the processed chip is placed in the airtight detection box 16. The handle on the front of the airtight detection box 16 is pulled to take out the airtight detection box 16 from the fixed shell 1. At this time, the airtight detection box 16 will pull the spring 19 to deform during movement. At the same time, the airtight detection box 16 will move the sealing cover plate 9 upward through the steel cable 11 during movement. Then the chip can be placed in the airtight detection box 16, and the handle 30 is loosened. The airtight detection box 16 will be quickly reset under the elastic force of the spring 19. At this time, the steel cable 11 will be loosened due to the resetting of the airtight detection box 16, and the sealing cover plate 9 will be quickly pressed and attached to the airtight detection box 16 under the action of its own gravity and the elastic force of the elastic expansion rod 21. When the airtight detection box 16 is attached to the sealing cover plate 9, the chip is placed in the airtight detection box 16, and the chip triggers the sensing block 28, so that the sensing block 28 starts the air pump assembly 2 to run. When the air pump assembly 2 is running, the air pump assembly 2 will respectively draw air into the air inlet pipe 22 and discharge it through the air outlet pipe 3. When the air pump assembly 2 discharges air through the air outlet pipe 3, the air will enter the first connecting pipe 4 and the second connecting pipe 6 along the air outlet pipe 3. Since the first connecting pipe 4 and the second connecting pipe 6 are in a connected state with the connecting head 8 at this time, the air will directly enter the expansion air bag inside the sealing cover plate 9, so that the expansion air bag quickly expands and presses the space inside the airtight detection box 16, so that the expansion air bag is completely attached to the chip. At this time, the air enters the airtight detection box 16 through the air inlet pipe 22. When there is a gap in the processed chip, the gas flow will cause the gas detection device 27 to trigger, so as to detect the processing effect of the chip. When there is no gap in the processed chip, the gas detection device 27 will not be triggered. During the detection process, the worker only needs to pull the handle, then place the chip in the airtight detection box 16, and then loosen the handle. The airtight detection box 16 can automatically detect the processing quality of the chip.

[0031] Finally, it should be pointed out that: first of all, in the description of the present application, it should be pointed out that unless otherwise specified and limited, the terms "installation", "connection", "connection" should be understood broadly, which can be mechanical connection or electrical connection, or the communication between two elements, or direct connection, "up", "down", "left", "right" and the like are only used to indicate the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may change;

[0032] Secondly: the embodiment disclosed in the embodiment of the present application only relates to the structure involved in the embodiment of the present application, other structures can refer to the general design, and in the case of no conflict, the same embodiment and different embodiments of the present application can be combined with each other;

[0033] Finally: the above only describes the preferred embodiments of the present application and is not used to limit the present application, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A full-automatic bonding machine for processing of an air intake temperature pressure sensor, comprising a fixed shell (1), characterized in that: The lower surface of the inner wall of the fixed shell (1) is fixedly connected with the lower surface of the air pump assembly (2), the air exhaust port in the front of the air pump assembly (2) is communicated with one end in the back of the air exhaust pipe (3), one end in the front of the air exhaust pipe (3) is respectively communicated with the bottom end of two first connecting pipes (4), the top end of the two first connecting pipes (4) is communicated with the top end of the same second connecting pipe (6) through an elbow and a first conduit (5), the outer surface of the second connecting pipe (6) and the two first connecting pipes (4) is sleeved with a sealing connecting barrel (7), the outer surface of the sealing connecting barrel (7) is fixedly connected with a connecting head (8), the bottom end of the three connecting heads (8) is respectively communicated with the upper surface of three sealing cover plates (9), the upper surface of the sealing cover plate (9) is fixedly connected with the lower surface of a buckling block (10), the outer surface of the buckling block (10) is fixedly connected with a steel cable (11), the other end of the steel cable (11) is fixedly connected with the back of an air tightness detection box (16) through a first pulley (12), a second pulley (13) and a third pulley (15), the upper surface of the first pulley (12) is fixedly connected with the upper surface of the inner wall of the fixed shell (1), the back of the second pulley (13) is fixedly connected with the front of a fixed support (14), the upper surface of the fixed support (14) is fixedly connected with the upper surface of the inner wall of the fixed shell (1), the back of the third pulley (15) is fixedly connected with the front of a mounting block (20), the back of the mounting block (20) is fixedly connected with the front of the inner wall of the fixed shell (1); The front of the mounting block (20) is fixedly connected with the back of a sliding sleeve (18), the sliding sleeve (18) is slidably connected with a sliding rod (17), the sliding sleeve (18) is provided with a spring (19), the two ends of the spring (19) are respectively fixedly connected with the front of the inner wall of the sliding sleeve (18) and the back of the sliding rod (17), the upper surface of the sealing cover plate (9) is fixedly connected with the bottom end of an elastic telescopic rod (21), the top end of the elastic telescopic rod (21) is fixedly connected with the upper surface of the inner wall of the fixed shell (1), the sealing cover plate (9) is provided with an inflatable air bag, the inflatable air bag provided in the sealing cover plate (9) is communicated with the connecting head (8), the air inlet in the back of the air pump assembly (2) is communicated with one end in the front of an air inlet pipe (22); The lower surface of the inner wall of the air tightness detection box (16) is fixedly connected with a plurality of sensing blocks (28), and the output ends of the plurality of sensing blocks (28) are electrically connected with the input end of the air pump assembly (2) through wires, the front of the air tightness detection box (16) is fixedly connected with the back of a gas detection device (27), the front of the air tightness detection box (16) is provided with a small hole, and the gas detection device (27) is located in front of the small hole in the front of the air tightness detection box (16).

2. The full-automatic bonding machine for gas inlet temperature and pressure sensor processing according to claim 1, characterized in that: The other end of the air inlet pipe (22) is respectively communicated with the bottom end of two second conduits (23), and the two second conduits (23) are respectively communicated with one end in the back of three first sleeves (24) through connecting pipes.

3. The full-automatic bonding machine for gas inlet temperature and pressure sensor processing according to claim 2, characterized in that: The first sleeve (24) is sleeved with a second sleeve (25), and one end of the front surface of the three second sleeves (25) is connected with the back surface of the three air tightness detection boxes (16) respectively, the outer surface of the two first connecting pipes (4) and the second connecting pipe (6) is provided with air holes, and the second connecting pipe (6) and the two first connecting pipes (4) are connected with the sealing connecting cylinder (7) through the air holes.

4. The full-automatic bonding machine for gas inlet temperature and pressure sensor processing according to claim 3, characterized in that: The back surface of the air tightness detection box (16) is provided with an exhaust hole (29), the air tightness detection box (16) is connected with the second sleeve (25) through the exhaust hole (29), and the front surface of the air tightness detection box (16) is fixedly connected with a handle (30).

5. The full-automatic bonding machine for gas temperature and pressure sensor processing according to claim 4, characterized in that: The outer surface of the handle (30) is provided with anti-skid lines, the upper surface of the fixed shell (1) is fixedly connected with the lower surface of a workbench (32), the upper surface of the workbench (32) is fixedly connected with the lower surface of a bonding device (33), and the upper surface of the workbench (32) is provided with a plurality of through holes (34).

6. The full-automatic bonding machine for gas temperature and pressure sensor processing according to claim 1, characterized in that: The upper surface of the first conduit (5) is connected with the lower surface of a sealing cover (26), the front surface of the fixed shell (1) is provided with three sliding grooves (31), and the three air tightness detection boxes (16) are slidably connected in the three sliding grooves (31) respectively, and the shape of the inner wall of the sliding groove (31) is matched with the shape of the outer surface of the air tightness detection box (16).

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