Device for storing a vehicle and method for storing a vehicle

Abstract

An apparatus for storing containers includes a storage tank comprising racks respectively configured to support containers; a purging unit configured to supply purging gas to each of the racks to purge the containers when the storage tank is in a purging mode, and to supply the purging gas only to each of the racks when the storage tank is in a normal mode; an inspection unit configured to inspect the purging quality of the purging gas supplied to each of the racks when the storage tank is in the normal mode; and a control unit configured to switch the storage tank between the purging mode and the normal mode, and configured to control the purging unit according to the switching between the purging mode and the normal mode. Therefore, the apparatus has optimized operating efficiency.

Description

Technical Field

[0001] This disclosure relates to an apparatus for storing a vehicle and a method for storing a vehicle. More specifically, this disclosure relates to an apparatus for storing containers on shelves and a method for storing containers on shelves respectively. Background Technology

[0002] Typically, multiple semiconductor processing units used to manufacture semiconductor devices are arranged sequentially to perform various processes on a semiconductor substrate. Objects, such as semiconductor substrates, to which the semiconductor processing units perform semiconductor device manufacturing processes can be supplied to or retrieved from each semiconductor processing unit in a container. Examples of containers include front-opening unified pods (FOUPs), front-opening shipping boxes (FOSBs), magazines, reticle pods, etc.

[0003] Containers can be transported via vehicles included in overhead hoist transport (OHT). These vehicles can transport containers containing objects to the loading ports of various semiconductor processing units, and can pick up containers containing processed objects from the loading ports and transport them externally.

[0004] Multiple containers can be temporarily stored on shelves included in the storage unit to facilitate efficient transport of the containers by transport vehicles. When containers are loaded onto the shelves, they can be purged with purging gas as a purging process to remove residual fumes or gases from the containers or to prevent oxide films from forming on the objects contained within them. However, depending on the type of container or object, purging may not be necessary.

[0005] The storage device can operate in a purging mode during purging and in a normal mode when purging is stopped.

[0006] When the hopper returns from normal mode to purging mode, it may be necessary to check whether the purging process is performed correctly; this is called purging quality check process.

[0007] Because the purging quality inspection is performed while the load is stopped on the racks, the storage unit with the racks cannot operate, which may result in inefficiency. Furthermore, since operators may need to manually step on each rack to check the purging quality, this inspection can be time-consuming and costly. Summary of the Invention

[0008] Embodiments of the present invention provide an apparatus for a storage container that can switch the storage container from a normal mode to a purging mode, while automatically checking the quality of the purging process of purging the container with purging gas.

[0009] Embodiments of the present invention provide a method for storing a container that can switch the container from a normal mode to a purging mode while automatically checking the quality of the purging process using purging gas to purge the container.

[0010] According to an exemplary embodiment of the present invention, an apparatus for a storage container is disclosed. The apparatus includes: a storage container comprising a plurality of shelves, each shelf being configured to support a container; a purging unit configured to supply purging gas to each shelf to purge the container when the storage container is in a purging mode, and to supply purging gas only to each shelf when the storage container is in a normal mode; an inspection unit configured to inspect the purging quality of the purging gas supplied to each shelf when the storage container is in a normal mode; and a control unit configured to switch the storage container between a purging mode and a normal mode based on the inspection results of the inspection unit related to each of the shelves, and configured to control the purging unit based on the switching between the purging mode and the normal mode.

[0011] In an exemplary embodiment, the purging unit may supply purging gas only to the empty shelves in all shelves that do not contain containers, to prevent the purging gas from being supplied to the containers in normal mode.

[0012] Here, the inspection unit can check the purging quality related to the empty rack.

[0013] Furthermore, the storage device may include a transfer robot configured as a transfer carrier, the control unit controlling the transfer robot to transfer containers loaded on occupied shelves from the occupied shelves to convert the occupied shelves into new empty shelves, and the inspection unit further inspecting the purging quality associated with the new empty shelves.

[0014] In addition, the inspection unit can check the purging quality related to empty shelves within a predetermined time period, and if the occupied shelf is not converted into a new empty shelf within the predetermined time period, the control unit controls the transfer robot to transfer the container from the occupied shelf.

[0015] On the other hand, converting occupied shelves into new empty shelves includes moving containers from occupied shelves to empty shelves where the inspection unit has completed the purging quality inspection process, or moving them out of the storage container.

[0016] In an exemplary embodiment, the inspection unit may include: a plurality of pressure sensors disposed in a supply line for supplying purge gas to each shelf and measuring the pressure of the purge gas; a plurality of flow sensors disposed in the supply line for measuring the flow rate of the purge gas; and a plurality of judges configured to determine whether the purge quality associated with each shelf is normal if the values ​​of the purge gas pressure and flow rate are both within the normal range.

[0017] In an exemplary embodiment, the control unit can classify shelves into multiple shelf groups and control the inspection unit to inspect the purging quality of selected shelf groups at regular intervals.

[0018] Here, the control unit can select a set of shelving groups to be inspected according to priority criteria, which are set in the following order: the maximum number of shelves included in a specific shelving group or the maximum number of empty shelves in a specific shelving group.

[0019] In one exemplary embodiment, the apparatus may further include a display unit configured to display whether each shelf is in a purging mode or a normal mode, whether the inspection unit performs a purging quality inspection process related to each shelf in the normal mode, and the result of the purging inspection process.

[0020] According to an exemplary embodiment of the present invention, a method for storing a storage carrier is disclosed, the method comprising: checking the purging quality of purging gas supplied to each shelf in a normal mode, wherein the purging gas is supplied only to each shelf included in a storage container; and, taking into account the results of the purging quality check associated with each shelf, switching each shelf from a normal mode to a purging mode, in which purging gas is supplied to a container supported by some shelves.

[0021] In an exemplary embodiment, purge gas may be supplied only to empty shelves that do not contain containers, to prevent purge gas from being supplied to containers.

[0022] Here, checking the purging quality of each shelf may include: checking the first purging quality associated with each empty shelf; transferring containers from occupied shelves to convert the occupied shelves into new empty shelves; and checking the second purging quality associated with the new empty shelves.

[0023] Furthermore, the first purging quality related to the empty shelf can be checked within a predetermined time period, and if the occupied shelf is not changed to a new empty shelf within the predetermined time period, the container is transferred from the occupied shelf to convert the occupied shelf into a new empty shelf.

[0024] In addition, removing containers from occupied shelves may include moving containers to empty shelves after a purging quality check has been completed, or removing them from storage containers.

[0025] Simultaneously, checking the first purging quality associated with each empty shelf may include: supplying purging gas to purge the empty shelf; measuring the pressure and flow rate of the purging gas supplied to the empty shelf; and determining whether the purging quality associated with each empty shelf is normal if the pressure and flow rate of the purging gas are both within the normal range.

[0026] Here, you can switch each rack from normal mode to purging mode only for racks whose purging quality is judged to be normal.

[0027] In an exemplary embodiment, the shelves may be classified into multiple shelf groups, and checking the purging quality of the purging gas supplied to each shelf includes checking the purging quality for shelves included in a selected shelf group at regular intervals.

[0028] Here, the selected shelf group can be determined according to priority criteria, which are set in the following order: the maximum number of shelves included in a particular shelf group or the maximum number of empty shelves in a particular shelf group.

[0029] According to an exemplary embodiment of the present invention, a method for storing a storage carrier is disclosed, the method comprising: checking the purging quality of purging gas supplied to each empty shelf in a normal mode, wherein the purging gas is supplied only to each shelf included in a storage container; considering the results of the purging quality check associated with each shelf, switching each empty shelf from the normal mode to a purging mode, in which purging gas is supplied to a container supported by some empty shelves; and displaying whether each empty shelf is in the purging mode or in the normal mode, whether the purging quality check process associated with each shelf in the normal mode has been completed, and what the result of the purging check process is.

[0030] According to an exemplary embodiment of the apparatus and method for the storage container, the inspection unit is capable of inspecting the purging quality when the storage container is in normal mode. Furthermore, based on the result of the purging quality inspection step, the storage container is switched from normal mode to purging mode.

[0031] Because the storage container can be changed without requiring the storage container to stop to check the purging quality, the storage container device can optimize the operating efficiency of the storage container.

[0032] Furthermore, when changing the storage tank from normal mode to purging mode, no additional purging quality inspection is required, thus saving time and costs associated with such inspections.

[0033] The above overview of this disclosure is not intended to describe the various embodiments or implementations illustrated in the figures of this disclosure. The following detailed description and claims illustrate these embodiments in more specific terms. Attached Figure Description

[0034] The exemplary embodiments can be understood in more detail from the following description taken in conjunction with the accompanying drawings, wherein:

[0035] Figure 1 This is a block diagram illustrating an apparatus for a storage carrier according to an embodiment of the present invention.

[0036] Figure 2 It shows Figure 1 A top view of the storage container.

[0037] Figure 3 It shows Figure 1 The front view of the storage tank, purging unit and inspection unit.

[0038] Figure 4 It is shown that includes Figure 1 The front view of multiple shelf groups of the storage unit.

[0039] Figure 5 This is a flowchart illustrating a method for using a storage carrier according to an exemplary embodiment of the present invention.

[0040] Figure 6 It shows Figure 5 A flowchart of the steps for checking the purging quality.

[0041] Figure 7 It shows that it is aimed at Figure 6 A flowchart of the steps for checking the purging quality of an empty frame. Detailed Implementation

[0042] While various embodiments may have various modifications and alternatives, their details have been shown by way of example in the accompanying drawings and will be described in detail. However, it should be understood that this is not intended to limit the claimed invention to the specific embodiments described. Rather, it is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the subject matter defined by the claims.

[0043] The specific embodiments of the raceway unit and the OHT having the raceway unit will now be described in detail with reference to the accompanying drawings. However, the invention can be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to make this disclosure more thorough and complete, and to fully convey the scope of the invention to those skilled in the art. The same reference numerals always refer to the same components. In the figures, the dimensions of layers and regions are exaggerated for clarity.

[0044] Terms such as "first" and "second" can be used to describe various components, but the components described above should not be limited by these terms. These terms are only used to distinguish one component from another. For example, in this invention, a second component can be named similarly without departing from the scope of the first component, and the second component can also be named relative to the first component.

[0045] The terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to limit the inventive concept. As used herein, the singular forms "a," "an," and "the" are also intended to include the plural forms unless the context clearly indicates otherwise. It will be further understood that when the terms "comprising" and / or "including" are used in this specification, they specify the presence of the stated features, integrals, steps, operations, components, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, components, components, and / or groups thereof. It will be further understood that when the terms "comprising" and / or "including" are used in this specification, they specify the presence of the stated features, integrals, steps, operations, components, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, components, components, and / or groups thereof.

[0046] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art. It will also be understood that terms such as those defined in common dictionaries shall, unless expressly defined herein, be interpreted as having the same meaning as they have in the context of the relevant art, and shall not be interpreted in an idealized or overly formal sense.

[0047] Figure 1 This is a block diagram illustrating an apparatus for a storage carrier according to an embodiment of the present invention. Figure 2 It shows Figure 1 A top view of the storage container. Figure 3 It shows Figure 1 The front view of the storage tank, purging unit and inspection unit. Figure 4 It is shown that includes Figure 1 The front view of multiple shelf groups of the storage unit.

[0048] Reference Figures 1 to 4 The storage carrier device 100 according to an embodiment of the present invention includes a storage container 110, a purging unit 120, an inspection unit 130, a control unit 140, and a display unit 150.

[0049] The storage device 110 includes a loading port 111, multiple shelves 112, and a transfer robot 113.

[0050] The loading port 111 can receive the container 10 from the transfer unit (not shown). Furthermore, the transfer unit can pick up the container 10 from the loading port 111. The loading port 111 can provide space to support the container 10. The container 10, which holds an object (not shown), is located on the loading port 111. Examples of various containers 10 include FOUPs, FOSBs, bins, photomask boxes, etc. The object may include a semiconductor substrate, a printed circuit board, a photomask, etc.

[0051] Each shelf 112 can be configured to store each container 10. Shelves 112 can be arranged horizontally and vertically. Although shelves 112 are depicted as being in... Figure 2 Arranged in a row in the middle, but in Figure 2 In the middle, the shelves 112 can be arranged in at least two rows that are parallel to each other.

[0052] The transfer robot 113 is positioned in front of the shelf 112 and can transfer the container 10 between the loading port 111 and the shelf 112. When the shelves 112 are arranged in two parallel rows, the transfer robot 113 can be positioned between the two rows of shelves 112.

[0053] The transfer robot 113 is capable of moving or rotating in both the horizontal and vertical directions to transfer the container 10. Although not shown in detail, the transfer robot 113 includes a horizontal drive unit for moving the robot arm 114 in the horizontal direction, a vertical drive unit for moving the robot arm 114 in the vertical direction, and a rotation drive unit for rotating the robot arm 114.

[0054] In detail, the transfer robot 113 may include a robotic arm 114 for holding the container 10, and the robotic arm 114 may be configured to move toward the shelf 112.

[0055] For example, the robotic arm 114 can be configured to move in a forward / backward direction perpendicular to the left-right direction. A horizontal drive unit can drive the robotic arm 114 to move in both the forward / backward and left-right directions. The robotic arm 114 may include a telescopic multi-joint robotic arm.

[0056] In an exemplary embodiment, each of the horizontal drive unit, vertical drive unit, and rotary drive unit may be configured to include a motor and a power transmission device having a timing belt and pulleys.

[0057] Therefore, the transfer robot 113 can load the container 10 onto the shelf 112 or transfer the container 10 from the shelf 112.

[0058] On the other hand, the transfer robot 113 can be set up in multiple forms to transfer the container 10 more quickly.

[0059] The purging unit 120 can perform purging by supplying purging gas to each rack 112 included in the storage container 110.

[0060] Reference Figure 3 The purging unit 120 may include a supply nozzle 121, a discharge nozzle 122, a supply pipe 123, a discharge pipe 124, a gas supply unit 125, and a flow controller 126.

[0061] Supply nozzles 121 are respectively disposed on the shelf 112. Each supply nozzle 121 has an end that contacts the lower surface of each container 10. For example, the supply nozzles 121 can be opened and closed using the pressure that may be generated when each container 10 squeezes the end of each supply nozzle 121. That is, when one of the containers 10 is loaded onto one of the shelves 112, one of the supply nozzles 121 can be in an open state due to the squeezing force generated when one of the containers 10 squeezes the end of one of the supply nozzles 121. On the other hand, when one of the containers 10 is removed from one of the shelves 112, the squeezing force of the container 10 squeezing the end of one of the supply nozzles 121 is released, and the supply nozzle 121 can be turned into a closed state.

[0062] Discharge nozzles 122 are respectively disposed on each shelf 112. Discharge nozzles 112 can contact the upper part of the lower surface of each container 10. For example, one of the discharge nozzles 122 can switch between an open state and a closed state by means of the squeezing force of one of the containers 10, which can be generated when one of the containers squeezes the upper part of one of the discharge nozzles 122.

[0063] Supply pipe 123 connects the supply nozzle 121 of purging unit 120 to gas supply unit 125. Purging gas can be supplied to container 10 via supply pipe 123 and supply nozzle 121.

[0064] The discharge pipe 124 is connected to the discharge nozzle 122 of the purging unit 120. The purging gas can be discharged from the container 10 via the discharge nozzle 122 and the discharge pipe 124.

[0065] The gas supply unit 125 can store purge gas and supply purge gas to the container 10 via the supply pipe 123. Examples of purge gas may include nitrogen.

[0066] A flow controller 126 is provided on one of the supply pipes 123 and can control the flow rate of the purge gas flowing through the supply pipe 123. For example, multiple flow controllers 126 can be provided for each supply pipe 123, and each flow controller 126 can control the flow rate of the purge gas to be supplied to multiple racks 112.

[0067] The purging unit 120 is capable of purging the internal space of each container 10 with purging gas. Therefore, the purging unit 120 can remove residual flue gas in the internal space of each container 10 or prevent oxide film from forming on the surface of the objects contained in each container 10.

[0068] The inspection unit 130 can check the purging quality of the purging gas by checking how the purging unit 120 properly purifies the internal space of each shelf 112.

[0069] The inspection unit 130 may include a pressure sensor 131, a flow sensor 133, and a detector 135.

[0070] Pressure sensor 131 may be located in one of the adjacent shelves 112. For example, pressure sensor 131 may be located in one of the adjacent supply nozzles 121 or in one of the adjacent supply pipes 123. Pressure sensor 131 may measure the pressure of purge gas flowing to one of the shelves 112 to purge that shelf 112.

[0071] Flow sensor 133 may be located in one of the adjacent shelves 112. For example, flow sensor 133 may be located in one of the adjacent supply nozzles 121 or in one of the adjacent supply pipes 123. Flow sensor 133 can measure the flow rate of purge gas flowing to one of the shelves 112 to purge that shelf.

[0072] The detector 135 is connected to both the pressure sensor 131 and the flow sensor 133, and determines whether the pressure and flow rate of the purge gas measured by the pressure sensor 131 and the flow sensor 133 are within the normal range.

[0073] For example, when the pressure and flow rate of the purge gas measured by the pressure sensor 131 and the flow sensor 133 are within the normal range relative to each rack 112, the purge quality is judged to be in a normal state; if the pressure and flow rate exceed the normal range, the purge quality can be judged to be in an abnormal state.

[0074] The control unit 140 can control the storage tank 110, the purging unit 120, the inspection unit 130, and the display unit 150.

[0075] Specifically, the control unit 140 can control the storage tank 110 to alternately switch between a purging mode that performs purging treatment and a normal mode that does not perform purging treatment.

[0076] Furthermore, when the storage container 110 alternates between purging mode and normal mode, the control unit 140 can control the purging unit 120. When the storage container 110 is in purging mode, the purging unit 120 supplies purging gas to each shelf 112 to purge the internal space of each container 10. When the storage container 110 changes to normal mode, the purging unit 120 only supplies purging gas to each shelf 112, so that the internal space of each container 10 is not purged.

[0077] When the storage tank 110 is in normal mode, the control unit 140 can control the inspection unit 130 to check the purging quality associated with each shelf 112. In addition, the control unit 140 can quickly change the storage tank 110 from normal mode to purging mode based on the purging quality inspection results.

[0078] Furthermore, when switching the storage device 110, especially one of the shelves 112, from normal mode to purging mode, it is not required that the storage device 110 be completely stopped, thus the storage device 110 can have optimized operating efficiency.

[0079] When the storage tank 110 changes from normal mode to purging mode, no additional purging quality inspection process is required, thereby saving time and cost for performing additional purging quality inspection processes.

[0080] Meanwhile, in normal mode, even if container 10 is loaded onto the shelf, purging will not be performed on all shelves.

[0081] Meanwhile, in normal mode, the storage unit 110 does not perform purging on the occupied shelves 112 that contain containers 10, so the purging unit 120 does not purge the containers 10. That is, in normal mode, the purging unit 120 can supply purging gas only to the empty shelves 112. Therefore, in normal mode, purging quality checks are not performed on the occupied shelves, but on the empty shelves. In other words, the inspection unit 110 can check the purging quality only for the empty shelves 112.

[0082] The control unit 140 can control the transfer robot 113 of the storage unit 110 to transfer containers 10 located on occupied shelves on the storage unit 110, so as to convert the occupied shelves into new empty shelves. When converting from occupied shelves to new empty shelves, the inspection unit 110 can check the purging quality of the new empty shelves. Therefore, the inspection unit 110 can sequentially perform purging quality inspection processing on all shelves 112.

[0083] The inspection unit 130 can check the purging quality of empty shelves within a predetermined time period. If an occupied shelf is not converted into a new empty shelf after the predetermined time period has elapsed, the control unit 140 controls the transfer robot 113 to transfer the container 10 from the occupied shelf to convert the occupied shelf into a new empty shelf.

[0084] In order to change the occupied shelf into a new empty shelf, after the inspection unit 130 has completed the purging quality inspection of the empty shelf, the transfer robot 113 can transfer the container 10 of the occupied shelf to the empty shelf, or transfer it to the outside of the storage container 110 through the loading port 111.

[0085] The control unit 140 can classify all shelves 112 into multiple shelf groups. In each shelf group, the flow control unit 126 controls the flow rate of purge gas flowing into the shelves 112 included in the respective shelf group. In addition, under the control of the control unit 140, the inspection unit 130 can perform purge quality inspection processing on a shelf group selected from the shelf groups at regular intervals.

[0086] The control unit 140 can select a shelf group from multiple shelf groups based on priority criteria. The priority criteria can be set in the following order: the maximum number of shelves included in a particular shelf group or the maximum number of empty shelves in a particular shelf group.

[0087] The display unit 150 displays whether each shelf 112 of the storage tank 110 is in purging mode or normal mode based on the control signals from the control unit 140. The display unit 150 shows whether a purging quality check was performed on one of the shelves 112, and what the check result was. Additionally, the display unit 150 can mark shelves 112 that are determined to have abnormal purging quality as unusable. Therefore, the operator can easily and accurately check the status of the storage tank 110 by monitoring the display unit 150.

[0088] Figure 5 This is a flowchart illustrating a method for using a storage vehicle having an exemplary embodiment of the present invention. Figure 6 It shows Figure 5 A flowchart of the steps for checking the purging quality. Figure 7 It shows that it is aimed at Figure 6 A flowchart of the steps for checking the purging quality of an empty frame.

[0089] Reference Figures 1 to 3 and Figure 5 According to an exemplary embodiment of the method for storing the carrier, in normal mode, a purging quality inspection process is performed on all shelves 112 to store the container 10, but the purging process is not performed on all shelves 112 included in the storage container 110 (step S100).

[0090] In normal mode, purge gas is supplied only to the racks 112 included in the storage container 110, and not to the container 10. During the purge quality inspection process, purge gas is supplied to each rack 112 to check the purge quality of each rack 112.

[0091] To prevent the purging unit 120 from purging the container 10 in normal mode, the purging unit 120 does not supply purging gas to the occupied shelves in the shelf 112 containing the container 10. That is, in normal mode, purging gas can be supplied only to the empty shelves in all shelves 112. Therefore, in normal mode, no purging quality inspection is performed on the occupied shelves, and the inspection unit 130 only checks the purging quality of each empty shelf.

[0092] Specifically, refer to Figure 6 In order to check the purging quality of each shelf 112, firstly, check the purging quality of each empty shelf in shelf 112 (step S110).

[0093] In shelf 112, the container 10 loaded to occupy the occupied shelf is transferred to convert the occupied shelf into a new empty shelf S120.

[0094] Specifically, a purging quality inspection can be performed on empty shelves within a predetermined time period. If an occupied shelf is not changed to a new empty shelf within the predetermined time period, the transfer robot 113 of the storage unit 110 will transfer the container 10 occupying the occupied shelf to convert the occupied shelf into a new empty shelf.

[0095] To convert occupied shelves into new empty shelves, the transfer robot 113 of the storage unit 110 transfers the container 10 from the occupied shelf to the empty shelf where the purging quality inspection process has been completed. Alternatively, the transfer robot 113 can transfer the container 10 from the occupied shelf to the outside of the storage unit 110 via the loading port 111.

[0096] Then, check the purging quality for the new empty rack (step S130).

[0097] When performing a purging quality inspection on each shelf 112, the shelves are classified into multiple shelf groups. A purging quality inspection is performed on the shelves within a selected shelf group within a predetermined time period.

[0098] For example, each flow controller 126 can control the purge gas to be supplied to all shelves included in each shelf group.

[0099] Based on priority criteria, each shelf group is selected sequentially to supply purge gas to one shelf group. The priority criteria are set in the following order: the maximum number of shelves constituting a particular shelf group or the maximum number of empty shelves in a particular shelf group.

[0100] Reference Figure 3 and Figure 7 The following describes the process of checking the purging quality of the empty rack (step S110).

[0101] First, purge gas for performing the purging is supplied to the empty rack (step S111).

[0102] Specifically, the purging gas can be supplied from the gas supply unit 125 to the empty rack via the supply pipe 123 and the supply nozzle 121.

[0103] Measure both the pressure and flow rate of the purge gas supplied to the empty rack (step S112).

[0104] Specifically, pressure sensor 131 measures the pressure of the purge gas supplied to each shelf 112, and flow sensor 133 measures the flow rate of the purge gas supplied to each shelf 112.

[0105] When the pressure and flow rate of the purging gas measured on the empty rack are both within the normal range, the purging quality of each empty rack is judged to be normal. When the pressure and flow rate exceed the normal range, the purging quality of each empty rack is judged to be abnormal (step S113).

[0106] The purging quality inspection process for the new empty shelf S130 is basically the same as the purging quality inspection process for the empty shelf (step S110).

[0107] When the purging quality inspection process of each shelf 112 is completed, the purging quality inspection results are provided to the control unit 140.

[0108] The storage device 110 changes from normal mode to purging mode S200. In purging mode, the carrier supported by the frame is purged according to the purging quality inspection results of each individual frame.

[0109] Only shelves 112 whose purging quality is judged to be normal can change from normal mode to purging mode. Since shelves 112 whose purging quality is judged to be abnormal cannot properly purge containers 10, shelves 112 whose purging quality is judged to be abnormal will not change to purging mode, thus the shelves may remain in normal mode or be unusable.

[0110] Because the purging quality inspection results of each shelf 112 are utilized, it is not necessary to stop the storage tank 100 when changing it from normal mode to purging mode. Therefore, the storage tank 110 can have optimized operating efficiency.

[0111] Furthermore, the storage tank 110 can quickly switch from normal mode to purging mode without additional purging quality checks. Therefore, it can save time and costs required for purging quality checks.

[0112] According to the apparatus and method for a storage container in an exemplary embodiment of the present invention, a storage container can be quickly changed from a normal mode to a purging mode while it is in a normal mode by using the purging quality inspection results performed by an inspection unit. Since the storage container does not need to be stopped for purging quality inspection processing, the storage container can have optimized operating efficiency.

[0113] Furthermore, when the storage tank is changed from normal mode to purging mode, the additional purging quality inspection process can be omitted, thereby saving the time and cost required for the purging quality inspection process.

[0114] While exemplary embodiments of the invention have been described with reference to specific details, they are not limited thereto. Therefore, those skilled in the art will readily understand that various modifications and changes can be made thereto without departing from the spirit and scope of this disclosure as defined by the appended claims.

Claims

1. An apparatus for storing a storage vehicle, the apparatus comprising: A storage container comprising multiple shelves, each shelf being configured to support a container; A purging unit is configured to supply purging gas to each of the shelves to purge the container when the storage container is in purging mode, and to supply purging gas only to each of the shelves when the storage container is in normal mode, wherein the purging unit is further configured to supply purging gas only to empty shelves that are not loaded with the container when the storage container is in normal mode, to prevent the purging gas from being supplied to the container in the normal mode; An inspection unit is configured to inspect the purging quality of the purging gas supplied to each of the shelves when the storage tank is in the normal mode, wherein the inspection unit is further configured to inspect the purging quality associated with the empty shelves when the storage tank is in the normal mode. and A control unit is configured to switch the storage container between the purging mode and the normal mode based on the inspection results of the inspection unit related to each of the shelves, and is configured to control the purging unit based on the switching between the purging mode and the normal mode.

2. The apparatus of claim 1, wherein the storage container includes a transfer robot configured to transfer the carrier, the control unit controlling the transfer robot to transfer the container loaded on the occupied shelf from the occupied shelf to convert the occupied shelf into a new empty shelf, and the inspection unit further inspecting the purging quality associated with the new empty shelf.

3. The apparatus of claim 2, wherein the inspection unit inspects the purging quality associated with the empty rack within a predetermined time period. Furthermore, if the occupied shelf is not converted into a new empty shelf within the predetermined time period, the control unit controls the transfer robot to transfer the container from the occupied shelf.

4. The apparatus of claim 2, wherein converting the occupied shelf into a new empty shelf comprises transferring the container from the occupied shelf to the empty shelf where the inspection unit has completed the purging quality inspection process, or transferring it from the storage container.

5. The apparatus according to claim 1, wherein the inspection unit comprises: Multiple pressure sensors are provided, each of which is disposed in a supply line for supplying the purge gas to each of the racks and measuring the pressure of the purge gas. Multiple flow sensors are provided, each of which is located in one of the supply lines and measures the flow rate of the purge gas. and Multiple detectors are configured to determine whether the purging quality associated with each of the racks is normal, provided that the values ​​of the pressure and flow rate of the purging gas are both within normal ranges.

6. The apparatus of claim 1, wherein the control unit classifies the shelves into multiple shelf groups and controls the inspection unit to inspect the purging quality of selected shelf groups at regular intervals.

7. The apparatus of claim 6, wherein the control unit selects a group of shelves to be inspected according to a priority criterion, the priority criterion being set in the following order: the maximum number of shelves included in the group of shelves to be inspected or the maximum number of empty shelves in the group of shelves to be inspected.

8. The apparatus of claim 1, further comprising a display unit configured to display whether each of the shelves is in the purging mode or the normal mode, whether the inspection unit performs a purging quality inspection process related to each of the shelves in the normal mode, and the result of the purging inspection process.

9. A method for storing a vehicle, the method comprising: In normal mode, check the purging quality of the purging gas supplied to each shelf, wherein the purging gas is supplied only to each shelf included in the storage container; and Taking into account the results of the purging quality checks associated with each of the shelves, each of the shelves is switched from the normal mode to the purging mode, in which the purging gas is supplied to a container supported by some of the shelves; In the normal mode, the purge gas is supplied only to empty shelves that do not contain the containers, in order to prevent the purge gas from being supplied to the containers. In the normal mode, checking the purging quality of each of the shelves includes checking the first purging quality associated with each of the empty shelves.

10. The method of claim 9, wherein checking the purging quality of each of the racks further comprises: The container is moved from the occupied shelf to convert the occupied shelf into a new empty shelf; and Check the second purging quality associated with the new empty shelf.

11. The method of claim 10, wherein the first purging quality associated with an empty shelf is checked within a predetermined time period. If the occupied shelf is not changed to the new empty shelf within the predetermined time period, the container is moved from the occupied shelf to convert the occupied shelf into the new empty shelf.

12. The method of claim 10, wherein transferring the container from the occupied shelf includes transferring the container to the empty shelf or from the storage container after the purging quality check has been completed.

13. The method of claim 10, wherein checking the first purging quality associated with each of the empty shelves comprises: A purge gas is supplied to purge the empty rack; Measure the pressure and flow rate of the purge gas supplied to the empty rack; and If the pressure and flow rate of the purging gas are both within the normal range, determine whether the purging quality associated with each empty shelf is normal.

14. The method of claim 13, wherein switching each of the racks from the normal mode to the purging mode is performed only for each rack whose purging quality is determined to be normal.

15. The method of claim 9, wherein the shelves are classified into multiple shelf groups, and checking the purging quality of the purging gas supplied to each shelf includes checking the purging quality at regular intervals for the shelves included in selected shelf groups.

16. The method of claim 15, wherein the selected shelf group is determined according to a priority criterion set in the following order: the maximum number of shelves included in the shelf group to be inspected or the maximum number of empty shelves in the shelf group to be inspected.

17. A method for storing a vehicle, the method comprising: In normal mode, check the purging quality of the purging gas supplied to each empty shelf in the storage rack, wherein in normal mode, the purging gas is only supplied to the empty shelves in the rack that do not contain containers. Taking into account the results of the purging quality checks associated with each of the empty shelves, the storage container is switched from the normal mode to the purging mode, in which the purging gas is supplied to the container mounted on the shelf; and The display shows whether the storage device is in the purging mode or the normal mode, whether the purging quality check process associated with each of the shelves in the normal mode has been completed, and the result of the purging quality check process.

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