Semiconductor process apparatus and pedestal lift mechanism thereof

Abstract

The application discloses a semiconductor process equipment and a base lifting mechanism thereof. The disclosed base lifting mechanism comprises a base support shaft, a clamping device, a lifting device and an electrical box. The clamping device comprises a first clamping assembly, the first clamping assembly comprises a first clamping block and a second clamping block, the electrical box is connected with the first clamping block, and the lifting device is connected with the first clamping block. In a first state, the first clamping block is detachably connected with the second clamping block, and the first clamping block and the second clamping block clamp the base support shaft. In a second state, the second clamping block is separated from the first clamping block, so that the first clamping assembly is separable from the base support shaft. The above scheme can solve the problems that it is difficult to disassemble the electrical box, the operation is inconvenient, and the disassembly of the electrical box has reliability when the base support shaft is separated from the clamping device.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, and in particular to a semiconductor process equipment and a base lifting mechanism thereof. BACKGROUND

[0002] In a semiconductor process equipment, a base is mainly used for carrying a component to be processed (for example, a wafer) and heating or cooling the component to be processed. A base lifting mechanism is used to drive the base to ascend or descend.

[0003] In the related art, the base lifting mechanism includes a base support shaft, a clamping device, a lifting device, and an electrical box. The base is connected with the base support shaft. When the base is inspected, the base support shaft needs to be disassembled. The base support shaft is connected with the clamping device. The clamping device is usually clamped on the base support shaft, so that the lifting device drives the clamping device to drive the base support shaft to ascend or descend. The clamping device is also connected with the electrical box. When the base support shaft and the clamping device need to be disassembled, the electrical box usually needs to be disassembled from the clamping device first, so that the clamping device and the base support shaft can be separated. Since the position space of the electrical box is relatively small, it is difficult to disassemble the electrical box, and the operation is not convenient. Meanwhile, there are a large number of water paths and gas paths in the electrical box, and the disassembly of the electrical box also has the problem of reliability. SUMMARY

[0004] The present application discloses a semiconductor process equipment and a base lifting mechanism thereof, to solve the problems that when the base support shaft and the clamping device are separated, it is difficult to disassemble the electrical box, the operation is not convenient, and the disassembly of the electrical box has the problem of reliability.

[0005] To solve the above technical problems, the present application is implemented as follows:

[0006] In a first aspect, the present application discloses a semiconductor process equipment, including a base support shaft, a clamping device, a lifting device, and an electrical box, wherein:

[0007] The clamping device includes a first clamping assembly, the first clamping assembly includes a first clamping block and a second clamping block, the electrical box is connected with the first clamping block, and the lifting device is connected with the first clamping block.

[0008] In a first state, the first clamping block is detachably connected with the second clamping block, and the first clamping block and the second clamping block clamp the base support shaft. The lifting device can drive the clamping device to drive the base support shaft to ascend or descend.

[0009] In a second state, the second clamping block is separated from the first clamping block, so that the first clamping assembly and the base support shaft can be separated.

[0010] In a second aspect, the application discloses a semiconductor process equipment, which comprises a process chamber, a susceptor provided in the process chamber for carrying a wafer, and the susceptor lifting mechanism of the first aspect, which is used for driving the susceptor to lift.

[0011] The technical scheme adopted by the application can achieve the following technical effects:

[0012] The susceptor lifting mechanism disclosed by the embodiment of the application comprises a first clamping assembly, a lifting device, an electrical box and a second clamping assembly. The first clamping assembly comprises a first clamping block and a second clamping block. The first clamping block is connected with the lifting device, and the electrical box is connected with the first clamping block. In the first state, the first clamping block and the second clamping block are detachably connected and clamped to the susceptor support shaft, so that the lifting device can drive the clamping device to lift the susceptor support shaft, and the susceptor support shaft can lift the susceptor. In the second state, the first clamping block is separated from the second clamping block, so that the clamping device can be separated from the susceptor support shaft. At this time, the first clamping block is still connected with the lifting device, and the electrical box is connected with the first clamping block. Therefore, the electrical box does not need to be disassembled when the susceptor support shaft is disassembled, so that the problem of difficult disassembly due to limited space and a large number of water lines and gas lines in the electrical box can be avoided, and the overall reliability is improved. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 FIG. 1 is a structural schematic view of a susceptor lifting mechanism in a first state according to an embodiment of the application;

[0014] Figure 2 FIG. 2 is a structural schematic view of the susceptor lifting mechanism in a second state according to the embodiment of the application;

[0015] Figure 3 FIG. 3 is another structural schematic view of the susceptor lifting mechanism in the first state according to the embodiment of the application;

[0016] Figure 4 FIG. 4 is a partial enlarged view of FIG. 3; Figure 3

[0017] Figure 5 FIG. 5 is a structural schematic view of a second clamping block separated from a first clamping block according to the embodiment of the application.

[0018] REFERENCE SIGNS:

[0019] 100, susceptor support shaft,

[0020] 210, first clamping block; 220, second clamping block; 221, strip-shaped hole; 230, first locking bolt; 240, third clamping block; 250, fourth clamping block; 260, second locking bolt, ​

[0021] 300 - electrical box, 310 - threaded connection,

[0022] 400 - moving cantilever, 410 - first hole section, 420 - second hole section, 430 - limit step face,

[0023] 500 - mounting space,

[0024] 600 - connection, 610 - abutment, 620 - connection portion,

[0025] 700 - elastic member. DETAILED DESCRIPTION

[0026] To make the objectives, technical solutions and advantages of the present application clearer, the technical solutions will be described below in connection with specific embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort belong to the scope of protection of the present application.

[0027] The technical solutions disclosed in the embodiments of the present application will be described in detail below in connection with the drawings.

[0028] Please refer to Figures 1 to 5 The embodiments of the present application disclose a semiconductor process equipment and a base lifting mechanism thereof. The disclosed base lifting mechanism comprises a base support shaft 100, a clamping device, a lifting device and an electrical box 300. The base support shaft 100 is used to support a base, which can be an assembly for supporting a component to be processed, such as a wafer. The base needs to be checked regularly, and when the base is checked, the base and the base support shaft 100 need to be disassembled as a whole.

[0029] The clamping device can be used to clamp the base support shaft 100, so that when the clamping device drives the base support shaft 100 to rise and fall, the clamping device and the base support shaft 100 will not move relatively. The clamping device can also be used to release the base support shaft 100, and the clamping force between the clamping device and the base support shaft 100 will disappear, and the base support shaft 100 can be disassembled from the clamping device. The clamping device comprises a first clamping assembly, and the first clamping assembly comprises a first clamping block 210 and a second clamping block 220. When the first clamping assembly clamps the base support shaft 100, the first clamping block 210 and the second clamping block 220 are detachably connected, and the first clamping block 210 and the second clamping block 220 clamp the base support shaft 100. When the first clamping assembly is separated from the base support shaft, the first clamping block 210 and the second clamping block 220 are separated.

[0030] The electrical box 300 can be an electrical connection device for electrical components in a semiconductor processing equipment, especially for electrical components (such as electrodes, heating wires, etc.) in a susceptor and external electrical components (such as power supply, controller, etc.). The electrical box 300 is connected to the first clamping block 210.

[0031] The lifting device is a power device for lifting the susceptor support shaft 100 by the clamping device. The lifting device is connected to the first clamping block 210.

[0032] In the first state, the first clamping block 210 is detachably connected to the second clamping block 220, and the first clamping block 210 and the second clamping block 220 clamp the susceptor support shaft 100. The lifting device can drive the clamping device to lift the susceptor support shaft 100. The detachable connection between the first clamping block 210 and the second clamping block 220 can be achieved by screwing or buckling. The lifting device can drive the first clamping block 210, the second clamping block 220, or both.

[0033] In the second state, the second clamping block 220 is separated from the first clamping block 210, so that the first clamping assembly can be separated from the susceptor support shaft 100. The second clamping block 220 can be separated from the first clamping block 210 by moving away from the first clamping block 210 to release the susceptor support shaft 100. The second clamping block 220 can be connected to the first clamping block 210 or disconnected from the first clamping block 210. When the susceptor is inspected, the second clamping block 220 is separated from the first clamping block 210 to facilitate the separation of the susceptor support shaft 100 from the first clamping assembly.

[0034] In the specific implementation process, the first clamping block 210 is connected to the lifting device, and the electrical box 300 is connected to the first clamping block 210. In the first state, the first clamping block 210 is detachably connected to the second clamping block 220, and the first clamping block 210 and the second clamping block 220 clamp the susceptor support shaft 100. The lifting device can drive the clamping device to lift the susceptor support shaft 100. In the second state, the second clamping block 220 is separated from the first clamping block 210 to separate the clamping device from the susceptor support shaft 100, so that the susceptor support shaft 100 can be detached from the clamping device.

[0035] The semiconductor process equipment disclosed by the embodiments of the present application comprises a first clamping assembly comprising a first clamping block 210 and a second clamping block 220, the first clamping block 210 is connected with a lifting device, and an electrical box 300 is connected with the first clamping block 210. In the first state, the first clamping block 210 and the second clamping block 220 are detachably connected and clamped to the base support shaft 100, so that the lifting device can drive the clamping device to drive the base support shaft 100 to ascend and descend, thereby achieving the function of driving the base support shaft 100 to ascend and descend. In the second state, the first clamping block 210 is separated from the second clamping block 220, so that the clamping device can be separated from the base support shaft 100. At this time, the first clamping block 210 is still connected with the lifting device, and the electrical box 300 is connected with the first clamping block 210, so that the electrical box 300 does not need to be disassembled when the base support shaft 100 is disassembled, thereby avoiding the problem of difficulty in disassembling the electrical box 300 due to limited space and a large number of water and gas channels in the electrical box 300, and improving the overall reliability.

[0036] In an optional embodiment, the lifting device can comprise a movable cantilever 400, the movable cantilever 400 can be sleeved on the base support shaft 100, the movable cantilever 400 can be connected with the first clamping block 210, and the electrical box 300 can be arranged on the side of the first clamping block 210 away from the movable cantilever 400. The electrical box 300, the movable cantilever 400 and the first clamping block 210 can enclose an installation space 500. In the first state, the second clamping block 220 can be inserted into the installation space 500, the first clamping block 210 is in abutment with the second clamping block 220, and the two can be detachably connected through the first locking bolt 230.

[0037] In the second state, the second clamping block 220 can be moved out of the installation space 500 to be separated from the first clamping block 210.

[0038] The mobile cantilever 400, the electrical box 300 and the first clamping block 210 enclose the installation space 500, so that in the first state, the second clamping block 220 can be inserted into the installation space 500, the first clamping block 210 and the second clamping block 220 are detachably connected through the first locking bolt 230, so that the first clamping block 210 and the second clamping block 220 clamp the base support shaft 100; and the installation space 500 can provide an installation basis for the second clamping block 220, and the movement of the second clamping block 220 in the direction of the electrical box 300 and the mobile cantilever 400 is limited, thereby improving the installation stability of the second clamping block 220, the connection mode between the first clamping block 210 and the second clamping block 220 is simple, stable and easy to operate, thereby effectively improving the connection performance and operability of the first clamping block 210 and the second clamping block 220; in the second state, the second clamping block 220 can be removed from the installation space 500 to be separated from the first clamping block 210, so that the first clamping assembly can be separated from the base support shaft 100.

[0039] Further, the electrical box 300 can be provided with a threaded connector 310, the threaded connector 310 can be located in the installation space 500, the threaded connector 310 can include a threaded rod and a nut connected to the first end of the threaded rod, the second end of the threaded rod can be connected to the electrical box 300, and the nut and the electrical box 300 can be spaced apart. The second clamping block 220 can be provided with a strip-shaped hole 221 extending in the insertion direction thereof, one end of the strip-shaped hole 221 can be an open end, and the open end can be used to pass the threaded rod. In the first state, the threaded rod can be inserted into the strip-shaped hole 221 through the open end, and the second clamping block 220 can be inserted into the installation space 500 through the guiding cooperation of the threaded rod and the strip-shaped hole 221, and the second clamping block 220 can be positioned between the nut and the electrical box 300. In the second state, the threaded rod can be separated from the strip-shaped hole 221, so that the first clamping assembly can be separated from the base support shaft 100.

[0040] In the first state, the threaded rod is inserted into the strip-shaped hole 221 through the open end, so that the second clamping block 220 can be inserted into the installation space 500 through the guiding cooperation of the threaded rod and the strip-shaped hole 221, and the second clamping block 220 can be positioned between the nut and the electrical box 300, so that the second clamping block 220 is connected to the electrical box 300. Since the electrical box 300 is connected to the first clamping block 210 and the second clamping block 220, the connection of the electrical box is more stable, and the problem of connection reliability of the electrical box 300 when the base support shaft 100 shakes can be effectively reduced.

[0041] Specifically, the strip-shaped hole 221 of the second holding block 220 can be a stepped hole. In the first state, the nut is located in the strip-shaped hole 221, and the nut abuts against the stepped surface inside the strip-shaped hole 221, so that the second holding block is positioned between the nut and the electrical box 300. Of course, the nut can also extend out of the strip-shaped hole 221, so that the second holding block 220 is located between the nut and the electrical box 300.

[0042] In an alternative embodiment, the lifting device can include a movable cantilever 400, which can be connected to the first holding block 210, and the electrical box 300 can be arranged on the side of the first holding block 210 away from the movable cantilever 400. The holding device can further include a second holding assembly, which can include a third holding block 240 and a fourth holding block 250. In the first state, the third holding block 240 and the fourth holding block 250 are detachably connected, and the third holding block 240 and the fourth holding block 250 hold the base support shaft 100, and the movable cantilever 400 can be clamped between the first holding assembly and the second holding assembly. In the second state, the third holding block 240 and the fourth holding block 250 are separated.

[0043] By further providing the third holding block 240 and the fourth holding block 250, in the first state, the movable cantilever 400 can be clamped between the first holding assembly and the second holding assembly, so that the first holding assembly and the second holding assembly both hold the base support shaft 100, thereby improving the stability of the holding device holding the base support shaft 100, and further enabling the lifting of the movable cantilever 400 to exert a driving force on the first holding assembly and the second holding assembly to drive the base support shaft 100 to lift, thereby effectively limiting the movable cantilever 400 between the first holding assembly and the second holding assembly, thereby improving the reliability and stability of the movable cantilever 400 driving the holding device to move the base support shaft 100.

[0044] In an alternative embodiment, the movable cantilever 400 can be provided with a through connection hole, which can include a first hole section 410 and a second hole section 420 arranged concentrically, the diameter of the first hole section 410 being greater than that of the second hole section 420, and the first hole section 410 and the second hole section 420 forming a limiting stepped surface 430 at the connection. The movable cantilever 400 and the first holding block 210 can be connected by a connecting piece 600, which can include a connecting portion 620 and an abutting portion 610, the connecting portion 620 can pass through the connection hole and be connected to the first holding block 210, and the abutting portion 610 can be located in the first hole section 410. In the first state, the abutting portion 610 is away from the limiting stepped surface 430 and abuts against the third holding block 240. In the second state, the abutting portion 610 is in contact with the limiting stepped surface 430, so that the first holding block 210 is connected to the movable cantilever 400.

[0045] By setting the through connecting hole on the mobile cantilever 400, and setting the connecting hole as the concentric first hole section 410 and the second hole section 420, so that the limiting step surface 430 is formed at the connecting place of the first hole section 410 and the second hole section 420, and then the mobile cantilever 400 and the first clamping block 210 are connected through the connecting piece 600 arranged in the connecting hole; in the first state, the abutting portion 610 abuts against the third clamping block 240, so that the first clamping block 210, the mobile cantilever 400 and the third clamping block 240 are tightly connected, thereby making the mobile cantilever 400 more stable when the base support shaft 100 is lifted by the driving of the clamping device; in the second state, since the second clamping block 220 is separated from the first clamping block 210, the clamping force between the first clamping block 210 and the second clamping block 220 disappears, and then the first clamping block 210 drives the connecting piece 600 to move downward, so that the abutting portion 610 is in contact with the limiting step surface 430, thereby making the first clamping block 210 and the electrical box 300 be obliquely hung on the mobile cantilever 400 through the connecting piece 600, effectively solving the problem of the connection between the electrical box 300 and the first clamping block 210 when the base support shaft 100 is disassembled.

[0046] Further, the connecting piece 600 can be sleeved with the elastic piece 700, the elastic piece 700 can be located in the connecting hole, and the elastic piece 700 can be elastically connected between the mobile cantilever 400 and the first clamping block 210. By sleeving the connecting piece 600 with the elastic piece 700, and elastically connecting the elastic piece 700 between the mobile cantilever 400 and the first clamping block 210, when the base support shaft 100 has a small shaking, the elastic piece 700 can buffer part of the shaking between the mobile cantilever 400, the first clamping block 210 and the electrical box 300, thereby reducing the shaking of the base support shaft 100; when the shaking is large, the elastic piece 700 not only can weaken the shaking, but also can use its damping characteristics to accelerate the end of the shaking, thereby effectively avoiding the problem of damage of the base support shaft 100 due to large shaking.

[0047] In an alternative embodiment, the connecting hole can be multiple, the connecting piece 600 can be multiple, and the multiple connecting pieces 600 can correspond to the multiple connecting holes one by one. The mobile cantilever 400 and the first clamping block 210 are connected through the multiple connecting pieces 600, so that the connection between the mobile cantilever 400 and the first clamping block 210 is more stable, avoiding the risk of falling off of the connecting piece 600, and at the same time, in the first state, the abutting portions 610 of the multiple connecting pieces 600 all abut against the third clamping block 240, so that the connection between the first clamping block 210, the mobile cantilever 400 and the third clamping block 240 is more stable.

[0048] In an alternative embodiment, the first clamping block 210 can be provided with a first threaded hole, the second clamping block 220 can be provided with a first locking hole, the third clamping block 240 can be provided with a second threaded hole, and the fourth clamping block 250 can be provided with a second locking hole. The first clamping assembly includes a first locking bolt 230, and the second clamping assembly includes a second locking bolt 260. In the first state, the first locking bolt 230 can be screwed through the first locking hole and the first threaded hole to clamp the first clamping block 210 and the second clamping block 220 to the base support shaft 100, and the second locking bolt 260 can be screwed through the second locking hole and the second threaded hole to clamp the third clamping block 240 and the fourth clamping block 250 to the base support shaft 100. In the second state, the first locking bolt 230 is separated from the first threaded hole, and the second locking bolt 260 is relatively movable with the second threaded hole to separate the third clamping block 240 and the fourth clamping block 250. Here, when the third clamping block 240 and the fourth clamping block 250 are separated, the third clamping block 240 and the fourth clamping block 250 can be connected by the second locking bolt 260, but not clamped to the base support shaft 100. Of course, the third clamping block 240 and the fourth clamping block 250 can also be directly separated.

[0049] The first clamping block 210 and the second clamping block 220 are connected by the first locking bolt 230, which can stably connect the first clamping block 210 and the second clamping block 220. The third clamping block 240 and the fourth clamping block 250 are connected by the second locking bolt 260, which can stably connect the third clamping block 240 and the fourth clamping block 250. The operation of the first locking bolt 230 and the second locking bolt 260 is relatively simple, and the structure is relatively simple, which can effectively improve the economy.

[0050] Further, the first threaded hole, the first locking hole, and the first locking bolt 230 are each provided in multiple numbers, and the multiple first threaded holes, the multiple first locking holes, and the multiple first locking bolts 230 are one-to-one matched. The second threaded hole, the second locking hole, and the second locking bolt 260 are each provided in multiple numbers, and the multiple second threaded holes, the multiple second locking holes, and the multiple second locking bolts 260 are one-to-one matched. By providing the first threaded hole, the first locking hole, and the first locking bolt 230 in multiple numbers, the connection of the first clamping block 210 and the second clamping block 220 is more stable, and the connection stress is more uniform. By providing the second threaded hole, the second locking hole, and the second locking bolt 260 in multiple numbers, the connection of the third clamping block 240 and the fourth clamping block 250 is more stable, and the connection stress is more uniform.

[0051] In an alternative embodiment, the base lifting mechanism can comprise a driving mechanism, the driving mechanism can be drivingly connected with the lifting device, and the driving mechanism can be used to drive the lifting device to move so as to drive the base support shaft 100 to be lifted by the holding device. By arranging the driving mechanism, the lifting device can drive the movable cantilever 400 to move under the driving action of the driving mechanism, so that the lifting device can drive the base support shaft 100 to be lifted by the holding device.

[0052] The application also discloses a semiconductor process equipment, and the disclosed semiconductor process equipment comprises a process chamber. A base for carrying a wafer is arranged in the process chamber. The disclosed semiconductor process equipment also comprises the base lifting mechanism disclosed in any of the above embodiments, and the base lifting mechanism is used to drive the base to be lifted.

[0053] In an alternative embodiment, the semiconductor process equipment can comprise a bellows, the bellows can be sleeved outside the base support shaft 100, the bellows sleeved outside the base support shaft 100 can effectively protect the base support shaft 100, and meanwhile, the bellows can cooperate with the base support shaft 100 passing through the process chamber, so as to realize the sealing of the process chamber.

[0054] In the above embodiments, the differences between the embodiments are mainly described, and the optimization features different between the embodiments can be combined to form a more optimal embodiment as long as they are not contradictory. In view of the brevity of the writing, the details are not described here.

[0055] The embodiments of the application are described above in combination with the drawings, but the application is not limited to the above specific embodiments, and the above specific embodiments are only illustrative but not restrictive. Those skilled in the art can make many forms under the inspiration of the application without departing from the purpose of the application and the scope protected by the claims, and all the forms belong to the protection of the application.

Claims

1. A base lifting mechanism for semiconductor process equipment, characterized in that, Includes a base support shaft (100), a clamping device, a lifting device, and an electrical box (300), wherein: The clamping device includes a first clamping assembly, which includes a first clamping block (210) and a second clamping block (220). The lifting device includes a movable cantilever (400), which is connected to the first clamping block (210). The electrical box (300) is connected to the first clamping block (210) and is located on the side of the first clamping block (210) facing away from the movable cantilever (400). The electrical box (300), the movable cantilever (400), and the first clamping block (210) form an installation space (500). In the first state, the second clamping block (220) is inserted into the installation space (500), the first clamping block (210) and the second clamping block (220) are detachably connected, and the first clamping block (210) and the second clamping block (220) are connected to clamp the base support shaft (100), and the lifting device can drive the clamping device to drive the base support shaft (100) to rise and fall; In the second state, the second clamping block (220) can be removed from the mounting space (500) to separate from the first clamping block (210), so that the first clamping assembly can be separated from the base support shaft (100).

2. The base lifting mechanism according to claim 1, characterized in that, In the first state, the first clamping block (210) and the second clamping block (220) are detachably connected by the first locking bolt (230).

3. The base lifting mechanism according to claim 2, characterized in that, The electrical box (300) is provided with a threaded connector (310), which is located within the installation space (500). The threaded connector (310) includes a threaded rod and a nut connected to the first end of the threaded rod. The second end of the threaded rod is connected to the electrical box, and the nut is spaced apart from the electrical box. The second clamping block (220) has a strip hole (221) extending along its insertion direction. One end of the strip hole (221) is an open end, which is used for the threaded rod to pass through. In the first state, the threaded rod slides into the strip hole (221) through the open end, and the second clamping block (220) is inserted into the installation space (500) through the guide cooperation between the threaded rod and the strip hole (221). The second clamping block (220) is positioned between the nut and the electrical box (300). In the second state, the threaded rod is separated from the strip hole (221) so that the first clamping assembly is separable from the base support shaft (100).

4. The base lifting mechanism according to claim 1, characterized in that, The lifting device includes a movable cantilever (400), which is connected to the first clamping block (210), and the electrical box (300) is located on the side of the first clamping block (210) facing away from the movable cantilever (400). The clamping device further includes a second clamping assembly, which includes a third clamping block (240) and a fourth clamping block (250), wherein: In the first state, the third clamping block (240) and the fourth clamping block (250) are detachably connected, and the third clamping block (240) and the fourth clamping block (250) clamp the base support shaft (100), and the movable cantilever (400) is clamped between the first clamping component and the second clamping component; In the second state, the third clamping block (240) separates from the fourth clamping block (250).

5. The base lifting mechanism according to claim 4, characterized in that, The movable cantilever (400) is provided with a through-hole. The through-hole includes a first hole segment (410) and a second hole segment (420) arranged concentrically. The diameter of the first hole segment (410) is larger than the diameter of the second hole segment (420). The first hole segment (410) and the second hole segment (420) form a limiting step surface (430) at the connection. The movable cantilever (400) is connected to the first clamping block (210) through a connector (600). The connector (600) includes a connecting part (620) and an abutting part (610). The connecting part (620) passes through the through-hole and is connected to the first clamping block (210). The abutting part (610) is located in the first hole segment (410). In the first state, the abutting part (610) is away from the limiting step surface (430) and abuts against the third clamping block (240). In the second state, the abutment portion (610) is in contact with the limiting step surface (430) so that the first clamping block (210) is connected to the movable cantilever (400).

6. The base lifting mechanism according to claim 5, characterized in that, The connector (600) is fitted with an elastic element (700), which is elastically connected between the movable cantilever (400) and the first clamping block (210).

7. The base lifting mechanism according to claim 5, characterized in that, There are multiple connecting holes and multiple connecting parts (600), and the multiple connecting parts (600) are matched one-to-one with the multiple connecting holes.

8. The base lifting mechanism according to claim 4, characterized in that, The first clamping block (210) is provided with a first threaded hole, the second clamping block (220) is provided with a through first locking hole, the third clamping block (240) is provided with a second threaded hole, and the fourth clamping block (250) is provided with a through second locking hole. The first clamping assembly includes a first locking bolt (230), and the second clamping assembly includes a second locking bolt (260). In the first state, the first locking bolt (230) passes through the first locking hole and is threaded into the first threaded hole, so that the first clamping block (210) and the second clamping block (220) clamp the base support shaft (100), and the second locking bolt (260) passes through the second locking hole and is threaded into the second threaded hole, so that the third clamping block (240) and the fourth clamping block (250) clamp the base support shaft (100). In the second state, the first locking bolt (230) is separated from the first threaded hole, and the second locking bolt (260) and the second threaded hole can move relative to each other to separate the third clamping block (240) from the fourth clamping block (250).

9. The base lifting mechanism according to claim 8, characterized in that, There are multiple first threaded holes, multiple first locking holes, and multiple first locking bolts (230), and each of the multiple first threaded holes, multiple first locking holes, and multiple first locking bolts (230) corresponds to and is matched with the first threaded hole; There are multiple second threaded holes, multiple second locking holes and multiple second locking bolts (260), and each of the multiple second threaded holes, multiple second locking holes and multiple second locking bolts (260) corresponds to and cooperates with each other.

10. A semiconductor process apparatus, comprising a process chamber, wherein a base for supporting a wafer is disposed within the process chamber, characterized in that, It also includes a base lifting mechanism as described in any one of claims 1-9, the base lifting mechanism being used to drive the base to rise and fall.

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