Vertical Cavity Surface Emitting Laser (VCSEL) with Light Blocker

Abstract

The light source structure includes a vertical cavity surface emitting laser (VCSEL) device, the vertical cavity surface emitting laser (VCSEL) device having a top surface and at least one side surface substantially perpendicular to and adjacent to the top surface. The VCSEL device is configurable to output directionally emitted light through the top surface. The light source structure also includes a light blocking member, which surrounds at least a top portion of the VCSEL device and is separated from at least one side surface. The light blocking member is configured to receive spontaneous emission from the VCSEL device through at least one side surface.

Description

Technical Field

[0001] The present application relates generally to vertical cavity surface emitting lasers (VCSELs), and more particularly to VCSELs used in eye tracking systems. Background Art

[0002] Vertical Cavity Surface Emitting Lasers (VCSELs) are semiconductor laser diodes that provide light emission in a direction perpendicular to their respective top surfaces. Due to the directionality of the laser emission, VCSELs can be used as light sources for photosensitive systems. However, challenges arise when the VCSELs and photosensors are positioned close to each other. In addition to the directional laser emission, VCSELs tend to produce spontaneous emissions in other directions. The spontaneous emission received by the photosensor increases the noise, thereby reducing the accuracy of the detection. For example, in an eye tracking device, the spontaneous emission received by the photosensor reduces the accuracy of detecting the user's eye position.

[0003] Therefore, there is a need for a compact-sized VCSEL light source structure with reduced spontaneous emission. Summary of the invention

[0004] The above-mentioned deficiencies and other problems associated with VCSELs are reduced or eliminated by the disclosed light source structure, which includes a VCSEL and a light blocking member for blocking spontaneous emission output by the VCSEL.

[0005] According to some embodiments, the light source structure includes a vertical cavity surface emitting laser (VCSEL) device, the VCSEL device having a top surface and at least one side surface substantially perpendicular to and adjacent to the top surface. The VCSEL device is configurable to output directionally emitted light through the top surface. The light source structure also includes a light blocking member surrounding at least a top portion of the VCSEL device and separated from at least one side surface. The light blocking member is configured to receive spontaneous emission from the VCSEL device through at least one side surface.

[0006] In some embodiments, the light source structure may have at least one dimension ranging from 100 microns to 200 microns.

[0007] In some embodiments, the thickness of the light blocking member may be in a range of two microns to ten microns.

[0008] In some embodiments, the top portion of the VCSEL device and the light blocking member can be disposed on the substrate and have approximately the same height from the surface of the substrate.

[0009] In some embodiments, a light block may be formed on the mesa structure around a top portion of the VCSEL device and extend to cover at least a top surface and edges of the mesa structure.

[0010] In some embodiments, the light blocking member may include: a passivation layer over the mesa structure and extending onto at least one side surface of the VCSEL device; and a metal layer over the passivation layer.

[0011] In some embodiments, the metal layer may extend to and cover an outer portion of the top surface of the VCSEL device.

[0012] In some embodiments, the top portion of the VCSEL device may include a substrate, and wherein the light blocking member also surrounds the substrate.

[0013] In some embodiments, the VCSEL device may be disposed on a first surface of the substrate, and the metal layer is disposed on a second surface of the substrate opposite the first surface.

[0014] In some embodiments, the light blocking member may include a black matrix material.

[0015] In some embodiments, the light blocking member may include metal.

[0016] According to some embodiments, a method of manufacturing a light source structure includes: manufacturing a vertical cavity surface emitting laser (VCSEL) device on a substrate. The VCSEL device has a top surface and at least one side surface substantially perpendicular to and adjacent to the top surface. The VCSEL device is configurable to output directionally emitted light through the top surface. The method also includes forming a light blocking member surrounding at least a top portion of the VCSEL device and separated from at least one side surface. The light blocking member is configured to receive spontaneous emission from the VCSEL device through at least one side surface.

[0017] In some embodiments, forming a light blocker may include: depositing a sacrificial layer over the VCSEL device and the top surface of the substrate; removing a portion of the sacrificial layer on the top surface of the substrate; depositing a light blocker layer over the substrate to form the light blocker; and removing a portion of the sacrificial layer on the VCSEL device.

[0018] In some embodiments, forming a light blocking member may include: forming a mesa structure around a top portion of the VCSEL device, the mesa structure separated from at least one side surface by a cavity; oxidizing the mesa structure and exposed surfaces of the VCSEL device; forming a passivation layer over the mesa structure, the passivation layer extending to cover a top surface of the mesa structure, an edge of the mesa structure facing the cavity, a bottom surface of the cavity, and at least one side surface of the VCSEL device; and forming a metal layer over the passivation layer and an outer portion of the top surface of the VCSEL device.

[0019] In some embodiments, the substrate may have a top surface parallel to the top surface of the VCSEL device and at least one side surface substantially perpendicular to the top surface of the VCSEL device, and wherein forming the light blocking member comprises: coating the exposed surface of the VCSEL device and at least one side surface of the substrate with a light blocking material; and removing a portion of the light blocking material from a middle portion of the top surface of the substrate adjacent to the VCSEL device.

[0020] In some embodiments, the light blocking material may be a black matrix material, and wherein removing portions of the light blocking material is accomplished using photolithography.

[0021] In some embodiments, coating the exposed surface of the VCSEL device and at least one side surface of the substrate with the black matrix material may include inkjet printing.

[0022] According to some embodiments, an eye tracking device includes a light source structure configured to project light to an eye of a user and a photodetector configured to receive light projected by the light source structure and reflected from the eye of the user. The light source structure includes a vertical cavity surface emitting laser (VCSEL) device, the VCSEL device having a top surface and at least one side surface substantially perpendicular to and adjacent to the top surface. The VCSEL device is configurable to output directionally emitted light through the top surface. The light source structure also includes a light blocking member surrounding at least a top portion of the VCSEL device and separated from at least one side surface. The light blocking member is configured to prevent spontaneous emission from the VCSEL device from reaching the photodetector through at least one side surface.

[0023] In some embodiments, the light source structures and the photodetectors may be formed on the same substrate.

[0024] Thus, a VCSEL device according to some embodiments can be integrated with a photodetector and can be fabricated, for example, on a common substrate with the photodetector, resulting in a VCSEL-photodetector combination having a very compact size and suitable for use in an eye tracking system used in a head-mounted display device. In some embodiments, the VCSEL and the photodetector are positioned very close to each other (e.g., side by side) and the photodetector receives no significant spontaneous emission through the side surfaces of the VCSEL, except for directional light reflected from a detection object (e.g., a user's eye).

[0025] According to some embodiments, a head-mounted display device includes a display, an optical component optically coupled to the display, and the above-mentioned eye tracking device arranged near the display and the optical component. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] For a better understanding of the various embodiments described, reference should be made to the following description of the embodiments in conjunction with the following drawings, wherein like reference numerals represent corresponding parts throughout the drawings. Unless otherwise specified, the drawings are not drawn to scale.

[0027] Components of the present invention shown with dotted lines in the following drawings are optional components.

[0028] Figure 1 is a perspective view of a display device according to some embodiments.

[0029] Figure 2 is a block diagram of a system including a display device according to some embodiments.

[0030] Figure 3A is an isometric view of a display device according to some embodiments.

[0031] Figure 3B is a schematic diagram illustrating an eye tracking device in accordance with some embodiments.

[0032] Figure 4A is a schematic diagram illustrating a cross-sectional view of an exemplary vertical cavity surface emitting laser (VCSEL) device outputting stimulated directional emission and spontaneous emission according to some embodiments.

[0033] Figure 4B-Figure 4F is a diagram illustrating the manufacture of Figure 4A Schematic diagram of the method of the VCSEL device.

[0034] Figure 5A is a schematic diagram illustrating a cross-sectional view of a light source structure according to some embodiments.

[0035] Figure 5B-5E is a diagram illustrating the manufacture of Figure 5A Schematic diagram of the method of the light source structure.

[0036] Fig. 5F is a diagram illustrating an embodiment of the present invention according to some embodiments Figure 5A Schematic diagram of a top view of a light source structure.

[0037] Fig. 6A is a schematic diagram illustrating a cross-sectional view of a light source structure according to some embodiments.

[0038] Figure 6B-Figure 6E is a diagram illustrating the manufacture of Fig. 6A Schematic diagram of the method of the light source structure.

[0039] Fig. 7A is a schematic diagram illustrating a cross-sectional view of a light source structure according to some embodiments.

[0040] Figure 7B-7D is a diagram illustrating the manufacture of Fig. 7A Schematic diagram of the method of the light source structure.

[0041] Fig. 8A is a schematic diagram illustrating a cross-sectional view of a light source structure according to some embodiments.

[0042] Figure 8B-Figure 8E is a diagram illustrating the manufacture of Fig. 8A Schematic diagram of the method of the light source structure.

[0043] Fig. 9 is a schematic diagram illustrating a cross-sectional view of a light source structure according to some embodiments. DETAILED DESCRIPTION

[0044] The light source structure of the present disclosure includes a vertical cavity surface emitting laser (VCSEL) configured to output directional stimulated emission through the top surface of the VCSEL and a light blocker VCSEL configured to receive spontaneous emission through the side surface of the VCSEL. The light blocker surrounds the VCSEL and is configured so that the light blocker does not significantly increase the size of the VCSEL. Due to its compact size and reduced spontaneous emission output, such a light source device is desirable for an eye tracking device used in a head-mounted display device.

[0045] Reference will now be made to embodiments, examples of which are illustrated in the accompanying drawings. In the following description, numerous specific details are set forth to provide an understanding of the various embodiments described. However, it will be apparent to one of ordinary skill in the art that the various embodiments described may be practiced without these specific details. In other cases, well-known methods, processes, components, circuits, and networks are not described in detail to avoid unnecessarily obscuring aspects of the embodiments.

[0046] It will also be understood that although the terms first, second, etc. are used in some cases herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, without departing from the scope of the various embodiments described, a first surface may be referred to as a second surface, and similarly, a second surface may be referred to as a first surface. Both the first surface and the second surface are surfaces, but not the same surface.

[0047] The terms used in the description of the various embodiments described herein are only used for the purpose of describing specific embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, as used in the description of the various described embodiments and the appended claims, the singular forms "one", "an" and "said" are also intended to include plural forms. It should also be understood that the term "and / or" used herein refers to and covers any and all possible combinations of one or more associated listed items. It will be further understood that when used in this specification, the terms "include", "comprise", "include" and / or "contain" specify the presence of the features, wholes, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, parts and / or their groups. The term "exemplary" used herein means "used as an example, instance or illustration", rather than "representing the best of the same kind".

[0048] Figure 1 A perspective view of a display device 100 according to some embodiments is shown. In some embodiments, the display device 100 is configured to be worn on the user's head (e.g., by having a display device such as Figure 1 The display device 100 may be in the form of goggles or glasses as shown, or may be included as part of a helmet to be worn by a user. When the display device 100 is configured to be worn on the head of a user, the display device 100 is referred to as a head-mounted display. Alternatively, the display device 100 is configured to be placed near one or more eyes of the user at a fixed position, rather than being head-mounted (e.g., the display device 100 is mounted in a vehicle such as a car or airplane for placement in front of one or more eyes of the user). Figure 1 As shown, the display device 100 includes a display 110. The display 110 is configured to present visual content (e.g., augmented reality content, virtual reality content, mixed reality content, or any combination thereof) to a user. In some embodiments, the display 110 is a clip-on display. The clip-on display is configured to be coupled to (e.g., clamped on) a frame of the headset (e.g., a frame of goggles) for displaying visual content. The clip-on display is also configured to be decoupled from the frame of the headset.

[0049] In some embodiments, the display device 100 includes the Figure 2 In some embodiments, the display device 100 includes Figure 2 Additional components not shown.

[0050] Figure 2 is a block diagram of a system 200 according to some embodiments. Figure 2 The system 200 shown in FIG. 1 includes display devices 205 (corresponding to Figure 1The display device 100 shown in FIG. 2 ), the imaging device 235 and the input interface 240. Figure 2 An example of a system 200 is shown, the system 200 includes a display device 205, an imaging device 235 and an input interface 240, and in other embodiments, any number of these components may be included in the system 200. For example, there may be multiple display devices 205, each display device 205 has an associated input interface 240 and is monitored by one or more imaging devices 235, wherein each display device 205, input interface 240 and imaging device 235 communicate with the console 210. In an alternative configuration, different and / or additional components may be included in the system 200. For example, in some embodiments, the console 210 is connected to the system 200 via a network (e.g., the Internet) or is self-contained as a part of the display device 205 (e.g., physically located inside the display device 205). In some embodiments, the display device 205 is used to create a mixed reality by adding a view of a real environment. Therefore, the display device 205 and the system 200 described herein can provide augmented reality, virtual reality and mixed reality.

[0051] In some embodiments, Figure 1 As shown, display device 205 is a head mounted display that presents media to the user. The example of the media presented by display device 205 includes one or more images, videos, audio or some combination thereof. In some embodiments, audio is presented via an external device (e.g., speaker and / or earphone) that receives audio information from display device 205, console 210 or both and presents audio data based on the audio information. In some embodiments, display device 205 immerses the user in an enhanced environment.

[0052] In some embodiments, the display device 205 also acts as an augmented reality (AR) headset. In these embodiments, the display device 205 uses computer-generated elements (e.g., images, videos, sounds, etc.) to enhance the view of the physical, real-world environment. In addition, in some embodiments, the display device 205 can cycle between different types of operations. Therefore, the display device 205 operates as a virtual reality (VR) device, an augmented reality (AR) device, as glasses or some combination thereof (e.g., glasses without optical correction, glasses with optical correction for the user, sunglasses or some combination thereof) based on instructions from the application engine 255.

[0053] The display device 205 includes an electronic display 215, one or more processors 216, an eye tracking module 217, an adjustment module 218, one or more positioners 220, one or more position sensors 225, one or more position cameras 222, a memory 228, an inertial measurement unit (IMU) 230, one or more optical components 260, or a subset or superset thereof (e.g., a display device 205 having an electronic display 215, an optical component 260, and not having any other listed components). Some embodiments of the display device 205 have modules different from those described herein. Similarly, functions can be distributed between modules in a manner different from that described herein.

[0054] One or more processors 216 (e.g., processing units or cores) execute instructions stored in memory 228. Memory 228 includes high-speed random access memory, such as DRAM, SRAM, DDR RAM, or other random access solid-state memory devices; and may include non-volatile memory, such as one or more magnetic disk storage devices, optical disk storage devices, flash memory devices, or other non-volatile solid-state storage devices. Memory 228, or alternatively (multiple) non-volatile memory devices within memory 228, includes non-transitory computer-readable storage media. In some embodiments, memory 228 or a computer-readable storage medium of memory 228 stores programs, modules, and data structures and / or instructions for displaying one or more images on electronic display 215.

[0055] The electronic display 215 displays images to the user based on data received from the console 210 and / or the processor(s) 216. In various embodiments, the electronic display 215 may include a single adjustable display element or multiple adjustable display elements (e.g., one display for each eye of the user). In some embodiments, the electronic display 215 is configured to project images to the user through one or more optical components 260.

[0056] In some embodiments, the display element includes one or more light-emitting devices and a corresponding array of spatial light modulators. The spatial light modulator is an array of electro-optical pixels, photoelectric pixels, some other device arrays that dynamically adjust the amount of light transmitted by each device, or some combination thereof. These pixels are located behind one or more lenses. In some embodiments, the spatial light modulator is a liquid crystal-based pixel array in an LCD (liquid crystal display). Examples of light-emitting devices include: organic light-emitting diodes, active matrix organic light-emitting diodes, light-emitting diodes, some type of device that can be placed in a flexible display, or some combination thereof. The light-emitting device includes a device that can show visible light (e.g., red, green, blue, etc.) for image generation. The spatial light modulator is configured to selectively attenuate individual light-emitting devices, groups of light-emitting devices, or some combination thereof. Alternatively, when the light-emitting device is configured to selectively attenuate individual light-emitting devices and / or groups of light-emitting devices, the display element includes an array of such light-emitting devices without a separate emission intensity array.

[0057] One or more optical components in one or more optical assemblies 260 direct light from the array of light emitting devices (optionally via an emission intensity array) to a location within each eye box. The eye box is the area occupied by the eyes of a user of display device 205 (e.g., a user wearing display device 205) who is viewing an image from display device 205. In some embodiments, the eye box is represented as 10x10 square millimeters. In some embodiments, the one or more optical components include one or more coatings, such as an anti-reflective coating.

[0058] In some embodiments, the display element includes an infrared (IR) detector array that detects IR light reflected from the viewing user's retina, corneal surface, eye lens, or some combination. The IR detector array includes an IR sensor or multiple IR sensors, each IR sensor corresponding to a different position of the viewing user's eye pupil. In alternative embodiments, other eye tracking systems may also be used.

[0059] The eye tracking module 217 determines the location of each pupil of the user's eyes. In some embodiments, the eye tracking module 217 instructs the electronic display 215 to illuminate the eye boxes with IR light (eg, via an IR emitting device in the display element).

[0060] A portion of the emitted IR light will pass through the pupil of the observing user and reflect from the retina toward the IR detector array, which is used to determine the position of the pupil. Alternatively, reflections from the surface of the eye are also used to determine the position of the pupil. The IR detector array scans the reflections and identifies which IR emitting devices are active when the reflections are detected. The eye tracking module 217 can use the tracking lookup table and the identified IR emitting devices to determine the pupil position of each eye. The tracking lookup table maps the signals received on the IR detector array to the positions in each eye frame (corresponding to the pupil positions). In some embodiments, the tracking lookup table is generated via a calibration procedure (e.g., the user views various known reference points in the image, and the eye tracking module 217 maps the position of the user's pupil to the corresponding signals received on the IR tracking array while viewing the reference points). As described above, in some embodiments, the system 200 can use other eye tracking systems that are different from the embedded IR system described herein.

[0061] The adjustment module 218 generates an image frame based on the determined pupil position. In some embodiments, this will send discrete images to the display, which tiles the sub-images together so that a coherent stitched image will appear on the back of the retina. The adjustment module 218 adjusts the output of the electronic display 215 (i.e., the generated image frame) based on the detected pupil position. The adjustment module 218 instructs portions of the electronic display 215 to pass image light to the determined pupil position. In some embodiments, the adjustment module 218 also instructs the electronic display not to pass image light to locations other than the determined pupil position. For example, the adjustment module 218 can block and / or stop light emitting devices whose image light falls outside the determined pupil position, allow other light emitting devices to emit image light that falls within the determined pupil position, translate and / or rotate one or more display elements, dynamically adjust the curvature and / or refractive power of one or more active lenses in a lens (e.g., microlens) array, or some combination thereof.

[0062] The optional locators 220 are objects on the display device 205 that are located in specific locations relative to each other and relative to specific reference points on the display device 205. The locators 220 can be light emitting diodes (LEDs), corner cube reflectors, reflective markers, a type of light source that contrasts with the environment in which the display device 205 operates, or some combination thereof. In embodiments where the locators 220 are active (i.e., LEDs or other types of light emitting devices), the locators 220 can emit light in the visible band (e.g., about 400 nm to 750 nm), the infrared band (e.g., about 750 nm to 1 mm), the ultraviolet band (about 100 nm to 400 nm), other parts of the electromagnetic spectrum, or some combination thereof.

[0063] In some embodiments, the locator 220 is located below an outer surface of the display device 205 that is transparent to the wavelength of light emitted or reflected by the locator 220 or thin enough to not substantially attenuate the light emitted or reflected by the locator 220. Additionally, in some embodiments, the outer surface or other portion of the display device 205 is opaque in the visible band of light wavelengths. Thus, the locator 220 can emit light in the IR band under an outer surface that is transparent in the IR band but opaque in the visible band.

[0064] The IMU 230 is an electronic device that generates calibration data based on measurement signals received from one or more position sensors 225. The position sensor 225 generates one or more measurement signals in response to the movement of the display device 205. Examples of the position sensor 225 include one or more accelerometers, one or more gyroscopes, one or more magnetometers, another suitable type of sensor that detects movement, a sensor for error correction of the IMU 230, or some combination thereof. The position sensor 225 may be located outside the IMU 230, inside the IMU 230, or some combination thereof.

[0065] Based on one or more measurement signals from one or more position sensors 225, the IMU 230 generates first calibration data indicating an estimated position of the display device 205 relative to an initial position of the display device 205. For example, the position sensor 225 includes a plurality of accelerometers for measuring translational motion (forward / backward, up / down, left / right) and a plurality of gyroscopes for measuring rotational motion (e.g., pitch, yaw, roll). In some embodiments, the IMU 230 samples the measurement signals quickly and calculates the estimated position of the display device 205 based on the sampled data. For example, the IMU 230 integrates the measurement signals received from the accelerometers over time to estimate the velocity vector and integrates the velocity vector over time to determine the estimated position of a reference point on the display device 205. Alternatively, the IMU 230 provides the sampled measurement signals to the console 210, and the measurement signals determine the first calibration data. The reference point is a point that can be used to describe the position of the display device 205. Although a reference point may generally be defined as a point in space; however, in practice the reference point is defined as a point within the display device 205 (eg, the center of the IMU 230).

[0066] In some embodiments, the IMU 230 receives one or more calibration parameters from the console 210. As discussed further below, the one or more calibration parameters are used to maintain tracking of the display device 205. Based on the received calibration parameters, the IMU 230 can adjust one or more IMU parameters (e.g., sampling rate). In some embodiments, certain calibration parameters cause the IMU 230 to update the initial position of the reference point to correspond to the next calibration position of the reference point. Updating the initial position of the reference point to the next calibration position of the reference point helps to reduce the cumulative error associated with the determined estimated position. The cumulative error (also referred to as drift error) causes the estimated position of the reference point to "drift" away from the actual position of the reference point over time.

[0067] The imaging device 235 generates calibration data based on the calibration parameters received from the console 210. The calibration data includes one or more images showing the viewing position of the locator 220 that can be detected by the imaging device 235. In some embodiments, the imaging device 235 includes one or more still cameras, one or more video cameras, any other device capable of capturing images, or some combination thereof, including one or more locators 220. Additionally, the imaging device 235 may include one or more filters (e.g., used to increase the signal-to-noise ratio). The imaging device 235 is configured to optionally detect light emitted or reflected from the locator 220 in the field of view of the imaging device 235. In embodiments where the locator 220 includes a passive element (e.g., a retroreflector), the imaging device 235 may include a light source that illuminates some or all of the locators 220, and the locators 220 retroreflect the light toward the light source in the imaging device 235. Second calibration data is communicated from imaging device 235 to console 210, and imaging device 235 receives one or more calibration parameters from console 210 to adjust one or more imaging parameters (eg, focal length, focus, frame rate, ISO, sensor temperature, shutter speed, aperture, etc.).

[0068] In some embodiments, display device 205 includes one or more optical components 260, which may include a single optical component 260 or multiple optical components 260 (e.g., an optical component 260 for each eye of a user). In some embodiments, one or more optical components 260 receive image light of a computer-generated image from electronic display 215 and direct the image light to one or more eyes of the user. The computer-generated image includes a static image, an animated image, and / or a combination thereof. The computer-generated image includes an object that appears to be a two-dimensional and / or three-dimensional object.

[0069] In some embodiments, the electronic display 215 projects a computer-generated image onto one or more reflective elements (not shown), and the one or more optical components 260 receive image light from the one or more reflective elements and direct the image light to the user's (multiple) eyes. In some embodiments, the one or more reflective elements are partially transparent (e.g., one or more reflective elements have a transparency of at least 15%, 20%, 25%, 30%, 35%, 40%, 45%, or 50%), thereby allowing ambient light to be transmitted. In such embodiments, the computer-generated image projected by the electronic display 215 is superimposed with the transmitted ambient light (e.g., the transmitted ambient image) to provide an augmented reality image.

[0070] The input interface 240 is a device that allows a user to send an action request to the console 210. An action request is a request to perform a specific action. For example, an action request may be to start or end an application or to perform a specific action within an application. The input interface 240 may include one or more input devices. Example input devices include: a keyboard, a mouse, a game controller, data from brain signals, data from other parts of the human body, or any other suitable device for receiving an action request and communicating the received action request to the console 210. The action request received by the input interface 240 is communicated to the console 210, and the console 210 performs an action corresponding to the action request. In some embodiments, the input interface 240 may provide tactile feedback to the user according to an instruction received from the console 210. For example, when an action request is received, tactile feedback is provided, or the console 210 communicates an instruction to the input interface 240 so that when the console 210 performs an action, the input interface 240 generates tactile feedback.

[0071] The console 210 provides media to the display device 205 for presentation to the user based on information received from one or more of the imaging device 235, the display device 205, and the input interface 240. Figure 2 In the example shown, the console 210 includes an application store 245, a tracking module 250, and an application engine 255. Some embodiments of the console 210 have Figure 2 Similarly, the functionality described further herein may be distributed among the components of console 210 in a manner different than that described here.

[0072] When the application store 245 is included in the console 210, the application store 245 stores one or more applications executed by the console 210. An application is a set of instructions that, when executed by a processor, is used to generate content for presentation to a user. The content generated by the processor based on the application may be responsive to input received from the user via movement of the display device 205 or the input interface 240. Examples of applications include: gaming applications, conferencing applications, video playback applications, or other suitable applications.

[0073] When the tracking module 250 is included in the console 210, the tracking module 250 uses one or more calibration parameters to calibrate the system 200 and can adjust the one or more calibration parameters to reduce errors in determining the position of the display device 205. For example, the tracking module 250 adjusts the focus of the imaging device 235 to obtain a more accurate position of the localizers observed on the display device 205. In addition, the calibration performed by the tracking module 250 also takes into account information received from the IMU 230. Additionally, if tracking of the display device 205 is lost (e.g., the imaging device 235 loses sight of at least a threshold number of localizers 220), the tracking module 250 recalibrates some or all of the system 200.

[0074] In some embodiments, the tracking module 250 uses the second calibration data from the imaging device 235 to track the movement of the display device 205. For example, the tracking module 250 uses an observation locator to determine the position of a reference point of the display device 205 based on the second calibration data and a model of the display device 205. In some embodiments, the tracking module 250 also uses position information from the first calibration data to determine the position of the reference point of the display device 205. Additionally, in some embodiments, the tracking module 250 can use portions of the first calibration data, the second calibration data, or some combination thereof to predict a future position of the display device 205. The tracking module 250 provides the estimated or predicted future position of the display device 205 to the application engine 255.

[0075] The application engine 255 executes an application within the system 200 and receives position information, acceleration information, velocity information, predicted future position, or some combination thereof of the display device 205 from the tracking module 250. Based on the received information, the application engine 255 determines the content provided to the display device 205 for presentation to the user. For example, if the received information indicates that the user has looked to the left, the application engine 255 generates content for the display device 205 that reflects the user's movement in the augmented environment. Additionally, the application engine 255 performs an action within an application executed on the console 210 in response to an action request received from the input interface 240 and provides feedback to the user that the action has been performed. The feedback provided may be visual or auditory feedback via the display device 205 or tactile feedback via the input interface 240.

[0076] Figure 3A is an isometric view of a display device 300 according to some embodiments, which corresponds to display device 100 (see Figure 1 ). In some embodiments, display device 300 includes display 310 (e.g., an array of light emitting devices), an optical assembly (e.g., optical assembly 260) having one or more optical components 330 (e.g., one or more lenses), and an eye tracking device 360 ​​(e.g., an eye tracking device included in or in communication with eye tracking module 217).

[0077] In some embodiments, display 310 emits image light. Display 310 can be, for example, an LED array, a microLED array, an OLED array, or some combination thereof. Display 310 includes a light emitting device 320 that emits visible light.

[0078] In some embodiments, the display device 300 includes an emission intensity array that is configured to selectively attenuate light emitted from the display 310. In some embodiments, the emission intensity array is composed of a plurality of liquid crystal cells or pixels, a group of light-emitting devices, or some combination thereof. Each liquid crystal cell or, in some embodiments, a group of liquid crystal cells is addressable to have a specific attenuation level. For example, at a given time, some liquid crystal cells may be set to no attenuation, while other liquid crystal cells may be set to maximum attenuation. In this way, the emission intensity array is able to control which portion of the image light emitted from the display 310 is passed to one or more optical components 330. In some embodiments, the display device 300 uses the emission intensity array to facilitate providing image light to the location of the pupil 350 of the user's eye 340, and to minimize the amount of image light provided to other areas in the eye box.

[0079] In some embodiments, display 310 and the emission intensity array constitute a display element. Alternatively, the display element includes display 310 without the emission intensity array (e.g., when display 310 includes individually adjustable pixels). In some embodiments, in response to the determined position of pupil 350, the display element adjusts the emitted image light so that light output by the display element is refracted by one or more optical components 330 toward the determined position of pupil 350, rather than toward another assumed position.

[0080] In some embodiments, display device 300 includes one or more broadband sources (eg, one or more white light LEDs) coupled with a plurality of color filters in addition to or in lieu of display 310 .

[0081] One or more optical components 330 receive image light (or modified image light, such as attenuated light) from display 310 and direct the image light to a detected or assumed location of pupil 350 of user eye 340. In some embodiments, the one or more optical components include one or more optical assemblies 260.

[0082] Eye tracking device 360 ​​includes a light source structure 362 configured to output light 363-1 (e.g., infrared (IR) light) toward eye 340 and a photodetector 364 configured to receive light 363-2 that has been reflected from the retina of eye 340, the cornea of ​​eye 340, the lens of eye 340, and / or other parts of eye 340. In some embodiments, eye tracking device 360 ​​is disposed proximate to an optical assembly (e.g., optical assembly 260) of display 310 and / or specifically one or more optical components 330. In some embodiments, eye tracking device 360 ​​is coupled to display 310 and / or one or more optical components 330. In some embodiments, eye tracking device 360 ​​is integrated into display 310 and / or integrated with one or more optical components 330. Photodetector 364 includes a single IR sensor or multiple IR sensitive detectors (e.g., photodiodes).

[0083] Figure 3B is a schematic diagram illustrating an eye tracking device 360 ​​according to some embodiments. Eye tracking device 360 ​​is configured to determine the position of the eyes of a user of a head mounted display device (e.g., Figure 3A The pupil 350 of the eye 340 in FIG. 3 is shown in FIG. 3 ). The eye tracking device 360 ​​is included in the Figure 2The eye tracking module 217 described above is in or in communication with the eye tracking module 217. As described above, the eye tracking device 360 ​​includes a light source structure 362 configured to project light (e.g., light 363-1) toward an eye of a user (e.g., eye 340). Light 363-1 is in the IR range and is therefore not visible to the user. The eye tracking device 360 ​​also includes a photodetector 364 configured to receive light reflected from the user's eye (e.g., light 363-2). In some embodiments, the photodetector 364 includes a single IR sensor or multiple IR sensors (e.g., a photodiode or other IR sensitive detector). As shown, the light source structure 362 and the photodetector 364 are integrated to form a single unit. In some embodiments, the eye tracking device 360 ​​includes a housing 366 that partially surrounds the light source structure 362 and the photodetector 364. In some embodiments, the light source structure 362 and the photodetector 364 are formed on separate substrates positioned adjacent to each other (e.g., formed by Figure 3B In some embodiments, light source structures 363 and photodetector 364 are formed on a common substrate (eg, substrates 368-1 and 368-2 are components or portions of a common uniform substrate).

[0084] Figure 4A 4 is a schematic diagram illustrating a cross-sectional view of a vertical cavity surface emitting laser (VCSEL) 400 that outputs stimulated directional emission and spontaneous emission according to some embodiments. VCSEL 400 includes a substrate 402, a top portion 401 of VCSEL 400 disposed on substrate 402 (e.g., a light emitting portion of VCSEL 400), two or more contacts (e.g., top contact 412 and bottom contact 414), and an optional wall layer 408.

[0085] The top portion 401 includes a pair of distributed Bragg reflectors (DBRs) 404 (e.g., n-type DBRs) and 405 (e.g., p-type DBRs) and an active layer 406 sandwiched between the DBRs 404 and 405. The DBRs 404 and 405 include doped (e.g., doped to p-type and n-type) semiconductor materials (e.g., gallium arsenide (GaAs) and / or aluminum gallium arsenide (Al x Ga (1-x) As). In some embodiments, DBRs 404 and 405 each include Al2O3 layers having different aluminum concentrations. x Ga (1-x) The active layer 406 includes one or more quantum wells and, in some embodiments, one or more capping layers. The active layer 406 includes an undoped semiconductor material (e.g., undoped GaAs, Al x Ga (1-x)As, indium gallium arsenide (InGaAs), or gallium nitride (GaN). For example, in some embodiments, DBRs 404 and 405 include n- and p-doped Al x Ga (1-x) As and the active layer 406 includes undoped Al x Ga (1-x) As.

[0086] DBR 404 and 405 are arranged on substrate 402 so that the reflector is parallel to surface 402-1 of substrate 402. Substrate 402 is made of semiconductor material (e.g., GaAs, silicon or sapphire). Contacts 412 and 414 are made of metal (e.g., gold, silver, copper, aluminum, chromium, tungsten or any alloy thereof). As shown in the figure, in some embodiments, top 401 of VCSEL 400 is arranged on surface 402-1 of substrate 402 and bottom contact 414 (e.g., n-type contact) is arranged on second surface 402-2 of substrate 402 opposite to first surface 402-1. Top contact 412 (e.g., p-type contact) is positioned to contact top surface 400-1 of VCSEL 400. In some embodiments, contact 414 and / or contact 412 can be positioned differently. For example, contact 414 and / or contact 412 can be arranged adjacent to different layers of VCSEL 400.

[0087] In some embodiments, VCSEL 400 further includes a wall layer 408 surrounding a top portion 401 of VCSEL 400, the wall layer 408 including a pair of DBRs 404 and 405 and an active layer 406 on substrate 402. In some embodiments, wall layer 408 includes the same material as substrate 402 or the same material as in DBRs 404 and 405 and / or active layer 406 (e.g., GaAs or Al). x Ga (1-x) As or a combination thereof).

[0088] The top portion 401 of the VCSEL 400 has a top surface 400-1 and a side surface 400-3. The substrate 402 has a surface 400-2 opposite to the top surface 400-1. The side surface 400-3 is substantially perpendicular to and adjacent to the top surface 400-1. In some embodiments, the top surface 400-1 of the VCSEL 400 has a circular shape (e.g., as described below with respect to Fig. 5FIn some embodiments, when the VCSEL 400 further includes a wall layer 408, a top surface 400-1 and a top surface 400-5 of the wall layer 408 together form a top surface of the VCSEL 400. In some embodiments, a side surface 400-4 of the substrate 402 and a side surface 400-6 of the wall layer 408 together form a side surface of the VCSEL 400.

[0089] The VCSEL 400 is configured to output a signal through the top surface 400-1. Figure 4A In addition, VCSEL 400 may output spontaneous emission of light through side surface 400-3. The spontaneous emission intensity of light may be, for example, about 1% of the stimulated directional emission intensity of light. Figure 3A-3B In the eye tracking device 360 ​​depicted in FIG. 1 , spontaneous emission of light emitted through the side surface 400-3, indicated by arrow 418, may be detected by the photodetector 364. The spontaneous emission thus increases the baseline light intensity (e.g., noise) detected by the photodetector 364, thereby reducing the intensity of the light emitted by the side surface 400-3, as indicated by arrow 418. Figure 3A The signal-to-noise ratio for detecting light 363-2 reflected from eye 340 is shown. Therefore, there is a need for a light source structure with reduced or negligible spontaneous emission received by the photodetector without significantly increasing the distance between the VCSEL and the photodetector and the overall size of the eye tracking device 360.

[0090] Figure 4A The VCSEL 400 in FIG. 4 is an exemplary configuration of a VCSEL. It should be understood that a VCSEL used in accordance with some embodiments may have any configuration or structure known in the art.

[0091] Figure 4B-Figure 4F 4 is a schematic diagram illustrating a method of manufacturing a VCSEL 400 on a substrate 402 according to some embodiments. Figure 4B In the embodiment of the present invention, a substrate 402 (e.g., GaAs, silicon, or sapphire GaAs substrate) is provided. In some embodiments, GaAs is an ideal material for substrate 402 because GaAs facilitates the addition of additional layers of GaAs or GaAs derivatives (such as Al for DBR 404 and 405 and active layer 406). x Ga (1-x) As doped and undoped layers).

[0092] exist Figure 4CIn the embodiment, the DBR layer 404-1, the active layer 406-1 and the DBR layer 405-1 are deposited on the surface 402-1 of the substrate 402 using any suitable deposition process known in the art, such as molecular beam epitaxy, metal organic chemical vapor deposition (MOCVD) or chemical beam epitaxy (CBE). In some embodiments, the deposition of the DBR layer 404-1 includes depositing a plurality of semiconductor material epitaxial layers (e.g., GaAs and Al) having n-type doping on the surface 402-1 of the substrate 402. x Ga (1-x) In some embodiments, the plurality of epitaxial layers include Al with different aluminum concentrations. x Ga (1-x) The deposition of the DBR layer 404-1 is completed so that the DBR 404 is in direct contact with the surface 402-1 of the substrate 402. After the DBR layer 404-1 is formed, the active layer 406-1 (e.g., undoped GaAs, Al x Ga (1-x) As, indium gallium arsenide (InGaAs) or gallium nitride (GaN) layer) is deposited on DBR 404-1 so that active layer 406-1 is in direct contact with DBR 404-1. After depositing active layer 406-1, DBR layer 405-1 is deposited on active layer 406-1 so that DBR 405-1 is in direct contact with active layer 406-1.

[0093] exist Figure 4D middle, Figure 4C The structure is etched to form a top portion 401 of the VCSEL 400 having a desired shape and size. The etching may be accomplished by reactive ion etching (e.g., fluorine-based or chlorine-based dry etching) or any other dry etching method known in the art. Figure 4D In the embodiment, a portion of the substrate 402 (e.g., a portion 402-1A of the surface 402-1 of the substrate 402 surrounding the top portion 401 of the VCSEL 400) has been exposed by etching. In some embodiments, the etching is performed such that the substrate 402 is not exposed (i.e., only a portion of the DBR layer 404-1 is removed by etching).

[0094] In some embodiments, Figure 4E As shown, the method of manufacturing VCSEL 400 also includes relative to Figure 4DA wall layer 408 is deposited on the portion of substrate 402 (e.g., portion 402-1A) that has been exposed during the described etching. As described above, in some embodiments, wall layer 408 is made of the same material as substrate 402 (e.g., wall layer 408 is part of substrate 402 and DBRs 404 and 405 and active layer 406 are at least partially embedded in substrate 402 / wall layer 408). In some embodiments, the wall layer is made of the same material as the material in DBRs 404 and 405 (e.g., GaAs or Al x Ga (1-x) As). Figure 4F 4 , a top contact 412 and a bottom contact 414 have been formed on a surface 402-2 of a substrate 402 and a top surface 400-1 of a VCSEL 400, respectively (e.g., by sputtering, metal evaporation, or any other known metal deposition process and dry etching). As described above, the top contact 412 and the bottom contact 414 are made of a metal (e.g., gold, silver, copper, aluminum, tungsten, or any alloy thereof).

[0095] Figure 5A is a schematic diagram illustrating a cross-sectional view of a light source structure 500 according to some embodiments. Fig. 5F The reference line AA' shown in FIG. The light source structure 500 includes the above Figure 4A As described above, the top portion 401 of the VCSEL 400 includes distributed Bragg reflectors (DBRs) 404 (e.g., n-type DBRs) and 405 (e.g., p-type DBRs) and an active layer 406 disposed on a substrate 402 and sandwiched between the DBRs 404 and 405. The light source structure 500 also includes a light blocking member 502 surrounding the top portion 401 of the VCSEL 400. The light blocking member 502 is configured to receive and absorb spontaneous emission of light output by the VCSEL 400 through the side surface 400-3 (e.g., at Figure 4A 4. The light blocking member 502 and the top portion 401 of the VCSEL 400 are both disposed on the substrate 402. In some embodiments, the light blocking member 502 and the top portion 401 of the VCSEL 400 have approximately the same height (e.g., height H1), which extends from the top surface 402-1 of the substrate 402 to the top surfaces of the light blocking member 502 and the DBR 405.

[0096] In some embodiments, light blocking member 502 includes a metal (e.g., gold or chromium). In such embodiments, light blocking member 502 is further configured to serve as a top contact for VCSEL 400 and top contact 412 can be excluded from VCSEL 400. In some embodiments, light blocking member 502 includes a black matrix material, such as a resin including a black pigment. In such embodiments, light source structure 500 further includes top contact 412 (e.g., Figure 5A ). Light blocking member 502 is spaced a distance from side surface 400-3 of VCSEL 400, as shown by gap 512. In some embodiments, gap 512 is an air gap. In some embodiments, gap 512 includes a dielectric material (e.g., oxidized Al x Ga (1-x) As).

[0097] Figure 5B-5E is a schematic diagram illustrating a method of manufacturing a light source structure 500 according to some embodiments. Figure 5B In the above text about Figure 4D The VCSEL described is obtained and a sacrificial layer 508 (eg, photoresist) is deposited over VCSEL 400 and substrate 402 by one or more processes known in the art. Figure 5C In the embodiment, a portion of the sacrificial layer 508 on the surface 402-1 of the substrate 402 is removed (e.g., by ion etching or any other dry etching method known in the art), so that a portion 508-1 of the sacrificial layer 508 located on the DBR 405 of the VCSEL 400 still exists. Figure 5D In the embodiment, the light blocking member layer 502-1 is deposited on Figure 5C 402 and the sacrificial layer 408. As described above, in some embodiments, the light blocking member 502 is made of a metal (e.g., gold or chromium) and the deposition of the light blocking member 502 includes a metal deposition method known in the art (e.g., by sputtering or evaporation methods). In some embodiments, the light blocking member 502 is made of a black matrix material. In such embodiments, the deposition of the black matrix material includes inkjet printing, spin coating, or other resin deposition methods known in the art.

[0098] exist Figure 5E4, a portion 508-1 of the sacrificial layer 508 above the DBR 405 and a portion of the light blocker layer 502-1 disposed on the portion 508-1 of the sacrificial layer 508 are removed (e.g., peeled off), resulting in the formation of a light blocker 502 surrounding the top portion 401 of the VCSEL 400 as shown. In some embodiments, the removal of the portion 508-1 of the sacrificial layer 508 on top of the DBR 405 and the portion 508 of the light blocker layer 502-1 disposed on the portion 508-1 of the sacrificial layer 508 is accomplished by wet chemical etching of the portion 508-1 of the sacrificial layer 508 or by a mechanical process (e.g., by chemical mechanical polishing of the light blocker layer 502-1). Figure 5E In FIG. 5 , bottom contact 414 and optional top contact 412 are added to form light source structure 500 .

[0099] In some embodiments, without depositing sacrificial layer 508, light blocking member 502 is deposited directly on the substrate. Figure 4D In such embodiments, the deposition includes a lithographic process (e.g., by photolithography or X-ray lithography) that applies a mask to form a pattern. In some embodiments, the light blocking member 502 is deposited on the VCSEL by patterned inkjet printing. Figure 4D The VCSEL 400 is depicted such that the light blocking member 502 is applied only to a portion of the surface 402 - 1 of the substrate 402 and not to the top portion 401 of the VCSEL 400 .

[0100] Fig. 5F is a schematic diagram illustrating a top view of a light source structure 500 according to some embodiments. As shown, the light source structure 500 includes a top surface 400-1 of a VCSEL, a gap 512, and a light blocking member 502. In some embodiments, an exposed surface 405-2 of an exposed portion of the top surface 400-1 of the VCSEL 400 (e.g., an exposed surface of the DBR 405) has a circular shape, and the top surface of the light source structure 500 has an overall square shape. In some embodiments, the exposed surface 405-2 of the top surface 400-1 of the VCSEL 400 has an elliptical shape, a rectangular shape, a square shape, other polygonal shapes, or a free shape. In some embodiments, the top surface of the light source structure is an elliptical shape, a rectangular shape, a square shape, other polygonal shapes, or a free shape. In some embodiments, the light source structure has at least one dimension ranging from 100 microns to 200 microns (e.g., Fig. 5FIn some embodiments, the light source structure has at least one dimension ranging from 100 microns to 175 microns, 100 microns to 150 microns, or 100 microns to 125 microns. In some embodiments, the light source structure has at least one dimension of 100 microns, 110 microns, 120 microns, 130 microns, 140 microns, 150 microns, 160 microns, 170 microns, 180 microns, 190 microns, or 160 microns. In some embodiments, the light source structure has a top surface area ranging from 100×100 microns to 200×200 microns. In some embodiments, the light source structure has a top surface area of ​​100×100 microns, 110×110 microns, 120×120 microns, 130×130 microns, 140×140 microns, 150×150 microns, 160×160 microns, 170×170 microns, 180×180 microns, 190×190 microns, or 200×200 microns. In some embodiments, the light source structure has a circular shape or an elliptical shape. In some embodiments, the diameter or axis of the circle or ellipse is 100 microns, 110 microns, 120 microns, 130 microns, 140 microns, 150 microns, 160 microns, 170 microns, 180 microns, 190 microns, or 200 microns, respectively. Fig. 5F As shown in the dimensions, the size of the light source structure 500 is similar to that of the VCSEL structure (e.g., Figure 4A Due to its compact size, the light source structure 500 is suitable for eye tracking devices used in head mounted display devices.

[0101] Fig. 6A 6 is a schematic diagram illustrating a cross-sectional view of a light source structure 600 according to some embodiments. The light source structure 600 includes a VCSEL 400, as described with reference to FIG. Figure 4AIn the embodiment of the present invention, VCSEL 400 includes a wall layer 408 disposed on a top portion 401 of VCSEL 400 and a substrate 402. Light source structure 600 also includes a light blocking member 602. Light blocking member 602 partially surrounds wall layer 408 so that wall layer 408 is disposed between top portion 401 of VCSEL 400 and light blocking member 602. In some embodiments, light blocking member 602 covers side surface 400-6 of wall layer and extends to partially cover top surface 400-5 of wall layer. In some embodiments, light blocking member 602 extends to partially cover exposed portion of top surface 402-1 of substrate. In some embodiments, light blocking member 602 has a thickness (e.g., thickness T) ranging from two microns to ten microns. In some embodiments, thickness T is in the range of two microns to three microns, two microns to four microns, two microns to five microns, or two microns to ten microns. In some embodiments, thickness T is less than 10 microns, less than nine microns, less than eight microns, less than seven microns, less than six microns, less than five microns, less than four microns, or less than three microns.

[0102] Figure 6B-Figure 6E is a schematic diagram illustrating a method of manufacturing a light source structure 600 according to some embodiments. Figure 6B In the above Figure 4E The described VCSEL structure is obtained, the VCSEL structure comprising a wall layer 408 deposited on a portion of the surface 402-1 of the substrate 402. Figure 6C 4 , bottom contact 414 is deposited on surface 402 - 2 of substrate 402 , and top contact 412 is deposited on top surface 400 - 1 of VCSEL 400 . In some embodiments, top contact 412 partially covers DBR 405 .

[0103] exist Fig.6D In the embodiment, the light blocking member layer 602-1 is deposited to cover the surface 402-1 of the substrate 402, the top surface 400-6 and the side surface 400-6 of the wall layer 408, and the exposed portion of the top surface 400-1 of the DBR 405. Fig. 6E In the embodiment, a portion of the light blocking member layer 602-1 is etched away (eg, by photolithography, reactive ion etching, or any dry etching technique known in the art) to form the light blocking member 602. Fig. 6E As shown in FIG. 4 , the light blocking member 602 covers the side surface 400 - 6 of the wall layer 408 and extends partially over the top surface 400 - 5 of the wall layer 408 . In some embodiments, the light blocking member 602 may cover a portion of the surface 402 - 1 of the substrate 402 .

[0104] In some embodiments, the deposition of light blocking member 602 includes the processes discussed above with respect to the deposition of light blocking member 502 (eg, Figure 5B-5E ).

[0105] Fig. 7A 7 is a schematic diagram illustrating a cross-sectional view of a light source structure 700 including a light blocking member 702 according to some embodiments. The light source structure 700 corresponds to the above description of Fig. 6A The light source structure 600 described above is different in that, in the light source structure 700, the wall layer 408 extends above the surface 402-1 of the substrate 402, so that the side surface 400-6 of the wall layer 408 is substantially aligned with the side surface 400-4 of the substrate, and the light blocking member 702 (corresponding to Fig. 6A The light blocking member 602 in the embodiment of the present invention extends along the side surface 400-4 and the side surface 400-6 and partially over the top surface 400-5 of the wall layer 408. Additionally, the bottom contact 414 only partially extends over the surface 402-2 of the substrate 402, so that the light blocking member 702 and the bottom contact 414 are not in direct contact with each other.

[0106] Figure 7B-7D is a schematic diagram illustrating a method of manufacturing a light source structure 700 according to some embodiments. Figure 7B In the above Figure 4E The VCSEL structure described is obtained, the VCSEL structure includes a surface 402-1 of the substrate 402 at about Figure 4D The wall layer 408 is deposited on the exposed portion after the etching described. The wall layer 408 extends above the surface 402-1 of the substrate 402 so that the side surface 400-6 of the wall layer 408 is substantially aligned with the side surface 400-4 of the substrate. Figure 7C 4 , bottom contact 414 is deposited on a portion (less than all) of surface 402-2 of substrate 402, and top contact 412 is deposited on top surface 400-1 of VCSEL 400. In some embodiments, contact 414 extends partially over DBR 405 and / or over side surface 400-3 of VCSEL 400.

[0107] exist Fig.7D 4, light blocking member 702 is deposited on VCSEL 400 such that light blocking member 702 extends along side surface 400-4 and side surface 400-6 and partially over top surface 400-5 of wall layer 408. In some embodiments, the deposition of light blocking member 702 is performed using a deposition method known in the art for performing patterned deposition. In some embodiments, the deposition of light blocking member 702 includes applying a black matrix material by inkjet printing. In some embodiments, the deposition of light blocking member 702 includes photolithography. In some embodiments, the deposition of light blocking member 702 includes the deposition described above with respect to light blocking member 502 (e.g., Figure 5B-5E ) or deposition of the light blocking member 602 (eg, Figure 6B-Figure 6E ) process discussed.

[0108] Fig. 8A 8 is a schematic diagram illustrating a cross-sectional view of a light source structure 800 according to some embodiments. The light source structure 800 corresponds to the above Fig. 6A The light source structure 600 described above is different in that in the light source structure 800 the wall layer 408 around the top portion 401 of the VCSEL 400 forms a mesa structure, the mesa structure having a steep-sided cavity 804, which is bounded on one side by the side surface 400-3 of the top portion 401 of the VCSEL 400, on the other side by the edge 804-1 of the wall layer 408 and at the bottom by a portion of the top surface 402-1 of the substrate 402. As shown, the light source structure 800 also includes a light blocking member 802, which is a light blocking or absorbing material layer formed on at least a portion of the top surface 400-5 of the wall layer 408 and extending to cover the edge 804-1 of the wall layer 408 facing the cavity 804, the portion of the top surface 402-1 of the substrate 402 at the bottom of the cavity 804, the side surface 400-3 of the top portion 401 of the VCSEL 400, and a portion of the top surface 400-1 of the VCSEL 400. In some embodiments, the cavity 804 does not extend all the way to the top surface 402-1 of the substrate 402. In some embodiments, the cavity 804 extends only through the DBR 405 and the active layer 406. In some embodiments, the cavity 804 extends through the top portion of the DBR 404 without exposing the top surface 402-1 of the substrate 402. In some embodiments, the cavity 804 is configured to isolate the top portion 401 of the VCSEL 400 from the wall layer 408. In such embodiments where the light blocking member 802 comprises metal, the light blocking member 802 also serves as the top contact 412 .

[0109] like Fig. 8A As shown, the light source structure 800 also includes a passivation layer 814 below at least a portion of the light blocking member layer 802. The passivation layer 814 is configured to provide electrical stability by further isolating the n-type and p-type doped portions of the light source structure 800, and to protect the surface of the VCSEL 400 from environmental contaminants. In some embodiments, the passivation layer 814 is formed on the side surface 400-3 of the top portion 401 of the VCSEL 400, the portion of the top surface 402-1 of the substrate 402 at the bottom of the cavity 804, the edge 804-1 of the wall layer 408 facing the cavity 804, and formed on the top surface of the wall layer 408. In some embodiments, the passivation layer 814 includes SiN4, SiO2, Al x Ga (1-x)As, or any other oxidized metal and oxidized semiconductor material, or a combination thereof. In some embodiments, the wall layer 408, DBRs 404 and 405, and active layer 406 include Al x Ga (1-x) As, and the passivation layer 814 includes oxidized Al x Ga (1-x) As. and about Fig. 6A The light block 802 corresponding to the light block 602 described above is disposed on the passivation layer 814 such that the passivation layer 814 is below at least a portion of the light block layer 802. In some embodiments, the light block layer 802 and the passivation layer 814 together form a light block for the VCSEL 400. In some embodiments, at least a portion of the top surface 402-1 of the DBR 405 remains uncovered, thereby allowing stimulated emission of output light (e.g., using Figure 4A 4, as indicated by the stimulated emission of light through the top surface 400-1.

[0110] Figure 8B-Figure 8E is a schematic diagram illustrating a method of manufacturing a light source structure 800 according to some embodiments. Figure 8B In the above Figure 4E The VCSEL described is obtained, the VCSEL comprising a wall layer 408. Figure 8C In the embodiment of the present invention, a portion of the wall layer 408 is removed to form a mesa structure having a cavity 804 (e.g., by using anisotropic etching such as fluorine-based or chlorine-based etching or any other dry etching method known in the art). In some embodiments, the portion of the wall layer 408 is etched such that, as shown, a height H3 of the wall layer 408 is less than a height H2 of the top portion 401 of the VCSEL 400.

[0111] exist Fig.8D In the embodiment, the passivation layer 814 is formed on the side surface 400-3 of the top portion 401 of the VCSEL 400, the portion of the top surface 402-1 of the substrate 402 at the bottom of the cavity 804, the edge 804-1 of the wall layer 408 facing the cavity 804, and the top surface of the wall layer 408. In some embodiments, the formation of the passivation layer 814 includes, for example, depositing SiN4, SiO2, Al2O3, etc. by chemical vapor deposition (CVD) or plasma enhanced deposition (CVD). x Ga (1-x) As or any other oxidized metal or oxidized semiconductor material or combination thereof. In some embodiments, the formation of the passivation layer 814 includes: Fig.8D In some embodiments, the wall layer 408, DBR 404 and 405, and active layer 406 include Al x Ga(1-x) As, and the passivation layer 814 is formed by oxidation (e.g., by a thermal oxidation or wet oxidation process known in the art). In some embodiments, the oxidation is performed selectively. For example, Al with different aluminum concentrations x Ga (1-x) As may be oxidized differently. Therefore, by configuring the DBR 405 such that the top layer of the DBR 405 near the top surface 400-1 has a much lower aluminum concentration than the layers below the top layer of the DBR 405, the top layer of the DBR 405 near the top surface 400-1 is not as easily oxidized as other exposed surfaces of the VCSEL 400. As a result, the passivation layer 814 may be formed on the side surface 400-3 without extending to the top surface 400-1. In some embodiments, the oxidation is performed generally such that the surface 400-1 of the DBR 405 is also oxidized and then removed after the oxidation, such that the surface 400-1 of the DBR 405 is exposed. Fig. 8E In the embodiment, the light blocking member 802 is deposited on the VCSEL 400 to form the light source structure 800. The deposition of the light blocking member 802 includes the above Figure 5B-5E , Figure 6B-Figure 6E and Figure 7B-7D Any of the methods described. Fig. 8E In the embodiment described above, the bottom contact 414 is deposited on the surface 402-2 of the substrate 402. In the embodiment where the light blocking member 802 comprises a non-conductive material (e.g., a black matrix material), the top contact 412 (e.g., Figure 5A ) is also deposited on the light source structure 800 .

[0112] Fig. 9 1 is a schematic diagram illustrating a cross-sectional view of a light source structure 900 according to some embodiments. The light source structure 900 includes a VCSEL 400, and the VCSEL 400 includes Figure 4A The top portion 401 of the VCSEL 400 and an optional wall layer 408 disposed on the substrate 402. The light source structure 900 also includes a light blocking member 902 (e.g., a reflective, diffractive, or refractive optical element) surrounding at least the top portion 401 of the VCSEL 400. The light blocking member 902 is configured to receive and redirect spontaneous emission of light output by the VCSEL 400 through the side surface 400-3 (e.g., spontaneous emission of light indicated by arrow 418).

[0113] Light blocking member 902 is spaced a distance from side surface 400-3 of VCSEL 400. In some embodiments, the distance is defined by optional wall layer 408 and light blocking member 902 is positioned adjacent to side surface 400-6. In some embodiments, the distance is defined by a gap (e.g., about Figure 5AFor example, the light blocking member 902 is positioned on the top surface 402-1 of the substrate 402 so that there is a gap between the side surface 400-3 and the light blocking member 902. In some embodiments, the light blocking member 902 and the top portion 401 of the VCSEL 400 have approximately the same height, extending from the top surface 402-1 of the substrate 402 to the top surface of the light blocking member 902 and the DBR 405.

[0114] like Fig. 9 As shown, light blocking member 902 includes a curved reflective surface (e.g., a curved metal surface). Light blocking member 902 is configured to receive spontaneous emission as shown by arrow 418 and reflect spontaneous emission as shown by arrow 918. In some embodiments, the direction of the reflected spontaneous emission as shown by arrow 918 is substantially the same as the direction of the directional emission as shown by arrow 416 (e.g., the angle between the direction of the reflected spontaneous emission and the direction of the directional emission is less than 30 degrees, 20 degrees, or 10 degrees). For example, the spontaneous emission is also directed toward the user's eye at the pupil (e.g., as shown with respect to FIG. 4B ). Figure 3A and Figure 3B In some embodiments, the light blocking member 902 is a diffractive or refractive optical element (eg, a lens or a light blocking member). In some embodiments, the light blocking member 902 has a flat or curved surface.

[0115] The light source structure 900 including the light blocking member 902 can be formed by existing semiconductor manufacturing techniques, such as the techniques described above with respect to the formation of the light source structures 500, 600, 700, and 800. For example, the light blocking member 902 is formed by etching a portion of an adjacent material to obtain a curved or inclined surface and coating the etched surface with a reflective material.

[0116] In light of these principles, we now turn to certain embodiments of the present disclosure.

[0117] According to some embodiments, the light source structure includes a vertical cavity surface emitting laser (VCSEL) device (e.g., Figure 5A The light source structure 500 includes Figure 4A 400), the VCSEL device has a top surface (e.g., top surface 400-1) and at least one side surface (e.g., side surface 400-3) substantially perpendicular to and adjacent to the top surface. The VCSEL device is configurable to output directionally emitted light (e.g., Figure 4AThe light source structure further includes a light blocking member (e.g., light blocking member 502) surrounding at least a top portion of the VCSEL device and separated from at least one side surface. The light blocking member is configured to receive spontaneous emission (e.g., Figure 4A Spontaneous emission of light as indicated by arrow 418 in FIG.

[0118] In some embodiments, the light source structure has at least one dimension ranging from 100 microns to 200 microns (e.g., Fig. 5F In some embodiments, the light source structure has at least one dimension ranging from 100 microns to 175 microns, 100 microns to 150 microns, or 100 microns to 125 microns. In some embodiments, the light source structure has at least one dimension of 100 microns, 110 microns, 120 microns, 130 microns, 140 microns, 150 microns, 160 microns, 170 microns, 180 microns, 190 microns, or 160 microns. In some embodiments, the light source structure has a top surface area ranging from 100×100 microns to 200×200 microns. In some embodiments, the light source structure has a top surface area of ​​100×100 microns, 110×110 microns, 120×120 microns, 130×130 microns, 140×140 microns, 150×150 microns, 160×160 microns, 170×170 microns, 180×180 microns, 190×190 microns, or 200×200 microns. In some embodiments, the light source structure has a circular shape or an elliptical shape. In some embodiments, the diameter or axis of the circle or ellipse is 100 microns, 110 microns, 120 microns, 130 microns, 140 microns, 150 microns, 160 microns, 170 microns, 180 microns, 190 microns, or 200 microns, respectively.

[0119] In some embodiments, the thickness of the light blocking member (eg, Fig. 6A The thickness T of the light blocking member 602 is in the range of two micrometers to ten micrometers.

[0120] In some embodiments, the top portion of the VCSEL device and the light blocking member are disposed on a substrate (eg, the top portion 400-1 of the VCSEL 400 and the light blocking member 502 are disposed on a substrate). Figure 5A ) and have approximately the same height (eg, height H1) from the substrate surface.

[0121] In some embodiments, the light blocking member is formed on a mesa structure (e.g., cavity 804) around the top portion of the VCSEL device and extends to cover at least the top surface and edges of the mesa structure. A mesa structure refers to a cavity with steep edges around the VCSEL. In some embodiments, the mesa structure is formed by ion etching or other dry etching methods.

[0122] In some embodiments, the light blocking member includes a passivation layer (e.g., passivation layer 814) on the mesa structure and extending to at least one side surface (e.g., edge 804-1) of the VCSEL device. In some embodiments, the passivation layer includes a silicon nitride layer. The light blocking member also includes a metal layer (e.g., light blocking member 802) on the passivation layer.

[0123] In some embodiments, the metal layer extends to and covers an outer portion of the top surface of the VCSEL device (e.g., Fig. 8A 4A of the surface 400-1 of the VCSEL 400 in FIG.

[0124] In some embodiments, the top portion of the VCSEL device includes (or is partially embedded in) the substrate (e.g., the top portion 400-1 of the VCSEL 400 includes Fig. 6A The light blocking member also surrounds the substrate (on the sidewalls of the substrate) (eg, the light blocking member 602 surrounds the substrate). Fig. 6A wall layer 408 in the embodiment.

[0125] In some embodiments, the VCSEL device is disposed on a first surface of the substrate (eg, Figure 5A A surface 402-1 of a substrate 402 is provided in the embodiment of the present invention, and a metal layer (eg, an n-contact) is provided on a second surface (eg, surface 402-2) of the substrate, the second surface being opposite to the first surface.

[0126] In some embodiments, the light blocking member comprises a black matrix material. In some embodiments, the light blocking member comprises a metal (eg, gold).

[0127] According to some embodiments, a method of manufacturing a light source structure includes: manufacturing a vertical cavity surface emitting laser (VCSEL) device (e.g., Figure 5B-5E ). The VCSEL device has a top surface and at least one side surface substantially perpendicular to and adjacent to the top surface. The VCSEL device is configurable to output directionally emitted light through the top surface. The method also includes forming a light blocking member that surrounds at least a top portion of the VCSEL device and is separated from at least one side surface. The light blocking member is configured to receive spontaneous emission from the VCSEL device through at least one side surface.

[0128] In some embodiments, forming the light blocking member includes: depositing a sacrificial layer over the VCSEL device and the top surface of the substrate; and removing a portion of the sacrificial layer on the top surface of the substrate (eg, Figure 5B-5E ). Forming the light blocking member further includes: depositing a light blocking member layer on the substrate to form the light blocking member; and removing a portion of the sacrificial layer on the VCSEL device.

[0129] In some embodiments, forming the light blocking member includes forming a mesa structure around a top portion of the VCSEL device, the mesa structure being separated from at least one side surface by a cavity (eg, Figure 8B-Figure 8E ). Forming the light blocking member further includes: oxidizing the exposed surfaces of the mesa structure and the VCSEL device, and forming a passivation layer over the mesa structure. The passivation layer extends to cover the top surface of the mesa structure, the edge of the mesa structure facing the cavity, the bottom surface of the groove, and at least one side surface of the VCSEL device. Forming the light blocking member further includes: forming a metal layer over the passivation layer and the outer portion of the top surface of the VCSEL device.

[0130] In some embodiments, the substrate has a top surface that is parallel to the top surface of the VCSEL device and at least one side surface that is substantially perpendicular to the top surface of the VCSEL device (e.g., Figure 6B-Figure 6E ). Forming the light blocking member includes coating an exposed surface of the VCSEL device and at least one side surface of the substrate with a light blocking material, and removing a portion of the light blocking material from a surface of the VCSEL device and a middle portion of a top surface of the substrate adjacent to the VCSEL device.

[0131] In some embodiments, the light blocking material is a black matrix material. Removing a portion of the light blocking material is performed using photolithography.

[0132] In some embodiments, coating the substrate and exposed surfaces of the VCSEL device with the black matrix material comprises inkjet printing.

[0133] According to some embodiments, an eye tracking device (e.g. Figure 3B The eye tracking device 360 ​​in FIG. 3 includes a light source structure (e.g., light source structure 362) configured to project light to the user's eye and a photodetector (e.g., photodetector 364) configured to receive light projected by the light source structure and reflected from the user's eye. Figure 5AThe light source structure 500 in the embodiment of the present invention includes a vertical cavity surface emitting laser (VCSEL) device having a top surface and at least one side surface substantially perpendicular to and adjacent to the top surface. The VCSEL device is configurable to output directionally emitted light through the top surface. The light source structure also includes a light blocking member that surrounds at least a top portion of the VCSEL device and is separated from at least one side surface. The light blocking member is configured to prevent spontaneous emission from the VCSEL device from reaching the photodetector through at least one side surface.

[0134] In some embodiments, the light source and the photodetector are formed on the same substrate (e.g., Figure 3B , substrates 368-1 and 368-2 form a single uniform substrate). The above light source structure is configured to reduce light output by the VCSEL device due to spontaneous emission, thereby preventing (or reducing) detection of light output by the VCSEL device due to spontaneous emission by the photodetector.

[0135] According to some embodiments, a head mounted display device (e.g., Figure 1 The display device 100 in FIG. 1 includes a display (eg, Figure 3A The display device includes an array of light-emitting devices 320 in the display, an optical component (e.g., one or more optical components 330) optically coupled to the display, and the above-mentioned eye tracking device (e.g., eye tracking device 360) arranged near the display and the optical component.

[0136] Although the various figures illustrate the operation of a particular component or a particular group of components relative to one eye, it will be understood by those skilled in the art that similar operations may be performed relative to the other eye or both eyes. For the sake of brevity, such details are not repeated here.

[0137] Although some of the various figures illustrate multiple logical stages in a particular order, stages that are not dependent on order may be reordered and other stages may be combined or decomposed. Although some reordering or other groupings are specifically mentioned, others will be apparent to one of ordinary skill in the art, and thus the ordering and groupings presented herein are not an exhaustive list of alternatives. Furthermore, it should be appreciated that the stages may be implemented in hardware, firmware, software, or any combination thereof.

[0138] For purposes of explanation, the foregoing description has been described with reference to specific embodiments. However, the above illustrative discussion is not intended to be exhaustive or to limit the scope of the claims to the precise forms disclosed. In light of the above teachings, many modifications and variations are possible. The embodiments were chosen in order to best explain the principles behind the claims and their practical application, thereby enabling others skilled in the art to best use the embodiments with various modifications suitable for the particular use contemplated.

Claims

1. An eye tracking device comprising a photodetector and a light source structure, the photodetector and the light source structure being integrated to form a single unit, the light source structure comprising: a vertical cavity surface emitting laser (VCSEL) device having a top surface and at least one side surface substantially perpendicular to and adjacent to the top surface, the VCSEL device being configurable to output directionally emitted light through the top surface in a first direction; as well as A light blocking member surrounds at least a top portion of the VCSEL device and is separated from the at least one side surface, the light blocking member being configured to receive spontaneous emission from the VCSEL device through the at least one side surface to prevent the spontaneous emission from being detected by the photodetector, and to reflect the spontaneous emission in the first direction.

2. The eye tracking device of claim 1, wherein the light source structure has at least one dimension ranging from 100 microns to 200 microns.

3. An eye tracking device according to claim 1 or claim 2, the thickness of the light blocking member ranging from two microns to ten microns.

4. An eye tracking device according to claim 1 or claim 2, wherein the top portion of the VCSEL device and the light blocking member are arranged on a substrate and have approximately the same height from the surface of the substrate.

5. An eye tracking device according to claim 1 or claim 2, wherein the light blocking member is formed on a mesa structure around the top portion of the VCSEL device and extends to cover at least a top surface and an edge of the mesa structure.

6. The eye tracking device of claim 5, wherein the light blocking member comprises: a passivation layer over the mesa structure, the passivation layer extending onto the at least one side surface of the VCSEL device; as well as A metal layer is above the passivation layer.

7. The eye tracking device of claim 6, wherein the metal layer extends to and covers an outer portion of the top surface of the VCSEL device.

8. An eye tracking device according to any one of claims 1, 2, 6 or 7, wherein the top portion of the VCSEL device includes a substrate, and wherein the light blocking member also surrounds the substrate.

9. The eye tracking device of claim 8, wherein the VCSEL device is disposed on a first surface of the substrate and a metal layer is disposed on a second surface of the substrate, the second surface being opposite to the first surface.

10. An eye tracking device as claimed in any one of claims 1, 2, 6, 7 or 9, wherein the light blocking member comprises metal.

11. An eye tracking device according to any one of claims 1, 2, 6, 7 or 9, wherein: The light source structure is configured to project light into a user's eyes; and the photodetector is configured to receive the light projected by the light source structure and reflected from the user's eyes.

12. The eye tracking device of claim 11, wherein the light source structure and the photodetector are formed on a single substrate.

13. A head mounted display device, comprising: monitor; an optical assembly optically coupled to the display; as well as An eye tracking device according to claim 11 or claim 12, arranged close to the display and the optical assembly.

14. A method of manufacturing an eye tracking device, the method comprising: fabricating a photodetector and a vertical cavity surface emitting laser (VCSEL) device on a substrate, the photodetector and the VCSEL device being integrated to form a single unit, the VCSEL device having a top surface and at least one side surface substantially perpendicular to and adjacent to the top surface, the VCSEL device being configurable to output directionally emitted light through the top surface in a first direction; as well as A light blocking member is formed, the light blocking member surrounding at least a top portion of the VCSEL device and separated from the at least one side surface, the light blocking member being configured to receive spontaneous emission from the VCSEL device through the at least one side surface to prevent the spontaneous emission from being detected by the photodetector, and to reflect the spontaneous emission in the first direction.

15. The method of manufacturing an eye tracking device according to claim 14, wherein forming the light blocking member comprises: depositing a sacrificial layer over the VCSEL device and a top surface of the substrate; removing a portion of the sacrificial layer on the top surface of the substrate; depositing a light blocker layer over the substrate to form the light blocker; as well as The portion of the sacrificial layer on the VCSEL device is removed.

16. The method of manufacturing an eye tracking device according to claim 14, wherein forming the light blocking member comprises: forming a mesa structure around the top portion of the VCSEL device, the mesa structure being separated from the at least one side surface by a cavity; oxidizing the exposed surfaces of the mesa structure and the VCSEL device; forming a passivation layer over the mesa structure, the passivation layer extending to cover a top surface of the mesa structure, an edge of the mesa structure facing the cavity, a bottom surface of the cavity, and the at least one side surface of the VCSEL device; as well as A metal layer is formed over the passivation layer and an outer portion of the top surface of the VCSEL device.

17. The method of manufacturing an eye tracking apparatus according to claim 14, wherein the substrate has a top surface parallel to the top surface of the VCSEL device and at least one side surface substantially perpendicular to the top surface of the VCSEL device, and wherein forming the light blocking member comprises: coating an exposed surface of the VCSEL device and at least one side surface of the substrate with a light blocking material; as well as A portion of the light blocking material is removed from a middle portion of the top surface of the substrate adjacent to the VCSEL device.

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