A semi-tooth rod for a flower basket

By designing a reasonable flower basket with half-tooth rod structure and modified PVDF material, the problems of water accumulation and aging of the tooth rod are solved, and the hydrophobic effect and mechanical properties are improved at high temperatures to ensure the surface of the silicon wafer is clean.

CN114188257BActive Publication Date: 2025-07-11CHANGZHOU GREATOP NEW MATERIAL CO LTD
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Patent Information

Application Number
CN202111675653.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-12-31
Publication Date
2025-07-11
Estimated Expiration
2041-12-31

AI Technical Summary

Technical Problem

The existing silicon wafer cleaning basket teeth rods are prone to residual water during cleaning and drying, and the teeth rods are prone to aging at high temperatures, which affects service life and surface quality of the silicon wafer.

Method used

A half-tooth rod for flower basket is designed, which adopts a structure of covering outer layer and tooth columns. The surface of the coated outer layer is designed as a guide surface with high middle and low sides. The tooth columns are in a specific shape along the axial and radial direction of the support main rod. They are made of modified PVDF materials, which have high temperature resistance and hydrophobic properties.

Benefits of technology

有效疏导清洗液,减少积水残留,降低齿印产生,提高机械性能,延长齿杆使用寿命,保证硅片表面质量。

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Abstract

The present invention provides a semi-toothed rod for a flower basket, which includes a supporting main rod, a covering outer layer and tooth columns. The circumferential side surface of the supporting main rod is covered and fixed with the covering outer layer, and a plurality of tooth columns are distributed at intervals along the axial direction of the supporting main rod on the surface of the covering outer layer. By reasonably designing the semi-toothed tooth columns of the present invention and using a modified PVDF material, it has the characteristics of being resistant to high temperature of 160 °C and not easy to absorb water; while ensuring the insertion effect, on the one hand, the contact area between the tooth columns and the silicon wafer is reduced, reducing the possibility of tooth marks, and on the other hand, the surface of the symmetric part of the semi-tooth can effectively hydrophobic, reducing the accumulation of cleaning liquid residues; at the same time, the covering outer layer adopts a surface design with a high in the middle and low on both sides, which is more conducive to draining and hydrophobic, facilitating the effective guiding of water flow to drain downward along the surface, further ensuring the hydrophobic effect.
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Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer manufacturing, and in particular to a semi-tooth rod for a flower basket. Background Art

[0002] During the production process of solar silicon wafers, the silicon wafers need to be placed in a flower basket for cleaning. After cleaning, the silicon wafers need to be dried. Existing flower baskets usually include flower basket side plates and tooth rods installed on the flower basket side plates. The tooth rods are used to place / clamp the silicon wafers at intervals.

[0003] Currently, for existing tooth rods, usually as disclosed in CN210467791U for silicon wafer cleaning, the tooth rod of a silicon wafer cleaning flower basket includes a tooth rod main body and first tooth columns and second tooth columns evenly and spacedly distributed on the tooth rod main body; the axial projection of the first tooth column and the second tooth column on the tooth rod main body forms a semi-ellipse or a parabola; both ends of the tooth rod main body are provided with connecting parts for connecting the tooth rod main body with the silicon wafer cleaning flower basket. The silicon wafers are inserted into the interval area between the tooth columns and are separated by the tooth columns, and can be prevented from being damaged by sticking together during cleaning. Moreover, two adjacent tooth columns are arranged in a staggered manner, which can double the number of support points of the silicon wafers and make it more difficult to stick together; the elliptical tooth columns have arc transitions at both sides, which can effectively reduce the imprints left by the tooth columns on the silicon wafers and improve the yield rate of the silicon wafers.

[0004] However, for existing tooth rods, usually the tooth columns cover the tooth rod main body. Between the tooth columns corresponding to the surface of the tooth rod main body, liquid is likely to remain and accumulate during cleaning. Due to the material reason, the tooth columns have a certain water absorption property. During drying, the water-absorbed tooth rod is likely to cause tooth mark residues on the surface of the silicon wafers. When the silicon wafers are dried, too high a temperature is also likely to cause the aging of the tooth columns and affect the service life of the tooth rod. Summary of the Invention

[0005] The technical problem to be solved by the present invention is: in order to overcome the deficiencies of the prior art, the present invention provides a semi-tooth rod for a flower basket with a reasonable structural design, convenient for inserting silicon wafers, good high-temperature resistance, effectively hydrophobic, not easy to accumulate water, and reducing tooth mark residues on the silicon wafers.

[0006] The technical solution adopted by the present invention to solve its technical problems is: a semi-tooth rod for a flower basket includes a support main rod, a covering outer layer is fixedly covered on the circumferential side surface of the support main rod, a plurality of tooth columns are spacedly distributed along the axial direction of the support main rod on the surface of the covering outer layer, and the surface of the covering outer layer corresponding to the distributed tooth columns has a guiding surface structure that is high in the middle and low on both sides along the radial section of the support main rod; the tooth columns are convexly fixed on the covering outer layer, the tooth columns have a tooth-shaped structure that is narrow at the top and wide at the connection with the covering outer layer along the axial section of the support main rod, the tooth columns are high on the inner side and low on the outer side along the radial section of the support main rod, and the position of the innermost side of the tooth columns along the radial section of the support main rod does not exceed the symmetry median line of the radial section of the support main rod.

[0007] In the above solution, the outer covering layer is designed as a guiding surface structure that is high in the middle and low on both sides, which can effectively guide the surface cleaning liquid and direct the cleaning liquid to be discharged outward on both sides. Through the design of the tooth column, it provides guiding directions for the downward discharge of the cleaning liquid both axially and radially along the supporting main rod, further reducing the possibility of cleaning liquid accumulation. At the same time, the tooth shape structure of the tooth column can, on the one hand, guide the discharge of the cleaning liquid, and on the other hand, also provide an effective guide for the insertion of the silicon wafer, facilitating the arrangement of the silicon wafers during insertion. At the same time, the coverage range of the tooth shape along the radial cross-section of the supporting main rod does not exceed the symmetric center line of the radial cross-section of the supporting main rod, that is, a semi-tooth structure. The semi-tooth can not only be used for the plug-in connection of the silicon wafer, but also reduce the contact area between the tooth column and the silicon wafer, reducing the generation of tooth marks during drying. The surface of the outer covering layer relative to the remaining surface of the semi-tooth has no tooth shape obstruction, which is more convenient for the cleaning liquid to flow along the surface.

[0008] Furthermore, a number of through supporting holes are evenly distributed at intervals on the supporting main rod, and the inner wall of the outer covering layer covers the supporting main rod and fills the supporting holes. Through the supporting holes and filling the supporting holes with the inner wall of the outer covering layer, the combination of the supporting main rod and the outer covering layer can be effectively ensured, improving the mechanical properties of the semi-tooth rod.

[0009] Even further, the outer covering layer is in a tubular structure and covers the outer surface of the supporting main rod circumferentially.

[0010] Preferably, the outer covering layer and the tooth column are integrally formed from PVDF material. PVDF mainly refers to polyvinylidene fluoride homopolymer or copolymer of vinylidene fluoride and other small amounts of fluorinated vinyl monomers. The outer covering layer and the tooth column produced by modifying PVDF material have good high-temperature resistance, can withstand high temperatures of 160 °C, and are not easy to absorb water. Even when in contact with the surface of the silicon wafer, tooth marks are not easily generated on the surface of the silicon wafer during drying.

[0011] Specifically, the surface of the outer covering layer corresponding to the distribution of the tooth column is an arc surface along the radial cross-section of the supporting main rod, and the highest point of the arc surface is located at the symmetric center line position of the radial cross-section of the supporting main rod. The innermost position of the tooth column along the radial cross-section of the supporting main rod is also located on this symmetric center line. The tooth column is in an arc structure that is high on the inner side and low on the outer side along the radial cross-section of the supporting main rod. Through the design of the arc surface and the arc, the outer covering layer and the tooth column in contact with the silicon wafer can be designed to have a guiding function. While guiding the insertion of the silicon wafer, it can effectively guide the water flow to achieve a hydrophobic effect.

[0012] The beneficial effects of the present invention are as follows. A semi-toothed rod for a flower basket provided by the present invention has a reasonable structural design. By reasonably designing the tooth columns of the semi-teeth and making them from a modified PVDF material, it has the characteristics of being resistant to high temperatures of 160 °C and not easily absorbing water. While ensuring the insertion effect, on the one hand, the contact area between the tooth columns and the silicon wafers is reduced, reducing the possibility of tooth marks; on the other hand, the surface of the symmetric part of the semi-teeth can effectively repel water, reducing the accumulation of cleaning liquid residues. At the same time, the outer covering layer has a surface design with a higher middle and lower sides, which is more conducive to draining and repelling water, facilitating the effective guiding of water flow to drain downward along the surface, and further ensuring the water repellency effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present invention will be further described below with reference to the drawings and embodiments.

[0014] Figure 1 is the front view of the optimal embodiment of the present invention.

[0015] Figure 2 is the top view of the optimal embodiment of the present invention.

[0016] Figure 3 is a schematic diagram of the axial section of the optimal embodiment of the present invention along the supporting main rod.

[0017] Figure 4 is a schematic diagram of the radial section of the optimal embodiment of the present invention along the supporting main rod.

[0018] In the figure, 1 is the supporting main rod, 2 is the outer covering layer, and 3 is the tooth column. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] Now, the present invention will be further described in detail with reference to the drawings. These drawings are all simplified schematic diagrams, only illustrating the basic structure of the present invention in a schematic manner. Therefore, they only show the components related to the present invention. Directions and references (such as up, down, left, right, etc.) can only be used to assist in the description of the features in the drawings. Therefore, the following specific embodiments are not adopted in a restrictive sense, and the scope of the claimed subject matter is only defined by the appended claims and their equivalent forms.

[0020] As Figure 1 shown, a semi-toothed rod for a flower basket is the optimal embodiment of the present invention. The semi-toothed rod includes a supporting main rod 1, an outer covering layer 2, and a tooth column 3.

[0021] The described outer covering layer 2 is in a tubular structure and covers the outer surface of the main support rod 1 circumferentially. A number of tooth columns 3 are distributed at intervals along the axial direction of the main support rod 1 on the surface of the outer covering layer 2. The surface of the outer covering layer 2 corresponding to the distribution of the tooth columns 3 is in an arc-shaped surface that is high in the middle and low on both sides along the radial section of the main support rod 1, and the highest point of the arc-shaped surface is located at the symmetric center line position of the radial section of the main support rod 1. Designing the outer covering layer 2 as a guiding surface structure that is high in the middle and low on both sides can effectively guide the surface cleaning liquid and direct the cleaning liquid to the outside on both sides.

[0022] The described tooth column 3 is in a tooth-shaped structure with a narrow top and a wide connection with the outer covering layer 2 along the axial section of the main support rod 1. The innermost position of the tooth column 3 along the radial section of the main support rod 1 is also located on this symmetric center line. The tooth column 3 is in an arc-shaped structure that is high on the inner side and low on the outer side along the radial section of the main support rod 1. In this embodiment, the tooth column 3 is in a generally isosceles triangle shape structure along the axial section of the main support rod 1, and the tooth column 3 is in a generally right triangle shape structure along the radial section of the main support rod 1, and the inclined surface of the right triangle is an arc-shaped structure. The tooth column 3 arranged in this way can, on the one hand, guide the cleaning liquid to drain, and on the other hand, also provide an effective guide for the insertion of the silicon wafer, facilitating the insertion and arrangement of the silicon wafers. At the same time, the coverage range of the tooth shape along the radial section of the main support rod 1 does not exceed the symmetric center line of the radial section of the main support rod 1, that is, a semi-tooth structure. The semi-tooth can not only be used for the silicon wafer to be inserted, but also reduce the contact area between the tooth column 3 and the silicon wafer, reducing the generation of tooth marks during drying. The surface of the outer covering layer 2 relative to the remaining surface of the semi-tooth has no tooth shape obstruction, making it more convenient for the cleaning liquid to be guided along the surface.

[0023] In actual production, the connection between the main support rod 1 and the outer covering layer 2 is carried out by designing support holes. A number of through support holes are evenly distributed at intervals on the main support rod 1. The inner wall of the outer covering layer 2 covers the main support rod 1 and fills the support holes completely. Through the support holes and filling the support holes completely with the inner wall of the outer covering layer 2, the combination of the main support rod 1 and the outer covering layer 2 can be effectively ensured, improving the mechanical properties of the semi-tooth rod.

[0024] The outer covering layer 2 and the tooth column 3 are integrally formed from PVDF material. PVDF mainly refers to polyvinylidene fluoride homopolymer or a copolymer of vinylidene fluoride and other small amounts of fluorinated vinyl monomers. The outer covering layer 2 and the tooth column 3 produced by modifying PVDF material have good high-temperature resistance and can withstand a high temperature of 160 °C. At the same time, they are not easy to absorb water. Even when in contact with the surface of the silicon wafer, tooth marks are not likely to be produced on the surface of the silicon wafer during drying.

[0025] Such a semi-tooth rod for a flower basket is designed with a reasonable structure. By reasonably designing the tooth column 3 of the semi-tooth, it is made of modified PVDF material, having the characteristics of being resistant to high temperature of 160 °C and not easily absorbing water. While ensuring the insertion effect, on the one hand, the contact area between the tooth column 3 and the silicon wafer is reduced, reducing the possibility of tooth marks. On the other hand, the surface of the symmetric part of the semi-tooth can effectively hydrophobic, reducing the accumulation of cleaning liquid residues. At the same time, the outer coating 2 adopts a surface design with a high middle and low sides, which is more conducive to drainage and hydrophobicity, facilitating the effective guidance of water flow to drain downward along the surface, further ensuring the hydrophobic effect.

[0026] Inspired by the ideal embodiments of the present invention described above, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of the present invention. The technical scope of the present invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A semi-toothed rod for a flower basket, comprising a supporting main rod (1), characterized in that: The circumferential side surface of the described supporting main rod (1) is fixedly covered with a covering outer layer (2). A number of tooth columns (3) are distributed at intervals along the axial direction of the supporting main rod (1) on the surface of the covering outer layer (2). The number of tooth columns (3) is distributed in a single row. The surface of the covering outer layer (2) corresponding to the distribution of the tooth columns (3) has a guiding surface structure that is high in the middle and low on both sides along the radial section of the supporting main rod (1). The radial section of the guiding surface structure is an arc surface that is high in the middle and low on both sides, and the highest point of the arc surface is located at the symmetric center line position of the radial section of the supporting main rod (1); the tooth columns (3) are convexly fixed on the covering outer layer (2). The tooth columns (3) have a tooth-shaped structure with a narrow top and a wide connection with the covering outer layer (2) along the axial section of the supporting main rod (1). The tooth columns (3) are high on the inner side and low on the outer side along the radial section of the supporting main rod (1), and the innermost position of the tooth columns (3) along the radial section of the supporting main rod (1) does not exceed the symmetric center line of the radial section of the supporting main rod (1).

2. The semi-toothed rod for a flower basket according to claim 1, characterized in that: A number of through supporting holes are evenly distributed at intervals on the described supporting main rod (1). The inner wall of the covering outer layer (2) covers the supporting main rod (1) and fills the supporting holes.

3. The semi-toothed rod for a flower basket according to claim 2, characterized in that: The described covering outer layer (2) is in a tubular structure and covers the outer surface of the supporting main rod (1) circumferentially.

4. The semi-toothed rod for a flower basket according to claim 1, wherein: The described covering outer layer (2) and the tooth columns (3) are made by integrally molding with PVDF material.

5. The semi-toothed rod for a flower basket according to claim 1, characterized in that: The innermost position of the tooth columns (3) along the radial section of the supporting main rod (1) is also located on the symmetric center line. The tooth columns (3) have an arc structure that is high on the inner side and low on the outer side along the radial section of the supporting main rod (1).

Citation Information

Patent Citations

  • Toothed rod of silicon wafer cleaning basket

    CN210467791U

  • Flower basket device

    CN111276574A

  • Texturing cleaning flower basket pressing rod

    CN213878035U

  • Half-toothed bar for flower basket

    CN217158141U