A sample holder converter

Abstract

This application relates to the technical field of ultra-high vacuum equipment, and particularly to a sample holder converter, comprising: a grounded base plate, a brush electrode, a first limit baffle, a first baffle pressing piece, a second limit baffle, a second baffle pressing piece, a third limit baffle, and a third baffle pressing piece. The sample holder converter provided by this application can make the sample transfer between two UHV devices more convenient and also reduce the damage to the sample.

Description

Technical Field

[0001] This application relates to the technical field of ultra-high vacuum equipment, and particularly relates to a sample holder converter. Background Art

[0002] Ultra-high vacuum (UHV) molecular beam epitaxy system (MBE) is a newly developed technology for preparing high-quality single-crystal thin films in an ultra-high vacuum environment. The combined system composed of molecular beam epitaxy equipment and devices such as scanning tunneling microscope (STM) and angle-resolved photoemission spectroscopy (ARPES) plays an important role in the exploration and characterization of new materials.

[0003] Currently, the common UHV equipment in the prior art includes the UHV equipment produced by Scienta Omicron of Germany (which can be called Scienta Omicron type UHV equipment) and the UHV equipment produced by Unisoku of Japan (Unisoku Co., Ltd. of Japan) (which can be called Unisoku type UHV equipment). However, the sample holder structures used in these two types of UHV equipment are different, so the two types of sample holders are not compatible with each other. Therefore, to achieve sample transfer between two different UHV equipment, it is necessary to evaporate high-saturated vapor pressure materials (such as selenium, tellurium, etc.) on the sample on the sample holder supporting a set of UHV equipment as a protective layer for the sample. Then, the sample holder is taken out from the UHV equipment through the corresponding manipulator, the sample is replaced from this sample holder to the sample holder supporting another set of UHV equipment in the atmosphere, and then the sample holder and the sample are put into another set of UHV equipment through the corresponding manipulator. Then, the sample is heated to remove the surface protective layer material, exposing the covered sample, thus completing the sample transfer.

[0004] Different UHV equipment has different measurement methods and characterization methods. When the same sample needs to be measured by different methods, multiple different UHV equipment need to work together. However, due to the different structures of the sample holders between the two types of UHV equipment, the sample transfer between different UHV equipment is cumbersome. Moreover, although evaporating the protective layer can reduce the influence of air on the sample, it cannot completely eliminate the influence of air on the sample, so the sample will be damaged. In addition, evaporating the protective layer may also change the structure of the sample and leave the protective layer material on the sample surface, thus also damaging the sample. In addition, especially for some samples with extremely strong activity or intolerance to heat, the method of evaporating the protective layer cannot be used for sample transfer.

[0005] Therefore, how to make the sample transfer between two UHV devices simple and reduce the damage to the sample is a technical problem that those skilled in the art urgently need to solve at present. Summary of the Invention

[0006] The present application provides a sample holder converter to make the sample transfer between two UHV devices simple and reduce the damage to the sample.

[0007] To solve the above technical problems, the present application provides the following technical solutions:

[0008] A sample holder converter includes: a grounded base plate, a brush electrode, a first limit baffle, a first baffle pressing piece, a second limit baffle, a second baffle pressing piece, a third limit baffle and a third baffle pressing piece; the grounded base plate includes: a base plate and a grounding electrode; a transfer hole penetrating up and down is formed on the base plate, and the transfer hole opens toward the first side of the base plate; a manipulator grasping hole is provided at a position on the base plate close to the second side, where the second side is opposite to the first side; the grounding electrode is disposed on the upper surface of the base plate and surrounds a part of the edge of the transfer hole; the brush electrode is fixed on the upper surface of the base plate, surrounds a part of the edge of the transfer hole, and the brush electrode is insulated from both the base plate and the grounding electrode; the first limit baffle and the first baffle pressing piece are fixed on the upper surface of the brush electrode from top to bottom, and an electrode slot with an opening is formed between the first limit baffle and the first baffle pressing piece, the second limit baffle and the second baffle pressing piece are fixed on the upper surface of the grounding electrode from top to bottom, an electrode slot with an opening is formed between the second limit baffle and the second baffle pressing piece, the third limit baffle and the third baffle pressing piece are fixed on the upper surface of the grounding electrode from top to bottom, an electrode slot with an opening is formed between the third limit baffle and the third baffle pressing piece, and the openings of the three electrode slots face the same direction.

[0009] The sample holder converter as described above, wherein, preferably, a manipulator grasping handle extends outward at the second side of the base plate, and a manipulator grasping hole penetrating up and down is provided in the manipulator grasping handle.

[0010] The sample holder converter as described above, wherein, preferably, the grounding electrode is distributed at the third side of the base plate and part of the second side, where the third side is located between the first side and the second side, and the brush electrode is distributed at the fourth side of the base plate and part of the second side, where the fourth side is located between the first side and the second side.

[0011] The sample holder converter as described above, wherein, preferably, the brush electrode extends in the direction from the fourth side to the third side, and the position of the brush electrode close to the third side is fixed outside the grounding electrode.

[0012] The sample holder converter as described above, wherein preferably, the grounding electrode has a grounding electrode connection hole at a position facing the second side, the brush electrode has a second grounding brush connection hole penetrating inside and outside at a position close to the third side, the inner and outer ends of the second brush connection hole are each inserted with the small end of a stepped ceramic gasket, and a screw sequentially passes through the hole of a stepped ceramic gasket, the second brush connection hole, the hole of another stepped ceramic gasket, and the grounding electrode connection hole from outside to inside to insulatively fix the brush electrode to the outside of the grounding electrode.

[0013] The sample holder converter as described above, wherein preferably, the bottom plate has a bottom plate connection hole, the brush electrode has a first brush connection hole penetrating up and down, the upper and lower ends of the first brush connection hole are each inserted with the small end of a stepped ceramic gasket, and a screw / bolt sequentially passes through the hole of a stepped ceramic gasket, the first brush connection hole, the hole of another stepped ceramic gasket, and the bottom plate connection hole from top to bottom to insulatively fix the brush electrode to the bottom plate.

[0014] The sample holder converter as described above, wherein preferably, the side surface of the brush electrode is used to contact the brush of the platform-type sample stage, and the bottom plate is used to be mounted on the platform-type sample stage.

[0015] The sample holder converter as described above, wherein preferably, a part of the lower surface of the first limiting baffle protrudes downward and contacts the upper surface of the first baffle pressing piece to form an electrode clamping groove with an opening, a part of the lower surface of the second limiting baffle protrudes downward and contacts the upper surface of the second baffle pressing piece to form an electrode clamping groove with an opening, and a part of the lower surface of the third limiting baffle protrudes downward and contacts the upper surface of the third baffle pressing piece to form an electrode clamping groove with an opening.

[0016] The sample holder converter as described above, wherein preferably, the second baffle pressing piece, the second baffle pressing piece, and the third baffle pressing piece have elasticity.

[0017] The sample holder converter as described above, wherein preferably, the size of the first limiting baffle is smaller than the sizes of the second limiting baffle and the third limiting baffle, and the size of the first baffle pressing piece is smaller than the sizes of the second baffle pressing piece and the third baffle pressing piece.

[0018] Compared with the above background art, the sample holder converter provided by the present application enables the sample to always remain on the Unisoku - type sample holder (ring - type sample holder) during the sample transfer process. The Unisoku - type sample holder (ring - type sample holder) can be installed on the ScientaOmicron - type sample stage (platform - type sample stage) of the ScientaOmicron - type UHV equipment (UHV equipment with a platform - type sample stage) through this sample holder converter. Therefore, the entire sample transfer process can be completed in a vacuum environment (for example: interconnected through a vacuum suitcase), avoiding the transfer of the sample in the atmosphere, making the sample transfer between the two UHV equipments more convenient, and also reducing the damage to the sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings.

[0020] Figure 1 is a perspective view of the sample holder converter provided by the embodiment of the present application;

[0021] Figure 2 is a perspective view of the grounding base plate of the sample holder converter provided by the embodiment of the present application;

[0022] Figure 3 is a perspective view of the brush electrode of the sample holder converter provided by the embodiment of the present application;

[0023] Figure 4 is a perspective view of the stepped ceramic gasket of the sample holder converter provided by the embodiment of the present application;

[0024] Figure 5 is a perspective view of the first limit baffle of the sample holder converter provided by the embodiment of the present application;

[0025] Figure 6 is a perspective view of the second and third limit baffles of the sample holder converter provided by the embodiment of the present application;

[0026] Figure 7 is a perspective view of the first baffle pressing piece of the sample holder converter provided by the embodiment of the present application;

[0027] Figure 8 is a perspective view of the second and third baffle pressing pieces of the sample holder converter provided by the embodiment of the present application;

[0028] Figure 9Schematic diagram of the sample holder converter provided by an embodiment of the present application installed on a ScientaOmicron - type sample stage;

[0029] Figure 10 Schematic diagram of cooperation between a Unisoku - type robotic arm and a Unisoku - type sample holder on a sample holder converter provided by an embodiment of the present application;

[0030] Figure 11 Schematic diagram of a Unisoku - type robotic arm grasping the Unisoku - type sample holder on a sample holder converter provided by an embodiment of the present application;

[0031] Figure 12 Schematic diagram of a Unisoku - type robotic arm installing the Unisoku - type sample holder onto a Unisoku - type sample stage provided by an embodiment of the present application. Detailed implementation manners

[0032] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention, and should not be construed as a limitation of the present invention.

[0033] Please refer to Figure 1 , the present application provides a sample holder converter 100, including: a grounding base plate 110, a brush electrode 120, a first limit baffle 131, a first baffle pressing piece 141, a second limit baffle 132, a second baffle pressing piece 142, a third limit baffle 133, and a third baffle pressing piece 143.

[0034] Please refer to Figure 2 , wherein, the grounding base plate 110 includes: a base plate 111 and a grounding electrode 112. The base plate 111 is used to be installed on a ScientaOmicron - type sample stage. The ScientaOmicron - type sample stage is a sample stage that cooperates with a ScientaOmicron - type UHV device. The ScientaOmicron - type sample stage can also be called a platform - type sample stage, and the ScientaOmicron - type UHV device can be called a UHV device with a platform sample stage.

[0035] A transfer hole 1117 penetrating up and down is formed in the bottom plate 111 for inserting a Unisoku - type manipulator to grasp a Unisoku - type sample carrier. Here, the Unisoku - type sample carrier is a sample carrier that cooperates with a Unisoku - type UHV device, and the Unisoku - type manipulator is a manipulator that cooperates with a Unisoku - type UHV device. The Unisoku - type sample carrier can also be called a ring - type sample carrier, and the Unisoku - type UHV device can be called a UHV device with a ring - type sample stage. The Unisoku - type manipulator can be called a rotary grasping manipulator. For the convenience of transfer, the transfer hole 1117 opens towards the first side 1111 of the bottom plate 111. Preferably, the bottom plate 111 is a square plate or a rectangular plate, and the transfer hole 1117 opens towards the first side 1111 of the square plate or the rectangular plate. A manipulator grasping hole 1118 is arranged at a position on the bottom plate 111 close to the second side 1112, where the second side 1112 is opposite to the first side 1111. Thus, grasping is achieved through the cooperation of a ScientaOmicron - type manipulator (the ScientaOmicron - type manipulator is a manipulator that cooperates with a ScientaOmicron - type UHV device, and the ScientaOmicron - type manipulator can also be called a horizontal grasping manipulator) and the manipulator grasping hole 1118. Preferably, for the convenience of the cooperation between the ScientaOmicron - type manipulator and the manipulator grasping hole 1118, a manipulator grasping handle 1115 extends outward at the second side 1112 of the bottom plate 111, and a manipulator grasping hole 1118 penetrating up and down is arranged in the manipulator grasping handle 1115. More preferably, the manipulator grasping handle 1115 extends outward from the middle position of the second side 1112, that is, the manipulator grasping handle 1115 is located at the middle position of the second side 1112.

[0036] The grounding electrode 112 is arranged on the upper surface of the bottom plate 111 and surrounds part of the edge of the transfer hole. Specifically, the grounding electrode 112 is distributed on the third side 1113 of the square plate or the rectangular plate and part of the second side 1112, where the third side 1113 is located between the first side 1111 and the second side 1112, so that the grounding electrode 112 surrounds the part of the transfer hole 1117 opposite to the third side 1113 and part of the second side 1112. In this application, the grounding electrode 112 and the bottom plate 111 are preferably of an integral structure. Of course, the grounding electrode 112 and the bottom plate 111 can also be of a split - type structure and are fixed and connected into a whole.

[0037] Continue to refer to Figure 1 and Figure 2, the brush electrode 120 is fixed on the upper surface of the bottom plate 111 of the grounded bottom plate 110 and surrounds a partial edge of the transfer hole 1117. Specifically, the brush electrode 120 is distributed at the fourth side 1114 of a square or rectangle and a partial second side 1112, where the fourth side 1114 is located between the first side 1111 and the second side 1112, so that the brush electrode 120 surrounds the part of the transfer hole 1117 opposite to the fourth side 1114 and the partial second side 1112.

[0038] Moreover, the brush electrode 120 is insulated from both the bottom plate 111 of the grounded bottom plate 110 and the ground electrode 112. Specifically, please refer to Figure 2 and Figure 3 , the bottom plate 111 has a bottom plate connection hole 1116, the brush electrode 120 has a first brush connection hole 121 penetrating up and down, and the upper and lower ends of the first brush connection hole 121 are inserted into the small end 151 of a stepped ceramic gasket 150 (as shown in Figure 4 ). A screw / bolt sequentially passes through the hole of a stepped ceramic gasket 150, the first brush connection hole 121, the hole of another stepped ceramic gasket 150, and the bottom plate connection hole 1116 from top to bottom, so that the large end 152 of a stepped ceramic gasket 150 contacts the bottom plate 111, the large end 152 of another stepped ceramic gasket 150 contacts the screw / bolt, and the brush electrode 120 is fixed on the bottom plate 111, ensuring the insulation between the brush electrode 120 and the bottom plate 111.

[0039] In addition, to ensure the stability of the brush electrode 120, the brush electrode 120 extends in the direction from the fourth side 1114 towards the third side 1113, and the position of the brush electrode 120 close to the third side 1113 is fixed outside the ground electrode 112. Specifically, the ground electrode 112 has a ground electrode connection hole (not shown in the figure) at the position towards the second side 1112, the position of the brush electrode 120 close to the third side 1113 has a second ground brush connection hole 122 penetrating inside and outside, and the inner and outer ends of the second brush connection hole 122 are inserted into the small end 151 of a stepped ceramic gasket 150. A screw sequentially passes through the hole of a stepped ceramic gasket 150, the second brush connection hole 122, the hole of another stepped ceramic gasket 150, and the ground electrode connection hole from outside to inside, so that the large end 152 of a stepped ceramic gasket 150 contacts the ground electrode 112, the large end 152 of another stepped ceramic gasket 150 contacts the screw, and the brush electrode 120 is fixed outside the ground electrode 112, ensuring the insulation between the brush electrode 120 and the ground electrode 112.

[0040] To reduce the volume of the sample holder converter 100, preferably, the lower part of the side surface of the ground electrode 112 near the second side 1112 has an inwardly concave receiving groove 1121, and the receiving groove 1121 extends in the horizontal direction to receive the part of the brush electrode 120 extending from the fourth side 1114 towards the third side 1113. On this basis, the ground electrode connection hole is arranged in the receiving groove 1121 to fix the brush electrode 120 and the ground electrode 112 in the receiving groove 1121. In addition, a recess 125 is formed inwardly at the position of the brush electrode 120 near the third side 1113, and the second ground brush connection hole 122 is opened at the recess 125 to fix the brush electrode 120 and the ground electrode 112 at the recess 125.

[0041] On the above basis, at the position where the first brush connection holes 121 are distributed on the brush electrode 120, a recess 126 is formed downward from its upper surface, and the first brush connection holes 121 are located at the recess 126 to fix the brush electrode 120 and the bottom plate 111 at the recess 126.

[0042] The side surface of the brush electrode 120 is used for brush contact with a ScientaOmicron type sample stage (platform type sample stage). Specifically, the side surface of the brush electrode 120 relative to the fourth side 1114 has an outwardly protruding horizontal guide rail 123, and the upper surface of the horizontal guide rail 123 is used for placing the brush of the ScientaOmicron type sample stage (platform type sample stage) so that the brush of the ScientaOmicron type sample stage (platform type sample stage) contacts the brush electrode 120. On this basis, to reduce the volume of the sample holder converter 100, the lower part of the side surface of the brush electrode 120 relative to the fourth side 1114 has an inwardly concave receiving groove 124, and the horizontal guide rail 123 protrudes outwardly in the receiving groove 124. The first limit baffle 131 and the first baffle pressing piece 141 are fixed to the upper surface of the brush electrode 120 from top to bottom, and an electrode clamping groove with an opening is formed between the first limit baffle 131 and the first baffle pressing piece 141. The second limit baffle 132 and the second baffle pressing piece 142 are fixed to the upper surface of the ground electrode 112 from top to bottom, and an electrode clamping groove with an opening is formed between the second limit baffle 132 and the second baffle pressing piece 142. The third limit baffle 133 and the third baffle pressing piece 143 are fixed to the upper surface of the ground electrode 112 from top to bottom, and an electrode clamping groove with an opening is formed between the third limit baffle 133 and the third baffle pressing piece 143. To ensure that the Unisoku type sample holder (ring type sample holder) is successfully clamped into the above three electrode clamping grooves, the openings of the three electrode clamping grooves in this application face the same direction, that is, both in the clockwise direction or both in the counterclockwise direction, to ensure the successful clamping of the Unisoku type sample holder (ring type sample holder).

[0043] Please refer to Figure 5 and Figure 6 , a part of the lower surface of the first limiting baffle 131 protrudes downward and contacts the upper surface of the first baffle pressing piece 141, so that an electrode clamping groove with an opening is formed between the first limiting baffle 131 and the first baffle pressing piece 141. A part of the lower surface of the second limiting baffle 132 protrudes downward and contacts the upper surface of the second baffle pressing piece 142, so that an electrode clamping groove with an opening is formed between the second limiting baffle 132 and the second baffle pressing piece 142. A part of the lower surface of the third limiting baffle 133 protrudes downward and contacts the upper surface of the third baffle pressing piece 143, so that an electrode clamping groove with an opening is formed between the third limiting baffle 133 and the third baffle pressing piece 143. On this basis, the first limiting baffle 131, the first baffle pressing piece 141 and the brush electrode 120 are fixed by the first screw, the second limiting baffle 132, the second baffle pressing piece 142 and the grounding electrode 112 are fixed by the second screw, and the third limiting baffle 133, the third baffle pressing piece and the grounding electrode 112 are fixed by the third screw. In this application, preferably, the first baffle pressing piece 141, the second baffle pressing piece 142 and the third baffle pressing piece 143 have elasticity (for example: elastic thin sheet, thickness 0.3mm) to clamp the Unisoku type sample holder (ring type sample holder) through the deformation of the first baffle pressing piece 141, the second baffle pressing piece 142 and the third baffle pressing piece 143. In addition, the materials of the first baffle pressing piece 141, the second baffle pressing piece 142 and the third baffle pressing piece 143 in this application can be tantalum metal, so as to balance elasticity and temperature change range. The materials of the grounding base plate 110, the brush electrode 120, the first limiting baffle 131, the second limiting baffle 132 and the third limiting baffle 133 can be molybdenum metal, so that the sample holder converter 100 can be used in the range of -270 to 1400 °C. The materials of the first baffle pressing piece 141, the second baffle pressing piece 142 and the third baffle pressing piece 143 can also be beryllium copper or 3j21 alloy, and the materials of the grounding base plate 110, the brush electrode 120, the first limiting baffle 131, the second limiting baffle 132 and the third limiting baffle 133 can also be 304 or 316 stainless steel, so that the sample holder converter 100 can have higher strength and longer service life on a system with mild temperature change.

[0044] On the basis described above, the first limit baffle 131 and the first baffle pressing piece 141 are fixed at the position of the brush electrode 120 close to the opening of the transfer hole 1117, and the electrode card slot formed by them faces outward, where the outward side here is the outward side of the transfer hole 1117, so as to provide a deformation space for the first baffle pressing piece 141 through the open space on the outside. The second limit baffle 132 and the second baffle pressing piece 142 are fixed at the position of the ground electrode 112 close to the first brush connection hole 121, and the electrode card slot formed by them faces the first brush connection hole 121, so as to provide a deformation space for the second baffle pressing piece 142 through the depression 126 at the first brush connection hole 121. The third limit baffle 133 and the third baffle pressing piece 143 are fixed at the position of the ground electrode 112 close to the opening of the transfer hole 1117, and the electrode card slot formed by them faces the second ground brush connection hole 122. In order to provide a deformation space for the third baffle pressing piece 143, a downward depression 1122 is formed at the position of the upper surface of the ground electrode 112 opposite to the third baffle pressing piece 143.

[0045] In addition, the size of the first limit baffle 131 is smaller than the sizes of the second limit baffle 132 and the third limit baffle 133, and the size of the first baffle pressing piece 141 is smaller than the sizes of the second baffle pressing piece 142 and the third baffle pressing piece 143, so as to facilitate the Unisoku type manipulator (rotary grasping manipulator) to take out the Unisoku type sample tray (ring type sample tray).

[0046] When using the sample tray converter 100 of the present application, as Figure 9 and Figure 1As shown, the Unisoku - type sample holder (ring - type sample holder) 200 is clamped in the electrode card slots formed by the first limit baffle 131 and the first baffle pressing piece 141 of the sample holder converter 100, the electrode card slots formed by the second limit baffle 132 and the second baffle pressing piece 142, and the electrode card slot of the third limit baffle 133 and the third baffle pressing piece 143. The bottom plate 111 of the grounding bottom plate 110 is inserted onto the ScientaOmicron - type sample stage (platform - type sample stage) 300, and the brush 400 on the ScientaOmicron - type sample stage (platform - type sample stage) 300 contacts the side of the brush electrode 120. Taking this as the positive electrode, the second limit baffle 132 and the second baffle pressing piece 142 or the third limit baffle 133 and the third baffle pressing piece 143 contact the ScientaOmicron - type sample stage (platform - type sample stage) 300 through the grounding electrode 112 and the bottom plate 111 to serve as the negative electrode. Thus, the sample holder converter 100 is divided into positive and negative electrodes. After passing an electric current, the sample on the Unisoku - type sample holder (ring - type sample holder) 200 can be heated to ensure the smooth growth of the sample. When transferring the sample from the ScientaOmicron - type UHV equipment (UHV equipment with a platform sample stage) to the Unisoku - type UHV equipment (UHV equipment with a ring - type sample stage), the ScientaOmicron - type manipulator (horizontal grasping manipulator) 500 cooperates with the manipulator grasping hole 1118 to remove the sample holder converter 100, the Unisoku - type sample holder (ring - type sample holder) 200, and the sample from the ScientaOmicron - type sample stage (platform - type sample stage) 300.

[0047] Then, as Figure 10 、 Figure 11 and Figure 1 shown, the Unisoku - type manipulator (rotary grasping manipulator) 600 is inserted from below into the transfer hole 1117 on the bottom plate 111 and cooperates with the Unisoku - type sample holder (ring - type sample holder) 200 clamped on the sample holder converter 100. It rotates to remove the Unisoku - type sample holder (ring - type sample holder) 200 from the electrode card slot of the sample holder converter 100 and takes it out through the opening of the transfer hole 1117 of the sample holder converter 100.

[0048] Next, as Figure 12 shown, the Unisoku - type manipulator (rotary grasping manipulator) 600 installs the Unisoku - type sample holder (ring - type sample holder) 200 and the sample thereon onto the Unisoku - type sample stage (ring - type sample stage) 700, thus completing the transfer of the sample from the ScientaOmicron - type UHV equipment (UHV equipment with a platform sample stage) to the Unisoku - type UHV equipment (UHV equipment with a ring - type sample stage).

[0049] Of course, when transferring the sample from a Unisoku-type UHV device (a UHV device with a ring-type sample stage) to a ScientaOmicron-type UHV device (a UHV device with a platform sample stage), the direction is opposite to that described above, which will not be elaborated here.

[0050] During the sample transfer process, the sample always remains on the Unisoku-type sample holder (ring-type sample holder) 200. The Unisoku-type sample holder (ring-type sample holder) 200 can be installed on the ScientaOmicron-type sample stage (platform-type sample stage) 300 of the ScientaOmicron-type UHV device (a UHV device with a platform sample stage) through the sample holder converter 100. Therefore, the entire sample transfer process can be completed in a vacuum environment (e.g., interconnected through a vacuum suitcase), avoiding sample transfer in the atmosphere, making the sample transfer between the two UHV devices more convenient and reducing damage to the sample.

[0051] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed claims.

[0052] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A sample holder converter, characterized in that, it includes: a grounding base plate, a brush electrode, a first limit baffle, a first baffle pressing piece, a second limit baffle, a second baffle pressing piece, a third limit baffle and a third baffle pressing piece; The grounding base plate includes: a base plate and a grounding electrode; a transfer hole penetrating up and down is formed on the base plate, and the transfer hole opens towards the first side of the base plate; A manipulator grasping hole is arranged on the base plate near the second side, where the second side is opposite to the first side; the grounding electrode is arranged on the upper surface of the base plate and surrounds part of the edge of the transfer hole; The brush electrode is fixed on the upper surface of the base plate, surrounds part of the edge of the transfer hole, and the brush electrode is insulated from both the base plate and the grounding electrode; The first limit baffle and the first baffle pressing piece are fixed on the upper surface of the brush electrode from top to bottom, and an electrode clamping groove with an opening is formed between the first limit baffle and the first baffle pressing piece. The second limit baffle and the second baffle pressing piece are fixed on the upper surface of the grounding electrode from top to bottom, and an electrode clamping groove with an opening is formed between the second limit baffle and the second baffle pressing piece. The third limit baffle and the third baffle pressing piece are fixed on the upper surface of the grounding electrode from top to bottom, and an electrode clamping groove with an opening is formed between the third limit baffle and the third baffle pressing piece, and the openings of the three electrode clamping grooves face the same direction; The electrode clamping groove formed by the first limit baffle and the first baffle pressing piece, the electrode clamping groove formed by the second limit baffle and the second baffle pressing piece, and the electrode clamping groove of the third limit baffle and the third baffle pressing piece are used for clamping a ring-shaped sample holder; The base plate of the grounding base plate is used for being inserted into a platform-type sample stage, and the side surface of the brush electrode is used for contacting the brush on the platform-type sample stage to serve as the positive electrode; The second limit baffle and the second baffle pressing piece or the third limit baffle and the third baffle pressing piece are used for contacting the platform-type sample stage through the grounding electrode and the base plate to serve as the negative electrode.

2. The sample holder converter according to claim 1, characterized in that, A manipulator grasping handle extends outward at the second side of the base plate, and a manipulator grasping hole penetrating up and down is arranged on the manipulator grasping handle.

3. The sample holder converter according to claim 1, characterized in that, The grounding electrode is distributed at the third side and part of the second side of the base plate, where the third side is located between the first side and the second side, and the brush electrode is distributed at the fourth side and part of the second side of the base plate, where the fourth side is located between the first side and the second side.

4. The sample holder converter according to claim 3, characterized in that, The brush electrode extends in the direction from the fourth side towards the third side, and the position of the brush electrode close to the third side is fixed outside the grounding electrode.

5. The sample holder converter according to claim 4, characterized in that, The grounding electrode has a grounding electrode connection hole at the position towards the second side, the brush electrode has a second grounding brush connection hole penetrating inside and outside at the position close to the third side, the inner and outer ends of the second brush connection hole are both inserted into the small ends of a stepped ceramic gasket, and the screw sequentially passes through the hole of a stepped ceramic gasket, the second brush connection hole, the hole of another stepped ceramic gasket, and the grounding electrode connection hole from outside to inside to insulate and fix the brush electrode outside the grounding electrode.

6. The sample holder converter according to any one of claims 1-5, characterized in that, the bottom plate has bottom plate connection holes, the brush electrode has a first brush connection hole penetrating up and down, and the upper and lower ends of the first brush connection hole are each inserted into the small end of a stepped ceramic gasket, and the screw / bolt sequentially passes through the hole of a stepped ceramic gasket, the first brush connection hole, the hole of another stepped ceramic gasket, and the bottom plate connection hole from top to bottom to insulate and fix the brush electrode on the bottom plate.

7. The sample holder converter according to any one of claims 1-5, characterized in that, part of the lower surface of the first limit baffle protrudes downward and contacts the upper surface of the first baffle pressing piece to form an electrode clamping groove with an opening, part of the lower surface of the second limit baffle protrudes downward and contacts the upper surface of the second baffle pressing piece to form an electrode clamping groove with an opening, and part of the lower surface of the third limit baffle protrudes downward and contacts the upper surface of the third baffle pressing piece to form an electrode clamping groove with an opening.

8. The sample holder converter according to any one of claims 1-5, characterized in that, the second baffle pressing piece, the second baffle pressing piece, and the third baffle pressing piece have elasticity.

9. The sample holder converter according to any one of claims 1-5, characterized in that, the size of the first limit baffle is smaller than the sizes of the second limit baffle and the third limit baffle, and the size of the first baffle pressing piece is smaller than the sizes of the second baffle pressing piece and the third baffle pressing piece.

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