Detection device and its light-receiving device

Abstract

The present invention discloses a detection device and a light receiving device thereof. The light receiving device includes a telecentric lens group, an image processing module, and a calculation module. The telecentric lens group has an incident light end and an exit light end, and is used to guide multiple first light rays emitted by a plurality of light emitting chips and passing through the incident light end into the telecentric lens group, and to form multiple second light rays with a smaller divergence angle when passing through the exit light end. The image processing module is disposed at the exit light end of the telecentric lens group, and is used to receive and process each of the second light rays passing through the exit light end, so as to calculate the RGB gray scale value of the corresponding light emitting chip. The calculation module is electrically coupled to the image processing module, and is used to receive the RGB gray scale value of each light emitting chip and calculate the light parameters of each light emitting chip. Accordingly, by providing the telecentric lens group, the light receiving device can obtain the light parameters of each light emitting chip.

Description

Technical Field

[0001] The present invention relates to a detection device, and more particularly to a detection device capable of simultaneously detecting multiple light-emitting chips and a light-receiving device thereof. Background Art

[0002] For the existing detection device used to detect multiple light-emitting chips, the light rays emitted by the multiple light-emitting chips are regarded as a single surface light source, and then the sum of the light parameters inferred from the surface light source is divided by the number of the multiple light-emitting chips to be used as the light parameter of each light-emitting chip. That is to say, the existing detection device cannot separately detect the light parameter of a single light-emitting chip among the multiple light-emitting chips.

[0003] Therefore, the inventor believes that the above defects can be improved. Through painstaking research and the application of scientific principles, the inventor finally proposes the present invention with reasonable design and effective improvement of the above defects. Summary of the Invention

[0004] An embodiment of the present invention provides a detection device and a light-receiving device thereof, which can effectively improve the defects that may occur in the existing detection device.

[0005] An embodiment of the present invention discloses a detection device, which includes: an electrical detection device, including: a probe card; an optical alignment module, whose position corresponds to the probe card; a light-transmitting carrier plate, whose position corresponds to the probe card, and the light-transmitting carrier plate has a bearing surface for bearing multiple light-emitting chips and a light-emitting surface located on the opposite side of the bearing surface; wherein, after the probe card is aligned through the optical alignment module, it is used to simultaneously supply power and electrically detect the multiple light-emitting chips on the light-transmitting carrier plate, so that each light-emitting chip emits a first light ray with a first divergence angle towards the light-emitting surface; and a light-receiving device, which is adjacently arranged on the light-emitting surface of the light-transmitting carrier plate, and the light-receiving device includes: a telecentric lens group, which includes an incident light end and an emergent light end; wherein, the telecentric lens group is used to guide multiple first light rays passing through the light-emitting surface and entering from the incident light end into it, and make the multiple first light rays pass through the emergent light end and form multiple second light rays; wherein, the second divergence angle of each second light ray is smaller than the first divergence angle of the corresponding first light ray; an image processing module, which is arranged at the emergent light end of the telecentric lens group, and is used to receive and process each second light ray passing through the emergent light end to calculate the RGB gray scale value of the corresponding light-emitting chip; and a calculation module, which is electrically coupled to the image processing module, and is used to receive the RGB gray scale value of each light-emitting chip and calculate the light parameter of each light-emitting chip.

[0006] Preferably, the light-receiving device further includes a light-reducing mirror located between the incident light end of the telecentric lens group and the light-emitting surface of the light-transmitting carrier plate, and the light-reducing mirror is used to reduce the light intensity of each first light ray.

[0007] Preferably, the light collecting device further includes: a spectrometer electrically coupled to the calculation module; and a beam splitter connected to the telecentric lens group and used to receive each second light beam; wherein the position of the beam splitter corresponds to the image processing module and the spectrometer, so that each second light beam received by it is guided to the image processing module and the spectrometer; wherein the spectrometer can calculate an average spectrum of a plurality of light-emitting chips according to the multiple second light beams received by it; the calculation module can calculate the optical parameters of each light-emitting chip according to the RGB gray-scale values and the average spectrum.

[0008] Preferably, the image processing module includes: an image receiver adjacent to the light-emitting end of the telecentric lens group, and the image receiver can receive any second light beam with its multiple pixels to correspondingly generate an image of a light-emitting chip; and a signal processing unit electrically coupled to the image receiver and the calculation module; the signal processing unit can be used to perform image processing on each light-emitting chip image to calculate the corresponding RGB gray-scale values.

[0009] Preferably, the number of multiple light-emitting chips that the light-transmitting carrier plate can carry is more than 100 and is arranged on a carrier, and the telecentric lens group of the light collecting device can be used to simultaneously guide multiple first light beams emitted by more than 100 light-emitting chips to form more than 100 non-overlapping second light beams.

[0010] An embodiment of the present invention also discloses a light collecting device of a detection device, which includes: a telecentric lens group including a light incident end and a light emitting end; wherein the telecentric lens group is used to guide multiple first light beams emitted by multiple light-emitting chips and passing through the light incident end into it, and make the multiple first light beams pass through the light emitting end and form multiple second light beams; wherein the second divergence angle of each second light beam is smaller than the first divergence angle of the corresponding first light beam; an image processing module arranged at the light emitting end of the telecentric lens group, used to receive and process each second light beam passing through the light emitting end to calculate the RGB gray-scale value of the corresponding light-emitting chip; and a calculation module electrically coupled to the image processing module, used to receive the RGB gray-scale value of each light-emitting chip and calculate the optical parameters of each light-emitting chip.

[0011] Preferably, the light collecting device further includes a neutral density filter located between the light incident end of the telecentric lens group and the light emitting surface of the light-transmitting carrier plate, and the neutral density filter is used to reduce the light intensity of each first light beam.

[0012] Preferably, the light collection device further includes: a spectrometer electrically coupled to the calculation module; and a beam splitter connected to the telecentric lens group and used to receive each second light beam; the position of the beam splitter corresponds to the image processing module and the spectrometer, and is used to guide each second light beam received by it to the image processing module and the spectrometer; wherein, the spectrometer can calculate an average spectrum of a plurality of light-emitting chips based on the multiple second light beams received by it; the calculation module can calculate the light parameters of each light-emitting chip based on the RGB grayscale values and the average spectrum.

[0013] Preferably, the image processing module includes: an image receiver adjacent to the light output end of the telecentric lens group, and the image receiver can receive any second light beam with its multiple pixels to correspondingly generate an image of a light-emitting chip; and a signal processing unit electrically coupled to the image receiver and the calculation module; the signal processing unit can be used to perform image processing on each light-emitting chip image to calculate the corresponding RGB grayscale values.

[0014] Preferably, the telecentric lens group of the light collection device can be used to simultaneously guide multiple first light beams emitted by more than 100 light-emitting chips to form more than 100 non-overlapping second light beams.

[0015] In summary, for the detection device and its light collection device disclosed in the embodiments of the present invention, by arranging the telecentric lens group before the light of the multiple light-emitting chips enters the image processing module, the light of the multiple light-emitting chips is separated by the telecentric lens group, and the light of each light-emitting chip can be individually detected by the image processing module and the calculation module, so as to obtain the light parameters of each light-emitting chip.

[0016] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, these descriptions and drawings are only used to illustrate the present invention and do not impose any limitation on the protection scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the detection device according to Embodiment 1 of the present invention.

[0018] Figure 2 is Figure 1 a partial schematic diagram of

[0019] Figure 3 is Figure 2 a partial schematic diagram of

[0020] Figure 4 It is a partial schematic diagram of the detection device according to Embodiment 2 of the present invention.

[0021] Figure 5 isFigure 4 Partial schematic view Detailed implementation manners

[0022] The following are the implementation manners of the present invention regarding "detection device and its light receiving device" disclosed through specific specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple schematic illustration and are not drawn according to actual dimensions, which is stated in advance. The following implementation manners will further detail the related technical content of the present invention, but the disclosed content is not used to limit the protection scope of the present invention.

[0023] It should be understood that although terms such as "first", "second", "third", etc. may be used in this article to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used in this article should, depending on the actual situation, possibly include any one or a combination of more of the associated listed items.

[0024] [Embodiment 1]

[0025] Please refer to Figures 1 to 3 shown in the figure, which is Embodiment 1 of the present invention. This embodiment discloses a detection device 100, which can simultaneously detect the electrical and optical parameters of multiple light emitting chips 200 (such as: light emitting diode chips). Among them, the detection device 100 includes an electrical detection device 1 and a light receiving device 2 disposed adjacent to the electrical detection device 1.

[0026] It should be noted first that the light receiving device 2 is described in this embodiment in combination with the electrical detection device 1, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the light receiving device 2 can also be applied independently (such as: sold) or used in combination with other devices (such as: other detection devices different from the electrical detection device 1 in this embodiment).

[0027] The electrical detection device 1 includes a probe card 11, an optical alignment module 12 (such as: charge coupled device, CCD) corresponding to the probe card 11 in position, a light transmissive carrier plate 13 corresponding to the probe card 11 in position, and a transfer module 14. Among them, the probe card 11, the optical alignment module 12, and the light transmissive carrier plate 13 can be installed on the transfer module 14, so as to be able to perform multi-axial displacement through the transfer module 14.

[0028] Furthermore, the type of the probe card 11 can be adjusted and changed according to design requirements. For example, the probe card 11 can be a cantilever probe card, a vertical probe card, or a microelectromechanical probe card, which is not limited in the present invention. The optical alignment module 12 and the light-transmissive carrier 13 are respectively located on opposite sides of the probe card 11 to facilitate the optical alignment module 12 to detect the relative positions of the probe card 11 and the light-transmissive carrier 13.

[0029] More specifically, the light-transmissive carrier 13 is transparent in this embodiment, and the light-transmissive carrier 13 has a bearing surface 131 for bearing a plurality of light-emitting chips 200 and a light-emitting surface 132 located on the opposite side of the bearing surface 131. Among them, the number of the plurality of light-emitting chips 200 that the light-transmissive carrier 13 can bear is preferably more than 100 and is arranged on a carrier 300 (such as a blue adhesive film), but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the light-transmissive carrier 13 can also be used to bear a plurality of light-emitting chips 200 not arranged on any carrier; or, the number of the plurality of light-emitting chips 200 that the light-transmissive carrier 13 can bear can also be less than 100.

[0030] As described above, after the probe card 11 is aligned by the optical alignment module 12, it can be used to simultaneously supply power and perform electrical detection (such as voltage, current, and power) on the plurality of light-emitting chips 200 on the light-transmissive carrier 13, so that each light-emitting chip 200 emits a first light ray L1 with a first divergence angle σ1 towards the light-emitting surface 132. Among them, the first divergence angle σ1 of each first light ray L1 is described as 110 degrees to 130 degrees in this embodiment, but the present invention is not limited thereto.

[0031] The light collection device 2 is disposed adjacent to the light-emitting surface 132 of the light-transmissive carrier 13; that is, the light collection device 2 is located on the light-emitting path of each light-emitting chip 200. Further, in this embodiment, when two first light rays L1 emitted by any two adjacent light-emitting chips 200 reach the light collection device 2, they are described as partially overlapping with each other, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, when two first light rays L1 emitted by any two adjacent light-emitting chips 200 reach the light collection device 2, they may also not overlap with each other.

[0032] The light collection device 2 in this embodiment includes a telecentric lens group 21, an image processing module 22 located on one side of the telecentric lens group 21, and a calculation module 23 electrically coupled to the image processing module 22.

[0033] It should be further noted that the shortest distance between the light collection device 2 and the light-transmitting carrier 13 (e.g., the distance of the light incident end 211 relative to the light-emitting surface 132) can be between 80 millimeters (mm) and 150 millimeters, but this value can be adjusted according to design requirements and is not limited to this embodiment.

[0034] The telecentric lens group 21 can be composed of a plurality of lenses cooperating with each other, and the telecentric lens group 21 includes a light incident end 211 adjacent to the light-emitting surface 132 and a light-emitting end 212 away from the light incident end 211; that is to say, the light incident end 211 is located on the light-emitting path of each light-emitting chip 200.

[0035] Furthermore, the telecentric lens group 21 is used to guide multiple first light rays L1 that pass through the light-emitting surface 132 and enter through the light incident end 211, and make the multiple first light rays L1 pass through the light-emitting end 212 and form multiple second light rays L2. Among them, the second divergence angle σ2 of each second light ray L2 is smaller than the first divergence angle σ1 of the corresponding first light ray L1.

[0036] Furthermore, in this embodiment, the second divergence angle σ2 is within 10 degrees (e.g., 1 degree to 3 degrees), so that the multiple second light rays L2 can be non-overlapping with each other, thereby effectively avoiding mutual interference between the multiple second light rays L2. For example: the telecentric lens group 21 of the light collection device 2 in this embodiment can be used to simultaneously guide multiple first light rays L1 emitted by more than 100 light-emitting chips 200 (located on the light-transmitting carrier 13) to form more than 100 non-overlapping second light rays L2, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the telecentric lens group 21 can be used to guide multiple first light rays L1 that overlap with each other to form multiple second light rays L2 with a lower degree of overlap, thereby reducing the mutual interference between the multiple second light rays L2.

[0037] The image processing module 22 is disposed at the light-emitting end 212 of the telecentric lens group 21, and is used to receive and process each second light ray L2 that passes through the light-emitting end 212 to calculate the RGB gray scale value of the corresponding light-emitting chip 200. Furthermore, the calculation module 23 is electrically coupled to the image processing module 22, and is used to receive the RGB gray scale value of each light-emitting chip 200 and calculate the light parameters of each light-emitting chip 200.

[0038] More specifically, in this embodiment, the image processing module 22 includes an image receiver 221 (such as a color charge coupled device) adjacent to the light output end 212 and a signal processing unit 222 electrically coupled to the image receiver 221 and the calculation module 23. However, the present invention is not limited thereto. Among them, the image receiver 221 can receive any one of the second light rays L2 with its multiple pixels to correspondingly generate a light emitting chip image, and the signal processing unit 222 can be used to perform image processing on each of the light emitting chip images to calculate the corresponding RGB gray scale values (0 to 65536 colors).

[0039] Among them, in this embodiment, the signal processing unit 222 synchronously processes the light emitting chip images corresponding to all the light emitting chips 200, but the light emitting chip images of each of the light emitting chips 200 are processed separately by the signal processing unit 222; that is to say, each of the light emitting chip images can be independently processed by the signal processing unit 222 for image processing, and the processing process is as follows. Each of the light emitting chip images belonging to the Tiff image file is sequentially subjected to steps such as converting to an RGB image, gray scaling, blurring, and binarization, and then each of the light emitting chip images is converted and drawn into a region of interest (ROI) image, and then the corresponding RGB gray scale values are calculated. However, the present invention is not limited thereto.

[0040] Accordingly, in this embodiment, the detection device 100 can be provided with the telecentric lens group 21 before the light rays of multiple light emitting chips 200 (such as multiple first light rays L1) enter the image processing module 22, so as to separate the light rays of multiple light emitting chips 200 (such as multiple second light rays L2) through the telecentric lens group 21, so that the light rays of each light emitting chip 200 (such as the second light ray L2) can be separately detected by the image processing module 22 and the calculation module 23, and then the light parameters of each light emitting chip 200 can be obtained.

[0041] [Embodiment 2]

[0042] Please refer to Figure 4 and Figure 5 as shown, which is Embodiment 2 of the present invention. Since this embodiment is similar to the above Embodiment 1, the same parts of the two embodiments will not be described in detail, and the main difference between this embodiment and the above Embodiment 1 lies in the light receiving device 2.

[0043] In this embodiment, the light receiving device 2 further includes a light attenuating mirror 24 located between the light incident end 211 and the light emitting surface 132, a beam splitter 25 connected to the telecentric lens group 21, and a spectrometer 26 located between the beam splitter 25 and the calculation module 23. Among them, the light attenuating mirror 24 and the image processing module 22 are respectively located on opposite sides of the telecentric lens group 21, and in this embodiment, the light attenuating mirror 24 is described as being disposed at the light incident end 211 of the telecentric lens group 21, so as to reduce the light intensity of each of the first light rays L1.

[0044] That is to say, in this embodiment, the light receiving device 2 can attenuate the light intensity of each of the first light rays L1 passing through it by means of the light attenuating mirror 24, so as to prevent the light intensity of the first light rays L1 from being too high and affecting the measurement accuracy of subsequent components (such as the image processing module 22 and the spectrometer 26). For example, the light attenuating mirror 24 can attenuate the light intensity of each of the first light rays L1 to less than 80% of the maximum intensity that the image processing module 22 (or the spectrometer 26) can withstand, but the present invention is not limited thereto.

[0045] The beam splitter 25 is connected to the telecentric lens group 21 and is used to receive each of the second light rays L2. Among them, the position of the beam splitter 25 corresponds to the image processing module 22 and the spectrometer 26, so as to guide each of the second light rays L2 received by it to the image processing module 22 and the spectrometer 26. Furthermore, in this embodiment, the beam splitter 25 is built into the telecentric lens group 21, but the present invention is not limited thereto.

[0046] Furthermore, the spectrometer 26 can calculate an average spectrum of the plurality of light emitting chips 200 based on the multiple second light rays L2 received by it, and the spectrometer 26 is electrically coupled to the calculation module 23, so as to be able to transmit the average spectrum calculated by it to the calculation module 23. Accordingly, the calculation module 23 can calculate the optical parameters (such as peak wavelength or full width at half maximum) of each of the light emitting chips 200 based on the RGB gray scale value and the average spectrum.

[0047] In other words, the calculation module 23 can use the optical parameter of a light emitting chip 200 calculated through the average spectrum as a reference value, so as to use the reference value to correct each of the passed RGB gray scale values, and then calculate the optical parameters of each of the light emitting chips 200; thereafter, the calculation module 23 calculates the optical parameters (such as peak wavelength or full width at half maximum) of each of the light emitting chips 200 according to the default design requirements.

[0048] Accordingly, the light collecting device 2 can use the image processing module 22 and the spectrometer 26 with different detection methods, so that the calculation module 23 can correct the RGB gray scale value of each light emitting chip 200 calculated from the image processing module 22 through the average spectrum obtained by the spectrometer 26, and thus can obtain more accurate light parameters of each light emitting chip 200.

[0049] It should be added that although the light collecting device 2 is described as including the above components in this embodiment, the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the light collecting device 2 may also selectively omit at least one of the neutral density filter 24, the beam splitter 25, and the spectrometer 26 according to design requirements.

[0050] [Technical effects of the embodiments of the present invention]

[0051] In summary, for the detection device and its light collecting device disclosed in the embodiments of the present invention, a telecentric lens group is provided before the light of multiple light emitting chips enters the image processing module, so as to separate the light of multiple light emitting chips through the telecentric lens group, and the light of each light emitting chip can be individually detected by the image processing module and the calculation module, and thus the light parameters of each light emitting chip can be obtained.

[0052] Furthermore, for the detection device and its light collecting device disclosed in the embodiments of the present invention, the telecentric lens group is used to make multiple first light rays form multiple second light rays with a smaller divergence angle, thereby effectively avoiding mutual interference between multiple second light rays. Among them, the telecentric lens group preferably enables multiple first light rays with partial overlap to form multiple second light rays that do not overlap with each other.

[0053] In addition, for the detection device and its light collecting device disclosed in the embodiments of the present invention, a neutral density filter can be provided between the light incident end of the telecentric lens group and the light emitting surface of the light transmissive carrier plate, so that the light intensity of each first light ray passing through the neutral density filter is attenuated, thereby avoiding the influence of the too high light intensity of the first light ray on the measurement accuracy of subsequent components (such as the image processing module and the spectrometer).

[0054] Moreover, for the detection device and its light collecting device disclosed in the embodiments of the present invention, the image processing module and the spectrometer with different detection methods are adopted, so that the calculation module can correct the RGB gray scale value of each light emitting chip calculated from the image processing module through the average spectrum obtained by the spectrometer, and thus can obtain more accurate light parameters of each light emitting chip.

[0055] The content disclosed above is only a preferred and feasible embodiment of the present invention, and does not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the content of the specification and drawings of the present invention are included in the patent scope of the present invention.

Claims

1. A detection device, characterized in that, the detection device includes: an electrical detection device, comprising: a probe card; an optical alignment module, whose position corresponds to that of the probe card; a light-transmitting carrier plate, whose position corresponds to that of the probe card, and the light-transmitting carrier plate has a bearing surface for bearing a plurality of light-emitting chips and a light-emitting surface located on the opposite side of the bearing surface; wherein, after the probe card is aligned by the optical alignment module, it is used to simultaneously supply power and electrically detect a plurality of the light-emitting chips on the light-transmitting carrier plate, so that each of the light-emitting chips emits a first light ray with a first divergence angle towards the light-emitting surface; and a light-receiving device, which is adjacently arranged on the light-emitting surface of the light-transmitting carrier plate, and the light-receiving device includes: a telecentric lens group, which includes an incident light end and an emergent light end; wherein, the telecentric lens group is used to guide multiple first light rays that pass through the light-emitting surface and enter into it from the incident light end, and make the multiple first light rays pass through the emergent light end and form multiple second light rays; wherein, the second divergence angle of each second light ray is smaller than the first divergence angle of the corresponding first light ray; an image processing module, which is arranged at the emergent light end of the telecentric lens group, and is used to receive and process each second light ray that passes through the emergent light end, so as to calculate the RGB gray scale value of the corresponding light-emitting chip; and a calculation module, which is electrically coupled to the image processing module, and is used to receive the RGB gray scale value of each light-emitting chip and calculate the optical parameters of each light-emitting chip.

2. The detection device according to claim 1, characterized in that, the light-receiving device further includes a light attenuator located between the incident light end of the telecentric lens group and the light-emitting surface of the light-transmitting carrier plate, and the light attenuator is used to reduce the light intensity of each first light ray.

3. The detection device according to claim 1, characterized in that, the light-receiving device further includes: a spectrometer, which is electrically coupled to the calculation module; and a beam splitter, which is connected to the telecentric lens group and is used to receive each second light ray; wherein, the position of the beam splitter corresponds to that of the image processing module and the spectrometer, and is used to guide each second light ray received by it to the image processing module and the spectrometer; wherein, the spectrometer can calculate an average spectrum of a plurality of the light-emitting chips according to the multiple second light rays received by it; the calculation module can calculate the optical parameters of each light-emitting chip according to the RGB gray scale value and the average spectrum.

4. The detection device according to claim 1, characterized in that, the image processing module includes: an image receiver, which is adjacent to the emergent light end of the telecentric lens group, and the image receiver can receive any second light ray with its multiple pixels and correspondingly generate an image of a light-emitting chip; and A signal processing unit, electrically coupled to the image receiver and the calculation module; the signal processing unit can be used to perform image processing on each of the light-emitting chip images to calculate the corresponding RGB grayscale values.

5. The detection device according to claim 1, wherein, the number of the plurality of light-emitting chips that the light-transmissive carrier plate can carry is more than 100, and the plurality of light-emitting chips are arranged on a carrier, and the telecentric lens group of the light-receiving device can be used to simultaneously guide multiple first light rays emitted by more than 100 light-emitting chips to form more than 100 second light rays that do not overlap with each other.

6. A light-receiving device of a detection device, wherein, the light-receiving device of the detection device includes: a telecentric lens group, which includes an incident light end and an exit light end; wherein, the telecentric lens group is used to guide multiple first light rays with a first divergence angle emitted by a plurality of light-emitting chips, so that the first light rays enter the telecentric lens group from the incident light end, and the multiple first light rays exit from the exit light end and form multiple second light rays; wherein, the second divergence angle of each second light ray is smaller than the first divergence angle of the corresponding first light ray; an image processing module, which is arranged at the exit light end of the telecentric lens group, and is used to receive and process each second light ray exiting from the exit light end to calculate the corresponding RGB grayscale value of the light-emitting chip; and a calculation module, which is electrically coupled to the image processing module, and is used to receive the RGB grayscale value of each light-emitting chip and calculate the light parameters of each light-emitting chip.

7. The light-receiving device of the detection device according to claim 6, wherein, the light-receiving device further includes a light reduction mirror located between the incident light end of the telecentric lens group and the exit light surface of the light-transmissive carrier plate, and the light reduction mirror is used to reduce the light intensity of each first light ray.

8. The light-receiving device of the detection device according to claim 6, wherein, the light-receiving device further includes: a spectrometer, which is electrically coupled to the calculation module; and a beam splitter, which is connected to the telecentric lens group and is used to receive each second light ray; the position of the beam splitter corresponds to the image processing module and the spectrometer, and is used to guide each second light ray received by it to the image processing module and the spectrometer; wherein, the spectrometer can calculate an average spectrum of a plurality of light-emitting chips according to the multiple second light rays received by it; the calculation module can calculate the light parameters of each light-emitting chip according to the RGB grayscale value and the average spectrum.

9. The light-receiving device of the detection device according to claim 6, wherein, the image processing module includes: an image receiver, which is adjacent to the exit light end of the telecentric lens group, and the image receiver can use its multiple pixels to receive any second light ray and correspondingly generate a light-emitting chip image; and A signal processing unit is electrically coupled to the image receiver and the computing module; the signal processing unit can be used to perform image processing on each of the light-emitting chip images to calculate the corresponding RGB grayscale values.

10. The light receiving device of the detection device according to claim 6, wherein, the telecentric lens group of the light receiving device can be used to simultaneously guide multiple first light beams emitted by more than 100 light-emitting chips to form more than 100 second light beams that do not overlap with each other.

Images