Device with components of electroceramics

Abstract

The invention relates to a device having an electroceramic component (1) with a first region (2) and a second region (3), a casting compound (11) which at least partially surrounds the electroceramic component (1), and a sleeve-shaped housing (15) which at least partially surrounds the casting compound (11), wherein the housing (15) has, in a first housing section (15a) which surrounds the casting compound (11) in the first region of the electroceramic component (1), a material which has a higher thermal conductivity than the material of the housing (15) in a second housing section (15b), and wherein the housing (15) has, in the second housing section (15b) which surrounds the casting compound (11) in the second region of the electroceramic component (1), a material which is non-conductive.

Description

TECHNICAL FIELD

[0001] The invention relates to a device with an electric ceramic component. The electric ceramic component can in particular relate to a piezoelectric transformer. BACKGROUND

[0002] A piezoelectric transformer can be used for generating a plasma. Here, a low input voltage is converted into a high voltage. By means of the high electric field the surrounding air can be ionized and thus a plasma is generated. One problem here can be a parasitic discharge, which can be caused for example by a conductive object in the vicinity of the piezoelectric ceramic and which can lead to a damage of the component. SUMMARY

[0003] It is the task of the invention to specify an improved device. This task is solved by a device according to the invention.

[0004] It is proposed that a device has an electric ceramic component with a first region and a second region. The device has a casting compound, which at least partially surrounds the electric ceramic component. The device has a sleeve-shaped housing, which at least partially surrounds the casting compound. The housing has a first housing section and a second housing section. The first housing section surrounds the casting compound in the first region of the electric ceramic component and has a material, which has a higher thermal conductivity than the material of the second housing section. The second housing section surrounds the casting compound in the second region of the electric ceramic component and has a non-conductive material. The material of the first housing section has a good thermal conductivity. The material of the first housing section can be a metallic material.

[0005] The first region and the second region of the electric ceramic component can place different requirements on the housing. The first region can in particular relate to a low voltage region and the second region can in particular relate to a high voltage region. In correspondence therewith, in the first region the use of a housing section of a metallic material can be advantageous, since a metallic material has a high robustness against further processing and has a high thermal conductivity. The heat generated in the first region of the electric ceramic component can thus be effectively dissipated by the first housing section. A further contact connection and a mechanical connection to further components can also be easily realized by the first housing section of a metallic material. The metallic material can for example relate to aluminum.

[0006] In the second housing section, which surrounds the second region of the component, the use of a non-conductive material can be advantageous, since a non-conductive material does not negatively influence the electric field, which is generated by force in the high voltage region. When the second housing section is made of a non-conductive material, a plasma ignition between the electric ceramic component and the second housing section is also avoided.

[0007] The electric ceramic component can relate to a piezoelectric transformer, which is preferably used for the ionization of a process gas and for the generation of a plasma.

[0008] The casting compound can have a non-conductive material, for example silicone. The casting compound can surround the component of electroceramics in such a way that parasitic discharges at the side of the component of electroceramics are avoided. The casting compound can be a soft, gel-like substance. The component of electroceramics can be cast in the casting compound in such a way that the casting compound does not or at least only slightly reduce the oscillation of the component of electroceramics, since the casting compound has a high elasticity. In correspondence therewith, the efficiency of the component is not severely worsened by the casting compound.

[0009] The non-conductive material used to manufacture the second housing section can relate to plastic, Teflon, glass or ceramic. These materials provide the advantage that they do not severely influence the electric field that can occur in the second region of the component of electroceramics. In correspondence therewith, the mode of operation of the component of electroceramics is not influenced by the provision of the housing. The sleeve-like housing can have a flat face on the outer side that faces away from the component of electroceramics.

[0010] The housing material in the first housing section has good thermal conductivity. The material can be a metal, a metal alloy, a well thermally conductive plastic or a ceramic. The material can have, for example, copper, aluminum or iron.

[0011] The component of electroceramics can protrude from the casting compound. The component of electroceramics can protrude from the casting compound, for example, by a length of between 0.5 mm and 5 mm, the component of electroceramics preferably protruding from the casting compound by a length of 1 mm to 3 mm. Here, in particular the end side of the second region of the component on the output side can protrude from the casting compound. Plasma ignition can occur at the end side. Since the end side is not covered by the casting compound, the plasma ignition is not influenced by the casting compound. It is alternatively also possible to completely cover the component of electroceramics with the casting compound.

[0012] The casting compound can cover the end side of the component of electroceramics that faces away from the first region in the second region. In some embodiments, the casting compound can be thinner on the end side than on the lateral faces of the component of electroceramics. Plasma ignition can then take place through the casting compound by means of dielectric barrier discharge.

[0013] The device can also have a negative pressure chamber. The negative pressure chamber can seal off the process chamber, in which the device is arranged, from the surroundings of the device, wherein a reduced pressure or vacuum prevails in the process chamber relative to atmospheric pressure. By means of the pressure reduction, the ignition field strength of the device can be reduced. Here, such a field strength can be referred to as ignition field strength, from which the ignition of the plasma is effected. Plasma ignition at a smaller field strength is less mechanically stressful for the electrically ceramic component. Correspondingly, the reliability and service life of the electrically ceramic component can be extended by using a negative pressure chamber, since the electrically ceramic component is less frequently damaged by the mechanical stresses occurring. Furthermore, the plasma characteristics change when the plasma is ignited in a negative pressure chamber compared to plasma ignition at atmospheric pressure. Instead of a point-like plasma ignition at the corner of the end side on the output side, the plasma can be ignited comprehensively on the end side on the output side.

[0014] The device can also have a contact line, by means of which the electrically ceramic component is electrically contacted. The contact line can have at least one bend. Here, a curve of the contact line can be referred to as a bend, in which the contact line deviates from a straight course. The contact line can be shape-stable, so that the bend is maintained without external forces acting. The electrically ceramic component can be connected to a further contact structure, for example a control circuit on a circuit board, by means of the contact line.

[0015] The device can have a cover, which is connected to the end of the first housing section, which points away from the second housing section. The cover can be produced in a casting process. The material of the cover can differ from the material of the casting compound and here in particular be harder than the material of the casting compound.

[0016] The at least one bend of the contact line can be arranged inside the cover, wherein the contact line extends through the cover. The contact line can thus be fixed in the cover in such a way that a movement of the contact line in the longitudinal direction is blocked by the cover. Tensile forces acting on the contact line can here be absorbed by the cover, so that the cover can provide a tensile force release, which can protect the electrically ceramic component from the effects of tensile forces.

[0017] The device can have a region filled with a soft casting compound between the cover and the electrically ceramic component. The electrically ceramic component is thus mechanically decoupled from the cover and the damping of the oscillating electrically ceramic component is reduced.

[0018] The device can also have an encapsulation which contains the second region of the electroceramic component. The second region of the electroceramic component can be encapsulated by the encapsulation. Material which detaches from the electroceramic component during the ignition of the plasma cannot leave the encapsulation here and is deposited at the inner side of the encapsulation. The encapsulation can thus prevent the surface which is treated by means of the plasma from being contaminated by the material. The material of the electroceramic component can in particular relate to a lead-containing material.

[0019] The encapsulation can act as a dielectric barrier, wherein a primary plasma ignition takes place between the end side of the electroceramic component and the inner side of the encapsulation and a plasma ignition takes place on the outer side of the encapsulation by means of a dielectric barrier discharge.

[0020] The encapsulation can be filled with a process gas. The process gas can for example relate to a noble gas or to air. The encapsulation can alternatively or additionally have a pressure which is reduced compared to the atmospheric pressure or a vacuum can be present in the encapsulation. The ignition field strength for the primary plasma ignition is reduced as a result of the reduced pressure or the vacuum in the encapsulation. The mechanical load of the electroceramic component can thus be reduced and the service life and the reliability of the electroceramic component can be increased.

[0021] The device can have a connection for the electrical contact connection, wherein the connection is designed for a detachable fixing by means of a bayonet connection, a clamping connection or a plug connection. By means of the connection elements for a further contact connection can be connected, for example, to the contact line mentioned above. The contact connection mentioned here in the form of a bayonet connection, a clamping connection or a plug connection is respectively releasable, so that the device can be easily exchanged.

[0022] The device can have a spring element which is arranged in such a way that it exerts a force which facilitates the separation of a further contact connection. Correspondingly, the spring element can simplify the separation of the contact connection.

[0023] The electroceramic component can relate to a piezoelectric transformer.

[0024] According to a further aspect, the application relates to a plasma generator having the device described above, wherein the electroceramic component is designed for the generation of a non-thermal atmospheric pressure plasma. The device can also be used as an ion generator or as an ozone generator. BRIEF DESCRIPTION OF DRAWINGS

[0025] Preferred embodiments are explained below with the aid of the drawings. In which:

[0026] Figure 1 An electroceramic component is shown;

[0027] Figure 2 An apparatus is shown, which has a component of electroceramics as shown in Figure 1

[0028] Figure 3 A second embodiment of the apparatus is shown;

[0029] Figure 4 A third embodiment of the apparatus is shown;

[0030] Figure 5 A fourth embodiment of the apparatus is shown;

[0031] Figure 6 The apparatus is shown in a perspective view;

[0032] Figure 7 The apparatus and the connection partner are shown in the plugged-in state;

[0033] Figure 8 The apparatus and the connection partner are shown in the unplugged state. DETAILED DESCRIPTION

[0034] Figure 1 A component 1 of electroceramics is shown. The component 1 of electroceramics relates to a piezoelectric transformer. The piezoelectric transformer can be used, inter alia, as a plasma generator for generating non-thermal atmospheric pressure plasma.

[0035] The piezoelectric transformer is a construction form of a resonant transformer, which is based on the piezoelectric phenomenon and is an electromechanical system contrary to the conventional magnetic transformer. The piezoelectric transformer is, for example, a Rosen transformer.

[0036] The component 1 of electroceramics has a first region 2, also referred to as input region or low-voltage region, and a second region 3, also referred to as output region or high-voltage region, wherein the second region 3 is connected to the first region 2 in the longitudinal direction z. In the first region 2, the piezoelectric transformer 1 has an electrode 4, to which an alternating voltage can be applied. The electrode 4 extends in the longitudinal direction z of the piezoelectric transformer 1. The electrode 4 is alternately stacked with a piezoelectric material 5 in a stacking direction x perpendicular to the longitudinal direction z. The piezoelectric material 5 is polarized here in the stacking direction x.

[0037] The electrode 4 is arranged in the interior of the piezoelectric transformer 1 and is also referred to as internal electrode. The piezoelectric transformer 1 has a first side 6 and a second side 7 opposite the first side 6. A first external electrode 8 is arranged on the first side 6. A second external electrode (not shown) is arranged on the second side 7. The internal electrode 4 is alternately electrically touch-connected either with the first external electrode 8 or with the second external electrode in the stacking direction x.

[0038] ​The first region 2 can be operated with a small alternating voltage applied between the electrodes 4. On the basis of the piezoelectric effect, the input-side applied alternating voltage is first converted into mechanical oscillations. The frequency of the mechanical oscillations fundamentally depends on the geometry of the electroceramic component 1 and the mechanical construction.

[0039] The second region 3 has a piezoelectric material 9 and has no built-in electrodes. The piezoelectric material 9 in the second region 3 is polarized in the longitudinal direction z. The piezoelectric material 9 of the second region 3 can relate to the same material as in the piezoelectric material 5 of the first region 2, wherein the piezoelectric materials 5 and 9 can differ in terms of their polarization direction. In the second region 3, the piezoelectric material 9 is formed as a single integral layer, which is completely polarized in the longitudinal direction z. Here, the piezoelectric material 9 in the second region 3 has only one polarization direction.

[0040] If an alternating voltage is applied to the electrodes 4 in the first region 2, mechanical waves are formed in the piezoelectric materials 5, 9, which generate an output voltage in the output region 3 by means of the piezoelectric effect. The second region 3 has an output-side end side 10. An electrical voltage is thus generated in the second region 3 between the end side 10 and the end of the electrodes 4 of the first region 2. Here, a high voltage is generated at the output-side end side 10. Here, a high potential difference is also generated between the output-side end side 10 and the surroundings of the electroceramic component 1, which is sufficient to generate a strong electric field that ionizes the process gas.

[0041] The electroceramic component 1 generates a high electric field in this way, which is able to ionize a gas or a liquid by electrical excitation. Here, atoms or molecules of the respective gas or the respective liquid are ionized and form a plasma. Ionization always occurs when the electric field strength at the surface of the electroceramic component 1 exceeds the ignition field strength of the plasma. The field strength required for ionization of the atoms or molecules is referred to as the ignition field strength of the plasma.

[0042] Figure 2 An apparatus is shown, which has an electroceramic component 1 as shown in Figure 1 The electroceramic component 1 is arranged in the casting compound 11, which largely surrounds the sides of the component 1. The first end 12 of the electroceramic component 1, which is arranged in the first region 2 and points away from the second region 3, protrudes from the casting compound 11. The second end 13 of the electroceramic component 1, which is arranged in the second region 3 and points away from the first region 2, protrudes from the casting compound 11. In an alternative embodiment, the first end 12 and / or the second end 13 of the electroceramic component 1 can also be covered with the casting compound 11.

[0043] The casting compound 11 has an electrically non-conductive material. The casting compound 11 has a soft, gel-like material. The casting compound 11 may, for example, have or be made of silicone.

[0044] The casting compound 11 serves to prevent a parasitic discharge at the side of the electroceramic component 1 from the surroundings in such a way that the side is insulated from the surroundings by the casting compound 11. Furthermore, the contact line 14 is also cast in the casting compound 11, by means of which the electroceramic component 1 can be electrically contacted.

[0045] The device also has a housing 15, which encloses the casting compound 11. In the embodiment shown, the electroceramic component 1 and the casting compound 11 are embedded together in the housing 15 in such a way that the first end 12 of the electroceramic component 1 and the second end 13 of the electroceramic component 1 protrude from the housing 15. In an alternative embodiment, only one of the two ends 12, 13 can protrude from the housing 15 or the housing 15 can be flush with the two ends 12, 13. Figure 2

[0046] The housing 15 can alternatively also protrude from the electroceramic component 1. The housing 15 can, for example, protrude from the electroceramic component 1 in the first region 2, i.e. in the low-voltage region. The housing 15 can here form a lateral edge of the cover 17.

[0047] The housing 15 is sleeve-like. The housing 15 has a cylindrical opening, which extends through the housing 15. The cylindrical opening is dimensioned in such a way that it accommodates the electroceramic component 1 and the casting compound 11, which encloses this electroceramic component, and the casting compound 11 is here pressed against the inside of the housing 15. A cylindrical inner contour of the housing 15 is not mandatory. A housing with a rectangular, square or oval cross section and / or a rectangular, square or oval opening is also possible.

[0048] The housing 15 has a first housing section 15a and a second housing section 15b. The two housing sections 15a, 15b have different materials from one another. The first housing section 15a encloses the casting compound 11 in the region in which the casting compound 11 encloses the first region 2 of the electroceramic component 1. The second housing section 15b encloses the casting compound 11 in the region in which the casting compound 11 encloses the second region 3 of the electroceramic component 1.

[0049] The housing 15 is designed to protect and mechanically stabilize the casting compound 11. By selecting different materials for the first and second housing sections 15a, 15b, the housing sections 15a, 15b can be well adapted to the different requirements in the first and second regions 2, 3 of the electroceramic component 1.

[0050] ​The first housing region 15a has a material with high thermal conductivity. The material of the first housing region 15 can have a metal, a metal alloy, a well thermally conducting plastic or a ceramic. The housing 15 can in particular have or be made of aluminum in the first housing region 15a. In the first region 2 of the electroceramic component 1, heat can be generated due to ohmic losses and mechanical oscillations. Metals have a high thermal conductivity and are well suited for conducting the heat generated in the first region 2 of the electroceramic component 1 accordingly. In addition, metals have a high robustness, which enables a non-complex further processing and contact connection of the first housing section 15a.

[0051] The second housing section 15b has a material that does not conduct. The second housing section 15b can be made of plastic, Teflon, glass or a ceramic, for example. In the second region 3 of the electroceramic component 1, high electric field strengths can occur. Since the second housing section 15b is made of a material that does not conduct, it does not influence the generated electric field. If the second housing section 15b were made of a conducting material, undesired plasma ignition from the component 1 to the second housing section 15b could occur. Such plasma ignition does not occur in the second housing section 15b made of a material that does not conduct.

[0052] The device also has two of the above-mentioned contact lines 14, wherein each of the contact lines 14 is fixed at one of the outer electrodes 8 of the electroceramic component 1. Each of the contact lines 14 can in particular be soldered at one of the outer electrodes 8, respectively.

[0053] The contact lines 14 enable a further contact connection of the device. The electroceramic component 1 can be electrically connected to a control circuit, for example, by means of the contact lines 14.

[0054] Figure 3 A second embodiment of the device is shown. In comparison to the first embodiment, the housing 15 is changed in its shape in the first housing section 15a. In cross-section, the housing 15 is square in the first housing section 15a. Here, the first housing section 15a has flat sides, which thus facilitates the installation on a flat heat exchanger.

[0055] In Figure 3 In the shown second embodiment, the contact lines 14 also have two bends 16a, 16b. The contact lines 14 extend linearly within the casting compound 11. In the region in which the contact lines 14 exit the casting compound 11, the contact lines each have a first bend 16a. In the first bend 16a, the course of the contact lines 14 is changed by about 30°. In addition, the contact lines 14 also have a second bend 16b, which is oriented in the opposite direction and is likewise a bend of about 30°.

[0056] In a second embodiment, the electroceramic component 1 also protrudes at both ends 12, 13 beyond the casting compound 11 and the housing 15. The electroceramic component 1 can, for example, extend 0.5 mm to 5 mm beyond the housing 15 at one or both ends 12, 13. In other embodiments, the electroceramic component 1 can be completely enclosed in the casting compound 11. The casting compound 11 has a lower thermal conductivity than the first housing section 15a made of metal. The housing 15 is therefore designed such that the electroceramic component is surrounded only by a thin layer of the casting compound 11. The housing 15 has a circular recess in its interior in the first and second housing sections 15a, 15b. The diameter of the circular recess is chosen here such that the electroceramic component 1 and the casting compound 11 can be arranged in the recess, while the layer of the casting compound 11 does not become too thick.

[0057] The second housing section 15b on the high-voltage side can be made, for example, of Teflon.

[0058] Figure 4 A third embodiment of the device is shown, which has Figure 1 an electroceramic component 1.

[0059] In Figure 4 the device shown in is based on the device shown in Figure 3 , to which a cover 17 is added at the first end 12 of the first housing section 15a. The cover 17 is produced by a casting method. The cover 17 is made of a material that is harder than the material of the casting compound 11. The cover 17 can be made, for example, of epoxy resin. The cover 17 surrounds, in particular, the two bends 16a, 16b of the two contact wires 14. The contact wires 14 are thereby additionally mechanically secured. The tensile forces acting on the two contact wires 14 are absorbed in the cover 17 and do not act on the soldering points at which the contact wires 14 are connected to the outer electrodes 8 of the electroceramic component 1. In correspondence therewith, the component 1 is protected from damage due to tensile forces. In addition, the adhesion of the contact wires 14 within the casting compound 11 also contributes to the mechanical stability of the device.

[0060] In a third embodiment, the device is also arranged in a negative pressure chamber 18. In Figure 4 , the negative pressure chamber 18 is illustrated by the side wall 19 of the negative pressure chamber 18. Within the negative pressure chamber 18, there is a pressure that is reduced compared to the pressure in the environment of the negative pressure chamber 18, that is to say, the atmospheric pressure. A vacuum can also be present in the negative pressure chamber 18. The treatment chamber in which the non-thermal atmospheric plasma generated by the electroceramic component 1 is conducted is present in the negative pressure chamber 18.

[0061] In the negative pressure chamber 18, the ignition voltage of the piezoelectric transformer drops, so that plasma ignition is already possible at a lower voltage in the input region and in the output region. The piezoelectric curve can be extracted from the interdependence of the current pressure and the corresponding ignition voltage. Plasma ignition at a lower voltage is a lower mechanical load for the ceramic component 1. Correspondingly, the service life of the component 1 can be extended due to the use in the negative pressure chamber 18. The reliability of the device can thus be improved.

[0062] A further advantage of the reduced ignition voltage in the negative pressure is that the plasma is not only ignited at the corners of the ceramic component 1, but also planarly over the entire end side 10 on the output side. A plasma cloud is thus now generated instead of a point-like or beam-like plasma ignition.

[0063] Figure 5 A fourth embodiment of the device is shown. This fourth embodiment is based on the third embodiment shown in Figure 4 , to which a packaging structure 20 is additionally added, which surrounds the second region 3 of the ceramic component 1. Air or process gas is contained together within the packaging structure 20. By using the packaging structure 20, which acts as a dielectric barrier, plasma ignition is achieved by barrier discharge. Here, as explained in Figure 5 , a primary plasma discharge 22 occurs between the end side 10 on the output side of the ceramic component 1 and the inner wall of the packaging structure 20 and thus also a plasma ignition 21 in front of the packaging structure by dielectric barrier discharge.

[0064] By using the packaging structure 20, contamination of the region to be treated can be avoided. During plasma discharge, material particles can detach from the ceramic component 1. The material of the ceramic component 1 can be lead-containing, in particular. By using the packaging structure 20, it is ensured that such lead-containing material does not deposit on the surface to be treated. This material deposition must be avoided, in particular when the device is used for medical or cosmetic purposes. The material now deposits on the inner wall of the packaging structure 20. In addition, the packaging structure 20 also enables easy cleaning of the device. The packaging structure 20 can be designed from a non-conductive material, for example glass or aluminum oxide, or from a conductive material, for example high-quality steel or aluminum. In the second case, the packaging structure 20 must be insulated from the first housing section 15a.

[0065] The use of dielectric barrier discharge has the advantage over direct plasma ignition in medical or cosmetic applications that the tissue to be treated is subjected to less stress.

[0066] According to another embodiment, the gas chamber 23 in the encapsulation 20 can be filled with a process gas, which involves a noble gas, such as argon Ar, helium He or neon Ne. The gas chamber 23 can alternatively or additionally have a reduced pressure or even a vacuum. By means of the reduced pressure, the ignition voltage can be reduced. The area of the primary plasma discharge increases as a result of the negative pressure. The size of the area of the dielectric barrier discharge also rises. The negative pressure in the gas chamber 23 of the encapsulation 20 can be combined with the negative pressure in the negative-pressure chamber 18 in which the device is arranged.

[0067] Figure 6 The device is shown in perspective view. In Figure 6 In the device shown, a recess 24 is provided in the housing 15, which recess can connect the housing 15 to a connection partner by means of a bayonet connection. In the connection of the housing 15 to the connection partner, the contact line 14 is connected to the electrical contacts of the connection partner and in this way a further contact connection of the electroceramic component 1 can be produced.

[0068] The device also has a spring element 25, in particular a spring pin, which is sheathed onto the contact line 14. The spring pin can be pre-tensioned in the connection of the housing 15 to the connection partner and facilitates the release of the connection when the bayonet connection is opened.

[0069] Correspondingly, the device can be easily connected to a further contact connection structure. By this, the replacement of the device is achieved.

[0070] As Figure 6 As an alternative to the bayonet connection shown, the device can be connected to a connection partner by means of a plug connection. In Figure 7 In this, the connection partner is plugged onto the device and Figure 8 The device and the connection partner in the unconnected state are shown. The plug connection is a connection which can be easily released, which enables the end consumer to replace the device.

[0071] As an alternative to the bayonet connection or the plug connection, other mechanically releasable connections can also be used, such as clamping contacts.

[0072] List of reference signs

[0073] 1 electroceramic component

[0074] 2 first region

[0075] 3 second region

[0076] 4 electrode

[0077] 5 piezoelectric material

[0078] 6 first side

[0079] 7 second side

[0080] 8 outer electrode

[0081] 9 piezoelectric material

[0082] 10 output-side end side

[0083] 11 potting compound

[0084] 12 first end

[0085] 13 second end

[0086] 14 contact line

[0087] 15 housing

[0088] 15a first housing section

[0089] 15b second housing section

[0090] 16a first bend

[0091] 16b second bend

[0092] 17 cover

[0093] 18 underpressure chamber

[0094] 19 side wall

[0095] 20 packaging structure

[0096] 21 plasma ignition by barrier discharge

[0097] 22 primary plasma discharge

[0098] 23 gas chamber

[0099] 24 recess

[0100] 25 spring element

[0101] x stacking direction

[0102] z longitudinal direction

Claims

1. Device, having an electroceramic component (1) with a first region (2) and a second region (3), an encapsulation (11) which at least partially surrounds the electroceramic component (1), and a sleeve-shaped housing (15) which at least partially surrounds the casting compound (11), wherein the housing (15) has in a first housing section (15a) of the encapsulation in the first region of the electroceramic component (1) a material which has a higher thermal conductivity than the material of the housing (15) in a second housing section (15b), and wherein the housing (15) has in the second housing section (15b) of the encapsulation in the second region of the electroceramic component (1) a non-conducting material, wherein the electroceramic component (1) is a piezoelectric transformer.

2. The apparatus of claim 1, wherein, The first region (2) of the electroceramic component (1) is a low-voltage region, and wherein the second region (3) of the electroceramic component (1) is a high-voltage region.

3. The apparatus of claim 1 or 2, wherein, The non-conducting material relates to a plastic, a glass or a ceramic.

4. The apparatus of claim 3, wherein, The plastic is Teflon.

5. The apparatus of claim 1 or 2, wherein, The outer side of the sleeve-like housing (15) which points away from the electroceramic component (1) has a flat face.

6. The apparatus of claim 1 or 2, wherein, The material of the housing (15) in the first housing section (15a) is a metal, a metal alloy, a ceramic or a well thermally conducting plastic.

7. The apparatus of claim 1 or 2, wherein, The electroceramic component (1) protrudes from the encapsulation (11).

8. The apparatus of claim 1 or 2, wherein, The encapsulation (11) covers an end side (10) of the electroceramic component (1) in the second region (3) which points away from the first region (2), wherein the encapsulation (11) is thinner on the end side (10) than on the lateral face of the electroceramic component (1).

9. The apparatus according to claim 1 or 2, having a negative pressure chamber (18) which seals the process chamber in which the apparatus is arranged from the surroundings of the apparatus, wherein There is a reduced pressure or a vacuum in the process chamber relative to atmospheric pressure.

10. The device according to claim 1 or 2, having a contact wire (14) through which the electrically ceramic component (1) is electrically contacted, wherein The contact line (14) has at least one bend (16a, 16b).

11. Device according to claim 1 or 2, having a cover (17) which is connected to the end of the first housing section (15a) which points away from the second housing section (15b).

12. The apparatus of claim 11, wherein, The encapsulation (11) covers an end side (12) of the electroceramic component (1) in the first region (2) which points away from the second region (3), and the electroceramic component (1) is mechanically decoupled relative to the cover (17).

13. The device according to claim 10, having a cover (17) which is connected to the end of the first housing section (15a) which is directed away from the second housing section (15b), wherein The contact line (14) extends through the cover (17) and at least one bend (16a, 16b) of the contact line (14) is arranged within the cover (17).

14. The apparatus of claim 12, wherein, The cover (17) has a material which is harder than the encapsulation (11).

15. Device according to claim 1 or 2, having an encapsulation structure (20) which contains the second region (3) of the electroceramic component (1).

16. The apparatus of claim 15, wherein, The encapsulation structure (20) is filled with a process gas, and / or wherein in the encapsulation structure (20) the pressure is reduced relative to atmospheric pressure, or wherein there is a vacuum in the encapsulation structure (20).

17. The device according to claim 1 or 2, having a connection for further contact connection of the electrical of the device, wherein, The joint is designed to be detachably fixed by means of a bayonet connection, a clamping connection or a plug connection.

18. The device according to claim 17, having a spring element (25) which is arranged in such a way that it exerts a force which assists in the separation of the further contact connection.

19. A plasma generator having a device according to claim 1 or 2, wherein, The electrically ceramic component (1) is designed to generate a non-thermal atmospheric pressure plasma.

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