A graphite boat cleaning device

Abstract

A graphite boat sheet cleaning device relates to the field of graphite production, including a sheet rack and a cleaning pool, wherein the sheet rack includes a rectangular frame, a horizontal partition, a vertical partition and a bottom support rod, the horizontal partition is a horizontal straight rod connecting the long side frame of the rectangular frame, the vertical partition is a vertical straight rod connecting the upper and lower side horizontal partitions, the bottom support rod is a horizontal straight rod connecting the width side frame of the lower side of the rectangular frame, and there is also an adjustment groove on the horizontal partition, the adjustment groove is a straight groove that is recessed inward from the upper and lower sides of the horizontal partition toward the opposite side, the upper and lower ends of the vertical partition are respectively inserted into the upper and lower side adjustment grooves, which are used to match the widths of graphite boat sheets of different specifications, improve the placement accuracy of the graphite boat sheets, and improve the cleaning efficiency of the graphite boat sheets, thereby ensuring the yield rate of the graphite boat.

Description

Technical Field

[0001] The invention relates to the field of graphite production, and in particular to a graphite boat sheet cleaning device. Background Art

[0002] With the increasing development of the new energy industry, solar power generation has gradually become popular, the demand for related products is increasing, and the quality requirements of products are getting higher and higher. Among them, in the field of solar power generation, the production and processing of solar silicon wafers is particularly important. In particular, there is a procedure in the production and processing called PECVD coating, which can improve the energy conversion rate of silicon wafers, thereby improving the efficiency of solar power generation. As a carrier for anti-reflection film coating of solar cells, the structure and size of the product will affect the conversion efficiency of silicon wafers. The graphite boat is composed of multiple graphite boat sheets, so the production quality of the graphite boat sheets directly affects the quality of the graphite boat. Summary of the invention

[0003] The present invention provides a graphite boat cleaning device, which matches the widths of graphite boats of different specifications, improves the placement accuracy of the graphite boats, and improves the cleaning efficiency of the graphite boats, thereby ensuring the yield rate of the graphite boats.

[0004] The above technical objectives of the present invention are achieved through the following technical solutions: a graphite boat sheet cleaning device, including a sheet rack and a cleaning pool, wherein the sheet rack includes a rectangular frame, a horizontal partition, a vertical partition and a bottom support rod, the horizontal partition is a horizontal straight rod connecting the long side frame of the rectangular frame, the vertical partition is a vertical straight rod connecting the upper and lower side horizontal partitions, the bottom support rod is a horizontal straight rod connecting the width side frame of the lower side of the rectangular frame, and there is also an adjustment groove on the horizontal partition, the adjustment groove is a straight groove that is recessed inward from the upper and lower sides of the horizontal partition to the opposite side, and the upper and lower ends of the vertical partition are respectively inserted into the upper and lower side adjustment grooves.

[0005] Preferably, the long side frame has a rod insertion groove for inserting the vertical partition rod into the transverse partition rod, and the rod insertion groove is a through groove extending horizontally inward from the lower edge of the outer side surface of the long side frame to connect with the adjustment slide groove.

[0006] Preferably, it further comprises a limiting portion for limiting the horizontal position of the vertical partition bar on the transverse partition bar.

[0007] Preferably, the limiting portion includes a diverging plate, a positioning groove and an upper wide groove, the diverging plate is an inclined plate extending diagonally outward from the surface of the rod body at the upper and lower ends of the vertical partition rod, the positioning groove is an inclined groove extending diagonally outward from the side wall of the adjustment slide groove, the positioning groove is spaced apart on the adjustment slide groove, and the upper wide groove is a straight groove extending in the opposite direction from the upper edge of the groove wall surface on both sides of the upper side of the adjustment slide groove.

[0008] Preferably, an operating through groove is provided on the vertical partition bar, and the operating through groove is a vertical through groove horizontally penetrating the vertical partition bar.

[0009] Preferably, the operating slot further includes an interference adjustment plate, and the interference adjustment plate is a flat plate inserted in the operating slot.

[0010] Preferably, it also includes a thickness adjustment portion for adjusting the spacing distance between the transverse partitions.

[0011] Preferably, the thickness adjustment portion includes a shallow transverse groove, a through transverse groove and a width selection block, the shallow transverse groove is a horizontally extending groove recessed inward from the inner surface of the long frame on one side, the through transverse groove is a through groove horizontally passing through the long frame on the other side, the two ends of the transverse partition rod are respectively inserted into the shallow transverse groove and the through transverse groove, and the width selection block includes a narrow push block and a wide push block, and the narrow push block and the wide push block are vertically stacked on the outside of the through transverse groove.

[0012] In summary, the present invention has the following beneficial effects.

[0013] 1. By adjusting the position of the vertical partition rod in the slide, the width of graphite boats of different specifications can be matched, the placement accuracy of the graphite boats can be improved, and the cleaning efficiency of the graphite boats can be improved, thereby ensuring the yield rate of the graphite boats.

[0014] 2. The number of vertical spacers can be increased or decreased in the adjustment slide through the rod insertion groove to ensure the stability of the graphite boat insertion process.

[0015] 3. The position of the vertical partition rod on the horizontal partition rod is stabilized by setting the limit part.

[0016] 4. The cleaning effect of the graphite boat can be improved by setting an interference adjustment plate in the operating slot.

[0017] 5. The thickness adjustment part can be used to adjust the spacing distance between the partitions. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the overall structure of the cleaning equipment.

[0020] Figure 2 It is a schematic diagram of the overall structure of the film rack.

[0021] Figure 3 This is a schematic diagram of the vertical partition structure.

[0022] Figure 4 It is a schematic diagram of the structure of the crossbar and the adjustment slide.

[0023] Figure 5 Schematic diagram of the vertical partition bar moving in the adjustment slide.

[0024] Figure 6 This is a working diagram of the interference adjustment plate.

[0025] Figure 7 It is a schematic diagram of the structure of the thickness adjustment part.

[0026] Figure 8 It is a schematic diagram of the structure when the narrow push block is pushed out.

[0027] In the figure: 1, film rack, 2, cleaning tank, 3, horizontal partition, 4, vertical partition, 5, long frame, 6, adjustment slide, 7, divergence plate, 8, positioning slot, 9, upper wide slot, 10, operation slot, 11, interference adjustment plate, 12, horizontal slot, 13, narrow push block, 14, wide push block. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present invention are clearly and completely described below in conjunction with the accompanying drawings.

[0029] Embodiment 1

[0030] like Figures 1 to 8 As shown, a graphite boat cleaning device includes a sheet rack 1 and a cleaning pool 2, wherein the sheet rack 1 includes a rectangular frame, a horizontal partition 3, a vertical partition 4 and a bottom support rod, the horizontal partition 3 is a horizontal straight rod connecting the long side frame 5 of the rectangular frame, the vertical partition 4 is a vertical straight rod connecting the upper and lower side horizontal partitions 3, the bottom support rod is a horizontal straight rod connecting the width side frame of the lower side of the rectangular frame, the bottom support rod is close to the lower side of the lower side horizontal partition 3, and there is an adjustment slide 6 on the horizontal partition 3, the adjustment slide 6 is a straight groove concave inward from the upper and lower side horizontal partitions 3 to the opposite side, and the upper and lower ends of the vertical partition 4 are respectively inserted into the upper and lower side adjustment slides 6. The graphite boat to be cleaned is inserted from the upper horizontal partition 3 interval into the corresponding position of the lower horizontal partition 3 interval, and supported by the bottom support rod at the bottom to realize the erection of the graphite boat. The vertical spacer 4 can prevent the graphite boat from being inserted into the side position of the corresponding interval below, that is, it plays a role in guiding the accurate insertion and vertical placement of the graphite boat. When the width of the graphite boat changes, especially when the width of the graphite boat is smaller than the horizontal distance between the vertical spacer 4 and the long frames 5 on both sides, the position of the vertical spacer 4 needs to be adjusted to guide the insertion of the graphite boat. At this time, the vertical spacer 4 can be horizontally slid in the adjustment slot 6 to match the width of the graphite boat and guide the insertion of graphite boats of different widths.

[0031] The long frame 5 is provided with a rod insertion groove for inserting the vertical spacer 4 into the horizontal spacer 3. The rod insertion groove is a through groove extending horizontally inward from the lower edge of the outer side of the long frame 5 to the connecting adjustment slot 6. The outer sides of the corresponding horizontal spacers 3 can be provided with rod insertion grooves, and the number of vertical spacers 4 can be increased or decreased in the adjustment slot 6 through the rod insertion grooves to ensure the stability of the graphite boat sheet insertion process.

[0032] It also includes a limiting portion for limiting the horizontal position of the vertical partition bar 4 on the transverse partition bar 3.

[0033] The limiting portion includes a diverging plate 7, a positioning groove 8 and an upper wide groove 9. The diverging plate 7 is an inclined plate extending diagonally outward from the rod surface at the upper and lower ends of the vertical partition rod 4. The positioning groove 8 is an inclined groove extending diagonally outward from the side wall of the adjusting slide groove 6. The positioning groove 8 is divided into intervals on the adjusting slide groove 6. The upper wide groove 9 is a straight groove extending in the opposite direction from the upper edge of the groove wall surface on both sides of the upper adjusting slide groove 6. The cross-sectional shape of the upper wide groove 9 and the adjusting slide groove 6 is like a T shape. When the vertical partition rod 4 naturally contacts the surface of the bottom support rod, the divergent plates 7 on the upper and lower sides are inserted into the upper and lower positioning grooves 8. When the vertical partition rod 4 needs to be moved, the vertical partition rod 4 is pushed up vertically so that the divergent plates 7 on the upper and lower sides are disengaged from the positioning grooves 8, wherein the upper divergent plate 7 enters the upper wide groove 9, and the lower divergent plate 7 is located above the lower adjustment slide groove 6, and is translated in the adjustment slide groove 6 through the rod body of the vertical partition rod 4. When the horizontal position adjustment is completed, the vertical partition rod 4 is vertically lowered again, and the divergent plate 7 is automatically inserted into the positioning groove 8 corresponding to the current position.

[0034] There is also an operation slot 10 on the vertical partition rod 4, which is a vertical slot horizontally penetrating the vertical partition rod 4. The operation slot 10 not only increases the roughness of the shaft of the vertical partition rod 4, which is conducive to pushing and translating the vertical partition rod 4, but also plays a role in clarifying the direction of the divergent plate 7.

[0035] The operation slot 10 also includes an interference adjustment plate 11, which is a flat plate inserted in the operation slot 10. When a plurality of vertical partitions 4 are arranged at intervals in the adjustment slot 6, the interference adjustment plate 11 can be pushed out of the operation slot 10, so that the gap between the edge of the interference adjustment plate 11 in the extension direction and the adjacent vertical partitions 4 is adjusted. In order to make the interference adjustment plate 11 easier to identify, the upper and lower edges are shortened in the figure. In practical applications, the operation slot 10 can be designed by calculation to be just close to the upper and lower edges of the horizontal partition 3 when the interference adjustment plate 11 is extended. At this time, the wavelength of the emitted sound wave is adjusted and unified in cooperation with the ultrasonic transducer in the cleaning tank, so that ultrasonic interference occurs when the ultrasonic wave passes through the gap between the interference adjustment plate 11 and the vertical partition 4, thereby more effectively cleaning the surface of the graphite boat sheet.

[0036] The utility model also comprises a thickness adjusting portion for adjusting the spacing distance between the diaphragms.

[0037] The thickness adjustment part includes a shallow transverse groove, a through transverse groove 12 and a width selection block. The shallow transverse groove is a horizontally extending groove that is recessed inward from the inner surface of the long frame 5 on one side. The through transverse groove 12 is a through groove that horizontally penetrates the long frame 5 on the other side. The two ends of the transverse bar 3 are respectively inserted into the shallow transverse groove and the through transverse groove 12. The width selection block includes a narrow push block 13 and a wide push block 14. The narrow push block 13 and the wide push block 14 are vertically stacked and mounted on the outside of the through transverse groove 12. The transverse bar 3 can be translated in the shallow transverse groove and the through transverse groove 12 to push the narrow push blocks 13 or wide push blocks 14 of different widths into the adjacent transverse bar 3, thereby changing the gap between adjacent transverse bars 3, matching graphite boats of different thicknesses or achieving stable extrusion of the graphite boats. In particular, by changing the gap between the transverse bars 3 to drive the gap between adjacent graphite boats, ultrasonic interference is formed in the spacing direction of the graphite boats, which can achieve a better ultrasonic cleaning effect. At this time, the rod insertion groove can only be set at one place. When the number of vertical partition rods 4 needs to be changed, the horizontal partition rod 3 can be translated to the rod insertion groove, and the vertical partition rod 4 can be pushed into the adjustment slide groove 6.

[0038] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by the terms "front and back", "left and right", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the invention.

[0039] Of course, in the present technical solution, those skilled in the art should understand that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the element may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0040] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art under the technical guidance of the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A graphite boat cleaning device, comprising a sheet rack (1) and a cleaning tank (2), characterized in that: The film rack (1) comprises a rectangular frame, a horizontal partition (3), a vertical partition (4) and a bottom support rod, wherein the horizontal partition (3) is a horizontal straight rod connecting the long side frame (5) of the rectangular frame, the vertical partition (4) is a vertical straight rod connecting the upper and lower sides of the horizontal partition (3), and the bottom support rod is a horizontal straight rod connecting the width side frame of the lower side of the rectangular frame. The horizontal partition (3) is also provided with an adjustment slide groove (6), and the adjustment slide groove (6) is a straight groove inwardly recessed from the opposite surfaces of the horizontal partition (3) on the upper and lower sides, and the upper and lower ends of the vertical partition (4) are respectively inserted into the upper and lower adjustment slide grooves (6); The long side frame (5) is provided with a rod insertion groove for inserting the vertical partition rod (4) into the horizontal partition rod (3), and the rod insertion groove is a through groove extending horizontally inward from the lower edge of the outer side surface of the long side frame (5) to communicate with the adjustment slide groove (6); It also includes a limiting portion for limiting the horizontal position of the vertical partition bar (4) on the horizontal partition bar (3); The limiting portion comprises a diverging plate (7), a positioning groove (8) and an upper wide groove (9), wherein the diverging plate (7) is an inclined plate extending diagonally outward from the surface of the rod body at the upper and lower ends of the vertical partition rod (4), and the positioning groove (8) is an inclined groove extending diagonally outward from the side wall surface of the adjustment slide groove (6). The positioning groove (8) is spaced apart on the adjustment slide groove (6), and the upper side of the adjustment slide groove (6) is recessed upward and provided with the upper wide groove (9); An operating through slot (10) is also provided on the vertical partition bar (4), and the operating through slot (10) is a vertical through slot that horizontally penetrates the vertical partition bar (4); It also comprises an interference adjustment plate (11), wherein the interference adjustment plate (11) is a flat plate inserted into the operation slot (10).

2. The graphite boat cleaning device according to claim 1, characterized in that: The invention also comprises a thickness adjusting portion for adjusting the spacing distance between the cross bars.

3. The graphite boat cleaning device according to claim 2, characterized in that: The thickness adjustment portion comprises a shallow transverse groove, a through transverse groove (12) and a width selection block, wherein the shallow transverse groove is a horizontally extending groove recessed inwardly from the inner surface of the long frame (5) on one side, and the through transverse groove (12) is a through groove horizontally penetrating the long frame (5) on the other side, and the two ends of the transverse partition rod (3) are respectively inserted into the shallow transverse groove and the through transverse groove (12), and the width selection block comprises a narrow push block (13) and a wide push block (14), and the narrow push block (13) and the wide push block (14) are vertically stacked and arranged on the outer side of the through transverse groove (12).

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