Wafer carrier positioning apparatus, pre-load chamber, and semiconductor processing equipment

Abstract

The application discloses a wafer carrier box positioning device, a preloading chamber and a semiconductor process equipment. The positioning device (100) is used for positioning a wafer carrier box (200) loaded in a preloading chamber. The preloading chamber comprises a base (110) used for carrying the wafer carrier box (200). The positioning device (100) comprises a first positioning part (120) and a second positioning part (130). The first positioning part (120) and the second positioning part (130) are movably arranged on the base (110). The first positioning part (120) and the second positioning part (130) can be relatively far away or close to each other to position wafer carrier boxes (200) of different sizes. The above scheme can solve the problem of poor compatibility of the preloading chamber.

Description

Technical Field

[0001] This invention relates to the field of wafer carrier positioning technology, and in particular to a wafer carrier positioning device, a pre-loading chamber, and a semiconductor process chamber. Background Technology

[0002] The pre-loading chamber serves as a transition chamber for wafers between vacuum and atmospheric environments. For example, when a wafer needs to be transferred from an atmospheric environment to a vacuum environment, the pre-loading chamber must first be in an atmospheric environment. An atmospheric robot can transfer the wafer into the pre-loading chamber, and then the pre-loading chamber is evacuated to a vacuum state. The wafer is then transferred to the vacuum transfer chamber by a vacuum robot, thus realizing the transfer of the wafer from the atmospheric environment to the vacuum environment.

[0003] In related technologies, to improve wafer transfer efficiency and reduce the number of times the pre-loading chamber is opened, a wafer carrier containing multiple wafers is typically moved into the pre-loading chamber. After the pre-loading chamber is evacuated, a vacuum robot sequentially transfers the wafers from the wafer carrier to the vacuum transfer chamber. Once the wafer has completed its processing, the vacuum robot returns it to the pre-loading chamber and places it back into the wafer carrier. The pre-loading chamber is then ventilated to bring it into an atmospheric environment before being opened again to remove the wafer carrier.

[0004] The pre-loading chamber needs to position the wafer carrier to prevent the wafer carrier from shifting during the process of the robot gripping the wafer, which would cause the wafer's installation position in the wafer carrier to change and thus affect the wafer's transmission stability.

[0005] In related technologies, a positioning block is fixedly mounted on the base of the pre-loading chamber. The positioning block has a positioning groove and is located between two vertical beams of the wafer carrier, engaging with them for positioning. The crossbeam of the wafer carrier is located within the positioning groove and engages with it for positioning. The wafer carrier is positioned within the pre-loading chamber via the positioning block.

[0006] However, due to the different sizes of wafers, the sizes of the wafer carrier cassettes also differ, resulting in different dimensions between the vertical beams of different sized wafer carrier cassettes. Therefore, the positioning blocks can only position wafer carrier cassettes of a single size. Different wafer carrier cassettes require positioning blocks of different sizes, necessitating the configuration of multiple positioning blocks of different sizes within the preloading chamber, thus leading to poor compatibility of the preloading chamber. Summary of the Invention

[0007] This invention discloses a positioning device for a wafer carrier, a pre-loading chamber, and semiconductor process equipment to solve the problem of poor compatibility of the pre-loading chamber.

[0008] To solve the above problems, the present invention adopts the following technical solution:

[0009] A positioning device for a wafer carrier is provided for positioning a wafer carrier placed in a pre-loading chamber. The pre-loading chamber includes a base for supporting the wafer carrier. The positioning device includes a first positioning part and a second positioning part.

[0010] Both the first positioning part and the second positioning part are movably disposed on the base, and the first positioning part and the second positioning part can be relatively far apart or close together to position the wafer carrier of different sizes.

[0011] A pre-loading chamber includes the aforementioned positioning device.

[0012] A semiconductor process apparatus, including the aforementioned preloaded chamber.

[0013] The technical solution adopted in this invention can achieve the following beneficial effects:

[0014] In the positioning device disclosed in this invention, both the first positioning part and the second positioning part are movably disposed on the base, and the first positioning part and the second positioning part can be relatively far apart or close together. That is, the distance between the first positioning part and the second positioning part can be adjusted, thus enabling the positioning of wafer carriers of different sizes. In this solution, by adjusting the distance between the first positioning part and the second positioning part, the positioning requirements of wafer carriers of different sizes can be met, thereby improving the compatibility of the pre-loading chamber. Attached Figure Description

[0015] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this invention, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention. In the drawings:

[0016] Figure 1 This is a schematic diagram of the positioning device positioning chip carrier box disclosed in an embodiment of the present invention;

[0017] Figure 2 This is a schematic diagram of the positioning device disclosed in an embodiment of the present invention;

[0018] Figure 3 This is a side view of the positioning device disclosed in an embodiment of the present invention;

[0019] Figure 4 for Figure 3 A magnified view of a portion of the image;

[0020] Figure 5 This is a cross-sectional view of the positioning device disclosed in an embodiment of the present invention;

[0021] Figures 6 to 8 This is a schematic diagram of the structure of some components of the positioning device disclosed in an embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures:

[0023] 100 - Positioning device; 110 - Base; 111 - Base; 1111 - First slide groove; 1112 - Second slide groove; 112 - Fixing part; 1121 - Positioning groove; 120 - First positioning part; 121 - First positioning block; 122 - First slider; 1221 - First threaded hole; 130 - Second positioning part; 131 - Second positioning block; 132 - Second slider; 1321 - Second threaded hole; 140 - Adjusting screw; 141 - First threaded rod segment; 142 - Second threaded rod segment; 143 - Connecting rod segment; 151 - First locking nut; 152 - Second locking nut; 160 - Bearing.

[0024] 200-Chip Carrier Box. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0026] The technical solutions disclosed in the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0027] like Figures 1 to 8 As shown, this embodiment of the invention discloses a positioning device 100 for a wafer carrier cassette. The positioning device 100 is used to position a wafer carrier cassette 200 placed into a pre-loading chamber. The pre-loading chamber includes a base 110 for supporting the wafer carrier cassette 200. The disclosed positioning device 100 includes a first positioning part 120 and a second positioning part 130.

[0028] The base 110 is used to support the wafer carrier 200 and also provides a mounting base for the components of the positioning device 100. Specifically, the base 110 is located in the preloading chamber.

[0029] The first positioning part 120 and the second positioning part 130 are both movably disposed on the base 110, and the first positioning part 120 and the second positioning part 130 can be relatively far apart or close together. That is to say, the distance between the first positioning part 120 and the second positioning part 130 can be adjusted, and the first positioning part 120 and the second positioning part 130 can form positioning spaces of different sizes to position wafer carrier boxes 200 of different sizes.

[0030] In the embodiments disclosed in this application, the size of the positioning space can be adjusted by adjusting the distance between the first positioning part 120 and the second positioning part 130, thereby meeting the positioning requirements of wafer carrier boxes 200 of different sizes, thus improving the compatibility of the pre-loading chamber.

[0031] In addition, by adjusting the size between the first positioning part 120 and the second positioning part 130, this application can meet the positioning needs of wafer carrier boxes 200 of different sizes. Therefore, the pre-loading chamber does not need to be configured with multiple positioning blocks, which makes the positioning device 100 simple in structure, consumes less material, and has a lower cost.

[0032] Furthermore, by adjusting the size between the first positioning part 120 and the second positioning part 130, the positioning requirements of wafer carriers 200 of different sizes can be met, making the positioning operation of the positioning device 100 simpler.

[0033] In another alternative embodiment, the base 110 may have a positioning groove 1121, which can be used to position the wafer carrier 200 along a first direction. The positioning groove 1121 may be located between the first positioning part 120 and the second positioning part 130. Both the first positioning part 120 and the second positioning part 130 can move relative to the base 110 along a second direction, and the first positioning part 120 and the second positioning part 130 can be used to position the wafer carrier 200 along the second direction, which is perpendicular to the first direction.

[0034] In this scheme, the first positioning part 120 and the second positioning part 130 are only used to limit one direction. Therefore, the structure of the first positioning part 120 and the second positioning part 130 only needs to satisfy the limitation of the first direction, which makes the processing difficulty of the first positioning part 120 and the second positioning part 130 less, and thus makes the manufacturing difficulty of the positioning device 100 less.

[0035] Optionally, the first positioning part 120 and the second positioning part 130 can be a block structure, a plate structure, or a strip structure. Of course, the first positioning part 120 and the second positioning part 130 can also be other structures, which are not limited in this article.

[0036] Specifically, at least a portion of the crossbeam of the wafer carrier 200 can be located within the positioning groove 1121. The positioning groove 1121 can be used to position the crossbeam along a first direction, which is perpendicular to the extension direction of the crossbeam. The crossbeam of the wafer carrier 200 connects the two vertical beams of the wafer carrier 200. The larger the size of the wafer carrier 200, the greater the distance between the two vertical beams, and therefore the greater the length of the crossbeam, but the width of the crossbeam, i.e., the thickness of the crossbeam, remains unchanged. Therefore, the positioning groove 1121 is provided on the base 110 to limit the crossbeam along its width or thickness direction.

[0037] In the above embodiments, the first positioning part 120 and the second positioning part 130 can abut against the outer sides of the two opposing vertical beams of the wafer carrier 200. That is, the positioning dimension of the wafer carrier 200 is the distance between the two vertical beams.

[0038] In another optional embodiment, the base 110 may have a first groove 1111 and a second groove 1112 extending in a second direction. A portion of the first positioning part 120 is located within the first groove 1111 and slides along the extending direction of the first groove 1111. Specifically, the first positioning part 120 may include a first positioning block 121 and a first slider 122. The first slider 122 may be located within the first groove 1111 and can slide along the extending direction of the first groove 1111. The first positioning block 121 may be connected to the first slider 122, and the first slider 122 may drive the first positioning block 121 to move in the second direction. In this case, the portion of the first positioning part 120 located within the first groove 1111 is the first slider 122.

[0039] A portion of the second positioning part 130 may be located within the second slide groove 1112 and slide along the extending direction of the second slide groove 1112. Specifically, the second positioning part 130 may include a second positioning block 131 and a second slider 132. The second slider 132 may be located within the second slide groove 1112 and slide along the extending direction of the second slide groove 1112. The second positioning block 131 may be connected to the second slider 132, and the second slider 132 may drive the second positioning block 131 to move along a second direction. In this case, the portion of the second positioning part 130 located within the second slide groove 1112 is the second slider 132.

[0040] The first positioning block 121 and the second positioning block 131 mentioned above can form a positioning space. That is to say, the first positioning block 121 and the second positioning block 131 play a positioning role for the wafer carrier 200. Therefore, the part that plays a positioning role for the wafer carrier 200 is the part of the first positioning part 120 and the second positioning part 130 located outside the first slide groove 1111 and the second slide groove 1112.

[0041] In this design, the first slide groove 1111 can provide auxiliary guidance for the first positioning part 120, making it less prone to deflection during movement and thus improving the movement accuracy of the first positioning part 120. Additionally, the second slide groove 1112 can also provide auxiliary guidance for the second positioning part 130, thereby improving the movement accuracy of the second positioning part 130.

[0042] In the above embodiment, the first positioning part 120 is easily detached from the first slide groove 1111, which may cause the first positioning part 120 to fall off the base 110 and damage the first positioning part 120.

[0043] Based on this, in another optional embodiment, the cross-sectional area of ​​the portion of the first positioning part 120 located within the first slide groove 1111 gradually increases along the direction from the opening to the bottom of the first slide groove 1111, and the shape of the first slide groove 1111 matches the shape of the portion of the first positioning part 120 located within the first slide groove 1111. Specifically, the cross-sectional area of ​​the first slider 122 can gradually increase along the direction from the opening to the bottom of the first slide groove 1111, and the shape of the first slide groove 1111 can match the shape of the first slider 122. In this scheme, both the first slider 122 and the first slide groove 1111 are wedge-shaped structures. The wedge-shaped first slider 122 cooperates with the wedge-shaped first slide groove 1111, making it difficult for the first slider 122 to detach from the first slide groove 1111, thus making it difficult for the first slider 122 to fall off the base 110, thereby making the first positioning part 120 less prone to damage, and thus improving the reliability of the positioning device 100.

[0044] In another alternative embodiment, the cross-sectional area of ​​the portion of the second positioning part 130 located within the second groove 1112 gradually increases along the direction from the opening to the bottom of the second groove 1112. The shape of the second groove 1112 can match the shape of the portion of the second positioning part 130 located within the second groove 1112. Specifically, the cross-sectional area of ​​the second slider 132 can gradually increase along the direction from the opening to the bottom of the second groove 1112, and the shape of the second groove 1112 can match the shape of the second slider 132. In this embodiment, both the second slider 132 and the second groove 1112 are wedge-shaped structures. The wedge-shaped second slider 132 cooperates with the wedge-shaped second groove 1112, making it difficult for the second slider 132 to detach from the second groove 1112, thus making it difficult for the second slider 132 to fall off the base 110, making the second positioning part 130 less prone to damage, and thereby improving the reliability of the positioning device 100.

[0045] In the above embodiment, the operator can manually move the first positioning part 120 and the second positioning part 130 to the target position. Once the first positioning part 120 and the second positioning part 130 reach the target position, they can be tightened by set screws. However, in this design, during the process of moving the first positioning part 120 and the second positioning part 130, the user's hand is prone to colliding with other components of the pre-loading chamber, potentially causing injury. Furthermore, set screws for tightening the first positioning part 120 and the second positioning part 130 need to be provided on the base 110, making manufacturing more difficult.

[0046] In another optional embodiment, the positioning device 100 disclosed in this application may further include an adjusting screw 140, which may include a first threaded rod segment 141 and a second threaded rod segment 142. The first threaded rod segment 141 may be located in a first sliding groove 1111, and the second threaded rod segment 142 may be located in a second sliding groove 1112.

[0047] The first positioning part 120 may have a first threaded hole 1221 along the second direction, the second positioning part 130 may have a second threaded hole 1321 along the second direction, the first threaded rod segment 141 may be threadedly engaged with the first threaded hole 1221, and the second threaded rod segment 142 may be threadedly engaged with the second threaded hole 1321.

[0048] Specifically, the first slider 122 may have a first threaded hole 1221 along the second direction. The second slider 132 may have a second threaded hole 1321 along the second direction. The first threaded rod segment 141 may be threadedly engaged with the first threaded hole 1221. The second threaded rod segment 142 may be threadedly engaged with the second threaded hole 1321.

[0049] In this design, the corresponding positioning part can be moved by turning the threaded rod segment, and the operator's hands do not need to move. Therefore, it is not easy to collide with other parts of the pre-loading chamber, thus reducing the risk of injury to the operator's hands and improving the operator's personal safety.

[0050] Furthermore, since the threaded connection has a self-locking property, when the threaded rod segment is screwed to the corresponding positioning part to reach the designated position, the threaded rod segment self-locks the corresponding positioning part, making the positioning part difficult to move, thus improving the positioning accuracy of the positioning part. In this solution, the threaded rod segment self-locks the corresponding positioning part, so there is no need to set an additional set screw, thereby simplifying the structure of the positioning device 100 and making the manufacturing difficulty of the positioning device 100 lower.

[0051] In the above embodiments, the movement of the first positioning part 120 and the second positioning part 130 requires screwing the corresponding threaded rod segments, which is a complex operation. Therefore, in another optional embodiment, the adjusting screw 140 may further include a connecting rod segment 143, and the first threaded rod segment 141 and the second threaded rod segment 142 may be connected by the connecting rod segment 143. The screwing direction of the first threaded rod segment 141 may be opposite to the screwing direction of the second threaded rod segment 142.

[0052] In this design, the first threaded rod segment 141 and the second threaded rod segment 142 are connected by a connecting rod segment 143. Therefore, when the first threaded rod segment 141 rotates, it drives the second threaded rod segment 142 to rotate through the connecting rod segment 143. At the same time, since the thread engagement direction of the first threaded rod segment 141 is opposite to that of the second threaded rod segment 142, when the first threaded rod segment 141 and the second threaded rod segment 142 rotate, they drive the first positioning part 120 and the second positioning part 130 to rotate in opposite directions.

[0053] Optionally, when the first threaded rod segment 141 rotates clockwise, the first positioning part 120 and the second positioning part 130 move closer together; when the second threaded rod segment 142 rotates counterclockwise, the first positioning part 120 and the second positioning part 130 move further apart.

[0054] In this solution, the first positioning part 120 and the second positioning part 130 can be driven to move simultaneously by rotating the first threaded rod segment 141 or the second threaded rod segment 142, so the operation steps are simple and convenient.

[0055] Furthermore, the central axes of the first threaded rod segment 141, the second threaded rod segment 142, and the connecting rod segment 143 can coincide. In this design, the first threaded rod segment 141, the second threaded rod segment 142, and the connecting rod segment 143 are coaxially arranged, thus making the structure of the adjusting screw 140 more compact.

[0056] In the above embodiment, a connecting hole may be provided below the positioning groove 1121. The connecting hole is used to connect the first slide groove 1111 and the second slide groove 1112, thereby facilitating the passage of the connecting rod segment 143 through the connecting hole and thus facilitating the installation of the adjusting screw 140. In this solution, the first threaded hole 1221, the second threaded hole 1321, and the connecting hole need to be aligned so that the adjusting screw 140 can pass through. Therefore, the positioning device 100 requires high machining precision and is difficult to manufacture.

[0057] In another alternative embodiment, the base 110 may include a base 111 and a fixing part 112, the base 111 and the fixing part 112 being detachably connected. The first slide groove 1111 and the second slide groove 1112 are both formed in the base 111. The fixing part 112 may have a positioning groove 1121 on the side opposite to the base 111. The base 111 has a connecting groove 1113, which connects the first slide groove 1111 and the second slide groove 1112. At least a portion of the connecting rod segment 143 is located within the connecting groove 1113, and the fixing part 112 covers the opening of the connecting groove 1113.

[0058] In this design, the positioning groove 1121 is formed on the fixing part 112, and the base 111 is provided with a first sliding groove 1111, a second sliding groove 1112 and a connecting groove 1113. The first sliding groove 1111 and the second sliding groove 1112 are connected by the connecting groove 1113. At this time, the first sliding groove 1111, the second sliding groove 1112 and the connecting groove 1113 are all open structures. Therefore, the machining accuracy of the positioning device 100 can be small and the machining difficulty is small.

[0059] In the above solution, the connecting rod segment 143 contacts the positioning part. During the rotation of the connecting rod segment 143, it is easy to cause the rotation of the connecting rod segment 143 to become jammed, and it will also cause wear on the connecting rod segment 143. Based on this, in another optional embodiment, the connecting rod segment 143 can be fitted with a bearing 160, and the outer ring of the bearing 160 contacts the fixing part 112. In this solution, the outer ring of the bearing 160 contacts the fixing part 112, and the inner ring of the bearing 160 rotates together with the connecting rod segment 143. Therefore, the outer ring does not rotate during the rotation of the connecting rod segment 143, so the rotation of the connecting rod segment 143 will not become jammed, and the connecting rod segment 143 will not be worn.

[0060] After the first threaded rod segment 141 moves the first positioning part 120 to the target position, to prevent the first threaded rod segment 141 from being accidentally rotated, in another optional embodiment, the positioning device 100 disclosed in this application may further include a first locking nut 151. One end of the first threaded rod segment 141 extending out of the base 110 can be threadedly engaged with the first locking nut 151 to lock the first threaded rod segment 141. In this solution, the first locking nut 151 can lock the first threaded rod segment 141, thereby preventing the first threaded rod segment 141 from rotating, thus improving the positioning accuracy and reliability of the positioning device 100.

[0061] In another alternative embodiment, the positioning device 100 disclosed in this application may further include a locking nut 152, and one end of the second threaded rod segment 142 extending out of the base 110 may be threadedly engaged with the second locking nut 152 to lock the second threaded rod segment 142. This solution can prevent the second threaded rod segment 142 from rotating, thus further improving the positioning accuracy and reliability of the positioning device 100.

[0062] To further improve the positioning accuracy of the positioning device 100, in another optional embodiment, the first positioning part 120 and the second positioning part 130 can be symmetrical along the central axis of the base 110. Specifically, the distance between the center of the first positioning part 120 and the center of the positioning groove 1121 can be a first distance. The distance between the center of the second positioning part 130 and the center of the positioning groove 1121 can be a second distance, and the first distance and the second distance can be equal.

[0063] In this scheme, the center of the first positioning part 120 and the center of the second positioning part 130 are at the same distance from the center of the positioning groove 1121. Therefore, the wafer carrier 200 can be positioned at the center of the positioning groove 1121, so that the position of the wafer carrier 200 is not easily shifted, thereby improving the positioning accuracy of the positioning device 100.

[0064] To facilitate easier insertion of the crossbeam into the positioning groove 1121, in another alternative embodiment, the edge of the groove 1121 may be chamfered. This design prevents interference between the crossbeam and the groove 1121, thus making it easier to insert the crossbeam into the positioning groove 1121.

[0065] Based on the positioning device 100 of any of the above embodiments of the present invention, the present invention also discloses a preloading chamber, wherein the disclosed preloading chamber has the positioning device 100 of any of the above embodiments. The preloading chamber disclosed in this application includes a chamber body, which serves as the mounting base for other component structures of the preloading chamber. The positioning device 100 is located within the chamber body. Optionally, the base 110 can be the bottom plate of the chamber body, or the base 110 can be a separate component, and the base 110 can be mounted on the bottom plate.

[0066] Based on the preloaded chamber of any of the above embodiments of the present invention, the present invention also discloses a semiconductor process apparatus having the preloaded chamber of any of the above embodiments.

[0067] The above embodiments of the present invention focus on describing the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be described in detail here.

[0068] The above description is merely an embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principle of the present invention should be included within the scope of the claims of the present invention.

Claims

1. A positioning device for a wafer carrier, used to position a wafer carrier (200) inserted into a pre-loading chamber, the pre-loading chamber including a base (110) for supporting the wafer carrier (200), characterized in that, The positioning device (100) includes a first positioning part (120), a second positioning part (130), and an adjusting screw (140). Both the first positioning part (120) and the second positioning part (130) are movably disposed on the base (110), and the first positioning part (120) and the second positioning part (130) can move away from or close to each other to position the wafer carrier (200) of different sizes; both the first positioning part (120) and the second positioning part (130) move relative to the base (110) along a second direction, and the first positioning part (120) and the second positioning part (130) are used to position the wafer carrier (200) along the second direction; The adjusting screw (140) includes a first threaded rod segment (141) and a second threaded rod segment (142). The first positioning part (120) has a first threaded hole (1221) along the second direction, and the second positioning part (130) has a second threaded hole (1321) along the second direction. The first threaded rod segment (141) is threadedly engaged with the first threaded hole (1221), and the second threaded rod segment (142) is threadedly engaged with the second threaded hole (1321).

2. The positioning device according to claim 1, characterized in that, The base (110) has a positioning groove (1121) for positioning the wafer carrier (200) along a first direction. The positioning groove (1121) is located between the first positioning part (120) and the second positioning part (130). The second direction is perpendicular to the first direction.

3. The positioning device according to claim 2, characterized in that, The base (110) has a first groove (1111) and a second groove (1112) extending along the second direction. A portion of the first positioning part (120) is located within the first slide groove (1111) and slides along the extending direction of the first slide groove (1111); A portion of the second positioning part (130) is located within the second slide groove (1112) and slides along the extending direction of the second slide groove (1112); In the direction from the opening to the bottom of the first groove (1111), the cross-sectional area of ​​the portion of the first positioning part (120) located in the first groove (1111) gradually increases, and the shape of the first groove (1111) matches the shape of the portion of the first positioning part (120) located in the first groove (1111). In the direction from the opening to the bottom of the second groove (1112), the cross-sectional area of ​​the portion of the second positioning part (130) located inside the second groove (1112) gradually increases, and the shape of the second groove (1112) matches the shape of the portion of the second positioning part (130) located inside the second groove (1112).

4. The positioning device according to claim 3, characterized in that, The first threaded rod segment (141) is located in the first groove (1111), and the second threaded rod segment (142) is located in the second groove (1112).

5. The positioning device according to claim 4, characterized in that, The adjusting screw (140) further includes a connecting rod section (143), the first threaded rod section (141) and the second threaded rod section (142) are connected by the connecting rod section (143), and the engagement direction of the first threaded rod section (141) is opposite to the engagement direction of the second threaded rod section (142).

6. The positioning device according to claim 5, characterized in that, The central axis of the first threaded rod segment (141), the central axis of the second threaded rod segment (142), and the central axis of the connecting rod segment (143) coincide.

7. The positioning device according to claim 5, characterized in that, The base (110) includes a base (111) and a fixing part (112). The base (111) and the fixing part (112) are detachably connected. The first sliding groove (1111) and the second sliding groove (1112) are both opened on the base (111). The fixing part (112) has a positioning groove (1121) on the side away from the base (111). The base (111) has a connecting groove (1113). The connecting groove (1113) connects the first sliding groove (1111) and the second sliding groove (1112). At least a portion of the connecting rod segment (143) is located in the connecting groove (1113). The fixing part (112) covers the opening of the connecting groove (1113).

8. The positioning device according to claim 7, characterized in that, The connecting rod segment (143) is fitted with a bearing (160), and the outer ring of the bearing (160) is in contact with the fixing part (112).

9. The positioning device according to claim 4, characterized in that, The positioning device (100) further includes a first locking nut (151), one end of the first threaded rod segment (141) extending out of the base (110) being threadedly engaged with the first locking nut (151) to lock the first threaded rod segment (141); and / or, The positioning device (100) further includes a second locking nut (152), and one end of the second threaded rod segment (142) extending out of the base (110) is threadedly engaged with the second locking nut (152) to lock the second threaded rod segment (142).

10. The positioning device according to claim 1, characterized in that, The first positioning part (120) and the second positioning part (130) are symmetrical about the central axis of the base (110).

11. A pre-loading chamber, characterized in that, The positioning device includes any one of claims 1 to 10.

12. A semiconductor process apparatus, characterized in that, Includes the preloaded chamber as described in claim 11.

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