A horizontal cutting device for gallium arsenide wafers

Abstract

The present invention discloses a horizontal cutting device for gallium arsenide wafers in the technical field of gallium arsenide production and processing, including a workbench and a driving motor. A groove for placing gallium arsenide crystal columns is formed on the surface of the workbench. The bottom of the groove is arc-shaped, and a driving push rod is slidably connected to the bottom of the groove. Before the work of the present invention, the position of the right end of the grinding roller is indirectly adjusted according to the different thicknesses of the gallium arsenide crystal columns, so as to adjust the maximum circle diameter that the grinding roller can grind, which is beneficial to determining the crystal columns of the maximum cylinder to be ground according to the different thicknesses of the gallium arsenide crystal columns, thereby reducing unnecessary grinding and avoiding waste. The connecting ball and the cross annular groove thereon can meet the angle adjustment between the grinding roller and the rotating shaft of the rotating gear, which is beneficial to providing a stable driving force for the grinding roller by the rotating gear when the right end of the grinding roller is lifted, avoiding jamming or unstable driving force.

Description

Technical Field

[0001] The present invention relates to the technical field of gallium arsenide production and processing, and specifically to a horizontal cutting device for gallium arsenide wafers. Background Technique

[0002] Gallium arsenide is an important semiconductor material. Gallium arsenide can be made into a semi-insulating high-resistance material with a resistivity more than three orders of magnitude higher than that of silicon and germanium, and is used to manufacture integrated circuit substrates, infrared detectors, γ photon detectors, etc. When manufacturing gallium arsenide by the horizontal method, the cross-section of the formed gallium arsenide crystal column is a unique "D" shape, and the crystal column needs to be polished into a circular shape before cutting the crystal column.

[0003] In the prior art, when polishing the gallium arsenide crystal column made by the horizontal method, generally, the gallium arsenide crystal column is directly polished uniformly. However, the thicknesses of the crystal columns made by the horizontal method are not the same. Uniform polishing will cause more polishing of the thicker crystal columns, resulting in waste, and the maximum circle that can be polished from the cross-section of the crystal column cannot be polished. Moreover, the thinner part of the crystal column cannot be completely polished, resulting in the crystal column not being polished into a complete circle and requiring secondary polishing.

[0004] Based on this, the present invention designs a horizontal cutting device for gallium arsenide wafers to solve the above problems. Summary of the Invention

[0005] The purpose of the present invention is to provide a horizontal cutting device for gallium arsenide wafers to solve the problem in the above background technique that in the prior art, when polishing the gallium arsenide crystal column made by the horizontal method, generally, the gallium arsenide crystal column is directly polished uniformly. However, the thicknesses of the crystal columns made by the horizontal method are not the same. Uniform polishing will cause more polishing of the thicker crystal columns, resulting in waste, and the maximum circle that can be polished from the cross-section of the crystal column cannot be polished. Moreover, the thinner part of the crystal column cannot be completely polished, resulting in the crystal column not being polished into a complete circle and requiring secondary polishing.

[0006] To achieve the above object, the present invention provides the following technical solution: A horizontal cutting device for gallium arsenide wafers, including a workbench and a driving motor. A groove for placing gallium arsenide crystal columns is provided on the surface of the workbench. The bottom of the groove is arc-shaped. A driving push rod is slidably connected to the bottom of the groove. A part of the left end of the driving push rod protrudes and its left end is located on the left side of the gallium arsenide crystal column. A pressing cover is provided above the groove. The pressing cover can cover the upper end of the gallium arsenide. A pushing block is fixedly connected to the upper right side of the pressing cover. The right side of the pushing block is an inclined surface. Limiting plates are fixedly connected to both sides of the workbench surface corresponding to the pressing cover. An auxiliary table is fixedly connected to the bottom right side of the workbench. A support frame is slidably connected up and down to the upper end of the auxiliary table. A grinding cylinder is fixedly connected to the upper end of the support frame. An internal gear ring is fixedly connected to the left end of the grinding cylinder. An external gear ring is rotatably connected to the right side of the internal gear ring. The driving motor is fixedly connected to the left side of the internal gear ring. The rotating shaft of the driving motor penetrates through the internal gear ring and is fixedly connected to a driving gear. The driving gear meshes with the external gear ring. Three equally spaced rotating gears are rotatably connected to the surface of the external gear ring. All three rotating gears mesh with the internal gear ring and the rotating shafts of the three rotating gears penetrate through the external gear ring. Ball hinge mechanisms are provided at the right ends of the rotating shafts of the three rotating gears. The rotating shafts of the three rotating gears are all connected to grinding rollers through ball hinge mechanisms. The grinding rollers are obliquely arranged and their bottoms are arc-shaped. A bearing is fixedly connected to the tail end of the grinding roller. An expandable arc-shaped pulling plate is fixedly connected to the surface of the bearing. The top of the arc-shaped pulling plate penetrates through the grinding cylinder. A through groove is provided in the grinding cylinder corresponding to the arc-shaped pulling plate. The through groove divides the grinding cylinder into two parts. A pushing ring is sleeved on the surface of the grinding cylinder corresponding to the through groove. The top of the arc-shaped pulling plate slides on the inner wall of the pushing ring. A pulling rope is fixedly connected to the middle position of the arc-shaped pulling plate. The other end of the pulling rope is fixedly connected to the inner wall of the pushing ring. A pushing rod is slidably connected to the upper end of the grinding cylinder corresponding to the pushing block. The left end of the pushing rod is an inclined surface and its right end contacts the pushing ring. A limiting mechanism is provided on the right side of the inner wall of the grinding cylinder. The limiting mechanism is used to limit the ground gallium arsenide crystal column to meet the maximum circle of the crystal column;

[0007] The ball hinge mechanism includes a connecting ball. A cross-shaped annular groove is provided on the surface of the connecting ball. The right end of the rotating shaft of the rotating gear and the left end of the grinding roller both slide in the cross-shaped annular groove;

[0008] During operation, when the prior art grinds a gallium arsenide crystal column made by the horizontal method, it generally grinds the gallium arsenide crystal column uniformly. However, the thickness of the crystal column made by the horizontal method is not the same. Uniform grinding will result in more grinding of the thicker crystal column, causing waste and unable to grind the largest circle that can be ground on the cross-section of the crystal column. The thinner part of the crystal column cannot be completely ground, resulting in the crystal column not being ground into a perfect circle and requiring secondary grinding. Before operation, the present invention needs to pick up the gland, place the gallium arsenide crystal column into the groove, and then use the gland to press and fix the gallium arsenide crystal column. When using the gland to fix the gallium arsenide crystal column, the inclined surface on the right side of the jacking block will act on the inclined surface at the left end of the push rod, and the push rod will move to the right. The push ring will move to the right under the action of the push rod. When the push ring moves to the right, it will drive the pulling rope to move to the right together. The pulling rope will pull the arc-shaped pull plate, and the lower end of the arc-shaped pull plate will move upward, thus lifting the right end of the grinding roller and increasing the maximum diameter of the circle that the grinding roller can grind. This is beneficial for determining the crystal column of the largest cylinder to be ground according to the different thicknesses of the gallium arsenide crystal column, thereby reducing unnecessary grinding and avoiding waste. Subsequently, the drive rod and the drive motor are started. The drive rod will push the gallium arsenide crystal to move, and the drive motor will drive the drive gear to rotate. The external tooth ring will rotate under the action of the drive gear. The rotating gear will revolve under the drive of the external tooth ring. While the rotating gear is revolving, the rotating gear will rotate around its own axis under the action of the internal tooth ring. The rotating shaft of the rotating gear will rotate along with it. The grinding roller will rotate under the action of the rotating shaft of the rotating gear and the connecting ball. The connecting ball and the cross-shaped annular groove on it can meet the angle adjustment between the grinding roller and the rotating shaft of the rotating gear, which is beneficial for the rotating gear to still provide a stable driving force for the grinding roller when the right end of the grinding roller is lifted, avoiding jamming or unstable driving force. The grinding roller will revolve and rotate along with the rotating shaft of the rotating gear. On the one hand, it is beneficial to improve the grinding effect, and on the other hand, it is beneficial to evenly grind the surface of the gallium arsenide crystal column and ensure the roundness of the ground crystal column.

[0009] After the gallium arsenide crystal column is polished, the unpolished part may move out of the polishing range of the polishing roller. To solve the above problems, as a further solution of the present invention, the limiting mechanism includes a blocking ring. There is a through hole in the middle position of the blocking ring. Three equally-angled limiting plates are hinged on the left side of the through hole. The left end of the limiting plate is arc-shaped and a wiping cotton is fixedly connected to the middle position of the bottom of the limiting plate. An adjusting rod is hinged at the middle position of the limiting plate. The adjusting rod passes through the polishing cylinder and its end bends to the left and extends to the position of the pushing ring. The left side of the upper end of the adjusting rod is a slope. During operation, when the gallium arsenide crystal column is fixed by the pressing cover, the pushing rod and the pushing ring will move to the right under the action of the jacking block. During the movement of the pushing ring to the right, the right side of the pushing ring will act on the slope on the left side of the top of the adjusting rod. The adjusting rod will move to the outside of the polishing cylinder under the action of the pushing ring, and the limiting plate will rotate under the action of the adjusting rod, thereby increasing the diameter of the circle formed on the left side. The limiting plate can adjust the diameter of the left circle according to the thickness of the gallium arsenide, which is beneficial to making the circle formed by the limiting plate adapt to the circle diameter that can be adjusted according to the thickness of the gallium arsenide by the polishing roller. When the gallium arsenide crystal column is not polished to match the circular diameter formed by the arc-shaped plate on the right side of the limiting plate, the gallium arsenide crystal column will be blocked and cannot pass through. The polishing roller will continuously polish the gallium arsenide crystal column. When the cross-sectional circle diameter of the gallium arsenide crystal column matches the circular diameter formed by the arc-shaped plate on the right side of the limiting plate, the gallium arsenide crystal column can pass through the limiting plate, which is beneficial to ensuring that the gallium arsenide crystal column can be polished into a circular column that meets the requirements, and avoiding the gallium arsenide crystal column that is not polished into a column that meets the requirements from moving out of the polishing range. When the polished gallium arsenide column moves past the limiting plate, the wiping cotton at the bottom of the limiting plate will wipe off the powder generated by the polishing on the surface of the column, preventing the powder from flying everywhere and being inconvenient to clean. The blocking ring can block the powder wiped off and the powder generated during polishing, which is beneficial to limiting the range of the powder generated by polishing and wiping within the polishing cylinder and preventing it from flying everywhere.

[0010] The gallium arsenide crystal column made by the horizontal method is "D"-shaped, and there are more grinding allowances on both sides, which will lead to a long grinding time, and the allowances on both sides can be ground into smaller circles, which can be used in special environments. In order to solve the above problems, as a further solution of the present invention, the workbench is provided with arc-shaped guide grooves at the front and rear sides of the bottom of the groove corresponding to the workbench, and the two arc-shaped guide grooves are slidably connected with retractable arc-shaped guide rails, and the ends of the arc-shaped guide rails are elastically connected by arc-shaped springs. The tops of the two arc-shaped guide rails slide on the left end of the pressure cover, and the left end of the pressure cover is provided with a clearance groove corresponding to the top positions of the two arc-shaped guide rails. The clearance groove passes through the pressure cover. The right end structure of the workbench is the same as that of the left end. Sliding blocks are slidably connected in the four arc-shaped guide rails, and a cutting wire is provided between the sliding blocks at the left and right ends. After the cutting wire passes through the sliding block, it contacts the external non-metallic The arc guide rail is connected to a wire cutting device; when working, after the gallium arsenide crystal column is placed into the groove, the top end of the arc guide rail is hung on the upper end of the gallium arsenide crystal column, and the arc guide rail will be stretched to different lengths according to the thickness of the gallium arsenide crystal column. When the arc guide rail is stretched, its bottom will slide to both sides in the arc guide groove, so that the arc guide rail can roughly circle the largest circle that can be processed by the crystal column, and then the crystal column will be fixed by the pressure cover, and the external non-metallic wire cutting device will drive the cutting wire to perform preliminary cutting on the crystal column, and the sliding block will slide in the arc guide rail, which is conducive to cutting the excess crystal column before the crystal column is polished, avoiding a large amount of polishing allowance and a long polishing time. Because the wire cutting can cut the crystal column along the arc guide rail, the cut corner material is relatively complete, which can provide a larger operating space for the processing workers, and can be reused in some special environments, which is conducive to saving resources.

[0011] When the thickness of the gallium arsenide crystal column is different, the center of the largest circle that can be polished will also change. To solve the above problems, as a further solution of the present invention, differential gears are fixedly connected to both front and rear sides of the corresponding gland on the right end surface of the workbench. Telescopic plates are provided on the right sides of the two differential gears. The two telescopic plates are connected to the inside of the differential gears and the right sides of the telescopic plates are inclined surfaces. Lifting grooves are formed in the inner gear ring corresponding to the positions of the telescopic plates, and the upper ends of the inner walls of the lifting grooves are inclined surfaces. A U-shaped limiting rod is slidably connected to the left end of the differential gear. A spring is elastically connected between the limiting rod and the differential gear. One end of the limiting rod extends to the surface of the telescopic plate, and a limiting opening is formed in the telescopic plate corresponding to the position of the limiting rod. The other end of the limiting rod extends to the surface of the arc-shaped guiding groove; during operation, after the gallium arsenide crystal column is fixed by the gland, the differential gear will adjust the position of the telescopic plate to rise according to the general height change between the end cover and the initial position. Subsequently, the cutting wire cuts the crystal column. When the sliding block moves to the middle position of the arc-shaped guiding rail, the limiting rod will be pushed, and the end of the limiting rod will disengage from the limiting opening. The telescopic plate will elongate, and the inclined surface at the end of the telescopic plate will act on the inclined surface at the top of the inner wall of the lifting groove, so that the polishing cylinder moves upward by half of the height change of the crystal column thickness. Since the thickness change of the crystal is the diameter change of the polished circle, and the movement change of the polishing cylinder is the radius change of the polished circle, it is necessary to use the differential gear for adjustment, which is beneficial to make the center position of the gallium arsenide crystal column concentric with the circle formed by the polishing roller, and avoid that when the crystal column thickness changes, the center of the largest circle that the crystal column can polish is not concentric with the polishing center of the polishing roller, resulting in eccentricity of the polished crystal column or even partial non-polishing.

[0012] When polishing the gallium arsenide crystal column, the polishing pressure of the polishing roller on the surface of the crystal column is the same. When there are relatively high protrusions on the surface of the crystal column, the polishing time is relatively long, and other parts of the crystal column will be polished together, resulting in the crystal column being polished thinner and thinner and unable to polish the largest circle that the crystal column can polish. To solve the above problems, as a further solution of the present invention, the arc-shaped pull plate is composed of three parts, and its upper and lower ends are elastically connected by arc-shaped springs; during operation, when polishing, when the polishing roller polishes the relatively high protrusions, the arc-shaped pull plate will rotate upward under the action of the protrusions and the polishing roller, the arc-shaped pull plate contracts, and the arc-shaped spring is compressed, thereby increasing the pressure between the polishing roller and the crystal column, which is beneficial to enabling the polishing roller to have a greater pressure when polishing the protruding part, so as to fully polish the protruding part and facilitate the crystal column to be quickly polished into the largest circle that the crystal column can polish.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] Before the present invention works, the position of the right end of the grinding roll is indirectly adjusted by the different thicknesses of the gallium arsenide crystal columns, so as to adjust the maximum circular diameter that the grinding roll can grind, which is beneficial to determining the crystal columns of the maximum cylinder to be ground according to the different thicknesses of the gallium arsenide crystal columns, thereby reducing unnecessary grinding and avoiding waste; the connecting ball and the cross annular groove thereon can meet the angle adjustment between the grinding roll and the rotating shaft of the rotating gear, which is beneficial to providing a stable driving force for the grinding roll by the rotating gear when the right end of the grinding roll is lifted, avoiding jamming or unstable driving force, and the grinding roll will revolve and rotate together with the rotating shaft of the rotating gear. On the one hand, it is beneficial to improve the grinding effect, and on the other hand, it is beneficial to evenly grind the surface of the gallium arsenide crystal column to ensure the roundness of the ground crystal column.

[0015] The present invention sets a limiting plate and adjusts the shape formed at the left end of the limiting plate according to the thickness of the gallium arsenide crystal column, which is beneficial to making the circle formed by the limiting plate adapt to the circular diameter that can be adjusted according to the gallium arsenide thickness by the grinding roll. When the gallium arsenide crystal column is not ground into a circular diameter that matches the circular diameter formed by the arc-shaped plate on the right side of the limiting plate, the gallium arsenide crystal column will be blocked and cannot pass through, and the grinding roll will continuously grind the gallium arsenide crystal column. When the cross-sectional circular diameter of the gallium arsenide crystal column matches the circular diameter formed by the arc-shaped plate on the right side of the limiting plate, the gallium arsenide crystal column can pass through the limiting plate, which is beneficial to ensuring that the gallium arsenide crystal column can be ground into a circular column that meets the requirements and avoiding the gallium arsenide crystal column that has not been ground into a column that meets the requirements from moving out of the grinding range.

[0016] Before the present invention works, the arc-shaped guide rail can be stretched to different lengths according to the thickness of the gallium arsenide crystal column, so that the arc-shaped guide rail can roughly circle the maximum circle that the crystal column can be processed into. Subsequently, the gland will fix the crystal column, and the external non-metallic wire cutting device will drive the cutting wire to perform preliminary cutting on the crystal column. The sliding block will slide in the arc-shaped guide rail, which is beneficial to cutting the redundant crystal column before the crystal column is ground, avoiding too much grinding allowance and long grinding time. Because the wire cutting can cut the crystal column along the arc-shaped guide rail, the cut-off waste is relatively complete, which can provide a large operating space for the processing workers and can be reused in some special environments, which is beneficial to saving resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0018] Figure 1 It is the overall first structural schematic diagram of the present invention;

[0019] Figure 2 This is the second overall structural schematic diagram of the present invention;

[0020] Figure 3 is Figure 2 the structural schematic diagram at position A in

[0021] Figure 4 This is the structural schematic diagram of the present invention after overall cross - sectioning;

[0022] Figure 5 This is the first structural schematic diagram of the workbench in the present invention;

[0023] Figure 6 is Figure 5 the structural schematic diagram at position B in

[0024] Figure 7 This is the second structural schematic diagram of the workbench in the present invention;

[0025] Figure 8 is Figure 7 the structural schematic diagram at position C in

[0026] Figure 9 This is the structural schematic diagram of the workbench in the present invention without placing a gallium arsenide crystal column;

[0027] Figure 10 This is the structural schematic diagram of the grinding cylinder in the present invention;

[0028] Figure 11 This is the structural schematic diagram of the inner gear ring and the outer gear ring exploded in the present invention;

[0029] Figure 12 This is the structural schematic diagram of the rotating gear, connecting ball and grinding roller exploded in the present invention (the pushing ring is cut open);

[0030] Figure 13 This is the structural schematic diagram of the connection relationship between the limiting plate, adjusting rod, arc - shaped pulling plate, grinding cylinder and pushing ring in the present invention.

[0031] In the attached drawings, the list of components represented by each reference numeral is as follows:

[0032] Workbench 1, drive motor 2, groove 3, drive push rod 4, pressure cover 5, push block 6, limit plate 7, auxiliary table 8, support frame 9, grinding cylinder 10, inner gear ring 11, outer gear ring 12, drive gear 13, rotating gear 14, grinding roller 15, bearing 16, arc pull plate 17, through groove 18, push ring 19, pull rope 20, push rod 21, connecting ball 22, cross ring groove 23, blocking ring 24, through port 25, limit plate 26, wiping cotton 27, adjusting rod 28, arc guide groove 29, arc guide rail 30, make way groove 31, sliding block 32, cutting wire 33, differential 34, telescopic plate 35, lifting groove 36, limit rod 37, limit port 38. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] See also Figure 1-13, the present invention provides a technical solution: a horizontal cutting device for gallium arsenide wafers, including a workbench 1 and a driving motor 2. A groove 3 for placing gallium arsenide crystal columns is provided on the surface of the workbench 1. The bottom of the groove 3 is arc-shaped. A driving push rod 4 is slidably connected to the bottom of the groove 3. Part of the left end of the driving push rod 4 protrudes and its left end is located on the left side of the gallium arsenide crystal column. A pressing cover 5 is provided above the groove 3. The pressing cover 5 can cover the upper end of the gallium arsenide. A top block 6 is fixedly connected to the upper right side of the pressing cover 5. The right side of the top block 6 is an inclined surface. Limiting plates 7 are fixedly connected to both sides of the workbench 1 corresponding to the position of the pressing cover 5. An auxiliary table 8 is fixedly connected to the bottom right side of the workbench 1. A support frame 9 is slidably connected up and down to the upper end of the auxiliary table 8. A grinding cylinder 10 is fixedly connected to the upper end of the support frame 9. An internal gear ring 11 is fixedly connected to the left end of the grinding cylinder 10. An external gear ring 12 is rotatably connected to the right side of the internal gear ring 11. The driving motor 2 is fixedly connected to the left side of the internal gear ring 11. The rotating shaft of the driving motor 2 penetrates through the internal gear ring 11 and is fixedly connected to a driving gear 13. The driving gear 13 meshes with the external gear ring 12. Three equally spaced rotating gears 14 are rotatably connected to the surface of the external gear ring 12. All three rotating gears 14 mesh with the internal gear ring 11 and the rotating shafts of the three rotating gears 14 penetrate through the external gear ring 12. Ball hinge mechanisms are provided at the right ends of the rotating shafts of the three rotating gears 14. The rotating shafts of the three rotating gears 14 are all connected to grinding rollers 15 through ball hinge mechanisms. The grinding rollers 15 are obliquely arranged and their bottoms are arc-shaped. A bearing 16 is fixedly connected to the tail end of the grinding roller 15. An arc-shaped pull plate 17 that can be telescoped is fixedly connected to the surface of the bearing 16. The top of the arc-shaped pull plate 17 penetrates through the grinding cylinder 10. A through groove 18 is provided in the grinding cylinder 10 corresponding to the position of the arc-shaped pull plate 17. The through groove 18 divides the grinding cylinder 10 into two parts. A pushing ring 19 is sleeved on the surface of the grinding cylinder 10 corresponding to the position of the through groove 18. The top of the arc-shaped pull plate 17 slides on the inner wall of the pushing ring 19. A pulling rope 20 is fixedly connected to the middle position of the arc-shaped pull plate 17. The other end of the pulling rope 20 is fixedly connected to the inner wall of the pushing ring 19. A pushing rod 21 is slidably connected to the upper end of the grinding cylinder 10 corresponding to the position of the top block 6. The left end of the pushing rod 21 is an inclined surface and its right end contacts the pushing ring 19. A limiting mechanism is provided on the right side of the inner wall of the grinding cylinder 10. The limiting mechanism is used to limit the ground gallium arsenide crystal column to meet the maximum circle of the crystal column;

[0035] The ball hinge mechanism includes a connecting ball 22. A cross-shaped annular groove 23 is provided on the surface of the connecting ball 22. The right end of the rotating shaft of the rotating gear 14 and the left end of the grinding roller 15 both slide in the cross-shaped annular groove 23;

[0036] During operation, when the prior art grinds a gallium arsenide crystal column made by the horizontal method, it generally grinds the gallium arsenide crystal column uniformly. However, the thickness of the crystal column made by the horizontal method is not the same. Uniform grinding will result in more grinding of the thicker crystal column, causing waste and not being able to grind the largest circle that can be ground on the cross-section of the crystal column. The thinner part of the crystal column cannot be completely ground, resulting in the crystal column not being ground into a perfect circle and requiring secondary grinding. Before operation, the present invention needs to pick up the gland 5, place the gallium arsenide crystal column into the groove 3, and then use the gland 5 to cover and fix the gallium arsenide crystal column. When using the gland 5 to fix the gallium arsenide crystal column, the inclined surface on the right side of the jacking block 6 will act on the inclined surface at the left end of the push rod 21, and the push rod 21 will move to the right. The push ring 19 will move to the right under the action of the push rod 21. When the push ring 19 moves to the right, it will drive the pulling rope 20 to move to the right together. The pulling rope 20 will pull the arc-shaped pull plate 17, and the lower end of the arc-shaped pull plate 17 will move upward, thus lifting the right end of the grinding roller 15 and increasing the maximum diameter of the circle that the grinding roller 15 can grind. This is beneficial for determining the crystal column of the largest cylinder to be ground according to the different thicknesses of the gallium arsenide crystal column, thereby reducing unnecessary grinding and avoiding waste. Subsequently, the driving rod and the driving motor 2 are started. The driving rod will push the gallium arsenide crystal to move, and the driving motor 2 will drive the driving gear 13 to rotate. The external gear ring 12 will rotate under the action of the driving gear 13. The rotating gear 14 will revolve under the drive of the external gear ring 12. While the rotating gear 14 is revolving, the rotating gear 14 will rotate on its own under the action of the internal gear ring 11. The rotating shaft of the rotating gear 14 will rotate together. The grinding roller 15 will rotate under the action of the rotating shaft of the rotating gear 14 and the connecting ball 22. The connecting ball 22 and the cross-shaped annular groove 23 on it can meet the angle adjustment between the grinding roller 15 and the rotating shaft of the rotating gear 14, which is beneficial for the rotating gear 14 to still provide a stable driving force for the grinding roller 15 when the right end of the grinding roller 15 is lifted, avoiding jamming or unstable driving force. The grinding roller 15 will revolve and rotate on its own along with the rotating shaft of the rotating gear 14. On the one hand, it is beneficial to improve the grinding effect, and on the other hand, it is beneficial to evenly grind the surface of the gallium arsenide crystal column and ensure the roundness of the ground crystal column.

[0037] After the gallium arsenide crystal column is polished, the unpolished part may move out of the polishing range of the polishing roller 15. To solve the above problems, as a further solution of the present invention, the limiting mechanism includes a blocking ring 24. There is a through hole 25 in the middle of the blocking ring 24. Three equally-angled limiting plates 26 are hinged on the left side of the through hole 25. The left end of the limiting plate 26 is arc-shaped and a wiping cotton 27 is fixedly connected to the middle position of the bottom of the limiting plate 26. An adjusting rod 28 is hinged at the middle position of the limiting plate 26. The adjusting rod 28 passes through the polishing cylinder 10 and the rear end bends to the left and extends to the position of the pushing ring 19. The left side of the upper end of the adjusting rod 28 is a slope; during operation, when the gallium arsenide crystal column is pressed and fixed by the pressing cover 5, the pushing rod 21 and the pushing ring 19 will move to the right under the action of the jacking block 6. During the process of the pushing ring 19 moving to the right, the right side of the pushing ring 19 will act on the slope on the left side of the top of the adjusting rod 28. The adjusting rod 28 will move to the outside of the polishing cylinder 10 under the action of the pushing ring 19. The limiting plate 26 will rotate under the action of the adjusting rod 28, so as to increase the diameter of the formed circle on the left side. The limiting plate 26 can adjust the diameter of the left circle according to the thickness of the gallium arsenide, which is beneficial to make the circle formed by the limiting plate 26 adapt to the circle diameter that can be adjusted according to the thickness of the gallium arsenide by the polishing roller 15. When the cross-sectional circle diameter of the gallium arsenide crystal column does not match the circle diameter formed by the arc-shaped plate on the right side of the limiting plate 26, the gallium arsenide crystal column will be blocked and cannot pass through. The polishing roller 15 will continuously polish the gallium arsenide crystal column. When the cross-sectional circle diameter of the gallium arsenide crystal column matches the circle diameter formed by the arc-shaped plate on the right side of the limiting plate 26, the gallium arsenide crystal column can pass through the limiting plate 26, which is beneficial to ensure that the gallium arsenide crystal column can be polished into a circular column body that meets the requirements, and avoid the gallium arsenide crystal column that is not polished into a column body that meets the requirements from moving out of the polishing range. When the polished gallium arsenide column body moves past the limiting plate 26, the wiping cotton 27 at the bottom of the limiting plate 26 will wipe off the powder generated by the polishing on the surface of the column body, avoiding the powder flying everywhere and being inconvenient to clean. The blocking ring 24 can block the wiped powder and the powder generated during polishing, which is beneficial to limit the range of the powder generated by polishing and wiping within the polishing cylinder 10 and avoid flying everywhere.

[0038] The gallium arsenide crystal column made by the horizontal method is "D"-shaped, and there are more grinding allowances on both sides, which will lead to a long grinding time, and the allowances on both sides can be ground into smaller circles, which can be used in special environments. In order to solve the above problems, as a further solution of the present invention, the workbench 1 is provided with arc-shaped guide grooves 29 at the front and rear sides of the bottom of the groove 3, and the two arc-shaped guide grooves 29 are slidably connected with retractable arc-shaped guide rails 30, and the ends of the arc-shaped guide rails 30 are elastically connected by arc-shaped springs. The tops of the two arc-shaped guide rails 30 slide on the left end of the pressure cover 5, and the left end of the pressure cover 5 corresponds to the top positions of the two arc-shaped guide rails 30. The give-way grooves 31 penetrate the pressure cover 5, and the structure of the right end of the workbench 1 is the same as that of the left end. Sliding blocks 32 are slidably connected in the four arc-shaped guide rails 30, and a cutting wire 33 is provided between the sliding blocks 32 at the left and right ends. After the cutting wire 33 penetrates the sliding block 32, it cuts with the external non-metallic wire. The device is connected; when working, after the gallium arsenide crystal column is placed into the groove 3, the top of the arc guide rail 30 is hung on the upper end of the gallium arsenide crystal column, and the arc guide rail 30 will be stretched to different lengths according to the thickness of the gallium arsenide crystal column. When the arc guide rail 30 is stretched, its bottom will slide to both sides in the arc guide groove 29, so that the arc guide rail 30 can roughly circle the largest circle that can be processed by the crystal column, and then the pressure cover 5 will fix the crystal column, and the external non-metallic wire cutting device will drive the cutting wire 33 to perform preliminary cutting on the crystal column, and the sliding block 32 will slide in the arc guide rail 30, which is conducive to cutting the excess crystal column before the crystal column is polished, avoiding a large amount of polishing allowance and a long polishing time. Because the wire cutting can cut the crystal column along the arc guide rail 30, the cut corner material is relatively complete, which can provide a larger operating space for the processing workers, and can be reused in some special environments, which is conducive to saving resources.

[0039] When the thickness of the gallium arsenide crystal column is different, the center of the largest circle that can be polished will also change. To solve the above problems, as a further solution of the present invention, differential gears 34 are fixedly connected to the front and rear sides of the right end surface of the workbench 1 corresponding to the positions of the gland 5. On the right side of both differential gears 34, there are telescopic plates 35. The two telescopic plates 35 are connected to the inside of the differential gear 34 and the right side of the telescopic plate is a slope. The internal gear ring 11 is provided with a lifting groove 36 corresponding to the position of the telescopic plate 35. The upper end of the inner wall of the lifting groove 36 is a slope. The left end of the differential gear 34 is slidably connected with a U-shaped limiting rod 37. A spring is elastically connected between the limiting rod 37 and the differential gear 34. One end of the limiting rod 37 extends to the surface of the telescopic plate 35. The telescopic plate 35 is provided with a limiting opening 38 corresponding to the position of the limiting rod 37. The other end of the limiting rod 37 extends to the surface of the arc-shaped guiding groove 29. During operation, after the gallium arsenide crystal column is fixed by the gland 5, the differential gear 34 will adjust the position of the telescopic plate 35 to rise according to the general height change between the end cover and the initial position. Subsequently, the cutting wire 33 cuts the crystal column. When the sliding block 32 moves to the middle position of the arc-shaped guiding rail 30, the limiting rod 37 will be pushed, and the end of the limiting rod 37 will be disengaged from the limiting opening 38. The telescopic plate 35 will extend. The slope at the end of the telescopic plate 35 will act on the slope at the top of the inner wall of the lifting groove 36, so that the polishing cylinder 10 moves upward by half of the height change of the crystal column thickness. Because the thickness change of the crystal is the diameter change of the polished circle, and the movement change of the polishing cylinder 10 is the radius change of the polished circle, it is necessary to use the differential gear 34 for adjustment, which is beneficial to make the center position of the gallium arsenide crystal column concentric with the circle formed by the polishing of the polishing roller 15, and avoid that when the crystal column thickness changes, the center of the largest circle that the crystal column can polish is not concentric with the polishing center of the polishing roller 15, resulting in the polished crystal column being eccentric or even partially not being polished.

[0040] When polishing the gallium arsenide crystal column, the polishing pressure of the polishing roller 15 on the surface of the crystal column is the same. When there are relatively high protrusions on the surface of the crystal column, the polishing time is relatively long, and other parts of the crystal column will be polished together, resulting in the crystal column being polished thinner and thinner and unable to polish the largest circle that the crystal column can polish. To solve the above problems, as a further solution of the present invention, the arc-shaped pull plate is composed of three parts, and its upper and lower ends are elastically connected by arc-shaped springs. During operation, when polishing, when the polishing roller 15 polishes the relatively high protrusions, the arc-shaped pull plate will rotate upward under the action of the protrusions and the polishing roller 15. The arc-shaped pull plate contracts and the arc-shaped spring is compressed, so as to increase the pressure between the polishing roller 15 and the crystal column, which is beneficial to make the polishing roller 15 have a greater pressure when polishing the protruding part, so as to fully polish the protruding part and facilitate the crystal column to be quickly polished into the largest circle that the crystal column can polish.

[0041] Working principle:

[0042] During operation, when the prior art grinds the gallium arsenide crystal column made by the horizontal method, it generally grinds the gallium arsenide crystal column uniformly. However, the thickness of the crystal column made by the horizontal method is not the same. Uniform grinding will result in more grinding of the thicker crystal column, causing waste and unable to grind the maximum circle that can be ground on the cross-section of the crystal column. The thinner part of the crystal column cannot be completely ground, resulting in the crystal column not being ground into a complete circle and requiring secondary grinding. Before operation, the present invention needs to pick up the gland 5, place the gallium arsenide crystal column into the groove 3, and then use the gland 5 to press and fix the gallium arsenide crystal column. When using the gland 5 to fix the gallium arsenide crystal column, the inclined surface on the right side of the ejector block 6 will act on the inclined surface at the left end of the push rod 21, and the push rod 21 will move to the right. The push ring 19 will move to the right under the action of the push rod 21. The movement of the push ring 19 to the right will drive the pull rope 20 to move to the right together. The pull rope 20 will pull the arc-shaped pull plate 17, and the lower end of the arc-shaped pull plate 17 will move upward, thus lifting the right end of the grinding roller 15 and increasing the maximum diameter of the circle that the grinding roller 15 can grind. This is beneficial to determining the crystal column of the maximum cylinder to be ground according to the different thicknesses of the gallium arsenide crystal column, thereby reducing unnecessary grinding and avoiding waste. Subsequently, the drive rod and the drive motor 2 are started. The drive rod will push the gallium arsenide crystal to move, and the drive motor 2 will drive the drive gear 13 to rotate. The external tooth ring 12 will rotate under the action of the drive gear 13. The rotating gear 14 will revolve under the drive of the external tooth ring 12. While the rotating gear 14 is revolving, the rotating gear 14 will rotate on its own under the action of the internal tooth ring 11. The rotating shaft of the rotating gear 14 will rotate together on its own. The grinding roller 15 will rotate under the action of the rotating shaft of the rotating gear 14 and the connecting ball 22. The connecting ball 22 and the cross-shaped annular groove 23 on it can meet the angle adjustment between the grinding roller 15 and the rotating shaft of the rotating gear 14, which is beneficial to providing a stable driving force for the grinding roller 15 by the rotating gear 14 when the right end of the grinding roller 15 is lifted, avoiding jamming or unstable driving force. The grinding roller 15 will revolve and rotate on its own together with the rotating shaft of the rotating gear 14. On the one hand, it is beneficial to improve the grinding effect, and on the other hand, it is beneficial to evenly grind the surface of the gallium arsenide crystal column and ensure the roundness of the ground crystal column.

Claims

1. A horizontal cutting device for gallium arsenide wafers, comprising a workbench (1) and a driving motor (2), characterized in that: The surface of the workbench (1) is provided with a groove (3) for placing a gallium arsenide crystal column. The bottom of the groove (3) is arc-shaped. A driving push rod (4) is slidably connected to the bottom of the groove (3). A part of the left end of the driving push rod (4) protrudes and its left end is located on the left side of the gallium arsenide crystal column. A pressing cover (5) is arranged above the groove (3), and the pressing cover (5) can cover the upper end of the gallium arsenide. A top block (6) is fixedly connected to the upper right side of the pressing cover (5). The right side of the top block (6) is an inclined surface. Limiting plates (7) are fixedly connected to both sides of the workbench (1) corresponding to the position of the pressing cover (5). An auxiliary table (8) is fixedly connected to the bottom right side of the workbench (1). A support frame (9) is slidably connected up and down to the upper end of the auxiliary table (8). A grinding cylinder (10) is fixedly connected to the upper end of the support frame (9). An internal gear ring (11) is fixedly connected to the left end of the grinding cylinder (10). An external gear ring (12) is rotatably connected to the right side of the internal gear ring (11). A driving motor (2) is fixedly connected to the left side of the internal gear ring (11). The rotating shaft of the driving motor (2) penetrates through the internal gear ring (11) and is fixedly connected to a driving gear (13). The driving gear (13) meshes with the external gear ring (12). Three rotating gears (14) arranged at equal intervals are rotatably connected to the surface of the external gear ring (12). All three rotating gears (14) mesh with the internal gear ring (11) and the rotating shafts of the three rotating gears (14) penetrate through the external gear ring (12). Ball hinge mechanisms are arranged at the right ends of the rotating shafts of the three rotating gears (14). The rotating shafts of the three rotating gears (14) are all connected to grinding rollers (15) through the ball hinge mechanisms. The grinding rollers (15) are obliquely arranged and their bottoms are arc-shaped. A bearing (16) is fixedly connected to the tail end of the grinding roller (15). An expandable arc-shaped pulling plate (17) is fixedly connected to the surface of the bearing (16). The top of the arc-shaped pulling plate (17) penetrates through the grinding cylinder (10). A through groove (18) is opened in the grinding cylinder (10) corresponding to the position of the arc-shaped pulling plate (17). The through groove (18) divides the grinding cylinder (10) into two parts. A pushing ring (19) is sleeved on the surface of the grinding cylinder (10) corresponding to the position of the through groove (18). The top of the arc-shaped pulling plate (17) slides on the inner wall of the pushing ring (19). A pulling rope (20) is fixedly connected to the middle position of the arc-shaped pulling plate (17). The other end of the pulling rope (20) is fixedly connected to the inner wall of the pushing ring (19). A pushing rod (21) is slidably connected to the upper end of the grinding cylinder (10) corresponding to the position of the top block (6). The left end of the pushing rod (21) is an inclined surface and its right end contacts the pushing ring (19). A limiting mechanism is arranged on the right side inner wall of the grinding cylinder (10). The limiting mechanism is used to limit the ground gallium arsenide crystal column to conform to the maximum circle of the crystal column.

2. The horizontal cutting device for gallium arsenide wafers according to claim 1, characterized in that: The ball hinge mechanism comprises a connecting ball (22), a cross annular groove (23) is formed on the surface of the connecting ball (22), and the right end of the rotating shaft of the rotating gear (14) and the left end of the grinding roller (15) both slide in the cross annular groove (23).

3. The horizontal cutting device for gallium arsenide wafers according to claim 2, characterized in that: The limiting mechanism comprises a blocking ring (24), a through opening (25) is provided at the middle position of the blocking ring (24), three limiting plates (26) arranged at equal angles are hingedly connected to the left side of the through opening (25), the left end of the limiting plate (26) is arc-shaped and a wiping cotton (27) is fixedly connected to the middle position of the bottom of the limiting plate (26), an adjusting rod (28) is hingedly connected to the middle position of the limiting plate (26), the adjusting rod (28) passes through the rear end of the grinding cylinder (10), bends to the left side and extends to the position of the pushing ring (19), and the left side of the upper end of the adjusting rod (28) is an inclined surface.

4. The horizontal cutting device for gallium arsenide wafers according to claim 3, characterized in that: The workbench (1) is provided with arc-shaped guide grooves (29) at the front and rear sides of the bottom of the groove (3), and retractable arc-shaped guide rails (30) are slidably connected in the two arc-shaped guide grooves (29). The ends of the arc-shaped guide rails (30) are elastically connected by arc-shaped springs. The tops of the two arc-shaped guide rails (30) slide on the left end of the pressure cover (5). The left end of the pressure cover (5) is provided with a clearance groove (31) at the top position of the two arc-shaped guide rails (30), and the clearance groove (31) passes through the pressure cover (5). The right end structure of the workbench (1) is the same as that of the left end. Sliding blocks (32) are slidably connected in the four arc-shaped guide rails (30), and a cutting wire (33) is provided between the sliding blocks (32) at the left and right ends. The cutting wire (33) passes through the sliding block (32) and is connected to an external non-metallic wire cutting device.

5. The horizontal cutting device for gallium arsenide wafers according to claim 4, characterized in that: The right end surface of the workbench (1) is fixedly connected to the front and rear sides of the pressure cover (5), and the right sides of the two differentials (34) are provided with telescopic plates (35). The two telescopic plates (35) are connected to the inside of the differential (34) and the right sides of the telescopic plates are inclined. The inner gear ring (11) is provided with a lifting groove (36) at the position corresponding to the telescopic plate (35). The upper end of the inner wall of the lifting groove (36) is an inclined surface. The left end of the differential (34) is slidably connected to a U-shaped limiting rod (37). A spring is elastically connected between the limiting rod (37) and the differential (34). One end of the limiting rod (37) extends to the surface of the telescopic plate (35). The telescopic plate (35) is provided with a limiting opening (38) corresponding to the position of the limiting rod (37). The other end of the limiting rod (37) extends to the surface of the arc-shaped guide groove (29).

6. The horizontal cutting device for gallium arsenide wafers according to claim 5, characterized in that: The arc-shaped pull plate is composed of three parts, and the upper and lower ends thereof are elastically connected by an arc-shaped spring.

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