Micro-nano porous throttling static pressure air flotation cylindrical bearing

A cylindrical bearing, micro-nano technology, applied in the direction of bearings, shafts and bearings, mechanical equipment, etc., can solve the problems that restrict ultra-compact machining, ultra-precision positioning, weak stiffness, micro-vibration, etc., to improve dynamic characteristics and reduce self-excitation Vibration, high stability effect

CN114321178APending Publication Date: 2022-04-12WUHAN UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2022-04-12

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Abstract

The invention discloses a micro-nano porous throttling static pressure air flotation cylindrical bearing device which is characterized in that a plurality of micro-nano porous throttlers are distributed on the inner surface of an air flotation cylindrical bearing, namely, a single row or multiple rows of micro-nano porous throttlers are distributed on the inner surface of the air flotation cylindrical bearing, and a plurality of micro-nano porous throttlers are uniformly distributed in the circumferential direction of each row. The micro-nano porous throttler is of a sheet structure, the thickness ranges from 0.1 mm to 10 mm, the diameter ranges from 1 mm to 100 mm, micro-nano pores are formed in the sheet structure, the pores with different diameters can be freely combined according to design (micron-scale and nano-scale porous combination or micron-scale and nano-scale mixed porous combination), and reasonable layout is carried out through optimization. The stability and the mechanical property of the air floatation cylindrical bearing can be remarkably improved, and the self-excited vibration of the air floatation cylindrical bearing can be effectively reduced. The micro-nano porous throttling static pressure air floatation cylindrical bearing has the advantages of high speed, high precision and the like, and is particularly suitable for the fields of ultra-precise semiconductor equipment, micro / nano electromechanical systems and the like.
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Description

technical field

[0001] The invention relates to a micro-nano porous throttling static pressure air-floating cylindrical bearing, which can significantly improve the stability of the air-floating cylindrical bearing, and at the same time reduce the self-excited vibration of the air-floating cylindrical bearing, and is mainly used in the fields of integrated circuit manufacturing and precision optics. . Background technique

[0002] Air-bearing cylindrical bearings have the advantages of high speed, high precision, no friction and heating, and ultra-clean, and are widely used in micro-nano processing and manufacturing. However, gas bearings have problems such as low bearing capacity, weak stiffness and micro-vibration: on the one hand, the micro-vibration caused by the turbulent flow of high-speed gas will affect the dynamic characteristics of the ultra-precision motion system; on the other hand, the traditional air bearing has weak damping, It is difficult to quickly attenua...

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Embodiment Construction

[0017] In order to describe the technical means and advantages of the present invention in more detail, the present invention will be further described in detail below in conjunction with the embodiments and accompanying drawings. The embodiments described here are only illustrative, not limiting, and the protection scope of the present invention is not limited by these embodiments.

[0018] figure 1 It is a structural schematic diagram of the micro-nano porous throttling static pressure air bearing spherical bearing constructed according to the preferred embodiment 1 of the present invention.

[0019] like figure 1 As shown, the micro-nano porous throttling static pressure air-bearing cylindrical bearing includes three parts: the air-floating cylindrical bearing body (1), the micro-nano porous throttle (2) and the cylindrical support member (7).

[0020] like figure 1 As shown, high-pressure gas flows into the gas channel (5) along the air inlet (6), passes through the air...