A new self-priming anti-blocking device for the air inlet of semiconductor waste gas treatment equipment

Abstract

The present invention discloses a novel self-priming anti-blocking device for the air inlet of semiconductor waste gas treatment equipment, including a self-priming air inlet pipe, the self-priming air inlet pipe including an upper tube body located at the top and a lower tube body located at the bottom, the upper tube body and the lower tube body are fixed by bolts and a buffer cavity is formed at the connection between the two, the upper tube body is symmetrically provided with an inlet port 1 and an inlet port 2 on both sides, the inlet port 1 is equipped with an air pressure sensor, and one side of the lower tube body is provided with an inlet port 3, the buffer cavity is movably provided with a rotating inner ring, an upper ring is provided just above the rotating inner ring, the upper ring is movably installed on the top of the upper tube body and four groups of cleaning mechanisms are vertically installed between the upper ring and the rotating inner ring. The waste gas treatment equipment air inlet structure designed by the present invention forms a high-speed airflow without dead angles on the inner side of the tube wall by introducing N2, and the high-speed downward airflow forms a downward suction at the air inlet, thereby ensuring the problem of air inlet blockage.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor waste gas treatment equipment, and in particular to a novel self-inhalation anti-blocking device for an air inlet of semiconductor waste gas treatment equipment. Background Art

[0002] Semiconductors refer to materials with electrical conductivity between conductors and insulators at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. Whether from the perspective of science and technology or economic development, the importance of semiconductors is enormous. Most electronic products, such as computers, mobile phones or digital recorders, have a very close relationship with semiconductors in their core units. Common semiconductor materials include silicon, germanium, gallium arsenide, etc. Silicon is the most influential semiconductor material in various applications. Some semiconductors will produce waste gas during the production process, which needs to be treated.

[0003] However, the existing semiconductor waste gas treatment equipment has the following problems during operation: (1) In the semiconductor waste gas treatment equipment, the waste gas inlet of the machine is easily blocked, causing semiconductor production to stagnate and delay; (2) The existing method of cleaning the air inlet of the semiconductor waste gas treatment equipment often requires manual regular cleaning and maintenance, which is cumbersome. Therefore, it is necessary to design corresponding technical solutions to solve the existing technical problems. Summary of the invention

[0004] The purpose of the present invention is to provide a new self-priming anti-blocking device for the air inlet of semiconductor waste gas treatment equipment, which solves the technical problem that in the semiconductor waste gas treatment equipment, the waste gas inlet of the machine is easily blocked, causing semiconductor production to stagnate and delay. The existing method of cleaning the air inlet of the semiconductor waste gas treatment equipment often requires manual regular cleaning and maintenance, and the operation is cumbersome.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a new type of self-priming anti-blocking device for the air inlet of a semiconductor waste gas treatment equipment, comprising a self-priming air inlet pipe, the self-priming air inlet pipe comprising an upper tube body located at the top and a lower tube body located at the bottom, the upper tube body and the lower tube body are fixed by bolts and a buffer cavity is formed at the connection between the two, the upper tube body is symmetrically provided with an inlet one and an inlet two on both sides, the inlet one is equipped with an air pressure sensor, and an inlet three is provided on one side of the lower tube body, a rotating inner ring is movably provided inside the buffer cavity, an upper ring is provided directly above the rotating inner ring, the upper ring is movably installed on the top of the upper tube body and four groups of cleaning mechanisms are vertically installed between the upper ring and the rotating inner ring, the cleaning mechanism comprises a vertically arranged connecting rod and a stripping sheet fixed on the connecting rod, the inner side of the stripping sheet is in contact with the inner wall of the upper tube body and the inner wall of the lower tube body, inert N2 is introduced into the inlet two, and high-pressure N2 is introduced into the inlet three.

[0006] As a preferred embodiment of the present invention, the rotating inner ring is a double-layer structure and includes an outer ring and an inner ring, a plurality of groups of pneumatic slots are evenly opened on the surface of the outer ring, two groups of gas inlets are symmetrically opened on both sides of the pneumatic slots, and the inner ends of the gas inlets extend to the interior of the inner ring.

[0007] As a preferred embodiment of the present invention, the left side of the pneumatic slot is an inclined structure and the right side is an arc surface structure, and the outer port diameter of the pneumatic slot is larger than the inner port diameter.

[0008] As a preferred embodiment of the present invention, the outer end of the gas inlet is communicated with the buffer cavity, the outer end specification of the gas inlet is larger than the inner end specification, and the bottom of the gas inlet is a slope structure.

[0009] As a preferred embodiment of the present invention, a plurality of groups of rotors are embedded in the surface of the upper ring, and the plurality of groups of rotors are rotatably connected to the inner wall of the upper tube body.

[0010] As a preferred embodiment of the present invention, the buffer cavity has a curved surface structure at the lower end and an air outlet is formed at the end, and the air outlet is directly opposite to the pneumatic slot.

[0011] As a preferred embodiment of the present invention, the stripping sheet is a two-stage structure and includes a main board fixed on the connecting rod and a cleaning brush fixed on the outside of the main board. The cleaning brush is made of rubber material and the outer end contacts the inner wall of the self-priming air intake pipe.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] 1. The air inlet structure of the waste gas treatment equipment designed by the present invention is divided into two parts, the upper and lower parts, which are connected in the middle by screws. The upper part has two openings, one for detecting the air inlet pressure, and the other for conveying inert gas N2 into the pipeline to cool and dilute the waste gas so that the waste gas is less likely to be blocked. The interface of the lower part is used to convey high-pressure N2. N2 first enters the buffer area composed of the upper and lower parts, and then sprays downward along the inner wall of the pipeline, forming a high-speed airflow without dead ends on the inner side of the pipe wall. The high-speed downward airflow will form a downward suction at the air inlet, thereby ensuring the problem of air inlet blockage.

[0014] 2. In this solution, a rotating inner ring is provided on the inner side of the lower half interface position, and an upper ring is provided above the rotating inner ring for use with the rotating inner ring. A cleaning mechanism is installed between the upper ring and the rotating inner ring. The introduction of high-pressure N2 drives the rotating inner ring to rotate, thereby driving the rotating inner ring and the cleaning mechanism to rotate. The cleaning mechanism is used to scrape the inner wall of the air inlet to avoid long-term adhesion of attachments, which may reduce the gas flow efficiency of the air inlet. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is the overall structure diagram of the present invention;

[0016] Figure 2 It is an overall top view of the structure of the present invention;

[0017] Figure 3 It is an overall cross-sectional view of the present invention;

[0018] Figure 4 This is a structural diagram of the rotating inner ring of the present invention;

[0019] Figure 5 This is a structural diagram of the connection between the upper ring and the cleaning mechanism of the present invention;

[0020] Figure 6 This is a structural diagram of the gas inlet port described in the present invention.

[0021] In the figure: 1. upper tube body; 2. lower tube body; 3. buffer cavity; 4. inlet port 1; 5. inlet port 2; 6. air pressure sensor; 7. inlet port 3; 8. rotating inner ring; 9. upper ring; 10. connecting rod; 11. stripping sheet; 12. outer ring; 13. inner ring; 14. pneumatic slot; 15. gas inlet port; 16. rotor; 17. air outlet; 18. main board; 19. cleaning brush. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] See also Figure 1-6 The present invention provides a technical solution: a new self-priming air blocking prevention device for the air inlet of a semiconductor waste gas treatment device, comprising a self-priming air inlet pipe, the self-priming air inlet pipe comprising an upper pipe body 1 located at the top and a lower pipe body 2 located at the bottom, the upper pipe body 1 and the lower pipe body 2 are fixed by bolts and a buffer cavity 3 is formed at the connection between the upper pipe body 1 and the lower pipe body 2, an inlet 1 4 and an inlet 2 5 are symmetrically opened on both sides of the upper pipe body 1, an air pressure sensor 6 is built in the inlet 1 4, and an inlet 3 is opened on one side of the lower pipe body 2. 7. A rotating inner ring 8 is movably provided inside the buffer cavity 3, and an upper ring 9 is provided just above the rotating inner ring 8. The upper ring 9 is movably installed on the top of the upper tube body 1 and four sets of cleaning mechanisms are vertically installed between the upper ring 9 and the rotating inner ring 8. The cleaning mechanism includes a vertically arranged connecting rod 10 and a stripping sheet 11 fixed on the connecting rod 10. The inner side of the stripping sheet 11 contacts the inner wall of the upper tube body 1 and the inner wall of the lower tube body 2. Inert N2 is introduced into the interior of the inlet 2 5, and high-pressure N2 is introduced into the interior of the inlet 3 7.

[0024] Further improvement, such as Figure 4 As shown: the rotating inner ring 8 is a double-layer structure and includes an outer ring 12 and an inner ring 13. The surface of the outer ring 12 is evenly provided with a plurality of groups of pneumatic slots 14. Two groups of gas inlets 15 are symmetrically provided on both sides of the pneumatic slots 14. The inner ends of the gas inlets 15 extend to the interior of the inner ring 13.

[0025] Further improvement, such as Figure 4 As shown, the left side of the pneumatic slot 14 is an inclined structure and the right side is an arc structure. The outer port diameter of the pneumatic slot 14 is larger than the inner port diameter. This design is convenient for blowing with the high-pressure airflow of the air outlet 17.

[0026] Further improvement, such as Figure 6 As shown, the outer end of the gas inlet 15 is connected to the buffer cavity 3, the outer end specification of the gas inlet 15 is larger than the inner end specification, and the bottom of the gas inlet 15 is a slope structure.

[0027] Further improvement, such as Figure 1 As shown: a plurality of groups of rotors 16 are embedded in the surface of the upper ring 9, and the plurality of groups of rotors 16 are rotatably connected to the inner wall of the upper tube body 1, so as to facilitate the movement of the upper ring 9.

[0028] Further improvement, such as Figure 3 As shown: the buffer cavity 3 has an arc surface structure at the lower end and an air outlet 17 is formed at the end. The air outlet 17 is opposite to the pneumatic slot 14. The purpose of blowing the rotating inner ring 8 is achieved by the high-pressure N2 in the buffer cavity 3, and the cleaning brush 19 is used to clean the inside of the self-priming air intake pipe.

[0029] Specifically, the stripping sheet 11 is a two-stage structure and includes a main board 18 fixed on the connecting rod 10 and a cleaning brush 19 fixed to the outside of the main board 18. The cleaning brush 19 is made of rubber material and the outer end is in contact with the inner wall of the self-aspirated air intake pipe. This design makes it easy to clean the interior of the self-aspirated air intake pipe through the cleaning brush 19.

[0030] When in use: The air inlet structure of the exhaust gas treatment equipment designed by the present invention is divided into two parts, the upper and lower parts, which are connected in the middle by screws. The upper part has two inlets, one for detecting the air inlet pressure, and the other for conveying inert gas N2 into the pipeline to cool and dilute the exhaust gas so that the exhaust gas is less likely to be blocked. The inlet of the lower part is used to convey high-pressure N2. N2 first enters the buffer area composed of the upper and lower parts, and then sprays downward along the inner wall of the pipeline to form a high-speed airflow without dead ends on the inner side of the pipe wall. The high-speed downward airflow will form a downward suction force at the air inlet, thereby ensuring the problem of air inlet blockage. In addition, the purpose of blowing the rotating inner ring 8 is achieved by the high-pressure N2 in the buffer cavity 3, and the interior of the self-priming air intake pipe is cleaned by a cleaning brush 19.

[0031] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A novel self-priming anti-blocking device for the air inlet of semiconductor waste gas treatment equipment, comprising a self-priming air inlet pipe, characterized in that: The self-aspirated air intake pipe comprises an upper tube body (1) located at the top and a lower tube body (2) located at the bottom. The upper tube body (1) and the lower tube body (2) are fixed by bolts and a buffer cavity (3) is formed at the connection between the upper tube body (1). An inlet port 1 (4) and an inlet port 2 (5) are symmetrically provided on both sides of the upper tube body (1). An air pressure sensor (6) is built into the inlet port 1 (4). An inlet port 3 (7) is provided on one side of the lower tube body (2). A rotating inner ring (8) is movably provided inside the buffer cavity (3). An upper ring ( 9), the upper ring (9) is movably mounted on the top of the upper tube (1) and four sets of cleaning mechanisms are vertically mounted between the upper ring (9) and the rotating inner ring (8), the cleaning mechanisms include a vertically arranged connecting rod (10) and a stripping sheet (11) fixed on the connecting rod (10), the inner side of the stripping sheet (11) is in contact with the inner wall of the upper tube (1) and the inner wall of the lower tube (2), the interior of the second inlet (5) is filled with inert N2, and the interior of the third inlet (7) is filled with high-pressure N2; the rotating inner ring (8) is a double-layer structure and includes an outer ring (12) and an inner ring (13), the outer ring (12) and the inner ring (13) are connected to the rotating inner ring (8), and the inner ring (13) is connected to the rotating inner ring (8). A plurality of groups of pneumatic notches (14) are evenly provided on the surface of the ring (12); two groups of gas inlet ports (15) are symmetrically provided on both sides of the pneumatic notches (14); the inner ends of the gas inlet ports (15) extend to the interior of the inner ring (13); the left side of the pneumatic notch (14) is in an inclined structure and the right side is in an arc surface structure; the outer end diameter of the pneumatic notch (14) is larger than the inner end diameter; the outer end of the gas inlet port (15) is connected to the buffer cavity (3); the outer end specification of the gas inlet port (15) is larger than the inner end specification; the bottom of the gas inlet port (15) is The invention discloses a sloping structure; a plurality of groups of rotors (16) are embedded in the surface of the upper ring (9), and the plurality of groups of rotors (16) are rotatably connected to the inner wall of the upper tube body (1); the buffer cavity (3) has an arc surface structure at the lower end and an air outlet (17) is formed at the end, and the air outlet (17) is directly opposite to the pneumatic slot (14); the stripping sheet (11) has a two-stage structure and includes a main board (18) fixed on the connecting rod (10) and a cleaning brush (19) fixed on the outside of the main board (18), and the cleaning brush (19) is made of rubber material and the outer end of the cleaning brush is in contact with the inner wall of the self-priming air intake pipe.

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