A flexible sensor and system for sensing distance and pressure, and a robot.

By designing flexible sensors that perceive distance and pressure, combined with sensing electrode arrays and signal processing circuits, the safety problem of traditional robots lacking tactile feedback has been solved, enhancing the safety and flexibility of robot-human interaction and providing functions similar to human skin.

CN114322736BActive Publication Date: 2025-10-28BEIHANG UNIV +1
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Patent Information

Application Number
CN202210070770.8
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-01-21
Publication Date
2025-10-28
Estimated Expiration
2042-01-21

AI Technical Summary

Technical Problem

Traditional industrial robots lack tactile feedback, which cannot guarantee safety when interacting with humans. Furthermore, existing flexible pressure sensors stop working when the robotic arm is in operation, affecting the production line and the robotic arm itself.

Method used

Design a flexible sensor for distance and pressure sensing, including a sensing electrode array, an insulating layer, a cavity structure array, a compressible dielectric, and a ground electrode. The sensing mode is switched through a signal processing circuit, and the combination of distance sensing and pressure sensing enhances security and interactivity.

Benefits of technology

It achieves safety assurance during machine-human interaction, enhances the machine's ability to interact with the outside world, enriches the diversity of human-computer interaction, provides functions similar to human skin, and improves safety and flexibility.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention relates to a flexible sensor and system for distance and pressure sensing, and a robot, belonging to the field of human-computer interaction technology. The sensing electrode array senses the distance from an object to the flexible sensor or the pressure on the surface of the flexible sensor. A signal processing circuit switches between distance and pressure sensing. During distance sensing, the signal processing circuit outputs a voltage signal to the sensing electrode array of the flexible sensor to generate an electric field and receives the potential value of the sensing electrode array. The host computer determines the distance from the object to the flexible sensor based on the potential value of the sensing electrode array, allowing detection even when obstacles are at a relatively far distance. During pressure sensing, the signal processing circuit reads the capacitance value between the sensing electrode array of the flexible sensor and the ground electrode. The host computer determines the pressure on the surface of the flexible sensor based on the capacitance value. This invention addresses safety issues during human-machine interaction, enhances the ability of machines to interact with the outside world, and enriches the diversity of human-machine interactions.
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Description

Technical Field

[0001] This invention relates to the field of human-computer interaction technology, and in particular to a flexible sensor and system for sensing distance and pressure, and a robot. Background Technology

[0002] Industrial robots are now widely used in factories, replacing workers in various assembly, handling, and packaging tasks. Traditional industrial robots use rigid components and lack tactile feedback, making it difficult to guarantee inherent safety when working alongside humans. Current solutions often involve attaching flexible pressure sensors to the surface of the robotic arm; when the sensor detects pressure, the robot immediately stops working. However, this abrupt stop significantly impacts the production line and the robotic arm itself, compromising safety during human-machine interaction. Summary of the Invention

[0003] The purpose of this invention is to provide a flexible sensor and system for distance and pressure sensing, as well as a robot, to solve safety issues during machine-human interaction, enhance the ability of machines to interact with the outside world, and enrich the diversity of human-machine interaction.

[0004] To achieve the above objectives, the present invention provides the following solution:

[0005] A flexible sensor for sensing distance and pressure, the flexible sensor comprising: a sensing electrode array, a first insulating layer, a cavity structure array, a compressible dielectric, and a ground electrode;

[0006] The sensing electrode array, the first insulating layer, the compressible dielectric, and the ground electrode are arranged sequentially from the top to the bottom; the cavity structure array is arranged in the first insulating layer and connected to the compressible dielectric.

[0007] The sensing electrode array is used to sense the distance between an object and the flexible sensor or the pressure on the surface of the flexible sensor.

[0008] Optionally, the sensing electrode array includes: a distance sensing receiving electrode array, a second insulating layer, and a common sensing electrode array;

[0009] The distance sensing receiving electrode array is connected to the second insulating layer, and a common sensing electrode array is disposed in the second insulating layer. The second insulating layer is connected to the first insulating layer. The common sensing electrode array is disposed opposite to the cavity structure array.

[0010] When the flexible sensor is used to sense distance, the shared sensing electrode array is a distance sensing transmitting electrode array;

[0011] When the flexible sensor is used to sense pressure, the shared sensing electrode array is a pressure sensing electrode array.

[0012] Optionally, the distance sensing receiving electrode array includes 5 electrodes;

[0013] The distance sensing receiving electrode array has four electrodes arranged in a square shape on the edge above the second insulating layer, and one electrode located at the center above the second insulating layer.

[0014] Optionally, the sensing electrode array includes: a distance sensing receiving electrode array and a shared sensing electrode array;

[0015] Both the distance sensing receiving electrode array and the shared sensing electrode array are disposed above the first insulating layer;

[0016] When the flexible sensor is used to sense distance, the shared sensing electrode array is a distance sensing transmitting electrode array;

[0017] When the flexible sensor is used to sense pressure, the shared sensing electrode array is a pressure sensing electrode array.

[0018] Optionally, the distance sensing receiving electrode array includes four electrodes;

[0019] Four electrodes are arranged in a square shape on the edge above the first insulating layer; the common sensing electrode array is located at the center above the first insulating layer.

[0020] A flexible sensing system for distance and pressure sensing, the flexible sensing system comprising: a signal processing circuit, a host computer, and the aforementioned flexible sensor;

[0021] The signal processing circuit is connected to the host computer and the sensing electrode array of the flexible sensor, respectively.

[0022] The signal processing circuitry is used to switch between distance sensing and pressure sensing.

[0023] When the signal processing circuit switches to distance sensing, it outputs a voltage signal to the sensing electrode array of the flexible sensor to generate an electric field, receives the potential value of the sensing electrode array, and sends the potential value of the sensing electrode array to the host computer. The host computer is used to determine the distance from the object to the flexible sensor based on the potential value of the sensing electrode array.

[0024] When the signal processing circuit switches to pressure sensing, it reads the capacitance value between the sensing electrode array of the flexible sensor and the ground electrode, and sends the capacitance value to the host computer. The host computer is also used to determine the pressure on the surface of the flexible sensor based on the capacitance value.

[0025] Optionally, the flexible sensing system further includes: a signal generator;

[0026] The signal generator is connected to the sensing electrode array of the flexible sensor via a signal processing circuit.

[0027] Optionally, the signal processing circuit includes: a signal processing chip, a signal matching module, an ADC module, a microprocessor, and a capacitor-to-digital converter;

[0028] The signal processing chip is connected to the signal generator and the distance sensing emission electrode array of the sensing electrode array, respectively. The signal processing chip is used to output a voltage signal to the distance sensing emission electrode array of the sensing electrode array to generate an electric field.

[0029] The signal matching module is connected to the ADC module and the distance sensing receiving electrode array of the sensing electrode array, respectively. The signal matching module is used to receive the potential analog signal of the distance sensing receiving electrode array and send the potential analog signal of the distance sensing receiving electrode array to the ADC module.

[0030] The ADC module is connected to the microprocessor through a signal processing chip. The ADC module is used to convert the potential analog signal into a potential digital signal, which is then amplified by the signal processing chip and transmitted to the microprocessor.

[0031] The capacitance-to-digital converter is connected to the microprocessor and the pressure sensing electrode array of the sensing electrode array, respectively. The capacitance-to-digital converter is used to receive the analog capacitance signal between the pressure sensing electrode array and the ground electrode, and convert the analog capacitance signal into a digital capacitance signal and then transmit it to the microprocessor.

[0032] The microprocessor is connected to the host computer, and the microprocessor is used to send the amplified digital potential signal or digital capacitance signal to the host computer.

[0033] Optionally, the host computer includes: a distance recognition module, a potential change curve display module, a distance display module, a pressure recognition module, a capacitance change curve display module, and a pressure display module;

[0034] The input terminal of the distance recognition module is connected to the signal processing circuit, and the output terminal of the distance recognition module is connected to the potential change curve display module and the distance display module, respectively. The distance recognition module is used to determine the distance from the object to the flexible sensor based on the potential value of the sensing electrode array and a polynomial fitting curve of the potential value versus the distance. The potential change curve display module is used to display the curve of the potential value of each electrode in the sensing electrode array changing over time. The distance display module is used to display the distance from the object to the flexible sensor in cylindrical coordinates.

[0035] The input terminal of the pressure recognition module is connected to the signal processing circuit, and the output terminal of the pressure recognition module is connected to the capacitance change curve display module and the pressure display module, respectively. The pressure recognition module is used to determine the pressure on the surface of the flexible sensor by using a polynomial fitting curve of capacitance value versus pressure based on the capacitance value between each electrode in the pressure sensing electrode array and the ground electrode. The capacitance change curve display module is used to display the curve of capacitance value between each electrode in the pressure sensing electrode array and the ground electrode changing over time. The pressure display module is used to display the position and magnitude of the pressure on the surface of the flexible sensor.

[0036] A robot that utilizes the aforementioned flexible sensing system for distance and pressure perception.

[0037] According to specific embodiments provided by the present invention, the present invention discloses the following technical effects:

[0038] This invention discloses a flexible sensor and system for distance and pressure sensing, as well as a robot. A sensing electrode array detects the distance from an object to the flexible sensor or the pressure on the sensor's surface. A signal processing circuit switches between distance and pressure sensing. During distance sensing, the signal processing circuit outputs a voltage signal to the sensing electrode array of the flexible sensor to generate an electric field and receives the potential value of the sensing electrode array. The host computer determines the distance from the object to the flexible sensor based on the potential value of the sensing electrode array, allowing detection even when obstacles are at a relatively far distance. During pressure sensing, the signal processing circuit reads the capacitance value between the sensing electrode array of the flexible sensor and the ground electrode. The host computer determines the pressure on the surface of the flexible sensor based on the capacitance value. This invention addresses safety issues during human-machine interaction, enhances the ability of machines to interact with the outside world, and enriches the diversity of human-machine interactions. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 A cross-sectional schematic diagram of a flexible sensor for sensing distance and pressure provided by the present invention;

[0041] Figure 2 Cross-sectional view of the 7-layer flexible sensing sensor for distance and pressure sensing provided by the present invention;

[0042] Figure 3 Cross-sectional view of the flexible sensor for sensing distance and pressure with 5 layers provided by the present invention;

[0043] Figure 4 The pressure sensing principle diagram provided for this invention; Figure 4 (a) is a cross-sectional view of the flexible sensor when there is no pressure. Figure 4 (b) is a cross-sectional view of the flexible sensor under slight pressure. Figure 4 (c) is a cross-sectional view of the flexible sensor under greater pressure;

[0044] Figure 5 This is a top-layer structure diagram of a 5-layer flexible substrate provided by the present invention;

[0045] Figure 6 A schematic diagram of a shared sensing electrode array of different dimensions provided by the present invention; Figure 6 (a) is a schematic diagram of a one-dimensional shared sensing electrode array. Figure 6 (b) is a schematic diagram of a two-dimensional shared sensing electrode array;

[0046] Figure 7 Schematic diagrams of different structures of the compressible dielectric provided by the present invention; Figure 7 (a) is a schematic diagram of a porous compressible dielectric. Figure 7 (b) is a schematic diagram of a compressible dielectric with a trench structure. Figure 7 (c) is a schematic diagram of a compressible dielectric with a pleated structure;

[0047] Figure 8 A structural diagram of the flexible sensing system for distance and pressure sensing provided by the present invention;

[0048] Figure 9 The diagram shows the host computer interface provided by this invention.

[0049] Symbol Explanation: 100-Sensing electrode array, 100-1-Distance sensing receiving electrode array, 100-2-Second insulating layer, 100-3-Common sensing electrode array, 101-First insulating layer, 102-Cavity structure array, 103-Compressible dielectric, 104-Ground electrode, 200-Signal processing circuit, 201-Signal matching module, 202-ADC module, 203-Signal processing chip, 204-Microprocessor, 205-Host computer, 206-Capacitor-to-digital converter, 301-Serial communication parameter control module, 302-Potential change curve display module, 303-Distance display module, 304-Capacitance change curve display module, 305-Pressure display module. Detailed Implementation

[0050] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0051] The purpose of this invention is to provide a flexible sensor and system for distance and pressure sensing, as well as a robot, to solve safety issues during machine-human interaction, enhance the ability of machines to interact with the outside world, and enrich the diversity of human-machine interaction.

[0052] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0053] This invention provides a flexible sensor for sensing distance and pressure, such as... Figure 1 As shown, the system includes: a sensing electrode array 100, a first insulating layer 101, a cavity structure array 102, a compressible dielectric 103, and a ground electrode 104. The sensing electrode array 100, the first insulating layer 101, the compressible dielectric 103, and the ground electrode 104 are arranged sequentially from top to bottom. The cavity structure array 102 is disposed within the first insulating layer 101 and connected to the compressible dielectric 103. The sensing electrode array 100 is used to sense the distance from an object to the flexible sensor or the pressure on the surface of the flexible sensor.

[0054] The sensing electrode array 100, the first insulating layer 101, the cavity structure array 102, the compressible dielectric 103, and the ground electrode 104 are all disposed on a flexible substrate. The flexible substrate is polyimide (PI), the electrodes are nano-silver electrodes or nano-copper electrodes, and the main polymer of the compressible dielectric 103 is formed from polymers into polydimethylsiloxane (PDMS) or copolyester (ecoflex).

[0055] The sensing electrode array 100 is designed with two structures, corresponding to 7 layers or 5 layers for the flexible sensor, such as... Figure 2-3 As shown.

[0056] Reference Figure 2The sensing electrode array 100 includes: a distance sensing receiving electrode array 100-1, a second insulating layer 100-2, and a common sensing electrode array 100-3. The distance sensing receiving electrode array 100-1 is connected to the second insulating layer 100-2, and the common sensing electrode array 100-3 is disposed within the second insulating layer 100-2. The second insulating layer 100-2 is connected to the first insulating layer 101. The common sensing electrode array 100-3 is disposed opposite to the cavity structure array 102. When the flexible sensor is used to sense distance, the common sensing electrode array 100-3 is a distance sensing transmitting electrode array. When the flexible sensor is used to sense pressure, the common sensing electrode array 100-3 is a pressure sensing electrode array. The second insulating layer 100-2 and the first insulating layer 101 can be combined into an insulating layer, and both the common sensing electrode array 100-3 and the cavity structure array 102 are located within the insulating layer.

[0057] The distance sensing receiving electrode array 100-1 includes 5 electrodes. Four electrodes of the distance sensing receiving electrode array 100-1 are distributed in a square shape on the edge above the second insulating layer 100-2, and one electrode is located at the center above the second insulating layer 100-2.

[0058] The 7-layer flexible sensor consists of, from top to bottom, a distance sensing receiving electrode, a second insulating layer 100-2, a distance sensing transmitting electrode array / pressure sensing electrode array, a first insulating layer 101, a cavity structure array 102, a compressible dielectric 103, and a ground electrode 104.

[0059] Reference Figure 3 The sensing electrode array 100 includes a distance sensing receiving electrode array 100-1 and a common sensing electrode array 100-3. Both the distance sensing receiving electrode array 100-1 and the common sensing electrode array 100-3 are disposed above the first insulating layer 101. When the flexible sensor is used to sense distance, the common sensing electrode array 100-3 is a distance sensing transmitting electrode array. When the flexible sensor is used to sense pressure, the common sensing electrode array 100-3 is a pressure sensing electrode array.

[0060] The distance sensing receiving electrode array 100-1 includes four electrodes. These four electrodes are arranged in a U-shape along the edge above the first insulating layer 101. The common sensing electrode array 100-3 is located at the center above the first insulating layer 101. A top-layer structure diagram of the 5-layer flexible substrate is shown below. Figure 5 As shown.

[0061] The five-layer flexible sensor consists of, from top to bottom, a distance sensing receiving electrode array 100-1, a distance sensing transmitting electrode array / pressure sensing electrode array, a first insulating layer 101, a cavity structure array 102, a compressible dielectric layer 103, and a ground electrode 104.

[0062] In both of the above structures, the pressure-sensing electrode array 100 adjusts its dimensions and number according to the pressure sensing resolution requirements. The dimensions are typically designed to be one-dimensional or two-dimensional, such as... Figure 6 As shown; the more electrodes, the higher the resolution. The pressure sensing electrode array and the cavity structure array 102 are matched, and the array units are designed in circular, spiral, or polygonal shapes to improve the sensitivity of pressure sensing and the ability to resist tensile deformation. The distance sensing transmitting electrode array is designed as a solid filler, and is designed as a grid when the circuit's capacitive load driving capability is low.

[0063] The 5-layer sensor design requires increasing the voltage of the waveform generator to achieve better distance sensing sensitivity. Compared to the 7-layer sensor design, the lack of a central electrode in the 5-layer sensor leads to reduced distance sensing resolution at close range. However, since both the distance sensing receiving electrode array 100-1 and the distance sensing transmitting electrode array / pressure sensing electrode array are on the top layer, the maximum distance and resolution for long-range sensing can be increased.

[0064] The principle of distance sensing is as follows: the distance sensing transmitting electrode array receives a high-frequency voltage signal and generates an electric field. When an object enters the electric field, the potential of the distance sensing receiving electrode changes. The distance from the object to the flexible sensor can be determined based on the changing potential.

[0065] Reference Figure 4 The pressure sensing principle is as follows: A capacitive pressure sensor is based on a parallel-plate capacitor structure embedded in a medium. Applying vertical pressure to the electrodes changes the distance between them, thus causing a change in the measured capacitance. When pressure is applied to the surface of the flexible sensor, the pressure-sensing electrode array is bent and deformed due to the presence of the cavity structure array 102, increasing the capacitance. When the pressure further increases, the compressible dielectric 103 is compressed, further increasing the capacitance. The pressure on the surface of the flexible sensor can be determined based on the capacitance value between the pressure-sensing electrode array and the ground electrode 104.

[0066] like Figure 7 As shown, the compressible dielectric 103 has a porous, grooved, or pleated structure to improve the sensitivity of pressure sensing. The compressible dielectric 103 is doped with inorganic ceramic nanoparticles with high dielectric constants, such as barium titanate and lead zirconate titanate, to enhance its pressure sensing sensitivity.

[0067] This invention also provides a flexible sensing system for distance and pressure sensing, such as... Figure 8 As shown, the flexible sensing system includes: a signal processing circuit 200, a host computer 205, and the aforementioned flexible sensor.

[0068] The signal processing circuit 200 is connected to both the host computer 205 and the sensing electrode array 100 of the flexible sensor. The signal processing circuit 200 is used to switch between distance sensing and pressure sensing.

[0069] When the signal processing circuit 200 switches to distance sensing, it outputs a voltage signal to the sensing electrode array 100 of the flexible sensor to generate an electric field, receives the potential value of the sensing electrode array 100, and sends the potential value of the sensing electrode array 100 to the host computer 205. The host computer 205 is used to determine the distance from the object to the flexible sensor based on the potential value of the sensing electrode array 100.

[0070] When the signal processing circuit 200 switches to pressure sensing, it reads the capacitance value between the sensing electrode array 100 and the ground electrode 104 of the flexible sensor and sends the capacitance value to the host computer 205. The host computer 205 is also used to determine the pressure on the surface of the flexible sensor based on the capacitance value.

[0071] The signal generator module of the signal processing circuit 200 generates a high-frequency AC voltage signal, which is connected to all electrodes of the distance sensing transmitting electrode array to generate an electric field. When an object enters the electric field, the potential of the distance sensing receiving electrode array 100-1 changes. The five channels of the signal matching module 201 of the signal processing circuit 200 are respectively connected to the five electrodes of the distance sensing receiving electrode array 100-1 to receive the changing potential signal. The ADC module 202 of the signal processing circuit 200 converts the potential signal into a digital quantity and sends it to the host computer 205. After the host computer 205 inputs multiple processed potential values, it outputs a curve showing the change of potential value over time and the distance of the object entering the electric field from the surface of the flexible substrate.

[0072] When pressure is applied to the surface of the flexible substrate, the pressure sensing electrode array is bent and deformed due to the presence of the pressure sensing vacuum structure array, reducing the distance between the pressure sensing electrode array and the ground electrode 104 and increasing the capacitance. When the pressure is further increased, the compressible dielectric 103 is compressed, further reducing the distance between the pressure sensing electrode array and the ground electrode 104 and further increasing the capacitance. The capacitance-to-digital converter 206 of the signal processing circuit 200 reads the capacitance value between the pressure sensing electrode array and the ground electrode 104 and converts it into a digital capacitance value, which is then sent to the host computer 205. After the host computer 205 inputs the capacitance value, it outputs a curve showing the capacitance value changing over time and the pressure applied to the surface of the flexible substrate. The 16 channels of the capacitance-to-digital converter 206 in the signal processing circuit 200 are connected to the 16 electrodes of the distance sensing transmitting electrode array / pressure sensing electrode array to receive capacitance signals. The microprocessor 204 inside the signal generator communicates with the signal processing chip 203 via I2C to transmit potential signals. The microprocessor 204 communicates with the capacitance-to-digital converter 206 via ISP to transmit capacitance signals. The signal processing chip 203 is connected to the signal generator and is connected to the ADC module 202 via signal lines. The ADC module 202 is connected to the signal matching module 201 via signal lines. The signal processing circuit 200 can be integrated onto the sensor. The microprocessor 204 can be an STM32 series microcontroller or various models of microprocessors from other manufacturers. The microprocessor 204 can be connected to the host computer 205 via a data cable or via various wireless connection methods.

[0073] The signal processing circuit 200 sends the acquired data to the host computer 205 via a serial port using a custom communication protocol. The host computer 205 can also control the signal processing circuit 200 via the serial port.

[0074] The flexible sensing system also includes a signal generator. The signal generator is connected to the sensing electrode array 100 of the flexible sensor via a signal processing circuit 200.

[0075] The signal processing circuit 200 includes a signal processing chip 203, a signal matching module 201, an ADC module 202, a microprocessor 204, and a capacitor-to-digital converter 206. The signal processing chip 203 is connected to both the signal generator and the distance sensing transmitting electrode array of the sensing electrode array 100. The signal processing chip 203 is used to output a voltage signal to the distance sensing transmitting electrode array of the sensing electrode array 100 to generate an electric field. The signal matching module 201 is connected to both the ADC module 202 and the distance sensing receiving electrode array 100-1 of the sensing electrode array 100. The signal matching module 201 is used to receive the analog potential signal from the distance sensing receiving electrode array 100-1 and send the analog potential signal from the distance sensing receiving electrode array 100-1 to the ADC module 202. The ADC module 202 is connected to the microprocessor 204 through the signal processing chip 203. The ADC module 202 is used to convert the analog potential signal into a digital potential signal, which is then amplified by the signal processing chip 203 and transmitted to the microprocessor 204. The capacitance-to-digital converter 206 is connected to both the microprocessor 204 and the pressure sensing electrode array of the sensing electrode array 100. The converter receives the analog capacitance signal between the pressure sensing electrode array and the ground electrode 104, converts it into a digital capacitance signal, and transmits it to the microprocessor 204. The microprocessor 204 is connected to the host computer 205 and sends the amplified digital potential signal or digital capacitance signal to the host computer 205.

[0076] Reference Figure 9 The host computer 205 includes: a distance recognition module, a potential change curve display module 302, a distance display module, a pressure recognition module, a capacitance change curve display module 304, and a pressure display module 305.

[0077] The input terminal of the distance recognition module is connected to the signal processing circuit 200, and the output terminal is connected to the potential change curve display module 302 and the distance display module 303, respectively. The distance recognition module determines the distance from the object to the flexible sensor based on the potential value of the sensing electrode array 100 using a polynomial fitting curve of the potential value versus distance. The potential change curve display module 302 displays the curve of the potential value of each electrode in the sensing electrode array 100 changing over time. The distance display module 303 displays the distance from the object to the flexible sensor in cylindrical coordinates.

[0078] The input terminal of the pressure recognition module is connected to the signal processing circuit 200, and the output terminal is connected to the capacitance change curve display module 304 and the pressure display module 305, respectively. The pressure recognition module determines the pressure on the surface of the flexible sensor based on the capacitance value between each electrode in the pressure sensing electrode array and the ground electrode 104, using a polynomial fitting curve of the capacitance value versus pressure. The capacitance change curve display module 304 displays the curve of the capacitance value between each electrode in the pressure sensing electrode array and the ground electrode 104 over time. The pressure display module 305 displays the position and magnitude of the pressure on the surface of the flexible sensor.

[0079] The polynomial fitting curves of potential value versus distance and capacitance value versus pressure are both existing publicly available technologies.

[0080] The host computer 205 includes a serial communication parameter control module 301, primarily used for debugging and processing circuits, and controlling signal acquisition and transmission rates. A potential / capacitance value versus time curve display module is designed to observe data characteristics such as response time and hysteresis error. A distance display module uses cylindrical coordinates, with the center of curvature of the scene to which the flexible sensor is attached as the coordinate axis, to intuitively display the distance between the object and the sensor surface. A pressure display module 305 has a resolution matched to the number and dimensions of the pressure sensing electrode array to display the position and magnitude of pressure on the sensor surface. The host computer 205 was created using Python, but can also be created using LabVIEW or C++. The serial communication parameter control module 301 is primarily used for debugging and processing circuits, and controlling signal acquisition and transmission rates.

[0081] This invention provides a flexible sensor for distance and pressure sensing, combining these two technologies. It features low power consumption, fast response, and functionality similar to human skin. This flexible sensor can be attached to various object surfaces, providing solutions for diverse applications. This invention can be used in smart homes, medical settings, robotics, and other scenarios. For example, covering key areas of a robotic arm can improve the safety of objects and human operators in their surrounding environment.

[0082] In one example, the flexible sensor for distance and pressure sensing provided by this invention combines distance and pressure sensing, features low power consumption and fast response speed, and achieves functions similar to human skin. The flexible sensor provided by this invention can be attached to various object surfaces, offering solutions for applications in diverse scenarios. This invention can be used in various scenarios such as smart homes, medical facilities, and robotics. For example, covering key locations of moving robotic arms can improve the safety of objects and human operators in their surrounding environment.

[0083] In one example, multiple flexible sensors for sensing distance and pressure are attached to a robotic arm and connected to a signal processing circuit 200 and a host computer 205. By programming the sensing system, the robotic arm can interact with the user. For example, when a person's hand hovers at a certain distance from the sensor, the robotic arm stops moving; when the person's hand presses on the sensor surface, the robotic arm performs a certain action.

[0084] There exists a type of weakly electric fish in nature that can actively electrolocate. During this process, it releases pulsed currents, which are detected by electroreceptors on its skin, causing signal changes caused by nearby objects. The skin surface also contains numerous tactile receptors, classified into Type I and Type II. Type I receptors are shallower, have a smaller pressure sensing range, but offer higher positioning accuracy; Type II receptors are deeper, have a larger pressure sensing range, but offer lower positioning accuracy. Based on the mechanism by which weakly electric fish acquire external information, this invention provides a flexible sensing system for distance and pressure sensing. This system aims to address safety issues in machine-human interaction, enhance the ability of machines to interact with the outside world, enrich the diversity of human-machine interaction, and provide new human-computer interaction solutions for wearable electronics, robotics, and other fields.

[0085] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. Furthermore, those skilled in the art will recognize that, based on the ideas of the present invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of the present invention.

Claims

1. A flexible sensor for sensing distance and pressure, characterized in that, The flexible sensor includes: a sensing electrode array, a first insulating layer, a cavity structure array, a compressible dielectric, and a ground electrode; The sensing electrode array, the first insulating layer, the compressible dielectric, and the ground electrode are arranged sequentially from the top to the bottom; the cavity structure array is arranged in the first insulating layer and connected to the compressible dielectric. The sensing electrode array is used to sense the distance from the object to the flexible sensor or the pressure on the surface of the flexible sensor. The sensing electrode array includes: a distance sensing receiving electrode array, a second insulating layer, and a common sensing electrode array; the distance sensing receiving electrode array is connected to the second insulating layer, the common sensing electrode array is disposed in the second insulating layer, and the second insulating layer is connected to the first insulating layer; the common sensing electrode array is disposed opposite to the cavity structure array; when the flexible sensor is used to sense distance, the common sensing electrode array is a distance sensing transmitting electrode array; when the flexible sensor is used to sense pressure, the common sensing electrode array is a pressure sensing electrode array; the distance sensing receiving electrode array includes 5 electrodes; 4 electrodes of the distance sensing receiving electrode array are distributed in a U-shape on the edge above the second insulating layer, and 1 electrode is located at the center above the second insulating layer; the electrodes are nano-silver electrodes or nano-copper electrodes.

2. A flexible sensing system for distance and pressure sensing, characterized in that, The flexible sensing system includes: a signal processing circuit, a host computer, and the flexible sensor as described in claim 1; The signal processing circuit is connected to the host computer and the sensing electrode array of the flexible sensor, respectively. The signal processing circuitry is used to switch between distance sensing and pressure sensing. When the signal processing circuit switches to distance sensing, it outputs a voltage signal to the sensing electrode array of the flexible sensor to generate an electric field, receives the potential value of the sensing electrode array, and sends the potential value of the sensing electrode array to the host computer. The host computer is used to determine the distance from the object to the flexible sensor based on the potential value of the sensing electrode array. When the signal processing circuit switches to pressure sensing, the signal processing circuit reads the capacitance value between the sensing electrode array of the flexible sensor and the ground electrode, and sends the capacitance value to the host computer; the host computer is also used to determine the pressure on the surface of the flexible sensor based on the capacitance value; The host computer includes: a distance recognition module, a potential change curve display module, a distance display module, a pressure recognition module, a capacitance change curve display module, and a pressure display module; The input terminal of the distance recognition module is connected to the signal processing circuit, and the output terminal of the distance recognition module is connected to the potential change curve display module and the distance display module, respectively. The distance recognition module is used to determine the distance from the object to the flexible sensor based on the potential value of the sensing electrode array and a polynomial fitting curve of the potential value versus the distance. The potential change curve display module is used to display the curve of the potential value of each electrode in the sensing electrode array changing over time. The distance display module is used to display the distance from the object to the flexible sensor in cylindrical coordinates. The input terminal of the pressure recognition module is connected to the signal processing circuit, and the output terminal of the pressure recognition module is connected to the capacitance change curve display module and the pressure display module, respectively. The pressure recognition module is used to determine the pressure on the surface of the flexible sensor by using a polynomial fitting curve of capacitance value versus pressure based on the capacitance value between each electrode in the pressure sensing electrode array and the ground electrode. The capacitance change curve display module is used to display the curve of capacitance value between each electrode in the pressure sensing electrode array and the ground electrode changing over time. The pressure display module is used to display the position and magnitude of the pressure on the surface of the flexible sensor.

3. The flexible sensing system for distance and pressure sensing according to claim 2, characterized in that, The flexible sensing system also includes: a signal generator; The signal generator is connected to the sensing electrode array of the flexible sensor via a signal processing circuit.

4. The flexible sensing system for distance and pressure sensing according to claim 3, characterized in that, The signal processing circuit includes: a signal processing chip, a signal matching module, an ADC module, a microprocessor, and a capacitor-to-digital converter; The signal processing chip is connected to the signal generator and the distance sensing emission electrode array of the sensing electrode array, respectively. The signal processing chip is used to output a voltage signal to the distance sensing emission electrode array of the sensing electrode array to generate an electric field. The signal matching module is connected to the ADC module and the distance sensing receiving electrode array of the sensing electrode array, respectively. The signal matching module is used to receive the potential analog signal of the distance sensing receiving electrode array and send the potential analog signal of the distance sensing receiving electrode array to the ADC module. The ADC module is connected to the microprocessor through a signal processing chip. The ADC module is used to convert the potential analog signal into a potential digital signal, which is then amplified by the signal processing chip and transmitted to the microprocessor. The capacitance-to-digital converter is connected to the microprocessor and the pressure sensing electrode array of the sensing electrode array, respectively. The capacitance-to-digital converter is used to receive the analog capacitance signal between the pressure sensing electrode array and the ground electrode, and convert the analog capacitance signal into a digital capacitance signal and then transmit it to the microprocessor. The microprocessor is connected to the host computer, and the microprocessor is used to send the amplified digital potential signal or digital capacitance signal to the host computer.

5. A robot, characterized in that, The robot employs the flexible sensing system for distance and pressure perception as described in any one of claims 2-4.

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