Data presentation method, device and equipment based on RMS system and storage medium

Abstract

The invention provides a data presentation method, device and equipment based on an RMS system and a storage medium, and the method comprises the steps: obtaining first production parameter information of a production data sequence of a production semiconductor in a target machine and second production parameter information of a standard data sequence of the production semiconductor in a database; comparing the first production parameter information with the second production parameter information to obtain an overall comparison result; comparing first sub-parameter information in the first production parameter information with second sub-parameter information in the second production parameter information to obtain a detailed comparison result; and displaying the overall comparison result on a main production monitoring page, and displaying the detailed comparison result on a sub-production monitoring page. In this way, the data comparison accuracy can be improved, and the reading efficiency of the user can be improved by displaying different forms of results in a layered mode.