An etching device

Abstract

The present application provides an etching device. It includes an etching solution tank, a conveying device and a pressing device. Among them, the etching solution tank has an etching solution chamber for containing the etching solution, and an etching opening communicating with the etching solution chamber is provided at the upper end. The conveying device can convey the product to be etched above the etching opening. The pressing device is used to press the product at the etching opening, and at least a part of the pressing device is arranged in an area other than directly above the etching opening. In the above etching device, at least a part of the pressing device is arranged in an area other than directly above the etching opening, which can reduce or even avoid dust generated by the movement of the pressing device from falling into the etching solution chamber and contaminating the etching solution, and is convenient for inspection and maintenance. In addition, the etching device is provided with a conveying device itself. Compared with transmitting the product through an external device, it is convenient for product conveying and saves the overall occupied space of the equipment required for etching.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular, to an etching device. Background Art

[0002] In the semiconductor packaging process, it is usually necessary to etch the product to obtain the required pattern or structure. Wet etching, as a common etching method, is widely used in the etching of semiconductor products. Wet etching mainly uses an etching device filled with an etching solution to chemically process the surface of the product to be etched. With the continuous development of semiconductor technology, the requirements for etching technology are getting higher and higher. Of course, the requirements for etching devices are also getting higher and higher. Summary of the Invention

[0003] This application provides an etching device, which includes:

[0004] An etching solution tank, having an etching solution cavity for containing the etching solution, and an etching opening communicated with the etching solution cavity is provided at the upper end;

[0005] A transfer device, capable of transferring the product to be etched above the etching opening;

[0006] A pressing device, used to press the product at the etching opening, and at least a part of the pressing device is arranged in an area other than directly above the etching opening.

[0007] Optionally, the pressing device includes a mounting shaft and a pressing plate capable of moving above the etching opening and pressing the product. The pressing plate is pivotally connected to the mounting shaft, and the mounting shaft is arranged in an area other than directly above the etching opening.

[0008] Optionally, the pressing device includes a driving mechanism. The pressing plate includes a pressing portion for pressing the product, a driving portion, and a mounting portion arranged between the pressing portion and the driving portion. The mounting portion is rotatably arranged in an area other than directly above the etching opening, and the driving mechanism is connected to the driving portion to drive the driving portion to rotate so that the pressing portion rotates.

[0009] Optionally, the etching device includes a control device. The driving mechanism includes a driving block and a driving motor. The driving block is drivingly connected to the driving motor. The control device is electrically connected to the driving motor, and the control device can control the working state of the driving motor so that the driving block can abut against the driving portion to drive the driving portion and the pressing portion to rotate.

[0010] Optionally, an anti-overflow groove is provided on one side of the pressing portion close to the mounting portion.

[0011] Optionally, the transfer device includes a transfer track and a product hanger. The product hanger is used to hang the product, and the product hanger can move along the transfer track to move the product above the etching opening.

[0012] Optionally, the product hanger is detachably arranged on the transfer track.

[0013] Optionally, the product hanger includes a connecting part, a lifting mechanism and a bearing part. The connecting part is connected to the transfer track and can move along the transfer track. The bearing part is arranged on the connecting part through the lifting mechanism, and the lifting mechanism can drive the bearing part to lift.

[0014] Optionally, a suction cup structure is arranged on the lower side of the product hanger, and the suction cup structure can suck and release the product.

[0015] Optionally, the transfer track is arranged outside the etching opening, and the transfer track and the pressing device are arranged on different sides of the etching liquid tank.

[0016] In the etching equipment provided by the embodiment of the present application, at least a part of the pressing device is arranged in an area other than directly above the etching opening, which can reduce or even avoid dust generated by the movement of the pressing device from falling into the etching liquid cavity and polluting the etching liquid, and is convenient for equipment maintenance and repair. And the pressing device can press the product placed above the etching opening at the etching opening, so that the surface to be etched of the product is etched in a relatively closed environment, preventing the leakage of the etching liquid from having an unnecessary impact on other structures or other areas of the product. In addition, the etching equipment itself is provided with a transfer device that can transfer the product to be etched above the opening. Compared with transferring the product through an external manipulator or other devices, it is convenient to control the transfer of the product and saves the overall occupied space of the equipment and devices required for etching. Description of the Drawings

[0017] Figure 1 is a schematic structural diagram of an etching equipment proposed according to an exemplary embodiment of the present application.

[0018] Figure 2 is Figure 1 a schematic structural diagram of the pressing plate pressing down of the shown etching equipment (excluding the transfer device).

[0019] Figure 3 is a schematic structural diagram of a transfer device proposed according to an exemplary embodiment of the present application. Detailed Embodiments

[0020] Exemplary embodiments will be described in detail herein, and examples thereof are shown in the accompanying drawings. When the following description refers to the accompanying drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims.

[0021] The terms used in the present application are for the purpose of describing specific embodiments only and are not intended to limit the present application. Unless otherwise defined, the technical terms or scientific terms used in the present application should have the ordinary meaning as understood by those of ordinary skill in the art to which the present application pertains. The terms "a" or "an" and the like used in the specification and claims of the present application do not denote a limitation of quantity but rather denote the presence of at least one. "Plurality" means two or more. The terms "comprising" or "including" and the like mean that the elements or items appearing before "comprising" or "including" cover the elements or items listed after "comprising" or "including" and their equivalents, and do not exclude other elements or items. The terms "connected" or "coupled" and the like are not limited to physical or mechanical connections and may include electrical connections, whether direct or indirect. The terms "upper" and / or "lower" and the like are for convenience of description only and are not limited to a position or a spatial orientation. The singular forms "a", "the", and "said" used in the specification and appended claims of the present application are also intended to include the plural forms unless the context clearly indicates otherwise.

[0022] In the semiconductor packaging process, it is usually necessary to etch the product to obtain the required pattern or structure. Wet etching, as a common etching method, is widely used in the etching of semiconductor products. Wet etching mainly uses an etching device containing an etching solution to chemically process the surface of the product to be etched. With the continuous development of semiconductor technology, the requirements for etching technology are getting higher and higher. Of course, the requirements for etching equipment are also getting higher and higher. The inventors have found through research that in the related art, when using an etching device to etch a product, it is necessary to use an external manipulator to transport the product to the etching location of the etching device. And there is a moving friction point above the etching opening of the etching device, and the dust generated at the moving friction point falling into the etching solution will contaminate the etching solution.

[0023] Figure 1 FIG. 100 is a schematic structural diagram of an etching device 100 according to an exemplary embodiment of the present application. The etching device 100 is a single-sided etching device and can be used for etching single-sided semiconductor products.

[0024] Please refer to Figure 1 and, if necessary, in conjunction with Figure 2And Figure 3 , the etching equipment 100 includes an etching solution tank 10, a transfer device 20, and a pressing device 30. Among them, the etching solution tank 10 has an etching solution chamber for containing the etching solution. And an etching opening 101 communicating with the etching solution chamber is provided at the upper end of the etching solution tank 10. The transfer device 20 can transfer the product to be etched above the etching opening 101. The pressing device 30 is used to press the product at the etching opening 101, and at least a part of the pressing device 30 is arranged in an area other than directly above the etching opening 101. The product can come into contact with the etching solution at the etching opening 101 and be etched. The etching equipment 100 further includes a control device (such as a control circuit board) to control the movement of structures such as the transfer device and the pressing device.

[0025] It should be noted that the area other than directly above the etching opening 101 can include the outside of the etching solution tank 10, such as the outside of the upper part of the etching tank. The pressing device 30 can be specifically arranged on the etching solution tank 10 or on other structures outside the etching solution tank. At least a part of the pressing device mentioned here includes, but is not limited to, the connection part of the pressing plate 31, the connection part for driving the movement of the pressing plate 31, the driving structure for driving the movement of the pressing plate 31, and the connection part for arranging the driving structure, etc.

[0026] In some embodiments, the transfer track 21 can be arranged outside the etching solution tank 10. The transfer track 21 and the pressing device 30 are arranged on different sides of the etching solution tank 10, such as on opposite sides outside the etching opening 101, to avoid the risk of collision during their movement.

[0027] In some embodiments, a spraying device 40 can be provided at the etching opening 101 of the etching equipment. The spraying device 40 can spray the etching solution in the etching solution chamber onto the lower surface of the product to be etched to etch the product. Of course, in some other embodiments, the spraying device may not be provided, and the lower surface of the product to be etched needs to directly contact the liquid level of the etching solution. In this case, the amount of the etching solution needs to be sufficient so that the lower surface of the product can contact the liquid level.

[0028] In some embodiments, the pressing device 30 includes a pressing plate 31 that can move above the etching opening 101 to press the product placed above the etching opening 101 at the etching opening 101.

[0029] In some embodiments, the pressing device 30 includes a driving mechanism. The pressing plate 31 includes a pressing part 311 for pressing the product, a driving part 312, and an installation part arranged between the pressing part 311 and the driving part 312. The installation part is rotatably arranged outside the etching solution tank 10. The driving mechanism is connected to the driving part 312 to drive the driving part 312 to rotate so that the pressing part 311 rotates.

[0030] In some embodiments, the pressing device 30 includes a mounting shaft 33. Specifically, the pressing plate 31 is pivotally connected to the mounting shaft 33. The mounting shaft 33 is installed outside the etching solution tank 10. Correspondingly, the above-mentioned mounting portion is pivotally connected to the mounting shaft 33. Thus, dust and chips generated when the pressing plate 31 rotates around the mounting shaft 33 will not fall into the etching opening.

[0031] Please refer to Figure 2 As shown, in some embodiments, the pressing plate is a bent plate. The pressing portion 311 and the driving portion 312 are connected at the bending portion. The length L1 of the pressing portion 311 is greater than the length L2 of the driving portion 312, and the mass of the pressing portion 311 is greater than that of the driving portion 312. Then, when the pressing plate 31 is in the pressing state, the pressing portion 311 can be pressed onto the product under the action of gravity. The bending portion is the mounting portion and is installed on the mounting shaft 33. The driving portion 312 is located below the mounting shaft 33.

[0032] In some embodiments, the driving mechanism can be a lifting mechanism. The driving mechanism includes a driving block 32 and a driving motor. The driving block 32 is drivingly connected to the driving motor, and the driving motor can directly drive the driving block 32 to move horizontally so that the driving block 32 can abut against the driving portion 312 to drive the driving portion 312 and the pressing portion 311 to rotate. Correspondingly, the above-mentioned control device can be electrically connected to the driving motor to control the working state of the driving motor, thereby realizing the driving of the driving block 32.

[0033] Specifically, before the product is placed in the etching opening, the pressing plate 31 and the driving block 32 can be located at the initial position as shown in Figure 1 . At this initial position, the driving block 32 abuts against the driving portion 312, applying a force to the driving portion 312 in the A1 direction, so that the pressing plate 31 can stay in this position. After the product is placed in the etching opening 101, the driving block 32 can be controlled to move in the A2 direction and move to the position as shown in Figure 2 , where the pressing plate 31 is in the pressing state.

[0034] It should be noted that in some other embodiments, the driving block can also be set to move in other directions, such as tilting. The driving block can also be connected to the driving plate together. The present application does not limit this and can be set according to the specific application environment.

[0035] Please refer to Figure 2 As shown, an anti-overflow groove 301 is provided on one side of the pressing portion 311 close to the mounting portion to prevent the etching solution adhered to the pressing plate from flowing down along the pressing plate to the driving mechanism or other structures, such as the mounting shaft 33, when the pressing plate is lifted, which may have an adverse impact on the driving mechanism or other structures.

[0036] Further, please refer to Figure 2 and Figure 3As shown, the conveying device 20 includes a conveying track 21 and a product hanging member 22. The product hanging member 22 is used to hang the product to convey the product. The product hanging member 22 is provided on the conveying track 21 and can move along the conveying track 21 to move the product above the etching opening 101. The above control device can be electrically connected to the driving device 20 to control the movement of the product hanging member 22 on the conveying track 21.

[0037] The conveying track 21 is a horizontal driving track. Specifically, in some embodiments, the conveying track 21 can be set as a straight horizontal driving track. The straight horizontal driving track can extend inwards or outwards along the direction perpendicular to Figure 1 and Figure 2 the paper surface direction. Correspondingly, the product hanging member 22 can be set to move inwards or outwards along the direction perpendicular to Figure 1 and Figure 2 the paper surface direction under the control of the control device to drive the product to move above the etching opening 101, or move inwards or outwards from above the etching opening 101.

[0038] In some embodiments, the product hanging member 22 is detachably provided on the conveying track 21. It is convenient for the disassembly and assembly of the product hanging member 22, facilitating the quick replacement and maintenance of the product hanging member 22, and is beneficial to improving the processing efficiency of abnormal situations of the driving device.

[0039] Please refer to Figure 2 and Figure 3 As shown, the product hanging member 22 includes a connecting portion 221, a lifting mechanism 222 and a bearing portion 223. The connecting portion 221 is connected to the conveying track 21 and can move along the conveying track 21. The bearing portion 223 is provided on the connecting portion 221 through the lifting mechanism 222, and the lifting mechanism 222 can drive the bearing portion 223 to lift. In some embodiments, the lifting mechanism can be electrically connected to the above control device to achieve automatic lifting under the control of the control device. Of course, in some other embodiments, the lifting structure can also be set to be manually controlled for lifting. This application does not make any limitations and can be set according to the specific application environment.

[0040] Please continue to refer to Figure 2 and Figure 3 As shown, in some embodiments, a suction cup structure 23 is provided on the lower side of the product hanging member 22. The suction cup structure 23 can suck and release the product. Specifically, the suction cup structure 23 can adsorb the non-product surface of the product.

[0041] The driving device described in the above embodiments is simple in structure and low in cost compared with relatively complex conveying devices such as manipulators. Moreover, the conveying device is a structure inherent in the etching equipment, which is convenient for the control of the conveying device, making the control of the conveying device simple and reliable. In addition, it can also avoid collisions between the conveying device and other structures outside the etching equipment.

[0042] Further, in some embodiments, the etching apparatus 100 may further be provided with a sensing device (such as a sensor) electrically connected to the control device to obtain information about the product being placed at or leaving the etching opening 101, so that the control device can perform corresponding control on the pressing device 30.

[0043] Further, in some embodiments, the etching apparatus 100 may further be provided with other structures such as a stripping device and a water washing device. Correspondingly, the etching apparatus 100 is provided with a stripping station and a water washing station. The above-mentioned transmission device can also be used to transfer the product to the stripping station, the water washing station, etc.

[0044] Based on the above structure of the etching apparatus 100, before the product to be etched is placed above the etching opening 101, the pressing device can be located at the initial position as shown in Figure 1 . The control device can control the product hanger 22 carrying the product to move towards the etching opening 101 in a direction perpendicular to the Figure 1 paper surface. When moving to a position where the product is directly above the etching opening 101, the lifting mechanism 222 of the product hanger 22 operates, and the product hanger 22 lowers the bearing part so that the product is placed at the etching opening 101. Subsequently, the product hanger 22 moves away, and the control device can control the driving block 32 to move along the A2 direction away from the etching chamber 10 so that the pressing plate can be pressed onto the product.

[0045] Based on the above structure of the etching apparatus 100, after the product etching is completed, the control device can control the driving block 32 to move along the A1 direction towards the etching chamber 10 so that the pressing part 311 is lifted. The control device can control the product hanger 22 of the transmission device to move towards the etching opening 101 to transfer the etched product away.

[0046] In this application, the structural embodiments and the method embodiments can complement each other when there is no conflict.

[0047] The above are only the preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this application shall be included within the scope of protection of this application.

Claims

1. An etching device, characterized in that, It includes: An etching solution tank having an etching solution chamber for containing an etching solution, and an etching opening communicating with the etching solution chamber is provided at the upper end; A conveying device capable of conveying a product to be etched above the etching opening; A pressing device, the pressing device includes a mounting shaft and a pressing plate capable of moving above the etching opening and pressing the product, the pressing plate is pivotally connected to the mounting shaft, and the mounting shaft is provided in an area other than directly above the etching opening; the pressing plate can be pressed on the product placed above the etching opening, so that the product is located at the etching opening, and the product can contact the etching solution at the etching opening and be etched.

2. The etching apparatus according to claim 1, wherein, The pressing device includes a driving mechanism, the pressing plate includes a pressing portion for pressing the product, a driving portion and a mounting portion provided between the pressing portion and the driving portion, the mounting portion is rotatably provided in an area other than directly above the etching opening, and the driving mechanism is connected to the driving portion to drive the driving portion to rotate so that the pressing portion rotates.

3. The etching apparatus according to claim 2, wherein The etching equipment includes a control device, the driving mechanism includes a driving block and a driving motor, the driving block is drivingly connected to the driving motor, the control device is electrically connected to the driving motor, and the control device can control the working state of the driving motor so that the driving block can abut against the driving portion to drive the driving portion and the pressing portion to rotate.

4. The etching apparatus according to claim 2, wherein An anti-overflow groove is provided on one side of the pressing portion close to the mounting portion.

5. The etching apparatus according to claim 1, wherein The conveying device includes a conveying track and a product hanging member, the product hanging member is used for hanging the product, and the product hanging member can move along the conveying track to move the product above the etching opening.

6. The etching device according to claim 5, wherein The product hanging member is detachably provided on the conveying track.

7. The etching apparatus according to claim 5, wherein, The product hanging member includes a connecting portion, a lifting mechanism and a bearing portion, the connecting portion is connected to the conveying track and can move along the conveying track, the bearing portion is provided on the connecting portion through the lifting mechanism, and the lifting mechanism can drive the bearing portion to lift.

8. The etching device according to claim 5, wherein, A suction cup structure is provided on the lower side of the product hanging member, and the suction cup structure can suck and release the product.

9. The etching apparatus according to claim 5, wherein The conveying track is provided outside the etching opening, and the conveying track and the pressing device are provided on different sides of the etching solution tank.

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