Display substrate, manufacturing method thereof and display device

Abstract

The application provides a display substrate, a manufacturing method thereof and a display device. The display substrate comprises a plurality of pixel units, each of which comprises a non-opening area and a plurality of sub-pixel opening areas, the plurality of sub-pixel opening areas comprising a first opening area, a second opening area and a third opening area; the first opening area and the second opening area are located in the same circle, the third opening area is located outside the circle, and the area of the first opening area and the area of the second opening area are both greater than twice the area of the third opening area. According to the display substrate of the embodiment of the application, by setting the first opening area and the second opening area in the plurality of sub-pixel opening areas in the same circle, while the third opening area is located outside the circle, and by setting the area of the first opening area and the area of the second opening area to be both greater than twice the area of the third opening area, the pixel resolution can be effectively improved, and the display effect can be improved.

Description

Technical Field

[0001] This invention relates to the field of display technology, specifically to a display substrate, its manufacturing method, and a display device. Background Technology

[0002] With the continuous development of display technology, people have increasingly higher requirements for the clarity of image display. Therefore, high resolution has become a major development trend in display panels. Resolution generally refers to the number of pixels on a display panel; the more pixels a display panel has, the more detailed the displayed image.

[0003] Currently, increasing the resolution of a display panel is generally achieved by increasing the number of pixels. This is especially true for display panels with a fixed screen size, where the only way to increase the number of pixels per unit area is to reduce the pixel area. However, the smaller the pixel area in a display panel, the more difficult the manufacturing process becomes, and consequently, the higher the cost. Traditional pixel arrangement methods combined with inkjet printing technology typically only achieve a resolution of around 300 dpi, and at most, cannot reach a resolution above 400 dpi. Summary of the Invention

[0004] In view of this, the present invention provides a display substrate and its manufacturing method, as well as a display device, which can solve the problem in the related art that it is impossible to further improve the pixel resolution of the display panel, thereby improving the display effect.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] One embodiment of the present invention provides a display substrate, the display substrate including a plurality of pixel units, each pixel unit including a non-aperture area and an aperture area of ​​a plurality of sub-pixels, the aperture areas of the plurality of sub-pixels including a first aperture area, a second aperture area and a third aperture area;

[0007] The first opening area and the second opening area are located within the same circle, and the third opening area is located outside the circle. The area of ​​the first opening area and the area of ​​the second opening area are both greater than twice the area of ​​the third opening area.

[0008] Optionally, the planar shape of any one of the first opening area, the second opening area, and the third opening area is any one of a circle, an ellipse, or a regular polygon with a side length greater than or equal to 6.

[0009] Optionally, the non-opening area is composed of a first pixel isolation structure and a second pixel isolation structure. The first pixel isolation structure has a circular opening, and the second pixel isolation structure is disposed in the circular opening and separates the circular opening into two parts to form the first opening area and the second opening area.

[0010] Optionally, the angle between the second pixel isolation structure and the first pixel isolation structure is an obtuse angle, and the distance between the two farthest points on the second pixel isolation structure is greater than two-thirds of the diameter of the circular opening and less than the diameter of the circular opening.

[0011] Optionally, the height of the first pixel isolation structure in the direction perpendicular to the display panel is 1 to 2 μm, and the height of the second pixel isolation structure in the direction perpendicular to the display panel is 1.5 to 3.5 μm. The height of the second pixel isolation structure in the direction perpendicular to the display panel is greater than the height of the first pixel isolation structure in the direction perpendicular to the display panel.

[0012] Optionally, both the first opening area and the second opening area are elliptical, the area of ​​the first opening area and the area of ​​the second opening area are both greater than or equal to one-quarter of the area of ​​the circle, and the area of ​​the third opening area is less than one-quarter of the area of ​​the circle.

[0013] Another embodiment of the present invention provides a method for manufacturing a display substrate, the method comprising:

[0014] A substrate is provided on which a plurality of pixel units are formed, each pixel unit including a non-aperture region and an aperture region of a plurality of sub-pixels, the aperture regions of the plurality of sub-pixels including a first aperture region, a second aperture region and a third aperture region;

[0015] The first opening area and the second opening area are located within the same circle, and the third opening area is located outside the circle. The area of ​​the first opening area and the area of ​​the second opening area are both greater than twice the area of ​​the third opening area.

[0016] Optionally, forming a plurality of pixel units on the substrate includes:

[0017] First, the first sub-pixel and the second sub-pixel of the pixel unit are formed on the substrate, and then the third sub-pixel of the pixel unit is formed on the substrate.

[0018] Alternatively, the third sub-pixel of the pixel unit may be formed on the substrate first, and then the first sub-pixel and the second sub-pixel of the pixel unit may be formed on the substrate on which the third sub-pixel is formed.

[0019] Wherein, the opening area of ​​the first sub-pixel is the first opening area, the opening area of ​​the second sub-pixel is the second opening area, and the opening area of ​​the third sub-pixel is the third opening area.

[0020] Optionally, the step of first forming the first sub-pixel and the second sub-pixel of the pixel unit on the substrate, and then forming the third sub-pixel of the pixel unit on the substrate, includes:

[0021] A first pixel isolation structure and a second pixel isolation structure are fabricated on the substrate to form a non-aperture area of ​​the pixel unit, an aperture area of ​​the first sub-pixel, an aperture area of ​​the second sub-pixel, and an aperture area of ​​the third sub-pixel.

[0022] A first light-emitting layer is formed in the first opening area and the second opening area using inkjet printing technology, and a second light-emitting layer is formed in the third opening area using electro-jet printing technology.

[0023] Optionally, the step of first forming the third sub-pixel of the pixel unit on the substrate, and then forming the first sub-pixel and the second sub-pixel of the pixel unit on the substrate where the third sub-pixel is formed, includes:

[0024] A photoresist layer is coated and patterned on the substrate to form the opening regions of the plurality of the third sub-pixels;

[0025] After forming the second light-emitting layer in the opening area of ​​the third sub-pixel, the photoresist layer is peeled off;

[0026] A first pixel isolation structure and a second pixel isolation structure are fabricated on the substrate to form a non-aperture area, an aperture area of ​​a first sub-pixel, and an aperture area of ​​a second sub-pixel of the pixel unit.

[0027] A second light-emitting layer is formed in the opening region of the first sub-pixel and the opening region of the second sub-pixel.

[0028] Another aspect of the present invention provides a display device, which includes a display substrate as described in the above embodiments.

[0029] The beneficial effects of the above technical solution of the present invention are as follows:

[0030] In this embodiment of the invention, by setting the first and second opening areas of the opening areas of multiple sub-pixels within the same circle, while the third opening area is located outside the circle, and setting the areas of the first and second opening areas to be twice the area of ​​the third opening area, the pixel resolution can be effectively improved and the display effect enhanced. Attached Figure Description

[0031] Figure 1 This is one of the structural schematic diagrams of a display substrate provided in an embodiment of the present invention;

[0032] Figure 2 This is an enlarged schematic diagram of the second pixel isolation structure provided in an embodiment of the present invention;

[0033] Figure 3 This is a second schematic diagram of the structure of a display substrate provided in an embodiment of the present invention;

[0034] Figure 4 This is a schematic flowchart illustrating a method for manufacturing a display substrate according to an embodiment of the present invention. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention are within the scope of protection of the present invention.

[0036] In related technologies, the pixel light-emitting layer can be made using inkjet printing technology. The printheads used in inkjet printing include 30pl, 10pl, 7pl, 4pl, 2pl, and 1pl. Due to its limited precision, inkjet printing cannot currently achieve a stable ±5μm impact accuracy. Impact accuracy represents the degree of deviation between the actual position of the inkjet print and the preset position. The theoretical pixel resolution limit obtained by inkjet printing is 350ppi, and it is difficult to further improve the pixel resolution.

[0037] Therefore, one embodiment of the present invention provides a display substrate, which includes a plurality of pixel units, each pixel unit including a non-aperture area and an aperture area of ​​a plurality of sub-pixels, the aperture areas of the plurality of sub-pixels including a first aperture area, a second aperture area and a third aperture area; wherein, the first aperture area and the second aperture area are located within the same circle, which can be an actual circular structure or a virtual circle, while the third aperture area is located outside the circle; and, the sizes of the first aperture area, the second aperture area and the third aperture area are not all equal, more specifically, the area of ​​the first aperture area and the area of ​​the second aperture area are both greater than twice the area of ​​the third aperture area. By designing the first and second opening areas as a single circle, the area they occupy can be reduced. The area of ​​the third opening area is less than half the area of ​​both the first and second opening areas, meaning the area of ​​the third opening area is designed to be smaller. Thus, the light-emitting layers of the first and second opening areas are still prepared using inkjet printing, while the light-emitting layer of the third opening area can be prepared using processes other than inkjet printing, such as photolithography or electro-inking. This reduces the overall pixel area, thereby improving pixel resolution. Furthermore, by using different processes for different opening areas, pixel manufacturing costs and time are balanced while improving pixel resolution, achieving a better overall effect.

[0038] Therefore, by arranging multiple sub-pixels in the above manner, that is, by placing the first and second opening areas of the opening areas of multiple sub-pixels within the same circle, while the third opening area is located outside the circle, and by setting the areas of the first and second opening areas to be twice the area of ​​the third opening area, the pixel resolution can be effectively improved and the display effect enhanced.

[0039] In some embodiments of the present invention, the plurality of sub-pixels include red sub-pixels, green sub-pixels and blue sub-pixels, wherein the first opening area is the opening area of ​​the red sub-pixel, the second opening area is the opening area of ​​the green sub-pixel and the third opening area is the opening area of ​​the blue sub-pixel.

[0040] In some embodiments of the present invention, the areas of the first opening area, the second opening area, and the third opening area may be the areas of the pattern formed by the outlines of the first opening area, the second opening area, and the third opening area projected onto the side of the display substrate opposite to the pixel unit.

[0041] In some embodiments of the present invention, the radii of the circles containing the first and second opening regions range from 10 μm to 25 μm, and the light-emitting layers within these first and second opening regions can be prepared using inkjet printing. The third opening region, regardless of its shape, can be surrounded by a minimum circle with a radius ranging from 6.35 μm to 9 μm. Considering the accuracy of inkjet printing, the light-emitting layer within the third opening region is not suitable for inkjet printing and can be prepared using photolithography, electro-inkjet printing, or similar techniques. It should be noted that setting the areas of the first, second, and third opening regions to different sizes allows them to be used in different light-emitting layer preparation processes. It is anticipated that smaller opening regions result in greater process difficulty and higher costs. Therefore, the pixel design described above balances the manufacturing costs and difficulties of the display substrate added by different processes while also improving pixel resolution.

[0042] In some embodiments of the present invention, the planar shape of any one of the first opening area, the second opening area, and the third opening area is any one of a circle, an ellipse, or a regular polygon with a side length greater than or equal to 6. That is, the first opening area can be any one of a circle, an ellipse, or a regular polygon with a side length greater than or equal to 6; the second opening area can be any one of a circle, an ellipse, or a regular polygon with a side length greater than or equal to 6; and the third opening area can be any one of a circle, an ellipse, or a regular polygon with a side length greater than or equal to 6. The planar shapes of the first opening area, the second opening area, and the third opening area can be the same or different.

[0043] Please refer to Figure 1 and Figure 2 , Figure 1 This is one of the structural schematic diagrams of a display substrate provided in an embodiment of the present invention. Figure 2 This is an enlarged schematic diagram of the second pixel isolation structure provided in an embodiment of the present invention. Figure 1 and Figure 2 As shown, in some embodiments of the present invention, the non-opening area is composed of a first pixel isolation structure 11 and a second pixel isolation structure 12. The first pixel isolation structure 11 has a circular opening, and the second pixel isolation structure 12 is disposed within the circular opening formed by the first pixel isolation structure 11. The second pixel isolation structure 12 divides the circular opening into two parts, thereby forming a first opening area 101 and a second opening area 102. That is, the two parts divided by the second pixel isolation structure 12 correspond to the first opening area 101 and the second opening area 102, respectively. In other words, the planar shapes of the first opening area 101 and the second opening area 102 can be irregular.

[0044] In some embodiments of the present invention, the orthographic projection shape of the second pixel isolation structure 12 on the side surface of the display substrate 10 away from the pixel unit can be a straight line, an arc, or other irregular line shape.

[0045] In some embodiments of the present invention, the first pixel isolation structure 11 and the second pixel isolation structure 12 can be integrally formed or separately formed.

[0046] In some embodiments of the present invention, the angle between the second pixel isolation structure 12 and the first pixel isolation structure 11 is an obtuse angle. That is, any interior angle formed by the edge contour of the first opening area 101 is an obtuse angle, and any interior angle formed by the edge contour of the second opening area 102 is also an obtuse angle. The obtuse angle opening structure helps the light-emitting layer to spread flatly in the first opening area 101 and the second opening area 102 during inkjet printing, forming a light-emitting layer with a relatively uniform thickness. Here, when the angle between the second pixel isolation structure 12 and the first pixel isolation structure 11 is not the angle formed by two straight lines, it can be characterized by the angle formed by the tangents at corresponding points on the line.

[0047] In some embodiments of the present invention, in order to make the second pixel isolation structure 12 and the first pixel isolation structure 11 form an obtuse angle, the two ends of the second pixel isolation structure 12 can be set to have a certain arc shape. Optionally, since the second pixel isolation structure 12 divides the circular opening of the first pixel isolation structure 11 into two parts, the two ends of the second pixel isolation structure 12 can be set to have a certain thickness, and the side that surrounds the first opening area 101 is arc-shaped, and the side that surrounds the second opening area 102 is also arc-shaped.

[0048] In some embodiments of the present invention, the distance between the two farthest points on the second pixel isolation structure 12 is greater than two-thirds of the diameter of the circular opening containing the first opening area 101 and the second opening area 102, but smaller than the diameter of the circular opening. This design allows the first opening area 101 and the second opening area 102 to be of unequal size, and the smaller of the two opening areas is not too small, thus ensuring the light-emitting display effect of the composed pixel unit.

[0049] In some embodiments of the present invention, the two farthest points on the so-called second pixel isolation structure 12 may be the two farthest points in the orthographic projection formed by the second pixel isolation structure 12 on the side surface of the display substrate 10 away from the pixel unit.

[0050] In some embodiments of the present invention, the height of the first pixel isolation structure 11 in the direction perpendicular to the display panel (display plane) is 1 to 2 μm, while the height of the second pixel isolation structure 12 in the direction perpendicular to the display panel is 1.5 to 3.5 μm. By setting the heights of the first pixel isolation structure 11 and the second pixel isolation structure 12 to the above values, and with the height of the second pixel isolation structure 12 being greater than the height of the first pixel isolation structure, the mixing of different colored light-emitting layer materials can be avoided as much as possible when preparing the light-emitting layers in the first opening region 101 and the second opening region 102 using inkjet printing technology, thus ensuring the purity of each light-emitting layer and ensuring the light-emitting effect.

[0051] In some embodiments of the present invention, the second pixel isolation structure 12 is made of a fluorine-containing organic material, which has better hydrophobicity and helps to improve the flatness of the organic layer.

[0052] Please refer to Figure 3 , Figure 3 This is a second schematic diagram of a display substrate provided in an embodiment of the present invention. Figure 3 As shown, in some other embodiments of the present invention, both the first opening region 101 and the second opening region 102 are elliptical, and the areas of both the first opening region 101 and the second opening region 102 are greater than or equal to one-quarter of the area of ​​the circle in which they are located, and the area of ​​the third opening region 103 is less than one-quarter of the area of ​​the circle. By setting the opening regions of the pixels in the above manner, the pixel resolution can be improved.

[0053] In some embodiments of the present invention, the non-opening area is composed of a first pixel isolation structure 11, wherein the first pixel isolation structure 11 has the aforementioned first opening area 101 and second opening area 102.

[0054] In some embodiments of the present invention, the pixel resolution of the display substrate 10 can reach 500ppi.

[0055] In summary, in this embodiment of the invention, by setting the first and second opening areas of the opening areas of multiple sub-pixels within the same circle, while the third opening area is located outside the circle, and by setting the areas of the first and second opening areas to be twice the area of ​​the third opening area, pixel resolution can be effectively improved and display effect enhanced.

[0056] Please refer to Figure 4 , Figure 4 This is a schematic flowchart illustrating a method for manufacturing a display substrate according to an embodiment of the present invention. Figure 4 As shown, another embodiment of the present invention also provides a method for manufacturing a display substrate. This method can be used to prepare the display substrate described in the above embodiments. The method includes the following steps:

[0057] Step 401: Provide a substrate, and form a plurality of pixel units on the substrate, each pixel unit including a non-aperture region and an aperture region of a plurality of sub-pixels, the aperture regions of the plurality of sub-pixels including a first aperture region, a second aperture region and a third aperture region;

[0058] The first opening area and the second opening area are located within the same circle, and the third opening area is located outside the circle. The area of ​​the first opening area and the area of ​​the second opening area are both greater than twice the area of ​​the third opening area.

[0059] In this embodiment of the invention, by designing the first and second opening regions as a single circle, the area they occupy can be reduced. The area of ​​the third opening region is less than half the area of ​​the first and second opening regions, that is, the area of ​​the third opening region is designed to be smaller. Thus, the light-emitting layers of the first and second opening regions are still prepared using inkjet printing technology, while the light-emitting layer of the third opening region can be prepared using processes other than inkjet printing, such as photolithography, electro-inkjet printing, etc. As a result, the overall pixel area is reduced, thereby improving the pixel resolution. Furthermore, by using different processes for different opening regions, the pixel manufacturing cost and time are balanced while improving the pixel resolution, achieving a better effect.

[0060] In some embodiments of the present invention, forming a plurality of pixel units on the substrate includes:

[0061] First, the first sub-pixel and the second sub-pixel of the pixel unit are formed on the substrate, and then the third sub-pixel of the pixel unit is formed on the substrate.

[0062] Alternatively, the third sub-pixel of the pixel unit may be formed on the substrate first, and then the first sub-pixel and the second sub-pixel of the pixel unit may be formed on the substrate on which the third sub-pixel is formed.

[0063] Wherein, the opening area of ​​the first sub-pixel is the first opening area, the opening area of ​​the second sub-pixel is the second opening area, and the opening area of ​​the third sub-pixel is the third opening area.

[0064] In other words, in this embodiment of the invention, the first and second sub-pixels can be fabricated first, followed by the third sub-pixel, or vice versa. The light-emitting layers of the first and second sub-pixels can be prepared using the same process, specifically inkjet printing. However, the light-emitting layer of the third sub-pixel uses a different process than that of the first and second sub-pixels, such as electro-inking or photolithography. Therefore, by using different processes to fabricate the sub-pixels, the manufacturing cost and difficulty of the display substrate associated with each process can be balanced, while pixel resolution can be improved.

[0065] In this embodiment of the invention, optionally, the first sub-pixel is a red sub-pixel, the second sub-pixel is a green sub-pixel, and the third sub-pixel is a blue sub-pixel.

[0066] The following examples illustrate the subpixel creation processes for the two different orders described above.

[0067] In some embodiments of the present invention, the step of first forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate, and then forming a third sub-pixel of the pixel unit on the substrate includes:

[0068] A first pixel isolation structure and a second pixel isolation structure are fabricated on the substrate to form a non-aperture area of ​​the pixel unit, an aperture area of ​​the first sub-pixel, an aperture area of ​​the second sub-pixel, and an aperture area of ​​the third sub-pixel.

[0069] A first light-emitting layer is formed in the first opening area and the second opening area using inkjet printing technology, and a second light-emitting layer is formed in the third opening area using electro-jet printing technology.

[0070] For example, a driving circuit layer and other structures can be formed on the substrate. Then, a cathode pattern, an electron transport layer, an electron injection layer, etc., are sequentially formed on the substrate. Next, a first pixel isolation structure and a second pixel isolation structure are fabricated on the obtained substrate. The first pixel isolation structure forms a circular opening, and the second pixel isolation structure is disposed within the circular opening and divides the circular opening into two parts to form a first opening region and a second opening region. Furthermore, the first pixel isolation structure also forms the opening region of a third sub-pixel. Subsequently, inkjet printing is performed in the first and second opening regions to form the light-emitting layers of the first and second sub-pixels. Electro-inkjet printing is then performed in the third opening region to form the light-emitting layer of the third sub-pixel. Subsequently, hole injection layers, hole transport layers, anode patterns, etc., are fabricated, and finally, a display substrate is encapsulated.

[0071] In other embodiments of the present invention, the step of first forming a third sub-pixel of the pixel unit on the substrate, and then forming a first sub-pixel and a second sub-pixel of the pixel unit on the substrate where the third sub-pixel is formed includes:

[0072] A photoresist layer is coated and patterned on the substrate to form the opening regions of the plurality of the third sub-pixels;

[0073] After forming the second light-emitting layer in the opening area of ​​the third sub-pixel, the photoresist layer is peeled off;

[0074] A first pixel isolation structure and a second pixel isolation structure are fabricated on the substrate to form a non-aperture area, an aperture area of ​​a first sub-pixel, and an aperture area of ​​a second sub-pixel of the pixel unit.

[0075] A second light-emitting layer is formed in the opening region of the first sub-pixel and the opening region of the second sub-pixel.

[0076] For example, a driving circuit layer and other structures can be formed on the substrate, and then a cathode pattern and other structures can be formed sequentially on the substrate. Next, photoresist is spin-coated onto the obtained substrate for exposure patterning, so that the formed photoresist layer has multiple opening regions for the third sub-pixel. Then, an electron transport layer, an electron injection layer, and a light-emitting layer are spin-coated sequentially on the entire surface. Then, the photoresist is peeled off, so that the electron transport layer, electron injection layer, and light-emitting layer are deposited only in the opening regions of the third sub-pixel, and the electron transport layer, electron injection layer, and light-emitting layer in other areas are peeled off along with the photoresist. Next, a first pixel isolation structure and a second pixel isolation structure are fabricated on the substrate to form the non-opening region of the pixel unit, the opening region of the first sub-pixel, and the third sub-pixel. In the fabrication of the first and second pixel isolation structures, the third sub-pixel can be protected by coating it with protective adhesive (i.e., covering the opening area of ​​the third sub-pixel) to avoid affecting the already fabricated light-emitting layer and other structures of the third sub-pixel. The protective adhesive is then removed after the light-emitting layers of the first and second sub-pixels are fabricated. After the opening areas of the first and second sub-pixels are formed, the light-emitting layers of the first and second sub-pixels can be fabricated using processes such as inkjet printing. After the light-emitting layers of the first, second, and third sub-pixels are fabricated, the hole injection layer, hole transport layer, anode pattern, etc., can be fabricated as a whole, and finally, the display substrate is encapsulated.

[0077] In some embodiments of the present invention, optionally, the light-emitting layer in the sub-pixel can be an organic light-emitting layer or a quantum dot light-emitting layer, etc., and the present invention does not specifically limit it.

[0078] In this embodiment of the invention, by designing the first and second opening regions as a single circle, the area they occupy can be reduced. The area of ​​the third opening region is less than half the area of ​​the first and second opening regions, that is, the area of ​​the third opening region is designed to be smaller. Thus, the light-emitting layers of the first and second opening regions are still prepared using inkjet printing technology, while the light-emitting layer of the third opening region can be prepared using processes other than inkjet printing, such as photolithography, electro-inkjet printing, etc. As a result, the overall pixel area is reduced, thereby improving the pixel resolution. Furthermore, by using different processes for different opening regions, the pixel manufacturing cost and time are balanced while improving the pixel resolution, achieving a better effect.

[0079] Therefore, by arranging the multiple sub-pixels on the prepared display substrate in the above-mentioned manner, that is, by placing the first and second opening areas of the opening areas of the multiple sub-pixels within the same circle, while placing the third opening area outside the circle, and by setting the areas of the first and second opening areas to be twice the area of ​​the third opening area, the pixel resolution can be effectively improved and the display effect enhanced.

[0080] The manufacturing method of the display substrate in the present invention will be described below with specific embodiments.

[0081] In some embodiments of the present invention, the manufacturing method includes the following steps:

[0082] Step 51: Deposit a layer of Mg-doped ZnO on the substrate on which the driving circuit is formed. The ZnMgO deposition can be performed using the sputter process. The deposition thickness is 20nm to 70nm. The Mg doping ratio can be 1% to 40%. During the deposition process, oxygen flow and other process conditions can be selected. The oxygen flow rate can be controlled to be 0 to 10 sccm.

[0083] Step 52: Patterned etching of ZnMgO;

[0084] Step 53: Fabricate the first pixel isolation structure and the second pixel isolation structure on the ZnMgO backing to form the first opening region and the second opening region;

[0085] Step 54: Inkjet printing is used to print the first and second sub-pixels, and electro-inkjet printing is used to print the third sub-pixel. When the display substrate has a resolution of 500ppi, after inkjet printing, the display substrate is placed in an electric field to perform SPD (selective electrophoretic deposition) film deposition. SPD film deposition helps to deposit and layer the light-emitting layer, thereby improving the uniformity of the light-emitting layer thickness. Afterwards, the display substrate is removed from the electric field and placed in a vacuum drying chamber (VCD) to remove excess solvent, finally forming the light-emitting layers of the first and second sub-pixels.

[0086] Step 55: Deposit the hole transport layer / hole injection layer and the electrode using a vapor deposition process. The hole transport layer / hole injection layer can be an existing vapor deposition material.

[0087] Step 56: Perform packaging to obtain the final display substrate.

[0088] In other embodiments of the present invention, the manufacturing method includes the following steps:

[0089] Step 61: Sequentially form cathode patterns, etc., on the substrate on which the driving circuit is formed;

[0090] Step 62: Spin-coat photoresist on the front side and expose it for patterning, so that the formed photoresist layer has multiple opening areas of third sub-pixels;

[0091] Step 63: Spin-coat the electron transport layer, electron injection layer, and light-emitting layer sequentially across the entire surface, and then peel off the photoresist. This allows the electron transport layer, electron injection layer, and light-emitting layer to be deposited only in the opening area of ​​the third sub-pixel, while the electron transport layer, electron injection layer, and light-emitting layer in the remaining areas are peeled off along with the photoresist.

[0092] Step 64: Fabricate the first pixel isolation structure and the second pixel isolation structure to form the first opening region and the second opening region;

[0093] Step 65: Inkjet printing is used to print the first and second sub-pixels. When the display substrate has a resolution of 500ppi, after inkjet printing, the display substrate is placed in an electric field to perform SPD (selective electrophoretic deposition) film deposition. SPD film deposition helps to deposit and layer the light-emitting layer, thereby improving the uniformity of the light-emitting layer thickness. Afterwards, the display substrate is removed from the electric field and placed in a vacuum drying chamber (VCD) to remove excess solvent, finally forming the light-emitting layers of the first and second sub-pixels.

[0094] Step 66: Deposit the hole transport layer / hole injection layer and the electrode using a vapor deposition process. The hole transport layer / hole injection layer can be an existing vapor deposition material.

[0095] Step 67: Perform packaging to obtain the final display substrate.

[0096] In this embodiment of the invention, by designing the first and second opening regions as a single circle, the area they occupy can be reduced. The area of ​​the third opening region is less than half the area of ​​the first and second opening regions, that is, the area of ​​the third opening region is designed to be smaller. Thus, the light-emitting layers of the first and second opening regions are still prepared using inkjet printing technology, while the light-emitting layer of the third opening region can be prepared using processes other than inkjet printing, such as photolithography, electro-inkjet printing, etc. As a result, the overall pixel area is reduced, thereby improving the pixel resolution. Furthermore, by using different processes for different opening regions, the pixel manufacturing cost and time are balanced while improving the pixel resolution, achieving a better effect.

[0097] Optionally, embodiments of the present invention also provide a display device, which includes the display substrate in the above-described method or device embodiments and can achieve the same technical effect. To avoid repetition, it will not be described again here.

[0098] The above description represents some embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A display substrate, characterized in that, The display substrate includes a plurality of pixel units, each pixel unit including a non-aperture area and an aperture area of ​​a plurality of sub-pixels, the aperture areas of the plurality of sub-pixels including a first aperture area, a second aperture area and a third aperture area; The first opening area and the second opening area are located within the same circle, and the third opening area is located outside the circle. The area of ​​the first opening area and the area of ​​the second opening area are both greater than twice the area of ​​the third opening area. The non-opening area is composed of a first pixel isolation structure and a second pixel isolation structure. The first pixel isolation structure has a circular opening, and the second pixel isolation structure is disposed in the circular opening and divides the circular opening into two parts to form the first opening area and the second opening area.

2. The display substrate according to claim 1, characterized in that, The planar shape of any one of the first opening area, the second opening area, and the third opening area is any one of a circle, an ellipse, or a regular polygon with a side length greater than or equal to 6.

3. The display substrate according to claim 1, characterized in that, The angle between the second pixel isolation structure and the first pixel isolation structure is an obtuse angle. The distance between the two farthest points on the second pixel isolation structure is greater than two-thirds of the diameter of the circular opening and less than the diameter of the circular opening.

4. The display substrate according to claim 1, characterized in that, The height of the first pixel isolation structure in the direction perpendicular to the display substrate is 1~2μm, and the height of the second pixel isolation structure in the direction perpendicular to the display substrate is 1.5~3.5μm. The height of the second pixel isolation structure in the direction perpendicular to the display substrate is greater than the height of the first pixel isolation structure in the direction perpendicular to the display substrate.

5. The display substrate according to claim 2, characterized in that, Both the first opening area and the second opening area are elliptical. The area of ​​the first opening area and the area of ​​the second opening area are both greater than or equal to one-quarter of the area of ​​the circle. The area of ​​the third opening area is less than one-quarter of the area of ​​the circle.

6. A method for manufacturing a display substrate, characterized in that, The method for manufacturing a display substrate as described in any one of claims 1-5 includes: A substrate is provided on which a plurality of pixel units are formed, each pixel unit including a non-aperture region and an aperture region of a plurality of sub-pixels, the aperture regions of the plurality of sub-pixels including a first aperture region, a second aperture region and a third aperture region; The first opening area and the second opening area are located within the same circle, and the third opening area is located outside the circle. The area of ​​the first opening area and the area of ​​the second opening area are both greater than twice the area of ​​the third opening area.

7. The manufacturing method according to claim 6, characterized in that, The formation of multiple pixel units on the substrate includes: First, the first sub-pixel and the second sub-pixel of the pixel unit are formed on the substrate, and then the third sub-pixel of the pixel unit is formed on the substrate. Alternatively, the third sub-pixel of the pixel unit may be formed on the substrate first, and then the first sub-pixel and the second sub-pixel of the pixel unit may be formed on the substrate on which the third sub-pixel is formed. Wherein, the opening area of ​​the first sub-pixel is the first opening area, the opening area of ​​the second sub-pixel is the second opening area, and the opening area of ​​the third sub-pixel is the third opening area.

8. The manufacturing method according to claim 7, characterized in that, The step of first forming the first sub-pixel and the second sub-pixel of the pixel unit on the substrate, and then forming the third sub-pixel of the pixel unit on the substrate includes: A first pixel isolation structure and a second pixel isolation structure are fabricated on the substrate to form a non-aperture area of ​​the pixel unit, an aperture area of ​​the first sub-pixel, an aperture area of ​​the second sub-pixel, and an aperture area of ​​the third sub-pixel. A first light-emitting layer is formed in the first opening area and the second opening area using inkjet printing technology, and a second light-emitting layer is formed in the third opening area using electro-jet printing technology.

9. The manufacturing method according to claim 7, characterized in that, The step of first forming the third sub-pixel of the pixel unit on the substrate, and then forming the first sub-pixel and the second sub-pixel of the pixel unit on the substrate where the third sub-pixel is formed, includes: A photoresist layer is coated and patterned on the substrate to form the opening regions of the plurality of the third sub-pixels; After forming the second light-emitting layer in the opening area of ​​the third sub-pixel, the photoresist layer is peeled off; A first pixel isolation structure and a second pixel isolation structure are fabricated on the substrate to form a non-aperture area, an aperture area of ​​a first sub-pixel, and an aperture area of ​​a second sub-pixel of the pixel unit. A second light-emitting layer is formed in the opening region of the first sub-pixel and the opening region of the second sub-pixel.

10. A display device, characterized in that, Includes the display substrate as described in any one of claims 1-5.

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