Electromagnetic field control components

Abstract

The electromagnetic field control component comprises: a first insulating component, comprising a cylindrical ceramic, having a plurality of through holes extending along an axial direction; a conductive component, comprising a metal, blocking the through holes so as to have an opening portion opening at the outer periphery of the first insulating component; a power supply terminal connected to the conductive component; and flanges located at both ends of the first insulating component, a second insulating component comprising a cylindrical ceramic is arranged on the outer periphery of the first insulating component, and both ends of the second insulating component are airtightly fixed to the flange.

Description

Technical Field

[0001] The present disclosure relates to an electromagnetic field control member used in an accelerator or the like for accelerating charged particles such as electrons and heavy particles. Background Art

[0002] In the past, electromagnetic field control components used in accelerators for accelerating charged particles such as electrons and heavy particles have been required to have high speed, high magnetic field output, and high repeatability. In order to improve these performances, Shiori Mitsuda et al. of the High Energy Accelerator Research Institute proposed a ceramic chamber with integrated pulsed-magnet (hereinafter referred to as CCiPM) (Non-Patent Document 1).

[0003] The CCiPM has a cylindrical insulating member made of ceramic, and a substrate-shaped coil is embedded in a through hole formed along the axial direction of the insulating member and penetrating the insulating member in the thickness direction. In addition, the coil functions as a part of a partition wall separating the inside and outside of the insulating member, thereby ensuring the airtightness of the inside of the insulating member.

[0004] Prior Art Literature

[0005] Non-patent literature

[0006] Non-patent document 1: Shiori Mitsuda et al., "Performance test of ceramic chamber-integrated pulsed magnetic beam at the dump line of KEK-PF annular beam transmission path" Summary of the invention

[0007] The electromagnetic field control component disclosed in the present invention comprises: a first insulating component, comprising a cylindrical ceramic, having a plurality of through holes extending along an axial direction; a conductive component, comprising a metal, blocking the through holes so as to have an opening portion opening at the outer periphery of the first insulating component; a power supply terminal connected to the conductive component; and flanges located at both ends of the first insulating component, a second insulating component comprising a cylindrical ceramic is arranged on the outer periphery of the first insulating component, and both ends of the second insulating component are airtightly fixed to the flange. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1A It is a front view showing an electromagnetic field control member according to one embodiment of the present disclosure.

[0009] Figure 1B yes Figure 1A AA′ line section view.

[0010] Figure 1C yes Figure 1A BB′ line section view.

[0011] Figure 2 yes Figure 1B Magnified view of part F in FIG.

[0012] Figure 3 yes Figure 1C Magnified view of section G in FIG.

[0013] Figure 4A yes Figure 1C CC′ line section view.

[0014] Figure 4B yes Figure 4A An enlarged view of section D in FIG.

[0015] Figure 4C yes Figure 4A Enlarged view of part E in FIG.

[0016] Figure 5 Yes means Figure 1A Front view of the flange. DETAILED DESCRIPTION

[0017] Hereinafter, an electromagnetic field control member according to an embodiment of the present disclosure will be described with reference to the drawings. In this example, an example of a CCiPM (ceramic cavity integrated pulse magnet) will be described as an embodiment of the electromagnetic field control member.

[0018] Figure 1A FIG. 1 shows an electromagnetic field control member 100 according to one embodiment of the present disclosure as a CCiPM. The electromagnetic field control member 100 shown in FIG. 1 includes an insulating member 1 and flanges 2 and 2 located at both ends of the insulating member.

[0019] like Figure 1A The AA' line section view is Figure 1B And the BB′ line cross-sectional view is Figure 1C As shown, the insulating member 1 comprises: a first insulating member 11 including a cylindrical ceramic, and a second insulating member 12 including a cylindrical ceramic disposed on the outer peripheral side of the first insulating member 11, and a space 14 surrounded by the inner peripheral surface of the first insulating member 11 is formed inside. The second insulating member 12 is positioned by installing a sleeve 9 described later (see Figure 4B , Figure 4C ).

[0020] The first insulating member 11 has a plurality of through holes 3 extending in the axial direction. Here, the axial direction is a direction along the central axis of the cylindrical ceramic insulating member 1. In addition, the second insulating member 12 is provided with a through hole 31 communicating with the through hole 3 of the first insulating member 11.

[0021] The insulating member 1 is provided with a plurality of first power supply terminals 5 and a plurality of second power supply terminals 6 at both ends. Figure 1B As shown, adjacent first power supply terminals 5, 5 are connected by a lead wire 16 in order to form a magnetic field. In addition, the second power supply terminal 6 is connected to a connection member 23 for power supply.

[0022] If Figure 1B The F part of the image is enlarged. Figure 2 and Figure 1C The G part of the enlarged Figure 3 As shown in FIGS. 1 and 2 , a conductive member 4 is disposed in the through hole 3. The conductive member 4 includes metal and extends in the axial direction together with the through hole 3. Figure 2 , Figure 3 As shown in FIG. 1 , the through hole 3 is blocked to form an opening 13 opened at the outer periphery of the first insulating member 11. The through hole 3 is blocked by the conductive member 4, thereby ensuring a space 14 surrounded by the inner periphery of the first insulating member 11 (see FIG. 1 ). Figure 1B , Figure 1C , Figure 4A )’s airtightness.

[0023] Here, both end surfaces of the conduction member 4 in the axial direction may be curved surfaces extending in the axial direction in a plan view.

[0024] If the end surfaces of the conductive member 4 in the axial direction have such shapes, it is possible to reduce the thermal stress remaining near the end surfaces of the conductive member 4 in the axial direction even if heating and cooling are repeated.

[0025] like Figure 2 , Figure 3 As shown, the through hole 3 may be a tapered surface in which the width between the inner walls gradually increases from the inner circumference to the outer circumference of the first insulating member 11. When the through hole 3 is such a tapered surface, the stress remaining in the first insulating member 11 is relaxed even if it is repeatedly heated and cooled, so that cracks in the first insulating member 11 can be suppressed over a long period of time.

[0026] Furthermore, when the through hole 3 is a through hole having a tapered surface, the angle θ1 formed by the opposing inner walls (see Figure 3 ) can be 12° or more and 20° or less. When the angle θ1 is within this range, the mechanical strength of the insulating member 1 can be maintained, and cracks in the insulating member 1 can be further suppressed. In addition, when measuring the angle θ1 formed by the opposing inner walls, the measurement can be performed on a cross section perpendicular to the axial direction.

[0027] At least one of the two end faces of the through hole 4 may be formed Figure 4C In the cross-sectional view shown, the center axis is inclined toward both ends in the axial direction. An angle θ2 formed between the normal line n of the center axis and the end surface is, for example, not less than 4° and not more than 12°.

[0028] On the other hand, the width between the inner walls of the through hole 31 of the second insulating member 12 is substantially constant from the inner circumference side to the outer circumference side of the second insulating member 12. Figure 2 , Figure 3 As shown in FIG. 1 , a step portion 24 is provided on the outer peripheral side of the through hole 31 of the second insulating member 12, a metallized layer 22 is formed on the surface of the step portion 24, and the front end of the first sleeve 20 described later is inserted into the step portion 24 for fixing, and the width between the inner walls is set to be approximately constant. In this way, the airtightness of the space surrounded by the inner peripheral surface of the second insulating member 11 can be further improved. As a result, the airtightness of the electromagnetic field control member 100 can be set to 1.3×10 -11 Pa·m 3 / s or less.

[0029] Also, similar to the through hole 3 , the through hole 31 may have a tapered surface whose width between the inner walls gradually increases.

[0030] The conducting member 4 is a member that ensures a conductive area for the excited induced current to flow in order to accelerate or deflect the electrons, heavy particles, etc. moving in the space 14. The inner peripheral side of the first insulating member 11 of the conducting member 4 may be a flat surface, but as shown in FIG. Figure 2 , Figure 3 As shown in FIG. 1 , the first insulating member 11 is preferably bent along the inner periphery 11 c .

[0031] In order to supply power to the conductive member 4 near both ends of the conductive member 4 arranged along the axial direction, the first power supply terminal 5 and the second power supply terminal 6 respectively pass through the through holes 31 of the second insulating member 12 and are connected to the conductive member 4 in the through holes 3 of the first insulating member 11.

[0032] In addition, if Figure 2 , Figure 3 As shown in FIG. 1 , a metallization layer 15 is formed on both inner walls of the first insulating member 11 that are opposite to each other with the through hole 3 interposed therebetween. The metallization layer 15 may be located between the first insulating member 11 and the conductive member 4. In addition, the metallization layer 15 is formed from the first power supply terminal 5 to the second power supply terminal 6 (see FIG. 1 ). Figure 4A ).

[0033] The metallization layer 15 may be composed mainly of molybdenum and may contain manganese, for example. Alternatively, a metal layer composed mainly of nickel may be provided on the surface of the metallization layer 15 .

[0034] The thickness of the metallization layer 15 is, for example, not less than 15 μm and not more than 45 μm. The thickness of the metal layer is, for example, not less than 0.01 μm and not more than 0.1 μm.

[0035] The conductive member 4 is bonded to the first insulating member 11 via the metallization layer 15 and the metal layer by solder such as silver solder (for example, BAg-8, BAg-8A, or BAg-8B).

[0036] like Figure 2 As shown, the first power supply terminal 5 comprises: a pin 18, which is inserted into the through holes 3, 31 along the radial direction of the insulating component 1; a block 19, which is threadedly fastened to the front end of the pin 18; a first sleeve 20, whose front end is inserted into the second insulating component 12 and engaged with the inner wall surface of the second insulating component 12; and a second sleeve 21, which is embedded in the rear end expanded diameter portion of the first sleeve 20 and engaged with the first sleeve 20.

[0037] The first sleeve 20 is bonded to the second insulating member 12 via a metallization layer 22 formed on the inner wall surface of the second insulating member 12 by solder such as silver solder (for example, BAg-8, BAg-8A, or BAg-8B).

[0038] The pin 18 of the first power supply terminal 5 is connected to the lead wire 16 at the rear end portion located on the outer peripheral side of the second insulating member 12. The pin 18 and the lead wire 16 are made of, for example, oxygen-free copper (for example, alloy number C1020 specified in JIS H 3100: 2012 or alloy number C1011 specified in JIS H3510: 2012). The block 19 is threadedly fastened to hold the pin 18, and the bottom surface is fixed to the surface of the conductive member 4. The conductive member 4 is interposed between the metallized layers 15 formed on both inner walls of the first insulating member 11, and is brazed to the first insulating member 1 via the metallized layers 15. Thus, the conductive member 4 is reliably held.

[0039] For example, the block 19 includes oxygen-free copper (C1020, C1011, etc.), and the first sleeve 20 and the second sleeve 21 both include titanium (for example, the types specified in JIS H4600: 2012 are 1 type, 2 types, 3 types, 4 types, etc.). The first sleeve 20 and the second sleeve 21 are joined by TIG welding, which is a type of arc electrolysis, for example, and the pin 18 and the second sleeve 21 are joined by solder such as silver solder (for example, BAg-8, BAg-8A, BAg-8B), and both seal the gas that leaks to the outside from the gap between the threaded portion of the block 19 and the pin 18. When both the first sleeve 20 and the second sleeve 21 include titanium, TIG welding is easier and the reliability of airtightness is improved.

[0040] Figure 3 The second power supply terminal 6 shown in the figure is similar to the second power supply terminal 6 in that the connecting member 23 is engaged with the pin 18 instead of the lead wire 16. Figure 2 The first power supply terminal 5 shown is the same, and therefore the same reference numerals are given to the same components, and description thereof is omitted.

[0041] like Figure 4A As shown, both ends of the first insulating member 11 are fixed by flanges 2 to be airtightly sealed. That is, since the space 14 located inside the first insulating member 11 is a space for accelerating or deflecting electrons, heavy particles, etc. moving in the space 14 by a high-frequency or pulsed electromagnetic field, it is necessary to ensure vacuum. In addition, the flange 2 is a member connected to a vacuum pump for making the space 14 a vacuum.

[0042] like Figure 5 As shown in FIG. 1 , the flange 2 includes an annular base 2a and a plurality of extensions 2b extending radially from the outer peripheral surface of the annular base 2a. The extensions 2b are joined to the outer peripheral surface of the annular base 2a by TIG welding, which is a type of arc welding method. Figure 5 In the example shown, four are provided at equal intervals along the circumferential direction. The extension portion 2b has an insertion hole 2c having a female threaded portion along the thickness direction, and the shaft S having a male threaded portion is inserted into the insertion hole 2c and fastened with nuts (not shown) from both sides in the thickness direction of the extension portion 2b, thereby connecting the flanges 2, 2 respectively mounted on both ends of the insulating member 1 to each other.

[0043] The annular base 2a has mounting holes 2d for connection with a flange (not shown) on the vacuum pump side at equal intervals in the circumferential direction. Fastening members such as bolts are inserted into the mounting holes 2d to fasten the flanges to each other.

[0044] The flange 2, the shaft S and the nut may include austenitic stainless steel. Since austenitic stainless steel is non-magnetic, it is possible to reduce the effect of the magnetism generated by the flange 2 on the electromagnetic field control component 100. In particular, the flange 2 may include SUS304L or SUS304L. SUS304L and SUS304L are stainless steels that are not susceptible to intergranular corrosion. Therefore, TIG welding is performed on the outer peripheral surface of the annular base 2a to the extension 2b, and even if the annular base 2a and the extension 2b are at high temperatures, intergranular corrosion is not likely to occur, and the airtightness of the annular base 2a is not likely to be impaired. The TIG welding of the extension 2b to the outer peripheral surface of the annular base 2a may be either intermittent welding or continuous welding along the thickness direction.

[0045] The second insulating member 12 is fixed to the flange 2 by the first sealing unit to perform airtight sealing. Figure 4A The D part is enlarged Figure 4B And enlarge the E part Figure 4CAs shown, the first sealing unit includes a joint portion formed on the end face of the second insulating member 12 and a sleeve 9 joined to the joint portion. The joint portion includes, for example, a metallized layer 17 formed on the end face of the second insulating member 12 and a solder joining the metallized layer 17 and the sleeve 9. The front end of the sleeve 9 is bent so as to be in surface contact with the end face of the second insulating member 12. The solder is a silver solder (for example, BAg-8, BAg-8A, BAg-8B) or the like.

[0046] Furthermore, the sleeve 9 is joined to the inner peripheral surface of the flange 2 by TIG welding to achieve airtight sealing.

[0047] The first and second power supply terminals 5 and 6 are airtightly joined and fixed to the inner wall of the through hole 31 formed in the second insulating member 12 by the second sealing means. Figure 2 , Figure 3 As shown, in the second sealing unit, a means is adopted in which the metallization layer 22 formed on the inner wall surface of the through hole 31 and the first sleeve 20 made of metal are joined by solder.

[0048] By the TIG welding of the first sealing unit, the second sealing unit, and the sleeve 9 and the flange 2, the airtightness of the electromagnetic field control member 100 can be set to, for example, 1.3×10 -11 Pa·m 3 / s or less.

[0049] The outer peripheral sides of both end portions of the first insulating member 11 may include flat surfaces on the extension lines in the axial direction of the through hole 3 .

[0050] If the flat surface is provided, the gap between the first insulating member 11 and the second insulating member 12 at both ends can be partially enlarged, so that exhaust from the gap between the first insulating member 11 and the second insulating member 12 can be facilitated.

[0051] The outer peripheral sides of both end portions of the second insulating member 12 may include flat surfaces on the extension lines in the axial direction of the through hole 31 .

[0052] If the flat surface is provided, the second insulating member 11 can be fixed without rotating during the assembly operation of the first power supply terminal 5 and the second power supply terminal 6 to the conductive member 4 , so that assembly is easy.

[0053] These planes are, for example, D-cut planes, which are planes obtained by eliminating the outer peripheral surface on the extension lines of the axial direction of the through holes 3 and 31 .

[0054] The first insulating member 11 has electrical insulation and nonmagnetism, and is made of, for example, ceramics mainly composed of aluminum oxide or zirconium oxide, and is particularly preferably made of ceramics mainly composed of aluminum oxide. The average grain size of aluminum oxide crystals is preferably 5 μm or more and 20 μm or less.

[0055] If the average grain size of the aluminum oxide crystals is within the above range, the area of ​​the grain boundary phase per unit area is reduced compared to the case where the average grain size is less than 5 μm, so the thermal conductivity is improved. On the other hand, compared to the case where the average grain size exceeds 20 μm, the area of ​​the grain boundary phase per unit area is increased, so the adhesion of the metallization layer 15 is improved by the anchoring effect of the metallization layer 15 at the grain boundary phase, thereby improving the reliability and improving the mechanical properties.

[0056] In order to measure the particle size of the aluminum oxide crystals, the average particle size D 50 The first grinding was performed with a copper disk using diamond abrasive grains with an average grain size of 3 μm. 50 The second grinding is performed with a tin plate using diamond abrasive grains of 0.5 μm. The grinding depth is, for example, 0.6 mm for the total of the first grinding and the second grinding. The ground surface obtained by these grindings is heat-treated at 1480° C. until the crystal particles and the grain boundary layer can be identified and the observation surface is obtained. The heat treatment is performed for, for example, about 30 minutes.

[0057] The heat-treated surface is observed with an optical microscope and photographed at a magnification of, for example, 400 times. The area of ​​the photographed image is 4.8747×10 2 The measurement range is set to a range of μm. The measurement range is analyzed using image analysis software (eg, Win ROOF manufactured by Mitani Shoji Co., Ltd.) to obtain the particle size of each crystal. The average particle size of the crystal is the arithmetic average of the particle sizes of the individual crystals.

[0058] At this time, the peak value of the particle size of the aluminum oxide crystal may be greater than 0. Thus, since the deviation of the particle size of the crystal is suppressed, the possibility of a local decrease in mechanical strength is reduced. In particular, the peak value of the particle size of the aluminum oxide crystal may be greater than 0.1.

[0059] Kurtosis is a statistic that generally indicates the deviation of a distribution from a normal distribution. It indicates the sharpness of the peak and the extent of the bottom. When the kurtosis is less than 0, the peak is gentle and the bottom is short. When it is greater than 0, it means that the peak is steep and the bottom is long. In a normal distribution, the kurtosis is 0.

[0060] The kurtosis can be obtained using the above-mentioned crystal particle size by using the Kurt function provided in Excel (registered trademark, Microsoft Corporation). To set the kurtosis to 0 or more, for example, the particle size of the raw material aluminum oxide powder may have a kurtosis of 0 or more.

[0061] Here, the so-called ceramics containing aluminum oxide as the main component are ceramics in which the content of aluminum oxide obtained by converting Al into Al2O3 is 90 mass% or more out of 100 mass% of all components constituting the ceramics. As components other than the main component, for example, at least one of silicon oxide, calcium oxide and magnesium oxide may be included.

[0062] The ceramics containing zirconium oxide as the main component are ceramics in which the content of zirconium oxide calculated as ZrO2 is 90% by mass or more out of 100% by mass of all components constituting the ceramics. As components other than the main component, for example, yttrium oxide may be included.

[0063] Here, the components constituting the ceramic can be determined based on the measurement results of an X-ray diffraction device using CuKα rays, and the content of each component can be obtained by, for example, an ICP (Inductively Coupled Plasma) emission spectrometer or a fluorescent X-ray analyzer.

[0064] The second insulating member 12 has electrical insulation and non-magnetic properties similarly to the first insulating member 11. For example, it includes ceramics mainly composed of aluminum oxide, ceramics mainly composed of zirconium oxide, etc., and preferably includes ceramics mainly composed of aluminum oxide. Similar to the first insulating member 11, the average grain size of the aluminum oxide crystals is not less than 5 μm and not more than 20 μm, and the peak value of the grain size of the aluminum oxide crystals can be not less than 0.

[0065] The size of the first insulating member 11 is, for example, set to an outer diameter of 35 mm to 45 mm, an inner diameter of 25 mm to 35 mm, and an axial length of 350 mm to 370 mm.

[0066] The size of the second insulating member 12 is, for example, 50 mm to 60 mm in outer diameter, 36 mm to 46 mm in inner diameter, and the axial length is set to be substantially the same as that of the first insulating member 11 .

[0067] In the case of obtaining the first insulating component 11 and the second insulating component 12 including ceramics whose main component is alumina, first, alumina powder as the main component, powders of magnesium hydroxide, silicon oxide and calcium carbonate, and a dispersant for dispersing the alumina powder as needed are pulverized and mixed using a ball mill, a bead mill or a vibration mill to form a slurry, and a binder is added to the slurry, mixed, and then spray-dried to form particles whose main component is alumina.

[0068] In order to make the peak value of the particle size of the aluminum oxide crystals 0 or more, the time for pulverization and mixing is adjusted so that the peak value of the particle size of the powder becomes 0 or more.

[0069] Here, the average particle size (D 50 ) is 1.6 μm or more and 2.0 μm or less. The content of magnesium hydroxide powder in the total 100 mass % of the above powders is 0.43-0.53 mass %, the content of silicon oxide powder is 0.039-0.041 mass %, and the content of calcium carbonate powder is 0.020-0.022 mass %.

[0070] Next, the pellets obtained by the above method are filled into a molding die, and a hydrostatic molding method (rubber pressing method) or the like is used, for example, at a molding pressure of 98 MPa or more and 147 MPa or more to obtain a molded body.

[0071] After forming, a plurality of elongated lower holes 3 are formed along the axial direction of the first insulating member 11, a cylindrical lower hole is formed as a through hole 31 for inserting the power supply terminal 6 of the second insulating member 12, and a lower hole with end faces opened on both sides along the axial direction of each of the first insulating member 11 and the second insulating member 12, all of which are set as cylindrical formed bodies.

[0072] The molded body formed by cutting is heated in a nitrogen atmosphere for 10 to 40 hours as necessary, maintained at 450 to 650° C. for 2 to 10 hours, and then naturally cooled to eliminate the binder and obtain a degreased body.

[0073] Furthermore, in an atmospheric atmosphere, for example, the firing temperature is set to be greater than 1500°C and less than 1800°C, and the formed body (degreased body) is maintained at the firing temperature for greater than 4 hours and less than 6 hours, thereby obtaining a first insulating component 11 and a second insulating component 12 of ceramic having alumina as a main component and an average particle size of alumina crystals of greater than 5μm and less than 20μm.

[0074] The electromagnetic field control component disclosed in the present invention has a cylindrical second insulating component 12 disposed on the outer peripheral side of a cylindrical first insulating component 11, and both ends of the second insulating component 12 are airtightly fixed to the flange 2, so that the airtightness of both ends of the insulating component 1 is improved, thereby improving the airtightness of the electromagnetic field control component 100 as a whole.

[0075] An embodiment of the electromagnetic field control member of the present disclosure has been described above, but the present disclosure is not limited to this embodiment, and various changes and improvements can be made. For example, direct brazing can be performed without using a metallized layer as needed.

[0076] Explanation of symbols

[0077] 1 Insulation components

[0078] 11. First insulating member

[0079] 12 Second insulating member

[0080] 2 Flange

[0081] 3.31 Through hole

[0082] 4 Conductive components

[0083] 5 1st power supply terminal

[0084] 6 Second power supply terminal

[0085] 9 Sleeve

[0086] 13 Opening

[0087] 14 Space

[0088] 15, 17, 22 Metallization layers

[0089] 16 Lead

[0090] 18 Pins

[0091] 19 pieces

[0092] 20 1st sleeve

[0093] 21. Second sleeve

[0094] 23 Connecting components

[0095] 24 Step

[0096] 100 Components for electromagnetic field control.

Claims

1. An electromagnetic field control component, comprising: The first insulating member includes a cylindrical ceramic and has a plurality of through holes extending in the axial direction; a conductive member including a metal and blocking the through hole so as to have an opening portion opening at an outer periphery of the first insulating member; A power supply terminal connected to the conducting component; and flanges, located at both ends of the first insulating member, A second insulating member made of cylindrical ceramic is disposed on the outer peripheral side of the first insulating member, and both ends of the second insulating member are airtightly fixed to the flange.

2. The electromagnetic field control member according to claim 1, wherein: Each end portion of the second insulating member is fixed to the flange via a sleeve, and the sleeve is airtightly fixed to the inner circumferential surface of the flange. The front end portion extending from the inner circumferential surface of the flange to the second insulating member is bent, and the surface of the bent front end portion contacts the end face of the second insulating member and is airtightly fixed.

3. The electromagnetic field control member according to claim 2, wherein: A metallization layer is formed on an end surface of the second insulating member, and the metallization layer is joined to the bent front end portion of the sleeve by solder.

4. The electromagnetic field control member according to any one of claims 1 to 3, wherein: The second insulating member includes a through hole through which the power supply terminal passes, and the power supply terminal is airtightly fixed to an inner wall forming the through hole.

5. The electromagnetic field control member according to claim 4, wherein: The power supply terminal includes a sleeve whose front end portion is inserted into the through hole of the second insulating member, and a metallization layer formed on an inner wall surface of the through hole is joined to the sleeve by solder.

6. The electromagnetic field control member according to any one of claims 1 to 3, wherein: The conductive member includes a groove in the thickness direction for mounting the power supply terminal, and both end surfaces of the groove are curved surfaces extending in the axial direction in a plan view.

7. The electromagnetic field control member according to any one of claims 1 to 3, wherein: The outer peripheral sides of both end portions of the first insulating member include flat surfaces on the extension lines in the axial direction of the through hole.

8. The electromagnetic field control member according to any one of claims 1 to 3, wherein: The outer peripheral sides of both end portions of the second insulating member include flat surfaces on the extension lines in the axial direction of the through hole.

9. The electromagnetic field control member according to any one of claims 1 to 3, wherein: The first insulating member includes ceramics containing aluminum oxide as a main component, and an average grain size of aluminum oxide crystals is 5 μm or more and 20 μm or less.

10. The electromagnetic field control member according to claim 9, wherein: The kurtosis of the particle size of the aluminum oxide crystals is 0 or more.

11. The electromagnetic field control member according to any one of claims 1 to 3, wherein: The second insulating member includes ceramics containing aluminum oxide as a main component, and an average grain size of aluminum oxide crystals is 5 μm or more and 20 μm or less.

12. The electromagnetic field control member according to claim 11, wherein: The kurtosis of the particle size of the aluminum oxide crystals is 0 or more.

Images