A carrying device and a detection device

Abstract

The present invention provides a carrying device, comprising a carrying plate for carrying an object to be carried, the carrying plate having a carrying surface and a vent hole connected to the outside world for exhausting at least some of the gas between the carrying surface and the object to be carried; the vent hole is disposed in a central region of the carrying surface, and an orthographic projection of the vent hole on the carrying surface is located within the central region of the carrying surface. This arrangement effectively exhausts gas from the central region between the carrying surface and the object to be carried, maintaining consistent air pressure in the central region with that in other regions, particularly the edge regions, thereby preventing deformation of the carried object.

Description

Technical Field

[0001] The present invention relates to the technical field of detection equipment, and in particular to a carrying device and detection equipment. Background Art

[0002] In testing equipment, the main function of the carrier is to securely support the wafer and drive its movement. Existing wafer carriers include vacuum chucks, electrostatic chucks, and air-floating chucks. Vacuum chucks and electrostatic chucks require close contact with the wafer. However, in some cases, both the front and back sides of the wafer cannot be in close contact with the carrier. In this case, an air-floating chuck can be used to support the wafer. The principle of an air-floating chuck is to simultaneously provide positive and negative pressure to the wafer, so that the wafer is fixed in a certain plane without physical contact with the chuck surface. Currently, how to ensure that the wafer in the air-floating state has good flatness is an urgent problem to be solved.

[0003] The main problem with existing air-floating suction cups is that when the suction cup rotates at high speed, the air pressure provided to the wafer in the center and edge areas of the suction cup is different, which will cause the wafer to deform. Summary of the Invention

[0004] In response to the shortcomings of existing carrying devices, the present invention provides a carrying device, including a carrying plate, wherein the carrying plate is used to carry an object to be carried, and the carrying plate has a carrying surface. The device is characterized in that the carrying plate is provided with an exhaust hole, which is connected to the atmosphere and is used to discharge at least part of the gas between the object to be carried and the carrying surface; the exhaust hole is arranged in the central area of ​​the carrying plate, and the orthographic projection of the exhaust hole on the carrying surface is located in the central area.

[0005] By providing the carrying plate of the carrying device with exhaust holes, and the ventilation size of the first exhaust hole is adjustable, the carrying device can timely adjust the air pressure between the carrying surface of the carrying device and the object to be carried; that is, the size of the first exhaust hole is timely adjusted according to the air pressure above the carrying surface, so that the air pressure in each area between the carrying surface and the object to be carried is kept consistent, thereby preventing the object to be carried from being deformed.

[0006] In one embodiment, the exhaust hole includes a first exhaust hole, and the ventilation size of the first exhaust hole is adjustable.

[0007] In one embodiment, the exhaust hole further includes a second exhaust hole, and the distance between the first exhaust hole and the center of the bearing surface is smaller than the distance between the second exhaust hole and the center of the bearing surface.

[0008] In one embodiment, the supporting plate is provided with a first mounting hole, a first fixing screw is provided in the first mounting hole, and the first fixing screw is provided with the second exhaust hole.

[0009] In one embodiment, a groove is provided in the central area of ​​the supporting plate, and the supporting device further includes an adjusting member, which is provided in the groove and rotates relative to the supporting plate.

[0010] In one embodiment, the adjusting member is provided with a waist-shaped through hole, and the supporting plate is provided with a second mounting hole, which is arranged opposite to the waist-shaped through hole; it also includes a second fixing screw, which passes through the waist-shaped through hole and is fixed in the second mounting hole, and the adjusting member rotates relative to the supporting plate around the central axis of the supporting plate.

[0011] In one embodiment, the adjusting member is provided with a first through hole, the carrying plate is provided with a second through hole, the first through hole and the second through hole are arranged opposite to each other, and the first exhaust hole includes the first through hole and the second through hole arranged opposite to each other.

[0012] In one embodiment, the carrier plate further includes an air hole, and the air hole is connected to the pressure supply device.

[0013] In one embodiment, the air hole includes a positive pressure air hole, the pressure supply device includes a positive pressure supply device, and the positive pressure air hole is connected to the positive pressure supply device; and / or, the air hole includes a negative pressure air hole, the pressure supply device includes a negative pressure supply device, and the negative pressure air hole is used to be connected to the negative pressure supply device.

[0014] In one embodiment, the carrier plate is provided with a pressure supply air path, and the air hole is connected to the pressure supply air path.

[0015] In one embodiment, the negative pressure air hole includes a first negative pressure air hole provided in the central area of ​​the carrier plate, and the ventilation size of the first negative pressure air hole is adjustable.

[0016] In one embodiment, the first negative pressure air hole includes a third through hole provided in the central area of ​​the carrier plate and a third screw provided in the through hole, the third screw is provided with a channel, and the channel is connected to the negative pressure supply device.

[0017] In one embodiment, the first through hole and the first negative pressure air hole further include an elastic member, and the third screw passes through the elastic member and is fixed in the first through hole.

[0018] In one embodiment, the third through hole includes a first part and a second part, the diameter of the first part is larger than the diameter of the second part, and the third screw is threadedly connected to the second part of the third through hole; the screw head of the third screw is abutted against or away from the end face of the first part of the third through hole away from the second part, and the elastic member is abutted against the screw head of the third screw and the end face of the first part close to the second part.

[0019] In one embodiment, the first negative pressure supply path is connected to the first portion of the third through hole through the first opening of the third screw, and the first portion is connected to the bearing surface.

[0020] In one embodiment, the carrying device further includes a clamping mechanism, and the clamping mechanism includes a plurality of clamping components, each of which can radially abut against the outer peripheral wall of the object to be carried to clamp and fix the object to be carried.

[0021] The present invention also provides a detection device, comprising a carrying device, wherein the carrying device is any of the carrying devices described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 A perspective view of a specific embodiment of the carrying device provided by the present invention;

[0024] Figure 2 A top view of a specific embodiment of the carrier plate provided by the present invention;

[0025] Figure 3 A cross-sectional view of a specific embodiment of the carrier plate provided by the present invention;

[0026] Figure 4 for Figure 3 A partial enlarged view of

[0027] Figure 5 This is a schematic diagram of the first fixing screw and the third screw provided by the present invention.

[0028] Figure 1-4 The reference numerals in the figures are described as follows:

[0029] 1 Carrying plate, 11 Groove, 21 First exhaust hole, 211 First through hole, 212 Second through hole, 22 Second exhaust hole, 221 First fixing screw, 222 First mounting hole, 31 First negative pressure air hole, 311 Third screw, 312 Channel, 313 Third through hole, 314 Elastic member, 315 First opening, 316 Fourth through hole, 32 Second negative pressure air hole, 4 Adjusting member, 41 Waist-shaped through hole, 43 Second fixing screw, 5 Clamping member DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0031] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0032] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and are not to be construed as limiting the present invention.

[0033] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0034] Please refer to Figures 1 to 4 , Figure 1 This is a schematic diagram of a specific embodiment of the carrying device provided by the present invention. Figure 2 This is a top view of a specific embodiment of the carrying device provided by the present invention. Figure 3 This is a cross-sectional view of a specific embodiment of the carrying device provided by the present invention. Figure 3 This is an enlarged view of a specific embodiment of the carrying device provided by the present invention. In this embodiment of the present invention, the carried object is a wafer, which can be a wafer to be processed or a wafer to be inspected after processing; of course, the carried object can also be other products such as panels and glass.

[0035] In an embodiment of the present invention, the carrier plate 1 is disc-shaped, and the central area refers to a circular area formed by a radius R with the center of the carrier surface or the center of the carrier plate as the center of the circle, and the radius R is less than or equal to three-quarters of the radius of the carrier plate; in other embodiments, the carrier plate 1 may also be square-shaped or have other structures.

[0036] The present invention provides a carrying device, which includes a carrying plate 1, which is used to carry an object to be carried. The carrying plate 1 has a carrying surface and is provided with an exhaust hole. The exhaust hole is connected to the atmosphere and is used to discharge at least part of the gas between the object to be carried and the carrying surface; the exhaust hole is arranged in the central area of ​​the carrying surface, and the orthographic projection of the exhaust hole on the carrying surface is located in the central area of ​​the carrying surface.

[0037] In the prior art, when the carrying device rotates at high speed, the gas between the carrying surface and the object to be carried will be discharged from the edge due to centrifugal force, and since the magnitude of the centrifugal force is related to the radius, that is, the larger the radius of the gas molecules, the greater the centrifugal force they are subjected to, that is, the gas at the edge of the carrying device is easier to be discharged from the edge of the carrying plate than the gas in the center area, resulting in different air pressures in the center area and the edge area between the carrying surface and the object to be carried, causing the object to be carried to be deformed due to different pressures. The present application provides an exhaust hole in the carrying plate, the exhaust hole is set in the center area of ​​the carrying surface, and the orthographic projection of the exhaust hole on the carrying surface is located in the center area of ​​the carrying surface, which can timely and effectively discharge the gas in the center area between the carrying surface and the object to be carried, so that the air pressure in the center area is consistent with that in other areas, especially the edge area, to prevent the carried object from being deformed.

[0038] In this embodiment, the exhaust hole includes a first exhaust hole 21, and the ventilation size of the first exhaust hole 21 is adjustable; through the above setting, the air pressure between the carrying surface and the object to be carried can be adjusted in time according to needs. For example, when the rotation speed of the carrying device is reset, the ventilation size of the exhaust hole needs to be readjusted to ensure that the air pressure in the central area and the edge area between the carrying surface and the carrying object is the same.

[0039] In this embodiment, there are multiple first exhaust holes 21, each of which is equidistant from the center of the support surface. In one embodiment, the multiple first exhaust holes 21 are distributed along the same circumference. In a specific implementation, the multiple first exhaust holes 21 are all located in the central area of ​​the support surface. This arrangement ensures that gas is exhausted from the central area above the support surface, ensuring that the air pressure in the central and edge areas of the support surface and the object being supported remains consistent. In other embodiments, the first exhaust holes 21 can be located at different positions relative to the center of the support surface, as long as the position of the first exhaust holes 21 meets the requirements.

[0040] Furthermore, a groove 11 is provided in the central area of ​​the carrier plate 1, and the groove 11 may be cylindrical, or truncated cone, prism, or pyramidal, etc. The carrier device further comprises an adjusting member 4, which is provided in the groove 11, and the adjusting member 4 may be cylindrical, or truncated cone, prism, or pyramidal, etc. In addition, the adjusting member 4 may rotate in the groove 1 around the central axis of the carrier surface relative to the carrier plate 1 or move along the central axis of the carrier surface. Since the adjusting member 4 rotates around the axis relative to the carrier plate, the opening area of ​​the groove 1 is greater than or equal to the surface area of ​​the adjusting member 4. Specifically, the adjusting member 4 is provided with a waist-shaped through hole 41, and the waist-shaped through hole may be a straight waist-shaped through hole or an arc-shaped waist-shaped through hole, preferably an arc-shaped waist-shaped through hole, and the number of waist-shaped through holes 41 may be one or more; in the case of Figure 1 In the embodiment shown, the number of waist-shaped through holes is 2. Figure 1 and Figure 2 The carrier plate 1 is provided with a second mounting hole, the first mounting hole is provided in the groove 11, and the second mounting hole is arranged opposite to the waist-shaped through hole, so that the second fixing screw can pass through the waist-shaped through hole 41 and is provided in the second mounting hole. Specifically, the inner wall of the second mounting hole is provided with a thread, and the second fixing screw is provided with a thread corresponding thereto, and the second fixing screw is threadedly connected to the second mounting hole; and there is a movable margin between the second fixing screw and the waist-shaped through hole 41 in the rotation direction of the adjustment member 4, so the adjustment member 4 can rotate relative to the carrier plate 1 around the central axis of the carrier plate. After the adjustment member 4 rotates to a predetermined angle relative to the carrier plate 1, the second fixing screw locks the adjustment member 4. In other embodiments, the adjustment member 4 can also be translated relative to the carrier plate 1, specifically, it can be moved along the diameter direction of the bearing surface or along the central axis of the bearing surface. When the adjustment member 4 is translated relative to the carrier plate, there should also be a movable margin between the groove 11 and the adjustment member 4.

[0041] Specifically, the first exhaust hole 212 will be described in detail below. Figure 3, a first through hole 211 is opened on the adjusting member 4, and a second through hole 212 is opened on the carrying plate, and the first through hole 211 and the second through hole 212 are arranged opposite to each other, and the first through hole 211 and the second through hole 212 arranged opposite to each other form a first exhaust hole 21; the end surface area of ​​the first through hole 211 and the end surface area of ​​the second through hole 212 can be the same or different; when the first through hole 211 and the second through hole 212 are opposite to each other, that is, the center of one end surface of the first through hole 211 coincides with the center of at least one end surface of the second through hole 212, the end surface of the first through hole 211 overlaps the end surface of the second through hole 212 The area is the largest, that is, the connection area between the first through hole 211 and the second through hole 212 is the largest, that is, the ventilation size of the first exhaust hole 21 is the largest; when the adjusting member 4 rotates relative to the central axis of the bearing surface of the bearing disk, the overlapping area of ​​the end face of the first through hole 211 and the end face of the second through hole 212 will change, that is, the connection area between the first through hole 211 and the second through hole 212 will change, thereby changing the ventilation size of the first exhaust hole 21, thereby changing the gas flow discharged from the first exhaust hole 21, so as to ensure that the air pressure in each area between the object to be carried and the bearing surface remains consistent.

[0042] Furthermore, the first through hole 211 can be a cylindrical through hole, or a truncated cone through hole, a prismatic through hole, a truncated pyramid through hole, etc.; the extension direction of the second through hole 212 is perpendicular to the bearing surface or has an acute angle. Figure 3 In the embodiment shown, the extension direction of the second through hole 212 has an acute angle with the carrying surface. Through the above arrangement, on the one hand, the central area of ​​the carrying plate 1 can be avoided to set up other structures. On the other hand, the gas discharge path can be increased, and the gas discharge flow rate can be effectively controlled, thereby controlling the air pressure in each area between the carrying surface and the object to be carried.

[0043] Through the above settings, the ventilation size of the first exhaust hole 21 can be adjusted, and the adjustment is convenient and fast. By adjusting the ventilation size of the first exhaust hole 21, the flow rate of the gas discharged from the first exhaust hole 21 can be changed, thereby ensuring that the air pressure in each area between the object to be carried and the carrying surface remains consistent, thereby preventing the carried object from being deformed.

[0044] In addition, the exhaust holes also include second exhaust holes 22, and the number of second exhaust holes 22 is multiple, and the multiple second exhaust holes 22 are evenly distributed on the same circumference. The distance between the second exhaust holes 22 and the center of the bearing surface is greater than the distance between the first exhaust holes 21 and the center of the bearing surface. In a specific embodiment, the size of the second exhaust holes 22 is relatively fixed. Such a setting can reduce the structural complexity of the bearing device.

[0045] Specifically, the second exhaust hole 22 is described in detail below. Figure 1 、 Figure 2The carrier plate 1 is provided with a first mounting hole 222, and a first fixing screw 221 is provided in the first mounting hole 222. Specifically, the inner wall of the first mounting hole 222 is provided with a thread, and the surface of the first fixing screw 221 is provided with a thread corresponding thereto, and the first fixing screw 221 is threadedly connected to the first mounting hole 222. Figure 5 a. A second exhaust hole 22 is provided on the first fixing screw 221. The second exhaust hole 22 passes through the first fixing screw 221 along the extension direction of the first fixing screw 221. The second exhaust hole 22 is also used to discharge at least part of the gas between the bearing surface and the object to be carried to the outside.

[0046] In addition, the supporting device also includes an air hole, which is connected to the pressure supply device. In a specific embodiment, the air hole includes a positive pressure air hole and a negative pressure air hole, and the pressure supply device includes a positive pressure supply device and a negative pressure supply device. The positive pressure air hole and the positive pressure supply device are connected to provide gas to the positive pressure air hole, and the negative pressure air hole and the negative pressure supply device are connected to exhaust air from the negative pressure air hole.

[0047] In other embodiments, the air holes only include positive pressure air holes or negative pressure air holes, and the pressure supply device only includes a positive pressure supply device or a negative pressure supply device; that is, positive pressure can be provided between the object to be carried and the carrying surface through the positive pressure air holes to increase the pressure between the object to be carried and the carrying surface, and negative pressure can also be provided between the object to be carried and the carrying surface through the negative pressure air holes to reduce the pressure between the object to be carried and the carrying surface. The specific operation can be carried out in combination with actual needs.

[0048] Furthermore, the carrying device includes a plurality of annular air hole plates 12, each of which includes a plurality of evenly distributed positive pressure air holes; the negative pressure air holes include a plurality of second negative pressure air holes arranged at intervals, specifically, the second negative pressure air holes are provided on the annular air hole plates 12. In one specific embodiment, the annular air hole plates 12 can be made of porous ceramics, and the positive pressure air holes provided on the annular air hole plates 12 are micropores to ensure that a uniform positive pressure is provided to the object to be carried. In this case, the size of the positive pressure air holes is much smaller than that of the negative pressure air holes; in other embodiments, the annular air hole plates 12 can also be made of other materials, and the size of the positive pressure air holes can be the same as that of the negative pressure air holes, or larger than that of the negative pressure air holes, as long as the requirements are met.

[0049] In addition, the negative pressure air hole further includes a first negative pressure air hole 32 disposed in the central area of ​​the carrier plate 1 , and the ventilation size of the first negative pressure air hole 32 is adjustable.

[0050] Specifically, the first negative pressure air hole 32 includes a third through hole 313 arranged in the central area of ​​the supporting plate 1 and a third screw 311 arranged in the third through hole 313; more specifically, the third through hole 313 is arranged in the groove 11. Furthermore, the adjusting member 4 is provided with a fourth through hole 316, and the fourth through hole 316 is arranged opposite to the third through hole 313, and the diameter of the fourth through hole 316 is larger than the diameter of the screw head of the third screw 311, so that the third screw 311 can pass through the fourth through hole 316 and directly abut against the end face of the third through hole 313 close to one end of the supporting surface.

[0051] See also Figure 4 、 Figure 5 b and Figure 5 c. The third screw 311 is provided with a hole 312, which is connected to the negative pressure supply device through the pressure supply air path. The hole 312 is L-shaped or T-shaped. The fourth through hole 316, the third through hole 313 and the hole 312 of the third screw 311 are connected to the negative pressure supply device, thereby enabling the negative pressure supply device to provide negative pressure through the first negative pressure air hole 32.

[0052] Specifically, the channel 312 has a first opening 315 at one end close to the bearing surface, and the first opening 315 is connected to the third through hole 313. The channel 312 has a second opening at one end away from the bearing surface, and the second opening is connected to the negative pressure supply device; the third through hole 313 includes a first part 313a and a second part 313b, wherein the diameter of the first part 313a is larger than the diameter of the second part 313b, and the third screw 311 is mainly threadedly connected to the second part 313b of the third through hole 313, and a gap is left between the first part 313a of the third through hole 313 and the third screw 311. Furthermore, the first opening 315 on the third screw 311 is located at the part corresponding to the first part 313a of the third through hole 313. Through the above arrangement, the first opening 315 is connected to the third through hole.

[0053] In addition, the screw head of the third screw 311 includes a frustum, the side surface of the frustum abuts or moves away from the end surface of the first portion 313a of the third through hole 313 away from the second portion 313b; when the screw head abuts the end surface of the first portion 313a away from the second portion 313b, the third through hole 313 cannot be connected to the top of the bearing surface; when the screw head is away from the end surface of the first portion 313a away from the second portion 313b, the third through hole 313 is connected to the top of the bearing surface, and the greater the distance between the screw head and the end surface of the first portion 313a away from the second portion 313b, that is, the larger the gap between the side surface of the screw head and the end surface of the first portion 313a away from the second portion 313b, the larger the area of ​​the third through hole 313 connected to the top of the bearing surface, that is, the larger the first negative pressure air hole 312, and conversely, the smaller the first negative pressure air hole 312. When the two abut, the first negative pressure air hole is in a closed state. Through the above settings, the size of the first negative pressure air hole 312 can be adjusted, and then the size of the negative pressure provided by the negative pressure supply device to the carrying surface can be adjusted to ensure the size of the air pressure in each area between the carrying surface and the object to be carried, thereby preventing the carried object from being deformed.

[0054] In this embodiment, the carrier plate 1 may also be provided with a pressure supply air path, and the air holes are connected to the pressure supply air path. The structure of the pressure supply air path can be various, and the embodiment of the present invention is not limited thereto, as long as the above requirements can be met.

[0055] In addition, the carrying device of the present application also includes a clamping mechanism, which includes several clamping components 5. Each clamping component can radially abut against the outer peripheral wall of the object to be carried to clamp and fix the object to be carried, thereby better ensuring the stability of the object to be carried during inspection or processing.

[0056] The aforementioned clamping components 5 may all be fixed-position clamping components 5. In this case, the clamping mechanism is only capable of clamping an object to be loaded of a specific radial size. Alternatively, at least one of the aforementioned clamping components 5 may be an adjustable clamping component 51 that can be adjusted in the radial direction. In a specific embodiment, the radial mounting position of the adjustable clamping component can be adjusted according to the radial size of the object to be loaded, so that samples to be loaded of different radial sizes can be fixed, thereby improving the practical performance of the load-bearing device provided by the present invention.

[0057] Combine Figure 1 For a circular object to be carried, generally only three clamping parts 5 are needed to reliably fix it. Among these three clamping parts 5, only one clamping part 2 is actually needed to be an adjustable clamping part 51 to meet the clamping requirements for objects to be carried of different sizes.

[0058] An embodiment of the present application further provides a detection device, which includes the above-mentioned carrier. The detection device is used to detect and process the object to be carried. In other embodiments, the detection device can also be used to process the object to be carried.

[0059] Although the present invention has been described with reference to specific examples, which are intended to be illustrative only and not limiting, it is obvious to those skilled in the art that changes, additions or deletions may be made to the disclosed embodiments without departing from the spirit and scope of the present invention.

Claims

1. A carrying device, comprising a rotatable carrying plate, the carrying plate being used to carry an object to be carried, the carrying plate having a carrying surface, characterized in that: The carrying plate is provided with an exhaust hole, the exhaust hole being in communication with the atmosphere and being used to exhaust at least part of the gas between the object to be carried and the carrying surface; The exhaust hole is arranged in the central area of ​​the carrying plate; and the orthographic projection of the exhaust hole on the carrying surface is located in the central area of ​​the carrying surface; The exhaust holes include a first exhaust hole, the ventilation size of the first exhaust hole is adjustable; when the rotation speed of the carrying device is reset, the ventilation size of the first exhaust hole is adjusted to maintain the same air pressure in the central area and the edge area between the carrying surface and the carried object; A groove is provided in the central area of ​​the carrying plate, and the carrying device further comprises an adjusting member, the adjusting member is provided in the groove, and the adjusting member rotates relative to the carrying plate; The adjusting member is provided with a first through hole, the carrying plate is provided with a second through hole, the first through hole and the second through hole are arranged opposite to each other, and the first exhaust hole includes the first through hole and the second through hole which are arranged opposite to each other.

2. The carrying device according to claim 1, characterized in that: The exhaust holes further include a second exhaust hole, and a distance between the first exhaust hole and the center of the bearing surface is smaller than a distance between the second exhaust hole and the center of the bearing surface.

3. The carrying device according to claim 2, characterized in that: The carrying plate is provided with a first mounting hole, a first fixing screw is provided in the first mounting hole, and the first fixing screw is provided with the second exhaust hole.

4. The carrying device according to claim 1, characterized in that: The adjusting piece is provided with a waist-shaped through hole. The supporting plate is provided with a second mounting hole, which is arranged opposite to the waist-shaped through hole; it also includes a second fixing screw, which passes through the waist-shaped through hole and is fixed in the second mounting hole, and the adjusting part rotates around the central axis of the supporting plate relative to the supporting plate.

5. The carrying device according to claim 1, characterized in that: The carrier plate further includes an air hole, which is connected to the pressure supply device.

6. The carrying device according to claim 5, characterized in that: The air hole comprises a positive pressure air hole, the pressure supply device comprises a positive pressure supply device, and the positive pressure air hole and the positive pressure supply device are connected; and / or, The air hole includes a negative pressure air hole, the pressure supply device includes a negative pressure supply device, and the negative pressure air hole is used to be connected to the negative pressure supply device.

7. The carrying device according to claim 5, characterized in that: The carrier plate is provided with a pressure supply air path, and the air hole is communicated with the pressure supply air path.

8. The carrying device according to claim 6, characterized in that: The negative pressure air hole includes a first negative pressure air hole provided in the central area of ​​the carrier plate, and the ventilation size of the first negative pressure air hole is adjustable.

9. The carrying device according to claim 8, characterized in that: The first negative pressure air hole includes a third through hole provided in the central area of ​​the carrier plate and a third screw provided in the through hole. The third screw is provided with a channel, and the channel is connected to the negative pressure supply device.

10. The carrying device according to claim 9, characterized in that: The first through hole and the first negative pressure air hole further include an elastic member, and the third screw passes through the elastic member and is fixed in the first through hole.

11. The carrying device according to claim 10, characterized in that: The third through hole includes a first portion and a second portion, the diameter of the first portion is larger than the diameter of the second portion, and the third screw is threadedly connected to the second portion of the third through hole; The screw head of the third screw abuts or moves away from the end surface of the first part of the third through hole away from the second part, and the elastic member abuts the screw head of the third screw and the end surface of the first part close to the second part.

12. The carrying device according to claim 11, characterized in that: The first negative pressure supply path is communicated with the first portion of the third through hole through the first opening of the third screw, and the first portion is communicated with the bearing surface.

13. The carrying device according to any one of claims 1 to 12, characterized in that: The carrying device further comprises a clamping mechanism, which comprises a plurality of clamping components. Each of the clamping components can abut against the outer peripheral wall of the object to be carried in the radial direction to clamp and fix the object to be carried.

14. A detection device, comprising a carrying device, characterized in that: The carrying device is the carrying device according to any one of claims 1 to 13.

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