A physical vapor deposition equipment sputtering target material mounting and positioning device

Abstract

The application discloses a physical vapor deposition equipment sputtering target material mounting and positioning device, which comprises a sputtering target material mounting and positioning device, the sputtering target material mounting and positioning device comprises a base, a lifting mechanism, target material lifting and placing bolts and target material positioning bolts, four groups of rollers are uniformly arranged at the corners of the base, the lifting mechanism is arranged in the base and comprises a driving motor, a belt, a lead screw, a sliding block and a lifting rod, the driving motor is vertically arranged on the base and the power output end is connected with the lead screw through the belt, the lead screw is vertically arranged in the base and the bottom end is rotationally connected with the base, the sliding block is threadedly inserted on the lead screw and the outer end is connected with the lifting rod, the lower end of the lifting rod is fixed on the base and the outer end is connected with a cross support mechanism. The application designs a device specially used for dismounting, mounting and positioning of a sputtering target material of a physical vapor deposition equipment, when the target material is moved out and mounted, the device is operated by a mechanical mechanism, so that personnel injury and damage of the target material and the equipment are avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing physical vapor deposition equipment, in particular to a physical vapor deposition equipment sputtering target material mounting and positioning device. BACKGROUND

[0002] Physical vapor deposition technology means that under vacuum conditions, using physical methods, the surface of the target material is gasified into gaseous atoms, molecules or partially ionized into ions, and through the process of low pressure gas (or plasma), a thin film with certain special functions is deposited on the substrate surface. The target material is the material source used in physical vapor deposition equipment. The target material is consumed during use and needs to be replaced when it is consumed to a certain amount. Different processes use different target materials, and the target material needs to be replaced when switching between different processes. Commonly used target materials are: aluminum copper, copper, titanium, etc. The main steps of replacing the target material are: disassemble the old target material on the original equipment and install a new target material.

[0003] However, the existing physical vapor deposition equipment sputtering target material dismounting and mounting method has the following problems: (1) manual operation is often used, the target material is heavy, manual removal and installation are not convenient, which is easy to cause personnel injury and easy to cause collision to the target material, causing damage to the target material and the equipment; (2) there is no alignment device during installation, and alignment is done by naked eye, which causes inaccurate alignment, repeated operation and waste of time. Therefore, it is necessary to design a corresponding technical solution to solve the existing technical problems. SUMMARY

[0004] The present application relates to the technical field of semiconductor manufacturing physical vapor deposition equipment, in particular to a physical vapor deposition equipment sputtering target material mounting and positioning device.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a sputtering target installation and positioning device for physical vapor deposition equipment, comprising a sputtering target installation and positioning device, wherein the sputtering target installation and positioning device includes a base, a lifting mechanism, target lifting and placing bolts, and target positioning pins. Four sets of rollers are evenly installed at the corners of the base. The lifting mechanism is built into the base and consists of a drive motor, a belt, a lead screw, a slider, and a lifting rod. The drive motor is vertically mounted on the base and its power output end is connected to the lead screw via a belt. The lead screw is vertically mounted inside the base and its bottom end is rotatably connected to the base. The slider is threaded through the lead screw and its outer end is connected to the lifting rod. The lower end of the lifting rod is fixed to the base and its outer end is connected to a cross-type support mechanism. The lower end of the cross-type support mechanism is connected to two sets of brackets. The target lifting and placing bolts are provided in several sets and are threadedly fixed to the brackets. The lower ends of the several sets of target lifting and placing bolts are threadedly connected to the target body. The target positioning pins are provided in several sets and are threadedly inserted into the cross-type support mechanism.

[0006] In a preferred embodiment of the present invention, four sets of side plates are vertically mounted on the periphery of the base and have mounting grooves formed inside. An adjustment button is mounted on the side plate and is connected to the drive motor via a circuit.

[0007] In a preferred embodiment of the present invention, the cross-type support mechanism comprises a main cylinder, a lifting rod, a support plate, a cross rod, and a connecting block. The bottom of the main cylinder is fixed to the base. The lifting rod is movably inserted through the main cylinder and its outer end is connected to the slider. The support plate is horizontally installed on the top of the lifting rod. The cross rod is fitted with the outer end of the support plate and its lower end is connected to the connecting block. The connecting block is provided in two sets and is symmetrically installed above the bracket.

[0008] In a preferred embodiment of the present invention, the crossbar consists of two sets of crossbars, which are arranged in a cross shape and whose center position is connected to the outer end of the support plate.

[0009] In a preferred embodiment of the present invention, the bracket and the connecting block are provided with a plurality of positioning holes, including four sets of positioning hole one and four sets of positioning hole two. The positioning hole one is eight inches away from the center of the bracket, and the positioning hole two is twelve inches away from the center of the bracket.

[0010] In a preferred embodiment of the present invention, the target lifting bolt includes a manual lifting handle and a screw fixed vertically below the manual lifting handle, wherein the screw is threaded through the target body.

[0011] In a preferred embodiment of the present invention, a threaded hole is provided on the periphery of the target body, and the lower end of the screw is threadedly inserted into the threaded hole.

[0012] Compared with the prior art, the present application has the following advantages:

[0013] 1. The present application designs a device specially used for dismounting and positioning sputtering target material of physical vapor deposition equipment, which adopts mechanical mechanism operation when the target material is removed and installed, so as to avoid personnel injury and damage to the target material and equipment.

[0014] 2. The present application has a positioning device when the target material is installed, so as to facilitate accurate positioning and one-time installation success, save installation time, and reduce the cost of separately purchasing a specific size device and save device placement space. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 Figure 1 is a schematic diagram of the sputtering target material installation positioning device of the present application;

[0016] Figure 2 Figure 2 is a structure diagram of the target material body and target material lifting and placing bolt of the present application;

[0017] Figure 3 Figure 3 is a sputtering target material installation flowchart of the present application.

[0018] In the figure: 1, base; 2, lifting mechanism; 3, target material lifting and placing bolt; 4, target material positioning pin; 5, roller; 6, driving motor; 7, belt; 8, lead screw; 9, sliding block; 10, lifting rod; 11, cross support mechanism; 12, support; 13, target material body; 14, side plate; 15, installation groove; 16, adjustment button; 17, main cylinder; 18, lifting rod; 19, support plate; 20, cross rod; 21, connecting block; 22, cross rod; 23, positioning hole one; 24, positioning hole two; 25, manual lifting handle; 26, screw rod; 27, threaded hole. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0020] Please refer to Figures 1-3The application provides a technical scheme: a sputtering target material mounting and positioning device of physical vapor deposition equipment, which comprises a sputtering target material mounting and positioning device, characterized in that the sputtering target material mounting and positioning device comprises a base 1, a lifting mechanism 2, target material lifting and placing bolts 3 and target material positioning pins 4, four groups of rollers 5 are uniformly arranged at the corners of the base 1, the lifting mechanism 2 is arranged in the inside of the base 1 and comprises a driving motor 6, a belt 7, a lead screw 8, a sliding block 9 and a lifting rod 10, the driving motor 6 is vertically arranged on the base 1 and connected with the lead screw 8 through the belt 7, the lead screw 8 is vertically arranged in the base 1 and rotationally connected with the base 1 at the bottom end, the sliding block 9 is threadedly inserted on the lead screw 8 and connected with the lifting rod 10 at the outer end, the lower end of the lifting rod 10 is fixed on the base 1 and the outer end is connected with a cross support mechanism 11, the lower end of the cross support mechanism 11 is connected with two groups of supports 12, the target material lifting and placing bolts 3 are arranged in groups and threadedly fixed on the supports 12, the lower ends of the groups of target material lifting and placing bolts 3 are threadedly connected with target material bodies 13, and the target material positioning pins 4 are arranged in groups and threadedly inserted on the cross support mechanism 11.

[0021] The target material body 13 is provided with a plurality of threaded holes 27, the target material is fixed with the machine table through bolts, when the target material is disassembled, the bolts on the target material are disassembled, the lifting mechanism 2 is fixed in the base 1, four wheels are arranged on the four corners of the base 1, each wheel is provided with a brake, the wheels are used for moving the device, the motor is used as power to drive the lifting, the motor is fixed on the base 1, the motor is connected with the lead screw 8 through the belt 7, the lead screw 8 is connected with the lifting rod 10 through the sliding block 9, the motor is reversely rotated, the lifting mechanism 2 is lifted or lowered, three buttons are arranged on the shell of the lifting mechanism 2, which are respectively used for lifting, lowering and stopping, the two horizontal rods 22 are crossly arranged, the lifting rod 10 is fixed on the horizontal rod 22, the target material lifting and placing bolts 3 are connected with the supports 12 through threads, the front ends of the target material lifting and placing bolts 3 are connected with the target material through threads, the front ends of the target material positioning pins 4 are conical, the pins are connected with the positioning holes on the target material, and the positioning is realized.

[0022] Further improvement is made as shown in the figure: Figure 1 The periphery of the base 1 is vertically provided with four groups of side plates 14 and the inside of the base 1 is formed with mounting grooves 15, the side plates 14 are provided with adjusting buttons 16, the adjusting buttons 16 are connected with the driving motor 6 through lines, and three adjusting buttons are arranged, which are respectively used for lifting, lowering and stopping.

[0023] Further improvement is made as shown in the figure: Figure 1As shown: the cross support mechanism 11 is composed of the main cylinder 17, the lifting rod 18, the support plate 19, the cross rod 20 and the connecting block 21, the bottom of the main cylinder 17 is fixed on the base 1, the lifting rod 18 is movably inserted into the main cylinder 17 and the outer end is connected with the sliding block 9, the support plate 19 is horizontally installed on the top of the lifting rod 18, the cross rod 20 is installed with the outer end of the support plate 19 and is connected with the connecting block 21 below, the connecting block 21 is divided into two groups and is symmetrically installed above the support 12.

[0024] Further improved, as Figure 1 As shown: the cross rod 20 is composed of two groups of horizontal rods 22, the two groups of horizontal rods 22 are arranged in a cross shape and the center position of the connection is connected with the outer end of the support plate 19.

[0025] Further improved, as Figure 1 As shown: a plurality of positioning holes are formed on the support 12 and the connecting block 21, the plurality of positioning holes include four groups of positioning holes one 23 and four groups of positioning holes two 24, the positioning hole one 23 is eight inches away from the center position of the support 12, and the positioning hole two 24 is twelve inches away from the center position of the support 12.

[0026] Further improved, as Figure 2 As shown: the target material lifting and placing bolt 3 includes a manual lifting handle 25 and a screw rod 26 vertically fixed below the manual lifting handle 25, and the screw rod 26 is threadedly inserted into the target material body 13.

[0027] Specifically, a threaded hole 27 is formed on the periphery of the target material body 13, and the lower end of the screw rod 26 is threadedly inserted into the threaded hole 27, so as to facilitate the connection and installation of the lower end of the target material lifting and placing bolt 3 with the target material body 13.

[0028] In use:

[0029] Target material moving-out method:

[0030] There are a plurality of threaded holes 27 on the target material body 13, and the target material body 13 is fixed by bolts. When disassembling the target material body 13, first remove the bolts that fix the target material body 13. Then screw the target material lifting and placing bolt 3 into the target material threaded hole 27. The target material lifting and placing bolt 3 can be 2 or more, and at least 2, symmetrically arranged at the edge of the target material body 13. After the target material lifting and placing bolt 3 is fixed, the lifting device is actuated to lift the target material body 13 and completely separate from the machine table. The sputtering target material installation positioning device is pushed to move to the position where the old target material needs to be stored. The target material body 13 is lowered by pressing the descending key.

[0031] Target material installation method:

[0032] The sputtering target installation positioning device is moved above the new target, the lifting device is slowly lowered, the target lifting bolt 3 is screwed into the target body 13, the target body 13 is lifted, the device is moved, the new target is moved above the machine cavity, the target body 13 is slowly lowered, when the target body 13 is about 10mm away from the cavity, the positioning pins are inserted into the cavity positioning holes from the target positioning holes, usually 2 positioning pins, the front end of the positioning pin is tapered, the positioning holes are symmetrically arranged on the target, after the positioning pins are placed, the target is slowly lowered until it is completely attached to the machine cavity connection surface, the target fastening bolt is installed, the target positioning pin 4 is removed, the target lifting bolt is removed, and the sputtering target installation positioning device is removed.

[0033] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the foregoing embodiments of the present application are described in detail, for those skilled in the art, it still can be modified, or part of the technical features of the equivalent replacement. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A physical vapor deposition sputter target mounting and positioning apparatus comprising a sputter target mounting and positioning apparatus, characterized by: The sputtering target installation positioning device comprises a base (1), a lifting mechanism (2), a target lifting bolt (3) and a target positioning pin (4), four groups of rollers (5) are uniformly installed at the corners of the base (1), the lifting mechanism (2) is internally arranged in the base (1) and comprises a driving motor (6), a belt (7), a lead screw (8), a sliding block (9) and a lifting rod (10), the driving motor (6) is vertically installed on the base (1) and the power output end is connected with the lead screw (8) through the belt (7), the lead screw (8) is vertically installed in the base (1) and the bottom end is rotationally connected with the base (1), the sliding block (9) is threadedly inserted on the lead screw (8) and the outer end is connected with the lifting rod (10), the lower end of the lifting rod (10) is fixed on the base (1) and the outer end is connected with a cross support mechanism (11), the lower end of the cross support mechanism (11) is connected with two groups of supports (12), the target lifting bolts (3) are divided into several groups and are threadedly fixed on the supports (12), the lower ends of the several groups of target lifting bolts (3) are threadedly connected with a target body (13), and the target positioning pins (4) are divided into several groups and are threadedly inserted on the cross support mechanism (11).

2. The sputtering target mounting and positioning device of claim 1, wherein: Four groups of side plates (14) are vertically installed on the periphery of the base (1) and form installation grooves (15) in the inside, adjustment buttons (16) are installed on the side plates (14), and the adjustment buttons (16) are connected with the driving motor (6) through lines.

3. A sputtering target mounting and positioning device for a physical vapor deposition apparatus according to claim 2, wherein: The cross support mechanism (11) comprises a main cylinder (17), a lifting rod (18), a support plate (19), a cross rod (20) and a connecting block (21), the bottom of the main cylinder (17) is fixed on the base (1), the lifting rod (18) is movably inserted in the main cylinder (17) and the outer end is connected with the sliding block (9), the support plate (19) is horizontally installed on the top of the lifting rod (18), the outer end of the cross rod (20) is installed with the support plate (19) and the lower end is connected with the connecting block (21), and the connecting block (21) is divided into two groups and symmetrically installed above the supports (12).

4. The sputtering target mounting and positioning device of claim 3, wherein: The cross rod (20) is composed of two groups of cross rods (22), and the two groups of cross rods (22) are arranged in a cross shape and the center positions connected with the outer ends of the support plates (19) are connected.

5. The sputtering target mounting and positioning device of claim 3, wherein: A plurality of positioning holes are formed in the supports (12) and the connecting blocks (21), the plurality of positioning holes comprise four groups of positioning holes one (23) and four groups of positioning holes two (24), the positioning holes one (23) are eight inches away from the center positions of the supports (12), and the positioning holes two (24) are twelve inches away from the center positions of the supports (12).

6. The sputtering target mounting and positioning device of claim 1, wherein: The target lifting bolt (3) comprises a manual lifting handle (25) and a screw rod (26) vertically fixed below the manual lifting handle (25), and the screw rod (26) is threadedly inserted in the target body (13).

7. A sputtering target mounting and positioning device for a physical vapor deposition apparatus as defined in claim 6, wherein: Threaded holes (27) are formed in the periphery of the target body (13), and the lower end of the screw rod (26) is threadedly inserted in the threaded hole (27).

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