Fixture tooling, assembly table, substrate assembly and assembly method and fixing method thereof

Abstract

The present application provides a fixture, an assembly table, a substrate assembly, and an assembly method and a fixing method thereof. The fixture comprises a fixture frame part, a fixture frame part two, and a wedge block. The fixture frame part one and the fixture frame part two can be assembled to form a fixture frame body. The wedge block is detachably connected to the fixture frame part one and the fixture frame part two. The fixture frame part one and the fixture frame part two are used to fit on opposite sides of the substrate during the assembly process. The fixture frame body is arranged around the substrate. The wedge block is used to extend into the side wall groove of the substrate during the assembly process. There is a gap between the mating end face of the wedge block and the mating end face of the side wall groove of the substrate. The use of the fixture is conducive to achieving zero edge of the substrate, avoiding scratches caused by heat on the contact part of the fixture and the substrate surface, and can meet the requirements of loading the coating machine and the fixture carrying a large mass of the substrate during the coating process.

Description

Technical Field

[0001] The present invention relates to the field of film coating technology, and in particular to a fixture, an assembly table, a substrate assembly, and an assembly method and a fixing method thereof. Background Art

[0002] Large, irregularly shaped grating substrates are used in lithography machine scale measurement systems. The grating substrate consists of a grating surface and a mounting surface. The grating is fabricated on the grating surface, which is fixed to the grating mounting plate using optical adhesive. The grating surface requires high edge precision, with some areas requiring zero edge. Both the grating and mounting surfaces of the grating substrate are subject to high precision requirements for surface shape, roughness, and surface quality.

[0003] In existing technology, due to the large size, heavy weight, and unique shape of special-shaped large-scale grating substrates, thin film production can only be achieved by placing them on a flat surface and using sputtering. This method has disadvantages such as slow sputtering speed, limited material variety, and low target material utilization, resulting in long production cycles and high costs.

[0004] Electron beam evaporation (EBE) coating effectively overcomes the shortcomings of existing sputtering methods. It offers advantages such as a wide range of materials, flexible fabrication methods, short production cycles, and low costs. However, there is currently no suitable tooling for EB deposition of large, irregularly shaped grating substrates.

[0005] Existing fixtures include edge-holding fixtures and spring-type fixtures. During loading, edge-holding fixtures inevitably contact the substrate's grating surface, obstructing it. Thermal expansion of the fixture and substrate can also cause scratches where the fixture contacts the substrate surface. Existing spring-type fixtures can achieve contact-free and unobstructed fixation, but they are only suitable for small, conventionally shaped, and lightweight grating substrates. Summary of the Invention

[0006] In response to the problems in the above-mentioned prior art, the present application proposes a fixture, an assembly table, a substrate assembly, and an assembly method and fixing method thereof. Among them, the fixture can fix large-sized and irregular substrates, and it can achieve the goal of not blocking the substrate surface during the electron beam deposition process, and it does not contact the substrate. At the same time, it has a large load, which is conducive to achieving zero edge of the substrate, avoiding scratches caused by heat on the contact part of the fixture and the substrate surface, and can meet the requirements of loading the coating machine and the fixture carrying large mass substrate movement during the coating process.

[0007] In a first aspect, the present invention provides a fixture, comprising a fixture frame portion, a fixture frame portion, and a wedge, wherein the fixture frame portion and the fixture frame portion can be assembled to form a fixture frame body; the wedge is detachably connected to the fixture frame portion and the fixture frame portion; the fixture frame portion and the fixture frame portion are used to fit opposite sides of a substrate during assembly, so that the fixture frame body is arranged around the substrate; the wedge is used to extend into a sidewall groove of the substrate during assembly, wherein a gap is provided between the mating end face of the wedge and the mating end face of the sidewall groove of the substrate. Utilizing the fixture, large-sized substrates of irregular shapes can be fixed, and the fixture can achieve the goal of not blocking the substrate surface during electron beam deposition, and not contacting the substrate, while having a large load, thereby facilitating the realization of zero edge of the substrate, avoiding scratches caused by heat on the contact portion of the fixture with the substrate surface, and meeting the requirements of loading the coating machine and the fixture carrying a large mass of the substrate during the coating process.

[0008] In one embodiment of the first aspect, the fixture further includes a chamfer block assembly, comprising a chamfer block and a chamfer block bolt. The chamfer block is secured to the fixture frame body via the chamfer block bolt, and the chamfer mating surface of the chamfer block is arranged parallel to the chamfer plane of the substrate. In this embodiment, the chamfer block acts as a limiter, restricting vertical movement of the substrate, thereby facilitating stability during the coating process and thereby protecting the substrate.

[0009] In one embodiment of the first aspect, the fixture further includes a connecting block assembly comprising a connecting block, a longitudinal connecting block screw, and a vertical connecting block screw. The longitudinal connecting block screw is used to connect the connecting block to the fixture frame body. The connecting block secures the fixture to the adapter chuck via the vertical connecting block screw. This embodiment facilitates securely securing the fixture to the adapter chuck.

[0010] In one embodiment of the first aspect, the fixture further comprises a handle that is detachably fixed to the fixture frame body. In this embodiment, the handle facilitates the operator to hold the fixture, thereby improving the controllability and convenience of various operations, especially improving the controllability of the assembly process.

[0011] In a second aspect, the present invention further provides a substrate assembly, comprising a substrate and the fixture described in the first aspect and any embodiment thereof. Using this substrate assembly, a large-sized, irregularly shaped substrate can be fixed using the fixture. This substrate assembly can achieve the goal of not blocking the substrate surface during electron beam deposition, and the fixture does not contact the substrate surface. It also has a large load capacity, thereby facilitating zero edge deposition of the substrate, preventing scratches caused by heat on the contact portion of the fixture with the substrate surface, and meeting the requirements of loading the coating machine and the fixture carrying the movement of a large-mass substrate during the coating process.

[0012] In a third aspect, the present invention further provides an assembly table for assembling the substrate assembly described in the second aspect. The assembly table includes a support body, a support seat disposed on the top surface of the support body, and a limit line formed at the end of the support seat for aligning with the edge line of the substrate; a guide groove is disposed on the top surface of the support body, and the first and second fixture frames are capable of sliding within the guide groove, with a gap between the groove wall of the guide groove and the side walls of the first and second fixture frames. Utilizing this assembly table can assist in assembling the substrate assembly, reduce assembly difficulty, and improve assembly accuracy.

[0013] In one embodiment of the third aspect, the support base has at least two limit lines, each of which can be aligned with a first edge line and a second edge line of the substrate. This embodiment allows the support base to adapt to the irregularly shaped substrate, facilitating the correct positioning of the substrate during assembly. Workers can visually ensure that the limit lines are aligned with the substrate's edge lines, thereby ensuring that the substrate does not deviate from its correct position. This reduces assembly difficulty and improves assembly accuracy.

[0014] In one embodiment of the third aspect, the support base is detachably connected to the support body. This embodiment facilitates replacement of the support base to adapt to substrates of different structures.

[0015] In a fourth aspect, the present invention further provides an assembly method for assembling a substrate assembly using the assembly table described in the third aspect and any of its embodiments, the assembly method comprising the following steps: placing the assembly table on a plane, wherein the support seat is away from the plane; making the mounting surface of the substrate fit the support seat, and the two limit lines of the support seat are aligned with the first edge line and the second edge line of the substrate respectively; making the first and second clamp frames enter the guide grooves of the support table respectively; making the first and second clamp frames slide toward each other along the guide grooves of the support table until the wedge block completely enters the side wall groove of the substrate; fixing the first and second clamp frames to form the clamp frame body, and the substrate is located in the clamp frame body, and the substrate and the fixture tooling form a substrate assembly. Using this assembly method, the assembly table can assist in assembling the substrate assembly, reduce assembly difficulty, and improve assembly accuracy.

[0016] In one embodiment of the fourth aspect, after the first and second fixture frame parts are fixedly connected to form the fixture frame body, the connecting block is fixed to the fixture frame body. This embodiment facilitates subsequent secure fixing of the fixture tool to the adapter chuck.

[0017] In a fifth aspect, the present invention further provides a method for securing the substrate assembly described in the second aspect, comprising the following steps: placing the substrate assembly in a chuck recess of an adapter chuck, with the grating surface of the substrate facing the chuck recess during placement; and securing the substrate assembly to the adapter chuck. This securing method facilitates ensuring that the grating surface of the substrate faces the coating mechanism during the coating process and securely secures the fixture to the adapter chuck.

[0018] In one embodiment of the fifth aspect, after the substrate assembly is secured to the adapter chuck, a chamfering block is installed on the fixture frame body on the side of the substrate mounting surface, with the chamfering mating surface of the chamfering block parallel to the chamfering plane of the substrate. This embodiment allows the chamfering block to act as a limiter, restricting vertical movement of the substrate, thereby facilitating stability during the coating process and thereby protecting the substrate.

[0019] In an embodiment of the fifth aspect, after the substrate assembly is fixed to the adapter chuck, the substrate assembly is fixed to the adapter chuck. This embodiment is conducive to firmly fixing the fixture to the adapter chuck.

[0020] Compared with the prior art, the fixture tooling, assembly table, substrate assembly, and assembly method and fixing method thereof provided in this application have the following beneficial effects.

[0021] 1. The fixture can be used to fix large-sized and irregular substrates. The fixture can achieve the goal of not blocking the substrate surface during electron beam deposition and not contacting the substrate. At the same time, it has a large load, which is conducive to achieving zero edge of the substrate and avoiding scratches caused by heat on the contact part of the fixture and the substrate surface. It can also meet the requirements of coating machine loading and the fixture carrying large mass substrate movement during the coating process.

[0022] 2. The wedge is helpful to achieve zero edge of the substrate, so that the fixture does not contact the substrate surface, avoiding scratches caused by heat on the contact part of the fixture and substrate surface, which is helpful to reduce the scrap rate of the substrate.

[0023] 3. The chamfer block plays a role of limiting, which can limit the vertical movement of the substrate, which is beneficial to keep the substrate in a stable state during the coating process, thereby helping to protect the substrate.

[0024] 4. The assembly table can assist in assembling substrate components, reduce assembly difficulty and improve assembly accuracy.

[0025] The above technical features can be combined in various suitable ways or replaced by equivalent technical features, as long as the purpose of the present invention can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The present invention will be described in more detail below based on embodiments and with reference to the accompanying drawings, in which:

[0027] Figure 1 A schematic diagram of a structure according to an embodiment of the present invention is shown, in which the substrate assembly is fixed in an adapter chuck;

[0028] Figure 2 A schematic structural diagram of a fixture frame according to an embodiment of the present invention is shown, in which the first fixture frame and the second fixture frame are in a separated state;

[0029] Figure 3 shows a schematic structural diagram of an assembled fixture frame according to an embodiment of the present invention;

[0030] Figure 4 shows a schematic structural diagram of a wedge according to an embodiment of the present invention;

[0031] Figure 5 shows a schematic diagram of assembling a wedge and a base plate according to an embodiment of the present invention;

[0032] Figure 6 shows a schematic structural diagram of a chamfer block according to an embodiment of the present invention;

[0033] Figure 7A schematic structural diagram of an assembly table according to an embodiment of the present invention is shown, in which the support base of the assembly table is located on the top surface of the assembly table;

[0034] Figure 8 A schematic structural diagram of an assembly table according to an embodiment of the present invention is shown, in which the support body of the assembly table is located on the top surface of the assembly table;

[0035] Figure 9 A schematic structural diagram of an assembly table according to one embodiment of the present invention is shown, in which the substrate assembly is located on the top surface of the assembly table and is in an assembled state;

[0036] Figure 10 A schematic structural diagram of an adapter chuck according to an embodiment of the present invention is shown.

[0037] Reference numerals list:

[0038] 1-Adapter chuck; 2-First part of the fixture frame; 3-Second part of the fixture frame; 4-Chamfered block; 5-Handle; 6-Connecting block; 7-Wedge block; 8-Assembly table; 9-Support seat; 10-Base plate; 11-Guide groove; 12-Limiting line; 15-Wedge block screw; 16-Assembly hole; 17-Assembly screw; 18-Chamfered block bolt; 19-Connecting block longitudinal screw; 20-Connecting block vertical screw; 21-Lifting threaded hole; 22-Support body; 23-Weight reduction hole; 24-Chamfered mating surface; 25-Mating end face of the wedge block.

[0039] In the drawings, like reference numerals are used for like parts, but the drawings are not necessarily true to scale. DETAILED DESCRIPTION

[0040] The present invention will be further described below with reference to the accompanying drawings.

[0041] like Figure 2 and Figure 3 As shown, this embodiment provides a fixture tool, which includes a fixture frame part 2, a fixture frame part 2 and a wedge 7. The fixture frame part 2 and the fixture frame part 2 3 can be assembled to form a fixture frame body; the wedge 7 is detachably connected to the fixture frame part 2 and the fixture frame part 2 3; the fixture frame part 2 and the fixture frame part 2 3 are used to fit on opposite sides of the substrate 10 during the assembly process; so that the fixture frame body is arranged around the substrate 10; the wedge 7 is used to extend into the side wall groove of the substrate 10 during the assembly process, wherein, as shown in FIG. Figure 4 and Figure 5 As shown, there is a gap between the mating end surface 25 of the wedge and the mating end surface of the sidewall groove of the substrate 10 .

[0042] Existing fixtures include edge-holding fixtures and spring-type fixtures. During loading, edge-holding fixtures inevitably contact the substrate's grating surface, obstructing it. Thermal expansion of the fixture and substrate can also cause scratches where the fixture contacts the substrate surface. Existing spring-type fixtures can achieve contact-free and unobstructed fixation, but they are only suitable for small, conventionally shaped, and lightweight substrates.

[0043] The fixture of this embodiment can fix the irregular large-sized substrate 10. It can achieve the goal of not blocking the surface of the substrate 10 during the electron beam deposition process, and it does not contact the substrate 10. At the same time, it has a large load, which is conducive to achieving zero edge of the substrate 10, avoiding scratches caused by heat on the contact part of the fixture and the surface of the substrate 10, and can meet the requirements of loading the coating machine and the fixture carrying the movement of large-mass substrates 10 during the coating process.

[0044] Specifically, the fixture frame body includes a detachably connected fixture frame portion 2 and a second fixture frame portion 3. The shape of the notches in the first and second fixture frame portions 2 and 3 is determined by the outer shape of the substrate 10, thereby enabling the fixation of irregularly shaped substrates 10. To accommodate the large size requirements of the substrate 10, the dimensions of the first and second fixture frame portions 2 and 3 match the dimensions of the substrate 10 and have a certain width, thereby providing a certain rigidity to ensure that the fixture tooling can fix large-sized substrates 10.

[0045] The design of the wedge block 7 prevents the fixture from contacting the substrate 10 , thereby facilitating the realization of a zero edge for the substrate 10 and preventing scratches caused by heat on the contact portion between the fixture and the substrate 10 .

[0046] Specifically, the wedge 7 is used to extend into the side wall groove of the substrate 10 during the assembly process. Figure 5 As shown, there is a gap between the mating end face 25 of the wedge and the mating end face of the side wall groove of the substrate 10. The gap allows the substrate 10, which is heated and expanded during the coating process, to avoid being scratched by a violent collision with the fixture, that is, the fixture does not contact the surface of the substrate 10, avoiding scratches caused by the contact part of the fixture with the surface of the substrate 10 due to heat, which is beneficial to reducing the scrap rate of the substrate 10. In addition, since the wedge 7 extends into the side wall groove of the substrate 10 without interfering with the surface of the substrate 10, it is more beneficial to avoid the wedge 7 scratching the surface of the substrate 10. At the same time, the wedge 7 does not block the surface of the substrate 10. It extends into the side wall groove of the substrate 10, so that it does not block the surface of the substrate 10 during the coating process, which is beneficial to achieving zero edge of the substrate 10.

[0047] The wedge block 7 is detachably connected to the first and second clamping frame sections 2 and 3, allowing the material of the wedge block 7 to be changed according to the material of the substrate 10, thereby better protecting the substrate 10. Furthermore, the shape of the wedge block 7 can be designed to suit the shape of the sidewall grooves of different substrates 10, so that the wedge block 7 adapts to the sidewall grooves of the substrate 10. Furthermore, if the wedge block 7 is damaged, since the wedge block 7 is detachably connected to the first and second clamping frame sections 2 and 3, only the wedge block 7 needs to be replaced, without having to scrap the first and second clamping frame sections 2 and 3.

[0048] The load of the fixture needs to be greater than the mass of the substrate 10 to meet the requirements of the coating machine loading and the fixture carrying the large mass of the substrate 10 during the coating process, so as to cope with the large inertia generated by the substrate 10 under acceleration conditions such as rotation.

[0049] During assembly, the first clamp frame 2 and the second clamp frame 3 are moved closer to the substrate 10 from the upper and lower sides along the longitudinal direction until the first clamp frame 2 and the second clamp frame 3 enclose the substrate 10 .

[0050] The fixture can be used to fix large-sized and irregular-shaped substrates 10. The fixture can achieve the goal of not blocking the surface of the substrate 10 during the electron beam deposition process and not contacting the substrate 10. At the same time, it has a large load, which is conducive to achieving zero edges of the substrate 10, avoiding scratches caused by heat on the contact part of the fixture and the surface of the substrate 10, and can meet the requirements of loading the coating machine and the fixture carrying the movement of large-mass substrates 10 during the coating process.

[0051] In one embodiment, Figure 3 As shown, the fixture tool further includes a wedge screw 15 , and the wedge 7 is fixed to the fixture frame part 1 2 or the fixture frame part 2 3 through the wedge screw 15 .

[0052] This embodiment facilitates the detachable connection between the wedge block 7 and the first clamp frame part 2 or the second clamp frame part 3 .

[0053] In one embodiment, when the substrate 10 is made of a microcrystalline material, the wedge 7 is made of a polytetrafluoroethylene material; or, when the substrate 10 is made of a quartz material, the wedge 7 is made of an aluminum alloy material.

[0054] This embodiment is conducive to better protection of the substrate 10.

[0055] In one embodiment, Figure 3 As shown, the fixture tooling also includes assembly screws 17, and assembly holes 16 are provided on the fixture frame part 12 and the fixture frame part 2 3. The assembly screws 17 can extend into the assembly holes 16 on the fixture frame part 12 and the assembly holes 16 on the fixture frame part 3 to assemble the fixture frame part 12 and the fixture frame part 3 into the fixture frame body.

[0056] This embodiment facilitates the detachable connection between the first fixture frame part 2 and the second fixture frame part 3 , thereby better adapting to the special-shaped substrate 10 .

[0057] In one embodiment, Figure 6 As shown, the fixture tooling also includes a chamfering block assembly, which includes a chamfering block 4 and a chamfering block bolt 18. The chamfering block 4 is fixed to the fixture frame body by the chamfering block bolt 18, and the chamfering mating surface 24 of the chamfering block 4 is arranged parallel to the chamfering plane of the substrate 10.

[0058] The chamfer block 4 plays a role of limiting, which can limit the vertical movement of the substrate 10, which is beneficial for keeping the substrate 10 in a stable state during the coating process, thereby helping to protect the substrate 10.

[0059] The chamfer block 4 is secured to the fixture frame body via chamfer block bolts 18, providing a removable connection between the chamfer block 4 and the fixture frame body. This design facilitates the design of different chamfer blocks 4 to accommodate the different chamfering plane angles of the substrate 10, ensuring that the chamfer block 4 is compatible with the substrate 10. Furthermore, if the chamfer block 4 becomes damaged, the removable connection between the chamfer block 4 and the fixture frame body allows only replacement of the chamfer block 4 without having to scrap the fixture frame body.

[0060] Through this embodiment, the chamfer block 4 plays a role of limiting, which can limit the vertical movement of the substrate 10, which is beneficial for keeping the substrate 10 in a stable state during the coating process, thereby facilitating the protection of the substrate 10.

[0061] In one embodiment, the fixture tooling also includes a connecting block assembly, which includes a connecting block 6, a connecting block longitudinal screw 19 and a connecting block vertical screw 20; the connecting block longitudinal screw 19 is used to connect the connecting block 6 and the fixture frame body; the connecting block 6 fixes the fixture tooling on the adapter chuck 1 through the connecting block vertical screw 20.

[0062] This embodiment is conducive to firmly fixing the fixture tool on the adapter chuck 1.

[0063] In one embodiment, Figure 3 As shown, the fixture tool further includes a handle 5, which is detachably fixed to the fixture frame body.

[0064] Preferably, the handle 5 is detachably fixed to the horizontal sides of the first and second clamp frame parts 2 and 3 ; the handle 5 is an angle handle that is bent upward away from the grating surface of the substrate 10 .

[0065] Through this embodiment, the handle 5 is helpful for the staff to hold the fixture tooling, which is beneficial to improving the controllability and convenience of each operation, especially improving the controllability of the assembly process; the handle 5 is an angle handle, and the angle handle is bent upward away from the grating surface of the substrate 10, which is helpful to distinguish the two sides of the fixture tooling and avoid installation errors.

[0066] This embodiment further provides a substrate assembly, which includes a substrate 10 and the above-mentioned fixture.

[0067] By using this substrate assembly, a large-sized, irregular-shaped substrate 10 can be fixed using a fixture. The substrate assembly can achieve the goal of not blocking the surface of the substrate 10 during the electron beam deposition process, and the fixture does not contact the surface of the substrate 10. At the same time, it has a large load, which is conducive to achieving zero edges of the substrate 10, avoiding scratches caused by heat on the contact part of the fixture and the surface of the substrate 10, and can meet the requirements of loading the coating machine and the fixture carrying the movement of a large mass substrate 10 during the coating process.

[0068] This embodiment also provides an assembly table 8 for assembling the above-mentioned substrate assembly, such as Figure 7 and Figure 8 As shown, the assembly table 8 includes a supporting body, a supporting seat 9 is provided on the top surface of the supporting body, and a limit line 12 is formed at the end of the supporting seat 9 for aligning with the edge line of the substrate 10; a guide groove 11 is provided on the top surface of the supporting body, and the clamp frame part 1 2 and the clamp frame part 2 3 can slide in the guide groove 11, and there is a gap between the groove wall of the guide groove 11 and the side wall of the clamp frame part 1 2 and the clamp frame part 2 3.

[0069] The assembly table 8 can assist in assembling the substrate assembly, reduce assembly difficulty, and improve assembly accuracy.

[0070] The function of the limit line 12 is to ensure that the substrate 10 is in the correct position during the assembly process. The staff can ensure that the limit line 12 is aligned with the edge line of the substrate 10 by observation, thereby ensuring that the substrate 10 does not deviate from its correct position, which is conducive to reducing the difficulty of assembly and improving assembly accuracy.

[0071] The provision of the guide groove 11 is beneficial to preventing the first clamp frame part 2 and the second clamp frame part 3 from deviating from the correct track, and is beneficial to assisting assembly, thereby reducing the difficulty of assembly and improving assembly accuracy.

[0072] There is a gap between the groove wall of the guide groove 11 and the side walls of the longitudinal sides of the fixture frame part 1 2 and the fixture frame part 2 3 , which is conducive to the smooth separation of the substrate assembly from the assembly table 8 after the assembly is completed.

[0073] The assembly table 8 can assist in assembling the substrate assembly, reduce assembly difficulty, and improve assembly accuracy.

[0074] In one embodiment, Figure 7 As shown, there are at least two limit lines 12 on the support base 9, and the two limit lines 12 can be aligned with the first edge line and the second edge line of the substrate respectively.

[0075] Optionally, in order to adapt to the corresponding substrate 10, the support seat 9 can be a 270-degree ring, and there are two limit lines 12 located at the starting and ending ends of the ring of the support seat 9 respectively. The two limit lines 12 are arranged perpendicular to each other and can be aligned with the first edge line and the second edge line of the substrate 10 respectively.

[0076] Through this embodiment, the support seat 9 is adapted to the special-shaped substrate 10, which is conducive to ensuring that the substrate 10 is in the correct position during the assembly process. The staff can ensure that the limit line 12 is aligned with the edge line of the substrate 10 through observation, thereby ensuring that the substrate 10 does not deviate from its correct position, which is conducive to reducing the difficulty of assembly and improving assembly accuracy.

[0077] In one embodiment, the support base 9 is detachably connected to the support body.

[0078] This embodiment facilitates the replacement of the support seat 9 to adapt to substrates 10 of different structures.

[0079] In one embodiment, Figure 8 As shown, the bottom surface of the support body is provided with support bodies 22 arranged crosswise with each other, and weight-reducing holes 23 are formed between adjacent support bodies 22, and a plurality of weight-reducing holes 23 are symmetrically distributed.

[0080] Through this embodiment, the weight of the assembly table 8 is reduced while ensuring that it has a good load-bearing capacity.

[0081] In one embodiment, Figure 7 and Figure 8 As shown, the assembly table 8 further includes a handle 5, which is detachably fixed to two longitudinal sides of the assembly table 8; the handle 5 is an angle handle, which is bent upward away from the bottom surface of the support body.

[0082] Through this embodiment, the handle 5 is convenient for the staff to hold the assembly table 8, and is convenient for carrying, transporting, and fixing; the handle 5 is an angle handle, which is bent upward away from the bottom surface of the supporting body, which is convenient for distinguishing the two sides of the assembly table 8 and avoiding installation errors.

[0083] In one embodiment, the support base 9 is made of non-metallic material.

[0084] This embodiment is beneficial for protecting the substrate 10 and preventing the surface of the substrate 10 from being worn.

[0085] In one embodiment, the support base 9 is made of polytetrafluoroethylene material.

[0086] Through this embodiment, the hardness of the polytetrafluoroethylene material is relatively low, which is beneficial for further protecting the substrate 10 and preventing wear on the surface of the substrate 10.

[0087] like Figure 9 As shown, the present embodiment also provides an assembly method for assembling a substrate assembly using the above-mentioned assembly table 8, and the assembly method includes the following steps: placing the assembly table 8 on a plane, wherein the support seat 9 is away from the plane; making the mounting surface of the substrate 10 fit with the support seat 9, and the two limit lines 12 of the support seat 9 are respectively aligned with the first edge line and the second edge line of the substrate 10; making the fixture frame part 2 and the fixture frame part 3 enter the guide groove 11 of the support table respectively; making the fixture frame part 2 and the fixture frame part 3 slide toward each other along the guide groove 11 of the support table until the wedge block 7 completely enters the side wall groove of the substrate 10; fixing the fixture frame part 2 and the fixture frame part 3 to form a fixture frame body, and the substrate 10 is located in the fixture frame body, and the substrate 10 and the fixture tooling form a substrate assembly.

[0088] The assembly table 8 can assist in assembling the substrate assembly, reduce assembly difficulty, and improve assembly accuracy.

[0089] The function of the limit line 12 is to ensure that the substrate 10 is in the correct position during the assembly process. The staff can ensure that the limit line 12 is aligned with the edge line of the substrate 10 by observation, thereby ensuring that the substrate 10 does not deviate from its correct position, which is conducive to reducing the difficulty of assembly and improving assembly accuracy.

[0090] The provision of the guide groove 11 is beneficial to preventing the first clamp frame part 2 and the second clamp frame part 3 from deviating from the correct track, and is beneficial to assisting assembly, thereby reducing the difficulty of assembly and improving assembly accuracy.

[0091] Preferably, there is a gap between the groove wall of the guide groove 11 and the side walls of the longitudinal edges of the fixture frame part 1 2 and the fixture frame part 2 3 , so as to facilitate the smooth separation of the substrate assembly from the assembly table 8 after the assembly is completed.

[0092] By utilizing this assembly method, the assembly table 8 can assist in assembling the substrate assembly, thereby reducing assembly difficulty and improving assembly accuracy.

[0093] In one embodiment, before the longitudinal edges of the fixture frame part 2 and the fixture frame part 2 3 are respectively inserted into the guide grooves 11 of the support platform, the handles 5 are first fixed to the two horizontal edges of the fixture frame part 2 and the fixture frame part 3 to facilitate holding the fixture frame part 2 and the fixture frame part 3 during the assembly process.

[0094] Through this embodiment, the handle 5 is convenient for the staff to hold the assembly table 8, and is convenient for carrying, transporting, and fixing; the handle 5 is an angle handle, which is bent upward away from the bottom surface of the supporting body, which is convenient for distinguishing the two sides of the assembly table 8 and avoiding installation errors.

[0095] In one embodiment, before the longitudinal edges of the first and second clamping frame parts 2 and 3 are respectively inserted into the guide grooves 11 of the support platform, the wedges 7 are first fixed to the first and second clamping frame parts 2 and 3 .

[0096] like Figure 4 and Figure 5 As shown, the wedge block 7 is used to extend into the side wall groove of the substrate 10 during the assembly process. After the assembly is completed, there is a gap between the mating end face 25 of the wedge block and the mating end face of the side wall groove of the substrate 10. The gap allows the substrate 10, which is heated and expanded during the coating process, to avoid being scratched by a violent collision with the fixture, that is, the fixture does not contact the surface of the substrate 10, avoiding scratches caused by the contact part of the fixture with the surface of the substrate 10 due to heat, thereby helping to reduce the scrap rate of the substrate 10. In addition, since the wedge block 7 extends into the side wall groove of the substrate 10 without interfering with the surface of the substrate 10, it is more conducive to preventing the wedge block 7 from scratching the surface of the substrate 10. At the same time, the wedge block 7 does not block the surface of the substrate 10. It extends into the side wall groove of the substrate 10, so that it does not block the surface of the substrate 10 during the coating process, which is conducive to achieving zero edge of the substrate 10.

[0097] The wedge block 7 is detachably connected to the first and second clamping frame sections 2 and 3, allowing the material of the wedge block 7 to be changed according to the material of the substrate 10, thereby better protecting the substrate 10. Furthermore, the shape of the wedge block 7 can be designed to suit the shape of the sidewall grooves of different substrates 10, so that the wedge block 7 adapts to the sidewall grooves of the substrate 10. Furthermore, if the wedge block 7 is damaged, since the wedge block 7 is detachably connected to the first and second clamping frame sections 2 and 3, only the wedge block 7 needs to be replaced, without having to scrap the first and second clamping frame sections 2 and 3.

[0098] Through this embodiment, the wedge block 7 is conducive to achieving zero edge of the substrate 10, so that the fixture tooling does not contact the surface of the substrate 10, avoiding scratches caused by heat on the contact part of the fixture tooling and the surface of the substrate 10, thereby helping to reduce the scrap rate of the substrate 10.

[0099] In one embodiment, fixedly connecting the fixture frame part 2 and the fixture frame part 2 3 to form the fixture frame body includes extending the assembly screw 17 into the assembly hole 16 on the fixture frame part 2 and the assembly hole 16 on the fixture frame part 3 so that the fixture frame part 2 and the fixture frame part 3 are assembled into the fixture frame body.

[0100] This embodiment facilitates the detachable connection between the first fixture frame part 2 and the second fixture frame part 3 , thereby better adapting to the special-shaped substrate 10 .

[0101] In one embodiment, after the fixture frame part 1 2 and the fixture frame part 2 3 are fixedly connected to form the fixture frame body, the connecting block 6 is fixed to the fixture frame body by means of the connecting block longitudinal screws 19 .

[0102] This embodiment facilitates the subsequent secure fixing of the fixture to the adapter chuck 1 .

[0103] This embodiment also provides a method for fixing the above-mentioned substrate assembly, which includes the following steps: placing the substrate assembly in the chuck groove of the adapter chuck 1, with the grating surface of the substrate 10 facing the chuck groove during the placement process; and fixing the substrate assembly on the adapter chuck 1 using a fixture frame screw.

[0104] The fixing method is used to ensure that the grating surface of the substrate 10 is arranged toward the coating mechanism during the coating process, and is also used to firmly fix the fixture to the adapter chuck 1 .

[0105] In one embodiment, after the substrate assembly is fixed to the adapter chuck 1 using the fixture frame screws, the chamfer block 4 is installed on the mounting surface side of the substrate 10 of the fixture frame body through the chamfer block bolts 18, and the chamfer mating surface 24 of the chamfer block 4 is set parallel to the chamfer plane of the substrate 10.

[0106] Through this embodiment, the chamfer block 4 plays a role of limiting, which can limit the vertical movement of the substrate 10, which is beneficial for keeping the substrate 10 in a stable state during the coating process, thereby facilitating the protection of the substrate 10.

[0107] In one embodiment, after the base plate assembly is fixed to the adapter chuck 1 using the fixture frame screws, the base plate assembly is fixed to the adapter chuck 1 using the connecting block vertical screws 20 that pass through the connecting block 6 and the adapter chuck 1 in sequence.

[0108] This embodiment is conducive to firmly fixing the fixture tool on the adapter chuck 1.

[0109] like Figure 1 and Figure 10 As shown, at the same time, a lifting threaded hole 21 is provided on the adapter chuck 1 for assembling a connecting device so that a subsequent connecting device can be used in conjunction with a subsequent lifting device, thereby facilitating the smooth transfer of the substrate assembly into the coating machine.

[0110] Example 1

[0111] like Figure 2 and Figure 3As shown, this embodiment provides a fixture tool, which includes a fixture frame part 2, a fixture frame part 2 and a wedge block 7. The fixture frame part 2 and the fixture frame part 3 can be assembled to form a fixture frame body; the wedge block 7 is detachably connected to the fixture frame part 2 and the fixture frame part 3; the fixture frame part 2 and the fixture frame part 3 are used to fit with the opposite sides of the substrate 10 during the assembly process; so that the fixture frame body is arranged around the substrate 10; the wedge block 7 is used to extend into the side wall groove of the substrate 10 during the assembly process, wherein there is a gap between the mating end face 25 of the wedge block and the mating end face of the side wall groove of the substrate 10.

[0112] Existing fixtures include edge-holding fixtures and spring-type fixtures. During loading, edge-holding fixtures in existing technologies inevitably contact the grating surface of the substrate 10, obstructing it. Thermal expansion of the fixture and substrate 10 can also cause scratches in the contact area between the fixture and the substrate 10. Spring-type fixtures in existing technologies can achieve contact-free and unobstructed fixation of the fixture and substrate 10, but they are only suitable for small, conventionally shaped, and lightweight substrates 10.

[0113] The fixture of this embodiment can fix a large-sized substrate 10 of irregular shape. It can achieve the goal of not blocking the surface of the substrate 10 during the electron beam deposition process, and it does not contact the substrate 10. At the same time, it has a large load, which is conducive to achieving zero edge of the substrate 10, avoiding scratches caused by heat on the contact part of the fixture and the surface of the substrate 10, and can meet the requirements of loading the coating machine and the fixture carrying the movement of a large mass substrate 10 during the coating process.

[0114] Specifically, the fixture frame body includes a detachably connected fixture frame portion 2 and a second fixture frame portion 3. The shape of the notches in the first and second fixture frame portions 2 and 3 is determined by the outer shape of the substrate 10, thereby enabling the fixation of irregularly shaped substrates 10. To accommodate the large size requirements of the substrate 10, the dimensions of the first and second fixture frame portions 2 and 3 match the dimensions of the substrate 10 and have a certain width, thereby providing a certain rigidity to ensure that the fixture can fix large-sized substrates 10.

[0115] The design of the wedge block 7 prevents the fixture from contacting the substrate 10 , thereby facilitating the realization of a zero edge for the substrate 10 and preventing scratches caused by heat on the contact portion between the fixture and the substrate 10 .

[0116] Specifically, the wedge block 7 is used to extend into the side wall groove of the substrate 10 during the assembly process. After the assembly is completed, there is a gap between the mating end face 25 of the wedge block and the mating end face of the side wall groove of the substrate 10. The gap allows the substrate 10, which is heated and expanded during the coating process, to avoid being scratched by a violent collision with the fixture, that is, the fixture does not contact the surface of the substrate 10, avoiding scratches caused by the contact part of the fixture with the surface of the substrate 10 due to heat, thereby helping to reduce the scrap rate of the substrate 10. In addition, since the wedge block 7 extends into the side wall groove of the substrate 10 without interfering with the surface of the substrate 10, it is more conducive to avoiding the wedge block 7 from scratching the surface of the substrate 10. At the same time, the wedge block 7 does not block the surface of the substrate 10. It extends into the side wall groove of the substrate 10, so that it does not block the surface of the substrate 10 during the coating process, which is conducive to achieving zero edge of the substrate 10.

[0117] The wedge block 7 is detachably connected to the first and second clamping frame sections 2 and 3, allowing the material of the wedge block 7 to be changed according to the material of the substrate 10, thereby better protecting the substrate 10. Furthermore, the shape of the wedge block 7 can be designed to suit the shape of the sidewall grooves of different substrates 10, so that the wedge block 7 adapts to the sidewall grooves of the substrate 10. Furthermore, if the wedge block 7 is damaged, since the wedge block 7 is detachably connected to the first and second clamping frame sections 2 and 3, only the wedge block 7 needs to be replaced, without having to scrap the first and second clamping frame sections 2 and 3.

[0118] The load of the fixture needs to be greater than the mass of the substrate 10 to meet the requirements of the coating machine loading and the fixture carrying the large mass of the substrate 10 during the coating process, so as to cope with the large inertia generated by the substrate 10 under acceleration conditions such as rotation.

[0119] During assembly, the first clamp frame 2 and the second clamp frame 3 are moved closer to the substrate 10 from the upper and lower sides along the longitudinal direction until the first clamp frame 2 and the second clamp frame 3 enclose the substrate 10 .

[0120] The fixture can be used to fix large-sized and irregular-shaped substrates 10. The fixture can achieve the goal of not blocking the surface of the substrate 10 during the electron beam deposition process and not contacting the substrate 10. At the same time, it has a large load, which is conducive to achieving zero edges of the substrate 10, avoiding scratches caused by heat on the contact part of the fixture and the surface of the substrate 10, and can meet the requirements of loading the coating machine and the fixture carrying the movement of large-mass substrates 10 during the coating process.

[0121] Example 2

[0122] Based on the first embodiment, Figure 3As shown, the fixture tooling also includes a wedge screw 15, and the wedge 7 is fixed to the fixture frame part 2 or the fixture frame part 2 3 through the wedge screw 15, which is conducive to achieving a detachable connection between the wedge 7 and the fixture frame part 2 or the fixture frame part 3.

[0123] When the substrate 10 is made of microcrystalline material, the wedge 7 is made of polytetrafluoroethylene material; or when the substrate 10 is made of quartz material, the wedge 7 is made of aluminum alloy material, which is conducive to better protection of the substrate 10.

[0124] The fixture tooling also includes assembly screws 17, and assembly holes 16 are provided on the fixture frame part 2 and the fixture frame part 3. The assembly screws 17 can extend into the assembly holes 16 on the fixture frame part 2 and the assembly holes 16 on the fixture frame part 3 to assemble the fixture frame part 2 and the fixture frame part 3 into the fixture frame body, which is conducive to realizing the detachable connection between the fixture frame part 2 and the fixture frame part 3, so as to better adapt to the special-shaped substrate 10.

[0125] like Figure 6 As shown, the fixture also includes a chamfer block assembly, which includes a chamfer block 4 and a chamfer block bolt 18. The chamfer block 4 is fixed to the fixture frame body by the chamfer block bolt 18. The chamfer mating surface 24 of the chamfer block 4 is arranged parallel to the chamfer plane of the substrate 10. The chamfer block 4 acts as a limiter, which can limit the vertical movement of the substrate 10, thereby facilitating the substrate 10 to maintain a stable state during the coating process, thereby facilitating the protection of the substrate 10.

[0126] The fixture tooling also includes a connecting block assembly, which includes a connecting block 6, a connecting block longitudinal screw 19 and a connecting block vertical screw 20; the connecting block longitudinal screw 19 is used to connect the connecting block 6 and the fixture frame body; the connecting block 6 fixes the fixture tooling on the adapter chuck 1 through the connecting block vertical screw 20, which is conducive to firmly fixing the fixture tooling on the adapter chuck 1.

[0127] like Figure 3 As shown, the fixture also includes a handle 5, which is detachably secured to the lateral edges of the first and second fixture frame portions 2, 3. The handle 5 is an angled handle that bends upward, away from the grating surface of the base plate 10. This facilitates the operator's grip on the fixture, improving the controllability and convenience of various operations, particularly the controllability of the assembly process. The handle 5 is an angled handle that bends upward, away from the grating surface of the base plate 10, facilitating differentiation between the two sides of the fixture and preventing installation errors.

[0128] Example 3

[0129] like Figure 7 and Figure 8As shown, this embodiment also provides an assembly table 8 for assembling the above-mentioned substrate assembly, and the assembly table 8 includes a supporting body, and a supporting seat 9 is provided on the top surface of the supporting body. The end of the support seat 9 forms a limit line 12 for aligning with the edge line of the substrate 10; guide grooves 11 are provided along the two longitudinal edges of the top surface of the supporting body, and the longitudinal edges of the fixture frame part 2 and the fixture frame part 2 3 can slide in the guide grooves 11, and there is a gap between the groove wall of the guide groove 11 and the side wall of the longitudinal edges of the fixture frame part 2 and the fixture frame part 3.

[0130] The assembly table 8 can assist in assembling the substrate assembly, reduce assembly difficulty, and improve assembly accuracy.

[0131] The function of the limit line 12 is to ensure that the substrate 10 is in the correct position during the assembly process. The staff can ensure that the limit line 12 is aligned with the edge line of the substrate 10 by observation, thereby ensuring that the substrate 10 does not deviate from its correct position, which is conducive to reducing the difficulty of assembly and improving assembly accuracy.

[0132] The provision of the guide groove 11 is beneficial to preventing the first clamp frame part 2 and the second clamp frame part 3 from deviating from the correct track, and is beneficial to assisting assembly, thereby reducing the difficulty of assembly and improving assembly accuracy.

[0133] There is a gap between the groove wall of the guide groove 11 and the side walls of the longitudinal sides of the fixture frame part 1 2 and the fixture frame part 2 3 , which is conducive to the smooth separation of the substrate assembly from the assembly table 8 after the assembly is completed.

[0134] The assembly table 8 can assist in assembling the substrate assembly, reduce assembly difficulty, and improve assembly accuracy.

[0135] Example 4

[0136] Based on the third embodiment, Figure 7 As shown, the support seat 9 is a 270-degree ring, and there are two limit lines 12 located at the starting and ending ends of the ring of the support seat 9. The two limit lines 12 are arranged perpendicular to each other and can be aligned with the first edge line and the second edge line of the substrate 10 respectively, so that the support seat 9 is adapted to the special-shaped substrate 10, which is conducive to ensuring that the substrate 10 is in the correct position during the assembly process. The staff can ensure that the limit lines 12 are aligned with the edge lines of the substrate 10 by observation, thereby ensuring that the substrate 10 does not deviate from its correct position, which is conducive to reducing the difficulty of assembly and improving assembly accuracy.

[0137] like Figure 8 As shown, the bottom surface of the support body is provided with support bodies 22 arranged crosswise with each other, and weight-reducing holes 23 are formed between adjacent support bodies 22, and a plurality of weight-reducing holes 23 are symmetrically distributed; this design reduces the dead weight of the assembly table 8 while ensuring that it has a good load-bearing capacity.

[0138] The assembly table 8 also includes a handle 5, which is detachably fixed to the two longitudinal sides of the assembly table 8; the handle 5 is an angle handle, which is bent upward away from the bottom surface of the supporting body, and the handle 5 is convenient for the staff to hold the assembly table 8, and is convenient for carrying, transporting, and fixing; the handle 5 is an angle handle, which is bent upward away from the bottom surface of the supporting body, and is convenient for distinguishing the two sides of the assembly table 8 to avoid installation errors.

[0139] The support base 9 is made of non-metallic material, which is beneficial to protecting the substrate 10 and avoiding wear on the surface of the substrate 10.

[0140] Preferably, the support seat 9 is made of polytetrafluoroethylene material. The hardness of polytetrafluoroethylene material is relatively low, which is beneficial to further protect the substrate 10 and avoid wear on the surface of the substrate 10.

[0141] Example 5

[0142] The present embodiment also provides an assembly method for assembling a substrate assembly using the above-mentioned assembly table 8, and the assembly method includes the following steps: placing the assembly table 8 on a plane, wherein the support seat 9 is away from the plane; making the mounting surface of the substrate 10 fit the support seat 9, and the two limit lines 12 of the support seat 9 are respectively aligned with the first edge line and the second edge line of the substrate 10; making the longitudinal edges of the fixture frame part 2 and the fixture frame part 3 enter the guide groove 11 of the support table respectively; making the fixture frame part 2 and the fixture frame part 3 slide toward each other along the guide groove 11 of the support table until the wedge block 7 completely enters the side wall groove of the substrate 10; fixing the fixture frame part 2 and the fixture frame part 3 to form a fixture frame body, and the substrate 10 is located in the fixture frame body, and the substrate 10 and the fixture tooling form a substrate assembly.

[0143] like Figure 9 As shown, the assembly table 8 can assist in assembling the substrate assembly, reduce assembly difficulty, and improve assembly accuracy.

[0144] The function of the limit line 12 is to ensure that the substrate 10 is in the correct position during the assembly process. The staff can ensure that the limit line 12 is aligned with the edge line of the substrate 10 by observation, thereby ensuring that the substrate 10 does not deviate from its correct position, which is conducive to reducing the difficulty of assembly and improving assembly accuracy.

[0145] The provision of the guide groove 11 is beneficial to preventing the first clamp frame part 2 and the second clamp frame part 3 from deviating from the correct track, and is beneficial to assisting assembly, thereby reducing the difficulty of assembly and improving assembly accuracy.

[0146] Preferably, there is a gap between the groove wall of the guide groove 11 and the side walls of the longitudinal edges of the fixture frame part 1 2 and the fixture frame part 2 3 , so as to facilitate the smooth separation of the substrate assembly from the assembly table 8 after the assembly is completed.

[0147] By utilizing this assembly method, the assembly table 8 can assist in assembling the substrate assembly, thereby reducing assembly difficulty and improving assembly accuracy.

[0148] Example 6

[0149] This embodiment also provides a method for fixing the above-mentioned substrate assembly, which includes the following steps: placing the substrate assembly in the chuck groove of the adapter chuck 1, with the grating surface of the substrate 10 facing the chuck groove during the placement process; and fixing the substrate assembly on the adapter chuck 1 using a fixture frame screw.

[0150] The fixing method is used to ensure that the grating surface of the substrate 10 is arranged toward the coating mechanism during the coating process, and is also used to firmly fix the fixture to the adapter chuck 1 .

[0151] In the description of the present invention, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "back", "inside", "outside", "left", "right", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention.

[0152] Although the present invention is described herein with reference to specific embodiments, it should be understood that these embodiments are merely illustrative of the principles and applications of the invention. It should be understood that many modifications may be made to the illustrative embodiments, and that other arrangements may be devised, without departing from the spirit and scope of the invention as defined by the appended claims. It should be understood that the various dependent claims and features described herein may be combined in ways other than those described in the original claims. It should also be understood that features described in conjunction with individual embodiments may be employed in conjunction with other described embodiments.

Claims

1. A fixture tool, characterized in that: The clamp frame comprises a first clamp frame, a second clamp frame, a wedge, and a wedge screw. The first clamp frame and the second clamp frame can be assembled to form a clamp frame body. The wedge is detachably connected to the first clamp frame and the second clamp frame via the wedge screw. The first clamp frame and the second clamp frame are used to fit on opposite sides of a base plate during assembly, and the notches of the first clamp frame and the second clamp frame are determined by the base plate. The fixture frame body is arranged around the substrate; the wedge is used to extend into the side wall groove of the substrate during assembly, wherein a gap is formed between the mating end surface of the wedge and the mating end surface of the side wall groove of the substrate; The fixture tooling also includes a chamfer block assembly, which includes a chamfer block and a chamfer block bolt. The chamfer block is fixed to the fixture frame body by the chamfer block bolt. The chamfer mating surface of the chamfer block is arranged parallel to the chamfer plane of the substrate to limit the vertical movement of the substrate.

2. The fixture according to claim 1, characterized in that: Also included is a connecting block assembly, the connecting block assembly including a connecting block, a connecting block longitudinal screw, and a connecting block vertical screw; The longitudinal screws of the connecting block are used to connect the connecting block and the fixture frame body; the connecting block fixes the fixture tooling on the adapter chuck through the connecting block vertical screws.

3. The fixture according to claim 1, characterized in that: It also includes a handle, which is detachably fixed to the fixture frame body.

4. A substrate assembly, comprising a substrate and the fixture according to any one of claims 1 to 3.

5. An assembly table for assembling the substrate assembly according to claim 4, characterized in that: It includes a supporting body, the top surface of which is provided with a supporting seat, the end of which forms a limiting line for aligning with the edge line of the substrate; a guide groove is provided on the top surface of the supporting body, and the clamp frame part one and the clamp frame part two can slide in the guide groove, and there is a gap between the groove wall of the guide groove and the side wall of the clamp frame part one and the clamp frame part two.

6. The assembly table according to claim 5, characterized in that There are at least two limit lines on the support base, and the two limit lines can be aligned with the first edge line and the second edge line of the substrate respectively.

7. The assembly station according to claim 5, characterized in that The support seat is detachably connected to the support body.

8. A method for assembling a substrate assembly using the assembly table according to any one of claims 5 to 7, the method comprising the following steps: placing the assembly table on a plane, wherein the support base is away from the plane; The mounting surface of the substrate is fitted with the support base, and the two limit lines of the support base are aligned with the first edge line and the second edge line of the substrate respectively; Make the first and second clamp frames enter the guide grooves of the support platform respectively; Slide the first and second clamp frames toward each other along the guide groove of the support platform until the wedge block completely enters the side wall groove of the substrate; The fixture frame part one and the fixture frame part two are fixedly connected to form the fixture frame main body, and the substrate is located in the fixture frame main body. The substrate and the fixture tooling form a substrate assembly.

9. The assembly method according to claim 8, characterized in that: After the first fixture frame part and the second fixture frame part are fixedly connected to form the fixture frame main body, the connecting block is fixed on the fixture frame main body.

10. A method for fixing the substrate assembly according to claim 8, the method comprising the following steps: Placing the substrate assembly in a chuck groove of an adapter chuck, with the grating surface of the substrate facing the chuck groove during the placement process; The base plate assembly is fixed on the adapter chuck.

11. The fixing method according to claim 10, characterized in that: After the substrate assembly is fixed on the adapter chuck, the chamfering block is installed on the mounting surface side of the substrate of the fixture frame body, and the chamfering mating surface of the chamfering block is arranged parallel to the chamfering plane of the substrate.

12. The fixing method according to claim 10, characterized in that: After the substrate assembly is fixed on the adapter chuck, the substrate assembly is fixed on the adapter chuck via a connecting block.

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