A light reflection component, an optical switch, and a photographing device

Abstract

Embodiments of the present application disclose an optical reflection component, an optical switch, and a photographing device, which can be applied to fields such as photographing, optical switching, and lidar, and solve the problem that the cantilever beam in the optical reflection component is easily damaged. The optical reflection component includes a reflection element, a substrate, a first cantilever beam, a second cantilever beam, a magnetic structure, and a support structure. The substrate is located on the magnetic structure, and the reflection element is located in the hollow area in the middle of the substrate. Both ends of the reflection element are respectively connected to the substrate through the first cantilever beam and the second cantilever beam. The first cantilever beam and the second cantilever beam are located on different sides of the reflection element and are arranged along the first axial direction. The front surface of the reflection element is used to reflect incident light. The magnetic structure is used to drive the reflection element to rotate. The support structure is fixed to the magnetic structure, and one end of the support structure away from the magnetic structure contacts the back surface of the reflection element, and the support structure does not move with the rotation of the reflection element.

Description

Technical Field

[0001] This application relates to the field of micro electro mechanical systems, and in particular, to an optical reflection component, an optical switch, and a photographing device. Background Art

[0002] Micro Electro Mechanical Systems (MEMS) are micro-devices or systems that utilize traditional semiconductor processes and materials to integrate micro-sensors, micro-actuators, micro-mechanical mechanisms, signal processing and control circuits, high-performance electronic integrated devices, interfaces, communications, and power supplies. In optical fiber communication, MEMS-driven micromirrors can be used to achieve the deflection of the micromirrors for optical switching.

[0003] MEMS micromirrors usually consist of a micromirror substrate, a micromirror body, and a cantilever beam. The micromirror substrate is located outside the micromirror body, one end of the cantilever beam is connected to the micromirror substrate, and the other end of the cantilever beam is connected to the micromirror body. The cantilever beam can drive the micromirror to deflect by a certain angle. In practical applications, if the MEMS micromirror moves in a direction perpendicular to the horizontal plane, the micromirror body will bring a large tensile force to the cantilever beam, posing a risk of damage to the cantilever beam. Summary of the Invention

[0004] Embodiments of this application provide an optical reflection component, an optical switch, and a photographing device, which solve the problem that the cantilever beam is easily damaged.

[0005] In a first aspect, the optical reflection component provided by the embodiments of this application includes a reflection element, a substrate, a first cantilever beam, a second cantilever beam, a magnetic structure, and a support structure. Among them, the substrate is located on the magnetic structure, and the reflection element is located in the hollow area in the middle of the substrate. The first end of the reflection element is connected to the substrate through the first cantilever beam, and the second end of the reflection element is connected to the substrate through the second cantilever beam. The front surface of the reflection element is used to reflect incident light. The magnetic structure is used to drive the reflection element to rotate. The support structure is fixed on the magnetic structure, and the end of the support structure far from the magnetic structure contacts the back surface of the reflection element, and the support structure does not move as the reflection element rotates.

[0006] In this embodiment, the support structure is located on the magnetic structure, and the end of the support structure far from the magnetic structure contacts the back surface of the reflection element, which can prevent the reflection element in the optical reflection component from moving significantly in a direction perpendicular to the horizontal plane, effectively protecting the cantilever beam for connecting the reflection element.

[0007] In some possible embodiments, on the premise of not affecting the rotation of the reflection element, the position where the support structure contacts the reflection element changes as the reflection element rotates, making the rotation angle of the reflection element more flexible.

[0008] In some possible embodiments, the contact area between the support structure and the reflective element is located at the center of the reflective element, minimizing the influence of the support structure on the rotational performance of the reflective element.

[0009] In some possible embodiments, the material of the support structure is gel, and the support structure is adhesively bonded to the back side of the reflective element. In this way, the overall movement of the reflective element away from the magnetic structure can also be avoided. Moreover, when the cantilever beam drives the reflective element to rotate, the movement of the reflective element driven by a driving force in other directions (such as the horizontal direction) can also be avoided, so that the rotation of the reflective element is not affected.

[0010] In some possible embodiments, the length of the contact area between the support structure and the reflective element satisfies a first preset condition, and the first preset condition is B≤0.1*A, where B represents the length of the contact area and A represents the rotation radius of the reflective element. Through this design method, the influence of the support structure on the rotational performance of the reflective element is further reduced.

[0011] In some possible embodiments, the optical reflection assembly further includes a height limiting structure and a protection structure. The height limiting structure is located on the substrate, and the protection structure is located on the height limiting structure. The protection structure is used to limit the movement amplitude of the reflective element not to exceed the plane where the protection structure is located. If the reflective element moves as a whole towards the protection structure under the influence of an external force, the protection structure can play a role in stopping the reflective element, protecting the reflective element and the cantilever beam used to connect the reflective element.

[0012] In some possible embodiments, the protection structure is a light-transmitting element, and the light-transmitting element is used to transmit incident light to the reflective element. The present application provides a specific implementation manner of the protection structure, improving the practicability of the solution.

[0013] In some possible embodiments, the protection structure is a protection frame, and the middle of the protection frame is hollowed out. In order to enable the protection frame to play a role in stopping the reflective element, the length of the hollowed-out area in the middle of the protection frame is less than the length of the reflective element in at least one direction. Using a protection frame instead of a light-transmitting element can reduce the stray light generated by multiple specular reflections, and can also reduce costs.

[0014] In some possible embodiments, the protection structure is a lens, and the lens is used to refract incident light to the reflective element. In some application scenarios, the incident light or the outgoing light can be beam-shaped through the lens, and there is no need to set a lens outside the optical reflection assembly, which can streamline the optical path.

[0015] In some possible embodiments, the height of the height-limiting structure satisfies a second preset condition, and the second preset condition is: H≥R*tanθ, where H represents the height of the height-limiting structure, R represents the maximum rotation radius of the reflection element, and θ represents the maximum rotation angle of the reflection element. In the above manner, the protection structure can be prevented from affecting the normal rotation of the reflection element.

[0016] In some possible embodiments, the height-limiting structure is fixed to the protection structure by means of silk-screen printing, and the material of the height-limiting structure can be ink. In this way, the effect of raising the height can be achieved by adding silk-screen printing on the protection structure. The protection structure and the silk-screen printing are integrated, reducing the process of separately setting the height-limiting structure, saving the processing process and making the overall structure more compact.

[0017] In some possible embodiments, the first cantilever beam and the second cantilever beam are located on different sides of the reflection element and are arranged along the first axial direction, providing a specific setting position of a group of cantilever beams and improving the feasibility of the solution.

[0018] In some possible embodiments, the third end of the reflection element is connected to the base through a third cantilever beam, and the fourth end of the reflection element is connected to the base through a fourth cantilever beam. The specific number of cantilever beams is not limited in this solution. Another group of cantilever beams can be added on the basis of an existing group of cantilever beams, enabling the reflection element to rotate around multiple different axial directions and meeting more application requirements.

[0019] In some possible embodiments, the third cantilever beam and the fourth cantilever beam are located on different sides of the reflection element and are arranged along the second axial direction. The magnetic structure is further configured to drive the reflection element to rotate around the first axial direction, and the first axial direction and the second axial direction are in the same plane and perpendicular to each other. A specific setting position of another group of cantilever beams is provided, further improving the feasibility of the solution.

[0020] In some possible embodiments, a coil is disposed on the reverse side of the reflection element. The coil is electrically connected to a pad on the base through a wire to form a circuit, and the wire is used to transmit current so that the coil generates an electromagnetic force to drive the reflection element to rotate. A specific implementation manner of driving the reflection element to rotate by the magnetic structure is provided, making the solution more practical.

[0021] In some possible embodiments, the wire includes a first wire and a second wire, the pad includes a first pad and a second pad, one end of the first wire is connected to the first pad, the other end of the first wire runs along the first cantilever beam and is connected to the coil, one end of the second wire is connected to the second pad, and the other end of the second wire runs along the second cantilever beam and is connected to the coil. In the above manner, the wires run along the cantilever beams and are connected to the coil, avoiding the mutual entanglement between the wires, making the arrangement of the wires neater, and avoiding the wires being pulled by external forces, playing a good protective role.

[0022] In some possible embodiments, the light reflection component further includes a printed circuit board (PCB), the PCB is electrically connected to the first pad and the second pad, and the PCB is used to output current to the first pad. The current is input into the coil through the first wire and transmitted to the second pad through the second wire. The PCB can provide the current required to drive the reflection element, improving the feasibility of this solution.

[0023] In some possible embodiments, the magnetic structure includes a first magnet and a second magnet, the magnetic properties of the first magnet and the second magnet are opposite, the second magnet is located between the first magnets, the substrate is located on the first magnet, and the support structure is located on the second magnet. In the above manner, a specific implementation manner of the magnetic structure is provided. The magnetic structure can form a stable magnetic field and drive the reflection element to rotate through the magnetoelectric method, further improving the feasibility of the solution.

[0024] In some possible embodiments, the light reflection component further includes a housing, and the housing is fixed outside the magnetic structure and the substrate. By providing the housing, better protection can be provided for the internal structure of the light reflection component.

[0025] In some possible embodiments, the reflection element is a plane mirror or a curved mirror, improving the flexibility of this solution and meeting more application requirements.

[0026] In a second aspect, the present application provides an optical switch, which includes a first fiber collimator, a second fiber collimator, a first optical reflection array, and a second optical reflection array. Among them, the first optical reflection array includes a plurality of optical reflection components as in any one of the embodiments of the first aspect above. The second optical reflection array has a similar structure to the first optical reflection array and also includes a plurality of optical reflection components as in any one of the embodiments of the first aspect above. The first fiber collimator is used to direct the input optical signal to the first optical reflection array. The optical reflection components on the first optical reflection array are used to reflect the optical signal to the optical reflection components on the second optical reflection array. The optical reflection components on the second optical reflection array are used to reflect the optical signal to the second fiber collimator. The second fiber collimator is used to output the optical signal. It should be understood that the reflection elements in each optical reflection component on the first optical reflection array can be rotated, and by adjusting the rotation angle, the optical signal can be reflected to any optical reflection component on the second optical reflection array to achieve optical switching.

[0027] In a third aspect, the present application provides a photographing device, which includes an optical reflection component, a lens component, and an image sensor as in any one of the embodiments of the first aspect above. The optical reflection component is used to reflect the input light to the lens component. The lens component is used to direct the input light to the image sensor. The image sensor is used to perform imaging according to the input light. It should be understood that during the process of using the above-mentioned photographing device for photographing, the captured image may be blurred due to hand shake. The reflection element in the optical reflection component can change the optical path by rotating, so as to compensate for the shake and achieve the anti-shake function. In addition, the shake during the photographing process will also cause a large movement of the photographing device. The support structure can stop the reflection element in the reflection component, avoiding damage to the optical reflection component caused by the shake.

[0028] In a fourth aspect, the present application provides a radar, which includes an optical reflection component, a detector, and a lens as in any one of the embodiments of the first aspect above. The optical reflection component is used to reflect the beam output by the detector to the lens, and the beam is directed to the target through the lens. The beam reflected back by the target first passes through the lens and then is reflected by the optical reflection component to the detector. Since the above-mentioned radar adopts the optical reflection component provided by the present application, when the radar is applied in an environment with severe jitter (such as a vehicle driving environment), the support structure can stop the reflection element in the reflection component, avoiding damage to the optical reflection component caused by the jitter.

[0029] In the embodiments of the present application, the support structure is located on the magnetic structure, and one end of the support structure far from the magnetic structure contacts the back surface of the reflection element. By the above method, it is possible to prevent the reflection element in the optical reflection component from generating a large movement in the direction perpendicular to the horizontal plane, and solve the problem that the cantilever beam is easily damaged. Description of the Drawings

[0030] Figure 1 A schematic plan view of an optical reflection component in an embodiment of the present application;

[0031] Figure 2 A schematic three-dimensional view of an optical reflection component in an embodiment of the present application;

[0032] Figure 3 Another schematic plan view of an optical reflection component in an embodiment of the present application;

[0033] Figure 4 A schematic view of the height of a height-limiting structure in an embodiment of the present application;

[0034] Figure 5 Another schematic plan view of an optical reflection component in an embodiment of the present application;

[0035] Figure 6 Another schematic plan view of an optical reflection component in an embodiment of the present application;

[0036] Figure 7 Another schematic plan view of an optical reflection component in an embodiment of the present application;

[0037] Figure 8 A schematic view of a structure of the connection between a pad and a coil in an embodiment of the present application;

[0038] Figure 9 Another schematic view of a structure of the connection between a pad and a coil in an embodiment of the present application;

[0039] Figure 10 Another schematic plan view of an optical reflection component in an embodiment of the present application;

[0040] Figure 11 A schematic view of the structure of a photographing device provided by an embodiment of the present application;

[0041] Figure 12 A schematic view of the structure of an optical switch provided by an embodiment of the present application. Detailed implementation manners

[0042] The embodiments of the present application provide an optical reflection component, an optical switch, and a photographing device, which can avoid large-amplitude movement of the reflection element in the optical reflection component in the direction perpendicular to the horizontal plane, and solve the problem that the cantilever beam is easily damaged. The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances, so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units does not have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products, or devices.

[0043] Figure 1 It is a schematic plan view of an optical reflection component in an embodiment of the present application. As Figure 1 shown, the optical reflection component includes a reflection element 10, a substrate 20, a magnetic structure 30, a cantilever beam 40, and a support structure 50. Among them, the substrate 20 is located on the magnetic structure 30, and the reflection element 10 is located in the hollow area in the middle of the substrate 20. The reflection element 10 is connected to the substrate 20 through the cantilever beam 40 to support and fix the reflection element 10. It should be understood that the number of cantilever beams in the optical reflection component provided in the present application is at least 2, and these two cantilever beams can drive the reflection element to rotate around the first axis. On this basis, another two cantilever beams can be provided to drive the reflection element to rotate around the second axis. The present application does not limit the specific number of cantilever beams, and the following will be uniformly introduced according to the embodiment of 4 cantilever beams.

[0044] Figure 2 It is a schematic three-dimensional view of an optical reflection component in an embodiment of the present application. The cantilever beam 40 at least includes a first cantilever beam 401, a second cantilever beam 402, a third cantilever beam 403, and a fourth cantilever beam 404. The fixed end of each cantilever beam is connected to the substrate 20, and the movable end of each cantilever beam is connected to the reflection element 10. Among them, the first cantilever beam 401 and the second cantilever beam 402 are located on different sides of the reflection element 10 and are arranged along the first axis, the third cantilever beam 403 and the fourth cantilever beam 404 are located on different sides of the reflection element 10 and are arranged along the second axis, and the first axis and the second axis are in the same plane and perpendicular to each other.

[0045] The front surface of the reflection element 10 is used to reflect incident light, and a coil is provided on the back surface of the reflection element 10. Among them, the coil can be connected to a pad on the substrate 20 through a wire (such as Figure 2The pad 60 shown is electrically connected and forms a circuit. The magnetic structure 30 forms a magnetic field, and the wire is used to transmit current so that the coil generates an electromagnetic force to drive the reflection element 10 to rotate about the first axial direction or the second axial direction. It should be understood that the present application does not limit the shape and type of the reflection element 10. For example, the reflection element 10 can be circular, or can be other shapes such as rectangular. The reflection element 10 can be a plane mirror, or can be other elements with reflection ability such as a curved mirror.

[0046] The support structure 50 is located on the magnetic structure 30, and one end of the support structure 50 away from the magnetic structure 30 contacts the back surface of the reflection element 10. It should be understood that the support structure 50 is fixed on the magnetic structure 30, and the support structure 50 does not move along with the rotation of the reflection element 10. That is to say, the support structure 50 only supports and protects the reflection element 10, and does not apply an additional force to the reflection element 10.

[0047] As a possible implementation manner, on the premise of not affecting the rotation of the reflection element, the position where the support structure contacts the reflection element changes with the rotation of the reflection element, making the rotation angle of the reflection element more flexible.

[0048] It should be noted that in order to ensure that the reflection element 10 has sufficient space to rotate, there is a certain distance between the reflection element 10 and the magnetic structure 30. However, in some scenarios, due to the influence of external forces, the reflection element 10 may move significantly in the direction close to the magnetic structure 30 as a whole. Then, the contact between the support structure 50 and the back surface of the reflection element 10 can effectively avoid the occurrence of the above situation. Optionally, in some possible implementation manners, the support structure 50 and the reflection element 10 may not form contact, and one end of the support structure 50 away from the magnetic structure 30 is close to the back surface of the reflection element 10, which can also avoid the reflection element 10 moving significantly in the direction close to the magnetic structure 30 as a whole.

[0049] The present application does not limit the specific position of the support structure 50 and the size of the contact area between the support structure 50 and the reflection element 10. In a preferred implementation, in order to minimize the influence of the support structure 50 on the rotation performance of the reflection element 10, the support structure 50 should contact the central position of the reflection element 10. It should be understood that the central position of the reflection element 10 can be the geometric center of the reflection element 10, or a position near the geometric center, or a central area including the geometric center, and specific details are not limited here. In addition, the length of the contact area between the support structure 50 and the reflection element 10 in the first axial direction should satisfy the following preset condition, which is B≤0.1*A, where B represents the length of the contact area in the first axial direction, and A represents the rotation radius of the reflection element around the second axial direction. Similarly, the length of the contact area in the second axial direction should satisfy the following preset condition, which is C≤0.1*D, where C represents the length of the contact area in the second axial direction, and D represents the rotation radius of the reflection element around the first axial direction.

[0050] It should be understood that the present application does not limit the material of the support structure 50. For example, the material of the support structure 50 is gel, and the support structure 50 is adhesively bonded to the back side of the reflection element 10, which can also prevent the entire reflection element 10 from moving away from the magnetic structure 30. Moreover, when the cantilever beam drives the reflection element 10 to rotate, it can also prevent the reflection element 10 from moving under the driving force in other directions (such as the horizontal direction), so that the rotation of the reflection element 10 is not affected. For another example, the material of the support structure 50 can also be a hard material, and the support structure 50 is in hard contact with the back side of the reflection element 10, avoiding the complex dispensing process and simplifying the processing technology. In addition, the present application does not limit the shape of the support structure 50 either. The support structure 50 can be spherical as shown in Figure 1 or other shapes such as cylindrical.

[0051] Figure 3 is another schematic plan view of the optical reflection component in the embodiment of the present application. As shown in Figure 3 the optical reflection component further includes a height limiting structure 70 and a protection structure 80. The height limiting structure 70 is located on the substrate 20, and the protection structure 80 is located on the height limiting structure 70. The protection structure 80 is used to limit the movement amplitude of the reflection element 10 not to exceed the plane where the protection structure 80 is located. That is to say, if the entire reflection element 10 moves towards the protection structure 80 under the influence of an external force, the protection structure 80 can play a role in stopping the reflection element 10.

[0052] It should be understood that as long as the height-limiting structure 70 does not cover the cantilever beam 40 and the reflecting element 10, the coverage area of the height-limiting structure 70 is not limited in this application. However, in order to ensure that the protective structure 80 does not affect the normal rotation of the reflecting element 10, the height of the height-limiting structure 70 should meet the following preset condition: H≥R*tanθ. For Figure 4 example, where H represents the height of the height-limiting structure 70, R represents the maximum rotation radius of the reflecting element 10, and θ represents the maximum rotation angle of the reflecting element 10. It should be understood that the reflecting element 10 in this application can rotate around multiple axes, and the rotation radii of the reflecting element 10 around different axes can be the same or different. As long as its maximum rotation radius meets this preset condition, the other rotation radii also meet this preset condition. In addition, considering that the tensile force that the cantilever beam 40 can withstand is limited, the maximum rotation angle of the reflecting element 10 can be calculated in advance. Therefore, based on the provided R and θ, the minimum height of the height-limiting structure 70 can be calculated through simple mathematical operations. It should be noted that the distance between the reflecting element 10 and the magnetic structure 30 should also meet this preset condition so that the magnetic structure 30 does not affect the normal rotation of the reflecting element 10.

[0053] In a possible implementation, the height-limiting structure 70 can be fixed to the protective structure 80 by means of screen printing, and the material of the height-limiting structure 70 is ink. In this way, the effect of raising the height can be achieved by adding screen printing on the protective structure. The protective structure and the screen printing are integrated, reducing the process of separately setting the height-limiting structure, saving the processing process and making the overall structure more compact at the same time.

[0054] It should be noted that there are various implementation manners for the protective structure in this application. For example, the protective structure can be a Figure 3 light-transmitting element as shown, and this light-transmitting element can transmit the incident light to the reflecting element. For another example, the protective structure can be a Figure 5 protective frame as shown. The middle of this protective frame is hollowed out, and the length of the hollowed-out area in the middle of the protective frame in at least one direction is less than the length of the reflecting element, so as to play a role in stopping the reflecting element. And using the protective frame instead of the light-transmitting element can reduce the stray light generated by multiple specular reflections, and can also reduce costs. For another example, the protective structure can be a Figure 6 lens as shown. The lens is used to refract the incident light to the reflecting element. In some application scenarios, the lens can perform beam shaping on the incident light or the outgoing light, and there is no need to set a lens outside the optical reflection component, which can streamline the optical path.

[0055] Figure 7 This is another schematic plan view of the optical reflection component in the embodiment of this application. As Figure 7As shown, the optical reflection component further includes a housing 90, which is fixed to the outside of the substrate 20 and the magnetic structure 30. A Printed Circuit Board (PCB) 110 may also be provided in the housing 90, and the PCB is used to provide the current required to drive the reflection element 10. The PCB is electrically connected to each pad 60 located on the substrate 20, where part of the pads serve as the current input terminals of the coil, and the other part of the pads serve as the current output terminals of the coil. It should be understood that in addition to the above-mentioned housing packaging method, the chip-level packaging process can also be adopted in this application to reduce the packaging size. For example, the Wafer Level Package can be adopted.

[0056] The wiring method between the pads and the coil will be introduced below through some specific examples. Figure 8 It is a schematic structural diagram of the connection between the pad and the coil in an embodiment of this application. As Figure 8 shown, one end of each wire is connected to the pad, and the other end of each wire runs along the cantilever beam and is connected to the coil. Specifically, the wire led out from the pad 601a runs along the cantilever beam 401 and is connected to one end of the first coil. The wire led out from the other end of the first coil runs along the cantilever beam 402 and is connected to the pad 601b, so that a current loop is formed among the first coil, the pad 601a, and the pad 601b. The wire led out from the pad 602a runs along the cantilever beam 403 and is connected to one end of the second coil. The wire led out from the other end of the second coil runs along the cantilever beam 404 and is connected to the pad 602b, so that a current loop is formed among the second coil, the pad 602a, and the pad 602b.

[0057] Figure 9 It is another schematic structural diagram of the connection between the pad and the coil in an embodiment of this application. As Figure 9 shown, the wire led out from the pad 601a runs along the cantilever beam 401 and is connected to one end of the first coil. The wire led out from the other end of the first coil runs along the cantilever beam 402 and is connected to the pad 601b, so that a current loop is formed among the first coil, the pad 601a, and the pad 601b. The wire led out from the pad 602a runs along the cantilever beam 401 and the cantilever beam 403 in sequence and is connected to one end of the second coil. The wire led out from the other end of the second coil runs along the cantilever beam 404 and the cantilever beam 402 in sequence and is connected to the pad 602b, so that a current loop is formed among the second coil, the pad 602a, and the coil 602b.

[0058] It should be noted that there can be a space for routing wires inside the cantilever beam provided in this application. In the above manner, the wires are routed along the cantilever beam and connected to the coil, avoiding the mutual entanglement of the wires, making the arrangement of the wires neater, and preventing the wires from being pulled by external forces, thus playing a good protective role. Of course, in practical applications, the wires can also have other routing methods. For example, it is also feasible to directly connect the coil and the pad through flying wires, and this application does not specifically limit it.

[0059] Figure 10 Another schematic plan view of the optical reflection component in the embodiment of this application. As Figure 10 shown, the magnetic structure specifically includes a first magnet 301 and a second magnet 302. Among them, the second magnet 302 is located in the middle of the first magnet 301, and the first magnet 301 and the second magnet 302 have opposite magnetic polarities, so that a stable magnetic field can be formed. Specifically, the base 20 is located on the first magnet 301, and the support structure 50 is located on the second magnet 302.

[0060] In the embodiment of this application, the support structure is located on the magnetic structure, and one end of the support structure far from the magnetic structure contacts the reverse side of the reflection element. In the above manner, it is possible to prevent the reflection element in the optical reflection component from generating a relatively large movement in the direction perpendicular to the horizontal plane, and solve the problem that the cantilever beam is easily damaged.

[0061] It should be noted that the optical reflection component provided in this application can be applied to a variety of different scenarios, which will be specifically introduced below.

[0062] Figure 11 A schematic structural diagram of a photographing device provided by the embodiment of this application. As Figure 11 shown, the photographing device includes an optical reflection component 1101, a lens component 1102, and an image sensor 1103. Among them, the optical reflection component 1101 can be the optical reflection component described in any of the above embodiments. Specifically, the optical reflection component 1101 reflects the input light to the lens component 1102, the lens component 1102 guides the input light to the image sensor 1103, and the image sensor 1103 then forms an image according to the input light. It should be understood that during the process of using the above photographing device for photographing, the captured image may be blurred due to hand shaking. The reflection element in the optical reflection component can change the optical path by rotating, so as to compensate for the shake to achieve the anti-shake function. In addition, the shake during the photographing process will also cause a relatively large movement of the photographing device. The support structure can play a role in blocking the reflection element in the reflection component, avoiding the damage to the optical reflection component caused by the shake.

[0063] Figure 12 A schematic structural diagram of an optical switch provided by the embodiment of this application. As Figure 12As shown in the figure, the optical switch includes a first fiber collimator 1201, a second fiber collimator 1202, a first optical reflection array 1203, and a second optical reflection array 1204. Among them, the first optical reflection array 1203 and the second optical reflection array 1204 have similar structures and are both composed of a plurality of optical reflection components introduced in any of the above embodiments. Specifically, the first fiber collimator 1201 directs the input optical signal to the first optical reflection array 1203. The optical reflection components on the first optical reflection array 1203 reflect the optical signal to the second optical reflection array 1204. The optical reflection components on the second optical reflection array 1204 reflect the optical signal to the second fiber collimator 1202 again. The second fiber collimator 1202 outputs the optical signal. It should be understood that the reflection elements in each optical reflection component on the first optical reflection array 1203 can be rotated, and by adjusting the rotation angle, the optical signal can be reflected to any optical reflection component on the second optical reflection array 1204 to achieve optical switching.

[0064] It should be understood that in practical applications, the scenarios to which the optical reflection components provided in this application are applied include but are not limited to the above-listed cases. For example, the optical reflection components can also be applied to other scenarios such as lidar, and details are not elaborated here.

[0065] It should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A light reflection component, characterized in that, Comprising: A reflective element, a substrate, a first cantilever beam, a second cantilever beam, a magnetic structure, and a support structure. Among them, the substrate is located on the magnetic structure, and the reflective element is located in the hollow area in the middle of the substrate; The first end of the reflective element is connected to the substrate through the first cantilever beam, and the second end of the reflective element is connected to the substrate through the second cantilever beam; The front surface of the reflective element is used to reflect incident light, and a coil is provided on the back surface of the reflective element. The coil is used to drive the reflective element to rotate in response to the drive of the magnetic structure; The magnetic structure is used to drive the reflective element to rotate; The support structure is fixed on the magnetic structure. One end of the support structure far from the magnetic structure is in contact with the back surface of the reflective element, and the support structure does not move with the rotation of the reflective element.

2. The optical reflection component according to claim 1, wherein The contact area between the support structure and the reflective element is located at the center of the reflective element.

3. The optical reflection component according to claim 1, characterized in that The material of the support structure is gel, and the support structure is adhesively bonded to the back surface of the reflective element.

4. The optical reflection component according to any one of claims 1 to 3, characterized in that The length of the contact area between the support structure and the reflective element satisfies a first preset condition. The first preset condition is B≤0.1*A, where B represents the length of the contact area and A represents the rotation radius of the reflective element.

5. The optical reflection component according to claim 1, wherein The optical reflection assembly further includes a height-limiting structure and a protection structure. The height-limiting structure is located on the substrate, and the protection structure is located on the height-limiting structure. The protection structure is used to limit the movement amplitude of the reflective element not to exceed the plane where the protection structure is located.

6. The optical reflection component according to claim 5, wherein The protection structure is a light-transmitting element.

7. The optical reflection component according to claim 5, characterized in that, The protection structure is a protection frame. The middle of the protection frame is hollow, and the length of the hollow area in the middle of the protection frame is less than the length of the reflective element in at least one direction.

8. The optical reflection component according to claim 5, characterized in that, The protection structure is a lens, and the lens is used to refract incident light to the reflective element.

9. The optical reflection component according to any one of claims 5 to 8, characterized in that, The height of the height-limiting structure satisfies a second preset condition. The second preset condition is: H≥R*tanθ, where H represents the height of the height-limiting structure, R represents the maximum rotation radius of the reflective element, and θ represents the maximum rotation angle of the reflective element.

10. The optical reflection component according to any one of claims 5 to 8, characterized in that, The height-limiting structure is fixed together with the protection structure by means of screen printing.

11. The optical reflection component according to any one of claims 1 to 3, characterized in that, The first cantilever beam and the second cantilever beam are located on different sides of the reflective element and are arranged along a first axial direction.

12. The optical reflection component according to claim 11, characterized in that, The third end of the reflective element is connected to the substrate through a third cantilever beam, and the fourth end of the reflective element is connected to the substrate through a fourth cantilever beam.

13. The optical reflection component according to claim 12, wherein, The third cantilever beam and the fourth cantilever beam are located on different sides of the reflective element and are arranged along a second axial direction. The magnetic structure is further used to drive the reflective element to rotate around the first axial direction. The first axial direction and the second axial direction are in the same plane and perpendicular to each other.

14. The optical reflection component according to any one of claims 1 to 3, characterized in that, The coil is electrically connected to the pad on the substrate through a wire to form a circuit. The wire is used to transmit current so that the coil generates electromagnetic force and drives the reflective element to rotate.

15. The optical reflection component according to claim 14, wherein, The wire includes a first wire and a second wire, the pad includes a first pad and a second pad, one end of the first wire is connected to the first pad, the other end of the first wire runs along the first cantilever beam and is connected to the coil, one end of the second wire is connected to the second pad, and the other end of the second wire runs along the second cantilever beam and is connected to the coil.

16. The optical reflection component according to claim 15, characterized in that, The optical reflection component further includes a printed circuit board (PCB), the PCB is electrically connected to the first pad and the second pad, the PCB is used to output current to the first pad, and the current is input into the coil through the first wire and transmitted to the second pad through the second wire.

17. The optical reflection component according to any one of claims 1 to 3, characterized in that, The magnetic structure includes a first magnet and a second magnet, the magnetic properties of the first magnet and the second magnet are opposite, the second magnet is located between the first magnets, the substrate is located on the first magnet, and the support structure is located on the second magnet.

18. The optical reflection component according to any one of claims 1 to 3, characterized in that The optical reflection component further includes a housing, and the housing is fixed outside the magnetic structure and the substrate.

19. The optical reflection component according to any one of claims 1 to 3, characterized in that, The reflection element is a plane mirror or a curved mirror.

20. An optical switch, characterized in that, Comprising: A first fiber collimator, a second fiber collimator, a first optical reflection array, and a second optical reflection array. The first optical reflection array includes a plurality of optical reflection components as described in any one of claims 1-19, and the second optical reflection array includes a plurality of optical reflection components as described in any one of claims 1-19; The first fiber collimator is used to direct the input optical signal to the first optical reflection array; The optical reflection components on the first optical reflection array are used to reflect the optical signal to the optical reflection components on the second optical reflection array; The optical reflection components on the second optical reflection array are used to reflect the optical signal to the second fiber collimator; The second fiber collimator is used to output the optical signal.

21. A photographing device, characterized in that, Comprising: An optical reflection component, a lens component, and an image sensor as described in any one of claims 1-19; The optical reflection component is used to reflect the input light to the lens component; The lens component is used to direct the input light to the image sensor; The image sensor is used to perform imaging based on the input light.

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