A vacuum chuck, nanoimprinting equipment and control method thereof

Abstract

The present invention discloses a vacuum suction cup, a nanoimprinting device and a control method thereof, which are used for a nanoimprinting device, wherein the nanoimprinting device comprises a rolling mechanism, and the vacuum suction cup comprises: a suction cup body; an adsorption hole, wherein the adsorption hole array is arranged on the suction cup body, and one or more rows of adsorption holes in a direction perpendicular to the rolling forward direction of the rolling mechanism are connected to form an adsorption unit, and the adsorption hole array forms a plurality of adsorption units. The benefit of the present invention is that by setting the adsorption holes arranged in an array, vacuum is gradually sucked during the imprinting process, so that wrinkles and bubbles do not appear in the soft film during the imprinting process, and at the same time, the soft film and the substrate are more closely matched, and the imprinting effect is better. After the processing is completed, the vacuum is gradually broken, which is convenient for taking the soft film.

Description

Technical Field

[0001] The present invention relates to the technical field of nanoimprinting, and in particular to a vacuum chuck, nanoimprinting equipment and a control method thereof. Background Art

[0002] During the nanoimprinting process, a suction cup is required to adsorb and fix the substrate. However, during the imprinting process, relative movement will occur between the soft film and the substrate, or bubbles or wrinkles will appear in the soft film during processing, resulting in poor imprinting effect and failure of imprinting of a certain part, which will affect the next step of processing. Summary of the invention

[0003] In order to solve the above technical problems, the present invention discloses a vacuum suction cup, a nanoimprinting device and a control method thereof. By setting an array of adsorption holes, during the imprinting process, as the soft film is attached to the suction cup, the vacuum is gradually absorbed, and the soft film is fixed on the suction cup. After the processing is completed, the vacuum is gradually broken, so that the soft film can be easily taken and placed.

[0004] Specifically, the present invention discloses a vacuum suction cup for use in a nanoimprinting device, wherein the nanoimprinting device includes a rolling mechanism, and the vacuum suction cup includes: a suction cup body; adsorption holes, wherein an adsorption hole array is arranged on the suction cup body, and one or more columns of adsorption holes along a direction perpendicular to the rolling forward direction of the rolling mechanism are connected to form an adsorption unit, and the adsorption hole array forms a plurality of adsorption units.

[0005] The benefit of the present invention lies in that, by providing an array of adsorption holes, vacuum is gradually absorbed during the imprinting process, so that the soft film does not have wrinkles and bubbles during the imprinting process, and at the same time, the soft film and the substrate are more closely matched, and the imprinting effect is better. After the processing is completed, the vacuum is gradually broken to facilitate the removal of the soft film.

[0006] Furthermore, the adsorption unit is connected to a negative pressure control device, and the negative pressure control device can independently control the adsorption unit.

[0007] The benefit of adopting the above technical solution is that, by providing a negative pressure control device, each adsorption unit can be individually controlled during the processing, so that each adsorption unit can act independently.

[0008] Furthermore, the negative pressure control device is connected to the vacuum generating device.

[0009] The advantage of adopting the above technical solution is that the vacuum generating device is used to form a vacuum environment in the adsorption unit, adsorb the soft film during the processing, and make the soft film flat.

[0010] Furthermore, a positioning groove is provided on the upper surface of the suction cup body, a plurality of annular vacuum grooves are provided in the positioning groove, and air holes are provided in the vacuum groove.

[0011] The benefit of adopting the above technical solution is that the product is positioned by providing a positioning groove, and a vacuum groove and air holes are provided in the positioning groove for vacuuming, so as to further fix the product.

[0012] Furthermore, a through groove penetrating the vacuum groove is arranged in the positioning groove.

[0013] The advantage of adopting the above technical solution is that the through groove is connected to the vacuum groove. During suction, the air in the vacuum groove can be discharged through each pore, thus avoiding the situation where the adsorbed product is uneven due to blockage of the pores in the vacuum groove.

[0014] Furthermore, the vacuum groove is provided with chamfers or roundings.

[0015] The benefit of adopting the above technical solution is that, during the process of adsorbing the product, suction will be generated inside the vacuum groove to suck the product, and the adsorbed area of ​​the product will produce a certain concave deformation, which may cause strain on the surface of the product. This phenomenon can be better avoided by setting chamfers or rounding on the vacuum suction groove.

[0016] Furthermore, the chamfer or rounding does not exceed 0.5 mm.

[0017] Furthermore, a nanoimprinting device includes a rolling mechanism and a vacuum suction cup as described in any of the above technical solutions.

[0018] The benefit of adopting the above technical solution is that a nanoimprinting device includes a vacuum suction cup, which can be used to adsorb the soft film during the processing process, so that wrinkles and bubbles appear on the soft film to achieve a good imprinting effect.

[0019] Furthermore, a vacuum chuck control method comprises the following steps:

[0020] Step 1: an adsorption hole array is arranged on the vacuum suction cup body, and one or more rows of adsorption holes are connected in a direction perpendicular to the rolling direction of the rolling mechanism to form an adsorption unit; the adsorption hole array forms a plurality of adsorption units; a negative pressure control device is used to use the positioning groove to absorb vacuum through the adsorption holes to fix the product;

[0021] Step 2, the negative pressure control device controls each adsorption unit to gradually increase the vacuum absorption of the adsorption unit during the rolling process of the rolling mechanism;

[0022] Step three, the negative pressure control device controls the adsorption unit to gradually break the vacuum in the reverse direction after the rolling mechanism completes the imprinting.

[0023] The benefit of adopting the above technical solution is that the vacuum suction cup working through the above steps adsorbs the soft film and the product during the processing, gradually absorbs the vacuum during the processing, and gradually breaks the vacuum after the processing is completed, which is convenient for taking and placing the soft film. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0025] Figure 1 It is a schematic diagram of the structure of the vacuum suction cup of the present invention.

[0026] The reference numerals in the accompanying drawings are as follows:

[0027] The suction cup body 1 has an exhaust hole 11 , an adsorption hole 2 , a positioning groove 12 , a vacuum groove 13 , and a through groove 14 . DETAILED DESCRIPTION

[0028] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0029] As shown in the figure, the present invention discloses a vacuum suction cup for use in a nanoimprinting device, wherein the nanoimprinting device includes a rolling mechanism, and the vacuum suction cup includes: a suction cup body 1; adsorption holes 2, wherein an array of adsorption holes 2 is arranged on the suction cup body 1, and one or more rows of adsorption holes 2 along a direction perpendicular to the rolling forward direction of the rolling mechanism are connected to form an adsorption unit, and the array of adsorption holes 2 forms a plurality of adsorption units.

[0030] The benefit of the present invention is that by providing an array of adsorption holes 2, vacuum is gradually absorbed during the imprinting process, so that the soft film does not have wrinkles and bubbles during the imprinting process, and at the same time, the soft film and the substrate are more closely matched, and the imprinting effect is better. After the processing is completed, the vacuum is gradually broken to facilitate the removal of the soft film.

[0031] In some embodiments, the adsorption unit may adopt the following structural scheme, wherein the adsorption unit is connected to a negative pressure control device, and the negative pressure control device can independently control the adsorption unit.

[0032] The benefit of adopting the above technical solution is that, by providing a negative pressure control device, each adsorption unit can be individually controlled during the processing, so that each adsorption unit can act independently.

[0033] In some embodiments, the negative pressure control device may adopt the following structural scheme, wherein the negative pressure control device is connected to a vacuum generating device, and the negative pressure control device may be a solenoid valve.

[0034] The advantage of adopting the above technical solution is that the vacuum generating device is used to form a vacuum environment in the adsorption unit, adsorb the soft film during the processing, and make the soft film flat.

[0035] In some embodiments, the suction cup body 1 can adopt the following structural scheme, wherein a positioning groove 12 is further provided on the upper surface of the suction cup body 1, a plurality of annular vacuum grooves 13 are provided in the positioning groove 12, and air holes are provided in the vacuum groove 13, and the air holes are connected to the exhaust hole 11 provided on the side of the suction cup body.

[0036] The benefit of adopting the above technical solution is that the product is positioned by providing the positioning groove 12, and a vacuum groove 13 and air holes are provided in the positioning groove 12 for vacuuming, so as to further fix the product.

[0037] In some embodiments, the positioning groove 12 may adopt the following structural scheme, in which a through groove 14 penetrating the vacuum groove 13 is provided in the positioning groove 12 .

[0038] The advantage of adopting the above technical solution is that the through groove 14 is connected to the vacuum groove 13. During suction, the air in the vacuum groove 13 can be discharged through each pore, thereby avoiding the situation where the adsorbed product is uneven due to the blockage of the pores in the vacuum groove 13.

[0039] In some embodiments, the exhaust hole 11 may adopt the following structural scheme, wherein the exhaust hole 11 is connected to a solenoid valve and a vacuum generating device, the vacuum generating device is connected to the solenoid valve through an air pipe, and one solenoid valve is connected to one exhaust hole 11 through an air pipe.

[0040] The benefit of adopting the above technical solution is that the solenoid valve is used to control the exhaust hole 11 to achieve gradual exhaust, and the vacuum generating device is used to absorb vacuum.

[0041] In some embodiments, the vacuum groove 13 may adopt the following structural scheme, and the vacuum groove 13 is provided with chamfers or roundings.

[0042] The benefit of adopting the above technical solution is that, during the process of adsorbing the product, suction will be generated inside the vacuum groove 13 to suck the product, and the adsorbed area of ​​the product will produce a certain concave deformation, which may cause damage to the surface of the product. This phenomenon can be better avoided by setting chamfers or rounding on the vacuum suction groove.

[0043] In some embodiments, the chamfer or rounding may adopt the following structural scheme, and the chamfer or rounding does not exceed 0.5 mm.

[0044] The present invention also discloses a nano-imprinting device, comprising a rolling mechanism and a vacuum suction cup as described in any one of the above technical solutions.

[0045] The benefit of adopting the above technical solution is that a nanoimprinting device includes a vacuum suction cup, which can be used to adsorb the soft film during the processing process, so that wrinkles and bubbles appear on the soft film to achieve a good imprinting effect.

[0046] The present invention also discloses a vacuum suction cup control method, comprising the following steps:

[0047] Step 1: an array of adsorption holes 2 is arranged on the vacuum suction cup body 1, and one or more rows of adsorption holes 2 are connected in a direction perpendicular to the rolling direction of the rolling mechanism to form an adsorption unit; the array of adsorption holes 2 forms a plurality of adsorption units; a negative pressure control device is used to use the positioning groove 12 to absorb vacuum through the adsorption holes 2 to fix the product;

[0048] Step 2, the negative pressure control device controls each adsorption unit to gradually increase the vacuum absorption of the adsorption unit during the rolling process of the rolling mechanism;

[0049] Step three, the negative pressure control device controls the adsorption unit to gradually break the vacuum in the reverse direction after the rolling mechanism completes the imprinting.

[0050] The benefit of adopting the above technical solution is that the vacuum suction cup working through the above steps adsorbs the soft film and the product during the processing, gradually absorbs the vacuum during the processing, and gradually breaks the vacuum after the processing is completed, which is convenient for taking and placing the soft film.

[0051] For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, all of which fall within the protection scope of the present invention.

Claims

1. A vacuum chuck for a nanoimprinting device, wherein the nanoimprinting device comprises a rolling mechanism, characterized in that: The vacuum chuck comprises: Suction cup body (1); Adsorption holes (2), wherein the adsorption holes (2) are arranged in an array on the suction cup body (1), and one or more rows of adsorption holes (2) in a direction perpendicular to the rolling forward direction of the rolling mechanism are connected to form an adsorption unit, and the adsorption holes (2) array forms a plurality of adsorption units; wherein, The adsorption unit is connected to a negative pressure control device, and the negative pressure control device can independently control the adsorption unit; and wherein, The upper surface of the suction cup body (1) is also provided with a positioning groove (12), a plurality of annular vacuum grooves (13) are provided in the positioning groove (12), and air holes are provided in the vacuum groove (13); and a through groove (14) penetrating the vacuum groove (13) is provided in the positioning groove (12).

2. The vacuum suction cup according to claim 1, characterized in that: The negative pressure control device is connected to the vacuum generating device.

3. The vacuum suction cup according to claim 1, characterized in that: The vacuum groove (13) is provided with a chamfer or a rounded corner.

4. The vacuum suction cup according to claim 3, characterized in that: The chamfer or rounding does not exceed 0.5 mm.

5. A nanoimprinting device, comprising a rolling mechanism, characterized in that: The invention comprises the vacuum suction cup as described in any one of claims 1 to 4.

6. A vacuum suction cup control method, characterized in that: Using the vacuum suction cup as described in any one of claims 1 to 4, the method comprises the following steps: Step 1: an array of adsorption holes (2) is provided on the vacuum suction cup body (1); one or more rows of adsorption holes (2) are connected in a direction perpendicular to the rolling direction of the rolling mechanism to form an adsorption unit; the array of adsorption holes (2) forms a plurality of adsorption units; a negative pressure control device is used to use the positioning groove (12) to absorb vacuum through the adsorption holes (2) to fix the product; Step 2, the negative pressure control device controls each adsorption unit to gradually increase the vacuum absorption of the adsorption unit during the rolling process of the rolling mechanism; Step three, the negative pressure control device controls the adsorption unit to gradually break the vacuum in the reverse direction after the rolling mechanism completes the imprinting.

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