A control system and method for intelligently obtaining workpiece processing (WPH) in a wafer production line

Abstract

A kind of control system of wafer production line intelligent acquisition dispatch WPH, comprising: synchronization module, according to dispatch preprocessing program requirement synchronization equipment wafer production capacity peak (PWPH) per hour operation, to automatically obtain standard basic data;Intelligent acquisition automatic dispatch wafer production capacity (WPH) per hour operation module, to automatically obtain the wafer production capacity peak (PWPH) per hour operation of equipment as basic data, intelligent acquisition automatic dispatch wafer production capacity (WPH) per hour operation;Application module, to final version automatic dispatch wafer production capacity (WPH) per hour operation is presented in the form of visual interface, and is applied in intelligent dispatch Q-time model, to calculate downstream capacity, and according to the calculation result, determine whether Q-time starting site is put in goods.This application can not only accurately control automatic dispatch, reduce human intervention, but also reduce product quality risk, worthy of industry to use.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to a control system and method for intelligently obtaining work-in-process (WPH) of a wafer production line. BACKGROUND

[0002] As is known, due to process limitations, a maximum waiting time (Queue Time, Q-time) needs to be set at a key station in semiconductor wafer manufacturing. If the waiting time is exceeded without entering the equipment for operation, the wafer manufacturing unit product (LOT) is at risk of being scrapped. Therefore, the capacity of each station needs to be considered when dispatching, that is, the capacity of each downstream station is considered when dispatching at the Q-time starting station.

[0003] The capacity of the equipment is related to the production capacity peak of wafers per hour (Peak Wafer Per Hour, PWPH). However, if the production capacity peak of wafers per hour (PWPH) is directly used to guide dispatching, it will inevitably lead to Q-time exceeding. On the other hand, if the production capacity peak of wafers per hour (PWPH) for automatic dispatching is estimated only by experience or simple data collection, there are problems such as poor accuracy and lack of intelligence.

[0004] It has become one of the technical problems to be solved by those skilled in the art to seek a process and algorithm to automatically obtain the WPH for automatic dispatching.

[0005] Therefore, in view of the problems in the prior art, the present application is designed by the present inventor with years of experience in this field, and actively researches and improves, thereby providing a control system and method for intelligently obtaining WPH of a wafer production line. SUMMARY

[0006] A first object of the present application is to provide a control system for intelligently obtaining WPH of a wafer production line to overcome the defects of poor accuracy and lack of intelligence in the traditional automatic dispatching process and algorithm in the prior art.

[0007] A second object of the present application is to provide a control method for the control system for intelligently obtaining WPH of a wafer production line to overcome the defects of poor accuracy and lack of intelligence in the traditional automatic dispatching process and algorithm in the prior art.

[0008] To achieve the first object of the present application, the present application provides a control system and method for intelligently obtaining WPH of a wafer production line. The control system for intelligently obtaining WPH of a wafer production line comprises:

[0009] A synchronization module automatically synchronizes the production capacity peak (PWPH) of the device per hour wafer job from the manufacturing execution system server to the manufacturing department server where the dispatch pre-processing program is located according to the requirements of the dispatch pre-processing program, so as to automatically obtain standard basic data;

[0010] An intelligent WPH acquisition module is used to intelligently acquire the production capacity (WPH) of the automatic dispatch per hour wafer job based on the production capacity peak (PWPH) of the device per hour wafer job automatically acquired, and further includes a pre-processing module, a calculation module and an output module controlled by a control module;

[0011] An application module is used to display the production capacity (WPH) of the final automatic dispatch per hour wafer job in a visual interface form, and is applied in an intelligent dispatch Q-time model to calculate downstream capacity and determine whether the Q-time starting site is put into stock according to the calculation result.

[0012] Optionally, the production capacity (WPH) of the automatic dispatch per hour wafer job is divided into machine automatic dispatch WPH and cavity automatic dispatch WPH.

[0013] Optionally, when the production capacity peak (PWPH) of the device per hour wafer job needs to be synchronized, the device with cavities provides the production capacity peak (PWPH) of the device per hour wafer job corresponding to the cavities, and the device without cavities provides the production capacity peak (PWPH) of the device per hour wafer job corresponding to the machine.

[0014] Optionally, the synchronization module further includes a first unit of an instant update process and a second unit of an arrival time frequency update process.

[0015] Optionally, the first unit of the instant update process includes at least one of the following triggering conditions: adding a device, adding production capacity, changing production capacity, improving the device to cause the production capacity peak (PWPH) of the device per hour wafer job to be greater than or equal to 10%, and damaging the device to cause the production capacity peak (PWPH) of the device per hour wafer job to be less than or equal to 10%.

[0016] Optionally, the second unit of the arrival time frequency update process is triggered at a fixed time every month.

[0017] In order to achieve another object of the present application, the present application provides a control method of a wafer production line intelligent dispatch WPH control system, which comprises:

[0018] The execution step S1: the synchronization module synchronizes the peak wafer per hour (PWPH) of the production capacity of the device per hour job wafer from the manufacturing execution system server to the manufacturing department server where the dispatch preprocessor is located according to the requirements of the dispatch preprocessor, so as to automatically obtain the standard basic data;

[0019] The execution step S2: the intelligent acquisition of the automatic dispatch of the production capacity of the wafer per hour job (WPH) module takes the peak wafer per hour (PWPH) of the production capacity of the device per hour job wafer as the basic data, and intelligently acquires the production capacity of the wafer per hour job (WPH) of the automatic dispatch;

[0020] The execution step S3: the final version of the production capacity of the wafer per hour job (WPH) of the automatic dispatch is output by the output module under the control of the control module and after the adjustment of the production line personnel and the automatic dispatch personnel according to the actual situation of the production line and the capacity control;

[0021] The execution step S4: the application module displays the final version of the production capacity of the wafer per hour job (WPH) of the automatic dispatch in the form of an interface, and applies it in the intelligent dispatch Q-time model to calculate the downstream capacity, and determines whether the Q-time starting station is put into stock according to the calculation result.

[0022] Optionally, the intelligent acquisition of the production capacity of the wafer per hour job (WPH) of the automatic dispatch further comprises:

[0023] The execution step S21: the effective overall equipment effectiveness (OEE) of the device is screened by the preprocessing module, the effective flow is screened, and the production capacity corresponding to the pass ratio M of the Q-time is screened i And the weighted average pass ratio C is obtained;

[0024] The execution step S22: according to the data of step S21, the calculation module is calculated to obtain the initial version of the production capacity of the wafer per hour job (WPH) of the automatic dispatch, and the production line personnel and the automatic dispatch personnel adjust the final version of the production capacity of the wafer per hour job (WPH) of the automatic dispatch according to the actual situation of the production line and the capacity control.

[0025] Optionally, the pass ratio M i is C is

[0026] Optionally, the production capacity of the wafer per hour job (WPH) of the automatic dispatch is: automatic dispatch WPH=peak wafer per hour (PWPH) of the production capacity of the wafer per hour job × Ratio.

[0027] In summary, the wafer production line intelligent control system for obtaining dispatch WPH synchronizes the production capacity peak value (Peak Wafer Per Hour, PWPH) of the wafer per hour of the equipment according to the dispatch preprocessing program requirement through the synchronization module, automatically obtains the standard basic data, and uses the intelligent automatic dispatch wafer per hour production capacity (WPH) module to take the production capacity peak value (PWPH) of the wafer per hour of the equipment as the basic data, intelligently obtains the automatic dispatch wafer per hour production capacity (WPH), and is used for guiding actual dispatch. The wafer production line intelligent control system for obtaining dispatch WPH not only can accurately control the automatic dispatch and reduce human intervention, but also reduces the product quality risk, and is worth popularization and application in the industry. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 Fig. 1 shows a framework structure schematic diagram of the wafer production line intelligent control system for obtaining dispatch WPH.

[0029] Figure 2 Fig. 2 shows a real-time update flow chart of the production capacity peak value (PWPH) of the wafer per hour of the equipment manufacturing execution system server.

[0030] Figure 3 Fig. 3 shows a time frequency update flow chart of the production capacity peak value (PWPH) of the wafer per hour of the equipment manufacturing execution system server.

[0031] Figure 4 Fig. 4 shows a flow chart of the wafer production line intelligent control method for obtaining dispatch WPH.

[0032] Figure 5 Fig. 5 shows a schematic diagram of the wafer per hour production capacity (WPH) of the automatic dispatch in the form of an interface.

[0033] Figure 6 Fig. 6 shows an example diagram of the wafer per hour production capacity (WPH) of the automatic dispatch applied to a delivery model.

[0034] Figure 7 Fig. 7 shows an application achievement diagram of the wafer production line intelligent control system for obtaining dispatch WPH. DETAILED DESCRIPTION

[0035] To explain the technical content, structural features, purposes and effects of the present application in detail, the embodiments will be described in detail below with reference to the drawings.

[0036] Please refer to Figure 1 , Figure 1 Fig. 1 shows a framework structure schematic diagram of the wafer production line intelligent control system for obtaining dispatch WPH. The wafer production line intelligent control system for obtaining dispatch WPH comprises:

[0037] a synchronization module 10, which synchronizes the peak wafer per hour (PWPH) of the production capacity of the device per hour job wafers from the manufacturing execution system server to the manufacturing department server where the dispatch pre-processing program is located, according to the requirements of the dispatch pre-processing program, so as to automatically obtain the standard basic data;

[0038] an intelligent automatic dispatch wafer per hour (WPH) production capacity module 20, which takes the automatically obtained peak wafer per hour (PWPH) of the device per hour job wafers as the basic data, intelligently obtains the automatic dispatch wafer per hour (WPH) production capacity, and further includes a pre-processing module 22, a calculation module 23, and an output module 24 controlled by a control module 21;

[0039] an application module 30, which displays the final automatic dispatch wafer per hour (WPH) production capacity in a visual interface form, and applies it in the intelligent dispatch Q-time model to calculate the downstream capacity, and determines whether the Q-time starting station is put on stock according to the calculation result.

[0040] In order to more directly disclose the technical solutions of the present application and highlight the beneficial effects of the present application, the wafer production line intelligent dispatch WPH control system and method will be described in conjunction with specific embodiments. In the specific embodiments, the specific values involved in the IE engineers, PE engineers, production line personnel, automatic dispatch personnel, and applications are only for illustration and should not be regarded as a limitation on the technical solutions of the present application.

[0041] Please continue to refer to Figure 1 As a person skilled in the art, it is easy to understand that the peak wafer per hour (PWPH) of the production capacity of the device per hour job wafers is provided by the IE engineer. Since the peak wafer per hour (PWPH) of the production capacity of the device per hour job wafers is obtained from the manufacturing execution system server, and the dispatch pre-processing program is located in the manufacturing department server, it is necessary to synchronize the peak wafer per hour (PWPH) of the production capacity of the device per hour job wafers according to the requirements of the dispatch pre-processing program.

[0042] In addition, since the automatic dispatching of the production capacity of wafers per hour (WPH) is divided into the automatic dispatching of the whole machine WPH and the automatic dispatching of the cavity WPH, that is, the equipment has no cavity, and the equipment is operated in the form of the whole machine, the capacity of the machine is the automatic dispatching WPH of the whole machine; the equipment has a cavity, and the equipment is operated in the form of the cavity, the capacity of each cavity is different, and the capacity of the cavity with the smallest capacity of the machine is the capacity of the machine, that is, the bottleneck cavity (Bottleneck) automatic dispatching WPH. When the peak value of the production capacity of wafers per hour (PWPH) of the equipment is required to be synchronized, the equipment with the cavity provides the peak value of the production capacity of wafers per hour (PWPH) corresponding to the cavity, and the equipment without the cavity provides the peak value of the production capacity of wafers per hour (PWPH) corresponding to the whole machine.

[0043] Referring to Figure 2 、 Figure 3 , and in combination with referring to Figure 1 , Figure 2 , the peak value of the production capacity of wafers per hour (PWPH) of the manufacturing execution system server equipment is shown in the real-time updating flowchart. Figure 3 The peak value of the production capacity of wafers per hour (PWPH) of the manufacturing execution system server equipment is shown in the arrival time frequency updating flowchart. The synchronization module 10 further comprises a first unit of the real-time updating flow and a second unit of the arrival time frequency updating flow, specifically:

[0044] 1. The first unit of the real-time updating flow

[0045] 1.1 Define the updating standard: including but not limited to adding equipment, adding production capacity, changing production capacity, equipment improvement leading to the peak value of the production capacity of wafers per hour (PWPH) ≥10%, and equipment damage leading to the peak value of the production capacity of wafers per hour (PWPH) ≤10%.

[0046] 1.2 The updating flow is as follows: the PE engineer informs the manufacturing department of the change of the peak value of the production capacity of wafers per hour (PWPH) through a document, the manufacturing department machine responsible person maintains the area to which the production capacity belongs, and then the automatic dispatching determines whether the bottleneck cavity is changed according to the data provided by the PE engineer, and then the production line personnel determine the final peak value of the production capacity of wafers per hour (PWPH) of the bottleneck cavity according to the data provided by the PE engineer.

[0047] 2. The second unit of the arrival time frequency updating flow

[0048] 2.1 Define the updating standard: the time frequency is fixed every month.

[0049] 2.2 Update process as follows: monthly by IE engineers and PE engineers to provide hourly job wafer production capacity peak (PWPH), automatic dispatch according to the latest hourly job wafer production capacity peak (PWPH) check if there is missing. If there is missing, manufacturing department corresponding equipment responsible person from the corresponding PE engineer to obtain missing hourly job wafer production capacity peak (PWPH), manual maintenance; if there is no missing, update is complete.

[0050] Referring to Figure 4 , and referring to Figure 1 , Figure 4 The flow chart of the wafer production line intelligent acquisition of the WPH control method is shown in the figure. The wafer production line intelligent acquisition of the WPH control method comprises:

[0051] Step S1 is executed: the synchronization module 10 acquires the peak wafer per hour (PWPH) of the equipment from the manufacturing execution system server according to the requirements of the dispatch preprocessing program, and synchronizes the peak wafer per hour (PWPH) of the equipment to the manufacturing department server where the dispatch preprocessing program is located, so as to automatically acquire standard basic data;

[0052] Step S2 is executed: the intelligent acquisition of the automatic dispatch wafer production capacity (WPH) module 20 takes the peak wafer per hour (PWPH) of the equipment as the basic data, and intelligently acquires the automatic dispatch wafer production capacity (WPH), and further comprises:

[0053] Step S21 is executed: the effective overall equipment effectiveness (OEE) of the equipment is screened through the preprocessing module 22, the effective flow is screened, and the production capacity corresponding to the pass ratio M involving Q-time is screened i And the weighted average pass ratio C is obtained;

[0054] Step S22 is executed: according to the data of step S21, the initial version of the automatic dispatch wafer production capacity (WPH) is obtained by calculating the calculation module 23, and the production line personnel and the automatic dispatch personnel adjust the final version of the automatic dispatch wafer production capacity (WPH) according to the actual situation of the production line and the production capacity control;

[0055] Step S3 is executed: controlled by the control module 21, and the final version of the automatic dispatch wafer production capacity (WPH) is output through the output module 24 after the production line personnel and the automatic dispatch personnel adjust according to the actual situation of the production line and the production capacity control;

[0056] Step S4: The application module 30 presents the production capacity of the final version of the automatic dispatching of the hourly job wafer (WPH) in the form of a visual interface, and applies it in the intelligent dispatching Q-time model to calculate the downstream capacity, and determines whether the Q-time starting site is put into stock according to the calculation result.

[0057] Please continue to refer to Figure 1 , the intelligent acquisition of the automatic dispatching of the production capacity of the hourly job wafer (WPH) module 20 further includes a preprocessing module 22, a calculation module 23, and an output module 24 controlled by the control module 21. The preprocessing module 22 is used to screen the effective overall equipment efficiency (Overall Equipment Effectiveness, OEE), screen the effective flow, and screen the production capacity corresponding to the pass ratio M i and the weighted average pass ratio C related to Q-time. Specifically,

[0058] 1. Screen the effective overall equipment efficiency (Overall Equipment Effectiveness, OEE): Record the OEE of each device every day, and take the 3σ value as the effective OEE, that is, eliminate outliers.

[0059] 2. Screen the effective flow: At the beginning of each month, according to the monthly production plan and the WIP (Work In Progress) of the production line, take the production involving all flows as the effective flow, marked as F i .

[0060] 3. Screen the production capacity corresponding to the pass ratio M i and the weighted average pass ratio C related to Q-time: Each flow defines the production capacity used at each station. Each production capacity is divided into ① production capacity without Q-time. ② Production capacity with all Q-time. ③ Production capacity with some Q-time and some without Q-time. Let the pass ratio M i be,

[0061]

[0062] When the production capacity does not involve Q-time, M i is 0; when the production capacity partially involves Q-time, M i ∈(0, 1); when the production capacity involves all Q-time, M i is 1.

[0063] 4. Weighted average production capacity pass ratio C

[0064] Non-limitingly, if:

[0065] Ratio M1 [M2] [M3] …… M k ]]> Frequency [N1] [N2] [N3] …… <![CDATA[N k ]]>

[0066] The weighted average production capacity pass ratio is,

[0067]

[0068] Definition,

[0069]

[0070] Please refer to Table 1, which is not limited, the calculation process of Ratio is as follows:

[0071] Table 1 Calculation process of Ratio

[0072]

[0073] Please continue to refer to Figure 1 , the calculation module 23 carries out calculation to obtain the initial edition automatic dispatching per hour operation wafer production capacity (WPH), and the production line personnel and the automatic dispatching personnel adjust according to the actual situation of the production line and the production capacity control to obtain the final edition automatic dispatching per hour operation wafer production capacity (WPH). Specifically,

[0074] 1. Obtain the initial edition automatic dispatching WPH: the automatic dispatching WPH is,

[0075] Automatic dispatching WPH = per hour operation wafer production capacity peak (PWPH) × Ratio.

[0076] More specifically, check the effective OEE at the beginning of each month, and when M i is 0 or 1, the automatic dispatching per hour operation wafer production capacity (WPH) is: automatic dispatching WPH = PWPH × OEE; when M i ∈(0,1), automatic dispatching WPH = PWPH × C × OEE.

[0077] 2. For the initial edition automatic dispatching per hour operation wafer production capacity (WPH), the production line personnel and the automatic dispatching personnel adjust according to the actual situation of the production line and the production capacity control to obtain the final edition automatic dispatching per hour operation wafer production capacity (WPH).

[0078] Please continue to refer to Figure 1 , controlled by the control module 21, and output by the output module 24 to the final edition automatic dispatching per hour operation wafer production capacity (WPH) adjusted by the production line personnel and the automatic dispatching personnel according to the actual situation of the production line and the production capacity control.

[0079] Please refer to Figure 5 , Figure 6 , Figure 5The automatic dispatching per-hour job wafer production capacity (WPH) is shown in the schematic diagram of the visual interface. Figure 6 The automatic dispatching per-hour job wafer production capacity (WPH) is applied to the put-away model example diagram. The application module 30 displays the final automatic dispatching per-hour job wafer production capacity (WPH) in the visual interface and applies it to the intelligent dispatching Q-time model to calculate the downstream capacity and determine whether the Q-time starting site is put away according to the calculation result. The interface settings include but are not limited to device name, production capacity, PWPH, and automatic dispatching WPH information.

[0080] The automatic dispatching per-hour job wafer production capacity (WPH) is applied to the intelligent dispatching Q-time model to calculate the downstream capacity and determine whether the Q-time starting site is put away according to the calculation result, and the underlying data is applied to determine whether the capacity of each downstream site that can accommodate the product of each starting site has reached the upper limit calculated by the automatic dispatching WPH.

[0081] Please refer to Figure 7 , Figure 7 The control system application results of the wafer production line intelligent acquisition of dispatching WPH are shown in the diagram. The control system of the wafer production line intelligent acquisition of dispatching WPH is applied to the wafer production line intelligent acquisition of dispatching WPH. Figure 7 It can be seen that the number of wafer manufacturing unit products (LOT) per day that exceeds the Q-time is reduced and remains stable. Specifically, the number of wafer manufacturing unit products (LOT) per day that exceeds the Q-time is reduced from 120 to 56.

[0082] In summary, the control system of the wafer production line intelligent acquisition of dispatching WPH synchronizes the peak production capacity of per-hour job wafers (PWPH) of the equipment according to the dispatching preprocessing program requirements through the synchronization module, automatically acquires standard basic data, and uses the intelligent acquisition of automatic dispatching per-hour job wafer production capacity (WPH) module to acquire the peak production capacity of per-hour job wafers (PWPH) of the equipment as the basic data, intelligently acquires the automatic dispatching per-hour job wafer production capacity (WPH), and guides the actual dispatching. Not only can it accurately control the automatic dispatching and reduce human intervention, but also reduce the risk of product quality, and is worth popularizing and using in the industry.

[0083] Those skilled in the art should understand that various modifications and variations can be made to the present application without departing from the spirit or scope of the present application. Thus, if any modification or variation falls within the scope of the appended claims and their equivalents, it is considered that the present application encompasses these modifications and variations.

Claims

1. A control system for intelligently acquiring the work permit (WPH) of a wafer production line, characterized in that, The control system for intelligently acquiring the work permit WPH of the wafer production line includes: The synchronization module synchronizes the peak hourly wafer production capacity (PeakWaferPerHour, PWPH) of the equipment from the manufacturing execution system server to the manufacturing department server where the dispatch preprocessing program is located, according to the requirements of the dispatch preprocessing program, in order to automatically obtain standard basic data. The intelligent module for acquiring the hourly wafer production capacity (WPH) of automatically dispatched wafers uses the automatically acquired peak hourly wafer production capacity (PWPH) as the base data to intelligently acquire the hourly wafer production capacity (WPH) of automatically dispatched wafers. The hourly wafer production capacity (WPH) of automatically dispatched wafers is defined as: Automatic dispatch WPH = Peak hourly wafer production capacity (PWPH) × Ratio. The module further includes a preprocessing module, a calculation module, and an output module controlled by the control module. The preprocessing module is used to screen Overall Equipment Effectiveness (OEE), effective processes, and the ratio M of Q-time production capacity corresponding to the number of passes. i And the weighted average lane ratio C, corresponding to: The ratio of passes to lanes M i for Then C is The application module displays the hourly wafer production capacity (WPH) of the final version of automatic dispatching in a visual interface and applies it to the intelligent dispatching Q-time model to calculate downstream capacity and determine whether to release goods at the Q-time starting station based on the calculation results.

2. The control system for intelligent acquisition of work permit WPH on a wafer production line as described in claim 1, characterized in that, The automatic dispatching capacity per hour (WPH) of wafers is divided into automatic dispatching of the whole machine (WPH) and automatic dispatching of the cavity (WPH).

3. The control system for intelligent acquisition of work permit WPH on a wafer production line as described in claim 2, characterized in that, When it is necessary to synchronize the peak wafer production capacity (PWPH) of equipment per hour, equipment with cavities provides the peak wafer production capacity (PWPH) of the cavity corresponding to the cavity, while equipment without cavities provides the peak wafer production capacity (PWPH) of the entire machine corresponding to the peak wafer production capacity (PWPH).

4. The control system for intelligent acquisition of work permit WPH on a wafer production line as described in claim 1, characterized in that, The synchronization module further includes a first unit of an instant update process and a second unit of an arrival time frequency update process.

5. The control system for intelligent acquisition of work permit WPH on a wafer production line as described in claim 4, characterized in that, The first unit triggering condition of the real-time update process includes at least one of the following: adding new equipment, adding new production capacity, changing production capacity, equipment improvement resulting in a peak production capacity per hour (PWPH) ≥ 10%, or equipment damage resulting in a peak production capacity per hour (PWPH) ≤ 10%.

6. The control system for intelligent acquisition of work permit WPH on a wafer production line as described in claim 4, characterized in that, The second unit trigger condition of the arrival time frequency update process is a fixed time every month.

7. A control method for a control system for intelligently acquiring the work permit (WPH) of a wafer production line as described in claim 1, characterized in that, The control method of the control system for intelligently acquiring the work dispatch WPH includes: Execution step S1: The synchronization module synchronizes the peak wafer per hour (PWPH) production capacity of the equipment from the manufacturing execution system server to the manufacturing department server where the dispatch preprocessing program is located, according to the requirements of the dispatch preprocessing program, in order to automatically obtain standard basic data. Execution step S2: Intelligent acquisition of the hourly wafer production capacity (WPH) module of the automatic dispatching system. Based on the automatically acquired peak hourly wafer production capacity (PWPH) of the equipment, the module intelligently acquires the hourly wafer production capacity (WPH) of the automatic dispatching system. Step S3: Controlled by the control module, and output through the output module, the final version of the hourly wafer production capacity (WPH) of the automatic dispatching is output, which is adjusted by the production line personnel and automatic dispatching personnel according to the actual situation of the production line and capacity control. Step S4: The application module displays the final version of the automatic dispatching hourly wafer production capacity (WPH) in a visual interface and applies it to the intelligent dispatching Q-time model to calculate downstream capacity and determine whether the Q-time starting station should release the goods based on the calculation results. The intelligent acquisition of the hourly wafer production capacity (WPH) for automatic dispatching further includes: Execution step S21: Screen the overall equipment effectiveness (OEE) through the preprocessing module, screen the effective flow, and screen the ratio M of production capacity corresponding to Q-time. i And the weighted average lane ratio C; Step S22: Based on the data from step S21, the initial automatic dispatching hourly wafer production capacity (WPH) is calculated by the calculation module. The production line personnel and automatic dispatching personnel then make adjustments based on the actual situation of the production line and capacity control to obtain the final automatic dispatching hourly wafer production capacity (WPH). The ratio of passes to lanes M i for Then C is The hourly wafer production capacity (WPH) for automated dispatching is: Automatic job dispatch WPH = Peak wafer production capacity per hour (PWPH) × Ratio.

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