Light scattering measuring device and measuring jig

By using a single light receiver and a moving mechanism in the light scattering measurement device, the optical path is switched to prevent stray light interference, the backward measurement accuracy problem is solved, and the device is miniaturized and reduced in cost, while maintaining the accuracy of forward and lateral measurements.

CN114509372BActive Publication Date: 2025-08-26OTSUKA DENSHI CO LTD
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Patent Information

Application Number
CN202111360763.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2020-11-17
Filing Date
2021-11-17
Publication Date
2025-08-26
Estimated Expiration
2041-11-17

AI Technical Summary

Technical Problem

The existing light scattering measurement device is susceptible to stray light interference when performing backward measurement, resulting in a decrease in measurement accuracy. At the same time, the backward measurement of the inclined sample cell will affect the forward and lateral measurement optical paths, and the device cannot be miniaturized and cost-effective.

Method used

Using a single light receiver and a moving mechanism, the optical paths for forward, lateral and backward measurements are switched by moving the measurement fixture in the vertical direction, and optical elements are used to prevent stray light from entering the light receiver, so as to achieve compatibility of forward, lateral and backward measurements.

Benefits of technology

The light scattering measurement device is reduced in size and reduced in cost, while improving the measurement accuracy, so that the backward measurement can be performed without affecting other measurement modes.

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Abstract

The present invention provides a light scattering measurement device and a measurement fixture capable of performing both forward or lateral and backward measurements, and having a single light receiver, resulting in a compact and low-cost design. The light scattering measurement device comprises: a light source; a single light receiver; a sample holder having a sample cell, a housing, and an optical element. The housing includes a holding space for the sample cell, a first opening forming an entrance portion for a first optical path used for at least one of forward or lateral measurement, and a second opening forming an entrance portion for a second optical path used for backward measurement. The optical element includes a first surface that forms a predetermined angle with a side surface of a cavity. Furthermore, a moving mechanism is provided for vertically moving the measurement fixture. The optical element is positioned at the entrance portion or exit portion of the first or second optical path. The first and second optical paths are separated in the vertical direction. The moving mechanism moves the first opening to the entrance portion of the first optical path when performing forward or lateral measurement, and moves the second opening to the entrance portion of the second optical path when performing backward measurement.
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Description

Technical Field

[0001] The present invention relates to a light scattering measurement device and a measurement jig. Background Art

[0002] Light scattering measurement devices are known as devices for measuring particle characteristics such as particle shape, particle size distribution, and molecular weight. These devices detect light scattered from a sample containing particles. When analyzing the particle size distribution of a sample containing particles of varying sizes, it is necessary to perform not only forward or side measurements, where the scattering angle between incident and scattered light is small, but also backward measurements, where the scattering angle is large.

[0003] For example, Patent Document 1 below discloses a light scattering measurement device with an optical element positioned between a light source and a sample. This optical element corrects the light from the light source, generating a corrected beam that diverges in the far field. This creates a dark region that is substantially unilluminated at a location away from the sample along the irradiation axis. A light receiver positioned away from the sample then detects the forward-scattered or backscattered light, allowing the light scattering measurement device to measure particle characteristics.

[0004] Furthermore, Patent Document 2 below discloses a light scattering measurement device that detects scattered light from gel particles. The device includes a mechanism for stirring the sample and reagent within a sample cell, and a unit for separating light reflected from the sample cell surface and light scattered from the sample. Furthermore, Patent Document 3 below discloses a particle measurement device that can irradiate incident light of different wavelengths from two or more different directions and deflect the incident light using a light deflector.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application No. 2019-536997

[0008] Patent Document 2: Japanese Patent No. 6373486

[0009] Patent Document 3: Japanese Patent Application Laid-Open No. 02-074845 Summary of the Invention

[0010] Problems to be solved by the invention

[0011] In recent years, miniaturization and cost reduction of devices are required. As a method for miniaturization and cost reduction, there is a method of sharing the light receiver used for forward measurement or side measurement and backward measurement. However, when using a light scattering device that can perform forward measurement or side measurement to perform backward measurement, the reduction in measurement accuracy caused by components other than scattered light (so-called stray light) occurs. Therefore, when performing backward measurement, it is necessary to have countermeasures to prevent stray light (mainly the component reflected by the incident light on the sample cell surface) from entering the light receiver.

[0012] As a countermeasure, one method is to tilt the sample cell when performing backward measurement. This prevents light reflected from the sample cell surface from entering the light receiver. However, tilting the sample cell causes the optical path to shift during forward or sideways measurement. Therefore, devices that tilt the sample cell for backward measurement cannot perform forward or sideways measurement.

[0013] The present disclosure is made in view of the above-mentioned actual situation, and its purpose is to provide a light scattering measurement device that can perform at least one of forward measurement or lateral measurement and both backward measurement and has a single light receiver, thereby being compact and low-cost, and a measurement fixture for the light scattering measurement device.

[0014] Solutions for solving problems

[0015] To solve the above-mentioned problems, the light scattering measurement device disclosed herein is characterized in that it comprises: a light source for generating incident light for irradiating a sample; a single light receiver disposed at a position to receive scattered light emitted from the sample and measure the intensity of the scattered light; and a sample holding portion comprising a sample cell, a frame, and an optical element, wherein the sample cell has a cavity for accommodating the sample, and the frame has a holding space for accommodating the sample cell, a first opening formed at an incident portion of a first light path for measuring at least one of forward measurement or lateral measurement when the scattering angle formed between the incident light and the scattered light is 100 degrees or less, and a second opening formed at an incident portion of a second light path for measuring backward measurement when the scattering angle is greater than 100 degrees. The optical element has a second opening of the incident part, the optical element has a first surface that forms a certain angle with the side surface of the cavity; and a moving mechanism that moves the measuring fixture in the vertical direction, the optical element is arranged at least one of the incident part or the exit part of the optical path of at least one of the first optical path and the second optical path, and the first optical path and the second optical path are separated in the vertical direction, the moving mechanism moves the first opening to the position of the incident part of the first optical path when performing at least any one of the forward measurement and the lateral measurement, and moves the second opening to the position of the incident part of the second optical path when performing the backward measurement.

[0016] In addition, according to other viewpoints of the present invention, the measuring fixture disclosed herein is characterized in that it has a frame having: a holding space, in which a sample pool having a cavity for accommodating a sample is configured; a first opening formed at the incident portion of a first light path for measuring at least either a forward measurement or a lateral measurement in which a scattering angle between incident light irradiated to the sample and scattered light is less than 100 degrees; and a second opening formed at the incident portion of a second light path for measuring a backward measurement in which a scattering angle is greater than 100 degrees, wherein the first light path and the second light path are separated in a vertical direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a diagram schematically showing a light scattering measurement device according to this embodiment.

[0018] Figure 2 It is a perspective view of the measuring jig of this embodiment.

[0019] Figure 3 It is a side view of the measuring jig of this embodiment.

[0020] Figure 4 This is a perspective view of a measuring jig showing the forward measurement optical path, the side measurement optical path, and the backward measurement optical path.

[0021] Figure 5 This is a diagram showing the forward measurement light path, the side measurement light path, and the backward measurement light path in the sample as viewed from the Z-axis direction.

[0022] Figure 6 This is a diagram showing the optical path for backward measurement as viewed from the side.

[0023] Figure 7 This is a flow chart showing a method for light scattering measurement.

[0024] Figure 8 This is an example of a measurement result.

[0025] Description of reference numerals:

[0026] 100 light scattering measuring device; 102A first light source; 102B second light source; 104 semi-transparent mirror; 106 reflecting mirror; 108 sample cell; 110 measuring fixture; 112 moving mechanism; 114 light receiver; 202 bottom portion; 204 first side portion; 206 second side portion; 208 top surface portion; 210 first opening; 212 second opening; 214 optical element; 602 first surface; 604 second surface. DETAILED DESCRIPTION

[0027] Hereinafter, embodiments of the present disclosure will be described using the drawings.

[0028] Figure 1FIG is a diagram schematically showing a light scattering measurement device 100 according to this embodiment. Figure 1 As shown, the light scattering measurement device 100 includes a light source, a semi-transparent mirror 104 , a reflecting mirror 106 , a sample cell 108 , a sample holding portion, a moving mechanism 112 , and a light receiver 114 .

[0029] The light source 102 generates light to irradiate the sample. Specifically, for example, the light source 102 generates laser light such as He-Ne laser or semiconductor laser. Figure 1 In the example shown, the light source 102 includes a first light source 102A and a second light source 102B.

[0030] The first light source 102A generates light along a first optical path. Herein, the first optical path is the optical path used for at least one of forward measurement and lateral measurement. Hereinafter, the light path used for forward measurement is referred to as the forward measurement optical path. Furthermore, the light path used for lateral measurement is referred to as the lateral measurement optical path. Furthermore, the light irradiating the sample is referred to as incident light, and the light scattered by the sample is referred to as scattered light.

[0031] The first optical path includes a forward measurement optical path and a side measurement optical path. Forward and side measurements are performed under the condition that the scattering angle between the incident light and the scattered light is 100 degrees or less. For example, the scattering angle for forward measurement is greater than 0 degrees and less than 80 degrees, while the scattering angle for side measurement is greater than 80 degrees and less than 100 degrees.

[0032] The second light source 102B generates light along a second optical path. Herein, the second optical path is the optical path used for backward measurement. Hereinafter, the path of light used for backward measurement will be referred to as the backward measurement optical path. Furthermore, backward measurement refers to measurement performed under conditions where the scattering angle is greater than 100 degrees. For example, the scattering angle for backward measurement is greater than 100 degrees and less than 180 degrees. The forward measurement optical path, the lateral measurement optical path, and the backward measurement optical path will be described in detail later. Furthermore, the positions of the first light source 102A and the second light source 102B in the Z-axis direction are assumed to be identical.

[0033] It should be noted that in Figure 1 In the example shown, the light source for forward measurement and the light source for side measurement are shared, but the light source for forward measurement and the light source for side measurement may be provided separately.

[0034] The half mirror 104 separates the light emitted by the first light source 102A into a light path for forward measurement and a light path for lateral measurement. It should be noted that the half mirror 104 may be omitted if separate light sources for forward measurement and lateral measurement are provided.

[0035] Reflectors 106 reflect light. Specifically, they are located in the forward, side, and backward measurement optical paths, reflecting light from each optical path. Reflectors 106 are configured to guide light from each optical path emitted by the light source to the sample cell 108. Furthermore, the optical path length of each optical path is adjusted based on the position of the reflectors 106.

[0036] The sample cell 108 has a cavity for accommodating a sample. Specifically, for example, the sample cell 108 has a rectangular parallelepiped shape with an inner side surface parallel to an outer side surface. The liquid sample to be measured is accommodated in this cavity. The sample cell 108 containing the sample is placed in the sample holding portion.

[0037] The sample holding part has a frame and an optical element 214. It should be noted that the sample holding part is not only a member for holding the sample, but also a fixture for light scattering measurement, and therefore, it is also referred to as a measurement fixture 110 below. Specifically, for example, using Figure 2 (a) to Figure 3 (c) is used for explanation. Figure 2 (a) and Figure 2 (b) is a perspective view of the measuring jig 110 according to this embodiment as viewed from a different direction. Figure 3 (a) to Figure 3 (c) and (d) are all side views of the measurement jig 110 of this embodiment. The measurement jig 110 may be composed of only the housing excluding the optical element 214 or may be composed of the housing, the optical element 214 and the sample cell 108 .

[0038] Specifically, for example, the frame includes a bottom portion 202, a first side portion 204, a second side portion 206, and a top portion 208, providing a holding space. The bottom portion 202 is a plate-shaped member parallel to the XY plane. The first side portion 204 and the second side portion 206 are members disposed upright on the Z-axis side of the bottom portion 202. A space corresponding to the shape of the sample cell 108 is formed between the first side portion 204 and the second side portion 206. The top portion 208 is located on the Z-axis side of the first and second side portions 204, 206 and has an opening corresponding to the shape of the sample cell 108. The space between the first and second side portions 204, 206 and the opening form the holding space. The holding space is a space enclosed by the frame and is where the sample cell 108 is placed. The sample cell 108 placed in the holding space is supported in the X-axis and Y-axis directions by the frame. Furthermore, the sample cell 108 is supported in the Z-axis direction by the bottom portion 202.

[0039] In addition, the frame has a first opening 210 and a second opening 212. Specifically, the first opening 210 is an opening formed by a cutout formed in the first side portion 204 and an end portion of the second side portion 206. The first opening 210 is formed at the incident portion of the first optical path described later. The second opening 212 is a hole that penetrates from the outer side of the second side portion 206 toward the retaining space. The second opening 212 is formed at the incident portion of the second optical path and at the exit portions of the first optical path and the second optical path. As shown in the figure, the second opening 212 has a larger diameter in the Z-axis direction than the first opening 210.

[0040] The optical element 214 has a first surface 602 that forms a certain angle with the side surface of the cavity. In addition, the optical element 214 has a triangular prism-shaped portion that includes a first surface 602 and a second surface 604 that is parallel to and opposite to the sample cell 108 on the opposite side of the first surface 602. The optical element 214 is arranged at least one of the incident portion or the exit portion of the light path of at least one of the first light path and the second light path. That is, the optical element 214 can be arranged at at least one of the incident portion of the first light path, the exit portion of the first light path, the incident portion of the second light path, and the exit portion of the second light path. For example, in Figure 2 (a) to Figure 3 In the example shown in (c), the optical element 214 is disposed at the incident portion of the second optical path and the emitting portion of the second optical path. The optical element 214 may also have other shapes, as long as it has a triangular prism-shaped portion.

[0041] The light receiver 114 is positioned to receive scattered light emitted from the sample and measure the intensity of the scattered light. Specifically, the light receiver 114 is a meter that measures the intensity of the scattered light at predetermined intervals, capturing temporal changes in the scattered light intensity. The light receiver 114 is located at the exit of the forward, lateral, and backward measurement optical paths. The light source, reflector 106, semi-transparent mirror 104, and measurement jig 110 are arranged so that the optical paths of the exits of the forward, lateral, and backward measurement optical paths are identical. In other words, the light receiver 114 is shared by the forward, lateral, and backward measurements. Therefore, a single light receiver 114 is provided in the scattered light measurement device. This allows for a more compact light scattering measurement device 100.

[0042] The moving mechanism 112 moves the measurement jig 110 in the vertical direction. Specifically, when performing at least one of forward and sideward measurements, the moving mechanism 112 moves the first opening 210 to the position of the incident portion of the first optical path. Furthermore, when performing backward measurements, the moving mechanism 112 moves the second opening 212 to the position of the incident portion of the second optical path.

[0043] The moving mechanism 112 moves the measuring fixture 110 in the vertical direction, so that it is possible to switch between the measurement using the first light path (forward scattering measurement and side scattering measurement, or one of them) and the measurement using the second light path (backscattering measurement) without moving other components such as the light source 102, the reflector 106, and the semi-transparent mirror 104. As in the prior art, when the backscattering measurement is performed by tilting the sample cell 108, it is necessary to perform the measurement using the first light path and the measurement using the second light path in different XY planes. However, by moving the measuring fixture 110 in the vertical direction, it is possible to perform the measurement using the first light path and the measurement using the second light path in the same XY plane. Therefore, there is no need to move other components such as the light source 102, the reflector 106, and the semi-transparent mirror 104. In addition, when the sample cell 108 is tilted, it is necessary to strictly control the angle of inclination for the adjustment of the optical path. However, when the measuring fixture 110 is moved in the vertical direction, even if a slight error occurs in the moving distance, it will not affect the measurement accuracy. Therefore, the measurement accuracy can be improved.

[0044] The light scattering measurement apparatus 100 analyzes the scattered light intensity measured by the light receiver 114 using an information processing unit (not shown). Specifically, the light scattering measurement apparatus 100 uses the photon correlation method to calculate the zeta potential, particle diffusion coefficient, particle size, particle size distribution, and other information from the scattered light intensity. The information processing unit is a personal computer included in the light scattering measurement apparatus 100 or an external personal computer used in conjunction with the light scattering measurement apparatus 100. It performs the calculations required to calculate the zeta potential, particle diffusion coefficient, particle size, particle size distribution, and other information.

[0045] Next, use Figure 1 、 Figures 4 to 6 The forward measurement optical path, the side measurement optical path, and the backward measurement optical path are described. Figure 4 It is a perspective view of the measuring jig 110 showing a forward measurement optical path, a side measurement optical path, and a backward measurement optical path. Figure 5 (a) to Figure 5 (c) is a diagram showing the forward measurement light path, the side measurement light path, and the backward measurement light path in the sample cell 108 and the sample arranged in the cavity of the sample cell 108 as viewed from the Z-axis direction. Figure 6 Observed from the side Figure 5 (c) Diagram of the backward measurement light path. Figure 1 、 Figures 4 to 6 The solid line is the forward measurement light path, the dotted line is the lateral measurement light path, and the dotted line is the backward measurement light path.

[0046] like Figure 1As shown, the forward measurement optical path begins with first light source 102A, passes through half mirror 104, is reflected by reflector 106A, is scattered by the sample, and reaches light receiver 114. The lateral measurement optical path begins with first light source 102A, is reflected by half mirror 104 and reflector 106B, is scattered by the sample, and reaches light receiver 114. The backward measurement optical path begins with second light source 102B, is reflected by reflectors 106C and 106D, is scattered by the sample, and reaches light receiver 114. The portion of each optical path before entering the sample is called the incident portion, and the portion after exiting the sample is called the exit portion.

[0047] like Figure 4 As shown, light from the forward and lateral measurement optical paths is irradiated onto the sample via first opening 210. Light from the backward measurement optical path is irradiated onto the sample via second opening 212. Furthermore, light emitted from the forward, lateral, and backward measurement optical paths is incident upon light receiver 114 via second opening 212. Furthermore, the first and second optical paths are separated in the vertical direction. Specifically, the backward measurement optical path is located closer to the Z-axis than the forward and lateral measurement optical paths.

[0048] like Figure 5 As shown in (a) of FIG. 2 , the light in the forward measurement optical path is scattered by the sample. Of the light scattered in the forward measurement optical path, the light having a scattering angle θ of 20 degrees enters the light receiver 114 through the second opening 212 .

[0049] like Figure 5 As shown in (b) of FIG. 2 , the light in the lateral measurement optical path is scattered by the sample. Of the light scattered in the lateral measurement optical path, the light having a scattering angle θ of 90 degrees enters the light receiver 114 through the second opening 212 .

[0050] like Figure 5 As shown in (c), the light of the backward measurement optical path is scattered by the sample. Among the scattered light of the backward measurement optical path, the light with a scattering angle θ of 160 degrees enters the light receiver 114 through the second opening 212. Figure 5 (c) and Figure 6 As shown, an optical element 214 is disposed at the exit portion of the backward measurement optical path. In this embodiment, optical element 214 is in the shape of a triangular prism, arranged so as to form a triangle when viewed from the side. The surface facing the sample cell 108 and parallel to the Z axis is the second surface 604. The surface opposite the second surface 604 and forming a predetermined angle with the side surface of the sample cell 108 is the first surface 602. Optical element 214 prevents stray light, such as light reflected from the surface of the sample cell 108, from entering the light receiver 114.

[0051] Figure 6The arrows indicated by single-dash lines represent the direction of light entering the light receiver 114 from the incident portion of the backward measurement optical path and the scattered light. The arrows indicated by double-dash lines represent the direction of stray light. Here, stray light refers to components of the light entering the light receiver 114 that do not contribute to the measurement. Because the refractive indices of air, optical element 214, sample cell 108, and the sample differ, the intensity of light reflected at the interfaces among the air, optical element 214, sample cell 108, and the sample is high. Therefore, the primary component of stray light is light reflected from the surfaces of optical element 214 and sample cell 108.

[0052] Specifically, if Figure 6 As shown, first surface 602 of optical element 214 forms a certain angle with the side surface of sample cell 108. Therefore, stray light reflected from first surface 602 of optical element 214 travels in a direction different from that of light receiver 114. Similarly, stray light that passes through optical element 214 and is reflected from the surface of sample cell 108 (including the surface facing optical element 214 and the surface opposite thereto) travels in a direction different from that of light receiver 114 due to the difference in refractive index between optical element 214 and air. Consequently, the intensity of stray light incident on light receiver 114 through optical element 214 can be reduced, thereby improving measurement accuracy.

[0053] It should be noted that the direction of light travel changes due to the refraction of light at the interface between the air and the sample cell 108 and at the interface between the sample cell 108 and the sample. Figure 5 (a) to Figure 5 In (c), strictly speaking, the direction of travel changes at the interface between the air and sample cell 108 and at the interface between the sample cell 108 and the sample, but description of this change is omitted. Furthermore, the optical element 214 can be arranged so as to be in contact with the sample cell 108 or so as to have a gap between it and the sample cell 108.

[0054] Next, use Figure 7 The flowchart in FIG. 1 illustrates a method for light scattering measurement using the light scattering measurement apparatus 100. First, a determination is made as to whether to perform multi-angle measurement ( S702 ). Specifically, the light scattering measurement apparatus 100 receives information indicating whether to perform multi-angle measurement through user operation. If it is determined that multi-angle measurement is to be performed, the process proceeds to S704 .

[0055] Next, the measurement jig 110 is set up (S704). Specifically, the measurement jig 110, which consists of a housing and an optical element 214, is placed in the light scattering measurement apparatus 100. Then, the sample cell 108 is placed in the holding space of the measurement jig 110 (S706). The sample to be measured is pre-placed in the cavity of the sample cell 108. It should be noted that S704 and S706 are not performed in order; the sample cell 108 can be placed in the holding space of the measurement jig 110 first, and then the measurement jig 110 can be placed in the light scattering measurement apparatus 100.

[0056] Next, the moving mechanism 112 moves the measuring jig 110 so that the second opening 212 is located at the incident portion of the second optical path (S708). Specifically, the moving mechanism 112 adjusts the position of the measuring jig 110 in the Z-axis direction so that Figure 4 The backward measurement light path is shown at the second opening 212 .

[0057] Next, the light scattering measurement apparatus 100 performs backscattering measurement (S710). Specifically, the second light source 102B emits light, and the light in the backscattering measurement optical path is irradiated onto the sample via the optical element 214. The light receiver 114 measures the intensity of the scattered light scattered by the sample.

[0058] Next, the moving mechanism 112 moves the measuring jig 110 so that the first opening 210 is located at the incident portion of the first optical path (S712). Specifically, the moving mechanism 112 adjusts the position of the measuring jig 110 in the Z-axis direction so that Figure 4 The forward and sideward detection light paths are shown located at the first opening 210 .

[0059] Next, the light scattering measurement device 100 performs forward scattering and side scattering measurements (S714). Specifically, the first light source 102A emits light, and the light in the forward measurement light path is irradiated onto the sample. The light receiver 114 measures the intensity of the scattered light scattered by the sample. Similarly, the light scattering measurement device 100 performs side scattering measurement. The light scattering measurement device 100 then calculates the particle size distribution using the scattered light intensities measured in S710 and S714 and the photon correlation method. It should be noted that the measurement performed in S714 may be only one of the forward scattering and side scattering measurements.

[0060] If it is determined in S702 that multi-angle measurement is not to be performed, the process proceeds to S716. In S716, the measurement jig 110 is set. Then, the sample cell 108 is set in the holding space of the measurement jig 110 (S718). The steps of S716 and S718 are the same as those of S704 and S706.

[0061] Next, the moving mechanism 112 moves the measuring fixture 110 so that the first opening 210 is located at the position of the incident part of the first optical path or the second optical path (S720). The steps of S720 are the same as those of S712. Then, the light scattering measurement device 100 performs forward, side, or backward scattering measurement (S722). For example, in the case of performing a forward scattering measurement in the step of S722, the first light source 102A emits light, and the light of the forward measurement optical path is irradiated onto the sample. The light receiver 114 measures the intensity of the scattered light scattered by the sample. Then, the light scattering measurement device 100 calculates the particle size distribution using the photon correlation method. The position to which the measuring fixture 110 is moved in the step of S720 and the measurement performed in the step of S722 can be appropriately selected according to the user's instructions.

[0062] According to the above steps, in response to the user's instruction, measurement based on the three methods of forward scattering measurement, side scattering measurement, and back scattering measurement, or measurement based on only the forward scattering measurement, is performed.

[0063] Figure 8 (a) is based on Figure 7 An example of the measurement results of steps S716 to S722. Figure 8 (b) is based on Figure 7 An example of the measurement results of steps S704 to S714. Figure 8 (a) and Figure 8 The measurement results of (b) are the measurement results for the same sample.

[0064] like Figure 8 As shown in (a), in the analysis results based on only the forward scattering measurement method, a scattering intensity distribution with a peak value in the particle size range of 200 nm to 300 nm was obtained. Figure 8 As shown in (b), in the analysis results based on the three methods of forward scattering, side scattering, and back scattering, a scattering intensity distribution with peak values ​​at 120 nm and 280 nm was obtained. That is, by performing analysis based on the three methods, a distribution in which a sample mixed with particles of different but small particle sizes is separated by each particle size can be obtained. On the other hand, in the case of obtaining a rough particle size distribution, the time required for the measurement can be shortened by performing analysis based on one method.

[0065] It should be noted that the present invention is not limited to the solutions described in the above embodiments. For example, in the above description, the second opening 212 is located at the exit portion of the first optical path and at the entrance and exit portions of the second optical path. However, the opening configured at the exit portion of the first optical path and the openings configured at the entrance and exit portions of the second optical path may also be different openings. For example, the opening configured at the exit portion of the first optical path may also be a third opening separated from the second opening 212 configured at the entrance and exit portions of the second optical path.

Claims

1. A light scattering measuring device, characterized in that: have: A light source, generating incident light that is irradiated onto the sample; a single light receiver disposed at a position to receive scattered light emitted from the sample and measure the intensity of the scattered light; A sample holding portion comprising a sample cell, a frame, and an optical element, wherein the sample cell has a cavity for accommodating the sample, the frame has a holding space for arranging the sample cell, a first opening formed at an incident portion of a first optical path for at least one of forward measurement or side measurement with a scattering angle of 100 degrees or less between incident light and scattered light, and a second opening formed at an incident portion of a second optical path for backward measurement with a scattering angle greater than 100 degrees, and the optical element has a first surface forming a predetermined angle with a side surface of the cavity; and A moving mechanism moves the sample holding portion in a vertical direction, The optical element is disposed at least at one of the incident portion or the exit portion of at least one of the first optical path and the second optical path. The first optical path and the second optical path are separated in the vertical direction, The moving mechanism moves the first opening to the position of the incident part of the first optical path when performing at least either the forward measurement or the lateral measurement, and moves the second opening to the position of the incident part of the second optical path when performing the backward measurement.

2. The light scattering measurement device according to claim 1, wherein The second opening is formed at the exit portion of the first light path and the second light path.

3. The light scattering measurement device according to claim 1 or 2, characterized in that The optical element has a triangular prism-shaped portion including the first surface and a second surface opposite to the first surface and parallel to the sample cell and facing each other.

4. The light scattering measurement device according to claim 1 or 2, characterized in that The scattering angle of the forward measurement is greater than 0 degrees and less than 80 degrees, The scattering angle of the side measurement is greater than 80 degrees and less than 100 degrees, The backscattering angle measured is greater than 100 degrees and less than 180 degrees.

5. The light scattering measurement device according to claim 1 or 2, characterized in that The light source includes a first light source generating light along the first light path and a second light source generating light along the second light path.

6. A measuring jig, characterized in that: The measuring jig is a sample holding portion of the light scattering measuring device according to claim 1 .

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