Conveying box cleaning chamber

Abstract

The present invention provides a transfer case cleaning chamber, comprising: a cleaning chamber having an entrance door and containing a transferred transfer case for cleaning; a drying chamber having an exit door and drying the transfer case transferred from the cleaning chamber; a switch configured between the cleaning chamber and the drying chamber for lifting and lowering; and a chamber moving section transferring the transfer case from the cleaning chamber to the drying chamber.

Description

Technical Field

[0001] The embodiments relate to a transfer box (POD) cleaning chamber. More specifically, it relates to a transfer box cleaning chamber that processes cleaning and drying in a separate space when cleaning the inner and outer transfer boxes separately. Background Technology

[0002] Semiconductors have been used in a variety of fields as industry has developed, and they have gradually become smaller and the technology has been advancing.

[0003] Recently, new semiconductor manufacturing technologies that utilize extreme ultraviolet (EUV) processes have attracted much attention.

[0004] In the semiconductor industry, EUV refers to the lithography technique or manufacturing process that uses an extreme ultraviolet wavelength light source in the important process of semiconductor manufacturing, namely, the photolithography process.

[0005] In the production of semiconductor chips, a silicon-based circular plate, or disk, called a wafer, is coated with a photosensitive material and enters a photolithography process device called a scanner. Inside this device, in order to generate circuit patterns, a photolithography process is performed by projecting a laser light source onto the wafer.

[0006] This allows billions of tiny, microscopic circuit elements to be formed within a semiconductor chip. The EUV process refers to performing this exposure step using a light source with extremely ultraviolet wavelengths.

[0007] In the field of semiconductor chip manufacturing, it is essential to fabricate extremely fine circuits on wafers. This allows for the integration of more components such as transistors and capacitors within a wafer space limited to a diameter of 300mm, thereby improving performance and power efficiency.

[0008] Because the wavelength of the EUV light source is shorter than that of the argon fluoride (ArF) light source used in existing processes, it is possible to generate finer and more compact patterns. The newly launched EUV scanner uses EUV with a wavelength of 13.5 nanometers, which is less than one-tenth the wavelength of light used in current argon fluoride excimer laser scanners.

[0009] Moreover, traditionally, manufacturing microcircuits requires multiple exposure processes, but EUV equipment can reduce the number of process steps, thereby significantly increasing productivity.

[0010] However, this EUV technology differs from existing exposure techniques. It requires multiple steps to reflect light and faces several challenges, such as its efficiency only being present in a vacuum.

[0011] Furthermore, new research and development of related materials, including EUV masks and photoresists (the protective films used to protect the masks), is necessary. In particular, the protective films are extremely thin films, measuring 110mm horizontally and 144mm vertically, with a thickness of only 50 nanometers, making them difficult to manufacture. Even more challenging is attaching the protective film to the mask. A single mask costs hundreds of millions of Korean won, while a protective film costs between 20 and 30 million Korean won. Properly storing and transporting these masks and protective films is also not easy.

[0012] An EUV transport box (POD) is required for the storage and transfer of this EUV mask and protective film.

[0013] The EUV transport box consists of an external transport box and an internal transport box. Only the internal transport box is installed inside the EUV exposure equipment. However, when entering the mass production workshop, it needs to undergo the 'scanning → inspection → cleaning' steps, which causes gases (Gas) and other chemical agents to move to the outside and be lost.

[0014] For this type of transfer box, cleaning it can pose significant challenges to semiconductor processes if impurities are present inside, thus increasing the importance of cleaning the transfer box. Summary of the Invention

[0015] The problem that the invention aims to solve

[0016] The purpose of this embodiment is to increase the cleaning efficiency of the transfer box by distinguishing between the cleaning chamber and the drying chamber during the cleaning process.

[0017] The problems to be solved by the present invention are not limited to those mentioned above. Other problems not mentioned herein can be clearly understood by those skilled in the art through the following description.

[0018] Solution for solving the problem

[0019] An embodiment of the present invention may include: a cleaning chamber having an entrance door and accommodating a transfer box for cleaning; a drying chamber having an exit door and drying the transfer box transferred from the cleaning chamber; a switch disposed between the cleaning chamber and the drying chamber for lifting and lowering; and a chamber moving part for transferring the transfer box from the cleaning chamber to the drying chamber.

[0020] Preferably, the moving part of the chamber may include: a clamp for placing the transfer box; and a moving unit connected to the clamp for moving the clamp.

[0021] Preferably, the fixture includes: a placement fixture for supporting the transfer box; and a connecting fixture for connecting the placement fixture to the moving unit. The transfer box cleaning chamber may include: a plurality of support pins connected to the placement fixture for placing the transfer box.

[0022] Preferably, the placement clamp is configured at an angle to place the transfer box at an angle when placing the transfer box.

[0023] Preferably, a region of the mobile unit is located outside the cleaning chamber and the drying chamber.

[0024] Preferably, the cleaning chamber may include: a cleaning nozzle that sprays steam and cleaning fluid into the transfer box; and a first drying nozzle that sprays drying gas for drying the transfer box.

[0025] The aforementioned cleaning chamber may further include: a first air knife, which is configured adjacent to the aforementioned switch.

[0026] Preferably, the drying chamber may include a second drying nozzle that sprays drying gas for drying the transfer box.

[0027] Preferably, the drying chamber may include an IR lamp.

[0028] Preferably, the drying chamber may further include a second air knife.

[0029] Preferably, the cleaning chamber is provided with a first exhaust port, the drying chamber is provided with a second exhaust port, and the conveyor box cleaning chamber may include a control unit that controls the opening and closing of the first exhaust port and the second exhaust port.

[0030] Preferably, when the transfer box is first dried in the clean room or transferred to the drying room, the control unit opens the first exhaust port to exhaust the air inside the clean room to the outside.

[0031] Preferably, when drying is being carried out in the drying chamber, or when the outlet door is opened to move the transfer box from the drying chamber to the outside, the control unit opens the second exhaust port to exhaust the air inside the drying chamber to the outside.

[0032] Preferably, the moving part of the chamber moves in the front-to-back direction inside the clean chamber and the dry chamber.

[0033] Invention Effects

[0034] According to the embodiment, the separate washing and drying conveyor boxes improve the washing efficiency.

[0035] Furthermore, each process is unique and unidirectional, thus preventing contamination of the transfer box.

[0036] Furthermore, exhaust conditions are used to prevent contamination in areas where the conveyor box may become contaminated.

[0037] Furthermore, the various components of the transfer box are moved into another chamber, thereby improving cleaning and drying efficiency.

[0038] The various and advantageous advantages and effects of the present invention are not limited to the above description, and will be more readily understood in the process of describing the specific embodiments of the invention. Attached Figure Description

[0039] Figure 1 This diagram illustrates the structure of the transfer box cleaning apparatus according to an embodiment of the present invention.

[0040] Figure 2 To show Figure 1 The constituent elements, namely the structure of the cleaning chamber.

[0041] Figure 3 To show Figure 2 A diagram showing the structure of the cleaning chamber.

[0042] Figure 4 To show Figure 2 A diagram showing the specific structure of the cleaning chamber.

[0043] Figure 5 To show Figure 2 The constituent elements, namely the structure of the fixture.

[0044] Figure 6 To show Figure 5 The image shows a clamp containing a transport box.

[0045] Figure 7 To observe from the side Figure 6 The image.

[0046] Figures 8 to 10 To show in Figure 3 A diagram showing the internal exhaust structure of the cleaning chamber when the conveyor box is moved.

[0047] Figure 11 To show Figure 1 The constituent elements, namely the diagram of the structure inside the vacuum chamber.

[0048] Figure 12 To demonstrate the use Figure 1 The sequence diagram of the conveyor box cleaning process performed by the conveyor box cleaning device.

[0049] Figure 13 To show Figure 12 The constituent elements, namely the diagram of the specific process of the cleaning steps.

[0050] Figure 14 To show Figure 12 The constituent elements, namely, the specific process diagram of the vacuum treatment steps.

[0051] Explanation of reference numerals in the attached figures:

[0052] 10: Teleportation Box 100: Input Department

[0053] 200: Separation section; 300: First transfer section

[0054] 310: First transfer track; 320: First space section

[0055] 400: Cleaning Room 410: Cleaning Room

[0056] 411: First cleaning nozzle; 412: Second cleaning nozzle

[0057] 413: First drying nozzle; 414: First air knife

[0058] 415: Entrance door; 417: Air curtain

[0059] 418: First exhaust port 420: Switch

[0060] 430: Drying chamber; 431: Second drying nozzle

[0061] 433: Second air knife; 435: IR lamp

[0062] 437: Exit door; 438: Second exhaust port

[0063] 450: Room moving part; 451: Fixture

[0064] 451a: Connecting clamp 451b: Placing clamp

[0065] 451b-1: Inclined section; 451b-2: Straight section

[0066] 451c: Support pin; 453: Moving unit

[0067] 500: Second transfer unit; 510: Second transfer track

[0068] 520: Second Space Section; 600: Vacuum Chamber

[0069] 610: Low vacuum pump; 620: High vacuum pump

[0070] 630: Pressure sensor; 640: Pirani pressure gauge

[0071] 650: IR heater; 660: Residual gas analysis sensor

[0072] 670: Ionization pressure gauge; 680: Nitrogen pump

[0073] 700: Assembly Department; 800: Third Transfer Department

[0074] 900: Storage Department; 1000: Moving-out Department. Detailed Implementation

[0075] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0076] However, the technical concept of the present invention is not limited to the partial embodiments described, but can be implemented in various different forms. Within the scope of the technical concept of the present invention, one or more of the constituent elements between the embodiments can be selectively combined or replaced.

[0077] Furthermore, the terms used in the embodiments of the present invention (including technical and scientific terms) are, in the absence of explicit specific definitions, interpreted as meanings that would be commonly understood by one of ordinary skill in the art to which this invention pertains. For example, terms that have been defined in commonly used dictionaries may be interpreted in terms of their meaning in the context of the relevant art.

[0078] Furthermore, the terminology used in the embodiments of the present invention is for illustrative purposes and not for limiting the present invention.

[0079] In this specification, the singular form may also include the plural form unless otherwise specifically mentioned in the text. For the case described as "at least one (or more) of A and (and) B, C", it may include one or more of all combinations that can be made of A, B, and C.

[0080] Furthermore, when describing the constituent elements of the embodiments of the present invention, terms such as first, second, A, B, (a), and (b) may be used.

[0081] This term is used only to distinguish the constituent element from other constituent elements, and is not used to define the nature, order, or sequence of the corresponding constituent elements.

[0082] Furthermore, the case described as a constituent element being 'connected,' 'combined,' or 'linked' with other constituent elements includes not only cases where the constituent element is directly connected, combined, or linked with other constituent elements, but also cases where the constituent element is 'connected,' 'combined,' or 'linked' with other constituent elements through other constituent elements between the constituent element and other constituent elements.

[0083] Furthermore, when describing something as "above" or "below," which refers to something formed or arranged on each of the constituent elements, "above" or "below" includes not only cases where two constituent elements are in direct contact with each other, but also cases where one or more other constituent elements are formed or arranged between two constituent elements. Moreover, when expressed as "above" or "below," it includes not only the upper direction based on a constituent element, but also the lower direction.

[0084] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. The same or corresponding constituent elements are given the same reference numerals, regardless of the symbols in the drawings, and repeated descriptions of them are omitted.

[0085] Figures 1 to 14 To provide a clear conceptual understanding of the invention, only the main features are explicitly shown. As a result, various variations of the illustrations can be contemplated, and the scope of the invention need not be limited by the specific shapes shown in the drawings.

[0086] Figure 1 This diagram illustrates the structure of the transfer box cleaning apparatus according to an embodiment of the present invention.

[0087] In the transfer box cleaning apparatus of this invention, the transfer box that is to be cleaned includes: an inner transfer box for placing the object to be transferred; and an outer transfer box configured to wrap the inner transfer box outside the inner transfer box.

[0088] At this time, the inner transport box includes a lower inner transport box and an upper inner transport box, and the outer transport box may include a lower outer transport box and an upper outer transport box.

[0089] In the embodiments of the present invention, the transfer box refers to an EUV transfer box (POD) used for storing and transferring EUV masks and protective films, and can use known technologies.

[0090] Reference Figure 1 The conveyor box cleaning device of the present invention may include: a separation unit 200, a first transfer unit 300, a cleaning chamber 400, a vacuum chamber 600, a second transfer unit 500, and an assembly unit 700.

[0091] For the input section 100, the transfer box is moved in through the outside of the housing of the transfer box cleaning device, and the transfer box moves to the separation section 200 after passing through the input section 100.

[0092] The separation unit 200 can separate the transfer box into an inner transfer box and an outer transfer box, and further separate the inner transfer box into a lower inner transfer box and an upper inner transfer box, and separate the outer transfer box into a lower outer transfer box and an upper outer transfer box.

[0093] The transfer box that has been separated in the separation section 200 can be moved to the cleaning chamber 400 through the first transfer section 300.

[0094] The first transfer unit 300 can transfer the separated transfer box to the cleaning chamber 400.

[0095] As one embodiment, the first transfer unit 300 moves along the first transfer track 310 disposed in the first space unit 320 and can transfer separate transfer boxes into the cleaning chambers 400, which are configured as a plurality of chambers.

[0096] The first transfer unit 300 transfers separate lower inner transfer box, upper inner transfer box, lower outer transfer box and upper outer transfer box to multiple cleaning chambers 400 to enhance cleaning efficiency.

[0097] The first space section 320, which is equipped with the first transfer section 300, can form a dirty gas zone in which external gas can flow in.

[0098] The space required for cleaning the transfer box is extremely clean. However, during the process of moving the transfer box into the cleaning device, it comes into contact with external air. Because the transfer box is moved in and out repeatedly, it is difficult to completely cut off the inflow of external air.

[0099] Therefore, in this invention, in one area of ​​the transfer box process, the area where external gas can flow in and where the first transfer unit 300 is located is configured as a dirty gas area, and in the process of entering the cleaning chamber 400 for drying, a clean area is formed.

[0100] The cleaning chamber 400 can clean and dry the transfer box that has been separated and transferred in by the first transfer section 300.

[0101] The cleaning chamber 400 includes: a plurality of cleaning chambers 410 configured to contain and clean separate transfer boxes transferred through the first transfer unit 300; and a drying chamber 430 for drying the transfer boxes transferred from the cleaning chambers 410, wherein the cleaning chambers 410 and the drying chambers 430 may be spatially separated.

[0102] The cleaning chamber 410 and the drying chamber 430 are configured in the same number, and the cleaning chamber 410 and the drying chamber 430 can be arranged in columns in the direction of movement of the conveyor box.

[0103] As one embodiment, the cleaning chamber 410 and the drying chamber 430 can each contain four chambers in a manner that matches the number of structural components generated when the transfer boxes are separated, that is, in a manner that matches the number of the lower inner transfer box, the upper inner transfer box, the lower outer transfer box, and the upper outer transfer box.

[0104] The cleaning chamber 410 can perform the function of cleaning the transfer box, and the drying chamber 430 can perform the function of drying the cleaned transfer box.

[0105] At this time, various cleaning fluids and steam for cleaning are sprayed into the cleaning chamber 410. To minimize the possibility of the sprayed liquid moving to the drying chamber 430, a first drying process can be performed before it moves to the drying chamber 430.

[0106] The transfer box moved into the cleaning chamber 410 is isolated from the outside within the cleaning chamber 400. However, during the transfer process, the air in the dirty gas zone of the first space 320 may move. Therefore, the dirty gas zone can mean that the space of the first space 320 and the cleaning chamber 410 of the cleaning chamber 400 is completely isolated from the air that comes into contact with the outside air when it moves from the cleaning chamber 410 to the drying chamber 430 through the exhaust conditions inside the cleaning chamber 400.

[0107] The cleaning chamber 400 may also include a chamber moving part 450 for moving the cleaning chamber 410 and the drying chamber 430.

[0108] The chamber moving part 450 moves back and forth in the front-to-back direction inside the divided cleaning chamber 410 and drying chamber 430, thereby increasing the efficiency of cleaning and drying.

[0109] Multiple chamber moving parts 450 are configured, with one in each row of the cleaning chamber 410 and the drying chamber 430, to clean the separated conveyor boxes in the cleaning chamber 410 and then move them to the drying chamber 430 for drying.

[0110] The chamber moving part 450 is disposed outside the cleaning chamber 400, and a clamp 451 for moving the transfer box can be disposed inside the chamber.

[0111] The specific structure of the cleaning chamber 400 will be further explained below.

[0112] Vacuum chamber 600 can perform vacuum treatment on dried transfer boxes. Multiple vacuum chambers 600 can be configured, and each can perform vacuum treatment on separated transfer boxes.

[0113] As one embodiment, two vacuum chambers 600 can be configured, and the separation components of the inner and outer transfer boxes can be moved into each vacuum chamber 600. The inner and outer transfer boxes are made of different materials, allowing components of the same material to be moved into the same vacuum chamber 600, utilizing a vacuum state that matches the material to enhance the efficiency of vacuum processing.

[0114] The number of vacuum chambers 600 is unlimited, and various modifications can be implemented based on the vacuum processing time and the cleaning and drying time in the cleaning chamber 400.

[0115] The specific structure and operation of vacuum chamber 600 will be further explained below.

[0116] The second transfer unit 500 is disposed in the second space 520 forming the clean area, and can move along the second transfer track 510 to transfer the transfer box that is dried in the cleaning chamber 400 to the vacuum chamber 600.

[0117] As one embodiment, the second transfer unit 500 can transfer materials from each of the four separate cleaning chambers 400 through the transfer boxes of the cleaning chamber 410 and the drying chamber 430 into the vacuum chamber 600.

[0118] Furthermore, the second transfer unit 500 can transfer the transfer box that has undergone vacuum processing in the vacuum chamber 600 to the assembly unit 700.

[0119] The assembly unit 700 can assemble the transfer boxes that have been separated for cleaning and vacuum processing. At this time, the assembly unit 700 can first assemble the lower inner transfer box and the upper inner transfer box to complete the inner transfer box, and then assemble the outer transfer box to complete the transfer box.

[0120] The transfer box completed in the assembly section can be transferred through the third assembly section 700 and discharged to the outside via the discharge section.

[0121] The third assembly section 700 can be a separate area or it can be configured in an area of ​​the second space section 520. The third assembly section 700 can move along the third transfer line and be discharged to the outside through the discharge section.

[0122] Furthermore, a storage unit 900 for storing the transfer box assembled by the assembly unit 700 may be configured in a region of the second space unit 520.

[0123] The storage unit 900 serves as the space for storing the transfer box that has completed cleaning and vacuum processing, and various known storage unit 900 technologies can be used.

[0124] Figure 2 To show Figure 1 The diagram shows the structural elements of the cleaning chamber 400. Figure 3 To show Figure 2 A structural diagram of the 400 cleaning chamber. Figure 4 To show Figure 2 A diagram showing the specific structure of the cleaning chamber 400.

[0125] Figures 2 to 4 The cleaning chamber 400 shown is a figure for illustrating one of a plurality of cleaning chambers 400. The structures of the other cleaning chambers 400 are the same, and therefore descriptions are omitted.

[0126] Reference Figures 2 to 4The cleaning chamber 400 may include: a cleaning chamber 410, a drying chamber, a shutter 420, and a chamber moving part 450.

[0127] The cleaning room 410 has an entrance door 415 that can accommodate a transfer box transferred through the first transfer section 300 for cleaning.

[0128] The entrance door 415 opens when the transfer box is moved in and closes after the transfer box is moved in, thereby separating the cleaning room 410 from the first space section 320.

[0129] The cleaning chamber 410 may include a cleaning nozzle, a first drying nozzle 413, and an air knife.

[0130] The cleaning nozzles can spray cleaning fluid or steam into the transfer box. Multiple cleaning nozzles can be configured within the cleaning chamber 410. In this case, steam, deionized water (DI), nitrogen (N2), or clean dry air (CDA) are sequentially sprayed through a single cleaning nozzle.

[0131] The steam sprayed from the cleaning nozzle, along with deionized water (DI), dissolves small gaps and fine impurities in the transfer box, making them easier to remove and enhancing cleaning efficiency.

[0132] After the delivery box is cleaned, nitrogen or CDA can be used to expel the water remaining in the pipes and nozzles to clean the nozzles.

[0133] Furthermore, as shown above, multiple cleaning nozzles performing the same function can be configured for cleaning nozzles, but cleaning nozzles with different functions can also be configured.

[0134] As one embodiment, the cleaning nozzle may include a first cleaning nozzle 411 and a second cleaning nozzle 412.

[0135] The first cleaning nozzle 411 can spray deionized water (DI). In this case, the DI sprayed through the first nozzle can be warm water at a high temperature. The first cleaning nozzle 411 can be configured with multiple spray ports along the longitudinal direction of the chamber, and by repeating the spray area, the DI can be sprayed in a manner that can clean the entire conveyor box. At this time, the sprayed DI can be controlled to form a range larger than the height of the conveyor box.

[0136] Furthermore, at least one pair of first cleaning nozzles 411 may be configured opposite each other to clean both sides of the conveyor box.

[0137] The second cleaning nozzle 412 can spray steam. The second cleaning nozzle 412 can also have the same configuration structure as the first cleaning nozzle 411, and multiple spray nozzles can be arranged longitudinally along the cleaning chamber 410, and can be configured to repeat the sprayed area so that the steam can clean the entire area of ​​the transfer box.

[0138] The first drying nozzle 413 is disposed on both sides facing the transfer box and can spray high-temperature gas. The gas sprayed through the first drying nozzle 413 can be nitrogen (N2) or CDA (Clean Dry Air). By spraying high-temperature gas, the first drying nozzle 413 can perform the function of drying the cleaning fluid sprayed by the cleaning nozzle.

[0139] The first air knife 414 can be configured adjacent to the outlet and switch 420 of the cleaning chamber 410 to spray gas. As one embodiment, the gas sprayed through the first air knife 414 can be nitrogen (N2) or CDA (Clean Dry Air). The first air knife 414 can be positioned opposite each other on both sides of the transfer box moving within the cleaning chamber 410, and can spray gas at an angle onto the surface of the transfer box. This serves to remove residual cleaning fluid from the surface of the transfer box before it enters the drying chamber 430.

[0140] The drying chamber 430 has an exit door 437 for drying conveyor boxes transferred from the cleaning chamber 410.

[0141] The drying chamber 430 may include: a second drying nozzle 431, an infrared (IR) lamp 435, and a second air knife 433.

[0142] The second drying nozzle 431 can spray drying gas into the transfer box that is being moved from the cleaning chamber 410. The second drying nozzle 431 can be configured in at least one pair, and preferably in multiple pairs to enhance drying efficiency.

[0143] The second drying nozzle 431 can be arranged opposite to each other, and multiple spray ports can be arranged along the longitudinal direction of the cleaning chamber 410. Furthermore, it can be configured to repeat the spraying area so that steam can clean the entire area of ​​the transfer box.

[0144] As one embodiment, the gas injected through the second drying nozzle 431 can be nitrogen (N2) or CDA (CleanDry Air).

[0145] IR lamps 435 can be configured in pairs to emit infrared light for drying the conveyor box. As one embodiment, the IR lamps 435 can use a method that heats the filament to emit infrared light, or an infrared LED can be used to dry a selective area. Furthermore, a ceramic heater can be used to emit infrared or far-infrared light for heating and drying. The structure or heat release structure of the IR lamps 435 is not limited, and various known structures can be used.

[0146] The second air knife 433 can be disposed in the drying chamber 430 to spray high-temperature gas. As an embodiment, the gas sprayed through the second air knife 433 can be nitrogen (N2) or CDA (Clean Dry Air). The second air knife 433 can be disposed opposite to both sides of a conveyor box that moves in the drying chamber 430, and can spray gas at an angle onto the surface of the conveyor box.

[0147] Furthermore, the second air knife 433 can be configured in multiple pairs, and can be respectively configured on the inlet and outlet sides of the drying chamber 430.

[0148] The exit door 437 can perform opening and closing actions to move the dried transfer box to the second space section 520.

[0149] Switch 420 can be configured between cleaning chamber 410 and drying chamber 430 for lifting.

[0150] Switch 420 functions to divide the cleaning chamber 410 and the drying chamber 430. When drying occurs in the drying chamber 430, it can prevent air from flowing into the cleaning chamber 410. Switch 420 can be connected to a drive unit to have a lifting structure.

[0151] The chamber moving unit 450 can receive the transfer box transferred from the first transfer unit 300, and can transfer the received transfer box from the cleaning chamber 410 to the drying chamber 430. At this time, the chamber moving unit 450 can increase the efficiency of cleaning or drying by reciprocating in the front-to-back direction inside the cleaning chamber 410 or the drying chamber 430.

[0152] The specific structure of the moving part 450 will be further explained below.

[0153] Figure 5 To show Figure 2 The diagram shows the structural elements of the fixture 451. Figure 6 To show Figure 5 The image shows the state of the transfer box being placed in clamp 451. Figure 7 To observe from the side Figure 6 The image.

[0154] Reference Figures 5 to 7The components of the cleaning chamber 400, namely the chamber moving part 450, may include: a clamp 451 and a moving unit 453.

[0155] The clamp 451 holds the transfer box 10 and may include a connecting clamp 451a and a placing clamp 451b.

[0156] A region of the connecting clamp 451a is connected to the connecting unit and can be configured such that a region protrudes into the cleaning chamber 400. As one embodiment, the connecting clamp 451a can be configured as a structure with multiple frames connected together.

[0157] The fixture 451b may include a frame and multiple support pins 451c.

[0158] The placement clamp 451b is connected to a region of the connecting clamp 451a and may have a support structure for placing the transfer box. The placement clamp 451b may be constructed of a frame, thereby opening its two sides for cleaning or drying when placing the transfer box. As one embodiment, the placement clamp 451b has a quadrilateral cross-section larger than the outer edge shape of the transfer box, thereby allowing the transfer box 10 to be placed with both sides of the transfer box exposed.

[0159] Furthermore, the placement clamp 451b can be configured at an angle to prevent the transfer box 10 from detaching when it is placed and moved.

[0160] As one embodiment, the placement clamp 451b may have a structure in which an inclined portion 451b-1 and a straight portion 451b-2 are combined. The straight portion 451b-2 may be connected to a region of the connecting clamp 451a, and the inclined portion 451b-1 has a shape that extends from the end of the straight portion 451b-2.

[0161] The straight section 451b-2 provides a certain distance between the inclined section 451b-1 and the placement fixture 451b, while the inclined section 451b-1 is provided with space for installing the transfer box, thereby preventing conflict with the frame when installing the transfer box.

[0162] Support pins 451c can be configured in multiple ways for connection with placement fixtures 451b. Support pins 451c can be configured at the lower part of the frame to support the lower part of the transfer box, and can be configured at the side of the frame to support the side and rear surfaces of the transfer box.

[0163] The front surface of the transfer box 10 can be prevented from detaching by tilting the frame, and the rear surface of the transfer box can be supported by the support pin 451c.

[0164] The moving unit 453 can be connected to the clamp 451 to move the clamp 451 inside the cleaning chamber 400.

[0165] The moving unit 453 is configured to reciprocate within the cleaning chamber 410 or the drying chamber 430 according to the user's settings, and can move the transfer box that has finished cleaning in the cleaning chamber 410 to the drying chamber 430.

[0166] A driving area for the moving unit 453 can be configured outside the cleaning chamber 400. The moving unit 453 may include structures such as tracks or motors for moving the clamp 451.

[0167] As one embodiment, the moving unit 453 can be configured outside the cleaning chamber 400, and a portion of the connecting clamp 451a connected to the moving unit 453 exists inside the cleaning chamber 400, thereby minimizing the flow of impurities generated by the moving unit 453 into the cleaning chamber 400.

[0168] Furthermore, a structure is provided in the area where the moving unit 453 is configured to block the outflow of air, thereby preventing the air inside the cleaning chamber 400 from flowing out.

[0169] As one embodiment, nitrogen or CDA flows in from the area where the moving unit is configured, thereby continuously generating fluid flow inside the cleaning chamber 400. Air is discharged through the exhaust port inside the cleaning chamber 400, thereby preventing air from the side where the moving unit 453 is configured from flowing into the cleaning chamber 400.

[0170] Figures 8 to 10 To show in Figure 3 A diagram showing the internal exhaust structure of the cleaning chamber 400 when the conveyor box is moved inside.

[0171] Reference Figures 8 to 10 The cleaning chamber 410 and drying chamber 430 inside the cleaning chamber 400 can each have an exhaust port, and the opening and closing of each exhaust port can be controlled by the control unit.

[0172] A first exhaust port 418 can be configured in the cleaning chamber 410, and a second exhaust port 438 can be configured in the drying chamber 430. The control unit can control the first exhaust port 418 and the second exhaust port 438 according to the movement of the transfer box inside the cleaning chamber 400 to prevent the inflow of impurities.

[0173] Figure 8 This describes the state of the transfer box moving into the cleaning chamber 400. When the transfer box moves into the cleaning chamber 400, the entrance door 415 is opened and closed, and the transfer box is placed in the chamber moving part 450 inside the cleaning chamber 400.

[0174] At this time, when the transfer box is moved in, in order to minimize the inflow of impurities due to the opening and closing of the inlet door 415, the air curtain 417 configured on the side of the inlet door 415 can be operated to minimize the inflow of impurities. When the transfer box is moved into the cleaning chamber 400, the switch 420 is in the closed state, and the first exhaust port 418 is not open.

[0175] Figure 9 This describes the state of the transfer box that has completed cleaning in the cleaning chamber 400 and is moved to the drying chamber.

[0176] The transfer box, having completed cleaning in the cleaning chamber 400, moves to the drying chamber 430. At this time, the entrance door 415 is closed to prevent air movement in the first space section 320, and the switch 420 is opened to allow the transfer box placed in the chamber moving section 450 to move.

[0177] When the transfer box is being cleaned in the cleaning chamber 410, the first exhaust port is opened, continuously venting air from inside the cleaning chamber 410 to the outside. This is to prevent the cleaning liquid (steam or purified water (DIW)) from leaking to the outside due to increased pressure inside the chamber during cleaning.

[0178] When the cleaned transfer box moves from the cleaning chamber 410 to the drying chamber 430, the first exhaust port 418 in the cleaning chamber 410 opens, venting the air inside the cleaning chamber 410 to the outside. At this time, air that is cleaner than the air in the cleaning chamber 410 can flow into the drying chamber 430.

[0179] Therefore, moisture or impurities present in the clean chamber 410 can be prevented from flowing into the dry chamber 430.

[0180] Figure 10 The image shows the state in which the transfer box, having completed drying in the drying chamber, is moved to the second space section 520.

[0181] When drying is being performed in the drying chamber 430, the switch 420 is in a closed state to separate the cleaning chamber 410 and the drying chamber 430.

[0182] At this time, the second exhaust port 438, which is located inside the drying chamber 430, can be opened during the drying process to continuously exhaust the air inside the drying chamber 430 to the outside.

[0183] Upon completion of drying, the outlet door is opened. To prevent air inside the drying chamber 430 from leaking into the second space 520, the control unit opens the second exhaust port 438 to discharge the air from the drying chamber 430 to the outside. At this time, as the second exhaust port 438 draws in air from inside the drying chamber 430 and discharges it to the outside, clean air present in the second space 520 will flow in, thus preventing external gas present in the drying chamber 430 from flowing out.

[0184] Figure 11 To show Figure 1 The diagram shows the constituent elements, i.e., the internal structure of the vacuum chamber 600.

[0185] Reference Figure 11 Vacuum chambers 600 are configured in multiple ways, and each chamber can be equipped with a transfer box (inner transfer box or outer transfer box) of the same material.

[0186] The vacuum chamber 600 is equipped with a low vacuum pump 610 and a high vacuum pump 620, which can operate independently depending on the internal conditions of the vacuum chamber 600.

[0187] The vacuum chamber 600 may be equipped with a pressure sensor 630 and a Pirani gauge 640 for measuring pressure conditions. The vacuum chamber 600 may also be equipped with multiple heaters to prevent temperature drops due to low pressure. In this case, an IR heater 650 may be used.

[0188] Furthermore, a residual gas analysis (RGA) sensor 660 is provided inside the vacuum chamber 600 for determining the cleaning status of the transfer box, thereby allowing analysis in terms of the mass units of molecules stripped from the surface of the transfer box or the surface of the vacuum chamber 600 to determine the cleaning status.

[0189] The vacuum chamber 600 is equipped with a nitrogen pump 680 that injects nitrogen gas according to the state inside the chamber, and the nitrogen gas can be diffused through a diffuser.

[0190] The specific structure of the vacuum chamber 600 is not limited to the above-mentioned contents, and various known vacuum chamber 600 technologies can be added for cleaning items.

[0191] Furthermore, the conveyor box cleaning process of another embodiment of the present invention will be described below with reference to the accompanying drawings. However, the same content described in the conveyor box cleaning apparatus and conveyor box cleaning chamber 400 of one embodiment of the present invention will be omitted from the description.

[0192] Figure 12 To demonstrate the use Figure 1 The sequence diagram of the conveyor box cleaning process performed by the conveyor box cleaning device. Figure 13 To show Figure 12 The constituent elements, namely, the diagram of the specific process of the cleaning steps, Figure 14 To show Figure 12 The constituent elements, namely, the specific process diagram of the vacuum treatment steps.

[0193] In explanation Figures 12 to 14 At that time, and Figures 1 to 11 The same reference numerals denote the same parts, and specific descriptions are omitted.

[0194] Reference Figures 12 to 14 Another embodiment of the present invention may include a transfer box cleaning process including: a separation step (S100), a cleaning step (S200), a drying step (S300), a vacuum treatment step (S400), an assembly step (S500), a storage step (S600), and a removal step (S700).

[0195] In the separation step (S100), the transfer box inserted by the input section 100 can be separated into an inner transfer box and an outer transfer box in the separation section 200. As an embodiment, in the separation step (S100), the inner transfer box can be separated into an upper inner transfer box and a lower inner transfer box, and the outer transfer box can be separated into an upper outer transfer box and a lower outer transfer box.

[0196] The transfer boxes separated in the separation step (S100) are moved into multiple cleaning chambers 400, which are divided into four chambers. The transfer boxes moved into the cleaning chambers 400 can undergo a cleaning step (S200) in the cleaning chamber 410 and a drying step (S300) in the drying chamber 430.

[0197] In the cleaning step (S200), a step of cleaning the transfer box that has been separated and transferred inside the cleaning chamber 410 can be performed.

[0198] The cleaning step (S200) may include: a transfer box input step (S210), a washing step (S220, S230), and a pre-drying step (S240).

[0199] The transfer box insertion step (S210) refers to the step of moving the transfer box transferred by the first transfer unit 300 into the cleaning chamber 410. At this time, the transfer box transferred by the first transfer unit 300 can be placed in the chamber moving unit 450 to move inside the cleaning chamber 400.

[0200] At this time, when the transfer box is put into the cleaning chamber 410 through the first transfer unit 300, the air curtain 417 configured at the entrance of the cleaning chamber 410 operates to minimize the possibility of air or impurities from the first space 320 being moved into the cleaning chamber 410.

[0201] The cleaning steps (S220, S230) refer to the steps of spraying cleaning fluid to clean the transfer box. At this time, the cleaning steps may include: a cleaning step (S220) using hot DI water cleaning and a cleaning step (S230) using steam cleaning.

[0202] In the cleaning steps (S220, S230), the chamber moving part 450 can be driven to reciprocate in the front-to-back direction inside the cleaning chamber 410.

[0203] At this time, during the cleaning step (S200), the first exhaust port can remain open to exhaust the air inside the cleaning chamber to the outside.

[0204] Subsequently, in the cleaning step (S200), a pre-drying step (S240) can be performed before moving to the drying step (S300). The pre-drying step (S240) is a step to remove moisture before the cleaned conveyor box moves to the drying step, which minimizes the possibility of impurities being moved into the drying chamber 430.

[0205] The cleaning chamber 410 and the drying chamber 430 are separated by a switch 420, which is turned on when the transfer box moves from the cleaning step (S200) to the drying step (S300). At this time, the first exhaust port 418 disposed inside the cleaning chamber 410 remains open, thereby preventing air inside the cleaning chamber 410 from flowing into the drying chamber 430.

[0206] The drying step (S300) refers to the step of drying the transfer box that has undergone the cleaning step inside the drying chamber 430.

[0207] Gas drying and IR drying can be performed in the drying step (S300). The transfer box entering the drying step (S300) can be dried using high-temperature nitrogen (N2) or CDA (Clean Dry Air).

[0208] Furthermore, IR drying can be performed using IR lamps 435. A pair of IR lamps 435 can be configured opposite each other to emit infrared light to dry the transport box.

[0209] During the drying step (S300), the second exhaust port 438 is opened to allow air inside the drying chamber to be exhausted to the outside.

[0210] The conveyor box undergoing drying in the drying step (S300) is transferred by the second transfer unit 500. During this time, when the conveyor box is discharged in the drying step, the second exhaust port 438 disposed inside the drying chamber 430 remains open to draw in air from inside the drying chamber 430 and discharge it to the outside. This prevents air from flowing into the second space 520 from inside the drying chamber.

[0211] The vacuum treatment step (S400) refers to the step of performing vacuum treatment on the chamber that has passed the drying step (S300).

[0212] The vacuum processing step (S400) may include: transfer box input step (S410), vacuum process step (S420), RGA measurement step (S430), nitrogen emission step (S440) and discharge step (S450).

[0213] The transfer box insertion step (S410) refers to the step of inserting the transfer box, which has undergone the drying step (S300), into the vacuum chamber 600. The second transfer unit 500 clamps the transfer box that moves through the chamber moving unit 450 and inserts it into the multiple vacuum chambers 600. At this time, in the transfer boxes where the structural components have been separated and cleaned, the structural components of the inner transfer box, which are made of the same material, are inserted into one vacuum chamber 600, and the structural components of the outer transfer box are inserted into another vacuum chamber 600.

[0214] At this time, the inlet of vacuum chamber 600 can be opened and closed by a cylinder.

[0215] In the vacuum process step (S420), after the transfer box is placed inside the vacuum chamber 600, the low vacuum pump 610 is run. At this time, the pressure is measured by the pressure sensor 630, and when a negative pressure is reached, the pressure is measured by the Pirani pressure gauge 640.

[0216] When the pressure inside the vacuum chamber 600 reaches the medium vacuum region suitable for driving, the high vacuum valve is opened to drive the high vacuum pump 620.

[0217] Subsequently, when the pressure inside the vacuum chamber 600 reaches a suitable high vacuum region, the pressure will be measured by an iongauge 670. When a suitable vacuum state for detection is reached, the residual gas analyzer (RGA) sensor will be activated.

[0218] The residual gas analysis sensor 660 analyzes the cleanliness by the molecular weight units stripped from the surface of the transfer box or the chamber to determine the cleaning status. When the cleaning status meets the preset conditions, the operation of the vacuum pump will be interrupted.

[0219] Subsequently, nitrogen is injected into the vacuum chamber 600 by nitrogen pump 680 through nitrogen emission step (S440), thereby discharging the transfer box from the vacuum chamber 600 after the pressure inside the chamber is the same as atmospheric pressure.

[0220] In the assembly step (S500), the inner and outer transfer boxes that have undergone the vacuum treatment step are transferred to the assembly unit 700 via the second transfer unit 500, where the inner and outer transfer boxes are assembled.

[0221] The storage step (S600) refers to the step of storing the transfer box assembled in the assembly step into the storage unit 900.

[0222] In this invention, the storage unit 900 can be disposed inside the transfer box cleaning device to store the transfer boxes when needed. The specific structure of the storage unit 900 can use a known structure.

[0223] In the removal step (S700), the transfer box stored in the storage step is transferred, or the transfer box assembled in the assembly step (S500) can be moved to the outside via the removal unit 1000. In the removal step (S700), the third transfer unit 800 operates to transfer the transfer box stored in the storage unit 900, or the transfer box assembled in the assembly unit 700 can be moved to the outside.

[0224] In summary, the embodiments of the present invention have been specifically described with reference to the accompanying drawings.

[0225] The above description is merely illustrative of the technical concept of the present invention. Those skilled in the art can make various modifications, alterations, and substitutions without departing from the essential characteristics of the present invention. Therefore, the embodiments and drawings disclosed in this invention are not intended to limit the technical concept of the invention but are for illustrative purposes, and the scope of the technical concept of the invention is not limited to these embodiments and drawings. The scope of protection of this invention should be interpreted by the claims, and should be interpreted as including all technical concepts within the equivalent scope in the claims.

Claims

1. A conveyor box cleaning chamber, characterized in that, include: The cleaning room has an entrance door and houses the transfer boxes for cleaning; A drying chamber having an exit door, and for drying the transfer box transferred from the cleaning chamber; A switch, configured between the cleaning chamber and the drying chamber, is used for lifting and lowering; and The chamber moving unit transfers the transfer box from the cleaning chamber to the drying chamber. The chamber moving part includes: A clamp for holding the transfer box; A moving unit, connected to the clamp, for moving the clamp. A region of the mobile unit is disposed outside the cleaning chamber and the drying chamber. The clamp includes: Placement clamps for supporting the transfer box; and A connecting fixture connects the placement fixture to the moving unit. The placement fixture includes: The straight section is perpendicularly connected to the connecting clamp. An inclined portion, extending obliquely from the end of the straight portion, has a quadrilateral cross-section larger than the outer edge shape of the transfer box, thereby placing the transfer box with both sides of the transfer box exposed; and A support pin is disposed at the lower part of the inclined portion to support the lower part of the transfer box, and is disposed at the side of the inclined portion to support the two side surfaces and the rear surface of the transfer box.

2. The conveyor box cleaning chamber according to claim 1, characterized in that, The clean room includes: Cleaning nozzles that spray steam and cleaning fluid into the conveyor box; and The first drying nozzle sprays drying gas for drying the transfer box.

3. The conveyor box cleaning chamber according to claim 2, characterized in that, The clean room also includes: The first air knife is configured adjacent to the switch.

4. The conveyor box cleaning chamber according to claim 1, characterized in that, The drying chamber includes: The second drying nozzle sprays drying gas for drying the transfer box.

5. The conveyor box cleaning chamber according to claim 1, characterized in that, The drying chamber includes infrared lamps.

6. The conveyor box cleaning chamber according to claim 1, characterized in that, The drying chamber also includes a second air knife.

7. The conveyor box cleaning chamber according to claim 1, characterized in that, The cleaning chamber is equipped with a first exhaust port, and the drying chamber is equipped with a second exhaust port. The conveyor box cleaning chamber includes a control unit that controls the opening and closing of the first exhaust port and the second exhaust port.

8. The conveyor box cleaning chamber according to claim 7, characterized in that, When the transfer box is first dried in the cleaning chamber or transferred to the drying chamber, the control unit opens the first exhaust port to exhaust the air inside the cleaning chamber to the outside.

9. The conveyor box cleaning chamber according to claim 7, characterized in that, When drying is being carried out in the drying chamber, or when the outlet door is opened to move the transfer box from the drying chamber to the outside, the control unit opens the second exhaust port to exhaust the air inside the drying chamber to the outside.

10. The conveyor box cleaning chamber according to claim 1, characterized in that, The chamber moving part moves in the front-to-back direction inside the cleaning chamber and the drying chamber.

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